CN206301074U - A kind of one-dimensional micro mirror of Electromagnetic Drive - Google Patents
A kind of one-dimensional micro mirror of Electromagnetic Drive Download PDFInfo
- Publication number
- CN206301074U CN206301074U CN201621003011.6U CN201621003011U CN206301074U CN 206301074 U CN206301074 U CN 206301074U CN 201621003011 U CN201621003011 U CN 201621003011U CN 206301074 U CN206301074 U CN 206301074U
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- China
- Prior art keywords
- magnet
- minute surface
- micro mirror
- electromagnetic drive
- coil
- Prior art date
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical group [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 claims description 3
- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 3
- 238000005538 encapsulation Methods 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 230000006698 induction Effects 0.000 abstract description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000009977 dual effect Effects 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002609 medium Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Landscapes
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Abstract
The utility model discloses a kind of one-dimensional micro mirror of Electromagnetic Drive, it is characterised in that including：Pedestal and minute surface, the minute surface are erected on pedestal by torsion beam, and around torsion beam Arbitrary Rotation；The one side of the minute surface is reflection reflecting surface, and another side is provided with the magnet coil for producing output torque.Through the above way, the utility model micro mirror compact overall structure, two blocks of magnet wrap up minute surface, increase the magnetic induction intensity at magnet coil, the output torque that increase driving coil is produced；Reflecting surface and driving coil are placed on different faces and are placed in one side compared to by reflecting surface and driving coil, the effective dimensions of minute surface can be expanded, simultaneously by the output torque for increasing the length of coil to increase driving coil, that is, realize the wide-angle deflection of large scale micro mirror.
Description
Technical field
The utility model is related to microelectron-mechanical field, more particularly to a kind of one-dimensional micro mirror of Electromagnetic Drive.
Background technology
Existing several MEMS micromirrors have the following disadvantages：
1. electrostatic MEMS scanning micro-mirrors：Although its type of drive is simple, power consumption is relatively small, and it drives electricity
Pressure is often higher, and the driving force for producing is smaller, it is impossible to which the micro mirror for providing large-size mirror reverses required power, and current is quiet
The mirror surface of the MEMS micromirror of electric-type is all smaller and needs to be operated in resonant condition and could realize larger corner.
2. electric heating MEMS scanning mirrors：It is driven through it is integrated with metal oxide in polysilicon heater realize,
Deflection angle under electric current driving is larger, but due to the hesitation of thermal arrest device, the response speed of micro mirror often compares
Slowly, be not suitable for being widely used in laser scanner technique field.
3. piezoelectric type MEMS scanning micro-mirrors：Piezoelectric Driving is the telecommunications that will be input into using the inverse piezoelectric effect of piezoelectric
Number it is converted into mechanical energy（Power and displacement）Output, Piezoelectric Driving has driving force big, the advantage of fast response time, but most of
Piezoelectric is incompatible with traditional integrated circuit technique, and this also turns into major obstacle of the Piezoelectric Driving as micro mirror type of drive.
4. current electromagnetic type MEMS scanning micro-mirrors, are all to put on the same face driving coil and reflecting surface, limitation
The effective dimensions of reflecting surface, the micro mirror cannot be obtained big so as to reduce driving moment to also limit the length of driving coil
Deflection angle.
Utility model content
The utility model can provide big mainly solving the technical problems that provide a kind of Electromagnetic Drive one-dimensional micro mirror
Can also be by the design of outer enclosure magnet while mirror surface so that micro mirror obtains big deflection angle.
In order to solve the above technical problems, the technical scheme that the utility model is used is：A kind of Electromagnetic Drive one is provided
Dimension micro mirror, including：Pedestal and minute surface, the minute surface are erected on pedestal by torsion beam, and around torsion beam Arbitrary Rotation；
The one side of the minute surface is reflection reflecting surface, and another side is provided with the magnet coil for producing output torque.
In one preferred embodiment of the utility model, the minute surface periphery is provided with magnet encapsulating structure, magnet encapsulation knot
Structure at least includes two groups of magnet, and the field system that magnet is formed wraps up minute surface, for the torque output of magnet coil provides power.
In one preferred embodiment of the utility model, magnet encapsulating structure includes two groups of magnet, is respectively arranged on minute surface
Lower both sides.
In one preferred embodiment of the utility model, the magnet is neodymium iron boron strong magnet.
In one preferred embodiment of the utility model, the torsion beam is located at minute surface two ends, and is vertically arranged with pedestal.
In one preferred embodiment of the utility model, the mirror shape is rectangle, circular or ellipse.
In one preferred embodiment of the utility model, the reflecting surface is provided with reflecting layer, the reflecting layer be aluminium,
The mixing material of gold, medium membrane material or metal and deielectric-coating.
In one preferred embodiment of the utility model, the driving coil is single driving coil or dual drive coil, list
The material of driving coil is nickel or gold, and the material of dual drive coil includes nickel and gold.
The beneficial effects of the utility model are：Micro mirror compact overall structure of the present utility model, two blocks of magnet are by minute surface bag
Wrap up in, increase the magnetic induction intensity at magnet coil, the output torque that increase driving coil is produced；Reflecting surface is put with driving coil
It is placed in one side compared to by reflecting surface and driving coil on different faces, the effective dimensions of minute surface can be expanded, while logical
Cross the length of increase coil to increase the output torque of driving coil, that is, realize the wide-angle deflection of large scale micro mirror.
Brief description of the drawings
In order to illustrate more clearly of the technical scheme in the utility model embodiment, below will be to needed for embodiment description
The accompanying drawing to be used is briefly described, it should be apparent that, drawings in the following description are only some realities of the present utility model
Example is applied, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to these accompanying drawings
Other accompanying drawings are obtained, wherein：
Fig. 1 is the structural representation of the utility model Electromagnetic Drive one-dimensional micro mirror one preferred embodiment；
Fig. 2 is the sectional view of the one-dimensional micro mirror of Electromagnetic Drive shown in Fig. 1；
Fig. 3 is structural representation of the one-dimensional micro mirror of Electromagnetic Drive shown in Fig. 1 in encapsulating structure；
Fig. 4 is the top view shown in Fig. 3.
Specific embodiment
The technical scheme in the utility model embodiment will be clearly and completely described below, it is clear that described
Embodiment is only a part of embodiment of the present utility model, rather than whole embodiments.Based on the implementation in the utility model
Example, all other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made is belonged to
The scope of the utility model protection.
The utility model embodiment includes：
A kind of one-dimensional micro mirror of Electromagnetic Drive, including：Pedestal 1 and minute surface 2, the minute surface 2 are erected at pedestal by torsion beam 3
On 1, the torsion beam 3 is located at the two ends of minute surface 2, and is vertically arranged with pedestal 1.Minute surface 2 is around the Arbitrary Rotation of torsion beam 3.Such as
Shown in Fig. 1 and Fig. 2.
The one side of the minute surface 2 is reflection reflecting surface 2-1, and another side is provided with the electromagnetic wire for producing output torque
Circle 2-2.The minute surface of the structure not only ensures to provide larger reflecting surface 2-1, increases effective work area of reflecting surface, and
And increased the length of coil increases the Lorentz force of generation, the corner of micro mirror is improved.
The minute surface 2 of micro mirror is shaped as rectangle, circular or ellipse.Whole micro mirror is prepared using micro fabrication, electromagnetic wire
Circle employs micro Process plating mode.The accuracy of micro fabrication is high, efficiency high, it can be ensured that the matter of the product for processing
Amount.
The periphery of the minute surface 2 is provided with magnet encapsulating structure, and magnet encapsulating structure at least includes two groups of magnet 4, the magnet
It is neodymium iron boron strong magnet, as shown in Figure 3-4.
The field system that magnet 4 is formed wraps up minute surface, for the torque output of magnet coil provides power.
In preferred embodiment of the present utility model, magnet encapsulating structure includes two groups of magnet 4, using sandwich structure, magnetic
Iron 4 is respectively arranged on minute surface, and about 2 both sides.
The encapsulating structure can make the magnetic induction intensity on magnet coil reach maximum, can play offer high magnetic strong
Spend and increase the effect of output torque.
Needed on the reflecting surface 2-1 of micro mirror for different lambda1-wavelength requirements, deposition different materials and different thickness
The reflecting layer of degree.Reflecting layer is the mixing material of aluminium, gold, medium membrane material or metal and deielectric-coating.
The driving coil 2-2 is single driving coil or dual drive coil, and the coil method of single driving coil is nickel or gold
Coil method Deng, dual drive coil 2-2 includes nickel and golden mix and match.
Micro mirror compact overall structure of the present utility model, two blocks of magnet wrap up minute surface, increase the magnetic strength at magnet coil
Answer intensity, the output torque that increase driving coil is produced；Reflecting surface 2-1 and driving coil 2-2 are placed on different faces and are compared
It is placed in one side in by reflecting surface and driving coil, the effective dimensions of minute surface can be expanded, while the length by increasing coil
To increase the output torque of driving coil, that is, realize the wide-angle deflection of large scale micro mirror.
Embodiment of the present utility model is the foregoing is only, the scope of the claims of the present utility model is not thereby limited, it is every
The equivalent structure or equivalent flow conversion made using the utility model description, or directly or indirectly it is used in other phases
The technical field of pass, is similarly included in scope of patent protection of the present utility model.
Claims (6)
1. the one-dimensional micro mirror of a kind of Electromagnetic Drive, it is characterised in that including：Pedestal and minute surface, the minute surface is by reversing erection
On pedestal, and around torsion beam Arbitrary Rotation；The one side of the minute surface is reflection reflecting surface, another side be provided with for
Produce the magnet coil of output torque.
2. the one-dimensional micro mirror of Electromagnetic Drive according to claim 1, it is characterised in that the minute surface periphery is provided with magnet encapsulation
Structure, magnet encapsulating structure at least includes two groups of magnet, and the field system that magnet is formed wraps up minute surface, is the power of magnet coil
Square output provides power.
3. the one-dimensional micro mirror of Electromagnetic Drive according to claim 1, it is characterised in that magnet encapsulating structure includes two groups of magnetic
Iron, is respectively arranged on the upper and lower both sides of minute surface.
4. the one-dimensional micro mirror of Electromagnetic Drive according to claim 3, it is characterised in that the magnet is neodymium iron boron strong magnet.
5. the one-dimensional micro mirror of Electromagnetic Drive according to claim 1, it is characterised in that the torsion beam is located at minute surface two ends,
And be vertically arranged with pedestal.
6. the one-dimensional micro mirror of Electromagnetic Drive according to claim 1, it is characterised in that the mirror shape is rectangle, circle
Or it is oval.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621003011.6U CN206301074U (en) | 2016-08-31 | 2016-08-31 | A kind of one-dimensional micro mirror of Electromagnetic Drive |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621003011.6U CN206301074U (en) | 2016-08-31 | 2016-08-31 | A kind of one-dimensional micro mirror of Electromagnetic Drive |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206301074U true CN206301074U (en) | 2017-07-04 |
Family
ID=59203424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621003011.6U Expired - Fee Related CN206301074U (en) | 2016-08-31 | 2016-08-31 | A kind of one-dimensional micro mirror of Electromagnetic Drive |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206301074U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106249402A (en) * | 2016-08-31 | 2016-12-21 | 常州创微电子机械科技有限公司 | A kind of one-dimensional micro mirror of Electromagnetic Drive |
| CN110405339A (en) * | 2019-06-28 | 2019-11-05 | 贺思源 | Flexible PCB electromagnetic micromirror, scanner and laser marking/engraving machine |
| JP2021511527A (en) * | 2017-12-14 | 2021-05-06 | 京東方科技集團股▲ふん▼有限公司Ｂｏｅ Ｔｅｃｈｎｏｌｏｇｙ Ｇｒｏｕｐ Ｃｏ．，Ｌｔｄ． | Display devices, assemblies for adaptively modulating the display contrast of display devices, and methods of adaptively modulating the display contrast of display devices. |
-
2016
- 2016-08-31 CN CN201621003011.6U patent/CN206301074U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106249402A (en) * | 2016-08-31 | 2016-12-21 | 常州创微电子机械科技有限公司 | A kind of one-dimensional micro mirror of Electromagnetic Drive |
| JP2021511527A (en) * | 2017-12-14 | 2021-05-06 | 京東方科技集團股▲ふん▼有限公司Ｂｏｅ Ｔｅｃｈｎｏｌｏｇｙ Ｇｒｏｕｐ Ｃｏ．，Ｌｔｄ． | Display devices, assemblies for adaptively modulating the display contrast of display devices, and methods of adaptively modulating the display contrast of display devices. |
| JP7023870B2 (en) | 2017-12-14 | 2022-02-22 | 京東方科技集團股▲ふん▼有限公司 | Display devices, assemblies for adaptively modulating the display contrast of display devices, and methods of adaptively modulating the display contrast of display devices. |
| CN110405339A (en) * | 2019-06-28 | 2019-11-05 | 贺思源 | Flexible PCB electromagnetic micromirror, scanner and laser marking/engraving machine |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170704 Termination date: 20200831 |
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| CF01 | Termination of patent right due to non-payment of annual fee |