CN201281587Y - Photoelectric on-line detecting system for wall thickness of quartz tube - Google Patents
Photoelectric on-line detecting system for wall thickness of quartz tube Download PDFInfo
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- CN201281587Y CN201281587Y CNU2008200726831U CN200820072683U CN201281587Y CN 201281587 Y CN201281587 Y CN 201281587Y CN U2008200726831 U CNU2008200726831 U CN U2008200726831U CN 200820072683 U CN200820072683 U CN 200820072683U CN 201281587 Y CN201281587 Y CN 201281587Y
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- quartz ampoule
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- wall thickness
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- 239000010453 quartz Substances 0.000 title claims abstract description 73
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 73
- 238000012545 processing Methods 0.000 claims abstract description 6
- 238000004364 calculation method Methods 0.000 claims abstract description 4
- 239000003708 ampul Substances 0.000 claims description 56
- 230000003287 optical effect Effects 0.000 claims description 22
- 238000007493 shaping process Methods 0.000 claims description 10
- 230000005622 photoelectricity Effects 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000003321 amplification Effects 0.000 claims 1
- 238000003199 nucleic acid amplification method Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
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Abstract
The utility model discloses an opto-electrical on-line detecting system for the wall thickness of a quartz tube, comprising a laser transmitting system used for generating linear light beam, a CCD measuring system used for receiving and detecting the light beam reflected by the tube wall of the quartz tube to be detected, and a calculation processing system used for calculating for the light beam detected by CCD measuring system and obtaining the tube-wall thickness of the quartz tube. In the opto-electrical on-line detecting system, by adopting the combination of the laser scanning technology and the CCD detecting technology, the wall thickness of the quartz tube can be measured in real time at a high speed and in a non-contacting way, and the requirements for measuring the wall thickness can be met in the production process of the quartz tube.
Description
Technical field
The utility model relates to a kind of photodetector system, especially a kind of photoelectricity on-line detecting system that wall thickness of quartz tube is detected
Background technology
Quartz ampoule is mainly used in the outer leather hose of optical fiber, and the wall thickness dimension of quartz ampoule directly influences the life-span and the characteristic of optical fiber.So in the quartz ampoule production run, the wall thickness of quartz ampoule is an important parameter, must monitors this parameter in real time and make it to be controlled in the margin tolerance.The characteristics that have high temperature, red heat in the quartz ampoule production, fragility are big and difficult employing contact method is measured.Therefore, need a kind of noncontact, high-speed, high-precision on-line monitoring system, to adapt to the needs that quartz ampoule is produced.
The utility model content
The purpose of this utility model provides a kind of wall thickness of quartz tube photoelectricity on-line detecting system, to realize noncontact, high-speed, the high-precision on-line monitoring of wall thickness of quartz tube.
For achieving the above object, the utility model provides a kind of wall thickness of quartz tube photoelectricity on-line detecting system, comprising: be used to produce the laser transmitting system of linear beam, the computing system that is used to receive and detect the CCD measuring system of the tube wall beam reflected of passing through quartz ampoule to be measured and is used for the detected light beam of CCD is calculated and draws the pipe thickness of quartz ampoule;
Described laser transmitting system comprises laser instrument and collimation, expansion bundle and shaping optical system;
Described CCD measuring system comprises line array CCD and beam expander optical system;
Described laser instrument, described collimation, expand bundle and shaping optical system, described line array CCD and described beam expander optical system are arranged on the homonymy of quartz ampoule to be measured, described laser instrument produces behind the laser through collimation, expand bundle and shaping optical system and form long and narrow linear beam, described linear beam α at a certain angle incides on the outer wall of quartz ampoule, this linear light beam forms first folded light beam and deflecting light beams, described deflecting light beams is through the internal reflection of described quartz ampoule and pass described quartz ampoule outer wall and form second folded light beam, and described first folded light beam and second folded light beam are parallel to each other;
Described first folded light beam and second folded light beam incide described line array CCD after expanding the bundle processing through described beam expander optical system;
Described computing system is connected with described line array CCD, be used for light intensity signal according to line array CCD output, calculate described described first folded light beam on the described line array CCD and the distance of second folded light beam of inciding, and according to the pipe thickness of the described quartz ampoule of this distance calculation.
As shown from the above technical solution, the utility model has been realized the high speed to wall thickness of quartz tube, non-contacting real-time measurement by the combination of laser scanner technique and CCD detection technique, has satisfied in the quartz ampoule production run requirement to wall thickness measuring.
Below by drawings and Examples, the technical solution of the utility model is described in further detail.
Description of drawings
Fig. 1 is the structural representation of the embodiment one of wall thickness of quartz tube photoelectricity on-line detecting system of the present utility model;
Fig. 2 is the synoptic diagram of measuring principle of the present utility model.
Embodiment
The utility model is according to the analysis of measuring principle, the design experiences of combining laser scanning detection technique and thickness of glass dip stick, utility model based on the detection design scheme of CCD.Wall thickness of quartz tube photoelectricity on-line detecting system of the present utility model is a kind of high speed, high precision, non-contacting measuring system.
Embodiment one
As shown in Figure 1, it is the structural representation of the embodiment one of wall thickness of quartz tube photoelectricity on-line detecting system of the present utility model, and this system comprises: be used to produce the laser transmitting system 1 of linear beam, the computing system 3 that is used to receive and detect the CCD measuring system 2 of the tube wall beam reflected of passing through quartz ampoule 4 to be measured and is used for the detected light beam of CCD is calculated and draws the pipe thickness of quartz ampoule;
Described laser transmitting system 1 comprises laser instrument 11 (being preferably semiconductor laser) and collimation, expands bundle and shaping optical system 12;
Laser instrument 11 can adopt the 650nm semiconductor laser in the present embodiment, and its Gaussian beam of sending can form the collimation linear beam after the processing of collimation, expansion bundle and shaping optical system 12.
Described CCD measuring system 2 comprises line array CCD 21 and beam expander optical system 22;
Described laser instrument, described collimation, expand bundle and shaping optical system, described line array CCD 21 and described beam expander optical system 22 are arranged on the homonymy of quartz ampoule to be measured, described laser instrument produces behind the laser through collimation, expand bundle and shaping optical system and form long and narrow linear beam, described linear beam α at a certain angle incides on the outer wall of quartz ampoule, this linear light beam forms first folded light beam and deflecting light beams, described deflecting light beams is through the internal reflection of described quartz ampoule and pass described quartz ampoule outer wall and form second folded light beam, and described first folded light beam and second folded light beam are parallel to each other; Wherein, 0 °＜α＜90 °.Comparatively preferred value is about 49 °.
Described first folded light beam and second folded light beam incide described line array CCD after expanding the bundle processing through described beam expander optical system;
Described computing system 3 is connected with described line array CCD, be used for light intensity signal according to line array CCD output, calculate described described first folded light beam on the described line array CCD and the distance of second folded light beam of inciding, and according to the pipe thickness of the described quartz ampoule of this distance calculation.
The measuring principle to wall thickness of the utility model embodiment is as follows: when a certain light beam incides on the quartz ampoule side with certain angle, this bundle light is divided into two parts: a part is reflected by the quartz ampoule outside surface; Another part incides on the inside surface after the outside surface refraction, is incided outside surface once more by the inside surface reflection, and the refraction back forms a refracted ray that is parallel to the outside surface reflection ray.The locus of this two parallel ray beam is relevant with the wall thickness of quartz ampoule.Just can obtain the wall thickness of quartz ampoule by the space length of measuring this two parallel ray beam.
Below in conjunction with Fig. 2 measuring principle of the present utility model is further specified, as shown in Figure 2:
When semiconductor laser beam when α (air is to quartz ampoule) incides on the quartz ampoule 4 to be measured at a certain angle, form light path as shown in Figure 2.By reflection law as can be known, the reflection of the outer wall of the described quartz ampoule to be measured of process will form a branch of and the reflection ray OC incident ray symmetry, and some light reflects in tube wall simultaneously, and the refraction angle is θ, then has according to refraction law
Relation is set up (n is the quartz ampoule refractive index).When the light in quartzy tube wall incides the inside surface A place, follow reflection and refraction law equally, the internal reflection light of formation can incide outside surface once more, forms the light parallel with OC according to refraction law and penetrates.If the wall thickness of quartz ampoule is L, by Δ OAB and Δ OBC, can obtain the BC value according to geometric relationship.
BC＝2K
αL
In the formula,
By above-mentioned two formulas, can draw wall thickness L and be:
Light incides on the photosurface of line array CCD 21 behind beam expander optical system 22, and the spacing of light beam has been exaggerated, and BC multiply by the magnificationfactor of beam-expanding system, just obtains the actual beam separation on the line array CCD that is radiated at.
Be that final formula is as follows:
This carries the light intensity pulse signal of tested wall thickness information two of line array CCD outputs, after disposal system 3 data processing, just can obtain the wall thickness value of described quartz ampoule by above-mentioned formula as calculated.
Embodiment two
Present embodiment has increased servo-control system on the basis of embodiment one, in order to give full play to CCD measuring system high speed, non-contacting characteristics, gyration and straight-line servo-control system and corresponding topworks have been increased in the present embodiment, tested quartz ampoule is rotated around axis, make CCD measuring system 2 to detect to the different parts of quartz ampoule circumferencial direction, CCD measuring system 2 and laser transmitting system 1 are moved vertically, the wall thickness of quartz ampoule axis direction different cross section is detected.
Servo-control system can comprise AC servo motor, stepper motor and motion-control module.Specifically, can adopt AC servo machinery driving CCD measuring system axle 2 and laser transmitting system 1 to move vertically, adopt the tested quartz ampoule of step motor drive to carry out gyration, and gyration and rectilinear motion are carried out the control of speed, direction and displacement by motion-control module (specifically can adopt PC).
Present embodiment is by increasing servo-control system, give full play to CCD measuring system high speed, non-contacting characteristics, measurement data to wall thickness of quartz tube is more comprehensive and accurate, and can be according to concrete needs, can measure the wall thickness value of any position on the quartz ampoule easily, and can measure the wall thickness of a certain section by average weighted mode, also can measure the average wall thickness of whole quartz ampoule.
For example, can make quartz ampoule only do gyration, and CCD measuring system 2 and laser transmitting system 1 position are motionless, a plurality of wall thickness value at a certain interface that can survey are weighted average treatment then, can obtain the average wall thickness in this cross section.And then move CCD measuring system 2 and laser transmitting system 1 along axis direction, and carry out the wall thickness measuring of another sectional position, behind the wall thickness of a plurality of sectional positions of surveying, average the wall thickness value that both can obtain whole quartz ampoule.
It incides on the quartz ampoule side with certain angle, and this bundle light is divided into two parts: a part is reflected by the quartz ampoule outside surface.Another part incides on the inside surface after the outside surface refraction, is incided outside surface once more by the inside surface reflection, and the refraction back forms a refracted ray that is parallel to the outside surface reflection ray.The locus of this two parallel ray beam is relevant with the wall thickness of quartz ampoule.The thickness measure principle as shown in Figure 2.
It should be noted that at last: above embodiment is only in order to explanation the technical solution of the utility model but not limit it, although the utility model is had been described in detail with reference to preferred embodiment, those of ordinary skill in the art is to be understood that: it still can make amendment or be equal to replacement the technical solution of the utility model, and these modifications or be equal to replacement and also can not make amended technical scheme break away from the spirit and scope of technical solutions of the utility model.
Claims (4)
1, a kind of wall thickness of quartz tube photoelectricity on-line detecting system is characterized in that comprising: be used to produce the laser transmitting system of linear beam, the computing system that is used to receive and detect the CCD measuring system of the tube wall beam reflected of passing through quartz ampoule to be measured and is used for the detected light beam of CCD is calculated and draws the pipe thickness of quartz ampoule;
Described laser transmitting system comprises laser instrument and collimation, expansion bundle and shaping optical system;
Described CCD measuring system comprises line array CCD and beam expander optical system;
Described laser instrument, described collimation, expand bundle and shaping optical system, described line array CCD and described beam expander optical system are arranged on the homonymy of quartz ampoule to be measured, described laser instrument produces behind the laser through collimation, expand bundle and shaping optical system and form long and narrow linear beam, described linear beam α at a certain angle incides on the outer wall of quartz ampoule, this linear light beam forms first folded light beam and deflecting light beams, described deflecting light beams is through the internal reflection of described quartz ampoule and pass described quartz ampoule outer wall and form second folded light beam, and described first folded light beam and second folded light beam are parallel to each other; Wherein, 0 °＜α＜90 °,
Described first folded light beam and second folded light beam incide described line array CCD after expanding the bundle processing through described beam expander optical system;
Described computing system is connected with described line array CCD, be used for light intensity signal according to line array CCD output, calculate described described first folded light beam on the described line array CCD and the distance of second folded light beam of inciding, and according to the pipe thickness of the described quartz ampoule of this distance calculation.
2, system according to claim 1 is characterized in that, the pipe thickness of described quartz ampoule is calculated by following formula:
Wherein, L is the pipe thickness of quartz ampoule, and BC is the spacing of distance before the described beam expander optical system of process of described first folded light beam and second folded light beam, and β is the amplification coefficient of described beam expander optical system, and n is the refractive index of described quartz ampoule.
3, system according to claim 1 and 2, it is characterized in that also comprising servo-control system, be used to control described quartz ampoule and carry out gyration, and described laser transmitting system and described CCD measuring system are moved along the axis direction of described quartz ampoule around its axis.
4, system according to claim 3 is characterized in that, described servo-control system comprises:
AC servo motor is used to drive described driven CCD measuring system and described laser transmitting system and moves along the axis direction of described quartz ampoule;
Stepper motor is used to drive tested quartz ampoule and carries out gyration around its axis;
Motor control module is connected with described stepper motor with described AC servo motor, is used to control described axis direction and moves speed, direction and displacement with described gyration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200726831U CN201281587Y (en) | 2008-10-31 | 2008-10-31 | Photoelectric on-line detecting system for wall thickness of quartz tube |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200726831U CN201281587Y (en) | 2008-10-31 | 2008-10-31 | Photoelectric on-line detecting system for wall thickness of quartz tube |
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| CNU2008200726831U Expired - Fee Related CN201281587Y (en) | 2008-10-31 | 2008-10-31 | Photoelectric on-line detecting system for wall thickness of quartz tube |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102853784A (en) * | 2012-08-29 | 2013-01-02 | 中国科学院长春光学精密机械与物理研究所 | Non-contact optical automatic detecting device for linearity of scale shell of grating scale |
| CN104520028A (en) * | 2012-08-10 | 2015-04-15 | Sms米尔股份有限公司 | Method and device for optically measuring interior of pipe |
| CN104848794A (en) * | 2015-05-26 | 2015-08-19 | 天津市得艺乐器有限公司 | Drum set spraying detection system |
| CN106323177A (en) * | 2015-07-02 | 2017-01-11 | 郭达仁 | Device and method for identifying photoelectric glass substrate in real time with high accuracy |
-
2008
- 2008-10-31 CN CNU2008200726831U patent/CN201281587Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104520028A (en) * | 2012-08-10 | 2015-04-15 | Sms米尔股份有限公司 | Method and device for optically measuring interior of pipe |
| CN104520028B (en) * | 2012-08-10 | 2016-10-26 | Sms米尔股份有限公司 | Method and apparatus for internal measurement pipeline optically |
| CN102853784A (en) * | 2012-08-29 | 2013-01-02 | 中国科学院长春光学精密机械与物理研究所 | Non-contact optical automatic detecting device for linearity of scale shell of grating scale |
| CN104848794A (en) * | 2015-05-26 | 2015-08-19 | 天津市得艺乐器有限公司 | Drum set spraying detection system |
| CN106323177A (en) * | 2015-07-02 | 2017-01-11 | 郭达仁 | Device and method for identifying photoelectric glass substrate in real time with high accuracy |
| CN106323177B (en) * | 2015-07-02 | 2019-08-06 | 郭达仁 | Device and method for identifying photoelectric glass substrate in real time with high accuracy |
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Granted publication date: 20090729 Termination date: 20091130 |