CN1862329A - Fabricating method of flexible display - Google Patents
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Abstract
一种柔性显示器的制造方法包括步骤为:设置粘接层、第一钝化层和第二钝化层,所述粘接层包括位于支撑层的第一表面上的第一粘接材料、位于支撑层第二表面的第二粘接材料以及环绕第二粘接材料的边缘第三粘接材料的粘接层,其中第二粘接材料的粘接强度低于第一粘接材料的粘接强度,第三粘接材料的粘接强度高于第二粘接材料的粘接强度;第一钝化层粘附到支撑层的第一表面上,在二者之间设置有第一粘接材料;以及第二钝化层粘附到支撑层的第二表面上,在二者之间设置有第二粘接材料和第三粘接材料;从粘接层上剥离第一钝化层;将刚性基板粘附到第一粘接材料上;从粘接层上剥离第二钝化层;并将柔性基板粘附到第二和第三粘接材料上。
A method for manufacturing a flexible display includes the steps of: setting an adhesive layer, a first passivation layer and a second passivation layer, the adhesive layer includes a first adhesive material on a first surface of a support layer, an adhesive layer of a second adhesive material on the second surface of the support layer and a third adhesive material surrounding an edge of the second adhesive material, wherein the second adhesive material has a lower bond strength than the first adhesive material Strength, the bonding strength of the third bonding material is higher than the bonding strength of the second bonding material; the first passivation layer is adhered to the first surface of the support layer with the first bonding between the two material; and a second passivation layer adhered to the second surface of the support layer with a second bonding material and a third bonding material disposed therebetween; peeling off the first passivation layer from the bonding layer; The rigid substrate is adhered to the first adhesive material; the second passivation layer is peeled from the adhesive layer; and the flexible substrate is adhered to the second and third adhesive materials.
Description
本申请要求享有2005年5月13日在韩国递交的申请号为P2005-40240和2005年7月14日在韩国递交的申请号为P2005-63930的申请的权益,在此引用其全部内容作为参考。This application claims the benefit of application number P2005-40240 filed in Korea on May 13, 2005 and application number P2005-63930 filed in Korea on July 14, 2005, the entire contents of which are incorporated herein by reference .
技术领域technical field
本发明涉及一种柔性显示器,特别是涉及一种在柔性显示器制造过程中防止基板脱落的制造方法。The invention relates to a flexible display, in particular to a manufacturing method for preventing a substrate from falling off during the manufacturing process of the flexible display.
背景技术Background technique
近来显示器市场变化很快,并且中心位置已经由平板显示(FPD)器件占据。很容易将该FPD器件制造为大尺寸、薄而轻的显示器件。该FPD器件包括液晶显示器(LCD)、等离子体显示面板(PDP)、有机电致发光显示器(OLED)等。但是,现有的液晶显示器、等离子体显示面板、有机电致发光显示器均由玻璃基板构成,由于其不具有柔性从而限制了其应用。Recently, the display market has changed rapidly, and the central position has been taken by flat panel display (FPD) devices. It is easy to manufacture the FPD device as a large-sized, thin and light display device. The FPD device includes a liquid crystal display (LCD), a plasma display panel (PDP), an organic electroluminescent display (OLED), and the like. However, existing liquid crystal displays, plasma display panels, and organic electroluminescent displays are all made of glass substrates, which limit their applications due to their inflexibility.
因此,已经采用具有诸如塑料或者箔之类的柔性材料构成的基板制造可以弯曲的柔性显示器,并且该显示器已经迅速上升为替代现有的不具有柔性的玻璃基板的下一代显示器。柔性显示器通常称为“可弯曲显示器”或者“可卷曲显示器”。实现柔性显示器的方法可以分为两种:采用现有显示器的方法和采用电子纸的方法。Accordingly, flexible displays that can be bent have been fabricated using substrates composed of flexible materials such as plastic or foil, and have rapidly risen as next-generation displays replacing existing glass substrates that do not have flexibility. Flexible displays are often referred to as "bendable displays" or "rollable displays". Methods for realizing flexible displays can be classified into two types: methods using existing displays and methods using e-paper.
采用现有显示器件的方法为使薄膜晶体管液晶显示器件、有机电致发光显示器件材料等柔性的方法。相比之下,关于采用电子纸的方法,已经开始研究使用胆固醇液晶、使用微胶囊、电泳和由静电荷充电的半球状扭曲球(twistball)的电泳显示器显示器件。该电子纸的缺点在于很难实现全彩化并且由于工作速度很慢造成在实现运动图像方面具有局限。The method of using the existing display device is to make the thin film transistor liquid crystal display device, organic electroluminescent display device material and the like flexible. In contrast, with regard to methods employing electronic paper, studies have been started on electrophoretic display devices using cholesteric liquid crystals, using microcapsules, electrophoresis, and hemispherical twistballs charged by electrostatic charges. The disadvantage of this electronic paper is that it is difficult to achieve full color and has limitations in realizing moving images due to the slow working speed.
因此,近来很多调查的焦点集中于采用现有显示器件实现柔性显示器件的研究。为此,研究的主题在于制造具有柔性的现有显示器件——包括显示部分、驱动部分和开关部分——的核心部分中的显示部分和开关部分。Therefore, the focus of many recent investigations has been on the study of implementing flexible display devices using existing display devices. For this reason, the subject of research is to fabricate a display portion and a switch portion in the core portion of an existing display device having flexibility, including a display portion, a driving portion, and a switch portion.
具体地,为了对于柔性显示器件的显示部分赋予柔性,应该使用柔性基板。但是,在显示器件的制造工序中应该准确地形成电极,因此基板应该起到充分的支撑作用。为此,应该将其粘附在刚性基板上。在粘附刚性基板时,使用即可以粘附又可以拆离的粘接剂,在柔性显示器的制造过程中当刚性基板和柔性基板彼此粘附时由于粘接剂可能发生分离因此存在问题。Specifically, in order to impart flexibility to a display portion of a flexible display device, a flexible substrate should be used. However, the electrodes should be accurately formed in the manufacturing process of the display device, and thus the substrate should play a sufficient supporting role. For this, it should be glued to a rigid substrate. In adhering a rigid substrate, using an adhesive that is both attachable and detachable, there is a problem in the manufacturing process of a flexible display because the adhesive may separate when the rigid substrate and the flexible substrate are adhered to each other.
发明内容Contents of the invention
因此,本发明涉及一种柔性显示器的制造方法,能够基本上克服因现有技术的局限和缺点带来的一个或多个问题。Accordingly, the present invention is directed to a method of fabricating a flexible display that substantially overcomes one or more of the problems due to limitations and disadvantages of the related art.
本发明的目的在于提供一种在柔性显示器制造过程中防止基板脱落的柔性显示器制造方法。The object of the present invention is to provide a flexible display manufacturing method that prevents the substrate from falling off during the flexible display manufacturing process.
本发明的附加优点和特征将在后面的描述中得以阐明,通过以下描述,将使它们对于本领域普通技术人员在某种程度上显而易见,或者可通过实践本发明来认识它们。本发明的这些和其他优点可通过书面描述及其权利要求以及附图中具体指出的结构来实现和得到。Additional advantages and features of the invention will be set forth in the description which follows, and in part will become apparent to those skilled in the art from the description, or may be learned by practice of the invention. These and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
为了实现这些和其它优点,按照本发明的目的,作为具体和广义的描述,柔性显示器的制造方法包括设置粘接层、第一钝化层和第二钝化层,所述粘接层包含位于支撑层的第一表面上的第一粘接材料、位于支撑层第二表面的第二粘接材料以及环绕第二粘接材料的边缘第三粘接材料的粘接层,其中第二粘接材料的粘接强度低于第一粘接材料的粘接强度,第三粘接材料的粘接强度高于第二粘接材料的粘接强度;第一钝化层粘附到支撑层的第一表面上,在二者之间设置有第一粘接材料;并第二钝化层粘附到支撑层的第二表面上,在二者之间设置有第二粘接材料和第三粘接材料;从粘接层上剥离第一钝化层;将刚性基板粘附到第一粘接材料上;从粘接层上剥离第二钝化层;并将柔性基板粘附到第二和第三粘接材料上。To achieve these and other advantages, and in accordance with the purposes of the present invention, as specifically and broadly described, a method of manufacturing a flexible display includes providing an adhesive layer, a first passivation layer, and a second passivation layer, the adhesive layer comprising an adhesive layer of a first adhesive material on the first surface of the support layer, a second adhesive material on the second surface of the support layer, and a third adhesive material surrounding the edge of the second adhesive material, wherein the second adhesive The bonding strength of the material is lower than that of the first bonding material, and the bonding strength of the third bonding material is higher than that of the second bonding material; the first passivation layer is adhered to the second layer of the support layer. On one surface, a first bonding material is arranged between the two; and the second passivation layer is adhered to the second surface of the support layer, and a second bonding material and a third bonding material are arranged between the two. peeling the first passivation layer from the bonding layer; attaching the rigid substrate to the first bonding material; peeling the second passivation layer from the bonding layer; and adhering the flexible substrate to the second and on the third bonding material.
另一方面,柔性显示器的制造方法包括步骤为设置粘接层、第一钝化层和第二钝化层,所述粘接层包含位于支撑层的第一表面上的第一粘接材料、位于支撑层第二表面的第二粘接材料以及位于第二粘接材料上粘接强度大于第二粘接材料的第三粘接材料的粘接层,其中第二粘接材料的粘接强度低于第一粘接材料的粘接强度;第一钝化层粘附到支撑层的第一表面上,在二者之间设置有第一粘接材料;并第二钝化层粘附到支撑层的第二表面上,在二者之间设置有第二粘接材料和第三粘接材料;从粘接层上剥离第一钝化层;将刚性基板粘附到第一粘接材料上;从粘接层上剥离第二钝化层;并将柔性基板粘附到第二和第三粘接材料上。In another aspect, a method of manufacturing a flexible display includes the steps of providing an adhesive layer, a first passivation layer, and a second passivation layer, the adhesive layer comprising a first adhesive material on a first surface of a support layer, The second adhesive material located on the second surface of the support layer and the adhesive layer located on the second adhesive material with a third adhesive material whose adhesive strength is greater than that of the second adhesive material, wherein the adhesive strength of the second adhesive material lower than the bonding strength of the first bonding material; the first passivation layer is adhered to the first surface of the support layer with the first bonding material disposed therebetween; and the second passivation layer is adhered to On the second surface of the support layer, a second adhesive material and a third adhesive material are disposed therebetween; peeling off the first passivation layer from the adhesive layer; adhering the rigid substrate to the first adhesive material peeling off the second passivation layer from the adhesive layer; and adhering the flexible substrate to the second and third adhesive materials.
另一方面,柔性显示器的制造方法包括步骤为设置粘接层、第一钝化层和第二钝化层,所述粘接层包含位于支撑层的第一表面上的第一粘接材料、位于支撑层第二表面的第二粘接材料的粘接层,其中第二粘接材料的粘接强度低于第一粘接材料的粘接强度;第一钝化层粘附到支撑层的第一表面上,在二者之间设置有第一粘接材料;并且第二钝化层粘附到支撑层的第二表面上,在二者之间设置有第二粘接材料;从粘接层上剥离第一钝化层;将刚性基板粘附到第一粘接材料上;从粘接层上剥离第二钝化层;在第二粘接材料上形成粘接强度高于第二粘接材料的第三粘接材料;并将柔性基板粘附到第二和第三粘接材料上。In another aspect, a method of manufacturing a flexible display includes the steps of providing an adhesive layer, a first passivation layer, and a second passivation layer, the adhesive layer comprising a first adhesive material on a first surface of a support layer, An adhesive layer of a second adhesive material on the second surface of the support layer, wherein the adhesive strength of the second adhesive material is lower than the adhesive strength of the first adhesive material; the first passivation layer is adhered to the support layer On the first surface, a first bonding material is arranged between the two; and the second passivation layer is adhered to the second surface of the support layer, and a second bonding material is arranged between the two; from the adhesive Peel off the first passivation layer on the bonding layer; adhere the rigid substrate to the first adhesive material; peel off the second passivation layer from the adhesive layer; form a higher bond strength on the second adhesive material than the second a third bonding material of bonding material; and adhering the flexible substrate to the second and third bonding materials.
另一方面,柔性显示器的制造方法包括形成具有第一凹槽和形成于第一凹槽边缘下部的第二凹槽的第一和第二夹具基板;在第二凹槽涂布粘接剂;将第一和第二柔性基板固定到第一凹槽和粘接剂上;在第一柔性基板上制造上阵列基板并在第二柔性基板上制造下阵列基板;将上阵列基板粘接到下阵列基板上并在二者之间注入液晶;从第一第二夹具基板上剥离第一和第二柔性基板。In another aspect, the method for manufacturing a flexible display includes forming first and second jig substrates having a first groove and a second groove formed at a lower portion of an edge of the first groove; coating an adhesive on the second groove; fixing the first and second flexible substrates to the first groove and the adhesive; manufacturing an upper array substrate on the first flexible substrate and manufacturing a lower array substrate on the second flexible substrate; bonding the upper array substrate to the lower Injecting liquid crystals on and between the array substrates; peeling off the first and second flexible substrates from the first and second fixture substrates.
应该理解,上面的概括性描述和下面的详细描述都是示意性和解释性的,意欲对本发明的权利要求提供进一步的解释。It is to be understood that both the foregoing general description and the following detailed description are schematic and explanatory and are intended to provide further explanation of the claims of the present invention.
附图说明Description of drawings
本申请所包括的附图用于提供对本发明的进一步理解,并且包括在该申请中并且作为本申请的一部分,示出了本发明的实施方式并且连同说明书一起用于解释本发明的原理。在附图中:The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiments of the invention and together with the description serve to explain the principle of the invention. In the attached picture:
图1A到1C所示为柔性显示器制造方法示图;1A to 1C are diagrams showing a method of manufacturing a flexible display;
图2A到2C所示为粘接工序示图;2A to 2C are diagrams illustrating the bonding process;
图3A到3E所示为上阵列基板制造方法示图;3A to 3E are diagrams showing a manufacturing method of an upper array substrate;
图4A到4D所示为下阵列基板制造方法示图;4A to 4D are diagrams showing a manufacturing method of the lower array substrate;
图5A和5B所示为根据本发明第一示例性实施方式的粘接结构图;5A and 5B are diagrams showing a bonding structure according to a first exemplary embodiment of the present invention;
图6所示为根据本发明第二示例性实施方式的粘接结构图;Fig. 6 is a bonding structure diagram according to a second exemplary embodiment of the present invention;
图7A和7B所示为根据本发明第三示例性实施方式的柔性显示器粘接工序示图;7A and 7B are diagrams illustrating a bonding process of a flexible display according to a third exemplary embodiment of the present invention;
图8A到8C所示为根据本发明第四示例性实施方式的柔性显示器粘接工序示图;8A to 8C are diagrams illustrating a bonding process of a flexible display according to a fourth exemplary embodiment of the present invention;
图9所示为柔性显示器部分制造方法示图;Fig. 9 is a diagram showing a part of the manufacturing method of the flexible display;
图10A和10B所示为根据本发明第四示例性实施方式的柔性显示器剥离工序图;以及10A and 10B are diagrams showing a peeling process of a flexible display according to a fourth exemplary embodiment of the present invention; and
图11所示为有机电致发光显示器件截面结构简图。Fig. 11 is a schematic cross-sectional structure diagram of an organic electroluminescent display device.
具体实施方式Detailed ways
现在要详细说明本发明的最佳实施方式,所述实施方式的实施例示于附图中。在附图中,为了帮组理解本发明放大了要显示的具体区域的厚度。以下将参照图1A到11说明本发明的示例性实施方式。Reference will now be made in detail to the preferred mode of carrying out the invention, examples of which are illustrated in the accompanying drawings. In the drawings, the thicknesses of specific regions to be shown are exaggerated in order to facilitate understanding of the present invention. An exemplary embodiment of the present invention will be described below with reference to FIGS. 1A to 11 .
如图1A到1C所示,根据本发明的柔性液晶显示器的制造工序主要分为基板粘接工序(S1)、上阵列基板制造工序(S2)、下阵列基板制造工序(S3)、液晶工序(S4)、剥离工序(S5)和模块工序(S6)。基板粘接工序S1为用于将柔性基板45粘接到刚性基板47的工序,其中该柔性基板45向显示器件提供柔韧性而刚性基板47提供支撑从而准确执行电极形成过程。这里,该刚性基板47由玻璃基板形成并且柔性基板45由具有高耐热特性的塑料基板形成。As shown in FIGS. 1A to 1C, the manufacturing process of the flexible liquid crystal display according to the present invention is mainly divided into a substrate bonding process (S1), an upper array substrate manufacturing process (S2), a lower array substrate manufacturing process (S3), a liquid crystal process ( S4), peeling process (S5) and module process (S6). The substrate bonding process S1 is a process for bonding the
参照图2A到图2C对基板粘接工序(S1)进行详细说明。上、下阵列基板制造工序(S2,S3)为用于形成R、G、B像素和主电极等的工序。以下将在图3A到4D中对上、下阵列基板制造工序(S2,S3)进行详细说明。液晶工序(S4)为将在上、下阵列基板制造工序(S2,S3)中制造的两个基板粘接在一起的工序,并将液晶注入其液晶层空间49。剥离工序(S5)为剥离经过液晶工序(S4)上/下部分的柔性基板45和刚性基板47的工序。The substrate bonding step ( S1 ) will be described in detail with reference to FIGS. 2A to 2C . The upper and lower array substrate manufacturing steps (S2, S3) are steps for forming R, G, B pixels, main electrodes, and the like. The manufacturing steps ( S2 , S3 ) of the upper and lower array substrates will be described in detail below in FIGS. 3A to 4D . The liquid crystal step ( S4 ) is a step of bonding the two substrates manufactured in the upper and lower array substrate manufacturing steps ( S2 , S3 ) together, and injecting liquid crystal into the liquid
为了详细说明剥离工序(S5),如图1B所示,剥离粘接到具有低粘接强度的粘接表面上的柔性基板45。然后,如图1C所示,剥离粘接到具有高粘接强度粘接表面上的刚性基板47。在图1B和1C中,未示出在上/下阵列基板工序(S2,S3)之后形成于柔性基板45上的电极和滤色片。模块工序(S6)为通过在完成S1到S5工序的面板上执行粘接偏光器并安装驱动电路的工序来完成模块的工序。To describe the peeling process ( S5 ) in detail, as shown in FIG. 1B , the
以下通过参照图2A到2C讨论基板粘接工序。The substrate bonding process is discussed below by referring to FIGS. 2A to 2C.
如图2A-2C所示,将提供支撑从而精确执行电极形成的刚性基板47和为显示器提供柔韧性的柔性基板45粘接到粘接层1上。As shown in FIGS. 2A-2C , a
如图2A所示,该粘接层1包括支撑层1b和粘接到支撑层1b的第一表面和第二表面上的粘接材料1a和1c。该支撑层1b位于支撑层1的中间并用来支撑粘接材料1a、1c。该支撑层1b为具有极佳耐热性的聚合体材料,该材料主要由聚酰亚胺PI构成。As shown in FIG. 2A, the
粘接材料1a、1c彼此相对设置,在二者之间设置有支撑层1b。该粘接材料1a、1c由具有极佳耐热性的材料形成并主要压克力树脂或硅基材料构成。The
可以形成粘接刚性基板47的第一粘接材料1a和粘接柔性基板45的第二粘接材料1c的粘接强度从而根据粘接材料1a和1c的成分强度变强或者变弱。在图2A中,第二粘接材料1c具有低于第一粘接材料1a的粘接强度。粘接层1由第一和第二钝化层11a和11b覆盖,该钝化层截断与外界的接触。The adhesive strength of the first
参照图2B,在基板粘接工序(S1)中,剥离第一钝化层11a并将刚性基板47粘接到第一粘接材料1a上。如图2C所示,在基板粘接工序(S1)中,在剥离粘接层1的第二钝化层11b后,将柔性基板45粘接到第二粘接材料1c上。通过第一粘接材料1a和第二粘接材料1c的双粘接强度形成粘接层1目的在于在执行如图1B和1C所示的剥离工序(S5)时逐步剥离柔性基板45和刚性基板47。Referring to FIG. 2B, in the substrate bonding process (S1), the
在上/下阵列基板工序(S2,S3)为形成基本电极的工序。该下阵列基板包括多条信号线、薄膜晶体管和散布于其上用于定向液晶的定向层。上阵列基板包括用于实现彩色的滤色片、防止漏光的黑矩阵和散布于其上用于定向液晶的定向层。The upper/lower array substrate process (S2, S3) is a process of forming basic electrodes. The lower array substrate includes a plurality of signal lines, thin film transistors and alignment layers scattered thereon for aligning liquid crystals. The upper array substrate includes a color filter for realizing color, a black matrix for preventing light leakage, and an alignment layer scattered thereon for aligning liquid crystals.
图3A到3E所示为上阵列基板制造工序(S2)的分步示图。3A to 3E are step-by-step diagrams showing the manufacturing process (S2) of the upper array substrate.
首先,如图3A所示,在前述的基板粘接工序(S1)之后在第一柔性基板45a上沉积诸如不透明金属或者不透明树脂的不透明材料后,通过光刻工序和蚀刻工序构图有机材料,从而形成黑矩阵3。该不透明金属通常为铬,并且不透明树脂通常为有机材料。如图3B所示,在形成有黑矩阵3的第一柔性基板45a上沉积红树脂后,通过光刻工序和蚀刻工序构图该红树脂,从而形成红滤色片R。如图3C所示,在形成有红滤色片R的第一柔性基板45a上沉积绿树脂后,通过光刻工序和蚀刻工序构图该绿树脂,从而形成绿滤色片G。如图3D所示,在形成有绿滤色片G的第一柔性基板45a上沉积蓝树脂后,通过光刻工序和蚀刻工序构图该蓝树脂,从而形成蓝滤色片B。如图3E的上阵列基板制造工序(S2)所示,在形成有红、绿和蓝滤色片的第一柔性基板45a上沉积透明导电材料后,通过光刻工序和蚀刻工序构图该透明导电材料,从而形成公共电极35。First, as shown in FIG. 3A, after the aforementioned substrate bonding process (S1), an opaque material such as opaque metal or opaque resin is deposited on the first
以下将通过参照图4A到4D作为实施例说明采用四轮掩模工序的下阵列基板制造方法(S3)。The lower array substrate manufacturing method ( S3 ) using the four-round masking process will be described below by referring to FIGS. 4A to 4D as an example.
首先,如图4A所示,采用第一掩模工序在经过基板粘接工序(S1)的第二柔性基板45b上形成包括栅线2、栅极8和栅焊盘下电极26的第一导电图案组。详细说明形成第一导电图案组的工序,通过诸如溅射的沉积方法在第二柔性基板45b上形成栅金属层。随后,通过采用第一掩模的光刻工序和蚀刻工序构图该栅金属层,从而形成包括栅线2、栅极8和栅焊盘下电极26的第一导电图案组。这里,栅金属层由铝族金属构成。First, as shown in FIG. 4A , the first conductive layer including the
如图4B所示,在形成第一导电图案组的第二柔性基板45b上涂布栅绝缘层46。采用第二掩模工序在栅绝缘层46上形成包括有源层48和欧姆接触层50的半导体图案;以及包括数据线4、源极10、漏极12、数据焊盘下电极32和存储电极22的第二导电图案组。As shown in FIG. 4B, a
现在将详细说明形成第二导电图案组的过程。通过诸如PECVD或者溅射的沉积方法在形成有第一导电图案组的第二柔性基板45b上顺序形成栅绝缘层46、非晶硅层、n+非晶硅层和源/漏金属层。这里,栅绝缘层46由诸如氧化硅SiOx或者氮化硅SiNx的无机绝缘材料形成。将钼Mo、钛Ti、钽Ta或者钼合金用作源/漏金属。The process of forming the second conductive pattern group will now be described in detail. A
随后,通过采用第二掩模的光刻工序在源/漏金属层上形成光刻胶图案。这样,在薄膜晶体管的沟道部分具有衍射曝光部分的衍射曝光掩模用作第二掩模。因此,沟道部分的光刻胶图案比源/漏图案部分低。Subsequently, a photoresist pattern is formed on the source/drain metal layer through a photolithography process using a second mask. In this way, the diffraction exposure mask having the diffraction exposure portion at the channel portion of the thin film transistor is used as the second mask. Therefore, the photoresist pattern of the channel portion is lower than the source/drain pattern portion.
接下来,通过采用光刻胶图案的湿刻工序构图该源/漏金属层,从而形成包括数据线4、源极10、与源极10一体的漏极和存储电极22。然后,通过采用同一光刻胶图案的干刻工序构图该n+非晶硅层和非晶硅层,从而形成欧姆接触层50和有源层48。Next, the source/drain metal layer is patterned through a wet etching process using a photoresist pattern, thereby forming a data line 4 , a
在通过灰化工序去除在沟道部分高度相对较低的光刻胶图案后,通过干刻工序蚀刻沟道部分的源/漏金属图案和欧姆接触层50。因此,该沟道部分的有源层48暴露以分离源极10和漏极12。随后,通过剥离工序去除残留在第二导电图案组上的光刻胶图案。After removing the photoresist pattern with a relatively low height at the channel portion through an ashing process, the source/drain metal pattern and the
参照图4C,通过第三掩模工序在形成第二导电图案组的栅绝缘层46上形成包括第一到第四接触孔13、21、27、33的钝化层52。详细的说,通过诸如PECVD的沉积方法在形成有第二导电图案组的栅绝缘层46上形成钝化层52。随后,采用第三掩模通过光刻工序和蚀刻工序构图该钝化层52,从而形成第一到第四接触孔13、21、27、33。该第一接触孔13贯穿钝化层52以暴露漏极12,该第二接触孔21贯穿钝化层52以暴露存储电极22,第三接触孔27贯穿钝化层52和栅绝缘层46以暴露栅焊盘下电极26,并且第四接触孔33贯穿钝化层52以暴露数据焊盘下电极32。这里,当采用具有高蚀刻速率的金属诸如钼作为源/漏金属时,该第一、第二和第四接触孔13、21、33分别贯穿至漏极12、存储电极22和数据焊盘下电极32以暴露其侧面。该钝化层52由诸如栅绝缘层46的无机绝缘层或者如PFCB、BCB或者具有低介电常数的丙烯酸有机化合物的有机绝缘材料构成。Referring to FIG. 4C, a
参照图4D,通过第四掩模工序在钝化层52上形成包括像素电极、栅焊盘上电极28和数据焊盘上电极34的第三导电图案组。具体地,通过诸如溅射的沉积方法在钝化层52上涂布透明导电层。随后,采用第四掩模通过光刻工序和蚀刻工序构图该透明导电层,从而形成包括像素电极14、栅焊盘上电极28和数据焊盘上电极34的第三导电图案组。该像素电极14通过第一接触孔13电连接到漏极并通过第二接触孔21电连接到存储电极22。该栅焊盘上电极通过第三接触孔37电连接到栅焊盘下电极26。该数据焊盘上电极34通过第四接触孔33电连接到数据焊盘下电极32。Referring to FIG. 4D , a third conductive pattern group including the pixel electrode, the gate pad
这里,透明导电层由氧化铟锡ITO、氧化锡TO、氧化锌锡ITZO和氧化铟锌IZO其中之一构成。如同在上下阵列基板制造工序(S2,S3)所述的形成每个电极的沉积方法包括PECVD(等离子体增强型化学汽相沉积)方法、溅射方法等。在采用这些方法时,需要诸如真空态、指定基板温度、反应气体和反应压力等条件。Here, the transparent conductive layer is composed of one of indium tin oxide ITO, tin oxide TO, zinc tin oxide ITZO and indium zinc oxide IZO. The deposition method for forming each electrode as described in the upper and lower array substrate manufacturing processes (S2, S3) includes a PECVD (Plasma Enhanced Chemical Vapor Deposition) method, a sputtering method, and the like. When employing these methods, conditions such as vacuum state, specified substrate temperature, reaction gas, and reaction pressure are required.
另一方面,在粘接到第二粘接材料1c的柔性基板45表面和粘接到第一粘接材料1a的刚性基板47表面可能产生小气泡。在上下阵列基板制造工序(S2,S3)中形成真空态时这些小气泡结合成大气泡。由于粘接到第二粘接材料1c上的柔性基板45的表面粘接强度相对小于粘接到第一粘接材料1a的刚性基板47表面的粘接强度所以在柔性基板45和第二粘接材料1c的粘接表面产生多个气泡结合成大气泡的现象。因此,由于气泡越来越大在制造工序过程中该柔性基板45可能从粘接材料1上剥离。On the other hand, small air bubbles may be generated on the surface of the
此外,在比现有的液晶显示器玻璃基板相对更不牢固的柔性基板45上执行上下阵列基板制造工序(S2,S3)。因此,该柔性基板45受到诸如在执行沉积时产生的温度或者压力条件的压迫,从而可能导致粘接到第二粘接材料1c上的柔性基板45收缩。而且,由于在执行上下阵列基板制造工序(S2,S3)时发生的湿刻或者清洗工序中该第二粘接材料1c粘接强度低因此该粘接到第二粘接材料1c的柔性基板45可能从粘接层1上剥离。In addition, the upper and lower array substrate manufacturing processes ( S2 , S3 ) are performed on the
图5A到10B所示为根据本发明的柔性显示器的制造方法,本发明用于防止在执行上述柔性显示器的制造过程中柔性基板被剥离。5A to 10B illustrate a method of manufacturing a flexible display according to the present invention for preventing the flexible substrate from being peeled off during the above-mentioned manufacturing process of the flexible display.
图5A和5B所示为用于根据本发明第一示例性实施方式的柔性基板制造方法中的粘接层5的结构图。如图5A和5B所示,根据本发明第一示例性实施方式的粘接层5包括第一粘接材料5a、支撑层5b第二粘接材料5c和第三粘接材料55。形成粘接强度低于第一粘接材料5a的第二粘接材料5c,并形成粘接强度高于第二粘接材料5c的第三粘接材料55。可以形成和第一粘接材料5a具有同样粘接强度的第三粘接材料55。该支撑层5b对第一到第三粘接材料5a、5c、55提供支撑力。在柔性显示器的制造工序中由于图2A所示的现有技术第二粘接材料1c的粘接强度较低因此会产生剥离现象。为了防止这种情况,在本发明第一实施方式中在第二粘接材料5c的边缘形成具有适当宽度的第三粘接材料55。图5B所示为形成于第二粘接材料5c边缘的第三粘接材料55的平面图。具有该结构的粘接层5受到第一和第二钝化层11a、11b的保护使其不与外界接触。和如图2B和2C所述的一样根据本发明的第一示例性实施方式通过采用包括粘接层5和第一、第二钝化层11a、11b的粘接剂执行将向柔性显示器提供柔性的柔性基板45粘接到刚性基板47上的工序。5A and 5B are structural diagrams showing an adhesive layer 5 used in the method of manufacturing a flexible substrate according to the first exemplary embodiment of the present invention. As shown in FIGS. 5A and 5B , the adhesive layer 5 according to the first exemplary embodiment of the present invention includes a first adhesive material 5 a, a support layer 5 b, a second adhesive material 5 c, and a third adhesive material 55 . A second adhesive material 5c having an adhesive strength lower than the first adhesive material 5a is formed, and a third adhesive material 55 having an adhesive strength higher than the second adhesive material 5c is formed. The third adhesive material 55 having the same adhesive strength as the first adhesive material 5a can be formed. The support layer 5b provides support for the first to third adhesive materials 5a, 5c, 55. During the manufacturing process of the flexible display, the second
图6所示为在根据本发明第二示例性实施方式的柔性显示器制造方法中粘接层结构。FIG. 6 shows a structure of an adhesive layer in a method of manufacturing a flexible display according to a second exemplary embodiment of the present invention.
根据本发明第二示例性实施方式的粘接层6包括第一粘接材料6a、支撑层6b、第二粘接材料6c和第三粘接材料66。形成粘接强度低于第一粘接材料6a的第二粘接材料6c,并形成粘接强度高于第二粘接材料6c的第三粘接材料66。也可以形成和第一粘接材料6a具有同样粘接强度的第三粘接材料66。该支撑层6b对第一和第二粘接材料6a、6c提供支撑力。形成第三粘接层66防止在柔性显示器的制造工序中产生的柔性基板剥离现象。在形成第二粘接材料6c后在该第二粘接材料6c的上边缘形成第三粘接层66。通过第一和第二钝化层11a、11b保护粘接层6和第三粘接层66不与外界接触。而且,和如图2B和2C所述的一样根据本发明的第二示例性实施方式通过采用包括粘接层6和第一、第二钝化层11a、11b的粘接剂执行将向柔性显示器提供柔性的柔性基板45粘接到刚性基板47上的工序。The
图7A和7B所示为根据本发明第三示例性实施方式的柔性显示器制造方法示图。7A and 7B are diagrams illustrating a method of manufacturing a flexible display according to a third exemplary embodiment of the present invention.
根据本发明第三示例性实施方式的基板粘接工序(S1)和上述图2A到2C所示的从粘接层1剥离第一钝化层11a并在其上粘接刚性基板47的步骤和从粘接刚性基板47的粘接层1剥离第二钝化层11b的步骤一样。然后,本发明第三示例性实施方式包括在剥离第二钝化层11b的第二粘接材料1c的上边缘印刷具有合适宽度的第三粘接材料77的步骤。在形成第三粘接材料77的方法中,存在一种以和除了部分印刷方法以外的处理密封剂一样的方式形成该第三粘接材料77的方法。在形成第三粘接材料77后执行将柔性基板45粘接到第二粘接材料1c和该印刷的第三粘接材料77的步骤。这里,形成粘接强度相对高于第二粘接材料1c的第三粘接材料77。也可以形成粘接强度和第一粘接材料1a一样的第三粘接材料77。The substrate bonding process (S1) according to the third exemplary embodiment of the present invention and the steps of peeling the
在本发明的第一到第三实施方式中,优选的,第二粘接材料5c、6c和7c边缘的宽度和在第二粘接材料5c、6c和7c上边缘形成的第三粘接材料55、66和77的宽度为2~8mm。如果其形成为少于2mm,则无法避免在执行柔性显示器件制造工序过程中出现的剥离现象。如果形成宽度超过8mm,则不能在剥离工序中逐步剥离该柔性基板45和刚性基板47。In the first to third embodiments of the present invention, preferably, the width of the edge of the second
图8A到8C所示为根据本发明第四示例性实施方式的柔性显示器粘接工序示图。参照图8A到8C,如图8A和8B所示通过蚀刻工序提供了一种包括第一凹槽113和第二凹槽111的夹具基板100。接下来,如图8C所示,在夹具基板100的第二凹槽111上涂布粘接剂101,然后将柔性基本103与夹具基板100的上部的第一凹槽113以及涂布在第二凹槽111上的粘接剂101粘接。8A to 8C are diagrams illustrating a bonding process of a flexible display according to a fourth exemplary embodiment of the present invention. Referring to FIGS. 8A to 8C , a
该夹具基板100包括放置柔性基板101的第一凹槽113和填充粘接剂101的第二凹槽111。通过在刚性基板的玻璃基板上执行蚀刻工序形成该第一凹槽113和第二凹槽111。采用玻璃基板作为刚性基板原因在于当采用金属基板时由于需要单独的涂敷处理以防止化学损伤因此会导致夹具基板100制造工序复杂化。The
形成该第一凹槽的厚度和宽度与该柔性基板103的厚度和宽度一样从而固定该柔性基板103。在柔性显示器的制造工序中该第一凹槽113固定该柔性基板103,从而在柔性显示器的制造工序中使柔性基板103得到支撑。此外,在第一凹槽113边缘下部形成第二凹槽111以提供涂布粘接剂101的空间。该第二凹槽的宽度(x)为5mm~100mm。如果该第二凹槽宽度(x)小于5mm,则不能充分提供粘接力,因此在该柔性显示器制造过程中该柔性基板会剥离,并因此不少于5mm为优选的。此外,该第二凹槽宽度(x)超过100mm,则很难执行后续的剥离工序,因此不多于100mm为优选的。并且,形成该第二凹槽的厚度(y)与粘接剂101一样。形成第二凹槽的厚度(y)与粘接剂101厚度一样能够改善在本发明的第二和第三示例性实施方式中粘接到具有台阶差异的粘接材料66、77上时在柔性基板45和刚性基板47之间产生的台阶差异。The thickness and width of the first groove are formed to be the same as those of the
图9和图10A-10B所示为在执行根据本发明第四示例性实施方式的柔性显示器的粘接工序(S1)后的工序简图。具体地,图10A和10B所示为用于说明根据本发明第四示例性实施方式的柔性显示器剥离工序图,这里没有示出在上/下阵列基板工序后形成的电极和滤色片。在即将经历上阵列基板制造工序(S2)的第一夹具基板100a和第一柔性基板103a和即将经历下阵列基板制造工序(S3)的第二夹具基板100b和第二柔性基板103b分别执行柔性基板103和夹具基板100的粘接工序(S1)。9 and 10A-10B are process diagrams after performing the bonding process ( S1 ) of the flexible display according to the fourth exemplary embodiment of the present invention. Specifically, FIGS. 10A and 10B are diagrams illustrating a stripping process of a flexible display according to a fourth exemplary embodiment of the present invention, where electrodes and color filters formed after the upper/lower array substrate process are not shown. The first jig substrate 100a and the first
然后,如图9所示,在粘在夹具基板的柔性基板上部执行该上/下阵列基板制造工序(S2,S3)。由于在图3A到4D中进行过说明因此这里将省略对上/下阵列基板制造工序(S2,S3)的详细说明。Then, as shown in FIG. 9, the upper/lower array substrate manufacturing process (S2, S3) is performed on the upper portion of the flexible substrate adhered to the jig substrate. A detailed description of the upper/lower array substrate manufacturing process ( S2 , S3 ) will be omitted here since it has been described in FIGS. 3A to 4D .
接下来,将在上阵列基板制造工序(S2)和下阵列基板制造工序(S3)中制造的两基板粘结在一起,并且执行向液晶140空间注入液晶149的液晶工序(S4)。对于经过液晶工序(S4)的上/下阵列基板执行从粘接剂剥离上/下阵列基板的剥离工序(5)。Next, the two substrates manufactured in the upper array substrate manufacturing process (S2) and the lower array substrate manufacturing process (S3) are bonded together, and a liquid crystal process (S4) of injecting
参照图10A和10B详细说明该剥离工序(S5),该剥离工序(S5)随着散布于第二凹槽111上的粘接剂种类而不同。紫外光UV型和加热型粘接剂以及具有高耐热性的聚酰亚胺粘接带均可以用于涂布在第二凹槽中的粘接剂101。The peeling process ( S5 ) is described in detail with reference to FIGS. 10A and 10B . The peeling process ( S5 ) differs according to the kind of adhesive spread on the
在采用紫外光型粘接剂时,如果在执行剥离工序(S5)时紫外光照射在粘接剂101上,则粘接剂101失去粘接力。因此,该第一和第二柔性基板103a、103b从第一和第二夹具基板100a、100b上剥离。When the ultraviolet light type adhesive is used, if the ultraviolet light is irradiated on the adhesive 101 during the peeling process ( S5 ), the adhesive 101 loses its cohesive force. Accordingly, the first and second
在低于常温的温度下失去粘接力的粘接剂和在温度20℃~200℃之间失去粘接力的粘接剂可以用作加热型粘接剂。当采用该在低于常温失去粘接力的粘接剂时,通过对于粘接剂101施加低于常温的冷却方法使其失去粘接力执行剥离工序(S5),当采用温度20℃~200℃之间失去粘接力的粘接剂时,通过对于粘接剂101施加20℃~200℃之间温度的加热方法使其失去粘接力执行剥离工序(S5)。当采用聚酰亚胺粘接带时,在剥离工序(S5)过程中通过用于剥离的激光切除粘结聚酰亚胺粘接带的第一和第二柔性基板103a、103b边缘。Adhesives that lose adhesive force at a temperature lower than normal temperature and adhesives that lose adhesive force at a temperature between 20° C. and 200° C. can be used as the heating type adhesive. When using the adhesive that loses its cohesive force at lower than normal temperature, the peeling process (S5) is performed by applying a cooling method lower than normal temperature to the adhesive 101 to make it lose its cohesive force (S5). In the case of an adhesive that loses its adhesive force between 20° C. and 200° C., the adhesive 101 is heated at a temperature between 20° C. and 200° C. to cause it to lose its adhesive force, and the peeling process is performed ( S5 ). When the polyimide adhesive tape is used, the edges of the first and second
这样,可以很容易的将柔性显示器的制造方法施加到ECB(电控双折射)液晶显示面板、VA(垂直定向)模式以及IPS模式和TN模式液晶显示面板。此外,而且也可以用在有机电致发光显示器件的制造方法中。In this way, the manufacturing method of the flexible display can be easily applied to ECB (electrically controlled birefringence) liquid crystal display panels, VA (vertical alignment) mode, and IPS mode and TN mode liquid crystal display panels. In addition, it can also be used in a method of manufacturing an organic electroluminescent display device.
参照图11,简述了通过应用本发明的示例性实施方式制造有机电致发光显示器件的截面结构。该柔性有机电致发光显示器件的简要结构包括位于柔性基板82上部的阳极电极84、阴极电极86,以及形成于阳极电极84、阴极电极86各交叉部分的有机发光层80。如果将驱动信号施加给具有该结构的有机电致发光显示器件的阳极电极84、阴极电极86,发出电子和空穴,并且从该阳极电极84、阴极电极86发出的电子和空穴在有机发光层80复合从而产生可见光。此时,该产生的可见光通过阳极电极84向外界发射,从而显示指定图片和图像。Referring to FIG. 11 , a cross-sectional structure of an organic electroluminescence display device manufactured by applying an exemplary embodiment of the present invention is briefly described. The brief structure of the flexible organic electroluminescent display device includes an anode electrode 84 and a cathode electrode 86 on the top of a flexible substrate 82 , and an organic light-emitting layer 80 formed at intersections of the anode electrode 84 and cathode electrode 86 . If a driving signal is applied to the anode electrode 84 and the cathode electrode 86 of the organic electroluminescence display device having this structure, electrons and holes are emitted, and the electrons and holes emitted from the anode electrode 84 and the cathode electrode 86 are emitted in the organic luminescence. Layer 80 recombines to produce visible light. At this time, the generated visible light is emitted to the outside through the anode electrode 84, thereby displaying specified pictures and images.
如上所述,本发明的制造方法包括用于基板粘接工序的位于第二粘接材料上部边缘的第三粘接材料和位于粘接层第二粘接材料的边缘,或者在粘接工序在第二粘接材料上部边缘印刷第三粘接材料的步骤。因此,可以降低在制造柔性显示器件过程中由于第二粘接材料粘接力低产生的剥离危险。此外,该第一粘接材料保护作为粘接到第二粘接材料上的柔性基板薄弱点的侧面,从而防止由各工序中产生的沉积层应力导致的柔性基板收缩现象。因此,可以实现柔性显示器件制造工序的稳定性以及生产率的提高。As described above, the manufacturing method of the present invention includes the third adhesive material positioned on the upper edge of the second adhesive material used in the substrate bonding process and the edge of the second adhesive material positioned on the adhesive layer, or in the bonding process at the edge of the second adhesive material A step of printing the third adhesive material on the upper edge of the second adhesive material. Therefore, the risk of peeling due to the low adhesive force of the second adhesive material during the process of manufacturing the flexible display device can be reduced. In addition, the first adhesive material protects the sides that are the weak points of the flexible substrate bonded to the second adhesive material, thereby preventing shrinkage of the flexible substrate caused by the stress of the deposited layer generated in each process. Therefore, the stability of the manufacturing process of the flexible display device and the improvement of productivity can be realized.
而且,通过形成具有固定柔性基板的凹槽和涂布粘接剂凹槽的夹具基板,可以更稳定的执行柔性显示器的制造工序。该夹具制造简单,从而简化工序并改善生产率、提高工序稳定性。Also, by forming the jig substrate with the groove for fixing the flexible substrate and the groove for applying the adhesive, the manufacturing process of the flexible display can be performed more stably. The jig is simple to manufacture, thereby simplifying the process and improving productivity and process stability.
可以清楚地理解,对于熟悉本领域的普通技术人员来说,本发明具有各种变型和改进。因而,本发明意欲覆盖所有落入所附权利要求以及等效物所限定的范围内的变型和改进。It will be clearly understood that various modifications and improvements of the present invention will occur to those skilled in the art. Thus, the present invention is intended to cover all modifications and improvements that come within the scope of the appended claims and their equivalents.
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