CN205388456U - Displacement sensor and displacement sensing measurement system - Google Patents
Displacement sensor and displacement sensing measurement system Download PDFInfo
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- CN205388456U CN205388456U CN201521099467.2U CN201521099467U CN205388456U CN 205388456 U CN205388456 U CN 205388456U CN 201521099467 U CN201521099467 U CN 201521099467U CN 205388456 U CN205388456 U CN 205388456U
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Abstract
The utility model discloses a displacement sensor, including at least three magnetic transducing unit, the magnetic transducing unit is used for measuring the magnetic field of determinand when every magnetic transducing unit, the determinand contains magnetic material, and the magnetic transducing unit forms a line or the multiseriate along the traffic direction of determinand. The utility model also discloses a displacement sensing measurement system, adopts in front displacement sensor, be fixed with a plurality of magnetic substance pieces on the determinand, magnetic substance piece that the magnetic transducing unit still is arranged in detecting the determinand is through magnetic field at that time, closely spaced in the distance of adjacent magnetic substance piece between the adjacent magnetic transducing unit. Still can have the magnetosphere at the determinand, the magnetic transducing unit still is used for detecting the magnetosphere warp magnetic field at that time of determinand. The utility model has the characteristics of high accuracy, high sensitivity, high air gap distance, interference killing feature are strong and the measurement cost has been reduced.
Description
Technical field
This utility model relates to magnetic sensor field, particularly displacement transducer and displacement sensing measures system.
Background technology
Displacement transducer is mainly used in automation control system, in order to measure the physical quantity such as the speed of parts, position, direction of displacement and angle in industrial system.At present, conventional displacement measurement mode is to be installed in a device by gear sensor, by needing the parts measured and corresponding gear to connect, gear sensor learns the respective physical amount of UUT by physical quantitys such as the rotating speed of prototype gear, displacement, direction of displacement, angles.
Conventional gear sensor is light sensor and magnetic sensor.In mechanical rotation system, in the face of adverse circumstances such as vibrations, impact, greasy dirts, Magnetic Sensor has bigger advantage than light sensor.Prior art has many different types of Magnetic Sensors, the Magnetic Sensor being such as sensing element with Hall element, anisotropic magnetoresistance element, giant magnetoresistance element and magnetic tunnel junction element, wherein Hall element has very big measurement scope, but sensitivity and certainty of measurement are relatively low, several below belong to magnetoelectricity resistance type sensing element, there is higher sensitivity and certainty of measurement.
The structure of existing magnetic gear sensor is back of the body magnetic and two magnetic transducing unit, magnetic transducing unit is used for the tooth measuring gear under test through out-of-date magnetic field, whenever a gear exports a peak value through a sensing unit, the phase contrast of two groups of signals judges the traffic direction of gear under test, often organize the signal peak number of signal be through the number of teeth, it is known that the tooth pitch of gearPAnd the timeT, the physical quantitys such as the displacement of gear under test, speed, direction of displacement can be calculated.Each magnetic transducing unit is generally formed a gradient full-bridge by two half-bridges and exports a road signal.A gradient magnetic is formed between the gear that back of the body magnetic and magnetic material are constituted, when the tooth of gear is through sensor, the distribution in magnetic field changes, two half-bridges of magnetic transducing unit are respectively induced gear through out-of-date changes of magnetic field, so form electric potential difference between latter two half-bridge, export a road sinusoidal wave signal.For adopting the sensor of different sensing element, the distance between sensing unit half-bridge along sensitive directiondLength with the tooth rim phasePBetween there is following relation:
For adopting the sensor of Hall element, have:
P=2·d(1)
For adopting the sensor of giant magnetoresistance element, have:
P=4·d(2)
For adopting the sensor of magnetic tunnel junction element, have:
P=2·d(3)
Above formula is the optimal result in practical application, and when the conditions are satisfied, output amplitude is maximum.It will be seen that the output signal period of the two of sensor sensing units depends on space widthP, its certainty of measurement depends on the relative size of tooth, and namely module ratio (tooth radius/number of gears), popular, it is simply that in unit distance, the number of teeth is more many, and the peak of its output signal is more many, and certainty of measurement is more high.
Modern industry and mechanical system requirements displacement transducer or gear sensor to have high accuracy and high air gap (AirGap) distance.For high-precision requirement, traditional method has two kinds of thinkings, and one is that the modulus ratio reducing gear carrys out the displacement that perception gear is small.But the gear cost of low modulus ratio is very high, and processing technology is required height, it is not easy to reach required precision and easily cause abrasion, simultaneously, its air gap distance of gear measuring low modulus ratio also can be very little, if distance increases, semaphore can be non-normally low, and certainty of measurement also can decrease；Another one thinking is that high mode is exported the cycle that signal subdivision becomes little by the method adopting segmentation than gear, but is so built upon on the basis of reckoning, and when gear rotational speed is unstable or changes, its error is very big.
China's publication number is the patent of CN103528625A: a kind of gear sensor discloses a kind of gear sensor adopting multiple magnetic transducing unit, but this patent does not disclose its concrete structure, also without the result providing optimum, it still adopts the physical quantitys such as the displacement in the method measurement system of prototype gear, direction, angle simultaneously.
Summary of the invention
Technical problem to be solved in the utility model is to overcome the deficiencies in the prior art and provide displacement transducer and displacement sensing to measure system, and this utility model has the strong feature of high accuracy, high sensitivity, high air gap distance, capacity of resisting disturbance and reduces measurement cost.
This utility model is for solving above-mentioned technical problem by the following technical solutions:
According to a kind of displacement transducer that the utility model proposes, including at least three magnetic transducing unit, magnetic transducing unit is for measuring the determinand magnetic field through each magnetic transducing unit, described determinand is containing magnetic material, and magnetic transducing unit forms a line or multiple row along the traffic direction of determinand.
As a kind of further prioritization scheme of displacement transducer described in the utility model, also include for providing background magnetic field and magnetizing the magnet of determinand.
As a kind of further prioritization scheme of displacement transducer described in the utility model, the magnetic-field-sensitive direction of described magnetic transducing unit is identical.
As a kind of further prioritization scheme of displacement transducer described in the utility model, the spacing of adjacent magnetic sensing unit is identical.
As a kind of further prioritization scheme of displacement transducer described in the utility model, multiple magnetic transducing unit are in parallel and/or connect.
As a kind of further prioritization scheme of displacement transducer described in the utility model, described magnetic transducing unit be list electric resistance structure or half-bridge structure or full bridge structure；Described single electric resistance structure includes a magneto-resistor；Described half-bridge structure includes the magneto-resistor of two series connection；Described full bridge structure includes two half-bridge structures in parallel；Described magneto-resistor is connected by one or more magnetic sensor elements and/or parallel connection is constituted, and described magnetic sensor elements includes anisotropic magnetoresistance element, giant magnetoresistance element and/or magnetic tunnel junction element.
A kind of displacement sensing measures system, including above-mentioned displacement transducer, being fixed with multiple Magnetic Materials mass on determinand, magnetic transducing unit is additionally operable to the distance being smaller than adjacent magnetic material block between magnetic field at that time, adjacent magnetic sensing unit of the Magnetic Materials mass in detection determinand.
Measuring the further prioritization scheme of system as a kind of displacement sensing described in the utility model, determinand has magnetosphere, and magnetic transducing unit is additionally operable to the magnetosphere of detection determinand through magnetic field at that time.
This utility model adopts above technical scheme compared with prior art, has following technical effect that
(1) this utility model has high accuracy, high sensitivity, high air gap distance, the feature that capacity of resisting disturbance is strong；
(2) adopt the determinand containing magnetisable material or the gear that magnetic material coating replacement is traditional is set on the test object, possessing high accuracy, high sensitivity, high air gap distance, while the feature that capacity of resisting disturbance is strong, reduce further measurement cost；
(3) adopt fixing Magnetic Materials mass on the test object to substitute the determinand containing magnetisable material, possessing high accuracy, high sensitivity, high air gap distance, while the feature that capacity of resisting disturbance is strong, reduce further measurement cost.
Accompanying drawing explanation
Fig. 1 is the structural representation of the displacement transducer that the utility model proposes.
Fig. 2 is the structural representation of the displacement transducer with magnet that the utility model proposes.
Fig. 3 is the structural representation that the displacement sensing that the utility model proposes measures system.
Fig. 4 is the output curve diagram of giant magnetoresistance element or magnetic tunnel junction element.
Fig. 5 is the output curve diagram of bridge-type magnetic transducing unit.
Fig. 6 is a kind of locus figure of the magneto-resistor of bridge-type magnetic transducing unit.
Fig. 7 is the second locus figure of the magneto-resistor of bridge-type magnetic transducing unit.
Fig. 8 is the parallel electrical connection graph adopting multiple bridge-type magnetic transducing unit.
Fig. 9 is the output curve diagram of the displacement transducer that the utility model proposes.
Accompanying drawing labelling in figure is construed to: 11a, 11b, 11c ... 11n is magnetic transducing unit, 21-gear under test, the magnetic-field-sensitive direction of 1-magnetic transducing unit, 12-magnet, 23-Magnetic Materials mass, 111,112,113,114,121,122,123,124,131,132,133,134 are magneto-resistor.
Detailed description of the invention
Below in conjunction with drawings and Examples, utility model content of the present utility model is further described.
In order to make those skilled in the art be more fully understood that the technical scheme in the application, below in conjunction with the accompanying drawing in the embodiment of the present application, technical scheme in the embodiment of the present application is clearly and completely described, obviously, described embodiment is only some embodiments of the present application, rather than whole embodiments.Based on the embodiment in the application, the every other embodiment that those of ordinary skill in the art obtain under not making creative work premise, all should belong to the scope of the application protection.
As it is shown in figure 1, the displacement transducer that the utility model proposes includes multiple magnetic transducing unit 11a, 11b, 11c of three and more than three ... 11n, multiple magnetic transducing unit are along the traffic direction of gear under test 21xAxle forms a line or lines up array, the spacing between multiple magnetic transducing unitDSpace width less than gear under testP, the magnetic-field-sensitive direction 1 of multiple magnetic transducing unit is identical.During work, gear 21 is through the many group output signals of multiple magnetic transducing unit output, and rear end can be passed through these many group output signals and judge the physical quantitys such as the displacement of gear, direction of displacement, rotating speed.It practice, the displacement transducer adopting multiple magnetic transducing unit is exactly replace, with multiple magnetic transducing unit, the gear that modulus ratio is low, because the cost of the latter is high.Rear end is when analyzing signal, many group output signals are equivalent to the output signal of multiple teeth of gear (as shown in Figure 9, signal 1, 2, 3 is the output signal of three magnetic transducing unit), in order to distinguish (traditional gear sensor adopting two magnetic transducing unit is the traffic direction utilizing two groups of output signals to judge gear) with traditional gear sensor adopting two magnetic transducing unit, the displacement transducer that the utility model proposes at least contains three magnetic transducing unit, and its output accuracy depends on the number of magnetic transducing unit, owing to the number of magnetic transducing unit can be arranged according to demand, therefore utility model people cannot exhaustive all possible sensing unit number, therefore the number of magnetic transducing unit is described with " multiple ", " multiple " that the utility model proposes, it it is at least three.The magnetic-field-sensitive direction of magnetic transducing unit can be perpendicular to the direction of motion of gear 21xAxle, it is also possible to be parallel toxAxle, it is also possible to tilt at an angle.
Spacing between aforementioned each magnetic transducing unitDRefer to the physical centre of each magnetic transducing unit in determinand (such as gear) direction of advance (namelyxAxle) distance, as a rule, spacingDWill much smaller than the tooth pitch of gearP, more magnetic transducing unit so just can be set in unit distance, the signal of output is more many, the track refinement just more can advanced by gear, improves certainty of measurement.Displacement sensor shown in Fig. 1 is the gear of ferrite that coercivity is higher or metal material, if the coercivity of gear material is relatively low, then need to arrange magnet 12, as shown in Figure 2, magnet 12 is in order to apply background magnetic field magnetization gear 21, multiple magnetic transducing unit 11a, 11b, 11c ... the magnetic field that 11n causes through each magnetic transducing unit in order to the tooth of prototype gear 21, thus exporting corresponding waveform.
Determinand can be gear, may not be gear, but containing the magnetic material (alloy of such as ferrum, cobalt or nickel or above-mentioned three kinds of metals any two or three, or containing ferrum, cobalt, nickel any one or two or three alloy or compound, or Ferrite Material, or other ferromagnetic, Ferrimagnetic, paramagnetic materials, or the mixing of above-mentioned material) parts, determinand can also be mixed magnetic material, or scribble magnetic medium on the test object.If the coercivity of determinand is relatively low, then need to arrange magnet 12.If determinand is containing magnetic material, then through each magnetic transducing unit, the change of Distribution of Magnetic Field about can be caused, export corresponding waveform, for instance cubical determinand is long square wave, and tetrahedron or cone are sharp-pointed waveform.If on determinand being magnetisable material coating, then its output waveform is corresponding sinusoidal wave form (magnetic stripe of such as bank card or hard disk card medium or magnetic railings ruler).The output waveform of each magnetic transducing unit is identical, simply there is phase contrast, judge that the physical quantitys such as the speed of determinand, displacement, direction of displacement are not relying on the often group output waveform of reality, but judge according to the peak difference that many group output signals are corresponding, magnetic transducing unit is more many, and spacing is more little, more accurate, therefore determinand need not necessarily be gear, as long as containing magnetisable material.Owing to rear end is not relying on independent often group output signal for the calculating exporting signal, but by the superpositions organizing signal more, therefore the magnetic-field-sensitive direction of each magnetic transducing unit is also not necessarily identical, signal also without magnetic transducing unit that must be adjacent, spacing between adjacent magnetic sensing unit is also without necessarily identical, only need to meet the determinand process containing magnetisable material, and have many group signal output, it is known that the position of multiple magnetic transducing unit and spacing.
In actually used, determinand may not contain magnetisable material, or is not metal material, in this case, additionally the parts arranged containing magnetic material will increase cost, in order to reduce cost further, Magnetic Materials mass 23 can be fixed on the determinand 22 without magnetic material, as shown in Figure 3.In this design, Magnetic Materials mass 23 can be considered the tooth of gear, when Magnetic Materials mass 23 is through each magnetic transducing unit, the Distribution of Magnetic Field near this magnetic transducing unit can be made to change, thus exporting corresponding waveform.Magnetic Materials mass 23 comprises magnetic material, can be paramagnetic material can also be ferromagnetic material or the mixing of the two, if the coercivity of Magnetic Materials mass 23 is bigger, magnet 12 then need not be set, if the coercivity of Magnetic Materials mass 23 is less, then need to arrange magnet 12, as in figure 2 it is shown, gear replaces with the determinand being fixed with Magnetic Materials mass.The shape of Magnetic Materials mass 23 can set according to demand, can be cube, cylinder, hemisphere, tetrahedron, cone or other regular or irregular shapes, what it was mainly characterized by making the determinand 22 not comprising magnetic material has magnetisable material projection, available pastes, welds, the fixed form such as inlays and be fixed on determinand 22.
For the displacement sensor gear arranging three magnetic transducing unit, as shown in Figure 9.When a tooth of gear or a Magnetic Materials mass or the determinand containing magnetic material are through three magnetic transducings unit 11a, 11b, 11c, it exports three groups of signals respectively: signal 1, signal 2, signal 3, we are with first peak for standard, can pass through first the peak-to-peak time of these three groups of signalsT, and the spacing of magnetic transducing unit 11a, 11b, 11c of known signal 1,2,3 correspondence and these three magnetic transducing unitD1、D2 and (such as three magnetic transducing unit are along the traffic direction of determinand in positionxAxle is arranged in order), rear end can obtain the physical quantitys such as the traffic direction of determinand, displacement and speed by simple program in conjunction with the output signal peak of aforementioned known parameter and displacement sensor.Such as, if determinand is through three magnetic transducing unit, then displacement be (D1+D2) time, passed through isT, then speed be (D1+D2)/T, namely can determine whether direction of displacement by exporting the phase contrast of signal, accordingly, if through (m+1) individual magnetic transducing unit, the elapsed time isT mThen displacement be (D1+D2+……+DM), speed be (D1+D2+……+DM)/T m.In practical application, due to the spacing between each magnetic transducing unitDVery little, for micron level, only little by the extreme case of a magnetic transducing unit, if need nanometer or several micron level measurement, the displacement transducer that the utility model proposes also can realize, it is only necessary to each magnetic transducing unit is designed to Nano grade or several micron level, due to giant magnetoresistance element or magnetic tunnel junction element can by nanometer processing or micro-processing technology prepare very little, and sensitivity is significantly high, high-precision measurement therefore can be realized.Aforesaid algorithm is citing simply, in practical application, corresponding design can be done according to the output of sensor in rear end, displacement transducer of the present utility model both qualitative can measure the waveform of respective magnetic determinand, it is possible to quantitatively measures the size in magnetic field near each magnetic transducing unit.Rear end is in the calculation also without the need for the output signal of known each magnetic transducing unit, also without the magnetic transducing unit that must be adjacent position, practical application can be appointed according to demand and take three groups and above, it is necessary to known these three groups and magnetic transducing unit extremely position relationship corresponding to above output signal.For the consideration being easy to later stage signal processing, it is preferred that scheme is the magnetic transducing unit interval that multiple magnetic transducing unit magnetic-field-sensitive direction is identical and adjacentDIdentical.
By the gear arranging multiple magnetic transducing unit low modulus ratio of replacement, namely adopting and multiple magnetic transducing unit be set rather than use the gear of multiple tooth as far as possible under the distance of relative size.Further, can Magnetic Materials mass be directly anchored on determinand to substitute existing gear.Have employed three magnetic transducing cellular constructions in this embodiment, the more many precision of the number of magnetic transducing unit are more high in actual applications, and it at least to have three, and its certainty of measurement is greater than the gear sensor of existing employing double-sensing unit.
Will in space little as far as possible integrated more magnetic transducing unit, the inductance coil generally adopted in prior art, fluxgate or Hall element cannot realize, especially Hall element, need extra magnetism gathering rings, and its accuracy and sensitivity is all non-normally low, therefore in this utility model, sensitivity and the precision height anisotropic magnetoresistance element (AMR) that volume is little simultaneously, giant magnetoresistance element (GMR) or magnetic tunnel junction element (MTJ) are preferred sensing elements, magnetic transducing unit in the displacement transducer that the utility model proposes then includes this several magnetic sensor elements, simultaneously, high sensitivity characteristic due to above-mentioned magnetic sensor elements, it can realize high-acruracy survey under the distance of high air gap.
Usual magnetic transducing unit is made up of single resistance, half-bridge or full bridge structure one or more magnetic sensor elements, and described single electric resistance structure includes a magneto-resistor；Described half-bridge structure includes the magneto-resistor of two series connection；Described full bridge structure includes two half-bridge structures in parallel；Described magneto-resistor is connected by one or more magnetic sensor elements and/or parallel connection is constituted, and described magnetic sensor elements includes anisotropic magnetoresistance element, giant magnetoresistance element and/or magnetic tunnel junction element.
Fig. 4 is the output curve diagram of giant magnetoresistance element or magnetic tunnel junction element.As it can be seen, giant magnetoresistance element or magnetic tunnel junction element are in outfieldHEffect under resistance change, particularly in-H SWithH SBetween, its resistance linearly changes, if the absolute value in outfield more thanH S, then its resistance is not changed in, and generally willH SIt is called the saturation field of such magnetic sensor elements.Giant magnetoresistance element or magnetic tunnel junction element generally comprise the thin film of free layer, nonmagnetic layer and three Nano grade thickness of reference layer, it is distinctive in that, the nonmagnetic layer of giant magnetoresistance element is metal, the nonmagnetic layer of magnetic tunnel junction element is insulant, wherein the magnetic moment of free layer changes with outfield, the magnetic moment of reference layer is pinned, in Fig. 4, black arrow is reference layer magnetic moment direction, white arrow is free layer magnetic moment direction, it will be clear that free layer magnetic moment changes with outfield, reference layer magnetic moment is constant, its resistanceRSaturation field-H SWithH SBetween linearly change,R LWithR HThe resistance of the corresponding high-impedance state of difference and low resistance state resistance.In actually used, can using multiple magnetic sensor elements serial or parallel connections as a magneto-resistor, or only using a magnetic sensor elements as a magneto-resistor.After one magneto-resistor is passed into constant voltage or electric current, the voltage at its two ends is with resistance linear change, and its resistance is (i.e. saturation field in its operation intervalH SIn) with outfield linear change, the measurement to outfield just can be realized.
Two magneto-resistors are connected, passes into steady current or voltage, a half-bridge can be formed, the output port of this half-bridge is between two magneto-resistors, and it can be recommend half-bridge, it is also possible to be gradient half-bridge, can also be that its curve of output is referred to single magnetoresistive element with reference to half-bridgeR-HCurve.
Full bridge structure becomes the preferred structure of magnetic transducing unit owing to its temperature resistance floats performance.As shown in Figure 8, multiple magnetic transducing unit 11a, 11b, 11c ... 11n parallel connection, by port V for the electric connection mode of multiple bridge-type magnetic transducing unitINPass into constant voltage or electric current with GND, often group magnetic transducing unit exports respectively.For 11a, magneto-resistor 111 and 112 series connection is a half-bridge, and 113 and 114 series connection are a half-bridge, and the two half-bridge composes in parallel a bridge-type magnetic transducing unit 11a.Two output port one is between 111 and 112, and one between 113 and 114.If this full bridge structure is for recommending full-bridge, then in identical outfieldHEffect under, 111 and 114 resistances become big and change identical, and the resistance of 112 and 113 diminishes and changes identical；If this full-bridge is with reference to full-bridge, in identical outfieldHEffect under, time 111 and 114 resistances change simultaneously and change identical, the resistance of 112 and 113 is constant or varies less；If this full-bridge is gradient full-bridge, identical outfieldHEffect under, 111 is identical with 114 change in resistance, and 112 is identical with the change in resistance of 113.Multiple magnetic transducing unit 11a, 11b, 11c ... 11n can also be series connection, it is also possible to serial-parallel mirror, input port pass into steady current or voltage, many group magnetic transducing unit export respectively.The output signal of bridge-type magnetic transducing unit is as shown in Figure 5.
For three gradient bridge-type magnetic transducing unit, the magneto-resistor spatial arrangement of bridge-type magnetic transducing unit introduced below.
Fig. 6 is a kind of locus figure of the magneto-resistor of bridge-type magnetic transducing unit.As shown in the figure, magnetic-field-sensitive direction 1 along three magnetic field sensing cell 11a, 11b, 11c, magneto-resistor 111,114,121,124,131,134 is co-located, magneto-resistor 112,113,122,123,132,133 is co-located, its electric connection mode is referred to the electrical connection graph of multiple magnetic transducing unit as shown in Figure 8, magneto-resistor 111,112,113,114 forms magnetic transducing unit 11a, magneto-resistor 121,122,123,124 forms magnetic transducing unit 11b, and magneto-resistor 131,132,133,134 forms magnetic transducing unit 11c.For 11a, due to outfieldHBeing a gradient fields, along magnetic-field-sensitive direction 1, the magneto-resistor 111 and 114,112 being positioned at para-position is identical with the change in resistance of 113, is positioned at magneto-resistor 111 and the 112(or 113 at ortho position) change in resistance different, thus forming one group of output voltage.Magnetic transducing unit 11b, 11c are in like manner.Distance between two half-bridges of magnetic transducing unit 11a, 11b, 11cd1、d2、dThe distance of Magnetic Materials mass fixing on 3 tooth pitches being less than gear under test or determinand, and the distance between each sensing unitDAlso the distance of Magnetic Materials mass fixing on the tooth pitch of gear under test or determinand it is less than.Adopt same more than the set-up mode of its magneto-resistor of structure of n magnetic transducing unit of three magnetic transducing unit, be all alongxDirection of principal axis arranges n full-bridge.
Fig. 7 is the another kind of locus figure of the magneto-resistor of bridge-type magnetic transducing unit.Put with the first locus and identical be, along three magnetic field sensing cell 11a, 11b, the magnetic-field-sensitive direction 1 of 11c, magneto-resistor 111, 114, 121, 124, 131, 134 is co-located, magneto-resistor 112, 113, 122, 123, 132, 133 is co-located, its electric connection mode is also referred to the electrical connection graph of multiple magnetic transducing unit as shown in Figure 8, magneto-resistor 111, 112, 113, 114 composition magnetic transducing unit 11a, magneto-resistor 121, 122, 123, 124 composition magnetic transducing unit 11b, magneto-resistor 131, 132, 133, 134 composition magnetic transducing unit 11c.The difference is that, the magneto-resistor dislocation of three sensing units is put, and the distance between two half-bridges of magnetic transducing unit 11a, 11b, 11cd1、d2、dThe distance of Magnetic Materials mass fixing on 3 tooth pitches being less than gear under test or determinand, and the distance between each sensing unitDAlso the distance of Magnetic Materials mass fixing on the tooth pitch of gear under test or determinand it is less than.According to n the magnetic transducing unit more than three, then, in the array of magneto-resistor composition, left-half is all the left half-bridge of each sensing unit, and right half part is all the right half-bridge of each sensing unit.
Above-mentioned for disposing way two kinds conventional, but it is not limited to both disposing ways, such as can also by two half-bridge cross arrangements of magnetic transducing unit adjacent for each two, the arrangement mode of each half-bridge or magneto-resistor can arrange layout according to concrete demand, the focusing on of displacement transducer of the present utility model adopts three and above multiple magnetic transducing unit, only need to meet this condition.The spacing of multiple magnetic transducing unitDCan be identical, it is also possible to differ, it is only necessary to the position of fixing and known each magnetic transducing unit, it is known that the spacing between each magnetic transducing unitD, and the output signal that known each magnetic transducing unit is corresponding.Above-mentioned gradient bridge-type magneto-resistor disposing way is also applied for recommending full-bridge and with reference to full-bridge, and the magnetic-field-sensitive direction 1 of magnetic transducing unit can be perpendicular toxAxle, it is possible toxAxle is parallel or at an angle, and multiple magnetic transducing unit can be connected also can be in parallel or go here and there and combine.
Reduce can the adopting with reference to half/full-bridge to constitute but be not limited in the following manner of magneto-resistor sensitivity: soft magnetic materials as high in deposition pcrmeability in magnetic sensor elements, the inverse ferric magnetosphere etc. of the big permanent magnet of bias-field or deposition of thick is set.By once preparing on a wafer with reference to full-bridge chip with upper type.Building and recommend the mode of half-bridge or full-bridge can be that the magneto-resistor reference layer magnetic moment direction of para-position is identical, ortho position magneto-resistor reference layer magnetic moment direction is contrary, or the reference layer magnetic moment direction of four magneto-resistors is all identical, free layer magnetic moment can be set in advance as an angle, the free layer magnetic moment direction of relative position magneto-resistor is identical, and the magneto-resistor free layer magnetic moment direction of adjacent position is different.
Should be appreciated that above is illustrative and not restrictive by preferred embodiment to the detailed description that the technical solution of the utility model carries out.Technical scheme described in each embodiment can be modified by those of ordinary skill in the art on the basis of reading this utility model description, or wherein portion of techniques feature carries out equivalent replacement；And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of each embodiment technical scheme of this utility model.
Claims (8)
1. a displacement transducer, it is characterized in that, including at least three magnetic transducing unit, magnetic transducing unit is for measuring the determinand magnetic field through each magnetic transducing unit, described determinand is containing magnetic material, and magnetic transducing unit forms a line or multiple row along the traffic direction of determinand.
2. a kind of displacement transducer according to claim 1, it is characterised in that also include for providing background magnetic field and magnetizing the magnet of determinand.
3. a kind of displacement transducer according to claim 1, it is characterised in that the magnetic-field-sensitive direction of described magnetic transducing unit is identical.
4. a kind of displacement transducer according to claim 1, it is characterised in that the spacing of adjacent magnetic sensing unit is identical.
5. a kind of displacement transducer according to claim 1, it is characterised in that multiple magnetic transducing unit are in parallel and/or connect.
6. a kind of displacement transducer according to claim 1, it is characterised in that described magnetic transducing unit be list electric resistance structure or half-bridge structure or full bridge structure；Described single electric resistance structure includes a magneto-resistor；Described half-bridge structure includes the magneto-resistor of two series connection；Described full bridge structure includes two half-bridge structures in parallel；Described magneto-resistor is connected by one or more magnetic sensor elements and/or parallel connection is constituted, and described magnetic sensor elements includes anisotropic magnetoresistance element, giant magnetoresistance element and/or magnetic tunnel junction element.
7. a displacement sensing measures system, it is characterized in that, including the displacement transducer described in any one in claim 1-6, determinand is fixed with multiple Magnetic Materials mass, magnetic transducing unit is additionally operable to the distance being smaller than adjacent magnetic material block between magnetic field at that time, adjacent magnetic sensing unit of the Magnetic Materials mass in detection determinand.
8. a displacement sensing measures system, it is characterised in that including the displacement transducer described in any one in claim 1-6, determinand has magnetosphere, and magnetic transducing unit is additionally operable to the magnetosphere of detection determinand through magnetic field at that time.
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| CN201521099467.2U CN205388456U (en) | 2015-12-25 | 2015-12-25 | Displacement sensor and displacement sensing measurement system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105466324A (en) * | 2015-12-25 | 2016-04-06 | 无锡乐尔科技有限公司 | Displacement sensor and displacement sensing measurement system |
| CN109282877A (en) * | 2018-11-22 | 2019-01-29 | 贵州航天智慧农业有限公司 | Displacement detecting method, device and liquid level emasuring device |
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2015
- 2015-12-25 CN CN201521099467.2U patent/CN205388456U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105466324A (en) * | 2015-12-25 | 2016-04-06 | 无锡乐尔科技有限公司 | Displacement sensor and displacement sensing measurement system |
| CN109282877A (en) * | 2018-11-22 | 2019-01-29 | 贵州航天智慧农业有限公司 | Displacement detecting method, device and liquid level emasuring device |
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