CN201309962Y - Protectively treated magnetron sputtering column target - Google Patents
Protectively treated magnetron sputtering column target Download PDFInfo
- Publication number
- CN201309962Y CN201309962Y CNU2008201237029U CN200820123702U CN201309962Y CN 201309962 Y CN201309962 Y CN 201309962Y CN U2008201237029 U CNU2008201237029 U CN U2008201237029U CN 200820123702 U CN200820123702 U CN 200820123702U CN 201309962 Y CN201309962 Y CN 201309962Y
- Authority
- CN
- China
- Prior art keywords
- target
- magnet
- target core
- core yoke
- magnetron sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 12
- 239000003973 paint Substances 0.000 claims abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000000741 silica gel Substances 0.000 claims description 9
- 229910002027 silica gel Inorganic materials 0.000 claims description 9
- 230000001681 protective effect Effects 0.000 claims description 8
- 230000002401 inhibitory effect Effects 0.000 claims description 6
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 229910000831 Steel Inorganic materials 0.000 abstract 4
- 239000010959 steel Substances 0.000 abstract 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
- 239000002390 adhesive tape Substances 0.000 abstract 1
- 239000000498 cooling water Substances 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 3
- 239000002826 coolant Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 230000003245 working effect Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a protectively treated magnetron sputtering column target which comprises a thermal shrunk pipe, target core yoke steel and a magnet arranged on the target core yoke steel, wherein anticorrosion paint is coated on the surface of the assembled magnet and the surface of the target core yoke steel, the thermal shrunk pipe is hooped outside a target core after being baked by a hot air gun, silicon gel is coated between two end ports of the thermal shrunk pipe and the target core yoke steel, and the outermost layers of the two end ports of the thermal shrunk pipe are provided with waterproof adhesive tapes; and the silicon gel is 704 silicon gel. The magnetron sputtering column target separates water from the magnet, prevents water from corroding the magnet, leads the magnetic density of a whole target to be kept uniformly for a long time and ensures that the target can stably sputter for a long time, thereby greatly prolonging the service life of the target, reducing the frequency for the process operating personnel to fine adjust the process, lowering the labor intensity and improving the production efficiency.
Description
Technical field
The utility model relates to a kind of magnetron sputtering cylindrical target, particularly a kind of magnetron sputtering cylindrical target by protective treatment.
Background technology
The structure of magnetron sputtering cylindrical target is that magnet cartridge fits on the target core yoke, then is placed in the target pipe, and two ends are blocked up with target head and target respectively and sealed.Target is in the process of work, need be at target Guan Zhongtong water coolant, target is cooled off, thereby make magnet inevitably be immersed in the water, because water coolant is mostly taken from tap water, because the problem of water quality, impel the magnet that is immersed in the water to be corroded very soon,, make each magnet be subjected in various degree erosion simultaneously again because the difference of magnet individuality, cause whole target magneticstrength inhomogeneous, thereby cause the sputter inequality of whole target, have a strong impact on the quality of valve tube, when seriously corroding, whole target can't works better, scraps too early; The magnet cost is higher, frequently changes magnet, has not only increased manufacturing cost, has also improved working strength of workers, has reduced production efficiency.
Summary of the invention
The utility model is in order to solve the deficiencies in the prior art, provide a kind of by after the protective treatment, can prevent the corrosion of sealing, make the magneticstrength of whole target can keep evenly the magnetron sputtering cylindrical target that has prolonged the work-ing life of target widely for a long time magnet.
The technical scheme that its technical problem that solves the utility model adopts is: a kind of magnetron sputtering cylindrical target by protective treatment, comprise heat-shrink tube, target core yoke and be installed in magnet on the target core yoke, scribble rust-inhibiting paint at magnet surface that assembles and target core yoke surface, described heat-shrink tube passes through the baking hoop of heat gun in target core outside, be provided with silica gel between two ports of described heat-shrink tube and the target core yoke, two port outermost layers of described heat-shrink tube are provided with adhesive waterproof tape.
Described silica gel is 704 silica gel.
Compared with prior art, adopt structure of the present utility model that water and magnet are isolated, prevented the corrosion of water, make the magneticstrength of whole target can keep even for a long time magnet, and then guaranteed that target can sputter steady in a long-term, prolonged the work-ing life of target widely; Simultaneously also reduce the frequency that the technological operation personnel finely tune technology, reduced labour intensity, improved production efficiency.
Description of drawings
Fig. 1 is a cross-sectional view of the present utility model.
Among the figure: 1 heat-shrink tube, 2 target core yokes, 3 magnet, 4 rust-inhibiting paints, 5 silica gel, 6 cooling water inlet pipes, 7 cooling water inlet pipes, 8 target pipes.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing, but not as to qualification of the present utility model.
Referring to Fig. 1, a kind of magnetron sputtering cylindrical target by protective treatment, comprise heat-shrink tube 1, target core yoke 2 and the magnet 3 that is installed on the target core yoke, scribble one deck rust-inhibiting paint 4 on magnet 3 surfaces and target core yoke 2 surfaces that assemble, the baking hoop of heat-shrink tube 1 by heat gun is in magnet 3 that assembles and target core yoke 2 outsides, magnet 3 and target core yoke 2 are formed the target core, be provided with silica gel 5 between two ports of heat-shrink tube 1 and the target core yoke 2, two port outermost layers of heat-shrink tube 1 are provided with adhesive waterproof tape, in the middle of the target core yoke 2 is cooling water inlet pipe 6, is cooling water inlet pipe 7 between target pipe 8 and the target core yoke 2.
Protective treatment step of the present utility model:
The first step: the corrosion on target core yoke surface is cleaned out, make the surface cleaning of target core yoke not have foreign material;
Second step: magnet cartridge is fitted on the target core yoke, and measures the Surface field intensity of each piece magnet, in time underproof magnet is removed, guarantee the homogeneity of whole target core magneticstrength;
The 3rd step: be coated with one deck rust-inhibiting paint uniformly at magnet surface that assembles and target core yoke surface, and leave standstill curing;
The 4th step: after treating the rust-inhibiting paint completely solidified, whole target core is assembled in the heat-shrink tube, and heat-shrink tube toasted, it is bound round tightly in entire target core outside with the heat-sealing rifle, can reduce the obstruction of heat-shrink tube like this, guarantee that target has good cooling performance cooling-water flowing;
The 5th step: at two ports of heat-shrink tube, between target core yoke and heat-shrink tube, fill with 704 silica gel, then tighten with adhesive waterproof tape, anti-sealing enters into heat-shrink tube, makes the generation corrosion of magnet.
Above-described embodiment, the utility model embodiment a kind of more preferably just, the common variation that those skilled in the art carries out in the technical solutions of the utility model scope and replacing all should be included in the protection domain of the present utility model.
Claims (2)
1, a kind of magnetron sputtering cylindrical target by protective treatment, comprise heat-shrink tube, target core yoke and be installed in magnet on the target core yoke, it is characterized in that, scribble rust-inhibiting paint at magnet surface that assembles and target core yoke surface, described heat-shrink tube passes through the baking hoop of heat gun in target core outside, be provided with silica gel between two ports of described heat-shrink tube and target core yoke, two port outermost layers of described heat-shrink tube are provided with adhesive waterproof tape.
2, the magnetron sputtering cylindrical target by protective treatment according to claim 1 is characterized in that, described silica gel is 704 silica gel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201237029U CN201309962Y (en) | 2008-11-10 | 2008-11-10 | Protectively treated magnetron sputtering column target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201237029U CN201309962Y (en) | 2008-11-10 | 2008-11-10 | Protectively treated magnetron sputtering column target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201309962Y true CN201309962Y (en) | 2009-09-16 |
Family
ID=41107214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201237029U Expired - Fee Related CN201309962Y (en) | 2008-11-10 | 2008-11-10 | Protectively treated magnetron sputtering column target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201309962Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105452522B (en) * | 2013-08-14 | 2018-07-24 | 应用材料公司 | The magnetron of encapsulation |
-
2008
- 2008-11-10 CN CNU2008201237029U patent/CN201309962Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105452522B (en) * | 2013-08-14 | 2018-07-24 | 应用材料公司 | The magnetron of encapsulation |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: HIMIN SOLAR ENERGY CO., LTD. Free format text: FORMER NAME: HIMIN SOLAR ENERGY GROUP CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 253000 Shandong Province, Dezhou City Economic Development Zone, Sun Valley Road - Huang Tan building on the first floor of the East tomorrow North Song Patentee after: Himin Solar Co., Ltd. Address before: 253000 Shandong Province, Dezhou City Economic Development Zone, Sun Valley Road - Huang Tan building on the first floor of the East tomorrow North Song Patentee before: Himin Solar Energy Group Co., Ltd. |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090916 Termination date: 20121110 |