CN208391817U - Polish the measuring device of frictional force - Google Patents
Polish the measuring device of frictional force Download PDFInfo
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- CN208391817U CN208391817U CN201821069513.8U CN201821069513U CN208391817U CN 208391817 U CN208391817 U CN 208391817U CN 201821069513 U CN201821069513 U CN 201821069513U CN 208391817 U CN208391817 U CN 208391817U
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- polishing
- stress test
- measuring device
- frictional force
- test component
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Abstract
本实用新型提供一种全口径抛光过程中元件所受抛光摩擦力的测量装置。抛光摩擦力的测量装置，包括多个应力测试部件，所述应力测试部件包括U形夹板，在所述U形夹板上设置有应力传感器，在所述应力传感器上设置有信号传输线和承载接触块，所述信号传输线与信号接收器连接，所述信号接收器将数据发送给电脑。本实用新型能够检测不同形状的元件在不同抛光阶段所受的抛光摩擦力，根据测得的抛光摩擦力即可了解抛光盘的表面粗糙度和材料去除特性，从而指导抛光工艺的控制。
The utility model provides a measuring device for the polishing friction force received by an element during the full-diameter polishing process. A measuring device for polishing friction force, comprising a plurality of stress testing parts, the stress testing parts comprise a U-shaped splint, a stress sensor is arranged on the U-shaped splint, and a signal transmission line and a bearing contact block are arranged on the stress sensor , the signal transmission line is connected with the signal receiver, and the signal receiver sends the data to the computer. The utility model can detect the polishing friction force on different shapes of elements in different polishing stages, and can know the surface roughness and material removal characteristics of the polishing disc according to the measured polishing friction force, so as to guide the control of the polishing process.
Description
Technical field
The utility model belongs to a kind of suffered polishing of element in optical manufacturing field more particularly to unified polishing process and rubs
Wipe the measuring device of power.
Background technique
Unified polishing is to process one of the key technology of heavy-calibre planar optical elements.Unified burnishing machine is usually adopted
Polishing disk basal disc is made with the natural granite of large scale, high thermal stability, the pitch glue-line conduct of annular is cast on basal disc surface
Polishing disk.The cuff surface of pitch lap is successively placed with correction-plate and workpiece plate, and wherein correction-plate is for correcting and controlling throwing
The form error of CD, and workpiece plate is then used to hold element.When processing, polishing disk, correction-plate and workpiece plate are with certain
Revolving speed at the uniform velocity rotates counterclockwise, is placed on the optical element in workpiece plate in pitch lap and its polishing particles of carrying
Effect is lower to generate material removal to form optical surface.
Be placed on optical element in workpiece plate can free floating in vertical direction, and by a pair in vertical direction
Counteracting forces, the i.e. normal pressure of its own gravity and polishing disk；And in the horizontal direction, the polished surface of optical element by
The frictional force of polishing disk, while the normal pressure that is applied by workpiece plate of the side of optical element is to match the friction of polishing disk
Power.The frictional force that polishing disk acts on optical element polished surface is Important Parameters in polishing process, to the material of element
Removing speed and machining accuracy has great influence.Since, with the rotation of polishing disk and element, polishing disk is made in polishing process
The size and Orientation of frictional force for element surface constantly changes, and keeps its detection extremely difficult.
Utility model content
The technical problem to be solved by the utility model is to provide polish to rub suffered by element in a kind of unified polishing process
Wipe the measuring device of power.
The utility model technical scheme applied to solve the technical problem is: polishing the measuring device of frictional force, including more
A stress test component, the stress test component include U-clamp plate, are provided with strain gauge on the U-clamp plate,
Signal transmssion line and carrying contact block are provided on the strain gauge, the signal transmssion line is connect with signal receiver,
The signal receiver sends the data to computer.
Further, the stress test component further includes fastening screw, movable pressing board and holds spring, in the U-shaped
The upper end side of clamping plate is provided with through screw hole, is arranged between the inside of upper end side and the inside of lower end side of the U-clamp plate
There is movable pressing board, and the movable pressing board is connect by multiple holding springs with the inside of the upper end side of U-clamp plate, the fastening
Screw passes through the screw hole that runs through and contacts with movable pressing board, and the movable pressing board is at a distance from the inside of the lower end side of U-clamp plate
It is adjusted by fastening screw.
Further, the signal receiver is provided with WIFI function, the carrying contact block that can measure strain gauge
Load force data be sent to computer.
Further, the carrying contact block has smooth surface；The signal receiver has internal battery.
Further, the maximum range of the stress test component is not less than the gravity and on-load pressure of the measured optical unit
The sum of, measurement accuracy is not less than the 2% of maximum range.
Further, for circular optical elements, 3-12 stress test component is set, and is uniformly mounted on circle
In workpiece hole；For rectangular or rectangular optical component, 4-12 stress test component is set, is set in each edge of workpiece hole
Set 1-3 stress test component.
The beneficial effects of the utility model are: the utility model is able to detect element of different shapes in the different polishing stages
It is special to can be appreciated that the surface roughness of polishing disk and material remove according to the polishing frictional force measured for suffered polishing frictional force
Property, to instruct the control of polishing process.
Detailed description of the invention
Fig. 1 is the perspective view of the stress test component of the utility model measuring device.
Fig. 2 is the top view of the utility model measuring device working condition.
Fig. 3 is the schematic diagram of the utility model measuring device working condition.
Fig. 4 is the schematic diagram for the active force that stress test component is actually measured in the utility model embodiment.
Fig. 5 is the schematic diagram of the radial component for the active force that stress test component measures in the utility model embodiment.
Fig. 6 is the schematic diagram of the circumferential component for the active force that stress test component measures in the utility model embodiment.
Fig. 7 is the schematic diagram of the synthesis frictional force for the active force that stress test component measures in the utility model embodiment.
Specific embodiment
As shown in Figure 1-3, the measuring device of the polishing frictional force of the utility model includes multiple stress test components 1 and letter
Number receiver 13, wherein each stress test component 1 includes U-clamp plate 5, fastening screw 7, holds spring 8, activity pressure
Plate 9, strain gauge 10, signal transmssion line 11 and carrying contact block 12；It (is in when work in the upper end side of the U-clamp plate 5
That side above is the upper end side of U-clamp plate 5) be provided with through screw hole 6, the U-clamp plate 5 upper end side inside with
Movable pressing board 9 is provided between the inside of lower end side, and the movable pressing board 9 passes through multiple holding springs 8 and U-clamp plate 5
The inside of upper end side connects, and the fastening screw 7, which is passed through, to be contacted through screw hole 6 with movable pressing board 9, movable pressing board 9 and U-clamp plate
The distance of the inside of 5 lower end side can be adjusted by fastening screw 7, to adapt to the different-thickness of the side of workpiece hole 24, be guaranteed
Firm grip；It is provided with strain gauge 10 on the U-clamp plate 5, signal biography is provided on the strain gauge 10
Defeated line 11 and carrying contact block 12, the signal transmssion line 11 are connect with signal receiver 13, and the signal receiver 13 is arranged
There is WIFI function, the load force data for the carrying contact block 12 that can measure strain gauge 10 is sent to computer.
Above-mentioned carrying contact block 12 has smooth surface, and effect is the positive acting for receiving the application of optical element side
Power, the side-friction between optical element side and carrying 12 surface of contact block can be ignored；Above-mentioned signal receiver
13 have internal battery, can be powered by battery to it.
The maximum range of above-mentioned stress test component 1 is surveyed not less than the sum of the gravity of the measured optical unit and on-load pressure
Accuracy of measurement is not less than the 2% of maximum range；For circular optical elements, it is preferably provided 3-12 stress test component 1, and
It is uniformly mounted on round piece hole；For rectangular or rectangular optical component, it is preferably provided 4-12 stress test component
1,1-3 stress test component 1 is set in each edge of workpiece hole.
In the unified polishing process of the utility model the suffered polishing frictional force of element measurement method the following steps are included:
1) each stress test component 1 is stuck in workpiece hole 24 by U-clamp plate 5, adjusts fastening screw 7, it is ensured that is every
A stress test component 1 is completely fixed on workpiece plate 23, element under test is placed in workpiece hole 24, at this time stress test component
The distance between 1 carrying contact block 12 and element are preferably controlled within the scope of 5mm；
2) polishing disk 22 and 23 counter clockwise direction uniform speed rotation of workpiece plate are opened, 13 He of signal receiver is then turned on
Computer；
3) when the corresponding element under test side of the 1st stress test component 1 rotates to the outside of polishing disk 22 and and workpiece plate
When 23 offset distance direction is vertical, the load pressure data that each stress test component 1 of start recording measures, signal receiver 13 is in fact
When receive the load pressure data that each stress test component 1 measures, and computer is sent the data to by WIFI function, by electricity
Brain real-time display, each stress test component 1 stop recording data after measuring m sample point.
The utility model polishes frictional force to measure suffered by element in polishing process, by multiple stress test components 1 according to
It is secondary to be mounted in workpiece hole 24, by measuring cell side action in the normal pressure of stress test component 1 to obtain element table
The polishing frictional force in face.The active force that each stress test component 1 measures is the positive pressure that element acts on its surface vertical direction
Power, the active force can be decomposed into (circumferential to divide along the component (radial component) of polishing disk radial direction and the component of circumferencial direction
Power), sum respectively to it can be obtained optical element act on each stress test component 1 resultant force radial component and week
To component, the two is the radial component and circumferential component for the polishing frictional force that polishing disk 22 acts on element surface.
Using the offset distance direction of workpiece plate 23 as X-axis, the center of workpiece plate 23 is that origin establishes rectangular coordinate system, such as Fig. 2 institute
Show, the X-component of directed force F suffered by stress test component 1 is radial component Fx at this time, and the Y-component of suffered directed force F is week
To component Fy, meet following formula, wherein θ is phase angle:
Fx=Fcos θ；Fy=Fsin θ
Starting phase angle of each stress test component 1 at the start recording data moment is denoted as θk, k=1 ..., n, indicate
1st ..., n stress test component 1.The sampling period of each stress test component 1 is set as t (s), and the revolving speed of workpiece plate 23 is set as
The data of ω (RPM), the m sample point that each stress test component 1 measures respectively are denoted as Fk(i), i=1 ..., m.It is then each
The angle that stress test component 1 rotates during the sampling period isThe corresponding phase of m sample point measured respectively
Angle isRadial component, circumferential direction of each stress test component 1 in the sum of the surveyed active force of sample point i of synchronization
Component and integrated value are respectively as follows:
Thus the polishing frictional force that each moment polishing disk 22 acts on element surface can be obtained.
Embodiment:
The measuring device of the suffered polishing frictional force of element and its measurement method are in the unified polishing process of the present embodiment
It is carried out on one large-scale glass polishing machine 21, as shown in Figure 1.The diameter of polishing disk 22 is four meters, is set in the top of polishing disk 22
It is equipped with workpiece plate 23, square cross hole 24, polishing disk 22 and workpiece plate 23 are provided on workpiece plate 23 and is driven by servo motor
It is dynamic to be rotated.
The present embodiment uses 4 stress test components 1, as Figure 2-3, the maximum range of 4 stress test components 1
For 100N, measurement accuracy is better than 0.2N.
The measurement method of the polishing frictional force of the utility model are as follows:
4 stress test components 1 are arranged in a counterclockwise direction on four sides for being installed on square cross hole 24, it may be assumed that
Can an optional stress test component 1 be used as the 1st stress test component, the 2nd, 3,4 stress test components are arranged in a counterclockwise direction
Cloth is installed on four sides in square cross hole 24.When installation, the U-clamp plate 5 of 4 stress test components 1 is stuck in
The middle position of 4 sides in square cross hole 24 adjusts fastening screw 7 to control the lower end of movable pressing board 9 Yu U-clamp plate 5
The distance of the inside of side, it is ensured that 4 stress test components 1 are completely fixed on workpiece plate 23；Rectangular member 15 is placed on workpiece
In hole 24, the size of rectangular member 15 is 330mm × 330mm × 40mm, between rectangular member 15 and carrying contact block 12 away from
From for 2mm, the counter clockwise direction uniform speed rotation of polishing disk 22 and workpiece plate 23 is opened, 13 He of signal receiver is then turned on
Computer, signal receiver 13 real-time reception, 4 stress test components 1 measurement load pressure data and by WIFI function general
The data are sent to computer, by computer real-time display；Polishing is rotated to the 1st corresponding element side of stress test component 1
The outside of disk 22 and it is vertical with the offset distance direction of workpiece plate 23 when, 4 stress test components 1 of start recording measurement data, 4
Stress test component 1 stops recording data after measuring 16000 sample points.
As shown in figure 3, the center of workpiece plate 23 is that origin establishes rectangular co-ordinate using the offset distance direction of workpiece plate 23 as X-axis
It is XOY.The starting phase angle of 4 stress test components 1 is θk=(k-1) pi/2, k=1,2,3,4 indicate the 1st, 2,3,4 stress
Test component 1.The sampling period of 4 stress test components 1 is t=0.01 (s), and the revolving speed of workpiece plate is ω=0.29 (RPM),
The data for 16000 sample points that 4 stress test components 1 measure respectively are denoted as Fk(i), i=1 ..., 16000.4 stress
The measured value of test component 1 as shown in figure 4,4 stress test components 1 synchronization the sum of the surveyed active force of sample point i
Radial component, circumferential component and integrated value be respectively as follows:
Its result as illustrated in figs. 5-7, it can thus be concluded that each moment polishing disk acts on the polishing frictional force of element surface.
Claims (8)
1. polishing the measuring device of frictional force, it is characterised in that: including multiple stress test components (1), the stress test portion
Part (1) includes U-clamp plate (5), strain gauge (10) is provided on the U-clamp plate (5), in the strain gauge
(10) it is provided with signal transmssion line (11) on and carries contact block (12), the signal transmssion line (11) and signal receiver (13)
Connection.
2. the measuring device of polishing frictional force as described in claim 1, it is characterised in that: the stress test component (1) is also
Including fastening screw (7), movable pressing board (9) and spring (8) are held, are provided in the upper end side of the U-clamp plate (5) through spiral shell
Hole (6) is provided with movable pressing board (9) between the inside of upper end side and the inside of lower end side of the U-clamp plate (5), and institute
It states movable pressing board (9) and is connect by multiple holdings spring (8) with the inside of the upper end side of U-clamp plate (5), the fastening screw
(7) run through screw hole (6) are passed through to contact with movable pressing board (9), the lower end side of the movable pressing board (9) and U-clamp plate (5)
The distance of inside is adjusted by fastening screw (7).
3. the measuring device of polishing frictional force as claimed in claim 1 or 2, it is characterised in that: the signal receiver (13)
It is provided with WIFI function, the load force data of the carrying contact block (12) of strain gauge (10) measurement is sent to computer.
4. the measuring device of polishing frictional force as claimed in claim 1 or 2, it is characterised in that: the carrying contact block (12)
With smooth surface.
5. the measuring device of polishing frictional force as claimed in claim 1 or 2, it is characterised in that: the signal receiver (13)
With internal battery.
6. the measuring device of polishing frictional force as claimed in claim 1 or 2, it is characterised in that: the stress test component (1)
Maximum range not less than the gravity and the sum of on-load pressure of the measured optical unit, measurement accuracy is not less than the 2% of maximum range.
7. the measuring device of polishing frictional force as claimed in claim 1 or 2, it is characterised in that: for circular optical elements, if
3-12 stress test component (1) is set, and is uniformly mounted on round piece hole.
8. the measuring device of polishing frictional force as claimed in claim 1 or 2, it is characterised in that: for rectangular or rectangular optical
Element is arranged 4-12 stress test component (1), 1-3 stress test component (1) is arranged in each edge of workpiece hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821069513.8U CN208391817U (en) | 2018-07-06 | 2018-07-06 | Polish the measuring device of frictional force |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821069513.8U CN208391817U (en) | 2018-07-06 | 2018-07-06 | Polish the measuring device of frictional force |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208391817U true CN208391817U (en) | 2019-01-18 |
Family
ID=65131290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821069513.8U Expired - Fee Related CN208391817U (en) | 2018-07-06 | 2018-07-06 | Polish the measuring device of frictional force |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208391817U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109580058A (en) * | 2019-01-23 | 2019-04-05 | 福建省安元光学科技有限公司 | A method of mould product stress is judged using coating surface roughness |
-
2018
- 2018-07-06 CN CN201821069513.8U patent/CN208391817U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109580058A (en) * | 2019-01-23 | 2019-04-05 | 福建省安元光学科技有限公司 | A method of mould product stress is judged using coating surface roughness |
| CN109580058B (en) * | 2019-01-23 | 2021-03-09 | 福建省安元光学科技有限公司 | Method for judging stress of die product by utilizing surface roughness of coating |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190118 Termination date: 20210706 |
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| CF01 | Termination of patent right due to non-payment of annual fee |