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CN1982921A - inkjet process - Google Patents

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Publication number
CN1982921A
CN1982921A CN 200510131455 CN200510131455A CN1982921A CN 1982921 A CN1982921 A CN 1982921A CN 200510131455 CN200510131455 CN 200510131455 CN 200510131455 A CN200510131455 A CN 200510131455A CN 1982921 A CN1982921 A CN 1982921A
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ink
slurry
jetting process
substrate
heated
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吴泉毅
林宜平
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Chunghwa Picture Tubes Ltd
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Chunghwa Picture Tubes Ltd
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Abstract

An ink jet process. Firstly, a substrate is provided, and then an ink-jet step is carried out to spray a slurry on the surface of the substrate. Then, an in-situ local heating step is performed to directly heat the slurry just sprayed on the substrate surface, thereby controlling the shape and position of the slurry.

Description

喷墨工艺inkjet process

技术领域technical field

本发明涉及一种喷墨工艺,尤其涉及一种利用加热光源的喷墨工艺。The invention relates to an ink-jet process, in particular to an ink-jet process utilizing a heating light source.

背景技术Background technique

随着电子信息产业的蓬勃发展,液晶显示器(liquid crystal display,LCD)的应用范围以及市场需求也不断在扩大,从小型产品,如电子血压计,到便携式信息产品,如个人数字助理(PDA)、笔记本计算机(notebook),以至于未来非常可能商业化的大画面显示器,均可见到液晶显示器被广泛应用于其上。由于液晶显示器的结构非常轻薄短小,同时又具有耗电量少以及无辐射污染的优点,因此被广泛应用在上述民用及信息产品上。With the vigorous development of the electronic information industry, the application range and market demand of liquid crystal display (LCD) are also expanding, from small products, such as electronic blood pressure monitors, to portable information products, such as personal digital assistants (PDA) , notebook computers (notebooks), and large-screen displays that are very likely to be commercialized in the future, it can be seen that liquid crystal displays are widely used thereon. Because the structure of the liquid crystal display is very light, thin and small, and has the advantages of less power consumption and no radiation pollution, it is widely used in the above-mentioned civil and information products.

薄膜晶体管液晶显示器基本上包括一薄膜晶体管阵列基板、一彩色滤光片(color filter)基板、以及填充于薄膜晶体管阵列基板与彩色滤光片基板之间的液晶材料。其中,薄膜晶体管阵列基板还包括一透明基板(transparentsubstrate),例如一玻璃基板,其上具有许多排列成阵列的薄膜晶体管、像素电极(pixel electrode)、位于不同平面的扫描线(scan line)与数据线(data line),并配合以适当的电容、连接焊盘等电子元件,来驱动液晶像素,进而产生丰富亮丽的图像。而彩色滤光片基板则还包括一透明基板,其上具有许多阵列排列的彩色滤光片及一公共电极(common electrode)。A thin film transistor liquid crystal display basically includes a thin film transistor array substrate, a color filter (color filter) substrate, and a liquid crystal material filled between the thin film transistor array substrate and the color filter substrate. Wherein, the thin film transistor array substrate also includes a transparent substrate (transparent substrate), such as a glass substrate, on which there are many thin film transistors arranged in an array, pixel electrodes (pixel electrodes), scan lines (scan lines) and data in different planes. Line (data line), and with appropriate capacitors, connecting pads and other electronic components to drive the liquid crystal pixels, and then produce rich and bright images. The color filter substrate also includes a transparent substrate on which there are many color filters arranged in an array and a common electrode (common electrode).

在现有的薄膜晶体管液晶显示器的制作过程中,一般利用多道光刻工艺(PEP)以形成薄膜晶体管阵列基板所需的像素电极、扫描线以及数据线。而在制作现有彩色滤光片基板则主要包括R、G、B三原色光致抗蚀剂的涂布、间隙对位曝光、以及显影工艺等三步骤。然而,传统进行三原色光致抗蚀剂涂布的涂布工艺的材料使用率只有约1~2%,而且彩色滤光片基板须历经多次光刻、清洗等工艺。此外,薄膜晶体管阵列基板更需配合制作像素电极、扫描线以及数据线的沉积、光刻、蚀刻、清洗等工艺,进而增加透明基板及工艺图案的损伤以及与化学溶剂接触的机会。为了改善此缺点,目前业界开始利用喷墨工艺方法来改善现有的利用多道工艺来制作薄膜晶体管液晶显示器的缺点。In the manufacturing process of the existing thin film transistor liquid crystal display, a multi-channel photolithography process (PEP) is generally used to form pixel electrodes, scanning lines and data lines required by the thin film transistor array substrate. However, the production of the existing color filter substrate mainly includes three steps of R, G, and B three-color photoresist coating, gap alignment exposure, and development process. However, the material utilization rate of the traditional coating process for three-primary-color photoresist coating is only about 1-2%, and the color filter substrate has to go through multiple photolithography, cleaning and other processes. In addition, the thin film transistor array substrate needs to cooperate with the deposition, photolithography, etching, cleaning and other processes for making pixel electrodes, scanning lines and data lines, which will increase the chance of damage to the transparent substrate and process patterns and contact with chemical solvents. In order to improve this shortcoming, the industry has begun to use the inkjet process to improve the shortcoming of the existing multi-pass process for manufacturing thin film transistor liquid crystal displays.

请参照图1,图1为现有喷墨工艺的方法示意图。如图1所示,首先提供一玻璃基板26,例如一彩色滤光片基板,接着利用一喷墨设备20,来在玻璃基板26上制作所需的彩色滤光片图案。其中喷墨设备20包括至少一喷墨头(以下简称喷头)22以及一控制机台(图未示),而玻璃基板26表面则包括一黑色矩阵28,用来提高薄膜晶体管液晶显示器的对比度并遮挡薄膜晶体管阵列基板的薄膜晶体管、扫描线以及数据线的不透光部分。然后依照不同工艺与产品的需求喷涂一彩色光致抗蚀剂浆料24于玻璃基板26表面的黑色矩阵28之间。随后再将玻璃基板26移至一高温退火炉进行一硬化工艺,以硬化涂布于玻璃基板26表面的浆料24。Please refer to FIG. 1 , which is a schematic diagram of a conventional inkjet process. As shown in FIG. 1 , a glass substrate 26 , such as a color filter substrate, is firstly provided, and then an inkjet device 20 is used to fabricate required color filter patterns on the glass substrate 26 . Wherein the inkjet device 20 includes at least one inkjet head (hereinafter referred to as the nozzle) 22 and a control machine (not shown), and the surface of the glass substrate 26 includes a black matrix 28, which is used to improve the contrast of the thin film transistor liquid crystal display and The opaque parts of the thin film transistors, scan lines and data lines of the thin film transistor array substrate are shielded. Then spray a colored photoresist paste 24 between the black matrix 28 on the surface of the glass substrate 26 according to the requirements of different processes and products. Then the glass substrate 26 is moved to a high temperature annealing furnace for a hardening process to harden the paste 24 coated on the surface of the glass substrate 26 .

由上述可见,传统喷墨涂布法主要包括两阶段工艺:首先利用喷头22直接对玻璃基板26进行喷墨涂布,待整面玻璃基板26涂布完后,接着再移至一高温退火炉进行硬化(curing)工艺。因为如欲在玻璃基板26进行喷墨涂布时,便直接利用加热板(hot plate)等大面积加热方式来对玻璃基板26进行热烘烤(hot baking),则工艺室内过高的温度不但会影响喷头22而造成喷墨出口阻塞,导致喷墨图案大小不一致,而且也会使得每一个喷墨涂布图案受热的时间也不均匀。因此传统喷墨涂布与硬化工艺需分两阶段进行,进而增加工艺的时间。It can be seen from the above that the traditional inkjet coating method mainly includes two stages of process: firstly, the glass substrate 26 is directly inkjet coated with the nozzle 22, and then the entire glass substrate 26 is coated, and then moved to a high temperature annealing furnace A curing process is performed. Because when intending to carry out ink-jet coating on glass substrate 26, just directly utilize large-area heating methods such as heating plate (hot plate) to carry out thermal baking (hot baking) to glass substrate 26, then the too high temperature in process room will not only It will affect the nozzle 22 and cause the inkjet outlet to be blocked, resulting in inconsistency in the size of the inkjet pattern, and also making the time for each inkjet coating pattern to be heated uneven. Therefore, the traditional inkjet coating and hardening process needs to be carried out in two stages, thereby increasing the process time.

除此之外,现有喷墨工艺还会因需进行两阶段的工艺而无法有效控制浆料喷涂于玻璃基板上的尺寸,进而导致浆料溢流的情况发生,因此日本专利JP08-29776便披露一种利用添加多孔硅化物(silica)来增加彩色光致抗蚀剂浆料的表面张力,以有效控制浆料与玻璃基板间的表面张力及接触角,进而改善此类问题。但是这种方法不但增加工艺步骤与制造成本,并降低薄膜晶体管液晶显示器的透光率,而且也不完全适用其它聚酰亚胺(polyimide)、银胶或液晶等任何可以喷墨方式涂布的材料。In addition, the existing inkjet process cannot effectively control the size of the slurry sprayed on the glass substrate due to the need for a two-stage process, which leads to the occurrence of slurry overflow. Therefore, Japanese patent JP08-29776 A method of increasing the surface tension of a color photoresist slurry by adding porous silicide (silica) is disclosed, so as to effectively control the surface tension and contact angle between the slurry and a glass substrate, thereby improving such problems. However, this method not only increases the process steps and manufacturing cost, but also reduces the light transmittance of the thin film transistor liquid crystal display, and is not completely suitable for any other polyimide (polyimide), silver glue or liquid crystal that can be coated by inkjet. Material.

发明内容Contents of the invention

因此本发明的主要目的在于提供一种改良的喷墨工艺方法,以改善现有喷墨工艺因需分两阶段进行而造成浆料溢流与不均匀浆料形成的尺寸与形状等问题。Therefore, the main purpose of the present invention is to provide an improved inkjet process to improve the size and shape of slurry overflow and uneven slurry formation caused by the existing inkjet process which needs to be carried out in two stages.

根据本发明的权利要求,披露一种喷墨工艺。首先提供一基板,然后进行一喷墨步骤,以喷涂一浆料至该基板表面。接着原位(in-situ)进行一局部加热步骤,以直接对刚喷涂至该基板表面的该浆料进行加热,进而控制该浆料的形状与位置。According to the claims of the present invention, an inkjet process is disclosed. Firstly, a substrate is provided, and then an inkjet step is performed to spray a slurry onto the surface of the substrate. A local heating step is then performed in-situ to directly heat the slurry just sprayed onto the surface of the substrate, thereby controlling the shape and position of the slurry.

由于本发明在喷头喷涂一浆料于玻璃基板的同时利用一加热光源并配合一光学聚焦系统对刚喷涂于该玻璃基板表面的浆料进行局部加热,因此可有效控制浆料的加热时间与加热范围。除此之外,本发明的加热光源也可与喷头进行同步移动,进而确保后续浆料形成的尺寸与形状,以改善现有喷墨工艺方法因需进行两阶段工艺而造成浆料溢流、喷头堵塞以及不均匀的浆料尺寸与形状等问题。Since the present invention uses a heating light source and an optical focusing system to locally heat the slurry that has just been sprayed on the surface of the glass substrate while the nozzle is spraying a slurry on the glass substrate, the heating time and heating time of the slurry can be effectively controlled. scope. In addition, the heating light source of the present invention can also move synchronously with the nozzle, thereby ensuring the size and shape of the subsequent slurry formation, so as to improve the slurry overflow and Problems such as nozzle clogging and uneven slurry size and shape.

附图说明Description of drawings

图1是说明现有喷墨工艺的方法示意图。FIG. 1 is a method schematic diagram illustrating a conventional inkjet process.

图2是说明本发明的喷墨工艺方法示意图。Figure 2 is a schematic diagram illustrating the inkjet process of the present invention.

图3是说明本发明喷墨工艺设备的方块示意图。Figure 3 is a schematic block diagram illustrating the inkjet process equipment of the present invention.

主要元件符号说明Description of main component symbols

20    喷墨设备        22    喷头20 inkjet equipment 22 print head

24    浆料            26    玻璃基板24 Paste 26 Glass substrate

28    黑色矩阵        60    喷墨设备28 black matrix 60 inkjet equipment

62    喷头            64    浆料62 nozzle 64 slurry

66    玻璃基板        68    加热光源66 Glass substrate 68 Heating light source

70    黑色矩阵        82    喷墨系统70 black matrix 82 inkjet system

84    光学系统        86    光源系统84 Optical system 86 Light source system

88    同步侦测装置    90    计算机控制器88 Synchronous detection device 90 Computer controller

具体实施方式Detailed ways

请参照图2,图2为本发明的喷墨工艺方法示意图。首先提供一玻璃基板66,例如一彩色滤光片基板,接着利用一喷墨设备60,来在玻璃基板66上制作所需的彩色滤光片图案。其中喷墨设备60包括至少一喷头62以及一用来供给浆料并控制喷头62移动方向的控制机台(图未示),而玻璃基板66表面则另设有一黑色矩阵70,用来提高薄膜晶体管液晶显示器的对比度并遮挡薄膜晶体管阵列基板的薄膜晶体管、扫描线以及数据线的不透光部分。然后依照不同工艺与产品的需求,利用喷头62喷涂一彩色光致抗蚀剂浆料64至玻璃基板66表面。Please refer to FIG. 2 , which is a schematic diagram of the inkjet process of the present invention. Firstly, a glass substrate 66 , such as a color filter substrate, is provided, and then an inkjet device 60 is used to fabricate required color filter patterns on the glass substrate 66 . Wherein the inkjet device 60 includes at least one nozzle 62 and a control machine (not shown) for supplying slurry and controlling the direction of movement of the nozzle 62, and the surface of the glass substrate 66 is additionally provided with a black matrix 70 for improving the thickness of the film. The contrast of the transistor liquid crystal display and shielding the opaque parts of the thin film transistors, scan lines and data lines of the thin film transistor array substrate. Then, a colored photoresist paste 64 is sprayed onto the surface of the glass substrate 66 by using the spray head 62 according to the requirements of different processes and products.

如图2所示,在喷涂浆料64于玻璃基板66的同时,本发明先提供一由红外光(IR)、紫外光(UV)或激光光源(Laser)所组成的加热光源68,然后利用一光学系统(图未示)将加热光源68所提供的光束加以聚集,用以对刚喷涂于玻璃基板66表面的浆料64进行局部加热。换句话说,由于加热光源68可藉由该光学聚焦系统控制其加热范围,因此本发明可对喷涂于玻璃基板66表面的浆料64进行局部加热并控制每一加热范围的加热时间。除此之外,当玻璃基板66移动至下一区域进行喷墨时,加热光源64与喷头62相对于玻璃基板66进行同步移动,以确保每一局部加热范围均在相同的时间下进行加热。As shown in Figure 2, while spraying the slurry 64 on the glass substrate 66, the present invention first provides a heating light source 68 composed of infrared light (IR), ultraviolet light (UV) or laser light source (Laser), and then utilizes An optical system (not shown) gathers the light beam provided by the heating light source 68 to locally heat the slurry 64 just sprayed on the surface of the glass substrate 66 . In other words, since the heating light source 68 can control its heating range through the optical focusing system, the present invention can locally heat the slurry 64 sprayed on the surface of the glass substrate 66 and control the heating time of each heating range. In addition, when the glass substrate 66 moves to the next area for inkjet, the heating light source 64 and the spray head 62 move synchronously relative to the glass substrate 66 to ensure that each local heating area is heated at the same time.

值得注意的是,本发明的喷墨工艺方法并不仅局限于上述的彩色滤光片基板的彩色滤光片图案的工艺,一般而言,视不同工艺与产品的需求,本发明可以应用在彩色滤光片基板与薄膜晶体管阵列基板的各式工艺中,而且喷涂于玻璃基板上的浆料可包括彩色光致抗蚀剂、黑色矩阵、聚酰亚胺(polyimide)、银胶、氧化钯(PdO)或液晶等任何可以喷墨方式涂布的材料。It is worth noting that the inkjet process method of the present invention is not limited to the above-mentioned color filter pattern process of the color filter substrate. Generally speaking, depending on the requirements of different processes and products, the present invention can be applied to color In various processes of filter substrates and thin film transistor array substrates, and the paste sprayed on the glass substrate may include color photoresist, black matrix, polyimide, silver glue, palladium oxide ( PdO) or liquid crystals, any inkjet-coatable material.

此外,又如先前所述,由于本发明以喷墨方式所喷涂的浆料64可视不同产品需求与工艺设计来进行调配,因此本发明又可搭配不同加热光源68来针对不同浆料64进行加热。举例来说,根据本发明的优选实施例,利用紫外光来进行加热的最佳浆料包括彩色光致抗蚀剂、聚酰亚胺以及液晶;利用红外光来进行加热的最佳浆料包括液态金属、聚酰亚胺以及银胶;而利用激光来进行加热的最佳浆料则包括银胶。其中,一般用来制作配向膜的聚酰亚胺(polyimide)可利用红外光与紫外光等两种加热光源来进行加热,而银胶及氧化钯也可利用红外光与激光等两种加热光源来进行加热。In addition, as previously mentioned, since the slurry 64 sprayed by the inkjet method of the present invention can be formulated according to different product requirements and process designs, the present invention can be matched with different heating light sources 68 to target different slurry 64. heating. For example, according to a preferred embodiment of the present invention, optimal pastes that utilize ultraviolet light for heating include colored photoresists, polyimide, and liquid crystals; optimal pastes that utilize infrared light for heating include Liquid metal, polyimide, and silver paste; the best pastes that use laser heating include silver paste. Among them, polyimide (polyimide), which is generally used to make alignment films, can be heated by two heating light sources such as infrared light and ultraviolet light, while silver colloid and palladium oxide can also be heated by two heating light sources such as infrared light and laser. for heating.

一般而言,由于玻璃基板66表面具有较小的张力及附着力,故当浆料64喷涂于玻璃基板66上时,浆料64的形状便会不易控制。因此本发明即利用先前所述的加热光源68来局部对喷涂于玻璃基板66上的浆料64进行快速退火后,便可有效控制玻璃基板66上的浆料64的形状与位置,而且本发明还可利用此同时且局部加热的方式,来应用于不同浆料的工艺,进而实现不同工艺条件的效果。举例来说,本发明可在喷涂彩色光致抗蚀剂时使彩色光致抗蚀剂不易溢流,或可在喷涂银胶时控制银金属成形的尺寸及厚度,以及在喷涂液晶时同时进行每一液晶单元(cell)的固化。Generally speaking, since the surface of the glass substrate 66 has relatively low tension and adhesion, when the paste 64 is sprayed on the glass substrate 66 , the shape of the paste 64 is difficult to control. Therefore, the present invention utilizes the aforementioned heating light source 68 to partially carry out rapid annealing to the slurry 64 sprayed on the glass substrate 66, so that the shape and position of the slurry 64 on the glass substrate 66 can be effectively controlled, and the present invention Simultaneous and partial heating can also be used to apply to different slurry processes, thereby achieving the effects of different process conditions. For example, the present invention can make the color photoresist not easy to overflow when spraying the color photoresist, or can control the size and thickness of the silver metal formation when spraying the silver glue, and simultaneously carry out the process when spraying the liquid crystal. Curing of each liquid crystal unit (cell).

请参照图3,图3为本发明喷墨工艺设备的方块示意图。如图3所示,本发明的喷墨工艺设备包括一喷墨系统82、一用来对加热光束进行聚焦的光学系统84、一提供各种加热光源的光源系统86、一同步侦测装置88以及一计算机控制器90。其中,喷墨系统82包括至少一喷头以及一用来容纳并提供浆料至喷头的控制机台。因此当喷墨系统82喷涂一浆料于一玻璃基板上时,光源系统86便会提供一由红外光(IR)、紫外光(UV)或激光光源(Laser)所组成的加热光源,并通过光学系统84将该加热光源进行聚焦,然后实时且局部对喷涂于玻璃基板的浆料进行加热,以控制该浆料的形状与位置。除此之外,当加热光源对该浆料进行加热的同时,使用者可利用同步侦测装置88与计算机控制器90来使光源系统86的加热光源与喷墨系统82的喷头进行同步移动,以确保玻璃基板移动时,加热光源可于相同的时间下对喷涂于玻璃基板上的浆料进行加热,进而有效控制浆料的形状与位置。Please refer to FIG. 3 , which is a schematic block diagram of the inkjet process equipment of the present invention. As shown in Figure 3, the inkjet process equipment of the present invention includes an inkjet system 82, an optical system 84 for focusing the heating beam, a light source system 86 providing various heating light sources, and a synchronous detection device 88 and a computer controller 90 . Wherein, the inkjet system 82 includes at least one spray head and a control machine for receiving and supplying the slurry to the spray head. Therefore, when the inkjet system 82 sprays a slurry on a glass substrate, the light source system 86 will provide a heating light source composed of infrared light (IR), ultraviolet light (UV) or laser light source (Laser), and pass The optical system 84 focuses the heating light source, and then heats the slurry sprayed on the glass substrate in real time and locally, so as to control the shape and position of the slurry. In addition, when the heating light source is heating the slurry, the user can use the synchronous detection device 88 and the computer controller 90 to make the heating light source of the light source system 86 and the nozzle of the inkjet system 82 move synchronously, To ensure that when the glass substrate is moving, the heating light source can heat the slurry sprayed on the glass substrate at the same time, thereby effectively controlling the shape and position of the slurry.

相比于现有利用喷墨工艺的方法,本发明在喷头喷涂一浆料于玻璃基板的同时利用一加热光源并配合一光学聚焦系统对刚喷涂于该玻璃基板表面的浆料进行局部加热,因此可有效控制浆料的加热时间与加热范围。除此之外,本发明的加热光源也可与喷头进行同步移动,进而确保后续浆料形成的尺寸与形状,以改善现有喷墨工艺方法因需进行两阶段工艺而造成浆料溢流、喷头堵塞以及不均匀的浆料尺寸与形状等问题。Compared with the existing method using the inkjet process, the present invention uses a heating light source and an optical focusing system to locally heat the slurry just sprayed on the surface of the glass substrate while spraying a slurry on the glass substrate with the nozzle head, Therefore, the heating time and heating range of the slurry can be effectively controlled. In addition, the heating light source of the present invention can also move synchronously with the nozzle, thereby ensuring the size and shape of the subsequent slurry formation, so as to improve the slurry overflow and Problems such as nozzle clogging and uneven slurry size and shape.

以上所述仅为本发明的优选实施例,凡依本发明权利要求所做的均等变化与修饰,都应属本发明的涵盖范围。The above descriptions are only preferred embodiments of the present invention, and all equivalent changes and modifications made according to the claims of the present invention shall fall within the scope of the present invention.

Claims (11)

1. an ink-jetting process comprises the following steps:
One substrate is provided;
Carry out an ink-jet step, to spray a slurry to this substrate surface; And
Original position is carried out a spot heating step, directly this slurry that just is sprayed into this substrate surface being heated, and then controls the shape and the position of this slurry.
2. ink-jetting process as claimed in claim 1, wherein this substrate comprises a thin-film transistor array base-plate or a colored filter substrate.
3. ink-jetting process as claimed in claim 2, wherein this colored filter substrate surface also comprises a black matrix".
4. ink-jetting process as claimed in claim 3, wherein this slurry is sprayed between this black matrix" on this colored filter substrate surface.
5. ink-jetting process as claimed in claim 1, wherein this slurry comprises that colorama causes resist, polyimide, elargol, palladium oxide or liquid crystal.
6. ink-jetting process as claimed in claim 1, wherein this spot heating step utilizes a heated light sources to be implemented.
7. ink-jetting process as claimed in claim 6, wherein this heated light sources comprises infrared light, ultraviolet light or LASER Light Source.
8. ink-jetting process as claimed in claim 7, wherein this heated light sources is utilized an optical system that this heated light sources is focused on and this slurry that is sprayed at this substrate surface is heated.
9. ink-jetting process as claimed in claim 6, wherein this ink-jet step utilizes an ink-jet apparatus to be implemented.
10. ink-jetting process as claimed in claim 9, wherein this ink-jet apparatus comprises at least one shower nozzle, and one is used for supplying with this slurry and controls the control board of this shower nozzle moving direction.
11. ink-jetting process as claimed in claim 10, wherein when carrying out this ink-jetting process, this heated light sources and this shower nozzle carry out same moved further with respect to this substrate.
CN 200510131455 2005-12-14 2005-12-14 inkjet process Pending CN1982921A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102378539A (en) * 2010-08-18 2012-03-14 素塔电子科技(上海)有限公司 Method for depositing buffer material on framework of flat-panel display
CN102407665A (en) * 2010-07-30 2012-04-11 株式会社理光 Thin film forming device and method, piezoelectric element forming method, discharge head, and device
CN102854655A (en) * 2012-09-25 2013-01-02 深圳市华星光电技术有限公司 Liquid crystal display panel and manufacturing method thereof
CN103439825A (en) * 2013-09-05 2013-12-11 深圳市华星光电技术有限公司 Film laying device and film laying method using same
US8833921B2 (en) 2010-07-30 2014-09-16 Ricoh Company, Limited Thin-film forming apparatus, thin-film forming method, piezoelectric-element forming method, droplet discharging head, and ink-jet recording apparatus
CN108437632A (en) * 2017-02-16 2018-08-24 惠普赛天使公司 Substrates coatings

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102407665A (en) * 2010-07-30 2012-04-11 株式会社理光 Thin film forming device and method, piezoelectric element forming method, discharge head, and device
US8833921B2 (en) 2010-07-30 2014-09-16 Ricoh Company, Limited Thin-film forming apparatus, thin-film forming method, piezoelectric-element forming method, droplet discharging head, and ink-jet recording apparatus
CN102407665B (en) * 2010-07-30 2015-03-04 株式会社理光 Thin film forming device and method, piezoelectric element forming method, discharge head, and device
CN102378539A (en) * 2010-08-18 2012-03-14 素塔电子科技(上海)有限公司 Method for depositing buffer material on framework of flat-panel display
CN102378539B (en) * 2010-08-18 2015-05-06 苏州天辅新型建材有限公司 Method for depositing buffer material on framework of flat-panel display
CN102854655A (en) * 2012-09-25 2013-01-02 深圳市华星光电技术有限公司 Liquid crystal display panel and manufacturing method thereof
WO2014047987A1 (en) * 2012-09-25 2014-04-03 深圳市华星光电技术有限公司 Liquid crystal display panel and manufacturing method thereof
CN102854655B (en) * 2012-09-25 2015-07-22 深圳市华星光电技术有限公司 Liquid crystal display panel and manufacturing method thereof
CN103439825A (en) * 2013-09-05 2013-12-11 深圳市华星光电技术有限公司 Film laying device and film laying method using same
WO2015032178A1 (en) * 2013-09-05 2015-03-12 深圳市华星光电技术有限公司 Film laying apparatus and film laying method using apparatus
CN108437632A (en) * 2017-02-16 2018-08-24 惠普赛天使公司 Substrates coatings

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