CN201163225Y - Air-floating measuring system for force and displacement - Google Patents

Abstract

The air-floating measuring system of force and displacement is characterized in that a floating body is set, and an air-floating system is set to support the floating body with airflow. The pressure chamber is provided with a pressure measuring chamber at the tail of the throttling device; the detection output signal is the pressure signal of the pressure chamber or the pressure measuring chamber, or the flow rate or flow velocity signal of the throttling device is the detection output signal. The utility model can effectively avoid inter-dimensional coupling when multi-dimensional force acts, accurately implement multi-dimensional force measurement, and enable the gas bearing to act as a force and displacement sensor at the same time.

Description

Air-floating measuring system for force and displacement

technical field

The utility model relates to a measuring system for force and displacement.

Background technique

At present, the application of air flotation technology is mainly in gas bearings, and the application of gas bearings as the "carrying" function of air flotation systems has achieved great success. However, the gas bearing can only be used to bear the load, but cannot measure the magnitude of the load on the floating body and the displacement of the floating body.

The existing force measurement methods include strain gauge type, piezoelectric element type, differential transformer type, capacitive displacement type and so on. However, for the measurement of multi-dimensional force, there is inevitably inter-dimensional coupling in this type of measurement method. The decoupling setting is not only complex in structure, but also cannot achieve complete decoupling. Various decoupling methods only reduce the influence of coupling to a certain degree of accuracy. .

So far, there is no relevant report on the measurement of force and displacement by means of pneumatic floating.

Utility model content

The utility model aims at avoiding the disadvantages of the above-mentioned prior art, and provides a device that can effectively avoid inter-dimensional coupling when multi-dimensional forces act, accurately implement multi-dimensional force measurement, and enable gas bearings to be used as force and displacement sensors at the same time. Air-floating measuring system for force and displacement.

The utility model solves the technical problem and adopts the following technical solutions:

The structural feature of the air-floating measuring system of the force and displacement of the utility model is that a floating body is provided, and an air-floating system supporting the floating body is provided with an air flow. A pressure chamber is formed on the surface, and a pressure measurement chamber is set at the tail of the throttling device; the detection output signal is the pressure signal of the pressure chamber or the pressure measurement chamber, or the flow rate or flow rate signal of the throttling device.

The utility model obtains the external force acting on the floating body or the displacement of the floating body under the action of the external force by measuring the gas pressure, flow or flow velocity signal in the air flotation system, and the pressure, flow and flow velocity in the air flotation system are related to the The one-to-one relationship between the measured external force acting on the floating body or the displacement of the floating body under the action of the external force is determined by the method of experimental calibration.

Compared with the prior art, the beneficial effects of the utility model are reflected in:

1. The utility model is a non-contact measurement system, which can effectively avoid errors caused by coupling between dimensions when multi-dimensional forces act, improve measurement accuracy, and accurately implement one-dimensional force measurement.

2. The utility model can be applied to the gas bearing, so that the gas bearing can not only bear the load, but also can detect the size, displacement and vibration of the load independently in real time, so that the gas bearing can also function as a force and displacement sensor.

3. The utility model can be widely used, including the timely detection of faults and hidden dangers through the real-time monitoring of the working conditions of the gas bearing itself; in the production of precision cutting, the cutting force can be detected in real time through the air-floating spindle or the air-floating guide rail Changes, so as to monitor the tool condition in real time.

Description of drawings

Fig. 1 is a schematic diagram of the principle of a specific embodiment of the present invention.

Fig. 2 is a schematic diagram of the elevation structure of the specific embodiment shown in Fig. 1 .

Fig. 3 is a schematic plan view of the specific embodiment shown in Fig. 1 .

Fig. 4 is a schematic diagram of the principle of the nozzle baffle in the embodiment shown in Fig. 1 .

Fig. 5 is a schematic diagram of the air flotation measurement of the utility model.

Numbers in Figure 1, Figure 2, Figure 3 and Figure 4: 1 rectangular floating plate, 1a floating plate top surface, 1b floating plate bottom surface, 1c floating plate left side, 1d floating plate right side, 1e floating plate front side, 1f floating plate rear Side, 2a top nozzle, 2b bottom nozzle, 2c left nozzle, 2d right nozzle, 2e front nozzle, 2f rear nozzle, 3 working table, 4 nozzle bracket, 5 air inlet, 6 pressure chamber, 7 Pressure measuring port, 51 floating body, 52 throttling device, 53 pressure chamber, 54 pressure measuring chamber.

The utility model will be further described below in conjunction with the accompanying drawings through specific embodiments.

Detailed ways

Referring to Fig. 5, the floating body 51 is set as a floating plate, and the air flotation system supporting the floating plate with air flow is set, the air flotation system is to form a pressure chamber 53 by the throttling device 52 communicated with the gas source and the surface of the floating plate. The tail of the throttling device 52 is provided with a pressure measuring chamber 54; the pressure signal of the pressure receiving chamber 53 or the pressure measuring chamber 54 is used as the detection output signal, or the flow rate or flow velocity signal of the throttling device 52 is used as the detection output signal. Each detection output signal is in one-to-one correspondence with the measured external force acting on the floating plate and the displacement of the floating plate under the action of the external force, and the corresponding relationship is determined by the method of experimental calibration.

Referring to Fig. 1, in order to realize the measurement of the six-dimensional force, a hexahedron rectangular floating plate 1 is set in this embodiment, corresponding to each surface of the rectangular floating plate 1, nozzles are respectively provided, and the surfaces corresponding to each nozzle and the rectangular floating plate 1 are It constitutes a nozzle baffle type pressure sensor, and the rectangular floating plate 1 as a baffle is completely suspended under the action of the air pressure of each nozzle, and the air cavity pressure signal of each nozzle is used as the detection output signal.

Referring to Fig. 2, Fig. 3 and Fig. 4, the corresponding settings in the specific implementation are:

On the four corners of the top surface 1a of the floating plate and the bottom surface 1b of the floating plate, there is a nozzle respectively, and on each surface of the left side 1c of the floating plate, the right side 1d of the floating plate, the front side 1e of the floating plate and the rear side 1f of the floating plate, there are two nozzles. There is one nozzle at each end, that is, there are four top nozzles 2a, four bottom nozzles 2b, two left nozzles 2c, two right nozzles 2d, two front nozzles 2e and two rear nozzles 2f, all The axis of each nozzle is perpendicular to the plate surface of the rectangular floating plate 1 corresponding as its baffle.

As shown in Figure 2 and Figure 3, the two nozzles on the corresponding positions on the two opposite surfaces of the rectangular floating plate 1 are arranged on the same axis position, so that the air chamber pressure of the two nozzles on the same axis position The difference is used as the detection signal for differential measurement.

The measurement method is as follows:

A coordinate system is established through the center 0 of the rectangular floating plate 1 as shown in FIG. 1 . The force of the top nozzle 2a and the bottom nozzle 2b is parallel to the Z axis, and the force of other nozzles is in the XOY plane and parallel to the X axis and the Y axis respectively.

Assume: the external force acting on the rectangular floating plate 1 is decomposed into component forces Fx, Fy, Fz along each coordinate axis, and moment Mx, My, Mz around each coordinate axis; each corner of the floating plate is parallel to the coordinate axis The buoyancy forces of the three nozzles acting on the floating plate meet at one point, and the meeting points at the four corners are A, B, C, and D; in the coordinate system, the coordinates of each point of A, B, C, and D are A (1/2, -1/2, 0), B (1/2, 1/2, 0), C (-1/2, -1/2, 0), D (-1/2, 1/2 2, 0); the variation of the force of each nozzle acting on the floating plate caused by the external force acting on the rectangular floating plate is respectively:

Point A: Fax (X-axis direction), _Fay (Y-axis direction), F _az+ (Z-axis positive direction), F _az- (Z-axis negative direction);

Point B: F _bx (X-axis direction), F _by (Y-axis direction), F _bz+ (Z-axis positive direction), F _bz- (Z-axis negative direction);

Point C: F _cx (X-axis direction), F _cy (Y-axis direction), F _cz+ (Z-axis positive direction), F _cz- (Z-axis negative direction);

Point D: F _dx (X-axis direction), F _dy (Y-axis direction), F _dz+ (Z-axis positive direction), F _dz- (Z-axis negative direction); then the difference in buoyancy of each group of nozzles is:

F _cax =F _cx -F _ax

F _dbx = F _dx -F _bx

F _aby ＝F _ay -F _by

F _cdy = F _cy -F _dy

F _az ＝F _az+ -F _az-

F _bz ＝F _bz+ -F _bz-

F _cz ＝F _cz+ -F _cz-

F _dz ＝F _dz+ -F _dz-

then:

F _x ＝-(F _cax +F _dbx ) (1)

F _y ＝-(F _aby +F _cdy ) (2)

F _z ＝-(F _az +F _bz +F _cz +F _dz ) (3)

M _x ＝(F _az +F _cz -F _bz -F _dz )1/2 (4)

M _y =(F _az +F _bz -F _cz -F _dz )1/2 (5)

M _z =(F _dbx -F _cax +F _cdy -F _aby )1/2 (6)

In specific implementation, a nozzle holder 4 is provided on the workbench 3 , the four bottom nozzles 2 b are fixedly arranged on the table surface of the workbench 3 , and other nozzles are arranged on the nozzle holder 4 .

Figure 4 shows the pressure sensor composed of the nozzle and the corresponding surface of the floating plate. When working, the compressed air of constant pressure leads to the air inlet 5 of each nozzle, the floating plate 1 is completely floated, and a pressure chamber 6 is formed between the nozzle and the baffle, and the pressure measurement port 7 of the pressure chamber can be used to measure The gas pressure out of the pressure chamber 6. If an external force acts on the floating plate 1, it will cause pressure changes in the pressure chambers of each pressure sensor. According to the change in air pressure in each pressure chamber, the pressure acting on the floating plate along each coordinate axis can be calculated according to the above formula. Component forces F _x , F _y , F _z , and moments M _x , M _y , M _z around each coordinate axis.

Claims (1)

1, the air-flotation type measuring system of power and displacement, it is characterized in that being provided with buoyancy body (51), and setting is with the air-flotation system of airflow supports buoyancy body (51), described air-flotation system is that the surface by the throttling device (52) that communicates with source of the gas and buoyancy body (51) forms pressure pocket (53), at the afterbody of throttling device (52) pressure measuring cavity (54) is set; With the pressure signal of described pressure pocket (53) or pressure measuring cavity (54) serves as to detect output signal, or serve as the detection output signal with the flow or the flow velocity signal of throttling device (52).

Images