CN1881745A - Motor and connector for semiconductor - Google Patents

Abstract

An object of the present invention is to improve a magnetic circuit when a stator core is formed by joining a plurality of split cores formed by splitting. A stator core (31) is formed by joining a yoke portion (22) and a tooth portion (23). Both the yoke portion (22) and the tooth portion (23) are formed by stacking stamped steel plates (26, 27). A compound (30) formed by mixing iron powder into a resin binder is sandwiched between the junction of the yoke (22) and the teeth (23).

Description

Connection devices for motors and semiconductors

technical field

The present invention relates to a motor in which a stator core is formed by joining a plurality of divided iron cores, and more particularly to a motor in which the divided iron core is formed by laminating a plurality of stamped steel plates, and a connection device for semiconductors such as a connector using the motor.

Background technique

Conventionally, there is known a technique in which a stator core is formed by joining a plurality of split cores, and the split core is formed of laminated steel plates (for example, refer to Patent Document 1).

FIG. 16 shows a stator core 3 formed by joining an annular tooth portion 2 to the inner peripheral portion of an annular yoke portion 1 , and a rotor 4 disposed on the inner periphery of the stator core 3 . The rotor 4 is composed of a rotor core 5 and a plurality of permanent magnets 6 arranged on the outer periphery thereof. Both the yoke portion 1 and the teeth portion 2 are formed by laminating a plurality of pressed steel plates 7 and 8 (see FIG. 17 ) and binding them together by riveting or the like. The tooth part 2 is formed by connecting a plurality of teeth 2 a at the head part, and a plurality of recesses 1 a corresponding to the teeth 2 a are provided on the inner peripheral surface of the yoke 1 . In this case, a dimensional tolerance is set for the recess 1a and the tooth 2a so that when the tooth 2a is pressed into the recess 1a, the joint portion of the recess 1a and the tooth 2a is prevented from occurring. askew.

Patent Document 1: Japanese Patent Laid-Open No. 2003-134702

Although the outer surfaces of the yoke 1 and the teeth 2 formed by laminating the stamped steel plates 7 and 8 appear to be smooth curved or flat surfaces macroscopically, in fact, due to the dimensional error of the stamped steel plates 7 and 8 and the time of lamination, deviation, etc., there are minute unevenness. As shown in FIG. 17 , since the above-mentioned dimensional tolerance is set, a slight gap 9 is generated at the joint portion of the yoke portion 1 and the tooth portion 2 . FIG. 17 shows a situation where a gap 9 is formed between some of the steel plates 7 and 8 and the rest of the steel plates 7 and 8 are in close contact.

In the motor having the above structure, a magnetic path is formed that returns to the S pole of the permanent magnet 6 from the N pole of the permanent magnet 6 via the tooth portion 2 , the yoke portion 1 , and the tooth portion 2 . If there is a gap 9 in the middle of such a magnetic circuit, the magnetic resistance of this part will become large. On the other hand, the magnetic resistance is small at the portion where the steel plates 7 and 8 are in close contact with each other. Therefore, there is a problem that the reluctance of the joining portion of the yoke portion 1 and the tooth portion 2 is unevenly distributed in the axial direction and the circumferential direction.

Contents of the invention

In view of the above problems, an object of the present invention is to provide a motor which improves a magnetic circuit when a stator core is formed by joining a plurality of divided cores, and a connecting device for semiconductors such as a connector using the motor.

The motor of the present invention includes: a stator having a stator core formed by joining a plurality of split cores and a stator winding wound on the stator core; and a rotor having permanent magnets for excitation, characterized in that the The bonded portion of the split cores is sandwiched with a mixture composed of fine-grained magnets mixed into a binder.

The connecting device for semiconductor of the present invention has a connecting head that can move up and down for connecting the wire to the electrode of the semiconductor chip, and is characterized in that it includes a swing mechanism for performing the vertical movement of the connecting head, and a A swing motor driving the swing mechanism is a motor having the above-mentioned structure.

According to the present invention, when the split cores are joined to each other, the mixture is filled into the gaps created at the joined portions thereof. Therefore, the magnetic resistance of the joining portion of the split cores can be reduced, and the magnetic resistance of the entire joining portion can be made substantially uniform. Therefore, the effective magnetic flux of the permanent magnet for excitation increases, and the output of the motor can be increased.

According to the connection device for semiconductors of the present invention, since the above-mentioned swing motor with substantially uniform reluctance is used in the swing mechanism of the connection head, the arm portion of the swing arm can move up and down smoothly, so that semiconductors with uniform quality can be produced. chip.

Description of drawings

Fig. 1 is a longitudinal sectional front view showing a part (upper half) of a motor according to a first embodiment of the present invention.

Fig. 2 is a plan view of a stator and a rotor.

Fig. 3 is an enlarged view of joint portions of split cores constituting a stator.

4 is a comparison diagram of the magnetic flux curves with respect to the electrical angle of the motor of the present embodiment and the motor of the conventional example.

Fig. 5 is a diagram corresponding to Fig. 3 showing a second embodiment of the present invention.

Fig. 6 is a diagram corresponding to Fig. 2 showing a third embodiment of the present invention.

Fig. 7 is an external perspective view of a split core.

Fig. 8 is a perspective view showing the positional relationship between the assembly jig and nine split cores.

Fig. 9 is a perspective view when assembled.

FIG. 10 is a graph showing changes in the variable torque of the motor with respect to the rotational angle position.

Fig. 11 is an external perspective view showing the head part of the connector device.

Fig. 12 is a diagram corresponding to Fig. 6 showing a fifth embodiment of the present invention.

Fig. 13 is a diagram corresponding to Fig. 6 showing a sixth embodiment of the present invention.

Fig. 14 is a diagram corresponding to Fig. 6 showing a seventh embodiment of the present invention.

Fig. 15 shows an eighth embodiment of the present invention, and is a plan view showing the positional relationship between an assembly jig, a forming die, and nine split cores.

FIG. 16 is a diagram corresponding to FIG. 2 showing a conventional structure.

FIG. 17 is a diagram corresponding to FIG. 3 .

(Description of component symbols)

11 motor

15 stator

16 rotors

21 permanent magnet for excitation

22 Yoke (split core)

23 Teeth (split core)

25 stator winding

30 mix

31 Stator core

41 split core

42a The inner peripheral end surface of the tooth

44 Assembly jig (forming jig)

51 bonding wire

52 semiconductor chips

52a electrode

53 wire

54 connector

55 connector frame

60 swing motor

61 position sensor

71 concave and convex part

81, 91 convex part

82, 92 Concave

101 Forming die

Detailed ways

A first embodiment of the present invention will be described below with reference to FIGS. 1 to 4 . As shown in FIG. 1, in the motor 11 of the present embodiment, a stator 15 and a rotor 16 are accommodated inside a housing 14. The housing 14 consists of a cylindrical frame 12 having an opening 12a on the left in FIG. A bracket 13 that plugs the opening 12a is formed. Bearings 17, 18 are respectively fixed on the right end surface in Fig. 1 of the frame 12 and the bracket 13.

As shown in FIGS. 1 and 2 , the rotor 16 includes: a rotor core 20 having a shaft 19 rotatably supported by the bearings 17 and 18 ; 6 permanent magnets 21 for excitation. The permanent magnet 21 is configured by arranging N poles and S poles alternately.

On the other hand, the stator 15 includes: an annular yoke portion 22 (corresponding to a split iron core) solidified on the inner peripheral surface of the frame 12 and an annular tooth portion 23 joined to the inner peripheral portion of the yoke portion 22 (corresponding to a split core) and a stator core 31; and a stator winding 25 (only shown in FIG. 1 ) wound around a plurality of teeth 24 included in the tooth portion 23 . The rotor 16 is located at the inner peripheral portion of the stator 15 , and the permanent magnets 21 of the rotor 16 have a small gap with the inner peripheral surfaces of the teeth 23 and are radially opposite.

Both the yoke portion 22 and the teeth portion 23 are formed by laminating a plurality of pressed steel plates 26 and 27 (only shown in FIG. 3 ) and then binding them together by riveting or the like. The inner peripheral surface of the yoke 22 has a plurality of recesses 28 corresponding to the teeth 24. By pressing the outer peripheral end of each tooth 24 into the recesses 28, the yoke 28 and the The teeth 23 engage. Thereby, the recessed part 28 of the yoke part 22 and the outer peripheral end part of the tooth 24 become a joint part.

However, since the yoke portion 22 and the tooth portion 23 are formed by laminating a plurality of stamped steel plates 26, 27, the yoke portion 22 and the tooth portion 22 may be damaged due to the dimensional error of each stamped steel plate 26, 27 and the deviation during lamination. There are many minute irregularities on the outer surface of the tooth portion 23 . Therefore, when the teeth 24 are press-fitted into the recesses 28 of the yoke 22 to engage, gaps are generated at the engaging portions thereof. Therefore, in the present embodiment, the mixture 30 in which fine-grained magnets such as iron powder is mixed into a resin binder is sandwiched between the joint portion of the yoke portion 22 and the teeth portion 23 .

Here, a method of manufacturing the stator 15 having the above configuration will be described. First, after the stator winding 25 is wound around the teeth 24 of the teeth 23 , a thin film is formed by applying or spraying the compound 30 on at least one of the recesses 28 of the yoke 22 or the outer peripheral ends of the teeth 24 .

Next, the outer peripheral ends of the teeth 24 are press-fitted into the recesses 28 using a forming jig (not shown). Thereby, the teeth 24 are firmly crimped in the recesses 28 , thereby engaging the yoke 22 and the teeth 23 . At this time, as shown in FIG. 3 , the mixture 30 is filled into the gap 29 generated at the joint portion of the tooth 24 and the recess 28 .

In the motor 11 adopting the above-mentioned structure, the magnetic flux emitted from the N pole of the permanent magnet 21 provided on the rotor 16 is formed after passing through the tooth portion 23 (teeth 24), the yoke portion 22, and the tooth portion 23 (teeth 24). Return to the magnetic circuit of the S pole of the permanent magnet 21 . At this time, since the mixture 30 containing iron powder is filled in the gap 29 of the joint portion of the tooth portion 23 and the yoke portion 22, the axial direction (the lamination direction of the stamped steel plates 26, 27) and the Radial reluctance increases. Thereby, it is possible to reduce magnetic resistance unevenness at the joining portion of the tooth portion 23 and the yoke portion 22 .

FIG. 4 is a diagram comparing the interlinkage magnetic fluxes of the output stator windings of the motor 11 of the present embodiment and the conventional motor (see FIGS. 16 and 17 ). In FIG. 4 , the horizontal axis represents the electrical angle (deg), and the vertical axis represents the magnetic flux (Wb). As shown in FIG. 4 , compared with the conventional motor, the interlinkage magnetic flux of the motor 11 of this embodiment increases by about 6%. Therefore, compared with the conventional motor, the output of the motor 11 of the present embodiment is increased by about 6%. As a result, the motor efficiency is improved, the power consumption is reduced, and the size of the motor 11 can also be reduced.

By filling the gap 29 at the joint portion of the tooth portion 23 and the yoke portion 22 with the compound 30, the unevenness of the magnetic flux at the joint portion can also be reduced. Therefore, an induced voltage waveform with less harmonic components can be obtained, and torque ripple can be suppressed to be small.

Since the magnetic resistance at the joint portion can be reduced without depending on the manufacturing accuracy of the yoke portion 22 and the tooth portion 23, the assembly workability of the yoke portion 22 and the tooth portion can be improved.

FIG. 5 shows a second embodiment of the present invention for explaining differences from the first embodiment. This second embodiment is suitable for the case where punched steel plates constituting the split cores are stacked obliquely, and the manufacturing method of the stator core is different from that of the first embodiment.

FIG. 5 shows a form in which punched steel plates 27 constituting tooth portions 23 serving as split cores are stacked obliquely. On the other hand, the yoke 22 is formed by laminating pressed steel plates 26 approximately vertically. As shown in FIG. 5 , if the stamped steel plates 27 are stacked obliquely, the gap 29 at the joint portion of the tooth portion 23 and the yoke portion 22 goes from one side to the other side in the stacking direction (from the upper side to the lower side in FIG. 5 ). Gradually get bigger. Therefore, the stator core 31 is manufactured as follows.

First, a film is formed on the outer peripheral end of the tooth portion 23 by coating or spraying the mixture 30, and then the film is cured by thermoforming. At this time, the thin film is formed in such a manner as to correct the inclined lamination state of the pressed steel sheets 27 . Next, after the stator winding 25 is wound around the tooth portion 23 , the tooth portion 23 is pressed into the concave portion 28 of the yoke portion 22 . As a result, the mixture 30 can be used to fill the gap 29 generated at the joint portion of the tooth portion 23 and the yoke portion 22 due to the oblique lamination of the punched steel plates 27 . Thus, as in the first embodiment, in this embodiment as well, the improvement of the motor output and the improvement of the motor efficiency can be realized, and the reduction of power consumption and the miniaturization of the motor can be realized.

In the present embodiment, since the mixture 30 is cured, the tooth portion 23 can be easily pressed into the concave portion 28 of the yoke portion 22 .

6 to 9 show the third embodiment of the present invention, which are used to illustrate the differences from the first embodiment. As shown in FIG. 6 , a stator core 31 of the third embodiment is composed of nine split cores 41 and a compound 30 . Each split core 41 is a shape in which the stator core 31 is divided into 9 parts in the circumferential direction, and each has a tooth 42. As shown in FIGS. part 43 and one tooth 42. Each of the split cores 41 is formed by stacking a plurality of pressed steel plates and binding them together by caulking or the like. The split cores 41 are arranged in an annular shape with the teeth 42 located on the inner periphery, and the compound 30 is filled in the gaps at the junctions between the circumferential end faces 43a of the yokes 43 of the adjacent split cores 41 . The third coil is formed by winding an unillustrated stator winding 25 on each tooth 42 of the stator core 31.

The stator 15 of the embodiment.

Here, a method of manufacturing the stator 15 will be described with reference to FIGS. 8 and 9 . FIG. 8 shows an assembly jig (forming jig) 44 and nine split cores 41 used in manufacturing the stator 15 . The assembly jig 44 has a cylindrical shape with a high degree of perfect circle accuracy. When the split iron core 41 is arranged in a ring shape, the assembly jig 44 is almost tightly accommodated in the cylindrical shape formed by the inner peripheral end surfaces 42a of the nine teeth 42. in space.

The stator 15 is manufactured as follows. First, the stator winding 25 is wound on each tooth 42 of the nine split cores 41 . Next, the compound 30 is applied or sprayed on both end faces 43 a of each split core 41 to form a thin film of the compound 30 on both end faces 43 a of each split core 41 . Next, as shown in FIG. 9 , the inner peripheral end surfaces 42 a of the teeth 42 of the nine split cores 41 are crimped to the outer peripheral surface 44 a of the assembly jig 44 . As a result, the end faces 43 a of adjacent split cores 41 come into contact with each other. In this way, since the mixture 30 is filled in the gap at the joint portion between the end faces 43a of the split cores 41, the gap between the end faces 43a of the split cores 41 disappears. When the mixture 30 is solidified while filling the gap, the stator 15 is manufactured.

The third embodiment can achieve the following effects. Since the mixture 30 is filled in the gaps at the joint portions of the split cores 41 , gaps in the axial and circumferential directions disappear, thereby suppressing an increase in magnetic resistance. By using the assembly jig 44, the accuracy of the perfect circle of the stator 15 can be improved.

10 is a motor (hereinafter referred to as "implementation product") made of a stator 15 manufactured by using an assembly jig 44 with high precision of a perfect circle and a motor (hereinafter referred to as an "implementation product") made of a stator manufactured by not using an assembly jig 44 and a mixture 30 (hereinafter This is a graph comparing the characteristics of variable torques (called "existing products"). The horizontal axis in FIG. 10 represents the rotational angle position of the rotor 16, and the vertical axis represents the variable torque. The solid line A shows the change in the variable torque of the implemented product, and the broken line B shows the change in the variable torque of the conventional product. As shown in Figure 10, since the stator 15 of the embodiment has high precision of a perfect circle, and the distance between the rotor 16 and the inner peripheral end surface 42a of each tooth 42 is equal, the magnetic resistance can be small and substantially uniform, thereby reducing the magnetic resistance. Variable torque. On the other hand, since the precision of the perfect circle of the stator of the conventional product is low, the reluctance is not uniform, resulting in an increase in the variable torque.

FIG. 11 shows a fourth embodiment of the present invention, showing an example in which the implemented product shown in the third embodiment is applied to a connecting device for semiconductors.

The connecting device for semiconductor is a device for connecting the electrode 52a of the semiconductor chip 52 to the wire 53 by bonding wire 51. FIG. 11 shows the appearance of the connector part of the connecting device for semiconductor. The connector 54 is constituted by setting the swing arm 56 on the connector frame 55 so as to be rotatable up and down, and the connector 54 is mounted and fixed on a horizontal plane that can move in the X direction and the Y direction. Controlled X-Y platform 57. An X-axis motor 58 for moving the joint head frame 55 in the X direction and a Y-axis motor 59 for moving the connector frame 55 in the Y direction are arranged on the X-Y stage 57 .

The swing arm 56 is moved up and down by the swing motor 60 . The swing motor 60 is constituted by the stator 15 shown in the third embodiment, and moves the swing arm 56 up and down within a predetermined angular range by reversing the direction of energization to the stator winding 25 . The rotation angle of the swing motor 60 is detected by a position sensor 61 .

In the swing arm 56, an arm portion 56b is fixed to a holding portion 56a, a connection tool 56c is provided at a front end portion of the arm portion 56b, and a bonding wire 51 is passed through the connection tool 56c. Using this connection tool 56c, the bonding wire 51 is bonded to the electrode 52a and the lead 53 of the semiconductor chip 52. As shown in FIG.

Effects of the fourth embodiment are as follows. Since the swing motor 60 is constituted by the stator 15 shown in the third embodiment, the variable torque can be reduced. Therefore, the arm portion 56b can be moved up and down smoothly, and a high-precision connecting operation can be performed. Thereby, the bonding state of the electrode 52 a of the semiconductor chip 52 and the bonding wire 51 and the bonding state of the wire 53 and the bonding wire 51 can be made uniform, and the quality of the semiconductor chip 52 can be made uniform.

Fig. 12 shows the fifth embodiment of the present invention, which is used to explain the differences from the third embodiment. The same parts as those of the third embodiment are marked with the same symbols.

The stator core 31 of the fifth embodiment has a plurality of sawtooth-shaped minute unevenness portions 71 on both end surfaces 43a of each split core 41 that can be engaged with a bonding partner.

As in the third embodiment, the assembly jig 44 is also used to manufacture the stator 15 in the fifth embodiment. That is, the stator winding 25 is wound on each tooth 42, and the compound 30 is applied or sprayed on both end surfaces 43a of each split core 41, and then the inner peripheral end surfaces 42a of the nine teeth 42 are crimped to the mounting jig 44. on the outer peripheral surface 44a. As a result, the plurality of sawtooth-shaped fine unevenness portions 71 on both end surfaces 43 a of adjacent split cores 41 mesh with each other. In this state, split core 41 is pressurized from outer peripheral surface 43 . As a result, the plurality of saw-tooth-shaped fine unevenness portions 71 are crushed, and the joined portions of the split cores 41 are brought into close contact.

Thereby, the gap between the split iron cores 41 can be made extremely small, and the jiggle torque can be further reduced.

Fig. 13 shows the sixth embodiment of the present invention, which is used to explain the differences from the third embodiment. As shown in FIG. 13, with regard to the split core 41 of the sixth embodiment, one end face 43a of the two end faces 43a of the joined portions of the joined split iron cores 41 has a stepped convex portion 81, and the other end face 43a has a A concave portion 82 that can fit into the stepped convex portion 81 . The stator core 31 is composed of a plurality of split cores 41 and a compound 30 , and the compound 30 is filled in a gap between a fitting portion of one split core 41 and a split core 41 to be joined. The convex portion 81 and the concave portion 82 are configured such that the stator core 31 is formed into a perfect circle when the convex portion 81 of one split core 41 is fitted into the concave portion 82 of the joining partner.

The sixth embodiment described above can achieve the following effects. When the split cores 41 having protrusions 81 and recesses 82 are joined to each other, the protrusions 81 of one split core 41 fit into the recesses 82 of the joining partner, and a perfect circle can be easily obtained. High split core 41 .

Fig. 14 shows a seventh embodiment of the present invention, which is different from the sixth embodiment in the following points. That is, on one end surface 43a of the split core 41 of the seventh embodiment, a semicircular convex portion 91 is provided instead of the stepped convex portion 81, and a semicircular convex portion 91 is provided on the other end surface 43a instead of the concave portion 82. A semicircular concave part 92 that can fit into the semicircular convex part 91 .

Like the above-mentioned sixth embodiment, the seventh embodiment can easily obtain the stator core 31 with high perfect circle accuracy.

Fig. 15 shows the eighth embodiment of the present invention for explaining the differences from the third embodiment. The manufacturing method of the stator 15 in the eighth embodiment is different from that of the third embodiment. First, at the inner center of the cylindrical forming die 101 , a cylindrical mounting jig 44 is disposed concentrically with the forming die 101 . Next, the stator winding 25 (not shown) is wound around the teeth 42 of each split iron core 41, and then, between the forming die 101 and the assembly jig 44, the inner peripheral end surface 42a of the tooth 42 of each split iron core 41 is The form contacting the outer peripheral surface 44a of the assembly jig 44 is arrange|positioned in annular shape. Then, the mixture 30 is injected between the molding die 101 and the outer peripheral surface 43b of the yoke 43 of the split core 41, and the mixture 30 is cured.

With the stator 15 thus produced, the mixture 30 flows into the gaps of the joined portions of the plurality of split cores 41 . Therefore, the magnetic resistance of the joining portion can also be reduced in this embodiment.

The present invention is not limited to the above-described embodiments, and may be modified or expanded as described below.

In the third and fifth to eighth embodiments, the divided core 41 is formed by dividing the stator core 31 into nine parts in the circumferential direction, but the divided core can only be formed by dividing the stator core into a plurality of parts in the circumferential direction. That's it.

In the fifth embodiment, after the nine split cores 41 are crimped to the outer peripheral surface 44a of the assembly jig 44, the split cores 41 are pressurized from the outer surface 43b, but if the unevenness of the adjacent split cores 41 If the parts 71 are engaged with each other, they can be in a sufficiently close contact state, and the pressing process can also be omitted.

In the sixth and seventh embodiments, one convex portion and one concave portion are respectively provided on the end surface 43 a of the split core 41 , but two or more concave portions may be provided.

It is also possible to provide serrated concave-convex portions 71, stepped convex portions 81 and concave portions 82, or semicircular-shaped convex portions 91 and concave portions 92 on the joint portion of the tooth portion 23 and the yoke portion 22 shown in the first embodiment. .

The stator 15 shown in the sixth and seventh embodiments can also be manufactured using the assembly jig 44 or the forming die 101 like the third and eighth embodiments.

The motor 11 shown in the first embodiment can also be used as the swing motor 60 of the connection device for semiconductors. The motor of the present invention can also be used as the X-axis motor 58 and the Y-axis motor 59 of the semiconductor connection device. With this structure, the connector frame 55 can be moved with high precision.

The present invention is not limited to inner rotor type motors, but can also be applied to outer rotor type motors.

Claims (11)

1, a kind of motor comprises: stator, this stator have unshakable in one's determination engaged the stator core that forms and be wound on stator winding in the described stator core a plurality of cutting apart; And have the rotor of excitation with permanent magnet, it is characterized in that,

Sandwich by granuliform magnet being sneaked into the mixture that constitutes in the adhesive in the described bonding part of cutting apart iron core.

2, motor as claimed in claim 1 is characterized in that, cuts apart iron core and constitutes: with as engaging on cutting apart of object of the bonding part that engages unshakable in one's determination behind the coating mixture, this cuts apart the unshakable in one's determination and described object joint that engages.

3, motor as claimed in claim 1 or 2 is characterized in that, stator core is by engaging and form a plurality of iron cores of cutting apart that stator core are divided into tooth portion and yoke portion.

4, motor as claimed in claim 1 or 2 is characterized in that, stator core will be by forming along a plurality of iron core joints of cutting apart of circumferentially cutting apart stator core.

5, as each described motor in the claim 1 to 4, it is characterized in that, on each bonding part of cutting apart iron core that engages, be respectively arranged with a plurality of small jogs, with described when cutting apart unshakable in one's determination the joint, a side is cut apart jog unshakable in one's determination and is meshed as the jog of cutting apart iron core that engages object.

6, motor as claimed in claim 5 is characterized in that, while stator core is the jog of engagement to be close to engage to cut apart iron core and constitute.

7, as each described motor in the claim 1 to 4, it is characterized in that, each the unshakable in one's determination bonding part of cutting apart that engages is provided with at least one recess or protuberance, is engaging describedly when cutting apart iron core, and a side is cut apart recess unshakable in one's determination with chimeric as the protuberance of cutting apart iron core that engages object.

8, as each described motor in the claim 1 to 7, it is characterized in that, cut apart iron core and be to use forming jig to engage.

9, motor as claimed in claim 4 is characterized in that, constitutes: with a plurality of cut apart unshakable in one's determination with circular being configured after, interior all side end faces of respectively cutting apart tooth unshakable in one's determination are abutted on the columned assembling jig.

10, motor as claimed in claim 5, it is characterized in that, stator is so to constitute: at the internal configurations of cylindric finishing die and the described finishing die cylindric assembling jig with core, between described finishing die and described assembling jig, become circular with respectively cutting apart interior all side end faces unshakable in one's determination with the state configuration of the outer peripheral face butt of described assembling jig, then at finishing die with cut apart between the yoke portion unshakable in one's determination the injection mixture and make mixture solidified with tooth.

11, a kind of connector for semiconductor, has the connector that moves up and down on the electrode that is used to make lead be connected to semiconductor chip, it is characterized in that, comprise being used to carry out the swing mechanism that moves up and down of described connector and the rotary actuator that is used to drive this swing mechanism that described rotary actuator is each described motor in the claim 1 to 10.

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