CN1981323A - Optical positioning device using different combinations of interlaced photosensitive elements - Google Patents
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Abstract
一个实施例涉及一种光学位移传感器,用于通过确定在表面的连续帧中光学特性的位移来感测数据输入装置和表面(304)之间的相对移动。该传感器包括至少检测器、第一电路和第二电路。检测器包括组织成第一和第二阵列(例如1502和1504)的多个光敏元件。第一电路配置成组合来自第一阵列每第M个元件的信号,以产生M组群信号,且第二电路配置成组合来自第二阵列每第M'个元件的信号,以产生M'组群信号。M和M'是彼此不同的数。还公开了其它实施例。One embodiment relates to an optical displacement sensor for sensing relative movement between a data input device and a surface (304) by determining displacement of optical properties in successive frames on the surface. The sensor includes at least a detector, a first circuit, and a second circuit. The detector includes a plurality of photosensitive elements organized into first and second arrays (e.g., 1502 and 1504). The first circuit is configured to combine signals from every M-th element of the first array to generate an M-group signal, and the second circuit is configured to combine signals from every M'-th element of the second array to generate an M'-group signal. M and M' are different numbers from each other. Other embodiments are also disclosed.
Description
相关申请交叉引用Related Application Cross Reference
本申请要求由发明人David A.LeHoty,Douglas A.Webb,Charles B.Roxlo,Clinton B.Carlisle和Jahja I.Trisnadi于2004年5月21日提交的、题目为“Optical position sensing device having a detector array usingdifferent combinations of shared interlaced photosensitive elements”的美国临时申请No.60/573,075的权益。上述美国临时申请的公开内容通过引用全部结合在本文中。This application claims the title "Optical position sensing device having a detector", filed May 21, 2004, by inventors David A. LeHoty, Douglas A. Webb, Charles B. Roxlo, Clinton B. Carlisle and Jahja I. Trisnadi benefit of U.S. Provisional Application No. 60/573,075 for array using different combinations of shared interlaced photosensitive elements". The disclosures of the aforementioned US provisional applications are incorporated herein by reference in their entirety.
技术领域technical field
本发明一般涉及光学定位装置(OPD),以及使用这种装置感测移动的方法。The present invention relates generally to optical positioning devices (OPDs), and methods of sensing movement using such devices.
背景技术Background technique
指示装置,例如计算机鼠标或跟踪球,用于将数据输入到个人计算机和工作站中,并与它们对接。这种装置允许在监控器上光标快速重新定位,且在许多文本、数据库和图形程序中都很有用。用户通过在一个表面上移动鼠标,使光标在与鼠标的移动成比例的方向和距离上移动来控制光标。备选的是,手在静止装置上的移动也可用于同样目的。Pointing devices, such as computer mice or trackballs, are used to enter data into and interface with personal computers and workstations. This device allows rapid repositioning of the cursor on the monitor and is useful in many text, database and graphics programs. The user controls the cursor by moving the mouse over a surface, causing the cursor to move in a direction and distance proportional to the movement of the mouse. Alternatively, movement of the hand on the stationary device can also be used for the same purpose.
计算机鼠标有光学和机械两种型式。机械鼠标通常使用旋转球来检测移动,且一对轴编码器与球接触以产生数字信号,由计算机用来移动光标。机械鼠标的一个问题在于,由于污垢积累等原因在持续使用后易于不精确和出故障。此外,机械元件特别是轴编码器的移动和综合磨损必然限制装置的有用寿命。Computer mice come in both optical and mechanical types. Mechanical mice typically use a spinning ball to detect movement, and a pair of shaft encoders make contact with the ball to produce digital signals that are used by the computer to move the cursor. One problem with mechanical mice is that they are prone to inaccuracy and malfunction after continued use due to, for example, dirt buildup. Furthermore, movement and combined wear of the mechanical elements, especially the shaft encoder, necessarily limits the useful life of the device.
上述机械鼠标问题的一个解决方案是开发光学鼠标。光学鼠标已经非常普及,因为它们更为健壮,且可提供更好的指示精确度。One solution to the aforementioned problems of mechanical mice has been the development of optical mice. Optical mice have become popular because they are more robust and offer better pointing precision.
用于光学鼠标的主要常规技术依赖于以切线入射或接近切线入射而照射表面的发光二极管(LED)、捕获综合图像的二维CMOS(互补金属氧化物半导体)检测器、以及使连续图像相关联以确定鼠标已移动的方向、距离和速度的软件。这种技术通常提供高精确度,但却有复杂设计和相对高的图像处理要求等问题。此外,由于照射的切线入射,光学效率很低。The main conventional technology for optical mice relies on light-emitting diodes (LEDs) illuminating the surface at or near tangential incidence, a two-dimensional CMOS (complementary metal oxide semiconductor) detector that captures a composite image, and correlating successive images Software to determine the direction, distance, and speed that the mouse has moved. This technique usually provides high accuracy but suffers from complex design and relatively high image processing requirements. Furthermore, the optical efficiency is low due to the tangential incidence of the illumination.
另一途径是使用一维阵列的光传感器或检测器,如光电二极管。表面的连续图像由成像光学器件捕获,转换到光电二极管上,并作比较以检测鼠标的移动。光电二极管可直接用导线连接成组,便于移动检测。这降低了光电二极管的要求,并能作快速模拟处理。这种鼠标的一个实例在授予Dandliker等人的美国专利No.5,907,152中公开。Another approach is to use a one-dimensional array of light sensors or detectors, such as photodiodes. Successive images of the surface are captured by imaging optics, converted to photodiodes, and compared to detect mouse movement. Photodiodes can be directly connected into groups with wires for easy motion detection. This reduces photodiode requirements and enables fast analog processing. An example of such a mouse is disclosed in US Patent No. 5,907,152 to Dandliker et al.
在Dandliker等人的专利中公开的鼠标与标准技术的不同之处还在于它使用相干光源,例如激光器。来自相干源的光从粗糙表面散射开来产生光的随机强度分布,称为斑点(speckle)。使用基于斑点的图案有几个优点,包括高效的基于激光器的光产生以及即使在正常入射照射下的高对比度图像。这就允许有更高效的系统,并节省电流消耗,这在无线应用中很有利,可以延长电池寿命。The mouse disclosed in the Dandliker et al. patent also differs from standard technology in that it uses a coherent light source, such as a laser. Light from a coherent source scatters off the rough surface to produce a random intensity distribution of light, called speckle. There are several advantages to using a speckle-based pattern, including efficient laser-based light production and high-contrast images even under normal incident illumination. This allows for more efficient systems and saves current consumption, which is beneficial in wireless applications to extend battery life.
虽然在基于LED的常规光学鼠标上有了重大改进,但这些基于斑点的装置仍因许多原因并不能完全令人满意。具体地说,使用激光器斑点的鼠标并未展示出当今技术水平的鼠标通常所需求的精确度,通常需要有小于0.5%或左右的路径差错。While a significant improvement over conventional LED-based optical mice, these speckle-based devices are still not entirely satisfactory for a number of reasons. In particular, mice using laser spots do not exhibit the level of precision typically required of state-of-the-art mice, typically requiring path errors of less than 0.5% or thereabouts.
本公开内容讨论并提供了对现有技术光学鼠标和其它类似光学指示装置的各种问题的解决方案。This disclosure discusses and provides solutions to various problems with prior art optical mice and other similar optical pointing devices.
发明内容Contents of the invention
一个实施例涉及一种光学位移传感器,用于通过确定在表面的连续帧中光学特性的位移来感测数据输入装置和表面之间的相对移动。该传感器包括至少检测器、第一电路和第二电路。检测器包括组织在第一和第二阵列中的多个光敏元件。第一电路配置成组合来自第一阵列每第M个元件的信号,以产生M组群信号,且第二电路配置成组合来自第二阵列每第M’个元件的信号,以产生M’组群信号。M和M’是彼此不同的数。One embodiment relates to an optical displacement sensor for sensing relative movement between a data input device and a surface by determining displacement of an optical property in successive frames of the surface. The sensor includes at least a detector, a first circuit and a second circuit. The detector includes a plurality of photosensitive elements organized in first and second arrays. The first circuit is configured to combine signals from every Mth element of the first array to generate M groups of signals, and the second circuit is configured to combine signals from every M'th element of the second array to generate M' groups group signal. M and M' are different numbers from each other.
另一实施例涉及一种使用光学位移传感器感测数据输入装置在表面上移动的方法,该光学位移传感器具有的检测器包括组织成第一和第二阵列的多个光敏元件。多个光敏元件接收从部分表面反射的光所产生的强度图案。来自第一阵列每第M个元件的信号被组合起来产生M组群信号,且来自第二阵列每第M’个元件的信号被组合起来产生M’组群信号。M和M’是彼此不同的数。Another embodiment relates to a method of sensing movement of a data input device over a surface using an optical displacement sensor having a detector comprising a plurality of light sensitive elements organized into first and second arrays. A plurality of photosensitive elements receive intensity patterns generated by light reflected from portions of the surface. Signals from every Mth element of the first array are combined to generate M group signals, and signals from every M'th element of the second array are combined to generate M' group signals. M and M' are different numbers from each other.
另一实施例涉及包括二维阵列光敏元件的光学定位设备,这些光敏元件组织成重复以形成阵列的元件的M×M’图案。电路配置成组合来自图案中同一位置上的每个元件的信号,以产生M×M’组群信号。Another embodiment relates to an optical positioning device comprising a two-dimensional array of photosensitive elements organized in an M x M' pattern that repeats to form the elements of the array. The circuitry is configured to combine the signals from each element at the same location in the pattern to produce M x M' group signals.
还公开了其它实施例。Other embodiments are also disclosed.
附图说明Description of drawings
本公开内容的这些和各种其它特性和优点从以下详细说明和从附图中就可更充分理解,但这些说明和附图不应被认为是将所附权利要求限制在所示的具体实施例上,而仅是为了作解释和理解,附图包括:These and various other features and advantages of the present disclosure will be more fully understood from the following detailed description and from the accompanying drawings, which should not be construed to limit the appended claims to the specific implementation shown. By way of example, and for purposes of explanation and understanding only, the accompanying drawings include:
图1A和1B分别示出从光滑表面反射的光的衍射图案和从粗糙表面反射的光的干涉图案中的斑点;Figures 1A and 1B illustrate the diffraction pattern of light reflected from a smooth surface and the spots in the interference pattern of light reflected from a rough surface, respectively;
图2示出按照本公开实施例的基于斑点的OPD的功能框图;Figure 2 shows a functional block diagram of a speckle-based OPD according to an embodiment of the disclosure;
图3示出按照本公开实施例具有交错光敏元件组群的阵列框图;Figure 3 shows a block diagram of an array with interleaved groups of photosensitive elements in accordance with an embodiment of the disclosure;
图4示出按照本公开实施例来自图3阵列的仿真信号图;Figure 4 shows a graph of simulated signals from the array of Figure 3 according to an embodiment of the disclosure;
图5示出按照本公开实施例具有多行交错光敏元件组群的阵列排列以及结果同相信号的框图;5 illustrates a block diagram of an array arrangement with multiple rows of interleaved groups of photosensitive elements and the resulting in-phase signals in accordance with an embodiment of the disclosure;
图6示出按照本公开实施例来自具有交错光敏元件组群的阵列的仿真信号图,其中来自每第四个光敏元件的信号被电连接或组合;6 illustrates a graph of simulated signals from an array having interleaved groups of photosensitive elements in which signals from every fourth photosensitive element are electrically connected or combined in accordance with an embodiment of the disclosure;
图7示出按照本公开实施例用于检测器的估算速度直方图,该检测器有64个光敏元件、连接成4N配置、并以81%最大速度工作;Figure 7 shows an estimated velocity histogram for a detector having 64 photosensitive elements connected in a 4N configuration and operating at 81% of maximum velocity in accordance with an embodiment of the present disclosure;
图8示出按照本公开实施例作为检测器元件数的函数的差错率,该检测器具有连接成4N配置的光敏元件;Figure 8 shows error rate as a function of the number of elements of a detector having photosensitive elements connected in a 4N configuration, according to an embodiment of the present disclosure;
图9示出按照本发明实施例差错率对信号幅度的依赖关系;Fig. 9 shows the dependence of the error rate on the signal amplitude according to an embodiment of the present invention;
图10示出按照本公开实施例作为检测器元件数的函数的差错率,该检测器具有连接成4N配置的多行光敏元件;Figure 10 shows the error rate as a function of the number of elements of a detector having multiple rows of photosensitive elements connected in a 4N configuration, according to an embodiment of the present disclosure;
图11示出按照本公开实施例来自具有连接成各种配置的交错光敏元件组群的阵列的仿真信号图;Figure 11 shows a graph of simulated signals from an array having interleaved groups of photosensitive elements connected in various configurations, according to an embodiment of the disclosure;
图12示出按照本公开实施例具有连接成5N配置的光敏元件的阵列排列框图以及原始和正交加权系数;Figure 12 shows a block diagram of an array arrangement with photosensitive elements connected in a 5N configuration and original and orthogonal weighting coefficients in accordance with an embodiment of the disclosure;
图13示出按照本公开实施例具有连接成6N配置的光敏元件的阵列排列框图以及原始和正交加权系数;Figure 13 shows a block diagram of an array arrangement with photosensitive elements connected in a 6N configuration and original and orthogonal weighting coefficients in accordance with an embodiment of the disclosure;
图14示出按照本公开实施例具有连接成4N配置的光敏元件的阵列排列框图以及原始和正交加权系数;Figure 14 shows a block diagram of an array arrangement with photosensitive elements connected in a 4N configuration and original and orthogonal weighting coefficients in accordance with an embodiment of the disclosure;
图15出按照本公开实施例具有连接成6N配置和4N配置的光敏元件的多行阵列的排列框图;FIG. 15 is a block diagram illustrating an arrangement of a multi-row array with photosensitive elements connected in a 6N configuration and a 4N configuration according to an embodiment of the disclosure;
图16示出按照本公开实施例的电路实施例示意图,该电路使用电流镜来实现4N/5N/6N加权组,其方式为重新使用同一元件输出来产生多个独立信号用于移动估算;Figure 16 shows a schematic diagram of an embodiment of a circuit using current mirrors to implement 4N/5N/6N weighted groups by reusing the same component output to generate multiple independent signals for motion estimation, according to an embodiment of the disclosure;
图17示出按照本公开实施例具有两行的多行阵列排列,这两行是端对端连接,而不是彼此上下连接;以及Figure 17 illustrates a multi-row array arrangement having two rows connected end-to-end, rather than on top of each other, in accordance with an embodiment of the disclosure; and
图18示出按照本公开实施例的光敏元件在二维阵列中的排列。Figure 18 illustrates the arrangement of photosensitive elements in a two-dimensional array according to an embodiment of the disclosure.
具体实施方式Detailed ways
现有光学定位装置的问题Problems with Existing Optical Positioning Devices
现有基于斑点的OPD的一个问题归因于邻近光电二极管之间的间距或距离,此距离范围通常从十(10)微米到五百(500)微米。在成像平面中尺寸小于该间距的斑点不能被正确检测,从而限制了OPD的敏感度和精确性。显著大于该间距的斑点会产生大幅减小的信号。One problem with existing spot-based OPDs is due to the pitch or distance between adjacent photodiodes, which typically ranges from ten (10) microns to five hundred (500) microns. Spots with a size smaller than this pitch in the imaging plane cannot be detected correctly, thereby limiting the sensitivity and accuracy of OPD. Spots significantly larger than this spacing will produce a greatly reduced signal.
另一问题是相干光源必须和检测器正确对准,以便产生有斑点的表面图像。在现有设计中,图像平面的受照部分通常比检测器的视场宽得多,以确保光电二极管阵列完全被反射的照射所覆盖。但是,具有大的受照面积就降低了光电二极管可检测的反射照射的功率强度。因此,为解决或避免现有基于斑点的OPD中错位问题的尝试常导致损失光电二极管阵列可用的反射光,或对照射功率提出了更高的要求。Another problem is that the coherent light source must be properly aligned with the detector in order to produce a speckled surface image. In existing designs, the illuminated portion of the image plane is typically much wider than the detector's field of view to ensure that the photodiode array is fully covered by reflected illumination. However, having a large illuminated area reduces the power intensity of reflected illumination that the photodiode can detect. Therefore, attempts to solve or avoid the misalignment problem in existing spot-based OPDs often result in a loss of available reflected light from the photodiode array, or place higher demands on the illumination power.
常规OPD还有另一问题是由于在视场内不同点处成像光学器件和特性之间的视角和/或改变的距离而引起的表面上或从表面发出的特性变形问题。对于使用以切线入射的照射的OPD来说,这特别是个问题。Yet another problem with conventional OPDs is the problem of distortion of features on or emanating from the surface due to viewing angles and/or changing distances between imaging optics and features at different points within the field of view. This is particularly a problem for OPDs that use illumination at tangential incidence.
因斑点图案的图像分析而引起的现有基于斑点的OPD的附加问题在于估算方案对统计波动的敏感性。由于斑点是通过对散射相干光的相位随机化而产生的,因此斑点平均具有所定义的尺寸和分布,但斑点可能呈现出与该平均不一致的局部图案。所以,装置可能易于有局部模糊或难于解释的数据,例如斑点图案提供的与运动有关的信号比通常要小。An additional problem with existing speckle-based OPDs arising from image analysis of speckle patterns is the sensitivity of the estimation scheme to statistical fluctuations. Since speckles are generated by phase randomization of scattered coherent light, speckles have a defined size and distribution on average, but speckles may exhibit local patterns inconsistent with this average. As a result, devices may be prone to locally blurred or difficult to interpret data, eg speckle patterns providing less motion-related signals than usual.
现有基于斑点的OPD还有另一问题涉及斑点图案的改变,或斑点“沸腾”。一般来说,当表面移动时,来自表面的斑点图案随之移动,且方向相同,速度相同。但在许多光学系统中,从表面离开的相前中会有附加的改变。例如,如果光学系统不是远心的,以致从表面到对应检测器的路径长度在表面上是不均匀的,则在表面移动时,斑点图案可能以有些随机的方式改变。这就会使检测表面移动所用的信号失真,导致系统的精确度和敏感度下降。Yet another problem with existing speckle-based OPDs involves changes in the speckle pattern, or speckle "boiling". In general, as the surface moves, the speckle pattern from the surface moves with it, in the same direction and at the same speed. But in many optical systems there is an additional change in the phase front away from the surface. For example, if the optical system is not telecentric such that the path length from the surface to the corresponding detector is not uniform across the surface, the spot pattern may change in a somewhat random manner as the surface moves. This distorts the signal used to detect surface movement, reducing the accuracy and sensitivity of the system.
因此,需要有一种高度精确的基于斑点的指向装置和使用它的方法,其能够以路径差错小于0.5%或上下来检测移动。希望该装置具有简单易懂和不复杂的设计,对图像处理的要求相对较低。还希望该装置具有高光学效率,即,光电二极管阵列可用的反射光损失被减至最小。还希望优化该装置对所用斑点尺寸的敏感度和精确度,以及由光学系统精确地保持斑点图案。Therefore, there is a need for a highly accurate speckle-based pointing device and method of using the same that is capable of detecting movement with less than 0.5% path error or up and down. The device is expected to have a simple, understandable and uncomplicated design, with relatively low requirements for image processing. It is also desirable for the device to have high optical efficiency, ie, the loss of reflected light available to the photodiode array is minimized. It is also desirable to optimize the sensitivity and precision of the device to the spot size used, as well as the precise maintenance of the spot pattern by the optical system.
本文公开的OPD实施例OPD embodiments disclosed herein
本公开内容一般涉及用于光学定位装置(OPD)的传感器,以及基于从表面反射的光的随机强度分布图案,称为斑点的位移来感测传感器和表面之间相对移动的方法。OPD包括但不限于用于向个人计算机输入数据的光学鼠标或跟踪球。The present disclosure generally relates to sensors for optical positioning devices (OPDs), and methods of sensing relative movement between the sensor and the surface based on the displacement of a random intensity distribution pattern of light reflected from the surface, called a spot. OPDs include, but are not limited to, optical mice or trackballs for inputting data into personal computers.
在说明书中提到“一个实施例”或“实施例”是指,结合该实施例说明的一个具体特性、结构或特征被包括在本发明的至少一个实施例中。在说明书中各个地方出现的短语“在一个实施例中”不一定全部指同一实施例。Reference in the specification to "one embodiment" or "an embodiment" means that a specific feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment of the present invention. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment.
一般来说,用于OPD的传感器包括:照射器,它具有光源和照射光学器件以照射部分表面;检测器,它具有多个光敏元件和成像光学器件;以及信号处理或混合信号电子电路,用于组合来自各个光敏元件的信号,以产生检测器的输出信号。In general, a sensor for an OPD includes: an illuminator, which has a light source and illumination optics to illuminate a portion of the surface; a detector, which has multiple photosensitive elements and imaging optics; and signal processing or mixed-signal electronics with The signals from the individual photosensitive elements are combined to produce the output signal of the detector.
在一个实施例中,检测器和混合信号电子电路是使用标准CMOS工艺和设备制造的。优选的是,本发明的传感器和方法提供了一种光学高效检测体系结构,即:使用结构照射和远心斑点成像,以及使用模拟和数字电子电路组合的简化信号处理配置。这种体系结构减少了专用于传感器中的信号处理和位移估算的电力量。已发现,使用斑点检测技术并按照本发明适当配置的传感器可以符合或超过通常对OPD所期望的所有性能标准,包括最大位移速度、精确度和%路径差错率。In one embodiment, the detector and mixed signal electronics are fabricated using standard CMOS processes and equipment. Preferably, the sensors and methods of the present invention provide an optically efficient detection architecture using structure illumination and telecentric speckle imaging, and a simplified signal processing configuration using a combination of analog and digital electronics. This architecture reduces the amount of power dedicated to signal processing and displacement estimation in the sensor. It has been found that a sensor using speckle detection technology and properly configured in accordance with the present invention can meet or exceed all performance criteria normally expected of an OPD, including maximum displacement velocity, accuracy and % path error rate.
基于斑点的位移传感器介绍Introduction to Speckle-Based Displacement Sensors
本节讨论申请人所理解和相信的基于斑点的位移传感器的工作原理。虽然这些工作原理对于理解很有用,但本发明的实施例不应不必要地受这些原理的限制。This section discusses applicants' understanding and belief of how a speckle-based displacement sensor works. While these principles of operation are useful for understanding, embodiments of the invention should not be unnecessarily limited by these principles.
参阅图1A,所示波长的激光器光被示为射到光滑反射表面的102和从光滑反射表面反射的104,其中入射角θ等于反射角θ。产生衍射图案106,它具有的周期性为λ/2sinθ。Referring to FIG. 1A , laser light at the indicated wavelengths is shown impinging on 102 and reflecting 104 from a smooth reflective surface, where the angle of incidence Θ is equal to the angle of reflection Θ. A
形成对比的是,参阅图1B,任何具有尺寸大于光波长(即大约>1μm)的拓扑不规则的一般表面倾向于使光114以近似Lambertian形式散射到全部范围。如果使用相干光源如激光器,则在由具有有限孔径的平方律检测器检测时,空间相干的散射光会产生复杂的干涉图案116。亮区和暗区的这种复杂干涉图案116称为斑点。斑点图案116的准确性质和对比度取决于表面粗糙度、光的波长及其空间相干程度、以及聚光或成像光学器件。虽然常常是高度复杂,但斑点图案116的明显特征是有一段任何粗糙表面被光学器件成像,于是当表面上的位置相对激光器和光学器件-检测器组件横向移位时就可用来对其加以识别。In contrast, referring to FIG. 1B , any general surface with topological irregularities having dimensions larger than the wavelength of light (ie, approximately >1 μm) tends to scatter light 114 in an approximately Lambertian fashion over the full range. If a coherent light source such as a laser is used, the spatially coherent scattered light produces a
期望斑点会有所有尺寸,高达由光学器件的有效孔径所设定的空间频率,常规上以其数值孔径NA=sinθ定义,如图1B所示。根据Goodman[J.W.Goodman,″Statistical Properties of Laser SpecklePatterns″in″Laser Speckle and Related Phenomena″edited by J.C.Dainty,Topics in Applied Physics volume 9,Springer-Verlag(1984)-具体见39-40页],尺寸统计分布以斑点强度自动相干性表示。“平均”斑点直径可定义为:The spot is expected to be of all sizes, up to the spatial frequency set by the effective aperture of the optic, conventionally defined by its numerical aperture NA=sin Θ, as shown in Figure 1B. According to Goodman [J.W.Goodman, "Statistical Properties of Laser Speckle Patterns" in "Laser Speckle and Related Phenomena"edited by J.C.Dainty, Topics in Applied Physics volume 9, Springer-Verlag (1984) - see pages 39-40 for details], size statistics Distributions are represented by spot intensity auto-coherence. The "average" spot diameter can be defined as:
有趣的是要指出,斑点强度的空间频谱密度,根据Wiener-Khintchine法则,就是强度自动相干性的傅立叶变换。最细小的可能斑点amin=λ/2NA,由以下不太可能的情况设定,即:主要作用来自于图1B的最外射线118(即在±θ的射线),且来自最“内”射线的作用有破坏性干扰。所以截止空间频率为fco=1/(λ/2NA)或2NA/λ。It is interesting to point out that the spatial spectral density of the speckle intensity, according to the Wiener-Khintchine law, is the Fourier transform of the intensity auto-coherence. The smallest possible spot, amin = λ/2NA, is set by the improbable case that the main contribution comes from the
请注意,数值孔径对于沿一个维度(例如“x”)和沿其正交维度(“y”)的图像中的空间频率可以不同。这可能是由于在一个维度上的光学孔径比另一维度上的要长(例如椭圆而不是圆)、或由于变形透镜而引起。在这些情况下,斑点图案116也会是各向异性的,且平均斑点尺寸在两个维度上会不同。Note that the numerical aperture can be different for spatial frequencies in the image along one dimension (eg "x") and along its orthogonal dimension ("y"). This may be due to the optical aperture being longer in one dimension than the other (eg, an ellipse rather than a circle), or due to an anamorphic lens. In these cases, the
基于斑点的激光器位移传感器的一个优点是,它能用以近法线入射角到达的照射光来工作。采用成像光学器件和以切线入射角到达粗糙表面的不相干光的传感器也可用于横向位移传感。但是,由于照射的切线入射角用于产生图像中表面地形的适当大的亮-暗阴影,这种系统本身在光学上效率就低,因为很大一部分光以镜面形式反射到检测器之外,因此对所形成的图像不起作用。相反,基于斑点的位移传感器可以有效利用来自激光源的较大部分的照射光,从而允许开发光学高效的位移传感器。One advantage of a speckle-based laser displacement sensor is that it can operate with illuminating light arriving at a near-normal angle of incidence. Sensors employing imaging optics and incoherent light hitting rough surfaces at tangential incidence angles can also be used for lateral displacement sensing. However, since the tangential angle of incidence of the illumination is used to produce suitably large light-dark shadows of the surface topography in the image, such a system is inherently optically inefficient since a significant fraction of the light is specularly reflected out of the detector, Therefore it has no effect on the image formed. In contrast, spot-based displacement sensors can efficiently utilize a larger fraction of the illuminating light from the laser source, allowing the development of optically efficient displacement sensors.
基于斑点的位移传感器的所公开体系结构Disclosed Architecture of Speckle-Based Displacement Sensor
以下的详细说明描述了用于一个这种基于斑点的激光器位移传感器的体系结构,它使用CMOS光电二极管,并有模拟信号组合电路、适量的数字信号处理电路、以及低功率光源,例如850nm垂直腔面发射激光器(VCSEL)。虽然在以下的详细说明中讨论了某些实现细节,但所属领域的技术人员应理解,在不背离本发明的精神和范围的前提下,不同的光源、检测器或光敏元件、和/或用于组合信号的不同电路也可使用。The following detailed description describes the architecture for one such spot-based laser displacement sensor using CMOS photodiodes with analog signal combining circuitry, appropriate digital signal processing circuitry, and a low power light source such as an 850nm vertical cavity Surface emitting lasers (VCSELs). Although certain implementation details are discussed in the following detailed description, those skilled in the art should understand that different light sources, detectors or photosensitive elements, and/or Different circuits for combining signals can also be used.
现参阅图2和3对按照本发明实施例的基于斑点的鼠标加以说明。Referring now to FIGS. 2 and 3, a speckle-based mouse according to an embodiment of the present invention will be described.
图2示出按照本发明实施例的基于斑点的系统200的功能图。系统200包括激光源202、照射光学器件204、成像光学器件208、至少两组多个CMOS光电二极管阵列210、前端电子电路212、信号处理电路214、以及接口电路216。光电二极管阵列210可以配置成提供沿两个正交轴x和y的位移测量。可以使用前端电子电路212中的无源电子组件将每个阵列中的多组光电二极管加以组合,以产生组群信号。组群信号随后可由信号处理电路214进行代数组合,以产生(x,y)信号,提供在x和y方向上OPD位移的幅度和方向的信息。(x,y)信号可由接口电路218转换成x、y数据220,其可由OPD输出。使用这种检测技术的传感器可以具有线性光电二极管的交错组群阵列,称为“差分梳形阵列”。FIG. 2 shows a functional diagram of a blob-based system 200 according to an embodiment of the invention. System 200 includes
图3示出这种光电二极管阵列302的一般配置(沿一个轴),其中表面304由相干光源,例如垂直腔面发射激光器(VCSEL)306和照射光学器件308照射,且其中阵列302中交错组群的组合用作对斑点图像所产生的亮-暗信号空间频率的周期性滤光器。Figure 3 shows a general configuration (along one axis) of such a
来自粗糙表面304的斑点被成像到具有成像光学器件310的检测器平面。优选的是,成像光学器件310是远心的,以求有最佳性能。Spots from the
在一个实施例中,在两个独立正交阵列中执行梳形阵列检测,以获得在x和y上的位移估算。一个小型的这种阵列302示于图3。In one embodiment, comb array detection is performed in two separate orthogonal arrays to obtain displacement estimates in x and y. A small
检测器中的每个阵列包括N个光电二极管组,每组有M个光电二极管(PD),排列起来形成MN线性阵列。在图3所示的实施例中,每组包括四个光电二极管(4PD),称为1、2、3、4。将每组中的PD1电连接(线和)形成组群,PD2、PD3和PD4也一样,得到从阵列出来的四条信号线。它们对应的电流或信号是I1、I2、I3和I4。这些信号(I1、I2、I3和I4)可称为组群信号。通过使用差分模拟电路312产生同相差分电流信号314(I13)=I1-I3,以及使用差分模拟电路316产生正交差分电流信号318(I24)=I2-I4,可实现背景抑制(以及信号加重)。这些同相和正交信号可称为线信号。比较I13和I24的相位就可检测移动的方向。Each array in the detector includes N groups of photodiodes, each group has M photodiodes (PDs), arranged to form an MN linear array. In the embodiment shown in FIG. 3, each group includes four photodiodes (4PD), referred to as 1,2,3,4. The PD1 in each group is electrically connected (wired and) to form a group, and the same is true for PD2, PD3 and PD4, resulting in four signal lines coming out of the array. Their corresponding currents or signals are I 1 , I 2 , I 3 and I 4 . These signals (I 1 , I 2 , I 3 and I 4 ) may be referred to as group signals. By using the
如图3所示使用4N检测的梳形检测器的一个困难在于,它们会具有不可接受的大差错率,除非他们具有非常大的阵列,例如在阵列102中有多于数百个的检测器或光电二极管。由于在落到阵列不同部分上的光强度之间的有效平衡而使振荡信号很弱时,这些差错就会产生。在图4中的仿真例如帧65中及其附近,振荡信号的幅度就相对较小。参阅图4,图中示出同相(原始)信号和正交信号。帧号沿水平轴示出。One difficulty with comb detectors using 4N detection as shown in FIG. 3 is that they can have unacceptably large error rates unless they have very large arrays, such as more than a few hundred detectors in
多行检测器阵列multi-row detector array
对该基本噪声源的一个解决方案是,使数行这些检测器或光敏元件成套排列或排列在一起。有两个成套排列的行502-1和502-2的检测器示意于图5。还示出了来自这两行的结果振荡同相信号504-1和504-2。在这种检测器中,当一行产生弱信号时,可以根据来自另一行的信号测量速度。例如,在帧2400附近,同相信号504-1具有相对较小的幅度,但第二同相信号504-2则具有相对较大的幅度。如以下所示,当振荡幅度较大时,差错率较小。所以,“右”行(即,具有相对较大幅度振荡的那一行)可被选中,并可作低差错估算。One solution to this fundamental source of noise is to have rows of these detectors or photosensitive elements arranged in sets or together. A detector with two nested rows 502-1 and 502-2 is shown schematically in FIG. The resulting oscillating in-phase signals 504-1 and 504-2 from these two rows are also shown. In this type of detector, when one row produces a weak signal, velocity can be measured from the signal from the other row. For example, around frame 2400, the in-phase signal 504-1 has a relatively small amplitude, but the second in-phase signal 504-2 has a relatively large amplitude. As shown below, when the oscillation amplitude is large, the error rate is small. Therefore, the "right" row (ie, the row with relatively larger amplitude oscillations) can be selected and evaluated with low error.
仿真方法simulation method
为演示图5配置的功效,在方形网格上产生斑点图案,每个方格中具有随机和独立的强度值。斑点大小,或网格间距,设定为20微米。产生代表检测器阵列的另一网格,它具有可变的尺寸,并以恒速在斑点图案上扫描。每个检测器或光敏元件上的瞬时强度与同一组群中的其他光电流求加来确定信号。以下的仿真使用具有恒定的水平检测器或光敏元件间距的“4N”检测器方案。To demonstrate the efficacy of the Figure 5 configuration, a speckle pattern was generated on a square grid with random and independent intensity values in each square. The spot size, or grid spacing, was set at 20 microns. Another grid representing the detector array is generated, which has variable dimensions and is scanned at a constant speed over the spot pattern. The instantaneous intensity at each detector or photosensitive element is summed with other photocurrents in the same group to determine the signal. The following simulations use a "4N" detector scheme with constant horizontal detector or photosensitive element spacing.
差错率计算Error rate calculation
这些仿真的示例输出示于图6,图中示出来自4N梳形检测器的仿真同相(原始)信号602-1和正交信号602-2。还示出了由这两个信号定义的矢量的幅度(长度)604和相位(角度)606。在此示范仿真中,每个阵列包括84个检测器或光敏元件,以5%最大速度工作。An example output of these simulations is shown in Figure 6, which shows simulated in-phase (raw) signal 602-1 and quadrature signal 602-2 from a 4N comb detector. Also shown is the magnitude (length) 604 and phase (angle) 606 of the vector defined by these two signals. In this exemplary simulation, each array includes 84 detectors or photosensitive elements, operating at 5% of the maximum speed.
这些图上的水平轴示出帧计数;在该情况下,使用了4000个单独测量(帧)。下面两条曲线是同相602-1和正交602-2信号(分别为组群1减组群3,和组群2减组群4)。从这两条曲线就可确定信号长度604和角度606,如上面两条曲线所示。请注意,同相602-1和正交602-2信号非常相似,因为它们取决于斑点图案的同一部分。The horizontal axis on these graphs shows frame counts; in this case 4000 individual measurements (frames) were used. The lower two curves are the in-phase 602-1 and quadrature 602-2 signals (group 1 minus
此数据可用来计算速度。在此实例中,我们使用简单的零交叉算法进行速度计算。在每一帧,计算在前两个正走向零交叉之间的帧数τ。正走向零交叉就是线斜率为正以使信号由负值走向正值的零交叉。在此情况下,τ代表前进20微米(μm)所需的帧数估算。考虑帧速率(每单位时间的帧)为f,且检测器间距(从一组群元件的开始到下一组群元件的距离)为p。则估算的速度(速率)v为:This data can be used to calculate speed. In this example, we use a simple zero-crossing algorithm for velocity calculations. At each frame, calculate the number of frames τ between the previous two positive going zero crossings. A positive going zero crossing is a zero crossing where the slope of the line is positive to move the signal from negative to positive. In this case, τ represents an estimate of the number of frames required to advance 20 micrometers (μm). Consider the frame rate (frames per unit of time) as f and the detector pitch (distance from the start of a group of elements to the next group of elements) as p. Then the estimated velocity (velocity) v is:
v=f*p/τ (公式4)v=f*p/τ (Formula 4)
最大速度vmax是奈奎斯特速度的一半。该结果的直方图示于图7。The maximum velocity v max is half the Nyquist velocity. A histogram of the results is shown in FIG. 7 .
参阅图7,该直方图示出64个光敏元件检测器,4N检测器以81%最大速度工作的估算速度。在4.938帧的垂直线701代表根据数据估算的实际速度。直方图中不同的点标记用于数据集的不同选择:第一标记702表示当所有帧都包括在内时的发生数;第二标记704表示不包括下面17%的幅度分布中的那些帧时的发生数;第三标记706表示不包括下面33%的幅度分布中的那些帧时的发生数;第四标记708表示不包括下面50%的幅度分布中的那些帧时的发生数;以及第五标记710表示不包括下面67%的幅度分布中的那些帧时的发生数。Referring to Figure 7, the histogram shows the estimated speed for a 64 photosensitive element detector, 4N detector operating at 81% of the maximum speed. The vertical line 701 at frame 4.938 represents the actual speed estimated from the data. Different point markers in the histogram are used for different selections of data sets: the first marker 702 indicates the number of occurrences when all frames are included; the second marker 704 indicates when those frames in the lower 17% of the magnitude distribution are not included the number of occurrences; the third mark 706 represents the number of occurrences when those frames in the amplitude distribution below 33% are not included; the fourth mark 708 represents the number of occurrences when those frames in the amplitude distribution below 50% are not included; and The five marks 710 indicate the number of occurrences when those frames in the lower 67% of the amplitude distribution are not included.
第一标记702的点,包含所有数据,示出了在5帧有强峰值以及迅速向两侧递减的分布。在4.938帧的垂直线701,我们称其为“真值”,是所估算的实际速度。在这条线的每一侧(即在4帧和5帧处)有数据中两个相对最强的峰值。The points of the first marker 702, containing all the data, show a distribution with a strong peak at
为了此仿真,我们将落在这两个最强峰值外的任何点计数为差错。换句话说,距“真值”大于一帧的估算值即被定义为属于“差错”。这是一个相当严格的差错定义,因为在随后的周期中常会形成这种差错。如果实际速度位于靠近整数的帧处,则会有很大一部分差错距“真值”仅稍稍大于一帧。例如,图7中在6帧的点距4.938帧的估算“真值”仅稍稍大于一帧。在该相当严格的定义下,在6帧的这些点都会被认为是“差错”。For the purposes of this simulation, we count any point that falls outside of these two strongest peaks as an error. In other words, estimates that are more than one frame away from the "truth" are defined as "errors". This is a fairly strict definition of an error, since it often occurs in subsequent cycles. If the actual velocity is at a frame close to an integer, there will be a large fraction of the error that is only slightly more than one frame from the "true value". For example, the estimated "true value" of 4.938 frames at 6 frames in Figure 7 is only slightly more than one frame. Under this rather strict definition, these points in 6 frames would all be considered "errors".
图8示出在4N检测器中作为元件数函数的差错率。参阅图8,可见随着检测器或光敏元件数的增加差错率下降,如以前工作所预期。Figure 8 shows the error rate as a function of the number of elements in a 4N detector. Referring to Figure 8, it can be seen that the error rate decreases with increasing number of detectors or photosensitive elements, as expected from previous work.
对于这些测量,差错率是对七(7)个不同的速度计算和平均的。For these measurements, error rates were calculated and averaged over seven (7) different speeds.
与矢量长度的关系Relationship to vector length
差错集中在具有弱信号的那些帧中。图7中的数据还示出在对矢量幅度作选择后的数据直方图。例如,第三标记706的点是仅对矢量长度在分布图上部三分之二的那些帧(即:根据信号幅度或信号矢量长度排除下部33%)的速度估算值。所以该数据排除了信号很弱且预期易于有差错的那些帧。正如预期,排除了较小的信号幅度时,零交叉之间的帧数分布就较窄,这样计算的差错率显著改进了。Errors are concentrated in those frames with weak signals. The data in Figure 7 also shows a histogram of the data after selection of the vector magnitude. For example, the points marked 706 are velocity estimates for only those frames with vector lengths in the upper two-thirds of the profile (ie, excluding the lower 33% based on signal magnitude or signal vector length). So the data excludes those frames where the signal is weak and expected to be prone to errors. As expected, when smaller signal amplitudes are excluded, the distribution of frame numbers between zero crossings is narrower, resulting in a significant improvement in the calculated error rate.
通过排除较小的信号幅度而在差错率方面的改进示于图9。图9示出了差错率与信号幅度的关系。更具体的说,差错率示为对所用信号矢量长度的最小百分点的关系。参阅图9,可见矢量长度分布的上部三分之二(以数据点902代表)具有的差错率仅为所有帧的差错率的三分之一(以数据点904代表):即4.8%对14.1%。仅使用上部第三个(以数据点906代表)使差错率进一步降到1.2%。The improvement in error rate by excluding smaller signal amplitudes is shown in Figure 9. Figure 9 shows the error rate versus signal amplitude. More specifically, the error rate is shown as a function of the minimum percentile of the signal vector length used. Referring to Figure 9, it can be seen that the upper two-thirds of the vector length distribution (represented by data point 902) has an error rate that is only one-third that of all frames (represented by data point 904): i.e. 4.8% versus 14.1 %. Using only the upper third (represented by data point 906) further reduces the error rate to 1.2%.
因此,根据排除较小的信号幅度时差错率的改进,从检测器的多行中作行选择的一个方案是选择具有最高信号幅度的行。例如,在图5具有两个成套排列行的情况下,来自第二行504-2的信号被选择用于帧2400,因为在那一点有较大幅度,而来自第一行504-1的信号被选择用于帧3200,因为在那一点有较大幅度。当然,该选择方案可适用于多于两行。此外,代之以使用信号幅度(AC强度)作为线信号质量的量度,可使用其他的质量量度或指示符。Therefore, one approach to row selection from among the rows of the detector is to select the row with the highest signal magnitude, in terms of error rate improvement when smaller signal magnitudes are excluded. For example, in the case of Figure 5 with two nested rows, the signal from the second row 504-2 is selected for frame 2400 because there is a larger amplitude at that point, while the signal from the first row 504-1 was chosen for frame 3200 because there is a larger margin at that point. Of course, this selection scheme can be applied to more than two rows. Furthermore, instead of using signal amplitude (AC strength) as a measure of line signal quality, other quality measures or indicators may be used.
从具有最高线信号质量的行中选择线信号是一种利用来自多行的信号来避免或抵制斑点衰落的方案。此外,还有各种其他的备选方案可实现相同或类似的目的。Selecting the line signal from the line with the highest line signal quality is a scheme to avoid or counteract speckle fading using signals from multiple lines. Additionally, there are various other alternatives for accomplishing the same or a similar purpose.
一个备选方案是对来自不同行的线信号按照它们的幅度(或其它质量量度)进行加权,然后例如再平均加权的信号。在一个实施例中,不是简单地平均加权的信号,而是用采用递归滤波技术的算法对加权的信号组进行更优化的处理。线性递归滤波技术的一个值得注意的实例使用卡尔曼滤波器。[见R.E.Kalman,″A New Approach to LinearFiltering and Prediction Problems,″Trans.ASME,Journal of BasicEngineering,Volume 82(Series D),35-45页(1960).]扩展卡尔曼滤波器可用于非线性估算算法(例如来自梳形检测器排列的正弦信号的情况)。用于基于斑点的光学鼠标的信号性质和测量模型表明:递归数字信号处理算法完全适合于由斑点鼠标前端检测器和电子电路所产生的加权信号。An alternative is to weight the line signals from different rows by their amplitude (or other quality measure) and then eg average the weighted signals again. In one embodiment, rather than simply averaging the weighted signals, the group of weighted signals is more optimally processed by an algorithm using recursive filtering techniques. A notable example of a linear recursive filtering technique uses a Kalman filter. [See R.E. Kalman, "A New Approach to Linear Filtering and Prediction Problems," Trans. ASME, Journal of Basic Engineering, Volume 82 (Series D), pp. 35-45 (1960).] The extended Kalman filter can be used for nonlinear estimation Algorithms (eg in the case of sinusoidal signals from a comb detector arrangement). Signal properties and measurement models for a speckle-based optical mouse show that a recursive digital signal processing algorithm is well suited to the weighted signals produced by the speckle mouse front-end detector and electronic circuitry.
多行排列的仿真Simulation of multi-line arrangement
两行和三行的检测器用同样的技术进行仿真。每一行由斑点图案的独立部分照射。差错率的结果示于图10。Two-row and three-row detectors are simulated using the same technique. Each row is illuminated by a separate part of the speckle pattern. The results of the error rate are shown in Fig.10.
图10示出对于以下运动检测器的差错率:有三(3)行4N检测器1002、有两(2)行4N检测器1004、以及有一(1)行4N检测器1006。还示出了对于3-行数据1012、2-行数据1014、以及1-行数据1016的趋势线。这些差错率是通过对在五千(5000)帧上以三(3)个不同速度的结果进行平均而计算出来的。图上的多个点代表不同的仿真:我们使用四个不同的行作1-行测量;两行的三种不同组合作2-行测量;以及三行的两种不同组合作3-行测量。为确保公正的比较,通过组合原始的四行来构成两行和三行数据。FIG. 10 shows the error rates for motion detectors having three (3) rows of 4N detectors 1002 , having two (2) rows of 4N detectors 1004 , and one (1) row of 4N detectors 1006 . Trendlines are also shown for the 3-row data 1012 , the 2-row data 1014 , and the 1-row data 1016 . These error rates were calculated by averaging the results at three (3) different speeds over five thousand (5000) frames. Multiple points on the graph represent different simulations: we use four different rows for 1-row measurements; three different combinations of two rows for 2-row measurements; and two different combinations of three rows for 3-row measurements . To ensure unbiased comparisons, two-row and three-row data were formed by combining the original four rows.
该仿真示出,例如,单行32个元件具有的差错率稍大于20%。组合两个这种行(总元件数为64)使差错率降到大约13%。这比单行64个元件的结果稍低。组合三个这种行(总元件数为96)得到的差错率大约为8%,降到小于单行差错率的1/2。The simulations show, for example, that a single row of 32 elements has an error rate of slightly greater than 20%. Combining two such rows (for a total element count of 64) reduces the error rate to about 13%. This is slightly lower than the result for a single row of 64 elements. Combining three such rows (total element count of 96) gives an error rate of about 8%, dropping to less than 1/2 the error rate of a single row.
对于较高数量的元件,增加行数的益处更大。组合三行每行128个元件(总元件数为384)使差错率从10%(单行128个元件)降到1.5%(三个这种行的组合),降到小于单行差错率的1/6。For higher component counts, the benefit of increasing the number of rows is greater. Combining three rows of 128 elements in each row (the total number of elements is 384) reduces the error rate from 10% (128 elements in a single row) to 1.5% (combination of three such rows), down to less than 1/ of the error rate of a
路径差错path error
我们可根据该差错率计算路径差错,方法如下。在遍历M计数长的路径时,差错的总数为ME。此处E为以上讨论和计算的差错率。随着表面移动,差错呈现为额外计数和缺失计数。对于在较长距离上的测量,这些差错趋向于抵消,且平均净差错仅以总差错数的平方根增加。所测量的计数数与预期计数相差的数量可以为正或负,但平均起来它具有的绝对值等于差错数的平方根。我们将路径差错定义为:From this error rate, we can calculate the path error as follows. In traversing a path that is M count long, the total number of errors is ME. Here E is the error rate discussed and calculated above. Errors appear as extra and missing counts as the surface moves. For measurements over longer distances, these errors tend to cancel out, and the average net error only increases with the square root of the total number of errors. The measured count can differ from the expected count by a positive or negative amount, but on average it has an absolute value equal to the square root of the number of errors. We define path errors as:
当遍历M计数长的路径时,鼠标平均将产生ME个差错,并以计数结束。所以,在所测量的计数高于预期的计数时,
这仅是平均路径差错的粗略表述,在更精确的计算中,它具有集中在零附近的分布,标准偏差为 This is only a rough representation of the mean path error, in a more precise calculation it has a distribution centered around zero with a standard deviation of
为将此公式应用于上述结果,我们假定分辨率为847点每英寸(dpi)(即每英寸847帧或采样),前进的距离为2厘米(cm)。这得出每次测量667帧(即在前进2cm时有667帧),所以M=667。对于三行每行128个检测器或光敏元件,我们得到的差错率E为1.5%,所以按照公式6,路径差错为0.5%。在较长的距离,路径差错会有显著改进。To apply this formula to the above results, we assume a resolution of 847 dots per inch (dpi) (ie 847 frames or samples per inch) and a distance of 2 centimeters (cm) of travel. This gives 667 frames per measurement (ie 667 frames at 2 cm advance), so M=667. For three rows of 128 detectors or photosensitive elements each, we obtain an error rate E of 1.5%, so according to
使用检测器或光敏元件成套排列组合的检测Detection using detectors or sets of photosensitive elements
使用4N检测的梳形检测器噪声问题的另一解决方案是提供一种检测器,它的阵列包括一行或多行有许多组交错光敏元件组群(N),每组具有许多连续的光敏元件(M),其中M不等于四(4)。换句话说,M是由3、5、6、7、8、9、10等组成的组中的一个数。具体的说,将每第三个、每第五个、每第六个或每第M个检测器或光敏元件组合起来以产生独立的信号用来估算运动。Another solution to the noise problem of comb detectors using 4N detection is to provide a detector whose array includes one or more rows of groups (N) of interleaved photosensitive element groups, each group having a number of consecutive photosensitive elements (M), where M is not equal to four (4). In other words, M is a number from the group consisting of 3, 5, 6, 7, 8, 9, 10, etc. Specifically, every third, every fifth, every sixth or every Mth detector or photosensitive element is combined to generate an independent signal for estimating motion.
图11示出用于组合每第三个1102、每第四个1104、每第五个1108以及每第六个1110检测器或光敏元件,并以相同的检测强度工作的原始信号和正交信号。图11所示的信号是来自具有交错组群光敏元件或检测器的阵列的仿真信号,其中将来自每第三、第四、第五和第六检测器或光敏元件的原始检测组合起来。参阅图11,图中示出了原始信号和正交信号,帧数沿水平轴给出。从图11可见,当检测器或光敏元件的一个分组产生弱信号时,可使用另一分组测量速度。如上所述,当振荡幅度较大时,差错率较小。所以,“右”(较大幅度)信号可以被选中,并可进行低差错估算。Figure 11 shows the raw and quadrature signals for combining every third 1102, every fourth 1104, every fifth 1108, and every sixth 1110 detector or photosensitive element, and operating at the same detection intensity . The signal shown in Figure 11 is a simulated signal from an array with interleaved groups of photosensitive elements or detectors, where the raw detections from every third, fourth, fifth and sixth detector or photosensitive element are combined. Referring to Figure 11, the original and quadrature signals are shown, with frame numbers given along the horizontal axis. As can be seen from Figure 11, when one subgroup of detectors or photosensitive elements produces a weak signal, the other subgroup can be used to measure velocity. As mentioned above, when the oscillation amplitude is large, the error rate is small. Therefore, the "right" (larger amplitude) signal can be selected and a low error estimate can be made.
上述实例包括一百二十(120)个检测器或光敏元件,以约72%最大额定速度工作。图11中图上的水平轴示出帧计数。请注意,原始或同相信号和正交信号非常相似,因为它们取决于同一斑点图案,或由同一斑点图案产生。The above example includes one hundred and twenty (120) detectors or photosensitive elements operating at about 72% of the maximum rated speed. The horizontal axis on the graph in FIG. 11 shows the frame count. Note that the original or in-phase signal and the quadrature signal are very similar in that they depend on, or result from, the same speckle pattern.
如以前所述,该数据可以用于计算速度。在此情况下,我们使用简单的零交叉算法。在每一帧,计算在前两个正走向零交叉之间的帧数τ。这代表前进20微米所需的帧数的估算。考虑帧速率(每单位时间的帧数)为f,且检测器间距(从一组群元件的开始到下一组群元件的距离)为p。则估算的速度v为:As mentioned before, this data can be used to calculate speed. In this case we use a simple zero-crossing algorithm. At each frame, calculate the number of frames τ between the previous two positive going zero crossings. This represents an estimate of the number of frames required to advance 20 microns. Consider the frame rate (number of frames per unit of time) to be f, and the detector pitch (distance from the start of a group of elements to the next group of elements) to be p. Then the estimated velocity v is:
v=f*p/τ (公式4)v=f*p/τ
该速度是沿检测器阵列长轴的总速度的分量。This velocity is a component of the total velocity along the long axis of the detector array.
为了产生与速度相关的信号,对于除4N以外的配置,对各组群检测器或光敏元件进行加权和组合。适用加权系数的一个实施例由以下公式给出:For configurations other than 4N, groups of detectors or photosensitive elements are weighted and combined in order to generate a velocity-dependent signal. One embodiment of a suitable weighting factor is given by the following formula:
以及as well as
式中i跨越从0到M-1的组中所有光敏元件。此处phi是所有加权系数共用的相移。where i spans all photosensitive elements in the group from 0 to M-1. Here phi is the phase shift common to all weighting coefficients.
输出信号的同相加权和(即同相信号)由下式给出:The in-phase weighted sum of the output signals (i.e., the in-phase signal) is given by:
而输出信号的正交加权和(即正交信号)由下式给出:And the quadrature weighted sum of the output signal (i.e. the quadrature signal) is given by:
对于5元件组群,即对于5N配置,这些系数示于图12。在此实例中,形成了5个线“和”(1202-1、1202-2、1202-3、1202-4、1202-5)。原始信号是每个线和乘以其原始权重的总和,其中每个线和的原始权重由图12中的S1列给出。同样,正交信号是每个线和乘以其正交权重的总和,其中每个线和的正交权重由图12中的S2列给出。These coefficients are shown in Figure 12 for a 5-element group, ie for a 5N configuration. In this example, five lines "sum" (1202-1, 1202-2, 1202-3, 1202-4, 1202-5) are formed. The original signal is the sum of each line sum multiplied by its original weight, where the original weight of each line sum is given by column S1 in Fig. 12. Likewise, the quadrature signal is the sum of each line sum multiplied by its quadrature weight, where the quadrature weight of each line sum is given by column S2 in Fig. 12.
具有连接成6N配置的光敏元件的阵列的加权系数示于图13。对应于六线和的原始加权系数在S1列下给出,而对应于六线和的正交加权系数在S2列下给出。The weighting coefficients for an array with photosensitive elements connected in a 6N configuration are shown in FIG. 13 . The original weighting coefficients corresponding to the six-line sum are given under the S1 column, and the orthogonal weighting coefficients corresponding to the six-line sum are given under the S2 column.
具有连接成4N配置的光敏元件的阵列的加权系数示于图14。对应于四线和的原始加权系数在S1列下给出,而对应于四线和的正交加权系数在S2列下给出。对于4N梳形,加权系数都是0或+/-1,且系统可简化为差分放大器,如图3所示和结合图3所述。The weighting coefficients for an array with photosensitive elements connected in a 4N configuration are shown in FIG. 14 . The original weighting coefficients corresponding to the four-line sum are given under the S1 column, and the orthogonal weighting coefficients corresponding to the four-line sum are given under the S2 column. For a 4N comb, the weighting coefficients are all 0 or +/-1, and the system can be simplified as a differential amplifier, as shown in and described in conjunction with FIG. 3 .
在另一方面,本公开内容针对的传感器其具有的检测器有两个或更多不同分组的光敏元件。具有元件多个分组的这种实施例允许产生多个独立信号用于运动估算。In another aspect, the present disclosure is directed to sensors having detectors with two or more differently grouped photosensitive elements. Such an embodiment with multiple groupings of elements allows multiple independent signals to be generated for motion estimation.
例如,如果将具有不同M值的梳形组合在同一传感器中(例如4N和6N),且光敏元件的宽度保持恒定,我们从图15所示的排列,即具有不同但却平行的阵列中可获得良好的性能。图15是按照本发明的实施例两行阵列的排列框图,具有连接成6N配置1502和4N配置1504的光敏元件。在此情况下,测量两个不同的斑点图案,每行一个。For example, if combs with different values of M are combined in the same sensor (e.g. 4N and 6N), and the width of the photosensitive element is kept constant, we can see from the arrangement shown in Figure 15 that there are different but parallel arrays get good performance. 15 is a block diagram of an arrangement of a two-row array with photosensitive elements connected in a 6N configuration 1502 and a 4N configuration 1504 in accordance with an embodiment of the invention. In this case, two different spot patterns are measured, one for each row.
备选的是,我们可使用相同的阵列和相同部分的斑点图案。这就是上述图11中模型化的情况。这个方法的优点是节省光电二极管空间,以及与每个光电二极管关联的漏电流。它还保存了光子,因为硅上较小的区域需用斑点图案照射。Alternatively, we can use the same array and the same part of the speckle pattern. This is the situation modeled in Figure 11 above. The advantage of this approach is saving photodiode space, as well as the leakage current associated with each photodiode. It also conserves photons, since smaller areas on the silicon need to be illuminated with a speckle pattern.
将具有多个M值的各个光电二极管元件连线起来的一个电路实现方案示于图16。图16是按照本发明实施例的示意图,其中使用电流镜以重新使用相同元件输出的方式来实现4N、5N和6N加权组。图16的电路1600产生多个独立信号用于运动估算,每个独立信号用于不同的M配置。在此实例中,用电流镜1604使每个检测器或光敏元件1602的输出电流加倍。使用按照不同M配置排序的连线结构1606将这些输出连接在一起,对这些电流求和。对于多个M值,这些连线结构1606将每第M个输出电流加在一起。加权幅度则由电流减少元件1608施加。对于每个同相和正交输出,另一连线结构1610将用于正权重的电流总加在一起,并分别将来自负权重的电流总加在一起。最后,对于每个同相和正交输出,差分电路1612接收用于正和负权重的各自电流,并产生输出信号。A circuit implementation for wiring individual photodiode elements having multiple values of M is shown in FIG. 16 . Figure 16 is a schematic diagram in which current mirrors are used to implement 4N, 5N, and 6N weighted groups in a manner that reuses the same component outputs in accordance with an embodiment of the present invention. The circuit 1600 of FIG. 16 generates multiple independent signals for motion estimation, each for a different M configuration. In this example,
在图16所示的具体实例中,对M=4、5和6,产生独立的同相和正交输出。在其他实现方案中,可以对其它M值产生同相和正交输出。而且,可以对更多(或更少)的M值产生同相和正交输出,不必刚好是按图16中具体实例的对3个M值。In the specific example shown in Figure 16, for M=4, 5 and 6, separate in-phase and quadrature outputs are produced. In other implementations, in-phase and quadrature outputs can be generated for other values of M. Also, the in-phase and quadrature outputs can be generated for more (or fewer) values of M, not necessarily exactly 3 values of M as in the specific example in FIG. 16 .
在备选电路实现方案中,每个检测器或光敏元件可馈送具有不同增益的多个电流镜,以使同一检测器或光敏元件能够对于不同的检测器周期(M值),对不同的、独立的同相和正交总和起作用。In an alternative circuit implementation, each detector or photosensitive element can feed multiple current mirrors with different gains, so that the same detector or photosensitive element can be used for different detector periods (M values) for different, Independent in-phase and quadrature sums work.
在另一备选电路实现方案中,可使用模数转换器(ADC)电路对检测器值单独采样,或将检测器值复用并顺序采样,且数字化的值然后可被处理以产生独立的总和。在又一电路实现方案中,检测器输出的模拟总和可由共享时分复用的或多个同时的ADC电路进行处理。有许多电路实现方案可以完成此任务,其中不同的实现方案权衡各种因素,如电路复杂性、功耗、和/或噪声指数。In another alternative circuit implementation, the detector values may be sampled individually using an analog-to-digital converter (ADC) circuit, or the detector values may be multiplexed and sampled sequentially, and the digitized values may then be processed to produce independent sum. In yet another circuit implementation, the analog sum of the detector outputs can be processed by a shared time-multiplexed or multiple simultaneous ADC circuits. There are many circuit implementations to accomplish this task, with different implementations weighing various factors such as circuit complexity, power consumption, and/or noise figure.
图5和15中所示的实施例示出多行的一维阵列。这些行沿其短轴连接起来-一个叠一个。备选的是,使两行沿长轴连接起来也很有用,如图17所示。The embodiments shown in Figures 5 and 15 show a one-dimensional array of rows. The rows are joined along their short axis - one on top of the other. Alternatively, it is also useful to have two rows joined along the long axis, as shown in FIG. 17 .
在图17中,单个一维阵列被分成两部分,左侧1702和右侧1704。每一侧都可配置成具有相同M值的梳形排列。在图17的具体实现方案中,M=5。其它实现方案可使用其它M值。左侧1702产生一组信号1706,而右侧1704产生第二组信号1708。这两组信号可选择地组合成第三组信号1710。因此,根据信号幅度或上述其它机制,共有三组信号可以从中选择。这种排列具有的优点是,组合的那组信号1710受益于有效的较长阵列,它应具有优异的噪声属性。In FIG. 17 , a single one-dimensional array is divided into two parts, left 1702 and right 1704 . Each side can be configured in a comb arrangement with the same M value. In the specific implementation scheme of FIG. 17, M=5. Other implementations may use other values of M. The left side 1702 produces a set of signals 1706 and the right side 1704 produces a second set of signals 1708 . These two sets of signals are optionally combined into a third set of signals 1710 . Thus, there are three groups of signals from which to choose, based on signal magnitude or other mechanisms as described above. This arrangement has the advantage that the combined set of signals 1710 benefits from an effectively longer array, which should have excellent noise properties.
上述详细的实施例示出沿单一轴定向的检测器或光敏元件一即在一维阵列中,尽管可能有数行。在另一实施例中,检测器或光敏元件为二维阵列,例如,如图18所示。The above detailed embodiments show detectors or photosensitive elements oriented along a single axis - ie in a one dimensional array, although there may be several rows. In another embodiment, the detectors or photosensitive elements are a two-dimensional array, eg, as shown in FIG. 18 .
在图18中,21×9元件的示例二维(2D)阵列排列成9元件组(在3×3矩阵中)。一组中给定位置上的元件(示为具有相同颜色)通过共用连线分为一组群。用这种配置,在x和y上的运动信息可由同一组检测器或光敏元件收集。虽然在图18的示例2D阵列中每组是3×3矩阵,但其它实现方案可有其它维度的组。一组在水平维度(x)1802上具有的元件数可不同于在垂直维度(y)1804上的元件数。此外,虽然图18所示的光敏元件尺寸都相等且是矩形,但备选实现方案可使用不同尺寸和/或形状不是矩形的光敏元件。In Figure 18, an example two-dimensional (2D) array of 21x9 elements is arranged in groups of 9 elements (in a 3x3 matrix). Elements (shown with the same color) at a given position in a group are grouped into groups by common wires. With this configuration, motion information in x and y can be collected by the same set of detectors or photosensitive elements. While each group is a 3x3 matrix in the example 2D array of Figure 18, other implementations may have groups of other dimensions. A set may have a different number of elements along the horizontal dimension (x) 1802 than the number of elements along the vertical dimension (y) 1804 . Furthermore, while the photosensitive elements shown in FIG. 18 are all equally sized and rectangular, alternative implementations may use photosensitive elements of different sizes and/or shapes that are not rectangular.
本发明的特定实施例和实例的上述说明是为了图示和说明的目的而提出,且虽然已通过某些前述实例对本发明作了说明,但不应认为本发明受其限制。说明和图示并不旨在穷举或将本发明限于所公开的精确形式,根据上述内容可以有许多在本发明范围内的改动、改进和变化。本发明的范围应包括本文所公开的,以及由本文所附权利要求书及它们的等效物所包括的一般领域。The foregoing descriptions of specific embodiments and examples of this invention have been presented for purposes of illustration and description, and while the invention has been illustrated by certain foregoing examples, it should not be construed as limiting thereto. The descriptions and illustrations are not intended to be exhaustive or to limit the invention to the precise form disclosed, and many modifications, improvements and variations are possible in light of the above teaching and are within the scope of the invention. The scope of the present invention shall include the general field as disclosed herein and covered by the claims appended hereto and their equivalents.
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