CN207124801U - Electromagnetic shielding film and the printing distributing board with electromagnetic shielding film - Google Patents
Electromagnetic shielding film and the printing distributing board with electromagnetic shielding film Download PDFInfo
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- CN207124801U CN207124801U CN201720653312.1U CN201720653312U CN207124801U CN 207124801 U CN207124801 U CN 207124801U CN 201720653312 U CN201720653312 U CN 201720653312U CN 207124801 U CN207124801 U CN 207124801U
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
- H05K1/0218—Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/07—Electric details
- H05K2201/0707—Shielding
- H05K2201/0723—Shielding provided by an inner layer of PCB
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Abstract
本实用新型提供电磁波屏蔽膜和带电磁波屏蔽膜的印刷配线板,该电磁波屏蔽膜通过设置于印刷配线板表面的绝缘膜的贯通孔而能可靠地电连接于印刷配线板的印刷电路。电磁波屏蔽膜具有:绝缘树脂层(10);金属薄膜层(22),与绝缘树脂层(10)邻接;各向异性导电性粘合剂层(24),与金属薄膜层(22)的和绝缘树脂层(10)相反的一侧邻接;以及第一脱模膜(30),与绝缘树脂层(10)的和金属薄膜层(22)相反的一侧邻接,金属薄膜层(22)的厚度为150nm以上400nm以下。
The utility model provides an electromagnetic wave shielding film and a printed wiring board with the electromagnetic wave shielding film. The electromagnetic wave shielding film can be reliably electrically connected to the printed circuit of the printed wiring board through the through hole of the insulating film arranged on the surface of the printed wiring board. . The electromagnetic wave shielding film has: an insulating resin layer (10); a metal thin film layer (22), adjacent to the insulating resin layer (10); an anisotropic conductive adhesive layer (24), and the metal thin film layer (22). The opposite side of the insulating resin layer (10) is adjacent; and the first release film (30), adjacent to the opposite side of the insulating resin layer (10) and the metal film layer (22), the metal film layer (22) The thickness is not less than 150 nm and not more than 400 nm.
Description
技术领域technical field
本实用新型涉及电磁波屏蔽膜和设有电磁波屏蔽膜的印刷配线板。The utility model relates to an electromagnetic wave shielding film and a printed wiring board provided with the electromagnetic wave shielding film.
背景技术Background technique
为了屏蔽从柔性印刷配线板产生的电磁波噪音、来自外部的电磁波噪音,有时会在柔性印刷配线板的表面设置电磁波屏蔽膜,该电磁波屏蔽膜包括:绝缘树脂层;以及与绝缘树脂层邻接的由金属薄膜层和导电性粘合剂层构成的导电层(例如参照专利文献1、2)。In order to shield the electromagnetic wave noise generated from the flexible printed wiring board and the electromagnetic wave noise from the outside, an electromagnetic wave shielding film is sometimes provided on the surface of the flexible printed wiring board. The electromagnetic wave shielding film includes: an insulating resin layer; A conductive layer composed of a metal thin film layer and a conductive adhesive layer (for example, refer to Patent Documents 1 and 2).
图6是表示现有的带电磁波屏蔽膜的柔性印刷配线板的制造工序的一个例子的截面图。6 is a cross-sectional view illustrating an example of a conventional manufacturing process of a flexible printed wiring board with an electromagnetic wave shielding film.
带电磁波屏蔽膜的柔性印刷配线板101包括:柔性印刷配线板130、绝缘膜140以及剥离了第一脱模膜118的电磁波屏蔽膜110。Flexible printed wiring board 101 with electromagnetic wave shielding film includes flexible printed wiring board 130 , insulating film 140 , and electromagnetic wave shielding film 110 from which first release film 118 was peeled off.
柔性印刷配线板130在基底膜132的单面设置有印刷电路134。In flexible printed wiring board 130 , printed circuit 134 is provided on one surface of base film 132 .
绝缘膜140设置于柔性印刷配线板130的设置有印刷电路134一侧的表面。The insulating film 140 is provided on the surface of the flexible printed wiring board 130 on which the printed circuit 134 is provided.
电磁波屏蔽膜110具有:绝缘树脂层112;金属薄膜层114,与绝缘树脂层112邻接;导电性粘合剂层116,与金属薄膜层114的和绝缘树脂层112相反的一侧邻接;以及第一脱模膜118(载体膜),与绝缘树脂层112的和金属薄膜层114相反的一侧邻接。The electromagnetic wave shielding film 110 has: an insulating resin layer 112; a metal thin film layer 114 adjacent to the insulating resin layer 112; a conductive adhesive layer 116 adjacent to the side opposite to the insulating resin layer 112 of the metal thin film layer 114; A release film 118 (carrier film) adjoins the side of the insulating resin layer 112 opposite to the metal thin film layer 114 .
电磁波屏蔽膜110的导电性粘合剂层116粘结于绝缘膜140的表面、且被固化。另外,导电性粘合剂层116通过形成于绝缘膜140的贯通孔142而电连接到印刷电路134。The conductive adhesive layer 116 of the electromagnetic wave shielding film 110 is adhered to the surface of the insulating film 140 and cured. In addition, the conductive adhesive layer 116 is electrically connected to the printed circuit 134 through the through hole 142 formed in the insulating film 140 .
带电磁波屏蔽膜的柔性印刷配线板101例如像图6所示那样经下面的工序而制造。The flexible printed wiring board 101 with an electromagnetic wave shielding film is manufactured through the following process as shown in FIG. 6, for example.
工序(i):在柔性印刷配线板130的设置有印刷电路134一侧的表面设置绝缘膜140的工序,在绝缘膜140的与印刷电路134的地线对应的位置形成有贯通孔142。Step (i): The step of forming insulating film 140 on the surface of flexible printed wiring board 130 on which printed circuit 134 is provided, and forming through hole 142 in position corresponding to the ground of printed circuit 134 in insulating film 140 .
工序(ii):将电磁波屏蔽膜110以电磁波屏蔽膜110的导电性粘合剂层116接触绝缘膜140的表面的方式重叠于绝缘膜140的表面,通过对它们进行热压,使导电性粘合剂层116粘结于绝缘膜140的表面,并使导电性粘合剂层116通过贯通孔142而与印刷电路134的地线电连接的工序。Step (ii): The electromagnetic wave shielding film 110 is superimposed on the surface of the insulating film 140 in such a manner that the conductive adhesive layer 116 of the electromagnetic wave shielding film 110 contacts the surface of the insulating film 140, and the conductive adhesive is formed by hot pressing them. A process of bonding the mixture layer 116 to the surface of the insulating film 140 and electrically connecting the conductive adhesive layer 116 to the ground of the printed circuit 134 through the through hole 142 .
工序(iii):在热压后,将结束了作为载体膜的作用的第一脱模膜118从绝缘树脂层112剥离、去除,从而得到带电磁波屏蔽膜的柔性印刷配线板101的工序。Step (iii): After hot pressing, the first release film 118 that has completed its role as a carrier film is peeled and removed from the insulating resin layer 112 to obtain the flexible printed wiring board 101 with an electromagnetic wave shielding film.
现有技术文献prior art literature
专利文献patent documents
专利文献1:日本特开2000-269632号公报Patent Document 1: Japanese Patent Laid-Open No. 2000-269632
专利文献2:日本特开2015-109404号公报Patent Document 2: Japanese Patent Laid-Open No. 2015-109404
实用新型内容Utility model content
实用新型要解决的技术问题Technical problems to be solved by utility models
然而,在通过绝缘膜的贯通孔将电磁波屏蔽膜的导电性粘合剂层粘结于印刷配线板的印刷电路的情况下,地线与导电性粘合剂层的粘结易于变得不充分。为此,在从绝缘树脂层剥离第一脱模膜时、或在高温下加热带电磁波屏蔽膜的柔性印刷配线板而使导电性粘合剂层完全固化时,在地线与导电性粘合剂层之间易于发生剥离。为此,地线与导电性粘合剂层之间的连接电阻增高,有时无法可靠地进行电连接。However, when the conductive adhesive layer of the electromagnetic wave shielding film is bonded to the printed circuit of the printed wiring board through the through-hole of the insulating film, the bonding between the ground wire and the conductive adhesive layer tends to become insufficient. full. For this reason, when the first release film is peeled from the insulating resin layer, or when the flexible printed wiring board with an electromagnetic wave shielding film is heated at high temperature to completely cure the conductive adhesive layer, there is a gap between the ground wire and the conductive adhesive layer. The mixture layer is prone to peeling off. For this reason, the connection resistance between the ground wire and the conductive adhesive layer increases, and electrical connection may not be reliably performed.
本实用新型提供电磁波屏蔽膜和带电磁波屏蔽膜的印刷配线板,该电磁波屏蔽膜通过设置于印刷配线板表面的绝缘膜的贯通孔而能可靠地电连接于印刷配线板的印刷电路,在带电磁波屏蔽膜的印刷配线板中,电磁波屏蔽膜的导电性粘合剂层通过设置于印刷配线板表面的绝缘膜的贯通孔而可靠地电连接于印刷配线板的印刷电路。The utility model provides an electromagnetic wave shielding film and a printed wiring board with the electromagnetic wave shielding film. The electromagnetic wave shielding film can be reliably electrically connected to the printed circuit of the printed wiring board through the through hole of the insulating film arranged on the surface of the printed wiring board. , in the printed wiring board with electromagnetic wave shielding film, the conductive adhesive layer of the electromagnetic wave shielding film is reliably electrically connected to the printed circuit of the printed wiring board through the through hole of the insulating film provided on the surface of the printed wiring board .
用于解决技术问题的方案Solutions for technical problems
本实用新型具有以下方面。The utility model has the following aspects.
[1]电磁波屏蔽膜具有:绝缘树脂层;金属薄膜层,与所述绝缘树脂层邻接;导电性粘合剂层,与所述金属薄膜层的和所述绝缘树脂层相反的一侧邻接;以及第一脱模膜,与所述绝缘树脂层的和所述金属薄膜层相反的一侧邻接,所述金属薄膜层的厚度为150nm以上400nm以下。[1] The electromagnetic wave shielding film has: an insulating resin layer; a metal thin film layer adjacent to the insulating resin layer; a conductive adhesive layer adjacent to a side of the metal thin film layer opposite to the insulating resin layer; And the first release film is adjacent to the side of the insulating resin layer opposite to the metal thin film layer, and the thickness of the metal thin film layer is not less than 150 nm and not more than 400 nm.
[2]在[1]中所述的电磁波屏蔽膜中,所述绝缘树脂层的厚度为0.1μm以上30μm以下。[2] In the electromagnetic wave shielding film described in [1], the thickness of the insulating resin layer is not less than 0.1 μm and not more than 30 μm.
[3]在[1]或[2]中所述的电磁波屏蔽膜中,所述导电性粘合剂层包含平均粒径为2μm以上26μm以下的导电性粒子,所述导电性粘合剂层的厚度为3μm以上25μm以下。[3] In the electromagnetic wave shielding film described in [1] or [2], the conductive adhesive layer contains conductive particles having an average particle diameter of 2 μm or more and 26 μm or less, and the conductive adhesive layer The thickness is not less than 3 μm and not more than 25 μm.
[4]在[1]或[2]中所述的电磁波屏蔽膜中,所述导电性粘合剂层包含平均粒径为0.1μm以上10μm以下的导电性粒子,所述导电性粘合剂层的厚度为5μm以上20μm以下。[4] In the electromagnetic wave shielding film described in [1] or [2], the conductive adhesive layer contains conductive particles having an average particle diameter of 0.1 μm or more and 10 μm or less, and the conductive adhesive The thickness of the layer is not less than 5 μm and not more than 20 μm.
[5]带电磁波屏蔽膜的印刷配线板具有:印刷配线板,在基板的至少单面设有印刷电路;绝缘膜,与所述印刷配线板的设置有所述印刷电路一侧的表面邻接;以及[1]或[2]中所述的电磁波屏蔽膜,所述电磁波屏蔽膜的所述导电性粘合剂层与所述绝缘膜邻接、且所述导电性粘合剂层通过形成于所述绝缘膜的贯通孔而电连接于所述印刷电路。[5] A printed wiring board with an electromagnetic shielding film comprising: a printed wiring board having a printed circuit on at least one side of a substrate; and an insulating film on the side of the printed wiring board on which the printed circuit is provided surface adjoining; and the electromagnetic wave shielding film described in [1] or [2], the conductive adhesive layer of the electromagnetic wave shielding film is adjacent to the insulating film, and the conductive adhesive layer passes through The through hole formed in the insulating film is electrically connected to the printed circuit.
[6]在[5]中所述的带电磁波屏蔽膜的印刷配线板中,所述绝缘树脂层中的位于所述贯通孔的上方的部位向所述贯通孔一侧凹陷。[6] In the printed wiring board with an electromagnetic shielding film described in [5], a portion of the insulating resin layer above the through hole is recessed toward the through hole.
实用新型效果Utility Model Effect
本实用新型的电磁波屏蔽膜通过设置于印刷配线板表面的绝缘膜的贯通孔而能可靠地电连接于印刷配线板的印刷电路。The electromagnetic wave shielding film of the present invention can reliably be electrically connected to the printed circuit of the printed wiring board through the through hole of the insulating film provided on the surface of the printed wiring board.
在本实用新型的带电磁波屏蔽膜的印刷配线板中,电磁波屏蔽膜的导电性粘合剂层通过设置于印刷配线板表面的绝缘膜的贯通孔而可靠地电连接于印刷配线板的印刷电路。In the printed wiring board with electromagnetic wave shielding film of the present invention, the conductive adhesive layer of the electromagnetic wave shielding film is reliably electrically connected to the printed wiring board through the through hole of the insulating film provided on the surface of the printed wiring board. printed circuit.
附图说明Description of drawings
图1是表示本实用新型的电磁波屏蔽膜的一实施方式的截面图。FIG. 1 is a cross-sectional view showing one embodiment of the electromagnetic wave shielding film of the present invention.
图2是表示本实用新型的电磁波屏蔽膜的其它实施方式的截面图。Fig. 2 is a cross-sectional view showing another embodiment of the electromagnetic wave shielding film of the present invention.
图3是表示图1的电磁波屏蔽膜的制造工序的截面图。Fig. 3 is a cross-sectional view illustrating a manufacturing process of the electromagnetic wave shielding film of Fig. 1 .
图4是表示本实用新型的带电磁波屏蔽膜的印刷配线板的一实施方式的截面图。Fig. 4 is a cross-sectional view showing an embodiment of a printed wiring board with an electromagnetic shielding film of the present invention.
图5是表示图4的带电磁波屏蔽膜的印刷配线板的制造工序的截面图。Fig. 5 is a cross-sectional view showing a manufacturing process of the printed wiring board with an electromagnetic wave shielding film shown in Fig. 4 .
图6是表示现有的带电磁波屏蔽膜的柔性印刷配线板的制造工序的一个例子的截面图。6 is a cross-sectional view illustrating an example of a conventional manufacturing process of a flexible printed wiring board with an electromagnetic wave shielding film.
具体实施方式Detailed ways
以下的用语的定义适用于本说明书及权利要求书。The following definitions of terms apply to the present specification and claims.
“各向同性导电性粘合剂层”是指在厚度方向和面方向具有导电性的导电性粘合剂层。The "isotropic conductive adhesive layer" refers to a conductive adhesive layer having conductivity in the thickness direction and the surface direction.
“各向异性导电性粘合剂层”是指在厚度方向具有导电性、而在面方向不具有导电性的导电性粘合剂层。The "anisotropic conductive adhesive layer" refers to a conductive adhesive layer having conductivity in the thickness direction but not having conductivity in the plane direction.
“在面方向不具有导电性的导电性粘合剂层”是指表面电阻在1×104Ω以上的导电性粘合剂层。The "conductive adhesive layer having no conductivity in the plane direction" refers to a conductive adhesive layer having a surface resistance of 1×10 4 Ω or more.
导电性粒子的平均粒径是从导电性粒子的显微镜图像中任意选出30个导电性粒子,对各个导电性粒子测量最小直径和最大直径,将最小直径和最大直径的中间值作为一个粒子的粒径,并将测量出的30个导电性粒子的粒径进行算术平均而得到的值。The average particle diameter of conductive particles is 30 conductive particles randomly selected from the microscope image of conductive particles, the minimum diameter and maximum diameter are measured for each conductive particle, and the median value of the minimum diameter and maximum diameter is taken as the average value of one particle. Particle size, and the value obtained by arithmetically averaging the measured particle sizes of 30 conductive particles.
膜(脱模膜、绝缘膜等)、涂膜(绝缘树脂层、导电性粘合剂层等)、金属薄膜层等的厚度是使用显微镜观察测量对象的截面并测量五个部位的厚度进行平均而得到的值。The thickness of the film (release film, insulating film, etc.), coating film (insulating resin layer, conductive adhesive layer, etc.), metal thin film layer, etc. is measured by observing the cross-section of the measurement object with a microscope and measuring the thickness of five parts and averaging them. And get the value.
储能模量根据施加于测量对象的应力和检测出的应变而算出,使用作为温度或时间的函数输出的动态粘弹性测量装置,作为粘弹性特性之一而测定。The storage modulus is calculated from the stress applied to the measurement object and the detected strain, and is measured as one of the viscoelastic properties using a dynamic viscoelasticity measuring device whose output is a function of temperature or time.
表面电阻是使用在石英玻璃上蒸镀金形成的两根薄膜金属电极(长度10mm、宽度5mm、电极间距离10mm),在该电极上放置被测量物,从被测量物上方,以0.049N的负荷按压被测量物的10mm×20mm的区域,在1mA以下的测量电流下测定的电极间的电阻。The surface resistance is obtained by using two thin-film metal electrodes (length 10mm, width 5mm, and distance between electrodes 10mm) formed by evaporating gold on quartz glass. The object to be measured is placed on the electrodes, and a load of 0.049N is applied from above the object to be measured. Press the area of 10mm x 20mm on the object to be measured, and measure the resistance between electrodes under the measurement current of 1mA or less.
金属薄膜层的基于纳米压痕(nanoindentation)法的硬度是使用超微硬度计,并使用钻石制三角锥压头作为压头来进行基于下面的纳米压痕法(连续刚度测量法)的测量,根据测量结果以下述的计算方法而求出的。The hardness of the metal thin film layer based on the nanoindentation (nanoindentation) method is measured by the following nanoindentation method (continuous stiffness measurement method) using an ultramicrohardness tester, and using a diamond triangular cone indenter as the indenter. Calculated from the measurement results by the following calculation method.
使用三角锥压头(Berkovich压头)对金属薄膜层进行压入载荷/卸载试验,取得载荷-位移(压痕深度)曲线图。The indentation load/unloading test was carried out on the metal film layer using a triangular cone indenter (Berkovich indenter), and a load-displacement (indentation depth) curve was obtained.
最大载荷时的硬度H是使用载荷P和压入后弹性变形部分恢复而残余的压痕的投影面积A如下式(1)这样定义的。The hardness H at the maximum load is defined by the following equation (1) using the load P and the projected area A of the indentation remaining after the elastic deformation is partially recovered after pressing.
H=P/A (1)H=P/A (1)
压痕的投影面积A根据下式(2)求出。The projected area A of the indentation was obtained by the following formula (2).
A=ηkhc 2 (2)A=ηkh c 2 (2)
其中,η是压头前端形状的校正系数,k是根据压头的几何学形状求出的常数,在Berkovich压头中k=24.56,hc是有效接触深度,以下式(3)表示。Among them, η is a correction coefficient for the shape of the front end of the indenter, k is a constant obtained from the geometric shape of the indenter, k=24.56 in the Berkovich indenter, and hc is the effective contact depth, which is represented by the following formula (3).
hc=h-ε{c/(dP/dh)} (3)h c = h-ε{c/(dP/dh)} (3)
其中,h是测量的全部位移,dP/dh是得到的载荷-位移(压痕深度)曲线图中的卸载时的初始梯度,ε是根据压头的几何学形状求出的常数,在Berkovich压头中为0.75。Among them, h is the total displacement measured, dP/dh is the initial gradient at the time of unloading in the obtained load-displacement (indentation depth) curve, ε is a constant obtained according to the geometry of the indenter. 0.75 in the head.
根据式(1)、式(2)和式(3),从下式(4)算出最大载荷Pmax下的硬度。Based on the formula (1), formula (2) and formula (3), the hardness at the maximum load P max was calculated from the following formula (4).
H=Pmax/(ηkhc 2) (4)H=P max /(ηkh c 2 ) (4)
式(3)中的dP/dh是通过下面的纳米压痕法(连续刚度测量法)而算出的。dP/dh in the formula (3) was calculated by the following nanoindentation method (continuous stiffness measurement method).
连续刚度测量法是在压痕试验中使压头微振动,将相对于振动的响应振幅、相位差作为时间的函数而取得,并对应于压痕深度的连续变化连续地算出dP/dh的方法。以下示出其原理。The continuous stiffness measurement method is to vibrate the indenter slightly during the indentation test, obtain the response amplitude and phase difference relative to the vibration as a function of time, and continuously calculate dP/dh corresponding to the continuous change of the indentation depth . The principle is shown below.
压头侵入金属薄膜层的方向的力的总和(检测载荷成分)F(t)用下式(5)表示。The total force (detection load component) F(t) of the direction in which the indenter penetrates into the metal thin film layer is expressed by the following formula (5).
F(t)=m(d2h/dt2)+D(dh/dt)+Kh (5)F(t)=m(d 2 h/dt 2 )+D(dh/dt)+Kh (5)
其中,式(5)的第一项是来源于压头轴的力(m:压头轴的质量),式(5)的第二项是来源于金属薄膜层和压头系统的粘性成分的力(D:损失常数),式(5)的第三项是金属薄膜层、载荷机架(负载机架(load frame))的柔度(compliance)、支撑压头轴的板簧的刚度复合后的力(K:复合刚度),t是时间。式(5)的D和K用下式(6)、式(7)表示。Among them, the first term of formula (5) is the force derived from the indenter shaft (m: mass of the indenter shaft), and the second term of formula (5) is derived from the viscous component of the metal film layer and the indenter system Force (D: Loss constant), the third term of Equation (5) is the combination of the metal film layer, the compliance of the load frame (load frame), and the stiffness of the leaf spring supporting the indenter shaft After the force (K: composite stiffness), t is time. D and K in the formula (5) are represented by the following formulas (6) and (7).
K={(dh/dP)+Cr}-1+Ks (6)K={(dh/dP)+C r } -1 +K s (6)
D=Ds+Di (7)D=D s +D i (7)
其中,Cr是负载机架的柔度,Ks是支撑压头轴的板簧的刚度,Ds是压头系统的损失常数,Di是金属薄膜层的损失常数。where C r is the compliance of the load frame, K s is the stiffness of the leaf spring supporting the indenter shaft, D s is the loss constant of the indenter system, and D i is the loss constant of the metal film layer.
另外,式(5)的F(t)依赖于时间,所以如下式(8)那样表示。In addition, since F(t) of the formula (5) depends on time, it is represented as the following formula (8).
F(t)=F0exp(iωt) (8)F(t)=F 0 exp(iωt) (8)
其中,F0是常数,ω是角振动频率。在将式(8)代入式(5),并代入作为常微分方程式的特殊解的下式(9)来求解方程式时,如下式(10)那样计算dP/dh。where F0 is a constant and ω is the angular vibration frequency. When the equation is solved by substituting equation (8) into equation (5) and equation (9) below which is a special solution of an ordinary differential equation, dP/dh is calculated as in equation (10) below.
其中,是相位差。在式(10)中,由于Cr、m、Ks在测量时是已知的,所以在对金属薄膜层进行测量时,计测位移的振动振幅(h0)、相位差和激励振动振幅(F0),从而能根据式(10),与压痕深度的连续变化对应地连续地算出dP/dh。因而,通过将计算得到的值代入式(3),从而能够算出金属薄膜层的硬度。in, is the phase difference. In formula (10), since Cr , m, and K s are known at the time of measurement, when measuring the metal thin film layer, the vibration amplitude (h 0 ) and phase difference of the measurement displacement and the excitation vibration amplitude (F 0 ), dP/dh can be continuously calculated corresponding to the continuous change of the indentation depth according to the formula (10). Therefore, the hardness of the metal thin film layer can be calculated by substituting the calculated value into the formula (3).
导电性粒子的10%压缩强度是根据使用微压缩试验机的测量结果,通过下式(11)而求出的。The 10% compressive strength of electroconductive particle was calculated|required by following formula (11) from the measurement result using the microcompression tester.
C(x)=2.48P/πd2 (11)C(x)=2.48P/πd 2 (11)
其中,C(x)是10%压缩强度(MPa),P是粒径的10%位移时的试验力(N),d是粒径(mm)。Here, C(x) is the 10% compressive strength (MPa), P is the test force (N) at the time of 10% displacement of the particle diameter, and d is the particle diameter (mm).
<电磁波屏蔽膜><Electromagnetic wave shielding film>
图1是表示本实用新型的电磁波屏蔽膜的第一实施方式的截面图,图2是表示本实用新型的电磁波屏蔽膜的第二实施方式的截面图。FIG. 1 is a cross-sectional view showing the first embodiment of the electromagnetic wave shielding film of the present invention, and FIG. 2 is a cross-sectional view showing the second embodiment of the electromagnetic wave shielding film of the present invention.
第一实施方式和第二实施方式的电磁波屏蔽膜1具有:绝缘树脂层10;导电层20,与绝缘树脂层10邻接;第一脱模(离型)膜30,与绝缘树脂层10的和导电层20相反的一侧邻接;以及第二脱模(离型)膜40,与导电层20的和绝缘树脂层10相反的一侧邻接。The electromagnetic wave shielding film 1 of the first embodiment and the second embodiment has: an insulating resin layer 10; a conductive layer 20, adjacent to the insulating resin layer 10; a first release (release) film 30, and the insulating resin layer 10 The opposite side of the conductive layer 20 is adjacent; and the second release (release) film 40 is adjacent to the opposite side of the conductive layer 20 to the insulating resin layer 10 .
第一实施方式的电磁波屏蔽膜1是导电层20具有与绝缘树脂层10邻接的金属薄膜层22和与第二脱模膜40邻接的各向异性导电性粘合剂层24的例子。The electromagnetic wave shielding film 1 of the first embodiment is an example in which the conductive layer 20 has the metal thin film layer 22 adjacent to the insulating resin layer 10 and the anisotropic conductive adhesive layer 24 adjacent to the second release film 40 .
第二实施方式的电磁波屏蔽膜1是导电层20具有与绝缘树脂层10邻接的金属薄膜层22和与第二脱模膜40邻接的各向同性导电性粘合剂层26的例子。The electromagnetic shielding film 1 of the second embodiment is an example in which the conductive layer 20 has the metal thin film layer 22 adjacent to the insulating resin layer 10 and the isotropic conductive adhesive layer 26 adjacent to the second release film 40 .
(绝缘树脂层)(insulating resin layer)
绝缘树脂层10作为形成金属薄膜层22时的基底(打底),在将电磁波屏蔽膜1贴附于设在柔性印刷配线板的表面的绝缘膜的表面后成为金属薄膜层22的保护层。The insulating resin layer 10 serves as a base (priming) when forming the metal thin film layer 22, and becomes a protective layer of the metal thin film layer 22 after the electromagnetic wave shielding film 1 is attached to the surface of the insulating film provided on the surface of the flexible printed wiring board. .
作为绝缘树脂层10,从回流焊等时的耐热性的角度出发,优选涂布包含热固化性树脂和固化剂的涂料并使其半固化或固化而形成的涂膜。As the insulating resin layer 10 , a coating film formed by applying a coating containing a thermosetting resin and a curing agent and semi-curing or curing it is preferable from the viewpoint of heat resistance during reflow soldering or the like.
作为热固化性树脂,可举出聚酰胺树脂、环氧树脂、酚醛树脂、氨基树脂、醇酸树脂、聚氨酯树脂、合成橡胶、紫外线固化丙烯酸酯树脂等。作为热固化性树脂,从耐热性优异的角度出发,优选聚酰胺树脂、环氧树脂。Examples of thermosetting resins include polyamide resins, epoxy resins, phenolic resins, amino resins, alkyd resins, polyurethane resins, synthetic rubbers, and ultraviolet-curable acrylate resins. As the thermosetting resin, polyamide resin and epoxy resin are preferable from the viewpoint of excellent heat resistance.
作为固化剂,可举出与热固化性树脂的种类相应的公知的固化剂。Examples of the curing agent include known curing agents corresponding to the type of thermosetting resin.
热压前的绝缘树脂层10在180℃下的储能模量优选是5×106Pa以上5×109Pa以下,更优选是1×107Pa以上1×109Pa以下。若绝缘树脂层10 的180℃下的储能模量为上述范围的下限值以上,则绝缘树脂层10具有更适度的硬度,能进一步减少热压时的绝缘树脂层10中的压力损失。其结果,导电性粘合剂层与印刷配线板的印刷电路更充分地粘结,导电性粘合剂层通过绝缘膜的贯通孔而更可靠地电连接于印刷配线板的印刷电路。若绝缘树脂层10的180℃下的储能模量为上述范围的上限值以下,则电磁波屏蔽膜1的柔性变得更好。其结果,电磁波屏蔽膜1更易于沉入绝缘膜的贯通孔内,导电性粘合剂层通过绝缘膜的贯通孔而更可靠地电连接于印刷配线板的印刷电路。The storage modulus at 180°C of the insulating resin layer 10 before hot pressing is preferably 5×10 6 Pa to 5×10 9 Pa, more preferably 1×10 7 Pa to 1×10 9 Pa. When the storage modulus at 180° C. of the insulating resin layer 10 is equal to or greater than the lower limit of the above range, the insulating resin layer 10 has more appropriate hardness, and the pressure loss in the insulating resin layer 10 during hot pressing can be further reduced. As a result, the conductive adhesive layer is more fully bonded to the printed circuit of the printed wiring board, and the conductive adhesive layer is more reliably electrically connected to the printed circuit of the printed wiring board through the through-hole of the insulating film. The flexibility of the electromagnetic wave shielding film 1 will become more favorable as the storage elastic modulus in 180 degreeC of the insulating resin layer 10 is below the upper limit of the said range. As a result, the electromagnetic shielding film 1 sinks more easily into the through-holes of the insulating film, and the conductive adhesive layer is more reliably electrically connected to the printed circuit of the printed wiring board through the through-holes of the insulating film.
为了赋予带电磁波屏蔽膜的印刷配线板以外观设计性,也可以对绝缘树脂层10进行着色。The insulating resin layer 10 may be colored in order to impart designability to the printed wiring board with the electromagnetic shielding film.
为了不使绝缘树脂层10表面的划痕等醒目,也可以在绝缘树脂层10的表面转印实施了压花加工、喷砂(ブラスト)加工的第一脱模膜30的凹凸。The unevenness of the first release film 30 embossed or blasted may be transferred onto the surface of the insulating resin layer 10 in order not to conspicuous scratches or the like on the surface of the insulating resin layer 10 .
绝缘树脂层10也可以包含其它成分(阻燃剂等)。The insulating resin layer 10 may also contain other components (flame retardant, etc.).
从电绝缘性的角度出发,绝缘树脂层10的表面电阻优选是1×106Ω以上。从实际应用上的角度出发,绝缘树脂层10的表面电阻优选是1×1019Ω以下。From the viewpoint of electrical insulation, the surface resistance of the insulating resin layer 10 is preferably 1×10 6 Ω or more. From a practical point of view, the surface resistance of the insulating resin layer 10 is preferably 1×10 19 Ω or less.
绝缘树脂层10的厚度优选是0.1μm以上30μm以下,更优选是0.5μm以上20μm以下。若绝缘树脂层10的厚度为上述范围的下限值以上,则绝缘树脂层10能充分地发挥作为保护层的功能。若绝缘树脂层10的厚度为上述范围的上限值以下,则能使电磁波屏蔽膜1较薄。The thickness of the insulating resin layer 10 is preferably not less than 0.1 μm and not more than 30 μm, more preferably not less than 0.5 μm and not more than 20 μm. The insulating resin layer 10 can fully exhibit the function as a protective layer as the thickness of the insulating resin layer 10 is more than the lower limit of the said range. The electromagnetic wave shielding film 1 can be thinned as the thickness of the insulating resin layer 10 is below the upper limit of the said range.
(导电层)(conductive layer)
作为导电层20,可举出导电层(I)或导电层(II),导电层(I)具有与绝缘树脂层10邻接的金属薄膜层22和在导电层20中与绝缘树脂层10相反一侧的作为最表层的导电性粘合剂层(各向异性导电性粘合剂层24或各向同性导电性粘合剂层26),导电层(II)仅由各向同性导电性粘合剂层26构成。在本实用新型中,作为导电层20,从能充分地作为电磁波屏蔽层发挥功能的角度出发,采用导电层(I)。As the conductive layer 20, a conductive layer (I) or a conductive layer (II) can be mentioned, and the conductive layer (I) has a metal thin film layer 22 adjacent to the insulating resin layer 10 and a layer opposite to the insulating resin layer 10 in the conductive layer 20. As the conductive adhesive layer (anisotropic conductive adhesive layer 24 or isotropic conductive adhesive layer 26) on the side as the outermost layer, the conductive layer (II) is only bonded by isotropic conductive adhesive Agent layer 26 constitutes. In the present invention, as the conductive layer 20 , the conductive layer (I) is employed from the viewpoint of being able to sufficiently function as an electromagnetic wave shielding layer.
(金属薄膜层)(metal thin film layer)
金属薄膜层22是由金属的薄膜构成的层。金属薄膜层22形成为在面方向上扩展,从而在面方向上具有导电性,作为电磁波屏蔽层等发挥功能。The metal thin film layer 22 is a layer made of a metal thin film. The metal thin film layer 22 is formed so as to spread in the plane direction, has conductivity in the plane direction, and functions as an electromagnetic wave shielding layer or the like.
作为金属薄膜层22,可举出通过物理蒸镀(真空蒸镀、溅射、离子束蒸镀、电子束蒸镀等)或者CVD形成的蒸镀膜、通过电镀形成的电镀膜、金属箔等。从面方向的导电性优异的角度出发,优选蒸镀膜、电镀膜,从能使厚度较薄、且即使厚度薄面方向的导电性也优异、并能以干法工艺简便地形成的角度出发,更优选蒸镀膜,进一步优选通过物理蒸镀的蒸镀膜。Examples of the metal thin film layer 22 include vapor deposition films formed by physical vapor deposition (vacuum deposition, sputtering, ion beam deposition, electron beam deposition, etc.) or CVD, plated films formed by electroplating, and metal foils. From the point of view of excellent electrical conductivity in the plane direction, vapor-deposited films and plated films are preferred, and from the perspective that the thickness can be made thinner, the electrical conductivity in the plane direction is excellent even if the thickness is thin, and it can be easily formed by a dry process. A vapor-deposited film is preferable, and a vapor-deposited film by physical vapor deposition is more preferable.
作为构成金属薄膜层22的金属,可举出铝、银、铜、金、导电性陶瓷等。从电导率的角度、以及金属薄膜层22具有适度的硬度、能减少热压时金属薄膜层22中的压力损失的角度出发,优选铜。Examples of the metal constituting the metal thin film layer 22 include aluminum, silver, copper, gold, conductive ceramics, and the like. Copper is preferable from the viewpoint of electrical conductivity, the metal thin film layer 22 has moderate hardness, and the pressure loss in the metal thin film layer 22 can be reduced during hot pressing.
金属薄膜层22的基于纳米压痕法的硬度优选是0.3GPa以上2.0GPa以下,更优选是0.4GPa以上1.5GPa以下,进一步优选是0.5GPa以上1.0GPa以下。若金属薄膜层22的基于纳米压痕法的硬度为上述范围的下限值以上,则金属薄膜层22具有更适度的硬度,能进一步减少热压时金属薄膜层22中的压力损失。其结果,导电性粘合剂层与印刷配线板的印刷电路更充分地粘结,导电性粘合剂层通过绝缘膜的贯通孔而更可靠地电连接于印刷配线板的印刷电路。若金属薄膜层22的基于纳米压痕法的硬度为上述范围的上限值以下,则电磁波屏蔽膜1的柔性变得更好。其结果,电磁波屏蔽膜1更易于沉入绝缘膜的贯通孔内,导电性粘合剂层通过绝缘膜的贯通孔而更可靠地电连接于印刷配线板的印刷电路。The hardness of the metal thin film layer 22 by the nanoindentation method is preferably not less than 0.3 GPa and not more than 2.0 GPa, more preferably not less than 0.4 GPa and not more than 1.5 GPa, still more preferably not less than 0.5 GPa and not more than 1.0 GPa. When the hardness of the metal thin film layer 22 by the nanoindentation method is above the lower limit of the above range, the metal thin film layer 22 has a more moderate hardness, and the pressure loss in the metal thin film layer 22 during hot pressing can be further reduced. As a result, the conductive adhesive layer is more fully bonded to the printed circuit of the printed wiring board, and the conductive adhesive layer is more reliably electrically connected to the printed circuit of the printed wiring board through the through-hole of the insulating film. When the hardness by the nanoindentation method of the metal thin film layer 22 is below the upper limit of the said range, the flexibility of the electromagnetic wave shielding film 1 will become more favorable. As a result, the electromagnetic shielding film 1 sinks more easily into the through-holes of the insulating film, and the conductive adhesive layer is more reliably electrically connected to the printed circuit of the printed wiring board through the through-holes of the insulating film.
金属薄膜层22的表面电阻优选是0.001Ω以上1Ω以下,更优选是0.001Ω以上0.1Ω以下。若金属薄膜层22的表面电阻为上述范围的下限值以上,则能够使金属薄膜层22足够薄。若金属薄膜层22的表面电阻为上述范围的上限值以下,则能作为电磁波屏蔽层充分地发挥功能。The surface resistance of the metal thin film layer 22 is preferably not less than 0.001Ω and not more than 1Ω, more preferably not less than 0.001Ω and not more than 0.1Ω. If the surface resistance of the metal thin film layer 22 is more than the lower limit value of the said range, the metal thin film layer 22 can be made thin enough. If the surface resistance of the metal thin film layer 22 is below the upper limit of the said range, it can fully function as an electromagnetic wave shielding layer.
金属薄膜层22的厚度是150nm以上400nm以下,优选是200nm以上350nm以下,更优选是250nm以上300nm以下。若金属薄膜层22的厚度为上述范围的下限值以上,则金属薄膜层22具有适度的硬度,能减少热压时金属薄膜层22中的压力损失。其结果,导电性粘合剂层与印刷配线板的印刷电路被充分地粘结,导电性粘合剂层通过绝缘膜的贯通孔而可靠地电连接于印刷配线板的印刷电路。若金属薄膜层22的厚度为上述范围的上限值以下,则电磁波屏蔽膜1的柔性好。其结果,电磁波屏蔽膜1易于沉入绝缘膜的贯通孔内,导电性粘合剂层通过绝缘膜的贯通孔而可靠地电连接于印刷配线板的印刷电路。The thickness of the metal thin film layer 22 is not less than 150 nm and not more than 400 nm, preferably not less than 200 nm and not more than 350 nm, more preferably not less than 250 nm and not more than 300 nm. When the thickness of the metal thin film layer 22 is more than the lower limit of the above-mentioned range, the metal thin film layer 22 has moderate hardness, and the pressure loss in the metal thin film layer 22 during hot pressing can be reduced. As a result, the conductive adhesive layer and the printed circuit of the printed wiring board are sufficiently bonded, and the conductive adhesive layer is reliably electrically connected to the printed circuit of the printed wiring board through the through-hole of the insulating film. The flexibility of the electromagnetic wave shielding film 1 will be favorable as the thickness of the metal thin film layer 22 is below the upper limit of the said range. As a result, the electromagnetic shielding film 1 sinks easily into the through-holes of the insulating film, and the conductive adhesive layer is reliably electrically connected to the printed circuit of the printed wiring board through the through-holes of the insulating film.
(导电性粘合剂层)(conductive adhesive layer)
导电性粘合剂层至少在厚度方向具有导电性、且具有粘接性。The conductive adhesive layer has conductivity and adhesiveness at least in the thickness direction.
作为导电性粘合剂层,可举出在厚度方向具有导电性、而在面方向不具有导电性的各向异性导电性粘合剂层24、或者在厚度方向和面方向均具有导电性的各向同性导电性粘合剂层26。作为导电层(I)中的导电性粘合剂层,从下面的角度出发,优选各向异性导电性粘合剂层24。Examples of the conductive adhesive layer include an anisotropic conductive adhesive layer 24 having conductivity in the thickness direction but not having conductivity in the plane direction, or an anisotropic conductive adhesive layer 24 having conductivity in both the thickness direction and the plane direction. Isotropic conductive adhesive layer 26 . As the conductive adhesive layer in the conductive layer (I), the anisotropic conductive adhesive layer 24 is preferable from the following viewpoints.
·导电性粘合剂层具有更为适度的硬度,能进一步减少热压时导电性粘合剂层中的压力损失。·The conductive adhesive layer has more appropriate hardness, which can further reduce the pressure loss in the conductive adhesive layer at the time of hot pressing.
·能使导电性粘合剂层较薄,导电性粒子的量变少,其结果,能使电磁波屏蔽膜1较薄,电磁波屏蔽膜1的柔性好。·The conductive adhesive layer can be made thinner, and the amount of conductive particles can be reduced. As a result, the electromagnetic wave shielding film 1 can be made thinner, and the flexibility of the electromagnetic wave shielding film 1 is good.
作为导电层(I)中的导电性粘合剂层,从能作为电磁波屏蔽层充分地发挥功能的角度出发,优选各向同性导电性粘合剂层26。As the conductive adhesive layer in the conductive layer (I), the isotropic conductive adhesive layer 26 is preferable because it can sufficiently function as an electromagnetic wave shielding layer.
作为导电性粘合剂层,从固化后能发挥耐热性的角度出发,优选热固化性的导电性粘合剂层。热固化性的导电性粘合剂层既可以是未固化的状态,也可以是乙阶(B-stage)化的状态。As the conductive adhesive layer, a thermosetting conductive adhesive layer is preferable from the viewpoint of exhibiting heat resistance after curing. The thermosetting conductive adhesive layer may be in an uncured state or in a B-staged state.
热固化性的各向异性导电性粘合剂层24例如包含热固化性粘合剂24a和导电性粒子24b。热固化性的各向异性导电性粘合剂层24也可以根据需要包含阻燃剂。The thermosetting anisotropic conductive adhesive layer 24 includes, for example, a thermosetting adhesive 24a and conductive particles 24b. The thermosetting anisotropic conductive adhesive layer 24 may contain a flame retardant as needed.
热固化性的各向同性导电性粘合剂层26例如包含热固化性粘合剂26a和导电性粒子26b。热固化性的各向同性导电性粘合剂层26也可以根据需要包含阻燃剂。The thermosetting isotropic conductive adhesive layer 26 includes, for example, a thermosetting adhesive 26a and conductive particles 26b. The thermosetting isotropic conductive adhesive layer 26 may contain a flame retardant as needed.
作为热固化性粘合剂,可举出环氧树脂、酚醛树脂、氨基树脂、醇酸树脂、聚氨酯树脂、合成橡胶、紫外线固化丙烯酸酯树脂等。从耐热性优异的角度出发,优选环氧树脂。环氧树脂也可以包含用于赋予柔性的橡胶成分(羧基改性丁腈橡胶、丙烯酸橡胶等)、赋粘剂等。Examples of thermosetting adhesives include epoxy resins, phenolic resins, amino resins, alkyd resins, polyurethane resins, synthetic rubbers, and ultraviolet-curable acrylate resins. From the viewpoint of excellent heat resistance, epoxy resin is preferable. The epoxy resin may also contain a rubber component (carboxy-modified nitrile rubber, acrylic rubber, etc.), a tackifier, and the like for imparting flexibility.
为了提高导电性粘合剂层的强度、提高冲压特性,热固化性粘合剂也可以包含纤维素树脂、微纤维(microfibril,玻璃纤维等)。In order to increase the strength of the conductive adhesive layer and improve the stamping characteristics, the thermosetting adhesive may contain cellulose resin, microfiber (microfibril, glass fiber, etc.).
作为导电性粒子,可举出金属(银、铂、金、铜、镍、钯、铝、焊料等)的粒子、石墨粉、煅烧碳粒子、被电镀的煅烧碳粒子等。作为导电性粒子,从导电性粘合剂层具有更适度的硬度,能进一步减少热压时导电性粘合剂层中的压力损失的角度出发,优选金属粒子,更优选铜粒子。Examples of the conductive particles include metal (silver, platinum, gold, copper, nickel, palladium, aluminum, solder, etc.) particles, graphite powder, calcined carbon particles, and plated calcined carbon particles. As the electroconductive particles, metal particles are preferable, and copper particles are more preferable because the electroconductive adhesive layer has more appropriate hardness and can further reduce pressure loss in the electroconductive adhesive layer during hot pressing.
导电性粒子的10%压缩强度优选是30MPa以上200MPa以下,更优选是50MPa以上150MPa以下,进一步优选是70MPa以上100MPa以下。若导电性粒子的10%压缩强度为上述范围的下限值以上,则不会在热压时较大地损失对金属薄膜层22施加的压力,导电性粘合剂层通过绝缘膜的贯通孔而更可靠地电连接于印刷配线板的印刷电路。若导电性粒子的10%压缩强度为上述范围的上限值以下,则与金属薄膜层22的接触好,电连接可靠。The 10% compressive strength of the electroconductive particle is preferably 30 MPa to 200 MPa, more preferably 50 MPa to 150 MPa, still more preferably 70 MPa to 100 MPa. If the 10% compressive strength of the conductive particles is more than the lower limit of the above range, the pressure applied to the metal thin film layer 22 will not be greatly lost during hot pressing, and the conductive adhesive layer will pass through the through holes of the insulating film. A printed circuit that is electrically connected to a printed wiring board more reliably. If the 10% compressive strength of electroconductive particle is below the upper limit of the said range, contact with the metal thin film layer 22 will be favorable and electrical connection will be reliable.
各向异性导电性粘合剂层24中的导电性粒子24b的平均粒径优选是2μm以上26μm以下,更优选是4μm以上16μm以下。若导电性粒子24b的平均粒径为上述范围的下限值以上,则能确保各向异性导电性粘合剂层24的厚度,能得到足够的粘合强度。若导电性粒子24b的平均粒径为上述范围的上限值以下,则能确保各向异性导电性粘合剂层24的流动性(对绝缘膜的贯通孔形状的追随性),能用导电性粘合剂将绝缘膜的贯通孔内充分地填埋。The average particle diameter of the electroconductive particle 24b in the anisotropic conductive adhesive layer 24 is preferably 2 μm or more and 26 μm or less, more preferably 4 μm or more and 16 μm or less. The thickness of the anisotropic electroconductive adhesive layer 24 can be ensured as the average particle diameter of the electroconductive particle 24b is more than the lower limit of the said range, and sufficient adhesive strength can be acquired. If the average particle diameter of the conductive particles 24b is below the upper limit of the above-mentioned range, the fluidity of the anisotropic conductive adhesive layer 24 (followability to the shape of the through-hole of the insulating film) can be ensured, and the conductivity can be used. The permanent adhesive fully fills the through-holes of the insulating film.
各向同性导电性粘合剂层26中的导电性粒子26b的平均粒径优选是0.1μm以上10μm以下,更优选是0.2μm以上1μm以下。若导电性粒子26b的平均粒径为上述范围的下限值以上,则导电性粒子26b的接触点数量增加,能稳定地提高三维方向的导通性。若导电性粒子26b的平均粒径为上述范围的上限值以下,则能确保各向同性导电性粘合剂层26的流动性(对绝缘膜的贯通孔形状的追随性),能用导电性粘合剂将绝缘膜的贯通孔内充分地填埋。The average particle diameter of the electroconductive particle 26b in the isotropic conductive adhesive layer 26 is preferably 0.1 μm or more and 10 μm or less, more preferably 0.2 μm or more and 1 μm or less. The number of contact points of the electroconductive particle 26b increases that the average particle diameter of the electroconductive particle 26b is more than the lower limit of the said range, and can improve the conductivity of a three-dimensional direction stably. If the average particle size of the conductive particles 26b is below the upper limit of the above-mentioned range, the fluidity of the isotropic conductive adhesive layer 26 (followability to the shape of the through-hole of the insulating film) can be ensured, and the conductivity can be used. The permanent adhesive fully fills the through-holes of the insulating film.
各向异性导电性粘合剂层24中的导电性粒子24b的比例在各向异性导电性粘合剂层24的100体积%中,优选是1体积%以上30体积%以下,更优选是2体积%以上10体积%以下。若导电性粒子24b的比例在上述范围的下限值以上,则各向异性导电性粘合剂层24的导电性良好。若导电性粒子24b的比例在上述范围的上限值以下,则各向异性导电性粘合剂层24的粘接性、流动性(对绝缘膜的贯通孔形状的追随性)良好。另外,电磁波屏蔽膜1的柔性好。The ratio of the conductive particles 24b in the anisotropic conductive adhesive layer 24 is preferably 1% by volume or more and 30% by volume or less, more preferably 2% by volume, in 100% by volume of the anisotropic conductive adhesive layer 24. Volume % or more and 10 volume % or less. The electroconductivity of the anisotropic electroconductive adhesive layer 24 becomes favorable that the ratio of the electroconductive particle 24b is more than the lower limit of the said range. When the ratio of electroconductive particle 24b is below the upper limit of the said range, the adhesiveness of the anisotropic electroconductive adhesive layer 24 and fluidity (followability to the shape of the through-hole of an insulating film) will become favorable. In addition, the electromagnetic wave shielding film 1 has good flexibility.
各向同性导电性粘合剂层26中的导电性粒子26b的比例在各向同性导电性粘合剂层26的100体积%中,优选是50体积%以上80体积%以下,更优选是60体积%以上70体积%以下。若导电性粒子26b的比例为上述范围的下限值以上,则各向同性导电性粘合剂层26的导电性良好。若导电性粒子26b的比例为上述范围的上限值以下,则各向同性导电性粘合剂层26的粘接性、流动性(对绝缘膜的贯通孔形状的追随性)良好。另外,电磁波屏蔽膜1的柔性好。The ratio of the conductive particles 26b in the isotropic conductive adhesive layer 26 is preferably 50% by volume or more and 80% by volume or less, more preferably 60% by volume in 100% by volume of the isotropic conductive adhesive layer 26. Volume % or more and 70 volume % or less. The electroconductivity of the isotropic electroconductive adhesive layer 26 becomes favorable that the ratio of the electroconductive particle 26b is more than the lower limit of the said range. When the ratio of electroconductive particle 26b is below the upper limit of the said range, the adhesiveness of the isotropic electroconductive adhesive layer 26 and fluidity (followability to the through-hole shape of an insulating film) are favorable. In addition, the electromagnetic wave shielding film 1 has good flexibility.
各向异性导电性粘合剂层24的表面电阻优选是1×104Ω以上1×1016Ω以下,更优选是1×106Ω以上1×1014Ω以下。若各向异性导电性粘合剂层24的表面电阻为上述范围的下限值以上,则可将导电性粒子24b的含量抑制在低水平。The surface resistance of the anisotropic conductive adhesive layer 24 is preferably not less than 1×10 4 Ω and not more than 1×10 16 Ω, more preferably not less than 1×10 6 Ω and not more than 1×10 14 Ω. Content of the electroconductive particle 24b can be suppressed low as the surface resistance of the anisotropic electroconductive adhesive layer 24 is more than the lower limit of the said range.
若各向异性导电性粘合剂层24的表面电阻为上述范围的上限值以下,则在实际应用上在各向异性方面没有问题。When the surface resistance of the anisotropic electroconductive adhesive layer 24 is below the upper limit of the said range, there will be no problem practically in terms of anisotropy.
各向同性导电性粘合剂层26的表面电阻优选是0.05Ω以上2.0Ω以下,更优选是0.1Ω以上1.0Ω以下。若各向同性导电性粘合剂层26的表面电阻为上述范围的下限值以上,则可将导电性粒子26b的含量抑制在低水平,导电性粘合剂的粘度不会过高,涂布性更为良好。另外,能进一步确保各向同性导电性粘合剂层26的流动性(对绝缘膜的贯通孔形状的追随性)。若各向同性导电性粘合剂层26的表面电阻为上述范围的上限值以下,则各向同性导电性粘合剂层26的整面具有均匀的导电性。The surface resistance of the isotropic conductive adhesive layer 26 is preferably not less than 0.05Ω and not more than 2.0Ω, more preferably not less than 0.1Ω and not more than 1.0Ω. If the surface resistance of the isotropic conductive adhesive layer 26 is more than the lower limit of the above-mentioned range, the content of the conductive particles 26b can be suppressed at a low level, and the viscosity of the conductive adhesive will not be too high. Cloth is better. In addition, the fluidity of the isotropic conductive adhesive layer 26 (followability to the shape of the through-hole of the insulating film) can be further ensured. If the surface resistance of the isotropic conductive adhesive layer 26 is below the upper limit of the said range, the whole surface of the isotropic conductive adhesive layer 26 will have uniform conductivity.
导电性粘合剂层的在180℃下的储能模量优选是1×103Pa以上5×107Pa以下,更优选是5×103Pa以上1×107Pa以下。若导电性粘合剂层在180℃下的储能模量为上述范围的下限值以上,则导电性粘合剂层具有更适度的硬度,能进一步减少热压时导电性粘合剂层中的压力损失。其结果,导电性粘合剂层与印刷配线板的印刷电路被进一步充分地粘结,导电性粘合剂层通过绝缘膜的贯通孔而更可靠地电连接于印刷配线板的印刷电路。若导电性粘合剂层在180℃下的储能模量为上述范围的上限值以下,则电磁波屏蔽膜1的柔性变得更好。其结果,电磁波屏蔽膜1更易于沉入绝缘膜的贯通孔内,导电性粘合剂层通过绝缘膜的贯通孔而更可靠地电连接于印刷配线板的印刷电路。The storage modulus at 180° C. of the conductive adhesive layer is preferably not less than 1×10 3 Pa and not more than 5×10 7 Pa, more preferably not less than 5×10 3 Pa and not more than 1×10 7 Pa. If the storage modulus of the conductive adhesive layer at 180° C. is more than the lower limit of the above range, the conductive adhesive layer has a more moderate hardness, and the conductive adhesive layer can be further reduced during hot pressing. pressure loss in. As a result, the conductive adhesive layer and the printed circuit of the printed wiring board are more fully bonded, and the conductive adhesive layer is more reliably electrically connected to the printed circuit of the printed wiring board through the through-hole of the insulating film. . The flexibility of the electromagnetic wave shielding film 1 will become more favorable as the storage elastic modulus in 180 degreeC of a conductive adhesive layer is below the upper limit of the said range. As a result, the electromagnetic shielding film 1 sinks more easily into the through-holes of the insulating film, and the conductive adhesive layer is more reliably electrically connected to the printed circuit of the printed wiring board through the through-holes of the insulating film.
各向异性导电性粘合剂层24的厚度优选是3μm以上25μm以下,更优选是5μm以上15μm以下。若各向异性导电性粘合剂层24的厚度在上述范围的下限值以上,则能确保各向异性导电性粘合剂层24的流动性(对绝缘膜的贯通孔形状的追随性),能用导电性粘合剂将绝缘膜的贯通孔内充分地填埋。若各向异性导电性粘合剂层24的厚度在上述范围的上限值以下,则能使电磁波屏蔽膜1较薄。另外,电磁波屏蔽膜1的柔性好。The thickness of the anisotropic conductive adhesive layer 24 is preferably not less than 3 μm and not more than 25 μm, more preferably not less than 5 μm and not more than 15 μm. When the thickness of the anisotropic conductive adhesive layer 24 is more than the lower limit of the above range, the fluidity of the anisotropic conductive adhesive layer 24 (followability to the shape of the through hole of the insulating film) can be ensured. Therefore, the inside of the through-hole of the insulating film can be sufficiently filled with the conductive adhesive. The electromagnetic wave shielding film 1 can be thinned as the thickness of the anisotropic conductive adhesive layer 24 is below the upper limit of the said range. In addition, the electromagnetic wave shielding film 1 has good flexibility.
各向同性导电性粘合剂层26的厚度优选是5μm以上20μm以下,更优选是7μm以上17μm以下。若各向同性导电性粘合剂层26的厚度在上述范围的下限值以上,则各向同性导电性粘合剂层26的导电性良好,能够作为电磁波屏蔽层充分地发挥功能。另外,能确保各向同性导电性粘合剂层26的流动性(对绝缘膜的贯通孔形状的追随性),能用导电性粘合剂将绝缘膜的贯通孔内充分地填埋,还能确保耐折性,即使反复折弯,各向同性导电性粘合剂层26也不会断裂。若各向同性导电性粘合剂层26的厚度在上述范围的上限值以下,则能使电磁波屏蔽膜1较薄。另外,电磁波屏蔽膜1的柔性好。The thickness of the isotropic conductive adhesive layer 26 is preferably not less than 5 μm and not more than 20 μm, more preferably not less than 7 μm and not more than 17 μm. When the thickness of the isotropic conductive adhesive layer 26 is more than the lower limit of the above-mentioned range, the conductivity of the isotropic conductive adhesive layer 26 is good, and it can fully function as an electromagnetic wave shielding layer. In addition, the fluidity of the isotropic conductive adhesive layer 26 (followability to the shape of the through-hole of the insulating film) can be ensured, and the inside of the through-hole of the insulating film can be sufficiently filled with the conductive adhesive. The folding resistance can be ensured, and the isotropic conductive adhesive layer 26 will not be broken even if it is repeatedly bent. The electromagnetic wave shielding film 1 can be thinned as the thickness of the isotropic conductive adhesive layer 26 is below the upper limit of the said range. In addition, the electromagnetic wave shielding film 1 has good flexibility.
(第一脱模膜)(first release film)
第一脱模膜30作为形成绝缘树脂层10、导电层20时的载体膜,使电磁波屏蔽膜1的操作性良好。第一脱模膜30在将电磁波屏蔽膜1贴附于了印刷配线板等之后从绝缘树脂层10剥离。The first release film 30 serves as a carrier film when the insulating resin layer 10 and the conductive layer 20 are formed, and improves the handleability of the electromagnetic wave shielding film 1 . The first release film 30 is peeled from the insulating resin layer 10 after the electromagnetic wave shielding film 1 is attached to a printed wiring board or the like.
第一脱模膜30例如具有脱模膜主体32和设置于脱模膜主体32的绝缘树脂层10侧的表面的脱模剂层34。The first release film 30 has, for example, a release film main body 32 and a release agent layer 34 provided on the surface of the release film main body 32 on the insulating resin layer 10 side.
作为脱模膜主体32的树脂材料,可举出聚对苯二甲酸乙二醇酯、聚萘二甲酸乙二酯、聚间苯二甲酸乙二醇酯、聚对苯二甲酸丁二醇酯、聚烯烃、聚乙酸酯、聚碳酸酯、聚苯硫醚、聚酰胺、乙烯-乙酸乙烯共聚物、聚氯乙烯、聚偏二氯乙烯、合成橡胶、液晶聚合物等,从制造电磁波屏蔽膜1时的耐热性(尺寸稳定性)和成本的角度出发,优选聚对苯二甲酸乙二醇酯。Examples of the resin material for the release film main body 32 include polyethylene terephthalate, polyethylene naphthalate, polyethylene isophthalate, and polybutylene terephthalate. , polyolefin, polyacetate, polycarbonate, polyphenylene sulfide, polyamide, ethylene-vinyl acetate copolymer, polyvinyl chloride, polyvinylidene chloride, synthetic rubber, liquid crystal polymer, etc., from the manufacture of electromagnetic wave shielding From the viewpoint of heat resistance (dimensional stability) and cost in the case of the film 1, polyethylene terephthalate is preferable.
脱模膜主体32的在180℃下的储能模量优选是8×107Pa以上5×109Pa以下,更优选是1×108Pa以上8×108Pa以下。若脱模膜主体32的180℃下的储能模量在上述范围的下限值以上,则第一脱模膜30具有更为适度的硬度,能进一步减少热压时第一脱模膜30中的压力损失。其结果,导电性粘合剂层与印刷配线板的印刷电路被进一步充分地粘结,导电性粘合剂层通过绝缘膜的贯通孔而更可靠地电连接于印刷配线板的印刷电路。若脱模膜主体32的180℃下的储能模量在上述范围的上限值以下,则电磁波屏蔽膜1的柔性变得更好。其结果,电磁波屏蔽膜1更易于沉入绝缘膜的贯通孔内,导电性粘合剂层通过绝缘膜的贯通孔而更可靠地电连接于印刷配线板的印刷电路。The storage modulus at 180° C. of the release film main body 32 is preferably not less than 8×10 7 Pa and not more than 5×10 9 Pa, more preferably not less than 1×10 8 Pa and not more than 8×10 8 Pa. If the storage modulus at 180°C of the release film main body 32 is above the lower limit of the above-mentioned range, the first release film 30 will have a more moderate hardness, which can further reduce the hardness of the first release film 30 during hot pressing. pressure loss in. As a result, the conductive adhesive layer and the printed circuit of the printed wiring board are more fully bonded, and the conductive adhesive layer is more reliably electrically connected to the printed circuit of the printed wiring board through the through-hole of the insulating film. . The flexibility of the electromagnetic wave shielding film 1 will become more favorable as the storage modulus in 180 degreeC of the release film main body 32 is below the upper limit of the said range. As a result, the electromagnetic shielding film 1 sinks more easily into the through-holes of the insulating film, and the conductive adhesive layer is more reliably electrically connected to the printed circuit of the printed wiring board through the through-holes of the insulating film.
脱模膜主体32的厚度优选是5μm以上500μm以下,更优选是10μm以上150μm以下,进一步优选是25μm以上100μm以下。若脱模膜主体32的厚度为上述范围的下限值以上,则电磁波屏蔽膜1的操作性变得良好。若脱模膜主体32的厚度为上述范围的上限值以下,则在将电磁波屏蔽膜1的导电性粘合剂层热压于绝缘膜的表面时,热易于传递到导电性粘合剂层。The thickness of the release film main body 32 is preferably not less than 5 μm and not more than 500 μm, more preferably not less than 10 μm and not more than 150 μm, and still more preferably not less than 25 μm and not more than 100 μm. The handleability of the electromagnetic wave shielding film 1 becomes favorable that the thickness of the release film main body 32 is more than the lower limit of the said range. When the thickness of the release film main body 32 is below the upper limit of the above range, heat is easily transferred to the conductive adhesive layer when the conductive adhesive layer of the electromagnetic wave shielding film 1 is hot-pressed on the surface of the insulating film. .
脱模剂层34是对脱模膜主体32的表面实施利用脱模剂的脱模处理而形成的层。由于第一脱模膜30具有脱模剂层34,从而在将第一脱模膜30 从绝缘树脂层10剥离时,易于剥离第一脱模膜30,绝缘树脂层10、固化后的导电性粘合剂层不易断裂。The release agent layer 34 is a layer formed by subjecting the surface of the release film main body 32 to a release treatment with a release agent. Since the first release film 30 has a release agent layer 34, when the first release film 30 is peeled off from the insulating resin layer 10, the first release film 30 is easy to peel off, and the insulating resin layer 10 and the cured conductivity The adhesive layer is not easy to break.
作为脱模剂,使用公知的脱模剂即可。As a mold release agent, what is necessary is just to use a well-known mold release agent.
脱模剂层34的厚度优选是0.05μm以上2.0μm以下,更优选是0.1μm以上1.5μm以下。若脱模剂层34的厚度在上述范围内,则更易于将第一脱模膜30剥离。The thickness of the release agent layer 34 is preferably not less than 0.05 μm and not more than 2.0 μm, more preferably not less than 0.1 μm and not more than 1.5 μm. When the thickness of the release agent layer 34 is within the above-mentioned range, it will be easier to peel the first release film 30 .
(第二脱模膜)(second release film)
第二脱模膜40保护导电性粘合剂层,使电磁波屏蔽膜1的操作性变得良好。第二脱模膜40在将电磁波屏蔽膜1贴附于印刷配线板等之前从导电性粘合剂层剥离。The second release film 40 protects the conductive adhesive layer and improves the handleability of the electromagnetic wave shielding film 1 . The second release film 40 is peeled from the conductive adhesive layer before the electromagnetic wave shielding film 1 is attached to a printed wiring board or the like.
第二脱模膜40例如具有脱模膜主体42和设置于脱模膜主体42的导电性粘合剂层侧的表面的脱模剂层44。The second release film 40 has, for example, a release film main body 42 and a release agent layer 44 provided on the surface of the release film main body 42 on the side of the conductive adhesive layer.
作为脱模膜主体42的树脂材料,可举出与脱模膜主体32的树脂材料相同的树脂材料。As the resin material of the release film main body 42, the resin material similar to the resin material of the release film main body 32 is mentioned.
脱模膜主体42的厚度优选是5μm以上500μm以下,更优选是10μm以上150μm以下,进一步优选是25μm以上100μm以下。The thickness of the release film main body 42 is preferably not less than 5 μm and not more than 500 μm, more preferably not less than 10 μm and not more than 150 μm, and still more preferably not less than 25 μm and not more than 100 μm.
脱模剂层44是对脱模膜主体42的表面实施利用脱模剂的脱模处理而形成的层。由于第二脱模膜40具有脱模剂层44,从而在将第二脱模膜40从导电性粘合剂层剥离时,易于将第二脱模膜40剥离,导电性粘合剂层不易断裂。The release agent layer 44 is a layer formed by subjecting the surface of the release film main body 42 to a release treatment with a release agent. Since the second release film 40 has the release agent layer 44, when the second release film 40 is peeled off from the conductive adhesive layer, the second release film 40 is easily peeled off, and the conductive adhesive layer is not easily fracture.
作为脱模剂,使用公知的脱模剂即可。As a mold release agent, what is necessary is just to use a well-known mold release agent.
脱模剂层34的厚度优选是0.05μm以上2.0μm以下,更优选是0.1μm以上1.5μm以下。若脱模剂层34的厚度在上述范围内,则更易于将第二脱模膜40剥离。The thickness of the release agent layer 34 is preferably not less than 0.05 μm and not more than 2.0 μm, more preferably not less than 0.1 μm and not more than 1.5 μm. When the thickness of the release agent layer 34 is within the above-mentioned range, it will be easier to peel the second release film 40 .
(电磁波屏蔽膜的厚度)(thickness of electromagnetic wave shielding film)
电磁波屏蔽膜1的厚度(除脱模膜以外)优选是10μm以上45μm以下,更优选是10μm以上30μm以下。若电磁波屏蔽膜1的厚度(除脱模膜以外)在上述范围的下限值以上,则在将第一脱模膜30剥离时不易断裂。若电磁波屏蔽膜1的厚度(除脱模膜以外)在上述范围的上限值以下,则能使带电磁波屏蔽膜的印刷配线板较薄。The thickness of the electromagnetic wave shielding film 1 (excluding the mold release film) is preferably 10 μm to 45 μm, more preferably 10 μm to 30 μm. When the thickness (except the release film) of the electromagnetic wave shielding film 1 is more than the lower limit of the said range, when peeling the 1st release film 30, it will become difficult to break. The printed wiring board with an electromagnetic wave shielding film can be thinned as the thickness (except a mold release film) of the electromagnetic wave shielding film 1 is below the upper limit of the said range.
(电磁波屏蔽膜的制造方法)(Manufacturing method of electromagnetic wave shielding film)
本实用新型的电磁波屏蔽膜例如可通过具有下面的工序(a)~(c)的方法(α)来制造。The electromagnetic wave shielding film of this invention can be manufactured by the method (α) which has the following process (a)-(c), for example.
工序(a):在第一脱模膜的单面形成绝缘树脂层的工序。Step (a): a step of forming an insulating resin layer on one surface of the first release film.
工序(b):在工序(a)之后,在绝缘树脂层的表面形成导电层的工序。Step (b): After step (a), a step of forming a conductive layer on the surface of the insulating resin layer.
工序(c):在工序(b)之后,在导电层的表面贴附第二脱模膜的工序。Process (c): The process of affixing a 2nd release film to the surface of a conductive layer after process (b).
另外,本实用新型的电磁波屏蔽膜例如可通过具有下面的工序(a’)、(b’1)、(b’2)、(c’)的方法(β)来制造。Moreover, the electromagnetic wave shielding film of this invention can be manufactured by the method (β) which has following process (a'), (b'1), (b'2), (c'), for example.
工序(a’):在第一脱模膜的单面形成绝缘树脂层的工序。Step (a'): a step of forming an insulating resin layer on one surface of the first release film.
工序(b’1):通过在绝缘树脂层的表面形成金属薄膜层而得到依次具有第一脱模膜、绝缘树脂层和金属薄膜层的第一层叠体的工序。Step (b'1): A step of obtaining a first laminate having a first release film, an insulating resin layer, and a metal thin film layer in this order by forming a metal thin film layer on the surface of the insulating resin layer.
工序(b’2):通过在第二脱模膜的单面形成导电性粘合剂层而得到依次具有第二脱模膜和导电性粘合剂层的第二层叠体的工序。Step (b'2): A step of obtaining a second laminate having a second release film and a conductive adhesive layer in this order by forming a conductive adhesive layer on one side of the second release film.
工序(c’):以使金属薄膜层与导电性粘合剂层接触的方式将第一层叠体与第二层叠体相贴合的工序。Step (c'): a step of bonding the first laminate and the second laminate so that the metal thin film layer and the conductive adhesive layer are in contact with each other.
下面,参照图3说明通过方法(α)制造图1所示的电磁波屏蔽膜1的方法。Next, a method of manufacturing the electromagnetic wave shielding film 1 shown in FIG. 1 by the method (α) will be described with reference to FIG. 3 .
工序(a):Process (a):
如图3所示,在第一脱模膜30的单面形成绝缘树脂层10。As shown in FIG. 3 , the insulating resin layer 10 is formed on one surface of the first release film 30 .
作为绝缘树脂层10的形成方法,从回流焊等时的耐热性的角度出发,优选涂布包含热固化性树脂和固化剂的涂料并使其半固化或固化的方法。As a method of forming the insulating resin layer 10 , a method of applying a coating containing a thermosetting resin and a curing agent and semi-curing or curing it is preferable from the viewpoint of heat resistance during reflow soldering or the like.
包含热固化性树脂和固化剂的涂料也可以根据需要而包含溶剂、其它成分(阻燃剂等)。The paint containing a thermosetting resin and a curing agent may also contain a solvent and other components (flame retardant, etc.) as necessary.
绝缘树脂层10的储能模量的控制可通过选择热固化性树脂、固化剂等的种类、组成、调整使热固化性树脂半固化或固化时的温度、时间等固化条件、添加作为不具有热固化性的成分的热可塑性弹性体等热可塑性树脂等来进行。The storage modulus of the insulating resin layer 10 can be controlled by selecting the type and composition of the thermosetting resin, curing agent, etc., adjusting the curing conditions such as temperature and time when the thermosetting resin is semi-cured or solidified, adding as Thermoplastic resins such as thermoplastic elastomers with thermosetting components are used.
工序(b):Process (b):
如图3所示,在绝缘树脂层10的表面形成金属薄膜层22(工序(b1)),在金属薄膜层22的表面形成各向异性导电性粘合剂层24(工序(b2))。As shown in FIG. 3 , the metal thin film layer 22 is formed on the surface of the insulating resin layer 10 (step (b1)), and the anisotropic conductive adhesive layer 24 is formed on the surface of the metal thin film layer 22 (step (b2)).
作为金属薄膜层22的形成方法,可举出通过物理蒸镀、CVD形成蒸镀膜的方法、通过电镀形成电镀膜的方法、贴附金属箔的方法等。从能形成面方向的导电性优异的金属薄膜层22的角度出发,优选通过物理蒸镀、CVD形成蒸镀膜的方法、或者通过电镀形成电镀膜的方法,从能使金属薄膜层22的厚度较薄、且即使厚度薄也能形成面方向的导电性优异的金属薄膜层22、并能用干法工艺简便地形成金属薄膜层22的角度出发,更优选通过物理蒸镀、CVD形成蒸镀膜的方法,进一步优选通过物理蒸镀形成蒸镀膜的方法。The method of forming the metal thin film layer 22 includes a method of forming a deposited film by physical vapor deposition or CVD, a method of forming a plated film by electroplating, and a method of attaching a metal foil. From the viewpoint of being able to form the metal thin film layer 22 with excellent electrical conductivity in the plane direction, the method of forming an evaporated film by physical vapor deposition, CVD, or the method of forming an electroplated film by electroplating is preferred, and the thickness of the metal thin film layer 22 can be made relatively It is thin, and can form a metal thin film layer 22 with excellent electrical conductivity in the plane direction even if the thickness is thin, and can form the metal thin film layer 22 simply by a dry process, and it is more preferable to form a vapor-deposited film by physical vapor deposition or CVD. method, more preferably a method of forming a deposited film by physical vapor deposition.
作为各向异性导电性粘合剂层24的形成方法,可举出对金属薄膜层22的表面涂布热固化性导电性粘合剂组合物的方法。As a method of forming the anisotropic conductive adhesive layer 24, a method of applying a thermosetting conductive adhesive composition to the surface of the metal thin film layer 22 is mentioned.
作为热固化性导电性粘合剂组合物,使用包含热固化性粘合剂24a和导电性粒子24b的物质。As a thermosetting conductive adhesive composition, what contains thermosetting adhesive 24a and electroconductive particle 24b is used.
能与绝缘树脂层10的储能模量的控制同样地进行各向异性导电性粘合剂层24的储能模量的控制。The storage modulus of the anisotropic conductive adhesive layer 24 can be controlled similarly to the storage modulus of the insulating resin layer 10 .
工序(c):Process (c):
如图3所示,在各向异性导电性粘合剂层24的表面贴附第二脱模膜40,得到电磁波屏蔽膜1。As shown in FIG. 3, the 2nd release film 40 is stuck on the surface of the anisotropic conductive adhesive layer 24, and the electromagnetic wave shielding film 1 is obtained.
(作用效果)(Effect)
关于以上说明的电磁波屏蔽膜1,由于金属薄膜层22的厚度为150nm以上,因此金属薄膜层22具有适度的硬度,能减少热压时金属薄膜层22中的压力损失。其结果,导电性粘合剂层与印刷配线板的印刷电路被充分地粘结,导电性粘合剂层通过绝缘膜的贯通孔而可靠地电连接于印刷配线板的印刷电路。另外,由于金属薄膜层22的厚度为400nm以下,因此电磁波屏蔽膜1的柔性好。其结果,电磁波屏蔽膜1易于沉入绝缘膜的贯通孔内,导电性粘合剂层通过绝缘膜的贯通孔而可靠地电连接于印刷配线板的印刷电路。Regarding the electromagnetic wave shielding film 1 described above, since the metal thin film layer 22 has a thickness of 150 nm or more, the metal thin film layer 22 has moderate hardness and can reduce pressure loss in the metal thin film layer 22 during hot pressing. As a result, the conductive adhesive layer and the printed circuit of the printed wiring board are sufficiently bonded, and the conductive adhesive layer is reliably electrically connected to the printed circuit of the printed wiring board through the through-hole of the insulating film. In addition, since the thickness of the metal thin film layer 22 is 400 nm or less, the flexibility of the electromagnetic wave shielding film 1 is good. As a result, the electromagnetic shielding film 1 sinks easily into the through-holes of the insulating film, and the conductive adhesive layer is reliably electrically connected to the printed circuit of the printed wiring board through the through-holes of the insulating film.
(其它实施方式)(Other implementations)
本实用新型的电磁波屏蔽膜是依次具有第一脱模膜、绝缘树脂层、金属薄膜层和导电性粘合剂层的电磁波屏蔽膜,金属薄膜层的厚度为150nm以上400nm以下即可,不限于附图例示的实施方式。The electromagnetic wave shielding film of the present utility model is an electromagnetic wave shielding film having a first release film, an insulating resin layer, a metal thin film layer and a conductive adhesive layer in sequence, and the thickness of the metal thin film layer can be more than 150nm and less than 400nm, and is not limited to The embodiment illustrated in the accompanying drawings.
例如,绝缘树脂层也可以是2层以上。For example, there may be two or more insulating resin layers.
在导电性粘合剂层的表面的粘性小的情况下,省略第二脱模膜40也没关系。When the tackiness of the surface of the conductive adhesive layer is small, the second release film 40 may be omitted.
脱模膜在仅以脱模膜主体就有足够的脱模性的情况下,也可以不具有脱模剂层。When the release film has sufficient releasability only by the release film main body, it does not need to have a release agent layer.
脱模膜也可以具有粘着剂层以替代脱模剂层。The release film may have an adhesive layer instead of the release agent layer.
<带电磁波屏蔽膜的印刷配线板><Printed wiring boards with electromagnetic wave shielding film>
图4是表示本实用新型的带电磁波屏蔽膜的印刷配线板的一实施方式的截面图。Fig. 4 is a cross-sectional view showing an embodiment of a printed wiring board with an electromagnetic shielding film of the present invention.
带电磁波屏蔽膜的柔性印刷配线板2包括柔性印刷配线板50、绝缘膜60和第一实施方式的电磁波屏蔽膜1。The flexible printed wiring board 2 with an electromagnetic wave shielding film includes the flexible printed wiring board 50, the insulating film 60, and the electromagnetic wave shielding film 1 of 1st Embodiment.
柔性印刷配线板50在基底膜52的至少单面设置有印刷电路54。In the flexible printed wiring board 50 , a printed circuit 54 is provided on at least one surface of a base film 52 .
绝缘膜60设置于柔性印刷配线板50的设置有印刷电路54一侧的表面。The insulating film 60 is provided on the surface of the flexible printed wiring board 50 on the side where the printed circuit 54 is provided.
电磁波屏蔽膜1的各向异性导电性粘合剂层24粘结于绝缘膜60的表面且被固化。另外,各向异性导电性粘合剂层24通过形成于绝缘膜60的贯通孔(省略图示)而电连接于印刷电路54。The anisotropic conductive adhesive layer 24 of the electromagnetic wave shielding film 1 is bonded to the surface of the insulating film 60 and cured. In addition, the anisotropic conductive adhesive layer 24 is electrically connected to the printed circuit 54 through a through-hole (not shown) formed in the insulating film 60 .
在带电磁波屏蔽膜的柔性印刷配线板2中,第二脱模膜40已从各向异性导电性粘合剂层24剥离。In the flexible printed wiring board 2 with an electromagnetic wave shielding film, the 2nd release film 40 is peeled from the anisotropic conductive adhesive layer 24.
当在带电磁波屏蔽膜的柔性印刷配线板2中不需要第一脱模膜30时,将第一脱模膜30从绝缘树脂层10剥离。When the first release film 30 is unnecessary in the flexible printed wiring board 2 with an electromagnetic wave shielding film, the first release film 30 is peeled from the insulating resin layer 10 .
在除有贯通孔的部分以外的印刷电路54(信号电路、接地电路、接地层等)的附近,电磁波屏蔽膜1的金属薄膜层22隔着绝缘膜60和各向异性导电性粘合剂层24而分开并相对地配置。In the vicinity of the printed circuit 54 (signal circuit, ground circuit, ground layer, etc.) 24 and separate and relatively configured.
除有贯通孔的部分以外的印刷电路54和金属薄膜层22的间隔距离与绝缘膜60的厚度和各向异性导电性粘合剂层24的厚度的总和大致相等。间隔距离优选是30μm以上200μm以下,更优选是60μm以上200μm以下。当间隔距离小于30μm时,信号电路的阻抗变低,因此为了具有100Ω等的特性阻抗,必须缩小信号电路的线宽,线宽的不均导致特性阻抗的不均,阻抗的不平衡所致的反射共振噪声易于叠加在电信号上。在间隔距离大于200μm时,带电磁波屏蔽膜的柔性印刷配线板2变厚,柔性不足。The distance between the printed circuit 54 and the metal thin film layer 22 is substantially equal to the sum of the thickness of the insulating film 60 and the thickness of the anisotropic conductive adhesive layer 24 excluding the portion having the through hole. The separation distance is preferably not less than 30 μm and not more than 200 μm, more preferably not less than 60 μm and not more than 200 μm. When the spacing distance is less than 30μm, the impedance of the signal circuit becomes low. Therefore, in order to have a characteristic impedance of 100Ω or the like, the line width of the signal circuit must be reduced. The unevenness of the line width leads to the unevenness of the characteristic impedance and the imbalance of the impedance. Reflection resonance noise tends to be superimposed on electrical signals. When the separation distance is greater than 200 μm, the flexible printed wiring board 2 with an electromagnetic wave shielding film becomes thick and has insufficient flexibility.
(柔性印刷配线板)(Flexible Printed Wiring Board)
柔性印刷配线板50是通过公知的蚀刻法将覆铜层压板的铜箔加工为希望的图案而形成为印刷电路(电源电路、接地电路、接地层等)的配线板。The flexible printed wiring board 50 is a wiring board in which a printed circuit (power circuit, ground circuit, ground layer, etc.) is formed by processing the copper foil of the copper-clad laminate into a desired pattern by a known etching method.
作为覆铜层压板,可举出经由粘合剂层(省略图示)将铜箔贴附于基底膜52的单面或双面而成的层压板、在铜箔的表面浇铸形成基底膜52的树脂溶液等而成的层压板等。Examples of copper-clad laminates include laminates in which copper foil is attached to one or both sides of the base film 52 via an adhesive layer (not shown), and the base film 52 is formed by casting on the surface of the copper foil. Laminates made of resin solutions, etc.
作为粘合剂层的材料,可举出环氧树脂、聚酯、聚酰亚胺、聚酰胺酰亚胺、聚酰胺、酚醛树脂、聚氨酯、丙烯酸树脂、三聚氰胺树脂等。Examples of the material of the adhesive layer include epoxy resin, polyester, polyimide, polyamideimide, polyamide, phenolic resin, polyurethane, acrylic resin, melamine resin and the like.
优选粘合剂层的厚度为0.5μm以上30μm以下。The thickness of the pressure-sensitive adhesive layer is preferably not less than 0.5 μm and not more than 30 μm.
(基底膜)(basement membrane)
作为基底膜52,优选具有耐热性的膜,更优选聚酰亚胺膜、液晶聚合物膜,进一步优选聚酰亚胺膜。The base film 52 is preferably a heat-resistant film, more preferably a polyimide film or a liquid crystal polymer film, and still more preferably a polyimide film.
基底膜52的表面电阻从电绝缘性的角度出发优选是1×106Ω以上。基底膜52的表面电阻从实际应用上的角度出发优选是1×1019Ω以下。The surface resistance of the base film 52 is preferably 1×10 6 Ω or more from the viewpoint of electrical insulation. The surface resistance of the base film 52 is preferably 1×10 19 Ω or less from a practical point of view.
基底膜52的厚度优选是5μm以上200μm以下,从弯曲性的角度出发,更优选是6μm以上25μm以下,进一步优选是10μm以上25μm以下。The thickness of the base film 52 is preferably not less than 5 μm and not more than 200 μm, more preferably not less than 6 μm and not more than 25 μm, and still more preferably not less than 10 μm and not more than 25 μm in terms of flexibility.
(印刷电路)(printed circuit)
作为构成印刷电路54(信号电路、接地电路、接地层等)的铜箔,可举出轧制铜箔、电解铜箔等,从弯曲性的角度出发,优选轧制铜箔。Examples of the copper foil constituting the printed circuit 54 (signal circuit, ground circuit, ground layer, etc.) include rolled copper foil, electrolytic copper foil, and the like, and rolled copper foil is preferable from the viewpoint of flexibility.
铜箔的厚度优选是1μm以上50μm以下,更优选是18μm以上35μm以下。The thickness of the copper foil is preferably not less than 1 μm and not more than 50 μm, more preferably not less than 18 μm and not more than 35 μm.
印刷电路54的长度方向的端部(端子)因为要焊接连接、连接器连接、搭载部件等而不被绝缘膜60、电磁波屏蔽膜1覆盖。Ends (terminals) in the longitudinal direction of the printed circuit 54 are not covered with the insulating film 60 or the electromagnetic wave shielding film 1 because of solder connection, connector connection, component mounting, and the like.
(绝缘膜)(insulating film)
绝缘膜60是在基材膜(省略图示)的单面通过涂布粘合剂、贴附粘合剂片等而形成有粘合剂层(省略图示)的膜。The insulating film 60 is a film in which an adhesive layer (not shown) is formed on one surface of a base film (not shown) by applying an adhesive, attaching an adhesive sheet, or the like.
基材膜的表面电阻从电绝缘性的角度出发优选是1×106Ω以上。基材膜的表面电阻从实际应用上的角度出发优选是1×1019Ω以下。The surface resistance of the base film is preferably 1×10 6 Ω or more from the viewpoint of electrical insulation. The surface resistance of the base film is preferably 1×10 19 Ω or less from a practical point of view.
作为基材膜,优选具有耐热性的膜,更优选聚酰亚胺膜、液晶聚合物膜,进一步优选聚酰亚胺膜。The base film is preferably a heat-resistant film, more preferably a polyimide film or a liquid crystal polymer film, and even more preferably a polyimide film.
基材膜的厚度优选是1μm以上100μm以下,从柔性的角度出发,更优选是3μm以上25μm以下。The thickness of the base film is preferably not less than 1 μm and not more than 100 μm, and more preferably not less than 3 μm and not more than 25 μm from the viewpoint of flexibility.
作为粘合剂层的材料,可举出环氧树脂、聚酯、聚酰亚胺、聚酰胺酰亚胺、聚酰胺、酚醛树脂、聚氨酯、丙烯酸树脂、三聚氰胺树脂、聚苯乙烯、聚烯烃等。环氧树脂也可以包含用于赋予柔性的橡胶成分(羧基改性丁腈橡胶等)。Examples of materials for the adhesive layer include epoxy resin, polyester, polyimide, polyamideimide, polyamide, phenolic resin, polyurethane, acrylic resin, melamine resin, polystyrene, polyolefin, etc. . The epoxy resin may also contain a rubber component (carboxy-modified nitrile rubber, etc.) for imparting flexibility.
粘合剂层的厚度优选是1μm以上100μm以下,更优选是1.5μm以上60μm以下。The thickness of the adhesive layer is preferably not less than 1 μm and not more than 100 μm, more preferably not less than 1.5 μm and not more than 60 μm.
贯通孔的开口部的形状没有特别限定。作为贯通孔62的开口部的形状,例如可举出圆形、椭圆形、四边形等。The shape of the opening of the through hole is not particularly limited. Examples of the shape of the opening of the through hole 62 include a circle, an ellipse, a rectangle, and the like.
(带电磁波屏蔽膜的印刷配线板的制造方法)(Manufacturing method of printed wiring board with electromagnetic wave shielding film)
本实用新型的带电磁波屏蔽膜的印刷配线板例如可通过具有下面的工序(d)~(g)的方法来制造。The printed wiring board with the electromagnetic wave shielding film of this invention can be manufactured by the method which has the following process (d)-(g), for example.
工序(d):在印刷配线板的设置有印刷电路一侧的表面设置在与印刷电路对应的位置形成有贯通孔的绝缘膜而得到带绝缘膜的印刷配线板的工序。Process (d): The process of providing the insulating film in which the through-hole was formed in the position corresponding to a printed circuit on the surface of the printed wiring board provided with a printed circuit, and obtaining the printed wiring board with an insulating film.
工序(e):在工序(d)之后,将带绝缘膜的印刷配线板与剥离了第二脱模膜的本实用新型的电磁波屏蔽膜以导电性粘合剂层与绝缘膜的表面接触的方式重叠,对它们进行热压,从而将导电性粘合剂层粘结到绝缘膜的表面且将导电性粘合剂层通过贯通孔电连接于印刷电路,得到带电磁波屏蔽膜的印刷配线板的工序。Step (e): After step (d), the printed wiring board with insulating film and the electromagnetic wave shielding film of the present invention from which the second release film has been peeled off are brought into contact with the surface of the insulating film through a conductive adhesive layer. They are overlapped in a way, and they are hot-pressed, so that the conductive adhesive layer is bonded to the surface of the insulating film and the conductive adhesive layer is electrically connected to the printed circuit through the through hole, and a printed distribution with an electromagnetic wave shielding film is obtained. The process of line board.
工序(f):在工序(e)之后当不需要第一脱模膜时将第一脱模膜剥离的工序。Step (f): a step of peeling the first release film when the first release film is unnecessary after the step (e).
工序(g):根据需要在工序(e)与工序(f)之间或者工序(f)之后使各向异性导电性粘合剂层完全固化的工序。Step (g): A step of completely curing the anisotropic conductive adhesive layer between the step (e) and the step (f) or after the step (f) as necessary.
下面,参照图5说明制造带电磁波屏蔽膜的柔性印刷配线板的方法。Next, a method of manufacturing a flexible printed wiring board with an electromagnetic shielding film will be described with reference to FIG. 5 .
(工序(d))(Process (d))
如图5所示,将在与印刷电路54对应的位置形成有贯通孔62的绝缘膜60重叠于柔性印刷配线板50,在柔性印刷配线板50的表面粘结绝缘膜60的粘合剂层(省略图示),使粘合剂层固化,从而得到带绝缘膜的柔性印刷配线板3。也可以在柔性印刷配线板50的表面临时粘结绝缘膜60的粘合剂层并通过工序(g)使粘合剂层完全固化。As shown in FIG. 5 , an insulating film 60 having a through-hole 62 formed at a position corresponding to the printed circuit 54 is superimposed on the flexible printed wiring board 50 , and the insulating film 60 is bonded to the surface of the flexible printed wiring board 50 . An agent layer (not shown in the figure) is formed, and the adhesive layer is cured to obtain a flexible printed wiring board 3 with an insulating film. The adhesive layer of the insulating film 60 may be bonded temporarily to the surface of the flexible printed wiring board 50, and the adhesive layer may be fully hardened by process (g).
粘合剂层的粘结和固化例如是通过使用压力机(省略图示)等的热压来进行的。Adhesion and curing of the adhesive layer are performed, for example, by hot pressing using a press (not shown) or the like.
(工序(e))(Process (e))
如图5所示,将剥离了第二脱模膜40的电磁波屏蔽膜1重叠于带绝缘膜的柔性印刷配线板3,通过热压,将各向异性导电性粘合剂层24粘结于绝缘膜60的表面,并使各向异性导电性粘合剂层24通过贯通孔62电连接于印刷电路54,得到带电磁波屏蔽膜的柔性印刷配线板2。As shown in FIG. 5 , the electromagnetic wave shielding film 1 from which the second release film 40 has been peeled off is superimposed on the flexible printed wiring board 3 with an insulating film, and the anisotropic conductive adhesive layer 24 is bonded by hot pressing. On the surface of the insulating film 60, the anisotropic conductive adhesive layer 24 is electrically connected to the printed circuit 54 through the through hole 62, and the flexible printed wiring board 2 with an electromagnetic wave shielding film is obtained.
通过热压,电磁波屏蔽膜1的一部分陷入贯通孔62中,电磁波屏蔽膜1中的绝缘树脂层10、金属薄膜层22和各向异性导电性粘合剂层24向贯通孔62侧凹陷。由此,绝缘树脂层10中的位于贯通孔62上方的部位向贯通孔62侧凹陷,在绝缘树脂层10的表面可观察到凹坑。当存在这样的凹坑时,绝缘树脂层10的表面积增加,从而能有助于在印刷配线板50产生的热的散热。Part of the electromagnetic wave shielding film 1 sinks into the through hole 62 by hot pressing, and the insulating resin layer 10 , metal thin film layer 22 and anisotropic conductive adhesive layer 24 in the electromagnetic wave shielding film 1 are dented toward the through hole 62 side. Accordingly, the portion of the insulating resin layer 10 located above the through hole 62 is recessed toward the through hole 62 side, and pits are observed on the surface of the insulating resin layer 10 . When such dimples exist, the surface area of the insulating resin layer 10 increases, thereby contributing to heat dissipation of heat generated in the printed wiring board 50 .
各向异性导电性粘合剂层24的粘结和固化例如是通过使用压力机(省略图示)等的热压来进行的。Adhesion and curing of the anisotropic conductive adhesive layer 24 are performed, for example, by heat press using a press (not shown in the figure) or the like.
热压时间为20秒以上60分钟以下,进一步优选为30秒以上30分钟以下。若热压时间在上述范围的下限值以上,则各向异性导电性粘合剂层24粘结于绝缘膜60的表面。若热压时间在上述范围的上限值以下,则能缩短带电磁波屏蔽膜的柔性印刷配线板2的制造时间。The hot pressing time is not less than 20 seconds and not more than 60 minutes, more preferably not less than 30 seconds and not more than 30 minutes. The anisotropic conductive adhesive layer 24 adheres to the surface of the insulating film 60 as the hot pressing time is more than the lower limit of the said range. The manufacturing time of the flexible printed wiring board 2 with an electromagnetic wave shielding film can be shortened as heat press time is below the upper limit of the said range.
热压的温度(压力机的热压盘的温度)优选是140℃以上190℃以下,更优选是150℃以上175℃以下。若热压的温度为上述范围的下限值以上,则各向异性导电性粘合剂层24粘结于绝缘膜60的表面。并且,能缩短热压的时间。若热压的温度为上述范围的上限值以下,则能够抑制电磁波屏蔽膜1、柔性印刷配线板50等的劣化等。The temperature of hot pressing (the temperature of the hot plate of the press) is preferably 140°C to 190°C, more preferably 150°C to 175°C. When the temperature of hot pressing is more than the lower limit of the said range, the anisotropic conductive adhesive layer 24 will adhere to the surface of the insulating film 60. In addition, the time for hot pressing can be shortened. The deterioration etc. of the electromagnetic wave shielding film 1, the flexible printed wiring board 50, etc. can be suppressed as the temperature of hot-pressing is below the upper limit of the said range.
热压的压力优选是0.5MPa以上20MPa以下,更优选是1MPa以上16MPa以下。若热压的压力为上述范围的下限值以上,则各向异性导电性粘合剂层24粘结于绝缘膜60的表面。并且,能缩短热压的时间。若热压的压力为上述范围的上限值以下,则能抑制电磁波屏蔽膜1、柔性印刷配线板50等的破损等。The pressure of hot pressing is preferably 0.5 MPa to 20 MPa, more preferably 1 MPa to 16 MPa. The anisotropic conductive adhesive layer 24 adheres to the surface of the insulating film 60 as the pressure of hot pressing is more than the lower limit of the said range. In addition, the time for hot pressing can be shortened. The damage etc. of the electromagnetic wave shielding film 1, the flexible printed wiring board 50, etc. can be suppressed as the pressure of a hot press is below the upper limit of the said range.
(工序(f))(Process (f))
如图5所示,当不需要第一脱模膜时,从绝缘树脂层10将第一脱模膜30剥离。As shown in FIG. 5 , when the first release film is unnecessary, the first release film 30 is peeled from the insulating resin layer 10 .
(工序(g))(Process (g))
在工序(e)中的热压时间为20秒以上10分钟以下的短时间的情况下,优选在工序(e)与工序(f)之间或者工序(f)之后进行各向异性导电性粘合剂层24的完全固化。When the hot pressing time in the step (e) is as short as 20 seconds to 10 minutes, it is preferable to carry out the anisotropic conductive bonding between the step (e) and the step (f) or after the step (f). The complete curing of the mixture layer 24.
例如使用烤箱等加热装置进行各向异性导电性粘合剂层24的完全固化。Complete curing of the anisotropic conductive adhesive layer 24 is performed, for example, using a heating device such as an oven.
加热时间是15分钟以上120分钟以下,优选是30分钟以上60分钟以下。若加热时间在上述范围的下限值以上,则能使各向异性导电性粘合剂层24充分地固化。若加热时间在上述范围的上限值以下,则能缩短带电磁波屏蔽膜的柔性印刷配线板2的制造时间。The heating time is not less than 15 minutes and not more than 120 minutes, preferably not less than 30 minutes and not more than 60 minutes. The anisotropic conductive adhesive layer 24 can be fully hardened as heating time is more than the lower limit of the said range. The manufacturing time of the flexible printed wiring board 2 with an electromagnetic wave shielding film can be shortened as heating time is below the upper limit of the said range.
加热温度(烤箱中的气氛温度)优选是120℃以上180℃以下,更优选是120℃以上150℃以下。若加热温度为上述范围的下限值以上,则能缩短加热时间。若加热温度为上述范围的上限值以下,则能抑制电磁波屏蔽膜1、柔性印刷配线板50等的劣化等。The heating temperature (atmospheric temperature in the oven) is preferably not less than 120°C and not more than 180°C, more preferably not less than 120°C and not more than 150°C. Heating time can be shortened as heating temperature is more than the lower limit of the said range. If heating temperature is below the upper limit of the said range, deterioration, etc. of the electromagnetic wave shielding film 1, the flexible printed wiring board 50, etc. can be suppressed.
从可以不使用特殊装置的角度出发,优选以无加压来进行加热。It is preferable to heat without pressurization from the viewpoint that no special equipment can be used.
(作用效果)(Effect)
关于以上说明的带电磁波屏蔽膜的柔性印刷配线板2,由于使用了电磁波屏蔽膜1,因此电磁波屏蔽膜1的导电性粘合剂层通过设置于柔性印刷配线板50的表面的绝缘膜60的贯通孔62而可靠地电连接于柔性印刷配线板50的印刷电路54。Regarding the flexible printed wiring board 2 with the electromagnetic wave shielding film described above, since the electromagnetic wave shielding film 1 is used, the conductive adhesive layer of the electromagnetic wave shielding film 1 passes through the insulating film provided on the surface of the flexible printed wiring board 50 . The through-hole 62 of 60 is reliably electrically connected to the printed circuit 54 of the flexible printed wiring board 50 .
(其它实施方式)(Other implementations)
本实用新型的带电磁波屏蔽膜的印刷配线板只要具有印刷配线板、与印刷配线板的设置有印刷电路一侧的表面邻接的绝缘膜、以及导电层与绝缘膜邻接且导电层通过形成于绝缘膜的贯通孔而电连接于印刷电路的电磁波屏蔽膜即可,不限于附图例示的实施方式。The printed wiring board with the electromagnetic wave shielding film of the present invention only needs to include the printed wiring board, the insulating film adjacent to the surface of the printed wiring board on which the printed circuit is provided, and the conductive layer adjacent to the insulating film through which the conductive layer passes. The through-holes formed in the insulating film may be electrically connected to the electromagnetic wave shielding film of the printed circuit, and are not limited to the embodiments illustrated in the drawings.
例如,柔性印刷配线板也可以在背面侧具有接地层。另外,柔性印刷配线板也可以在双面具有印刷电路并在双面贴附有绝缘膜和电磁波屏蔽膜。For example, a flexible printed wiring board may have a ground layer on the back side. In addition, the flexible printed wiring board may have a printed circuit on both surfaces, and an insulating film and an electromagnetic wave shielding film may be attached on both surfaces.
也可以代替柔性印刷配线板而使用无柔性的刚性印刷基板。Instead of the flexible printed wiring board, a non-flexible rigid printed circuit board may be used.
也可以代替第一实施方式的电磁波屏蔽膜1而使用第二实施方式的电磁波屏蔽膜1等。The electromagnetic wave shielding film 1 etc. of 2nd Embodiment may be used instead of the electromagnetic wave shielding film 1 of 1st Embodiment.
[实施例][Example]
以下示出实施例。需要注意的是,本实用新型并不限定于实施例。Examples are shown below. It should be noted that the present utility model is not limited to the examples.
(金属薄膜层的基于纳米压痕法的硬度)(Hardness of metal thin film layer based on nanoindentation method)
金属薄膜层的基于纳米压痕法的硬度是使用超微硬度计(MTS systems公司制、Nano Indenter XP),并使用钻石制三角锥压头作为压头来进行通过上述的纳米压痕法(连续刚度测量法)的测量,根据测量结果以上述的计算方法而求出的。The hardness of the metal thin film layer based on the nanoindentation method was carried out by the above-mentioned nanoindentation method (continuous The measurement of stiffness measurement method) is obtained by the above-mentioned calculation method according to the measurement results.
(导电性粒子的10%压缩强度)(10% compressive strength of conductive particles)
导电性粒子的10%压缩强度是根据使用微压缩试验机(岛津制作所公司制、MCT-510)的测量结果,通过上述式(11)而求出的。The 10% compressive strength of electroconductive particle was calculated|required by said Formula (11) from the measurement result using the microcompression tester (Shimadzu Corporation make, MCT-510).
(储能模量)(storage modulus)
储能模量是使用动态粘弹性测量装置(Rheometric Scientific,Inc.制、RSAII)在温度:180℃、频率:1Hz、升温速度:10℃/分钟的条件下测量的。The storage modulus was measured using a dynamic viscoelasticity measuring device (manufactured by Rheometric Scientific, Inc., RSAII) under the conditions of temperature: 180° C., frequency: 1 Hz, and heating rate: 10° C./minute.
(电连接)(electrical connection)
通过后述的工序(f)对对应于形成有贯通孔62的位置的印刷电路54的地线与电磁波屏蔽膜1的金属薄膜层22之间的连接电阻进行了测量,按下述的标准进行了评价。The connection resistance between the ground wire of the printed circuit 54 corresponding to the position where the through-hole 62 is formed and the metal thin film layer 22 of the electromagnetic wave shielding film 1 was measured by the step (f) described later, and was carried out according to the following standard. commented.
◎(优):连接电阻不到0.5Ω。◎(Excellent): The connection resistance is less than 0.5Ω.
〇(良):连接电阻在0.5Ω以上但不到1Ω。〇 (good): The connection resistance is 0.5Ω or more but less than 1Ω.
×(差):连接电阻在1Ω以上。× (poor): The connection resistance is 1Ω or more.
(实施例1)(Example 1)
作为第一脱模膜30和第二脱模膜40,准备了用非硅酮系脱模剂对单面进行了脱模处理的聚对苯二甲酸乙二醇酯膜(琳得科公司(Lintec Corporation)制、T157、厚度:50μm、180℃下的储能模量:5×108Pa)。As the first release film 30 and the second release film 40, a polyethylene terephthalate film (Lintec Corporation ( Lintec Corporation), T157, thickness: 50 μm, storage modulus at 180° C.: 5×10 8 Pa).
作为涂料,准备了将双酚A型环氧树脂(三菱化学公司制、jER(注册商标)828)100质量份及固化剂(N-氨基哌嗪)15质量份、炭黑5质量份溶解到溶剂(甲基乙基酮)200质量份中而得的涂料。As a paint, 100 parts by mass of bisphenol A type epoxy resin (manufactured by Mitsubishi Chemical Corporation, jER (registered trademark) 828), 15 parts by mass of curing agent (N-aminopiperazine), and 5 parts by mass of carbon black were dissolved in A paint obtained in 200 parts by mass of a solvent (methyl ethyl ketone).
作为热固化性导电性粘合剂组合物,准备了使热固化性粘合剂24a(将环氧树脂(DIC公司制、EXA-4816)100质量份与固化剂(Ajinomoto Fine-Techno公司制、PN-23)15质量份混合而成的潜固化性环氧树脂)和导电性粒子24b(铜粒子、平均粒径:8μm、10%压缩强度:85.1MPa)40质量份溶解或分散到溶剂(甲基乙基酮)200质量份中而得的组合物。As a thermosetting conductive adhesive composition, a thermosetting adhesive 24a (100 parts by mass of epoxy resin (manufactured by DIC Corporation, EXA-4816) and a curing agent (manufactured by Ajinomoto Fine-Techno Corporation, PN-23) 15 parts by mass of latent curable epoxy resin) and 40 parts by mass of conductive particles 24b (copper particles, average particle diameter: 8 μm, 10% compressive strength: 85.1 MPa) were dissolved or dispersed in a solvent ( A composition obtained in 200 parts by mass of methyl ethyl ketone).
工序(a):Process (a):
在第一脱模膜30的脱模剂层34的表面涂布涂料,在60℃下加热2分钟,使其半固化,形成了绝缘树脂层10(厚度:10μm、180℃下的储能模量:1.9×107Pa)。The coating is applied on the surface of the release agent layer 34 of the first release film 30, heated at 60°C for 2 minutes to make it semi-cured, and the insulating resin layer 10 (thickness: 10 μm, energy storage mold at 180°C) is formed. Volume: 1.9×10 7 Pa).
工序(b1):Process (b1):
通过电子束蒸镀法将铜物理蒸镀于绝缘树脂层10的表面,形成了金属薄膜层22(蒸镀膜、厚度:300nm、表面电阻:0.07Ω、基于纳米压痕法的硬度:0.66GPa)。Copper was physically vapor-deposited on the surface of the insulating resin layer 10 by electron beam vapor deposition to form a metal thin film layer 22 (deposited film, thickness: 300nm, surface resistance: 0.07Ω, hardness by nanoindentation method: 0.66GPa) .
工序(b2):Process (b2):
使用模缝涂布头在金属薄膜层22的表面涂布热固化性导电性粘合剂组合物,并使溶剂挥发乙阶(B阶,B-stage)化,从而形成了各向异性导电性粘合剂层24(厚度:7μm、铜粒子:4.5体积%、180℃下的储能模量:2×104Pa)。A thermally curable conductive adhesive composition is coated on the surface of the metal thin film layer 22 using a slot die coating head, and the solvent is volatilized into a B-stage (B-stage) to form an anisotropic conductive adhesive composition. Adhesive layer 24 (thickness: 7 μm, copper particles: 4.5 vol%, storage modulus at 180° C.: 2×10 4 Pa).
工序(c):Process (c):
将第二脱模膜40贴附于各向异性导电性粘合剂层24的表面,得到了电磁波屏蔽膜1。The second release film 40 was attached to the surface of the anisotropic conductive adhesive layer 24 to obtain the electromagnetic wave shielding film 1 .
工序(d):Process (d):
在厚度为12μm的聚酰亚胺膜(表面电阻:1×1017Ω)(基材膜)的表面将由丁腈橡胶改性环氧树脂构成的绝缘性粘合剂组合物涂布成干燥膜厚为12μm,形成粘合剂层,得到了绝缘膜60(厚度:25μm)。在对应于印刷电路54的地线的位置形成了贯通孔62(孔径:2mm)。On the surface of a polyimide film (surface resistance: 1×10 17 Ω) (substrate film) with a thickness of 12 μm, an insulating adhesive composition composed of a nitrile rubber-modified epoxy resin is applied as a dry film The thickness was 12 μm, an adhesive layer was formed, and an insulating film 60 (thickness: 25 μm) was obtained. A through-hole 62 (aperture diameter: 2 mm) is formed at a position corresponding to the ground of the printed circuit 54 .
准备了在厚度为12μm的聚酰亚胺膜(表面电阻:1×1017Ω)(基底膜52)的表面形成有印刷电路54的柔性印刷配线板50。The flexible printed wiring board 50 in which the printed circuit 54 was formed on the surface of the 12-micrometer-thick polyimide film (surface resistance: 1× 1017Ω ) (base film 52) was prepared.
通过热压,使绝缘膜60贴附于柔性印刷配线板50,得到了带绝缘膜的柔性印刷配线板3。The insulating film 60 was attached to the flexible printed wiring board 50 by hot pressing, and the flexible printed wiring board 3 with an insulating film was obtained.
工序(e):Process (e):
将剥离了第二脱模膜40的电磁波屏蔽膜1重叠于带绝缘膜的柔性印刷配线板3,使用热压装置(折原制作所公司制、G-12)以热压盘温度:170℃、压力:2MPa热压60秒,将各向异性导电性粘合剂层24临时粘结于绝缘膜60的表面,得到了带电磁波屏蔽膜的柔性印刷配线板2。The electromagnetic wave shielding film 1 from which the second release film 40 was peeled off was superimposed on the flexible printed wiring board 3 with an insulating film, and a hot pressing plate temperature: 170° C. . Pressure: 2MPa heat press for 60 seconds, temporarily bond the anisotropic conductive adhesive layer 24 to the surface of the insulating film 60, and obtain the flexible printed wiring board 2 with the electromagnetic wave shielding film.
工序(f):Process (f):
使用高温恒温器(楠本化成公司制、HT210)在温度:160℃下对带电磁波屏蔽膜的柔性印刷配线板2加热1小时,从而使各向异性导电性粘合剂层24完全固化。从绝缘树脂层10剥离了第一脱模膜30。The flexible printed wiring board 2 with an electromagnetic shielding film was heated at 160° C. for 1 hour using a high temperature thermostat (manufactured by Kusumoto Kasei Co., Ltd., HT210) to completely cure the anisotropic conductive adhesive layer 24 . The first release film 30 was peeled off from the insulating resin layer 10 .
对对应于形成有贯通孔62的位置的印刷电路54的地线与电磁波屏蔽膜1的金属薄膜层22之间的连接电阻进行了测量。将结果示于表1。The connection resistance between the ground wire of the printed circuit 54 corresponding to the position where the through hole 62 was formed and the metal thin film layer 22 of the electromagnetic wave shielding film 1 was measured. The results are shown in Table 1.
(实施例2~5、比较例1~2)(Examples 2-5, Comparative Examples 1-2)
除了将构成金属薄膜层22的金属的种类、金属薄膜层22的厚度、导电性粒子24b的种类、导电性粒子24b的平均粒径如表1所示那样进行了变更以外,与实施例1同样地得到了电磁波屏蔽膜1。另外,除了变更了电磁波屏蔽膜1以外,与实施例1同样地得到了带电磁波屏蔽膜的柔性印刷配线板2。对对应于形成有贯通孔62的位置的印刷电路54的地线与电磁波屏蔽膜1的金属薄膜层22之间的连接电阻进行了测量。将结果示于表1。Except that the kind of metal constituting the metal thin film layer 22, the thickness of the metal thin film layer 22, the kind of the conductive particles 24b, and the average particle diameter of the conductive particles 24b were changed as shown in Table 1, it was the same as in Example 1. The electromagnetic wave shielding film 1 was thus obtained. Moreover, except having changed the electromagnetic wave shielding film 1, it carried out similarly to Example 1, and obtained the flexible printed wiring board 2 with an electromagnetic wave shielding film. The connection resistance between the ground wire of the printed circuit 54 corresponding to the position where the through hole 62 was formed and the metal thin film layer 22 of the electromagnetic wave shielding film 1 was measured. The results are shown in Table 1.
[表1][Table 1]
在金属薄膜层22的厚度在150nm以上400nm以下的范围内的实施例1~5中,印刷电路54的地线与电磁波屏蔽膜1的金属薄膜层22之间的连接电阻低,导电性粘合剂层通过绝缘膜的贯通孔而可靠地电连接于印刷配线板的印刷电路。In Examples 1 to 5 in which the thickness of the metal thin film layer 22 is in the range of 150 nm to 400 nm, the connection resistance between the ground wire of the printed circuit 54 and the metal thin film layer 22 of the electromagnetic wave shielding film 1 is low, and the conductive adhesion The agent layer is reliably electrically connected to the printed circuit of the printed wiring board through the through hole of the insulating film.
在使用银作为构成金属薄膜层22的金属和构成导电性粒子24b的金属两者的实施例5中,连接电阻稍微变高。In Example 5 which used silver as both the metal which comprises the metal thin film layer 22, and the metal which comprises electroconductive particle 24b, connection resistance became slightly high.
工业上的可利用性Industrial availability
本实用新型的电磁波屏蔽膜作为智能电话、手机、光模块、数码相机、游戏机、笔记本电脑、医疗器械等电子设备用的柔性印刷配线板中的电磁波屏蔽用部件是有用的。The electromagnetic wave shielding film of the present invention is useful as a component for electromagnetic wave shielding in flexible printed wiring boards for electronic equipment such as smart phones, mobile phones, optical modules, digital cameras, game machines, notebook computers, and medical equipment.
附图标记说明Explanation of reference signs
1 电磁波屏蔽膜1 Electromagnetic wave shielding film
2 带电磁波屏蔽膜的柔性印刷配线板2 Flexible printed wiring board with electromagnetic shielding film
3 带绝缘膜的柔性印刷配线板3 Flexible printed wiring board with insulating film
10 绝缘树脂层10 insulating resin layer
20 导电层20 conductive layer
22 金属薄膜层22 metal film layer
24 各向异性导电性粘合剂层24 Anisotropic conductive adhesive layer
24a 热固化性粘合剂24a Heat-curing adhesives
24b 导电性粒子24b Conductive particles
26 各向同性导电性粘合剂层26 isotropic conductive adhesive layer
26a 热固化性粘合剂26a Thermosetting adhesives
26b 导电性粒子26b Conductive particles
30 第一脱模膜30 first release film
32 脱模膜主体32 release film body
34 脱模剂层34 release agent layer
40 第二脱模膜40 Second release film
42 脱模膜主体42 release film body
44 脱模剂层44 release agent layer
50 柔性印刷配线板50 Flexible printed wiring board
52 基底膜52 basement membrane
54 印刷电路54 printed circuit
60 绝缘膜60 insulating film
62 贯通孔62 through hole
101 带电磁波屏蔽膜的柔性印刷配线板101 Flexible printed wiring board with electromagnetic shielding film
110 电磁波屏蔽膜110 Electromagnetic wave shielding film
112 绝缘树脂层112 insulating resin layer
114 金属薄膜层114 metal film layer
116 导电性粘合剂层116 conductive adhesive layer
118 第一脱模膜118 The first release film
130 柔性印刷配线板130 flexible printed wiring board
132 基底膜132 Basement membrane
134 印刷电路134 printed circuits
140 绝缘膜140 insulating film
142 贯通孔。142 Through hole.
Claims (6)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| JP2016-114719 | 2016-06-08 | ||
| JP2016114719A JP6694763B2 (en) | 2016-06-08 | 2016-06-08 | Electromagnetic wave shield film and printed wiring board with electromagnetic wave shield film |
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| CN201710421861.0A Active CN107484324B (en) | 2016-06-08 | 2017-06-06 | Electromagnetic wave shielding film and printed wiring board with electromagnetic wave shielding film |
| CN201720653312.1U Active CN207124801U (en) | 2016-06-08 | 2017-06-06 | Electromagnetic shielding film and the printing distributing board with electromagnetic shielding film |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12232306B2 (en) | 2021-03-29 | 2025-02-18 | Tatsuta Electric Wire & Cable Co., Ltd. | Electromagnetic wave shielding film and shielded printed wiring board |
| TWI910333B (en) | 2021-03-29 | 2026-01-01 | 日商拓自達電線股份有限公司 | Electromagnetic wave shielding film and shielded printed circuit board |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6407395B1 (en) * | 2017-12-01 | 2018-10-17 | タツタ電線株式会社 | Electromagnetic shielding film |
| JP6714631B2 (en) * | 2018-03-15 | 2020-06-24 | タツタ電線株式会社 | Electromagnetic wave shield film and shield printed wiring board |
| JP6504302B1 (en) * | 2018-06-12 | 2019-04-24 | 東洋インキScホールディングス株式会社 | Electromagnetic wave shield sheet, component mounting board, and electronic device |
| JP2020007464A (en) * | 2018-07-09 | 2020-01-16 | 信越ポリマー株式会社 | Electromagnetic wave shielding film, method of manufacturing the same, printed wiring board with electromagnetic wave shielding film, and method of manufacturing the same |
| JP2020024977A (en) * | 2018-08-06 | 2020-02-13 | 信越ポリマー株式会社 | Electromagnetic wave shielding film, method of manufacturing the same, printed wiring board with electromagnetic wave shielding film, and method of manufacturing the same |
| JP7424745B2 (en) * | 2018-10-11 | 2024-01-30 | 信越ポリマー株式会社 | Electromagnetic shielding film, printed wiring board with electromagnetic shielding film, and manufacturing method thereof |
| JP2020107775A (en) * | 2018-12-28 | 2020-07-09 | 信越ポリマー株式会社 | Method for manufacturing printed wiring board with electromagnetic wave shielding film |
| JP7099365B2 (en) * | 2019-03-01 | 2022-07-12 | 東洋インキScホールディングス株式会社 | Electromagnetic wave shield sheet, component mounting board, and electronic equipment |
| CN111312078B (en) * | 2020-03-05 | 2022-03-08 | 武汉华星光电半导体显示技术有限公司 | Display panel and side bonding method thereof |
| JP7697530B2 (en) * | 2022-04-22 | 2025-06-24 | artience株式会社 | Conductive sheet, wiring board and electronic device |
| CN121060009A (en) * | 2025-03-11 | 2025-12-05 | 迈胜医疗设备有限公司 | Linear potentiometer, beam distribution system and related equipment |
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| JP4340454B2 (en) * | 2003-03-06 | 2009-10-07 | 住友電工プリントサーキット株式会社 | Shield film and manufacturing method thereof |
| EP2187720A4 (en) * | 2008-03-10 | 2011-11-23 | Ibiden Co Ltd | Flexible wiring board, and its manufacturing method |
| JP5712095B2 (en) * | 2011-09-16 | 2015-05-07 | 藤森工業株式会社 | Electromagnetic wave shielding material for FPC |
| JP6030924B2 (en) * | 2012-11-12 | 2016-11-24 | デクセリアルズ株式会社 | Conductive adhesive, solar cell module, and method for manufacturing solar cell module |
| JP6467701B2 (en) * | 2014-10-28 | 2019-02-13 | 信越ポリマー株式会社 | Electromagnetic wave shielding film, flexible printed wiring board with electromagnetic wave shielding film, and manufacturing method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12232306B2 (en) | 2021-03-29 | 2025-02-18 | Tatsuta Electric Wire & Cable Co., Ltd. | Electromagnetic wave shielding film and shielded printed wiring board |
| TWI910333B (en) | 2021-03-29 | 2026-01-01 | 日商拓自達電線股份有限公司 | Electromagnetic wave shielding film and shielded printed circuit board |
Also Published As
| Publication number | Publication date |
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| JP6694763B2 (en) | 2020-05-20 |
| CN107484324A (en) | 2017-12-15 |
| JP2017220592A (en) | 2017-12-14 |
| CN107484324B (en) | 2021-08-17 |
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Effective date of registration: 20250624 Address after: Ri Ben Patentee after: TATSUTA ELECTRIC WIRE & CABLE Co.,Ltd. Country or region after: Japan Address before: Tokyo, Japan Patentee before: Shin-Etsu Polymer Co.,Ltd. Country or region before: Japan |