CN207908856U - A double-sided exposure machine - Google Patents
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- CN207908856U CN207908856U CN201820332055.6U CN201820332055U CN207908856U CN 207908856 U CN207908856 U CN 207908856U CN 201820332055 U CN201820332055 U CN 201820332055U CN 207908856 U CN207908856 U CN 207908856U
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Abstract
Description
技术领域technical field
本实用新型涉及菲林设备技术领域,具体涉及一种双面曝光机。The utility model relates to the technical field of film equipment, in particular to a double-sided exposure machine.
背景技术Background technique
目前,曝光机是指通过开启光源发出光,将胶片或其他透明体上的图像信息转移到涂有感光物质的表面上的机器设备。曝光机具有单面曝光机和双面曝光机,双面曝光机相对于单面曝光机多增加了一个翻转机构使感光物质翻转至背面进行曝光。但无论是单面曝光机还是双面曝光机,都需要进行对位,传统的操作是人工把曝光物料标志点与菲林标志点对正,再用双面胶把两者粘合后放到曝光机曝光。这种操作方法准确度不高,存在较大的移位,同时手工对位效率慢,大大降低生产效率。At present, an exposure machine refers to a machine device that transfers image information on a film or other transparent body to a surface coated with a photosensitive substance by turning on the light source to emit light. The exposure machine has a single-side exposure machine and a double-side exposure machine. Compared with the single-side exposure machine, the double-side exposure machine adds a flip mechanism to turn the photosensitive material to the back for exposure. However, whether it is a single-side exposure machine or a double-side exposure machine, alignment is required. The traditional operation is to manually align the mark points of the exposure material with the mark points of the film, and then use double-sided tape to bond the two and place them in the exposure position. camera exposure. The accuracy of this operation method is not high, and there is a large displacement. At the same time, the efficiency of manual alignment is slow, which greatly reduces the production efficiency.
实用新型内容Utility model content
本实用新型的目的是针对现有技术中的上述不足,提供一种双面曝光机,采用摄像对位装置对待曝光材料进行曝光,相对于传统的手动进行对位,对位更精确。The purpose of this utility model is to provide a double-sided exposure machine for the above-mentioned shortcomings in the prior art, which uses a camera alignment device to expose the material to be exposed. Compared with the traditional manual alignment, the alignment is more accurate.
本实用新型的目的通过以下技术方案实现:The purpose of this utility model is achieved through the following technical solutions:
一种双面曝光机,包括用于对物料一面进行曝光的第一曝光机构、用于对物料的另一面进行曝光的第二曝光机构以及用于将第一曝光机构处理后的物料进行翻转面的翻转机构,所述第一曝光机构包括第一曝光装置和滑动设置于第一曝光装置下方的第一曝光平台,所述第一曝光平台设置有第一摄像对位装置,所述第二曝光机构包括第二曝光装置和滑动设置于第二曝光装置下方的第二曝光平台,所述第二曝光平台设置有第二摄像对位装置。A double-sided exposure machine, comprising a first exposure mechanism for exposing one side of a material, a second exposure mechanism for exposing the other side of a material, and a surface for turning over the material processed by the first exposure mechanism The turning mechanism of the first exposure mechanism includes a first exposure device and a first exposure platform slidingly arranged under the first exposure device, the first exposure platform is provided with a first camera alignment device, and the second exposure The mechanism includes a second exposure device and a second exposure platform slidingly arranged under the second exposure device, and the second exposure platform is provided with a second camera alignment device.
其中,所述第一曝光平台包括用于承载外界感应材料的第一承载座、用于驱动第一承载座移动的第一驱动组件,所述第一承载座包括第一移动底座、活动设置于第一移动底座的第一曝光平板和用于调整第一曝光平板角度与位置的第一调整机构,第一摄像对位装置设置于第一移动底座,所述第一驱动组件用于驱动第一移动底座移动;所述第二曝光平台包括用于承载外界感应材料的第二承载座、用于驱动第二承载座移动的第二驱动组件,所述第二承载座包括第二移动底座、活动设置于第二移动底座的第二曝光平板和用于调整第二曝光平板角度与位置的第二调整机构,第二摄像对位装置设置于第二移动底座,所述第二驱动组件用于驱动第二移动底座移动。Wherein, the first exposure platform includes a first bearing seat for carrying external induction materials, and a first drive assembly for driving the first bearing base to move, and the first bearing base includes a first mobile base, which is movably arranged on The first exposure plate of the first mobile base and the first adjustment mechanism for adjusting the angle and position of the first exposure plate, the first camera alignment device is arranged on the first mobile base, and the first drive assembly is used to drive the first The mobile base moves; the second exposure platform includes a second bearing seat for carrying external induction materials, a second drive assembly for driving the second bearing base to move, and the second bearing base includes a second mobile base, a movable The second exposure plate set on the second mobile base and the second adjustment mechanism for adjusting the angle and position of the second exposure plate, the second camera alignment device is set on the second mobile base, and the second drive assembly is used to drive The second mobile base moves.
其中,所述第一曝光装置包括用于装截菲林的第一曝光组件、用于对第一曝光组件进行照射曝光的第一曝光光源,所述第一曝光组件包括第一曝光框板、卡设于第一曝光框板的第一装载板和用于吸附外界菲林紧贴第一装载板下表面的第一吸附嘴,所述第一装载板设有与第一吸附嘴连通的第一通孔;所述第二曝光装置包括用于装截菲林的第二曝光组件、用于对第二曝光组件进行照射曝光的第二曝光光源,所述第二曝光组件包括第二曝光框板、卡设于第二曝光框板的第二装载板和用于吸附外界菲林紧贴第二装载板下表面的第二吸附嘴,所述第二装载板设有与第二吸附嘴连通的第二通孔。Wherein, the first exposure device includes a first exposure assembly for mounting film, a first exposure light source for exposing the first exposure assembly, and the first exposure assembly includes a first exposure frame plate, a card The first loading plate set on the first exposure frame plate and the first suction nozzle for absorbing the external film close to the lower surface of the first loading plate, the first loading plate is provided with a first passage communicating with the first suction nozzle hole; the second exposure device includes a second exposure assembly for mounting film, a second exposure light source for exposing the second exposure assembly, and the second exposure assembly includes a second exposure frame plate, a card The second loading plate arranged on the second exposure frame plate and the second suction nozzle for absorbing the external film close to the lower surface of the second loading plate, the second loading plate is provided with a second passage communicating with the second suction nozzle hole.
其中,所述第一曝光组件还包括用于抽真空的第一真空吸嘴,所述第二曝光组件还包括用于抽真空的第二真空吸嘴,所述第一装载板与第一曝光平板形成容设外界菲林和基材的第一空间,所述第一装载板与第二曝光平板形成容设外界菲林和基材的第二空间。Wherein, the first exposure assembly also includes a first vacuum nozzle for vacuuming, the second exposure assembly also includes a second vacuum nozzle for vacuuming, the first loading plate and the first exposure The plate forms a first space for accommodating the external film and the base material, and the first loading plate and the second exposure plate form a second space for accommodating the external film and the base material.
其中,所述第一曝光组件和第二曝光组件还均包括用于曝光对位的对位光源,所述对位光源包括对位灯和用于驱动对位灯伸出或缩回的驱动气缸。Wherein, the first exposure assembly and the second exposure assembly also include an alignment light source for exposure alignment, and the alignment light source includes an alignment lamp and a driving cylinder for driving the alignment lamp to extend or retract .
其中,所述第一曝光组件和第二曝光组件还均包括用于检测曝光光源能量强度的能量检测装置,所述能量检测装置滑动设置于第一曝光框板,能量检测装置分别与第一曝光光源和第二曝光光源连接。Wherein, the first exposure assembly and the second exposure assembly also include an energy detection device for detecting the energy intensity of the exposure light source. The light source is connected to the second exposure light source.
其中,所述第一曝光装置和第二曝光装置均还包括用于清洁基材的清洁装置,所述清洁装置包括两个并列设置的清洁辊。Wherein, both the first exposure device and the second exposure device further include a cleaning device for cleaning the substrate, and the cleaning device includes two cleaning rollers arranged side by side.
其中,所述双面曝光机还包括上料机构,所述上料机构包括上料支架、滑动设置于上料支架的上料座和用于将上料座中的物料顶出的顶出组件,所述上料座包括滑动设置于上料支架的上料框和滑动设置于上料支架的上料挡板,所述上料框漏空设有调节槽,所述上料挡板滑动设置于调节槽。Wherein, the double-sided exposure machine also includes a feeding mechanism, and the feeding mechanism includes a feeding bracket, a feeding seat slidably arranged on the feeding bracket, and an ejection assembly for ejecting the materials in the feeding seat , the feeding seat includes a feeding frame slidably arranged on the feeding bracket and a feeding baffle slidably arranged on the feeding bracket, the feeding frame is provided with an adjustment groove, and the feeding baffle is slidingly arranged in the adjustment slot.
其中,所述翻转机构包括翻转支架、用于承载并输送第一曝光机构处理后的物料的第一翻转载板、用于驱动第一翻转载板进行翻转的翻转电机以及用于承接第一翻转载板所输送的物料的第二翻转载板,所述第一翻转载板设置有用于吸附物料的吸附孔。Wherein, the turning mechanism includes a turning bracket, a first turning carrier for carrying and transporting the materials processed by the first exposure mechanism, a turning motor for driving the first turning carrier to turn over, and a turning motor for receiving the first turning The second inverting carrier plate for the materials conveyed by the transfer plate, the first inverting carrier plate is provided with adsorption holes for absorbing materials.
本实用新型的有益效果:本实用新型的一种双面曝光机,采用摄像对位装置对待曝光材料进行曝光,相对于传统的手动进行对位,对位更精确。Beneficial effects of the utility model: a double-sided exposure machine of the utility model uses a camera alignment device to expose the material to be exposed, and compared with the traditional manual alignment, the alignment is more accurate.
附图说明Description of drawings
利用附图对实用新型作进一步说明,但附图中的实施例不构成对本实用新型的任何限制,对于本领域的普通技术人员,在不付出创造性劳动的前提下,还可以根据以下附图获得其它的附图。Utilize accompanying drawing to further illustrate the utility model, but the embodiment in the accompanying drawing does not constitute any restriction to the present utility model, for those of ordinary skill in the art, under the premise of not paying creative work, also can obtain according to following accompanying drawing Additional drawings.
图1是本实用新型的结构示意图。Fig. 1 is the structural representation of the utility model.
图2是本实用新型第一曝光平台的结构示意图。Fig. 2 is a schematic structural view of the first exposure platform of the present invention.
图3是本实用新型第一曝光装置的结构示意图。FIG. 3 is a schematic structural view of the first exposure device of the present invention.
图4是本实用新型第一曝光装置的部分结构示意图。Fig. 4 is a partial structural schematic diagram of the first exposure device of the present invention.
图5是本实用新型第一曝光组件的部分结构示意图。Fig. 5 is a partial structural schematic diagram of the first exposure assembly of the present invention.
图6是本实用新型第一装载板的结构示意图。Fig. 6 is a schematic structural view of the first loading plate of the present invention.
图7是本实用新型第二曝光装置和第二曝光平台的装配结构示意图。FIG. 7 is a schematic diagram of the assembly structure of the second exposure device and the second exposure platform of the present invention.
图8是本实用新型第二承载座的结构示意图。Fig. 8 is a schematic structural view of the second bearing seat of the present invention.
图9是本实用新型第二曝光机构的结构示意图。FIG. 9 is a schematic structural view of the second exposure mechanism of the present invention.
图10是本实用新型第二曝光机构的部分结构示意图。Fig. 10 is a partial structural schematic diagram of the second exposure mechanism of the present invention.
图11是本实用新型第二装载板的结构示意图。Fig. 11 is a schematic structural view of the second loading plate of the present invention.
图12是本实用新型翻转机构的结构示意图。Fig. 12 is a structural schematic diagram of the turning mechanism of the utility model.
图13是本实用新型上料机构的结构示意图。Fig. 13 is a structural schematic diagram of the feeding mechanism of the utility model.
附图标记包括:Reference signs include:
1——第一曝光机构;1 - the first exposure agency;
11——第一曝光装置;111——第一曝光组件;1111——第一曝光框板;1112——第一装载板;11121——第一通孔;1113——第一吸附嘴;1114——第一真空吸嘴;1115——对位灯;1116——驱动气缸;1117——能量检测装置;112——第一曝光光源;113——清洁装置;12——第一曝光平台;121——第一摄像对位装置;122——第一承载座;1221——第一移动底座;1222——第一曝光平板;1223——第一调整机构;123——第一驱动组件;11—the first exposure device; 111—the first exposure assembly; 1111—the first exposure frame plate; 1112—the first loading plate; 11121—the first through hole; 1113—the first suction nozzle; 1114 ——First vacuum nozzle; 1115——Alignment lamp; 1116——Drive cylinder; 1117——Energy detection device; 112——First exposure light source; 113——Cleaning device; 12——First exposure platform; 121—the first camera alignment device; 122—the first bearing seat; 1221—the first mobile base; 1222—the first exposure plate; 1223—the first adjustment mechanism; 123—the first drive assembly;
2——第二曝光机构;2 - the second exposure agency;
21——第二曝光装置;211——第二曝光组件;2111——第二曝光框板;2112——第二装载板;21121——第二通孔;2113——第二吸附嘴;2114——第二真空吸嘴;212——第二曝光光源;21—the second exposure device; 211—the second exposure assembly; 2111—the second exposure frame plate; 2112—the second loading plate; 21121—the second through hole; 2113—the second suction nozzle; 2114 - the second vacuum nozzle; 212 - the second exposure light source;
22——第二曝光平台;221——第二摄像对位装置;222——第二承载座;2221——第二移动底座;2222——第二曝光平板;2223——第二调整机构;223——第二驱动组件;22—the second exposure platform; 221—the second camera alignment device; 222—the second bearing seat; 2221—the second moving base; 2222—the second exposure plate; 2223—the second adjustment mechanism; 223——the second drive assembly;
3——翻转机构;31——翻转支架;32——翻转电机;33——第一翻转载板;331——吸附孔;34——第二翻转载板;3——turning mechanism; 31——turning bracket; 32——turning motor; 33——first turning carrier; 331——adsorption hole; 34——second turning carrier;
5——上料机构;51——上料支架;52——上料座;521——上料框;5211——调节槽;522——上料挡板。5——feeding mechanism; 51——feeding bracket; 52——feeding seat; 521——feeding frame; 5211——regulating groove; 522——feeding baffle.
具体实施方式Detailed ways
结合以下实施例及附图对本实用新型作进一步描述。The utility model will be further described in conjunction with the following embodiments and accompanying drawings.
如图1、图2、图3、图7和图8所示,本实施例的一种双面曝光机,包括用于对物料一面进行曝光的第一曝光机构1、用于对物料的另一面进行曝光的第二曝光机构2以及用于将第一曝光机构1处理后的物料进行翻转面的翻转机构3,所述第一曝光机构1包括第一曝光装置11和滑动设置于第一曝光装置11下方的第一曝光平台12,所述第一曝光平台12设置有第一摄像对位装置121,所述第二曝光机构2包括第二曝光装置21和滑动设置于第二曝光装置21下方的第二曝光平台22,所述第二曝光平台22设置有第二摄像对位装置221。进行曝光时,将基材放置于第一曝光平台12,第一摄像对位装置121对基材进行第一次对位,使基材的标记点出现第一摄像对位装置121的视野中央,第一曝光平台12滑动至第一曝光装置11正下方,第一摄像对位装置121对基材进行第二次对位,使第一曝光装置11中菲林标记点与基材的标记点重合,第一曝光装置11对基材进行曝光,完成基材的双面曝光操作。As shown in Fig. 1, Fig. 2, Fig. 3, Fig. 7 and Fig. 8, a kind of double-sided exposure machine of the present embodiment comprises a first exposure mechanism 1 for exposing one side of the material, another for exposing the material The second exposure mechanism 2 for exposure on one side and the turning mechanism 3 for turning over the material processed by the first exposure mechanism 1. The first exposure mechanism 1 includes a first exposure device 11 and is slidably arranged on the first exposure The first exposure platform 12 below the device 11, the first exposure platform 12 is provided with a first camera alignment device 121, the second exposure mechanism 2 includes a second exposure device 21 and is slidably arranged under the second exposure device 21 The second exposure platform 22 is provided with a second camera alignment device 221 . When performing exposure, the substrate is placed on the first exposure platform 12, and the first camera alignment device 121 performs the first alignment on the substrate, so that the marking point of the substrate appears in the center of the field of view of the first camera alignment device 121, The first exposure platform 12 slides to directly below the first exposure device 11, and the first camera alignment device 121 performs a second alignment on the substrate, so that the marking points on the film in the first exposure device 11 coincide with the marking points on the substrate, The first exposure device 11 exposes the substrate to complete the double-side exposure operation of the substrate.
如图2、图7和图8所示,本实施例的第一曝光平台12包括用于承载外界感应材料的第一承载座122、用于驱动第一承载座122移动的第一驱动组件123,所述第一承载座122包括第一移动底座1221、活动设置于第一移动底座1221的第一曝光平板1222和用于调整第一曝光平板1222角度与位置的第一调整机构1223,第一摄像对位装置121设置于第一移动底座1221,所述第一驱动组件123用于驱动第一移动底座1221移动;所述第二曝光平台22包括用于承载外界感应材料的第二承载座222、用于驱动第二承载座222移动的第二驱动组件223,所述第二承载座222包括第二移动底座2221、活动设置于第二移动底座2221的第二曝光平板2222和用于调整第二曝光平板2222角度与位置的第二调整机构2223,第二摄像对位装置221设置于第二移动底座2221,所述第二驱动组件223用于驱动第二移动底座2221移动。具体地,第一驱动组件123驱动第一移动座移动滑出,基材放置于第一曝光平板1222的表面,第一摄像对位装置121对基材进行第一次对位,第一调整机构1223对第一曝光平板1222进行调整,使放置于第一曝光平板1222的基材的标记点出现在第一摄像对位装置121的视野中央,第一驱动组件123驱动第一移动座移动至第一曝光装置11正下方,第一摄像对位装置121对基材进行第二次对位,使第一曝光装置11中菲林标记点与放置于第一曝光平板1222的基材的标记点重合,第一曝光装置11对基材进行曝光,从而完成基材的一面曝光处理。同理,经过第一曝光机构1处理的基材,翻转机构3对基材进行翻转,具体地,第二驱动组件223驱动第二移动座移动滑出,基材放置于第二曝光平板2222的表面,第二摄像对位装置221对基材进行第一次对位,第二调整机构2223对第二曝光平板2222进行调整,使放置于第二曝光平板2222的基材的标记点出现在第二摄像对位装置221的视野中央,第二驱动组件223驱动第二移动座移动至第二曝光装置21的正下方,使第二曝光装置21中菲林标记点与放置于第二曝光平板2222的基材的标记点重合,第二曝光装置21对基材进行曝光,完成基材的双面曝光处理。As shown in FIG. 2 , FIG. 7 and FIG. 8 , the first exposure platform 12 of this embodiment includes a first bearing seat 122 for carrying external sensing materials, and a first driving assembly 123 for driving the first bearing base 122 to move. The first bearing seat 122 includes a first moving base 1221, a first exposure plate 1222 movably arranged on the first moving base 1221, and a first adjustment mechanism 1223 for adjusting the angle and position of the first exposure plate 1222, the first The camera alignment device 121 is arranged on the first mobile base 1221, the first driving assembly 123 is used to drive the first mobile base 1221 to move; the second exposure platform 22 includes a second bearing seat 222 for carrying external sensing materials . The second driving assembly 223 for driving the second bearing base 222 to move, the second bearing base 222 includes a second moving base 2221, a second exposure plate 2222 movably arranged on the second moving base 2221 and a second exposure plate 2222 for adjusting the second The second adjustment mechanism 2223 for the angle and position of the second exposure plate 2222 , the second camera alignment device 221 is arranged on the second moving base 2221 , and the second driving component 223 is used to drive the second moving base 2221 to move. Specifically, the first driving assembly 123 drives the first moving seat to move and slide out, the substrate is placed on the surface of the first exposure plate 1222, the first camera alignment device 121 performs the first alignment on the substrate, and the first adjustment mechanism 1223 adjusts the first exposure plate 1222 so that the marking point on the substrate placed on the first exposure plate 1222 appears in the center of the field of view of the first camera alignment device 121, and the first drive assembly 123 drives the first moving base to move to the second Directly below the exposure device 11, the first camera alignment device 121 performs a second alignment on the substrate, so that the marks on the film in the first exposure device 11 coincide with the marks on the substrate placed on the first exposure plate 1222, The first exposure device 11 exposes the base material to complete one-side exposure treatment of the base material. Similarly, the substrate processed by the first exposure mechanism 1 is turned over by the turnover mechanism 3. Specifically, the second driving assembly 223 drives the second moving seat to move and slide out, and the substrate is placed on the side of the second exposure plate 2222. On the surface, the second camera alignment device 221 performs the first alignment on the base material, and the second adjustment mechanism 2223 adjusts the second exposure plate 2222 so that the marking points on the base material placed on the second exposure plate 2222 appear at the first In the center of the field of view of the second camera alignment device 221, the second drive assembly 223 drives the second moving seat to move to the right below the second exposure device 21, so that the film marking point in the second exposure device 21 is aligned with the second exposure flat plate 2222. The marking points on the substrate are overlapped, and the second exposure device 21 exposes the substrate to complete the double-sided exposure process of the substrate.
如图4至图11所示,本实施例的第一曝光装置11包括用于装截菲林的第一曝光组件111、用于对第一曝光组件111进行照射曝光的第一曝光光源112,所述第一曝光组件111包括第一曝光框板1111、卡设于第一曝光框板1111的第一装载板1112和用于吸附外界菲林紧贴第一装载板1112下表面的第一吸附嘴1113,所述第一装载板1112设有与第一吸附嘴1113连通的第一通孔11121;所述第二曝光装置21包括用于装截菲林的第二曝光组件211、用于对第二曝光组件211进行照射曝光的第二曝光光源212,所述第二曝光组件211包括第二曝光框板2111、卡设于第二曝光框板2111的第二装载板2112和用于吸附外界菲林紧贴第二装载板2112下表面的第二吸附嘴2113,所述第二装载板2112设有与第二吸附嘴2113连通的第二通孔21121。进行曝光前,菲林在第一吸附嘴1113的作用下吸附并紧贴第一装载板1112的下表面,承载了基材的第一曝光平台12滑动至第一曝光装置11的正下方,第一曝光光源112对第一曝光平台12进行曝光,完成对基材的一面曝光,第一晃平台滑出,对基材进行更换,继续滑动至第一曝光装置11的正下方,如此重复操作,对多个基材进行曝光。一面曝光后的基材翻转后放置于第二曝光机构2,承载了基材的第二曝光平台22滑动至第二曝光装置21的正下方,第二曝光光源212对第二曝光平台22进行曝光,完成对基材的双面曝光,第二曝光平台22滑出,对完成双面曝光的基材进行下料,第二曝光平台22继续滑动至第二曝光装置21的正下方,如此重复操作,对多个基材进行曝光。优选地,第一曝光平台12与第二曝光平台22协同工作,大大缩短多个基材进行曝光的时间,增加工作效率。As shown in FIGS. 4 to 11 , the first exposure device 11 of this embodiment includes a first exposure assembly 111 for mounting a film, and a first exposure light source 112 for exposing the first exposure assembly 111 . The first exposure assembly 111 includes a first exposure frame plate 1111, a first loading plate 1112 clamped on the first exposure frame plate 1111, and a first suction nozzle 1113 for sucking the external film close to the lower surface of the first loading plate 1112 , the first loading plate 1112 is provided with a first through hole 11121 communicating with the first suction nozzle 1113; the second exposure device 21 includes a second exposure assembly 211 for mounting a film, for exposing the second exposure The second exposure light source 212 for exposure by the component 211, the second exposure component 211 includes a second exposure frame plate 2111, a second loading plate 2112 clamped on the second exposure frame plate 2111 and a film for absorbing the outside world The second suction nozzle 2113 on the lower surface of the second loading plate 2112 is provided with a second through hole 21121 communicating with the second suction nozzle 2113 . Before exposure, the film is adsorbed by the first suction nozzle 1113 and adhered to the lower surface of the first loading plate 1112, and the first exposure platform 12 carrying the substrate is slid to directly below the first exposure device 11, and the first The exposure light source 112 exposes the first exposure platform 12 to complete the exposure on one side of the substrate. The first shaking platform slides out to replace the substrate, and continues to slide directly under the first exposure device 11. Repeat the operation in this way. Multiple substrates are exposed. The substrate exposed on one side is turned over and placed in the second exposure mechanism 2, the second exposure platform 22 carrying the substrate slides to directly below the second exposure device 21, and the second exposure light source 212 exposes the second exposure platform 22 , to complete the double-sided exposure of the substrate, the second exposure platform 22 slides out, and unloads the substrate that has completed the double-sided exposure, the second exposure platform 22 continues to slide to the right below the second exposure device 21, and repeats the operation , to expose multiple substrates. Preferably, the first exposure platform 12 and the second exposure platform 22 work together to greatly shorten the exposure time for multiple substrates and increase work efficiency.
如图3、图5、图7和图10所示,本实施例的第一曝光组件111还包括用于抽真空的第一真空吸嘴1114,所述第二曝光组件211还包括用于抽真空的第二真空吸嘴2114,所述第一装载板1112与第一曝光平板1222形成容设外界菲林和基材的第一空间,所述第一装载板1112与第二曝光平板2222形成容设外界菲林和基材的第二空间。第一曝光装置11进行曝光时,第一真空吸嘴1114对容设外界菲林的第一空间进行吸真空,使菲林与基材紧合得更紧,使曝光精度更高,失真率更少。同理,第二曝光装置21进行曝光时,第二真空吸嘴2114对容设外界菲林的第二空间进行吸真空,使菲林与基材紧合得更紧,使曝光精度更高,失真度更少。As shown in Figure 3, Figure 5, Figure 7 and Figure 10, the first exposure assembly 111 of this embodiment also includes a first vacuum suction nozzle 1114 for vacuuming, and the second exposure assembly 211 also includes a vacuum suction nozzle 1114 for vacuuming. The second vacuum suction nozzle 2114 for vacuum, the first loading plate 1112 and the first exposure flat plate 1222 form a first space for accommodating the external film and the substrate, and the first loading plate 1112 and the second exposure flat plate 2222 form a space for accommodating A second space is provided for the external film and the base material. When the first exposure device 11 is exposing, the first vacuum suction nozzle 1114 vacuums the first space where the external film is accommodated, so that the film and the substrate are tightly bonded, so that the exposure accuracy is higher and the distortion rate is lower. Similarly, when the second exposure device 21 performs exposure, the second vacuum suction nozzle 2114 vacuums the second space where the external film is accommodated, so that the film and the substrate are tightly bonded, so that the exposure accuracy is higher and the distortion degree is lower. less.
如图2、图4、图7、图9、图10所示,本实施例的第一曝光组件111和第二曝光组件211还均包括用于曝光对位的对位光源,所述对位光源包括对位灯1115和用于驱动对位灯1115伸出或缩回的驱动气缸1116。进行第二次对位时,由于需要将基材中的标记点移动至视野的中央处,需要更清晰的光线来提供视野,驱动气缸1116驱动对位灯1115伸出,第一摄像对位装置121和第二摄像对位装置221在清晰的光线下进行第二次对位,使基材中的标记点快速、准确地移动至视野的中央处,增加曝光精度,减少失真度。As shown in Fig. 2, Fig. 4, Fig. 7, Fig. 9, and Fig. 10, the first exposure assembly 111 and the second exposure assembly 211 of this embodiment also include an alignment light source for exposure alignment, and the alignment The light source includes an alignment light 1115 and a driving cylinder 1116 for driving the alignment light 1115 to extend or retract. When performing the second alignment, since the marking point in the substrate needs to be moved to the center of the field of view, clearer light is needed to provide the field of view, the drive cylinder 1116 drives the alignment light 1115 to extend, and the first camera alignment device 121 and the second camera alignment device 221 perform the second alignment under clear light, so that the marking point in the substrate can be moved to the center of the field of view quickly and accurately, increasing exposure accuracy and reducing distortion.
如图3、图4、图9和图10所示,本实施例的所述第一曝光组件111和第二曝光组件211还均包括用于检测曝光光源能量强度的能量检测装置1117,所述能量检测装置1117滑动设置于第一曝光框板1111,能量检测装置1117分别与第一曝光光源112和第二曝光光源212连接。不同的基材需要不同的曝光时间,曝光光源长时间曝光后容易出现曝光能量强度减弱,能量检测装置1117能够分别检测出第一曝光光源112和第二曝光光源212的能量强度,并对第一曝光光源112和/或第二曝光光源212进行调整,使曝光强度保证一致,有效地保证曝光精度,减少失真度。As shown in FIG. 3, FIG. 4, FIG. 9 and FIG. 10, the first exposure assembly 111 and the second exposure assembly 211 of this embodiment also include an energy detection device 1117 for detecting the energy intensity of the exposure light source. The energy detection device 1117 is slidably disposed on the first exposure frame plate 1111 , and the energy detection device 1117 is respectively connected with the first exposure light source 112 and the second exposure light source 212 . Different substrates require different exposure times, and the exposure energy intensity tends to be weakened after the exposure light source is exposed for a long time. The energy detection device 1117 can detect the energy intensity of the first exposure light source 112 and the second exposure light source 212 respectively, and the first The exposure light source 112 and/or the second exposure light source 212 are adjusted to ensure consistent exposure intensity, effectively ensure exposure accuracy, and reduce distortion.
如图3、图4、图7和图10所示,本实施例的第一曝光装置11和第二曝光装置21均还包括用于清洁基材的清洁装置113,所述清洁装置113包括两个并列设置的清洁辊。第一曝光平台12和第二曝光平台22分别滑向第一曝光装置11和第二曝光装置21正下方时,均分别经过清洁装置113,使放置于第一曝光平台12和第二曝光平台22的基材的上表面进行清洁,清洁装置113包括两个并列设置的清洁辊,其中一个清洁辊直接与基材上表面接触,在第一曝光平台12经过时对基材上表面进行清洁,第二个清洁辊与第一个清洁辊抵接,第二个清洁辊的粘性较好,能够粘附在第一曝光平台12表面的杂质,从而对第一清洁辊进行清洁,避免第一清洁辊在长时间使用后导致的清洁性下降。As shown in Fig. 3, Fig. 4, Fig. 7 and Fig. 10, the first exposure device 11 and the second exposure device 21 of this embodiment also include a cleaning device 113 for cleaning the substrate, and the cleaning device 113 includes two Cleaning rollers arranged side by side. When the first exposure platform 12 and the second exposure platform 22 slide directly below the first exposure device 11 and the second exposure device 21, they all pass through the cleaning device 113 respectively, so that they are placed on the first exposure platform 12 and the second exposure platform 22. The upper surface of the substrate is cleaned, and the cleaning device 113 includes two cleaning rollers arranged side by side, one of which is in direct contact with the upper surface of the substrate, and cleans the upper surface of the substrate when the first exposure platform 12 passes by. The two cleaning rollers abut against the first cleaning roller, and the second cleaning roller has better viscosity and can adhere to impurities on the surface of the first exposure platform 12, thereby cleaning the first cleaning roller and avoiding the first cleaning roller Decreased cleanliness after prolonged use.
如图1、图2、图3和图13所示,本实施例的双面曝光机还包括上料机构5,所述上料机构5包括上料支架51、滑动设置于上料支架51的上料座52和用于将上料座52中的物料顶出的顶出组件,所述上料座52包括滑动设置于上料支架51的上料框521和滑动设置于上料支架51的上料挡板522,所述上料框521漏空设有调节槽5211,所述上料挡板522滑动设置于调节槽5211。第一曝光装置11还设置有用于将上料机构5输送的物料移送至第一曝光机构1的第一移料臂,待曝光的基材放置于上料座52中,基材在顶出组件的作用下顶出并被第一移料臂移取至第一曝光平台12。同时,由于放置于上料座52的基材有大有小,上料挡板522能够根据基材的大小进行滑动,使基材牢固地容设于上料座52。具体地,基材紧贴上料框521放置,上料挡板522沿着调节槽5211进行移动,并与基材的另一端紧贴,使基材合适地装设于上料座52,顶出组件从上料座52的底部顶出,第一移料臂对基材进行移料至第一曝光平台12,完全基材的上料。As shown in Fig. 1, Fig. 2, Fig. 3 and Fig. 13, the double-sided exposure machine of this embodiment also includes a feeding mechanism 5. The material loading seat 52 and the ejection assembly for ejecting the material in the material loading seat 52, the material loading seat 52 includes a material loading frame 521 which is slidably arranged on the material loading bracket 51 and a material loading frame 521 which is slidably arranged on the material loading bracket 51. The feeding baffle 522, the feeding frame 521 is provided with an adjustment groove 5211, and the feeding baffle 522 is slidably arranged in the adjustment groove 5211. The first exposure device 11 is also provided with a first material transfer arm for transferring the material conveyed by the feeding mechanism 5 to the first exposure mechanism 1. The substrate to be exposed is placed in the loading seat 52, and the substrate is placed in the ejection assembly. Ejected under the action of the first material transfer arm and moved to the first exposure platform 12 . At the same time, since the substrates placed on the loading seat 52 are different in size, the feeding baffle 522 can slide according to the size of the substrates, so that the substrates are firmly accommodated in the loading seat 52 . Specifically, the base material is placed close to the material loading frame 521, the material loading baffle 522 moves along the adjustment groove 5211, and is in close contact with the other end of the base material, so that the base material is properly installed on the material loading seat 52, and the top The output component is ejected from the bottom of the loading seat 52, and the first material transfer arm transfers the substrate to the first exposure platform 12, so that the substrate is completely loaded.
如图2和图11所示,本实施例的翻转机构3包括翻转支架31、用于承载并输送第一曝光机构1处理后的物料的第一翻转载板33、用于驱动第一翻转载板33进行翻转的翻转电机32以及用于承接第一翻转载板33所输送的物料的第二翻转载板34,所述第一翻转载板33设置有用于吸附物料的吸附孔331。第一曝光平台12完成基材的单面曝光后,第一曝光平台12滑出,第一移料臂吸取完成单面曝光的基材并输送至第一翻转载板33,真空泵对第一翻转载板33的吸附孔331进行抽真空,使物料在紧贴在第一翻转载板33,翻转电机32工作,第一翻转载板33翻转180度,物料紧贴着第一翻转载板33翻转至第二翻转载板34,真空泵停止工作,物料在重力的作用下脱离第一翻转载板33并放置于第二翻转载板34的上表面,完成物料的翻转。As shown in Fig. 2 and Fig. 11, the turning mechanism 3 of this embodiment includes a turning bracket 31, a first turning carrier plate 33 for carrying and transporting the materials processed by the first exposure mechanism 1, and a first turning carrier plate 33 for driving the first turning carrier. An inversion motor 32 for inverting the board 33 and a second inversion carrier 34 for accepting the materials conveyed by the first inversion carrier 33 , the first inversion carrier 33 is provided with adsorption holes 331 for absorbing materials. After the first exposure platform 12 completes the single-sided exposure of the substrate, the first exposure platform 12 slides out, the first material transfer arm sucks the substrate that has completed the single-sided exposure and transports it to the first turning carrier 33, and the vacuum pump rotates the first turning The suction hole 331 of the transfer plate 33 is vacuumed, so that the material is close to the first turning carrier 33, the turning motor 32 works, the first turning carrier 33 is turned over 180 degrees, and the material is turned close to the first turning carrier 33 When the second inverting carrier 34 is reached, the vacuum pump stops working, and the material is separated from the first inverting carrier 33 under the action of gravity and placed on the upper surface of the second inverting carrier 34 to complete the inversion of the material.
最后应当说明的是,以上实施例仅用以说明本实用新型的技术方案,而非对本实用新型保护范围的限制,尽管参照较佳实施例对本实用新型作了详细地说明,本领域的普通技术人员应当理解,可以对本实用新型的技术方案进行修改或者等同替换,而不脱离本实用新型技术方案的实质和范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model, rather than limiting the protection scope of the present utility model. Although the utility model has been described in detail with reference to the preferred embodiments, those skilled in the art Personnel should understand that the technical solution of the utility model can be modified or equivalently replaced without departing from the essence and scope of the technical solution of the utility model.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108255029A (en) * | 2018-03-09 | 2018-07-06 | 广东华恒智能科技有限公司 | A kind of sided exposure machine and its exposure method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108255029A (en) * | 2018-03-09 | 2018-07-06 | 广东华恒智能科技有限公司 | A kind of sided exposure machine and its exposure method |
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