CN200979606Y - A raster single-forming device - Google Patents

Abstract

The utility model discloses a device for manufacturing a circular grating by one-time forming, which solves the problems of the prior art, such as more equipment, higher cost, poor linearity of grating lines, long cycle and the like. Technical solution: It is composed of a laser, an exposure time controller, a beam expander, a collimator, an optical linear element made of transparent optical materials, and a carrier frame, and is installed on the base in sequence; the laser emitted by the laser, after the exposure time The controller controls, expands the beam of the beam expander, adjusts the parallel light of the collimator; installs the optical linear element on the parallel optical axis, so that all the output light passes through the center of the optical linear element, and forms on the back focal plane of the optical linear element Mount the carrier holder at the location of the interference pattern. The utility model is easy to adjust the optical path, can be used for a long time after the optical path is adjusted, greatly simplifies the process of manufacturing the circular grating, saves time and labor, improves work efficiency and reliability, greatly reduces the manufacturing cost of the circular grating, and the grating lines are neat and smooth. Good linearity and high precision.

Description

A device for manufacturing circular gratings in one shot

Technical field

The utility model relates to a device for manufacturing a circular grating, in particular to a device for manufacturing a circular grating with one-time forming grating lines.

technical background

It is well known that the amount of optical discs is huge, and most of the devices used to manufacture gratings are long and circular line scribe machines. Taking photolithography as an example to manufacture a circular grating is roughly as follows:

A mechanical knife carves a single slit on the glass sheet coated with an opaque color layer, and uses a "knife" to carve a light-transmitting single slit. The width of the single slit depends on factors such as the line width of the circular grating and the manufacturing process of the single slit. 5-10um. Optical lithography fan-shaped, install the single slit on the boat of the circular engraving machine bracket (also called the knife bridge), adjust the center distance between the single slit and the circular engraving machine (that is, the radius of the circular grating line) and eccentricity, and put the coated The glass substrate with photosensitive material is placed on the workbench tray of the circular engraving machine (just below the light-transmitting single slit), and a light source exposure device is placed above the support (directly above the light-transmitting single slit), and the circular engraving machine is rotated. After the wire machine and the light source exposure device are started, the image of the single slit can be projected onto the photosensitive substrate to form a group of reticulated fan shapes, and the ratio of 360° to the size of the fan angle is an integer m. Multiplication method photolithography circular grating, replace the single slit with a fan-shaped piece, adjust the distance and eccentricity, place the circular grating blank coated with photosensitive material on the circular reticle tray, start the light source exposure device and rotate the circular reticle, so that The image of a group of fan-shaped grating lines is projected onto the circular grating blank carrier, the circular engraving machine rotates 360°, and after exposing m times, a full circle of grating lines is obtained on the circular grating blank carrier; developing, degumming, baking After drying, it becomes a complete circular grating. This traditional device for manufacturing circular gratings has unsatisfactory quality of the grating lines, that is, the edges of the grating lines are hairy, the steepness is small, and the straightness is poor, so they cannot be formed at one time. These will directly affect the quality of the grating; and the manufacturing process is many, complicated and the cycle is long.

In addition, a laser direct writing device is used to replace the circular engraving machine, that is, a laser direct writing device is used to scan and expose the grating blank carrier coated with photosensitive materials. Although this process is automatically controlled by a computer, it still cannot be formed at one time. Displacement sensor, driving device, optical scanning head, etc. can only be completed when the six are adjusted repeatedly to form a closed loop, and the quality of the grid line is still not very satisfactory, and more equipment is used, and the manufacturing cost is higher.

Contents of utility model

The purpose of the utility model is to overcome the deficiencies of the prior art, and provide a device which is easy to manufacture, high in precision and low in cost, and can be formed and manufactured at one time to manufacture circular gratings.

In order to achieve the purpose of the utility model, the utility model adopts the technical scheme: the device for manufacturing the circular grating by forming at one time is an optical linear element made of a laser, an exposure time controller, a beam expander, a collimating mirror, and transparent optical materials. , carrier frame, and installed on the base in turn; the laser emitted by the laser is controlled by the exposure time controller, the beam expander expands the beam, and the front and rear positions of the collimator are adjusted to generate parallel light; on the parallel optical axis The optical linear element is installed so that all output light passes through the center of the optical linear element, and the carrier frame is installed at the position where the back focal plane of the optical linear element forms an interference pattern.

In order to make the device have better versatility and meet the needs of adjusting the optical path of gratings with different specifications, all the devices of the utility model are installed on the base through the adjustable frame

The material of the optical linear element described in the utility model is transparent optical plastic, such as organic glass, resin and other optical materials.

Compared with the prior art, the utility model has the following advantages: adopting the device of the utility model to manufacture laser gratings can form a full circle of circular grating lines at one time. Insert the record carrier coated with photosensitive material into the carrier frame on which the interference pattern is formed on the rear focal plane, and the laser beam is shot on the record carrier to obtain a full circle of circular grating lines, that is, a full circle of circular grating lines formed at one time. The fabrication process of the grating takes only 2-4 minutes. Compared with the prior art of "mechanical knife engraving single slit, optical lithography sector and multiplication method photolithography circular grating" and "using laser direct writing device to scan and expose the grating blank coated with photosensitive material, the circular grating line is automatically controlled by computer "In comparison, it is simple and portable to make, and its optical path is easy to adjust. After the optical path is adjusted, the grating of one specification can be used for a long time, which is convenient for mass production, greatly simplifies the process of manufacturing circular gratings, greatly shortens the time, and saves time. It saves labor, improves work efficiency and reliability, greatly reduces manufacturing cost, and has neat grid lines, good linearity and high precision.

Description of drawings

The overall structure schematic diagram of Fig. 1 the utility model, wherein: laser device 1, exposure time controller 2, beam expander mirror 3, collimator mirror 4, optical linear element 5, carrier frame 6, base 7; Fig. 2 linear element structural representation; Fig. 3 is a schematic diagram of the optical path for manufacturing a circular grating by direct laser irradiation on a linear element, in which: a laser 1, an exposure time controller 2, a beam expander 3, a collimator 4, an optical linear element 5, and a record carrier 6x.

Detailed ways

Below in conjunction with accompanying drawing, the utility model is described in further detail. As shown in Figure 1, it is a schematic diagram of the overall structure of the device for manufacturing a circular grating by one-time forming of the present invention. The base [7] is a 5mm thick steel plate or iron plate with a size of 1000mm×400mm, which is used to install various components in the optical path . The laser [1] adopts a single-mode helium-neon laser with a wavelength of 632.8nm, and is installed at the front end of the base [7]. An exposure time controller [2] is installed at a position 100 mm away from the exit of the laser [1]. The exposure time controller [ 2] Use the DSQ-II exposure timer; install the beam expander [3] at a distance of 100mm from the exposure time controller [2]. On the front focal plane of the collimator lens [4] of 150mm, the collimator lens [4] selects φ45mm f=140mm for use, and adjusts the front and rear positions of the collimator lens to make it produce parallel light; install an optical linear element on the parallel optical axis [ 5], make all the output light pass through the center of the optical linear element [5], install the carrier frame [6] at the position where the back focal plane of the linear element [5] forms an interference pattern. The light path of the utility model is shown in Fig. 3, and the light path is easy to adjust. After the light path is adjusted, the grating of one specification can be used for a long time, which is convenient for mass production. In order to make the device have better versatility, meet the needs of adjusting the light path of gratings with different specifications, and make the device more humanized, all components of the device are installed on the base through adjustable frames.

Optical linear element [5] is to complete the key device of the present utility model, and its manufacturing method is: the diameter that becomes with 45mm*45mm*25mm K9 glass rough machining is 40mm, and height is 22mm isosceles tapered blank; Then rough grinding with carborundum 40mm in diameter and 22mm in height isosceles conical blank, and then polished with abrasive paste until it is made into a transparent isosceles cone with a diameter of 40mm and a height of 22mm, as shown in Figure 2. Transparent optical plastics for optical components, such as plexiglass, resin and other optical materials. It can also be made by casting and polishing in prefabricated molds. The machining accuracy of the linear element should be high. If the tapered surface is not straight, the formed interference ring is not round, which will affect the linearity of the grating. Therefore, the tapered surface must be straight. The linear element stripes are 0.8 μm. According to the needs of the stripes, the diameter and height of the adjustable cone can be processed into different linear elements, which are used to manufacture circular gratings with different stripes.

Manufacture of circular grating: place the record carrier 6x coated with photosensitive material on the carrier frame [6]: turn on the laser [1], exposure time controller [2], the beam emitted by the laser passes through the exposure time controller [2] By controlling the exposure time, a full circle of circular grating lines can be obtained on the record carrier 6x, that is, a full circle of circular grating lines can be formed at one time, which is convenient and quick. Exposure - The exposure time is determined by the photosensitive material on the record carrier 6x, which can be: silver salt latex, gelatin, photoresist, photosensitive material, thermoplastic, etc. The photosensitive material after exposure is subjected to physical and chemical treatment such as developing, fixing, bleaching, etc., washed with water, and dried naturally or air-dried to complete the manufacture of all the grid line patterns of the circular grating required by the design. The record carrier can be: glass, metal, plastic, organic glass, resin, wood and derivatives, etc. According to actual needs, as long as the recording carrier is replaced, it can be produced in batches according to requirements.

The laser directly irradiates the optical linear element to manufacture the circular grating, and the manufacturing process of each circular grating takes only 2-4 minutes. The circular grating produced by the utility model has good quality, neatness, good linearity and high precision.

Claims (3)

1. the device of once-forming manufacturing circle grating is characterized in that it is to be made of laser instrument, time shutter controller, beam expanding lens, collimating mirror, the optics linear element, the carrier rack that utilize transparent optical material to make, and is installed on the base successively; Laser by laser instrument sends expands bundle through time shutter controller control, beam expanding lens, the directional light that the front and back position of adjustment collimating mirror makes it to produce; The optics linear element is installed on the directional light axis, and all light that make output form the position installation carrier rack of interference pattern all by the center of optics linear element at the back focal plane of optics linear element.

2. the device of once-forming manufacturing circle grating according to claim 1 is characterized in that all devices all are to be installed on the base by adjustable articulator.

3. the device of once-forming manufacturing circle grating according to claim 1, the material that it is characterized in that the optics linear element is the transparent optical plastics, as organic glass, optical materials such as resin.

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