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CN201034559Y - Flatness and parallelism detection device for the upper and lower planes of plate-shaped workpieces - Google Patents

Flatness and parallelism detection device for the upper and lower planes of plate-shaped workpieces Download PDF

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CN201034559Y
CN201034559Y CNU2007200693157U CN200720069315U CN201034559Y CN 201034559 Y CN201034559 Y CN 201034559Y CN U2007200693157 U CNU2007200693157 U CN U2007200693157U CN 200720069315 U CN200720069315 U CN 200720069315U CN 201034559 Y CN201034559 Y CN 201034559Y
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vertical
plate
workpiece
flatness
movement mechanism
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李迎伟
李明
李伟
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University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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Abstract

本实用新型涉及一种同时检测板状工件上下两平面的平面度及平行度的检测装置,装置包含一个底座,底座的一侧设置一横向移动机构,该横向移动机构上设置激光传感器垂直移动机构,所述横向移动机构上安装一光栅尺,同时,光栅尺的活动部件与激光传感器垂直移动机构固定连接;底座的另一侧安装一纵向滑台,滑台上安装工件检测平台,工作时,上下安装的两个激光传感器处于工件检测平台的上下方作横向运动。本装置结构简单、操作方便、测量速度快,测量精度高,适用于类似于射线防护板等生产行业对产品上下平面的平面度及平行度需精确检测的行业。

The utility model relates to a detection device for simultaneously detecting the flatness and parallelism of the upper and lower planes of a plate-shaped workpiece. The device includes a base, a lateral movement mechanism is arranged on one side of the base, and a laser sensor vertical movement mechanism is arranged on the lateral movement mechanism. , a grating ruler is installed on the described transverse movement mechanism, and meanwhile, the movable part of the grating ruler is fixedly connected with the vertical movement mechanism of the laser sensor; a longitudinal slide table is installed on the other side of the base, and a workpiece detection platform is installed on the slide table. During work, The two laser sensors installed up and down move laterally above and below the workpiece detection platform. The device is simple in structure, easy to operate, fast in measurement speed and high in measurement accuracy. It is suitable for industries such as radiation protection boards that need to accurately detect the flatness and parallelism of the upper and lower planes of products.

Description

板状工件上下平面的平面度及平行度检测装置 Flatness and parallelism detection device for the upper and lower planes of plate-shaped workpieces

技术领域 technical field

本实用新型涉及一种对板状工件上下平面的平面度及平行度同步进行非接触式测量的检测装置,特别是一种针对上下平面的平面度及平行度要求很高的薄板状工件的专用检测装置。The utility model relates to a non-contact detection device for synchronously measuring the flatness and parallelism of the upper and lower planes of a plate-shaped workpiece, in particular to a special device for thin plate-shaped workpieces with high requirements on the flatness and parallelism of the upper and lower planes. detection device.

背景技术 Background technique

目前公知的测量工件的平面度及平行度技术是在三维坐标测量机下进行的,这并不是一种专门测量平面度及平行度的专用设备,其特点是接触式测量,即用三维坐标测量机的探针接触工件实现测量,而且在测量过程中,不能同时采集工件的两待测平面上点的位置数据,即工件必须测完一面上点的数据后再翻转过来测另一面,再根据这些点在计算机中重新拟合出两平面,进一步评价两平面的平行度,这种测量手段代价昂贵,而且效率不高,对于一些仅仅严格要求上下平面平行度的工件的测量,这种测量手段就不太实用。研制一种非接触式的测量平板工件的平面度及平行度的专用检测装置,即测量部分不需要接触工件即可完成,而且可以对工件两待测表面同时进行采集点的数据进行测量平板工件的平面度及平行度的专用检测装置,可以降低一些对产品测量模式要求单一的生产企业的测量费用,提高测量效率。At present, the known technology of measuring the flatness and parallelism of the workpiece is carried out under the three-dimensional coordinate measuring machine. This is not a special equipment for measuring flatness and parallelism. It is characterized by contact measurement, that is, three-dimensional coordinate measurement The probe of the machine touches the workpiece to achieve measurement, and during the measurement process, the position data of the points on the two planes to be measured cannot be collected at the same time, that is, the workpiece must be turned over to measure the other side after measuring the data of the points on one side, and then according to These points re-fit the two planes in the computer, and further evaluate the parallelism of the two planes. This measurement method is expensive and not efficient. For the measurement of some workpieces that only strictly require the parallelism of the upper and lower planes, this measurement method It is not very practical. Develop a non-contact special detection device for measuring the flatness and parallelism of flat workpieces, that is, the measurement part can be completed without touching the workpiece, and the data of the two surfaces of the workpiece to be measured can be collected at the same time to measure flat workpieces The special detection device for flatness and parallelism can reduce the measurement cost of some production enterprises that require a single product measurement mode and improve measurement efficiency.

实用新型内容Utility model content

本实用新型的目的在于针对现有技术的缺陷,提供一种板状工件上下平面的平面度及平行度的检量装置,提高测量效率,降低生产成本。The purpose of the utility model is to provide a flatness and parallelism measuring device for the upper and lower planes of a plate-shaped workpiece to improve the measurement efficiency and reduce the production cost.

为达到上述目的,本实用新型采用下述技术方案:In order to achieve the above object, the utility model adopts the following technical solutions:

一种板状工件上下平面的平面度及平行度检测装置,包括底座,工件平台和激光传感器,其特征在于所述的底座上面一侧通过一个固定的垂直侧板安装一个横向移动机构,所述的横向移动机构上固定安装一个激光传感器垂直移动机构,所述的激光传感器垂直移动机构的上下端的垂直移动架上分别固定安装两个所述的激光传感器;所述底座另一侧安装一个可水平纵向调位的滑台,所述滑台上固定安装一个工件检测平台,所述工件检测平台放置工件的中央处有一条横向长穿槽;工作时,所述的两激光传感器分别处于所述的工件平台的上下方而对准所述的横向长穿槽。A flatness and parallelism detection device for the upper and lower planes of a plate-shaped workpiece, including a base, a workpiece platform and a laser sensor, characterized in that a lateral movement mechanism is installed on the upper side of the base through a fixed vertical side plate, and the A laser sensor vertical movement mechanism is fixedly installed on the horizontal movement mechanism of the laser sensor, and two described laser sensors are respectively fixedly installed on the vertical movement frame at the upper and lower ends of the laser sensor vertical movement mechanism; a horizontal movement mechanism is installed on the other side of the base A slide table with longitudinal adjustment, a workpiece detection platform is fixedly installed on the slide table, and there is a long transverse groove in the center of the workpiece detection platform where the workpiece is placed; when working, the two laser sensors are respectively in the The top and bottom of the workpiece platform are aligned with the long transverse groove.

上述的横向移动机构的结构是:一块固定基板与所述的垂直侧板固定连接,所述的固定基板的垂直面上下两侧各固定一条横向导轨,两横向导轨分别与两块横移滑块滑动匹配,两横移滑块与一块固定连接所述激光传感器垂直移动机构的盖板固定连接,所述的固定基板的一端固定连接一块端板,该端板上固定安装一电机;一根横向驱动螺杆由轴承支撑,使其一端连接所述电机的输出端,另一端与螺母旋配,所述螺母固定安装于所述固定基板的内侧垂直面上。The structure of the above-mentioned lateral movement mechanism is as follows: a fixed base plate is fixedly connected with the vertical side plate, a horizontal guide rail is respectively fixed on the upper and lower sides of the vertical surface of the fixed base plate, and the two lateral guide rails are respectively connected with two traverse sliders. Sliding matching, two traversing sliders are fixedly connected to a cover plate fixedly connected to the vertical movement mechanism of the laser sensor, one end of the fixed base plate is fixedly connected to an end plate, and a motor is fixedly installed on the end plate; The driving screw is supported by bearings, one end of which is connected to the output end of the motor, and the other end is screwed with a nut, and the nut is fixedly mounted on the inner vertical surface of the fixed base plate.

上述的横向移动机构的固定基板的上侧面安装一个光栅尺,所述光栅尺的可移动部件通过连接板固定连接,所述的连接板与激光传感器垂直移动机构上连接横向移动机构的垂直连接板固定连接。A grating ruler is installed on the upper side of the fixed substrate of the above-mentioned lateral movement mechanism, and the movable parts of the grating ruler are fixedly connected through a connecting plate, and the vertical connecting plate of the horizontal moving mechanism is connected to the connecting plate on the vertical moving mechanism of the laser sensor Fixed connection.

上述的底座的一侧装有两个接近开关支架,每个接近开关支架上各安装一个接近开关,而滑台的侧面上装有一个与其对应的接近开关块。One side of the above-mentioned base is equipped with two proximity switch brackets, each proximity switch bracket is respectively equipped with a proximity switch, and a proximity switch block corresponding to it is installed on the side of the slide table.

上述激光传感器垂直机构的结构是:一块竖直基板通过所述的竖直连接板与盖板固定连接,竖直基板的垂直面的前后两侧,通过挡块固定两根垂直导杆,有上下各两块垂直滑块分别与上下各一块小盖板固定连接,上下两小盖板分别各固定连接一个安装激光传感器的垂直移动架;有一根垂直驱动螺杆由轴承支撑,使其一端连接一个安装于竖直基板一端固定端板上的电机的输出轴,而另一端与两个驱动螺母旋配,所述的两个驱动螺母分别固定安装在上下两个小盖板内侧垂直面上;所述的竖直基板的一侧通过两个接近开关支架分别各安装一个接近开关,在所述的上小盖板的侧面上相应地安装一个接近感应块。The structure of the vertical mechanism of the above-mentioned laser sensor is: a vertical base plate is fixedly connected with the cover plate through the vertical connecting plate, and the front and rear sides of the vertical surface of the vertical base plate are fixed with two vertical guide rods through stoppers, with upper and lower Each of the two vertical sliders is fixedly connected to the upper and lower small cover plates, and the upper and lower two small cover plates are respectively fixedly connected to a vertical moving frame for installing the laser sensor; there is a vertical driving screw supported by a bearing, so that one end is connected to a mounting The output shaft of the motor on the end plate is fixed on one end of the vertical base plate, and the other end is screwed with two driving nuts, and the two driving nuts are respectively fixed and installed on the inner vertical surfaces of the upper and lower two small cover plates; A proximity switch is installed on one side of the vertical base plate through two proximity switch brackets, and a proximity sensor block is correspondingly installed on the side of the upper small cover plate.

上述的滑台机构是:两根水平纵向导轨固定安装在所述的底座上,四块导轨滑块分别与所述两根水平纵向导轨滑动匹配,四块导轨滑块固定连接一个支架,支架上面固定安装所述的工作平台,支架的一侧装有限位挡块和接近感应块。The above-mentioned slide table mechanism is: two horizontal longitudinal guide rails are fixedly installed on the base, four guide rail sliders are slidingly matched with the two horizontal longitudinal guide rails respectively, and the four guide rail sliders are fixedly connected to a bracket, on which the bracket The working platform described above is fixedly installed, and a limit stopper and a proximity sensing block are installed on one side of the support.

上述的底座下有电气安装盒,电气安装盒内装有两个电机的驱动器,两激光传感器和光栅尺的供电单元以及其输入计算机的数据处理线路,接触开关的输入计算机的通信线路等,并将这些数据线路与一台控制计算机相连;控制计算机内部配置一块数据采集卡,所述除光栅尺以外的电气元件的信号和数据均通过上述通信线路与该数据采集卡相连,并于计算机通信、接受计算机控制;所述光栅尺通过计算机的相应接口与计算机进行数据交换。There is an electrical installation box under the above-mentioned base, and the driver of two motors, the power supply unit of two laser sensors and the grating ruler, the data processing line input to the computer, the communication line input to the computer of the contact switch, etc. are installed in the electrical installation box. These data lines are connected to a control computer; a data acquisition card is configured inside the control computer, and the signals and data of the electrical components other than the grating scale are connected to the data acquisition card through the above communication lines, and communicated with the computer, received Computer control; the grating scale exchanges data with the computer through the corresponding interface of the computer.

本实用新型与现有技术相比较,具有如下显而易见的特点和优点:由于本实用新型采用两激光传感器同时对工件上下平面进行非接触式数据采集,并可利用计算机自动控制,从而提高了效率,降低了测量成本。本实用新型结构简单、操作方便、检测速度快,检测精度高(此精度取决于传感器的精度),适用于像射线防护板等专门对板状工件上下平面的平面度及平行度要求较高的生产行业。Compared with the prior art, the utility model has the following obvious features and advantages: because the utility model adopts two laser sensors to carry out non-contact data acquisition on the upper and lower planes of the workpiece at the same time, and can use computer automatic control, thereby improving the efficiency, Reduced measurement costs. The utility model has the advantages of simple structure, convenient operation, fast detection speed and high detection precision (the precision depends on the precision of the sensor), and is suitable for special requirements on flatness and parallelism of the upper and lower planes of plate-shaped workpieces, such as ray shields. production industry.

附图说明 Description of drawings

图1为本实用新型的一个实施例的结构示意立体图;Fig. 1 is a structural schematic perspective view of an embodiment of the present utility model;

图2为图1示例中横向移动机构的结构示意立体图;Fig. 2 is a schematic perspective view of the structure of the lateral movement mechanism in the example of Fig. 1;

图3为图1示例中激光传感器垂直移动机构的结构示意立体图;Fig. 3 is a schematic perspective view of the structure of the vertical movement mechanism of the laser sensor in the example of Fig. 1;

图4为图1示例中滑台的结构示意立体图Figure 4 is a schematic perspective view of the structure of the slide table in the example of Figure 1

具体实施方式 Detailed ways

本实用新型的一个优选实施例结合附图说明如下:A preferred embodiment of the present utility model is described as follows in conjunction with accompanying drawing:

图1是本板状工件上下平面的平面度及平行度检测装置的结构立体图,它包括:底座1,其上设置有一个垂直侧板2,该垂直侧板2位于底座1正上方的一侧安装有一横向移动机构3,该横向移动机构3通过竖直连接板20与激光传感器垂直移动机构7相连接,并驱动激光传感器垂直移动机构7横向往复运动,同时,该横向移动机构3上方安装有一光栅尺4,光栅尺4的可移动部件6通过连接板5和竖直连接板20相连接,从而光栅尺4可以采集到激光传感器垂直移动机构7横向移动的位移值;所述激光传感器垂直移动机构7用于驱动安装在其上的两激光传感器9、10上下运动,并通过所述两激光传感器9、10采集工件11上下两平面上的点的竖直方向的位置数据;底座1上相对于安装垂直侧板2的另一侧安装有一滑台14,该滑台14用于放置平板工件11并在垂直于激光传感器9、10测量方向和光栅尺测量方向的方向上运动,使激光传感器在工件上的测量点在该方向上移动,以便采集平面上的多个位置的点的位置数据;底座1的一侧安装有两个接近开关支架17、18,接近开关支架17、18上分别安装接近开关16、19,接近开关16、19用来检测滑台14在底座1上移动的位置;底座1下的盒子里可安装有各个电机的驱动器和数据通讯装置,这些驱动器和数据通讯装置与一台计算机相连接,并受其控制,该计算机对来自检测装置上各个传感器的数据进行处理。Fig. 1 is a structural perspective view of the flatness and parallelism detection device of the upper and lower planes of the plate-shaped workpiece, which includes: a base 1, on which a vertical side plate 2 is arranged, and the vertical side plate 2 is located on the side directly above the base 1 A lateral movement mechanism 3 is installed, and the lateral movement mechanism 3 is connected with the vertical movement mechanism 7 of the laser sensor through the vertical connecting plate 20, and drives the vertical movement mechanism 7 of the laser sensor to reciprocate laterally. At the same time, a The grating ruler 4, the movable part 6 of the grating ruler 4 is connected with the vertical connecting plate 20 through the connecting plate 5, so that the grating ruler 4 can collect the displacement value of the lateral movement of the vertical movement mechanism 7 of the laser sensor; the vertical movement of the laser sensor The mechanism 7 is used to drive the two laser sensors 9 and 10 mounted on it to move up and down, and collect the vertical position data of the points on the upper and lower planes of the workpiece 11 through the two laser sensors 9 and 10; A slide table 14 is installed on the other side where the vertical side plate 2 is installed, and the slide table 14 is used to place the flat workpiece 11 and move in a direction perpendicular to the measurement direction of the laser sensors 9, 10 and the measurement direction of the grating ruler, so that the laser sensor The measuring point on the workpiece moves in this direction so as to collect the position data of the points of multiple positions on the plane; two proximity switch brackets 17,18 are installed on one side of the base 1, and two proximity switch brackets 17,18 are installed on the proximity switch brackets 17,18 respectively Proximity switch 16,19 is installed, and proximity switch 16,19 is used for detecting the position that slide table 14 moves on base 1; The driver and data communication device of each motor can be installed in the box under base 1, these drivers and data communication device Connected with and controlled by a computer, the computer processes data from various sensors on the detection device.

图2为图1示例中横向移动机构3的结构立体图,该横向移动机构3主要由端板27、电机26、轴承28、横向驱动螺杆24、螺母21、盖板22、两横向移动滑块31、23、两横向导轨29、25、以及固定基板30组成。固定基板30的一端安装垂直其正面的端板27,端板27的外侧安装一电机26,该电机26主轴与横向驱动螺杆24一端相连,所述横向驱动螺杆24另一端由轴承28支撑,横向驱动螺杆24上安装一螺母21,该螺母21上方安装一盖板22;固定基板30的另外两平行侧分别安装两横向导轨29、25,在两横向导轨29、25上分别安装一配套的横移滑块31和23,横移滑块31和23都与盖板22固定连接;该盖板22是通过图1中的中间件竖直连接板20与图1中的激光传感器垂直移动机构7相连的。Fig. 2 is the perspective view of the structure of the lateral movement mechanism 3 in the example of Fig. 1. , 23, two transverse guide rails 29,25, and a fixed base plate 30 are formed. One end of the fixed base plate 30 is installed with an end plate 27 perpendicular to its front surface, and a motor 26 is installed on the outside of the end plate 27. The main shaft of the motor 26 is connected to one end of the horizontal drive screw 24, and the other end of the horizontal drive screw 24 is supported by a bearing 28. A nut 21 is installed on the driving screw rod 24, and a cover plate 22 is installed above the nut 21; Move slide block 31 and 23, traversing slide block 31 and 23 are all fixedly connected with cover plate 22; This cover plate 22 is through the middle piece vertical connecting plate 20 among Fig. 1 and laser sensor vertical movement mechanism 7 among Fig. 1 connected.

图3为图1示例中激光传感器垂直移动机构7的结构立体图,该激光传感器垂直移动机构7主要由两垂直导杆35、37、垂直驱动螺杆36、垂直滑块33、51、38、41,驱动螺母43、53、轴承54、挡块40、32、52、小盖板34、39、垂直移动架8、15、激光传感器9、10、接近开关45、48、接近开关支架46、49、接近感应块50、电机56、端板31、安装板20和竖直基板42组成。竖直基板42的一面上安装有两对相同的垂直滑块33、51、38、41;在所述两对垂直滑块间安装垂直导杆35、37,垂直滑块33、51、38、41可沿着导杆35、37来回滑动;在两对垂直导杆35、37之间的竖直基板42上,安装轴线平行于两垂直导杆轴线的轴承54;轴承54中安装垂直驱动螺杆36;垂直驱动螺杆36上安装有两驱动螺母43、53;两驱动螺母43、53上分别安装一小盖板39、34;所述小盖板39、34分别固定连接在两组垂直滑块33、51、38、41上,并可以分别和这两组垂直滑块33、51、38、41一起沿垂直导杆轴线方向来回运动;小盖板39、34上面分别安装两激光传感器9、10的垂直移动架8、15;垂直移动架8、15上面分别安装两激光传感器9、10,激光传感器9、10分别位于垂直移动架8、15的内侧,安装位置应保证发出激光照射方向相反;竖直基板42上位于垂直滑块33、51、38、41的外侧,各安装有一挡块40、32、52,挡块40、32、52分别与垂直导杆35、37固定连接,从而将垂直导杆35、37固定在竖直基板42上;竖直基板42的一个端面上安装端板31,端板31外侧安装有一电机56,电机56主轴与所述垂直驱动螺杆36固定连接;竖直基板42的侧边上安装两接近开关支架46、49,两接近开关支架46、49上分别安装接近开关45、48;此外,竖直基板42的底面上还安装一安装板20,用于把整个激光传感器垂直移动机构7安装固定在所述的横向移动机构3上;在滑块51外侧上安装接近感应块50。Fig. 3 is the perspective view of the structure of the vertical movement mechanism 7 of the laser sensor in the example of Fig. 1, the vertical movement mechanism 7 of the laser sensor mainly consists of two vertical guide rods 35, 37, a vertical drive screw 36, vertical sliders 33, 51, 38, 41, Drive nuts 43, 53, bearings 54, stoppers 40, 32, 52, small cover plates 34, 39, vertical moving frames 8, 15, laser sensors 9, 10, proximity switches 45, 48, proximity switch brackets 46, 49, It consists of proximity sensing block 50 , motor 56 , end plate 31 , mounting plate 20 and vertical base plate 42 . Two pairs of identical vertical slide blocks 33,51,38,41 are installed on one side of the vertical base plate 42; 41 can slide back and forth along the guide rods 35, 37; on the vertical base plate 42 between two pairs of vertical guide rods 35, 37, install the bearing 54 whose axis is parallel to the axis of the two vertical guide rods; install the vertical drive screw in the bearing 54 36; two drive nuts 43, 53 are installed on the vertical drive screw rod 36; a small cover plate 39, 34 is respectively installed on the two drive nuts 43, 53; the small cover plate 39, 34 is fixedly connected to two groups of vertical sliders respectively 33, 51, 38, 41, and can move back and forth along the axis direction of the vertical guide bar with these two groups of vertical sliders 33, 51, 38, 41 respectively; two laser sensors 9, 9, 10 vertical moving frames 8, 15; two laser sensors 9, 10 are respectively installed on the vertical moving frames 8, 15, and the laser sensors 9, 10 are respectively located in the inner side of the vertical moving frames 8, 15, and the installation position should ensure that the direction of laser irradiation is opposite Be positioned at the outside of vertical slide block 33,51,38,41 on the vertical base plate 42, respectively install a stopper 40,32,52, stopper 40,32,52 are fixedly connected with vertical guide rod 35,37 respectively, thereby The vertical guide rods 35, 37 are fixed on the vertical base plate 42; an end plate 31 is installed on an end surface of the vertical base plate 42, and a motor 56 is installed on the outside of the end plate 31, and the main shaft of the motor 56 is fixedly connected with the vertical drive screw 36; Two proximity switch supports 46,49 are installed on the side of the vertical base plate 42, and proximity switches 45,48 are respectively installed on the two proximity switch supports 46,49; The whole laser sensor vertical movement mechanism 7 is installed and fixed on the described lateral movement mechanism 3; the proximity sensing block 50 is installed on the outside of the slider 51.

图4为图1示例中滑台14的结构立体图,该滑台14主要由导轨滑块57、58、62、64、水平纵向导轨59、61、限位挡块63、接近感应块65、支架60和工件平台13组成。所述支架60下底面分别安装两对安装孔轴线平行的导轨滑块57、58、62、64;每对导轨滑块各安装在一水平纵向导轨59、61上并可沿着该导轨滑动,在水平纵向导轨61上还固定一限位挡块63;支架60上方安装工件检测平台13,工件检测平台13上开有一横向长穿槽12,工件11放在工件检测平台13上横向长穿槽12正上方的位置,支架60下端侧面安装限位挡块63。Fig. 4 is the perspective view of the structure of slide table 14 in the example of Fig. 1, and this slide table 14 is mainly made up of guide rail slider 57, 58, 62, 64, horizontal longitudinal guide rail 59, 61, limit block 63, proximity sensor block 65, support 60 and workpiece platform 13 forms. Two pairs of guide rail sliders 57, 58, 62, 64 parallel to the axes of the mounting holes are respectively installed on the bottom surface of the support 60; each pair of guide rail sliders is respectively installed on a horizontal longitudinal guide rail 59, 61 and can slide along the guide rail, A limit stop 63 is also fixed on the horizontal longitudinal guide rail 61; a workpiece detection platform 13 is installed above the support 60, and a horizontal long-through groove 12 is opened on the workpiece detection platform 13, and the workpiece 11 is placed on the workpiece detection platform 13 and horizontally long through the groove 12, a limit block 63 is installed on the side of the lower end of the support 60.

本实施例的板状工件上下平面的平面度及平行度检测装置工作时,操作者把平板工件11放在工件检测平台13的横向长穿槽12正上方位置,并把滑台14推向激光检测装置的正下方,使接近感应块65正对着接近开关16,由于经过事先安装调整,此时,两激光传感器9、10的激光正好可以打到工作平台13上平板工件11处于槽12的位置上,同时,计算机采集到接近开关的状态,判断滑台14位置就绪,启动计算机测试程序,电机56带动垂直驱动螺杆36转动,垂直驱动螺杆36带动驱动螺母43、53一起向工件11的方向运动,驱动螺母43、53带动固定安装在其上的小盖板34、39,进而带动固定安装在小盖板34、39上的接近开关支架49、46带着激光传感器9、10运动到激光传感器的量程范围内,由于激光传感器9、10不需要接触工件11即可探测工件11到其在激光束方向的距离,因此,可实现非接触式测量,此时,接近开关45感应到接近感应块50,并通过通讯装置传给计算机信号,计算机判断激光传感器开始测量位置就绪,计算机通过激光传感器9、10采集工件11上下表面一点的竖直方向的位置数据(记为Z方向数据),同时记录光栅尺4此时的读数(记为X方向数据),接着,控制电机26带动螺杆24转动,螺杆24带动螺母21,,螺母带动盖板22运动,盖板22拖动安装在其上的整个激光传感器垂直移动机构7运动一小段固定的距离,这段距离由程序设定,同时,计算机采集光栅尺4的读数,得到实际运动距离的大小,当该距离大小达到设定值时,控制电机26停下,开始通过激光传感器9、10采集平板工件11上下表面第二点的竖直方向的位置数据,循环下去,计算机得到一组这样的数据(这组点在三维坐标系下除了上面所述X、Z方向以外的Y方向数据,全部记为零),此时,激光传感器垂直移动机构7运动到横向移动机构3的一端,接着,操作者把滑台14往前推动,使接近感应块29正对着接近开关19,计算机判断滑台14进入第二个测量位置,启动计算机程序进入下一工作步骤,计算机控制电机26反方向运动,并采集第二排点的Z方向数据,方法同采集第一组点时相同。在三维坐标系中Y方向数据均记为两位置之差;两排X方向数据是程序设定并通过控制电机运动具体实现的。根据各个点X、Y、Z方向的数据,可以在计算机里拟合出平板工件的上下平面,进一步可以评价出上下平面的平面度及平行度。When the flatness and parallelism detection device of the upper and lower planes of the plate-shaped workpiece in this embodiment is working, the operator places the flat workpiece 11 directly above the transverse long-through groove 12 of the workpiece detection platform 13, and pushes the slide table 14 towards the laser beam. Right below the detection device, the proximity sensing block 65 is facing the proximity switch 16. Due to the installation and adjustment in advance, the lasers of the two laser sensors 9 and 10 can just hit the flat workpiece 11 on the working platform 13 where the groove 12 is located. At the same time, the computer collects the state of the proximity switch, judges that the position of the slide table 14 is ready, starts the computer test program, the motor 56 drives the vertical drive screw 36 to rotate, and the vertical drive screw 36 drives the drive nuts 43, 53 to the direction of the workpiece 11 together Movement, the drive nuts 43,53 drive the small cover plates 34,39 fixedly installed thereon, and then drive the proximity switch brackets 49,46 fixedly installed on the small cover plates 34,39 to move to the laser sensor 9,10. Within the range of the sensor, since the laser sensors 9 and 10 can detect the distance from the workpiece 11 to the laser beam direction without contacting the workpiece 11, non-contact measurement can be realized. At this time, the proximity switch 45 senses the proximity sensor Block 50, and transmit computer signal by communication device, computer judges that laser sensor begins to measure the position and is ready, and computer collects the vertical position data (recorded as Z direction data) of a point on the upper and lower surfaces of workpiece 11 by laser sensor 9,10, simultaneously Record the reading of the grating ruler 4 at this time (recorded as the X direction data), then, the control motor 26 drives the screw rod 24 to rotate, the screw rod 24 drives the nut 21, the nut drives the cover plate 22 to move, and the cover plate 22 drags the screw rod installed thereon. The entire laser sensor vertical moving mechanism 7 moves a small fixed distance, which is set by the program. At the same time, the computer collects the readings of the grating ruler 4 to obtain the actual moving distance. When the distance reaches the set value, the control Motor 26 stops, and starts to collect the vertical position data of the second point on the upper and lower surfaces of the flat workpiece 11 by laser sensors 9,10, and the cycle goes on, and the computer obtains a group of such data (this group of points is except the above under the three-dimensional coordinate system) The Y direction data other than the X and Z directions are all marked as zero), at this time, the laser sensor vertical movement mechanism 7 moves to one end of the lateral movement mechanism 3, and then, the operator pushes the slide table 14 forward to make the approaching The sensing block 29 faces the proximity switch 19, the computer judges that the slide table 14 enters the second measurement position, starts the computer program and enters the next working step, the computer controls the motor 26 to move in the opposite direction, and collects the Z-direction data of the second row of points, The method is the same as when collecting the first set of points. In the three-dimensional coordinate system, the data in the Y direction is recorded as the difference between the two positions; the two rows of X direction data are set by the program and realized by controlling the movement of the motor. According to the data in the X, Y, and Z directions of each point, the upper and lower planes of the flat workpiece can be fitted in the computer, and the flatness and parallelism of the upper and lower planes can be evaluated further.

Claims (7)

1. the flatness and the depth of parallelism pick-up unit of lower plane on the plate workpiece, comprise base [1], workpiece sensing platform [13] and laser sensor [9,10], it is characterized in that a side is installed a transverse moving mechanism [3] by a fixing perpendicular side plate [2] above the described base [1], described transverse moving mechanism [3] is gone up a fixed installation laser sensor vertical movement mechanism [7], and the vertical moving frame of the upper and lower side of described laser sensor vertical movement mechanism [7] fixedly mounts two described laser sensors [9,101 respectively on [8,15]; Described base [1] but go up opposite side the vertically slide unit [14] of positioning of a level be installed, described slide unit [14] is gone up a fixed installation workpiece sensing platform [13], the centre that described workpiece sensing platform [13] is gone up place work piece [11] has a laterally long groove [12] of wearing; During work, described two laser sensors [9,10] are in the upper and lower of described workpiece [1] respectively and aim at described horizontal length and wear groove [12].
2. according to claims 1 described plate workpiece up and down flatness and the depth of parallelism pick-up unit on two planes, it is characterized in that, the structure of described transverse moving mechanism [3] is: a fixing base [30] is fixedlyed connected with described perpendicular side plate [2], the vertical plane of described fixing base [30] up and down both sides each fix a cross slide way [25,29], two cross slide waies [25,29] respectively with two traversing slide blocks [23,31] slip coupling, two traversing slide blocks [23,3 1] it is fixedly connected to fixedly connected the cover plate [22] of laser sensor vertical movement mechanism [7] with one, the fixedly connected end plate of one end of described fixing base [30] [27] fixedly mounts servomotor [26] on this end plate; A horizontal drive screw is supported by bearing [28], makes the one end connect the output terminal of described motor [26], and the other end and nut [21] revolve joins, and described nut [21] is fixedly installed on the inboard vertical plane of described fixing base [30].
3. the flatness of lower plane and depth of parallelism pick-up unit on the plate workpiece according to claim 2, a grating chi of top installation [4] that it is characterized in that the fixing base [30] of described transverse moving mechanism [3], the movable part [6] of described grating chi [4] is fixedly connected by web joint [5], described web joint [5] be positioned at laser sensor vertical movement mechanism [7] on to be connected the vertical web joint [20] of transverse moving mechanism [3] fixedly connected.
4. the flatness of lower plane and depth of parallelism pick-up unit on the plate workpiece according to claim 1, it is characterized in that, one side of described base [1] is equipped with two near switch bracket [17,18], each is near respectively installing one near switch [16,19] on the switch bracket [17,18], and be equipped with on the side of described slide unit [14] one corresponding to it switch block [65].
5. according to the flatness and the depth of parallelism pick-up unit of lower plane on claims 1 described plate workpiece, the structure that it is characterized in that described laser sensor vertical mechanism [7] is: a vertical substrate [42] is fixedlyed connected with cover plate [22] by described vertical web joint [20], vertically pass through block [32 on the both sides, front and back of the vertical plane of substrate [42], 40,52] two vertical guide stem [37 of support fixation, 35], each two vertical slipper [33 up and down, 51,38,41] respectively with each minor flaps [34 up and down, 39] fixedly connected, two minor flaps [34 up and down, 39] the fixedly connected installation laser sensor [9 of difference, 10] vertical moving frame [8,15]; A vertical drive screw rod [36] is supported by bearing [54], make the one end be connected and installed in the output shaft of the motor [56] on the fixed charge method end plate [31] of vertical substrate [42] one ends, and the other end and two drive nuts [53,43] revolve and join, and described two drive nuts [53,43] are fixedly mounted on respectively up and down on the inboard vertical plane of two minor flaps [34,39]; One side of described vertical substrate [42] is respectively installed one respectively near switch [48,45] by two near switch bracket [49,46], correspondingly installs one near sensor block [50] on the side of minor flaps [34] on described.
6. according to the flatness and the depth of parallelism pick-up unit of lower plane on claims 1 described plate workpiece, the structure that it is characterized in that described slide unit mechanism [14] is: two horizontal longitudinal rails [59,61] be fixedly mounted on the described base [1], four guide rail slide blocks [57,58,62,64] respectively with described two horizontal longitudinal rails [59,61] slip coupling, four guide rail slide blocks [57,58,62,64] a fixedly connected support [60], fixed installation described workpiece sensing platform [13] above the support [60], a side of support [60] are equipped with limited block [63] and near sensor block [65].
7. according to the flatness and the depth of parallelism pick-up unit of lower plane on claims 1 described plate workpiece, it is characterized in that under the described base [1] electric mounting box being arranged, the driver of two motors [26,56] is housed in the electric mounting box, the data processing circuit of the power supply unit of two laser sensors [9,10] and grating chi [4] and input computing machine, the tie line of the input computing machine of contact-making switch [16,19,48,45] etc., and these data circuits are linked to each other with a control computer; The internal configurations one blocks of data capture card of control computer; The signal of described electrical equipment except that grating chi [4] all links to each other with this data collecting card by described data circuit with data, and with compunication, accept computer control; Described grating chi [4] carries out exchanges data by the corresponding interface and the computing machine of computing machine.
CNU2007200693157U 2007-04-25 2007-04-25 Flatness and parallelism detection device for the upper and lower planes of plate-shaped workpieces Expired - Fee Related CN201034559Y (en)

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CN105043307A (en) * 2015-08-06 2015-11-11 苏州金牛精密机械有限公司 Tool for detecting plate flatness
CN105091802A (en) * 2015-09-09 2015-11-25 华中科技大学 Portable two-dimensional following laser measurement device based on laser distance measuring sensor
CN105241399A (en) * 2015-09-09 2016-01-13 合肥芯碁微电子装备有限公司 Method of measuring dynamic flatness of precision positioning platform
CN105371776A (en) * 2015-12-09 2016-03-02 上海电机学院 Device for detecting damage degree of electric welding electrode head
CN106767659A (en) * 2016-12-20 2017-05-31 武汉钢铁股份有限公司 Automatic coarseness measuring apparatus
CN106931846A (en) * 2015-12-29 2017-07-07 天津宝涞精工集团股份有限公司 A kind of large-scale housing special inspecting equipment
CN107907077A (en) * 2017-12-26 2018-04-13 宁波旭升汽车技术股份有限公司 A kind of radiator heat-dissipation section testing agency
CN108151678A (en) * 2018-01-25 2018-06-12 国网浙江省电力有限公司电力科学研究院 Portable porcelain bottle faces parallel and concentricity testing device and its detection method
CN108151809A (en) * 2018-01-17 2018-06-12 亿和精密工业(苏州)有限公司 A kind of hardware stamping part multiple functions detection device
CN108534678A (en) * 2018-04-25 2018-09-14 湖南工业大学 Rock sample geometrical defect measuring device
CN109029336A (en) * 2018-10-06 2018-12-18 嘉兴正野新材料有限公司 A kind of automobile gear surface flatness detection device
CN109373879A (en) * 2018-12-11 2019-02-22 湖北钜鑫工贸有限公司 Parts external dimension detection device and detection method
CN109974632A (en) * 2017-12-28 2019-07-05 苏州固曼特精密机械有限公司 A flatness automatic detection device
CN110031352A (en) * 2019-05-15 2019-07-19 河南省计量科学研究院 Rockwell apparatus Standard Machine and hardness calibration method
CN110220483A (en) * 2019-06-28 2019-09-10 江苏省百斯特检测技术有限公司 Three axial plane degree detection systems of one kind and its detection method
CN110440724A (en) * 2019-08-14 2019-11-12 莱赛激光科技股份有限公司 A kind of planar smoothness detection device and detection method
CN110567405A (en) * 2019-09-29 2019-12-13 北京林业大学 Flat panel detection device and flatness calculation method
CN111141235A (en) * 2019-12-31 2020-05-12 浙江合众新能源汽车有限公司 A rapid identification of stamping sheet deformation aids
CN111928800A (en) * 2020-06-01 2020-11-13 深圳市誉辰自动化设备有限公司 Non-contact type detector for battery appearance
CN112097697A (en) * 2020-09-17 2020-12-18 江苏安全技术职业学院 Disc cover part flatness detection device for automobile machinery
CN112361986A (en) * 2020-11-27 2021-02-12 中国科学院沈阳自动化研究所 Section three-dimensional appearance detection device and measurement method thereof
CN114812454A (en) * 2022-05-31 2022-07-29 佛山市顺德区乐普达电机有限公司 Motor casing end cover straightness depth of parallelism detector that hangs down
CN115183688A (en) * 2022-06-10 2022-10-14 国珑智能科技(威海)有限公司 Detection system for flatness and thickness of household appliance door body

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TWI485359B (en) * 2011-03-30 2015-05-21 Hon Hai Prec Ind Co Ltd System and method for flatness measuring by laser
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CN103363913A (en) * 2013-04-25 2013-10-23 苏州方林科技股份有限公司 Workpiece detecting equipment
CN103363913B (en) * 2013-04-25 2014-06-11 苏州方林科技股份有限公司 Workpiece detecting equipment
CN103292702A (en) * 2013-06-25 2013-09-11 湖北工业大学 Geometric dimension measuring instrument of silicon rod
CN103292702B (en) * 2013-06-25 2015-12-09 湖北工业大学 A kind of silicon rod physical dimension measuring instrument
CN103822589A (en) * 2014-02-12 2014-05-28 元虎虎 Thickness and flatness testing machine
CN103983218A (en) * 2014-03-26 2014-08-13 东莞市天勤仪器有限公司 Multi-laser flatness measuring instrument
CN104266614A (en) * 2014-09-03 2015-01-07 上海大学 Full-automatic panel planeness detection device
CN104266614B (en) * 2014-09-03 2017-05-10 上海大学 Full-automatic panel planeness detection device
CN105043307B (en) * 2015-08-06 2017-09-29 刘建华 A kind of plate flatness detection tool
CN105043307A (en) * 2015-08-06 2015-11-11 苏州金牛精密机械有限公司 Tool for detecting plate flatness
CN105241399B (en) * 2015-09-09 2018-04-10 合肥芯碁微电子装备有限公司 A kind of measuring method of precisely locating platform dynamic flatness
CN105091802A (en) * 2015-09-09 2015-11-25 华中科技大学 Portable two-dimensional following laser measurement device based on laser distance measuring sensor
CN105241399A (en) * 2015-09-09 2016-01-13 合肥芯碁微电子装备有限公司 Method of measuring dynamic flatness of precision positioning platform
CN105371776A (en) * 2015-12-09 2016-03-02 上海电机学院 Device for detecting damage degree of electric welding electrode head
CN106931846A (en) * 2015-12-29 2017-07-07 天津宝涞精工集团股份有限公司 A kind of large-scale housing special inspecting equipment
CN106767659A (en) * 2016-12-20 2017-05-31 武汉钢铁股份有限公司 Automatic coarseness measuring apparatus
CN107907077A (en) * 2017-12-26 2018-04-13 宁波旭升汽车技术股份有限公司 A kind of radiator heat-dissipation section testing agency
CN109974632A (en) * 2017-12-28 2019-07-05 苏州固曼特精密机械有限公司 A flatness automatic detection device
CN108151809A (en) * 2018-01-17 2018-06-12 亿和精密工业(苏州)有限公司 A kind of hardware stamping part multiple functions detection device
CN108151678A (en) * 2018-01-25 2018-06-12 国网浙江省电力有限公司电力科学研究院 Portable porcelain bottle faces parallel and concentricity testing device and its detection method
CN108534678A (en) * 2018-04-25 2018-09-14 湖南工业大学 Rock sample geometrical defect measuring device
CN109029336A (en) * 2018-10-06 2018-12-18 嘉兴正野新材料有限公司 A kind of automobile gear surface flatness detection device
CN109373879A (en) * 2018-12-11 2019-02-22 湖北钜鑫工贸有限公司 Parts external dimension detection device and detection method
CN109373879B (en) * 2018-12-11 2024-04-16 湖北钜鑫工贸有限公司 Part outline dimension detection device and detection method
CN110031352A (en) * 2019-05-15 2019-07-19 河南省计量科学研究院 Rockwell apparatus Standard Machine and hardness calibration method
CN110220483A (en) * 2019-06-28 2019-09-10 江苏省百斯特检测技术有限公司 Three axial plane degree detection systems of one kind and its detection method
CN110440724A (en) * 2019-08-14 2019-11-12 莱赛激光科技股份有限公司 A kind of planar smoothness detection device and detection method
CN110567405A (en) * 2019-09-29 2019-12-13 北京林业大学 Flat panel detection device and flatness calculation method
CN111141235B (en) * 2019-12-31 2021-11-05 浙江合众新能源汽车有限公司 A rapid identification of stamping sheet deformation aids
CN111141235A (en) * 2019-12-31 2020-05-12 浙江合众新能源汽车有限公司 A rapid identification of stamping sheet deformation aids
CN111928800A (en) * 2020-06-01 2020-11-13 深圳市誉辰自动化设备有限公司 Non-contact type detector for battery appearance
CN112097697A (en) * 2020-09-17 2020-12-18 江苏安全技术职业学院 Disc cover part flatness detection device for automobile machinery
CN112361986A (en) * 2020-11-27 2021-02-12 中国科学院沈阳自动化研究所 Section three-dimensional appearance detection device and measurement method thereof
CN114812454A (en) * 2022-05-31 2022-07-29 佛山市顺德区乐普达电机有限公司 Motor casing end cover straightness depth of parallelism detector that hangs down
CN114812454B (en) * 2022-05-31 2024-02-09 佛山市顺德区乐普达电机有限公司 Motor casing end cover straightness depth of parallelism detector that hangs down
CN115183688A (en) * 2022-06-10 2022-10-14 国珑智能科技(威海)有限公司 Detection system for flatness and thickness of household appliance door body

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