CN1994744A - fluid ejection device - Google Patents

Abstract

A fluid ejection device includes a substrate, a flow channel, a nozzle, and a deformation mechanism. The flow channel extends in a first axial direction, and the jet hole is positioned at the tail end of the flow channel. The deformation mechanism comprises a first piezoelectric component and a first elastic component, the first elastic component is arranged on the base material and connected with the first piezoelectric component, and the flow channel penetrates through the deformation mechanism to be connected with the jet orifice. The first elastic component forms at least one part of the inner wall of the flow passage, and the fluid flows through the flow passage and is ejected from the spray hole. When the first piezoelectric component is deformed under the action of an electric field, the first elastic component deforms along with the first piezoelectric component, and the shape of the inner wall of the flow channel is changed.

Description

fluid ejection device

technical field

The present invention relates to a fluid injection device, in particular to a fluid injection device capable of adjusting the size of the nozzle hole, the angle and the velocity of the fluid injection.

Background technique

Due to the increasing sophistication of micro-machining processing technology, the driving method of micro-fluid ejection devices has been transformed from a single technology such as thermal bubble or piezoelectric to a multi-style hybrid structure. Please refer to Fig. 1 at first, disclose an inkjet printing device 1 (Assisted drop-on demand inkjet printer) in former case EP 1116586 A1, it mainly comprises a paddle-shaped member 2 (thermally-actuated paddle), a front substrate 3 (front substrate), a back substrate 4 (back substrate) and a heater 30 (heater). As shown in the figure, the fluid flows through the manifold between the front and rear substrates 3, 4, and sprays droplets D through the nozzle 3' (nozzle), wherein the paddle-shaped member 2 is used to drive the fluid toward the upper nozzle hole 3' The heating device 30 located at the outlet of the nozzle 3' serves as an auxiliary function, so as to make up for the lack of strength of the paddle-shaped member 2.

In addition, another previous US 6536882 B1 (Inkjet printhead having substrate feedthroughs for accommodating conductors) also discloses a similar fluid injection device, which mainly uses a heating device to change the properties of the fluid, thereby controlling the direction offset of the fluid injection ( deflection).

Contents of the invention

The invention provides a fluid injection device, which includes a substrate, a flow channel, a spray hole and a deformation mechanism. The flow channel generally extends toward a first axial direction, and the injection hole is located at the end of the flow channel. The deformation mechanism includes a first piezoelectric component and a first elastic component, the first elastic component is arranged on the base material and connected with the first piezoelectric component, and the flow channel passes through the deformation mechanism and connects with the injection hole. The first elastic member forms at least a part of the inner wall of the flow channel, and the fluid flows through the flow channel and is ejected from the nozzle hole. Wherein, when the first piezoelectric member is deformed by an electric field, the first elastic member deforms along with the first piezoelectric member, thereby changing the shape of the inner wall of the flow channel.

In a preferred embodiment, the first piezoelectric member has a first piezoelectric body and a second piezoelectric body, and the nozzle hole is formed between the first and second piezoelectric bodies. When the second piezoelectric body expands and deforms, the diameter of the nozzle hole shrinks; when the first and second piezoelectric bodies contract and deform, the diameter of the nozzle hole increases.

In a preferred embodiment, the first elastic member has a first elastic body and a second elastic body, respectively connected to the first and second piezoelectric bodies, and the first and second elastic bodies form the flow channel At least a part of the inner wall, when the first piezoelectric body expands and the second piezoelectric body contracts, the inner wall of the flow path formed by the first and second elastic bodies is deflected relative to the first axial direction, so as to change the injection of fluid direction.

In a preferred embodiment, the first piezoelectric member is substantially parallel to a second axis, and the second axis is perpendicular to the first axis, when the inner wall of the flow channel is deflected relative to the first axis , the nozzle hole is offset in the second axial direction.

In a preferred embodiment, the first piezoelectric member is approximately perpendicular to the first axis, and the electric field is approximately parallel to the first axis.

In a preferred embodiment, the first piezoelectric member and the electric field are substantially parallel to a second axis, wherein the second axis is perpendicular to the first axis.

In a preferred embodiment, the first piezoelectric member is embedded in the first elastic member.

In a preferred embodiment, the first piezoelectric member is made of lead zirconate titanate (PZT).

In a preferred embodiment, the first elastic member is made of polymer.

In a preferred embodiment, the fluid injection device includes a plurality of nozzle holes and a plurality of flow channels, in addition, the first piezoelectric member also has a third piezoelectric body, the first elastic member also has a third elastic body, The third elastic body is connected to the third piezoelectric body. Wherein, the nozzle holes are respectively formed between the first, second, and third piezoelectric bodies, the flow channels are respectively located between the first, second, and third elastic bodies, and the flow channels are respectively connected to the the nozzle hole.

The invention also provides a fluid injection device, which includes a substrate, a flow channel, a spray hole and a deformation mechanism. The flow channel generally extends toward a first axial direction, and the injection hole is located at the end of the flow channel. The deformation mechanism includes a first elastic member, a first piezoelectric member, a second elastic member and a second piezoelectric member. The first and second elastic members and the first and second piezoelectric members are stacked on the substrate, wherein the first and second elastic members respectively form a part of the inner wall of the channel, and the fluid flows through the The flow channel is ejected from the nozzle hole. When at least one of the first and second piezoelectric components is deformed by an electric field, at least one of the first and second elastic components is deformed, thereby changing the shape of the flow channel.

In a preferred embodiment, the first elastic member is disposed on the substrate and connected to the first piezoelectric member, and the second elastic member is disposed on the first piezoelectric member and connected to the second piezoelectric member.

In a preferred embodiment, the first piezoelectric member has a first piezoelectric body and a second piezoelectric body, the first elastic member has a first elastic body and a second elastic body, and the above first, The second elastic body is respectively connected to the first and second piezoelectric bodies, and the first and second elastic bodies form at least a part of the inner wall of the flow channel; when the first and second piezoelectric bodies expand and deform, the flow channel and the nozzle The diameter of the hole shrinks, and when the first piezoelectric body expands and the second piezoelectric body contracts, the flow channel is deflected relative to the first axial direction, so as to change the jetting direction of the fluid.

In a preferred embodiment, the second piezoelectric member has a third piezoelectric body and a fourth piezoelectric body, and the nozzle hole is formed between the third and fourth piezoelectric bodies. When the fourth piezoelectric body expands and deforms, the diameter of the nozzle hole shrinks; when the third and fourth piezoelectric bodies contract and deform, the diameter of the nozzle hole increases.

In a preferred embodiment, the second elastic member has a third elastic body and a fourth elastic body, the third elastic body is connected to the first and third piezoelectric bodies, and the fourth elastic body is connected to the second, For the fourth piezoelectric body, when the third piezoelectric body expands and the fourth piezoelectric body contracts, the flow channel is deflected relative to the first axial direction, so as to change the jetting direction of the fluid.

In a preferred embodiment, the first piezoelectric member is substantially parallel to a second axis, the second axis is perpendicular to the first axis, and when the flow channel is skewed relative to the first axis, the The spray holes are offset along the second axis.

In a preferred embodiment, the first piezoelectric member is approximately perpendicular to the first axis, and the electric field is approximately parallel to the first axis.

In a preferred embodiment, the first piezoelectric member is embedded in the first elastic member.

In a preferred embodiment, the first piezoelectric member is made of lead zirconate titanate (PZT).

In a preferred embodiment, the first elastic member is made of polymer.

Description of drawings

Fig. 1 represents the schematic diagram of conventional inkjet printing device;

Fig. 2 represents the top view of the first embodiment among the present invention;

Fig. 3 represents the partial sectional view of the first embodiment among the present invention;

Fig. 4A, Fig. 4B, Fig. 5A, Fig. 5B show the schematic diagram of the deformation of the first piezoelectric member in the first embodiment;

Fig. 6A, Fig. 6B represent the schematic diagram of the second embodiment in the present invention;

7A to 7F show schematic diagrams of the third embodiment of the present invention;

Fig. 8 shows the schematic diagram of the fourth embodiment in the present invention;

Figure 9 shows a schematic diagram of a fifth embodiment of the present invention; and

Fig. 10A and Fig. 10B show the top view of the circular nozzle formed by the first piezoelectric member and the first elastic member.

Explanation of main component symbols

Inkjet printing device～1

Paddle member ~ 2

Front Substrate ~ 3

Nozzle ~ 3'

Rear Substrate ~ 4

Heater ~ 30

Droplet ~ D

Fluid Ejector ~ 5, 6, 8, 9

First piezoelectric member ~ 51P, 61P, 71P, 81P, 91P, 10P

First elastic member ~ 51E, 61E, 71E, 81E, 91E, 10E

Outer surface ~50

The first piezoelectric body ~ 51RP, 61RP, 711RP

Second piezoelectric body ~ 51LP, 61LP, 711LP

The third piezoelectric body ~ 61CP, 712RP

Fourth piezoelectric body ~ 712LP

Deformation mechanism ~ 51, 61, 71

Substrate ~ 52, 62, 72

Orifice ~ 53, 63L, 63R, 73, 83, 103

Runner ~ 54, 64L, 64R, 74, 84

Fluid ~ 55, 65, 75, 85

The first elastomer ~ 51RE, 61RE, 711RE

Second elastomer ~ 51LE, 61LE, 712LE

The third elastomer ~ 61CE, 712RE

The fourth elastomer ~ 712LE

Detailed ways

First, please refer to FIG. 2 and FIG. 3 , which respectively represent a top view and a partial cross-sectional view of the first embodiment of the present invention. As shown in FIG. 2, the fluid ejection device 5 in this embodiment has a first piezoelectric member 51P disposed on an outer surface 50 of the fluid ejection device 5. The first piezoelectric member 51P includes a pair of sheet-like The first piezoelectric body 51RP and the second piezoelectric body 51LP have a nozzle hole 53 between the first and second piezoelectric body 51RP, 51LP, the width of the nozzle hole 53 in the X-axis direction is L0, and the fluid can After being driven by a fluid ejection actuator (not shown), it is ejected through the nozzle hole 53 to form ejection droplets.

Please refer to FIG. 3 for the detailed structure of the fluid ejection device 5. The fluid ejection device 5 mainly includes a deformation mechanism 51 and a substrate 52, wherein the deformation mechanism 51 is arranged on the substrate 52 and includes a first piezoelectric member 51P. and a first elastic member 51E. As mentioned above, the first piezoelectric member 51P includes first and second piezoelectric bodies 51RP and 51LP, which can be made of lead zirconate titanate (PZT) piezoelectric material; in addition, the first elastic member 51E includes a first An elastic body 51RE and a second elastic body 51LE can be made of high molecular polymer (polymer). In particular, there is a channel 54 between the first and second elastic bodies 51RE, 51LE, and the channel 54 generally extends toward a first axial direction (Z-axis direction) and passes through the base material 52 and the first elastic member. 51E is further connected to the nozzle hole 53, wherein the first and second elastic bodies 51RE, 51LE constitute part of the inner wall of the flow channel 54, and the fluid 55 can be sprayed through the nozzle hole 53 at the end of the flow channel 54 to form spray droplets.

In this embodiment, the upper and lower surfaces of the first and second piezoelectric bodies 51RP and 51LP are coated with electrode layers (ELECTRODE). When the first and second piezoelectric bodies 51RP and 51LP are subjected to When the electric field in the direction) acts, it will expand or contract in the horizontal direction (X-axis direction), and force the first and second elastic bodies 51RE, 51LE below the first and second piezoelectric bodies 51RP, 51LP to generate out of shape. Next, please refer to FIG. 4A. When the first and second piezoelectric bodies 51RP and 51LP are subjected to an electric field to expand and deform in a second axial direction (X-axis direction), the diameter of the nozzle hole 53 is reduced from the original width L0. is L1, and at the same time, the inner wall of part of the channel 54 formed by the first and second elastic bodies 51RE and 51LE will also produce a linear deformation along with the first and second piezoelectric bodies 51RP and 51LP (as shown in FIG. 4A ). In this case, since the fluid 55 is affected by the shrinkage of the nozzle hole 53 and the flow channel 54, the injection flow rate can be effectively reduced, and the flying speed of the fluid 55 after ejection can be increased at the same time.

Conversely, as shown in FIG. 4B, when the first and second piezoelectric bodies 51RP and 51LP shrink and deform in the X-axis direction, the aperture diameter of the injection hole 53 increases from the original width L0 to L2, and at the same time, the first , The inner wall of the part of the channel 54 formed by the second elastic bodies 51RE, 51LE expands outward. In this case, since the fluid 55 is affected by the enlargement of the nozzle hole 53 and the flow channel 54, the injection flow rate can be effectively increased, and the flight speed of the fluid 55 after ejection can be reduced.

5A and 5B, when the first piezoelectric body 51RP undergoes contraction deformation and the second piezoelectric body 51LP undergoes expansion deformation, the inner wall of part of the flow channel 54 formed by the first and second elastic bodies 51RE and 51LE Deviate to the right (as shown in Figure 5A); on the contrary, when the first piezoelectric body 51RP produces expansion deformation and the second piezoelectric body 51LP produces contraction deformation, the part of the flow channel 54 formed by the elastic bodies 51RE and 51LE The inner wall is deflected to the left (as shown in FIG. 5B ).

As mentioned above, when the direction of the electric field received by the first and second piezoelectric bodies 51RP and 51LP is opposite to produce a situation of expansion and contraction, the direction and shape of the flow channel 54 will be changed, and the position of the nozzle hole 53 will be changed at the same time. Produces a modest offset in the X-axis direction. The above principle can be used to control and adjust the jetting angle of the fluid 55 , wherein when the deformations of the first and second piezoelectric bodies 51RP and 51LP are equal, the diameter of the nozzle hole 53 can remain substantially constant.

Please refer to FIG. 6A again, which shows a schematic view of the second embodiment of the present invention. The fluid ejection device 6 in this embodiment includes a deformation mechanism 61, a substrate 62, a plurality of nozzle holes 63L, 63R, and a plurality of corresponding flow channels 64L, 64R, wherein the deformation mechanism 61 is arranged on the substrate 62, The flow passages 64L, 64R pass through the substrate 62 and the deformation mechanism 61 in sequence, and are respectively connected to the injection holes 63L, 63R. As shown in the figure, the deformation mechanism 61 includes a first piezoelectric member 61P and a first elastic member 61E, wherein the first piezoelectric member 61P includes sheet-shaped first, second, and third piezoelectric bodies 61RP, 61LP. , 61CP, and the first elastic member 61E includes first, second, and third elastic bodies 61RE, 61LE, and 61CE.

In FIG. 6A, the first, second, and third elastic bodies 61RE, 61LE, and 61CE are respectively arranged under the first, second, and third piezoelectric bodies 61RP, 61LP, and 61CP, wherein the first, second, and The upper and lower surfaces of the third piezoelectric bodies 61RP, 61LP, 61CP are coated with electrode layers (ELECTRODE). In particular, when the first, second, and third piezoelectric bodies 61RP, 61LP, and 61CP are subjected to an electric field in the vertical direction (Z-axis direction), they will expand or contract in the horizontal direction (X-axis direction), and then The shapes of the injection holes 63L, 63R and the flow paths 64L, 64R can be changed.

Next, please refer to FIG. 6B. When the third piezoelectric body 61CP and the third elastic body 61CE produce horizontal contraction deformation in the X-axis direction, the first piezoelectric body 61RP on the right side and the first elastic body 61RE correspondingly produce horizontal contraction. deformation, whereby the diameter of the nozzle hole 63R can be increased to increase the injection flow rate of the fluid 65; at the same time, the second piezoelectric body 61LP on the left and the second elastic body 61LE correspondingly produce the same amount of horizontal expansion deformation , whereby the flight direction of the fluid 65 sprayed from the nozzle hole 63L can be changed. Based on the above principles, this embodiment can properly adjust the contours of each nozzle hole and flow channel according to the requirements of more than two different nozzle holes in the fluid injection device, so as to effectively control the volume, flight speed and flight direction of the injected fluid. As for other similar change effects, no further description will be given.

Next, please refer to FIG. 7A , which shows a schematic view of the third embodiment of the present invention. As shown in the figure, the deformation mechanism 71 in this embodiment is formed by overlapping first and second piezoelectric members 711P and 712P and first and second elastic members 711E and 712E. Among them, the first piezoelectric member 711P has first and second piezoelectric bodies 711RP and 711LP, the first elastic member 711E has first and second elastic bodies 711RE and 711LE, and the second piezoelectric member 712P has third and fourth The piezoelectric bodies 712RP, 712LP, and the second elastic member 712E have third and fourth elastic bodies 712RE, 712LE. Among them, the upper and lower surfaces of the piezoelectric bodies 711RP, 711LP, 712RP, and 712LP are respectively coated with electrode layers (ELECTRODE). produce expansion or contraction deformation.

As shown in FIG. 7B, when the first piezoelectric body 711RP undergoes shrinkage deformation and the second piezoelectric body 711LP undergoes expansion deformation, the inner wall of part of the flow channel 74 formed by the first and second elastic bodies 711RE and 711LE faces rightward. deflection, the third piezoelectric body 712RP and the third elastic body 712RE at the upper free end are shifted to the right along with the first piezoelectric body 711RP; similarly, the fourth elastic body 712LE and the fourth elastic body The piezoelectric body 712LP shifts to the right along with the first piezoelectric body 711RP, and makes the position of the nozzle hole 73 also shift to the right.

Next, please refer to FIG. 7C , when the first and second piezoelectric bodies 711RP and 711LP both expand and deform in the X-axis direction, the effect of shrinking the flow channel 74 and the injection hole 73 can be achieved. Similarly, please refer to FIG. 7D and FIG. 7E. In this embodiment, only an electric field can be applied to the third and fourth piezoelectric bodies 712RP and 712LP at the upper free ends. When the third piezoelectric body 712RP shrinks and deforms and When the fourth piezoelectric body 712LP is expanded and deformed, the inner wall of part of the flow channel 74 formed by the third and fourth elastic bodies 712RE and 712LE is deflected to the right (as shown in FIG. 7D ); 3. The fourth piezoelectric body 712RP, 712LP expands and deforms in the X-axis direction, so as to reduce the width of the nozzle hole 73 (as shown in FIG. 7E ).

Next, please refer to FIG. 7F , in this embodiment, an electric field can also be applied to the first and second piezoelectric members 711P, 712P at the same time, so as to change the contours of the flow channel 74 and the injection hole 73 simultaneously. As shown in FIG. 7F , by shrinking and deforming the first piezoelectric body 711RP and expanding and deforming the second piezoelectric body 711LP and the third and fourth piezoelectric bodies 712RP and 712LP at the same time, not only the flow path can be greatly changed The shape of 74, more can reach the purpose of shifting nozzle hole 73 positions and dwindling nozzle hole 73 apertures. In this embodiment, mainly through the two-layer deformation mechanism, the aperture and position of the nozzle hole can be adjusted appropriately according to the needs, and the shape of the flow channel can be changed, thereby controlling the volume, flight speed and flight direction of the jet fluid. Other similar variations will not be described in detail.

Next, please refer to FIG. 8 , which shows a schematic view of the fourth embodiment of the present invention. In the fluid ejection device 8 in this embodiment, more than two sets of first piezoelectric members 81P and first elastic members 81E are superimposed on each other to form a laminated deformation mechanism 81, which can be deformed by stacking The principle of addition increases the variability in jet flow or flight direction.

Please refer to FIG. 9 again, which shows a schematic diagram of a fifth embodiment of the present invention. The fluid ejection device 9 in this embodiment can also adopt the first piezoelectric member 91P whose driving electric field and mechanical deformation are both in the horizontal direction. In particular, the first piezoelectric member 91P is embedded in the first elastic member 91E. Form an embedded composite structure (EMBEDDED COMPOSITE), which can provide higher deformation. However, the shape of the nozzle hole in the present invention is not limited to a rectangle. For example, FIG. 10A and FIG. 10B show the top view of the combination of the first piezoelectric member 10P and the first elastic member 10E. The deformation mechanism of the appearance of the circular nozzle hole 103.

To sum up, the present invention provides a fluid injection device that can change the contour of the nozzle hole by means of a deformation mechanism. At the same time, during the fluid ejection process, the size of the nozzle hole and the flow path can be adjusted to achieve a change in the injection flow rate. , The purpose of jet direction and speed. The present invention can achieve the above effect without changing the properties of the fluid through a heating device, so it can be widely used in general inkjet printing devices, micro-jet propulsion systems, biomedical technology and other systems.

Although the present invention is disclosed above with the described preferred embodiments, it is not intended to limit the present invention. Any person in the industry may make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection shall prevail as defined in the claims.

Claims (20)

1. fluid ejection apparatus comprises:

One base material;

One runner roughly extends axially towards one first;

One spray orifice is positioned at this flow field end; And

One deformation mechanism, comprise one first piezoelectric member and one first elastic component, this first elastic component is arranged on this base material and connects this first piezoelectric member, this runner passes this deformation mechanism and connects this spray orifice, and this first elastic component forms at least a portion of this runner inner wall, and this fluid is flowed through this runner and penetrated by this spray orifice;

Wherein, when this first piezoelectric member is subjected to an electric field action and when being out of shape, this first elastic component is with this first piezoelectric member distortion, and then changes the shape of this runner inner wall.

2. fluid ejection apparatus according to claim 1, it is characterized in that, this first piezoelectric member has one first piezoelectrics and one second piezoelectrics, this spray orifice is formed between these first, second piezoelectrics, when this first, second piezoelectrics dilatancy, the aperture of this spray orifice dwindles, and when this first, second piezoelectrics contraction distortion, the aperture of this spray orifice increases.

3. fluid ejection apparatus according to claim 2, it is characterized in that, this first elastic component has one first elastomer and one second elastomer, connect this first, second piezoelectrics respectively, and this first, second elastomer forms at least a portion of this runner inner wall, when this first piezoelectrics expand and this second piezoelectrics when shrinking, this runner inner wall that is formed by this first, second elastomer is with respect to this first axial deflection, so as to changing the injection direction of this fluid.

4. fluid ejection apparatus according to claim 1, it is characterized in that it is one second axial that this first piezoelectric member is roughly parallel to, this second is axially perpendicular to that this is first axial, when this runner inner wall during with respect to this first axial deflection, this spray orifice second is axially gone up and is produced skew in this.

5. fluid ejection apparatus according to claim 1 is characterized in that, this is first axial for this first piezoelectric member approximate vertical, and this electric field is roughly parallel to, and this is first axial.

6. fluid ejection apparatus according to claim 1 is characterized in that, it is one second axial that this first piezoelectric member and this electric field are roughly parallel to, and this second is axially perpendicular to that this is first axial.

7. fluid ejection apparatus according to claim 1 is characterized in that first piezoelectric member is embedded in first elastic component.

8. fluid ejection apparatus according to claim 1 is characterized in that, this first piezoelectric member is the lead zirconate titanate material.

9. fluid ejection apparatus according to claim 1 is characterized in that, this first elastic component is the high molecular polymer material.

10. fluid ejection apparatus according to claim 1, it is characterized in that, this fluid ejection apparatus comprises a plurality of spray orifices and a plurality of runner, this first piezoelectric member also has one the 3rd piezoelectrics, this first elastic component also has one the 3rd elastomer, the 3rd elastomer connects the 3rd piezoelectrics, described spray orifice is formed at respectively between these first, second, third piezoelectrics, described runner lays respectively between this first, second, third elastomer, and described runner connects described spray orifice respectively.

11. a fluid ejection apparatus comprises:

One base material;

One runner roughly extends axially towards one first;

One spray orifice is positioned at this flow field end; And

One deformation mechanism, comprise one first elastic component, one first piezoelectric member, one second elastic component and one second piezoelectric member, and this first, second elastic component and this first, second piezoelectric member are stacked on this base material, this first, second elastic component forms the part of this runner inner wall respectively, and this fluid is flowed through this runner and penetrated by this spray orifice;

Wherein, when this first, second piezoelectric member at least one of them person be subjected to an electric field action and when being out of shape, this first, second elastic component one of them person at least produces distortion, and then changes the shape of this runner.

12. fluid ejection apparatus according to claim 11 is characterized in that, this first elastic component is arranged on this base material and connects this first piezoelectric member, and this second elastic component is arranged on this first piezoelectric member and connects this second piezoelectric member.

13. fluid ejection apparatus according to claim 12, it is characterized in that, this first piezoelectric member has one first piezoelectrics and one second piezoelectrics, this first elastic component has one first elastomer and one second elastomer, connect respectively this first, second piezoelectrics, and this is first years old, second elastomer forms at least a portion of this runner inner wall, when this first, during the second piezoelectrics dilatancy, the aperture of this runner and this spray orifice dwindles, when this first piezoelectrics expansion and the contraction of this second piezoelectrics, this runner is with respect to this first axial deflection, so as to changing the injection direction of this fluid.

14. fluid ejection apparatus according to claim 13, it is characterized in that, this second piezoelectric member has one the 3rd piezoelectrics and a four piezoelectrics, this spray orifice is formed at the 3rd, between the four piezoelectrics, when the 3rd, during the four piezoelectrics dilatancy, the aperture of this spray orifice dwindles, and when the 3rd, during the four piezoelectrics contraction distortion, the aperture of this spray orifice increases.

15. fluid ejection apparatus according to claim 14, it is characterized in that, this second elastic component has one the 3rd elastomer and one the 4th elastomer, the 3rd elastomer connects this first, the 3rd piezoelectrics, the 4th elastomer connect this second, four piezoelectrics, when expansion of the 3rd piezoelectrics and the contraction of this four piezoelectrics, this runner is with respect to this first axial deflection, so as to changing the injection direction of this fluid.

16. fluid ejection apparatus according to claim 11, it is characterized in that it is one second axial that this first piezoelectric member is roughly parallel to, this second is axially perpendicular to that this is first axial, when this runner during with respect to this first axial deflection, this spray orifice second is axially gone up and is produced skew in this.

17. fluid ejection apparatus according to claim 11 is characterized in that, this is first axial for this first piezoelectric member approximate vertical, and this electric field is roughly parallel to, and this is first axial.

18. fluid ejection apparatus according to claim 11 is characterized in that, first piezoelectric member is embedded in first elastic component.

19. fluid ejection apparatus according to claim 11 is characterized in that, this first piezoelectric member is the lead zirconate titanate material.

20. fluid ejection apparatus according to claim 11 is characterized in that, this first elastic component is the high molecular polymer material.

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