CN1965612B - Substrate deposition method and organic material deposition apparatus - Google Patents

Abstract

The present invention relates to an apparatus and method for depositing an organic material, and more particularly, to an apparatus and method for depositing an organic material, which: which is designed to prevent sagging of large-sized substrates transported into the chamber of the device during deposition of organic material. The device includes: a chamber having an inner space isolated from the outside, an inlet provided at one side of the chamber to allow a substrate to be input into or output from the chamber, and a door for opening or closing the inlet; a substrate mounting platen provided at an upper portion of the chamber, fixing both ends of the substrate transferred into the chamber by pressure, and applying a tensile force to the substrate by moving one side of the substrate, which is in a fixed state, outward to prevent the substrate from sagging; a rotary lifter coupled to a center of an upper surface of the substrate mounting platen for rotating, lifting, or lowering the substrate mounting platen; and a heater and an organic material evaporation pan disposed at a lower portion of the chamber for evaporating an organic material onto the substrate.

Description

Substrate deposition method and organic material deposition apparatus

technical field

The present invention relates to apparatus and methods for depositing organic materials, and more particularly to an apparatus and method for depositing organic materials designed to prevent large Dimensional base plate sagging.

Background technique

Recently, with the rapid development of information and communication technology and the expansion of market demand, flat panel display devices have come to the forefront of display technology. Representative flat panel display devices include liquid crystal display devices, plasma display panels, organic light emitting diodes, and the like.

Among flat panel display devices, as next-generation display devices, organic light-emitting diodes stand out due to their advantages such as fast response time, lower power consumption compared to conventional liquid crystal display devices, light weight, Ultra-thin thickness, high brightness, etc.

Organic light-emitting diodes work based on the principle of electroluminescence, and have a configuration in which a cathode film, an organic thin film, and an anode film are coated on a substrate, and when a voltage is applied to the cathode and anode, suitable energy is generated on both sides of the organic thin film. Difference. That is, electrons and holes pass through the cathode and the anode respectively to recombine on the organic thin film, so that the excitation energy remaining after the recombination between the electrons and holes emits light. At this time, since the wavelength of light generated from the organic thin film can be controlled according to the amount of dopant of the organic material, full colors can be realized. In this regard, glass substrates used to manufacture display devices tend to increase in size due to improvement in productivity and increase in size of display devices.

As for the detailed configuration of the organic light emitting diode, it includes an anode, a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer, and a cathode, which are sequentially stacked on a substrate in this order. Here, for the anode, indium tin oxide (ITO) having low in-plane resistance and good transmittance is mainly used. The organic film is composed of multiple layers, such as a hole injection layer, a hole transfer layer, a light emitting layer, an electron transfer layer, and an electron injection layer, wherein organic materials used for the light emitting layer include Alq ₃ , TPD, PBD, m-MTDATA, TCTA et al. As for the cathode, a LiF-Al metal thin film is used. In addition, since the organic film is particularly weak against moisture and oxygen, an encapsulation film for encapsulating the diode is formed on the uppermost portion of the diode to increase the lifetime of the diode.

However, despite various advantages as described above, organic light emitting diodes are not currently established as next-generation display devices replacing conventional flat panel display devices because devices for manufacturing large-area organic light emitting diodes are not clearly standardized. That is, there is a strong demand to develop a method for manufacturing large-area organic light-emitting panels, considering that devices for manufacturing large-area panels have been developed and standardized along with the rapid increase in size of liquid crystal display devices or plasma display devices. diodes, which will allow OLEDs to be established as next-generation display devices.

Meanwhile, when manufacturing a flat panel display device such as an organic light emitting diode, the display device is formed on a glass substrate according to its characteristics, and the glass substrate must be held by a holding device such as a glass chuck during the deposition process so that the deposition surface Face down in a vacuum state.

One widely used glass chuck is a clamp chuck that physically supports the four sides of the glass substrate, and other chucks are vacuum chucks that use atmospheric pressure differences and electrostatic chucks that use electric fields and electrostatic induction.

The vacuum chuck uses an atmospheric pressure differential in such a way that it holds the glass substrate by sucking air from the suction plate as it contacts the rear side of the flat glass substrate. Therefore, there is a problem that a vacuum chuck cannot be used for a deposition process because the deposition process is mainly performed in a vacuum state and it has a complicated configuration.

That is, for flat panel display devices, since foreign matter such as dust, water vapor, oxygen, etc. becomes a main factor to increase the reject rate and needs to be operated in a vacuum state, the vacuum chuck cannot be applied to a vacuum device in consideration of this situation.

At the same time, the electrostatic chuck maintains the flat surface by means of the electrostatic force generated between the electrostatic chuck and the flat substrate (the electrostatic force generated by electrifying the flat substrate by the electric field generated when the current is applied to the rear side of the flat substrate). substrate, and can be used in a vacuum state. However, electrostatic chucks have several problems as described below.

In the case of holding a large area flat glass substrate, an electrostatic chuck requires a large electric field, thereby increasing power consumption. Furthermore, not only does the electrostatic chuck require a complicated mechanical structure in order for the current to be continuously supplied during various deposition processes, but also the electric field generated on the substrate by the current affects the material deposited on the flat glass substrate—that is, the deposited compounds, thereby degrading performance.

When clamping a glass substrate, the center of the substrate sags due to its own weight. At this time, if the thickness of the glass substrate is 370×470 mm, the substrate sags by about 1 mm, and if the thickness of the glass substrate is 600×720 mm, the substrate sags by about 5 mm. In addition, vacuum chucks cannot be used for deposition processes performed in a vacuum state, and in the case of large-area glass substrates, electrostatic chucks require a very strong electric field and are difficult to handle with wires when transferring the substrate.

A conventional apparatus for depositing an organic material includes a vacuum chamber in which a deposition process is performed, a substrate mounting table provided on an upper portion of the chamber for mounting a substrate, a magnetic magnet provided on the substrate mounted on the substrate mounting table, A seat, a mask holding device provided under the substrate mounted on the substrate mounting platen, a heater provided at the lower part of the chamber for evaporating an organic material and depositing it on the substrate, and an organic material provided at the lower part of the chamber Material evaporating dish.

Here, after placing a predicted suitable amount of organic material to be deposited on the substrate on the organic material evaporation dish, the vacuum chamber was evacuated below 10 ⁻⁶ Torr by using a vacuum pump. Here, the organic material evaporating dish is generally composed of molybdenum. Then, the heater is energized, and the temperature of the heater is increased to the melting point of the organic material by precisely controlling the temperature using a temperature controller (not shown) until the organic material evaporates. At this point, as the organic material begins to evaporate from the organic material evaporation dish, the previously installed baffle opens to allow the evaporated material to deposit onto the substrate. Here, the baffle is used to deposit impurities on the remaining organic material evaporation pan on the substrate before the organic material evaporates.

Conventional apparatuses for depositing organic materials have a problem in that a large-area substrate sags due to its own weight during mounting the substrate on a substrate mounting platen, so that the organic material cannot be uniformly deposited on the substrate.

Contents of the invention

technical problem

Therefore, the present invention has been made in consideration of the above-mentioned problems, and an object of the present invention is to provide an apparatus and method for depositing an organic material, which are designed to apply a pulling force to the substrate by stretching one side of the substrate, while both sides of the substrate The sides are held by the pressing and holding means, thereby preventing the center of the substrate from falling due to its own weight during deposition of the substrate, thereby preventing the substrate from sagging.

Technical solutions

According to one aspect of the present invention, the above and other objects can be achieved by providing an apparatus for depositing an organic material, the apparatus comprising: a chamber having an inner space isolated from the outside, an inlet provided on one side of the chamber to allow a substrate to be introduced into the chamber In or out of the chamber, and a door for opening or closing the entrance; a substrate mounting platen provided on the upper part of the chamber, which fixes both ends of the substrate transferred into the chamber by pressure, and is in a fixed state at both ends downwardly facing the side of the substrate moving outward, thereby applying a tensile force to the substrate to prevent the substrate from sagging; a rotary lifter coupled to the center of the upper surface of the substrate mounting platen for rotating, raising or lowering the substrate mounting platen; And a heater and an organic material evaporating dish arranged at the lower part of the chamber for evaporating the organic material and depositing it on the substrate. Accordingly, there is provided a substrate mounting stage for mounting substrates transported into the chamber for organic material deposition, thereby preventing sagging of large-area substrates.

The substrate mounting table may include: a substrate resting holding device provided in the substrate mounting table, adapted to allow one side of the substrate resting holding device to be separated from the other side, the substrate resting holding device having a shape of a plate perforated at a center, Thereby the four sides of the substrate can be rested on the perforated part formed in the substrate rest holding device; the pressing holding device provided on the substrate mounting table to ascend or descend is adapted to press the upper surface of the substrate when descending and allowing one side of the hold-down device to be separated from the other side of the hold-down device and positioned co-linearly with one side of the hold-down device for the substrate, the hold-down device having the shape of a plate perforated at the center; A first driving member disposed downwardly on either side of the upper surface of the pressing and holding device for pressing or releasing the relevant side of the upper surface of the substrate according to the supply or discharge of air; arranged perpendicularly to the first driving member , and fixed to the second driving member on one side of the hold down device, for linearly reciprocating the substrate rest hold device and the hold down device according to the supply or discharge of air, the substrate rest hold device and the hold down device thereof One side of each of them is separated from the other side, so that one side of the substrate whose both ends are held by the compression holding means is stretched by moving the fixing holding means and the compression holding means outwardly, by This prevents the substrate from sagging. Therefore, when the pressing and holding device presses and fixes the sides of the upper surface of the substrate resting on the substrate resting and holding device, the first and second driving members respectively apply pressure and tension to the substrate in the following manner: The second driving member applies tensile force to the substrate by moving one side of the substrate toward the outside, and the first driving member serves to fix both sides of the substrate, thereby preventing the substrate from sagging.

Each of the first and second driving members may include: a plate-shaped base; first and second fixing plates vertically located on both sides of the upper surface of the plate-shaped base; and a moving plate that reciprocates between the second fixed plate, and the moving plate has a shaft formed at the center of one surface of the moving plate, and the shaft passes through the fixed plate facing the above-mentioned one surface of the moving plate; a bellows between the moving plate and a second fixed plate opposite to said first fixed plate, wherein the two ends of the bellows are respectively fixed to the moving plate and the second fixed plate, and when the bellows is filled with air, the bellows are adapted to An increase in the shaft linearly moves the moving plate forward; an air injection nozzle for injecting air from the outside into the bellows; and a spring arranged around the shaft between the moving plate and the first fixed plate so that in A restoring force is applied to the bellows during the contraction of the bellows as air is expelled from the bellows. Thus, the bellows are able to exert a forward force or a rearward force depending on whether it is filled with air or not.

The apparatus for depositing an organic material may further include: a substrate fixing part for applying pressure; a tensile force applying part; and a controller for controlling the pressure applied by the substrate fixing part and the tension applied by the tensile force applying part. Stretch force, so that the pressure and stretch force can be corrected based on the detection results of the sagging amount of the substrate obtained from the pressure and stretch force.

The substrate fixing portion may include: an elongated lower plate longer than the fixing portion on the substrate; a plate-shaped fixing and holding device positioned on the lower plate and adapted to allow the substrate to rest on its upper surface, the plate-shaped fixing and holding device having a The same shape; a position fixing plate provided on one side of the plate-shaped fixing holding device and extending along one side of the base plate, the position fixing plate has an L-shaped cross-section; a drive spaced apart from the position fixing plate and located at the center above the position fixing plate Component fixing plate; a pressing and holding device adapted to be raised or lowered in the space between the driving component fixing plate and the plate-shaped fixing and holding device, for pressing or loosening the upper surface of the substrate resting on the plate-shaped fixing and holding device surface, wherein the pressing and holding means has the shape of a plate extending along one side of the substrate; The pressure, vertical drive member has a movement shaft fixed at its front end to the hold-down device. A vertical driving member is provided on an upper portion of the substrate fixing portion to raise or lower the hold down device, thereby allowing both ends of the substrate to be fixed by a simple structure of the vertical driving member.

The vertical driving member may be provided with a first pressure gauge on the moving shaft for measuring and outputting a load in the vertical direction.

The first pressure gauge may be at least one load cell.

The tensile force applying part may include: a stationary side plate fixed to the lower plate of the substrate fixing portion and the outer wall of the plate-shaped fixing holding device; the driving member fixing side plate on the edge; and the horizontal driving member provided to the outer wall of the driving member fixing side plate for moving the movable substrate fixing part in the horizontal direction to apply tensile force to the substrate, the horizontal driving member has a fixed to the moving axis of the movable substrate fixing part. A horizontal driving member is provided to an outer wall of one of the substrate fixing parts so that it applies a tensile force by moving one end of the substrate outward while both ends of the substrate are fixed in place, thereby preventing the substrate from sagging.

The at least one load sensor may be a plurality of load sensors, enabling more accurate measurement of tension and compression.

The vertical driving member and the horizontal driving member can respectively apply different pressure and tension to the substrate according to the thickness of the substrate, so that the optimal pressure and tension can be applied to the substrate regardless of changes in substrate conditions including the thickness of the substrate.

The controller may be provided with a display device electrically connected to the controller for digitally outputting the results measured by the first manometer and the second manometer, thereby allowing the operator to know the pressure and tension numerically.

Description of drawings

The above and other objects, features and other advantages of the present invention will be more clearly understood through the following detailed description in conjunction with the accompanying drawings, in which:

1 is a side view showing the overall configuration of an apparatus for depositing an organic material according to a first embodiment of the present invention;

Figure 2 is a top view showing the substrate alignment member of the device of the present invention;

Figures 3a and 3b are top and side views showing the first and second drive members of the device of the present invention;

4 is a perspective view illustrating a substrate mounting platen of an apparatus for depositing an organic material according to a second embodiment of the present invention;

Fig. 5 is a sectional view of Fig. 4;

6a to 6c are schematic diagrams illustrating a process of fixing a substrate to a substrate mounting platen of an apparatus according to a second embodiment of the present invention;

7a and 7b are top views showing a substrate mounted on a substrate mounting platen of an apparatus according to a second embodiment, and graphs showing the relationship between the amount of sagging and the clamping length of the substrate, where both sides of the substrate are held at The substrate is installed on the fixing and holding device of the platform;

8a and 8b are plan views showing a substrate mounted on a substrate mounting platen of an apparatus according to a second embodiment, and graphs showing the relationship between the amount of sagging and the clamping length of the substrate, where both sides of the substrate are held at The substrate is installed on the fixing and holding device of the platform;

Figure 9 is a block diagram of a method for depositing an organic material according to the present invention;

10a to 10c are schematic diagrams illustrating a process of fixing a substrate to a substrate mounting platen of an apparatus for depositing an organic material according to a third embodiment of the present invention;

FIG. 11 is a partial schematic view showing a substrate contact holding device of the substrate mounting table shown in FIGS. 10a to 10c;

12a and 12b are conceptual diagrams illustrating a fixing method, wherein FIG. 12a shows a substrate stretched vertically and horizontally, and FIG. 12b shows a substrate stretched diagonally.

Detailed ways

Preferred embodiments of the present invention will now be described with reference to the accompanying drawings.

Embodiment 1

Referring to FIG. 1 , the apparatus for depositing organic materials according to the first embodiment includes: a chamber 110 in which a substrate S is loaded and the substrate S will be subjected to a deposition process; a first driving member 220 disposed inside the chamber 100 for fixing the side of the substrate S; the second driving member 240' positioned perpendicular to the first driving member 220 to apply a pulling force to the substrate S by using air pressure, thereby preventing the substrate S from sagging; The top surface of the chamber is used to rotate the substrate S, so that the organic material can be evenly distributed on the substrate S in the cavity during the evaporation process of the organic material.

Here, the chamber 110 has: an inner space isolated from the outside thereof; an inlet (not shown) formed at one side of the chamber 110 for allowing the substrate S to be transferred into or out of the chamber 110; and a A door (not shown) is used to open and close the entrance. The chamber 110 is adapted to allow the substrate S to undergo deposition of organic materials therein.

In addition, a vacuum pump P is provided at the edge of the bottom surface of the chamber 110 and serves to reduce the internal pressure of the chamber 110 . That is, in order to deposit a pure organic material on the surface of the substrate S, impurities must be purged from the inside of the chamber 110 when the organic material is deposited on the substrate S. Referring to FIG. In this regard, the vacuum pump P removes impurities by removing air from the deposition chamber 110 .

The chamber 110 is provided with a board 202 , and a substrate mounting table 200 located a predetermined distance below the board 202 , and a bracket 120 located below the substrate mounting table 200 in an upper portion of the chamber 110 . The substrate mounting platen 200 includes a substrate resting and holding device 210 , a pressing and holding device 208 , a first driving member 220 , and a second driving member 240 .

The plate 202 is provided with a fixed side plate 204 on one side and a movable side plate 206 capable of moving horizontally on the other side. A substrate rest holder 210 is provided laterally to each lower end of the fixed side plate 204 and the movable side plate 206 , and a press holder 208 is provided parallel to the substrate rest holder 210 so as to be raised or lowered.

The bracket 120 is opened at a lower portion and has a C-shaped cross section. The bracket 120 includes: a mask holding device 122 horizontally arranged to any lower end of the bracket 120; a pair of plate-shaped magnetic seats 124 arranged on the top of the bracket 120 for applying magnetic force; mask 126 on.

The magnetic base 124 applies a magnetic force to the mask 126 and forces the mask 126 into close contact with the lower surface of the substrate S, ie, the patterned surface of the substrate S. Referring to FIG.

The substrate resting holder 210 has the shape of a plate perforated at the center so that the four sides of the substrate S can rest on the perforated portion defined by the substrate resting holder 210 and allow one side of the substrate resting holder 210 to be connected with the other side. separate.

The pressing holding device 208 has a shape corresponding to the substrate resting holding device 210 and is disposed above the substrate resting holding device 210 so as to be raised or lowered by the first driving member 220 . The press-hold device 208 fixes the substrate S by pressing both sides of the upper surface of the substrate S when the press-hold device 208 descends, and also has the shape of a plate perforated in the center. As with the substrate rest holder 210 , one side of the hold down holder 208 may be detached from the other side and positioned in-line with one side of the substrate rest holder 210 .

That is, the pressing holder 208 provided above the substrate resting holder 210 so as to be raised or lowered by the first driving member 220 serves to press both sides of the upper surface of the substrate S resting on the substrate resting holder 210 .

As shown in FIG. 2, the substrate rest holding device 210 has the shape of a plate with a central hole, and a step is formed at the boundary between the upper surface of the substrate and the side surface of the punched portion, thereby allowing the substrate to be easily rested on the step. .

In addition, the substrate rest holding device 210 is provided with four positioning cylinders 130, and four alignment cylinders 132 opposite to the positioning cylinders 130 on four sides of the substrate S so as to align the substrate S resting thereon.

The positioning cylinder 130 is driven by air pressure, and is provided with a reference point for the substrate S when it rests on the substrate rest holding device 210 for deposition.

The alignment cylinder 132 is driven by air pressure, and moves the substrate S to a reference point of the substrate S when the substrate S is aligned.

Here, four positioning cylinders 130 are located at two adjacent sides of the substrate S, and a reference point of the substrate S is determined. Meanwhile, four alignment cylinders 132 are positioned at the other two adjacent sides of the substrate S so as to be opposed to the four positioning cylinders 130, and the substrate S is aligned by applying pressure to the positioning cylinders 130 from the sides of the substrate S, respectively.

The first drive member 220 for raising or lowering the hold down device 208 is reciprocated by the transmission member 212 disposed between the first drive member 220 and the hold down device 208 . The transmission member 212 is rod-shaped, and is folded in opposite directions at both ends thereof.

The movable side plate 206 is freely moved outward by means of a guide on one side of the upper surface of the plate 202, and at this time, the linear reciprocating motion of the movable side plate 206 is controlled by the second drive member 240 fitted in the lateral direction.

3a and 3b, the first drive member 220 includes: a plate-shaped base 222; a pair of fixed plates 224 erected on both sides of the upper surface of the plate-shaped base 222; between the fixed plates 224, thereby moving reciprocatingly therebetween plate 226, and the movable plate has a shaft 228 formed at the center of the front surface of the movable plate 226 so as to protrude to the outside through the fixed plate 224 positioned in front of the movable plate 226; The air box 232 between the fixed plates 224 at the rear, wherein both ends of the air box 232 are respectively fixed to the movable plate 226 and the fixed plate 224, and when the air box is filled with air supplied from a compressor (not shown) provided outside the chamber , the bellows are adapted to linearly move the shaft 228 forward with the increased volume; and the air nozzles 234 for injecting air introduced from the outside into the bellows 232; The shaft 224 between the movable plate 226 and the fixed plate 224 is provided to the rear of the movable plate 226 to apply a restoring force to the bellows 232 during the contraction of the bellows 232 due to the discharge of air from the bellows 232 . Here, a damping force control plate 238 for pressing or releasing the spring 236 is fixed to the shaft 228 to control the damping force of the spring 236 .

Here, the second driving member 240' has the same shape and function as the first driving member 220, so a detailed description will be omitted here. The difference is that the first drive member 220 is fixed longitudinally to the fixed side plate 204 and the movable side plate 206, and is used to raise or lower the hold down device 208, while the second drive member 240' The state of the member 220 is disposed adjacent to the movable side plate 206 of the plate 202, and moves the movable side plate 206 outward or restores it to an original position by means of air pressure while being fixed to the upper end of the movable side plate 206.

Meanwhile, reference numerals 242, 244, 246, 248, 250, 252, 254, 256, and 258 denote a base, a fixed plate, a movable plate, a shaft, a jig, a bellows, an air injection nozzle, a spring, and a cushioning force control plate, respectively.

As shown in FIG. 1 , the rotary lifting device 300 is disposed on the upper surface of the chamber 110 to rotate the substrate S, so that the organic material can be uniformly distributed on the substrate S in the chamber 110 during deposition of the organic material. The rotary lifter 300 includes: a first hollow shaft 306 extending downwardly from the interior of the rotary lifter bracket 304 to the upper surface of the substrate mounting platen 200 within the cavity 110; The upper part of the shaft 306 extends to the second hollow shaft 308 on the upper surface of the magnetic base 124; ', the positioning cylinder 130 and the alignment cylinder 132 supply air pressure.

The mask holding device 122 of the substrate mounting table 200 provided at the lower end of the first hollow shaft 330 raises or lowers the mask by driving a servo motor (not shown), and the magnetic seat provided at the lower end of the second hollow shaft 340 by means of Cylinders (not shown) raise or lower the substrate S. As shown in FIG.

The apparatus may also include other rotating devices (not shown) for rotating the substrate mounting platen 200 with the substrate S mounted thereon.

The apparatus also includes a heater 140 and an organic material evaporating dish 142 provided in the lower portion of the chamber 110 for evaporating and depositing the organic material onto the substrate S. As shown in FIG.

The operation of the apparatus for depositing an organic material according to the present embodiment will be described below with reference to FIGS. 1 to 3c. First, the substrate S rests on the substrate rest holding device 210 of the substrate mounting table 200 through an entrance formed on one side of the chamber 110 by means of a transfer device (not shown) provided outside the chamber 110 .

After closing the entrance of the chamber 110 with the door, the air inside the chamber 110 is exhausted to the outside by means of a plurality of vacuum pumps P provided at the edge of the bottom surface of the chamber 110 .

Then, air is injected from the compressor provided outside the cavity into the bellows 232 of the first driving member 220 provided on the fixed side plate 204 and the movable side plate 206, so that the pressing and holding device 208 can be lowered to fix the rest to the base plate The substrate S on the holding device 210 is rested. When the bellows 232 increases in volume due to the air supplied from the compressor, the shaft 228 of the moving plate 226 moves forward, and then the clamp 230 provided to the far end of the shaft 228 forces the transmission member 212 to descend, thereby setting the pressure to the transmission member 230. The holding device 208 is lowered.

When the pressing and holding device 208 descends, it fixes the substrate S by pressing both sides of the upper surface of the substrate S, and when the substrate S is firmly fixed, air is injected into the second drive for moving the movable side plate 206 member 240, thereby, the shaft 248 of the second drive member 240 moves forward and forces the movable side plate 206 to move outward horizontally.

Here, the substrate S inserted between the substrate rest holding device 210 and the pressing holding device 208 is securely fixed, and at this time, the second driving member 240 provided to the movable side plate 206 operates to force the movable side plate 206 toward Move and stretch one side of the substrate S, thereby allowing the substrate S to be positioned horizontally while preventing the substrate S from sagging due to its own weight.

Then, power is supplied to the heater 140 disposed at the bottom of the chamber 110, and the temperature is precisely controlled by a temperature controller (not shown), and the temperature of the heater rises to the melting point of the organic material until the organic material evaporates. At this time, as the organic material in the organic material evaporation dish 142 starts to evaporate, a previously installed shutter (not shown) is opened, allowing the evaporated material to be deposited on the substrate S. Referring to FIG. Here, the baffle serves to prevent impurities remaining on the organic material evaporating dish 142 from being deposited on the substrate S before the organic material is evaporated.

At this time, the substrate S is rotated by means of the rotary lifter 300, so that the organic material can be uniformly distributed on the substrate S in the chamber 110 during deposition of the organic material. After the deposition of the substrate S is completed, the air inside the second driving member 240 is exhausted to the outside. Thereby, the movable side plate 206 returns to its original position due to the restoring force of the spring 256 provided around the shaft 248, and the pulling force applied to the base plate S is released. Finally, the hold-down device 208 is raised by means of the first drive member 220 from which the air is expelled and the substrate S is transferred out of the chamber 110 by the transfer device.

According to this embodiment, during the deposition process that takes place in the chamber 110 of the device 100, one side of the substrate S is stretched horizontally, while both ends are fixed by the pressing and holding device 208, thereby preventing the large-area substrate S from The S sags under its own weight.

Embodiment 2

Although not shown in the drawings, the apparatus for depositing an organic material according to the second embodiment of the present invention includes: a chamber (not shown) in which a large-area substrate S is loaded, and the substrate S undergoes a deposition process in the chamber; A substrate mounting platen 400 at the upper portion of the chamber for preventing the substrate S from sagging in a state where both ends thereof are fixed; and a rotary lifter (not shown) coupled to the upper surface of the chamber for rotating the substrate S, Therefore, during the evaporation process of the organic material, the organic material can be evenly distributed on the substrate S in the chamber.

The apparatus for depositing an organic material according to the second embodiment has a configuration and function similar to those of the first embodiment except for some components such as the substrate mounting platen 400, so similarities to the apparatus according to the second embodiment will be omitted. A detailed description of the build.

The apparatus for depositing an organic material further includes: a controller (not shown) that controls the compressive and tensile forces; and a display device (not shown) electrically connected to the controller for outputting digital results of the detected compressive and tensile forces.

The apparatus also includes: a heater (not shown); and an organic material evaporating dish (not shown) disposed at a lower portion of the chamber for evaporating and depositing the organic material on the substrate S.

Referring to FIGS. 4 and 5, the substrate mounting table 400 includes: a plate-shaped base 540; a pair of substrate fixing portions 410 and 510 respectively provided to opposite sides of the plate-shaped base 540; a pair of horizontal movement guides 542 longitudinally provided to the upper surface of the plate-shaped base 540 so that the substrate fixing parts 410 and 510 are located at both ends of the upper surface of the horizontal movement guide 542; , for applying a tensile force to the substrate by moving the substrate fixing part outward.

The device also includes: a drive member fixing side plate 544 ; and a side plate 536 erected on the opposite side of the plate-shaped base 540 .

The substrate fixing parts 410 and 510 move in the horizontal direction on the horizontal moving guide 542 so that the distance between the substrate fixing parts 410 and 510 can be adjusted according to the size of the substrate S. Referring to FIG.

The two substrate fixing parts 410 and 510 have the same shape and function, except that the substrate fixing part 410 provided on one side of the plate-shaped base 540 belongs to the fixed type, while the substrate fixing part 510 provided on the other side of the plate-shaped base 540 belongs to the Removable type. Here, both the stationary and movable substrate fixing parts 410 and 510 can be moved, so that the distance between the substrate fixing parts 410 and 510 can be adjusted according to the size of the substrate S having a large area, thereby allowing different sizes of deposition on the substrate.

The substrate fixing parts 410 and 510 include a stationary member 412 respectively fixed to one side of the horizontal guide 542 and a movable member 512 provided on the other side so as to be horizontally movable in a state in which the two members 412 and 512 are aligned with A pair of horizontal movement guides 542 longitudinally provided on the upper surface of the plate-shaped base 540 are in contact. Each substrate fixing portion 410 or 510 also includes: a longitudinally extending lower plate 414 or 514 disposed on the upper surface of the stationary member 412 or the movable member 512; a plate-shaped fixing holding device 416 positioned on the lower plate 414 or 514 or 516, wherein the vertical plate is inserted between the plate-shaped fixed holding device 416 or 516 and the lower plate 414 or 514 to ensure the separation between the two, and is suitable for allowing the substrate S to rest on the plate-shaped fixed holding device On the upper surface, wherein each plate-shaped fixing and maintaining device 416 or 516 has the same shape as each lower plate 414 or 514; the position fixing plate 418 or 518, wherein the position fixing plate 418 or 518 has an L-shaped section; the driving member fixing plate 420 or 520 is spaced apart from the position fixing plate 418 or 518 and positioned at the center above the fixing plate 418 or 518; The pressing and holding device 426 or 526 that rises or falls between the plate 420 or 520 and the plate-shaped fixing and holding device 416 or 516 is used to press the upper surface of the substrate S resting on the plate-shaped fixing and holding device 416 and 516, wherein The pressing and holding device 420 or 520 has the shape of a plate extending longitudinally; 520, thereby applying pressure to the substrate S.

The pressing portion 422 or 522 is composed of a pressing and holding device 426 or 526 and a moving plate 424 or 524 arranged on the pressing and holding device 426 or 526, and is provided with a plurality of vertical shafts to be held on the pressing and holding device 426 or 526 and the space between moving plate 424 or 524.

The pressing part 422 or 522 is constituted by the pressing holding means 426 or 526 and the moving plate 424 or 524 .

Here, the vertical driving member 428 or 528 is a hydraulic or pneumatic cylinder, and presses the substrate S using liquid or air supplied from the outside.

The vertical drive member 428 or 528 is provided with a first pressure gauge L1 on its axis of movement. The first pressure gauge L1 may be at least one load cell that deforms, eg extends or compresses, when a load is applied thereto. The degree of deformation is measured by the deformation detector in the form of an electrical signal, which is then converted into a digital signal, so that the pressure is output as a digital result on the display device of the controller.

Furthermore, the connecting plate 430 or 530 is interposed between the first pressure gauge L1 of the vertical driving member 428 or 528 and the press-holding device 426 or 526 .

That is, when the vertical driving member 428 or 528 descends and presses the substrate S, the pressure pressing the substrate S—that is, the load—is transmitted to the load cell, and then converted from an electrical signal to a digital signal, thereby allowing the pressure output to be digital form.

The tensile force applying portion 550 is positioned upright. The tensile force applying part 550 includes: the lower plate 514 of the movable substrate fixing part 510; the stationary side plate 552 fixed to the outer wall of the plate-shaped fixing holder 516 and positioned upright; a driving member fixing side plate 544 on one side of the base 540; and a horizontal driving member 554 provided to an outer wall of the driving member fixing side plate 544 for moving the movable substrate fixing part 510 in the horizontal direction.

The horizontal shaft is inserted between the stationary side plate 552 and the driving member fixing side plate 544 to maintain a space therebetween.

Here, the horizontal driving member 544 is a hydraulic cylinder or a pneumatic cylinder, and presses the substrate S by moving the movable substrate fixing part 510 outward using liquid or air supplied from the outside.

In addition, the horizontal driving member 554 is provided with a second pressure gauge L2 on the moving shaft. The second pressure gauge _L2 may be a load cell that deforms, eg extends or compresses, when a load is applied thereto. The degree of deformation is measured by the deformation detector as an electrical signal, which is then converted into a digital signal, so that the pressure is output as a digital result to the display device of the controller.

That is, when the moving axis of the horizontal driving member 554 moves outward in the horizontal direction, one side of the substrate S is stretched and both sides of the substrate are fixed, at this time, the tensile force acting on the substrate S—that is, the tensile load— — is passed to the load cell and then converted from electrical to digital, thereby allowing the pressure output to be in digital form.

Here, although the first and second pressure gauges _L1 and _L2 may respectively be constituted by a single load cell, desirably, the first and second pressure gauges _L1 and _L2 shall be constituted by a plurality of load cells, respectively, in order to uniformly and accurately Measure the load.

In addition, the vertical driving member 428 or 528, and the horizontal driving member 554 may apply different compressive and tensile forces to the substrate S according to the thickness of the substrate S. Referring to FIG.

Therefore, after measuring the compressive and tensile forces applied to the substrate S using the first and second pressure gauges _L1 and _L2 , the measured values are processed into compressive and tensile force data, which are then used in a feedback loop, This enables the deposition process to be automated and mass-produced.

As shown in FIGS. 6a to 6c, in the process of mounting the substrate S on the substrate mounting table 200, the sagging of the substrate S can be divided into three steps. In the first step, since the pressing and holding devices 426 and 526 do not press the plate-shaped fixing and holding devices 416 and 516, the substrate S rests on the plate-shaped fixing and holding devices 416 and 516, but no load is applied to the substrate S, at this time , the amount of sagging of the substrate S due to its own weight indicated by reference numeral "a" in FIG. 6a is at a maximum value.

In the second step, as shown in FIG. 6b, the substrate S rests on the plate-shaped fixing and holding devices 416 and 516, and the pressing and holding devices 426 and 526 located on the plate-shaped fixing and holding devices 416 and 516 descend and move toward the substrate. Pressure is applied to both ends of S. In this state, since both ends are held by the press-holding means 426 and 526, the substrate has a sag amount indicated by reference numeral "b", which is smaller than the sag amount a of the substrate S in the free-standing state, because even due to The substrate S hangs down at the center of the substrate S due to its own weight, and the two ends of the substrate S are fixed on the plate-shaped fixing and holding devices 416 and 516 by the pressing and holding devices 426 and 526 .

In the third step, as shown in Figure 6c, the substrate S is fixed on the plate-shaped fixing and holding devices 416 and 516 by the pressing and holding devices 426 and 526, and the plate-shaped fixing and holding device 516 on one side of the substrate S and the pressing and holding The device 526 moves outward and then applies a tensile force to the substrate S, thereby preventing the substrate S from sagging. That is, since one side of the substrate S is stretched by applying a stretching force to the substrate S while both ends of the substrate S are fixed on the plate-shaped fixing and holding devices 416 and 516 by the pressing and holding devices 426 and 526, the substrate S does not will sag under its own weight.

7a and 7b are top views showing that the two long sides of the substrate S are fixed to the plate-shaped fixing and holding devices 416 and 516 by the pressing and holding devices 426 and 526, respectively, and when compressive and tensile forces are simultaneously applied to the substrate. A graph of the relationship between the amount of sag and the clamping length of the substrate S. As shown in FIG. 7 b , it can be seen that when the clamping length of the substrate S by the pressing and holding devices 426 and 526 increases, the sagging amount of the substrate S decreases. In Fig. 7b, the change of the sagging amount of the substrate S when it rests freely on the plate-shaped fixing and holding devices 416 and 516 is represented by a solid line; when both sides of the substrate S are fixed by the pressing and holding devices 426 and 526, according to the pressing The change of the sagging amount of the substrate S of the clamping length of the holding devices 426 and 526 is represented by a dotted line; When being stretched, while both ends of the substrate S are fixed on the plate-shaped fixing and holding devices 416 and 516 by the pressing and holding devices 426 and 526, the amount of sagging of the substrate S according to the clamping length of the pressing and holding devices 426 and 526 Changes are indicated by dashed lines.

According to the graph shown in Fig. 7b, it can be seen that the sagging of the substrate S when the tensile force is applied to one side of the substrate S while the two ends are fixed on the plate-shaped fixing and holding devices 416 and 516 by the pressing and holding devices 426 and 526 Minimum amount.

In addition, it can be understood that as the clamping length of the substrate S increases, the amount of sagging of the substrate S decreases.

8a and 8b are top views of the substrate S showing the two short sides of the substrate S fixed to the plate-shaped fixing and holding devices 416 and 516 by the compression holding devices 426 and 526, respectively, and when compressive and tensile forces are simultaneously applied to the substrate A graph showing the relationship between the amount of sag and the clamping length of the substrate S when going up. As shown in FIG. 8 b , it can be seen that when the clamping length of the substrate S by the pressing and holding devices 426 and 526 increases, the sagging amount of the substrate S decreases. In Fig. 8b, the change of the sagging amount of the substrate S when it rests freely on the plate-shaped fixing and holding devices 416 and 516 is indicated by a dashed line; when both sides of the substrate S are fixed by the pressing and holding devices 426 and 526 according to the pressing The change of the sagging amount of the substrate S of the clamping length of the holding devices 426 and 526 is represented by a solid line; When being stretched, while both ends of the substrate S are fixed on the plate-shaped fixing and holding devices 416 and 516 by the pressing and holding devices 426 and 526, the amount of sagging of the substrate S according to the clamping length of the pressing and holding devices 426 and 526 Changes are indicated by double-dashed lines.

According to the graph shown in Fig. 8b, it can be seen that when the tensile force is applied to one side of the substrate S, while the two ends are fixed on the plate-shaped fixing and holding devices 416 and 516 by the pressing and holding devices 426 and 526, the Minimal sag.

In addition, it can be understood that as the clamping length of the substrate S increases, the amount of sagging of the substrate S decreases.

As a result, it can be seen that, for the case where the long side of the substrate S rests on the plate-shaped fixed holding devices 416 and 516, when a tensile force is applied to one side of the substrate S while its two sides are pressed by the holding devices 426 and 526 When fixed, the sagging amount of the substrate S is smaller than that when the substrate S rests on the plate-shaped fixing and holding devices 416 and 516 without applying any force, or is smaller than when both sides of the substrate S are fixed by the pressing and holding devices 426 and 526 The amount of sag when no stretching force is applied. In addition, when the clamping length of the substrate S is increased, the amount of sagging of the substrate S is reduced.

In addition, it can also be seen that for the case where the short side of the substrate S rests on the plate-shaped fixed holding devices 416 and 516, when a tensile force is applied to one side of the substrate S while its two sides are pressed by the holding device 426 and 526 is fixed, the sag of the substrate S is less than the sag when the substrate S rests on the plate-shaped fixing and holding devices 416 and 516 without applying any force, or is smaller than when the two sides of the substrate S are held by the pressing and holding devices 426 and 526 The amount of sag when fixed without tension applied. In addition, when the clamping length of the substrate S is increased, the amount of sagging of the substrate S is reduced. Meanwhile, when the long side of the substrate is fixed, the amount of sag is smaller than when the short side is fixed.

Therefore, the substrate mounting table 400 according to the second embodiment operates in such a manner that when the substrate S rests on the plate-shaped fixing portions 410 and 510 provided on both sides of the substrate mounting table 400 as shown in FIGS. While holding the devices 416 and 516, air is injected into the vertical driving members 428 or 528 respectively provided to both sides of the substrate fixing parts 410 and 510, thereby lowering the moving shaft of the vertical driving members 428 or 528 to fix the substrate S on the substrate S. Plate-shaped fixing and holding devices 416 and 516, while pressing and holding devices 426 and 526 descend, and fix both sides of the substrate S on the plate-shaped fixing and holding devices 416 and 516. Then, one side of the substrate S whose both sides are fixed by the press-holding means 426 and 526 is stretched by manipulating the horizontal driving member 554 equipped to move the substrate fixing part 510 provided on one side of the plate-shaped base. .

Here, the substrate S inserted between the plate-shaped fixing holding devices 416 and 516 and the press-holding devices 426 and 526 is firmly fixed therebetween, and one side of the substrate S is moved outward by the operation of the horizontal driving member 554, so that it Oriented horizontally without sagging under its own weight.

Therefore, when depositing an organic material by performing a deposition process on a substrate located in the chamber of the apparatus, when the substrate S is mounted on the substrate mounting table 400, the substrate S is stretched in the horizontal direction, thereby preventing the substrate S from being deformed due to its own weight. sagging.

Referring to FIG. 9, the method for depositing an organic material according to the present invention includes: a step S600 of transferring a substrate into a chamber; a step S610 of fixing both sides of the substrate; a step S620 of stretching one side of the substrate; and a step of depositing an organic material on the substrate. Step S630; and Step S640 of transferring the substrate out of the chamber.

The step S600 of transferring the substrate into the chamber is to transfer the substrate to the substrate fixing parts 410 and 510 of the substrate mounting table 400 located in the chamber 110 by means of a transfer device (not shown) provided outside the chamber 110 for plate-shaped fixing. Keep steps on devices 416 and 516.

The step S610 of fixing both sides of the substrate is a step of fixing both sides of the substrate S resting on the substrate fixing parts 410 and 510 by means of the vertical driving members 428 and 528 .

The step S620 of stretching one side of the substrate is to pull the one side of the substrate S outward by means of the horizontal driving member 554 of the tension applying part 550 provided on the substrate fixing part 510, and at the same time, both sides of the substrate S are held by the substrate fixing part. 410 and 510 fixed steps.

The step S630 of depositing the organic material on the substrate is a step of evaporating the organic material and depositing the evaporated organic material on the substrate S using heat supplied from a heater (not shown).

The step S640 of transporting the substrate out of the cavity is a step of transporting the deposited substrate S out of the cavity.

Embodiment 3

Although not shown in the drawings, the apparatus for depositing an organic material according to the third embodiment of the present invention includes: a chamber (not shown) in which a large-area substrate S is loaded, and the substrate S is subjected to a deposition process in the chamber; a substrate mounting platen 600 at the upper portion of the chamber for preventing the substrate S from sagging in a state where both ends thereof are fixed; and a rotary lifter (not shown) coupled to the upper surface of the chamber for rotating the substrate S, Therefore, during the evaporation process of the organic material, the organic material can be evenly distributed on the substrate S in the chamber.

The apparatus for depositing an organic material according to the third embodiment has a configuration and function similar to those of the first and second embodiments except for some components such as the substrate mounting platen 600 , so descriptions of the third embodiment will be omitted. A detailed description of a similar configuration of the device.

Referring to Figures 10a, 10b and 10c, in a third embodiment, a substrate mounting table 600 includes: a stationary holding device 610, a movable holding device 612, pressing and holding devices 620 and 622, at least one pair of vertical driving members 630, At least one horizontal drive member 632 , and a substrate contact holding device 640 .

The stationary holding device 610 has a longitudinally extending plate shape, and is bent downward at one end.

The movable holding device 612 is located on the horizontal side of the stationary holding device 610 and is connected to the stationary holding device 610 at one end by means of a horizontal drive member 632 while being bent downwards at the other end so that the curved portion of the movable holding device 612 faces The curved part of the stationary holding device. The movable holding device 612 is shorter than the stationary holding device 610 .

The pressing holders 620 and 622 can be raised or lowered so that they contact or separate from the lower surfaces of the stationary holder 610 and the movable holder 612, and have a symmetrical L-shaped section.

The pair of vertical drive members 630 may be bolts or pneumatic cylinders. The vertical driving member 630 compresses or loosens the substrate S inserted between the substrate contact holding devices 622 by manually rotating the bolt or by the automatic reciprocating movement of the piston rod of the pneumatic cylinder, so that the substrate S can be installed on the substrate mounting table 600 superior. That is, when the vertical driving member 630 is a bolt, the compression holding device 622 operates the thread on the bolt by rotating the bolt, thereby contacting or separating from the stationary holding device 610 and the movable holding device 612 .

Pairs of vertical drive members 630 may be provided to one side of the upper surface of the stationary holding device 610 and the movable holding device 612, respectively. Meanwhile, in the case where the vertical driving member 630 is a pneumatic cylinder, the piston rod passes through the upper surface sides of the stationary holder 610 and the movable holder 612 in the vertical direction, and the front ends thereof are fixed on the stationary holder and the movable holder 612 opposite to each other. In removable holding device.

The vertical drive member 630 may be a bolt or a pneumatic cylinder. The vertical driving member 630 compresses or loosens the substrate S inserted between the substrate contact holding devices 622 by manually rotating the bolt or by the automatic reciprocating movement of the piston rod of the pneumatic cylinder, thereby allowing the substrate S to be mounted on the substrate mounting table 600 superior. That is, in case the vertical driving member 630 is a bolt, the compression holding device 622 operates the screw thread on the bolt by rotating the bolt to come into contact with or separate from the stationary holding device 610 and the movable holding device 612 .

A plurality of horizontal driving members 632 may be provided to an upper portion outside the movable holding device 612 . Meanwhile, in the case where the horizontal driving member 632 is a pneumatic cylinder, the piston rod passes through the upper portion outside the movable holder 612 in the horizontal direction, and is fixed at the front end thereof.

Substrate contacting holders 640 are provided to opposing inner edges of the stationary holder 610 , the movable holder 612 , and the compression holders 620 and 622 . Each substrate contact holding device 640 is made of a soft silicon pad or rubber that provides high friction, thereby preventing damage to the surface of the substrate S. Referring to FIG.

In addition, each substrate contact holding device 640 has a surface inclined downward at an angle θ toward the outside, as shown in FIG. The resulting shape is pinned to it. However, when one side of the substrate S is stretched, the sagging of the substrate S is prevented, thereby allowing the substrate S to remain as a substantially flat surface.

Here, the angle at which each substrate contacts the holding device 640 is preferably in the range of 0 to 90 degrees.

Therefore, when the substrate S is fixed on the substrate mounting table 600 according to the third embodiment, the substrate S is transferred to a substrate of a device (not shown) by means of a transfer device (not shown) provided outside the chamber 110. Mounted on the platen 600 for depositing organic material, and the substrate S is rested on the substrate contact holder 640 provided in the holddown holders 620 and 622 . At this time, the center of the substrate S sags due to its own weight.

Then, as shown in FIG. 10b, operate a plurality of vertical driving members 630-the vertical driving members 630 are arranged on the upper surface side of the stationary holding device 610 and the movable holding device 612 facing the stationary holding device 610 , for lifting the pressing and holding devices 620 and 622, wherein the front end of the piston rod of the vertical drive member 630 is fixed, so as to be inserted between the pressing and holding devices 620 and the stationary holding devices 610 and between the pressing and holding devices 622 and The substrate S between the movable holders 612 is fixed at both sides thereof. At this time, a slight sag occurs at the center of the substrate S. Here, the substrate contact holder 640 made of a soft material and provided at the upper and lower surfaces of the substrate S prevents the surface of the substrate S from being damaged when the substrate S is fixed.

Then, as shown in FIG. 10c, a plurality of horizontal driving members 632 provided to the outer wall of the movable holding device 612 are operated to move the movable holding device 612 outwards, thereby separating from the stationary holding device 610, and at the same time, compress the holding device 622 The substrate S is supported from below the movable holder 612 . That is, one side of the substrate S is fixed by the substrate contact holding device 640 provided on the stationary holding device 610 and the pressing holding device 620, while the other side of the substrate S is fixed by the movable holding device 612 and the pressing holding device 622. The upper substrate contact holder 640 is fixed. At this time, when the other side of the substrate S fixed by the movable holding device 612 and the pressing holding device 622 is moved outward by the operation of the horizontal drive member 63, a tensile force is applied to the other side of the substrate S, by This allows the substrate to be supported horizontally.

Alternatively, as shown in FIG. 12a, after fixing all four sides of the substrate S, tensile forces may be applied to the four sides of the substrate S in four directions, thereby preventing the substrate S from sagging.

Alternatively, after compressing all four edges of the substrate S, a tensile force may be applied diagonally to the edges of the substrate, as shown in Figure 12b. Thus, since the concept of the present invention described above can be extended in any direction, the present invention can be widely applied.

In addition, the present invention can also be applied to flexible substrates, such as plastic substrates and stainless steel substrates, and fragile glass substrates.

Industrial Applicability

As is clear from the above description, according to the present invention, after the substrate is mounted on the substrate mounting platen in the chamber, a tensile force is applied to the substrate by moving one side of the substrate outward while both sides of the substrate are fixed, by This prevents the substrate from sagging due to its own weight, even if the substrate has a large area.

Although the preferred embodiment of the present invention has been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible without departing from the scope and spirit of the present invention as disclosed in the appended claims.

Claims (24)

1. device that is used for depositing organic material comprises:

The chamber, its have with the inner space of external isolation, be arranged on said chamber a side with inlet that allows in the substrate input cavity or transfer out in the chamber and the door that is used to open or close said inlet;

Substrate loading stand, it is arranged on the top in said chamber, moves outwardly and applies tensile force to stop substrate sagging to substrate through substrate one side that fixes the two ends that firmly are transferred to the substrate in the said chamber with pressure and make two ends be in stationary state;

The rotary lifting device, the center that it is coupled to said substrate loading stand upper surface is used for rotation, promotes or reduces said substrate loading stand; And

Heater and organic material evaporating dish, the bottom that it is arranged on said chamber is used for organic material is evaporated to said substrate,

Wherein, said substrate loading stand comprises:

Substrate is shelved holding device; A side that allows said substrate to shelve holding device is separated with opposite side; Said substrate is shelved holding device and is had the shape at the plate of center perforation, thereby four sides of said substrate can be shelved on and be formed at said substrate and shelve on the perforated portion in the holding device;

Compress holding device; It is arranged on that said substrate is shelved on the holding device and rises or descend; When being lowered by; Saidly compress the both sides that holding device compresses the upper surface of substrate, and the side conllinear location that allows a said side that compresses holding device to separate with the said opposite side that compresses holding device and shelve holding device with said substrate, saidly compress the shape that holding device has the plate of perforation in the center;

First drive member, it is arranged on downwards on the said either side that compresses the holding device upper surface, is used for the respective side that supply or discharging according to air compressed or unclamped said upper surface of base plate; And

Second drive member; It is perpendicular to the said first drive member setting and be fixed to a side that compresses holding device; Being used for moving back and forth said substrate linearly according to the supply of air or discharging shelves holding device and compresses holding device; During said substrate is shelved holding device and compressed holding device each all is in the state that a side is separated with opposite side; Thereby two ends are stretched through outwards moving said fixedly holding device and the said holding device that compresses by a said side that compresses the fixing substrate of holding device, stop said substrate sagging thus.

2. device as claimed in claim 1, wherein said substrate is shelved holding device and is provided with the substrate alignment member.

3. device as claimed in claim 2, wherein said substrate alignment member comprises:

Be positioned at four positioning cylinders on two sides adjacent of said substrate, wherein two said positioning cylinders lay respectively on the opposite end of a side, and each said positioning cylinder provides reference point in the fixed position; And

Be positioned at four alignment cylinders on two other sides adjacent of said substrate; Wherein said alignment cylinder is positioned on the opposite end of a side moving back and forth, said alignment cylinder through compressing substrate two sides adjacent and with the position that substrate the moves to said positioning cylinder substrate that aligns.

4. device as claimed in claim 3, each in wherein said first and second drive member all comprises:

Plate shape base portion;

First and second fixed heads, said first and second fixed heads are positioned on the both sides of plate shape base portion upper surface vertically;

Movable plate; It is between said first and second fixed heads and reciprocating motion between said first and second fixed heads; And the axle with the center on a surface that is formed on said movable plate, said axle passes first fixed head that is positioned in the face of a said surface of said movable plate;

Bellows; It is arranged on said movable plate and and second fixed head that is oppositely arranged of said first fixed head between; The two ends of wherein said bellows are respectively fixed on the movable plate and second fixed head; And when said bellows were filled with air, said bellows were according to the increase of volume and the linear forward axle that moves said movable plate;

Air injects nozzle, and it is used for air is injected in the said bellows from the outside; And

Spring, it is provided with around the axle between the said movable plate and first fixed head, thereby when air is discharged from said bellows, in the contraction process of said bellows, applies restoring force to these bellows.

5. device that is used for depositing organic material comprises:

The chamber, its have with the inner space of external isolation, be arranged on said chamber a side with inlet that allows in the substrate input cavity or transfer out in the chamber and the door that is used to open or close said inlet;

Substrate loading stand, it is arranged on the top in said chamber, moves outwardly and applies tensile force to stop substrate sagging to substrate through substrate one side that fixes the two ends that firmly are transferred to the substrate in the said chamber with pressure and make two ends be in stationary state;

The rotary lifting device, the center that it is coupled to said substrate loading stand upper surface is used for rotation, promotes or reduces said substrate loading stand; And

Heater and organic material evaporating dish, the bottom that it is arranged on said chamber is used for organic material is evaporated to said substrate,

Wherein, said substrate loading stand comprises:

Plate shape base portion;

A pair of substrate fixed part, it is set to said plate shape base portion both sides, is parallel to the both sides of said plate shape base portion simultaneously, is used for exerting pressure to substrate, and one of said substrate fixed part is static and another substrate fixed part can move;

Tensile force applies portion, and it is used for applying tensile force through outwards moving said substrate fixed part to substrate perpendicular to the outer surface setting of the said substrate fixed part that can move.

6. device as claimed in claim 5 also comprises:

Controller is used to control by said substrate fixed part applied pressure and the tensile force that by the said tensile force portion of applying.

7. device as claimed in claim 6, wherein said each substrate fixed part comprises: the microscler lower plate of being longer than the standing part on the said substrate;

Plate shape is holding device fixedly, and it is positioned on the lower plate and allows substrate to be shelved on this plate shape fixedly on the holding device upper surface, and this plate shape fixedly holding device has the shape identical with lower plate;

Position fixed plate, it is arranged on the fixedly side extension of the said substrate of a side and edge of holding device of said plate shape, and said position fixed plate has L shaped cross section;

The drive member fixed head, itself and said position fixed plate are spaced apart and be positioned at the center of said position fixed plate top;

Compress holding device; It is fixedly rising or is descending in the space between the holding device at said drive member fixed head and plate shape; Be used for compressing or unclamp and be shelved on the fixedly upper surface of the substrate on the holding device of said plate shape, saidly compress the shape that holding device has the plate that extends along a side of said substrate; And

Vertical drive member; The center that it is arranged on said drive member fixed head upper surface is used for rising or the said holding device that compresses that descends, thereby exerts pressure to substrate; Said vertical drive member has shifting axle, and the lower end of this shifting axle is fixed to and compresses holding device.

8. device as claimed in claim 7, wherein said substrate loading stand also comprises:

The a pair of guiding piece that moves horizontally, it is positioned at said substrate fixed part below being used for moving this substrate fixed part, thus the distance between said substrate fixed part can be regulated according to the size of substrate.

9. device as claimed in claim 8, wherein said vertical drive member shifting axle is provided with first pressure gauge.

10. device as claimed in claim 9, wherein said first pressure gauge is at least one load cell.

11. device as claimed in claim 10, wherein said vertical drive member is hydraulic pressure or pneumatic cylinder.

12. device as claimed in claim 11, the wherein said tensile force portion of applying comprises:

Static side plate, its plate shape that is fixed to said lower plate and said substrate fixed part are fixedly on the outer wall of holding device;

The drive member fixed side, it is positioned at the said static side plate outside and separates with this static side plate, and is arranged on the edge of plate shape base portion one side with vertical stationary state; And

The horizontal drive member; It is set on the outer wall of said drive member fixed side, be used for along continuous straight runs moves the substrate fixed part that can move; Thereby apply tensile force to substrate; This horizontal drive member has shifting axle, and said shifting axle is fixed to the said substrate fixed part that can move at the front end place.

13. device as claimed in claim 12, wherein said horizontal drive member shifting axle is provided with second pressure gauge.

14. device as claimed in claim 13, wherein said second pressure gauge is at least one load cell.

15. device as claimed in claim 14, wherein said vertical drive member is hydraulic pressure or pneumatic cylinder.

16. like claim 10 or 14 described devices, wherein said at least one load cell is a plurality of load cells.

17. device as claimed in claim 13, wherein said vertical drive member and horizontal drive member apply different pressure and tensile force to substrate respectively according to the thickness of substrate.

18. device as claimed in claim 13, its middle controller is provided with the display device that is electrically connected to this controller, thereby exports the result who is detected by first pressure gauge and second pressure gauge with digital form.

19. a device that is used for depositing organic material comprises:

The chamber, its have with the inner space of external isolation, be arranged on said chamber a side with inlet that allows in the substrate input cavity or transfer out in the chamber and the door that is used to open or close said inlet;

Substrate loading stand, it is arranged on the top in said chamber, moves outwardly and applies tensile force to stop substrate sagging to substrate through substrate one side that fixes the two ends that firmly are transferred to the substrate in the said chamber with pressure and make two ends be in stationary state;

The rotary lifting device, the center that it is coupled to said substrate loading stand upper surface is used for rotation, promotes or reduces said substrate loading stand; And

Heater and organic material evaporating dish, the bottom that it is arranged on said chamber is used for organic material is evaporated to said substrate,

Wherein, said substrate loading stand comprises:

Static holding device, it has along the shape and the downwarping at one end of the plate of the side extension of said substrate;

Removable holding device; One end of said removable holding device is connected to the other end downwarping of said static holding device and said removable holding device; Thereby the bend of said removable holding device is relative with the bend of said static holding device;

That can rise or descend compresses holding device; Thereby; Said compress holding device can contact said static holding device and removable holding device lower surface or separate with this lower surface, the said holding device that compresses has L shaped cross section respect to one another respectively;

A plurality of vertical drive member; It is set to upper surface one side of said static holding device and removable holding device respectively; Make said vertical drive member vertically pass the upper surface of static holding device and removable holding device, and be fixed at its front end place in said static holding device and the removable holding device, simultaneously relative each other;

A plurality of horizontal drive members; It is set to the top of said static that side of holding device of deviating from of said removable holding device; Make said horizontal drive member along continuous straight runs pass the top in the removable holding device outside, and be fixed in the said removable holding device at the front end place of said horizontal drive member; And

The substrate contacts holding device, it is set to said static holding device, removable holding device and compresses on the relative inward flange of holding device.

20. device as claimed in claim 19, wherein each said vertical drive member is one of bolt and pneumatic cylinder.

21. device as claimed in claim 20, wherein each said substrate contacts holding device has at a predetermined angle towards downward-sloping surface, other places, makes the sagging minimum of substrate thus.

22. device as claimed in claim 21, wherein each said substrate contacts holding device is processed by silicon pad or rubber.

23. device as claimed in claim 22, wherein said angle is between 0 to 90 degree scope.

24. be used for the method for depositing organic material, comprise the steps:

With board transport to the fixedly holding device of the substrate fixed part that is arranged on the substrate loading stand in the chamber;

By means of the both sides of the fixing said substrate of vertical drive member, the both sides of this substrate are shelved on the substrate fixed part;

Outwards a stretch side of said substrate of the horizontal drive member that applies portion by means of the tensile force that is set to one of substrate fixed part, said substrate fixed part secures the above the both sides of substrate;

The said substrate that is shelved on the substrate fixed part carries out the organic material deposition when being stretched; And

The substrate that deposition is accomplished transmits in said chamber.

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