CN201115929Y - Dressing controllable ultra-precision polishing machine - Google Patents

Abstract

A trimming and controllable ultra-precision polishing machine, including a machine base, a polishing disc, a polishing disc drive motor, a speed measuring mechanism, an intelligent control platform, a trimming ring, a linear guide rail, a reciprocating drive mechanism, a radial movement drive motor, and a rotary drive motor , the bracket plate is installed on the base, the base plate holder is installed on the bracket plate, two linear guide rails are horizontally installed under the bracket plate, the radial movement drive motor is installed on the support plate, and the radial movement drive motor and the reciprocating motion drive mechanism are transmitted Connection, the reciprocating drive mechanism can be horizontally slidably set on the linear guide rail, the trimming ring is installed under the reciprocating drive mechanism, the rotary drive motor is fixedly connected to the reciprocating drive mechanism, the output shaft of the rotary drive motor is connected to the trimming ring, A conditioning ring is positioned over an area of the polishing disc that is not covered by the base disc. The utility model realizes on-line trimming of the plane precision of the polishing pad, shortens the processing cycle, and has good uniformity on the surface of the processed workpiece.

Description

Dressing controllable ultra-precision polishing machine

technical field

The utility model relates to the field of polishing machines, in particular to an ultra-precision polishing machine (or grinding machine).

Background technique

Traditional grinding and polishing machines cannot trim the plane accuracy of the polishing disc (grinding disc) online during the processing of workpieces. As the processing continues, the plane accuracy of the polishing disc will become worse and worse. Off-line trimming plane precision. The current polishing machines (grinding machines) are non-intelligent or semi-intelligent, and cannot precisely intelligently control the speed and position of the polishing disc, the load on the workpiece and the dressing ring of the polishing disc, so it is difficult to guarantee The workpiece obtains extremely high plane precision during processing, and it is difficult to obtain high surface quality in a short period of time. Disadvantages: 1. It is impossible to realize the plane accuracy of online dressing of the polishing disc; 2. The processing cycle is prolonged; 3. The flatness of the polishing disc cannot be fully guaranteed.

According to the experimental results, it is found that improper surface dressing of the polishing disc will cause the deterioration of the surface of the polishing disc, and will cause a decrease in the removal rate, and the measurement results of the workpiece surface show that there is a great non-uniformity on the surface of the workpiece after grinding.

Utility model content

In order to overcome the shortcomings of the existing polishing machine that cannot realize the plane precision of the online trimming of the polishing pad, the processing cycle is long, and the surface of the processed workpiece has great non-uniformity, the utility model provides a method for realizing the plane precision of the online trimming of the polishing pad. , The finishing and controllable ultra-precision polishing machine that shortens the processing cycle and has a good uniformity on the surface of the processed workpiece.

The technical scheme that the utility model solves its technical problem adopts is:

A trimming and controllable ultra-precision polishing machine, including a machine base, a polishing disc, a polishing disc driving motor, a speed measuring mechanism and an intelligent control platform, the polishing disc is installed on the machine base through a main shaft, and the polishing disc driving motor The output shaft is connected to the main shaft by transmission, and the main shaft is connected by transmission to the speed measuring mechanism. The support plate is installed on the base, and the base plate holder is installed on the support plate. The base plate holder is provided with an arc section. The radian of the arc segment is not less than π/2, the arc segment is equipped with friction wheels, the number of friction wheels is at least 2, and the base plate is embedded in the arc segment and abuts against the friction wheel above, and there is a gap between the base disc and the arc segment, the base disc is located above the polishing disc; the ultra-precision polishing machine also includes a dressing ring, a linear guide rail, a reciprocating drive mechanism, a radial To move the drive motor and the rotation drive motor, the two linear guide rails are horizontally installed under the support plate, the radial movement drive motor is installed on the support plate, the radial movement drive motor and the reciprocating motion drive mechanism transmission connection, the reciprocating drive mechanism can be horizontally slidably set on the linear guide rail, the trimming ring is installed under the reciprocating drive mechanism, the rotary drive motor is fixedly connected with the reciprocating drive mechanism, and the The trimming ring is located above the area of the polishing disk outside the coverage of the substrate; the intelligent control platform is connected with the polishing disk drive motor, the speed measuring mechanism, the radial movement drive motor and the rotation drive motor.

As a preferred solution: a sleeve is installed under the reciprocating drive mechanism, and a dressing ring is installed at the lower end of the sleeve, and the polishing pad dressing mechanism also includes a dressing loading device, and the dressing loading device is installed vertically on the reciprocating On the motion drive mechanism, the trimming and loading device is connected to a pressure adjusting screw, the pressure adjusting screw is connected to the trimming ball head, the pressure adjusting screw is installed in the casing, and the intelligent control platform is connected to the trimming and loading device.

Further, the template holder is installed under the linear guide rail, the template loading device is installed on the template holder, the template loading transposition is connected to the pressure adjustment screw, and the pressure adjustment screw and the template ball The head is connected, and the intelligent control platform is connected to the substrate loading device.

As another preferred solution: the reciprocating drive mechanism includes a radial movement distance adjustment plate and a stroke adjustment plate, the output shaft of the radial movement drive motor is fixedly connected to the radial movement distance adjustment plate, the One end of the radial movement distance adjustment plate is matched with the groove on the stroke adjustment plate through the roller. The stroke adjustment plate can be horizontally slidably set on the linear guide rail. The trimming ring is installed under the stroke adjustment plate. The rotary driving motor is fixedly connected with the stroke adjusting plate.

Further, there are at least two grooves, and the at least two grooves are arranged parallel to each other; the radial movement distance adjustment plate is provided with a rectangular groove, and the radial movement driving motor The output shaft is fixedly installed on the rectangular groove by screws.

The trimming loading device and the substrate loading device are pneumatic loading devices or hydraulic loading devices.

The speed measuring mechanism is a grating measurement and control system.

The output shaft of the polishing disc drive motor is provided with a driving gear, the driving gear is connected to the driven gear through a synchronous belt, and the driven gear is installed on the main shaft; the bottom end of the main shaft is connected to an additional gear, and the additional gear The input shaft of the speed measuring mechanism is connected by a transmission belt.

The ultra-precision polishing machine includes at least one trimming ring and a base disc, and each trimming ring and base disc are respectively located in different areas of the polishing disc. The number of dressing rings and disc holders here depends on the actual processing needs, and also depends on the size ratio among the trimming rings, base discs and polishing discs, which can be two pairs, three pairs, four pairs or more pairs .

The output shaft of the rotary drive motor is provided with a driving gear, and the driving gear is connected to the driven gear through a synchronous belt, and the driven gear is installed on the shaft of the reciprocating drive mechanism, and the driven gear is socketed There are pulling rods, and the pulling rods are also sleeved on the trimming ring, and there are at least three pulling rods within the range of 2π radians.

The technical idea of the utility model is: add a trimming ring on the polishing machine, and the trimming ring is driven to rotate by the trimming ring rotary drive motor, and the trimming ring rotary drive motor is fixedly connected with the radial moving distance adjustment plate of the reciprocating motion drive mechanism, and the linear motion track is installed On the bracket plate, the trimming mechanism fixedly installed on the bracket plate radially moves the motor to drive the reciprocating motion driving mechanism to move on the linear motion track, thereby driving the trimming ring to reciprocate radially along the polishing disc. Press the power switch on the intelligent control panel, set the corresponding program according to different polishing discs, (1) adjust the rotation speed of the rotary drive motor, and drive the dressing ring to rotate through the pulley; (2) adjust the rotation of the radial drive motor The speed drives the dressing ring to move in the radial direction of the polishing disc and stay in different areas for a corresponding time. According to the radius of the polishing pad, adjust the radial movement distance of the reciprocating drive mechanism and install the adjusting plate on the motor shaft, so that the dressing ring can make automatic linear reciprocating motion in the predetermined stroke interval; change the rotation speed and linear reciprocation of the dressing ring The combination of movement speed and residence time, combined with the adjustment of dressing pressure, can meet the dressing requirements of polishing pads of different sizes and materials. The friction between the bottom surface of the dressing ring with flutes and the surface of the polishing pad is used for online dressing of the polishing disc surface, and an intelligent control system and a high-precision grating measurement and control system are used to control the speed of the dressing ring and the time the dressing ring stays in different areas of the polishing disc. High-precision control can be carried out within a short period of time, and high processing accuracy, surface quality and consistency of product quality can be obtained under the supporting process conditions.

Under a specific dressing program, by obtaining the velocity distribution on the surface of the workpiece, the average velocity distribution in the radial direction is calculated, and used to check the relationship between the average velocity and the removal rate. This mode can be used to find out the Optimal trimming procedure.

Divide the surface of the polishing pad into several areas, each area is defined by the distance between the center point of the polishing pad and the center point of the dressing ring, and set the relative residence time of the dressing ring in each area, then the dressing ring will be based on The set rotation speed, pressure and the relative residence time of each area move back and forth in the radial direction of the polishing pad, so that the polishing pad can achieve the purpose of flat dressing, that is, the dressing procedure is carried out simultaneously with the polishing procedure. The dressing ring sweeps back and forth within the radial setting range of the polishing disc, thereby removing the abrasive particles deposited on the surface of the polishing pad, the debris generated after the surface of the workpiece is worn, and scraping off the aging structure on the surface of the polishing pad.

Based on the principle of planetary motion design, it is guaranteed that each point on the workpiece processing surface has the same linear velocity relative to the polishing disc, and the polishing trajectory does not repeat. During processing, the dressing ring not only rotates, but also moves radially along the polishing pad, and the intelligent control system makes the dressing ring stay in different areas of the polishing pad for different times, so that its motion track can better cover the entire polishing pad Surface, to achieve uniform dressing of the polishing disc. This movement method of scraping the working surface of the polishing pad from time to time can always keep the polishing pad in the best working condition, and the removal rate of the processed surface of the workpiece can be kept within a fixed range, which will not be caused by the long-term use of the polishing pad. Finally, the surface of the polishing pad wears inconsistently everywhere, resulting in obvious differences in the removal amount of each point on the processed surface of the workpiece, resulting in unevenness of the processed surface of the workpiece.

The beneficial effects of the utility model are mainly manifested in: 1. The plane precision of the polishing disc can be trimmed online to obtain high plane machining precision; 2. The processing cycle of the workpiece can be shortened; 3. The parallelism can be trimmed: the workpiece can be corrected by eccentric load 4. Adjustable speed and advanced speed control mode: it can realize stepless speed regulation, and adopts "low speed start-stepless speed increase-constant speed processing-low speed dressing - The speed control mode of the grinding disc at low speed can ensure the technological requirements of ultra-precision grinding and polishing; 5. Precise control of the total number of revolutions: the ultra-precision grating measurement and control technology is used to control the accuracy of the total revolutions of the polishing disc within ±1° 6. Precise control of trimming ring and workpiece load: using intelligent sensors, closed-loop control trimming ring acts on the cylinder (or hydraulic cylinder) and the substrate acts on the medium in the cylinder (or hydraulic cylinder). Pressure, the accuracy can reach 0.02%, which can accurately and stably control the load on the trimming ring and the base plate to meet the requirements of precision machining; 7. Intelligent expert database: use the expert database control system for the best processing parameters to ensure the high quality and Consistency can effectively eliminate the adverse effects of human operation on the processing process.

Description of drawings

Figure 1 is a front view of a polishing pad conditioner in a polishing machine.

Fig. 2 is a top view of the trimming ring and the base plate in motion.

Fig. 3 is a schematic diagram of a reciprocating drive mechanism.

Figure 4 is a schematic diagram of the dressing ring rotation drive

Detailed ways

Below in conjunction with accompanying drawing, the utility model is further described.

Referring to Fig. 1, Fig. 2, Fig. 3 and Fig. 4, a dressing controllable ultra-precision polishing machine includes a machine base 5, a polishing disc 8, a polishing disc drive motor 1, a speed measuring mechanism 6 and an intelligent control platform 2, the The polishing disc 8 is installed on the base 5 through the main shaft, the output shaft of the polishing disc drive motor 1 is connected to the main shaft, the main shaft is connected to the speed measuring mechanism 6, and the support plate 15 is installed on the base 5. The base plate holder 12 is installed on the support plate 15, and the base plate holder 12 is provided with an arc section, the arc of the arc section is not less than π/2, and friction is installed on the arc section. wheel 11, the number of friction wheels 11 is at least 2, the base plate 10 is embedded in the arc segment and abuts on the friction wheel 11, and there is a gap between the base plate 10 and the arc segment, the The substrate 10 is located above the polishing disc 8; the ultra-precision polishing machine also includes a dressing ring 25, a linear guide rail 14, a radial reciprocating drive mechanism, a radial movement drive motor 17 and a rotary drive motor 16, the described Two linear guide rails 14 are horizontally installed below the support plate 15, and the radial movement drive motor 17 is installed on the support plate 15, and the radial movement drive motor 17 is connected with the reciprocating drive mechanism in transmission, and the reciprocating movement The motion driving mechanism can be horizontally slidably set on the linear guide rail 14, the trimming ring 25 is installed under the reciprocating motion driving mechanism, the rotating drive motor 16 is fixedly connected with the reciprocating motion driving mechanism, and the trimming ring 25 is located at The base plate of the polishing disc covers the upper part of the area; the intelligent control platform is connected with the polishing disc drive motor, the speed measuring mechanism, the radial movement drive motor and the rotation drive motor.

A sleeve is installed below the reciprocating drive mechanism, and a dressing ring 25 is installed at the lower end of the sleeve. The polishing pad dressing mechanism also includes a dressing loading device, and the dressing loading device is vertically installed on the reciprocating driving mechanism. The trimming and loading device is connected with a pressure adjusting screw, the pressure adjusting screw is connected with the trimming ring 25 by a ball joint, the pressure adjusting screw is installed in the sleeve, and the intelligent control platform is connected with the trimming and loading device.

The template holder 12 is installed below the linear guide rail 14, and the template loading device is installed on the template holder 12. The template loading transposition is connected to a pressure adjustment screw, and the pressure adjustment screw is connected to the template 10 ball joints, the intelligent control platform is connected to the substrate loading device.

The reciprocating drive mechanism includes a radial movement distance adjustment plate 19 and a stroke adjustment plate 21, the output shaft 18 of the radial movement drive motor 17 is fixedly connected with the radial movement distance adjustment plate 21, and the radial movement distance adjustment plate 21 is fixedly connected. One end of the moving distance adjusting plate 21 cooperates with the groove on the stroke adjusting plate 21 through the roller 20, the stroke adjusting plate 21 can be horizontally slidably set on the linear guide rail 14, and the trimming ring 25 is installed on the stroke adjusting plate 21 Below, the rotation drive motor 16 is fixedly connected with the stroke adjustment plate 21 .

There are at least two grooves, and the at least two grooves are arranged parallel to each other; the radial movement distance adjusting plate 19 is provided with a rectangular groove, and the radial movement driving motor 17 The output shaft is fixedly installed on the rectangular groove by screws.

The trimming loading device and the substrate loading device are pneumatic loading devices or hydraulic loading devices. The speed measuring mechanism 6 is a grating measurement and control system. The output shaft of the polishing disk drive motor 1 is provided with a driving gear, the driving gear is connected to the driven gear through a synchronous belt, and the driven gear is installed on the main shaft; the bottom end of the main shaft is connected to an additional gear, and the additional The gear is connected to the input shaft of the speed measuring mechanism through a transmission belt.

The ultra-precision polishing machine includes at least one trimming ring and a base disc, and each trimming ring and base disc are respectively located in different areas of the polishing disc. The number of dressing rings and disc holders here depends on the actual processing needs, and also depends on the size ratio among the trimming rings, base discs and polishing discs, which can be two pairs, three pairs, four pairs or more pairs .

The output shaft of the rotary driving motor 16 is provided with a driving gear, and the driving gear is connected with a driven gear through a synchronous belt, and the driven gear is installed on the shaft IV of the reciprocating drive mechanism, and the driven gear There are pulling rods 24 socketed, and the pulling rods 24 are also socketed on the trimming ring 25. There are at least three pulling rods within the range of 2π radians,

The base plate holder 12 is installed on the linear track 14 of the support plate 15 , the support plate 15 is installed on the column 26 , and the column 26 is fixedly installed on the machine base 5 .

The speed measuring mechanism 6 is a grating measurement and control system. The output shaft of the polishing disk drive motor 1 is provided with a driving gear, the driving gear is connected to the driven gear through a synchronous belt, and the driven gear is installed on the main shaft; the bottom end of the main shaft is connected to an additional gear, and the additional The gear is connected to the input shaft of the speed measuring mechanism through a transmission belt. The polishing disc drive motor 1 is a DC motor.

The specific working process of this embodiment is: through the intelligent control platform 2, the polishing disc drive motor 1 is steplessly adjusted, and the polishing disc drive motor drives the main shaft through the transmission mechanism on the shaft I and shaft II (structures such as synchronous belts and gears can be used) II rotates; one way drives the polishing disc 8 to rotate through the main shaft II, and at the same time, the polishing disc 8 drives the base disc 10 on the polishing disc to rotate through friction, and the workpiece 9 is installed on the bottom surface of the base disc 10; the other way is the transmission mechanism on the main shaft II and the shaft III 4 (Synchronous belt, gear and other structures can be used) to transmit the speed of the main shaft II to the grating measurement and control system, the grating measurement and control system measures the rotation parameters of its motor, and feeds back to the intelligent control platform 2. In addition, the intelligent control platform 2 controls the radial movement drive motor 17 of the finishing mechanism to rotate, and the output shaft 18 of the finishing mechanism radial movement drive motor drives the radial movement distance adjustment plate 19 installed on the motor shaft to rotate, and the radial movement distance adjustment plate The roller 20 at 19 one ends also rotates around the axis of drive motor 17 output shafts 18. The roller 20 cooperates with the groove of the stroke adjustment plate 21. Since the stroke adjustment plate 21 is slidably installed on the linear guide rail 14, when the roller 20 rotates with the motor shaft 18, the roller 20 pushes in the groove of the stroke adjustment plate 21. Stroke adjustment plate 21 makes reciprocating linear motion along linear guide rail 14. Rotation drive motor 16 is fixedly connected with stroke adjustment plate 21 of reciprocating motion drive mechanism, and is slidably installed on linear guide rail 14. They can slide freely on linear guide rail 14. , thus driving the dressing ring 25 to move radially along the polishing disc 8 . The intelligent control platform 2 controls the rotation of the trimming ring rotation drive motor 16, and the transmission mechanism 23 on the trimming ring rotation drive motor 16 drives the shaft V and the shaft IV (structures such as synchronous belts and gears can be used) to drive the driven drive socketed on the shaft IV. The pulling rod 24 of the gear rotates, and the lower end of the pulling rod 24 is sleeved on the trimming ring 25, thereby driving the trimming ring 25 to rotate. The intelligent control platform 2 uses the pressure sensor to control the pressure of the medium in the trimming ring acting cylinder (or hydraulic cylinder 22) and the base plate acting cylinder (or hydraulic cylinder) 13 by controlling the solenoid valve to open and close the medium channel, and then accurately control the pressure applied to the The load on the ring 25 and base plate 10 is adjusted. As shown in Figure 2 again, the main shaft II drives the polishing disc 8 to rotate, and the friction force on the polishing disc drives the base plate 10 to rotate, and the base plate 10 drives the friction wheel 11 on the base plate holder 12 to rotate, and at the same time the friction wheel 11 Reaction to the base plate 10 makes the base plate rotate in the base plate holder 12 . The trimming ring 25 is driven by the reciprocating drive mechanism, and the polishing disc surface is trimmed online through the friction between the bottom surface of the trimming ring 25 with chip removal grooves and the polishing disc surface.

Dressing rings are made of corrosion-resistant materials such as brass, stainless steel, ceramics, etc. The base plate 10 rotates stably in the ring of the base plate holder 12, and a dressing ring 25 with a chip removal groove at the bottom is used at the opposite position. The dressing ring 25 can be driven by the reciprocating drive mechanism to move radial movement. On the one hand on the polishing disk, the base disk 10 can be stably rotated, on the other hand the finishing ring 25 can constantly trim the surface of the polishing disk 8 on-line in the process of processing, and the finishing ring 25 is due to the linear velocity of each point on the surface of the polishing disk 8. It is different, and it can move radially on the surface of the polishing disc 8, and apply a load on the dressing ring through the dressing ring acting on the cylinder (or hydraulic cylinder) 22, so that the dressing effect is better and ideal. The base plate 10 (the workpiece 9 is installed on its bottom surface) is placed in the base plate holder, and the base plate on the base plate acts on the cylinder (or hydraulic cylinder) 13 to realize loading on the workpiece. After the polishing liquid is added from the polishing disc 8, it will flow out along the polishing liquid outlet 7. Adjusting the position of the base disc holder 12 on the linear track can make the base disc holder 12 drive the base disc 10 to move radially along the polishing disc 8, and the distance between the center of the base disc 10 and the center of the polishing disc 8 can be adjusted to obtain as much as possible High plane precision.

This embodiment can be applied to quartz crystals, piezoelectric crystals, Si substrates, gemstones, GaAs, optical glass, magnetic materials, structural ceramic materials, hard and brittle non-metallic material test pieces and flat mirror grinding and polishing of metal materials, in addition Grinding and polishing of the following materials is also possible:

(1) High-precision metal measuring tools (such as block gauges) and plane mirror grinding and polishing of mechanical parts.

(2) EPMA evaluation of minerals, AME, physical property tests, and flat mirror grinding and polishing of metallurgical and other analytical samples.

(3) Non-damaging angle grinding of the interface of composite materials and the metamorphic layer of the processed surface.

(4) Preparation and polishing of thin slices for TEM.

Claims (10)

1, a kind of finishing controlled ultraprecise polisher, comprise support, polishing disk, the polishing disk drive motors, velocity measurement mechanisms and intelligent control platform, described polishing disk is installed on the support by main shaft, the output shaft of described polishing disk drive motors is connected with spindle drive, described main shaft and velocity measurement mechanisms are in transmission connection, mounting bracket plate on the described support, described supporting plate is installed the basal disc retainer, described basal disc retainer is provided with segmental arc, the radian of described segmental arc is not less than pi/2, on the described segmental arc friction pulley is installed, the friction pulley number is at least 2, basal disc embeds described segmental arc and abuts against on the friction pulley, and gapped between described basal disc and the described segmental arc, and described basal disc is positioned at the top of polishing disk; It is characterized in that:

Described super precision polishing machine also comprises the finishing ring, line slideway, move back and forth driving mechanism, move radially drive motors and rotary drive motor, described two line slideway levels are installed in the below of supporting plate, the described drive motors that moves radially is installed on the supporting plate, the described drive motors that moves radially is in transmission connection with the reciprocating motion driving mechanism, described reciprocating motion driving mechanism can be sleeved on the line slideway horizontally slidingly, described finishing ring is installed in the below that moves back and forth driving mechanism, described rotary drive motor is fixedlyed connected with the reciprocating motion driving mechanism, the output shaft of described rotary drive motor is in transmission connection with the finishing ring, and described finishing ring is positioned at the top of the basal disc covering of polishing disk with exterior domain;

Described intelligent control platform connects polishing disk drive motors, velocity measurement mechanisms, moves radially drive motors and rotary drive motor.

2, finishing controlled ultraprecise polisher as claimed in claim 1, it is characterized in that: described reciprocating motion driving mechanism below mounting sleeve, the finishing ring is installed in described sleeve pipe lower end, described polishing pad finishing mechanism also comprises the finishing charger, described finishing charger is vertically mounted on and moves back and forth on the driving mechanism, described finishing charger connects pressure adjusting screw, described pressure adjusting screw is connected with the global head of finishing, described pressure adjusting screw is installed in the sleeve pipe, and described intelligent control platform connects the finishing charger.

3, finishing controlled ultraprecise polisher as claimed in claim 2, it is characterized in that: described basal disc retainer is installed in the below of line slideway, the basal disc charger is installed on the basal disc retainer, described basal disc loads transposition and connects pressure adjusting screw, described pressure adjusting screw is connected with the basal disc bulb, and described intelligent control platform connects the basal disc charger.

4, as the described finishing controlled ultraprecise polisher of one of claim 1-3, it is characterized in that: described reciprocating motion driving mechanism comprises and moves radially distance adjustment plate and stroke adjustment plate,

The described output shaft that moves radially drive motors with move radially the distance adjustment plate and fixedly connected, a described end that moves radially the distance adjustment plate cooperates with groove on the stroke adjustment plate by roller, described stroke adjustment plate can be sleeved on the line slideway horizontally slidingly, described finishing ring is installed in the below of stroke adjustment plate, and described rotary drive motor is fixedlyed connected with the stroke adjustment plate.

5, finishing controlled ultraprecise polisher as claimed in claim 4 is characterized in that: described groove has more than two at least, and described plural at least groove is the layout that is parallel to each other; The described distance adjustment plate that moves radially is provided with rectangular channel, and the described output shaft that moves radially drive motors is fixedly mounted on the described rectangular channel by screw.

6, finishing controlled ultraprecise polisher as claimed in claim 3 is characterized in that: described finishing charger and basal disc charger are Pneumatic loading or hydraulic loading device.

7, finishing controlled ultraprecise polisher as claimed in claim 4 is characterized in that: described velocity measurement mechanisms is the grating TT﹠C system.

8, as the described finishing controlled ultraprecise polisher of one of claim 1-3, it is characterized in that: the output shaft of described polishing disk drive motors is provided with driving gear, described driving gear by the driven gear of band connection synchronously, and described driven gear is installed on the main shaft; Described main shaft bottom connects additional gear, and described additional gear connects the power shaft of velocity measurement mechanisms by driving-belt.

9, finishing controlled ultraprecise polisher as claimed in claim 8 is characterized in that: described super precision polishing machine comprises at least one finishing ring and a basal disc, and described each finishing ring, basal disc lay respectively at the zones of different of polishing disk.

10, finishing controlled ultraprecise polisher as claimed in claim 4, it is characterized in that: the output shaft of described rotary drive motor is provided with driving gear, described driving gear by the driven gear of band connection synchronously, described driven gear be installed on the described reciprocating motion driving mechanism the axle on, described driven gear is socketed with dead man, the described dead man while, also above the socket finishing ring, described dead man had more than three in 2 π radian scopes at least.

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