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CN1842615A - Electroless plating method and electrically nonconductive plating object with plating film formed thereon - Google Patents

Electroless plating method and electrically nonconductive plating object with plating film formed thereon Download PDF

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Publication number
CN1842615A
CN1842615A CNA2005800008197A CN200580000819A CN1842615A CN 1842615 A CN1842615 A CN 1842615A CN A2005800008197 A CNA2005800008197 A CN A2005800008197A CN 200580000819 A CN200580000819 A CN 200580000819A CN 1842615 A CN1842615 A CN 1842615A
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plating
conductive
plated
conductive medium
reducing agent
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CN100480423C (en
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国司多通夫
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1635Composition of the substrate
    • C23C18/1637Composition of the substrate metallic substrate
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/38Coating with copper
    • C23C18/40Coating with copper using reducing agents
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/42Coating with noble metals
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/42Coating with noble metals
    • C23C18/44Coating with noble metals using reducing agents
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/48Coating with alloys

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)

Abstract

The invention relates to a plating film without catalyst process to form high adhesive without electric plating on the non-conductive object, wherein it adds the conductive medium (2) with catalytic to the oxidization of reducer (R) into the plating bath (1) of the reducer (R) that outputting metallic ion and the metallic ion (M+) for forming plating film (5); the metallic ion receives the electron generated by the oxidization of reducer to be reduced and output at the surface medium (2); and the output metal is adhered on the surface of medium 92); via impacting object (4) with medium (2), the metal (3) is compressed on the surface of object (4), and using said metal (3) as core, to form plating film (5).

Description

无电镀方法和形成镀膜的非导电性被镀物Electroless plating method and non-conductive object to be plated to form plated film

技术领域technical field

本发明涉及对非导电性被镀物的无电镀方法和基于该无电镀方法形成镀膜的非导电性被镀物。The present invention relates to an electroless plating method for a non-conductive to-be-plated object and a non-conductive to-be-plated object with a plated film formed by the electroless plating method.

背景技术Background technique

装饰镀、电子元器件的电极形成等各种领域中,均需形成金属膜。在金属膜的形成中经常应用镀敷。被镀物是非导电性的情况下,为了形成金属膜,通常不能应用电镀,而应用无电镀。无电镀中典型的是在镀浴中添加还原剂,利用由该还原剂的氧化反应产生的电子使金属在被镀物的表面析出。这种镀敷方法被称作自催化型无电镀。Formation of metal films is required in various fields such as decorative plating and electrode formation of electronic components. Plating is often used in the formation of metal films. When the object to be plated is non-conductive, in order to form a metal film, usually electroless plating cannot be applied instead of electroplating. Typically, in electroless plating, a reducing agent is added to a plating bath, and metal is deposited on the surface of an object to be plated using electrons generated by the oxidation reaction of the reducing agent. This plating method is called autocatalytic electroless plating.

自催化型无电镀中,需要使被镀物的表面对还原剂的氧化反应具有催化活性。因此,以往一般如例如日本专利特开2002-314309号公报(专利文献1)所记载,通过将被镀物事先浸渍在含有Pd(钯)的催化剂溶液中,从而使被镀物的表面催化活性化。In self-catalytic electroless plating, it is necessary to make the surface of the object to be plated catalytically active for the oxidation reaction of the reducing agent. Therefore, in the past, as described in Japanese Patent Application Laid-Open No. 2002-314309 (Patent Document 1), for example, the surface of the object to be plated is made catalytically active by immersing the object to be plated in a catalyst solution containing Pd (palladium) in advance. change.

该以Pd为主要成分的催化剂在自催化型无电镀中催化作用最强,还具有可适用的还原剂种类多的优点,在工业上的应用最广。The catalyst mainly composed of Pd has the strongest catalytic effect in the self-catalyzed electroless plating, and also has the advantage of many types of applicable reducing agents, and is most widely used in industry.

然而,要将被镀物浸渍在含有Pd的催化剂溶液中时,存在作为用于赋予Pd催化剂的预处理需要脱脂工序和蚀刻工序等使制造工序复杂的问题。此外,还有Pd昂贵的问题。另外,还存在被镀物和镀膜之间由作为催化剂残留的Pd构成的中间层削弱镀膜对被镀物的粘附力的问题。However, when an object to be plated is immersed in a catalyst solution containing Pd, there is a problem that a degreasing process, an etching process, and the like are required as a pretreatment for imparting a Pd catalyst, which complicates the production process. In addition, there is a problem that Pd is expensive. In addition, there is a problem in that an intermediate layer composed of Pd remaining as a catalyst between the object to be plated and the plated film weakens the adhesion of the plated film to the object to be plated.

在日本专利特开2003-183843号公报(专利文献2)中,揭示了以下的镀敷方法:对形成于被镀物表面的导电性电极部分使用添加形成镀膜的金属离子和使该金属离子析出的还原剂的镀浴进行无电镀的镀敷方法,其特征在于,在镀浴中与被镀物一起投入对于还原剂的氧化反应表现出催化活性的导电性介质。In Japanese Patent Laid-Open No. 2003-183843 (Patent Document 2), the following plating method is disclosed: adding metal ions forming a plating film to the conductive electrode portion formed on the surface of the object to be plated and separating the metal ions A method of electroless plating in a plating bath of a reducing agent, characterized in that a conductive medium exhibiting catalytic activity for the oxidation reaction of the reducing agent is thrown into the plating bath together with the object to be plated.

专利文献2所记载的镀敷方法中,即使不在电极部分进行上述Pd催化剂的赋予,也可以在电极部分形成无电镀膜。然而,专利文献2中对于由非导电体构成的被镀物的镀膜的形成没有进行揭示。In the plating method described in Patent Document 2, it is possible to form an electroless plating film on the electrode portion without applying the above-mentioned Pd catalyst to the electrode portion. However, Patent Document 2 does not disclose the formation of a plated film of an object to be plated made of a nonconductive body.

专利文献1:日本专利特开2002-314309号公报Patent Document 1: Japanese Patent Laid-Open No. 2002-314309

专利文献2:日本专利特开2003-183843号公报Patent Document 2: Japanese Patent Laid-Open No. 2003-183843

发明的揭示disclosure of invention

发明要解决的课题The problem to be solved by the invention

本发明的目的在于提供对于非导电性被镀物可以不经过事先的催化剂赋予工序而形成镀膜的无电镀方法。An object of the present invention is to provide an electroless plating method capable of forming a plating film on a non-conductive object to be plated without a prior catalyst application step.

本发明的目的还在于提供形成了粘附力高的镀膜的非导电性被镀物。Another object of the present invention is to provide a non-conductive object to be plated in which a plated film with high adhesion is formed.

解决课题的方法Solution to the problem

本发明首先是对非导电性被镀物使用添加了形成镀膜的金属离子和使该金属离子析出的还原剂的镀浴进行无电镀的镀敷方法,其特征在于,使对于还原剂的氧化反应表现出催化活性的导电性介质与被镀物接触。The present invention is firstly a plating method for electroless plating of a non-conductive object to be plated using a plating bath that has added metal ions forming a plated film and a reducing agent that precipitates the metal ions. It is characterized in that the oxidation reaction to the reducing agent is A conductive medium exhibiting catalytic activity is in contact with the object to be plated.

本发明所述的无电镀方法中,为了使导电性介质更有效地与被镀物接触,较好是准备允许镀液通过的容器,在该容器内投入非导电性被镀物和导电性介质,将投入了非导电性被镀物和导电性介质的容器在镀浴内旋转、摇动或振动。In the electroless plating method of the present invention, in order to make the conductive medium contact the object to be plated more effectively, it is preferable to prepare a container that allows the plating solution to pass through, and put the non-conductive object to be plated and the conductive medium into the container. , Rotate, shake or vibrate the container filled with the non-conductive object to be plated and the conductive medium in the plating bath.

本发明所述的无电镀方法中,较好是通过使上述金属离子在导电性介质上析出,使析出的金属附着在导电性介质上,通过使导电性介质与非导电性被镀物接触,将附着在导电性介质上的析出金属转移到非导电性被镀物上,由此在非导电性被镀物上形成镀膜。In the electroless plating method according to the present invention, it is preferable to deposit the above-mentioned metal ions on the conductive medium, to attach the deposited metal to the conductive medium, and to contact the conductive medium with the non-conductive object to be plated. Transfer the precipitated metal attached to the conductive medium to the non-conductive object to be plated, thereby forming a plated film on the non-conductive object to be plated.

本发明所述的无电镀方法优选的第1实施方式中,镀膜的主要成分由Ni、Co、Au或Pt或者它们的合金构成,还原剂含有磷酸类化合物,导电性介质至少表面含有Ni、Co、Au和Pt中的至少1种。In the preferred first embodiment of the electroless plating method described in the present invention, the main component of the plating film is made of Ni, Co, Au or Pt or their alloys, the reducing agent contains phosphoric acid compounds, and the conductive medium contains Ni, Co At least one of , Au and Pt.

本发明所述的无电镀方法优选的第2实施方式中,镀膜的主要成分由Ni、Co、Au或Pt或者它们的合金构成,还原剂含有硼类化合物,导电性介质至少表面含有Ni、Co、Au和Pt中的至少1种。In the preferred second embodiment of the electroless plating method described in the present invention, the main component of the coating film is made of Ni, Co, Au or Pt or their alloys, the reducing agent contains boron compounds, and the conductive medium contains Ni, Co, etc. at least on the surface. At least one of , Au and Pt.

本发明所述的无电镀方法优选的第3实施方式中,镀膜的主要成分由Ni、Co或Pt或者它们的合金构成,还原剂含有氮类化合物,导电性介质至少表面含有Ni、Co和Pt中的至少1种。In a preferred third embodiment of the electroless plating method of the present invention, the main component of the plating film is composed of Ni, Co or Pt or their alloys, the reducing agent contains nitrogen compounds, and the conductive medium contains Ni, Co and Pt at least on the surface At least 1 of them.

本发明所述的无电镀方法优选的第4实施方式中,镀膜的主要成分由Cu、Ag或Au或者它们的合金构成,还原剂含有醛类化合物,导电性介质至少表面含有Cu、Ag和Au中的至少1种。In a preferred fourth embodiment of the electroless plating method according to the present invention, the main component of the plated film is composed of Cu, Ag or Au or their alloys, the reducing agent contains aldehyde compounds, and the conductive medium contains Cu, Ag and Au at least on the surface At least 1 of them.

本发明还是形成了以选自Ni、Co、Cu、Ag、Au和Pt中的至少1种金属或它们的合金为主要成分的镀膜的非导电性被镀物。其特征在于,镀膜通过上述的本发明所述的无电镀方法形成,同时特征还在于处于镀膜不通过由对所述还原剂的还原作用表现出催化活性的物质构成的层而直接与非导电性被镀物粘合的状态。The present invention is also a non-conductive object to be plated that forms a plated film mainly composed of at least one metal selected from Ni, Co, Cu, Ag, Au, and Pt, or an alloy thereof. It is characterized in that the coating film is formed by the above-mentioned electroless plating method of the present invention, and it is also characterized in that the coating film is not directly connected to the non-conductive layer through a layer composed of a substance that exhibits catalytic activity for the reduction of the reducing agent. The state of being bonded to the plated object.

发明的效果The effect of the invention

采用本发明所述的无电镀方法,由于不需要事先对非导电性被镀物进行Pd等催化剂的赋予,所以可以不需要复杂的工序,并低成本地形成镀膜。According to the electroless plating method of the present invention, since it is not necessary to provide a catalyst such as Pd to the non-conductive object to be plated in advance, it is possible to form a plated film at low cost without complicated steps.

此外,采用本发明所述的无电镀方法,由于镀膜不通过由Pd催化剂等构成的中间层而直接粘合在非导电性被镀物上,所以可以得到对于被镀物的粘附力高的镀膜。In addition, with the electroless plating method of the present invention, since the plated film is directly bonded to the non-conductive object to be plated without passing through an intermediate layer composed of a Pd catalyst or the like, it is possible to obtain a material having high adhesion to the object to be plated. coating.

附图的简单说明A brief description of the drawings

[图1]图1是采用本发明所述的无电镀方法的镀膜形成过程的图解说明图。[ Fig. 1] Fig. 1 is a diagrammatic explanatory view of a plated film formation process using the electroless plating method according to the present invention.

符号的说明Explanation of symbols

1无电镀浴1 electroless plating bath

2导电性介质2 conductive medium

3析出金属3 Precipitation of metal

4非导电性被镀物4 Non-conductive objects to be plated

5镀膜5 coating

实施发明的最佳方式The best way to practice the invention

首先,对本发明所述的无电镀方法进行说明。First, the electroless plating method according to the present invention will be described.

简而言之,本发明所述的无电镀方法是使用添加形成镀膜的金属离子和使该金属离子析出的还原剂的镀浴对非导电性被镀物进行无电镀的镀敷方法,其特征在于,使对于还原剂的氧化反应表现出催化活性的导电性介质与被镀物接触。In short, the electroless plating method of the present invention is a plating method in which a non-conductive object to be plated is electrolessly plated using a plating bath that adds metal ions forming a plated film and a reducing agent that precipitates the metal ions, and is characterized in that The method is to bring a conductive medium, which exhibits catalytic activity to the oxidation reaction of the reducing agent, into contact with the object to be plated.

参看图1,更详细地进行说明。如图1(a)所示,在无电镀浴1中所含的金属离子(M+)通过导电性介质2的催化作用接受由还原剂(R)的氧化反应( )产生的电子(e-)而被还原,容易析出·附着在导电性介质2的表面。由此,首先在导电性介质2的表面附着来自金属离子(M+)的析出金属3。Referring to Figure 1, it will be described in more detail. As shown in Figure 1(a), the metal ions (M + ) contained in the electroless plating bath 1 undergo the oxidation reaction ( ) generated electrons (e ) are reduced and easily deposited and attached to the surface of the conductive medium 2 . As a result, first, the precipitated metal 3 derived from the metal ion (M + ) adheres to the surface of the conductive medium 2 .

接着,如图1(b)所示,附着于导电性介质2上的析出金属3通过在导电性介质2如箭头所示撞击非导电性被镀物时压附或擦附在被镀物4的表面,如图1(c)所示,转移到被镀物4的表面。由此,转移到被镀物4的表面的析出金属3对被镀物4通过固着效果而粘合。Next, as shown in FIG. 1( b), the precipitated metal 3 attached to the conductive medium 2 is attached to the object to be plated 4 by pressing or rubbing when the conductive medium 2 hits the nonconductive object to be plated as shown by the arrow. The surface, as shown in Figure 1(c), is transferred to the surface of the object to be plated 4. As a result, the deposited metal 3 transferred to the surface of the object to be plated 4 adheres to the object to be plated 4 by the fixation effect.

接着,以粘合在被镀物4上的析出金属3为核,如图1(c)中虚线所示,析出金属3在被镀物4上不断析出,形成镀膜5。特别是析出金属3对于还原剂具有催化活性的情况下,形成如上所述的析出金属3的核后,随着形成的镀膜5的扩大,镀膜5加速形成。Next, with the precipitated metal 3 adhered to the object 4 as the nucleus, as shown by the dotted line in FIG. Especially when the precipitated metal 3 has catalytic activity with respect to the reducing agent, the formation of the plated film 5 is accelerated as the formed plated film 5 expands after the nuclei of the precipitated metal 3 are formed.

上述的镀膜5处于不通过由对所述还原剂的还原作用表现出催化活性的物质构成的层而直接与非导电性被镀物4粘合的状态。The above-mentioned plated film 5 is in a state of being directly bonded to the non-conductive object to be plated 4 without a layer composed of a substance exhibiting catalytic activity for the reducing action of the reducing agent.

作为具体的实施方式,较好是应用以下方法:准备允许镀液通过的容器,在该容器内投入非导电性被镀物和导电性介质,通过将投入了非导电性被镀物和导电性介质的容器在镀浴内旋转、摇动或振动,使非导电性被镀物与导电性介质有效地接触。这时,可以优选地使用通常电镀法所用的那样的筒(barrel)作为上述容器。此外,也可以以筒倾斜的状态使其旋转、摇动或振动。As a specific embodiment, it is preferable to apply the following method: prepare a container that allows the plating solution to pass through, put the non-conductive object to be plated and the conductive medium in the container, and put the non-conductive object to be plated and the conductive medium into the container. The container of the medium is rotated, shaken or vibrated in the plating bath, so that the non-conductive object to be plated is in effective contact with the conductive medium. In this case, a barrel such as that used in the usual electroplating method can be preferably used as the above-mentioned container. In addition, the cylinder may be rotated, shaken or vibrated in a tilted state.

比较本发明所述的镀敷方法和专利文献2所记载的镀敷方法,在不需要事先的Pd等催化剂的赋予和使对还原剂表现出催化活性的导电性介质与被镀物接触方面是共通的。但是,在专利文献2所记载的镀敷方法中,在被镀物具有电极等导电体部分、镀膜只在导电体部分形成这一点上有较大不同。Comparing the plating method described in the present invention with the plating method described in Patent Document 2, it is superior in terms of not needing to provide a catalyst such as Pd in advance and to make a conductive medium exhibiting catalytic activity to a reducing agent contact the object to be plated. Common. However, in the plating method described in Patent Document 2, there is a big difference in that the object to be plated has a conductor portion such as an electrode, and that the plated film is formed only on the conductor portion.

即,专利文献2所记载的镀敷方法中,在具有催化活性的导电体介质与被镀物的导电体部分的表面接触时,在该接触点的附近发生还原剂的氧化反应,由该氧化反应产生的电子流动到被镀物的导电体上。镀浴中的导电体附近的金属离子接受该导电体上的电子,金属在导电体上析出。通过重复该反应而只在导电体上形成镀膜。That is, in the plating method described in Patent Document 2, when the conductive medium having catalytic activity contacts the surface of the conductive part of the object to be plated, an oxidation reaction of the reducing agent occurs in the vicinity of the contact point. The electrons generated by the reaction flow to the conductor of the object to be plated. Metal ions near the conductor in the plating bath receive electrons on the conductor, and the metal is deposited on the conductor. By repeating this reaction, a plating film is formed only on the conductor.

另一方面,在被镀物除导电体部分之外的非导电体部分上,由于没有还原剂的氧化反应所产生的电子流动,所以按照专利文献2所记载的机理不会形成镀膜。但是,在非导电体部分,若根据上述本发明的机理、即在导电性介质撞击被镀物时在导电性介质上析出·附着的析出金属转移到被镀物上并粘合的机理,推测也应该会有镀膜形成。然而,采用专利文献2所记载的机理,由于镀浴中的金属离子优先地析出到导电体部分上,因而在非导电体部分上几乎没有镀膜形成。On the other hand, since there is no flow of electrons generated by the oxidation reaction of the reducing agent on the non-conductor portion of the object to be plated except for the conductor portion, no plating film is formed according to the mechanism described in Patent Document 2. However, in the non-conductor part, if according to the above-mentioned mechanism of the present invention, that is, the mechanism in which the precipitated metal precipitated and attached on the conductive medium is transferred to the plated object and adhered to the plated object when the conductive medium hits the plated object, it is speculated that There should also be a coating formed. However, with the mechanism described in Patent Document 2, since metal ions in the plating bath are preferentially deposited on the conductor portion, almost no plated film is formed on the non-conductor portion.

综上所述,即使使用相同的金属离子和对还原剂具有催化活性的相同的导电性介质,根据被镀物是否含有导电体部分,镀膜形成的机理会完全不同。即,本发明所述的镀敷方法由于以在非导电体上形成镀膜为目的,所以作为本发明的对象的被镀物实际上不含有导电体部分。In summary, even if the same metal ion and the same conductive medium having catalytic activity to the reducing agent are used, the mechanism of plating film formation will be completely different depending on whether the object to be plated contains a conductive part or not. That is, since the plating method according to the present invention is aimed at forming a plated film on a nonconductive body, the object to be plated which is the object of the present invention does not actually contain a conductive part.

因为本发明所述的镀敷方法是基于如上所述的机理,所以与所述的专利文献1所记载的镀敷方法的情况相比,或者如专利文献2所记载的要形成镀膜的表面是导电体的情况相比,成膜速度较慢。但是,如上所述,如果考虑到形成具有自催化性的析出金属的核后成膜速度变得更快,则这一点在实用上不会成为问题。Because the plating method described in the present invention is based on the above-mentioned mechanism, so compared with the situation of the plating method described in the above-mentioned patent document 1, or the surface to form the plated film as described in the patent document 2 is Compared with the case of a conductor, the film formation rate is slow. However, as mentioned above, if it is taken into consideration that the film formation rate becomes faster by forming an autocatalytic metal-precipitating nucleus, this will not be a practical problem.

如上所述,采用本发明所述的镀敷方法,镀浴中的金属离子主要首先在具有催化活性的导电性介质上析出,然后通过导电性介质与被镀物接触,析出金属转移到被镀物上并粘合。以该粘合的析出金属为核,通过析出金属的自催化性形成镀膜。由此,即使被镀物是非导电性的,也可以不经过事先的催化剂赋予工序而形成无电镀膜。As mentioned above, using the plating method of the present invention, the metal ions in the plating bath are mainly precipitated on the conductive medium with catalytic activity, and then contact the plated object through the conductive medium, and the precipitated metal is transferred to the plated object. object and glue. Using the bonded precipitated metal as a nucleus, a plated film is formed by the autocatalytic property of the precipitated metal. Thereby, even if the object to be plated is non-conductive, an electroless plated film can be formed without going through a previous catalyst application step.

导电性介质至少表面必须是对镀浴中的还原剂表现出催化活性的。以下,对可以使用的还原剂的种类和与其相适应的构成导电性介质的金属元素进行说明。At least the surface of the conductive medium must be catalytically active towards the reducing agent in the plating bath. The types of reducing agents that can be used and the metal elements constituting the conductive medium corresponding thereto will be described below.

还原剂可以例举一般被广泛使用的磷酸类化合物、硼类化合物、氮类化合物和醛类化合物等。已经有关于对这些还原剂具有催化活性的金属的研究报告。As the reducing agent, phosphoric acid-based compounds, boron-based compounds, nitrogen-based compounds, aldehyde-based compounds and the like are generally and widely used. Studies have been reported on metals that are catalytically active against these reducing agents.

例如,已报道Au、Ni、Co和Pt对作为磷酸类还原剂的次磷酸钠(NaH2PO2)的氧化反应具有催化活性(大野淙、若林理、春山志郎著,“无电镀中对于次磷酸钠的阳极氧化的金属的催化活性(無電めつきにおける次亜リン酸ナトリウムのアノ一ド酸化に对する金属の触媒活性)”,金属表面技术,第34卷,第12号,1983年,pp.594-599)。For example, Au, Ni, Co, and Pt have been reported to be catalytically active for the oxidation reaction of sodium hypophosphite (NaH 2 PO 2 ) as a phosphoric acid-based reducing agent (Ohno, Wakabayashi, and Haruyama Shiro, "Electroless Plating for Secondary Catalytic activity of metals by anodic oxidation of sodium phosphate (catalytic activity of electroless めつきにおける おぺてきにおける おぺけるりりるウムのアノイドルトスるるののcatalytic activity) for metals)", Metal Surface Technology, Vol. 34, No. 12, 1983 , pp.594-599).

因此,使用磷酸类还原剂的情况下,通过至少构成导电性介质的表面的金属使用Au、Ni、Co和Pt中的至少1种,可以不经过事先的催化剂赋予工序而在非导电性被镀物的表面形成Ni、Co、Au、Pt等的镀膜。Therefore, in the case of using a phosphate-based reducing agent, at least one of Au, Ni, Co, and Pt is used as the metal constituting the surface of the conductive medium, so that it can be plated on a non-conductive substrate without a prior catalyst imparting process. The coating of Ni, Co, Au, Pt, etc. is formed on the surface of the object.

此外,已报道还原剂使用硼氢化钠(NaBH4)和DMAB((CH3)2NHBH3)等硼类化合物的情况下,Ni、Co、Pt和Au对这些硼类化合物的氧化反应具有催化活性(大野淙、若林理、春山志郎著,“无电镀中对于硼氢化钠和二甲胺硼烷的阳极氧化的金属的催化活性(無電めつきにおけるホウ水素化ナトリウムおよびジメチルアミンボランのアノ一ド酸化に对する金属の触媒活性)”,电化学,第53卷,第3号,1985年,pp.196-201)。In addition, it has been reported that when boron compounds such as sodium borohydride (NaBH 4 ) and DMAB ((CH 3 ) 2 NHBH 3 ) are used as reducing agents, Ni, Co, Pt, and Au can catalyze the oxidation of these boron compounds. Activity (Ohno, Wakabayashi, Haruyama Shiro, "Catalytic activity of metals for the anodic oxidation of sodium borohydride and dimethylamine borane in electroless plating (electroless めつきにおけるホウ hydrohydration ナトリウム りよびジメチルアミンボランのアノ一ぉ酸化に或するmetalのcatalyst activity)", Electrochemistry, Vol. 53, No. 3, 1985, pp.196-201).

因此,使用硼类化合物作为还原剂的情况下,通过至少构成导电性介质的表面的金属使用Au、Ni、Co和Pt中的至少1种,可以不经过事先的催化剂赋予工序而在非导电性被镀物的表面形成Ni、Co、Au、Pt等的镀膜。Therefore, when a boron compound is used as a reducing agent, at least one of Au, Ni, Co, and Pt is used as the metal constituting at least the surface of the conductive medium, and the non-conductive medium can be formed without a prior catalyst imparting process. Plating films of Ni, Co, Au, Pt, etc. are formed on the surface of the object to be plated.

另外,已报道还原剂使用作为氮类化合物的肼(N2H4)的情况下,Ni、Co和Pt对N2H4的氧化反应具有催化活性(大野淙、若林理、春山志郎著,“无电镀中对于甲醛和肼的阳极氧化的金属的催化活性(無電解めつきにぉけるホルムアルデヒドおよびヒドラジンのアノ一ド酸化に对する金属の触媒活性)”,电化学,第53卷,第3号,1985年,pp.190-195)。In addition, it has been reported that when hydrazine (N 2 H 4 ), which is a nitrogen compound, is used as a reducing agent, Ni, Co, and Pt have catalytic activity for the oxidation reaction of N 2 H 4 (by Ohno Haru, Wakabayashi Ri, and Haruyama Shiro, pp. "Catalytic activity of metals for anodic oxidation of formaldehyde and hydrazine in electroless plating (electroless めつきにぉける holmu アルデヒド およびびヒヒドラジンのアノ一ドアノイドイニトトルタルのcatalytic activity)", Electrochemistry, Vol. 53, No. No. 3, 1985, pp.190-195).

因此,使用氮类化合物作为还原剂的情况下,通过至少构成导电性介质的表面的金属使用Ni、Co和Pt中的至少1种,可以不经过事先的催化剂赋予工序而在非导电性被镀物的表面形成Ni、Co、Pt等的镀膜。Therefore, in the case of using a nitrogen compound as a reducing agent, at least one of Ni, Co, and Pt is used as the metal constituting the surface of the conductive medium, and the non-conductive substrate can be plated without a prior catalyst imparting process. Ni, Co, Pt and other coatings are formed on the surface of the object.

此外,已报道还原剂使用甲醛(HCHO)的情况下,Cu、Au和Ag对HCHO的氧化反应具有催化活性(大野淙、若林理、春山志郎著,“无电镀中对于甲醛和肼的阳极氧化的金属的催化活性”,电化学,第53卷,第3号,1985年,pp.190-195)。In addition, it has been reported that when formaldehyde (HCHO) is used as a reducing agent, Cu, Au, and Ag have catalytic activity for the oxidation reaction of HCHO (Ohno, Wakabayashi, Haruyama Shiro, "Anodic oxidation of formaldehyde and hydrazine in electroless plating Catalytic Activity of Metals", Electrochemistry, Vol. 53, No. 3, 1985, pp.190-195).

因此,使用醛类化合物作为还原剂的情况下,通过至少构成导电性介质的表面的金属使用Cu、Au和Ag中的至少1种,可以不经过事先的催化剂赋予工序而在非导电性被镀物的表面形成Cu、Au、Ag等的镀膜。Therefore, in the case of using an aldehyde compound as a reducing agent, at least one of Cu, Au and Ag is used as the metal constituting the surface of the conductive medium, and the non-conductive substrate can be plated without a prior catalyst imparting process. Coated films of Cu, Au, Ag, etc. are formed on the surface of the object.

以上,对本发明所述的镀敷方法所优选的镀浴和导电性介质的关系进行了说明。上述说明对还原剂分成磷酸类化合物、硼类化合物、氮类化合物和醛类化合物4类进行,但本发明所述的镀敷方法并不局限于上述4类。镀浴中的金属成分和导电性介质表面的金属成分只要是对采用的还原剂表现出催化活性,当然也可以另外考虑其它的组合。The relationship between the plating bath and the conductive medium preferable for the plating method according to the present invention has been described above. In the above description, the reducing agents are divided into four types: phosphoric acid compounds, boron compounds, nitrogen compounds and aldehyde compounds, but the plating method of the present invention is not limited to the above four types. As long as the metal component in the plating bath and the metal component on the surface of the conductive medium exhibit catalytic activity with respect to the reducing agent used, other combinations are of course also conceivable.

此外,关于导电性介质,只要是至少其表面具有导电性且对还原剂具有催化活性即可,内部的导电性和催化活性没有关系。In addition, as for the conductive medium, it is sufficient that at least the surface thereof is conductive and has catalytic activity with respect to the reducing agent, and the internal conductivity and catalytic activity are not related.

关于导电性介质的大小,可以根据被镀物的大小适当选择。如果导电性介质和被镀物的大小分别以体积表示,导电性介质的体积较好是被镀物体积的1/1000~1/1左右。若导电性介质过小,则由于与被镀物撞击时,压附析出金属的力弱,被膜形成慢。另一方面,若导电性介质过大,则由于与被镀物的撞击概率低,被膜形成慢。The size of the conductive medium can be appropriately selected according to the size of the object to be plated. If the sizes of the conductive medium and the object to be plated are expressed in volume, the volume of the conductive medium is preferably about 1/1000 to 1/1 of the volume of the object to be plated. If the conductive medium is too small, the formation of the film will be slow due to the weak force of pressing and depositing metal when it collides with the object to be plated. On the other hand, if the conductive medium is too large, the formation of the film will be slow due to the low probability of collision with the object to be plated.

镀浴的各种条件,例如金属离子浓度、还原剂的浓度、pH、温度以及稳定剂和表面活性剂等各种添加剂的种类和量等,需要根据对应于要实施的镀敷方法所选择的还原剂和金属离子的种类来适当调整。The various conditions of the plating bath, such as the concentration of metal ions, the concentration of reducing agents, pH, temperature, and the types and amounts of various additives such as stabilizers and surfactants, etc., need to be selected according to the plating method to be implemented. The type of reducing agent and metal ion can be adjusted appropriately.

接着,对使用本发明所述的镀敷方法形成了无电镀膜的非导电性被镀物进行说明。Next, a non-conductive object to be plated on which an electroless plated film is formed using the plating method according to the present invention will be described.

如前所述,本发明所述的非导电性被镀物是形成了以选自Ni、Co、Cu、Ag、Au和Pt中的至少1种金属或它们的合金为主要成分的镀膜的非导电性被镀物,其特征在于,上述镀膜处于不通过由以例如Pd为主要成分的金属或化合物构成的层而直接与被镀物粘合的状态。As mentioned above, the non-conductive object to be plated in the present invention is a non-conductive material formed with a coating film mainly composed of at least one metal selected from Ni, Co, Cu, Ag, Au, and Pt, or an alloy thereof. The conductive object to be plated is characterized in that the plated film is in a state of being directly bonded to the object to be plated without passing through a layer composed of a metal or a compound mainly composed of, for example, Pd.

由此,采用本发明,由于不需要事先的Pd等催化剂的赋予工序,所以在被镀物和镀膜之间不存在中间层。因此,镀膜的粘附力提高。Therefore, according to the present invention, no intermediate layer exists between the object to be plated and the plated film because there is no need for a prior step of adding a catalyst such as Pd. Therefore, the adhesion of the plating film is improved.

非导电性被镀物的前提是至少形成镀膜的表面部分是非导电性的。不形成镀膜的被镀物内部的非导电性不成为问题。若表面存在导电体部分的情况下,由于前述的理由非导电体部分不会形成镀膜,因此在本发明的范围外。The premise of a non-conductive object to be plated is that at least the surface portion forming the plated film is non-conductive. Non-conductivity inside the object to be plated where no plated film is formed is not a problem. If there are conductor parts on the surface, the non-conductor part will not form a plated film for the above-mentioned reason, so it is outside the scope of the present invention.

此外,由于被镀物是非导电性的,本发明的镀膜对被镀物通过固着效果而直接粘合。因此,被镀物的表面的表面粗糙度越大,镀膜的粘附力越大。被镀物的表面粗糙度Ra较好是在0.1μm以上,更好是在1μm以上。In addition, since the object to be plated is non-conductive, the coating film of the present invention adheres directly to the object to be plated through the fixing effect. Therefore, the greater the surface roughness of the surface of the object to be plated, the greater the adhesion of the plated film. The surface roughness Ra of the object to be plated is preferably at least 0.1 μm, more preferably at least 1 μm.

使用本发明的镀敷方法形成例如Ni镀膜后,可以在其表面形成通常普遍采用的置换Au镀层。此外,形成Sn镀层也没有问题。After forming, for example, a Ni plating film using the plating method of the present invention, a commonly used replacement Au plating layer can be formed on its surface. In addition, there is no problem in forming a Sn plating layer.

以下,基于更具体的实施例,对本发明所述的无电镀方法和非导电性被镀物进行说明。Hereinafter, the electroless plating method and the non-conductive object to be plated according to the present invention will be described based on more specific examples.

实施例1Example 1

作为非导电性被镀物,准备100个长3mm、宽3mm和高7mm的立方体状的电介质陶瓷单元。As a non-conductive object to be plated, 100 cube-shaped dielectric ceramic cells having a length of 3 mm, a width of 3 mm, and a height of 7 mm were prepared.

另一方面,准备具有如下的组成和条件的镀浴。On the other hand, a plating bath having the following composition and conditions was prepared.

金属盐:硫酸铜0.04摩尔/升Metal salt: copper sulfate 0.04 mol/L

还原剂:甲醛0.70摩尔/升Reducing agent: formaldehyde 0.70 mol/liter

配位剂:EDTA 0.08摩尔/升Complexing agent: EDTA 0.08 mol/L

pH:12.0pH: 12.0

浴温:45℃Bath temperature: 45°C

接着,在内容积为1.90×104m3的摇动筒中投入上述100个电介质陶瓷单元,同时投入8.6g(约1500个)直径约0.7mm的Cu球,将该摇动筒浸渍到上述镀浴中,一边进行空气搅拌,一边以8~16往复/分钟的速度使摇动筒摇动60分钟,在电介质陶瓷单元的表面形成Cu镀膜。Next, put 100 of the dielectric ceramic units and 8.6 g (approximately 1,500 pieces) of Cu balls with a diameter of about 0.7 mm into a shaker with an inner volume of 1.90×10 4 m 3 , and dip the shaker into the above-mentioned plating bath. , while performing air stirring, the shaker was shaken at a speed of 8 to 16 reciprocations/minute for 60 minutes to form a Cu plating film on the surface of the dielectric ceramic unit.

通过如上所述进行无电镀,可以不经过事先的催化剂处理工序,而形成没有粘合强度和析出不均的问题的膜厚约2.0μm的Cu镀膜。镀膜的膜厚通过荧光X射线膜厚计(セイコ一インスツルメンツ公司制SEA5120)进行测定。上述形成镀膜的电介质陶瓷单元适合用作电介质谐振器。By performing electroless plating as described above, it is possible to form a Cu plated film having a film thickness of about 2.0 μm without the problems of adhesive strength and deposition unevenness without going through a previous catalyst treatment step. The film thickness of the coating film was measured with a fluorescent X-ray film thickness meter (SEA5120 manufactured by Seiko Instruments Co., Ltd.). The above-mentioned plated dielectric ceramic unit is suitably used as a dielectric resonator.

实施例2Example 2

作为非导电性被镀物,准备100个长5mm、宽5mm和高1.5mm的塑料制框体。As non-conductive objects to be plated, 100 plastic frames with a length of 5 mm, a width of 5 mm, and a height of 1.5 mm were prepared.

另一方面,准备作为市场上销售的Ni-P合金浴的荏原ユ一ジライト制“エバシ一ルドTN”作为镀浴,浴温设定为63℃。On the other hand, "Ebasild TN" manufactured by Ebara Yujilite, which is a commercially available Ni-P alloy bath, was prepared as a plating bath, and the bath temperature was set at 63°C.

接着,在内容积为1.90×104m3的摇动筒中投入上述100个塑料制框体,同时投入7.9g(约1500个)直径约0.7mm的Ni球,将该摇动筒浸渍到上述镀浴中,一边进行空气搅拌,一边以8~16往复/分钟的速度使摇动筒摇动60分钟,在塑料制框体的表面形成Ni-P被膜。Next, the above-mentioned 100 plastic frames and 7.9 g (about 1500 pieces) of Ni balls with a diameter of about 0.7 mm were put into a shaking cylinder with an inner volume of 1.90×10 4 m 3 , and the shaking cylinder was immersed in the above-mentioned plating bath. In this process, the shaker was shaken at a speed of 8 to 16 reciprocations/minute for 60 minutes while air stirring, and a Ni—P film was formed on the surface of the plastic frame.

通过如上所述进行无电镀,可以不经过事先的催化剂处理工序,而形成没有粘合强度和析出不均的问题的膜厚约6.0μm的Ni-P镀膜。上述形成镀膜的塑料制框体适合用作电磁波屏蔽材料。By performing electroless plating as described above, it is possible to form a Ni-P plating film having a film thickness of about 6.0 μm without the problems of adhesive strength and deposition unevenness without a prior catalyst treatment step. The plastic frame on which the coating is formed is suitably used as an electromagnetic wave shielding material.

实施例3Example 3

作为非导电性被镀物,准备100个直径约3.0mm的Al2O3球体。As a non-conductive object to be plated, 100 Al 2 O 3 spheres with a diameter of about 3.0 mm were prepared.

另一方面,准备作为市场上销售的Ni-B合金浴的奥野制药制“トツプケミアロイB-1”作为镀浴,pH设定为6.7,浴温设定为60℃。On the other hand, as a plating bath, "Top Chemi Aroi B-1" manufactured by Okuno Pharmaceutical Co., Ltd., which is a Ni-B alloy bath sold on the market, was prepared, and the pH was set to 6.7, and the bath temperature was set to 60°C.

接着,在内容积为1.90×104m3的旋转筒中投入上述100个Al2O3球体,同时投入7.9g(约1500个)直径约0.7mm的Ni球,将该旋转筒浸渍到上述镀浴中,一边进行空气搅拌,一边以0.05s-1(=3rpm)的旋转速度使旋转筒旋转40分钟,在Al2O3球体的表面形成Ni-B被膜。Next, put the above-mentioned 100 Al 2 O 3 spheres into a rotating drum with an inner volume of 1.90×10 4 m 3 , and simultaneously put 7.9 g (about 1,500 pieces) of Ni balls with a diameter of about 0.7 mm, and dip the rotating drum into the above-mentioned plated In the bath, the rotating cylinder was rotated at a rotation speed of 0.05 s -1 (= 3 rpm) for 40 minutes while stirring with air to form a Ni-B coating on the surface of the Al 2 O 3 spheres.

通过如上所述进行无电镀,可以不经过事先的催化剂处理工序,而形成没有粘合强度和析出不均的问题的膜厚约1.5μm的Ni-B镀膜。上述形成镀膜的Al2O3球体适合用作低温发热体。By performing electroless plating as described above, it is possible to form a Ni-B plating film having a film thickness of about 1.5 μm without the problems of adhesive strength and deposition unevenness without a prior catalyst treatment step. The above-mentioned Al 2 O 3 spheres formed with a coating film are suitable for use as a low-temperature heating element.

Claims (8)

1. An electroless plating method for forming a plating film on a non-conductive plating object by electroless plating using a plating bath to which metal ions for forming a plating film and a reducing agent for precipitating the metal ions are added,
a step for preparing a conductive medium that exhibits catalytic activity for the oxidation reaction of the reducing agent;
and a step of bringing the conductive medium into contact with the non-conductive object to be plated in order to form the plating film on the non-conductive object to be plated.
2. The electroless plating method according to claim 1, further comprising a step of preparing a container that allows a plating solution constituting the plating bath to pass therethrough, and a step of charging the non-conductive plating object and the conductive medium into the container, wherein the step of bringing the conductive medium into contact with the non-conductive plating object comprises a step of bringing the non-conductive plating object and the conductive medium into contact while rotating, shaking, or vibrating the container charged with the non-conductive plating object and the conductive medium in the plating bath.
3. The electroless plating method according to claim 1, wherein the step of bringing the conductive medium into contact with the non-conductive plating object comprises the steps of: depositing the metal ions on the conductive medium to attach a deposited metal to the conductive medium; and transferring the precipitated metal attached to the conductive medium to the non-conductive object to be plated by bringing the conductive medium into contact with the non-conductive object to be plated.
4. The electroless plating method according to claim 1, wherein the plating film is composed mainly of Ni, Co, Au, or Pt or an alloy thereof, the reducing agent contains a phosphoric acid-based compound, and the conductive medium contains at least 1 of Ni, Co, Au, and Pt on at least a surface thereof.
5. The electroless plating method according to claim 1, wherein the plating film is composed mainly of Ni, Co, Au, or Pt or an alloy thereof, the reducing agent contains a boron-based compound, and the conductive medium contains at least 1 of Ni, Co, Au, and Pt on at least a surface thereof.
6. The electroless plating method according to claim 1, further characterized in that the plating film is composed mainly of Ni, Co, or Pt, or an alloy thereof, the reducing agent contains a nitrogen-based compound, and the conductive medium contains at least 1 of Ni, Co, and Pt on at least a surface thereof.
7. The electroless plating method according to claim 1, wherein a main component of the plating film is Cu, Ag, or Au or an alloy thereof, the reducing agent contains an aldehyde compound, and at least the surface of the conductive medium contains at least 1 of Cu, Ag, and Au.
8. A non-conductive plating object having a plating film formed mainly of at least 1 metal selected from the group consisting of Ni, Co, Cu, Ag, Au and Pt, or an alloy thereof,
the plating film is formed by the electroless plating method according to any one of claims 1 to 7, and the plating film is in a state of being directly bonded to the non-conductive plating object without passing through a layer composed of a substance exhibiting a catalytic activity for a reducing action of the reducing agent.
CNB2005800008197A 2004-09-27 2005-08-18 Electroless plating method and non-conductive plated object having plated film formed thereon Expired - Fee Related CN100480423C (en)

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