CN1980739A - Method and apparatus for mass analysis of samples - Google Patents

Abstract

The invention includes an apparatus and method for mass analysis of each of an array of samples contained in separate sample containers (18, 18'). The sample container (18, 18') is placed on or suspended from a plurality of sensors (19, 19', 19", 19" ') which preferably comprise an array of microbalances which provide output signals comprising mass data for the sample array.

Description

Sample mass analysis method and device

Background of the invention

The present invention relates to the simultaneous measurement of mass characteristics of an array of samples. More specifically, the invention relates to determining the mass of an array of samples in the microgram to gram range, and in higher and lower ranges.

Laboratory-scale gravity measurements have been hampered by relatively bulky equipment and inefficient measurement speeds. More efficient methods of monitoring and recording the quality of large quantities of material are needed to evaluate candidate performance and/or screen and select the best candidates for further development.

The optimization of materials for applications such as catalysts and adsorbents often requires the characterization of large numbers of samples of such materials as quickly as possible. Analytical techniques for such characterization must be fast and accurate to handle the large volumes of optimization-related data. Parallel rather than serial measurements facilitate rapid generation of data for such characterization. These measurements are particularly useful for determining surface properties such as surface area and pore size, which are indicators of potential performance in a variety of applications.

Over the past decade, micromachining technology has been widely used. Silicon micromachining in particular enables the full integration of mechanical and sensing elements, opening up the possibility of fabricating sensor arrays as a single integrated unit for the cost-effective production of small transducers.

Patent publication US 2002/0028456 A1 discloses an array of sensors arranged on a substrate to measure various material properties of a sample deposited on the substrate. Samples can be deposited on the sensor in solution or by vapor deposition. Properties that can be measured include temperature, heat capacity, thermal conductivity, thermal stability, dielectric constant, viscosity, density, elasticity, capacitance, and magnetic properties.

WO 00/20850 describes a multisensor device for the gravimetric chemical measurement of gaseous or vaporous analytes comprising a substrate and a plurality of sensors made of piezoelectric elements mounted on the substrate through thick film Technology acquired. The sensor is coated with a sensitive coating that absorbs the analyte.

US 5,983,711 discloses a temperature-controlled gravimetric humidity analyzer comprising a sample container connected to a weighing device, a temperature sensor, a heater and a controller responsive to the output signal of the temperature sensor. However, this patent does not disclose an array of weighing devices.

WO 03/071241 discloses a spring balance for microweighing comprising a loading platform suspended by at least three flexible springs in a surrounding frame, with bridge strain gauges for measuring the strain on one side of the flexible springs. However, an array of weighing devices is not proposed.

US 4,566,326 proposes an automated sorption and desorption analyzer using multiple sample cells with associated valves, controllers and sensors to perform measurements on multiple powder samples. The analyzer can nearly simultaneously measure surface area, total pore volume, micropore volume, average pore radius, and pore size and surface area distribution on multiple samples. Such analyzers represent known art for the purpose of the present invention.

However, the art does not address a device or method for mass analysis of an array of samples contained in individual sample containers.

Summary of the invention

The present invention provides apparatus and methods for mass analysis of each of an array of samples contained in an array of individual sample containers positioned to interact with a plurality of sensors providing The output signal of the quality data. Through this analysis, the present invention enables rapid determination of various sample properties related to sample quality. Subsequent analyzes of other sample arrays are also expedited.

In a more specific embodiment, the present invention provides an apparatus for performing mass analysis of each of an array of samples comprising an array of distinct sample containers containing samples positioned to interact with a plurality of microbalances, The sensor provides an output signal comprising mass data for the sample array.

In yet another specific embodiment, the present invention provides an apparatus for mass analysis of each of an array of samples comprising an array of distinct sample containers containing samples positioned to interact with a plurality of spring balances such that The sensor provides an output signal comprising mass data for the sample array.

In another embodiment, the present invention provides an apparatus for mass analysis of each of an array of samples comprising an array of sample-holding baskets positioned to interact with a plurality of microbalances such that The sensor provides an output signal comprising mass data for the sample array.

In another embodiment, the present invention provides a method of mass analyzing an array of samples by placing the array of samples in an array of individual sample containers, positioning the sample containers so that they are compatible with providing mass data comprising the array of samples The output signals of multiple sensors interact, and the quality of each sample is determined based on the output signals.

In another more specific embodiment, the present invention provides a method for mass analysis of a plurality of samples by placing the samples in an array of individual sample containers, placing the sample containers such that they are compatible with providing a mass comprising the array of samples. A plurality of sensors interacting with a first output signal of data, then subjecting the sample array to a changed environmental condition, then measuring a second output signal from the sample array, and by comparing the output signal from the sample array before and after the environmental condition change The output signal of the sample array determines one or more properties of each sample.

Brief description of the drawings

Figure 1 shows a broader embodiment of the device of the invention comprising a small array of six sample trays interacting with the same number of sensors.

Figure II shows the device of the invention in an embodiment comprising spring balances in the array unit.

Figure III shows an example of a bridge circuit that can be used for mass analysis.

Figure IV is a cross-sectional side view of a spring balance associated with a base member.

Figure V shows the device of the present invention in an embodiment comprising hanging baskets in the array unit.

Figures VI-A and VI-B show another arrangement of the microbalance as a cantilever.

Detailed description of the invention

In general, the present invention provides apparatus and methods for mass analysis of each of an array of samples contained in an array of individual sample containers positioned to interact with a plurality of sensors that provide An output signal comprising mass data for the sample array. Although elements of the method and associated apparatus are described in the singular, it is to be understood that combinations of two or more of the various elements or of the entire apparatus in parallel or in series are also within the scope of the invention.

An "array" of samples and sample containers includes at least 4, more typically 6 or more, typically at least 8, optionally 48 or more samples and containers. It is also within the scope of the invention to include certain multiples of these numbers in the array, for example 24, 96, 392 or 1264 arranged in rows and columns similar to microtiter plates. Preferably, the sample containers are spatially separated such that individual members of the array are separately addressable. A "plurality" of sensors is within the same numerical ranges as described above for an "array", and preferably the number of sensors is the same as the number of samples and sample containers. The present invention is considered in contrast to known techniques using parallel or sequential analysis, according to which the equipment required for analysis is relatively expensive and/or time consuming.

"Sample" refers to a substrate to be subjected to mass analysis. These substrates are generally solid, but need not be limited to solid materials, such as liquids, gels, slurries, and the like. Viable examples of liquid applications are in ionic liquids, monitoring gas solubility in liquids, etc. Possible examples of solid samples include, but are not limited to, ceramics, molecular sieves, other inorganic compounds, composite materials, metals and metal alloys, intermetallic compounds, carbon, ionic solids, molecular solids, covalent network solids, organometallic materials, organic polymers, and their combination. Substances for which surface properties are important are preferred, and particularly preferred substances include metal oxides, molecular sieves and catalysts.

The sample form is not critical to the definition of the invention. If a solid material, the sample may be a single solid monolith, or as a particle, film, plate, disk, bead, sphere, rod, wire, or any form suitable for analysis. Preferably, the solid sample is in particulate form, especially preferred is the sample in fine powder form. In fine powders, the average particle size is typically from 0.01 micron to 1000 microns, more typically from 0.1 micron to 100 microns.

The present invention includes an array of sample containers, wherein a sample container or containers are provided for each sample to be analyzed. A sample container may be any device that can hold a sample and that can be moved to and from a sensor as defined below. Preferably, the sample container or container provides an upwardly facing concave surface which accommodates the sample without significant risk of spillage. Suitable formations include, but are not limited to, plates, cups, saucers, plates, recesses and wells. Alternatively, the sample container may include a basket that is supported on the sensor by hooks, loops, loops, clips, clasps, or other fasteners. The advantages of placing the sample in the sample container to move to and from the sensor include:

^* Avoid contamination of the sensor due to direct contact with the sample, and

^* Ability to perform measurements simultaneously with sample loading and unloading and sample container cleaning with multiple sets of sample containers.

Any material that does not adversely affect the analytical results is suitable for the sample container. Preferably, the surface of the sample container which comes into contact with the sample is stable and inert to the sample under all conditions of the analytical method. For sample containers, one or both of ceramic and metallic materials are particularly preferred.

Optionally, inputs to the assay are provided via sample containers. For example, and without limitation, the sample container may contain a thermally conductive material through which heat is supplied to the sample or the temperature of the sample is measured. Alternatively, electrical energy can be delivered to the sample through the sample container. It is also within the scope of the present invention to physically or chemically coat or layer the sample container with a material that facilitates the analysis. In addition, the sample itself can be applied to the surface of the sample container by physical or chemical bonding, evaporation, and the like.

Following analysis of the array of samples, each analyzed sample may be unloaded from each sample container and the array of sample containers loaded with a new array of samples. Preferably, one or more additional sample arrays have been prepared in additional sample containers while the analysis is being performed, so that the additional sample arrays can be positioned in conjunction with the Multiple sensors interact. The array of sample containers is preferably contained in a tray that can be lowered towards the device containing the sensor to place the sample containers in place on the sensor. Thus, sample preparation and unloading do not delay sample analysis and more efficient use is made of the device containing the sensor.

Figure 1 shows an array 1 of six individual sample containers positioned to interact with six sensors providing output signals comprising mass data for the sample array. For each unit of six sample containers and spring balances, the sensor comprises a spring balance 19 housed in the frame 2 as described below. As noted above, an "array" or "plurality" comprises groups of at least 4 and preferably greater numbers of such elements.

Suitable sensors include any type of sensor that can measure changes in mass and support a sample container. Sensor materials include one or more of metals, silicon, other semiconductor materials, glass, carbon, polymers, films, and the like, with semiconductor materials such as silicon being particularly preferred. Preferred sensors of the invention include microbalances, particularly spring balances as described in International Publication WO 03/071241, which disclosure is hereby incorporated by reference in its entirety. A preferred spring scale 19 comprises a loading platform suspended in a surrounding frame by at least three flexure springs, with bridge strain gauges for measuring strain on one side of the flexure springs.

Figure II schematically shows a top view of a preferred embodiment of the invention. In this example, the spring scale 19 has a square shape with a loading platform 1 in its center on which the sample containers as shown in FIG. 1 are placed. The loading platform 1 is suspended in the frame 2 by means of flexural beams or flexural springs 3 which in the example shown are arranged along each side of the loading platform and have slots etched or machined 5 and 6 to provide a flexible rod such that the slot has one slit portion 5 outside the flexible rod 3 and a continuous portion 6 in the next flexible rod 3 . In this configuration, the flexible rod 3 becomes relatively long and compliant, ie the loading platform 1 can generate deep swings. Each flexible rod 3 is located in the gap between the frame 2 and the loading platform 1 , which gap is delimited by the slit portions 5 and 6 . Each flexible rod 3 has a joint 7 with the loading platform 1 , which is directly opposite the joint 8 of the adjacent flexible rod with the frame 2 . A sensor is used to record the load on the loading platform 1, reference 4 represents the strain gauge used for this purpose. When the sample container is placed on the loading platform 1 , the platform sinks away from the observer, and the flexible rod 3 bends and assumes a shallow S-like shape. The loading platform will then rotate slightly along an axis perpendicular to the loading platform surface, since the length of the rod 3 remains substantially constant.

When loaded on the platform, due to the above-mentioned S-shape of the flexible rod 3, the strongest mechanical stresses in the rod are found in the area where the frame 2 and the loading platform 1 intersect (ie at the joints 7 and 8). Thus, for example, it is advantageous to mount the strain gauges 4 as shown in FIG. II. Alternatively, the strain gauges could be mounted at the intersection with the loading platform instead of the frame, but this would require longer leads from the strain gauges to the signal processing equipment. In the manner in which the strain gauges 4 are mounted as shown in Figure II, all four strain gauges are mounted in the same orientation to optimize the connection of the sensors in the Wheatstone bridge. Alternatively, the sensors/strain gauges can be mounted in different orientations; for example two of them rotated by 90° relative to the other two in case of changing the bridge.

The strain gauge 4 can be mounted on top of the junction (junction 8 or 7) as a separate sensor by deposition and patterning, or by gluing off-the-shelf resistors. Alternatively, strain gauges in the form of piezoresistors may be fabricated as part of an advantageous silicon structural integrity, or mounted as surface elements in any suitable manner.

In an advantageous embodiment of the invention, the loading platform, flexible spring and frame are formed as a micromachined or etched part of a semiconductor material; preferably silicon. Strain gauges (preferably piezoresistors) mounted at the intersections between the flexible springs and the frame or loading platform may be integrated in this solid material part. Therefore, semiconductor materials that are mainly used in the manufacture of spring balances can also be used in the manufacture of sensor elements for detecting loads.

Figure III shows a bridge circuit that can be used to provide mass analysis by the scale of the present invention. The bridging circuit shown is a Wheatstone bridge suitable for the situation of Figure II, where each strain gauge 4 is mounted in the same direction. The strain gauges 4 are in the form of resistors and a Wheatstone bridge bridge circuit is completed by a power source (battery) 11 and a measuring instrument 12 . This is a standard type of circuit, but other bridging circuit variations can also be used in conjunction with other embodiments having other strain gauge configurations.

In its broadest embodiments, the spring balance of the present invention is not limited to a single component or made of semiconducting materials. Furthermore, a variety of geometries can be used as long as the central loading platform is suspended by at least three flexible springs connecting the loading platform to the surrounding frame.

Another embodiment is a substantially circular loading platform within a circular opening in the frame. Curved flexible rods or springs are attached to the loading platform and frame respectively. Typically, the joints are directly opposite each other, but they may overlap in the gap between the loading platform and the frame, or even hover over/along each other. Strain gauges as previously described are located at the junction of the flexible rod and the frame or platform, ie at the point where the surface stresses are strongest during the weighing operation.

Another possible configuration includes a triangular loading platform and three flexible bars between the loading platform and the frame. Strain gauges at, for example, three junctions can be connected in varying bridging fashion. Thus, a variety of geometries meet the requirements of the present invention.

A configuration with four flex springs is preferred for at least three reasons:

1. In a standard type of Wheatstone bridge, exactly four resistors are included.

2. In order to have a stable loading platform, too many poles should not be used.

3. For microscales made of silicon, it should be noted that the silicon (100) sheet has four-fold symmetry, which requires piezoresistors to be placed along the [011] or [011] direction.

Figure IV schematically shows a cross-section through the central part of the spring balance 19 comprising the platform 1 on which sample containers have been placed according to the Figure I embodiment of the invention. The central area containing the platform is thinned relative to the frame 2, which may be thicker. The flexible rod 3 is shown, where two rods can be seen from the side view and they are S-shaped.

The embodiment shown in Figure IV also shows an optional base member 24, which may be made of glass, and is attached to the frame 2 by anodic bonding. By extending the base part 24 below the loading platform 1 , it forms the hem limit of the loading platform 1 as a safety function of the flexible spring 3 . As shown, base member 24 may also have a central opening 25 for inspection and cleaning. Above the scale, an optional top cover 26 can be provided as a protective end stop and possible upper swing limit of the loading platform 1 . Optionally, there is a central opening 27 in the top cover to allow the object to be weighed to be lowered onto the loading platform. Contact parts can be provided for the signal leads from the strain gauges. The top cover may be glass and is secured to the base member 24 .

As shown in Figure V, another embodiment uses a sensor 19' and a sample container in the form of a hanging basket on a microbalance. The rack contains the array of microbalances, a portion of which is shown in this figure. The sample container 18' in the form of a hanging basket is suspended from the microbalance by a loop 29 attached to the microbalance and a wire 30 from the loop 29 to the basket sample container 18'. In this embodiment, the bucket sample container, the connection device to the microbalance, and the means for connecting the connection device to the bucket sample container can be any device known in the art that can hold the sample and perform the analysis during mass analysis. remain stable under conditions.

Although mass analysis is preferably performed using strain gauges, especially piezoresistors in a Wheatstone bridge as described above, it is also within the scope of the invention to use other methods of detecting deflection of the microbalance. These methods include, but are not limited to, the use of photodetectors or magnetic detectors. In one embodiment, a light detector is used to measure the deflection signal from each microbalance.

In another embodiment, the sensor 19" is a microbalance comprising a cantilever; two examples are shown in Figures VI and VII. In Figures VI-A and VI-B, the cantilever 31 contains a (It is preferably a ring structure 32 of a gondola). The gondola is connected to the ring of the ring structure 32 of the cantilever 31 by any suitable means, preferably by a wire 30'. The bridge 33 of the cantilever comprises a strain in the form of a piezoresistor instrument 4 to perform mass analysis on the sample placed in the sample container 18'.

In Figures VII-A and VII-B, the sensor 19'' is comprised of a sling structure 32' for suspending the sample container 18', which is preferably a gondola. The gondola sample container 18' is connected to the sling of the sling construction 32 of the cantilever 31' by any suitable means, preferably by wire 30". The bridge 33' of the cantilever 31' comprises a strain gauge 4 in the form of a piezoresistor ', to perform mass analysis on the sample placed in the sample container 18'.

The signal from the microbalance is read by a readout plate and processed by a microcomputer. The temperature dependence of the sensor can be compensated for using the temperature signal. The temperature signal can be provided by a separate resistor or diode, or the total bridge resistance can be monitored.

In measurements where the sample is heated or cooled, the thermoelectric potential at the junction affects the measurement. This can be compensated by periodically switching off the power supply 11 and subtracting the output from the measurement. Compound alternating current excitation and lock-in measurements can also be used.

The computer is equipped with suitable software for designing experiments, controlling the environment, and acquiring and analyzing data to determine sample properties.

Preferably, mass analysis is performed in a controlled environment. The environment can be controlled when the sample and sample containers are placed in one or more suitable sealable chambers that isolate the sample containers from uncontrolled environmental conditions. Environmental conditions to be controlled include, but are not limited to, pressure, temperature, and fluid composition, such as, but not limited to, the atmosphere surrounding the sample and sample containers. Suitable pressures include 10 ⁻¹⁰ Torr to 300 bar, preferably 10 ⁻⁶ Torr to 150 bar; temperatures are typically -200 to 1000°C, more typically less than 500°C. The temperature can be controlled using any suitable heating or cooling device known in the art.

The composition of the fluid medium in the controlled environment can be varied in order to weigh the samples and conduct the tests described below. In the case of a fluid medium, suitable gases include, but are not limited to, nitrogen; carbon monoxide; carbon dioxide; ammonia; SF ₆ ; Various.

Typically, environmental conditions are varied over time to determine sample properties as described below. Changes may include one or more of significant changes in temperature, changes in pressure, and changes in the compositional environment. For example, one or more properties can be determined by first measuring the output signal from the sample array, then varying the environmental conditions of the sample array, then measuring a second output signal from the sample array, and by comparing the first and second Two output signals determine one or more properties of each sample. These steps can be repeated on the test sample in the following order: then exposing the test sample array to further altered environmental conditions, then measuring further output signals from the sample array, and determining by comparing the output signals from further experiments One or more properties of each sample. The deflection signals of the microbalance array can be compared before and after changes in environmental conditions. Preferably, this is accomplished using known sensor curves for each of the plurality of spring balances.

It can also be recorded by recording the characteristic frequency of the load balance and according to the formula (where k is the spring rate, and m is the effective mass) to relate this, thereby measuring the mass. Vibrations can be induced by external excitation of the entire array and then the free oscillation of the individual balances monitored. This method can be used for calibration or measurement when a large offset is superimposed on the converter output (for example by the pyroelectric effect).

use

In addition to sample weighing, the microbalance of the present invention may also have one or more different uses. For example, monitoring changes in sample weight caused by environmental changes or over time can yield data on, inter alia, surface area, pore size and volume, acidity/basicity, and metal functionality. Environmental changes caused by changes in the mass of the sample can be monitored, and a microbalance can be used for reactivity testing.

The microbalance array itself can be used to weigh samples of the sample array. This functionality can be used as a preparatory step for another operation such as characterization, reactivity testing or synthesis. Furthermore, the weight change itself can be a critical part of an analysis involving exposing a set of samples to a specific set of conditions (eg coke deposition for reactivity tests, hydrogen absorption at high pressure). Other possible uses include, but are not limited to:

Isotherms from physisorbed probe molecules:

●Surface area

Surface area is extrapolated from isotherm data using the Langmuir equation (single layer adsorption) or the BET (Brunauer, Emmett, and Teller) equation (multilayer adsorption) or any other suitable method of measurement or calculation. Typically, nitrogen is used as the adsorbate.

●Pore volume

The amount of adsorbate was expressed as the corresponding pore volume using the Kelvin equation.

●Pore size distribution

Typically, adsorption isotherms and the Kelvin equation are combined in various ways to estimate adsorbate film thickness as a function of partial pressure. Use these equations to estimate the pore size distribution of the sample.

●Absorptive capacity

For a given set of conditions (vapor pressure and temperature), the amount of adsorbed probe molecules is measured. This value can be used to rate or compare materials. Typical examples are selective adsorption and gas storage applications. Also of interest is the adsorption capacity of a single adsorbent using a set of probe molecules with various kinetic diameters. This is similar to the McBain measure and helps to grade the pore size of the material.

● Adsorption kinetics (diffusion)

By measuring the rate of uptake of the probe gas, the diffusion constant of the adsorbent/adsorbate system can be estimated. When performed over a temperature range, this method can be used to determine the activation energy of diffusion.

●Adsorption heat

Measurement of adsorption at several temperatures enables calculation of the heat of adsorption for a given sample and adsorbate.

Isotherms from chemisorbed probe molecules:

●acidity

The number of acid sites of the sample can be estimated using the amount of probe base adsorbed by the sample. The acid strength distribution of the sample can be estimated by performing adsorption measurements at several temperatures, or by measuring the amount of base desorbed as a function of temperature.

Examples of probe molecules: NH ₃ , CO, pyridine, trimethylphosphine

○Number of acid sites

○Strength of acid sites

● Alkalinity

Similar to acidity, but using a probe molecule that characterizes alkalinity.

Examples of probe molecules: ethylene, propylene, 1-butene

○Number of basic sites

○Strength of basic sites

●Metallic function

By selecting appropriate probe molecules, the metals loaded on the sample can be characterized. If the amount of metal loaded on the sample is unknown, the amount of probe molecules adsorbed by the metal-functional containing material can be used to determine the amount of exposed metal atoms. If the metal loading is known, this same information can be used to determine what percent of the metal is available to catalyze the reaction. This type of information is very useful for characterizing metal dispersion as a function of impregnation conditions, secondary treatments (eg hydrothermal), and deactivation due to carbon deposition.

Changes in sample mass due to redox of metals on the sample can also be used to characterize metal content, dispersion, and activity.

○CO absorption

○H ₂ S absorption

○H ₂ /O ₂ redox/absorption

atmospheric sampling

A set of materials can be placed in a microbalance array and exposed to a process stream or gas from the ambient environment to characterize the process stream or gas. An example is the selection of a set of porous materials covering a range of pore sizes. Each unique material only adsorbs molecules in a specific size range. By comparing the uptake of each sample simultaneously, airflow can be characterized.

Similarly, gas streams can also be characterized using materials containing specific cations known to alter adsorption properties.

Response Pulse Experiment

●Coking

The reactant flow can be pulsed over a set of samples and the amount of deposited carbon for a given pulse can be measured. This provides data on reactivity and inactivation rates for a set of samples.

● redox

Exposing a set of samples to an oxidizing and/or reducing environment while measuring the weight change yields information about redox activity and capacity. This is similar to the metal test above.

● aggregation

Information about the activity and kinetics of these materials can be assessed by exposing polymerization catalysts or initiators to oligomerizable or polymerizable gases.

Combination technology

The combination of two or more techniques for in situ analysis of properties of a set of samples is a particularly valuable feature of the invention.

●IR temperature record + micro balance measurement

Microbalance measurements can be combined with IR thermographic measurements. In this experiment, a base (or acid) is added to the sample array. During the exposure, a microbalance monitors weight changes and an IR camera monitors thermal changes and heat of adsorption. The simultaneous use of both techniques provides much more information than each technique alone. Information from both measurements can be combined to determine the number and strength of acid (or base) sites in the material.

○Acidity

○ Alkalinity

○Reactivity

●Temperature + micro balance measurement

Monitoring the weight change as a function of temperature, the system can be used as combi-tga (thermogravimetric analysis). Phenomena such as water desorption as a function of temperature, template oxidation of zeolites (airing during temperature changes), carbon combustion kinetics for regeneration studies can be monitored.

●XRD + micro balance measurement.

Microbalance measurements can be combined with combi-xrd (x-ray diffraction) measurements. In this system, a set of samples can be exposed to a probe gas, which allows the measurement of structural information as a function of the amount of probe gas adsorbed. Some application examples could be:

○Effect of water on unit cell size

○ Effect of given hydrocarbon on unit pore size

○ Effect of carbon (coke) on unit pore size (in-situ coke combustion)

The above description and examples illustrate the invention without limiting the scope of the invention. A skilled operator will readily understand how to extrapolate the disclosed parameters for other embodiments of the invention. The invention is limited only by the claims set forth herein.

Claims (10)

1. in an array sample each is carried out the device of quality analysis, it comprises that an array independently holds the shuttle (18 of sample, 18 '), place these containers and make itself and a plurality of sensor (19,19 ', 19 ", 19 ) interact, described sensor provides the output signal of the qualitative data that comprises this sample array.

2. the device of claim 1, wherein said a plurality of sensors (19,19 ', 19 ", 19 ) comprise the microbalance array.

3. the device of claim 2, wherein the microbalance array comprises spring scale array (19).

4. the device of claim 3, wherein spring scale array (19) is whole with the framework of making by micro-cutting work sheet block of material (2).

5. the device of claim 3, wherein each spring scale (19) comprises the loading platform (1) that hangs with one or more flexible spring (3), and each spring scale (19) is equipped with the bridge joint deformeter (4) of strain on each the side that is used to measure described one or more flexible spring (3).

6. the device of claim 5, wherein each described deformeter (4) is a piezoresistor.

7. each device of claim 2-6 is wherein placed shuttle array (18,18 ') it is contacted with the microbalance array.

8. each device of claim 2-6, wherein shuttle array (18 ') comprises the basketry array that is suspended on the microbalance array.

9. each device of claim 2-6 further comprises being used for the compound AC signal generator of the frequency detecting deviation signal of coding and having the wave filter (11,12) of lock-in amplifier.

10. use each the method for device of claim 1-6, comprise the following steps:

(a) an array sample is placed an array independently in the shuttle (18,18 ');

(b) place these independently shuttle (18,18) itself and a plurality of sensor (19,19 ', 19 ", 19 ) are interacted, described sensor provides the output signal of the qualitative data that comprises this sample array; With

(c) determine the quality of each sample according to output signal.

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