CN209800217U - Micro Gas Delivery Device - Google Patents

Abstract

A micro gas conveying device comprises an air inlet plate, a resonance sheet, a piezoelectric actuator, an insulation sheet and a conducting sheet which are sequentially stacked. The air inlet plate is provided with an air inlet hole, a bus bar hole and a bus chamber. The resonator plate has a hollow hole. The piezoelectric actuator and the resonance sheet define a cavity space, the piezoelectric actuator comprises a suspension plate, an outer frame, a connecting part and a piezoelectric element, and the connecting part is connected between the suspension plate and the outer frame and defines a gap for gas circulation. The conducting strip is provided with a conducting inner pin for electrically connecting the piezoelectric element. When the piezoelectric actuator is driven, gas is introduced from the gas inlet hole, flows through the confluence chamber and the hollow hole, is introduced into the chamber space, and is discharged through the gap, so that the gas is transmitted.

Description

Micro Gas Delivery Device

technical field

This case is about a pneumatic power device, especially a miniature ultra-thin and silent miniature gas delivery device.

Background technique

At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, the fluid delivery included in products such as micro pumps, sprayers, inkjet heads, and industrial printing devices Structure is its key technology, so how to use innovative structure to break through its technical bottleneck is an important content of development.

For example, in the pharmaceutical industry, many instruments or equipment that need to be driven by pneumatic power usually use traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, limited by the volume limitations of the traditional motors and gas valves, it is difficult to reduce the volume of the overall device of this type of equipment, that is, it is difficult to achieve the goal of thinning, let alone achieve the purpose of portability. In addition, traditional motors and gas valves also generate noise during operation, resulting in inconvenience and discomfort in use.

Therefore, how to develop a micro-gas delivery device that can maintain a certain working characteristic and flow rate under long-term use is an urgent problem to be solved at present.

Utility model content

The main purpose of this case is to provide a micro gas delivery device, the gas enters from the air inlet on the micro gas delivery device, and the action of the piezoelectric actuator is used to make the gas flow in the designed flow channel and confluence chamber A pressure gradient is generated to make the gas flow at a high speed, so that the micro gas delivery device can achieve the effect of silence, and the overall volume of the micro gas power device can be reduced and thinned, so that the micro gas power device can be light, comfortable and portable formula purpose.

In order to achieve the above purpose, a more generalized implementation of this case is to provide a micro-gas delivery device, including: an air inlet plate with at least one air inlet, at least one confluence discharge hole and a confluence chamber, at least one of which The inlet hole is used to introduce gas, at least one of the inlet holes corresponds to at least one of the confluence row holes, at least one of the confluence row holes is correspondingly connected to the confluence chamber, and the gas is guided to flow into the confluence cavity through at least one of the inlet holes Indoor: a resonant plate, which is bonded to the air intake plate, has a hollow hole, a movable part and a fixed part, the hollow hole is located at the center of the resonant plate, and is connected with the confluence cavity of the air intake plate corresponding to the chamber; a piezoelectric actuator is assembled and combined with the resonant plate through a filling material to form a cavity space, and the piezoelectric actuator includes a suspension plate, an outer frame, at least one connecting portion, A piezoelectric element and at least one gap, at least one connecting portion is connected between the suspension board and the outer frame to provide elastic support, at least one gap is provided between the suspension board and the outer frame to provide gas circulation, and the The piezoelectric element is attached to the suspension plate; an insulating sheet, combined with one side of the piezoelectric actuator; and a conductive sheet, combined with the insulating sheet, has a conductive inner pin that is punched out integrally, A conductive position is extended inward from any side of the conductive sheet for contacting, engaging, and positioning connection with the surface of the piezoelectric element; wherein, when the piezoelectric actuator is driven, the gas flows from the gas inlet plate At least one of the air inlet holes is introduced, collected into the confluence chamber through at least one of the confluence row holes, and then flows through the hollow hole of the resonant plate into the cavity space, and then transmitted through the resonance action of the piezoelectric actuator. gas.

Description of drawings

FIG. 1 is a schematic diagram of the three-dimensional appearance of the micro gas delivery device of the present case.

FIG. 2A is an exploded schematic view of the micro-gas delivery device of the present invention viewed from the front direction.

FIG. 2B is an exploded schematic view of the micro-gas delivery device of the present invention viewed from the back direction.

FIG. 3A is a schematic cross-sectional view of the micro-gas delivery device of the present invention.

FIG. 3B is a schematic cross-sectional view of another preferred embodiment of the micro gas delivery device of the present invention.

Fig. 4 is an enlarged partial schematic diagram of the conductive inner pin of the micro gas conveying device of the present case.

5A to 5C are schematic diagrams of the implementation of the micro-gas delivery device in FIG. 3A .

Explanation of reference signs

1: Miniature gas delivery device

11: Air intake plate

11a: Air intake hole

11b: busbar hole

11c: Confluence chamber

12: Resonant film

12a: hollow hole

12b: Movable part

12c: fixed part

13: Piezoelectric Actuator

13a: Hoverboard

131a: first surface

132a: second surface

13b: Outer frame

131b: Assembly surface

132b: lower surface

133b: conductive pin

13c: connection part

13d: piezoelectric element

13e: Gap

13f: Convex part

131f: Convex surface

14: insulation sheet

15: Conductive sheet

151a: Conductive pin

151b: Conductive inner pin

1511b: extension

1512b: Fork

16: Chamber space

g: filling material

h: Spacing

θ: bending angle

H: bending height

P: middle interval distance

Detailed ways

Embodiments embodying the features and advantages of this case will be described in detail in the description of the latter paragraph. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are used as illustrations in nature, rather than construed to limit this case.

Please refer to Fig. 1, Fig. 2A, Fig. 2B and shown in Fig. 3A, the micro gas conveying device 1 of this case comprises a gas inlet plate 11, a resonant plate 12, a piezoelectric actuator 13, an insulating Sheet 14, a conductive sheet 15 is formed.

The air intake plate 11 has at least one air intake hole 11a, at least one confluence row hole 11b and a confluence chamber 11c. The number of 11a and the busbar hole 11b is 4 for example, but not limited thereto; the four air inlet holes 11a respectively pass through the four busbar holes 11b, and the four busbar holes 11b converge to the confluence chamber 11c.

The above-mentioned resonant plate 12 can be assembled on the air intake plate 11 by bonding, and the resonant plate 12 has a hollow hole 12a, a movable part 12b and a fixed part 12c, and the hollow hole 12a is located on the resonant plate 12 and corresponding to the confluence chamber 11c of the air intake plate 11, and the movable part 12b is arranged around the hollow hole 12a and opposite to the confluence chamber 11c, and is arranged on the outer peripheral portion of the resonant plate 12 The fixed portion 12 c is attached to the air intake plate 11 .

The above-mentioned piezoelectric actuator 13 includes a suspension plate 13a, an outer frame 13b, at least one connecting portion 13c, a piezoelectric element 13d, at least one gap 13e and a convex portion 13f; wherein, the suspension plate 13a is a square The suspension board has a first surface 131a and a second surface 132a opposite to the first surface 131a. The outer frame 13b is arranged around the periphery of the suspension board 13a, and the outer frame 13b has a matching surface 131b and a lower surface 132b, and is transparent Connect between the suspension board 13a and the outer frame 13b through at least one connecting portion 13c to provide elastic support for the suspension board 13a, wherein the first surface 131a of the suspension board 13a and the assembly surface 131b of the outer frame 13b both form Coplanar, and the second surface 132a of the suspension board 13a and the lower surface 132b of the outer frame 13b both form a coplanar plane, and the gap 13e is the space between the suspension board 13a, the outer frame 13b and the connecting part 13c, used for gas pass. In addition, the first surface 131a of the suspension plate 13a has a convex portion 13f. In this embodiment, the peripheral edge of the convex portion 13f and the joint adjacent to the connecting portion 13c are recessed through an etching process to make the suspension plate The protrusion surface 131f of the protrusion 13f of the protrusion 13a is higher than the first surface 131a, forming a stepped structure. In addition, the outer frame 13b is disposed around the outer side of the suspension board 13a, and has a conductive pin 133b protruding outward for power supply connection, but not limited thereto.

The above-mentioned resonant plate 12 and the piezoelectric actuator 13 are stacked and assembled with each other through a filling material g to form a cavity space 16 between them, and the filling material g can be a conductive glue, but it is not taken as a limit, so that the depth of the interval h can be maintained between the resonant plate 12 and the convex surface 131f of the convex portion 13f of the piezoelectric actuator 13, and then the airflow can be guided to flow more rapidly, and due to the convex portion of the suspension plate 13a 13f keeps an appropriate distance from the resonant plate 12, so that the mutual contact and interference are reduced, and the generation of noise is reduced; in other embodiments, as shown in FIG. The filling materials g are stacked and assembled to form a cavity space 16 between them, and the suspension plate 13a can also be used to press and form it to be depressed downward, and the sag distance can be formed on the suspension plate 13a by at least one connecting portion 13c Adjusted with the outer frame 13b so that the convex surface 131f of the convex portion 13f on the suspension board 13a and the assembly surface 131b of the outer frame 13b form a non-coplanar surface, that is, the convex surface 131f of the convex portion 13f The assembly surface 131b lower than the outer frame 13b, and the second surface 132a of the suspension board 13a is lower than the lower surface 132b of the outer frame 13b, and the piezoelectric element 13d is attached to the second surface 132a of the suspension board 13a, and the convex The portion 13f is opposite to each other. After the piezoelectric element 13d is applied with a driving voltage, it will deform due to the piezoelectric effect, and then drive the suspension plate 13a to vibrate; a small amount of filler g is applied to the assembly surface 131b of the outer frame 13b to heat The piezoelectric method enables the piezoelectric actuator 13 to be attached to the fixing portion 12 c of the resonant piece 12 , so that the piezoelectric actuator 13 can be combined with the resonant piece 12 . Wherein the spacing h formed between the first surface 131a of the suspension plate 13a and the resonant plate 12 will affect the transmission effect of the micro-gas delivery device 1, so maintaining a fixed spacing h provides stable transmission efficiency for the micro-gas delivery device 1. It is very important that the micro-gas delivery device 1 of this case uses a stamping method for the piezoelectric actuator 13, so that the suspension plate 13a is depressed downward, so that the first surface 131a of the suspension plate 13a and the assembly surface 131b of the outer frame 13b are both Non-coplanar, that is, the first surface 131a of the suspension board 13a will be lower than the assembly surface 131b of the outer frame 13b, and the second surface 132a of the suspension board 13a will be lower than the lower surface 132b of the outer frame 13b, so that the piezoelectric actuation The suspension plate 13a of the device 13 is recessed to form a space to form an adjustable distance h with the resonant plate 12, and the suspension plate 13a of the piezoelectric actuator 13 is directly adopted to form a recess to form a structural improvement of the distance h, so Firstly, the required distance h can be achieved by adjusting the recess distance of the suspension plate 13a of the piezoelectric actuator 13, which effectively simplifies the structural design for adjusting the distance h, and also achieves the advantages of simplifying the manufacturing process and shortening the manufacturing time. .

The insulating sheet 14 and the conductive sheet 15 mentioned above are frame-shaped thin sheets, which are sequentially stacked and combined on one side of the piezoelectric actuator 13 . In this embodiment, the insulating sheet 14 is attached to the lower surface 132 b of the outer frame 13 b of the piezoelectric actuator 13 , and the conductive sheets 15 are stacked and combined on the insulating sheet 14 . And its shape roughly corresponds to the shape of the outer frame of the piezoelectric actuator 13 . In some embodiments, the insulating sheet 14 is made of insulating material, such as plastic, but not limited thereto, for insulation; in other embodiments, the conductive sheet 15 is made of conductive Composed of materials, such as, but not limited to, metal, for the purpose of electrical conduction. And, in this embodiment, a conductive pin 151a may also be provided on the conductive sheet 15 for electrical conduction. And the drive two electrodes (not shown) of the piezoelectric element 13d of piezoelectric actuator 13, the mode that is known to use is nothing more than to use a conductive wire, utilize welding to fix it on the piezoelectric element 13d to reach the lead-out The connection of the electrodes plays an electrical role, but because the upper electrodes of the piezoelectric element 13d need to be fixed with jigs, and different alignments are required according to different processes, these multiples greatly cause the complexity of assembly. In order to solve this Problem, in this case, the conductive sheet 15 is used to provide a conductive inner pin 151b as one of the two driving electrodes of the piezoelectric element 13d, so as to overcome the above-mentioned way that the electrodes are led out by wires, the conductive inner pin 151b is stamped integrally by the conductive sheet 15 Made, and the conductive inner pin 151b can extend a conductive position inwardly on any side of the outer frame of the conductive sheet 15, and can be of any shape, used for external connection electrodes. The outer frame bends an extension 1511b inward on either side. In this embodiment, the conductive inner pin 151b has a length of 2.0mm to 6.5mm and a width of 0.1mm to 1mm, and the extension 1511b is bent inward at an angle θ is 15 degrees, the bending height H is 1mm, and the extension part 1511b has a bifurcation part 1512b, and the bifurcation part 1512b maintains a bending height H with the outer frame of the conductive sheet 15. The thickness of the electrical element 13d maintains the height of bonding to achieve a good contact effect. In this embodiment, the bending height H is 1mm, so that the branch portion 1512b can be attached to the surface of the piezoelectric element 13d, and the branch portion The intermediate distance P of 1512b is 0.1 mm to 0.5 mm, so that the intermediate distance P of the bifurcation part 1512b is fixed with the surface of the piezoelectric element 13d through alloy melting, conductive glue, conductive ink, conductive resin, etc., to achieve Better follow the effect.

Please continue to refer to FIG. 5A to FIG. 5C, which are schematic diagrams of the action of the micro-gas delivery device 1 shown in FIG. Drive the suspension plate 13a to move downward, and at the same time, the resonance plate 12 is affected by the principle of resonance and is moved downward synchronously. At this time, the volume of the chamber space 16 is increased, so a negative pressure is formed in the chamber space 16, and the micro gas is transported The external air of the device 1 is drawn through the air inlet hole 11a, enters the confluence chamber 11c through the confluence discharge hole 11b, and then enters the chamber space 16 through the hollow hole 12a; please refer to FIG. 5B again, when the piezoelectric element 13d drives the levitation The plate 13a moves upwards, compresses the chamber space 16, and forces the gas in the chamber space 16 to transmit downward through the gap 13e to achieve the effect of gas transmission. At the same time, the resonant plate 12 is also displaced upward by the suspension plate 13a due to resonance, and pushed synchronously The gas in the confluence chamber 11c moves to the chamber space 16, causing the movable part 12b of the resonator plate 12 to move upwards, so that the gas cannot be absorbed through the air inlet 11a temporarily; finally, please refer to FIG. 5C, when the suspension plate 13a is moved to When the suspension plate 13a recovers and maintains a horizontal position, the movable part 12b of the resonant plate 12 is also driven to move downward, and the resonant plate 12 will compress the gas in the chamber space 16 to the gap 13e. Move, and increase the volume in the confluence chamber 11c, so that the gas can continue to pass through the air inlet hole 11a, the confluence discharge hole 11b and then converge in the confluence chamber 11c; so by constantly repeating the above-mentioned operation of Figure 5A to Figure 5C move, so that the micro gas delivery device 1 can continuously enter the gas from the air inlet 11a, and then transport the gas downward through the gap 13e, so as to continuously draw the gas, which constitutes the operation of transporting the gas of the micro gas delivery device 1 of the present case.

To sum up, the micro gas delivery device provided in this case mainly enters the gas from the air inlet on the micro gas delivery device, and uses the action of the piezoelectric actuator to make the gas flow through the designed flow channel and A pressure gradient is generated in the confluence chamber, thereby allowing the gas to flow at a high speed. This configuration of the micro-gas delivery device can achieve the effect of silence, and can also reduce the overall volume and thickness of the micro-gas power device, thereby making the micro-gas power device light and portable. Comfortable portable purpose, and can be widely used in medical equipment and related equipment.

Even though the present case has been described in detail by the above-mentioned embodiment and can be modified in various ways by those who are familiar with the art, they are all modified as the desired protection of the appended patent scope.

Claims (17)

1. A micro gas delivery device, comprising:

The air inlet plate is provided with at least one air inlet hole, at least one bus bar hole and a confluence chamber, wherein at least one air inlet hole is used for introducing air, at least one air inlet hole corresponds to at least one bus bar hole, at least one bus bar hole is correspondingly communicated with the confluence chamber, and the air is guided to converge into the confluence chamber through at least one air inlet hole;

A resonance sheet, which is jointed with the air inlet plate and is provided with a hollow hole, a movable part and a fixed part, wherein the hollow hole is positioned at the center of the resonance sheet and corresponds to the confluence chamber of the air inlet plate;

A piezoelectric actuator assembled and combined on the resonance sheet through a filling material to form a cavity space, wherein the piezoelectric actuator comprises a suspension plate, an outer frame, at least one connecting part, a piezoelectric element and at least one gap, the at least one connecting part is connected between the suspension plate and the outer frame to provide elastic support, the at least one gap is arranged between the suspension plate and the outer frame to provide gas circulation, and the piezoelectric element is attached to the suspension plate;

An insulating sheet coupled to one side of the piezoelectric actuator; and

A conductive plate, which is combined with the insulating plate and is provided with a conductive inner pin which is integrally punched, and a conductive position extends inwards from any edge of the conductive plate for contacting, jointing, positioning and connecting with the surface of the piezoelectric element;

When the piezoelectric actuator is driven, gas is led in from at least one air inlet of the air inlet plate, is converged to the converging cavity through at least one bus bar hole, flows through the hollow hole of the resonance sheet and is led into the cavity space, and then is transmitted through the resonance action of the piezoelectric actuator.

2. The micro gas delivery device according to claim 1, wherein the length of the conductive inner leads is between 2.0mm and 6.5 mm.

3. The micro gas delivery device according to claim 1, wherein the width of the conductive inner leads is 0.1mm to 1 mm.

4. The micro gas delivery device according to claim 1, wherein the conductive inner lead is bent inward at a bending angle and a bending height on any side of the conductive sheet to form an extension portion, the extension portion has a bifurcation portion, the bifurcation portion and the conductive sheet maintain the bending height, and the bending height maintains a height in contact with the thickness of the piezoelectric element, so that the bifurcation portion is attached to the surface of the piezoelectric element, and the bifurcation portion and the piezoelectric element are combined and positioned through a surface bonding medium.

5. The micro gas delivery device according to claim 4, wherein the bend angle is 15 degrees.

6. The micro gas delivery device according to claim 4, wherein the bend height is 1 mm.

7. the micro gas delivery device according to claim 4, wherein the bifurcation has an intermediate separation distance that allows the bifurcation to couple to the piezoelectric element through the surface coupling medium.

8. The micro gas delivery device according to claim 7, wherein the intermediate separation distance of the bifurcation is between 0.1mm and 0.5 mm.

9. The micro gas delivery device according to claim 4, wherein the surface-bonding medium is one of an alloy melt, a conductive paste, a conductive ink, or a conductive resin.

10. the micro gas delivery device according to claim 1, wherein the suspension plate of the piezoelectric actuator includes a first surface and a second surface opposite to the first surface, the piezoelectric element is attached to the second surface of the suspension plate, and the outer frame of the piezoelectric actuator has a mating surface and a lower surface.

11. The micro gas delivery device according to claim 10, wherein the first surface of the suspension plate and the mating surface of the outer frame both form a common plane.

12. The micro gas delivery device according to claim 10, wherein at least one connecting portion is formed by stamping between the suspension plate and the outer frame, the first surface of the suspension plate and the mating surface of the outer frame are formed to be non-coplanar, and a distance between the first surface of the suspension plate and the resonator plate is adjusted by stamping at least one connecting portion.

13. the micro gas delivery device according to claim 1, wherein the movable portion of the resonator plate is disposed around the hollow hole in a region opposite to the confluence chamber.

14. The micro gas delivery device according to claim 1, wherein the fixing portion of the resonator plate is disposed at an outer peripheral portion of the resonator plate and is attached to the inlet plate.

15. The micro gas delivery device according to claim 1, wherein the filler material is a conductive adhesive.

16. The micro gas delivery device as claimed in claim 1, wherein the outer frame has a conductive pin, and the conductive plate has a conductive pin for electrical connection.

17. The micro gas delivery device according to claim 10, wherein the suspension plate is provided with a protrusion on the first surface thereof corresponding to the movable portion of the resonator plate.