CN1966279A - Laser induced thermal imaging apparatus with plate copying device - Google Patents

Abstract

The invention discloses a laser-induced thermal imaging (LITI) device and a method for manufacturing electronic devices using the LITI device. A LITI device includes a cavity, a substrate support, a printing device, and a laser source or oscillator. The LITI apparatus transfers a transferable layer from a film donor device onto the surface of an intermediate electronic device. The LITI device utilizes magnetic force to provide intimate contact between the transferable layer and the intermediate device surface. The magnetic force is generated by the magnetic material formed in two components of the LITI device spaced apart from each other, between the transferable layer and the intermediate device surface. The magnet or magnetic material is formed in the following two components of the LITI apparatus: 1) intermediate device and film donor device; 2) intermediate device and printing device; 3) substrate support and film donor device; 4) substrate support software and printing equipment.

Description

Laser-induced thermal imaging device with printing device

Technical field

The present invention relates to the production of electronic devices, and more particularly to the formation of organic material layers in electronic devices using laser induced thermal imaging (LITI) technology.

Background technique

Certain electronic devices include organic layers. For example, an organic light emitting device (OLED) includes multiple organic layers. Various methods have been employed to form these organic layers. For example, these methods include deposition methods, ink jet methods, and laser induced thermal imaging (LITI) methods.

In the LITI process, a film donor device is used to provide the transferable layer. The film donor device is placed on the already partially structured electronic device (intermediate device) such that the transferable layer contacts the surface of the intermediate device on which the transferable layer is to be transferred (receiving surface). A laser beam is then applied to selected regions of the donor device, which causes heat to be generated in the donor device in the selected regions. This heat causes the desired partial delamination of the transferable layer. When the donor device is removed, delaminated portions of the transferable film remain on the surface of the intermediate device.

Typical LITI setups use pumping to bring and hold the transferable layer in contact with the surface of the intermediate device during the process. FIG. 1 is a cross-sectional view of a LITI device 100 . The LITI device 100 includes a cavity 110 , a substrate support 120 and a laser source or oscillator 130 . The substrate support 120 includes: an intermediate device receiving groove 121 to accommodate an intermediate electronic device 140 therein; and a donor device receiving groove 123 to accommodate a film donor device 150 therein.

In order to partially transfer organic materials to intermediate devices with high precision and fewer defects, intimate contact between the transferable layer and the receiving surface is required. LITI device 100 includes an air pumping mechanism for forming such intimate contact. The pumping mechanism comprises pipes 161 , 163 and a vacuum pump P. The suction through the tube 161 brings down an intermediate device (not shown) placed in the groove 121 and keeps it that way. The suction through the tube 163 brings the donor device (not shown) placed in the groove 123 down and into contact with the intermediate device, and remains so. In order to perform these pumping processes, air or another gaseous medium is required inside the cavity.

However, processes performed before or after the LITI process are generally performed under a vacuum atmosphere. Therefore, the LITI process utilizing the aforementioned pumping needs to break the vacuum between the previous and subsequent processes.

The discussions in this section are intended to provide background information of related art and do not constitute representations of prior art.

Contents of invention

An aspect of the present invention provides an apparatus for laser-induced thermal imaging (LITI), the apparatus comprising: a substrate support configured to support an intermediate electronic device and a film donor device; a laser source; a printing device positioned at the Between the substrate support and the laser source, the printing device is movable relative to the substrate support between a first position and a second position, the first position being a distance from the substrate support a first distance, the second location is a second distance from the substrate support, the second distance is greater than the first distance, the printing device is configured to place the film in the vicinity of the first location A donor device is pressed against said intermediate device, said printing device comprising at least one magnetic material selected from the group consisting of permanent magnets and electromagnets.

The electromagnet can be electrically connected to an external power source and can be configured to be selectively energized. The at least one magnetic material may include one or more forms selected from the group consisting of plates, sheets, blocks, rods, and particles. The printing device may comprise a magnetic part and a non-magnetic part, the magnetic part may comprise at least one magnetic material. The magnetic portion may be arranged generally closer to the substrate support than the non-magnetic portion. The substrate support includes at least one magnetic material selected from the group consisting of permanent magnets, electromagnets, and magnetically attractable materials.

The apparatus may further comprise: an intermediate device comprising a receiving surface and positioned over said substrate support; a film donor device comprising a transferable film layer and positioned over said intermediate device. The intermediate means and the film donor means may be arranged such that the receiving surface is in contact with the transferable film layer. There will be substantially no air bubbles between the receiving surface and the transferable film layer. The film donor device may also include a light-to-heat conversion layer. The film donor device may not include a magnetic layer containing permanent magnets or electromagnets. The intermediate electronic device may comprise at least one magnetic material selected from the group consisting of a permanent magnet, an electromagnet, and a magnetically attractable material.

Another aspect of the present invention provides a method of manufacturing an electronic device using the apparatus, the method comprising: placing an intermediate device on the substrate support, the intermediate device comprising a first surface and a second surface, The first surface faces the printing device, the second surface contacts the substrate support; placing a film donor device on the first surface of the intermediate device, the film donor device comprising a first Three surfaces and a fourth surface, the third surface facing the printing device, the fourth surface facing the substrate support; moving the printing device so that it contacts the film donor device a third surface such that the fourth surface of the film donor device contacts the first surface of the intermediate device; pressing the film donor device against the intermediate device.

The printing device may include an opening, and the method may further include irradiating a laser beam onto the film donor device through the opening of the printing device. The method may be performed under a vacuum atmosphere. The printing device may comprise an electromagnet, inducing the magnetic force comprising energizing the electromagnet. Squeezing the film donor device may comprise applying the gravity of the printing device to the film donor device. Pressing the film donor device may further comprise causing the at least one magnetic material to magnetically interact with a magnet or magnetically attractable material underlying the first surface of the intermediate device. The intermediate device may comprise the magnet or magnetically attractable material. The substrate support may contain the magnet or magnetically attractable material.

Description of drawings

Aspects and advantages of the present invention will become apparent and better understood from the following description taken in conjunction with the accompanying drawings.

Fig. 1 shows a schematic cross-sectional view of a laser-induced thermal imaging device.

Fig. 2 shows a schematic cross-sectional view of a laser-induced thermal imaging device according to an embodiment of the present invention.

Fig. 3 shows a schematic exploded perspective view of a laser induced thermal imaging device according to an embodiment of the present invention.

4A and 4B show schematic cross-sectional views of partially constructed electronic devices according to embodiments of the present invention.

Figure 4C shows a schematic top plan view of a partially constructed electronic device according to one embodiment of the present invention.

Figure 5A shows a schematic perspective view of a substrate support according to one embodiment of the present invention.

Fig. 5B shows a schematic cross-sectional view of the substrate support in Fig. 5A taken along line I-I'.

6A-6C show schematic partial cross-sectional views of a donor device according to an embodiment of the present invention.

Figure 7 shows a schematic perspective view of a contact frame according to one embodiment of the present invention.

FIG. 8 is a flowchart of a laser induced thermal imaging method according to an embodiment of the present invention.

9A-9F illustrate a laser-induced thermal imaging method according to one embodiment of the present invention.

10A-10D illustrate a laser-induced thermal imaging method according to one embodiment of the present invention.

Fig. 11 shows a schematic perspective view of a laser oscillator according to one embodiment of the present invention.

Detailed ways

Various embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, identical reference numerals indicate identical or functionally similar parts or elements.

Laser Induced Thermal Imaging Device

In an embodiment, the LITI device utilizes magnetic force to provide intimate contact between the film donor device and the intermediate device. Unlike the pumping of the LITI device in Figure 1, the magnetic force does not require air or fluid inside the cavity. In embodiments, magnetically contacting the film donor device and the intermediate device can be performed under vacuum or non-vacuum conditions.

Figure 2 shows a LITI device 200 according to one embodiment. The illustrated LITI apparatus includes: a cavity 210 , a substrate support 260 , a printing device 230 , and a laser source or oscillator 220 . Cavity 210 provides space for processing intermediate (or partially constructed) electronic device 250 with film donor device 241 . The substrate support 260 is configured to support the intermediate device 250 and the film donor device 241 . The printing device 230 is movably connected to the cavity 210 for providing a downward gravitational force over the film donor device 241 . In some embodiments, the printing device 230 may be omitted. The film donor device 241 includes a transferable layer (not shown). The transferable layer is transferred to the intermediate device by laser. The laser oscillator 220 is located above the printing device 230 . The laser oscillator 220 is configured to irradiate laser light onto the film donor device 241 through the printing device 230 .

In one embodiment, LITI device 200 operates as follows. First, the intermediate device 250 is introduced into the cavity 210 and placed on the substrate support 260 . A film donor device 241 is then placed over the intermediate device 250 . The film donor device 241 at least partially contacts the intermediate device 250 . The film donor device 241 is pressed against the intermediate device 250 using magnetic force. In this step, the transferable layer is in intimate contact with the intermediate device. The laser oscillator 220 is activated to irradiate laser light onto the film donor device 241 . The transferable layer is then transferred from the film donor device 241 onto the intermediate device 250 .

FIG. 3 shows a schematic exploded view of a LITI device 200 . Shown in dashed lines is cavity 210 . In the illustrated embodiment, the laser oscillator 220, printing device 230 and substrate support 260 are vertically aligned with each other. In the LITI process, the intermediate device 250 is placed on the substrate support 260 and the film donor device 241 is placed over the intermediate device 250 . In another embodiment, the aforementioned components may have a different arrangement, eg reverse configuration. In some embodiments, the substrate support may be configured to support the intermediate device from the top. Such substrate supports may be referred to as substrate holders.

The chamber 210 provides a reaction space for the LITI process. The cavity 210 may be any suitable enclosed space in which LITI process can be performed. The cavity 210 houses a printing device 230 and a substrate support 260 . The cavity also includes channels for introducing or removing the intermediate device 250 and the film donor device 241 . In one embodiment, cavity 210 may be configured to provide a vacuum atmosphere.

In the illustrated embodiment, the laser oscillator 220 is located above the printing device 230 at the top central portion of the cavity 210, but it is not limited thereto. The laser oscillator 220 is configured to irradiate a laser beam onto the film donor device 241 . One embodiment of a laser oscillator 220 is shown in FIG. 11 . The illustrated laser oscillator 220 may be a CW ND:YAG laser (1604 nm). The laser oscillator 220 has two galvanometer scanners (galvanometer scanner) 221,222. The laser oscillator 220 also has a scanning lens 223 and a cylindrical lens 224 . The skilled person will appreciate that various types of laser oscillators can be used to provide laser light for the film donor device.

In the illustrated embodiment, the printing device 230 is positioned above the substrate support 260, but is not limited thereto. The printing device 230 is movably connected to the top center portion of the cavity 210 through a transmission unit 231 . The printing device 230 has a contact plate 232 configured to provide gravity over the film donor device 241 . The contact plate 232 is patterned to expose portions of the underlying film donor device 241 while blocking other portions. In order to expose parts of the film donor device 241 , the contact plate 232 includes a plurality of openings 233 . The opening 233 enables the laser beam to be directed to part of the film donor device 241 . This configuration enables the transfer of portions of the transferable layer onto the intermediate device 250, as will be described in detail below. In some embodiments, a LITI device may be free of a printing device.

In the illustrated embodiment, the substrate support 260 is located at the bottom of the reaction chamber 210, but is not limited thereto. The illustrated substrate support 260 has a recess 263 for receiving the intermediate device 250 . The substrate support 260 also supports the membrane donor device 241 . In addition, the substrate support 260 houses the underlying substrate ejector pins 265 and film donor device ejector pins 266 . The substrate supporter 260 has through holes 261 and 262 through which a substrate ejector pin 265 and a film donor device ejector pin 266 move in a vertical direction.

In the LITI process, the intermediate device 250 is placed on the substrate support 260 . The term "intermediate device" refers to any device having a surface formed of organic material using a LITI process. Typically, such devices are partially constructed electronic devices. In one embodiment, the intermediate device 250 is a partially structured organic light emitting device. Intermediate device 250 includes a surface to which a transferable layer is to be transferred.

In the LITI process, a film donor device 241 is placed over the intermediate device 250 . In one embodiment, the film donor device 241 includes a base substrate, a light-to-heat conversion layer, and a transferable layer, which will be further described later. The illustrated film donor device 241 also includes a film donor device seat 240 surrounding the film donor device 241 . The film donor device holder 240 serves as a frame that holds the shape of the film donor device 241 . In the LITI process, the transferable layer is arranged to face the surface of the intermediate layer.

The LITI device 200 in FIG. 3 uses magnetic force to provide intimate contact between the film donor device 241 and the intermediate device 250 . The magnetic force keeps the devices 241 and 250 in intimate contact with substantially no air gaps or bubbles between the devices 241 and 250 .

In one embodiment, the magnetic force can be generated by two or more magnetic materials separated from each other. In an embodiment, the magnetic material is formed in two components of the LITI device, the two components are separated from each other and the transferable layer and the surface to be transferred with the transferable layer are placed between the two components, also That is, one component is located above the transferable layer and the other component is located below the surface. Here, the term "component" refers to components and devices used in the LITI process, including the intermediate device 250 , the film donor device 241 , the printing device 230 and the substrate support 260 . In an embodiment, the magnet or magnetic material is formed in two following components of the LITI device, but not limited thereto: 1) the intermediate device 250 and the film donor device 241; 2) the intermediate device 250 and the printing device 230; 3 ) a substrate support 260 and a film donor device 241 ; or 4) a substrate support 260 and a printing device 230 .

Alternatively, the magnetic material may be provided in one of the following combinations of components of the LITI device: 5) substrate support 260, intermediate device 250, and printing device 230; 6) substrate support 260, intermediate device 250, and membrane Donor device 241 ; 7) substrate support 260 , film donor device 241 and printing device 230 ; or 8) intermediate device 250 , film donor device 241 and printing device 230 . In another embodiment, magnetic material may be provided in 9) the substrate support 260 , the intermediate device 250 , the film donor device 241 and the printing device 230 . The skilled person will understand that, depending on the design of the LITI device, the magnetic material may be provided in certain other components.

The magnetic materials in the paired assemblies are configured to attract each other such that the film donor device 241 and the intermediate device 250 form intimate contact between the transferable layer and the surface to which the transferable layer is to be transferred. The term "magnetic material", as used herein, means a magnet or a magnetically attractable material. Unless otherwise indicated, "magnet" generally means a permanent magnet or an electromagnet. The term "magnetically attractable material", as used herein, means a material that is not a magnet but can be attracted by a magnet. In some embodiments, one of the two LITI assemblies may contain a magnet, while the other may contain a magnetically attractable material that is not a magnet. In other embodiments, both LITI assemblies may contain magnets. In some embodiments, a magnet-containing assembly may also contain a magnetically attractable material. In all embodiments, the assembly contains magnetic material in an amount that generates sufficient magnetic force to provide intimate contact between the film donor device 241 and the intermediate device 250 .

Unlike pumping, magnetic force can be generated in a vacuum atmosphere. Thus, in some embodiments, the LITI process can be performed in a vacuum without breaking the vacuum using magnetically inductive contact between the film donor device 241 and the intermediate device 250 . Additionally, in other embodiments, a magnetic device may also be used in conjunction with an air extraction device to improve the LITI process. The location and configuration of the magnets or magnetically attractable material in each component will be described in detail below.

In one embodiment, the magnetic material underlying the transferable layer is located in the intermediate device 250 . 4A and 4B illustrate cross-sectional views of embodiments of intermediate devices 400A and 400B. The illustrated intermediate devices 400A and 400B are partially structured organic light emitting devices (OLEDs). Each of the intermediate devices 400A and 400B includes a substrate 401 , a buffer layer 402 , a thin film transistor 440 , a passivation layer 409 , an electrode 420 and a pixel partition wall 430 . The thin film transistor 440 includes insulating layers 403 and 404 , a semiconductor layer 405 , a source electrode 406 , a drain electrode 407 , and a gate electrode 408 . Pixel partition walls 430 are formed over passivation layer 409 and portions of electrode 420 , exposing a substantial portion of the top surface of electrode 420 . The electrode 420 will serve as a cathode or an anode of the organic light emitting diode. A transferable layer will be formed over the exposed top surface of the electrode 420 .

In FIG. 4A , a magnetic layer 410 a is attached to the bottom surface of a substrate 401 . In another embodiment shown in FIG. 4B , the magnetic layer 410 b is located between the substrate 401 and the buffer layer 402 . The magnetic layers 410a, 410b contain magnetic materials, which will be described in detail below. In one embodiment, the thickness of the magnetic layer 410a or 410b is between about 5,000 Ȧ and about 10,000 Ȧ.

In some embodiments, depending on the design of the device, the intermediate device may contain magnetic material buried in any component below the electrode 420, such as the substrate 401, the buffer layer 402, the insulating layers 403, 404, and/or the passivation layer. Layer 409. In any event, the intermediate device contains an amount of magnetic material sufficient to allow intimate contact between the film donor device and the intermediate device.

In yet another embodiment, the intermediate device may contain strips of magnetic material in specific regions of the intermediate device. Figure 4C illustrates a top plan view of one embodiment of an intermediate device 400C. The device shown is a partially structured organic light emitting device 400C. The device 400C includes a display area 460 , a data driver 430 , a scan driver 440 and power connectors 415 and 420 . The display area 460 includes a plurality of pixels 470 in a matrix. The illustrated device 400C includes strips of magnetic material 450a and 450b. In the illustrated embodiment, band 450a is located in a peripheral region outside display region 460 . In addition, a band 450 b is formed in the display area 460 . The strips 450b are shown substantially parallel to one another. In other embodiments, the strips of magnetic material are formed in the pixel region but not in the peripheral region. The skilled artisan will appreciate that various configurations of straps can be used to provide the magnetic force.

In one embodiment, the magnetic material may be a magnet including a permanent magnet or an electromagnet. The permanent magnets may be alnico magnets, ferrite magnets, rare earth magnets, rubber magnets or plastic magnets. The permanent magnet may take at least one form selected from plates, sheets, blocks, rods and pellets. In one embodiment, the permanent magnets may be nano-sized magnetic particles, plates, sheets, blocks or rods. Such nano-sized particles can be deposited on the surface of the components of the intermediate device using spin coating, electron beam deposition or ink jet deposition. In other embodiments, plates, sheets, blocks, rods and particles may be larger than nanometer dimensions.

The permanent magnets may be substantially evenly distributed in the magnetic layer 410a or 410b. In another embodiment, the magnetic layers 410a and 410b may have permanent magnet portions only in the region above the transferable layer to be transferred. In yet another embodiment, the magnetic layer may be a single plate formed of permanent magnets.

In yet another embodiment, the magnetic material may be an electromagnet. The electromagnet may have at least one form selected from a solenoid or a toroid. A solenoid refers to a coil of coils formed into the shape of a straight tube. A toroidal coil refers to a coil formed into a ring shape. Typically, a toroid is a solenoid bent into a connected end. In some embodiments, a solenoid or toroid coil may include a magnetic core of paramagnetic or ferromagnetic material (eg, iron) inside the coil. Because ferromagnets require electrical current to be magnetized, electromagnets are connected to an external power source by wire. In one embodiment, the non-display area of the intermediate device may include one or more electrodes electrically connected to be assigned to the electromagnet. The electrodes are configured to receive power from an external power source. In addition, the electrodes are connected to the electromagnet by wires. In embodiments, electrodes may be formed on the outer surface of the device or body incorporating the electromagnet to form an electrical connection to an external power source. In other embodiments, the electrodes may protrude outside of the device or body incorporating the ferromagnet. In a finished electronic device formed from an intermediate device, the electrodes may be passive and buried in a dielectric material. Similar to the permanent magnets, the electromagnets can be distributed substantially uniformly or non-uniformly, depending on the design of the intermediate device.

In yet another embodiment, the magnetic material may be a magnetically attractable material rather than a magnet. Magnetically attractable materials include, but are not limited to: Fe, Ni, Cr, Fe ₂ O ₃ , Fe ₃ O ₄ , CoFe ₂ O ₄ , MnFeO ₄ , alloys thereof, and mixtures of two or more of the foregoing . Other examples of magnetically attractable materials may also include plastic and ceramic magnetic materials. Similar to the permanent magnet, the magnetically attractable material may be in at least one form selected from plates, sheets, blocks, rods and particles. These can be nano-sized particles or larger particles. The magnetically attractable material may be uniformly distributed in the magnetic layer 410 . In another embodiment, the magnetic layer 410 may have a magnetically attractable material only in the region over which the transferable layer is to be transferred. In yet another embodiment, the magnetic layer may be a single plate formed of a magnetically attractable material.

In yet another embodiment, the magnetic material underlying the transferable layer may be located in the substrate support. 5A and 5B illustrate one embodiment of a substrate support 260 of magnetic material. The illustrated substrate support 260 includes an electromagnet 264 in a region 263 (shown in phantom) below the recess. Electromagnets 264 are shown aligned in a vertical direction. However, depending on the design of the substrate support, the electromagnets can be arranged in various configurations. The electromagnet can also have various shapes and configurations as described above for the intermediate device. In some embodiments, the magnetic material may be a permanent magnet or a magnetically attractable material as described above for the intermediate device.

In one embodiment, the magnetic material above the transferable layer may be located in a film donor device. 6A to 6C are partial cross-sectional views of film donor devices 600A to 600C according to an embodiment. Each of the film donor devices 600A-600C includes: a base substrate 601; a light-to-heat conversion layer 602 on the base substrate 601; an intermediate layer 603 on the light-to-heat conversion layer 602; a transferable layer 604 on the intermediate layer 603 above. Optionally, the film donor device may include a buffer layer (not shown) between the intermediate layer 603 and the transfer layer 604 .

The base substrate 601 is used to provide a film donor device having a film structure. The base substrate 601 may be made of transparent polymer. Examples of transparent polymers include, but are not limited to: polyethylene, polyester, teleptalrate, polyacryl, polyepoxy, polyethylene, and polystyrene. The thickness of the base substrate 601 is between about 10 μm and about 500 μm, optionally between about 100 μm and about 400 μm.

The light-to-heat conversion layer 602 is configured to absorb laser light and convert the laser light to heat. The conversion layer 602 includes a light absorbing material. The light absorbing material may have an optical density of greater than 0.1 to about 0.4. Light absorbing materials may include metals, metal oxides and/or organic materials. Examples of metals/metal oxides include, but are not limited to: aluminum, silver, chromium, tungsten, tin, nickel, titanium, cobalt, zinc, gold, copper, tungsten, molybdenum, lead, and oxides of the foregoing metals. Organic materials may include photosynthetic materials. Examples of organic materials include polymers made from (meth)acrylate monomers or oligomers, for example, from acryl-based (meth)acrylate oligomers, ester (meth)acrylate oligomers , epoxy (meth)acrylate oligomers, urethane (meth)acrylate oligomers, etc., or polymers made of a mixture of two or more of the above substances . In addition, the conversion layer 602 may also contain other additives such as carbon black, graphite or infrared dyes.

The thickness of the light-to-heat conversion layer 602 can vary depending on the light-absorbing material and manufacturing method. For example, when a vacuum deposition method, a laser beam deposition method, or a sputtering method is used, the conversion layer may have a thickness of about 100 Ȧ to about 5000 Ȧ. In another embodiment, the conversion layer may have a thickness of about 0.1 μm to about 2 μm when extrusion coating, gravure coating, spin coating, and blade coating are employed.

The middle layer 603 plays a role of protecting the light-to-heat conversion layer 602 . In one embodiment, the intermediate layer 603 has high heat resistance. The intermediate layer 603 may be made of an organic material or an inorganic material such as polyimide. The thickness of the intermediate layer 603 is between about 1 μm and about 1.5 μm. In some embodiments, intermediate devices may be omitted.

The transferable layer 604 is the layer that will be transferred onto the intermediate device. The transferable layer 604 may be formed from an organic material. In one embodiment where the electronic device is an organic light emitting device, the material may be an organic light emitting material. However, the material may also be other organic materials used to form other organic elements of an organic light emitting device. The other elements include, but are not limited to: hole injection layer (HIL), hole transport layer (HTL), electron injection layer (EIL), and electron transport layer (ETL). In other electronic devices, any material suitable for forming the target component can be used as the material for the transferable layer. The thickness of the transferable layer 604 is between about 200 Ȧ and about 1,000 Ȧ. The transferable layer 604 may be formed using any suitable method, such as extrusion coating, gravure coating, spin coating, blade coating, vacuum deposition, or chemical vapor deposition (CVD).

A buffer layer (not shown) is used to improve the transfer properties of the transferable layer 604 . The buffer layer may contain one or more of metal oxides, metal sulfides, non-metallic inorganic compounds and organic materials. Examples of inorganic compounds include Al and Au. Examples of organic materials include polyimide.

Referring to FIG. 6A, the light-to-heat conversion layer 602 includes a magnetic material. For example, the light-to-heat conversion layer 602 may contain permanent magnets and/or electromagnets. In other embodiments, conversion layer 602 may include a magnetically attractable material. The magnetic material may have various structures as described above for the intermediate device. In other embodiments, the magnetic material may be buried in the base substrate 601 or the intermediate layer 603 . In some embodiments, magnetic materials may be embedded in at least two of the base substrate 601 , the light-to-heat conversion layer 602 and the intermediate layer 603 . In other embodiments, the magnetic material may only be buried in certain portions of one or more of the layers 601-603, rather than the entire layer. For example, one or more of layers 601 to 603 may contain magnetic material only under the portion of the transferable layer that is to be transferred to the intermediate device.

Referring to FIGS. 6B and 6C , film donor devices 600B and 600C include a magnetic layer 605 . The magnetic layer 605 includes magnetic materials such as permanent magnets, electromagnets, and/or magnetically attractable materials. The magnetic material may have various structures as described above for the intermediate device.

In FIG. 6B , the film donor device 600B includes a magnetic layer 605 between the base substrate 601 and the light-to-heat conversion layer 602 . In FIG. 6C , film donor device 600C includes magnetic layer 605 between light-to-heat conversion layer 602 and intermediate layer 603 . In another embodiment, the film donor device may include a magnetic layer between the intermediate layer 603 and the transferable layer 604 . In yet another embodiment, the film donor device may comprise a magnetic layer on the bottom surface of the base substrate 601 facing away from the light converting layer 602 . In some embodiments, the film donor device may have two or more magnetic layers positioned between two consecutive ones of layers 601-604. In such an embodiment, the magnetic material may also be embedded in at least one of the base substrate 601 , the light-to-heat conversion layer 602 and the intermediate layer 603 . The skilled artisan will appreciate that the configuration and combination of magnetic layers may vary depending on the design of the film donor device.

In another embodiment, the magnetic material above the transferable layer may be located in the printing device. FIG. 7 shows an embodiment of a printing device 230 . The photolithography device 230 is shown comprising magnetic material embedded in the photolithography device. The magnetic material may be a permanent magnet or an electromagnet as described above for the intermediate device. In other embodiments, the magnetic material may be a magnetically attractable material, as described above.

In some embodiments, the printing device 230 may include a single magnetic layer. The magnetic layer comprises the magnetic material as described above for the intermediate device. A magnetic layer may be attached to at least one of the top and bottom surfaces of the printing device 230 . In another embodiment, the magnetic layer may be buried in the printing device 230 . In these embodiments, the layer is patterned to have openings corresponding to the openings of the printing device. The openings of the printing device and the magnetic layer enable the laser beam to be directed onto the portion of the film donor device 241 . This configuration selectively transfers the transferable film onto the intermediate device 250 . In another embodiment, the printing device itself may be formed from a magnetic material. In all of the foregoing embodiments, the printing device comprises magnetic material in an amount sufficient to provide a magnetic force for pressing the film donor device against the intermediate device.

Laser Induced Thermal Imaging Process

A Laser Induced Thermal Imaging (LITI) process according to an embodiment uses magnetic force to provide intimate contact between the film donor device and the intermediate device. Figure 8 is a flow diagram illustrating one embodiment of the LITI process.

First, in step 810 , intermediate device 250 is placed on substrate support 260 . During this step, the intermediate device 250 may be moved by any suitable moving means, such as robotic means. Next, in step 820 , the film donor device 241 is placed over the intermediate device 250 . First, the film donor device 241 is vertically aligned with the intermediate device 250 with its transferable layer facing downwards. Next, the film donor device 241 is moved down onto the intermediate device 250 . At least a portion of the transferable layer contacts the intermediate device 250 . Similar to step 810, the film donor device 241 may be moved by a moving device.

In step 830 , a magnetic force is provided to press the film donor device 241 against the intermediate device 250 . The magnetic force can be generated by the magnetic material as described above in two components of the LITI component, one above the transferable layer and the other on which the transferable layer is to be transferred. below the surface. In some embodiments, one of the two LITI components may contain a magnet, while the other may contain a magnetically attractable material that is not a magnet. In other embodiments, both LITI assemblies may contain magnets. The magnets may include permanent magnets and/or electromagnets. In one embodiment where the magnet comprises an electromagnet, the time to generate the magnetic force can be selected according to the needs of the LITI process. In some embodiments, a component that includes a magnet may also include a magnetically attractable material.

In this step, the magnetic force causes the film donor device 241 to be pushed towards the intermediate device 250, which brings the transferable layer into closer contact with the surface to which the transferable layer is to be transferred. During this process, all or at least some air gaps or bubbles between the film donor device 241 and the intermediate device 250 may be removed. This step facilitates the transfer of the transferable layer onto the intermediate device 250 .

In step 840 , laser light is irradiated onto the film donor device 241 . The laser provides the thermal energy required to transfer the transferable layer onto the intermediate device 250 . In this step, the laser oscillator 220 is activated to irradiate laser light onto the top surface of the film donor device 241 . In one embodiment employing a printing device 230 having openings, the laser light passes through the openings to the top surface of the film donor device 241 . In this process, laser light is directed to selected areas of the film donor device 241 . The laser light passes through the base substrate to the light-to-heat conversion layer of the film donor device 241 . The light-to-heat conversion layer converts light energy into thermal energy to generate heat. The heat is transferred to selected portions of the transferable layer. With this process, part of the transferable layer is released from the film donor device 241 and this part is transferred to the intermediate device 250 . In another embodiment that does not use a printing device, the laser is selectively irradiated on specific portions of the top surface of the film donor device 241 .

Subsequently, in step 850 , the film donor device 241 is removed from above the intermediate device 250 , leaving part of the transferable layer on the top surface of the intermediate device 250 . The film donor device 241 may be removed using the same means as the moving means used in step 820 .

Referring to FIGS. 9A to 9F , the intermediate device 250 is introduced into the transfer chamber 900 . Intermediate device 250 is placed on end effector 910 of robotic arm 920 in transfer chamber 900 . Subsequently, the intermediate device 250 is transferred into the LITI cavity 210, as shown in FIG. 9B. Next, the intermediate device 250 is placed on the substrate support 260, as shown in Figure 9C.

Next, the film donor device 241 is placed on the end effector 910, as shown in Figure 9C. Subsequently, a film donor device 241 is introduced into the LITI cavity 210, as shown in Figure 9D. The film donor device 241 is vertically aligned with the intermediate device 250 . Next, the film donor device 241 is moved down onto the intermediate device 250, as shown in Figure 9E. The end effector 910 is then withdrawn from the LITI lumen 210 . Subsequently, the gate valve 930 is closed to provide a sealed reaction chamber. In one embodiment, a vacuum atmosphere may be maintained throughout the transfer chamber and LITI chamber during these steps.

Optionally, a printing device may be positioned above the film donor device. In FIG. 9F , the printing device 230 is moved down over the film donor device 241 . The printing device 230 provides gravity over the film donor device 241 . The printing device 230 may facilitate intimate contact between the film donor device 241 and the intermediate device 250 . In other embodiments, the printing device may be omitted.

Next, a magnetic force is applied to bring an intimate contact between the intermediate device and the film donor device. The magnetic force can be generated by magnetic material located in two of the LITI device components, one below and one above the transferable layer, as described above. The skilled person will understand that magnetic material may be provided in some other components depending on the design of the LITI device. In all of the preceding embodiments, a magnetic force of sufficient strength is applied between the intermediate device and the film donor device such that there are no air gaps or air bubbles in contact between the intermediate device and the film donor device. The details of the location and configuration of the magnetic material are as described above for the LITI device.

10A to 10D are cross-sectional views showing how the transferable layer is transferred onto the intermediate device. The intermediate component shown is a partially structured organic light-emitting component 400 . In the illustrated embodiment, the magnetic material is located in the intermediate device and the film donor device. In other embodiments, the magnetic material may be provided in other components of the LITI device, as described above.

Referring to FIG. 10A , the intermediate device 400 includes a thin film transistor (TFT) structure 411 , a magnetic layer 410 , an electrode 420 and a pixel separation layer 430 . A portion 412 of the electrode 420 is exposed through the pixel separation layer 430 . An organic layer will be formed on the exposed portion 412, as will be better understood from the following description.

Next, the film donor device 600 is placed over the intermediate device 400 as shown in FIG. 10B . The film donor device 600 comprises a base substrate 601 , a magnetic layer 605 , a light-to-heat conversion layer 602 , an intermediate layer 603 and a transferable layer 604 as described with respect to FIG. 6B . The transferable layer 604 at least partially contacts the top surface of the pixel separation layer 430, as shown in FIG. 10B. In this step, a magnetic force is applied between the film donor device 600 and the intermediate device 400 .

Next, laser light is irradiated onto selected portions of the film donor device 600 . The selected portion is located over the exposed portion 412 of the electrode 420 . The laser light passes through the base substrate and the magnetic layer 605 to reach the light-to-heat conversion layer 602 . The light-to-heat conversion layer 602 converts light energy into thermal energy to generate heat. The heat is transferred to the transferable layer 604 through the intermediate layer 603 .

Next, based on the heat received, a portion of the transferable layer 604 delaminates from the film donor device 600 and comes into contact with the exposed portion 412 of the electrode 420, as shown in FIG. 1OC. In the illustrated embodiment, conversion layer 602 , intermediate layer 603 , and a portion of transferable layer 604 are separated from magnetic layer 605 . In other embodiments, only the transferable layer 604 may be separated from the film donor device 600 .

Subsequently, the film donor device 600 is removed from above the intermediate device 400 as shown in FIG. 10D . After this step, only a portion 604a of the transferable layer remains on the intermediate device 400 .

In the above embodiments, magnetic force is used to provide intimate contact between the film donor device and the intermediate device. Unlike pumping, this configuration does not require air pressure in the LITI cavity. Therefore, the LITI process can be performed in a vacuum atmosphere. Since processes performed before or after the LITI process are also generally performed in a vacuum atmosphere, the LITI process can be performed without breaking vacuum throughout the process. The vacuum atmosphere may be maintained from a process of depositing a hole injection layer (HIL) to a process of depositing a second electrode layer. Additionally, the LITI process reduces the occurrence of impurities or gaps between the donor film and intermediate devices. This improves the lifetime, yield and reliability of the resulting electronic devices.

While various embodiments of the present invention have been shown and described, it should be understood by those skilled in the art that changes may be made to these without departing from the principles and spirit of the invention, within the scope of the claims and their equivalents. Example changes.

Claims (20)

1, a kind of device that is used for laser induced thermal imaging comprises:

The substrate support part is configured to support intermediate electronic device and film donor device;

Lasing light emitter;

Plate copying device, between described substrate support part and described lasing light emitter, described plate copying device is movably with respect to described substrate support part between the primary importance and the second place, described substrate support part first distance of described primary importance distance, the described substrate support part second distance of described second place distance, described second distance is greater than described first distance, described plate copying device is pressed to described intermediary device with described film donor device near being formed at described primary importance, and described plate copying device comprises at least a magnetic material of selecting from the group of being made up of permanent magnet and electromagnet.

2, device as claimed in claim 1, wherein, described electromagnet is electrically connected with external power source, and is configured to by excitation selectively.

3, device as claimed in claim 1, wherein, described at least a magnetic material comprises one or more forms of selecting from the group of being made up of plate, sheet, piece, bar and particle.

4, device as claimed in claim 1, wherein, described plate copying device comprises magnetic part and nonmagnetic portion, wherein, described magnetic part comprises at least a magnetic material.

5, device as claimed in claim 4, wherein, described magnetic part is arranged to usually than the more close described substrate support part of described nonmagnetic portion.

6, device as claimed in claim 1, wherein, but described substrate support part comprises at least a magnetic material of selecting from the group of being made up of permanent magnet, electromagnet and magnetic attractive material.

7, device as claimed in claim 1 also comprises:

Intermediary device comprises receiving surface, and is placed on the top of described substrate support part;

The film donor device, but comprise the transfer printing rete, and be placed on the top of described intermediary device.

8, device as claimed in claim 7 wherein, is arranged described intermediary device and described film donor device, but makes described receiving surface contact with described transfer printing rete.

9, device as claimed in claim 8 wherein, but does not have bubble basically between described receiving surface and described transfer printing rete.

10, device as claimed in claim 7, wherein, described film donor device also comprises the photo-thermal conversion coating.

11, device as claimed in claim 7, wherein, described film donor device does not comprise the magnetosphere that contains permanent magnet or electromagnet.

12, device as claimed in claim 7, wherein, but described intermediate electronic device comprises at least a magnetic material of selecting from the group of being made up of permanent magnet, electromagnet and magnetic attractive material.

13, a kind of device that utilizes claim 1 is made the method for electronic device, and described method comprises:

Intermediary device is placed on the described substrate support part, and described intermediary device comprises first surface and second surface, and described first surface is in the face of described plate copying device, and described second surface contacts described substrate support part;

The film donor device is placed on the first surface of described intermediary device, described film donor device comprises the 3rd surface and the 4th surface, and described the 3rd surface is in the face of described plate copying device, and described the 4th surface is in the face of described substrate support part;

Move described plate copying device so that it contacts the 3rd surface of described film donor device, make the 4th surface of described film donor device contact the first surface of described intermediary device;

Described film donor device is pressed to described intermediary device.

14, method as claimed in claim 13, wherein, described plate copying device comprises opening, wherein, described method also comprises the opening of laser beam by described plate copying device is shone on the described film donor device.

15, method as claimed in claim 13 wherein, is carried out described method under vacuum atmosphere.

16, method as claimed in claim 13, wherein, described plate copying device comprises electromagnet, wherein, causes described magnetic force and comprises the described electromagnet of excitation.

17, method as claimed in claim 13 wherein, is pushed described film donor device and is comprised that the gravity with described plate copying device is applied to described film donor device.

18, method as claimed in claim 13 wherein, also comprises and makes described at least a magnetic material and magnet or magnetic attractive material below the first surface of described intermediary device that magneticaction take place mutually but push described film donor device.

19, method as claimed in claim 18, wherein, but described intermediary device comprises described magnet or magnetic attractive material.

20, method as claimed in claim 18, wherein, but described substrate support part comprises described magnet or magnetic attractive material.

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