CN1975985A - Apparatus and methods for a substrate carrier having an inflatable seal - Google Patents

Abstract

The present invention provides a system, method and apparatus for a substrate carrier. The present invention provides a door opener adapted to use a vacuum source to retract the inflatable seal of the door of a substrate carrier. By retracting the inflatable seal, the door is released from the body of the substrate carrier so that the substrate can be removed and/or inserted into the carrier. A second vacuum source can be applied to the door to hold it securely to the door opener. Many other aspects of the invention are also disclosed.

Description

Apparatus and method for a substrate carrier with an inflatable seal

This application claims priority to U.S. Provisional Patent Application Serial No. 60/738,542, filed November 21, 2005, entitled "Apparaus and Methods for a Substrae Carrier Having an Inflatable Seal," the entire contents of which are hereby incorporated by reference.

technical field

The present invention relates to electronic device fabrication, and more particularly, to apparatus and methods for sealing substrate carrier doors.

Background technique

In general, it is preferred to protect substrates (e.g., patterned or unpatterned semiconductor wafers, glass panels, polymer substrates, reticles, masks, glass plates, etc.) from exposure to any potential pollution particles. Therefore, these substrates must be stored in airtight containers. Often, however, the substrate must be transported to different processing tools in the electronics manufacturing facility. Accordingly, there is a need for methods and apparatus for transporting substrates into sealed containers and systems and methods for accessing substrates without exposing the substrates to potentially contaminating particles.

Contents of the invention

In some aspects, the present invention provides an apparatus for a substrate carrier that includes a door opener that uses a first vacuum source to retract the inflatable seal of the door of the substrate carrier to release the vacuum from the substrate carrier. The main release door.

In other aspects of the invention, a system for sealing a substrate carrier is provided that includes a substrate carrier adapted to hold one or more substrates and a substrate carrier for receiving a substrate carrier from a substrate carrier transport system. Mount port. The loadport includes a door opener adapted to retract the inflatable seal of the door of the substrate carrier using the first vacuum source to release the door from the body of the substrate carrier.

In other aspects of the invention there is provided a method comprising: receiving a substrate carrier at a load port; fitting a door opener to the door of the substrate carrier; applying a first vacuum pressure to the door via the door opener to holding the door; and applying a second vacuum pressure to the inflatable seal to contract the inflatable seal and release the door of the substrate from the substrate carrier.

Other features and aspects of the present invention will become more complete and apparent from the following detailed description, claims and accompanying drawings.

Description of drawings

Figure 1 illustrates a perspective view of an exemplary embodiment of the device of the present invention.

Figure 2 illustrates the apparatus of Figure 1 with the sealing plate of the door opener removed.

FIG. 3 illustrates the apparatus of FIG. 1 in a reverse perspective view showing the reverse side of the substrate carrier door and door opener.

4 illustrates a side view of components of the apparatus of FIG. 3 taken along line 4-4 of FIG. 3 .

Figure 5 illustrates a side view of the apparatus of Figure 4 showing the door opener attached to or engaged with the substrate carrier door.

6 illustrates a cross-sectional side view of the device component of FIG. 3 taken along line 6 - 6 of FIG. 3 .

Figure 7 illustrates a side view of the apparatus of Figure 6 showing the door opener attached to or mated with a FOUP door.

Figure 8 illustrates a system using the inventive FOUP door and door opener of Figures 1-7.

Figure 9 illustrates a flowchart describing example processing according to an embodiment of the present invention.

Detailed ways

The invention relates to a substrate carrier door with an inflatable seal. For convenience, the description will be made in conjunction with the door of a front opening unitary box (FOUP). However, it should be understood that the present invention may be used with any substrate carrier suitable for housing cassettes for transporting substrates, such as semiconductor wafers, glass substrates, polymer substrates, masks, reticles, and the like.

FIG. 1 illustrates a perspective view of an exemplary embodiment of the apparatus of the present invention, generally designated by the reference numeral 100 . Referring to FIG. 1 , apparatus 100 includes FOUP gate 200 . In an exemplary embodiment, the FOUP door 200 may be used in or in conjunction with any suitable front opening unitary pod (FOUP), an example of which is depicted in FIG. 8 . The FOUP door 200 is adapted to be placed in a door frame (not shown) of the FOUP to create a seal closure. The apparatus 100 also includes a door opener 300 for use with or in conjunction with a FOUP door opener (FIG. 8) and/or a load port (FIG. 8).

Referring to FIG. 1 , the FOUP door 200 includes an outer panel 210 and an inner structure 220 attached to the outer panel 210 . The outer panel 210 and inner structure 220 may be attached to each other in any suitable manner (eg, via screws, bolts, etc.), or may be integrally formed and/or a unitary construction.

The FOUP door 200 also includes an inflatable door seal 230 that extends along and adjacent the periphery of the combined outer panel 210/inner structure 220, as shown. In an exemplary embodiment, the inflatable door seal 230 may be made of rubber or similar material (eg, elastic, flexible, and/or compliant material). When the FOUP door 200 is seated in the door frame of the FOUP, the inflatable door seal 230 may expand to press against the door frame and seal the closed FOUP.

The FOUP door 200 may also include a socket 240 in the outer panel 210, as shown, the socket 240 may receive a pin or other feature of the door opener 300, as described below. In an exemplary embodiment, socket 240 may be an alignment pin socket or similar kinematic feature. Depending on the design of the door opener 300 and/or FOUP door 200, any number of sockets 240 may be used. The FOUP door 200 may also include a door seal vacuum fitting 250 in the outer panel 210, as shown. Other fitting locations may also be used.

The outer panel 210 and inner structure 220 are adapted such that the outer panel 210/inner structure 220 combination allows air or any other gas to pass through the inflatable door seal 230 via the door seal vacuum fitting 250 and allows air or any other gas to escape from the door seal A vacuum fitting 250 enters the inflatable door seal 230. In this way, applying a vacuum to the door seal vacuum fitting 250 may cause the door seal 250 to deflate or shrink. Removing the vacuum (and/or applying pressurized air/gas) from the door seal vacuum fitting 250 may allow air or any other gas (which may be applied to the door seal vacuum fitting 250 in some embodiments) to enter through the door Seal vacuum fitting 250 to reinflate or expand door seal 230 .

Referring again to FIG. 1 , the door opener 300 includes an outer wall 310 and an inner wall 320 . The inner wall 320 is adapted to face the outer panel 210 of the FOUP door 200 . The door opener 300 also includes a seal plate 330 that is removably attached to the outer wall 310 of the door opener and serves as a cover for the interior area of the door opener 300 .

The door opener 300 also includes a door hold port 340 that can be connected to a vacuum source (not shown) for allowing the FOUP door 200 to hold a vacuum through the door opener 300, as described in detail below. The door opener 300 also includes a door seal activation port 350 that can be connected to a vacuum source (not shown) for vacuum activation (deflation) of the door seal 230 of the FOUP door 200 (hereinafter referred to as A detailed description).

In exemplary embodiments, the apparatus and methods of the present invention may use two vacuum sources, any number of vacuum sources, or a single vacuum source adapted to provide the vacuum source functions described herein. Alternatively or additionally, the present invention may use one or more air or gas sources to inflate the door seal 230 of the FOUP door 200 .

FIG. 2 illustrates the apparatus 100 of FIG. 1 with the sealing plate 330 of the door opener 300 removed. With the sealing plate 330 removed, the interior area 360 of the door opener 300 is exposed. Within interior region 360 , door opener 300 may include a door holding vacuum passage 370 . Door holding vacuum channel 370 is connected to door holding port 340 via channel 341 to provide vacuum for holding FOUP door 200 in place against door opener 300 when vacuum pressure is applied from various vacuum sources, as described in detail below .

Within interior region 360 , door opener 300 may include a door seal-activated vacuum passage 380 . Door seal activation vacuum channel 380 is connected to door seal activation port 350 via channel 351 to allow vacuum applied from various vacuum sources to contract door seal 230 as described in detail below.

FIG. 3 illustrates the apparatus 100 of FIG. 1 in the opposite direction, showing the opposite side of the FOUP door 200 and door opener 300 . Referring to FIG. 3 , the door opener 300 includes a door seal vacuum fitting 355 on its inner wall 320 which, in the exemplary embodiment, is adapted to extend into the door seal vacuum fitting 250 in the FOUP door 200 . Door seal vacuum fitting 355 is connected to door seal activation vacuum channel 380 (FIG. 2). The door opener 300 may also include a pin 345 or other alignment/movement feature on its inner wall 320 which, in an exemplary embodiment, is adapted to interface with the receptacle 240 of the FOUP door 200 (FIG. 2 ) fit in motion. Depending on the design of the door opener 300 and/or the FOUP door 200, any number and shape of pins 345 may be used.

Referring again to FIG. 3 , the door opener 300 may include a door retaining vacuum cup member or element 375 on its inner wall 320 . In the illustrated embodiment, two door retaining vacuum cup members 375 are used to hold the FOUP door 200 against the door opener 300 . In general, any number of door holding vacuum cup members 375 may be used (eg, one, two, three, four, etc.).

The door retaining vacuum cup member 375 may be made of any suitable material capable of forming a seal against the FOUP door 200, such as polytetrafluoroethylene (PTFE) or the like. In one embodiment, each door retaining vacuum cup member 375 may be formed by machining a channel (not shown) in the inner wall 320 of the door opener 300 and placing an O-ring 377 or similar sealing element in the channel. . The door holding vacuum cup member 375 can be connected to the door holding vacuum channel 370 ( FIG. 2 ) and can be used when vacuum is applied from various vacuum sources and passed through the door holding port 340 ( FIG. 2 ) and the door holding vacuum channel 370 ( FIG. 2 ). The FOUP door 200 is held against the door opener 300 when provided to the door holding vacuum cup member 375 .

FIG. 4 illustrates a side view of components of the device 100 of FIG. 3 taken along line 4 - 4 of FIG. 3 . In FIG. 4, the FOUP door 200 and the door opener 300 are shown spaced apart from each other. FIG. 4 illustrates the outer panel 210 , inner structure 220 and inflatable seal 230 of the FOUP door 200 . FIG. 4 also illustrates the outer wall 310 , inner wall 320 , pin 345 and door retaining vacuum cup member 375 of the door opener 300 .

FIG. 5 illustrates a side view of the apparatus 100 shown in FIG. 4 showing the door opener 300 mounted to or engaged with the FOUP door 200 . In other words, the inner wall 320 of the door opener 300 is in contact with the outer panel 210 of the FOUP door 200 and the pin 345 ( FIG. 3 ) of the door opener 300 fits in the socket 240 ( FIG. 2 ) in the outer panel 210 . In the illustrated configuration, the FOUP door 200 can remain open against the door if vacuum pressure is applied to the door holding vacuum cup member 375 via the door holding port 340 ( FIG. 2 ) and via the door holding vacuum passage 370 ( FIG. 2 ). device 300.

FIG. 6 illustrates a cross-sectional side view of components of the apparatus 100 of FIG. 3 taken along line 6 - 6 of FIG. 3 . In FIG. 6, the FOUP door 200 and the door opener 300 are shown spaced apart from each other.

6 illustrates door opener 300 with outer wall 310, inner wall 320, seal plate 330, door holding vacuum channel 370, door seal activation vacuum channel 380, connecting channel 351, door seal vacuum fitting 355, pin 345 and door holding vacuum Cup member 375 . FIG. 6 also illustrates the FOUP door 200 together with the outer panel 210 , inner structure 220 , inflatable seal 230 and door seal vacuum fitting 250 . Door seal vacuum fitting 250 may include a sealing element 610 (eg, an O-ring) for forming a seal between door seal vacuum fitting 250 and door seal vacuum fitting 355 (shown in FIG. 7 ).

Turning now to FIG. 7 , which illustrates a cutaway side view of the apparatus 100 of FIG. 6 , FIG. 7 depicts the door opener 300 attached to or mated with the FOUP door 200 . In other words, the inner wall 320 of the door opener 300 is in contact with the outer panel 210 of the FOUP door 200 and the pin 345 ( FIG. 3 ) of the door opener 300 fits into the plug 240 ( FIG. 2 ) in the outer panel 210 . In the illustrated configuration, the FOUP door 200 can remain open against the door if vacuum pressure is applied to the door holding vacuum cup member 375 via the door holding port 340 ( FIG. 2 ) and via the door holding vacuum passage 370 ( FIG. 2 ). device 300.

Figure 8 illustrates a system 800 using the inventive FOUP door 200 and door opener 300 of Figures 1-7. Referring to FIG. 8, a system 800 includes a substrate carrier 810 (eg, a FOUP) having a FOUP gate 200 connected thereto. That is, the door 200 is seated in the opening 815 of the substrate carrier 810 and the inflatable seal 230 (not shown in FIG. 8 ) is inflated to hold the door 200 there.

System 800 also includes a load end 820 having a door opener 825 connected thereto. Door opener 825 includes door opener 300 (not shown in FIG. 8 ). A first vacuum source 830 may be connected to the door opener 300 via a first vacuum line 832 for applying a first vacuum to the door retaining vacuum cup member 375 of the door opener 300 . Similarly, a second vacuum source 835 may be connected to the door opener 300 via a second vacuum line 834 for applying a second vacuum to the door seal 230 of the door 200 . The first and second vacuum sources 830, 835 may be supplied from a single vacuum source or from multiple vacuum sources (eg, one or more vacuum pumps).

System 800 may also include a controller 840 adapted to control system 800 . For example, controller 840 may be coupled to load port 820 via a signal cable and may control operation of manipulator and door opener 825 . The controller 840 may also be directly coupled to the vacuum sources 830, 835 and is also adapted to directly control the vacuum sources 830, 835 to perform the method of the present invention, as described below with reference to FIG. 9 .

Turning now to FIG. 9 , an exemplary method 900 of the present invention is depicted for the system depicted in FIG. 8 . In step 902, when an opening operation is performed on the FOUP door 200, the FOUP 810 may be positioned at the load port 820 by a manipulator (not shown). In step 904, the FOUP may then be moved toward the door opener 825 of the loadport 820 such that the FOUP door 200 contacts the door opener 300 (as shown, eg, FIGS. 5 and 7).

When the FOUP door 200 is moved into contact with and/or abuts the door opener 300, the pin 345 of the door opener 300 engages and/or mates with the socket 240 on the outer panel 210 of the FOUP door 200 (see FIGS. 4-5 ) . The FOUP door 200 continues to move toward the door opener 300 until the outer panel 210 contacts the door holding vacuum cup member 375 (FIG. 5) and the door seal vacuum fitting 355 also moves into the door seal vacuum fitting 250 (FIG. 6- 7)

In step 906 , vacuum is applied from the first vacuum source 830 via the door holding vacuum channel 370 to the door holding port 340 and to the door holding vacuum cup member 375 . Based on the application of the first vacuum, the outer panel 210 of the FOUP door 200 is drawn tightly against the door opener 300 .

The first vacuum can then be verified to ensure that the FOUP door 200 remains against the door opener 300 . In this way, the first vacuum can be used to allow the door opener 300 to grip onto or attach itself to the FOUP door 200, and thereafter, during subsequent door opening and/or closing operations (described below) Hold and/or secure the FOUP door 200 in place, or otherwise manipulate the FOUP door 200.

Once the FOUP door 200 is attached to and held by the door opener 300, in step 908, a second vacuum is applied from the second vacuum source 835 via the door seal activation vacuum channel 380 to the door seal activation port 350 and door seal vacuum fitting 355. A second vacuum is applied to door seal 230 via door seal vacuum fitting 250 . Applying a second vacuum to door seal vacuum fitting 250 causes door seal 230 to deflate and/or shrink. Thereafter, in step 910 , FOUP door 200 may be removed from opening 815 of FOUP 810 , thereby opening FOUP 200 . Once opened, substrates may be added and/or removed from FOUP 810 in steps 912 and 914 .

To close the FOUP door 200, the above process is reversed. For example, in an exemplary embodiment, FOUP door 200 may be moved to a closed position to close front opening 815 of FOUP 810 in step 916 . In step 918 , the second vacuum source 835 may be disconnected to allow the door seal 230 to reinflate or expand, thereby sealing the closed FOUP door 200 . (A source of air, nitrogen, or other gas not shown separately could be used to inflate the door seal 230 if desired). Thereafter, in step 920 , the first vacuum source 830 may be turned off to release the door retaining vacuum cup member 375 from the outer panel 210 of the FOUP door 200 . Then, in step 922 , FOUP 810 is moved or transported away from door opener 300 and away from door opener 825 .

In the exemplary embodiment described above, apparatus 100 was described as using two vacuum sources. The first vacuum source 830 may be used to allow the door opener 300 to grip onto the FOUP door 200 or attach itself to the FOUP door 200 . After control of the FOUP door 200 has been established by the first vacuum source 830 , the second vacuum source 835 may deflate or shrink the door seal 230 to allow the FOUP door 200 to open. In another exemplary embodiment, any number of vacuum sources may be used. In another exemplary embodiment, a single vacuum source adapted to perform both operations above may be used.

While the invention has been described and illustrated in various exemplary embodiments, these descriptions are only exemplary of the invention and are not to be construed as limitations of the invention. With this in mind, the present invention encompasses any and all modifications, changes and/or alternative embodiments without departing from the scope of the present invention, which is limited only by the following claims.

Claims (24)

1. equipment that is used for substrate carrier comprises:

Door opener, it is suitable for using the inflatable seal of first vacuum source with the door that shrinks described substrate carrier, so that described door discharges from the main body of described substrate carrier.

2. equipment as claimed in claim 1, wherein, described door opener also be suitable for using second vacuum source with the described door that keeps described substrate carrier against described door opener.

3. equipment as claimed in claim 1, wherein, described door opener comprises port, described port is suitable for applying from the vacuum pressure of the described first vacuum source described inflatable seal to the described door of described substrate carrier.

4. equipment as claimed in claim 2, wherein, described door opener comprises port, described port is suitable for applying from the vacuum pressure of the described second vacuum source described door to described substrate carrier.

5. equipment as claimed in claim 2, wherein, described first vacuum source and described second vacuum source are produced by single vacuum source.

6. equipment as claimed in claim 1, wherein, described door opener also comprises alignment characteristics, the respective aligned feature that described alignment characteristics is suitable on the described door with described substrate carrier cooperates.

7. equipment as claimed in claim 1, wherein, described door opener also comprises one or more passages, described one or more passages are suitable for guiding from the vacuum pressure of the described first vacuum source described inflatable seal to the described door of described substrate carrier.

8. equipment as claimed in claim 2, wherein, described door opener also comprises one or more passages, described one or more passages are suitable for guiding from the vacuum pressure of the described second vacuum source described door to described substrate carrier.

9. system that is used for the seal substrate carrier comprises:

Substrate carrier is suitable for keeping one or more substrates; With

Load port, be used to receive substrate carrier from the substrate carrier transmission system, wherein, described load port comprises door opener, described door opener is suitable for using the inflatable seal of first vacuum source with the door that shrinks described substrate carrier, so that described door discharges from the main body of described substrate carrier.

10. system as claimed in claim 9, wherein, described door opener also be suitable for using second vacuum source with the described door that keeps described substrate carrier against described door opener.

11. system as claimed in claim 9, wherein, described door opener comprises port, and described port is suitable for applying from the vacuum pressure of first vacuum source inflatable seal to the door of described substrate carrier.

12. system as claimed in claim 10, wherein, described door opener comprises port, and described port is suitable for applying from the vacuum pressure of the second vacuum source described door to described substrate.

13. system as claimed in claim 10, wherein, described first vacuum source and described second vacuum source are produced by single vacuum source.

14. system as claimed in claim 9, wherein, described door opener also comprises alignment characteristics, described alignment characteristics be suitable for described substrate carrier the door on the respective aligned feature cooperate.

15. system as claimed in claim 9, wherein, described door opener also comprises one or more passages, and described one or more passages are suitable for guiding from the vacuum pressure of described first vacuum source inflatable seal to the door of described substrate carrier.

16. system as claimed in claim 10, wherein, described door opener also comprises one or more passages, and described one or more passages are suitable for guiding from the vacuum pressure of described second vacuum source door to described substrate carrier.

17. a method comprises:

Receive substrate carrier at the load port place;

The door opener of described load port is engaged to the door of described substrate carrier;

Apply the extremely described door of first vacuum pressure to keep described door via described door opener; And

Apply second vacuum pressure to the inflatable seal of described door to shrink described inflatable seal and to discharge the door of described substrate carrier from described substrate carrier.

18. method as claimed in claim 17 also comprises from described substrate carrier removing described door.

19. method as claimed in claim 17 also comprises from described substrate carrier removing substrate.

20. method as claimed in claim 17 also comprises substrate is inserted in the described substrate carrier.

21. method as claimed in claim 18 comprises also described door is inserted in the door frame of described substrate carrier that wherein, the described inflatable seal that still is under described second vacuum pressure shrinks.

22. method as claimed in claim 21 also comprises from described inflatable seal and removes described second vacuum pressure, expands to cause described inflatable seal, and seals described door in the described door frame of described substrate carrier.

23. method as claimed in claim 22 also comprises from described door removing described first vacuum pressure, discharges described door from described door opener thus.

24. method as claimed in claim 23 also comprises from the described door of described substrate carrier and separates described door opener.

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