CN1837112A - Molded glass core and manufacturing method thereof - Google Patents

Abstract

The invention provides a molded glass cavity, which comprises a substrate, an intermediate layer and a protective film, wherein the intermediate layer is arranged on the substrate, whose material is agraphitic carbon, the protective film is arranged on the intermediate layer whose material is pseudo-diamond thin film containing atoms. The invention also discloses a process for producing the molded glass cavity, which comprises the steps of providing a substrate, depositing an intermediate layer onto the surface of the substrate, then depositing a protective film onto the surface of the intermediate layer.

Description

Molded glass core and manufacturing method thereof

【Technical field】

The invention relates to a mold core, in particular to a mold core for molding glass and a manufacturing method thereof.

【Background technique】

With the development of multimedia technology, digital cameras and video cameras are becoming more and more popular among consumers. While people are pursuing miniaturization of digital cameras and video cameras, they also put forward higher requirements for the image quality of the objects they shoot. The image of the object is clear, and the image quality of the object depends to a large extent on the quality of the optical components in the digital camera.

Aspherical lenses are indispensable optical elements in digital cameras, and existing digital camera aspheric lenses are made by molding. Since glass molding needs to be carried out at high temperature (about 600°C) and high pressure (10-30KN), the production of aspheric lenses by molding method requires a strictly designed mold core, which generally needs to have the following characteristics:

1. Good chemical stability to avoid reaction with glass;

2. Sufficient hardness and mechanical strength to avoid surface scratches;

3. High temperature stability to avoid decomposition during molding;

4. Thermal shock resistance to withstand high temperature stamping in the molding process;

5. Machinability makes it easy to process into a specific optical surface;

6. The mold core should have a certain lifespan to reduce the cost.

The mold core of molded glass includes at least a single material, or a combined structure of a substrate and a protective film. The general substrate material is stainless steel, silicon carbide, tungsten carbide, etc., and the material of the protective film is generally a diamond-like film (Diamond Like Film, DLC ), noble metal coating or noble metal alloy coating, noble metal coating such as iridium (Iridium, Ir), platinum (Platinum, Pt), ruthenium (Ruthenium, Ru), etc., noble metal alloy coating such as iridium-ruthenium alloy (Ir-Ru), iridium- Rhenium alloy (Ir-Re), etc. Diamond-like carbon (DLC) film is easily graphitized at high temperature, so it is difficult to achieve a satisfactory mold core life. Precious metals or precious metal alloys have strong chemical stability, sufficient hardness and high temperature resistance, but due to the poor adhesion between the precious metal protective film and the substrate, the service life of the mold core is greatly reduced, which indirectly improves the quality of the molded glass. the cost of.

【Content of invention】

In view of the above situation, it is necessary to provide a molded glass core with a long service life, a tight bond between the protective film and the substrate, and a relatively high molding temperature.

In addition, a method for manufacturing a molded glass core is provided.

A molded glass mold core, including a substrate, an intermediary layer and a protective film, wherein the intermediary layer is located on the substrate, and its material is amorphous carbon, and the protective film is located on the intermediary layer, and its material is diamond-like carbon containing nitrogen atoms film.

A method for manufacturing a molded glass core, comprising the following steps:

provide a substrate;

Deposit a layer of intermediary layer on the surface of the substrate, the material of which is amorphous carbon;

A protective film is deposited on the surface of the intermediary layer, and its material is a diamond-like carbon film containing nitrogen atoms.

Compared with the prior art, the molded glass core of the present invention has a longer service life, the protective film is closely combined with the substrate, and the molding temperature is higher.

【Description of drawings】

Fig. 1 is a schematic diagram of the mold core structure of a preferred embodiment of the present invention.

【Detailed ways】

1, the molded glass core of the present invention includes a substrate 1, an intermediary layer 2 and a protective film 3, wherein the material of the substrate 1 is stainless steel, silicon carbide, tungsten carbide, etc.; the intermediary layer 2 is located on the On the substrate 1, its thickness is 1-2 micron, and its material is amorphous carbon (amorphous Carbon), and this amorphous carbon material also contains the crystalline diamond particle (nano crystalline-diamond) of nanoscale; Protective film 3 is positioned at this On the intermediary layer 2, its thickness is 50-100nm, its material is a diamond like carbon film (diamond like carbon) containing part of nitrogen atoms, and the protective film 3 has a molding surface 31 for molding grooves.

In this embodiment, the amorphous carbon containing nano-scale crystalline diamond particles is adopted as the material of the intermediary layer 2. Since the amorphous carbon contains a large amount of SP ² bonded carbon structure, the intermediary layer 2 has a lubricating property and is compatible with the substrate. 1 and the protective film are closely combined, and because it contains some nano-scale crystal diamond particles, its strength is also better, and it is not easy to be damaged by strong mechanical force during compression molding. The protective film 3 formed on the surface of the interposer 2 is made of a diamond-like film, and contains a small amount of nitrogen atoms. Because the diamond-like film contains a small amount of nitrogen atoms, it has better stability at high temperatures and can improve The disadvantage of diamond-like film being easy to graphitize at high temperature makes it have a better service life. At the same time, due to the lubricating effect of the amorphous carbon in the intermediary layer 2 , the diamond-like film is closely bonded to the intermediary layer 2 , and is not easily peeled off or damaged during demoulding.

The method for manufacturing the molded glass core comprises the following steps:

Provide a substrate 1;

Depositing a layer of intermediary layer 2 on the surface of the substrate 1, the material of the intermediary layer 2 is amorphous carbon containing nanoscale crystalline diamond particles;

A protective film 3 is deposited on the surface of the intermediary layer 2, and the material of the protective film 3 is a diamond-like carbon film containing nitrogen atoms.

The interposer 2 is plated on the substrate 1 by chemical vapor deposition (Chemical Vapor Depositon, CVD), preferably by microwave plasma chemical vapor deposition (Micro Wave Plasma Chemical Vapor Deposition). The protection layer 3 is plated on the surface of the interposer 2 by chemical vapor deposition or sputtering.

Put the substrate 1 in the microwave chemical vapor deposition equipment, after vacuuming, let methane (CH ₄ ) gas in, and coat the film under the existing chemical vapor deposition conditions to obtain an intermediate layer 2. Since the microwave chemical vapor deposition method is adopted , The amorphous carbon material in the intermediary layer 2 contains some nanoscale crystal diamond particles, and the thickness of the intermediary layer 2 should be controlled to be 1-2 microns. Then, a mixed gas of nitrogen (N ₂ ) and methane or methane and ammonia (NH ₃ ) is introduced into the chemical vapor deposition equipment, and a protective film 3 is plated on the surface of the interposer 2. At the same time, the deposition conditions are controlled so that the protective film The thickness of 3 is controlled to be 50-100 nanometers.

The protective film 3 can also be deposited by sputtering, using graphite as the sputtering target and nitrogen as the sputtering gas, and a diamond-like film containing nitrogen atoms can also be produced under the existing operating conditions.

Claims (10)

1. A molded glass mold kernel is characterized in that: it comprises substrate, intermediary layer and protective film, and this intermediary layer is positioned at the surface of substrate, and its material is amorphous carbon, and this protective film is positioned at the surface of intermediary layer, and its The material is a diamond-like carbon film containing nitrogen atoms. 2. The molded glass core as claimed in claim 1, wherein the amorphous carbon material contains nano-sized crystalline diamond particles. 3. The molded glass core as claimed in claim 2, wherein the interlayer has a thickness of 1-2 microns. 4. The molded glass core as claimed in claim 3, wherein the protective film has a thickness of 50-100 nm. 5 . The molded glass mold core as claimed in claim 4 , wherein the protective film has a molding surface in the shape of a molding groove. 6 . 6. A manufacturing method for molded glass mold kernels, characterized in that: it comprises the following steps: provide a substrate; Deposit a layer of intermediary layer on the surface of the substrate, the material of which is amorphous carbon; A protective film is deposited on the surface of the intermediary layer, and its material is a diamond-like carbon film containing nitrogen atoms. 7. The method for manufacturing a molded glass core as claimed in claim 6, wherein the interposer is deposited on the surface of the substrate by chemical vapor deposition. 8. The manufacturing method of the molded glass core as claimed in claim 7, wherein the chemical vapor deposition refers to microwave plasma chemical vapor deposition. 9. The method for manufacturing a molded glass core as claimed in claim 8, wherein the amorphous carbon material contains nano-sized crystalline diamond particles. 10. The method of manufacturing a molded glass core as claimed in claim 6, wherein the protective film is deposited on the surface of the interposer by chemical vapor deposition.

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