CN1971195A - Flat heat pipe for thermal diffusion - Google Patents
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- CN1971195A CN1971195A CN 200610105108 CN200610105108A CN1971195A CN 1971195 A CN1971195 A CN 1971195A CN 200610105108 CN200610105108 CN 200610105108 CN 200610105108 A CN200610105108 A CN 200610105108A CN 1971195 A CN1971195 A CN 1971195A
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Abstract
一种热扩散用平板热管,包括金属翅片或翅柱散热器和将其四周密封的金属盖板,金属翅片或翅柱的顶端与金属盖板内壁面相连接,且在翅片或翅柱散热器与金属盖板构成的空腔内设置有液体工质,在翅片或翅柱的表面以及翅片或翅柱基底、金属盖板内壁面上均设有供液体工质回流的毛细芯。金属翅片或翅柱可以起到加强热管机械强度的作用,其表面设置的供液体回流的毛细芯可以缩短液体回流的路径,提高传热效果。使用时功率器件产生的热量使加热壁面上的液体蒸发,蒸汽通过翅片或翅柱间相互连通的通道到达散热壁面,在散热壁面上冷凝放出热量,冷凝的液体经过毛细芯回到加热壁面。
A flat heat pipe for thermal diffusion, comprising a metal fin or fin radiator and a metal cover that seals its surroundings, the top of the metal fin or fin is connected to the inner wall of the metal cover, and the fin or fin The cavity formed by the radiator and the metal cover is provided with a liquid working medium, and the surface of the fin or fin column, the base of the fin or fin column, and the inner wall of the metal cover are provided with capillary cores for the return flow of the liquid working medium . The metal fins or fin columns can enhance the mechanical strength of the heat pipe, and the capillary wicks provided on the surface for liquid backflow can shorten the path of liquid backflow and improve the heat transfer effect. When in use, the heat generated by the power device evaporates the liquid on the heating wall, and the steam reaches the heat dissipation wall through the interconnected channels between the fins or fin columns, condenses on the heat dissipation wall to release heat, and the condensed liquid returns to the heating wall through the capillary core.
Description
技术领域technical field
本发明涉及功率模块的封装和散热技术,特别涉及一种高热密度热扩散用的平板热管。The invention relates to the encapsulation and heat dissipation technology of a power module, in particular to a flat heat pipe for heat diffusion with high heat density.
背景技术Background technique
现代电力电子技术的进步,使得电力电子装置在有限空间内集成的元器件数目越来越多,装置的功能越来越强大。而随之在装置内部产生的高热流密度成为影响装置性能和可靠性,制约装置朝小型化、微型化方向发展的重大障碍。排除这一障碍的关键在于采用高效的散热装置,将高热密度热源产生的热量排出。With the advancement of modern power electronics technology, the number of components integrated in the limited space of power electronic devices is increasing, and the functions of the devices are becoming more and more powerful. Then, the high heat flux generated inside the device has become a major obstacle that affects the performance and reliability of the device and restricts the development of the device in the direction of miniaturization and miniaturization. The key to overcoming this obstacle lies in the use of efficient cooling devices to dissipate the heat generated by high heat density heat sources.
解决高热密度热源散热问题首先要将集中热源扩散至大面积上,只有先将集中热源扩散,才能保证散热器(风冷、水冷等装置)的充分利用,热扩散的效果极大地影响散热器的散热效率。在微电子电路中甚至采用高成本的金箔、金刚石膜来进行热扩散。功率模块内的大功率器件,例如IGBT的热流密度可达400W/cm2,目前功率模块采用的热扩散装置主要是高导热率的金属基板,如铜板、铝板等。虽然金属基板的导热率较高,但基板底面仍存在温差,散热器的效率较低。另外,由于受到金属基板的热扩散能力的限制,大功率器件之间的距离不能太近,以免造成热集中。然而,对减小寄生参数而言,又希望功率器件之间的距离越近越好。因此,采用比金属基板热扩散能力更强而成本又低的热扩散装置对提高模块的功率和电性能非常有利。To solve the heat dissipation problem of high heat density heat sources, the concentrated heat source must first be diffused to a large area. Only by spreading the concentrated heat source first can the full utilization of the radiator (air-cooled, water-cooled, etc.) be guaranteed. The effect of thermal diffusion greatly affects the performance of the radiator. cooling efficiency. Even high-cost gold foil and diamond film are used for thermal diffusion in microelectronic circuits. The high-power devices in the power module, such as IGBT, have a heat flux density of up to 400W/cm 2 . At present, the thermal diffusion devices used in power modules are mainly metal substrates with high thermal conductivity, such as copper plates and aluminum plates. Although the thermal conductivity of the metal substrate is high, there is still a temperature difference on the bottom surface of the substrate, and the efficiency of the heat sink is low. In addition, due to the limitation of the thermal diffusion capacity of the metal substrate, the distance between high-power devices should not be too close to avoid heat concentration. However, in terms of reducing parasitic parameters, it is hoped that the distance between power devices should be as close as possible. Therefore, it is very beneficial to improve the power and electrical performance of the module to adopt a thermal diffusion device with stronger thermal diffusion ability than the metal substrate and a lower cost.
热管在电力电子装置中也常被用来进行热量的扩散和传输。其中平板热管的形状非常有利于对集中热源进行扩散。该平板热管的结构是将金属基板中心部分做成空腔,空腔内壁设有毛细结构,腔内抽真空,注入一定容量的工质。热源产生的热量使加热壁面附近的液态工质气化,带走热量,蒸汽在冷却壁面上凝结成液体放出热量,液态工质依靠毛细力的作用回到加热壁面上,如此循环便能带走热源产生的热量。由于热管的当量热导率远高于金属,平板热管的热扩散能力也远高出实体金属基板。热源热流密度较高时,平板热管散热表面的温差仅在1℃左右(洪宇平,李强,宣益民,小型平板热管传热实验研究,南京理工大学学报,2001,25(1):32-35)。一些专利文献中提出了各式各样的平板热管,如下所述:Heat pipes are also commonly used in power electronic devices to spread and transport heat. The shape of the flat heat pipe is very conducive to the diffusion of the concentrated heat source. The structure of the flat heat pipe is that the central part of the metal substrate is made into a cavity, the inner wall of the cavity is provided with a capillary structure, the cavity is evacuated, and a working medium of a certain capacity is injected. The heat generated by the heat source vaporizes the liquid working medium near the heating wall and takes away the heat. The steam condenses into liquid on the cooling wall and releases heat. The liquid working medium returns to the heating wall by the action of capillary force. The heat generated by the heat source. Since the equivalent thermal conductivity of the heat pipe is much higher than that of metal, the thermal diffusion capacity of the flat heat pipe is also much higher than that of the solid metal substrate. When the heat flux density of the heat source is high, the temperature difference on the cooling surface of the flat heat pipe is only about 1°C (Hong Yuping, Li Qiang, Xuan Yimin, Experimental Research on Heat Transfer of Small Flat Heat Pipe, Journal of Nanjing University of Science and Technology, 2001, 25(1): 32- 35). Various flat plate heat pipes have been proposed in some patent literature, as follows:
台达电子工业股份有限公司庄明德等人申请的发明专利“平板式热管及其支撑结构”(申请号:200410089845.9),提出了一种平板热管,该热管的蒸汽腔内广布支撑结构用以避免毛细组织剥离。支撑结构是一多层或单层的多孔材料。支撑结构不仅可支撑毛细组织,降低毛细组织与热管内壁的热阻,还可以提供蒸汽流动空间,进一步提供毛细力使工作流体回流。但是由于支撑结构为多孔材料,在热传导和机械强度方面都不如金属材料。Delta Electronics Co., Ltd. Zhuang Mingde et al. applied for the invention patent "Platform Heat Pipe and Its Supporting Structure" (Application No.: 200410089845.9), which proposes a flat heat pipe. The support structure is widely distributed in the steam chamber of the heat pipe to avoid Capillary stripping. The support structure is a multi-layer or single-layer porous material. The support structure can not only support the capillary tissue, reduce the thermal resistance between the capillary tissue and the inner wall of the heat pipe, but also provide a space for steam to flow, and further provide capillary force to make the working fluid flow back. However, since the support structure is a porous material, it is inferior to metal materials in terms of heat conduction and mechanical strength.
财团法人工业技术研究院徐金城等人申请的发明专利“平板型热管的热传加强结构”(申请号:200310121710.1),在热管腔体内较高温度处设有若干个抵接于上、下壁面的导热柱,以作为热传导的加强结构,降低热传路径上的热阻。该结构在设计上重点考虑到加强热管腔体上下壁面的热传导,因此导热柱只设在热管腔体内较高温度处,该结构并未做缩短蒸汽回流路径和加强热管机械强度方面的考虑。The invention patent "Heat Transfer Enhancement Structure of Flat Heat Pipe" (Application No.: 200310121710.1) applied by Xu Jincheng and others from the Industrial Technology Research Institute of the Foundation has several abutting joints on the upper and lower parts of the heat pipe cavity at higher temperatures. The heat conduction column on the wall serves as a strengthening structure for heat conduction and reduces the thermal resistance on the heat conduction path. The design of this structure focuses on strengthening the heat conduction of the upper and lower walls of the heat pipe cavity, so the heat conduction column is only set at a higher temperature in the heat pipe cavity, and this structure does not consider shortening the steam return path and strengthening the mechanical strength of the heat pipe. .
发明内容Contents of the invention
本发明的目的在于提供一种既能够充分保证热管的机械强度,又能够使工作液体的回流路径大大降低,从而提高热管的传热性能的一种热扩散用平板热管。The object of the present invention is to provide a flat heat pipe for thermal diffusion that can not only fully ensure the mechanical strength of the heat pipe, but also greatly reduce the return path of the working fluid, thereby improving the heat transfer performance of the heat pipe.
为达到上述目的,本发明采用的技术方案是:包括翅片或翅柱散热器和一个将其四周密封的金属盖板,其特点是,所说的翅片或翅柱散热器的翅片或翅柱的顶端与金属盖板内壁面相连接,且在翅片或翅柱散热器与金属盖板构成的空腔内设置有液体工质,在翅片或翅柱的表面以及与翅片或翅柱基底、金属盖板内壁面上均设有供液体工质回流的毛细芯。In order to achieve the above object, the technical scheme adopted by the present invention is: comprise fin or fin radiator and a metal cover plate that seals its surroundings, it is characterized in that, the fin of said fin or fin radiator or The top of the finned column is connected to the inner wall of the metal cover plate, and a liquid working medium is arranged in the cavity formed by the finned or finned column radiator and the metal cover plate, and the The base of the column and the inner wall of the metal cover are provided with capillary cores for the backflow of liquid working fluid.
本发明的翅片或翅柱为有圆柱形翅柱、方柱形翅柱或矩形翅片;毛细芯为烧结金属粉末、金属丝网、导热纤维、纳米纤维或细凹槽结构;翅片或翅柱散热器由高导热率的金属制成;金属翅片或翅柱间的通道相互连通;液体工质为去离子水、乙醇或丙酮。The fins or fins of the present invention have cylindrical fins, square column fins or rectangular fins; the capillary core is a sintered metal powder, wire mesh, heat-conducting fiber, nanofiber or fine groove structure; the fin or The finned column radiator is made of metal with high thermal conductivity; the channels between the metal fins or the finned columns are connected to each other; the liquid working medium is deionized water, ethanol or acetone.
由于本发明的翅片或翅柱表面设有供液体回流的毛细芯,这样既可以缩短液体回流的路径,提高传热效果,又可以起到加强热管机械强度的作用。使用时功率器件产生的热量使加热壁面上的液体蒸发,蒸汽通过翅片或翅柱间相互连通的通道到达散热壁面,在散热壁面上冷凝放出热量,冷凝的液体通过金属盖板内壁面、翅片或翅柱表面以及翅片或翅柱基底上的毛细结构回到加热壁面。采用该平板热管代替金属基板,既可以提高基板的热扩散能力,提高功率模块的功率密度,又可以降低功率模块的重量。Since the surface of the fin or fin column of the present invention is provided with a capillary core for liquid backflow, it can not only shorten the path of liquid backflow, improve the heat transfer effect, but also enhance the mechanical strength of the heat pipe. When in use, the heat generated by the power device evaporates the liquid on the heating wall surface. The steam reaches the heat dissipation wall surface through the interconnected channels between the fins or fin columns, and condenses on the heat dissipation wall surface to release heat. The condensed liquid passes through the inner wall surface of the metal cover plate, the fin Capillary structures on the surface of the fin or fin and on the base of the fin or fin return to the heated wall. Using the flat heat pipe instead of the metal base plate can not only improve the thermal diffusion capacity of the base plate, increase the power density of the power module, but also reduce the weight of the power module.
附图说明Description of drawings
图1为本发明的整体结构示意图;Fig. 1 is the overall structure schematic diagram of the present invention;
图2为本发明翅片或翅柱散热器的结构示意图,其中图2a为圆柱形翅柱式散热器,图2b为方柱形翅柱式散热器,图2c为矩形翅片式散热器;Fig. 2 is the structural representation of fin or fin radiator of the present invention, wherein Fig. 2 a is a cylindrical fin radiator, Fig. 2 b is a square column fin radiator, and Fig. 2 c is a rectangular fin radiator;
图3为本发明的功率模块的示意图。FIG. 3 is a schematic diagram of a power module of the present invention.
具体实施方式Detailed ways
下面结合附图对本发明的结构原理和工作原理作进一步详细说明。The structural principle and working principle of the present invention will be further described in detail below in conjunction with the accompanying drawings.
参见图1,本发明包括由高导热率的金属制成的翅片或翅柱散热器8和一个将翅片或翅柱散热器8四周密封的金属盖板9,在翅片或翅柱散热器8内设置有若干组分别与翅片或翅柱散热器基底801及金属盖板9内壁面相连接的金属翅片或翅柱802,金属翅片或翅柱802间的通道相互连通,且在翅片或翅柱散热器8与金属盖板9构成的空腔内设置有去离子水、乙醇或丙酮液体工质10,在翅片或翅柱802的表面以及与翅片或翅柱基底801、金属盖板内壁面901上均设有供液体工质10回流的毛细芯11,该毛细芯11为烧结金属粉末、金属丝网、导热纤维、纳米纤维或细凹槽结构。Referring to Fig. 1, the present invention comprises the fin or fin radiator 8 that is made of the metal of high thermal conductivity and a metal cover plate 9 that fin or fin radiator 8 are sealed all around, heat dissipation in fin or fin radiator There are several sets of metal fins or fin columns 802 connected to the fin or fin column radiator base 801 and the inner wall surface of the metal cover plate 9 respectively in the device 8, and the passages between the metal fins or fin columns 802 communicate with each other, and in The cavity formed by the fin or fin radiator 8 and the metal cover plate 9 is provided with deionized water, ethanol or acetone liquid working fluid 10, on the surface of the fin or fin 802 and with the fin or fin base 801 1. On the inner wall surface 901 of the metal cover plate, there are capillary cores 11 for the reflux of the liquid working medium 10, and the capillary cores 11 are sintered metal powder, wire mesh, heat-conducting fibers, nanofibers or fine groove structures.
参见图2,本发明的翅片或翅柱802为圆柱形翅柱、方柱形翅柱或矩形翅片。Referring to FIG. 2, the fins or fins 802 of the present invention are cylindrical fins, square column fins or rectangular fins.
参见图3,本发明提出的平板热管可作为大功率器件的热扩散基板。大功率器件12焊接在平板热管13翅片或翅柱基底的一面上,散热器14装在与其相对的另一面上,平板热管13通过螺钉15与散热器14连接。功率器件12产生的热量使加热壁面上的液体蒸发,蒸汽通过翅片或翅柱802间相互连通的通道到达散热壁面,在散热壁面上冷凝放出热量,冷凝的液体通过金属盖板内壁面以及翅片或翅柱表面的毛细芯11回到加热壁面。Referring to Fig. 3, the flat heat pipe proposed by the present invention can be used as a thermal diffusion substrate for high-power devices. The high-power device 12 is welded on one side of the fin or fin base of the flat heat pipe 13 , and the radiator 14 is mounted on the other side opposite to it. The flat heat pipe 13 is connected with the radiator 14 by screws 15 . The heat generated by the power device 12 evaporates the liquid on the heating wall surface, and the steam reaches the heat dissipation wall surface through the interconnected channels between the fins or fin columns 802, and condenses on the heat dissipation wall surface to release heat, and the condensed liquid passes through the inner wall surface of the metal cover plate and the fins. The capillary core 11 on the sheet or fin surface returns to the heated wall.
金属翅片或翅柱802可以增强平板热管的机械强度,其上的毛细芯11可以缩短液体的回流路径。由于平板热管的热扩散能力远高于实体金属基板,热管基板可以使功率器件产生的集中热量高效地扩散,较好地解决了高热密度功率模块的热集中问题。另外,采用平板热管代替实体金属基板也使模块的重量大大降低。The metal fins or fin columns 802 can enhance the mechanical strength of the flat heat pipe, and the capillary wick 11 on it can shorten the return flow path of the liquid. Since the thermal diffusion capacity of the flat heat pipe is much higher than that of the solid metal substrate, the heat pipe substrate can efficiently diffuse the concentrated heat generated by the power device, which better solves the heat concentration problem of the high heat density power module. In addition, the use of flat heat pipes instead of solid metal substrates also greatly reduces the weight of the module.
Claims (6)
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