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CN201034936Y - A surface-enhanced infrared spectroscopy optical device - Google Patents

A surface-enhanced infrared spectroscopy optical device Download PDF

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CN201034936Y
CN201034936Y CN 200720068337 CN200720068337U CN201034936Y CN 201034936 Y CN201034936 Y CN 201034936Y CN 200720068337 CN200720068337 CN 200720068337 CN 200720068337 U CN200720068337 U CN 200720068337U CN 201034936 Y CN201034936 Y CN 201034936Y
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electrode
electrolytic cell
silicon wafer
zinc selenide
optical device
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蔡文斌
薛晓康
严彦刚
王金意
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Fudan University
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Abstract

The utility model belongs to the infrared spectrum technology field, in particular to a surface enhanced infrared spectrum optical device, which comprises an electrolytic cell, a reference electrode, a counter electrode, a metal nanometer film electrode, a silicon wafer and a zinc selenide semicircular cylinder. The metal nanometer film electrode is plated on the silicon wafer, a water film is provided between the lower surface of the silicon wafer and the zinc selenide semicircular cylinder, which is sealed by the paraffin in the surrounding gaps to form a working electrode. The electrolytic cell is arranged on the upside of the metal nanometer film electrode, in the middle of which is a silicone rubber ring sealed. The metal nanometer film electrode is conducted by a conductor copper membrane. The counter electrode and the reference electrode are arranged in the electrolytic cell to form an electrode system of electrochemical spectrum testing. The device is simple in structure and convenient to operate, can detect the site and the off-site electrochemical spectrum infrared signals below the 1000cm <-1> wave band conveniently, which can be used stably for a longer time.

Description

一种表面增强红外光谱光学装置 A surface-enhanced infrared spectroscopy optical device

技术领域 technical field

本实用新型属于红外光谱技术领域,具体涉及一种表面增强红外光谱光学装置,可应用在电化学现场与非现场表面增强红外光谱的研究与应用中,可将信号区间下限从通常的1000cm-1波数扩展到700cm-1波数处。The utility model belongs to the technical field of infrared spectroscopy, in particular to a surface-enhanced infrared spectroscopy optical device, which can be used in the research and application of electrochemical on-site and off-site surface-enhanced infrared spectroscopy, and can lower the lower limit of the signal interval from the usual 1000cm -1 The wavenumber extends to 700cm -1 wavenumber.

背景技术 Background technique

表面增强红外光谱(SEIRAS)[1]是一种研究电极界面分子结构信息的重要分析工具。配以衰减全反射(ATR)模式的表面增强红外吸收光谱(ATR-SEIRAS)具有表面信号强、表面选律简单,可避免传统外反射红外吸收光谱(IRAS)面临的问题,如表面信号不够强、电场分布不均匀、传质补充滞后、溶液背景的干扰等。近10年来,ATR-SEIRAS技术在不断发展中:一是研究电极体系从Au、Ag电极拓展到Pt族和Fe族等电极;二是制膜方法从昂贵、难重现的传统干法(含蒸镀、溅射、电子束沉积)到简便、重现性好的湿法制备(包括化学镀、电沉积和自组装方法)。Surface-enhanced infrared spectroscopy (SEIRAS) [1] is an important analytical tool for studying molecular structure information at electrode interfaces. Surface-enhanced infrared absorption spectroscopy (ATR-SEIRAS) with attenuated total reflection (ATR) mode has strong surface signal and simple surface selection law, which can avoid the problems faced by traditional external reflection infrared absorption spectroscopy (IRAS), such as insufficient surface signal , Uneven electric field distribution, mass transfer replenishment hysteresis, solution background interference, etc. In the past 10 years, ATR-SEIRAS technology has been developing continuously: first, the research electrode system has expanded from Au and Ag electrodes to Pt and Fe family electrodes; Evaporation, sputtering, electron beam deposition) to simple and reproducible wet preparation (including electroless plating, electrodeposition and self-assembly methods).

特别是以半圆柱(球)硅为红外窗口,采用化学镀和电镀法在其反射底面上生长纳米金属薄膜电极已较成熟,可替代传统干法以制备膜电极。如Osawa小组等利用化学镀在红外窗口硅上获得了具有SEIRA活性的Au和Pt纳米薄膜电极[2],以及本小组采用两步湿法(化学镀+电沉积或自组装+化学镀)作为通用策略获得强SEIRA效应的Pt族和Fe族纳米薄膜电极[3,4]和SEIRA效应可调控的Au、Ag纳米薄膜电极[5]Especially with semi-cylindrical (spherical) silicon as the infrared window, it is relatively mature to grow nano-metal thin film electrodes on the reflective bottom surface by electroless plating and electroplating methods, which can replace the traditional dry method to prepare membrane electrodes. For example, the Osawa group obtained Au and Pt nano-film electrodes with SEIRA activity on the infrared window silicon by electroless plating [2] , and this group used a two-step wet method (electroless plating + electrodeposition or self-assembly + electroless plating) as General strategies to obtain Pt and Fe nano-film electrodes with strong SEIRA effect [3, 4] and Au and Ag nano-film electrodes with tunable SEIRA effect [5] .

目前表面增强红外光谱装置中常用的红外窗口是硅、锗和硒化锌柱。硅柱在1000cm-1以下有较强的吸收信号,无法给出相应的红外信号;锗和硒化锌在1000cm-1以下吸收较弱,但是这两种基底表面的金属膜依靠真空干法制备,更为严重的是锗和硒化锌基底在酸性溶液不稳定,容易造成金属膜在使用过程中的脱落,并且其上金属膜的电化学响应往往偏离本体金属电极的特征,不适于现场光谱电化学的研究。Adzic小组[6]提出了组合硒化锌柱体和硅片红外窗口的概念,但未给出有关参数,根据物理光学知识,这种组合必然对界面平整度加工要求很高,实际上在光谱电化学实验中很难实现装置的设计理念。The infrared windows commonly used in surface-enhanced infrared spectroscopy devices are silicon, germanium, and zinc selenide columns. Silicon pillars have strong absorption signals below 1000cm -1 and cannot give corresponding infrared signals; germanium and zinc selenide have weak absorption below 1000cm -1 , but the metal films on the surface of these two substrates are prepared by vacuum dry method , what is more serious is that the germanium and zinc selenide substrates are unstable in acidic solutions, which may easily cause the metal film to fall off during use, and the electrochemical response of the metal film on it often deviates from the characteristics of the bulk metal electrode, which is not suitable for field spectroscopy Electrochemical research. The Adzic group [6] proposed the concept of combining zinc selenide cylinders and silicon wafer infrared windows, but did not give the relevant parameters. According to the knowledge of physical optics, this combination must have high requirements for the smoothness of the interface. In fact, in the spectrum It is difficult to realize the design concept of the device in electrochemical experiments.

本实用新型不同于Adzic小组的实验装置是:根据衰势波穿透原理,在两个不同折射率的硒化锌柱体和硅片红外窗口间引入超薄水层,研制出一种简单易行的用于电化学内反射SEIRAS的装置。The utility model is different from the experimental device of the Adzic group: according to the principle of decay wave penetration, an ultra-thin water layer is introduced between two zinc selenide cylinders with different refractive indices and the infrared window of the silicon chip to develop a simple and easy Apparatus for electrochemical internal reflection SEIRAS.

1.M.Osawa,In Handbook of Vibrational Spectroscopy;Chalmers J.M.,Griffiths,P.R.,Eds.;John Wiley&Sons:Chichester,UK,2002;Vol.1,p.785.1.M.Osawa, In Handbook of Vibrational Spectroscopy; Chalmers J.M., Griffiths, P.R., Eds.; John Wiley&Sons: Chichester, UK, 2002; Vol.1, p.785.

2.Y.-X.Chen.;A.Miki.;S.Ye.;M.Osawa.J.Am.Chem.Soc.,125(2003)3680.2.Y.-X.Chen.; A.Miki.; S.Ye.; M.Osawa.J.Am.Chem.Soc., 125(2003) 3680.

3.S.-J.Huo.;X.-K.Xue.;Y.-G.Yan.;Q.-X.Li.;M.Ma.;W.-B.Cai*.;Q.-J.Xu.;M.Osawa.J.Phys.Chem.B 110(2006)4162.3.S.-J.Huo.;X.-K.Xue.;Y.-G.Yan.;Q.-X.Li.;M.Ma.;W.-B.Cai * .;Q. -J.Xu.; M.Osawa.J.Phys.Chem.B 110(2006)4162.

4.Y.-G.Yan.;Q.-X.Li.;S.-J.Huo.;M.Ma.;W.-B.Cai*.;M.Osawa.J.Phys.Chem.B 109(2005)7900.4.Y.-G.Yan.;Q.-X.Li.;S.-J.Huo.;M.Ma.;W.-B.Cai * .;M.Osawa.J.Phys.Chem. B 109(2005) 7900.

5.S.-J.Huo.;Q.-X.Li.;Y.-G.Yan.;Y.Chen.;W.-B.Cai*.;Q.-J.Xu.;M.Osawa.J.Phys.Chem.B 109(2005)15985.5.S.-J.Huo.;Q.-X.Li.;Y.-G.Yan.;Y.Chen.;W.-B.Cai * .;Q.-J.Xu.;M. Osawa. J. Phys. Chem. B 109 (2005) 15985.

6.M.-H.Shao.;P.Liu.;R.-R.Adzic.J.Am.Chem.Soc.,126(2006)7408.6.M.-H.Shao.; P.Liu.; R.-R.Adzic.J.Am.Chem.Soc., 126(2006)7408.

发明内容 Contents of the invention

本实用新型的目的在于提出一种新型表面增强红外光谱光学装置,要求该装置简单易行,可以较长时间稳定使用,方便检测1000cm-1以下波段的现场与非现场电化学光谱信号。The purpose of this utility model is to propose a new type of surface-enhanced infrared spectrum optical device, which is required to be simple and easy to operate, can be used stably for a long time, and is convenient to detect on-site and off-site electrochemical spectral signals in the band below 1000cm -1 .

本实用新型提出的表面增强红外光谱光学装置,由电解池、参比电极、对电极、金属纳米薄膜电极、硅片和硒化锌半圆柱组成。其结构如图1所示。其中,金属纳米薄膜电极8镀在硅片9上面,硅片9的下侧面与硒化锌半圆柱10之间设有水膜层5,由石碏4在四周缝隙处将水膜层密封,构成工作电极;金属纳米薄膜8上面为电解池6,中间有硅橡胶圈7密封,金属纳米薄膜8由导线铜膜3引出;对电极1和参比电极2置入电解池6中,构成电化学光谱测试的三电极体系。The surface-enhanced infrared spectrum optical device proposed by the utility model is composed of an electrolytic cell, a reference electrode, a counter electrode, a metal nano-film electrode, a silicon chip and a zinc selenide half cylinder. Its structure is shown in Figure 1. Wherein, the metal nano film electrode 8 is plated on the silicon chip 9, and the water film layer 5 is provided between the lower side of the silicon chip 9 and the zinc selenide semi-cylinder 10, and the water film layer is sealed by the stone ring 4 at the gap around it, Constitute the working electrode; above the metal nano film 8 is the electrolytic cell 6, with a silicon rubber ring 7 sealing in the middle, and the metal nano film 8 is drawn out by the wire copper film 3; the counter electrode 1 and the reference electrode 2 are placed in the electrolytic cell 6 to form an electrolytic cell Three-electrode system for chemical spectroscopic testing.

本实用新型中,在硒化锌半圆柱底面和硅片之间加入水薄膜层,控制挤压使其变薄到几微米(一般可为0.1-5微米),利用“耦合波导”理论使入射红外光衰势波能够透过硅片层,以便检测到吸附物种吸附在金属薄膜电极表面的红外信号。以上硅片上金属膜电极的制备采用化学湿法制备。In the utility model, a water thin film layer is added between the bottom surface of the zinc selenide semi-cylindrical and the silicon chip, and the extrusion is controlled to make it thinner to several microns (generally 0.1-5 microns), and the "coupling waveguide" theory is used to make the incident The infrared light attenuation wave can pass through the silicon wafer layer, so as to detect the infrared signal of the adsorbed species adsorbed on the surface of the metal thin film electrode. The above metal film electrodes on silicon wafers are prepared by chemical wet method.

“耦合波导”理论:在相距较远的两个平板波导中,两个波导模式的场分布互不重迭,它们在各自的波导中独立传播。但是,当两个平板波导相距很近时,两个波导模式的场分布相互重迭,可通过所谓光学隧道效应发生耦合而相互交换功率。若入射光从上射入下方,当用夹具将上下两光学窗口挤压,两窗口由很薄水介质相互隔开,其折射率较空气高,有利于红外光的穿透,这就构成耦合波导系统。液体薄膜层的厚度越薄,入射红外光透过该层的比例就越大。"Coupled waveguide" theory: In two slab waveguides that are far apart, the field distributions of the two waveguide modes do not overlap each other, and they propagate independently in their respective waveguides. However, when the two slab waveguides are very close to each other, the field distributions of the two waveguide modes overlap each other, and they can be coupled through the so-called optical tunneling effect to exchange power with each other. If the incident light enters the bottom from the top, when the upper and lower optical windows are squeezed with a fixture, the two windows are separated from each other by a very thin water medium, whose refractive index is higher than that of air, which is conducive to the penetration of infrared light, which constitutes coupling waveguide system. The thinner the thickness of the liquid film layer, the greater the proportion of incident infrared light transmitted through the layer.

事实上,加入水膜层后薄膜电极上吸附物种的红外信号随着入射角的增大而增强,实验结果表明入射角为70°较理想。相比下,不加水层只有在20°入射角时才可以检测到很弱的红外信号,增大入射角,无法检测到吸附物种的红外信号,表明入射红外光在硒化锌底面/空气界面大部分反射,无法有效地透过Si片。水薄膜层的稳定性对检测信号的强弱影响很大,而使用石蜡在界面四周的缝隙处将水膜密封,便可以提高水薄膜的稳定性。In fact, after adding the water film layer, the infrared signal of the adsorbed species on the thin film electrode increases with the increase of the incident angle, and the experimental results show that the incident angle is 70° which is ideal. In contrast, a very weak infrared signal can only be detected at an incident angle of 20° without adding water, and the infrared signal of the adsorbed species cannot be detected when the incident angle is increased, indicating that the incident infrared light is at the ZnSe bottom surface/air interface Most of the reflections cannot effectively pass through the Si sheet. The stability of the water film layer has a great influence on the strength of the detection signal, and the use of paraffin to seal the water film at the gaps around the interface can improve the stability of the water film.

本新型装置的有益效果:可以拓展测量4000cm-1~700cm-1波段之间的现场与非现场电化学光谱红外信号,结构简单稳定,方便易行。The beneficial effect of the novel device is that the on-site and off-site electrochemical spectrum infrared signals between 4000cm -1 and 700cm -1 can be expanded to be measured, the structure is simple and stable, and it is convenient and easy to operate.

附图说明 Description of drawings

下面结合附图和具体实例对本新型表面增强红外光谱研究装置进一步说明。The following is a further description of the new surface-enhanced infrared spectroscopy research device in conjunction with the accompanying drawings and specific examples.

图1是本新型表面增强红外光谱光学装置结构示意图。Fig. 1 is a schematic diagram of the structure of the novel surface-enhanced infrared spectroscopy optical device.

图2是本实用新型装置一个实例(手动调制电位)光谱图。Fig. 2 is a spectrogram of an example (manually modulated potential) of the device of the present invention.

图3是图2在不同电极电位时的光谱图。Fig. 3 is a spectrogram of Fig. 2 at different electrode potentials.

图4是图3中吸附CO中心波数和积分强度对电位关系图。Fig. 4 is a diagram of the relationship between the central wave number and integral intensity of CO adsorption in Fig. 3 and the potential.

图5是本实用新型装置另一个实例(手动调制电位)光谱图。Fig. 5 is a spectrogram of another example (manually modulated potential) of the device of the present invention.

图中标号:1:对电极;2:参比电极;3:导线铜膜;4:石蜡;5:水膜层;6:电解池;7:硅橡胶圈;8:金属纳米薄膜电极;9:硅片;10:硒化锌半圆柱。Numbers in the figure: 1: counter electrode; 2: reference electrode; 3: wire copper film; 4: paraffin; 5: water film layer; 6: electrolytic cell; 7: silicone rubber ring; 8: metal nano film electrode; 9 : Silicon wafer; 10: ZnSe half cylinder.

具体实施方式 Detailed ways

本装置具体结构主要由电解池、参比电极、对电极、金属纳米薄膜电极、硅片和硒化锌半圆柱组成。硅片的尺寸为20mm×25mm,厚度为50-200微米;硒化锌半圆柱的直径为20mm,高为25mm。具体的使用步骤如下:①首先在硅片9表面镀上金属纳米薄膜8,接着在金属纳米薄膜的表面覆盖上直径为8-14mm的硅橡胶圈7,并且装入电解池6中,然后在硅片9的另一面加入水层同时用硒化锌半圆柱10挤压水层,最后用石蜡4在界面四周的缝隙处将水膜5密封,这就构成了工作电极。②将参比电极2和对电极1插入到电解池中,这就组成了电化学光谱测试的三电极体系。The specific structure of the device is mainly composed of an electrolytic cell, a reference electrode, a counter electrode, a metal nano-film electrode, a silicon wafer and a zinc selenide half cylinder. The size of the silicon wafer is 20mm×25mm, and the thickness is 50-200 microns; the diameter of the zinc selenide half cylinder is 20mm, and the height is 25mm. Concrete use steps are as follows: 1. at first on the surface of silicon chip 9 plate metal nano-film 8, then the silicon rubber ring 7 that diameter is 8-14mm is covered on the surface of metal nano-film, and pack in the electrolytic cell 6, then in Add the water layer to the other side of the silicon wafer 9 and squeeze the water layer with the zinc selenide half cylinder 10, and finally seal the water film 5 in the gaps around the interface with paraffin 4, which constitutes the working electrode. ② Insert the reference electrode 2 and the counter electrode 1 into the electrolytic cell, which forms a three-electrode system for electrochemical spectroscopy.

图2是Pt电极在含饱和CO的0.1mol/LHClO4溶液中的表面增强红外光谱,样品光谱采于-0.2V(vs.SCE),参考光谱采于0.8V。其中曲线a是装置中未加入水薄膜层时的表面增强红外光谱,曲线b是在装置中加入了水薄膜层后的光谱。很明显,曲线b中吸附CO的信号(2072cm-1,vCOL;1857cm-1,vCOB)得到了很大的增强,同时还检测到了共吸附水的信号(3656cm-1,vOH;1634cm-1,δHOH)。Figure 2 is the surface-enhanced infrared spectrum of the Pt electrode in a 0.1mol/L HClO 4 solution containing saturated CO. The sample spectrum was collected at -0.2V (vs. SCE), and the reference spectrum was collected at 0.8V. Curve a is the surface-enhanced infrared spectrum when no water film layer is added to the device, and curve b is the spectrum after adding a water film layer to the device. Obviously, the signal of adsorbed CO (2072cm -1 , vCO L ; 1857cm -1 , vCO B ) was greatly enhanced in curve b, and the signal of co-adsorbed water (3656cm -1 , vOH; 1634cm - 1 , δHOH).

图3和图4是Pt表面吸附CO信号随不同电极电位变化的关系图,图4中vCOL中心波数的Stark斜率为31cm-1·V-1,并且vCOL的积分强度随着电位的正移有变弱的趋势,表明电位越正,吸附在Pt电极表面的CO越易发生氧化。Fig. 3 and Fig. 4 are graphs showing the relationship between the signal of CO adsorption on Pt surface and the change of different electrode potentials. In Fig. 4, the Stark slope of the central wave number of vCO L is 31cm -1 ·V -1 , and the integrated intensity of vCO L increases with the positive potential The shift tends to become weaker, indicating that the more positive the potential is, the easier it is for the CO adsorbed on the surface of the Pt electrode to be oxidized.

图5是Pt电极在对硝基苯甲酸(PNBA)饱和的0.1mol/L HClO4溶液中的表面增强红外光谱,样品电位采于0.6V,参比电位采于-0.1V。光谱不仅检测到了2000cm-1~1000cm-1之间PNBA的特征谱峰,还检测到了1000cm-1~700cm-1之间866cm-1(δCO2)和835cm-1(δNO2)的特征谱峰。Figure 5 is the surface-enhanced infrared spectrum of the Pt electrode in a 0.1mol/L HClO 4 solution saturated with p-nitrobenzoic acid (PNBA). The sample potential was collected at 0.6V, and the reference potential was collected at -0.1V. The spectrum not only detects the characteristic spectrum peaks of PNBA between 2000cm -1 and 1000cm -1 , but also detects the characteristic spectrum peaks of 866cm -1 (δCO 2 ) and 835cm -1 (δNO 2 ) between 1000cm -1 and 700cm -1 .

Claims (2)

1.一种表面增强红外光谱光学装置,其特征在于由电解池、参比电极、对电极、金属纳米薄膜电极、硅片和硒化锌半圆柱组成,其中,金属纳米薄膜电极(8)镀在硅片(9)上面,硅片(9)的下侧面与硒化锌(10)半圆柱之间设有水膜层,由石碚(4)在四周缝隙处将水膜层密封,构成工作电极;金属纳米薄膜(8)上面为电解池(6),中间有硅橡胶圈(7)密封,金属纳米薄膜(8)由导线铜膜(3)引出;对电极(1)和参比电极(2)置入电解池(6)中,构成电化学光谱测试的电极体系。1. A surface-enhanced infrared spectrum optical device is characterized in that it is made up of electrolytic cell, reference electrode, counter electrode, metal nano film electrode, silicon wafer and zinc selenide half cylinder, wherein, metal nano film electrode (8) is plated On the top of the silicon wafer (9), a water film layer is provided between the lower side of the silicon wafer (9) and the half cylinder of the zinc selenide (10), and the water film layer is sealed at the surrounding gaps by stone pegs (4) to form a Working electrode; above the metal nano film (8) is the electrolytic cell (6), with a silicon rubber ring (7) sealing in the middle, and the metal nano film (8) is drawn out by the wire copper film (3); the counter electrode (1) and the reference The electrode (2) is placed in the electrolytic cell (6) to form an electrode system for electrochemical spectroscopic testing. 2.根据权利要求1所述的表面增强红外光谱光学装置,其特征在于所述水膜层厚度为0.1-5微米。2. The surface-enhanced infrared spectroscopy optical device according to claim 1, characterized in that the thickness of the water film layer is 0.1-5 microns.
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CN103033474A (en) * 2012-12-10 2013-04-10 中南大学 Electrochemical-optical combined in-situ study spectral cell
CN103776790A (en) * 2014-02-25 2014-05-07 重庆大学 Infrared spectrum enhancement and detection method and infrared spectrum enhancement and detection device based on graphene nano antenna
CN106872389A (en) * 2017-04-26 2017-06-20 吉林大学 A kind of method that use nanometer aluminum doping zinc-oxide carries out SEIRAS detections as substrate
CN108559981A (en) * 2017-12-26 2018-09-21 南京大学 A kind of preparation method of surface-enhanced infrared spectroscopy enhancing substrate
CN110520022A (en) * 2017-02-03 2019-11-29 Seb公司 Equipped with the cooking pot of food dilatometry device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103033474A (en) * 2012-12-10 2013-04-10 中南大学 Electrochemical-optical combined in-situ study spectral cell
CN103033474B (en) * 2012-12-10 2016-06-08 中南大学 Electrochemistry optics coupling on-spot study spectrum tool
CN103776790A (en) * 2014-02-25 2014-05-07 重庆大学 Infrared spectrum enhancement and detection method and infrared spectrum enhancement and detection device based on graphene nano antenna
CN103776790B (en) * 2014-02-25 2016-03-23 重庆大学 A kind of infrared spectrum based on graphene nano antenna strengthens and detection method and device
CN110520022A (en) * 2017-02-03 2019-11-29 Seb公司 Equipped with the cooking pot of food dilatometry device
CN106872389A (en) * 2017-04-26 2017-06-20 吉林大学 A kind of method that use nanometer aluminum doping zinc-oxide carries out SEIRAS detections as substrate
CN106872389B (en) * 2017-04-26 2019-12-27 吉林大学 Method for carrying out SEIRAS detection by adopting nano-grade aluminum-doped zinc oxide as substrate
CN108559981A (en) * 2017-12-26 2018-09-21 南京大学 A kind of preparation method of surface-enhanced infrared spectroscopy enhancing substrate
CN108559981B (en) * 2017-12-26 2020-05-19 南京大学 A kind of preparation method of surface-enhanced infrared absorption spectrum enhanced substrate

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