CN1997949A - Chemical mixing apparatus, system and method - Google Patents

Abstract

A system and method of formulating a batch comprising at least two ingredients. The ingredients are admitted to a container to partially fill it (28). The quantities of the ingredient in the container are determined (30), and a ratio of a target quantity to the determined current quantity for at least one ingredient is calculated (32). The next quantity of that ingredient to be admitted to the admixture is calculated by multiplying the target quantity by the calculated ratio to determine a corrected quantity (34). The corrected quantity of the ingredient is admitted to the admixture (36), and a quantity of another ingredient is admitted to the admixture to adjust the proportion of ingredients to the target formulation (38). These steps may be repeated until the batch is completed.

Description

Chemical mixing devices, systems and methods

related application

This application claims priority to a U.S. Provisional Patent Application filed July 8, 2004, which is incorporated by reference in its entirety, and is entitled: CHEMICAL MIXING APPARATUS, SYSTEM AND METHOD ).

technical field

The present invention relates generally to devices, systems and methods for mixing chemicals. More particularly, it relates to devices, systems and methods for mixing components in an accurate manner according to a given recipe.

Background technique

This section describes the background to the disclosed embodiments of the invention, and is not intended to show or imply that the background discussed in this section legally constitutes prior art.

There are various types and kinds of devices, systems and methods for mixing multiple components. For example, reference is made to the following U.S. patents and patent applications, each of which is hereby incorporated by reference in its entirety:

Patent No inventor Publication date 4,363,742 Stone, Milton 12/14/82 5,340,210 Patel et al. 08/23/94 5,348,389 Lennart Jnsson et al 09/20/94 5,522,660 O'Dougherty et al. 06/04/96 5,632,960 Ferri, J.R. et al. 05/27/97 5,874,049 Ferri, J.R. et al. 02/23/99 5,924,794 O'Dougherty et al. 07/20/99 6,120,175 Tewell, Stanley 09/19/00 6,290,384 Pozniak et al. 09/18/01 2004/0100860 Wilmer et al. 05/27/04

Currently, many production methods require the application of chemical component mixing during different steps of the process to treat the various parts. Previously, these blended components relied on a control device to input chemicals to obtain the desired mixture, and then test the mixture on-line for acceptable usage levels. In some cases, an external analytical instrument or laboratory is used to confirm the blended mixture, while in other cases, an on-line test product is used.

While these methods are successful for some domains to ensure the quality of the method, each of them may use unnecessary and undesired delays. If the test fails, the chemical may need to be drained and refilled after the test results. For production methods in certain application areas, this can lead to unacceptable delays, additional costs and additional cycle times.

Brief description of the drawings

The following is a brief description of the attached drawings:

Fig. 1 is a schematic diagram of a chemical mixing system formed according to an embodiment of the present invention;

Figure 2 is a front view of a tank filled using the step-by-step filling method according to the system of Figure 1;

Figure 3 is a flow chart of a step-by-step filling mixing method that can be applied to the system of Figure 1;

Figures 4 and 5 are flow charts of another step-by-step filling mixing method that can be applied to the system of Figure 1; and

FIG. 6 is a block diagram of a controller used in the system of FIG. 1 .

Detailed Description of Certain Embodiments of the Invention

According to some embodiments of the present invention, there is provided a system and method for formulating a batch comprising at least two components. The components of the container are supplied to partially fill the container. Amounts of components in the container are determined, and a ratio of a target amount of at least one component to the determined current amount is calculated. The next amount of that component to add to the mixture is calculated by multiplying the target amount by the calculated ratio to determine its corrected amount. Corrective amounts of components are added to the mixture, and some additional components are added to the mixture to adjust the ratios of the components to the target formulation. These steps can be repeated until the batch is complete.

According to some embodiments of the present invention, there is provided a fractional fill mixing device, system and method for mixing components. In one disclosed embodiment, the step-by-step filling device, system and method include a container for holding each component, an on-line analysis device for testing the concentration or amount of each component placed in the container, and an on-line analysis device for storing the components Components dispensed into containers supply control devices. A controller is operatively connected to the component supply control means and the analysis means. The controller further employs a step-fill algorithm to add at least two components to the container to fill a portion of the total volume to obtain the desired batch.

According to some embodiments of the present invention, the controller uses a step-by-step fill-mix law, filling an initial partial volume of the total volume of the container during the fill sequence. This partial volume is recirculated to ensure a homogeneous mixture, and the on-line analysis device determines the composition of the mixture and communicates information about the current mixture to the controller. A controller implementing a step-fill mixing law adjusts the component feed control device in such a way that in subsequent portions of the total volume of the mixture, deviations between the actual and ideal values of the mixture are corrected. The resulting mixture is the desired mixture and for many fields no additional testing is required.

Referring now to the drawings, and more particularly to FIG. 1 , there is shown a step-fill mixing apparatus or system 10 constructed in accordance with an embodiment of the present invention for mixing two or more components, typically in a tank or vessel 12 . An analyzer or analytical device 14 is used to test the amount of each component in the container 12 . A component feed control, shown generally at 16 , controllably dispenses two or more components into tank or container 12 . Component supply control 16 dispenses components through a plurality of component supply inlets such as first component supply inlet 18 , second component supply inlet 20 and third component supply inlet 22 . Each component supply inlet 18, 20 and 22 is fluidly connected to a plurality of component supplies (not shown). Manifold 24 receives a plurality of components from component feeder control 16 , and each component then flows from manifold 24 to vessel 12 .

As shown in FIG. 2, the tank or container 12 may initially contain a remaining volume of one of the components to be mixed, as represented by volLowLev 200, according to the step-fill mixing law. Thus, when one of the components of the remaining volume is present in tank 12, the low level of the tank is generally indicated at 210.

According to an embodiment of the invention, the slots 12 are then sequentially filled in steps through two or more step-wise or partial filling sequences. The volumes of each fill portion are shown as 202, 204 and 208, respectively. For example, as shown in FIG. 2 , a step-by-step filling sequence may generally include four step-by-step filling sequences volFrac1 , volFrac2 , volFrac3 and volFrac4 . It should be noted that the tank or vessel 12 may have additional volume above the high point 212 (not shown). Thus, high point 212 represents the height achievable when the step fill sequence is complete, but not necessarily the maximum capacity of tank 12 .

As shown in FIG. 3 , the staged charge mixing method begins at block 27 . The step-by-step charge mixing method adds at least two components to container 12, filling a fraction of the total container 12 volume for the desired batch. The method then determines the amount of each component in the container, as indicated generally by block 30 . The amount of each component measured in container 12 may be expressed as weight percent or volume percent. The method then calculates a ratio between the target amount of the desired mixture of at least one component and the determined on-hand amount (as measured at block 30 ). This step is generally indicated by block 32 . As shown in block 34, the method then calculates the next amount in at least one of the components by multiplying the target amount for that component by the ratio calculated in block 32 to determine its corrected amount. The method then commands the component feed control 16 to add the corrected amount of the component to the mixture in the container 12, as indicated by block 36 . The method (shown as block 38) then adds some additional components, adjusting the ratios of the components to the target formula. The steps shown in blocks 30, 32, 34, 36 and 38 are repeated until the container is filled with the desired amount of batch material. The process ends when the container 12 is filled with the desired amount of batch material, as indicated by block 44 .

In view of the method just described in more detail, referring to FIG. 2 , the method includes determining the desired sequence of step charges for the quantity of step charges to be manipulated. For example, shown in Figure 2 is tank 12 which will contain the mixture and ultimately the final desired batch produced by the process. Illustrated in Figure 2 are the various volume levels that follow the step-by-step filling sequence. In this example, four step-fill sequences are to be performed. The first fractional filling sequence fills the container 12 to about 50% of its volume, as indicated by area 202 , denoted volFrac1 . In this example, the fractional fill volume is equal to 50%, including the remaining volume represented by volLowLev 200. The remaining volume is the volume of the remaining components that were already present in the tank 12 before the start of the step filling method. There may or may not be a remaining volume, as this depends on the user's requirements. In tank 12, the remaining volume is generally of the same composition as one of the components forming the current batch. The second fractional charge fills an additional 25% of the volume of the container, as indicated by region 204, where the volume of the fractional charge is denoted by volFrac2. The volumes of the third and fourth fractional fills, volFrac3 and volFrac4 , represented by regions 206 and 208 , respectively, fill an additional 12.5% of the volume of the container until approximately full, as indicated by arrow 212 .

The step-by-step fill volumes and percentages just described are for example purposes only and they can be modified to desired values to obtain various fill sequences, as will be clear to those skilled in the art. For example, instead of four step-fill sequences, three step-fill sequences may be used, where each step-fill volume sequence may comprise about 33% or one-third of the container volume. For the sake of example only, the ensuing discussion of the step-fill method will use four step-fill sequences. The first sub-fill sequence volFrac1 equals 50% of the total batch volume, the second sub-fill sequence volFrac2 contains 25% of the total batch volume, the third and fourth sub-fill sequences volFrac 3 and volFrac 4 each contain 12.5 % of the total batch volume, as previously described.

Thus, the total batch volume in container 12 is represented by the variable totalVol, which is equal to (volLowLev+volFrac1+volFrac2+volFrac3+volFrac4). totalVol can also be represented by (chem1TotalVol+chem2TotalVol+diwAddedVol). chem1TotalVol represents the total volume of the first component in the batch. chem2TotalVol represents the total volume of the second component in the batch. diwAddedVol represents the volume of the third component (typically deionized water) added to VolLowLev. It should be noted that diwAddedVol represents a third component, typically deionized water, but it could be any other component that is desired to be part of the batch. For clarity of the subsequent examples, the composition of the remaining volume in container 12 is defined to be the same composition as the third component diwAddedVol of the desired batch, so that when diwAddedVol and VolLowLev are combined, the third component can be obtained of the total volume.

The step fill mixing method then begins by filling the container to the first step fill percentage in the sequence. In our embodiment, the first percentage of filling is 50%, as shown in FIG. 2, represented by volFrac1 202. The actual volume of the first component, represented by chem1FracVol, that satisfies the requirements of the current step-fill sequence is then calculated. chem1FracVol is equal to chem1TotalVol·pourUp1Frac, where pourUp1Frac is the stepwise filling percentage of the first filling sequence, which is 50% in this embodiment. chem2FracVol is calculated using a similar formula.

Then, the calculation of the total volume of the first component must be calculated as represented by chem1TotalVol. chem1TotalVol is defined as chem1Ratio·x, where x is an intermediate variable. x is defined as TotalVol÷(chem1Ratio+chem2Ratio+diwRatio). chem1Ratio and chem2Ratio are defined as the volume ratios filled by the first and second components, respectively. diwRatio is the volume ratio filled by the third component.

The third component volume to which VolLowLev is added to obtain totalVol is defined as diwAddedVol, which is equal to (diwRatio·x)-VolLowLev.

The step-by-step mixing method step involves calculating a target amount of a component based on the component's target volume mix ratio and the component's feed concentration. The target amount of one component is expressed as concChem1, which is defined as (chem1Ratio·bulkChem1)÷(chem1Ratio+chem2Ratio+diwRatio). Among them, chem1Ratio, chem2Ratio and diwRatio respectively represent the filling volume ratios of the first, second and third components of the current step-by-step filling sequence. BulkChem1 represents the feed concentration of the first component. Target amounts for the other components are calculated using similar formulas in which the numerators of the above equations are replaced by the proportions and concentrations of the bulk ingredient supplies of the respective components to be calculated. Now that chem1FracVol has been calculated, chem2FracVol and diwFracVol are also calculated as just described.

In the step-by-step filling and mixing method according to an embodiment of the invention, at this point, the first part is poured in by sending a signal to the component supply control device 16 through the controller 26, preparing and providing the chem1FracVol The volume indicated by chem2FracVol is then prepared and delivered, and finally the volume indicated by diwFracVol is prepared and delivered.

Now that the first step charge has been added to container 12, the sequence of subsequent step charges must be calculated and added to container 12. To manipulate the remaining step-by-step loading sequences, ideal chemical fractions such as idealChem1Frac can be calculated. For each component added to vessel 12, an ideal chemical portion can be calculated. For example, idealChem1Frac is defined as (chem1TotalVol·pourUp2Frac), where chem1TotalVol represents the total volume of the first component that meets the requirements of the current step-by-step filling sequence, and pourUp2Frac is the subsequent step-by-step filling percentage in sequence. For example, since this is the second corrected filling sequence, pourUp2Frac is equal to 25% in this embodiment. Other ideal chemical fractions for each component can be calculated by using a similar formula where chem1TotalVol can be replaced by the total volume of the other component to be estimated.

Next, the actual volume of each component that satisfies the current step-fill sequence must be calculated. By way of example, the actual volume of the first component that meets the requirements of the current step-by-step filling sequence is denoted by chem1FracVol, which is defined as (idealChem1Frac · concChem1)÷chem1Val, where chem1Val is the test volume of the first component in the batch Or test concentration. Similar formulas can be used to calculate the actual volumes of other components to be added to the mixture during this step-fill sequence, the theoretical amounts/concentrations of other components, ideal chemical portions, and test amounts/concentrations can be calculated from the above formulas as appropriate. Substitute in part.

The method further includes calculating the difference between the ideal volume and the actual volume of the first component. This is calculated by subtracting chem1FracVol from idealChem1Frac. The same formula is used to calculate the chem2FracDelta of the second component using the actual volume and ideal chemical fraction that meets the requirements of the current step-fill sequence.

A different formula may be used for the actual volume of the third component required to satisfy the current step fill sequence. diwFracVol is equal to (diwAddedVol·pourUp2Frac)+chem1FracDelta+chem2FracDelta, where diwAddedVol is the volume of the third component at its VolLowLev to obtain the total third component volume. As discussed above, this assumes that VolLowLev (which represents the remaining volume of the container) is the same component as the third component. Chem1FracDelta is defined as the difference between the ideal volume and the actual volume of the first component, and chem2FracDelta is defined as the difference between the ideal volume and the actual volume of the second component. Thus, diwFracVol means volumetrically fill the remaining volume for the current step-fill sequence.

As previously stated, diwAddedVol represents the volume of the third component added to VolLowLev to obtain the total volume. diwAddedVol is defined as diwRatio x-VolLowLev, where x is defined as (TotalVol÷(chem1Ratio+chem2Ratio+diwRatio)). If diwFracVol is determined to be negative, diwFracVol is reduced by multiplying the volume of the first component added to the mixture by ((totalVol-VolLowLev)·pourUp2Frac)÷(chem1FracVol+chem2FracVol). The volume of the second component is also reduced by multiplying by the same formula.

It should be noted that the target amount of a component expressed in weight percent can be modified as a function of the specific gravity of each component in the batch. For example, by way of example, concChem1 can be modified as a function of specific gravity by using the following substitution formula: (chem1Ratio.bulkChem1.sGravChem1)÷((chem1Ratio.sGravChem1)+(chem2Ratio.sGravChem2))+(diwRatio.sGravChem3), where, concChem1 is the target concentration of the first component, chem1Ratio is the filling volume ratio of the first component, chem2Ratio is the filling volume ratio of the second component, and diwRatio is the filling volume ratio of the third component. BulkChem1 is the feed concentration of the first component. sGravChem1, sGravChem2, and sGravChem3 represent the specific gravity of the first component, the second component, and the third component, respectively.

It should be noted that the above method can use concentrated bulk chemicals, which typically have concentrations tested in weight percent. Thus, in the above examples, the above-listed formulas and methods for performing step-pack mixes may use weight concentration percentages as test amounts of the desired components in the mix or chemical supply. Alternatively, in other contemplated examples of embodiments of the invention not disclosed herein, percent volume concentration or other concentration test values may be used in some cases, depending on the type of analysis device 14 used.

Then, using the same formula and method as described in the previous example, the subsequent step-by-step filling sequence is calculated to add to the mixture in the container 12.

In one embodiment, the step-pack mixing device, system and method may be used for chemical mixing or mixing of concentrated chemicals used in the production of semiconductor wafers. Thus, in a mixture, one of the components to be mixed may be _NH4OH , _H2O2 or _{H2O .}

By way of example, the above formula can be used to show how the step-pack mixing method can be used. For this example, assume that it is desired to prepare a batch comprising three components. The first two components are named ("First Component") and ("Second Component"). The third component is deionized water, abbreviated ("diw"). For example, assume that the specific gravity of each component is equal to 1. Also for the purposes of this example, it is desirable that the components be mixed together such that a volume ratio of 1:1:100 is obtained, wherein the first component makes up 1 part, represented by the variable chem1Ratio; the second component makes up 1 part, Represented by the variable chem2Ratio; diw constitutes a batch of 100 parts, represented by the variable diwRatio.

For this example, the 10,000 ml tank 12 will be fully charged with the components. In this example, for the sake of clarity, it is assumed that no remaining volume of deionized water is present in the container. Therefore, the variable VolLowLev is equal to zero in all formulas. The total volume of the resulting batch is represented by the variable totalVol, which is equal to (chem1TotalVol+chem2TotalVol+diwAddedVol), where chem1TotalVol is the total volume of the first component of the batch; chem2TotalVol is the total volume of the second component that satisfies the batch requirements. Volume; diwAddedVol is the volume of deionized water added to VolLowLev to meet the batch requirements.

Therefore, the formula for calculating chem1TotalVol is chem1TotalVol=chem1Ratio·(totalVol÷(chem1Ratio+chem2Ratio+diwRatio)), substituting the numbers in our embodiment, chem1TotalVol=1·(10,000÷(1+1+100))=98 milliliters. Using a similar formula, chem2TotalVol=chem2Ratio·(totalVol÷(chem1Ratio+chem2Ratio+diwRatio)), substituting the numbers of this embodiment, chem2TotalVol=1·(10,000÷(1+1+100))=98mL.

diwAddedVol represents the volume of deionized water added to VoILowLev, which has a slightly different formula for calculating the remaining volume of deionized water in tank 12. diwAddedVol=diwRatio·(totalVol÷(chem1Ratio+chem2Ratio+diwRatio))−volLowLev. Substituting the numbers of this embodiment, diwAddedVol=100·(10,000÷(1+1+100))-0=9804ml.

Therefore, the volume of the batch (equal to totalVol) is also equal to (chem1TotalVol+chem2TotalVol+diwAddedVol). Substituting the numbers in this embodiment, totalVol=(98mL+98mL+9804mL)=10,000. 10,000mL is also the volume of the container 12 to be filled, which proves that the calculation is correct.

Then, determine the desired number of step fill sequences to be performed and the relative fill percentages for each load sequence. The number of step fill sequences and their relative fill percentages are at the operator's option. It has been found that for some fields of application the method works well with four filling sequences, wherein the first sequence fills container 12 with 50% of the target volume of the entire mixture, which value is assigned to pourUp1Frac. The second sequence fills container 12 with 25% of the target volume of the entire mixture, a value assigned to pourUp2Frac. The third and fourth sequences fill container 12 with 12.5% of the target volume of the entire mixture, values assigned to pourUp3Frac and pourUp4Frac respectively. Other amounts of the fill sequence and their percentages can be selected by the operator and can be modified experimentally to obtain improved results.

In the next step of the method, the concentration of the bulk supply of each component is determined and added to the mixture. For this example, it is assumed that the bulk supply of the first component has a concentration of 29% by weight; the bulk supply of the second component has a concentration of 30% by weight; in this example, deionized water ( Pure water) assumes 100% purity. These bulk concentrations can be printed on the material data card for the chemical or component.

Then, calculate the target concentrations for the first two components. The step-fill method of this example attempts to formulate the batch to achieve target concentrations of the first and second components. These target concentrations are represented by the variables concChem1, concChem2, where concChem1 represents the target concentration of the first component and concChem2 represents the target concentration of the second component. The target concentration of deionized water is generally not calculated, ie, when the first two components are added to the mixture, deionized water is usually used to fill the remaining volume of the step charge. It should be noted that concentrations can be measured as amounts or percentages by weight or volume, either of which can be used in the formula.

Then, the variable concChem1 is calculated by the following formula, ie concChem1=(chem1Ratio·bulkChem1)÷(chem1Ratio+chem2Ratio+chem3Ratio). The variable concChem2 is then calculated by the formula, conceChem2=(chem2Ratio·bulkChem2)÷(chem1Ratio+chem2Ratio+chem3Ratio). Therefore, substituting the numbers of our example, concChem1=(1·29%)÷(1+1+100)=0.284%, concChem2=(1·30%)÷(1+1+102)=0.294%. It should be noted that the specific gravity of each component is not factored into this equation and each component is assumed to have a specific gravity of 1.

In this embodiment, the next step of the method is to calculate the theoretical volume of each component added to the tank 12 in the first step-by-step filling sequence, wherein, at this step, chem1FracVol represents the The actual volume of the first component; chem2FracVol indicates the actual volume of the second component that meets the current or first step-by-step filling sequence; diwFracVol indicates the actual volume of deionized water that meets the current or first step-by-step filling sequence.

To calculate chem1FracVol, the following equation is used: chem1FracVol=chem1TotalVol·pourUp1Frac. Substituting the figures of this example, chem1FracVol=98mL·50%=49ml. chem2FracVol=chem2TotalVol·pourUp1Frac, substituting the number of this embodiment, chem2FracVol=98mL·50%=49ml. Finally, diwFracVol = diwAddedVol. pourUp1Frac. Substituting the figures of this example, diwFracVol=9804mL·50%=4902mL.

The method of this embodiment is best illustrated as step 28 in FIG. 3. For a first step filling sequence, components are added to container 12 to fill a portion of the entire volume of the container. In this example, container 12 is filled with 49 mL of the first component, 49 mL of the second component, and 4902 mL of deionized water. The first step-by-step loading sequence is now complete.

Depending on what type of component feed control device is used, controller 26 may actuate feed control device 16 to dispense the required amount of each component with a suitable device such as a pump or gravity feed dispensing device, as a flow controller or otherwise. point. For a pump, for example, the number of pump strokes can typically be calculated by the controller 12, and for a gravity feed dispensing device, the dispensing time can generally be calculated by the controller 12.

The next step 30 of the method calls for determining the amount/concentration of each component in the mixture. Analysis device 14 may be used for this purpose. For this example, it is assumed that the analysis device 14 can measure the amount of each component in the mixture, which is expressed in weight percent, which is why the target amount/concentration of each component is calculated in weight percent. For this example, assume that the measured test amount of the first component is 0.210% by weight, which is assigned to the variable chem1Val; the test amount of the second component is measured as 0.294% by weight, which is assigned to The variable chem2Val.

As shown in Figure 3 step 32 in the disclosed embodiment of the method, the second and all subsequent step-by-step loading sequences are prepared, in this embodiment requiring calculation of the target amount/concentration of each component in the mixture versus Amount/concentration ratio tested. In step 34 of this embodiment, the next amount of each component is calculated by multiplying the target amount by the ratio of the components calculated in step 32 to determine the corrected amount. Corrected amounts of each component are then added to the mixture.

To accomplish this calculation, the method of this embodiment involves calculating a series of variables idealChem1Frac, idealChem2Frac, which are intermediate variables. From this one finally obtains chem1FracVol, chem2FracVol and diwFracVol, which quantities represent the corrected volumes of the components that should be added to the mixture to correct the amounts/concentrations of the individual components of the current step-fill sequence in the mixture. Therefore, the variable idealChem1Frac is defined equal to chem1TotalVol·pourUp2Frac. Using the numbers from this example, idealChem1Frac = 98mL · 25% = 24.5mL. Variable idealChem2Frac = chem2TotalVol. pourUp2Frac. Using the numbers from this example, idealChem2Frac = 98mL · 25% = 24.5mL.

Now, idealChem1Frac and idealChem2Frac have been calculated, and then chem1FracVol and chem2FracVol are calculated, and chem1FracVol is equal to (idealChem1Frac·concChem1)÷chem1Val. Therefore, using the numbers of this example, chem1FracVol=(24.5mL·0.284%)÷0.210%=33.1mL. chem2FracVol is equal to (idealChem2Frac·concChem2)÷chem2Val. Therefore, using the numbers of this example, chem2FracVol = (24.5 mL · 0.294%) ÷ 0.294% = 24.5 mL.

Now, chem1FracVol and chem2FracVol are calculated, then chem1FracDelta and chem2FracDelta are calculated, chem1FracDelta and chem2FracDelta represent the difference between the ideal and actual volumes of the first and second components, respectively. Chem1FracDelta is equal to idealChem1Frac-chem1FracVol, and chem2FracDelta is equal to idealChem2Frac-chem2FracVol. Therefore, using the numbers of this example, chem1FracDelta = 24.5mL - 33.1mL = -8.6mL, chem2FracDelta = 24.5mlL - 24.5mL = 0mL.

In this example, the variable diwFracVol can now be calculated, diwFracVol is equal to (diwAddedVol·pourUp2Frac)+chem1FracDelta+chem2FracDelta. Therefore, substituting the data into this formula, diwFracVol=(9804mL·25%)+-8.6mL+0mL=2442.4mL.

According to an embodiment of the invention, according to this example, having calculated the corrected step-fill volumes for each component of the current step-fill sequence, they are added to the mixture according to steps 36 and 38 shown in FIG. 3 . For example, for the current step-fill sequence, 33.1 mL of the first component is added to the mixture, 24.5 mL of the second component is added to the mixture, and 2442.4 mL of deionized water is also added to the mixture.

It should be noted that if diwFracVol is less than zero, chem1FracVol and chem2FracVol will exceed the volume of the current step-fill sequence. In this case, reduce the chem1FracVol and chem2FracVol values to provide the correct fraction volume for the fill. Each variable is reduced by multiplying itself by the following fraction, ((totalVol-volLowLev)·pourUp2Frac)÷(chem1FracVol+chem2FracVol).

Step 42, shown in Figure 3, determines whether the container is filled with the desired amount of the entire batch. In this embodiment, filling the entire batch of the desired amount will occur when all of the step fill sequence is complete. If not, the next step in the filling sequence begins at step 30 . The method ends at step 44 if all of the step-by-step filling sequences are complete.

Referring to Figures 4 and 5, another embodiment of the present invention is shown which includes a step-by-step priming method and incorporates self-diagnostics. The method of this embodiment starts at step 46, as shown in FIG. 4 . The stored custom parameter values are collected by the controller 12 for subsequent use of these parameters within the step-by-step filling method. These custom parameter values can include the number of step fill sequences to be performed and the relative fill volume percentages. Custom parameter values may also include information such as concentration information on bulk components to be added to the mixture.

The next step in the method, shown as step 50, is to calculate the appropriate volumes of the first fill sequence components to add to the mixture. These components are then added to the mixture. For the first step-fill sequence, feedback from an analytical device such as analytical device 14 provides the amount (in weight percent concentration or volume percent concentration or otherwise) of each component of the mixture stored in tank 12 . A decision is then made whether the method is within the first sub-fill sequence or the second sub-fill sequence. If this is correct, self-diagnosis begins.

As shown in FIG. 5 , self-diagnosis begins at step 58 . The method of this embodiment then evaluates whether the first step-fill sequence is complete. If it is complete, then it is determined whether the first partial fill sequence increment value has been stored. The first step-by-step filling sequence increment value includes deviations between theoretical volumes that should be dispensed of components added to the mixture, such as revised volumes of components that may be added to the mixture due to deviations detected by the analysis device 14 .

If those step fill increment values are not stored, the controller 26 stores those step fill increment values. The method implemented by controller 26 then makes a decision at diamond 66 (shown in FIG. 5 ) to determine whether the second step-fill sequence is complete. If not, the self-diagnostic method terminates at step 74 and the method returns to 76 of the method shown in FIG. 4 . If the second step-by-step fill sequence has been completed, then proceed to step 68, where the second step-by-step fill increment value is obtained, and then the difference between the first step-by-step fill increment value and the second step-by-step fill increment can be calculated. the difference between the values.

As indicated by diamond 70, according to this embodiment, if any second step fill increment value is higher than or equal to the first step fill increment value, then proceed to step 72, which stops the fill sequence and displays an error message. This result occurs when the staged charge method is unable to correct for any deviations in component concentrations or amounts between the first staged charge sequence and the second staged charge sequence. In other words, if a deviation or incremental value is found in any component of the first fractional fill sequence, a corrected partial charge of the component is added to the second fractional fill sequence. Suppose it is found that the deviation or incremental value of any component does not decrease between the first and second step-fill sequences. If so, the step-fill method is doomed to fail to accomplish the desired batch.

Get back to judging frame 70 among the accompanying drawings 5, if any second step-by-step filling incremental value is not greater than or equal to the first step-by-step filling incremental value, then self-diagnosis method terminates in step 74, returns to as shown in Figure 4 76 in the step-by-step filling method.

Referring to FIG. 4, decision block 78 evaluates whether the mixed components are correct. In other words, the analysis device 14 analyzes the amount, weight percent concentration, volume percent concentration, or others of the chemical components based on the sample in the mixture. If they are inaccurate, an error correction for the subsequent step-by-step filling sequence (as previously described) is calculated, performed in steps 80 and 82 . If the mixed components are accurate, the method immediately passes to step 82 where the volume of each component of the subsequent step fill sequence is then calculated without applying any error correction.

The method of this embodiment (shown in FIG. 4 ) then proceeds to decision block 84 to determine whether the fourth sub-step is complete. It should be appreciated that if the stored custom parameter values in step 48 require less than or greater than four step-fill sequences, then decision block 84 evaluates whether all desired step-fill sequences have been completed.

If the fourth or final partial charge has been completed, the method of this embodiment ends at step 86 where closed loop control of the mixture in tank 12 can begin.

With respect to the step-fill mixing apparatus of the embodiment disclosed in more detail in FIG. 1, a pneumatically operated pump 88 may be used to recirculate the components in tank 12 to obtain uniformity of the mixture. Pump 88 is operatively connected to a source of high pressure air through a solenoid valve. Running the pump 88 may be pneumatically operated to minimize any risk of explosion or fire due to the flow of flammable compounds and components through the pump 88 . The operating pump 88 is fluidly connected to the tank 12 by a conduit 90 . Service drain valve 92 may be in the form of a manual valve for manually operating drain from conduit 90 .

In the recirculation line of the fractional charge mixing device 10 , a filter 96 is in-line connected to the pump 88 and a conduit 98 connects the pump 88 to the filter 96 . Pneumatic three-way valve 102 is connected to the recirculation line between pump 88 and filter 96 through conduit 98, allowing deionized water to enter conduit 98 from a high-pressure deionized water source for the purpose of thoroughly cleaning the step-pack mixing device 10.

Three-way valve 100 is in-line connected to valve 102 for venting between batches. The valve 104 is also connected to the valve 102 by a pipeline, allowing high-pressure nitrogen to enter the mixing device 10 for step-by-step charging. Three-way valve 106, connected fluidly downstream of filter 96, selectively allows the components stored in tank 12 to pass through conduit 124 to a process chamber (not shown) utilizing the batch.

Conduit 108 fluidly connects filter 96 to valve 106 , which may be a solenoid valve, and to analytical pump 112 , which allows high pressure air to drive analytical pump 112 . Conduit 114 is fluidly connected between conduit 108 and pump 112 to recirculate the mixture in tank 12 .

Analyzer or analysis device 14 is fluidically connected to the output of pump 112 via conduit 116 . Analyzer 14 may be a high precision chemical concentration monitor. An example of such a device is the SC-1 monitor (marketing model No. CS-131) produced by HORIBA. Analytical device or analyzer 14 is fluidically connected to bypass recirculation conduit 120 via conduit 118 and to valve 106 so the mixture recirculates through analyzer 14 and bypass conduit 120 until outlet valve 106 passes conduit 124 Batch delivery begins and the mixture is recycled to manifold 24 .

Manifold 24 is fluidly connected to component supply control means, generally designated 16 , by three conduits 132 , 134 and 136 . The component feed control unit 16 includes three separate component control units 126 , 128 and 130 . Each control device is capable of accurately dispensing components of a bulk supply (not shown) to manifold 24 . Composition control devices 126, 128 and 130 are each independently fed by composition supply lines 18, 20 and 22, respectively. Manifold 24 is fluidly connected to tank 12 by conduit 122 .

The composition control devices 126, 128, 130 may be any number of control devices such as pumps, gravity feed systems, flow controllers, or others.

Heater 150 heats the components within tank 12 . Tank temperature controller 170 regulates heater 150 to control the temperature of the mixture in tank 12 . Tank temperature controller 170 tests the temperature of the mixture in tank 12 via temperature probe 146 .

The component supply control device 16 and its respective component control devices 126, 128 and 130 are controlled by the digital output of the controller 26 through the cable 188. When it is desired to use a distributed network, the controller 26 can be set to communicate with the host through the cable 186. 168 communication connection, or directly through a host controller (not shown).

In operation, referring to FIG. 1 , the controller 26 accepts from the host computer a series of recipe parameters describing the desired amounts of each component to be mixed together in the tank 12 . Controller 26 then proceeds with the first step-by-step filling sequence, as previously described. Controller 26 communicates instructions to component feed control 16 to dispense the appropriate amounts of components of the first fractional charge. When this occurs, component control devices 126, 128, and 130 begin to accurately dispense components from their respective bulk component supplies (not shown) via conduits 18, 20, and 22, respectively. Each component is then dispensed into manifold 24 via conduits 132 , 134 and 136 . The components are partially mixed in manifold 24 and then supplied to tank 12 via conduit 122 . The analyzer 14 is capable of testing the amount/concentration of each chemical component in the mixture stored in the tank 12 after the first step filling sequence is completed.

To accomplish this, pump 88 drives recirculation of the mixture from tank 12 via air valve 94 , which causes the mixture stored in tank 12 to flow through conduits 90 and 98 , through filter 96 and through conduit 108 . During this operation, service drain valve 92 is closed as well as drain valves 100, 102, 104, and valve 106 is also closed. The mixture in tank 12 then continues through bypass conduit 120 , manifold 24 , and back into tank 12 . The recycle flow of the mixture is generally indicated by curved arrow 144 . In this regard, the mixture stored in tank 12 is recirculated through the various conduits, mixing the mixture to produce a more homogeneous mixture, before the assay device 14 tests its concentration. Analytical pump 112 is then activated by air valve 110, which pumps a portion of the mixture from conduit 108 to flow through conduit 114, pump 112, and analytical device 14, where the concentration of the mixture can be tested. The mixture then exits analysis device 14 via conduit 118 , flows through manifold 24 , and enters tank 12 via conduit 122 .

The same general procedure (as just described) is repeated for the subsequent step-wise filling sequence. In this embodiment, the run pump 88 and the analysis pump 112 are both deactivated via their respective valves 94 and 110 until the subsequent step filling sequence is performed, although for other applications they may not be deactivated. After completing all of the step fill sequences or at other times, tank temperature controller 170 may cause heater 150 to heat the mixture to a predetermined temperature. For certain mixtures, this may be required for subsequent use in the production process or for other processes or purposes.

After all the step-by-step filling sequences have been completed, it may be desirable for certain applications to transfer the mixture stored in tank 12 to a process chamber (not shown). This can be done by first ensuring that the service drain valve 92 is closed. The discharge line 100 is closed, the DI flush valve 102 is closed, and the nitrogen valve 104 is also closed. However, in this step, valve 106 is now open. The operating pump 88 is then operated through valve 94 which pumps the mixture in tank 12 through conduit 90 , pump 88 , conduit 98 , filter 96 , to conduit 108 . With valve 106 now open, the mixture flows through valve 106, conduit 124 where it can be delivered to a process chamber or other destination.

Recycle drain three-way valve 140 is disposed between conduits 138 and 142 so that the recirculated mixture can be recovered into tank 12 through conduits 138 and 142 and through valve 140 when recovery drain valve 140 is open. It should be noted that during all other operations of the step charge mixing system 10, the recovery drain valve 140 is normally closed.

During operation, the controller 26 communicates with the bath temperature controller 170 via a series of communication lines 160 under the RS-485 communication protocol. Likewise, controller 26 may also communicate with component feed control 16 and its respective component controls 126, 128, and 130 via a digital serial line or via an analog signal source if desired. Controller 26 may communicate with host computer 168 via another serial connection 186 .

Referring to accompanying drawing 6 to illustrate controller 26 in more detail, controller 164 includes controller package 180, and it includes multiple digital input terminal, digital output terminal, serial port, A/D channel and programmable logic controller bus (PLC BUS). An example of such a controller is the Z-World controller model PK 2600. This Z-World controller includes a BL 1700 controller 183, an OP 7100 display and a touch screen 182. Controller package 180 has a first serial port 182 that provides for RS 232 communication between controller 180 and an analysis device, such as analysis device 14. A second serial port 186 provides for communication between the controller 180 and the host computer 168 or a master controller (not shown). A third serial port 158 is also provided on the controller pack 180 to provide RS-485 communication with the bath temperature controller 170 (shown in FIG. 1 ). The controller package 180 also includes 16-bit digital outputs, generally indicated as cables 188 , which are operatively connected to the various pumps and valves of the step-fill mixing device and system 10 , including the component supply control device 16 . The controller package 180 also includes 16 digital inputs, generally indicated at 190 , which input various level sensors, leak detectors, and other digital signals to the controller package 180 . Such a liquid level sensor is shown as sensor 154 in FIG. 1 , which is connected to controller 170 via digital input line 156 .

Also included on the controller package 180 is a PLC bus, generally indicated at 192 . The PLC bus is connected by a ribbon cable from the controller package 180 to connect multiple extension devices such as the expansion IO device 194 , the auxiliary serial output device 208 , and the D/A channel device 199 . The PLC bus provides digital input and output control for the attached devices on these controller packs 180 .

The expansion IO device 194 provides additional outputs that can be used to control additional parts of the step-fill mixing system 10.

The auxiliary serial output accessory 208 is also connected to the PLC bus 192 and provides an additional RS 232 communication port for data entry and interaction, primarily for monitoring and software development. The RS 232 communication port, generally indicated at 210, can also be connected to a logger 212 to record and monitor operations on the controller pack 180. Through this RS 232 communication port 210, software for the controller package 180 can also be loaded (if desired).

A D/A accessory 199 is additionally connected to the PLC bus 192 to provide analog output signals to control various components on the step-fill mixer or system 10 (shown in FIG. 1 ). The components that may be controlled by D/A accessory 199 may be component feed controls 126, 128 or 130, or pumps 88 and 114. Optionally, the TAKVTOI accessory can be operatively connected to the D/A accessory to convert the analog voltage output signal from the accessory 199 into a plurality of current signals. These current signals generated by the TAKVTOI accessory 201 can be used to drive various metering pumps that are part of the step-fill mixing device and system 10 .

The controller package 180 also includes eight 12-bit A/D channels to monitor various information from the step-fill mixing system 10. For example, a thermocouple such as thermocouple 146 (FIG. 1) can be connected to an A/D channel 204 so the controller package 180 can monitor the temperature of the mixture. In addition, the A/D channel can also monitor various flow controllers or metering pumps, which can be part of the general step-fill mixing system 10.

The step-by-step recipe or method can be loaded into the controller package 180 in software form, via a suitable storage medium such as an optical disc 206, where it contains the step-by-step recipe or method, or via the RS 232 communication port 210.

While the embodiments of the present invention disclosed herein have been specifically shown and described with reference to specific embodiments thereof, those skilled in the art should appreciate that various modifications can be made without departing from the true spirit and scope of the present invention. Changes in form and detail.

Claims (29)

1. method of preparing batch of material, it comprises:

Steps A: for the batch of material of being wanted, at least two kinds of components are added container to sizing, to the part of entire container volume;

Step B: the amount of determining each component in the container;

Step C: calculate the aim parameter of at least a component and the ratio of the current amount of being measured:

Step D: multiply by described ratio by aim parameter,, calculate the next one amount of at least a component to determine correcting value with this component;

Step e: the component of correcting value is added in the potpourri of container;

Step F: add some other components, the ratio of adjusting each component is to the target prescription; And

Step G: repeating step B is to step F, up to the batch of material of the container filling amount of wanting.

2. the method for claim 1, wherein described method comprises the substep of the being wanted filling sequence of determining some substep fills to be operated further.

3. method as claimed in claim 2, wherein, steps A comprises that further filing of containers loads number percent to first substep in the sequence, and each repetitive cycling from step B to step G comprises that further filing of containers to the substep subsequently the sequence loads number percent.

4. method as claimed in claim 3, wherein, filing of containers loads number percent to first substep in the sequence and comprises totalVol, and it comprises (chem1TotalVol+chem2TotalVol+diwAddedVol), wherein

Chem1TotalVol is the cumulative volume of first component;

Chem2TotalVol is the cumulative volume of second component;

VolLowLev is the residual volume in the container;

TotalVol is the cumulative volume of this batch of material; And

DiwAddedVol is for adding the volume of VolLowLev with the 3rd component of acquisition TotalVol.

5. method as claimed in claim 4, wherein, chem1FracVol comprises (chem1TotalVolpourUp1Frac), wherein,

Chem1FracVol is the actual volume that satisfies first component of current substep filling sequence; And

PourUp1Frac is the substep filling number percent of the first filling sequence.

6. method as claimed in claim 5, wherein, chem1TotalVol comprises (chem1Ratiox), wherein, x comprises (totalVol ÷ (chem1Ratio+chem2Ratio+diwRatio)), and wherein diwAddedVol comprises (diwRatiox)-VolLowLev, wherein

Chem1Ratio is the admission space ratio of first component of current substep filling sequence;

Chem2Ratio is the admission space ratio of second component of current substep filling sequence;

DiwRatio is the admission space ratio of the 3rd component of current substep filling sequence;

DiwAddedVol is for adding the volume of VolLowLev with the 3rd component of acquisition TotalVol volume; And

X is an intermediate variable.

7. the method for claim 1, wherein described method comprises the amount of determining in the container each component, that test with percentage by weight further in step B.

8. the method for claim 1, wherein described method comprises definite target volume mixing ratio that will add the component of container further.

9. method as claimed in claim 8, wherein, each component that adds container has known supply concentration.

10. method as claimed in claim 9, wherein, described method comprises the aim parameter that calculates a certain component based on the supply concentration of the target volume mixing ratio of this component and component further.

11. method as claimed in claim 10, wherein, described calculating comprises concChem1, and it comprises (chem1RatiobulkChem1) ÷ (chem1Ratio+chem2Ratio+diwRatio), wherein

Chem1Ratio is the admission space ratio of first component of current substep filling sequence;

Chem2Ratio is the admission space ratio of second component of current substep filling sequence;

DiwRatio is the admission space ratio of the 3rd component of current substep filling sequence; And

BulkChem1 is that first component as expressed in weight percent is supplied with concentration; And

ConcChem1 is the aim parameter of first component.

12. method as claimed in claim 10, wherein, described method comprises the function that the aim parameter of a certain component is revised as the proportion of each component in the batch of material further.

13. method as claimed in claim 12, wherein, described calculating comprises concChem1, and it comprises (chem1RatiobulkChem1sGravChem1) ÷ ((chem1RatiosGravChem1)+(chem2RatiosGravChem2))+(diwRatiosGravChem3), wherein

ConcChem1 is the aimed concn of first component;

Chem1Ratio is the admission space ratio of first component;

Chem2Ratio is the admission space ratio of second component

DiwRatio is the admission space ratio of the 3rd component;

BulkChem1 is the supply concentration of first component;

SGravChem1 is the proportion of first component;

SGravChem2 is the proportion of second component; And

SGravChem3 is the proportion of the 3rd component.

14. method as claimed in claim 3, wherein, filing of containers comprises calculating idealChem1Frac to the substep filling number percent subsequently in the sequence, and it comprises (chem1TotalVolpourUp2Frac), wherein

IdealChem1Frac is for satisfying the volume of ideal that substep loads first component that requires;

Chem1TotalVol is the cumulative volume that satisfies first component of current substep filling sequence requirement;

PourUp2Frac is that the substep subsequently in the sequence loads number percent.

15. method as claimed in claim 14, wherein, described filling comprises further calculates chem1FracVol, and it comprises (idealChem1FracconcChem1) ÷ chem1Val, wherein

Chem1Val is the test volume of first component in the batch of material;

Chem1FracVol is the actual volume that satisfies first component of current substep filling series requirement; And

ConcChem1 is the aimed concn of first component.

16. method as claimed in claim 15, wherein, described filling comprises further calculates Chem1FracDelta, and it comprises (idealChem1Frac-chem1FracVol), wherein

Chem1FracDelta is satisfy the volume of ideal of first component that current substep filling sequence requires and actual volume poor.

17. method as claimed in claim 14, wherein, described filling comprises further calculates diwFracVol, and it comprises (diwAddedVolpourUp2Frac)+chem1FracDelta+chem2FracDelta, wherein

DiwFracVol is the actual volume that satisfies the 3rd component of current substep filling sequence requirement;

VolLowLev is the residual volume in the container;

DiwAddedVol is for adding the volume of VolLowLev with the 3rd component of acquisition cumulative volume;

Chem1FracDelta is satisfy the volume of ideal of first component that current substep filling sequence requires and actual volume poor;

Chem2FracDelta is satisfy the volume of ideal of second component that current substep filling sequence requires and actual volume poor.

18. method as claimed in claim 17, wherein, described filling comprises further calculates diwAddedVol, and it comprises (diwRatiox)-VolLowLev, and wherein, x is (totalVol ÷ (chem1Ratio+chem2Ratio+diwRatio)), wherein

Chem1Ratio is the admission space ratio of first component;

Chem2Ratio is the admission space ratio of second component;

DiwRatio is the admission space ratio of the 3rd component;

VolLowLev is the residual volume of the 3rd component in the container;

TotalVol is the cumulative volume of batch of material; And

X is an intermediate variable.

19. method as claimed in claim 17, wherein, described method comprises further determines whether diwFracVol is negative, if diwFracVol is negative, then multiply by ((totalVol-VolLowLev) pourUp2Frac) ÷ (chem1FracVol+chem2FracVol) by the first component volume that current substep filling sequence is added, the volume of first component is reduced, wherein

TotalVol is the cumulative volume of batch of material;

PourUp2Frac is the substep filling number percent of current substep filling sequence;

Chem1FracVol is the actual volume that satisfies first component of current substep filling sequence requirement; And

Chem2FracVol is the actual volume that satisfies second component of current substep filling series requirement.

20. the method for claim 1, wherein described method comprises the aim parameter of at least a component and the current ratio and the previous ratio of measuring of determined amount further, wherein, if current ratio is higher than previous ratio, signal then gives the alarm.

21. the method for claim 1, wherein the amount of each component is determined by absorption spectromtry.

22. the method for claim 1, wherein one of them component is NH ₄OH.

23. the method for claim 1, wherein one of them component is H ₂O ₂

24. the method for claim 1, wherein one of them component is H ₂O.

25. a computer-readable media stores the computer executable instructions that is used to carry out following method on it, described method comprises:

Steps A: for the batch of material of being wanted, at least two kinds of components are added container to sizing, to the part of entire container volume;

Step B: the amount of determining each component in the container;

Step C: calculate the aim parameter of at least a component and the ratio of determined current amount:

Step D: multiply by described ratio by aim parameter,, calculate the next one amount of at least a component to determine correcting value with this component;

Step e: in the potpourri in the component adding container of correcting value;

Step F: add some other components, the ratio of adjusting each component is to the target prescription; And

Step G: repeating step B is to step F, up to the batch of material of the container filling amount of wanting.

26. a device that is used to prepare batch of material, it comprises:

Groove;

At least two chemicals distributors, each chemicals distributor all have ground import and outlet, and each import is supplied with chemicals and is connected, and each outlet is connected with described groove;

Analytical equipment is used to test the amount of one or more components, and described analytical equipment is connected with described groove;

Controller is connected, carries out following steps with described chemicals distributor with analytical equipment:

Steps A: for the batch of material of being wanted, controller make the chemicals distributor will at least two kinds components add container to sizing, to the part of entire container volume;

Step B: controller is used for the amount of each component of definite container;

Step C: controller is used to calculate the aim parameter of at least a component and the ratio of determined current amount:

Step D: controller multiply by described ratio by the aim parameter with this component, to determine correcting value, calculates the next one amount of at least a component;

Step e: controller is used for the component of this correcting value is added in the potpourri of container;

Step F: controller is used for some other components are added, with the ratio of adjusting each component to the target prescription; And

Step G: controller is used for repeating step B to step F, up to the batch of material of the container filling amount of wanting.

27. a system that is used to prepare batch of material, it comprises:

Steps A: for the batch of material of being wanted, at least two kinds of components are added to the sizing container, arrive the unit of the part of entire container volume;

Step B: the unit of amount that is used for determining each component of container;

Step C: be used to calculate the aim parameter of at least a component and the unit of the ratio of determined current amount:

Step D: multiply by described ratio by aim parameter,, calculate the unit of the next one amount of at least a component to determine correcting value with this component;

Step e: with the unit in the potpourri in the component adding container of this correcting value;

Step F: some other components are added with the ratio of adjusting each component to unit that target is filled a prescription; And

Step G: repeating step B is to the unit of step F up to the batch of material of the container filling amount of wanting.

28. a method is used chemicals control device and a series of substep filling sequence, in container preparation the batch of material of the amount of wanting component, described method comprises:

Steps A: read custom parameter values stored, a plurality of substep filling number percents;

Step B: use the defined parameters value that in steps A, is read, calculate the required amount first substep filling, that add each component of the potpourri in the container;

Step C: each component of the required amount that will calculate in step B adds in the potpourri of container;

Step D: read the value of feedback of analytical instrument, be used for the amount of each component of definite potpourri;

Step e: determine whether current substep filling sequence is that first or second substep loads sequence;

Load sequence if it is first or second substep, forward step F to;

Do not load sequence if it is not first or second substep, forward step L to;

Step F: determine that first substep loads sequence and whether finishes;

If first substep loads sequence and finishes, forward step G to;

If first substep loads sequence and do not finish, forward step I to;

Step G: determine that first substep loads increment size and whether stores;

If first substep loads increment size and stores, then forward step I to;

If first substep loads increment size and do not store, then forward step H to;

Step H: storage first substep loads increment size; Forward step I to;

Step I: determine whether the second substep filling is finished;

If the second substep filling is not finished, then forward step L to;

If the second substep filling is finished, then forward step J to;

Step J: obtain second substep and load increment size;

Calculating is loaded the increment size and second increment size that loads step by step between the increment size at first substep;

Determine arbitrary second the substep increment size whether be higher than or equal first the substep increment size;

If arbitrary second substep increment size is higher than or equals the first substep increment size, then forward step K to;

If arbitrary second substep increment size is not higher than or is not equal to the first substep increment size, then forward step L to;

Step K: stop substep and load sequence;

Transmit error message;

Step L: the amount that the feedback of comparative analysis instrument and component are wanted;

If the amount that the feedback of analytical instrument and component are wanted is unequal, the error correction of chemistry control device;

Use the error correction of being calculated, calculate the required amount of each component in the potpourri that adds container, that next loads step by step;

Determine whether last substep filling sequence is finished;

If last substep filling sequence is not finished, then forward step e to.

29. a computer-readable media, it stores the computer executable instructions that is used to operate following method, described method with Chemical Control device and a series of substep filling sequence in container, prepare the batch of material of the amount of wanting component, it comprises:

Steps A: read custom parameter values stored, a plurality of substep filling number percents;

Step B: use the defined parameters value that in steps A, is read, calculate the required amount of each component in the potpourri first substep filling, that add container;

Step C: each component of the required amount that will calculate in step B adds in the potpourri of container;

Step D: read the value of feedback of analytical instrument, be used for the amount of each component of definite potpourri;

Step e: determine that current substep filling sequence is that first or second substep loads sequence;

Load sequence if it is first or second substep, forward step F to;

Do not load sequence if it is not first or second substep, forward step L to;

Step F: determine that first substep loads sequence and whether finishes;

If first substep loads sequence and finishes, forward step G to;

If first substep loads sequence and do not finish, forward step I to;

Step G: determine that first substep loads increment size and whether stores;

If first substep loads increment size and stores, then forward step I to;

If first substep loads increment size and do not store, then forward step H to;

Step H: storage first substep loads increment size;

Forward step I to;

Step I: determine whether the second substep filling is finished;

If the second substep filling is not finished, then forward step L to;

If the second substep filling is finished, then forward step J to;

Step J: obtain second substep and load increment size;

Calculating is loaded the increment size and second increment size that loads step by step between the increment size at first substep;

Determine arbitrary second the substep increment size whether be higher than or equal first the substep increment size;

If arbitrary second substep increment size is higher than or equals the first substep increment size, then forward step K to;

If arbitrary second substep increment size is not higher than or is not equal to the first substep increment size, then forward step L to;

Step K: stop substep and load sequence;

Transmit error message;

Step L: the amount that the feedback of comparative analysis instrument and component are wanted;

If the amount that the feedback of analytical instrument and component are wanted is unequal, the error correction of chemistry control device;

Use the error correction of being calculated, calculate the required amount that adds each component potpourri, that next loads step by step in the container;

Determine whether last substep filling sequence is finished;

If last substep filling sequence is not finished, then forward step e to.

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