CN207007346U - Long-wave light-guide infrared detector Nonuniformity Correction circuit - Google Patents
Long-wave light-guide infrared detector Nonuniformity Correction circuit Download PDFInfo
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技术领域technical field
本专利涉及红外探测器读出电路领域,尤其是涉及线列和面阵长波光导红外探测器的非均匀性校正电路。This patent relates to the field of infrared detector readout circuits, in particular to non-uniformity correction circuits for linear and area array long-wave photoconductive infrared detectors.
背景技术Background technique
红外探测器在航天探测方面起着不可替代的作用,长波红外探测器(波长在10微米以上)在低温目标探测、超视距探测和抗干扰目标识别等领域具有极其重要的用途,因此一直是红外探测器技术发展的一个重要方向。对于HgCdTe长波红外光导型探测器,怎么解决不同探测元之间的读出信号非均匀性是电路设计的关键难题和研究重点。Infrared detectors play an irreplaceable role in aerospace detection. Long-wave infrared detectors (wavelength above 10 microns) have extremely important uses in the fields of low-temperature target detection, over-the-horizon detection, and anti-jamming target recognition. Therefore, they have always been An important direction for the development of infrared detector technology. For HgCdTe long-wave infrared photoconductive detectors, how to solve the non-uniformity of readout signals between different detector elements is a key problem in circuit design and a research focus.
在HgCdTe长波光导型探测器制作过程中,由于工艺偏差和材料组分的缺陷,光导红外探测器存在一定的非均匀性。这种工艺带来的非均匀性不但严重影响读出电路的动态范围,而且还会导致输出表现出非均匀性,尤其是采用列级读出通道的探测器芯片会出现明显的列条纹,这种非均匀性产生的空间噪声通常远远大于时间噪声。光导型红外探测器电阻低且非均匀性大,影响光导探测器非均匀性的自身因素主要有电阻、电阻温度系数、热导、红外吸收率、热容等,其中电阻的非均匀性对输出带来的影响最大。目前,波长在10微米以上的红外探测器仍以HgCdTe光导型探测器为主,电阻在40Ω左右,在目前工艺基础上,其电阻一般存在10%左右的非均匀性。虽然一般的非均匀性可以由外部电路校正,但是会减小探测器的动态范围,而且针对性不强,效果一般,具有一定的局限性。目前,国内外几乎没有针对长波光导型探测器非均匀性的片上校正电路。In the manufacturing process of HgCdTe long-wavelength photoconductive detectors, due to process deviation and material component defects, photoconductive infrared detectors have certain non-uniformity. The non-uniformity brought by this process not only seriously affects the dynamic range of the readout circuit, but also causes the output to show non-uniformity, especially the detector chips that use the column-level readout channel will have obvious column stripes, which is The spatial noise generated by this non-uniformity is usually much larger than the temporal noise. The photoconductive infrared detector has low resistance and large non-uniformity. The main factors that affect the non-uniformity of the photoconductive detector are resistance, temperature coefficient of resistance, thermal conductivity, infrared absorptivity, heat capacity, etc. Among them, the non-uniformity of resistance has a great influence on the output have the greatest impact. At present, the infrared detectors with a wavelength of more than 10 microns are still dominated by HgCdTe photoconductive detectors, and the resistance is about 40Ω. Based on the current technology, the resistance generally has a non-uniformity of about 10%. Although the general non-uniformity can be corrected by an external circuit, it will reduce the dynamic range of the detector, and the pertinence is not strong, the effect is general, and it has certain limitations. At present, there are almost no on-chip correction circuits for the non-uniformity of long-wavelength photoconductive detectors at home and abroad.
发明内容Contents of the invention
本专利的目的在于提供一种长波光导型红外探测器非均匀性片上校正电路,解决长波光导红外探测器电阻不均匀带来的电路输出摆幅超出动态范围的问题,从而提高长波光导红外探测器系统的性能水平。The purpose of this patent is to provide a long-wave photoconductive infrared detector non-uniformity on-chip correction circuit to solve the problem that the circuit output swing exceeds the dynamic range caused by the uneven resistance of the long-wave photoconductive infrared detector, thereby improving the long-wave photoconductive infrared detector. The performance level of the system.
本专利设计的一种数模混合自适应校正的片上电路,适合校正电阻值小于200Ω的光导型探测器的非均匀性。其电路的单元结构如图1所示,包括比较器,计数器,电阻结构组件和两个偏置模块。所述的两个偏置模块,1号偏置模块由电压源V1与电阻Ra串联构成,2号偏置模块由电压源V2与电阻Rb串联构成,Ra和Rb取值在0.5~5KΩ,V1和V2在1V~5V之间,电路可根据不同的探测器电阻和电阻结构组件芯片工艺误差对V2进行调节,以调节电阻结构组件的分压范围,扩大电路的适用范围。该电路通过ADC和DAC的方法,在信号读取之前为每个探测元匹配相等参考电压作为差分放大器参考端的输入电压,参考电压由计数器控制的电阻结构组件的分压提供,计数器计数与否由比较器输出信号控制,比较器的一端接电阻结构组件的分压,一端接探测器的分压。A digital-analog hybrid adaptive correction on-chip circuit designed in this patent is suitable for correcting the non-uniformity of photoconductive detectors with a resistance value less than 200Ω. The unit structure of its circuit is shown in Figure 1, including a comparator, a counter, a resistance structure component and two bias modules. In the two bias modules, the No. 1 bias module is composed of a voltage source V 1 connected in series with a resistor R a , and the No. 2 bias module is composed of a voltage source V 2 connected in series with a resistor R b , and the values of R a and R b are In 0.5 ~ 5KΩ, V 1 and V 2 are between 1V ~ 5V, the circuit can adjust V 2 according to different detector resistance and chip process error of the resistance structure component, so as to adjust the voltage division range of the resistance structure component and expand the circuit scope of application. The circuit uses the method of ADC and DAC to match the equal reference voltage for each detection element before the signal is read as the input voltage of the reference terminal of the differential amplifier. The reference voltage is provided by the voltage division of the resistive structure components controlled by the counter. The output signal of the comparator is controlled, and one end of the comparator is connected to the voltage division of the resistance structure component, and the other end is connected to the voltage division of the detector.
电阻结构组件由一个20~100Ω的电阻R0与n个权电阻R1…Rn并联构成,n≥5,每个权电阻都串联有一个MOS开关,Rn取0.2~1KΩ,Rn-1=2Rn。电阻R0阻值最好设置为探测器最大电阻值,权电阻个数如果小于五个则范围太小或者精度太低,达不到校正效果,权电阻个数越多,阻值越大,校正精度越高。相对传统DAC的串联型和R-2R型等结构,这种并联的方式,节省了电阻数量,误差小,有更高的精度和更大的适用范围。权电阻个数和阻值大小决定了电路非均匀性校正的效果。The resistor structure component is composed of a 20-100Ω resistor R 0 connected in parallel with n weight resistors R 1 ... R n , n≥5, each weight resistor is connected in series with a MOS switch, R n is 0.2-1KΩ, R n- 1 = 2R n . The resistance value of resistor R 0 is best set to the maximum resistance value of the detector. If the number of weighted resistors is less than five, the range is too small or the accuracy is too low, and the correction effect cannot be achieved. The more weighted resistors, the larger the resistance value. The higher the calibration accuracy is. Compared with the series type and R-2R type structure of traditional DAC, this parallel connection method saves the number of resistors, has small error, higher precision and wider application range. The number and resistance value of weight resistors determine the effect of circuit non-uniformity correction.
计数器为n位二进制计数器,n等于权电阻个数,计数器设置有一个输入端T、一个复位端R、n位输出端Q0…Qn-1,输入端T控制计数器在时钟下是否计数。二进制计数器可以是加法或者减法计数器,复位端R控制计数器复位。最好采用T触发器构成的同步计数器且单向计数的方式。The counter is an n-bit binary counter, where n is equal to the number of weighted resistors. The counter is provided with an input terminal T, a reset terminal R, and n-bit output terminals Q 0 ... Q n-1 . The input terminal T controls whether the counter counts under the clock. The binary counter can be an addition or subtraction counter, and the reset terminal R controls the reset of the counter. It is best to use a synchronous counter composed of T flip-flops and a one-way counting method.
比较器为常规比较器,越接近理想比较器越好,可采用CMOS比较器,输出端接计数器的输入端T,当采用加法计数器时,同相端接电阻结构组件分压,反相端接探测器分压,输出信号开始为1,校正完成后变为0,减法计数器时接法则相反。The comparator is a conventional comparator, the closer it is to the ideal comparator, the better. A CMOS comparator can be used, and the output terminal is connected to the input terminal T of the counter. When an adding counter is used, the non-inverting terminal is connected to the resistive structural component for voltage division, and the inverting terminal is connected to the detection The voltage divider, the output signal is 1 at the beginning, and becomes 0 after the correction is completed, and the connection rule is reversed for the subtraction counter.
电路的连接关系为:所述的1号偏置模块与探测器串联再接地,所述的2号偏置模块与所述的电阻结构组件串联再接地,所述的计数器的输出端Q0…Qn-1分别接所述电阻结构组件R1…Rn对应的MOS开关栅极,比较器输出端接计数器的输入端T,比较器的一输入端接探测器分压,另一输入端接电阻结构组件分压。The connection relationship of the circuit is: the No. 1 bias module is connected in series with the detector and then grounded, the No. 2 bias module is connected in series with the resistance structure component and then grounded, and the output terminal Q 0 of the counter is connected to the ground. Q n-1 is respectively connected to the gate of the MOS switch corresponding to the resistance structure components R 1 ... R n , the output terminal of the comparator is connected to the input terminal T of the counter, one input terminal of the comparator is connected to the detector voltage divider, and the other input terminal Connect the resistive structural components to divide the voltage.
电路的工作原理为:校正电路工作的具体过程分为两步,以计数器为加法计数器时为例,第一步,比较器和计数器通电,输入复位电位和计数脉冲,比较器电路通过比较探测器端电压VRd和电阻结构组件端电压VRref的大小,若VRref>VRd,则T=1,计数器计数,计数器控制电阻结构组件电阻Rref的大小,Rref减小,导致VRref减小,不断循环直至VRref≦VRd时,T=0,计数器保持不变,自适应校正过程在2n个时钟周期内完成。第二步,校正完成后断开比较器电源和时钟脉冲,以降低功耗,然后再经差分放大器串行读出,得到均匀的信号。The working principle of the circuit is as follows: the specific process of the correction circuit is divided into two steps, taking the counter as an example of an addition counter, the first step, the comparator and the counter are powered on, the reset potential and counting pulse are input, the comparator circuit compares the detector The terminal voltage V Rd and the terminal voltage V Rref of the resistance structure component, if V Rref >V Rd , then T=1, the counter counts, the counter controls the resistance R ref of the resistance structure component, and the decrease of R ref leads to the decrease of V Rref Small, keep circulating until V Rref ≦ V Rd , T = 0, the counter remains unchanged, and the self-adaptive correction process is completed within 2 n clock cycles. In the second step, after the correction is completed, the comparator power supply and clock pulse are disconnected to reduce power consumption, and then read out serially through the differential amplifier to obtain a uniform signal.
本专利的优点如下:The advantages of this patent are as follows:
1.电阻结构组件,计数器,比较器和偏置模块构成了一个自动校正的系统,能有效地使探测器非均匀性降为0.5%内;1. Resistive structural components, counters, comparators and bias modules constitute an automatic correction system, which can effectively reduce the non-uniformity of the detector to within 0.5%;
2.无需传统的与响应元一一对应的盲元探测器设计,降低了探测器工艺的复杂性;2. There is no need for the traditional blind element detector design that corresponds to the response element one by one, which reduces the complexity of the detector process;
3.电路的校正精度高且适用范围广,且能在常温和低温下正常工作;3. The calibration accuracy of the circuit is high and the application range is wide, and it can work normally at room temperature and low temperature;
4.校正电路电源可断电设置,功耗低;4. The power supply of the correction circuit can be set to be powered off, and the power consumption is low;
5.采用亚微米CMOS工艺制造的重复性好。5. The repeatability of manufacturing by sub-micron CMOS process is good.
附图说明Description of drawings
图1长波光导红外探测器非均匀性校正电路单元结构图。Fig. 1 Structural diagram of the non-uniformity correction circuit unit of the long-wave photoconductive infrared detector.
图2电阻结构组件结构图。Figure 2 is a structural diagram of the resistor structure assembly.
图3 7位同步二进制加法计数器电路结构图。Figure 3 7-bit synchronous binary addition counter circuit structure diagram.
图4比较器电路原理图。Figure 4 Comparator circuit schematic.
图5校正电路工作时序图。Figure 5 Correction circuit timing diagram.
图6电阻结构组件分压VRref的变化过程。Fig. 6 Variation process of divided voltage V Rref of resistive structure components.
具体实施方式detailed description
下面结合附图对本专利的具体实施方式作进一步的详细说明:Below in conjunction with accompanying drawing, the specific embodiment of this patent is described in further detail:
实施方式1Embodiment 1
校正电路的单元结构如图1所示,包括比较器,计数器,电阻结构组件和两个偏置模块。可根据不同的探测器电阻和电阻结构组件工艺误差对V2进行调节,以调节电阻结构组件的分压范围。偏置模块电压源不能太大也不能太小,太大探测器发热大,太小探测器信号小。探测器电阻为40Ω左右,不考虑电阻结构组件工艺误差时,可以设定,V1=2.5V,V2=2.5V,Ra=Rb=1KΩ。电路工作的具体过程分为两步,以计数器为加法计数器时为例,第一步,比较器和计数器通电,输入复位电位和计数脉冲,比较器电路通过比较探测器端和电阻结构组件端电压的大小,若VRref>VRd,则T=1,计数器计数,计数器控制电阻结构组件电阻的大小,Rref减小,导致VRref减小,不断循环直至VRref≦VRd时,T=0,计数器保持不变,校正过程在2n个时钟周期内完成。第二步,校正完成后比较器电源断电以减少功耗,计数器不断电,使电阻结构组件分压保持不变,在未接受红外辐射之前使读出信号基本相等,再经差分放大器串行读出,得到均匀的信号。The unit structure of the correction circuit is shown in Figure 1, including a comparator, a counter, a resistance structure component and two bias modules. V2 can be adjusted according to different detector resistances and process errors of the resistance structure components, so as to adjust the voltage division range of the resistance structure components. The voltage source of the bias module should not be too large or too small. If it is too large, the detector will heat up, and if it is too small, the signal of the detector will be small. The resistance of the detector is about 40Ω. When the process error of the resistance structure components is not considered, V 1 =2.5V, V 2 =2.5V, R a =R b =1KΩ can be set. The specific process of the circuit work is divided into two steps, taking the counter as an example of an addition counter, the first step, the comparator and the counter are powered on, the reset potential and the counting pulse are input, the comparator circuit compares the voltage of the detector end and the resistance structure component end If V Rref >V Rd , then T=1, the counter counts, the counter controls the size of the resistance of the resistance structure component, R ref decreases, resulting in a decrease of V Rref , and the cycle continues until V Rref ≦V Rd , T= 0, the counter remains unchanged, and the correction process is completed within 2 n clock cycles. In the second step, after the calibration is completed, the power supply of the comparator is turned off to reduce power consumption, and the counter is not powered on, so that the divided voltage of the resistive structure components remains unchanged, and the readout signals are basically equal before receiving infrared radiation, and then serially Read out to get a uniform signal.
电阻结构组件如图2所示,当探测器最大电阻为50Ω时,电阻R0可设为50Ω。NMOS管开关W/L比尽可能大,以减小开关电阻,可设为200/1。The resistance structure components are shown in Figure 2. When the maximum resistance of the detector is 50Ω, the resistance R 0 can be set to 50Ω. The W/L ratio of the NMOS tube switch is as large as possible to reduce the switch resistance, which can be set to 200/1.
电阻结构组件的电阻参考尺寸如下表所示(单位为欧姆)。The resistance reference dimensions of the resistance structure components are shown in the table below (in ohms).
在此条件下,当R1~R7所有电阻都未选通情况下,电阻结构组件电阻值取最大值为50Ω,都选通情况下,取最小值为35.79Ω,变化步长在0.15Ω左右,适合电阻非均匀性在35.79~50Ω范围内的探测器,但还可以调节V2的大小,能够使电阻结构组件分压上下浮动。一般来说,探测器电阻非均匀性在15Ω内,若其非均匀性过大,则应改变权电阻R1~R7的大小和位数。Under this condition, when all the resistors of R 1 ~ R 7 are not selected, the maximum resistance value of the resistance structure component is 50Ω, and when they are all selected, the minimum value is 35.79Ω, and the change step is 0.15Ω It is suitable for detectors with resistance non - uniformity in the range of 35.79~50Ω, but the size of V2 can also be adjusted to make the voltage division of the resistance structure components fluctuate up and down. Generally speaking, the non-uniformity of the detector resistance is within 15Ω. If the non-uniformity is too large, the size and number of the weight resistors R1~R7 should be changed.
可采用的7位同步二进制加法计数器电路结构如图3所示,由7位上升沿T触发器构成,在开始计数时加入一个电位复位,然后再对时钟脉冲计数,脉冲的周期应大于比较器的传输延迟时间,否则计数器过多计数,导致VRref<VRd。计数器由7个上升沿T触发器、12个与门和一个与非门组成,输入端T=1时,计数器在一个脉冲周期内的一个上升沿计一位,当T=0时,计数器保持不变。计数器采用单向计数,当输出全为1时,会自动停止计数,为使计数器不循环,在第七个计数器后通过一个与非门和一个与门反馈到T上,使当探测器分压小于电阻结构组件分压的最小值时,可以取电阻结构组件分压的最小值。The circuit structure of the 7-bit synchronous binary addition counter that can be used is shown in Figure 3. It is composed of a 7-bit rising edge T flip-flop. A potential reset is added at the beginning of counting, and then the clock pulse is counted. The period of the pulse should be greater than that of the comparator The transmission delay time, otherwise the counter counts too much, resulting in V Rref <V Rd . The counter is composed of 7 rising edge T flip-flops, 12 AND gates and a NAND gate. When the input terminal T=1, the counter counts one bit on a rising edge in a pulse period. When T=0, the counter keeps constant. The counter adopts one-way counting. When the output is all 1, it will automatically stop counting. In order to prevent the counter from circulating, after the seventh counter, it is fed back to T through a NAND gate and an AND gate, so that when the detector divides the voltage When it is less than the minimum value of the voltage division of the resistance structure component, the minimum value of the voltage division of the resistance structure component can be taken.
图4为可采用的比较器的放大电路原理图,该CMOS比较器采用两级差分放大电路,常温下开环增益超过了90dB,第一级为预放大电路,第二级为折叠式共源共栅电路,采用P管作输入管,P为同相输入端,N为反相输入端,输出端OUT接计数器的输入端T,当采用加法计数器时,P接电阻结构组件分压,N接探测器分压,输出信号开始为1,校正完成后变为0,减法计数器接法则相反,其每个管子参考尺寸如下表所示(单位为微米)。Figure 4 is a schematic diagram of the amplifying circuit of the comparator that can be used. The CMOS comparator uses a two-stage differential amplifier circuit. The open-loop gain exceeds 90dB at room temperature. The first stage is a pre-amplification circuit, and the second stage is a folded common source. The common gate circuit uses a P tube as the input tube, P is the non-inverting input terminal, N is the inverting input terminal, and the output terminal OUT is connected to the input terminal T of the counter. The detector divides the pressure, the output signal is 1 at the beginning, and becomes 0 after the calibration is completed. The subtraction counter is connected in the opposite way. The reference size of each tube is shown in the table below (unit is micron).
实施方式2Embodiment 2
设某一位探测元的电阻Rd为40Ω,设置V1=V2=2.5V,Ra=Rb=1KΩ,采用7位同步二进制加法计数器,在低温66K下,在Cadence软件环境下,采用Spectre仿真器仿真,对应的校正仿真时序图如图5所示,其中电阻结构组件分压VRref的变化过程如图6所示,校正后二进制计数器值为1010001,电阻结构组件分压VRref为95.89mV,与探测器像元分压96.15mV相差0.26mV,在误差范围内,探测器电阻在200Ω以下变化时,校正结果电阻结构组件和探测器阻值差相对探测器都在0.5%内,即校正后非均匀性控制在了0.5%内,提高权电阻位数,能够使校正后非均匀性更小。Assume that the resistance Rd of a certain detection element is 40Ω, set V 1 =V 2 =2.5V, R a =R b =1KΩ, use a 7-bit synchronous binary addition counter, and at a low temperature of 66K, in the Cadence software environment, use Specter emulator simulation, the corresponding correction simulation timing diagram is shown in Figure 5, and the change process of the voltage division V Rref of the resistance structure component is shown in Figure 6, the value of the binary counter after correction is 1010001 , and the voltage division V Rref of the resistance structure component is 95.89mV, which is 0.26mV different from the detector pixel partial pressure 96.15mV. Within the error range, when the detector resistance changes below 200Ω, the difference between the resistance structure components and the detector resistance value of the calibration result is within 0.5% relative to the detector. That is, the non-uniformity after correction is controlled within 0.5%, and increasing the number of weight resistance digits can make the non-uniformity after correction even smaller.
以上通过具体的实施例对本专利进行了说明,但本专利并不限于这具体的实施例。本领域技术人员应该明白,还可以对本专利做各种修改、等同替换、变化等等,这些变换只要未背离本专利的精神,都应在本专利的保护范围之内。The patent has been described above through specific embodiments, but the patent is not limited to this specific embodiment. Those skilled in the art should understand that various modifications, equivalent replacements, changes, etc. can also be made to this patent. As long as these changes do not deviate from the spirit of this patent, they should all be within the scope of protection of this patent.
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| CN107192464B (en) * | 2017-07-12 | 2023-05-05 | 中国科学院上海技术物理研究所 | Non-uniformity correction circuit of long-wave photoconductive infrared detector |
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