CN201096350Y - Silicone hydride combustion tower - Google Patents
Silicone hydride combustion tower Download PDFInfo
- Publication number
- CN201096350Y CN201096350Y CNU2007200404392U CN200720040439U CN201096350Y CN 201096350 Y CN201096350 Y CN 201096350Y CN U2007200404392 U CNU2007200404392 U CN U2007200404392U CN 200720040439 U CN200720040439 U CN 200720040439U CN 201096350 Y CN201096350 Y CN 201096350Y
- Authority
- CN
- China
- Prior art keywords
- chamber
- combustion
- tower
- water tank
- tower body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 238000002485 combustion reaction Methods 0.000 title claims abstract description 82
- 150000004678 hydrides Chemical class 0.000 title claims description 23
- 229920001296 polysiloxane Polymers 0.000 title claims description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 59
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 48
- 239000007789 gas Substances 0.000 claims abstract description 36
- 239000002912 waste gas Substances 0.000 claims abstract description 26
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 24
- 239000007788 liquid Substances 0.000 claims abstract description 17
- 239000007921 spray Substances 0.000 claims description 35
- 239000000945 filler Substances 0.000 claims description 17
- 239000012530 fluid Substances 0.000 claims description 14
- 238000005516 engineering process Methods 0.000 claims description 12
- 239000013589 supplement Substances 0.000 claims description 10
- 230000001502 supplementing effect Effects 0.000 claims description 10
- 230000003020 moisturizing effect Effects 0.000 claims description 9
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 239000010865 sewage Substances 0.000 claims description 5
- 238000003825 pressing Methods 0.000 claims description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract description 14
- 229910000077 silane Inorganic materials 0.000 abstract description 14
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000004880 explosion Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 3
- 229910052809 inorganic oxide Inorganic materials 0.000 abstract description 2
- 230000002269 spontaneous effect Effects 0.000 description 4
- 238000007084 catalytic combustion reaction Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- VCOYRKXQRUGBKS-UHFFFAOYSA-N N.[Cl] Chemical compound N.[Cl] VCOYRKXQRUGBKS-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
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- Treating Waste Gases (AREA)
Abstract
The utility model relates to a device used for treating waste gas of inflammable inorganic oxide by adopting incineration method, in particular to a silane combustion tower. The silane combustion tower is provided with a tower body and a water tank, a combustion tube, a filling chamber, a sprinkling chamber and a de-liquid chamber, wherein the lower part of the combustion tube is arranged in the water tank, a ballasting cover is covered outside the combustion tube, a sprinkling device is installed in the cavity between the ballasting cover and the combustion tube, a combustion chamber is positioned at the bottom of the combustion tube, a pressure equalizing chamber is in the middle, a nitrogen protection chamber is at the top, a deslagging opening communicated to the outside the tower body is arranged at the bottom of the combustion chamber, a waste gas inlet opening and a compressed air inlet opening are arranged on the tube body of the combustion chamber, a one-way valve is installed at the waste gas inlet opening, and an overhaul mouth is arranged on the tower body and at the upper part of the filling chamber and the sprinkling chamber. The silane combustion tower solves the technical problems that the operating cost of the prior silane waste gas treatment equipment is high; when combustible gas encounters the failure of flame out, and gas break, etc., the danger of silane waste gas explosion is easy to happen; the waste gas treatment equipment can only be overhauled when the production equipment is stopped, etc.
Description
Technical field
The utility model relates to a kind of device that utilizes burning method to handle the waste gas of flammable inorganic oxide, particularly a kind of silicone hydride combustion tower.
Background technology
When adopting chemical vapor deposition (CVD) technology in solar cell manufacturing and the manufacturing field at integrated circuit and electronic component, for preventing to pollute and fire, must avoid discharging use in atmosphere the gas and/or the gas of these processes generation.Some gaseous compound is poisonous to the people in these waste gas, is flammable when at high temperature contacting with air, even burning that also can be spontaneous when contacting with air or any oxidant at normal temperatures.They mainly are silane and ammonia chlorine etc.The equipment of traditional processing silicone hydride waste gas mainly adopts in the burn mode of silane of burning imflammable gas; the shortcoming of this mode is: operating cost is higher; when faults such as imflammable gas occurs extinguishing, dies; explosion danger appears in silicone hydride waste gas easily; and production equipment must shut down and could overhaul waste gas treatment equipment, increases economic loss so undoubtedly.
Summary of the invention
The technical problems to be solved in the utility model is: the equipment operating cost that solves existing processing silicone hydride waste gas is higher; When faults such as imflammable gas occurs extinguishing, dies, explosion danger appears in silicone hydride waste gas easily; Production equipment must be shut down could be to technical problems such as waste gas treatment equipment overhaul; the utility model provides a kind of silicone hydride combustion tower; it utilizes silane to contact and the characteristics of spontaneous combustion with air; make silane at combustion chamber and air catalytic combustion; operating cost is low; safe and reliable, can production equipment not stopped status silicone hydride combustion tower is overhauled.
The technical scheme that its technical problem that solves the utility model adopts is: a kind of silicone hydride combustion tower, have tower body and water tank, the tower body top is provided with exhaust outlet, is provided with combustion barrel, filler chamber, spray chamber in the tower body and takes off liquid chamber, and the combustion barrel bottom is arranged in the water tank, combustion barrel is covered with the ballast cover, in the cavity between ballast cover and combustion barrel spray equipment is housed, the ballast cover is outward a filler chamber, and the filler chamber top is a spray chamber, spray equipment is housed in the spray chamber, and the spray chamber top is for taking off liquid chamber; Be provided with two perforated baffles in the combustion barrel, combustion barrel is separated into three chambers, the bottom is the combustion chamber, the middle part is for all pressing the chamber, and the top is the nitrogen protection chamber, and the bottom, combustion chamber has leads to the outer slag-drip opening of tower body, waste gas inlet and compressed air inlet port are arranged on the cylindrical shell of combustion chamber, check valve is housed on the waste gas inlet, the nitrogen air inlet is housed on the cylindrical shell of nitrogen protection chamber, there is the gas outlet on the top of the cylindrical shell of nitrogen protection chamber; On the tower body at filler chamber top and spray chamber place, have access hole; Tower body is equipped with water circulating pump outward, and the pump intake of water circulating pump feeds under the liquid level of water tank, delivery port connects each spray equipment by pipeline.The waste gas that contains silane and ammonia enters the combustion chamber of combustion barrel through check valve from waste gas inlet, charge into compressed air by compressed air inlet port to the combustion chamber, contact and the characteristics of spontaneous combustion with air according to silane, make silane at combustion chamber and air catalytic combustion, by the nitrogen air inlet to the indoor nitrogen that charges into of nitrogen protection, gas after the burning passes all the chamber of pressure and enters the nitrogen protection chamber and mix with nitrogen, with cooling of the gas after the burning and dilution, between the gas outlet inflow ballast cover and cavity between combustion barrel of gas by the combustion barrel top, gas is in cavity and spray equipment ejection and after the circulation fluid haptoreaction, gas enters spray chamber after filler chamber filters, once more with spray chamber in spray equipment ejection in and after the circulation fluid haptoreaction, gas is extracted out by air exhauster after liquid chamber takes off the liquid processing through taking off, and enters in the atmosphere; The spray equipment that is provided with in the cavity between ballast cover and combustion barrel also has the effect of cooling combustion tube.The SiO that waste gas burning produces in the combustion chamber
2Dust is discharged from the slag-drip opening of bottom, combustion chamber.The check valve of adorning on the waste gas inlet can prevent the into production equipment that flows backwards of the gas in the combustion chamber, improves the security performance of system.
For further improving the security of the use of silicone hydride combustion tower, the flame proof film is housed on the described perforated baffle, when the combustion chamber of combustion barrel or when all pressing the pressure of chamber excessive, the flame proof film is broken through, and plays the pressure release effect, prevents to set off an explosion because of pressure is excessive.
Described water tank bottom is provided with sewage draining exit, water tank upper is provided with water tank inlet, in in the water tank and circulation fluid cleannes when not reaching instructions for use, sewage draining exit by water tank bottom is discharged with circulation fluid in the water tank, inject new and circulation fluid by water inlet, with keep in the water tank in and the cleannes of circulation fluid.
Described combustion chamber has leads to the outer new wind gas supplementing opening of tower body, and new wind gas supplementing opening is equipped with check valve.When if compressed air occur to interrupt, rely on internal negative pressure to carry out tonifying Qi to the combustion chamber by new wind gas supplementing opening, when chamber pressure during greater than ambient pressure, the check valve that installs additional is closed automatically, discharges from new wind gas supplementing opening with the gas that prevents the combustion chamber.
Described nitrogen air inlet and compressed air inlet port all are equipped with gas flowmeter and air volume regulating valve, by air volume regulating valve, the air inflow of compressed air and nitrogen are regulated by air volume regulating valve according to exhaust gas flow.
Fluid flowmeter and flow control valve are housed on the described water pipe, according to exhaust gas flow by flow control valve in and the flow of circulation fluid regulate.
Water tank is provided with the technology water supplement port, and spray equipment is communicated with the technology water supplement port by the moisturizing pipeline, and the moisturizing pipeline is provided with the refill flow control valve, and the technology water supplement port is connected with running water pipe; When circulating pump breaks down; utilize the pressure of running water to carry out moisturizing, by the technology water supplement port to spray equipment in and circulation fluid, according to arts demand by in the refill flow control valve control and the flow of circulation fluid; need not to shut down and just can overhaul, do not influence production equipment.
The beneficial effects of the utility model are; silicone hydride combustion tower of the present utility model; it utilizes silane to contact and the characteristics of spontaneous combustion with air; make silane at combustion chamber and air catalytic combustion; operating cost is low; waste gas purification is effective, and is safe and reliable, and can production equipment not stopped status silicone hydride combustion tower is overhauled.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is the structural representation of silicone hydride combustion tower of the present utility model.
Fig. 2 is the vertical view of the perforated baffle in the utility model.
1. tower bodies among the figure, 1-1. exhaust outlet, 1-2. access hole, 2. water tank; 2-1. sewage draining exit, 2-2. water tank inlet, 2-3. overfall; 2-4. the technology water supplement port, 2-5. liquid level observation panel, 3. combustion barrel; 3-1. the combustion chamber, 3-2. all presses the chamber, 3-3. nitrogen protection chamber; 3-4. slag-drip opening, 3-5. waste gas inlet, 3-6. compressed air inlet port; 3-7. the nitrogen air inlet, 3-8. gas outlet, the new wind gas supplementing opening of 3-9.; 4. filler chamber, 5. spray chamber 6. takes off liquid chamber; 7. ballast cover, 8. spray equipment, 9. perforated baffle; 10. check valve, 11. water circulating pumps, 11-1. pump intake; 11-2. delivery port, 12. water pipes, 13. flame proof films; 14. gas flowmeter, 15. air volume regulating valves, 16. fluid flowmeters; 17. flow control valve, 18. moisturizing pipelines, 19. refill flow control valves.
The specific embodiment
Silicone hydride combustion tower of the present utility model shown in Fig. 1～2, have tower body 1 and water tank 2, tower body 1 top is provided with exhaust outlet 1-1, be provided with combustion barrel 3 in the tower body 1, filler chamber 4, spray chamber 5 and take off liquid chamber 6, water tank 2 bottoms are provided with sewage draining exit 2-1, combustion barrel 3 bottoms are arranged in the water tank 2, combustion barrel 3 is covered with ballast cover 7, in the cavity that ballast cover 7 and combustion barrel are 3 spray equipment 8 being housed, is filler chamber 4 outside the ballast cover 7, and filler chamber 4 is filled with stainless steel Bao Er ring filler, filler chamber 4 tops are spray chamber 5, spray equipment 8 is housed in the spray chamber 5, and spray chamber 5 tops are taken off liquid chamber 6 and are filled with stainless steel Bao Er ring filler for taking off liquid chamber 6; Be provided with two perforated baffles 9 in the combustion barrel 3, combustion barrel 3 is separated into three chambers, the bottom is combustion chamber 3-1, the middle part is for all pressing chamber 3-2, the top is nitrogen protection chamber 3-3, flame proof film 13 is housed on the perforated baffle 9, the slag-drip opening 3-4 that leads to outside the tower body 1 is arranged at combustion chamber 3-1 bottom, waste gas inlet 3-5 is arranged on the cylindrical shell of combustion chamber 3-1, compressed air inlet port 3-6 and new wind gas supplementing opening 3-9, waste gas inlet 3-5 is equipped with check valve 10, nitrogen air inlet 3-7 is housed on the cylindrical shell of nitrogen protection chamber 3-3, there is gas outlet 3-8 on the top of the cylindrical shell of nitrogen protection chamber 3-3, and nitrogen air inlet 3-7 and compressed air inlet port 3-6 all are equipped with gas flowmeter 14 and air volume regulating valve 15; On the tower body 1 at filler chamber 4 tops and spray chamber 5 places, have access hole 1-2; The tower body 1 outer water circulating pump 11 that is equipped with, the pump intake 11-1 of water circulating pump 11 feeds under the liquid level of water tank 2, delivery port 11-2 connects each spray equipment 8 by water pipe 12, fluid flowmeter 16 and flow control valve 17 are housed on the water pipe 12, water tank 2 tops are provided with overfall 2-3, technology water supplement port 2-4 and water tank inlet 2-2, spray equipment 8 is communicated with technology water supplement port 2-4 by moisturizing pipeline 18, moisturizing pipeline 18 is provided with refill flow control valve 19, water tank 2 walls are provided with liquid level observation panel 2-5, be used for observing water tank 2 in and the liquid level of circulation fluid, technology water supplement port 2-4 is connected with running water pipe, when water circulating pump 11 breaks down, utilize the pressure of running water to carry out moisturizing.
Claims (8)
1. silicone hydride combustion tower, it is characterized in that: have tower body (1) and water tank (2), tower body (1) top is provided with exhaust outlet (1-1), be provided with combustion barrel (3) in the tower body (1), filler chamber (4), spray chamber (5) and take off liquid chamber (6), combustion barrel (3) bottom is arranged in the water tank (2), combustion barrel (3) is covered with ballast cover (7), in the cavity between ballast cover (7) and combustion barrel (3) spray equipment (8) is housed, ballast cover (7) is outer to be filler chamber (4), filler chamber (4) top is spray chamber (5), spray equipment (8) is housed in the spray chamber (5), and spray chamber (5) top is for taking off liquid chamber (6); Be provided with two perforated baffles (9) in the combustion barrel (3), combustion barrel (3) is separated into three chambers, the bottom is combustion chamber (3-1), the middle part is for all pressing chamber (3-2), the top is nitrogen protection chamber (3-3), bottom, combustion chamber (3-1) has leads to the outer slag-drip opening (3-4) of tower body (1), waste gas inlet (3-5) and compressed air inlet port (3-6) are arranged on the cylindrical shell of combustion chamber (3-1), waste gas inlet (3-5) is equipped with check valve (10), nitrogen air inlet (3-7) is housed on the cylindrical shell of nitrogen protection chamber (3-3), and there is gas outlet (3-8) on the top of the cylindrical shell of nitrogen protection chamber (3-3); On the tower body (1) that filler chamber (4) top and spray chamber (5) are located, have access hole (1-2); The outer water circulating pump (11) that is equipped with of tower body (1), the pump intake (11-1) of water circulating pump (11) feed under the liquid level of water tank (2), delivery port (11-2) connects each spray equipment (8) by water pipe (12).
2. silicone hydride combustion tower according to claim 1 is characterized in that: flame proof film (13) is housed on the described perforated baffle (9).
3. silicone hydride combustion tower according to claim 1 and 2 is characterized in that: described water tank (2) bottom is provided with sewage draining exit (2-1), and water tank (2) top is provided with water tank inlet (2-2).
4. silicone hydride combustion tower according to claim 1 and 2 is characterized in that: described combustion chamber (3-1) has the new wind gas supplementing opening (3-9) that leads to outside the tower body (1), and new wind gas supplementing opening (3-9) is equipped with check valve (10).
5. silicone hydride combustion tower according to claim 3 is characterized in that: described combustion chamber (3-1) has the new wind gas supplementing opening (3-9) that leads to outside the tower body (1), and new wind gas supplementing opening (3-9) is equipped with check valve (10).
6. silicone hydride combustion tower according to claim 1 and 2 is characterized in that: described nitrogen air inlet (3-7) and compressed air inlet port (3-6) all are equipped with gas flowmeter (14) and air volume regulating valve (15).
7. silicone hydride combustion tower according to claim 1 and 2 is characterized in that: fluid flowmeter (16) and flow control valve (17) are housed on the described water pipe (12).
8. silicone hydride combustion tower according to claim 1 and 2, it is characterized in that: described water tank (2) is provided with technology water supplement port (2-4), spray equipment (8) is communicated with technology water supplement port (2-4) by moisturizing pipeline (18), and moisturizing pipeline (18) is provided with refill flow control valve (19).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200404392U CN201096350Y (en) | 2007-07-30 | 2007-07-30 | Silicone hydride combustion tower |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200404392U CN201096350Y (en) | 2007-07-30 | 2007-07-30 | Silicone hydride combustion tower |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201096350Y true CN201096350Y (en) | 2008-08-06 |
Family
ID=39923403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200404392U Expired - Lifetime CN201096350Y (en) | 2007-07-30 | 2007-07-30 | Silicone hydride combustion tower |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201096350Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103574624A (en) * | 2012-07-31 | 2014-02-12 | 苏州仕净环保设备有限公司 | Silane burning tower |
| CN109236239A (en) * | 2018-08-15 | 2019-01-18 | 贵州大学 | A kind of shale gas well gas testing combustion barrel |
-
2007
- 2007-07-30 CN CNU2007200404392U patent/CN201096350Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103574624A (en) * | 2012-07-31 | 2014-02-12 | 苏州仕净环保设备有限公司 | Silane burning tower |
| CN109236239A (en) * | 2018-08-15 | 2019-01-18 | 贵州大学 | A kind of shale gas well gas testing combustion barrel |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Changzhou Hengwei Purifying Equipment Co., Ltd. Assignor: Zhang Wenguang Contract fulfillment period: 2009.3.10 to 2017.3.9 Contract record no.: 2009320000462 Denomination of utility model: Silicone hydride combustion tower Granted publication date: 20080806 License type: Exclusive license Record date: 20090319 |
|
| LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2009.3.10 TO 2017.3.9; CHANGE OF CONTRACT Name of requester: CHANGZHOU HENGWEI CLEANSE EQUIPMENT CO., LTD. Effective date: 20090319 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20080806 Effective date of abandoning: 20070730 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20080806 Effective date of abandoning: 20070730 |