[go: up one dir, main page]

CN1947660B - Systems, methods and module assemblies for multi-die backlighting diodes - Google Patents

Systems, methods and module assemblies for multi-die backlighting diodes Download PDF

Info

Publication number
CN1947660B
CN1947660B CN200510124985XA CN200510124985A CN1947660B CN 1947660 B CN1947660 B CN 1947660B CN 200510124985X A CN200510124985X A CN 200510124985XA CN 200510124985 A CN200510124985 A CN 200510124985A CN 1947660 B CN1947660 B CN 1947660B
Authority
CN
China
Prior art keywords
backlighting
substrate
module
multilayer substrate
photodiodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200510124985XA
Other languages
Chinese (zh)
Other versions
CN1947660A (en
Inventor
G·S·泽曼
B·Z·巴布
M·R·纳拉亚纳斯瓦米
D·M·霍夫曼
B·J·格雷夫斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Priority to CN200510124985XA priority Critical patent/CN1947660B/en
Publication of CN1947660A publication Critical patent/CN1947660A/en
Application granted granted Critical
Publication of CN1947660B publication Critical patent/CN1947660B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • H10W74/15

Landscapes

  • Apparatus For Radiation Diagnosis (AREA)
  • Measurement Of Radiation (AREA)

Abstract

一种用计算机处理的断层摄影成像扫描器(10)模块,包括多个闪烁体(156),与闪烁体(156)光学耦合的多个背光照明光电二极管,具有多个基底导电体的多层基底(204),光电二极管与该多个基底导电体电耦合,其中多个基底导体中的每一个连接到一个不同的背光照明光电二极管上,以及具有多个挠性导电体的挠性电缆(308),该基底与该多个挠性导电体电耦合,其中多个挠性导电体中的每一个连接到多层基底的不同输出端。

Figure 200510124985

A computerized tomographic imaging scanner (10) module comprising a plurality of scintillators (156), a plurality of backlit photodiodes optically coupled to the scintillators (156), a multi-layered a substrate (204), a photodiode electrically coupled to the plurality of substrate conductors, each of the plurality of substrate conductors being connected to a different backlighting photodiode, and a flexible cable having a plurality of flexible conductors ( 308), the substrate is electrically coupled to the plurality of flexible electrical conductors, wherein each of the plurality of flexible electrical conductors is connected to a different output of the multilayer substrate.

Figure 200510124985

Description

用于多管芯背光照明二极管的系统、方法和模块组件 Systems, methods and module assemblies for multi-die backlighting diodes

技术领域technical field

本发明通常涉及医学成像系统,更具体地涉及计算机断层摄影术(CT)。虽然该应用主题主要应用于X射线系统,本发明还可用于其它成像设备中。The present invention relates generally to medical imaging systems, and more particularly to computed tomography (CT). Although this application subject applies primarily to X-ray systems, the invention can also be used in other imaging devices.

背景技术Background technique

现代CT扫描器典型地采用数千个X射线探测器将X射线能量转换成电信号。典型的探测器可包括附着到半导体光电二极管阵列上的闪烁体阵列,半导体光电二极管探测其前表面上的光或其它电离辐射。有些仪器具有可配置的探测器,其中可合并来自多个独立光电二极管的信号电流以在单个放大器通道中进一步处理。这种设置允许使用外部控制电开关(场效应管或FET)改变各像素的探测面积。用于电连接到FET上的焊盘典型位于光电二极管的一端或两端,且全部像素阵列必需从阵列中心引导到FET近旁的一边或两边。Modern CT scanners typically employ thousands of x-ray detectors to convert x-ray energy into electrical signals. A typical detector may include an array of scintillators attached to an array of semiconductor photodiodes that detect light or other ionizing radiation on their front surfaces. Some instruments have configurable detectors where the signal currents from multiple independent photodiodes can be combined for further processing in a single amplifier channel. This arrangement allows the detection area of each pixel to be varied using externally controlled electrical switches (field effect transistors or FETs). Pads for electrical connection to the FETs are typically located at one or both ends of the photodiode, and the entire pixel array must be directed from the center of the array to one or both sides next to the FETs.

随着阵列内元件数目的增加,引线和焊盘的密度在光电二极管阵列边缘附近增加到难以达到的高水平。这对使用顶面触点可制成的引线和焊盘的数目与尺寸有某些物理限制。采用现有的引线连接和硅处理技术,只可实现每0.625mm像素不超过40-50个切片(在CT台架等中心处测量)。As the number of elements within the array increases, the density of leads and pads increases to unattainably high levels near the edges of the photodiode array. This imposes certain physical limitations on the number and size of leads and pads that can be made using top surface contacts. With existing wire bonding and silicon processing techniques, only no more than 40-50 slices per 0.625mm pixel (measured at the isocenter of the CT gantry) can be achieved.

在此描述的方法和设备可至少部分解决上述问题。The methods and apparatus described herein address at least in part the above-mentioned problems.

发明内容Contents of the invention

在一个方面,提供一种计算机断层摄影成像扫描器模块,其包括多个闪烁体,与闪烁体光学耦合的多个背光照明光电二极管,具有多个基底导电体的多层基底,光电二极管与多个基底导电体电耦合,其中多个基底导体中的每一个连接到不同的一个背光照明光电二极管上,以及具有多个挠性导电体的挠性电缆,基底与该多个挠性导电体电耦合,其中多个挠性导电体中的每一个连接到多层基底的不同输出端上。In one aspect, a computed tomography imaging scanner module is provided that includes a plurality of scintillators, a plurality of backlit photodiodes optically coupled to the scintillators, a multilayer substrate having a plurality of substrate conductors, the photodiodes and the plurality of A plurality of base conductors electrically coupled, wherein each of the plurality of base conductors is connected to a different one of the backlighting photodiodes, and a flexible cable having a plurality of flexible conductors, the base and the plurality of flexible conductors are electrically coupled Coupling, wherein each of the plurality of flexible conductors is connected to a different output terminal of the multilayer substrate.

在另一方面,提供一种成像系统,其包括X射线源和定位成接收该X射线源发射的X射线的X射线探测器模块。该探测器模块包括面对X射线源的多个闪烁体,与闪烁体光学耦合的多个背光照明光电二极管,与多个背光照明光电二极管电耦合的多层基底,以及与多层基底电耦合的挠性电缆。In another aspect, an imaging system is provided that includes an x-ray source and an x-ray detector module positioned to receive x-rays emitted by the x-ray source. The detector module includes a plurality of scintillators facing the X-ray source, a plurality of backlit photodiodes optically coupled to the scintillators, a multilayer substrate electrically coupled to the plurality of backlit photodiodes, and a multilayer substrate electrically coupled to the multilayer substrate. flexible cable.

在又一方面,提供一种方法。该方法包括从闪烁体接收光子,将光子转换成电信号,通过多层基底传输该电信号,以及通过多层挠性电路传输该电信号。In yet another aspect, a method is provided. The method includes receiving photons from a scintillator, converting the photons to an electrical signal, transmitting the electrical signal through a multilayer substrate, and transmitting the electrical signal through a multilayer flexible circuit.

还在另一方面,提供一种用于将背光照明二极管附着到多层基底的方法,该方法包括将立柱块通过引线焊接到背光照明二极管的表面,将粘合剂放置到多层基底的表面上,将带有立柱块的表面相对于多层基底上带有粘合剂的表面对准,将背光照明二极管和基底加热到粘合剂固化温度,以及向背光照明二极管和基底之间形成的间隙进行底层填料(underfilling)。In yet another aspect, a method for attaching a backlighting diode to a multilayer substrate is provided, the method comprising wire bonding a stud block to a surface of the backlighting diode, placing an adhesive to the surface of the multilayer substrate , aligning the surface with the studs relative to the surface with the adhesive on the multilayer substrate, heating the backlight diodes and the substrate to the adhesive curing temperature, and The gap is underfilled.

在另一方面,提供一种用于将挠性电路附着到基底上的方法。该方法包括将焊料块放置到多层基底的表面上,将软熔(reflow)封装剂放置到挠性电路表面上,使多层基底表面与焊料块表面对准,将挠性电路和基底加热到焊料软熔温度。In another aspect, a method for attaching a flex circuit to a substrate is provided. The method includes placing a solder bump on a surface of a multilayer substrate, placing a reflow encapsulant on a surface of a flexible circuit, aligning the surface of the multilayer substrate with the surface of the solder bump, and heating the flex circuit and the substrate to the solder reflow temperature.

附图说明Description of drawings

图1是CT成像系统实施例的示意图。FIG. 1 is a schematic diagram of an embodiment of a CT imaging system.

图2是图1所示系统的示意框图。FIG. 2 is a schematic block diagram of the system shown in FIG. 1 .

图3示出已知探测器模块阵列。Figure 3 shows a known array of detector modules.

图4示出图3所示的已知探测器模块。FIG. 4 shows the known detector module shown in FIG. 3 .

图5示出将背光照明二极管阵列放置在基底上的情形。Figure 5 shows the placement of a backlighting diode array on a substrate.

图6示出基底和背光照明二极阵列之间的键合连接。Figure 6 shows the bonding connections between the substrate and the backlighting diode array.

图7示出基底和挠性电路之间的键合连接。Figure 7 shows the bonding connection between the substrate and the flex circuit.

图8示出挠性电路上牺牲垫(Sacrificial pads)的平面图。Figure 8 shows a plan view of sacrificial pads on a flex circuit.

图9示出附着到基底上的挠性电路,带有由牺牲垫的位置限定的挠曲的弯曲线。Figure 9 shows a flex circuit attached to a substrate with a flex line of flex defined by the location of the sacrificial pad.

具体实施方式Detailed ways

在此提供用于成像系统(例如但不限于计算机断层摄影(CT)系统)的射线探测方法和设备。参照附图说明该设备和方法,其中在全部附图中类似的标号指示相同的元件。这样的附图是用来解释说明的而非起限制作用的,因此,所包含的附图便于解释本发明的设备和方法的示范性实施例。Radiation detection methods and apparatus for imaging systems such as, but not limited to, computed tomography (CT) systems are provided herein. The apparatus and method are described with reference to the drawings, wherein like numerals indicate like elements throughout. Such drawings are illustrative rather than limiting and, therefore, are included to facilitate explanation of exemplary embodiments of the apparatus and methods of the present invention.

在某些已知的CT成像系统结构中,放射源投射出扇形射线束,其经过准直以后位于笛卡尔坐标系统的X-Y平面内,通常被称为“成像平面”。放射束穿过被成像物体,如患者。该射线束被物体衰减后撞击到射线探测器阵列上。探测器阵列接收的衰减的射线束的强度取决于物体对放射束的衰减。阵列的每个探测器元件生成单独的电信号,该电信号是在该探测器位置处的射线束衰减的量度。分别获取来自全部探测器的衰减的量度以生成透射分布。In some known CT imaging system configurations, a radioactive source projects a fan-shaped beam of rays that, after collimation, lies in an X-Y plane of a Cartesian coordinate system, commonly referred to as the "imaging plane." The radiation beam passes through the object being imaged, such as a patient. The ray beam is attenuated by the object and impinges on the ray detector array. The intensity of the attenuated radiation beam received by the detector array depends on the attenuation of the radiation beam by the object. Each detector element of the array generates an individual electrical signal that is a measure of the beam attenuation at that detector location. Measures of attenuation from all detectors are taken separately to generate a transmission profile.

在第三代CT系统中,放射源和探测器阵列与台架一起在成像平面内绕被成像物体转动,从而放射束与物体相交形成的角度恒定地改变。在一个台架角度来自探测器阵列一组放射衰减量度(即投影数据)被称用“视图”。物体的“扫描”包括在放射源和探测器旋转一周期间在不同台架角度或观察角度获得的一组视图。In the third-generation CT system, the radiation source and detector array are rotated together with the gantry around the object to be imaged in the imaging plane, so that the angle formed by the radiation beam intersecting the object is constantly changing. A set of radiation attenuation measurements (ie, projection data) from the detector array at one gantry angle is called a "view". A "scan" of an object consists of a set of views obtained at different gantry or viewing angles during one revolution of the radiation source and detector.

在轴向扫描中,处理投影数据以重建对应于穿过物体拍摄的二维切片的图像。用于从一组投影数据重建图像的方法在现有技术中被称为滤波反投影技术。该处理将来自扫描的衰减测量转换成被称为“CT数”或“亨斯菲尔德单位(Hounsfield units)”的整数,其用于控制显示设备上对应像素的亮度。In an axial scan, projection data is processed to reconstruct images corresponding to two-dimensional slices taken through the object. Methods for reconstructing images from a set of projection data are known in the art as filtered back-projection techniques. This process converts attenuation measurements from scans into integers called "CT numbers" or "Hounsfield units" that are used to control the brightness of corresponding pixels on a display device.

为减少总扫描时间,可进行“螺旋”扫描。为进行“螺旋”扫描,在获取规定数目的切片的数据期间,移动患者。这种系统从扇形射线束螺旋扫描产生单螺旋线。该由扇形射线束绘制的螺旋线产生投影数据,从该投影数据可重建每个规定切片中的图像。To reduce the overall scan time, a "helical" scan can be performed. To perform a "helical" scan, the patient is moved during the acquisition of data for a prescribed number of slices. This system generates a single helix from a helical scan of a fan beam. The helix drawn by the fan beam produces projection data from which an image in each defined slice can be reconstructed.

如在此所使用的,以单数形式和以词语“一”陈述的元件或步骤应当理解为不排除复数个所述元件或步骤,除非明确地陈述了这种排除。此外,参考本发明的“一个实施例”意思不是被解释为排除其它实施例的存在,这些其它实施例也并入了所述的特征。As used herein, an element or step recited in the singular and the word "a" should be understood as not excluding plural said elements or steps, unless such exclusion is explicitly stated. Furthermore, references to "one embodiment" of the present invention are not to be interpreted as excluding the existence of other embodiments that also incorporate the recited features.

同样,如在此所使用的,短语“重建图像”意思不是排除本发明的实施例,其中生成表示图像的数据但不生成可观看的图像。因此,在此所采用的术语“图像”泛指可观看图像和表示可观看的图像的数据。然而,许多实施例生成(或配置成生成)至少一个可观看图像。Also, as used herein, the phrase "reconstructing an image" is not meant to exclude embodiments of the invention in which data representing an image is generated but a viewable image is not generated. Accordingly, the term "image" is used herein to refer broadly to viewable images and data representing viewable images. However, many embodiments generate (or are configured to generate) at least one viewable image.

图1是CT成像系统10的示意图。图2是图1所示系统10的示意框图。在该示范性实施例中,计算机断层摄影(CT)成像系统10示出为包括代表“第三代”CT成像系统的台架12。台架12具有放射源14,放射源14向台架12对侧的探测器阵列18投射锥形X射线束16。FIG. 1 is a schematic diagram of a CT imaging system 10 . FIG. 2 is a schematic block diagram of the system 10 shown in FIG. 1 . In the exemplary embodiment, a computed tomography (CT) imaging system 10 is shown including a gantry 12 representative of a "third generation" CT imaging system. The gantry 12 has a radiation source 14 that projects a cone-shaped beam of X-rays 16 towards a detector array 18 on the opposite side of the gantry 12 .

探测器阵列18由包括多个探测器元件20的多个探测器行(图1和2中未示出)形成,探测器元件20共同检测穿过物体(如内科患者22)的投射的X射线束。每个探测元件20产生表示撞击射线束强度并因此表示射线束穿过物体或患者22时的衰减的电信号。具有多切片探测器18的成像系统10能够提供表示物体22体积的多个图像。多个图像中的每个图像对应于体积的单独的“切片”。切片的“厚度”或孔径取决于探测器行的厚度。Detector array 18 is formed from a plurality of detector rows (not shown in FIGS. 1 and 2 ) including a plurality of detector elements 20 that collectively detect projected X-rays passing through an object, such as a medical patient 22 . bundle. Each detection element 20 generates an electrical signal which represents the intensity of the impinging radiation beam and thus the attenuation of the radiation beam as it passes through the object or patient 22 . Imaging system 10 with multi-slice detector 18 is capable of providing multiple images representing the volume of object 22 . Each image of the plurality of images corresponds to a separate "slice" of the volume. The "thickness" or aperture of the slice depends on the thickness of the detector row.

在获得放射投影数据的扫描期间,台架12和安装在其上的部件绕旋转中心24旋转。图2只示出单行探测器元件20(即,探测器行)。然而,多切片探测器阵列18包括多个平行的探测器元件20的探测器行,以使在扫描期间可同时获得对应于多个准平行或平行切片的投影数据。During a scan to obtain radiographic projection data, the gantry 12 and components mounted thereon rotate about a center of rotation 24 . Figure 2 shows only a single row of detector elements 20 (ie, a detector row). However, the multi-slice detector array 18 includes multiple parallel detector rows of detector elements 20 so that projection data corresponding to multiple quasi-parallel or parallel slices can be acquired simultaneously during scanning.

由CT系统10的控制机构26支配台架12的旋转和放射源14的操作。控制机构26包括给放射源14提供电源和定时信号的放射控制器28,以及控制台架12旋转速度和位置的台架电机控制器30。控制机构26中的数据采集系统(DAS)32从探测器元件20采样模拟数据并将该数据转换成数字信号以供后续处理。图像重建器34从DAS 32接收采样的和数字化的放射数据并进行高速图像重建。重建的图像作为输入被加到计算机36,计算机36将该图像存储在大容量存储装置38中。Rotation of the gantry 12 and operation of the radiation source 14 are governed by a control mechanism 26 of the CT system 10 . The control mechanism 26 includes a radiation controller 28 that provides power and timing signals to the radiation source 14 , and a gantry motor controller 30 that controls the rotational speed and position of the gantry 12 . A data acquisition system (DAS) 32 in the control mechanism 26 samples analog data from the detector elements 20 and converts the data to digital signals for subsequent processing. Image reconstructor 34 receives sampled and digitized radiology data from DAS 32 and performs high-speed image reconstruction. The reconstructed image is applied as input to computer 36 which stores the image in mass storage device 38 .

计算机36还通过具有键盘的控制台40接收来自操作者的命令和扫描参数。连带的阴极射线管显示器42允许操作者从计算机36观察重建的图像和其它数据。计算机36使用操作者所提供的命令和参数向DAS 32、放射控制器28和台架电机控制器30提供控制信号和信息。另外,计算机36操作控制电动台46的台电机控制器44以将患者22定位到台架12中。特别地,台46只将患者22的一部分移过台架开口48。The computer 36 also receives commands and scanning parameters from the operator through a console 40 having a keyboard. An associated cathode ray tube display 42 allows the operator to view reconstructed images and other data from the computer 36 . Computer 36 provides control signals and information to DAS 32, radiation controller 28, and gantry motor controller 30 using commands and parameters provided by the operator. In addition, computer 36 operates table motor controller 44 that controls motorized table 46 to position patient 22 into table 12 . In particular, table 46 moves only a portion of patient 22 through table opening 48 .

在一个实施例中,计算机36包括装置50,例如软盘驱动器、CD-ROM驱动器、DVD驱动器、磁性光盘(MOD)装置、或者用于从计算机可读介质52读取指令和/或数据的包括如以太网装置的网络连接装置的任何其它数字装置计算机可读介质52诸如软盘、CD-ROM、DVD、或者如网络或因特网的其它数字源,以及还待开发的数字部件。在另一个实施例中,计算机36执行存储在固件(未示出)中指令。通常,在图2所示的DAS32、重建器34和计算机36中的至少一个的处理器被编程以执行以下描述的过程。当然,该方法不限于在CT系统10中实施,而是可与许多其它类型和变型的成像系统连同使用。在一个实施例中,计算机36被编程以执行在此所描述的功能,因此,如此处所使用的术语“计算机”不仅仅限于现有技术中称为计算机的那些集成电路,而是泛指计算机、处理器、微控制器、微计算机、可编程逻辑控制器、专用集成电路和其它可编程电路。虽然此处描述的方法是在医学环境中描述的,企图是非医学成像系统也能从本发明获得益处,如那些在工业环境中或运输环境中典型地采用的系统,例如但不限于用于机场或其它运输中心的行李扫描CT系统。In one embodiment, the computer 36 includes a device 50, such as a floppy disk drive, a CD-ROM drive, a DVD drive, a magneto-optical disk (MOD) device, or a device for reading instructions and/or data from a computer-readable medium 52 including, for example, Any other digital device computer readable medium 52 such as a floppy disk, CD-ROM, DVD, or other digital sources such as the network or the Internet, and digital components yet to be developed. In another embodiment, computer 36 executes instructions stored in firmware (not shown). Typically, the processor in at least one of DAS 32, reconstructor 34, and computer 36 shown in FIG. 2 is programmed to perform the process described below. Of course, the method is not limited to implementation in CT system 10, but may be used in conjunction with many other types and variations of imaging systems. In one embodiment, the computer 36 is programmed to perform the functions described herein, therefore, the term "computer" as used herein is not limited to those integrated circuits known in the art as computers, but generally refers to computers, Processors, microcontrollers, microcomputers, programmable logic controllers, application specific integrated circuits and other programmable circuits. Although the methods described herein are described in a medical setting, it is intended that non-medical imaging systems can also benefit from the present invention, such as those typically employed in industrial settings or in transportation environments, such as but not limited to those used in airports Or baggage scanning CT system in other transportation centers.

如图3和4所示,已知的探测器阵列118包括多个探测器模块组件150(也称为探测器模块),每个模块包括探测器元件120阵列。每个探测器模块150包括高密度光电传感器阵列152和位于光电传感器阵列152上并接近光电传感器阵列152的多维闪烁体阵列154。具体地,闪烁体阵列154包括多个闪烁体156,而光电传感器阵列152包括光电二极管158、开关设备160和解码器162。在闪烁体元件之间的狭小空间中填充诸如充有二氧化钛的环氧树脂的材料。光电二极管158为单个的光电二极管,或者光电二极管158为多维二极管阵列。在硅基底上扩散、沉积或形成光电二极管158。如在现有技术所公知的,闪烁体阵列154被定位在光电二极管158上面或接近光电二极管158。光电二极管158光耦合到闪烁体阵列154,并具有用于传输信号的电输出线,该信号代表由闪烁体阵列154输出的光。每个光电二极管158产生独立的低电平模拟输出信号,该信号为闪烁体阵列154的特定闪烁体的射线束衰减的量度。例如,光电二极管输出线(在图3或4中未示出)可物理地位于模块120一侧或模块120的多侧。如图4所示,光电二极管的输出位于光电二极管阵列的对侧。As shown in FIGS. 3 and 4 , a known detector array 118 includes a plurality of detector module assemblies 150 (also referred to as detector modules), each module including an array of detector elements 120 . Each detector module 150 includes a high-density photosensor array 152 and a multi-dimensional scintillator array 154 located on and proximate to the photosensor array 152 . Specifically, scintillator array 154 includes a plurality of scintillators 156 , while photosensor array 152 includes photodiodes 158 , switching devices 160 and decoders 162 . The small spaces between the scintillator elements are filled with a material such as titanium dioxide-filled epoxy. Photodiode 158 is a single photodiode, or photodiode 158 is a multidimensional diode array. Photodiodes 158 are diffused, deposited or formed on the silicon substrate. Scintillator array 154 is positioned above or near photodiode 158 as is known in the art. Photodiodes 158 are optically coupled to scintillator array 154 and have electrical output lines for transmitting signals representative of the light output by scintillator array 154 . Each photodiode 158 produces an independent low level analog output signal that is a measure of beam attenuation for a particular scintillator of scintillator array 154 . For example, photodiode output lines (not shown in FIGS. 3 or 4 ) may be physically located on one side of the module 120 or on multiple sides of the module 120 . As shown in Figure 4, the outputs of the photodiodes are located on opposite sides of the photodiode array.

如图3所示,探测器阵列118包括57个探测器模块150。每个探测器模块150包括光电传感器阵列152和典型的匹配闪烁体阵列154。因此,阵列118被分割成16行和912列(16 x 57个模块),在目前的技术中,其允许随着台架12的每次旋转沿Z轴同时收集直到例如N=16个切片的数据,其中Z轴是台架的旋转轴。As shown in FIG. 3 , the detector array 118 includes 57 detector modules 150 . Each detector module 150 includes a photosensor array 152 and typically a matched scintillator array 154 . Thus, the array 118 is partitioned into 16 rows and 912 columns (16 x 57 modules), which in current technology allows simultaneous collection along the Z axis with each rotation of the gantry 12 up to, for example, N=16 slices data, where the Z axis is the rotational axis of the gantry.

开关设备160为多维半导体开关阵列。开关设备160被耦合在光电传感器阵列152和DAS 32之间。在一个实施例中,开关设备160包括两个半导体开关阵列164和166。开关阵列164和166各包括多个布置成多维阵列的场效应管(FET)(未示出)。每个FET包括电连接到各发光二极管输出线之一的输入端、输出端和控制端(未示出)。FET输出端和控制端连接到通过挠性电缆168电连接到DAS 32的线路上。具体地,约半数光电二极管输出线电连接到开关164的每个FET输入线上,而另一半光电二极管的输出线电连接到开关166的FET输入线上。挠性电缆168从而电耦合到光电传感器阵列152,例如通过从皮线168到开关设备160,以及从开关设备160和解码器162到光电二极管158的导线连接。The switch device 160 is a multi-dimensional semiconductor switch array. Switching device 160 is coupled between photosensor array 152 and DAS 32. In one embodiment, switching device 160 includes two semiconductor switch arrays 164 and 166 . Switch arrays 164 and 166 each include a plurality of field effect transistors (FETs) (not shown) arranged in a multi-dimensional array. Each FET includes an input terminal, an output terminal, and a control terminal (not shown) electrically connected to one of the output lines of the respective LED. The FET output and control terminals are connected to lines that are electrically connected to the DAS 32 via a flexible cable 168. Specifically, about half of the photodiode output lines are electrically connected to each FET input line of switch 164 , while the other half of the photodiode output lines are electrically connected to the FET input lines of switch 166 . The flexible cable 168 is thereby electrically coupled to the photosensor array 152 , such as by wire connections from the flex wire 168 to the switching device 160 , and from the switching device 160 and the decoder 162 to the photodiodes 158 .

解码器162控制开关设备160的操作以依据预期的切片数和每个切片的切片分辨率使能、禁止或组合光电二极管158的输出。在一个实施例中,解码器162是现有技术中已知的FET控制器。解码器162包括多个耦合到开关设备160和DAS 32的输出和控制线。具体地,解码器输出端电耦合到开关设备控制线以使开关设备160能够从开关设备输入端到开关设备输出端传输固有数据。利用解码器162,有选择地使能、禁止或组合开关设备160内的特定FET,以使特定光电二极管158的输出端电连接到CT系统的DAS 32。解码器162使能开关设备160,以使光电传感器阵列152的选定的行数连接到DAS 32,导致选定数目切片的数据电连接到DAS 32供进行处理。Decoder 162 controls the operation of switching device 160 to enable, disable, or combine the output of photodiodes 158 depending on the desired number of slices and the slice resolution of each slice. In one embodiment, decoder 162 is a FET controller known in the art. Decoder 162 includes a plurality of output and control lines coupled to switching device 160 and DAS 32. Specifically, the decoder output is electrically coupled to the switch device control line to enable the switch device 160 to transmit inherent data from the switch device input to the switch device output. Using decoder 162, specific FETs within switching device 160 are selectively enabled, disabled, or combined to electrically connect the output of a specific photodiode 158 to DAS 32 of the CT system. Decoder 162 enables switching device 160 to connect a selected number of rows of photosensor array 152 to DAS 32, causing the selected number of slices of data to be electrically connected to DAS 32 for processing.

如图3和4所示,探测器模块150被装配到探测器阵列118中并通过轨道170和172紧固到位。图3示出,在模块150的基底174、挠性电缆168和安装支架176上,轨道172已紧固到位,而轨道170将要被紧固在电缆168上。然后,将螺钉(图3和4中未示出)穿过孔178和180并拧入轨道170的螺纹孔182内以将模块150紧固到位。通过对着轨道170和172加压(或通过粘结,在一个实施例中)而将安装支架176的凸缘184保持在适当位置上,并防止探测器模块150“摆动”。安装支架176还将挠性电缆168夹在基底174上,或在一个实施例中,挠性电缆168还被粘附地结合到基底174上。As shown in FIGS. 3 and 4 , detector module 150 is assembled into detector array 118 and secured in place by rails 170 and 172 . FIG. 3 shows that on the base 174 of the module 150 , the flexible cable 168 and the mounting bracket 176 , the track 172 has been secured in place and the track 170 is to be secured to the cable 168 . Screws (not shown in FIGS. 3 and 4 ) are then threaded through holes 178 and 180 and into threaded holes 182 of rail 170 to secure module 150 in place. The flange 184 of the mounting bracket 176 is held in place by applying pressure (or by bonding, in one embodiment) against the rails 170 and 172 and prevents the detector module 150 from "wobbling". The mounting bracket 176 also clamps the flexible cable 168 to the base 174 or, in one embodiment, the flexible cable 168 is also adhesively bonded to the base 174 .

然而,按常规,轨迹(trace)或电路径可仅从光电二极管阵列的任一端部引入,这对利用顶面触点形成的轨迹和焊盘的数目和尺寸产生一定物理限制。对轨迹和焊盘的数目和尺寸上的物理限制可通过反转二极管和将表面触点设置在光电二极管阵列的背面来消除。这种技术在例如美国专利US6,707,046(即,背面照明或“背光照明”二极管)中进行了描述。背光照明二极管阵列的每个像素直接电连接到由陶瓷或印刷线路板(PWB)等制成的基底上。基底为多层以穿过多层基底向基底的对面运送来自光电二极管阵列的电信号。在基底的每个表面上设有可电结合的焊盘以便于相互电连接。背面连接设计无需将轨迹引入二极阵列的两边而且能够无限制地在CT扫描器的Z和X维数内铺设(tiling)装置。Conventionally, however, traces or electrical paths can only be introduced from either end of the photodiode array, which creates certain physical limitations on the number and size of traces and pads formed with top surface contacts. Physical limitations on the number and size of traces and pads can be removed by inverting the diodes and placing the surface contacts on the backside of the photodiode array. This technique is described, for example, in US Patent No. 6,707,046 (ie, backside illuminated or "backlit" diodes). Each pixel of the backlighting diode array is directly electrically connected to a substrate made of ceramic or printed wiring board (PWB) or the like. The substrate is multilayered to carry electrical signals from the photodiode array across the multilayer substrate to the opposite side of the substrate. Electrically bondable pads are provided on each surface of the substrate to facilitate electrical interconnection. The backside connection design eliminates the need to introduce traces to both sides of the diode array and enables unlimited tiling of devices within the Z and X dimensions of the CT scanner.

图5和6示出通过将背光照明二极管阵列202放置到多层基底204上而组装成的二极管-基底组件200。在使背光照明二极管阵列202对准并附着到基低204上之前,将导电环氧树脂阵列206涂覆、遮蔽或施加到基底204上。将多个立柱块208热声键合(thermosonically bonded)到背光照明二极管阵列214的形成金属化图案的表面上,并基本放置在阵列202的每个像素的中心内。立柱块208为金属,且在一个实施例中为金。导电粘合剂206在基底204的表面上形成与立柱块阵列206上的图案216相配且相对的相同图案。使用拾取和放置倒装片技术(pick and place flip chip technology)来使二极管阵列202与基底204精确对准,并用于将立柱块208压到底部直到焊盘阵列216。使导电粘合剂按制造者的规定以所需要的时间和温度固化。立柱块208有利于控制背光照明二极管阵列202均匀高度,并提供用于底层填充材料210的间隙212。立柱块208接触贯穿接触区域的阵列的基底204的表面且是基本等高,使得二极管阵列基本上符合基底204的相同的表面平直度。立柱块还形成间隙212,底层填充材料210通过毛细管作用引入其中。底层填料210用于加强背光照明二极管阵列202和基底204之间连接。底层填料210还用于防止离子和其它污染物进入阵列附着区域,给连接增加低信号耐用度。5 and 6 illustrate a diode-substrate assembly 200 assembled by placing a backlighting diode array 202 onto a multilayer substrate 204 . A conductive epoxy array 206 is coated, masked or otherwise applied to the substrate 204 prior to aligning and attaching the backlighting diode array 202 to the substrate 204 . A plurality of stud blocks 208 are thermosonically bonded to the metallized surface of the backlight diode array 214 and placed substantially within the center of each pixel of the array 202 . Post blocks 208 are metal, and in one embodiment gold. The conductive adhesive 206 forms an identical pattern on the surface of the substrate 204 that matches and opposes the pattern 216 on the array of stud blocks 206 . Pick and place flip chip technology is used to precisely align the diode array 202 to the substrate 204 and to press the pillar block 208 to the bottom until the pad array 216 . The conductive adhesive is allowed to cure for the required time and temperature as specified by the manufacturer. Post block 208 facilitates controlling the uniform height of backlight diode array 202 and provides clearance 212 for underfill material 210 . Post blocks 208 contact the surface of substrate 204 across the array of contact areas and are substantially of equal height such that the array of diodes substantially conforms to the same surface flatness of substrate 204 . The stud blocks also form gaps 212 into which underfill material 210 is introduced by capillary action. The underfill 210 is used to strengthen the connection between the backlight diode array 202 and the substrate 204 . The underfill 210 also serves to prevent ions and other contaminants from entering the array attachment area, adding low signal robustness to the connection.

图7示出附着到基底204的与背光照明二极管阵列202(未示出)相对的面上的挠性电路308。多个易熔焊料球302以与基底204的多个电输出盘304相仿的图案定位在基底204上。而后使用无流动(no-flow)处理填充间隙310,首先,通过使用拾取和放置设备将封装剂312放置到挠性电路308上,将挠性电路308连接到基底204上,而后通过将组件加热到焊料所需的规定温度而使焊料球302流动。随着部分焊料流加热,封装材料被固化。挠性电路308相应地具有电接触盘306的图案,电接触盘306的图案与基底204上的相对的图案304匹配。无流动处理指在连接两个表面之前将封装剂放置在挠性电路308上,而后加热至焊料熔化温度。FIG. 7 shows a flex circuit 308 attached to the side of the substrate 204 opposite the backlight diode array 202 (not shown). A plurality of eutectic solder balls 302 are positioned on the substrate 204 in a pattern similar to the plurality of electrical output pads 304 of the substrate 204 . Gap 310 is then filled using a no-flow process, first by placing encapsulant 312 onto flex circuit 308 using a pick-and-place device, attaching flex circuit 308 to substrate 204, and then by heating the assembly The solder balls 302 flow to a predetermined temperature required for solder. As part of the solder flow heats up, the encapsulation material is cured. The flex circuit 308 accordingly has a pattern of electrical contact pads 306 that matches the opposing pattern 304 on the substrate 204 . No-flow processing refers to placing the encapsulant on the flex circuit 308 and then heating to the melting temperature of the solder before joining the two surfaces.

图8示出配置有阵列图案306的挠性电路308,其还配置有牺牲垫330,其缝合成在缝合部(stich)之间形成轴向间隙332。在基底(未示出)上还以与接触盘304的图案类似的方式定位类似的金属化牺牲缝合部。当挠性电路308与基底204连接时,相对的缝合部图案提供相对的金属化表面,其提供到少三个功能。图9示出牺牲垫330,当进行后续粘合处理时其为待粘附的封装剂提供强化粘合表面。牺牲垫330还用于阻止溢出牺牲垫330外的封装剂312流。封装剂312由凹槽334限制在其流动区域内,位置和尺寸设置成使毛细管作用在凹槽区域334内停止。在如此限制的流中,牺牲垫330还用于限定挠性电路308的弯曲线336。轴向间隙332使在焊料块304的加热处理期间形成的气体能够释放。Figure 8 shows a flex circuit 308 configured with an array pattern 306, which is also configured with a sacrificial pad 330 that is stitched to form an axial gap 332 between the stitches. Similar metallized sacrificial stitches are also positioned on the substrate (not shown) in a similar manner to the pattern of the contact pads 304 . When the flex circuit 308 is connected to the substrate 204, the opposing stitch patterns provide opposing metallized surfaces, which provide at least three functions. Figure 9 shows a sacrificial pad 330 that provides a reinforced bonding surface for the encapsulant to be adhered to when subjected to subsequent bonding processes. The sacrificial pad 330 also serves to stop the flow of the encapsulant 312 that overflows the sacrificial pad 330 . Encapsulant 312 is confined within its flow region by grooves 334 positioned and dimensioned such that capillary action stops within groove region 334 . The sacrificial pad 330 also serves to define the bend line 336 of the flex circuit 308 in such a restricted flow. Axial gap 332 enables release of gases formed during heat processing of solder bump 304 .

在此描述的方法和设备的一个技术效果是,其提供多层基底上的背光照明二极管和附着在基底下面的挠性电路。另一个技术效果是,在此描述的方法和设备使用多层陶瓷或印刷线路板作为基底材料。另一个技术效果是,在此描述的方法和设备使用焊料和回流封装剂供进行挠性附着和弯曲线控制。另一个技术效果是,在此描述方法和设备使用牺牲垫控制底层填充材料且增强CT探测器模块的可靠性。One technical effect of the methods and apparatus described herein is that it provides backlighting diodes on a multilayer substrate and a flex circuit attached below the substrate. Another technical effect is that the methods and devices described herein use multilayer ceramic or printed wiring boards as substrate materials. Another technical effect is that the methods and apparatus described herein use solder and reflow encapsulant for flex attachment and bend wire control. Another technical effect is that the methods and apparatus described herein use sacrificial pads to control underfill material and enhance CT detector module reliability.

已参照优选的实施例描述了本发明。在阅读和理解前述详细描述的基础上,本领域的其他技术人员可进行更改和改变。本发明应解释为包括全部这些更改和改变,只要它们落入所附的权利要求书或其等同物的范围内。The invention has been described with reference to preferred embodiments. Alterations and alterations will occur to others by others skilled in the art upon reading and understanding the preceding detailed description. The present invention should be construed to include all such modifications and changes as long as they fall within the scope of the appended claims or their equivalents.

部件列表parts list

CT系统............................................................................10CT system................................................ ...................................10

台架..............................................................................12Bench................................................ ................................12

放射源............................................................................14Radioactive source................................................ ...................................14

锥形射线束........................................................................16Cone Beam ................................................ ...................................16

探测器阵列........................................................................18Detector array................................................ ...................................18

探测器元件........................................................................20Detector element................................................ ...................................20

物体..............................................................................22object................................................. .............................twenty two

旋转中心..........................................................................24Center of rotation................................................ ..........................twenty four

控制机构..........................................................................26Control mechanism ................................................ ...................................26

放射控制器........................................................................28Radiation controller................................................ ...................................28

台架电机控制器....................................................................30Bench motor controller................................................ ..............30

DAS...............................................................................32DAS................................................................ ...................................32

图像重建器........................................................................34Image Reconstructor................................................ ...................................34

计算机............................................................................36computer................................................. ...................................36

存储装置..........................................................................38storage device................................................ ...................................38

控制台............................................................................40console................................................ ...................................40

显示器............................................................................42monitor................................................. ...................................42

台电机控制器......................................................................44A motor controller..................................................... ...................................44

台................................................................................46tower................................................. ...................................46

台架开口..........................................................................48Bench opening .............................................. ...................................48

装置..............................................................................50device................................................ ...................................50

计算机可读介质....................................................................52Computer Readable Media ................................................ ...................52

已知探测器阵列....................................................................118Known detector arrays................................... ...................................118

模块..............................................................................120module................................................ ...................................120

探测器模块.......................................................................150Detector Module................................................ ...................................150

光电传感器阵列...................................................................152Photosensor Array................................................ ...................152

闪烁体阵列.......................................................................154Scintillator Array................................................ ...................................154

多个闪烁体.......................................................................156Multiple Scintillators ................................................ ...................................156

光电二极管.......................................................................158Photodiode................................................ ................................158

开关设备.........................................................................160Switchgear................................................ ...................................160

解码器...........................................................................162decoder................................................ ...................................162

开关.............................................................................164switch................................................. ...................................164

挠性电缆.........................................................................168Flexible Cable ................................................ ...................................168

轨道.............................................................................170track................................................. ...................................170

轨道.............................................................................172track................................................. ...................................172

基底.............................................................................174Substrate ................................................... ...................................174

安装支架.........................................................................176Mounting brackets................................................ ...................................176

孔...............................................................................178hole................................................. ...................................178

孔...............................................................................180hole................................................. ................................180

孔...............................................................................182hole................................................. ................................182

凸缘.............................................................................184Flange................................................ ...................................184

二极管-基底组件..................................................................200Diode-Substrate Assemblies................................................ ...................200

背光照明二极管阵列...............................................................202Backlight Diode Array................................................... ..........202

多层基底.........................................................................204Multi-Layer Substrates ................................................ ...................................204

粘合剂...........................................................................206Adhesive................................................ ...................................206

立柱块...........................................................................208Column block................................................ ...................................208

底层填料.........................................................................210Underfill...................................... ...................................210

间隙.............................................................................212gap................................................. ...................................212

背光照明二极管阵列...............................................................214Backlight Diode Array................................................... ..........214

阵列.............................................................................216array..................................................... ...................................216

焊料球...........................................................................302Solder balls................................................ ...................................302

接触盘...........................................................................304Contact plate ................................................ ...................................304

阵列图案.........................................................................306Array pattern................................................ ...................................306

接触盘...........................................................................306Contact plate ................................................ ...................................306

挠性电路.........................................................................308Flexible Circuits ................................................ ...................................308

间隙.............................................................................310gap................................................. .......................................... 310

封装剂...........................................................................312Encapsulants................................................ ...................................312

牺牲垫...........................................................................330Sacrificial pads................................................ ...................................330

轴向间隙.........................................................................332Axial clearance................................................ ...................................332

凹槽.............................................................................334Groove................................................ ...................................334

弯曲线...........................................................................336Curved wire ................................................ ...................................336

Claims (10)

1.一种计算机断层摄影成像扫描器(10)模块,包括:1. A computed tomography imaging scanner (10) module comprising: 多个闪烁体(156);a plurality of scintillators (156); 与所述闪烁体(156)光学耦合的多个背光照明光电二极管(202);a plurality of backlighting photodiodes (202) optically coupled to the scintillator (156); 具有多个基底导电体的多层基底(204),所述背光照明光电二极管(202)与该多个基底导电体电耦合,其中所述多个基底导电体中的每一个连接到一个不同的所述背光照明光电二极管(202)上;和A multilayer substrate (204) having a plurality of substrate conductors to which the backlighting photodiode (202) is electrically coupled, wherein each of the plurality of substrate conductors is connected to a different on said backlighting photodiodes (202); and 具有多个挠性导电体的挠性电缆(308),所述基底与该多个挠性导电体电耦合,其中所述多个挠性导电体中的每一个连接到所述多层基底(204)的不同输出端上。A flexible cable (308) having a plurality of flexible electrical conductors to which the base is electrically coupled, wherein each of the plurality of flexible electrical conductors is connected to the multilayer base ( 204) on different output terminals. 2.根据权利要求1所述的模块,其中所述多个闪烁体(156)包括二维阵列(154)。2. The module of claim 1, wherein the plurality of scintillators (156) comprises a two-dimensional array (154). 3.根据权利要求2所述的模块,其中所述多个背光照明光电二极管(202)包括与所述多个闪烁体(156)阵列对准的二维阵列(214)。3. The module of claim 2, wherein said plurality of backlighting photodiodes (202) comprises a two-dimensional array (214) aligned with said plurality of scintillator (156) arrays. 4.根据权利要求3所述的模块,其中所述多个基底导电体包括与所述背光照明光电二极管(202)阵列对准的二维阵列。4. The module of claim 3, wherein the plurality of base conductors comprises a two-dimensional array aligned with the array of backlighting photodiodes (202). 5.根据权利要求1所述的模块,其中所述多个背光照明光电二极管(202)中的每一个包括立柱块。5. The module of claim 1, wherein each of the plurality of backlighting photodiodes (202) comprises a pillar block. 6.根据权利要求5所述的模块,其中每个所述立柱块包括金。6. The module of claim 5, wherein each of said stud blocks comprises gold. 7.一种成像系统(10),包括:7. An imaging system (10) comprising: X射线源(14);和X-ray source (14); and 定位成接收从所述X射线源发射的X射线的X射线探测器模块(18),所述探测器模块包括:an x-ray detector module (18) positioned to receive x-rays emitted from said x-ray source, said detector module comprising: 面对所述X射线源的多个闪烁体(156);a plurality of scintillators (156) facing said X-ray source; 与所述闪烁体(156)光学耦合的多个背光照明光电二极管(202);a plurality of backlighting photodiodes (202) optically coupled to the scintillator (156); 与所述多个背光照明光电二极管电耦合的多层基底(204);和a multilayer substrate (204) electrically coupled to the plurality of backlighting photodiodes; and 与所述多层基底(204)电耦合的挠性电缆(308)。A flexible cable (308) is electrically coupled to the multilayer substrate (204). 8.一种用于计算机断层成像的方法,包括:8. A method for computed tomography comprising: 从闪烁体(156)接收光子;receiving photons from the scintillator (156); 将所述光子转换成电信号;converting the photons into electrical signals; 通过多层基底(204)传输所述电信号;和transmitting said electrical signal through the multilayer substrate (204); and 通过多层挠性电路(308)传输所述电信号。The electrical signal is transmitted through a multilayer flexible circuit (308). 9.一种用于将背光照明二极管(202)附着到多层基底(204)的方法,所述方法包括:9. A method for attaching backlighting diodes (202) to a multilayer substrate (204), the method comprising: 将立柱块(208)通过引线焊接到所述背光照明二极管的表面;The column block (208) is welded to the surface of the backlighting diode by wire; 将粘合剂(206)放置到所述多层基底的表面;placing an adhesive (206) on the surface of the multilayer substrate; 将带有所述立柱块的表面相对于所述多层基底上带有粘合剂的表面对准;aligning the surface bearing the stud blocks relative to the surface bearing the adhesive on the multilayer substrate; 将所述背光照明二极管和所述基底加热到粘合剂固化温度;和heating the backlighting diodes and the substrate to an adhesive curing temperature; and 向所述背光照明二极管和所述基底之间形成的间隙(310)进行底层填料。A gap (310) formed between the backlighting diodes and the substrate is underfilled. 10.一种用于将挠性电路(308)附着到多层基底(204)上的方法,包括:10. A method for attaching a flexible circuit (308) to a multilayer substrate (204), comprising: 将焊料块(302)放置到所述多层基底的表面;placing solder bumps (302) on the surface of the multilayer substrate; 将软熔封装剂(312)放置到所述挠性电路的表面;placing a reflow encapsulant (312) onto the surface of the flexible circuit; 使所述多层基底的表面与所述焊料块表面对准;aligning a surface of the multilayer substrate with the solder bump surface; 将所述挠性电路和所述基底加热到焊料软熔温度。The flexible circuit and the substrate are heated to a solder reflow temperature.
CN200510124985XA 2005-10-14 2005-10-14 Systems, methods and module assemblies for multi-die backlighting diodes Expired - Fee Related CN1947660B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200510124985XA CN1947660B (en) 2005-10-14 2005-10-14 Systems, methods and module assemblies for multi-die backlighting diodes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN200510124985XA CN1947660B (en) 2005-10-14 2005-10-14 Systems, methods and module assemblies for multi-die backlighting diodes

Publications (2)

Publication Number Publication Date
CN1947660A CN1947660A (en) 2007-04-18
CN1947660B true CN1947660B (en) 2010-09-29

Family

ID=38017352

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200510124985XA Expired - Fee Related CN1947660B (en) 2005-10-14 2005-10-14 Systems, methods and module assemblies for multi-die backlighting diodes

Country Status (1)

Country Link
CN (1) CN1947660B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140312238A1 (en) * 2011-12-27 2014-10-23 Koninklijke Philips N.V. Flexible connectors for pet detectors
DE102014221829B4 (en) * 2014-10-27 2018-02-22 Siemens Healthcare Gmbh Method for producing a sensor board for a detector module and detector module produced thereby
SG11201707508PA (en) 2015-04-07 2017-10-30 Shenzhen Xpectvision Tech Co Ltd Semiconductor x-ray detector
KR101941899B1 (en) 2015-04-07 2019-01-24 선전 엑스펙트비전 테크놀로지 컴퍼니, 리미티드 Semiconductor X-ray detector
KR102403444B1 (en) 2015-04-07 2022-05-30 선전 엑스펙트비전 테크놀로지 컴퍼니, 리미티드 How to make a semiconductor X-ray detector
EP3320371B1 (en) 2015-06-10 2025-05-21 Shenzhen Xpectvision Technology Co., Ltd. A detector for x-ray fluorescence
EP3320374B1 (en) 2015-07-09 2020-05-20 Shenzhen Xpectvision Technology Co., Ltd. Methods of making semiconductor x-ray detector
EP3341756A4 (en) 2015-08-27 2019-05-22 Shenzhen Xpectvision Technology Co., Ltd. X-RAY IMAGING WITH A DETECTOR LIKELY TO RESOLVE PHOTONIC ENERGY
WO2017041221A1 (en) * 2015-09-08 2017-03-16 Shenzhen Xpectvision Technology Co., Ltd. Methods for making an x-ray detector
CN114886453A (en) * 2022-07-12 2022-08-12 芯晟捷创光电科技(常州)有限公司 CT detection module based on front-illuminated photodiode array and corresponding CT machine

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5284795A (en) * 1990-12-20 1994-02-08 Motorola, Inc. Thermal annealing of semiconductor devices
CN1262446A (en) * 1999-01-25 2000-08-09 模拟技术有限公司 X-ray absorption, optical reflecting medium for x-ray tester array
US6292529B1 (en) * 1999-12-15 2001-09-18 Analogic Corporation Two-dimensional X-ray detector array for CT applications
US6416881B1 (en) * 1999-08-10 2002-07-09 Seagate Technology Llc Media with a metal oxide sealing layer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5284795A (en) * 1990-12-20 1994-02-08 Motorola, Inc. Thermal annealing of semiconductor devices
CN1262446A (en) * 1999-01-25 2000-08-09 模拟技术有限公司 X-ray absorption, optical reflecting medium for x-ray tester array
US6416881B1 (en) * 1999-08-10 2002-07-09 Seagate Technology Llc Media with a metal oxide sealing layer
US6292529B1 (en) * 1999-12-15 2001-09-18 Analogic Corporation Two-dimensional X-ray detector array for CT applications

Also Published As

Publication number Publication date
CN1947660A (en) 2007-04-18

Similar Documents

Publication Publication Date Title
US7439516B2 (en) Module assembly for multiple die back-illuminated diode
US6522715B2 (en) High density flex interconnect for CT detectors
JP5455620B2 (en) Radiation detector and apparatus including the detector
CN101214154B (en) CT detector module structure
EP3210043B1 (en) Detector unit for detector array of radiation imaging modality
EP2433156B1 (en) Detector array with pre-focused anti-scatter grid
JP2001318155A (en) Radiation detector and X-ray CT device
CN106662661B (en) Sensor devices and imaging systems for detecting radiation signals
CN1947660B (en) Systems, methods and module assemblies for multi-die backlighting diodes
US20080253507A1 (en) Computed Tomography Detector Using Thin Circuits
JP2003066149A (en) Radiation detector, radiation detection system, X-ray CT device
CN105764420A (en) Precision self-aligning ct detector sensors
US7289336B2 (en) Electronic packaging and method of making the same
JP4502736B2 (en) Multi-layer flexible signal transmission detector circuit for multi-slice CT
US10680034B2 (en) Imaging detector module assembly
JP2013054030A (en) Anode-illuminated radiation detector
JP4831300B2 (en) Multi-die back-illuminated diode module assembly
JP2011191245A (en) Radioactive ray detecting apparatus, method of manufacturing the same, and imaging system
US10181493B2 (en) Radiation detector system of radiation imaging modality
JP2008122116A (en) Radiation detector and x-ray tomography
JP7034635B2 (en) Manufacturing method of detector module, radiation detector, X-ray computed tomography equipment and radiation detector
CN223259613U (en) Radiation detector module, radiation detector and imaging device
NL1030140C2 (en) Module assembly for rear-exposed diode with multiple molds.
CN115462821B (en) CT detector module
CN102193102B (en) Radiation detecting apparatus, the manufacture method of radiation detecting apparatus and image capturing apparatus

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100929

Termination date: 20141014

EXPY Termination of patent right or utility model