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CN201250820Y - Piezoelectric hydraulic linear motor - Google Patents

Piezoelectric hydraulic linear motor Download PDF

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Publication number
CN201250820Y
CN201250820Y CNU2008200724200U CN200820072420U CN201250820Y CN 201250820 Y CN201250820 Y CN 201250820Y CN U2008200724200 U CNU2008200724200 U CN U2008200724200U CN 200820072420 U CN200820072420 U CN 200820072420U CN 201250820 Y CN201250820 Y CN 201250820Y
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piezoelectric
pump
hydraulic
pipeline
reversing valve
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阚君武
唐可洪
高俊峰
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Jilin University
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Jilin University
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Abstract

本实用新型涉及一种压电液压直线马达,属于机电液一体化领域。压电泵的入口与蓄能器通过管路连接,该蓄能器还通过管路与换向阀连接,该换向阀与压电泵的出口通过管路连接,该换向阀还与液压缸的腔体连接。优点在于:结构新颖,利用流体介质传递动力,可有效地将压电陶瓷的微幅往复振动转换成液压缸活塞的宏观直线运动,获得较大的驱动力和运动行程,并可通过一次累积一个液滴的方法实现精密驱动与控制;同时,压电液压马达的结构及控制简单,体积小,密封性好,可作为标注部件应用。

Figure 200820072420

The utility model relates to a piezoelectric hydraulic linear motor, which belongs to the field of electromechanical-hydraulic integration. The inlet of the piezoelectric pump is connected to the accumulator through a pipeline, and the accumulator is also connected to a reversing valve through a pipeline, and the reversing valve is connected to the outlet of the piezoelectric pump through a pipeline, and the reversing valve is also connected to the hydraulic pressure Cylinder cavity connection. The advantages are: the structure is novel, the fluid medium is used to transmit power, and the micro-amplitude reciprocating vibration of the piezoelectric ceramic can be effectively converted into the macroscopic linear motion of the hydraulic cylinder piston to obtain a large driving force and motion stroke, and can be accumulated one at a time. The method of liquid droplets realizes precise driving and control; at the same time, the structure and control of the piezoelectric hydraulic motor are simple, small in size and good in sealing, and can be used as a marking component.

Figure 200820072420

Description

压电液压直线马达 Piezoelectric hydraulic linear motor

技术领域 technical field

本实用新型属于机电液一体化领域,具体涉及一种利用压电泵驱动液体循环,将压电陶瓷高频、微小往复振动转换成液压缸活塞有规律宏观直线运动的压电液压驱动器,即压电液压直线马达。The utility model belongs to the field of mechanical-electrical-hydraulic integration, and in particular relates to a piezoelectric hydraulic driver which utilizes a piezoelectric pump to drive liquid circulation and converts the high-frequency and small reciprocating vibrations of piezoelectric ceramics into regular macroscopic linear motion of hydraulic cylinder pistons. Electro-hydraulic linear motor.

背景技术 Background technique

压电陶瓷具有结构简单,响应快、无电磁干扰、能耗低、易于控制等特点,在航空航天、机械、光学工程、生物医药及流体驱动与控制等领域都有广泛的应用。目前,以压电陶瓷为动力部件实现力和直线位移输出/控制压电驱动器有多种形式,可简单归结为3类:1)直接利用压电体伸缩变形输出力或位移的压电驱动器;2)采用杠杆及柔性铰链等放大机构的压电驱动器;3)采用嵌位机构或超声波原理形成的步进式压电马达。前两类压电驱动器的结构简单、输出力大,但位移微小,实际应用受到了一定的限制;后者可获得较大的运动行程,但结构及控制复杂、要求部件的加工精度高,由于依靠摩擦力传递力和位移,因此进给刚度低、输出驱动力远低于压电体变形产生的压力,只有几到几十牛顿,无法满足力和位移都较大的使用场合。体积小,重量轻,高输出力、大位移,速度快,能效高的新型驱动器是很多领域所急需的。例如,材料试验机、火箭发动机推力测量试验台、直升机转子微小摆动和传统航空器表面的主动控制等应用对象,通常要求驱动器具有较大的输出力和位移来满足结构控制的要求,这类设备的控制对象主要是负荷,通过实时的大范围精密位移来加载或卸载(在数毫米/厘米的行程范围内进行数千牛顿力的双向调整),这是目前现有压电驱动器难以满足的。Piezoelectric ceramics have the characteristics of simple structure, fast response, no electromagnetic interference, low energy consumption, and easy control. They are widely used in aerospace, machinery, optical engineering, biomedicine, and fluid drive and control. At present, there are many forms of piezoelectric actuators that use piezoelectric ceramics as power components to achieve force and linear displacement output/control, which can be simply classified into three categories: 1) piezoelectric actuators that directly use piezoelectric body expansion and deformation to output force or displacement; 2) Piezoelectric actuators using amplification mechanisms such as levers and flexible hinges; 3) Stepping piezoelectric motors formed by clamping mechanisms or ultrasonic principles. The first two types of piezoelectric actuators have a simple structure and large output force, but the displacement is small, and the practical application is limited to a certain extent; the latter can obtain a large motion stroke, but the structure and control are complex and require high machining accuracy of the parts. Relying on friction to transmit force and displacement, the feed stiffness is low, and the output driving force is far lower than the pressure generated by the deformation of the piezoelectric body. It is only a few to tens of Newtons, which cannot meet the application occasions where the force and displacement are large. A new driver with small size, light weight, high output force, large displacement, fast speed and high energy efficiency is urgently needed in many fields. For example, application objects such as material testing machine, rocket engine thrust measurement test bench, micro-oscillation of helicopter rotor and active control of traditional aircraft surface usually require the driver to have a large output force and displacement to meet the requirements of structural control. The control object is mainly the load, which is loaded or unloaded through real-time large-scale precision displacement (two-way adjustment of thousands of newtons within a stroke range of several millimeters/centimeters), which is difficult for existing piezoelectric actuators to meet.

发明内容 Contents of the invention

本实用新型提供一种压电液压直线马达,以解决压电驱动器存在的输出力和位移微小、不能满足实际需要的问题。本实用新型采取的技术方案是:压电泵的入口与蓄能器通过管路连接,该蓄能器还通过管路与换向阀连接,该换向阀与压电泵的出口通过管路连接,该换向阀还通过管路与液压缸的腔体连接。The utility model provides a piezoelectric hydraulic linear motor to solve the problem that the output force and displacement of the piezoelectric driver are small and cannot meet the actual needs. The technical scheme adopted by the utility model is: the inlet of the piezoelectric pump is connected to the accumulator through a pipeline, and the accumulator is also connected to a reversing valve through a pipeline, and the reversing valve and the outlet of the piezoelectric pump are connected through a pipeline Connected, the reversing valve is also connected with the cavity of the hydraulic cylinder through the pipeline.

本实用新型一种实施方式是:该换向阀采用3位4通阀。One embodiment of the utility model is: the reversing valve adopts a 3-position 4-way valve.

本实用新型一种实施方式是:压电泵采用压电叠堆泵,所述压电叠堆泵由泵体、1~10个压电叠堆振子、刚性顶块、弹性隔膜及截止阀构成,所述泵体及弹性隔膜共同构成泵腔。One embodiment of the utility model is: the piezoelectric pump adopts a piezoelectric stack pump, and the piezoelectric stack pump is composed of a pump body, 1 to 10 piezoelectric stack vibrators, a rigid top block, an elastic diaphragm and a stop valve. , the pump body and the elastic diaphragm together form a pump chamber.

本实用新型一种实施方式是:压电泵采用压电晶片泵,所述压电晶片泵由泵体、1~10个压电晶片振子及截止阀构成,所述泵体及压电晶片振子共同构成泵腔。One embodiment of the present utility model is: the piezoelectric pump adopts a piezoelectric wafer pump, and the piezoelectric wafer pump is composed of a pump body, 1 to 10 piezoelectric wafer vibrators and a stop valve, and the pump body and piezoelectric wafer vibrators Together they form the pump cavity.

本实用新型中压电泵是动力元件,实现流体的循环与驱动;换向阀的功能是控制流体的流动及液压缸活塞的运动方向;蓄能器的作用是吸纳高压流体、补充低压流体,存储活塞两端面积不等造成的液体容积差;液压缸的功能是实现力或位移的输出。本实用新型的特点是能同时获得较大的输出力和运动行程。The medium-voltage electric pump of the utility model is a power element, which realizes the circulation and driving of the fluid; the function of the reversing valve is to control the flow of the fluid and the movement direction of the hydraulic cylinder piston; the function of the accumulator is to absorb the high-pressure fluid and supplement the low-pressure fluid, Store the difference in liquid volume caused by the unequal areas at both ends of the piston; the function of the hydraulic cylinder is to realize the output of force or displacement. The utility model is characterized in that it can obtain larger output force and motion stroke at the same time.

本实用新型利用压电泵驱动液体循环,通过流体介质实现运动转换和动力传递,进而将压电振子的高频微幅往复振动转换成液压缸活塞的直线运动。The utility model utilizes a piezoelectric pump to drive liquid circulation, realizes motion conversion and power transmission through the fluid medium, and then converts the high-frequency micro-amplitude reciprocating vibration of the piezoelectric vibrator into the linear motion of the piston of the hydraulic cylinder.

在本实用新型的一个实施方式中,包含至少一个压电泵、换向阀、蓄能器、液压缸及连接管路等部分。所述压电泵中的压电振子在交变电压作用下发生变形时,压电泵泵腔容积及流体压力发生变化,进而推动单向阀的开启与关闭:当所述压电振子的形变使压电泵泵腔容积减小、流体压力增加时,压电泵的进口阀关闭、出口阀开启,泵腔内高压流体经换向阀进入液压缸的某个腔体;同时,液压缸另一个腔体内的液体进入蓄能器,液压缸活塞运动一步;交变电压换向后,压电泵泵腔容积增加、泵腔内液体压力降低,致使压电泵的进口阀开启、出口阀关闭,蓄能器内液体进入泵腔,至此完成一个工作循环。当压电振子在交变电压作用下连续工作时,压电泵输出的脉动流体推动液压缸活塞进行直线运动。通过换向阀控制,可实现液压缸活塞的前进、后退、摆动或自锁。In one embodiment of the present utility model, it includes at least one piezoelectric pump, a reversing valve, an accumulator, a hydraulic cylinder, connecting pipelines and other parts. When the piezoelectric vibrator in the piezoelectric pump is deformed under the action of alternating voltage, the volume of the piezoelectric pump chamber and the fluid pressure will change, thereby pushing the opening and closing of the one-way valve: when the deformation of the piezoelectric vibrator When the volume of the piezoelectric pump chamber decreases and the fluid pressure increases, the inlet valve of the piezoelectric pump is closed and the outlet valve is opened, and the high-pressure fluid in the pump chamber enters a cavity of the hydraulic cylinder through the reversing valve; at the same time, the hydraulic cylinder The liquid in one cavity enters the accumulator, and the piston of the hydraulic cylinder moves one step; after the alternating voltage is reversed, the volume of the pump cavity of the piezoelectric pump increases, and the pressure of the liquid in the pump cavity decreases, causing the inlet valve of the piezoelectric pump to open and the outlet valve to close , the liquid in the accumulator enters the pump cavity, and a working cycle is completed so far. When the piezoelectric vibrator works continuously under the action of alternating voltage, the pulsating fluid output by the piezoelectric pump pushes the piston of the hydraulic cylinder to move in a straight line. Through the control of the reversing valve, the hydraulic cylinder piston can move forward, backward, swing or self-lock.

在本实用新型的另一个实施方式中,所述压电泵包含至少一个压电叠堆振子、泵腔膜薄、刚性顶块及一对截止阀。所述压电叠堆振子在交变电压作用下发生伸缩变形时,通过刚性顶块及泵腔隔膜改变泵腔容积和流体压力,进而推动单向阀的开启与关闭,实现流体的单向、连续流动。In another embodiment of the present utility model, the piezoelectric pump includes at least one piezoelectric stack vibrator, a pump chamber membrane, a rigid top block, and a pair of shut-off valves. When the piezoelectric stack vibrator is stretched and deformed under the action of alternating voltage, the volume of the pump chamber and the fluid pressure are changed through the rigid top block and the diaphragm of the pump chamber, and then the opening and closing of the one-way valve are pushed to realize the one-way, continuous flow.

在本实用新型的另一个实施方案中,所述压电泵包含至少一个压电晶片振子和一对截止阀。所述压电晶片振子在交变电压作用下发生弯曲变形时,致使泵腔容积及流体压力发生变化,进而推动单向阀的开启与关闭,实现流体的连续输出。In another embodiment of the present utility model, the piezoelectric pump includes at least one piezoelectric wafer vibrator and a pair of shut-off valves. When the piezoelectric wafer vibrator is bent and deformed under the action of the alternating voltage, the volume of the pump cavity and the fluid pressure will change, thereby promoting the opening and closing of the one-way valve to realize the continuous output of the fluid.

本实用新型提出将压电陶瓷驱动与液压传动技术相结合的压电液压直线马达,即利用压电泵循环液体的方法将压电体微小变形和高频振动转换成液压缸活塞有规律的直线运动。该马达具有压电元件响应快、无电磁干扰、易于控制、结构简单、体积小等特点;同时也具有液压传动的高能量密度、大运动行程、高输出压力、无冲击等特点。同传统的液压驱动器相比,其结构简单,体积小,可单独使用或作为复杂系统的标准部件,适用于机器人、微小系统及远程控制系统;同目前已有的压电直线马达相比,它的优点是可同时获得较大的输出力和运动行程、实现力和位移的双向控制。The utility model proposes a piezoelectric hydraulic linear motor that combines piezoelectric ceramic drive and hydraulic transmission technology, that is, the micro deformation and high-frequency vibration of the piezoelectric body are converted into regular straight lines of the hydraulic cylinder piston by using the method of circulating liquid through the piezoelectric pump. sports. The motor has the characteristics of fast response of piezoelectric elements, no electromagnetic interference, easy control, simple structure, small size, etc.; it also has the characteristics of high energy density, large motion stroke, high output pressure, and no impact of hydraulic transmission. Compared with traditional hydraulic actuators, it has simple structure and small volume, and can be used alone or as a standard component of complex systems, suitable for robots, micro systems and remote control systems; compared with existing piezoelectric linear motors, it is The advantage is that it can obtain a large output force and motion stroke at the same time, and realize two-way control of force and displacement.

本实用新型的优点在于:结构新颖,利用流体介质传递动力,可有效地将压电陶瓷的微幅往复振动转换成液压缸活塞的宏观直线运动,获得较大的驱动力和运动行程,并可通过一次累积一个液滴的方法实现精密驱动与控制;同时,压电液压马达的结构及控制简单,体积小,密封性好,可作为标注部件应用。The utility model has the advantages of novel structure, using the fluid medium to transmit power, and can effectively convert the micro-amplitude reciprocating vibration of the piezoelectric ceramic into the macroscopic linear motion of the piston of the hydraulic cylinder to obtain a larger driving force and motion stroke, and can Precise drive and control are realized by accumulating one drop at a time; at the same time, the piezoelectric hydraulic motor has a simple structure and control, small size, and good sealing performance, and can be used as a marking component.

附图说明 Description of drawings

图1是本实用新型压电液压直线马达的结构示意图;Fig. 1 is the structural representation of the utility model piezoelectric hydraulic linear motor;

图2是本实用新型压电叠堆泵的结构示意图;Fig. 2 is a structural schematic diagram of the utility model piezoelectric stack pump;

图3是本实用新型压电晶片泵的结构示意图;Fig. 3 is the structural representation of the utility model piezoelectric wafer pump;

具体实施方式 Detailed ways

压电泵的入口与蓄能器通过管路连接,该蓄能器还通过管路与换向阀连接,该换向阀与压电泵的出口通过管路连接,该换向阀还通过管路与液压缸的腔体连接;该换向阀采用3位4通阀。The inlet of the piezoelectric pump is connected to the accumulator through a pipeline, and the accumulator is also connected to a reversing valve through a pipeline, and the reversing valve is connected to the outlet of the piezoelectric pump through a pipeline, and the reversing valve is also connected through a pipeline The road is connected with the cavity of the hydraulic cylinder; the reversing valve adopts a 3-position 4-way valve.

如图1所示,压电泵1、换向阀2、液压缸3和蓄能器4通过管路连接成封闭的系统;所述的蓄能器与压电泵的入口相连,所述的换向阀为3位4通阀;在所述压电泵1启动的情况下,通过调整所述换向阀3的位置改变液压缸活塞301的运动状态:换向阀2截止时,处于202位置,压电泵1输出的流体经换向阀2直接返回泵腔,液压缸腔体302和303均无流体进入与流出,液压缸活塞杆301处于锁定状态;换向阀2的下端接通时,在201位置,压电泵的出口与液压缸腔体303连通、压电泵的进口与液压缸的腔体302连通,液压缸活塞杆301向下运动;相反,换向阀2的上端接通时,处203位置,压电泵的进、出口分别与液压缸的303和302腔体连通,液压缸活塞301向上运动。As shown in Figure 1, the piezoelectric pump 1, the reversing valve 2, the hydraulic cylinder 3 and the accumulator 4 are connected into a closed system through pipelines; the accumulator is connected with the inlet of the piezoelectric pump, and the The reversing valve is a 3-position, 4-way valve; when the piezoelectric pump 1 is started, the movement state of the hydraulic cylinder piston 301 is changed by adjusting the position of the reversing valve 3: when the reversing valve 2 is closed, it is at 202 position, the fluid output by the piezoelectric pump 1 returns directly to the pump chamber through the reversing valve 2, no fluid enters or flows out of the hydraulic cylinder chambers 302 and 303, and the hydraulic cylinder piston rod 301 is in a locked state; the lower end of the reversing valve 2 is connected , at position 201, the outlet of the piezoelectric pump communicates with the cavity 303 of the hydraulic cylinder, the inlet of the piezoelectric pump communicates with the cavity 302 of the hydraulic cylinder, and the piston rod 301 of the hydraulic cylinder moves downward; on the contrary, the upper end of the reversing valve 2 When it is connected, it is at position 203, the inlet and outlet of the piezoelectric pump communicate with the cavities of 303 and 302 of the hydraulic cylinder respectively, and the piston 301 of the hydraulic cylinder moves upward.

如图2所示,压电泵可由压电叠堆振子驱动,为压电叠堆泵,所述压电叠堆泵由泵体101、压电叠堆102、刚性顶块103、弹性隔膜104、及截止阀106和107构成。所述泵体101及弹性隔膜104共同构成泵腔105。当所述压电叠堆振子在外界交变电压作用下伸长时,推动泵腔隔膜使泵腔105容积减小、其内流体压力增加,出口阀106开启、进口阀107关闭,流体从出口流出;相反,交变电压换向后,压电叠堆振子101缩短、泵腔105容积增加,致使流体压力降低,出口阀106关闭、进口阀107开启,流体进入泵腔。As shown in Figure 2, the piezoelectric pump can be driven by a piezoelectric stack vibrator, which is a piezoelectric stack pump. The piezoelectric stack pump consists of a pump body 101, a piezoelectric stack 102, a rigid top block 103, and an elastic diaphragm 104. , And shut-off valves 106 and 107 constitute. The pump body 101 and the elastic diaphragm 104 together form a pump cavity 105 . When the piezoelectric stack vibrator is extended under the action of the external alternating voltage, the diaphragm of the pump chamber is pushed to reduce the volume of the pump chamber 105 and increase the fluid pressure in the pump chamber, the outlet valve 106 is opened, the inlet valve 107 is closed, and the fluid flows from the outlet On the contrary, after the alternating voltage is reversed, the piezoelectric stack vibrator 101 is shortened and the volume of the pump chamber 105 is increased, resulting in a decrease in fluid pressure, the outlet valve 106 is closed, the inlet valve 107 is opened, and the fluid enters the pump chamber.

如图3所示,压电泵可由压电晶片振子驱动,为压电晶片泵,所述压电晶片泵由泵体108、压电晶片振子109及截止阀111和112构成。所述泵体108及压电晶片振子109共同构成泵腔110。当所述压电晶片振子在外界交变电压作用下向泵腔内弯曲变形使泵腔110容积减小时,所述泵腔110内流体压力增加,出口阀111开启、进口阀112关闭,流体从出口流出;相反,电压换向后,压电晶片振子向泵腔外弯曲使泵腔105容积增加时,泵腔内流体压力降低,出口阀111关闭、进口阀112开启,流体进入泵腔。As shown in FIG. 3 , the piezoelectric pump can be driven by a piezoelectric wafer vibrator, and is a piezoelectric wafer pump. The piezoelectric wafer pump is composed of a pump body 108 , a piezoelectric wafer vibrator 109 and stop valves 111 and 112 . The pump body 108 and the piezoelectric wafer vibrator 109 together form a pump cavity 110 . When the piezoelectric wafer vibrator bends and deforms into the pump chamber under the action of the external alternating voltage to reduce the volume of the pump chamber 110, the fluid pressure in the pump chamber 110 increases, the outlet valve 111 opens, the inlet valve 112 closes, and the fluid flows from The outlet flows out; on the contrary, after the voltage is reversed, the piezoelectric wafer vibrator bends out of the pump chamber to increase the volume of the pump chamber 105, the fluid pressure in the pump chamber decreases, the outlet valve 111 is closed, the inlet valve 112 is opened, and the fluid enters the pump chamber.

Claims (6)

1, a kind of piezoelectric hydraulic linear motor, it is characterized in that: the inlet of piezoelectric pump is connected by pipeline with accumulator, this accumulator also is connected with selector valve by pipeline, and this selector valve is connected by pipeline with the piezoelectricity delivery side of pump, and this selector valve also is connected with the cavity of oil hydraulic cylinder.
2, piezoelectric hydraulic linear motor according to claim 1 is characterized in that: this selector valve adopts 34 logical valves.
3, piezoelectric hydraulic linear motor according to claim 1 and 2 is characterized in that: piezoelectric pump adopts piezoelectric stack pump.
4, piezoelectric hydraulic linear motor according to claim 1 and 2 is characterized in that: piezoelectric pump adopts the piezoelectric chip pump.
5, piezoelectric hydraulic linear motor according to claim 3 is characterized in that: piezoelectric pump adopts 1~10 piezoelectric stack oscillator.
6, piezoelectric hydraulic linear motor according to claim 4 is characterized in that: piezoelectric pump adopts 1~10 piezoelectric chip oscillator.
CNU2008200724200U 2008-09-12 2008-09-12 Piezoelectric hydraulic linear motor Expired - Fee Related CN201250820Y (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106647540A (en) * 2017-02-15 2017-05-10 吉林大学 Multifunctional displacement table system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106647540A (en) * 2017-02-15 2017-05-10 吉林大学 Multifunctional displacement table system

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