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CN201242995Y - Plasma generator for sterilizing gas - Google Patents

Plasma generator for sterilizing gas Download PDF

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Publication number
CN201242995Y
CN201242995Y CNU2008200680895U CN200820068089U CN201242995Y CN 201242995 Y CN201242995 Y CN 201242995Y CN U2008200680895 U CNU2008200680895 U CN U2008200680895U CN 200820068089 U CN200820068089 U CN 200820068089U CN 201242995 Y CN201242995 Y CN 201242995Y
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plasma generator
layer
anode layer
discharge
gas
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江超
王又青
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Hubei Normal University
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  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)

Abstract

用于气体消毒的等离子体发生器,具有壳体,壳体上设置有进气口及排气口,在壳体内装有由阳极层、绝缘层、阴极层自上而下依次重叠构成的微放电结构,在所述阳极层及绝缘层表面分布有纵横等距、孔径相等的若干微孔;在所述阳极层上方1-5cm处固定有与所述微孔一一相对的电极;本实用新型能够对大面积大容量的有毒气体进行消毒处理,尤其是对甲烷和苯等挥发性有毒气体进行消毒处理,得到清洁干净的气体,由于本实用新型能够在大气压或超大气压的空气中直接工作,特别适合于工业有毒气体的处理。

Figure 200820068089

The plasma generator used for gas disinfection has a shell, and the shell is provided with an air inlet and an exhaust port, and a microstructure composed of an anode layer, an insulating layer, and a cathode layer stacked from top to bottom is installed in the shell. Discharge structure, on the surface of the anode layer and the insulating layer, there are a number of micropores with vertical and horizontal equal distances and equal apertures; electrodes opposite to the micropores are fixed at 1-5 cm above the anode layer; the utility model The new type can sterilize large-area and large-capacity toxic gases, especially volatile toxic gases such as methane and benzene, to obtain clean gas, because the utility model can directly work in the air of atmospheric pressure or superatmospheric pressure , especially suitable for the treatment of industrial toxic gases.

Figure 200820068089

Description

用于气体消毒的等离子体发生器 Plasma generators for gas disinfection

(一)技术领域:本实用新型属于环保设备,具体是一种用于气体消毒的等离子体发生器。(1) Technical field: the utility model belongs to environmental protection equipment, specifically a kind of plasma generator for gas disinfection.

(二)背景技术:目前,对气体进行消毒处理比较成熟的技术主要有:紫外线消毒、臭氧消毒、负离子消毒等,但它们也存在一定的缺陷,一是会对人体产生一定的危害,二是不宜进行大面积大容量的气体消毒。(2) Background technology: At present, the more mature technologies for disinfection of gas mainly include: ultraviolet disinfection, ozone disinfection, negative ion disinfection, etc., but they also have certain defects. The first is that it will cause certain harm to the human body. It is not suitable for large-area and large-capacity gas disinfection.

(三)发明内容:本实用新型的目的就是提供一种用于气体消毒的等离子体发生器;该等离子体发生器是根据近年来高气压气体放电的研究成果,结合工业上对有毒气体进行消毒处理日益增长的需求,利用非热等离子体源可产生大体积的高气压放电等离子体的特性而设计的,能对大面积大容量的有毒气体进行消毒处理,同时对人体不构成危害。(3) Summary of the invention: the purpose of this utility model is to provide a plasma generator for gas disinfection; this plasma generator is based on the research results of high-pressure gas discharge in recent years, combined with industrial disinfection of toxic gases To deal with the increasing demand, it is designed by using the characteristics of non-thermal plasma source that can generate large volume of high pressure discharge plasma, which can disinfect large area and large capacity of toxic gas without causing harm to human body.

本实用新型具有壳体,壳体上设置有进气口及排气口,其特征在于:在壳体内装有由阳极层、绝缘层、阴极层自上而下依次重叠构成的微放电结构,在所述阳极层及绝缘层表面分布有纵横等距、孔径相等的若干微孔;在所述阳极层上方1-5cm处固定有与所述微孔一一相对的电极。The utility model has a shell, which is provided with an air inlet and an exhaust port, and is characterized in that: a micro-discharge structure composed of an anode layer, an insulating layer, and a cathode layer stacked sequentially from top to bottom is installed in the shell, On the surface of the anode layer and the insulating layer, a number of micropores with equal vertical and horizontal distances and equal pore diameters are distributed; electrodes opposite to the micropores are fixed at 1-5 cm above the anode layer.

所述阳极层、绝缘层、阴极层分别是钼片、Al2O3陶瓷片、钼片。The anode layer, insulating layer and cathode layer are molybdenum sheet, Al 2 O 3 ceramic sheet and molybdenum sheet respectively.

所述的微孔的孔径为100μm-250μm。The diameter of the micropores is 100 μm-250 μm.

所述电极为钨针。The electrodes are tungsten needles.

所述微放电结构阴极层与壳体之间设置有绝缘体。An insulator is arranged between the cathode layer of the micro-discharge structure and the casing.

本实用新型的设计原理是:由阳极层、绝缘层、阴极层构成的单一的微放电结构所形成的等离子体体积太小,工业上应用时需要大体积的高气压辉光放电等离子体;因此,类比相似的放电形式,本实用新型采用一个微放电结构和一个第三电极(钨针),第三电极放置在微放电结构中的阳极边作为整个放电的阳极,从微放电中抽出电子,而微放电作为整个放电的阴极。利用这个结构在大气压空气中产生规模达到厘米量级的稳定直流辉光放电等离子体,电子密度达到1014cm-3,而且该放电结构在整个放电区域具有正的微分电阻特性,这种放电结构不用镇流电阻能够进行大量的并联运行,构成更大的放电阵列。因此,由大量自持辉光放电阵列并联运行构成等离子发生器,产生大体积的放电等离子体,能够对工业有毒气体进行消毒处理。The design principle of the utility model is: the plasma volume formed by the single micro-discharge structure formed by the anode layer, the insulating layer and the cathode layer is too small, and a large-volume high-pressure glow discharge plasma is required for industrial application; therefore , analogous to similar discharge forms, the utility model adopts a micro-discharge structure and a third electrode (tungsten needle), the third electrode is placed on the anode side of the micro-discharge structure as the anode of the entire discharge, and electrons are extracted from the micro-discharge. The microdischarge acts as the cathode of the entire discharge. Using this structure to generate a stable DC glow discharge plasma with a scale of centimeters in atmospheric pressure air, the electron density can reach 10 14 cm -3 , and the discharge structure has positive differential resistance characteristics in the entire discharge area. A large number of parallel operations can be performed without ballast resistors to form a larger discharge array. Therefore, a large number of self-sustained glow discharge arrays operate in parallel to form a plasma generator to generate a large volume of discharge plasma, which can sterilize industrial toxic gases.

本实用新型是一种高气压稳定的辉光放电,放电气压能够达到甚至超过大气压,其主要特点是:(1)有非热电子能量分布,放电区域形成高电流密度,电子密度在1013-1016cm-3(直流放电或脉冲直流放电);(2)放电等离子体中有极高的功率密度。由于放电等离子体有极高的功率密度(一般大于103kW/cm3),极高密度的高能电子(一般大于1013cm-3),极高的气体温度(一般大于2000K),这些使它能够有效地分解气体,能够用来对甲烷和苯等挥发性有毒气体消毒;(3)采用脉冲直流放电方式,能够使放电功率提高50%左右;(4)采用气体流动与扩散冷却相结合的冷却方式,这种方式能够快速带走放电产生的大量热,降低功率损耗,提高等离子体发生器的效率。控制污染气体的流速可以对放电进行有效的冷却,另外整个放电的外壳采用散热效果好的铝合金制作,以提高扩散冷却的效果;(5)由于设计的等离子体发生器的放电气压能够达到甚至超过大气压,因此该等离子体发生器密封要求较低,降低了消毒装置的制造难度。The utility model is a glow discharge with high pressure and stability. The discharge pressure can reach or even exceed the atmospheric pressure. Its main features are: (1) There is non-thermal electron energy distribution, and the discharge area forms a high current density, and the electron density is between 10 13 - 10 16 cm -3 (DC discharge or pulsed DC discharge); (2) There is a very high power density in the discharge plasma. Because the discharge plasma has extremely high power density (generally greater than 10 3 kW/cm 3 ), extremely high density of high-energy electrons (generally greater than 10 13 cm -3 ), and extremely high gas temperature (generally greater than 2000K), these make It can effectively decompose gas and can be used to sterilize volatile toxic gases such as methane and benzene; (3) adopt pulsed DC discharge mode, which can increase the discharge power by about 50%; (4) adopt the combination of gas flow and diffusion cooling This method can quickly take away a large amount of heat generated by the discharge, reduce power loss, and improve the efficiency of the plasma generator. Controlling the flow rate of the polluting gas can effectively cool the discharge. In addition, the entire discharge shell is made of aluminum alloy with good heat dissipation effect to improve the effect of diffusion cooling; (5) Since the discharge pressure of the designed plasma generator can reach or even The pressure exceeds the atmospheric pressure, so the plasma generator requires less sealing, which reduces the manufacturing difficulty of the disinfection device.

(四)附图说明: (4) Description of drawings:

图1是本实用新型实施例的整体结构俯视方向示意图;Fig. 1 is a schematic view of the overall structure of an embodiment of the utility model in a top view direction;

图2是图1中A-A′向剖视结构示意图;Fig. 2 is a schematic diagram of the cross-sectional structure of A-A' in Fig. 1;

图3是单个微放电基本结构示意图;Fig. 3 is a schematic diagram of the basic structure of a single micro-discharge;

图4是由两个微放电和两个钨针电极构成的自持辉光放电并联运行结构示意图。Fig. 4 is a schematic diagram of a parallel operation structure of a self-sustained glow discharge composed of two micro-discharges and two tungsten needle electrodes.

(五)具体实施方式: (5) Specific implementation methods:

参见图1、图2、图3、图4,图中,1-壳体,2-进气口,3-出气口,4-阳极层,5-绝缘层,6-阴极层,7-微孔,8-钨针电极,9-孔洞,10-绝缘体,11-陶瓷管。See Figure 1, Figure 2, Figure 3, and Figure 4, in the figure, 1-housing, 2-air inlet, 3-air outlet, 4-anode layer, 5-insulation layer, 6-cathode layer, 7-micro Hole, 8-tungsten needle electrode, 9-hole, 10-insulator, 11-ceramic tube.

本实用新型具有壳体1,壳体上设置有进气口2及排气口3,一般进排气口的设置以其中心轴线刚好穿过等离子体为宜;参见图1,本实施例采用铝合金材料制作壳体,并进行氧极化处理;壳体呈长方体形状,在壳体内装有由阳极层4,绝缘层5、阴极层6自上而下依次叠接而成的微放电结构,其中阴极层和阳极层均采用0.1-0.2mm厚的钼片,中间的绝缘层采用Al2O3陶瓷片,厚度一般为0.2-0.4mm,阴极层、绝缘层及阳极层之间以粘接方式连在一起。在所述的阳极层及绝缘层表面分布有纵横等距、孔径相等的若干微孔7,微孔直径为200微米,在所述阳极层4的上方1-5cm处固定有与上述微孔一一相对的电极8,此电极一般使用钨针。本实施例中,直接在阳极层上方的壳体上打出孔洞9,将钨针电极置于其内。也可在阳极层上方适当距离固定一悬板,悬板上打出若干与所述微孔一一相对的孔洞,孔洞内再装上钨针电极,亦可达到本实用新型之目的。如图2中所示,在微放电结构阴极层6与壳体之间设置有绝缘体10,所有电极均用绝缘陶瓷管11与铝合金壳体进行绝缘隔离,阴极层、阳极层及钨针电极均分别与相应的电源连接。The utility model has a housing 1 on which an air inlet 2 and an air outlet 3 are arranged. Generally, the air inlet and air outlet are arranged so that their central axis just passes through the plasma; referring to FIG. 1 , this embodiment adopts The shell is made of aluminum alloy material and subjected to oxygen polarization treatment; the shell is in the shape of a cuboid, and the shell is equipped with a micro-discharge structure composed of an anode layer 4, an insulating layer 5, and a cathode layer 6 sequentially stacked from top to bottom. Among them, the cathode layer and the anode layer are made of molybdenum sheets with a thickness of 0.1-0.2mm, and the insulating layer in the middle is made of Al 2 O 3 ceramic sheets with a thickness of generally 0.2-0.4mm. The cathode layer, the insulation layer and the anode layer are bonded together connected together. Distributed on the surface of the anode layer and the insulating layer are some micropores 7 that are equally spaced vertically and horizontally and have equal apertures. An opposite electrode 8, which generally uses a tungsten needle. In this embodiment, a hole 9 is drilled directly on the casing above the anode layer, and a tungsten needle electrode is placed in it. It is also possible to fix a suspension plate at an appropriate distance above the anode layer, punch out some holes one by one relative to the micropores on the suspension plate, and then install tungsten needle electrodes in the holes, which can also achieve the purpose of the present utility model. As shown in Figure 2, an insulator 10 is arranged between the cathode layer 6 and the housing of the micro-discharge structure, and all electrodes are insulated and isolated from the aluminum alloy housing by an insulating ceramic tube 11, the cathode layer, the anode layer and the tungsten needle electrode are respectively connected to the corresponding power supply.

将本实用新型放置在处理室中,有毒气体经进气口进入,经处理后从出气口中流出,实验表明对甲烷的清除达到80%,对苯的清除达到90%。The utility model is placed in the treatment chamber, the toxic gas enters through the air inlet, and flows out from the gas outlet after being treated. Experiments show that the removal of methane reaches 80%, and the removal of benzene reaches 90%.

Claims (5)

1. the plasma generator that is used for gas depoisoning, has housing, housing is provided with air inlet and exhaust outlet, it is characterized in that: the micro discharge structure that is overlapped successively from top to bottom by anode layer, insulating barrier, cathode layer is housed in housing, is distributed with some micropores equidistant in length and breadth, that the aperture equates at described anode layer and surface of insulating layer; The 1-5cm place is fixed with and described micropore electrode of opposite one by one above described anode layer.
2. the plasma generator that is used for gas depoisoning according to claim 1 is characterized in that: described anode layer, insulating barrier, cathode layer are respectively molybdenum sheet, Al 2O 3Potsherd, molybdenum sheet.
3. the plasma generator that is used for gas depoisoning according to claim 1 and 2 is characterized in that: the aperture of described micropore is 100 μ m-250 μ m.
4. the plasma generator that is used for gas depoisoning according to claim 1 is characterized in that: described electrode is the tungsten pin.
5. the plasma generator that is used for gas depoisoning according to claim 1 is characterized in that: be provided with insulator between described micro discharge structure cathode layer and the housing.
CNU2008200680895U 2008-06-22 2008-06-22 Plasma generator for sterilizing gas Expired - Fee Related CN201242995Y (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011147595A1 (en) * 2010-05-27 2011-12-01 Arann Healthcare Ltd. Method and apparatus for the sterilisation of articles
CN101922750B (en) * 2009-12-31 2012-07-04 周云正 Smoke exhaust ventilator provided with plasma for purification
CN103458601A (en) * 2013-09-12 2013-12-18 大连民族学院 Plasma generation device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101922750B (en) * 2009-12-31 2012-07-04 周云正 Smoke exhaust ventilator provided with plasma for purification
WO2011147595A1 (en) * 2010-05-27 2011-12-01 Arann Healthcare Ltd. Method and apparatus for the sterilisation of articles
CN103458601A (en) * 2013-09-12 2013-12-18 大连民族学院 Plasma generation device

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Granted publication date: 20090520

Termination date: 20100622