CN1803321B - Liquid knife mechanism - Google Patents

Abstract

The invention discloses a liquid knife mechanism, which comprises a structure body and at least one fixed component. The structure main body comprises an upper plate and a lower plate, a cleaning liquid inner flow passage is defined between the upper plate and the lower plate, and a cleaning liquid jet orifice is arranged at the joint of the upper plate and the lower plate and is connected with the cleaning liquid inner flow passage. In addition, the fixing member penetrates through the upper plate to fixedly lock and connect the upper plate and the lower plate, and one tail end of the fixing member is positioned in the lower plate and is not exposed out of the lower plate.

Description

Liquid knife mechanism

technical field

The invention relates to a liquid knife mechanism, in particular to a liquid knife mechanism for cleaning a glass substrate.

Background technique

Due to the characteristics of thin and light appearance, low power consumption and no radiation pollution, liquid crystal display panels are widely used in portable information products such as notebook computers and personal digital assistants, and have even gradually replaced traditional desktop computers. CRT Monitor Trends. In the liquid crystal display panel, the glass substrate is a key component of the liquid crystal display panel. In addition to being related to the cost of the liquid crystal display panel, it also has a decisive impact on the yield of the liquid crystal display panel. In recent years, glass substrates have also increased in size along with increases in the size of liquid crystal display panels. Taking the current fifth-generation liquid crystal display panel as an example, its glass substrate has reached a size of 1300 cm by 1500 cm, and the sixth generation has reached a size of 1500 cm by 1850 cm.

As the size of the glass substrate increases, many more critical manufacturing processes, such as wet etching manufacturing processes, etc., are added, which in turn aggravates the impact on the final product. Among them, the etching process performed when making the scanning lines of the liquid crystal display panel mainly uses a mixed liquid composed of phosphoric acid (H ₃ PO4 ), acetic acid (CH ₃ COOH) and nitric acid (HNO ₃ ) to etch the metal, After the etching is completed, a liquid knife mechanism is used for preliminary cleaning, and then a large amount of clean water is used to clean the glass substrate. However, when the size of the glass substrate increases, the transfer time of the glass substrate also increases relatively, so the time from the cleaning of the liquid knife mechanism to the use of a large amount of clean water for cleaning is relatively increased. In other words, the uniformity of residual acid in this period of time becomes more important for subsequent products.

Please refer to FIG. 1 , which is a schematic diagram of a conventional liquid knife mechanism 10 . As shown in FIG. 1 , the conventional liquid knife mechanism 10 includes a structural body 20 and at least one fixing member 22 . Wherein, the structural main body 20 includes an upper plate 24 and a lower plate 26, and a cleaning liquid internal flow channel 28 is defined between the upper plate 24 and the lower plate 26, and the junction of the upper plate 24 and the lower plate 26 has a connecting cleaning liquid inner channel. The cleaning fluid injection port 30 of the flow channel 28 . Meanwhile, the fixing member 22 is formed by at least one screw. The fixing member 22 simultaneously penetrates and locks the upper board 24 and the lower board 26 , and the tail end of the fixing member 22 is exposed outside the lower board 26 .

Generally speaking, since the tail end of the fixing member 22 is exposed outside the lower plate 26, when the user uses the liquid knife mechanism 10 to clean a glass substrate, the cleaning liquid will flow out from the gap connecting the fixing member 22 and the lower plate 26. And drip onto the glass substrate, and then the liquid knife water curtain cannot clean the glass substrate uniformly, resulting in the generation of water drop marks (Mura). Since the water drop marks will change the concentration of residual acid on the glass substrate, affect the etching state and reduce the quality of the final panel, how to effectively improve the water dripping of the liquid knife when cleaning the glass substrate with the liquid knife mechanism is an important issue today.

Contents of the invention

The main purpose of the present invention is to provide a liquid knife mechanism to solve the above existing problems.

According to the purpose of the present invention, a liquid knife mechanism is disclosed, which includes a structural main body and at least one fixing component. Wherein, the main body of the structure includes an upper plate and a lower plate, and a cleaning liquid inner flow channel is defined between the upper plate and the lower plate, and the junction of the upper plate and the lower plate has a cleaning liquid injection port and connects the cleaning liquid internal flow channel. road. In addition, the fixing member penetrates the upper board for locking and connecting the upper board and the lower board, and a tail end of the fixing member is located in the lower board and is not exposed outside the lower board.

According to the purpose of the present invention, another liquid knife mechanism is disclosed, which includes a structural main body, a fixing component and a deflector. Wherein, the main body of the structure includes an upper plate and a lower plate, and a cleaning liquid inner flow channel is defined between the upper plate and the lower plate, and the junction of the upper plate and the lower plate has a cleaning liquid injection port connected to the Cleaning fluid inner channel. In addition, the fixing component locks and connects the upper board and the lower board, and the deflector is arranged on the lower board.

Because the present invention utilizes at least one fixing member, such as a screw, etc. to penetrate and securely connect the upper plate and the lower plate of the liquid knife mechanism, and a tail end of the fixing member is located in the lower plate and is not exposed outside the lower plate , and set a deflector on the lower plate of the liquid knife mechanism to receive the cleaning liquid dripped during cleaning. Therefore, when the user uses the liquid knife mechanism to clean the glass substrate, the present invention can effectively prevent the cleaning liquid from being released from the fixed member The gap between the tail end and the lower plate flows out and drips onto the glass substrate, and at the same time prevents the cleaning liquid from dripping onto the glass substrate from the rear end of the liquid knife mechanism, thereby reducing the probability of water drop marks on the glass substrate.

Description of drawings

Fig. 1 is the schematic diagram of existing one liquid knife mechanism;

Fig. 2 is a schematic diagram of a liquid knife mechanism of a preferred embodiment of the present invention;

Fig. 3 is a schematic sectional view along A2 and A2' of Fig. 2;

Fig. 4 is a schematic diagram of a liquid knife mechanism according to another embodiment of the present invention;

Fig. 5 is a schematic cross-sectional view along A4 and A4' of Fig. 4 .

Description of main component symbols:

10 Liquid knife mechanism 20 Structural main body

22 Fixed member 24 Upper plate

26 Lower plate 28 Cleaning fluid inner channel

30 Cleaning fluid injection port 40 Liquid knife mechanism

42 Structural main body 44 Fixed components

46 upper plate 48 lower plate

50 Cleaning fluid inner flow channel 52 Cleaning fluid injection port

54 baffle 60 liquid knife mechanism

62 Structural main body 64 Fixed components

66 upper plate 68 lower plate

70 Cleaning liquid inner flow channel 72 Cleaning liquid injection port

74 baffle 76 deflector

78 Catheter

Detailed ways

Please refer to FIG. 2 and FIG. 3 , FIG. 2 is a schematic diagram of a liquid knife mechanism 40 according to a preferred embodiment of the present invention, and FIG. 3 is a schematic cross-sectional view along A2 and A2' of FIG. 2 . As shown in FIGS. 2 and 3 , the liquid knife mechanism 40 of the present invention includes a structural body 42 and at least one fixing member 44 . Wherein, the structural main body 42 includes an upper plate 46 and a lower plate 48, and a cleaning liquid internal flow channel 50 is defined between the upper plate 46 and the lower plate 48, and the junction of the upper plate 46 and the lower plate 48 has a connecting cleaning liquid inner channel 50. The cleaning liquid injection port 52 of the flow channel 50 . As shown in the figure, the fixing member 44 can be a plurality of screws, and penetrates the upper plate 46 to securely lock the upper plate 46 and the lower plate 48, and a tail end of the fixing member 44 is located in the lower plate 48 without being exposed. Outside the lower plate 48.

It should be noted that, since the present invention arranges a tail end of the fixing member 44 inside the lower plate 48 and does not expose it to the outside of the lower plate 48, when the user uses the liquid knife mechanism 40 to clean the glass substrate, the present invention can avoid The cleaning solution for cleaning the glass substrate, such as clear water, flows out from the gap between the tail end of the fixing member 44 and the lower plate 48 , thereby reducing the probability of water drop marks on the substrate. In addition, in the present invention, a baffle 54 protruding from the front end of the upper plate 46 can also be provided on the upper plate 46 of the structural main body 42 . Therefore, when the user cleans the glass substrate, the present invention can simultaneously prevent the cleaning liquid from flowing out from the gap between the tail end of the fixing member 44 and the lower plate 48, and prevent the cleaning liquid from overflowing from the gap between the top of the fixing member 44 and the upper plate 46. And drip from the front end of the upper plate 46 onto the cleaned glass substrate.

Please refer to FIG. 4 and FIG. 5 , FIG. 4 is a schematic diagram of a liquid knife mechanism 60 according to another embodiment of the present invention, and FIG. 5 is a schematic cross-sectional view along A4 and A4' of FIG. 4 . As shown in FIGS. 4 and 5 , another liquid knife mechanism 60 of the present invention includes a structural body 62 , at least one fixing member 64 and a deflector 76 . Wherein, the structure main body 62 includes an upper plate 66 and a lower plate 68, and a cleaning liquid internal flow channel 70 is defined between the upper plate 66 and the lower plate 68, and the junction of the upper plate 66 and the lower plate 68 has a connecting cleaning liquid inner channel. The cleaning fluid injection port 72 of the flow channel 70 . At the same time, the fixing member 64 can be a plurality of screws, and penetrates the upper plate 66 to securely lock the upper plate 66 and the lower plate 68, and the deflector 76 is arranged on the lower plate 68 to receive dripping water during cleaning. Cleaning fluid. In addition, the liquid knife mechanism 60 may further include a conduit 78 connected to the deflector 76 to guide the cleaning liquid to a receiving device (not shown) for subsequent processing after the deflector 76 receives the cleaning liquid.

Like the previous embodiments, in this embodiment, a baffle 74 protruding from the front end of the upper plate 66 can also be provided on the upper plate 66 of the structural main body 62 . Therefore, when the user cleans the glass substrate, the present invention can prevent the cleaning liquid from flowing out from the gap between the tail end of the fixed member 64 and the lower plate 68, and prevent the cleaning liquid from overflowing from the connection between the top of the fixed member 64 and the upper plate 66. The front end of the upper plate 66 drips onto the glass substrate, and at the same time, the deflector 76 can be used to receive the cleaning liquid flowing out from the gap at the rear end of the liquid knife mechanism 60, so as to prevent the cleaning liquid from dripping from the rear end of the liquid knife mechanism 60 to the glass substrate. on a glass substrate.

In summary, compared with the existing liquid knife mechanism for cleaning glass substrates, the present invention utilizes at least one fixing member, such as a screw, to pass through and securely connect the upper plate and the lower plate of the liquid knife mechanism, and the fixing member A tail end of is located in the lower plate and is not exposed outside the lower plate. In addition, the present invention can additionally set a lower plate of the deflector liquid knife mechanism to receive the cleaning liquid dropped during cleaning. Therefore, when the user uses the liquid knife mechanism to clean the glass substrate, the present invention can effectively prevent the cleaning liquid from flowing out from the gap between the tail end of the fixing member and the lower plate and dripping onto the glass substrate, and at the same time prevent the cleaning liquid from being released by the liquid knife. The rear end of the mechanism drops onto the glass substrate, thereby reducing the chance of water drop marks on the glass substrate.

The above descriptions are only preferred embodiments of the present invention, and all equivalent changes and modifications made according to the claims of the present invention shall fall within the scope of the present invention.

Claims (5)

1. knife mechanism with liquid passage includes:

One main structure body, it includes a upper plate and a lower plate, is limited with a cleaning fluid inner flow passage between this upper plate and this lower plate, and this upper plate has a cleaning fluid jet and is connected this cleaning fluid inner flow passage with the joint of this lower plate; And

At least one fixed component penetrates this upper plate, in order to locking admittedly and to connect this upper plate and this lower plate, and and a tail end of this fixed component be arranged in this lower plate and be not exposed to outside this lower plate.

2. knife mechanism with liquid passage as claimed in claim 1, wherein this fixed component comprises screw.

3. knife mechanism with liquid passage as claimed in claim 1, wherein this main structure body also includes the end that a baffle plate is arranged at this upper plate.

4. knife mechanism with liquid passage as claimed in claim 1 also includes a deflector, is arranged on this lower plate.

5. knife mechanism with liquid passage as claimed in claim 4 also includes a conduit and connects this deflector.

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