[go: up one dir, main page]

CN201397821Y - Graphite carrier - Google Patents

Graphite carrier Download PDF

Info

Publication number
CN201397821Y
CN201397821Y CN2009200136082U CN200920013608U CN201397821Y CN 201397821 Y CN201397821 Y CN 201397821Y CN 2009200136082 U CN2009200136082 U CN 2009200136082U CN 200920013608 U CN200920013608 U CN 200920013608U CN 201397821 Y CN201397821 Y CN 201397821Y
Authority
CN
China
Prior art keywords
graphite
hook
metal
solar cell
silicon chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009200136082U
Other languages
Chinese (zh)
Inventor
夏铁
孙小刚
李雪亮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JINZHOU HUACHANG PHOTOVOLTANIC TECHNOLOGY Co Ltd
Original Assignee
JINZHOU HUACHANG PHOTOVOLTANIC TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JINZHOU HUACHANG PHOTOVOLTANIC TECHNOLOGY Co Ltd filed Critical JINZHOU HUACHANG PHOTOVOLTANIC TECHNOLOGY Co Ltd
Priority to CN2009200136082U priority Critical patent/CN201397821Y/en
Application granted granted Critical
Publication of CN201397821Y publication Critical patent/CN201397821Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)

Abstract

本实用新型公开了一种在太阳能电池生产过程的镀膜工序中使用的石墨载板,它包括石墨承载板,在石墨承载板上均布有多个硅片承载方孔,在硅片承载方孔内的二个平行的相对面上对称设有金属挂钩,在硅片承载方孔内另二个平行的相对面上对称设有定位钩,在石墨承载板底面两侧设有石墨滑道条,所述的石墨承载板下表面高于金属挂钩的挂钩顶端0.5-1.5mm,金属挂钩的厚度为0.4-0.5mm。该石墨载板能够明显提升太阳电池的电参数和转化效率,减小工艺点面积,改善太阳电池外观,提高产品质量。

Figure 200920013608

The utility model discloses a graphite carrier plate used in the coating process of the solar cell production process. Metal hooks are arranged symmetrically on the two parallel opposite surfaces inside, positioning hooks are arranged symmetrically on the other two parallel opposite surfaces in the silicon chip carrying square hole, graphite slide rails are arranged on both sides of the bottom surface of the graphite carrying plate, The lower surface of the graphite bearing plate is 0.5-1.5 mm higher than the hook top of the metal hook, and the thickness of the metal hook is 0.4-0.5 mm. The graphite support plate can significantly improve the electrical parameters and conversion efficiency of the solar cell, reduce the area of the process point, improve the appearance of the solar cell, and improve product quality.

Figure 200920013608

Description

石墨载板 Graphite carrier

技术领域 technical field

本实用新型涉及在太阳电池生产过程中使用的一种辅助工具,特别涉及一种石墨载板。The utility model relates to an auxiliary tool used in the production process of solar cells, in particular to a graphite carrier plate.

背景技术 Background technique

太阳能电池生产工艺一般包括清洗制绒、扩散、刻蚀、去磷硅玻璃、镀膜、印刷电极、烧结和测试分选工序,其中在镀膜工序中硅片是装在石墨载板上、再放在镀膜设备上进行镀膜加工。硅片在加工前平放在石墨载板中,石墨载板通过四个金属挂钩承载硅片两侧边缘位置,另外两侧用金属直钩对硅片定位。现有的石墨载板下表面高于金属挂钩顶端5mm,金属挂钩厚度为1mm,因此硅片上表面到载板下表面有一定距离,导致在工艺腔等离子体成膜的过程中会在硅片背面边缘形成一层很薄的膜,严重影响后面太阳能电池的电参数;而且在硅片背面镀膜后在四个金属挂钩处会出现四个工艺点(没有成膜)的固有缺陷。The solar cell production process generally includes cleaning and texturing, diffusion, etching, dephosphorous silicon glass, coating, printing electrodes, sintering and testing and sorting processes. Coating processing is carried out on the coating equipment. The silicon wafer is placed flat on the graphite carrier plate before processing, and the graphite carrier plate carries the edges of both sides of the silicon wafer through four metal hooks, and the other two sides use metal straight hooks to position the silicon wafer. The lower surface of the existing graphite carrier is 5mm higher than the top of the metal hook, and the thickness of the metal hook is 1mm. Therefore, there is a certain distance between the upper surface of the silicon wafer and the lower surface of the carrier, which will cause a certain distance between the upper surface of the silicon wafer and the lower surface of the carrier. A very thin film is formed on the edge of the back, which seriously affects the electrical parameters of the solar cell behind; and after the back of the silicon wafer is coated, there will be inherent defects of four process points (no film formation) at the four metal hooks.

发明内容 Contents of the invention

本实用新型的目的是要提供一种能够明显提升太阳能电池电参数和转化效率,减小工艺点面积,改善太阳能电池外观,提高产品质量的石墨载板。The purpose of the utility model is to provide a graphite carrier plate that can significantly improve the electrical parameters and conversion efficiency of solar cells, reduce the area of process points, improve the appearance of solar cells, and improve product quality.

本实用新型是这样实现的:它有一块石墨承载板,在石墨承载板上均布有多个硅片承载方孔,在硅片承载方孔内的二个平行的相对面上对称设有金属挂钩,在硅片承载方孔内另二个平行的相对面上对称设有定位钩,在石墨承载板底面两侧设有石墨滑道条,其特殊之处是:所述的石墨承载板下表面高于金属挂钩的挂钩顶端0.5-1.5mm,金属挂钩的厚度为0.4-0.5mm。The utility model is realized in the following way: it has a graphite bearing plate, on which a plurality of silicon chip bearing square holes are evenly distributed, and two parallel opposite surfaces in the silicon chip bearing square holes are symmetrically provided with metal The hooks are symmetrically provided with positioning hooks on the other two parallel opposite surfaces in the silicon wafer carrying square hole, and graphite slide rails are provided on both sides of the bottom surface of the graphite carrying plate. The surface is 0.5-1.5mm higher than the hook top of the metal hook, and the thickness of the metal hook is 0.4-0.5mm.

上述的石墨载板,所述的石墨承载板下表面高于金属挂钩的挂钩顶端1mm。For the above-mentioned graphite carrier plate, the lower surface of the graphite carrier plate is 1mm higher than the hook top of the metal hook.

本实用新型的优点是:石墨承载板下表面高于金属挂钩的挂钩顶端0.5-1.5mm,降低了挂钩的高度,直接缩短了硅片上表面到石墨承载板下表面的距离,解决了硅片背面边缘成膜的问题,太阳电池的电参数和转化效率都有明显的提升;金属挂钩的厚度减薄为0.4-0.5mm,直接减小了工艺点的面积,太阳电池的外观得到改善,提高了产品质量。The utility model has the advantages that the lower surface of the graphite bearing plate is 0.5-1.5mm higher than the top of the metal hook, which reduces the height of the hook, directly shortens the distance from the upper surface of the silicon wafer to the lower surface of the graphite bearing plate, and solves the problem of silicon wafer The problem of film formation on the back edge, the electrical parameters and conversion efficiency of the solar cell have been significantly improved; the thickness of the metal hook is reduced to 0.4-0.5mm, which directly reduces the area of the process point, and the appearance of the solar cell is improved. product quality.

附图说明 Description of drawings

图1是本实用新型的结构示意图;Fig. 1 is the structural representation of the utility model;

图2是图1的仰视图;Fig. 2 is the bottom view of Fig. 1;

图3是图1的局部放大图;Fig. 3 is a partially enlarged view of Fig. 1;

图4是图3的A-A剖视图;Fig. 4 is A-A sectional view of Fig. 3;

图5是图3的B-B剖视图。Fig. 5 is a B-B sectional view of Fig. 3 .

图中:石墨承载板1,硅片承载方孔2,金属挂钩3,定位钩4,石墨滑道条5,垫块6。In the figure: graphite bearing plate 1, silicon chip bearing square hole 2, metal hook 3, positioning hook 4, graphite slide rail 5, spacer 6.

具体实施方式 Detailed ways

如图所示,本实用新型有一块采用石墨制成的矩形石墨承载板1,在石墨承载板1上均布加工有多个与硅片相配合的硅片承载方孔2,本实施例硅片承载方孔2共有六行六列共三十六个,其数量不受本实施例的限制。在每个硅片承载方孔2内的二个平行的相对面上对称固定有二对金属挂钩3,在硅片承载方孔2内与上述相对面相垂直的另一对平行的相对面上对称固定有二对金属定位钩4,所述的金属挂钩3和定位钩4分别有两种,即一种分别为单侧挂钩和单侧定位钩、另一种为两侧挂钩和两侧定位钩,单侧挂钩和单侧定位钩位于石墨承载板1四周的硅片承载方孔2的外侧。在石墨承载板1的上下表面对应金属挂钩3和定位钩4处分别设有垫块6,以便于固定金属挂钩3和定位钩4,在石墨承载板1下表面两侧设有石墨滑道条5。所述的石墨承载板1下表面高于金属挂钩3的挂钩顶端0.5-1.5mm,其优选值a为1mm,金属挂钩3的厚度b为0.4-0.5mm,本实施例中金属挂钩3的厚度b以0.5mm为例。在加工时,将硅片平放在硅片承载方孔2中,通过二对金属挂钩3承载硅片两侧边缘位置,另外两侧用定位钩4对硅片定位,再将该装满硅片的石墨载板放到镀膜设备上即可镀膜。As shown in the figure, the utility model has a rectangular graphite bearing plate 1 made of graphite, and a plurality of silicon wafer bearing square holes 2 matched with silicon wafers are uniformly processed on the graphite bearing plate 1. There are altogether thirty-six sheet-carrying square holes 2 in six rows and six columns, the number of which is not limited by this embodiment. Two pairs of metal hooks 3 are symmetrically fixed on two parallel opposite surfaces in each silicon chip carrying square hole 2, and are symmetrical on another pair of parallel opposite surfaces perpendicular to the above-mentioned opposite surfaces in the silicon chip carrying square hole 2. Two pairs of metal positioning hooks 4 are fixed, and the metal hooks 3 and the positioning hooks 4 are respectively divided into two types, that is, one is a single-side hook and a single-side positioning hook, and the other is a two-side hook and two-side positioning hooks. , the one-side hook and one-side positioning hook are located on the outside of the silicon wafer carrying square hole 2 around the graphite carrying plate 1 . The upper and lower surfaces of the graphite bearing plate 1 are respectively provided with pads 6 corresponding to the metal hook 3 and the positioning hook 4, so as to fix the metal hook 3 and the positioning hook 4, and graphite slide rails are arranged on both sides of the lower surface of the graphite bearing plate 1. 5. The lower surface of the graphite bearing plate 1 is higher than the hook top of the metal hook 3 by 0.5-1.5 mm, its preferred value a is 1 mm, the thickness b of the metal hook 3 is 0.4-0.5 mm, and the thickness of the metal hook 3 in this embodiment b Take 0.5mm as an example. During processing, place the silicon chip flat in the silicon chip carrying square hole 2, carry the edge positions on both sides of the silicon chip through two pairs of metal hooks 3, and position the silicon chip with positioning hooks 4 on the other two sides, and then fill the silicon chip. The graphite carrier plate of the sheet is placed on the coating equipment to be coated.

Claims (2)

1, a kind of graphite support plate, comprise the graphite loading plate, on the graphite loading plate, be evenly equipped with a plurality of silicon chip carrying square holes, be arranged with metal hanger on two parallel opposite faces in silicon chip carrying square hole, in silicon chip carrying square hole, be arranged with location hook on two parallel opposite faces in addition, be provided with graphite slideway bar in both sides, graphite loading plate bottom surface, it is characterized in that: described graphite loading plate lower surface is higher than the hook top 0.5-1.5mm of metal hanger, and the thickness of metal hanger is 0.4-0.5mm.
2, graphite support plate according to claim 1 is characterized in that: described graphite loading plate lower surface is higher than the hook top 1mm of metal hanger.
CN2009200136082U 2009-05-07 2009-05-07 Graphite carrier Expired - Fee Related CN201397821Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009200136082U CN201397821Y (en) 2009-05-07 2009-05-07 Graphite carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009200136082U CN201397821Y (en) 2009-05-07 2009-05-07 Graphite carrier

Publications (1)

Publication Number Publication Date
CN201397821Y true CN201397821Y (en) 2010-02-03

Family

ID=41620348

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009200136082U Expired - Fee Related CN201397821Y (en) 2009-05-07 2009-05-07 Graphite carrier

Country Status (1)

Country Link
CN (1) CN201397821Y (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101826483A (en) * 2010-03-29 2010-09-08 常州亿晶光电科技有限公司 Quickly-dismounted silicon wafer coating symmetrical hanging hook subassembly and mounting method thereof
CN101892465A (en) * 2010-03-29 2010-11-24 常州亿晶光电科技有限公司 Quickly-changed silicon chip film-coated single-faced hanging hook assembly and mounting method thereof
CN103177999A (en) * 2011-12-20 2013-06-26 浚鑫科技股份有限公司 Graphite frame for deposition antireflective film process
CN103805965A (en) * 2012-11-08 2014-05-21 上海神舟新能源发展有限公司 Hook assembly for film plating of plate type PECVD graphite block

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101826483A (en) * 2010-03-29 2010-09-08 常州亿晶光电科技有限公司 Quickly-dismounted silicon wafer coating symmetrical hanging hook subassembly and mounting method thereof
CN101892465A (en) * 2010-03-29 2010-11-24 常州亿晶光电科技有限公司 Quickly-changed silicon chip film-coated single-faced hanging hook assembly and mounting method thereof
CN103177999A (en) * 2011-12-20 2013-06-26 浚鑫科技股份有限公司 Graphite frame for deposition antireflective film process
CN103805965A (en) * 2012-11-08 2014-05-21 上海神舟新能源发展有限公司 Hook assembly for film plating of plate type PECVD graphite block

Similar Documents

Publication Publication Date Title
CN206505899U (en) A kind of tubular film plating Horizontal graphite boat
CN201397821Y (en) Graphite carrier
CN109161872B (en) Automatic change quick-witted mould is changed to graphite boat stuck point
CN203092546U (en) Arm of base plate carrying robot and base plate carrying robot
CN105375880A (en) Back contact solar cell sheet test platform
TW200607038A (en) Contacts to semiconductor fin device and method for manufacturing the same
CN206505900U (en) A kind of graphite boat of stuck point position optimization
CN107046080A (en) A kind of contactless inserted sheet graphite boat
CN202134568U (en) a metal carrier
JP2014072396A (en) Detector, abnormality detection method and manufacturing method of photovoltaic cell
CN103681416A (en) Method for monitoring thickness of polycrystalline silicon furnace tube wafers
RU157964U1 (en) SUPPORT HOLDER
CN206961858U (en) A kind of support plate for PVD deposition equipment
CN105785251B (en) A kind of minority carrier life time detection method of silico briquette
CN210837690U (en) A quartz boat suitable for carrying large-sized silicon wafers
CN202189824U (en) A glass fiber reinforced plastic carrier
CN206502864U (en) A kind of Novel film-coated graphite boat
CN202695401U (en) Quartz boat
CN207320078U (en) A kind of graphite boat for placing solar cell in the horizontal direction
CN205258601U (en) A silicon chip support plate for $descending coating film
CN204424296U (en) The upper plated film support plate of solar energy back of the body passivation cell
CN114520169A (en) Semiconductor packaging jig and application thereof
CN110491968A (en) Carrier Plates for Improved Panel Coating
CN106257625A (en) A kind of stack high-temperature annealing process
CN217158152U (en) Tray for solar cell film formation

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100203

Termination date: 20120507