CN1982921A - inkjet process - Google Patents
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- CN1982921A CN1982921A CN 200510131455 CN200510131455A CN1982921A CN 1982921 A CN1982921 A CN 1982921A CN 200510131455 CN200510131455 CN 200510131455 CN 200510131455 A CN200510131455 A CN 200510131455A CN 1982921 A CN1982921 A CN 1982921A
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- 238000000034 method Methods 0.000 title claims abstract description 61
- 239000000758 substrate Substances 0.000 claims abstract description 73
- 239000002002 slurry Substances 0.000 claims abstract description 48
- 238000010438 heat treatment Methods 0.000 claims abstract description 41
- 239000007921 spray Substances 0.000 claims abstract description 9
- 239000004973 liquid crystal related substance Substances 0.000 claims description 17
- 239000010409 thin film Substances 0.000 claims description 17
- 239000004642 Polyimide Substances 0.000 claims description 8
- 239000011159 matrix material Substances 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 8
- 229920001721 polyimide Polymers 0.000 claims description 8
- 229910003445 palladium oxide Inorganic materials 0.000 claims description 2
- 238000007641 inkjet printing Methods 0.000 claims 12
- JQPTYAILLJKUCY-UHFFFAOYSA-N palladium(ii) oxide Chemical compound [O-2].[Pd+2] JQPTYAILLJKUCY-UHFFFAOYSA-N 0.000 claims 1
- 238000011065 in-situ storage Methods 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 37
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- 238000005507 spraying Methods 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- HBEQXAKJSGXAIQ-UHFFFAOYSA-N oxopalladium Chemical compound [Pd]=O HBEQXAKJSGXAIQ-UHFFFAOYSA-N 0.000 description 2
- 230000036772 blood pressure Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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Abstract
Description
技术领域technical field
本发明涉及一种喷墨工艺,尤其涉及一种利用加热光源的喷墨工艺。The invention relates to an ink-jet process, in particular to an ink-jet process utilizing a heating light source.
背景技术Background technique
随着电子信息产业的蓬勃发展,液晶显示器(liquid crystal display,LCD)的应用范围以及市场需求也不断在扩大,从小型产品,如电子血压计,到便携式信息产品,如个人数字助理(PDA)、笔记本计算机(notebook),以至于未来非常可能商业化的大画面显示器,均可见到液晶显示器被广泛应用于其上。由于液晶显示器的结构非常轻薄短小,同时又具有耗电量少以及无辐射污染的优点,因此被广泛应用在上述民用及信息产品上。With the vigorous development of the electronic information industry, the application range and market demand of liquid crystal display (LCD) are also expanding, from small products, such as electronic blood pressure monitors, to portable information products, such as personal digital assistants (PDA) , notebook computers (notebooks), and large-screen displays that are very likely to be commercialized in the future, it can be seen that liquid crystal displays are widely used thereon. Because the structure of the liquid crystal display is very light, thin and small, and has the advantages of less power consumption and no radiation pollution, it is widely used in the above-mentioned civil and information products.
薄膜晶体管液晶显示器基本上包括一薄膜晶体管阵列基板、一彩色滤光片(color filter)基板、以及填充于薄膜晶体管阵列基板与彩色滤光片基板之间的液晶材料。其中,薄膜晶体管阵列基板还包括一透明基板(transparentsubstrate),例如一玻璃基板,其上具有许多排列成阵列的薄膜晶体管、像素电极(pixel electrode)、位于不同平面的扫描线(scan line)与数据线(data line),并配合以适当的电容、连接焊盘等电子元件,来驱动液晶像素,进而产生丰富亮丽的图像。而彩色滤光片基板则还包括一透明基板,其上具有许多阵列排列的彩色滤光片及一公共电极(common electrode)。A thin film transistor liquid crystal display basically includes a thin film transistor array substrate, a color filter (color filter) substrate, and a liquid crystal material filled between the thin film transistor array substrate and the color filter substrate. Wherein, the thin film transistor array substrate also includes a transparent substrate (transparent substrate), such as a glass substrate, on which there are many thin film transistors arranged in an array, pixel electrodes (pixel electrodes), scan lines (scan lines) and data in different planes. Line (data line), and with appropriate capacitors, connecting pads and other electronic components to drive the liquid crystal pixels, and then produce rich and bright images. The color filter substrate also includes a transparent substrate on which there are many color filters arranged in an array and a common electrode (common electrode).
在现有的薄膜晶体管液晶显示器的制作过程中,一般利用多道光刻工艺(PEP)以形成薄膜晶体管阵列基板所需的像素电极、扫描线以及数据线。而在制作现有彩色滤光片基板则主要包括R、G、B三原色光致抗蚀剂的涂布、间隙对位曝光、以及显影工艺等三步骤。然而,传统进行三原色光致抗蚀剂涂布的涂布工艺的材料使用率只有约1~2%,而且彩色滤光片基板须历经多次光刻、清洗等工艺。此外,薄膜晶体管阵列基板更需配合制作像素电极、扫描线以及数据线的沉积、光刻、蚀刻、清洗等工艺,进而增加透明基板及工艺图案的损伤以及与化学溶剂接触的机会。为了改善此缺点,目前业界开始利用喷墨工艺方法来改善现有的利用多道工艺来制作薄膜晶体管液晶显示器的缺点。In the manufacturing process of the existing thin film transistor liquid crystal display, a multi-channel photolithography process (PEP) is generally used to form pixel electrodes, scanning lines and data lines required by the thin film transistor array substrate. However, the production of the existing color filter substrate mainly includes three steps of R, G, and B three-color photoresist coating, gap alignment exposure, and development process. However, the material utilization rate of the traditional coating process for three-primary-color photoresist coating is only about 1-2%, and the color filter substrate has to go through multiple photolithography, cleaning and other processes. In addition, the thin film transistor array substrate needs to cooperate with the deposition, photolithography, etching, cleaning and other processes for making pixel electrodes, scanning lines and data lines, which will increase the chance of damage to the transparent substrate and process patterns and contact with chemical solvents. In order to improve this shortcoming, the industry has begun to use the inkjet process to improve the shortcoming of the existing multi-pass process for manufacturing thin film transistor liquid crystal displays.
请参照图1,图1为现有喷墨工艺的方法示意图。如图1所示,首先提供一玻璃基板26,例如一彩色滤光片基板,接着利用一喷墨设备20,来在玻璃基板26上制作所需的彩色滤光片图案。其中喷墨设备20包括至少一喷墨头(以下简称喷头)22以及一控制机台(图未示),而玻璃基板26表面则包括一黑色矩阵28,用来提高薄膜晶体管液晶显示器的对比度并遮挡薄膜晶体管阵列基板的薄膜晶体管、扫描线以及数据线的不透光部分。然后依照不同工艺与产品的需求喷涂一彩色光致抗蚀剂浆料24于玻璃基板26表面的黑色矩阵28之间。随后再将玻璃基板26移至一高温退火炉进行一硬化工艺,以硬化涂布于玻璃基板26表面的浆料24。Please refer to FIG. 1 , which is a schematic diagram of a conventional inkjet process. As shown in FIG. 1 , a
由上述可见,传统喷墨涂布法主要包括两阶段工艺:首先利用喷头22直接对玻璃基板26进行喷墨涂布,待整面玻璃基板26涂布完后,接着再移至一高温退火炉进行硬化(curing)工艺。因为如欲在玻璃基板26进行喷墨涂布时,便直接利用加热板(hot plate)等大面积加热方式来对玻璃基板26进行热烘烤(hot baking),则工艺室内过高的温度不但会影响喷头22而造成喷墨出口阻塞,导致喷墨图案大小不一致,而且也会使得每一个喷墨涂布图案受热的时间也不均匀。因此传统喷墨涂布与硬化工艺需分两阶段进行,进而增加工艺的时间。It can be seen from the above that the traditional inkjet coating method mainly includes two stages of process: firstly, the
除此之外,现有喷墨工艺还会因需进行两阶段的工艺而无法有效控制浆料喷涂于玻璃基板上的尺寸,进而导致浆料溢流的情况发生,因此日本专利JP08-29776便披露一种利用添加多孔硅化物(silica)来增加彩色光致抗蚀剂浆料的表面张力,以有效控制浆料与玻璃基板间的表面张力及接触角,进而改善此类问题。但是这种方法不但增加工艺步骤与制造成本,并降低薄膜晶体管液晶显示器的透光率,而且也不完全适用其它聚酰亚胺(polyimide)、银胶或液晶等任何可以喷墨方式涂布的材料。In addition, the existing inkjet process cannot effectively control the size of the slurry sprayed on the glass substrate due to the need for a two-stage process, which leads to the occurrence of slurry overflow. Therefore, Japanese patent JP08-29776 A method of increasing the surface tension of a color photoresist slurry by adding porous silicide (silica) is disclosed, so as to effectively control the surface tension and contact angle between the slurry and a glass substrate, thereby improving such problems. However, this method not only increases the process steps and manufacturing cost, but also reduces the light transmittance of the thin film transistor liquid crystal display, and is not completely suitable for any other polyimide (polyimide), silver glue or liquid crystal that can be coated by inkjet. Material.
发明内容Contents of the invention
因此本发明的主要目的在于提供一种改良的喷墨工艺方法,以改善现有喷墨工艺因需分两阶段进行而造成浆料溢流与不均匀浆料形成的尺寸与形状等问题。Therefore, the main purpose of the present invention is to provide an improved inkjet process to improve the size and shape of slurry overflow and uneven slurry formation caused by the existing inkjet process which needs to be carried out in two stages.
根据本发明的权利要求,披露一种喷墨工艺。首先提供一基板,然后进行一喷墨步骤,以喷涂一浆料至该基板表面。接着原位(in-situ)进行一局部加热步骤,以直接对刚喷涂至该基板表面的该浆料进行加热,进而控制该浆料的形状与位置。According to the claims of the present invention, an inkjet process is disclosed. Firstly, a substrate is provided, and then an inkjet step is performed to spray a slurry onto the surface of the substrate. A local heating step is then performed in-situ to directly heat the slurry just sprayed onto the surface of the substrate, thereby controlling the shape and position of the slurry.
由于本发明在喷头喷涂一浆料于玻璃基板的同时利用一加热光源并配合一光学聚焦系统对刚喷涂于该玻璃基板表面的浆料进行局部加热,因此可有效控制浆料的加热时间与加热范围。除此之外,本发明的加热光源也可与喷头进行同步移动,进而确保后续浆料形成的尺寸与形状,以改善现有喷墨工艺方法因需进行两阶段工艺而造成浆料溢流、喷头堵塞以及不均匀的浆料尺寸与形状等问题。Since the present invention uses a heating light source and an optical focusing system to locally heat the slurry that has just been sprayed on the surface of the glass substrate while the nozzle is spraying a slurry on the glass substrate, the heating time and heating time of the slurry can be effectively controlled. scope. In addition, the heating light source of the present invention can also move synchronously with the nozzle, thereby ensuring the size and shape of the subsequent slurry formation, so as to improve the slurry overflow and Problems such as nozzle clogging and uneven slurry size and shape.
附图说明Description of drawings
图1是说明现有喷墨工艺的方法示意图。FIG. 1 is a method schematic diagram illustrating a conventional inkjet process.
图2是说明本发明的喷墨工艺方法示意图。Figure 2 is a schematic diagram illustrating the inkjet process of the present invention.
图3是说明本发明喷墨工艺设备的方块示意图。Figure 3 is a schematic block diagram illustrating the inkjet process equipment of the present invention.
主要元件符号说明Description of main component symbols
20 喷墨设备 22 喷头20
24 浆料 26 玻璃基板24
28 黑色矩阵 60 喷墨设备28
62 喷头 64 浆料62 nozzle 64 slurry
66 玻璃基板 68 加热光源66
70 黑色矩阵 82 喷墨系统70
84 光学系统 86 光源系统84
88 同步侦测装置 90 计算机控制器88
具体实施方式Detailed ways
请参照图2,图2为本发明的喷墨工艺方法示意图。首先提供一玻璃基板66,例如一彩色滤光片基板,接着利用一喷墨设备60,来在玻璃基板66上制作所需的彩色滤光片图案。其中喷墨设备60包括至少一喷头62以及一用来供给浆料并控制喷头62移动方向的控制机台(图未示),而玻璃基板66表面则另设有一黑色矩阵70,用来提高薄膜晶体管液晶显示器的对比度并遮挡薄膜晶体管阵列基板的薄膜晶体管、扫描线以及数据线的不透光部分。然后依照不同工艺与产品的需求,利用喷头62喷涂一彩色光致抗蚀剂浆料64至玻璃基板66表面。Please refer to FIG. 2 , which is a schematic diagram of the inkjet process of the present invention. Firstly, a
如图2所示,在喷涂浆料64于玻璃基板66的同时,本发明先提供一由红外光(IR)、紫外光(UV)或激光光源(Laser)所组成的加热光源68,然后利用一光学系统(图未示)将加热光源68所提供的光束加以聚集,用以对刚喷涂于玻璃基板66表面的浆料64进行局部加热。换句话说,由于加热光源68可藉由该光学聚焦系统控制其加热范围,因此本发明可对喷涂于玻璃基板66表面的浆料64进行局部加热并控制每一加热范围的加热时间。除此之外,当玻璃基板66移动至下一区域进行喷墨时,加热光源64与喷头62相对于玻璃基板66进行同步移动,以确保每一局部加热范围均在相同的时间下进行加热。As shown in Figure 2, while spraying the slurry 64 on the
值得注意的是,本发明的喷墨工艺方法并不仅局限于上述的彩色滤光片基板的彩色滤光片图案的工艺,一般而言,视不同工艺与产品的需求,本发明可以应用在彩色滤光片基板与薄膜晶体管阵列基板的各式工艺中,而且喷涂于玻璃基板上的浆料可包括彩色光致抗蚀剂、黑色矩阵、聚酰亚胺(polyimide)、银胶、氧化钯(PdO)或液晶等任何可以喷墨方式涂布的材料。It is worth noting that the inkjet process method of the present invention is not limited to the above-mentioned color filter pattern process of the color filter substrate. Generally speaking, depending on the requirements of different processes and products, the present invention can be applied to color In various processes of filter substrates and thin film transistor array substrates, and the paste sprayed on the glass substrate may include color photoresist, black matrix, polyimide, silver glue, palladium oxide ( PdO) or liquid crystals, any inkjet-coatable material.
此外,又如先前所述,由于本发明以喷墨方式所喷涂的浆料64可视不同产品需求与工艺设计来进行调配,因此本发明又可搭配不同加热光源68来针对不同浆料64进行加热。举例来说,根据本发明的优选实施例,利用紫外光来进行加热的最佳浆料包括彩色光致抗蚀剂、聚酰亚胺以及液晶;利用红外光来进行加热的最佳浆料包括液态金属、聚酰亚胺以及银胶;而利用激光来进行加热的最佳浆料则包括银胶。其中,一般用来制作配向膜的聚酰亚胺(polyimide)可利用红外光与紫外光等两种加热光源来进行加热,而银胶及氧化钯也可利用红外光与激光等两种加热光源来进行加热。In addition, as previously mentioned, since the slurry 64 sprayed by the inkjet method of the present invention can be formulated according to different product requirements and process designs, the present invention can be matched with different
一般而言,由于玻璃基板66表面具有较小的张力及附着力,故当浆料64喷涂于玻璃基板66上时,浆料64的形状便会不易控制。因此本发明即利用先前所述的加热光源68来局部对喷涂于玻璃基板66上的浆料64进行快速退火后,便可有效控制玻璃基板66上的浆料64的形状与位置,而且本发明还可利用此同时且局部加热的方式,来应用于不同浆料的工艺,进而实现不同工艺条件的效果。举例来说,本发明可在喷涂彩色光致抗蚀剂时使彩色光致抗蚀剂不易溢流,或可在喷涂银胶时控制银金属成形的尺寸及厚度,以及在喷涂液晶时同时进行每一液晶单元(cell)的固化。Generally speaking, since the surface of the
请参照图3,图3为本发明喷墨工艺设备的方块示意图。如图3所示,本发明的喷墨工艺设备包括一喷墨系统82、一用来对加热光束进行聚焦的光学系统84、一提供各种加热光源的光源系统86、一同步侦测装置88以及一计算机控制器90。其中,喷墨系统82包括至少一喷头以及一用来容纳并提供浆料至喷头的控制机台。因此当喷墨系统82喷涂一浆料于一玻璃基板上时,光源系统86便会提供一由红外光(IR)、紫外光(UV)或激光光源(Laser)所组成的加热光源,并通过光学系统84将该加热光源进行聚焦,然后实时且局部对喷涂于玻璃基板的浆料进行加热,以控制该浆料的形状与位置。除此之外,当加热光源对该浆料进行加热的同时,使用者可利用同步侦测装置88与计算机控制器90来使光源系统86的加热光源与喷墨系统82的喷头进行同步移动,以确保玻璃基板移动时,加热光源可于相同的时间下对喷涂于玻璃基板上的浆料进行加热,进而有效控制浆料的形状与位置。Please refer to FIG. 3 , which is a schematic block diagram of the inkjet process equipment of the present invention. As shown in Figure 3, the inkjet process equipment of the present invention includes an
相比于现有利用喷墨工艺的方法,本发明在喷头喷涂一浆料于玻璃基板的同时利用一加热光源并配合一光学聚焦系统对刚喷涂于该玻璃基板表面的浆料进行局部加热,因此可有效控制浆料的加热时间与加热范围。除此之外,本发明的加热光源也可与喷头进行同步移动,进而确保后续浆料形成的尺寸与形状,以改善现有喷墨工艺方法因需进行两阶段工艺而造成浆料溢流、喷头堵塞以及不均匀的浆料尺寸与形状等问题。Compared with the existing method using the inkjet process, the present invention uses a heating light source and an optical focusing system to locally heat the slurry just sprayed on the surface of the glass substrate while spraying a slurry on the glass substrate with the nozzle head, Therefore, the heating time and heating range of the slurry can be effectively controlled. In addition, the heating light source of the present invention can also move synchronously with the nozzle, thereby ensuring the size and shape of the subsequent slurry formation, so as to improve the slurry overflow and Problems such as nozzle clogging and uneven slurry size and shape.
以上所述仅为本发明的优选实施例,凡依本发明权利要求所做的均等变化与修饰,都应属本发明的涵盖范围。The above descriptions are only preferred embodiments of the present invention, and all equivalent changes and modifications made according to the claims of the present invention shall fall within the scope of the present invention.
Claims (11)
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| CN 200510131455 CN1982921A (en) | 2005-12-14 | 2005-12-14 | inkjet process |
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| CN 200510131455 CN1982921A (en) | 2005-12-14 | 2005-12-14 | inkjet process |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102378539A (en) * | 2010-08-18 | 2012-03-14 | 素塔电子科技(上海)有限公司 | Method for depositing buffer material on framework of flat-panel display |
| CN102407665A (en) * | 2010-07-30 | 2012-04-11 | 株式会社理光 | Thin film forming device and method, piezoelectric element forming method, discharge head, and device |
| CN102854655A (en) * | 2012-09-25 | 2013-01-02 | 深圳市华星光电技术有限公司 | Liquid crystal display panel and manufacturing method thereof |
| CN103439825A (en) * | 2013-09-05 | 2013-12-11 | 深圳市华星光电技术有限公司 | Film laying device and film laying method using same |
| US8833921B2 (en) | 2010-07-30 | 2014-09-16 | Ricoh Company, Limited | Thin-film forming apparatus, thin-film forming method, piezoelectric-element forming method, droplet discharging head, and ink-jet recording apparatus |
| CN108437632A (en) * | 2017-02-16 | 2018-08-24 | 惠普赛天使公司 | Substrates coatings |
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2005
- 2005-12-14 CN CN 200510131455 patent/CN1982921A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102407665A (en) * | 2010-07-30 | 2012-04-11 | 株式会社理光 | Thin film forming device and method, piezoelectric element forming method, discharge head, and device |
| US8833921B2 (en) | 2010-07-30 | 2014-09-16 | Ricoh Company, Limited | Thin-film forming apparatus, thin-film forming method, piezoelectric-element forming method, droplet discharging head, and ink-jet recording apparatus |
| CN102407665B (en) * | 2010-07-30 | 2015-03-04 | 株式会社理光 | Thin film forming device and method, piezoelectric element forming method, discharge head, and device |
| CN102378539A (en) * | 2010-08-18 | 2012-03-14 | 素塔电子科技(上海)有限公司 | Method for depositing buffer material on framework of flat-panel display |
| CN102378539B (en) * | 2010-08-18 | 2015-05-06 | 苏州天辅新型建材有限公司 | Method for depositing buffer material on framework of flat-panel display |
| CN102854655A (en) * | 2012-09-25 | 2013-01-02 | 深圳市华星光电技术有限公司 | Liquid crystal display panel and manufacturing method thereof |
| WO2014047987A1 (en) * | 2012-09-25 | 2014-04-03 | 深圳市华星光电技术有限公司 | Liquid crystal display panel and manufacturing method thereof |
| CN102854655B (en) * | 2012-09-25 | 2015-07-22 | 深圳市华星光电技术有限公司 | Liquid crystal display panel and manufacturing method thereof |
| CN103439825A (en) * | 2013-09-05 | 2013-12-11 | 深圳市华星光电技术有限公司 | Film laying device and film laying method using same |
| WO2015032178A1 (en) * | 2013-09-05 | 2015-03-12 | 深圳市华星光电技术有限公司 | Film laying apparatus and film laying method using apparatus |
| CN108437632A (en) * | 2017-02-16 | 2018-08-24 | 惠普赛天使公司 | Substrates coatings |
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