CN201034982Y - A double-layer PVDF piezoelectric film line focused ultrasonic probe - Google Patents
A double-layer PVDF piezoelectric film line focused ultrasonic probe Download PDFInfo
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Abstract
本实用新型涉及一种双层PVDF压电薄膜线聚焦超声探头,属于无损检测技术领域。包括有探头外壳、激励用压电元件、接收用压电元件、保护层、激励接收耦合层、背衬层、激励信号输入通道和接收信号输出通道。所述的激励用压电元件为上表面附着激励用压电元件负电极(11)并下表面附着激励用压电元件正电极(12)的激励用PVDF压电薄膜(14);所述的接收用压电元件为上表面附着接收用压电元件正电极(9)并下表面附着接收用压电元件负电极(10)的接收用PVDF压电薄膜(7)。本探头针对材料弹性常数声学测量时域波形分析方法而设计,可以同时测量材料表面波波速和纵波波速,信号信噪比高,测量盲区小。
The utility model relates to a double-layer PVDF piezoelectric film line focused ultrasonic probe, which belongs to the technical field of non-destructive testing. It includes a probe shell, a piezoelectric element for excitation, a piezoelectric element for reception, a protective layer, an excitation-reception coupling layer, a backing layer, an excitation signal input channel and a receiving signal output channel. The piezoelectric element for excitation is an excitation PVDF piezoelectric film (14) with the negative electrode (11) of the piezoelectric element for excitation attached to the upper surface and the positive electrode (12) of the piezoelectric element for excitation attached to the lower surface; The receiving piezoelectric element is a receiving PVDF piezoelectric film (7) with a receiving piezoelectric element positive electrode (9) attached to its upper surface and a receiving piezoelectric element negative electrode (10) attached to its lower surface. This probe is designed for the time-domain waveform analysis method of the acoustic measurement of the elastic constant of the material. It can measure the surface wave velocity and the longitudinal wave velocity of the material at the same time. The signal-to-noise ratio is high and the measurement blind zone is small.
Description
技术领域:Technical field:
一种采用双层PVDF压电薄膜为换能元件的线聚焦超声探头,用于纵波波速及漏表面波波速的测量,进而实现对材料力学性能的评价,属于无损检测技术领域。A line-focused ultrasonic probe using a double-layer PVDF piezoelectric film as a transducer element is used to measure the wave velocity of longitudinal waves and leaky surface waves, thereby realizing the evaluation of the mechanical properties of materials, and belongs to the technical field of non-destructive testing.
背景技术:Background technique:
材料科学发展迅速,各种新型材料不断涌现,许多材料表现出超常的力学性能,如:纳米铜或钯的块体材料其硬度比常规材料提高50倍,屈服强度提高12倍;纳米碳化硅的断裂韧性比常规材料提高100倍;纳米铁多晶体的断裂强度比常规铁高12倍;纳米铜离子密堆的铜片,具有惊人的超延展性,达到5100%,远远超出相同纯度的普通铜片的延展性。要准确评价各种新型材料的力学性能,就必须对材料进行力学性能测试。然而许多新型材料受特殊的制备工艺所致具有一次成型、尺寸小、制造成本高等特点,如目前所能制备的块体纳米材料,其尺寸大约为:直径小于100mm,厚度小于10mm,且根据不同的工艺,所能制备的尺寸也不相同。在这种情况下,对材料进行力学性能测试,无法采用如破坏试验等常规的力学性能测试方法。探索和开发新型的测试方法与仪器成为国内外学者的研究热点。近年来,人们研究并提出了许多新型力学性能测试方法,如:纳米压痕技术、声学显微镜技术、表面声波技术、激光超声技术等。With the rapid development of material science, various new materials are constantly emerging, and many materials show extraordinary mechanical properties, such as: the hardness of nano-copper or palladium block materials is 50 times higher than that of conventional materials, and the yield strength is 12 times higher; nano-silicon carbide The fracture toughness is 100 times higher than that of conventional materials; the fracture strength of nano-iron polycrystals is 12 times higher than that of conventional iron; the copper sheets densely packed with nano-copper ions have amazing super-ductility, reaching 5100%, far exceeding ordinary iron with the same purity. Ductility of copper sheet. To accurately evaluate the mechanical properties of various new materials, it is necessary to test the mechanical properties of the materials. However, many new materials have the characteristics of one-time molding, small size, and high manufacturing cost due to special preparation processes. Depending on the technology, the sizes that can be prepared are also different. In this case, conventional mechanical performance testing methods such as destructive testing cannot be used to test the mechanical properties of materials. Exploring and developing new testing methods and instruments has become a research hotspot for scholars at home and abroad. In recent years, people have researched and proposed many new mechanical property testing methods, such as: nano-indentation technology, acoustic microscope technology, surface acoustic wave technology, laser ultrasonic technology, etc.
声学显微镜是为对材料内部特性进行高分辨率成像而设计,其主要目的是研究材料内部不同点的力学性能差异,其侧重点在于研究材料的微观特性,优点在于其高分辨率,其结构特点为均采用传统的压电陶瓷或压电晶体为换能元件,通过球面声透镜将超声波聚焦为点,孔径较小,设备复杂而昂贵,且无法用于对材料的各向异性的分析。而对于材料弹性常数的测量及各向异性的分析,往往更关心材料的宏观特性,高分辨率并不是必须的,因此,针对小尺寸材料弹性常数测量及各向异性分析,设计一种简单实用的线聚焦探头对于材料力学性能的评价很有必要。The acoustic microscope is designed for high-resolution imaging of the internal properties of materials. Its main purpose is to study the difference in mechanical properties at different points inside the material. Its focus is on the microscopic properties of materials. Because traditional piezoelectric ceramics or piezoelectric crystals are used as transducer elements, ultrasonic waves are focused into points through spherical acoustic lenses, the aperture is small, the equipment is complex and expensive, and it cannot be used to analyze the anisotropy of materials. For the measurement of material elastic constant and the analysis of anisotropy, we often pay more attention to the macroscopic properties of the material, and high resolution is not necessary. Therefore, for the measurement of small-sized material elastic constant and anisotropy analysis, a simple and practical The line focusing probe is necessary for the evaluation of the mechanical properties of materials.
专利ZL.2005200053518提出了一种可以同时测量表面波波速和纵波波速的单层PVDF薄膜线聚焦探头,此类探头通过同时测量材料表面波波速和纵波波速,可以用于小尺寸材料弹性常数测量,探头包括有压电元件、浇铸于压电元件上的背衬层及由壳体和壳盖组成的外壳几个主要部分。此型探头中的换能元件采用单层PVDF薄膜,既作为激励换能器,又作为接收换能器。在实际使用过程中,PVDF薄膜先作为激励换能器激励出超声波激励,经历一定时间间隔后,又要作为接收换能器接收超声波回波。PVDF薄膜会被较强电信号激励,激励后会出现饱和现象,饱和将持续一段时间,此时间内PVDF将无法正常接收超声波回波。因此,此型探头存在较大的测量盲区,使用中,在探头与试件距离较近时不能得到正常检测效果。Patent ZL.2005200053518 proposes a single-layer PVDF film line focusing probe that can simultaneously measure surface wave velocity and longitudinal wave velocity. This type of probe can be used to measure elastic constants of small-sized materials by simultaneously measuring surface wave velocity and longitudinal wave velocity of materials. The probe includes a piezoelectric element, a backing layer cast on the piezoelectric element, and several main parts of the shell consisting of a shell and a shell cover. The transducer element in this type of probe adopts a single-layer PVDF film, which is used as both an excitation transducer and a receiving transducer. In actual use, the PVDF film first acts as an excitation transducer to excite ultrasonic excitation, and after a certain time interval, it also acts as a receiving transducer to receive ultrasonic echoes. The PVDF film will be excited by a strong electrical signal. After the excitation, there will be a saturation phenomenon, and the saturation will last for a period of time. During this time, PVDF will not be able to receive ultrasonic echoes normally. Therefore, this type of probe has a large measurement blind area, and the normal detection effect cannot be obtained when the distance between the probe and the test piece is close during use.
实用新型内容:Utility model content:
本实用新型的目的是研制一种双层PVDF压电薄膜线聚焦超声探头,分别通过专用的激励层和接收层,产生和接收超声信号,可以用于测量材料表面波波速和纵波波速,进而测量材料的弹性常数(杨氏模量和泊松比),克服单层PVDF薄膜线聚焦探头测量盲区大的缺点,在探头与被测试件相距较近时仍然获得较好的实验效果。The purpose of this utility model is to develop a double-layer PVDF piezoelectric film line focused ultrasonic probe, which generates and receives ultrasonic signals through a dedicated excitation layer and a receiving layer, which can be used to measure the surface wave velocity and longitudinal wave velocity of materials, and then measure The elastic constant of the material (Young's modulus and Poisson's ratio) overcomes the shortcoming of a single-layer PVDF film line focusing probe with a large measurement blind area, and still obtains good experimental results when the probe is relatively close to the tested object.
一种双层PVDF压电薄膜线聚焦超声探头,如图1所示,探头包括有探头外壳、激励用压电元件、接收用压电元件、保护层、激励接收耦合层、背衬层、激励信号输入通道和接收信号输出通道。A double-layer PVDF piezoelectric film line focused ultrasonic probe, as shown in Figure 1, the probe includes a probe shell, a piezoelectric element for excitation, a piezoelectric element for reception, a protective layer, an excitation receiving coupling layer, a backing layer, an excitation Signal input channel and received signal output channel.
其特征在于:It is characterized by:
所述的探头外壳为中空立方体下表面经过加工为上凹弧形的壳体6顶部配合壳盖3组成;The probe housing is composed of a hollow cube lower surface processed into an upwardly concave arc-
所述的激励用压电元件为上表面附着激励用压电元件负电极11并下表面附着激励用压电元件正电极12的激励用PVDF压电薄膜14;The piezoelectric element for excitation is an excitation PVDF
所述的接收用压电元件为上表面附着接收用压电元件正电极9并下表面附着接收用压电元件负电极10的接收用PVDF压电薄膜7;The receiving piezoelectric element is a receiving PVDF
所述壳体6下表面弧度大于待测材料的瑞利角的两倍;The radian of the lower surface of the
所述激励用PVDF压电薄膜14紧密粘附在壳体6下表面,呈与壳体6下表面弧度一致的上凹弧形;The PVDF
所述激励接收耦合层8紧密粘附在激励用PVDF压电薄膜14上表面,呈与激励用压电薄膜14上表面弧度一致的上凹弧形;The excitation-receiving
所述接收用PVDF压电薄膜7紧密粘附在激励接收耦合层8上表面,呈与激励接收耦合层8上表面弧度一致的上凹弧形;The PVDF
所述保护层13紧密附着于激励用PVDF压电薄膜14下表面,呈与激励用PVDF压电薄膜14下表面弧度一致的上凹弧形;The
所述激励信号输入通道由激励信号输入通道的信号正极通路和激励信号输入通道的信号负极通路组成;The excitation signal input channel is composed of a signal positive path of the excitation signal input channel and a signal negative path of the excitation signal input channel;
所述激励信号输出通道由激励信号输出通道的信号正极通路和激励信号输出通道的信号负极通路组成;The excitation signal output channel is composed of a signal positive path of the excitation signal output channel and a signal negative path of the excitation signal output channel;
所述激励信号输入通道的信号正极通路由激励用压电元件正电极12、激励用压电元件正电极引线17、激励信号输入插座1正极连接而成;The positive signal path of the excitation signal input channel is formed by connecting the
所述激励信号输入通道的信号负极通路由激励用压电元件负电极11、激励用压电元件负电极引线16、激励信号输入插座1负极连接而成;The signal negative path of the excitation signal input channel is formed by connecting the negative electrode 11 of the piezoelectric element for excitation, the negative
所述接收信号输出通道的信号正极通路由接收用压电元件正电极9、接收用压电元件正电极引线5、接收信号输出插座2正极连接而成;The signal positive path of the receiving signal output channel is formed by connecting the
所述接收信号输出通道的信号负极通路由接收用压电元件负电极10、接收用压电元件负电极引线4、接收信号输出插座2负极连接而成;The signal negative path of the receiving signal output channel is formed by connecting the
所述背衬层15浇铸于接收用PVDF压电薄膜7上。The
上述采用的PVDF压电薄膜厚度小于100μm,长度大于20μm。The PVDF piezoelectric film used above has a thickness less than 100 μm and a length greater than 20 μm.
本探头为超声发射接收双通道探头,采用通用的脉冲激励接收装置激励接收信号,使用时须水浸耦合。本探头针对材料弹性常数声学测量时域波形分析方法而设计,可以同时测量材料表面波波速和纵波波速,信号信噪比高,测量盲区小。This probe is a dual-channel probe for ultrasonic transmission and reception. It uses a general-purpose pulse excitation receiving device to excite and receive signals, and must be coupled in water when used. This probe is designed for the time-domain waveform analysis method of the acoustic measurement of the elastic constant of the material. It can measure the surface wave velocity and the longitudinal wave velocity of the material at the same time. The signal-to-noise ratio is high and the measurement blind area is small.
附图说明:Description of drawings:
附图1:探头结构示意图Figure 1: Schematic diagram of probe structure
1、激励信号输入插座,2、接收信号输出插座,3、壳盖,4、接收用压电元件负电极引线,5、接收用压电元件正电极引线,6、壳体,7、接收用PVDF薄膜,8、激励接收耦合层,9、接收用压电元件正电极,10、接收用压电元件负电极,11、激励用压电元件负电极,12、激励用压电元件正电极,13、保护层,14、激励用PVDF薄膜,15、背衬层,16、激励用压电元件负电极引线,17、激励用压电元件正电极引线,18、沉头螺钉1. Exciting signal input socket, 2. Receiving signal output socket, 3. Shell cover, 4. Negative electrode lead of piezoelectric element for receiving, 5. Positive electrode lead of piezoelectric element for receiving, 6. Shell, 7. Receiving PVDF film, 8. Exciting and receiving coupling layer, 9. Positive electrode of piezoelectric element for receiving, 10. Negative electrode of piezoelectric element for receiving, 11. Negative electrode of piezoelectric element for exciting, 12. Positive electrode of piezoelectric element for exciting, 13. Protective layer, 14. PVDF film for excitation, 15. Backing layer, 16. Negative electrode lead wire of piezoelectric element for excitation, 17. Positive electrode lead wire of piezoelectric element for excitation, 18. Countersunk screw
附图2:探头应用系统原理图Figure 2: Schematic Diagram of Probe Application System
19、探头,20、水,21、材料试块,22、脉冲发射接收仪,23、示波器,24、计算机19. Probe, 20. Water, 21. Material test block, 22. Pulse transmitter and receiver, 23. Oscilloscope, 24. Computer
具体实施方式:Detailed ways:
本实用新型的具体技术方案参见图1。The concrete technical scheme of the utility model is referring to Fig. 1.
本探头壳体6及壳盖3采用不锈钢材料加工,壳体6设计为35×20×30mm(长×宽×高)矩形上下贯通壳体,壁厚2mm,上端平齐,两个侧面(宽度)底端平齐,另外两个相对侧面底端加工成圆弧形。因为探头的聚焦参数取决于压电薄膜14的弧度,而对于本探头来说,探头制作完成后压电薄膜的弧度取决于探头壳体的弧度,所以探头壳体圆弧端弧度大小要根据所需的聚焦孔径角来设计。聚焦孔径角的确定主要是要考虑表面波的产生,根据声学理论,表面波是当入射角等于材料的瑞利角时产生并沿材料表面传播的波,所以,要使探头产生的声波在材料表面产生表面波,就需要探头的半孔径角下限要大于待测材料的瑞利角;而如果弧度过大,会增加探头制作难度,同时会使表面波传播路径变短,不利于波形分析。根据超声波入射不同材料时的瑞利角数据,探头的孔径角应在60°~80°范围内。在探头实际设计中采用孔径角为72°。The
PVDF压电薄膜14和PVDF压电薄膜7作为压电换能元件,两者为同一型号的器件,分别发挥其逆压电效应和正压电效应,起着超声波产生与接收的作用,为本探头的最重要元件,其性能优劣直接决定探头功能的好坏。设计中主要须考虑的参数是压电薄膜的厚度及覆于其表面的电极形状尺寸。不同厚度的压电薄膜其固有的中心频率亦不相同,压电薄膜越厚,其中心频率也就越低,导致探头整体中心频率降低,降低测量测量分辨率,对于本探头来说,要使测量精度得到保证,探头中心频率应该在5MHz以上,要达到此要求,所用压电薄膜厚度应小于50μm。本探头测量表面波波速是通过波形时域分析的方法,所以要求表面波传播的时间足够长,故要求探头口径不能过小,即要求压电薄膜长度不能太小,应设计长度在20mm以上。理论上说,在条件允许的情况下,压电薄膜的厚度越小越好,但因为压电薄膜为外购元件,厚度及电极形状尺寸局限于厂商产品的具体情况,所以只能在满足要求的情况下适当选取。本探头所选用的压电薄膜厚度为28μm,电极尺寸为30×12mm。PVDF
PVDF压电薄膜为很薄的薄膜材料,耐高温性能有限,一般不能超过100℃,所以电极导线与压电薄膜表面电极的连接不能采用常规的焊接方法。在目前其它种类压电薄膜传感器的制作中,电极引线多采用机械固定的方式连接,如铆接。本探头结构决定电极引线处不能占有过大空间,同时又要考虑压电薄膜与壳体的固定问题,故机械固定方法不适用。本探头采用了导电胶粘接的方法。本探头所用压电薄膜上下表面均覆有电极,实际设计中压电薄膜一端向上弯折一段后,弯折段正电极与正极引线粘接,弯折段负电极与负极引线粘接。PVDF piezoelectric film is a very thin film material with limited high temperature resistance, generally not exceeding 100°C, so the connection between the electrode wire and the surface electrode of the piezoelectric film cannot use conventional welding methods. In the production of other kinds of piezoelectric film sensors, the electrode leads are mostly connected by mechanical fixing, such as riveting. The structure of the probe determines that the electrode leads cannot occupy too much space, and at the same time, the fixing problem between the piezoelectric film and the shell must be considered, so the mechanical fixing method is not applicable. The probe adopts the method of conductive adhesive bonding. The upper and lower surfaces of the piezoelectric film used in this probe are covered with electrodes. In the actual design, after one end of the piezoelectric film is bent upward for a section, the positive electrode of the bent section is bonded to the positive lead, and the negative electrode of the bent section is bonded to the negative lead.
激励接收耦合层8位于激励用PVDF压电薄膜14和接收用PVDF压电薄膜7之间,用来将两片独立的压电薄膜粘接在一起。此层由厚度小于0.5mm的硅橡胶制成。The excitation-receiving
当压电元件受到电脉冲激励时,它不但向前方辐射声能,而且还向后方辐射。来自前方的回波信号中包含着被检材料的信息,但是从后面反射来的干扰杂波增加了接收信号的复杂性,给实际检测带来了很大困难,这一部分杂波信号需要消除,因此在超声探头设计中需要设计背衬层;此外,如果没有背衬层,压电元件受电激励而振动,当电脉冲停止激励后,压电元件却不会立即停止振动,而是要持续一段时间后才会停止。这样,脉冲-回波持续时间也会很长,使探头的分辨力下降。背衬层的另外一个作用就是使激励脉冲停止后,压电元件能瞬间停振,这样接收到的脉冲宽度比较小,可以提高探头的分辨力。背衬采用环氧树脂和钨粉混合固化剂按公知技术配制,使用的是WSR6101环氧树脂和T31环氧树脂固化剂。When the piezoelectric element is excited by an electric pulse, it not only radiates sound energy forward, but also radiates backward. The echo signal from the front contains the information of the inspected material, but the interference clutter reflected from the back increases the complexity of the received signal and brings great difficulties to the actual detection. This part of the clutter signal needs to be eliminated. Therefore, it is necessary to design a backing layer in the design of an ultrasonic probe; in addition, if there is no backing layer, the piezoelectric element is excited by electricity and vibrates, but when the electric pulse stops exciting, the piezoelectric element will not stop vibrating immediately, but will continue It will stop after a while. In this way, the pulse-echo duration will be very long, which reduces the resolution of the probe. Another function of the backing layer is to make the piezoelectric element stop vibrating instantly after the excitation pulse stops, so that the received pulse width is relatively small, which can improve the resolution of the probe. The backing is prepared by using epoxy resin and tungsten powder mixed curing agent according to known technology, using WSR6101 epoxy resin and T31 epoxy resin curing agent.
电极引线采用Φ0.2漆包线,探头的激励及接收信号通过射频插座9与其他仪器连接,壳体1与壳盖2通过沉头螺钉10固定,螺钉安装时涂硅橡胶以防水。The electrode leads are Φ0.2 enameled wires, the excitation and receiving signals of the probe are connected to other instruments through the
本探头保护层13采用防水漆料喷涂于激励用PVDF压电薄膜14下表面制成。The
探头在实际应用中与其它仪器组成测量系统,如附图2所示,脉冲发射接收仪发出激励脉冲使探头产生超声脉冲,经水耦合入射材料表面产生表面波并反射回探头被接收,波形经示波器显示,数据由计算机采集进行后续处理。In actual application, the probe forms a measurement system with other instruments. As shown in Figure 2, the pulse transmitter and receiver sends out excitation pulses to make the probe generate ultrasonic pulses, which are coupled with water to generate surface waves on the surface of the incident material and are reflected back to the probe to be received. The oscilloscope shows that the data is collected by the computer for subsequent processing.
因为本线聚焦PVDF压电薄膜超声探头用于材料表面波波速测量是一种无损检测方法,不同于传统的拉伸试验,其测量原理决定了探头用于小尺寸材料弹性常数测量的可行性;探头为线聚焦探头,本身具有聚焦的方向性,故能用于材料各向异性的分析。Because the focused PVDF piezoelectric thin film ultrasonic probe of this line is used to measure the surface wave velocity of materials, it is a non-destructive testing method, which is different from the traditional tensile test, and its measurement principle determines the feasibility of the probe for measuring the elastic constant of small-sized materials; The probe is a line focusing probe, which has focusing directionality, so it can be used for the analysis of material anisotropy.
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