CN1983394A - Microdrive, magnetic head gimbal assembly containing the microdrive, and disk drive unit - Google Patents

Abstract

A micro-actuator for a hga, comprising: a support frame and at least one piezoelectric element; the supporting frame comprises a beam and a spacing body arranged at one end of the beam; the piezoelectric element is arranged on the side part of the beam; wherein the beam generates a deflecting motion when the piezoelectric element is excited. The invention also discloses a magnetic head folding sheet combination and a disk drive unit which are provided with the micro-driver.

Description

Microdrive, magnetic head gimbal assembly containing the microdrive, and disk drive unit

technical field

The present invention relates to a disk drive unit, and more particularly to a microdrive with an improved structure used in a head gimbal assembly of a disk drive unit or other similar devices.

Background technique

A disk drive unit accesses data by placing a magnetic read/write head on a rotating magnetic medium, such as a magnetic disk. Referring to Figures 1a-1b, a typical disk drive includes a drive arm 105 and a set of concentric disks 106 rotating at high speed. The driving arm 105 is used to drive the head gimbal assembly 104 (HGA) on which the magnetic head 202 is installed. The magnetic disk 106 is mounted on the spindle motor 103 and driven to rotate by it. A voice coil motor (voice coil motor, VCM) 102 controls the movement of the driving arm 105, and then drives the head gimbal assembly 104, so that the magnetic head 202 with the read/write sensor moves between the magnetic tracks on the surface of the magnetic disk 106, and then Write data into the disk 106 or read data from the disk 106 .

However, due to inherent errors in the displacement of the head 202 from the voice coil motor 102 and/or manufacturing errors in the drive arm 105 , precise position adjustment of the head 202 cannot be achieved.

In order to solve the above-mentioned problems, an additional driver, such as a piezoelectric micro-driver, is used in the disk drive unit to adjust the displacement of the above-mentioned magnetic head. That is, the piezoelectric micro-actuator corrects the displacement of the magnetic head 202 with a smaller amplitude, so as to compensate for the above-mentioned error produced by the voice coil motor and the manufacturing error of the components in the drive arm. In this way, a smaller track recording width can be obtained, and the TPI value (tracks per inch) of the disk drive unit can be increased (while increasing the surface recording density), thereby greatly increasing the storage capacity of the disk drive unit.

1c-1e, a conventional HGA 104 includes a suspension 904, a magnetic head 202 with a read/write sensor (not shown) mounted on the end of the suspension 904, and a magnetic head mounted on the suspension 904 for fine-tuning. 202 micro-drives 205 for displacement. The suspension member 904 includes a base plate 201 , a flexible member 207 , a load bar 203 and a pivot member 206 assembled together. The HGA 104 is fixed to the driving arm 105 via the mounting hole 101 on the suspension member 904 (refer to FIG. 1 a ). The magnetic head 202 is located between the two side arms 2042, 2044 of the micro-driver 205, and its end is provided with a number of connection contacts (unlabeled), and these connection contacts are connected through a plurality of electrical connection balls 209 (gold ball welding or tin ball welding). way, GBB or SBB) are electrically connected to the outer cantilever cables 108a (suspension trace) located on both sides of the flexible member 207. One end of the flexible member 207 is provided with several connection contacts 107, one end of the connection contacts 107 is connected to the inner and outer cantilever cables 108a, 108b, and the other end is connected to the servo control system (not shown). Piezoelectric sheets 210 are installed on the arms on both sides of the micro-driver 205, and these piezoelectric sheets 210 are electrically connected to the inner cantilever cable 108b located inside the flexible member 207 through a plurality of electrical connection balls 208 (gold ball welding or solder ball welding). connected, and further connected with the connecting contact 107 on the flexible member 207. With the above electrical connection, the servo control system can control the magnetic head 202 and the micro-driver 205 through the inner and outer suspension cables 108a, 108b. The micro-driver 205 is composed of a U-shaped frame 204 and piezoelectric sheets 210 installed on the two side arms 2042 and 2044 of the frame. By applying an appropriate voltage to the piezoelectric sheets 210 on the two side arms 2042, 2044, these piezoelectric sheets 210 shrink or expand, thereby causing the deformation of the frame 204, and the deformation of the frame 204 makes the arms 2042 mounted on the two sides of the frame 204 The magnetic head 202 between , 2044 moves between the magnetic tracks on the surface of the rotating magnetic disk 106 (refer to FIG. 1 a ), thereby realizing fine adjustment of the position of the magnetic head 202 . A piezoelectric sheet 210 is installed on each side arm 2042 , 2044 , one end of the two side arms 2042 , 2044 is connected through the bottom plate 2046 , and the other end is connected to each other through the top plate 2048 . The micro-driver 205 is fixed on the flexure 207 through the bottom plate 2046 , and the top plate 2048 is used to hold the magnetic head 202 . The top plate 2048 forms necks 2048a, 2048b at positions adjacent to the arms 2042, 2048 on both sides. The narrower neck is connected to the side arms 2042,2048.

However, there are many disadvantages in the above-mentioned conventional techniques. First of all, since the microdrive is used to fine-tune the displacement of the magnetic head, it is a very critical component. Its precision plays a decisive role in improving the read and write performance of the disk and increasing the storage capacity of the disk, so it must have very high manufacturing precision. Especially the necks on both sides of the top plate of the micro-driver must have very high manufacturing accuracy, this is due to the smaller the width of the necks 2048a, 2048b, the better the stroke amplitude performance, but the actual manufacturing capacity or tolerance limited, so the manufacturing quality of the critical dimension with high stroke performance is not easy to control. In addition, the width of the neck 2048a, 2048b is too small so that it may break when it is impacted, so its processing and assembly process is complicated and the cost is relatively high. Second, due to the inevitable inherent errors in the processing of the U-shaped frame of this micro-driver, the positions of the arms on both sides cannot be completely consistent, that is, the arms on both sides are not ideally symmetrical to each other. The piezoelectric sheets on the two arms are not ideally symmetrical to each other, so that when a voltage is applied to the piezoelectric sheets, the arms on both sides cannot deform with the same amplitude, so that the magnetic head installed between the two arms cannot achieve precise positioning. Position adjustment; in addition, when the piezoelectric micro-driver is excited, due to the limitation of the U-shaped frame of the micro-driver, the magnetic head will simply move in translation and cannot obtain a relatively large displacement; in addition, in the traditional technology, the The above-mentioned piezoelectric micro-actuator must physically bond the bottom plate of its U-shaped frame to the flexible part of the cantilever with an adhesive such as epoxy glue, so the assembly process is complicated and the cost is high.

Therefore, it is necessary to provide an improved microdrive, an HGA containing the microdrive, and a disk drive unit to overcome the deficiencies of the prior art.

Contents of the invention

The main purpose of the present invention is to provide a micro-driver that is easy to manufacture and assemble, and has a strong ability to adjust the position of the magnetic head.

Another object of the present invention is to provide a magnetic head gimbal assembly and a magnetic disk drive unit including the above-mentioned microdrive, which are more convenient to assemble and have stronger ability to adjust the position of the magnetic head.

To achieve the above object, the present invention provides a micro-driver for head gimbal assembly, comprising: a support frame and at least one piezoelectric element; it is characterized in that the support frame includes a beam and a spacer arranged at one end of the beam; The piezoelectric element is mounted on the side of the beam; wherein the beam generates rotational motion when the piezoelectric element is excited. In the present invention, the micro-drive further includes a magnetic head support plate arranged at the other end of the beam. Wherein, the magnetic head support plate and the spacer are respectively disposed on two opposite sides of the beam.

In one embodiment, piezoelectric elements are installed on both sides of the beam. The beam is made of metal, alloy or ceramic material. The piezoelectric element is a thin film piezoelectric sheet or a ceramic piezoelectric sheet, which may have a multi-layer structure or a single-layer structure.

A magnetic head gimbal assembly of the present invention, comprising: a magnetic head; a micro-driver; and a cantilever carrying the above-mentioned magnetic head and the micro-driver; wherein the micro-driver includes a support frame and at least one piezoelectric element; it is characterized in that the support frame includes a beam and a spacer arranged at one end of the beam; the piezoelectric element is installed on the side of the beam; wherein, the beam generates rotational motion when the piezoelectric element is excited. Wherein, the micro-driver realizes the physical connection between the micro-driver and the cantilever at the same time through the electrical connection between the piezoelectric element on it and the cantilever. The spacer is sandwiched between the cantilever and the piezoelectric element.

A disk drive unit, comprising: a head gimbal assembly; a drive arm connected to the head gimbal assembly; a magnetic disk; a spindle motor for driving the magnetic disk, wherein the head gimbal assembly includes: a magnetic head; a micro drive; and a bearing The cantilever of the magnetic head and the micro-driver; wherein the micro-driver includes a support frame and at least one piezoelectric element; it is characterized in that the support frame includes a beam and a spacer located at one end of the beam; the piezoelectric element is installed on A side portion of the beam; wherein the beam generates rotational motion when the piezoelectric element is excited.

Compared with the prior art, the micro-actuator of the present invention replaces the traditional U-shaped frame with a monolithic or beam-type frame, so that the piezoelectric element can be accurately installed on both sides of the monolithic frame in the form of back-to-back , thereby improving the positional installation accuracy of the piezoelectric element; secondly, the present invention installs the magnetic head at the end of the monolithic frame, so under the same deflection angle, the offset range of the magnetic head is larger, that is, the position adjustment capability of the magnetic head Stronger; in addition, the single-piece frame structure simplifies the manufacturing and assembly process and reduces the cost compared with the U-shaped frame. In addition, the micro-driver realizes the physical connection between the micro-driver and the suspension component at the same time through the electrical connection of the piezoelectric element on the suspension component combined with the magnetic head gimbal. Specifically, the spacer is sandwiched between the cantilever and the piezoelectric element, and since the cantilever and the piezoelectric element are electrically connected, the micro-actuator passes through the spacer A suspension member combined with the head gimbal is physically connected. This eliminates the need for adhesives or epoxies to physically attach the microactuator to the cantilever, simplifying the assembly process and saving costs.

The present invention will become clearer through the following description in conjunction with the accompanying drawings, which are used to explain the embodiments of the present invention.

Description of drawings

Figure 1a is a perspective view of a conventional disk drive.

Fig. 1b is a partially enlarged view of Fig. 1a.

FIG. 1c is a perspective view of a conventional head gimbal assembly.

FIG. 1d is a partial perspective view of the head gimbal assembly shown in FIG. 1c.

FIG. 1e is an exploded perspective view of a conventional microdrive and a magnetic head, for explaining the structure of the conventional microdrive.

FIG. 2 is a perspective view of an embodiment of the HGA of the present invention.

FIG. 2 a is a partial perspective view of the head gimbal assembly shown in FIG. 2 .

FIG. 2b is a side view of the HGA shown in FIG. 2 .

FIG. 2c is an exploded perspective view of the head gimbal assembly shown in FIG. 2a.

FIG. 3a is a perspective view of a microdrive with magnetic heads installed in the HGA shown in FIG. 2a.

Fig. 3b is an exploded perspective view of Fig. 3a.

Fig. 3c is a perspective view of an embodiment of the piezoelectric sheet of the present invention.

Fig. 3d is a diagram of the internal structure of the piezoelectric sheet shown in Fig. 3c.

Fig. 3e shows the case where the magnetic head deviates to the left after an appropriate voltage is applied to the piezoelectric sheet shown in Fig. 3c.

Fig. 3f is a situation where the magnetic head is shifted to the right after a proper voltage is applied to the piezoelectric sheet shown in Fig. 3c.

FIG. 4 is an exploded perspective view of a microdrive including a magnetic head according to another embodiment of the present invention.

Fig. 5a is an exploded perspective view of another embodiment of the micro-actuator of the present invention.

Fig. 5b is a three-dimensional assembled view of the micro-driver shown in Fig. 5a.

Fig. 6 is a perspective view of another embodiment of the micro-driver of the present invention.

Fig. 7 is a perspective view of another embodiment of the micro-actuator of the present invention.

Fig. 8a is a perspective view of an embodiment of the support frame of the micro-actuator of the present invention.

Fig. 8b is a perspective view of another embodiment of the supporting frame of the micro-actuator of the present invention.

FIG. 9 is a perspective view of an embodiment of the disk drive unit of the present invention.

Detailed ways

Several preferred embodiments of the present invention will now be described with reference to the drawings, in which like reference numerals represent like elements. As mentioned above, the present invention provides a micro-actuator for head gimbal assembly, including a support frame and at least one piezoelectric element; wherein the support frame includes a beam and a spacer provided at one end of the beam; the A piezoelectric element is mounted on the side of the beam; wherein the beam generates rotational motion when the piezoelectric element is excited. The micro-actuator of the present invention replaces the traditional U-shaped frame with a monolithic or beam-type frame, so that the piezoelectric element can be accurately installed on both sides of the monolithic frame in the form of back-to-back, thereby improving the piezoelectric element. position installation accuracy; secondly, the present invention installs the magnetic head at the end of the monolithic frame, so under the same deflection angle, the offset range of the magnetic head is larger, that is, the position adjustment capability of the magnetic head is stronger; in addition, the monolithic Compared with the U-shaped frame structure, the U-shaped frame structure simplifies the manufacturing and assembly process and reduces the cost. In addition, the micro-driver realizes the physical connection between the micro-driver and the suspension component at the same time through the electrical connection of the piezoelectric element on the suspension component combined with the magnetic head gimbal. Specifically, the spacer is sandwiched between the cantilever and the piezoelectric element, and since the cantilever and the piezoelectric element are electrically connected, the micro-actuator passes through the spacer A suspension member combined with the head gimbal is physically connected. This eliminates the need for adhesives or epoxies to physically attach the microactuator to the cantilever, simplifying the assembly process and saving costs.

Referring to FIG. 2 , according to an embodiment of the present invention, a HGA 300 includes a magnetic head 302 , a micro-driver 305 and a suspension member 314 for supporting the magnetic head 302 and the micro-driver 305 . The magnetic head 302 includes a read/write sensor (not shown) and a plurality of magnetic head connection contacts (not shown) embedded thereon. The cantilever 314 includes a base plate 301 , a pivot 320 , a flexure 307 and a load beam 303 assembled together. A plurality of outer cantilever cables 308a and inner cantilever cables 308b are disposed on the flexible member 307 . Wherein, one end of the outer cantilever cable 308a is electrically connected to the magnetic head 302, one end of the inner cantilever cable 308b is electrically connected to the micro-driver 305, and the other ends of the inner and outer cantilever cables 308a, 308b are electrically connected to multiple contacts. Point 398 is electrically connected. In addition, the electrical connection contact 398 is connected to an external servo control system (not shown in the figure), so that the servo control system can control the micro motor through the electrical connection contact 398 and the inner and outer cantilever cables 308a, 308b. The driver 305 and the magnetic head 302 are driven and controlled.

2a-2c, the end of the flexible member 307 is provided with a cantilever tongue 3071, forming a number of electrical connection contacts on the cantilever tongue 3071, such as four electrical connection contacts 3072, 3074, 3076 and 3078, these The connection contacts are electrically connected to the inner cantilever cable 308b on the flexure 307 . In addition, the cantilever tongue 3071 is provided with a plurality of electrical connection contacts 392 corresponding to the magnetic head connection contacts, and the electrical connection contacts 392 are electrically connected to the outer cantilever cable 308 a on the flexible member 307 . A protruding point 3032 is formed on the load bar 303 , which abuts against the flexible member 307 . When the magnetic head 302 flies over the surface of the magnetic disk, the bumps 3032 can evenly transmit the load from the load bar 303 to the central area of the magnetic head 302 .

3 a - 3 b are three-dimensional structure diagrams and corresponding exploded views of the micro-drive 305 of the HGA 300 shown in FIG. 2 , both of which contain the magnetic head 302 . As shown in the figure, the micro-driver 305 includes a beam 316 and two piezoelectric elements 310 attached to its two sides. One end of the beam 316 forms a magnetic head support plate 313 for mounting the magnetic head 302 thereon. A spacer 312 is disposed at the other end of the beam 316 , and the magnetic head support plate 313 and the spacer 312 are respectively disposed on two opposite sides of the beam 316 . The crossbeam 316 , the magnetic head support plate 313 and the spacer 312 form a support frame. Wherein, the spacer 312 can be connected to the beam 316 through an adhesive or other connection means. When the piezoelectric element 310 is installed on both sides of the beam 316 , the spacer 312 is pressed under the piezoelectric element 310 . In an embodiment of the present invention, the piezoelectric element 310 may be a thin film piezoelectric sheet or a ceramic piezoelectric sheet. In another embodiment, the piezoelectric sheet can be a single-layer structure or a multi-layer structure. Several electrical connection contacts are formed on each piezoelectric element 310 , such as two electrical connection contacts 3102 , 3104 . The electrical connection contacts 3102, 3104 are provided corresponding to the electrical connection contacts 3072, 3074, 3076 and 3078 on the cantilever tongue 3071 (see FIG. 2c). In the present invention, since the piezoelectric elements 310 are all installed on the crossbeam 316, compared with the traditional technology where the piezoelectric elements are installed on the two side arms of the U-shaped frame, the present invention can effectively avoid the U-shaped frame The position deviation of the arms on both sides caused by the inherent manufacturing error and the position deviation when the piezoelectric element is installed. In this embodiment, each piezoelectric element 310 extends from the spacer 312 to a position close to the magnetic head support plate 313 . In addition, since the present invention installs the magnetic head on the end of the monolithic frame, that is, the magnetic head support plate, the deflection range of the magnetic head is larger at the same deflection angle, that is, the position adjustment capability of the magnetic head is stronger.

Referring to Figures 2a-3b, the micro-driver 305 is physically and electrically connected to the flexure 307: first the spacer 312 of the micro-driver 305 is placed on the cantilever tongue 3071 of the flexure 307, and the The connecting contacts 3102, 3104 of the two piezoelectric elements 310 are aligned with the connecting contacts 3072, 3074, 3076 and 3078 on the cantilever tongue 3071, so that the spacer 312 is clamped between the piezoelectric elements 310 and between the cantilever tongues 3071; then, by means of a plurality of electrical connection balls (gold ball connection or solder ball connection, not shown in the figure), the above-mentioned electrical connection contacts are connected correspondingly, so that through these electrical connection contacts and the flexible member 307 The inner cantilever cable 308b above electrically connects the micro-driver 305 with the above-mentioned external servo control system. Since the micro-actuator 305 of the present invention only includes a beam 316 and a spacer 312, compared with the prior art, it has a simple structure and a small volume. At the same time, since the spacer 312 is sandwiched between the piezoelectric element 310 and the cantilever tongue 3071, when the piezoelectric element 310 and the cantilever tongue 3071 are electrically connected through an electrical connection ball, the The spacer 312 is restricted by the piezoelectric element 310 and the cantilever tongue 3071 and cannot move. In this way, the micro-actuator is physically connected to the flexible member 307 through the spacer 312, so that there is no need to The micro-actuator 305 is physically connected to the flexible member 307 by using an additional connection means such as epoxy glue or the like in the conventional technology. In the present invention, due to the existence of the spacer 312, when the magnetic head 302 and the micro-driver 305 are mounted on the suspension 314, a gap is formed between the suspension 314 and the micro-driver 305 382, the gap 382 allows the micro-driver 305 and the magnetic head 302 mounted on it to move freely when the piezoelectric element 310 is excited.

In the above embodiments, the magnetic head support plate 313 and the beam 316 can be integrally formed, which can simplify the manufacturing process. Of course, the magnetic head support plate 313 can also be a separate structure from the crossbeam 316, and be fixed on the crossbeam 316 by any suitable connection method, such as bonding. In addition, the spacer 312 can also be fixed on the cantilever tongue 3071 of the flexible member 307 , or directly formed on the cantilever tongue 3071 of the flexible member 307 during the manufacturing process of the flexible member 307 . In the present invention, in some cases, the supporting frame may also not provide additional magnetic head support plate 313 , but the magnetic head is directly installed on the beam 316 .

3c-3d show the detailed structure of the piezoelectric element 310, as shown in the figure, each piezoelectric element 310 is provided with two connection contacts 3102, 3104 on one side thereof, which consists of a plurality of piezoelectric layers, such as Three piezoelectric layers 3101 and a plurality of conductive layers 3103, for example, four conductive layers 3103 are stacked in sequence, and these piezoelectric layers 3101 and conductive layers 3103 are rationally configured so that adjacent piezoelectric layers have opposite poles Orientation 607. In addition, the conductive layer 3103 has a common voltage input terminal 601 and a common ground terminal 602 . The working principle of the micro-driver 305 will be described in detail below. As shown in Figures 3e-3f, in this embodiment, the piezoelectric elements 310 located on both sides of the beam 316 have different polarization characteristics. When an appropriate voltage is applied to the two piezoelectric elements 310, one piezoelectric element Electric element 310 shrinks, and another piezoelectric element 310 expands simultaneously, and like this just makes the crossbeam 316 that is connected with piezoelectric element 310 bend, and the magnetic head 302 that is installed on the magnetic head support plate 313 of this crossbeam 316 will follow the bending of this crossbeam 316 simultaneously And deflection occurs, for example, relative to the initial position of the magnetic head 302 deflected by a distance s, so as to realize the fine adjustment of the position of the magnetic head 302, wherein FIG.

FIG. 4 illustrates a microdrive 405 including magnetic head 302 in accordance with another embodiment of the present invention. This embodiment is similar in structure to the above-mentioned embodiment, and the only difference lies in the connection structure of the supporting frame 805 in this embodiment. That is, the spacer 312 and the beam 316 are integrally formed, thereby simplifying the manufacturing and assembly process of the micro-actuator 405 .

Figures 5a-5b illustrate a microdrive 505 described in yet another embodiment of the present invention. This embodiment is similar in structure to the embodiment shown in FIG. 4 , the only difference being that the structure of the support frame 905 in this embodiment is different. That is, the support frame 905 includes a two-piece magnetic head support plate 513 formed by arranging the components 513a and 513b side by side, and the beam 516 of the support frame 905 is formed by laminating two plates.

Figure 6 illustrates a microdrive 605 described in another embodiment of the present invention. This embodiment is similar to the structure of the embodiment shown in Figures 5a-5b, the only difference is that in this embodiment, the length of the piezoelectric sheet 410 is the same as the length of the beam 516, compared to the implementation shown in Figures 5a-5b For example, due to the longer length of the piezoelectric sheet 410 , greater head position adjustment capability can be obtained, thereby improving the overall performance of the disk drive unit.

Figure 7 illustrates a microdrive 705 described in yet another embodiment of the present invention. This embodiment is similar in structure to the embodiment shown in FIGS. 5a-5b , the only difference is that in this embodiment, the beam 516 is only equipped with a piezoelectric sheet 310 on one side thereof. In the case that a single piezoelectric film 310 is sufficient to meet the requirement of adjusting the position of the magnetic head, the use of one piezoelectric film can simplify the manufacturing and assembly process of the micro-driver.

Figures 8a-8b illustrate several similar embodiments of the support frame of the microactuator of the present invention. The support frame 1005 shown in Figure 8a is similar to the support frame 905 shown in Figures 5a-5b, the only difference is that the head support plate 713 of the support frame 1005 is a two-piece structure composed of parts 713a and 713b staggered. and the support frame 1105 shown in Figure 8b is similar to the support frame 905 shown in Figures 5a-5b, the only difference is that its beam 1116 includes two parts arranged longitudinally and connected to each other, that is, the main body 1116a and the main body 1116a for enhancing its strength The reinforcement part 1116b.

In the above-mentioned embodiment of the micro-actuator, the beam can be formed of metal materials such as copper, stainless steel, silicon and other metal materials, or can be formed of alloy materials formed by these metal elements, or can be formed of these metal materials and non-metal materials such as Alloys made of ceramics, or non-metallic materials such as ceramics, as long as they have sufficient rigidity and strength, they can be formed by any suitable forming method, such as lamination.

It can be understood that the HGA of the present invention is not limited to the structure described in the above embodiments, but may have any suitable structure suitable for installing the micro-drive of the present invention.

FIG. 9 shows an exemplary disk drive unit including the HGA 300 of the present invention. According to an embodiment of the present invention, a disk drive unit 400 includes a casing 1209 , a disk 1206 , a spindle motor 1203 , a voice coil motor 1202 , a driving arm 1205 and the HGA 300 of the present invention assembled together. The HGA 300 is installed with the micro-driver of the present invention. Since the structure of the disk drive unit and/or the assembly process using the HGA of the present invention are familiar to those skilled in the art, more detailed structure and assembly descriptions are omitted here. It will be appreciated that disk drive units may contain other head gimbal assemblies constructed in accordance with the present invention.

The present invention has been described above in conjunction with the preferred embodiments, but the present invention is not limited to the above-disclosed embodiments, but should cover various equivalent combinations based on the essence of the present invention.

Claims (14)

1. A microdrive for head flap assembly, comprising: A support frame and at least one piezoelectric element; it is characterized in that the support frame includes a beam and a spacer arranged at one end of the beam; the piezoelectric element is installed on the side of the beam; wherein the beam is The deflection motion is generated when the piezoelectric element is excited. 2. The micro-driver according to claim 1, further comprising a magnetic head support plate disposed at the other end of the beam. 3 . The micro-driver according to claim 2 , wherein the magnetic head support plate and the spacer are respectively disposed on two opposite sides of the beam. 4 . 4. The micro-actuator according to claim 1, characterized in that piezoelectric elements are installed on both sides of the beam. 5. The micro-actuator according to claim 1, wherein the beam is made of metal, alloy or ceramic material. 6. The micro-driver according to claim 1, characterized in that: the piezoelectric element is a thin film piezoelectric sheet or a ceramic piezoelectric sheet. 7. The micro-actuator according to claim 1, wherein the piezoelectric element is a multi-layer structure or a single-layer structure. 8. A magnetic head flap assembly, comprising: magnetic head; microdrives; and The cantilever carrying the above-mentioned magnetic head and micro-driver; wherein The micro-driver includes a support frame and at least one piezoelectric element; it is characterized in that the support frame includes a beam and a spacer arranged at one end of the beam; the piezoelectric element is installed on the side of the beam; wherein, the The beam produces a deflection motion when the piezoelectric element is excited. 9. The head gimbal assembly according to claim 8, characterized in that: the micro-driver realizes the physical connection between the micro-driver and the cantilever through the electrical connection between the piezoelectric element on it and the cantilever. connect. 10. The HGA according to claim 8, wherein the spacer is interposed between the suspension member and the piezoelectric element. 11. The micro-driver according to claim 8, further comprising a magnetic head support plate disposed at the other end of the beam. 12 . The micro-driver according to claim 11 , wherein the magnetic head support plate and the spacer are respectively disposed on two opposite sides of the beam. 13 . 13. The micro-actuator according to claim 8, characterized in that piezoelectric elements are installed on both sides of the beam. 14. A disk drive unit comprising: Magnetic head flap assembly; a drive arm coupled to the head gimbal assembly; disk; A spindle motor for driving the disk, wherein the HGA includes: magnetic head; microdrives; and The cantilever carrying the above-mentioned magnetic head and micro-driver; wherein The micro-driver includes a support frame and at least one piezoelectric element; it is characterized in that the support frame includes a beam and a spacer arranged at one end of the beam; the piezoelectric element is installed on the side of the beam; wherein, the The beam produces a deflection motion when the piezoelectric element is excited.

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