CN201233444Y - Solid-state detector for radiation detection - Google Patents
Solid-state detector for radiation detection Download PDFInfo
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Abstract
Description
技术领域 technical field
本实用新型涉及用于辐射探测(例如,辐射成像系统)的探测器,尤其涉及到对大型物体进行辐射探测所用的阵列固体探测器。The utility model relates to a detector used for radiation detection (for example, a radiation imaging system), in particular to an array solid detector used for radiation detection of large objects.
背景技术 Background technique
在辐射成像系统中,阵列探测器的作用是将透过被检测物体的X射线或者γ射线信号转换为电信号。在大型物体辐射成像系统中,一般是采用单列探测器阵列,其中包括电离室型的气体探测器和闪烁体型的固体探测器。在中国专利02148670.0和200420009319.2中本申请人公开了两种辐射成像固体探测器技术,应用这些专利技术的固体探测器阵列已经广泛应用在X射线集装箱扫描系统中。多列探测器阵列的提出是为了适应大型物体辐射检测扫描速度提高的要求,比如对火车的辐射扫描检测等。提高探测器灵敏区在扫描方向的宽度可以提高扫描速度,然而提高探测器灵敏区的宽度会牺牲辐射成像系统的空间分辨率,导致扫描图像质量下降。要同时满足提高扫描速度和扫描图像质量的要求,一般采用多列探测器。中国专利200520136585.6中公开了一种用于辐射成像的多阵列探测器模块结构,但是该专利并没有指出如何构建多列的固体探测器。专利02148670.0和200420009319.2中的固体探测器或阵列固体探测器中闪烁体和光电二极管的耦合都是在和射线方向平行的闪烁体的侧面,用这两种探测器构建超过2列的多列固体探测器时,由于光电二极管及其输出电路板会占用空间,至少有两列探测器灵敏区之间的死区会比较大,而较大的死区会使扫描图像的反差灵敏度变差。In a radiation imaging system, the function of the array detector is to convert the X-ray or γ-ray signal transmitted through the detected object into an electrical signal. In the radiation imaging system of a large object, a single-column detector array is generally used, including ionization chamber-type gas detectors and scintillator-type solid-state detectors. In Chinese patents 02148670.0 and 200420009319.2, the applicant disclosed two radiation imaging solid-state detector technologies. The solid-state detector arrays using these patented technologies have been widely used in X-ray container scanning systems. The multi-column detector array is proposed to meet the requirements of increasing the scanning speed of radiation detection of large objects, such as the radiation scanning detection of trains. Increasing the width of the detector sensitive area in the scanning direction can increase the scanning speed, but increasing the width of the detector sensitive area will sacrifice the spatial resolution of the radiation imaging system, resulting in a decrease in the quality of the scanned image. To meet the requirements of improving scanning speed and scanning image quality at the same time, multi-column detectors are generally used. Chinese patent 200520136585.6 discloses a multi-array detector module structure for radiation imaging, but this patent does not point out how to construct multi-row solid detectors. In patent 02148670.0 and 200420009319.2, the coupling of the scintillator and the photodiode in the solid-state detector or array solid-state detector is on the side of the scintillator parallel to the ray direction, and these two kinds of detectors are used to construct multi-column solid-state detection with more than 2 columns When the detector is used, since the photodiode and its output circuit board will occupy space, the dead zone between the sensitive areas of at least two columns of detectors will be relatively large, and a large dead zone will make the contrast sensitivity of the scanned image worse.
在医学检测和小型物品检测领域内已经有许多辐射成像多列固体探测器的实例,比如多层CT探测器、平板探测器等。然而这些为小型物体检测设计的探测器结构并不适合构建大型物体的辐射成像检测,主要原因是这些探测器对高能电离辐射(比如由加速器产生的脉冲X射线)的探测效率太低,同时过于精细的像素尺寸使得依此构建大型物体检测通道的建造和维护成本太高。There have been many examples of radiation imaging multi-column solid detectors in the field of medical detection and small object detection, such as multi-slice CT detectors, flat panel detectors, etc. However, these detector structures designed for the detection of small objects are not suitable for the construction of radiation imaging detection of large objects, mainly because the detection efficiency of these detectors for high-energy ionizing radiation (such as pulsed X-rays generated by accelerators) is too low and too large. The fine pixel size makes it too expensive to build and maintain large object detection pipelines.
图1是目前常用大型物体辐射检测系统探测器的示意图。在这种探测器的结构中,光电二极管102和闪烁体101的耦合面平行于射线照射方向(如图中的箭头105所示)。电离辐射105在闪烁体101内部沉积能量产生可见光,经过反射材料(涂覆在闪烁体表面)收集后通过耦合面进入光电二极管102,在光电二极管102内转换成电荷信号,此电荷信号经过PCB板103后由PCB板103上的插座104输出到后续的信号放大和数据采集电路。这种结构的特点是闪烁体内的能量沉积发光点离光电二极管的光收集面比较近,在闪烁体内光传输条件不好时还能够收集到较多的可见光。Fig. 1 is a schematic diagram of a detector of a radiation detection system commonly used for large objects at present. In this detector structure, the coupling surface of the
实用新型内容Utility model content
本实用新型的一个目的在于提供一种辐射成像用的阵列固体探测器,这种阵列固体探测器可以构建成任意多列的阵列固体探测器,能够在不牺牲扫描图像的空间分辨率的情况下提高大型物体辐射检测速度。An object of the present invention is to provide an array solid-state detector for radiation imaging. This array solid-state detector can be constructed into an array solid-state detector with any number of columns, and can be used without sacrificing the spatial resolution of the scanned image. Increased radiation detection speed for large objects.
本实用新型的另一个目的在于提供一种辐射成像用的阵列固体探测器,这种阵列固体探测器可以构建成任意多列的阵列固体探测器,能够在不牺牲扫描图像的空间分辨率和反差灵敏度的情况下提高大型物体辐射检测速度。Another object of the present utility model is to provide an array solid-state detector for radiation imaging. This array solid-state detector can be constructed into any number of rows of array solid-state detectors, and can be used without sacrificing the spatial resolution and contrast of the scanned image. Improve the radiation detection speed of large objects in the case of sensitivity.
本实用新型的另一个目的在于提供一种辐射成像用的阵列固体探测器,利用该阵列固体探测器构建的多列固体探测器既能保持长期稳定性,又便于制造和维修。Another object of the present invention is to provide an array solid-state detector for radiation imaging. The multi-row solid-state detector constructed by using the array solid-state detector can not only maintain long-term stability, but also be easy to manufacture and maintain.
根据本实用新型的一方面,本实用新型提供了一种用于辐射探测的阵列固体探测器,该阵列固体探测器包括:检测沿预定方向辐射的射线的多个传感器,所述传感器具有射线入射的端面,和多个第一板,所述多个第一板大体平行设置,形成至少一行空间,所述多个传感器排列在所述空间中,其中所述多个第一板由金属形成。According to one aspect of the present invention, the present invention provides an array solid-state detector for radiation detection, the array solid-state detector includes: a plurality of sensors for detecting radiation radiated along a predetermined direction, the sensors have a radiation incident and a plurality of first plates arranged substantially in parallel to form at least one row of spaces in which the plurality of sensors are arranged, wherein the plurality of first plates are formed of metal.
根据本实用新型的一方面,所述用于辐射探测的阵列固体探测器还可以包括:多个第二板,所述多个第二板与多个第一板交叉,由此,将所述至少一行空间中的每一行分隔成多个空间阵列,所述传感器中的每一个位于多个空间阵列中的一个中,其中所述多个第二板由金属形成。According to an aspect of the present invention, the array solid-state detector for radiation detection may further include: a plurality of second plates intersecting with a plurality of first plates, whereby the Each of the at least one row of spaces is divided into a plurality of space arrays, each of the sensors is located in one of the plurality of space arrays, wherein the plurality of second plates are formed of metal.
优选方式是,所述多个第二板与多个第一板大体垂直。Preferably, the plurality of second plates are substantially perpendicular to the plurality of first plates.
所述传感器可以包括接收沿预定方向辐射的射线并将射线转变成可见光的多个闪烁体,和多个光电二极管,所述多个光电二极管分别与所述多个闪烁体通过耦合面耦合,使可见光进入光电二极管,以便将该可见光转换成电荷信号。The sensor may include a plurality of scintillators that receive rays radiated in a predetermined direction and convert the rays into visible light, and a plurality of photodiodes, the plurality of photodiodes are respectively coupled to the plurality of scintillators through coupling surfaces, so that Visible light enters the photodiode so that the visible light is converted into a charge signal.
优选方式是,所述耦合面大体垂直于所述预定方向。Preferably, the coupling surface is substantially perpendicular to the predetermined direction.
优选方式是,所述多个第一板和所述多个第二板沿与所述预定方向相反的方向伸出超过所述端面预定长度,而形成准直器。Preferably, the plurality of first plates and the plurality of second plates protrude beyond the predetermined length of the end surface in a direction opposite to the predetermined direction to form a collimator.
优选方式是,所述多个闪烁体中的每一个的、除了与光电二极管耦合的表面之外的表面都由反射材料包围,该反射材料用于反射所述可见光。Preferably, each of the plurality of scintillators has a surface other than the surface coupled to the photodiode surrounded by a reflective material for reflecting the visible light.
优选方式是,所述反射材料的折射率小于所述闪烁体的折射率。Preferably, the reflective material has a refractive index smaller than that of the scintillator.
优选方式是,所述多个第一板和所述多个第二板中的最外侧的板形成第一壳体,以包围沿预定方向延伸的各个侧面。Preferably, an outermost plate among the plurality of first plates and the plurality of second plates forms a first case so as to surround respective sides extending in a predetermined direction.
根据本实用新型的用于辐射探测的阵列固体探测器还可以包括:用于输出所述多个光电二极管的电荷信号的印刷电路板,以及金属的第二壳体,所述第二壳体至少围绕所述印刷电路板的一部分。The array solid-state detector for radiation detection according to the present invention may further include: a printed circuit board for outputting charge signals of the plurality of photodiodes, and a metal second housing, the second housing at least around a portion of the printed circuit board.
优选方式是,所述多个光电二极管是芯片尺寸封装结构的光电二极管。Preferably, the plurality of photodiodes are photodiodes of a chip-scale package structure.
优选方式是,所述多个光电二极管与相应的所述多个闪烁体沿耦合面用光学透明双面胶带或光学透明胶膜耦合。Preferably, the plurality of photodiodes and the corresponding plurality of scintillators are coupled along the coupling surface with an optically transparent double-sided adhesive tape or an optically transparent adhesive film.
根据本实用新型的用于辐射探测的阵列固体探测器还可以包括:用于输出所述多个光电二极管的电荷信号的印刷电路板,以及用于将多个光电二极管与印刷电路板之间进行连接的弹性连接器,该弹性连接器为绝缘橡胶薄片,并在所述预定方向设有导电介质条纹,该导电介质条纹将多个光电二极管与印刷电路板连接。The array solid-state detector for radiation detection according to the present utility model may also include: a printed circuit board for outputting charge signals of the plurality of photodiodes, and a circuit board for connecting the plurality of photodiodes to the printed circuit board. An elastic connector is connected, the elastic connector is an insulating rubber sheet, and conductive medium stripes are provided in the predetermined direction, and the conductive medium stripes connect a plurality of photodiodes to the printed circuit board.
优选方式是,所述光电二极管在所述预定方向上的投影大体落入所述闪烁体在所述预定方向上的投影中。Preferably, the projection of the photodiode in the predetermined direction substantially falls into the projection of the scintillator in the predetermined direction.
所述多个第一板和所述多个第二板可以由重金属形成。The plurality of first plates and the plurality of second plates may be formed of heavy metal.
所述重金属可以是钨、铅或钽中的一种,或钨、铅或钽构成的合金中的一种。The heavy metal may be one of tungsten, lead or tantalum, or one of alloys composed of tungsten, lead or tantalum.
根据本实用新型的结构方式可以构造任意多列的固体探测器,满足在不牺牲扫描系统空间分辨率和反差灵敏度的情况下提高大型物体辐射成像快速扫描的需要。这种探测器除了具有防潮、避光、防电磁干扰等功能外,还具有可靠性好、方便装配、维修的优点。According to the structure of the utility model, solid detectors of any number of columns can be constructed to meet the requirement of improving the rapid scanning of radiation imaging of large objects without sacrificing the spatial resolution and contrast sensitivity of the scanning system. In addition to the functions of moisture-proof, light-proof, and electromagnetic interference-proof, this detector also has the advantages of good reliability, convenient assembly and maintenance.
附图说明 Description of drawings
为了更加全面地理解本实用新型的特性和目的,以下参照附图对本实用新型进行详细描述。In order to more fully understand the characteristics and purpose of the utility model, the utility model will be described in detail below with reference to the accompanying drawings.
图1是目前常用大型物体辐射检测系统探测器原理示意图。Figure 1 is a schematic diagram of the detector principle of a commonly used radiation detection system for large objects.
图2是本实用新型探测器闪烁体和光电二极管结构示意图。Fig. 2 is a structural schematic diagram of the scintillator and photodiode of the detector of the present invention.
图3是本实用新型探测器壳体结构示意图。Fig. 3 is a structural schematic diagram of the detector housing of the present invention.
图4是闪烁体和光电二极管耦合面示意图。Fig. 4 is a schematic diagram of the coupling surface of the scintillator and the photodiode.
图5是光电二极管和PCB板通过弹性连接器连接示意图。Fig. 5 is a schematic diagram of connecting a photodiode and a PCB board through an elastic connector.
图6是闪烁体通道之间加重金属隔板的示意图。Figure 6 is a schematic diagram of a weighted metal spacer between scintillator channels.
图7是闪烁体通道之间重金属隔板向前延伸的示意图。Fig. 7 is a schematic diagram of the forward extension of the heavy metal partition between the scintillator channels.
具体实施方式 Detailed ways
图2是本实用新型的辐射检测系统探测器的示意图,其中该探测器是包括多个闪烁体和多个光电二极管的多列固体探测器。如图2所示,根据本实用新型的用于辐射探测的阵列固体探测器包括:接收沿预定方向(例如,射线照射方向205)辐射的射线并将射线转变成可见光的多个闪烁体201,和多个光电二极管202,所述多个光电二极管分别与所述多个闪烁体通过耦合面耦合,以使可见光进入光电二极管202并将该可见光转换成电荷信号。所述耦合面大体垂直于所述预定方向。即,光电二极管202和闪烁体201的耦合面垂直于射线照射方向205。闪烁体表面除了和光电二极管耦合面之外都有反射材料包围。光电二极管信号通过PCB板203输出。大型物品辐射检测系统一般采用较高能量的辐射源(比如电子直线加速器、高能量的放射源),与之相对应的探测器也要求对该辐射有较高的探测效率,因此本实用新型中探测器中闪烁体201的长度可以比较长(比如大于30mm),而为了达到特定的空间分辨率,每个探测器通道在垂直于射线照射方向205的闪烁体灵敏面积可比较小(比如小于5mm2)。这样闪烁体201就呈现出一种细长条状。优选方式是选用其折射率小于闪烁体201的折射率的反射体材料,在闪烁体内部就可以形成了一种光波导结构,这种光波导结构更有利于将辐射能量沉积产生的可见光传输到长条状闪烁体201的两个端面,因此将光电二极管202耦合在闪烁晶体的端面时,尽管可见光在闪烁晶体内部的传输距离比将光电二极管耦合在闪烁晶体的侧面会更远,却仍然能够得到足够多的可见光信号。Fig. 2 is a schematic diagram of the detector of the radiation detection system of the present invention, wherein the detector is a multi-row solid detector including a plurality of scintillators and a plurality of photodiodes. As shown in FIG. 2, the array solid-state detector for radiation detection according to the present invention includes: a plurality of
优选方式是,闪烁体呈大体柱状形状。Preferably, the scintillator has a substantially columnar shape.
作为检测射线的传感器,除了采用上述的多个闪烁体201和多个光电二极管202之外,也可以采用本领域其它适合的元件:比如化合物半导体射线探测器等。As a sensor for detecting radiation, in addition to the above-mentioned
图3是本实用新型探测器加上金属壳体的示意图。其中第一壳体301和第二壳体302将图2中所示的闪烁体201、光电二极管202以及一部分PCB板203包含在中间。第一壳体301除了和射线照射方向205垂直的入射面3011之外的几个侧面是由重金属材料组成,或者衬有重金属材料。重金属材料可以是W、Pb或者Ta等。金属壳体对闪烁体和光电二极管起到避光、隔潮的作用,同时也可以对壳体内的各种元件或零件起支撑作用。重金属材料的作用在于减弱探测器周围的散射电离辐射对多列探测器模块边缘通道的影响。Fig. 3 is a schematic diagram of the detector of the present invention plus a metal casing. Wherein the first housing 301 and the second housing 302 contain the
图4是闪烁体201和光电二极管202耦合面的示意图。根据本实用新型的一个实施例,光电二极管优选CSP(Chip Size Package芯片尺寸封装)结构的光电二极管。CSP结构的光电二极管的特点是其灵敏区和外形尺寸几乎相同,而且光电二极管的表面上没有跳线,有利于提高光电二极管和闪烁体的耦合效率,增加探测器通道的信号灵敏度。此外,如图4中所示,相互耦合的一个闪烁体201和一个光电二极管202形成一个单元,在每一个单元中,所述光电二极管在所述预定方向上的投影大体落入所述闪烁体在所述预定方向上的投影中。FIG. 4 is a schematic diagram of the coupling surface of the
对于闪烁体201和光电二极管202的耦合,本实用新型另一个实施例优选采用光学透明双面胶带或者光学透明胶膜。和一般光学耦合胶,如光学透明环氧树脂或光学透明硅橡胶相比,其优点是工艺简单、便于装配及维修。For the coupling of the
根据本实用新型的另一个实施例,光电二极管202和PCB板203的连接采用弹性连接器连接,参见图5中的501。这里所指的弹性连接器是指特制的只在一个方向埋有导电介质条纹5011的绝缘橡胶薄片,这些导电介质条纹的图案分别和光电二极管202以及PCB板203上的金触点图案相对应以达到传导电流信号的目的。应用这种弹性连接技术可以使阵列探测器的封装更加简便,不需要焊接等高温操作,而且便于维护。According to another embodiment of the present invention, the connection between the
如图6-7所示,在本实用新型的另一个实施例中,根据本实用新型的用于辐射探测的阵列固体探测器包括:检测沿射线照射方向205辐射的射线的多个传感器(例如,多个闪烁体201,和多个光电二极管202),传感器具有射线入射的端面(图7中的上端面),和多个第一板601,所述多个第一板大体平行设置,形成至少一行空间,所述多个传感器排列在所述空间中。As shown in FIGS. 6-7 , in another embodiment of the present invention, the array solid-state detector for radiation detection according to the present invention includes: a plurality of sensors (such as , a plurality of
根据本实用新型的用于辐射探测的阵列固体探测器还可以包括多个第二板(图中未示出),所述多个第二板与多个第一板601交叉,由此,将所述至少一行空间中的每一行分隔成多个空间阵列,所述传感器中的每一个位于多个空间阵列中的一个中。所述多个第二板与多个第一板601可以大体垂直,或形成例如80-100度的角度。The array solid-state detector for radiation detection according to the present invention may also include a plurality of second plates (not shown in the figure), and the plurality of second plates intersect with the plurality of
即,相互耦合的一个闪烁体和一个光电二极管形成一个单元,相邻的所述单元之间设有重金属的隔板(即第一和第二板)。即,在每个闪烁体和光电二极管通道之间增加作为第一板的重金属隔板,如图6中的601所示。第一板601可以基本消除与之相邻的两个通道之间闪烁光的串扰,同时也可以减轻电离辐射在两个通道之间的串扰,使得扫描图像的空间分辨率提高。重金属隔板材料可以是钨(W)、铅(Pb)或钽(Ta)金属或者是主要由这些金属构成的合金材料。That is, a scintillator and a photodiode coupled to each other form a unit, and heavy metal partitions (ie, first and second plates) are provided between adjacent units. That is, a heavy metal spacer as the first plate is added between each scintillator and the photodiode channel, as shown by 601 in FIG. 6 . The
根据本实用新型的另一个实施例,上述重金属隔板还可以朝向与射线照射方向205相反的方向伸出闪烁体的前端面,如图7中的701所示。这些前伸的重金属隔板实际上形成了一组栅格准直器(只有一个方向的重金属隔板伸出)或网格准直器(两个方向的重金属隔板都向前伸出),这些准直器可以减少进入多列探测器的散射射线,进而提高扫描图像的反差灵敏度。According to another embodiment of the present invention, the above-mentioned heavy metal partition can also protrude from the front end of the scintillator toward the direction opposite to the
在上述实施例中,金属壳体301单独形成,作为选择也可以由最外侧的第一板601和第二板形成金属壳体301,以包围沿预定方向延伸的各个侧面。In the above-mentioned embodiment, the metal shell 301 is formed alone, alternatively, the metal shell 301 may also be formed by the outermost
此外,尽管在上述是示例中,相邻的所述单元之间设有重金属的隔板(即第一和第二板),但是隔板(即第一和第二板)也可以是不透光的材料,这样隔板(即第一和第二板)的作用是隔离光。此外,隔板(即第一和第二板)也可以是普通金属材料,这样隔板(即第一和第二板)的作用是隔离光、电和磁。在采用重金属材料的情况下,隔板(即第一和第二板)的作用是隔离光、电、磁和电离辐射。In addition, although the above is an example in which heavy metal partitions (ie, first and second plates) are provided between adjacent units, the partitions (ie, first and second plates) may also be impermeable. The material of light, the effect of partition like this (ie first and second plate) is to isolate light. In addition, the spacers (ie, the first and second plates) can also be made of ordinary metal materials, so that the role of the spacers (ie, the first and second plates) is to isolate light, electricity and magnetism. In the case of heavy metal materials, the function of the partitions (ie the first and second plates) is to isolate light, electricity, magnetism and ionizing radiation.
尽管上述实施例中描述了本实用新型的阵列固体探测器用于辐射成像的情况,但是该探测器也可以用于其它辐射探测系统或设备。Although the above embodiments describe the use of the array solid detector of the present invention for radiation imaging, the detector can also be used in other radiation detection systems or devices.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101604023A (en) * | 2008-06-12 | 2009-12-16 | 清华大学 | Arrayed Solid State Detectors for Radiation Detection |
| CN108121014A (en) * | 2017-12-07 | 2018-06-05 | 公安部第三研究所 | Perspective view scatters array detection system and method |
| CN110124213A (en) * | 2019-05-15 | 2019-08-16 | 上海联影医疗科技有限公司 | A kind of multi-leaf optical grating and the radiotherapy unit with the multi-leaf optical grating |
| CN110691624A (en) * | 2017-05-30 | 2020-01-14 | 西部制药服务有限公司(以色列) | Vertical assembly of PCB |
| US11819666B2 (en) | 2017-05-30 | 2023-11-21 | West Pharma. Services IL, Ltd. | Modular drive train for wearable injector |
| US12357767B2 (en) | 2016-08-01 | 2025-07-15 | West Pharma. Services IL, Ltd. | Partial door closure prevention spring |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101604023A (en) * | 2008-06-12 | 2009-12-16 | 清华大学 | Arrayed Solid State Detectors for Radiation Detection |
| CN101604023B (en) * | 2008-06-12 | 2012-11-14 | 清华大学 | Array solid probe for radiation detection |
| US12357767B2 (en) | 2016-08-01 | 2025-07-15 | West Pharma. Services IL, Ltd. | Partial door closure prevention spring |
| CN110691624A (en) * | 2017-05-30 | 2020-01-14 | 西部制药服务有限公司(以色列) | Vertical assembly of PCB |
| CN110691624B (en) * | 2017-05-30 | 2020-10-27 | 西部制药服务有限公司(以色列) | Vertical Assembly of PCBs |
| US11819666B2 (en) | 2017-05-30 | 2023-11-21 | West Pharma. Services IL, Ltd. | Modular drive train for wearable injector |
| CN108121014A (en) * | 2017-12-07 | 2018-06-05 | 公安部第三研究所 | Perspective view scatters array detection system and method |
| CN110124213A (en) * | 2019-05-15 | 2019-08-16 | 上海联影医疗科技有限公司 | A kind of multi-leaf optical grating and the radiotherapy unit with the multi-leaf optical grating |
| CN110124213B (en) * | 2019-05-15 | 2020-12-11 | 上海联影医疗科技股份有限公司 | Multi-leaf collimator and radiotherapy device with same |
| US11331517B2 (en) | 2019-05-15 | 2022-05-17 | Shanghai United Imaging Healthcare Co., Ltd. | Multi-leaf collimator and radiation therapy device |
| US12128251B2 (en) | 2019-05-15 | 2024-10-29 | Shanghai United Imaging Healthcare Co., Ltd. | Multi-leaf collimator and radiation therapy device |
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