CN201381279Y - Etching apparatus - Google Patents

Abstract

The utility model discloses etching equipment, which is mainly characterized in that a plurality of spray sources are averagely arranged above a soaking tank, and the spray sources receive the supply of a liquid medicine working tank; a material feeding floating wheel and a material discharging floating wheel are respectively arranged on two sides of the inner surface of the soaking groove, and the floating wheels are respectively overlapped on a platform; and an air knife is arranged at the outer side of the soaking tank corresponding to the floating wheel respectively. When the glass substrate passes through the feeding floating wheel, the air knife provides high-speed strong air to limit the liquid medicine in the soaking tank from overflowing, the glass substrate completely enters the soaking tank, the feeding guide wheel is controlled to drive the substrate to move in a reciprocating mode in a micro-amplitude mode to soak, and meanwhile the liquid medicine is sprayed to the substrate through the spraying source.

Description

Etching equipment

technical field

The utility model relates to an etching device, in particular to an improvement of an etching chamber of the etching device, so as to solve the situation that the etching uniformity is not good due to the different times of etching and rinsing at both ends of a glass substrate.

Background technique

With reference to Fig. 2, it is a kind of etching equipment in the prior art, and this etching equipment comprises a feeding area A, an etching chamber B, a preliminary cleaning chamber C, a main cleaning chamber D, a drying chamber E, an outlet A continuous feeding guide wheel G is arranged between the material area F and the working room, and the feeding guide wheel G is controlled by an external electric control room (not shown). Wherein the etching chamber includes a soaking tank B1, and the soaking tank B1 is also externally connected to a liquid medicine working tank H, which basically includes a soaking pump H1 as a power source to supply the medicine liquid to the soaking tank B1, and a resistor Detector H3, pH detector H2, temperature detector H4, heater H5, cooling coil H6 and other components for controlling liquid medicine. The glass substrate I is transported from the feeding area A to the soaking tank B1 of the etching chamber B by means of the conveying guide wheel G, the rollers stop running, and the soaking pump H1 injects the liquid medicine into the soaking tank B1, so that the liquid medicine in the soaking tank B1 covers the glass substrate I. After the glass substrate I soaks for a period of time, the feeding guide wheel G is started, and the glass substrate I is transported to the preliminary cleaning chamber C. One end of the glass substrate I (hereinafter referred to as the first end) first enters the preliminary cleaning chamber C for cleaning, and then the other end (hereinafter referred to as the end) is driven by the feeding guide wheel G and enters the preliminary cleaning chamber C for cleaning, and the drug remaining on the substrate is cleaned. Fluid and by-products are initially washed away.

Since the etching process in the prior art is to wait for the substrate to completely enter the soaking tank and rest on the feeding guide wheel, the liquid medicine is supplied to the soaking tank, which prolongs the time of the substrate in the etching stage; on the other hand, the etching process, The substrate is fully and synchronously soaked in the chemical solution of the soaking tank. After soaking, the first end of the substrate leaves the soaking tank first, and the end is still immersed in the tank. This kind of transmission operation will cause different contact times between the first and last ends of the glass substrate. , resulting in different etching degrees, resulting in uneven etching results. Also, in the soaking process, the medicinal liquid must be constantly updated to maintain the concentration of the medicinal liquid.

Utility model content

In the etching process of the prior art, the etching operation needs to be started after the glass substrate is completely placed in the soaking tank, which will cause the problem of too long working hours in the etching stage. Therefore, the main purpose of the utility model is to provide a method that can save etching Etching equipment of the time.

During the etching process of the glass substrate, the contact time between the head and the end of the substrate is different, which will lead to uneven etching. Therefore, another object of the present invention is to provide an etching device that can uniformly etch the substrate.

In the process of soaking the glass substrate in the liquid medicine, the liquid medicine is not replaced at all, the substances produced by etching may affect the concentration of the liquid medicine, and the temperature of the liquid medicine will also be affected as the etching time increases. Therefore, another purpose of the utility model is to All parts of the surface of the plate can be in contact with the new liquid medicine simultaneously and evenly.

In order to achieve the above object, the utility model provides a kind of etching equipment, and this equipment comprises:

A soaking tank, the two sides of the inner surface are respectively provided with a feeding floating wheel and a discharging floating wheel;

a feeding guide wheel, used to carry a substrate, so that the substrate can pass through the feeding floating wheel and enter the soaking tank;

A spraying system, which is an external system of the soaking tank, includes a liquid medicine working tank and a plurality of spray sources that accept the supply of liquid medicine from the liquid medicine working tank. The spray sources are evenly arranged and correspond to the top of the soaking tank. The liquid working tank and the soaking tank are connected by pipelines to supply or recover the liquid medicine;

The spraying system and the feeding guide wheel are controlled by an electric control unit in the etching equipment.

Two air outlet devices respectively corresponding to the feeding floating wheel and the discharging floating wheel are arranged on the outside of the soaking tank.

The air outlet device is an air knife with narrow and long slits that can release compressed air.

The feeding floating wheel and the discharging floating wheel are overlapped on a platform and can move a small distance longitudinally relative to the platform.

The etching procedure of the utility model is to make the substrate contact the liquid medicine while entering the soaking tank, so the etching time can be saved. In addition, in conjunction with the operation of the feeding guide wheel, the first end of the substrate enters the soaking tank first to contact the liquid medicine. When the etching is completed, the first end of the substrate also leaves the soaking tank first, so that the first and last ends of the substrate can be in contact with each other. The time of the chemical solution is the same, and a uniform etching degree can be obtained. Furthermore, during the etching process of the immersion tank, the feeding guide wheel drives the motor plate to move forward and backward, coordinating with the spray source to continuously spray out new liquid medicine, so that all places on the surface of the substrate can contact the new liquid medicine at the same time and the substrate can be kept clean. The optical film on the surface is uniformly etched.

Description of drawings

FIG. 1 is a schematic diagram of an etching device in an embodiment of the present invention.

Fig. 2 is an etching device in the prior art.

Detailed ways

The implementation of the present utility model will be described in more detail below in conjunction with the drawings, so that those skilled in the art can implement it after studying this specification.

Referring to FIG. 1 , it is a schematic diagram of a preferred embodiment of the etching equipment of the present invention. The etching chamber 10 is connected with an exhaust device 1 leading to the inside. The inside of the etching chamber 10 is provided with a soaking tank 2, and the two sides of the soaking tank 2 are respectively provided with a feeding floating wheel 31 and a discharging floating wheel 32. 3 Longitudinally move a small distance, and an air outlet device 4 corresponding to the feeding floating wheel 31 and the discharging floating wheel 32 is arranged on the outside of the two sides of the soaking tank 2 respectively. Knife, air outlet device 4 is to link with a compressed air source (not shown). One section of the continuous feeding guide wheel 5 passes through the bottom of the soaking tank 2 . The soaking tank 2 is externally connected with a spraying system 6, which includes a row of spray sources 61 connected with pipelines and a liquid medicine working tank 62. The spray sources 61 refer to nozzles, which are evenly arranged on the top of the soaking tank 2, and respectively Corresponding to immersion tank 2 everywhere. The liquid medicine working tank 62 is connected to the outside of the etching chamber 10, and is connected with the soaking tank 2 by a pipeline to recover or supply the liquid medicine. Liquid volume, and a spraying pump 627, supply liquid medicine to each spray source 61 as power source; Liquid medicine working tank 62 still comprises a resistance detector 623, a pH detector 622, a temperature detector 624, A heater 625, a cooling coil 626, .. and other components for controlling the temperature or concentration of the liquid medicine.

The operation of the etching equipment is that the immersion pump 621 first supplies the liquid medicine to the etching tank 2, and an electric control room (not shown) controls and drives the feeding guide wheel 5 so that the glass substrate 7 enters the etching chamber 10 along with the feeding guide wheel 5, and the glass substrate 7 enters the etching chamber 10. The substrate 7 pushes the feeding floating wheel 31 upwards through the soaking tank 2, and at the same time, the adjacent air outlet device 4 ejects gas powerfully to limit the liquid medicine in the soaking tank 2 from overflowing the soaking tank 2 due to the rising of the feeding floating wheel 31 , the first and last ends of the glass substrate 7 successively enter the soaking tank 2 and contact the liquid medicine. When the glass substrate 7 completely enters the soaking tank 2, the feeding floating wheel 31 will drop to the position of the contact platform 3, forming a similar barrier wall to prevent soaking The liquid medicine in the tank 2 flows out, and while the glass substrate 7 is soaked in the liquid medicine, the spray pump 627 is turned on to control the spray source 61 to spray the liquid medicine, and the control room controls the feeding guide wheel 5 to move forward and backward repeatedly, and the feeding guide wheel 5 The glass substrate 7 must be reciprocated forward and backward with the feeding guide wheel 5, so that the glass substrate 7 is not only soaked in the tank, but also receives the spray source 61 to spray the liquid medicine, so that the surface of the substrate can be fully and evenly contacted. The chemical solution maintains the concentration of the chemical solution on the surface of the glass substrate 7, so that the optical film on the surface of the glass substrate 7 can be etched uniformly; the air extraction device 1 will maintain a negative pressure in the etching chamber 10, and the chemical gas will not leak To the outside of soaking tank 2. After etching for a predetermined time, the electric control room controls the feeding guide wheel 5 to run in the direction of the discharge floating wheel 32, the glass substrate 7 passes through the discharge floating wheel 32, and the other gas outlet device 4 corresponds to the discharge floating wheel 32 to eject gas. On the one hand, the liquid medicine in the soaking tank 2 is restricted from overflowing the soaking tank 2 due to the rising of the floating wheel; on the other hand, the residual liquid medicine on the substrate can be blown off; Descending to the contact platform 3 forms a barrier wall to prevent the liquid medicine in the soaking tank 2 from flowing out, and the glass substrate 7 enters the preliminary washing process of the etching equipment. After the substrate leaves the soaking tank 2 , the liquid medicine in the soaking tank 2 flows back to the liquid medicine working tank 62 after being filtered.

The design of the etching equipment of the utility model is that the first end of the glass substrate enters the soaking tank to contact the liquid medicine, and the first end leaves the soaking tank first, so that the total time for the first and last two ends (full surface) of the glass substrate to contact the liquid medicine is the same , can produce a uniform etch degree. Moreover, the substrate is contacted with the chemical solution when it enters the soaking tank, which can save time in the etching stage. In addition, during the etching process of the soaking tank, the feeding guide wheel drives the motor plate to move forward and backward, and cooperates with the spray source to continuously spray out new liquid medicine, so that all places on the surface of the substrate can be in contact with the new liquid medicine evenly at the same time, keeping the surface of the substrate clean. concentration of the drug solution.

The above descriptions are only preferred embodiments for explaining the utility model, and are not intended to limit the utility model in any form. Therefore, any modifications made under the spirit of the same utility model Or changes, all should still be included in the category that the utility model intends to protect.

Claims (4)

1. an etching machines is characterized in that, this equipment comprises:

One soaking compartment, its inner face both sides are respectively equipped with a pan feeding floating roller and a discharging floating roller;

One feeding guide wheel in order to carry a substrate, makes this substrate enter this soaking compartment by this pan feeding floating roller;

One sprays system, it is the outer welding system of this soaking compartment, the a plurality of sprays source that includes a soup work nest and accept this soup work nest supply soup, spray source are average are provided with and corresponding to this soaking compartment top, link to each other with supply or released liquor with pipeline between this soup work nest and this soaking compartment;

This sprinkling system is controlled by the electric control part in the etching machines with this feeding guide wheel.

2. etching machines as claimed in claim 1 is characterized in that, two of the arranged outside of described soaking compartment are respectively corresponding to the air-out apparatus of described pan feeding floating roller and this discharging floating roller.

3. etching machines as claimed in claim 2 is characterized in that, this air-out apparatus can discharge compressed-air actuated air knife for having long and narrow slit.

4. etching machines as claimed in claim 1 or 2 is characterized in that, described pan feeding floating roller and described discharging floating roller are to be overlapped on the platform, and can vertically move slight distance with respect to this platform.

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