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CN1715878A - Double light beam detection modulation device based on surface plasma wave sensing - Google Patents

Double light beam detection modulation device based on surface plasma wave sensing Download PDF

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CN1715878A
CN1715878A CN 200510050606 CN200510050606A CN1715878A CN 1715878 A CN1715878 A CN 1715878A CN 200510050606 CN200510050606 CN 200510050606 CN 200510050606 A CN200510050606 A CN 200510050606A CN 1715878 A CN1715878 A CN 1715878A
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prism
film
light beam
device based
modulation device
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胡建东
王晓萍
袁克皋
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Zhejiang University ZJU
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Abstract

本发明公开了一种基于表面等离子波传感的双光束检测调制装置。它具有激光器,激光器通过光学组件分成第一光束、第二光束两束偏振光,入射到棱镜,在棱镜端面上蒸镀有Au膜,在Au膜上生长有生物敏感膜,生物敏感膜上设有被测样品流动池,在棱镜端面产生全反射,两束反射光分别进入到第一PD探测器、第二PD探测器。本发明既保留了表面等离子共振(SPR)传感技术的特点,同时又由于双光束SPR传感器不需要精密的扫描入射角度,简化了角度调整机构,避免了可动的传动部件带来的测试误差,增强了可操作性。由于检测的是两光束的光强信号,可以用光电二极管代替光谱仪或昂贵的CCD阵列,因而可大大降低系统的复杂性和制造成本,易于设计成便携式仪器。

Figure 200510050606

The invention discloses a dual-beam detection and modulation device based on surface plasma wave sensing. It has a laser, and the laser is divided into two polarized beams, the first beam and the second beam by optical components, which are incident on the prism. Au film is evaporated on the end surface of the prism, and a biological sensitive film is grown on the Au film. There is a flow cell for the sample to be tested, which generates total reflection on the end face of the prism, and the two beams of reflected light enter the first PD detector and the second PD detector respectively. The invention not only retains the characteristics of surface plasmon resonance (SPR) sensing technology, but also simplifies the angle adjustment mechanism because the double-beam SPR sensor does not require precise scanning incident angles, and avoids test errors caused by movable transmission parts , enhanced operability. Since the light intensity signals of the two beams are detected, a photodiode can be used instead of a spectrometer or an expensive CCD array, which can greatly reduce the complexity and manufacturing cost of the system, and is easy to design as a portable instrument.

Figure 200510050606

Description

基于表面等离子波传感的双光束检测调制装置Dual-beam detection and modulation device based on surface plasmon wave sensing

技术领域technical field

本发明涉及生物传感技术、光电检测技术,尤其涉及基于表面等离子波传感的双光束检测调制装置。The invention relates to biosensing technology and photoelectric detection technology, in particular to a dual-beam detection and modulation device based on surface plasma wave sensing.

背景技术Background technique

一般表面等离子共振(SPR)的检测调制方法通常有以下四种:Generally, there are four detection and modulation methods for surface plasmon resonance (SPR):

1.角度调制以固定的波长λ的光入射,改变入射光波的入射角θ,在某一被测折射率下,依据方程 ϵ pr ω c sin θ = ϵ ~ 1 ϵ ~ 2 ϵ ~ 1 + ϵ ~ 2 ( ω c ) , 总可以找到一个入射角θ,使之满足共振条件,产生表面等离子共振。当被测样品的折射率发生变化时,重新扫描入射角,寻找共振入射角,建立共振入射角与被测样品折射率之间的关系。角度调制方法的检测分辨率可以达到1×10-7deg RIU-1(RIU是折射率单元)。1. Angle modulation Incidence of light with a fixed wavelength λ, change the incident angle θ of the incident light wave, under a certain measured refractive index, according to the equation ϵ pr ω c sin θ = ϵ ~ 1 ϵ ~ 2 ϵ ~ 1 + ϵ ~ 2 ( ω c ) , An incident angle θ can always be found to satisfy the resonance condition and produce surface plasmon resonance. When the refractive index of the measured sample changes, re-scan the incident angle to find the resonant incident angle, and establish the relationship between the resonant incident angle and the measured sample's refractive index. The detection resolution of the angle modulation method can reach 1×10 -7 deg RIU -1 (RIU is the refractive index unit).

2.波长调制以固定的入射角θ入射,改变入射光波的波长λ。根据Drude的色散模型,对于基于棱镜的SPR传感器,不同的入射光波长对应不同的金属折射率εm和棱镜的折射率εpr。当被测样品的折射率一定时,扫描入射光波长,使之满足共振条件,产生表面等离子共振,建立共振入射光波长与被测样品折射率之间的关系。波长调制的检测分辨率与角度调制基本相同,比较适合于波导或光纤表面等离子检测方案。通常入射光往往采用白光源,检测装置用光谱仪或CCD器件。2. Wavelength modulation is incident at a fixed incident angle θ, changing the wavelength λ of the incident light wave. According to Drude's dispersion model, for a prism-based SPR sensor, different incident light wavelengths correspond to different refractive indices ε m of the metal and ε pr of the prism. When the refractive index of the sample to be measured is constant, the wavelength of the incident light is scanned to satisfy the resonance condition, surface plasmon resonance is generated, and the relationship between the resonant incident light wavelength and the refractive index of the sample to be measured is established. The detection resolution of wavelength modulation is basically the same as that of angle modulation, which is more suitable for waveguide or optical fiber surface plasma detection schemes. Usually the incident light often uses a white light source, and the detection device uses a spectrometer or a CCD device.

3.强度调制以固定的入射角θ、固定的入射波长λ入射,测量当折射率变化产生的光强变化,建立传输光强与折射率之间的关系。强度调制检测方法,结构非常简单,检测装置价格也十分低廉,但是系统的稳定性差,无法区别检测光强信号变化是由折射率变化引起的还是检测装置的误差产生的,检测系统的抗干扰性不好和检测灵敏度低。3. Intensity modulation uses a fixed incident angle θ and a fixed incident wavelength λ to measure the change in light intensity when the refractive index changes, and establish the relationship between the transmitted light intensity and the refractive index. The intensity modulation detection method has a very simple structure and the price of the detection device is very low, but the stability of the system is poor, and it is impossible to distinguish whether the change of the detected light intensity signal is caused by the change of the refractive index or the error of the detection device. The anti-interference performance of the detection system Bad and low detection sensitivity.

4.相位调制先扫描入射角θ,寻找被测样品的折射率一定时的表面等离子共振入射角,此时固定共振时入射θ,然后测量在此折射率下的共振相位,当被测样品的折射率变化时重复上述过程,建立共振相位和折射率之间关系,根据这种关系就可以得到被测样品的折射率大小。相位调制是一种极具有发展潜力的检测方法,它有较好的信噪比和较高的检测灵敏度,缺点是系统的检测装置复杂,难于实现表面等离子共振传感仪器的便携化。4. Phase modulation first scans the incident angle θ to find the surface plasmon resonance incident angle when the refractive index of the sample to be measured is constant. At this time, the incident θ is fixed when the resonance is fixed, and then the resonance phase under this refractive index is measured. When the measured sample When the refractive index changes, the above process is repeated to establish the relationship between the resonance phase and the refractive index, and the refractive index of the sample to be measured can be obtained according to this relationship. Phase modulation is a detection method with great development potential. It has a good signal-to-noise ratio and high detection sensitivity. The disadvantage is that the detection device of the system is complicated, and it is difficult to realize the portability of the surface plasmon resonance sensing instrument.

角度调制、波长调制和强度调制技术已经十分成熟,这些技术已经在表面等离子共振(SPR)传感测试仪器以及所设计的监测分析系统中广泛采用。尽管角度调整方法检测精度高,但由于表面等离子共振角度调制方法需要一套高精度的角度调整装置,不方便用于现场在线监测等。本发明专利是在对表面等离子共振传感器的检测技术进行系统分析和实验研究后,提出的一种基于表面等离子波传感原理的双光束检测调制技术。表面等离子波传感器的双光束检测调制原理是:采用两个固定入射角θ1和θ2入射,两束光波作用到棱镜端面的金属Au膜与被测物质的分界面后产生反射,分别用两个光电探测器检测其反射光强,建立两束反射光强与被测样品折射率之间的关系,即可以获得被测样品的折射率的值。双光束检测调制装置无需在测试中进行角度扫描,只需要在检测前根据计算值调整入射光的角度。在双光束检测系统中,用光电二极管代替了通常使用的光谱仪或光功率计作反射光信号探测器,因此大大简化了系统的复杂性,降低了系统制造成本,满足了检测系统的高分辨率的要求。Angle modulation, wavelength modulation and intensity modulation technologies are very mature, and these technologies have been widely used in surface plasmon resonance (SPR) sensing test instruments and designed monitoring and analysis systems. Although the angle adjustment method has high detection accuracy, it is not convenient for on-site on-line monitoring because the surface plasmon resonance angle modulation method requires a set of high-precision angle adjustment devices. The invention patent is a dual-beam detection and modulation technology based on the surface plasmon wave sensing principle proposed after systematic analysis and experimental research on the detection technology of the surface plasmon resonance sensor. The dual-beam detection modulation principle of the surface plasmon wave sensor is as follows: two fixed incident angles θ 1 and θ 2 are used for incident, and the two beams of light waves act on the interface between the metal Au film on the end face of the prism and the measured substance to generate reflection. A photodetector detects the reflected light intensity, establishes the relationship between the reflected light intensity of the two beams and the refractive index of the sample to be measured, and then the value of the refractive index of the sample to be measured can be obtained. The dual-beam detection modulation device does not need to scan the angle during the test, but only needs to adjust the angle of the incident light according to the calculated value before detection. In the double-beam detection system, the photodiode is used instead of the commonly used spectrometer or optical power meter as the reflected light signal detector, thus greatly simplifying the complexity of the system, reducing the manufacturing cost of the system, and meeting the high resolution of the detection system requirements.

发明内容Contents of the invention

本发明的目的是提供一种不降低传感器的分辨率和测试精度的基于表面等离子波传感的双光束检测调制装置。The purpose of the present invention is to provide a dual-beam detection and modulation device based on surface plasmon wave sensing without reducing the resolution and test accuracy of the sensor.

它具有激光器,激光器通过光学组件分成第一光束、第二光束两束偏振光,入射到棱镜,在棱镜端面上蒸镀有Au膜,在Au膜上生长有生物敏感膜,生物敏感膜上设有被测样品流动池,在棱镜端面产生全反射,两束反射光分别进入到第一PD探测器、第二PD探测器。It has a laser, and the laser is divided into two polarized beams, the first beam and the second beam by optical components, which are incident on the prism. Au film is evaporated on the end surface of the prism, and a biological sensitive film is grown on the Au film. There is a flow cell for the sample to be tested, which generates total reflection on the end face of the prism, and the two beams of reflected light enter the first PD detector and the second PD detector respectively.

Au膜的厚度为40~60nm。棱镜为K9玻璃等腰三角棱镜。The thickness of the Au film is 40-60 nm. The prism is an isosceles triangular prism of K9 glass.

本发明既保留了表面等离子共振(SPR)传感技术的特点,同时又由于双光束SPR传感器不需要精密的扫描入射角度,简化了角度调整机构,避免了可动的传动部件带来的测试误差,增强了可操作性。由于检测的是两光束的光强信号,可以用光电二极管代替光谱仪或昂贵的CCD阵列,因而可大大降低系统的复杂性和制造成本,易于设计成便携式仪器。The invention not only retains the characteristics of surface plasmon resonance (SPR) sensing technology, but also simplifies the angle adjustment mechanism because the double-beam SPR sensor does not require precise scanning incident angles, and avoids test errors caused by movable transmission parts , enhanced operability. Since the light intensity signals of the two beams are detected, a photodiode can be used instead of a spectrometer or an expensive CCD array, which can greatly reduce the complexity and manufacturing cost of the system, and is easy to design as a portable instrument.

附图说明Description of drawings

附图是基于表面等离子波传感的双光束检测调制装置结构示意图,图中:激光器1、棱镜2、光学组件3、第一光束4、第二光束5、第一PD光探测器6、第二PD光探测器7、金膜8、生物质敏感膜9、被测样品流动池10。The accompanying drawing is a schematic structural diagram of a dual-beam detection and modulation device based on surface plasmon wave sensing. In the figure: laser 1, prism 2, optical component 3, first beam 4, second beam 5, first PD photodetector 6, second Two PD photodetectors 7 , a gold film 8 , a biomass sensitive film 9 , and a flow cell 10 for the sample to be measured.

具体实施方式Detailed ways

如附图所示,基于表面等离子波传感的双光束检测调制装置具有激光器(激光二极管)1,激光器通过光学组件(包括光束准直器、偏振器和分束器)3分成第一光束4、第二光束5两束偏振光,入射到棱镜2,在棱镜2端面上蒸镀有Au膜8,在Au膜上生长有生物敏感膜9,生物敏感膜9上设有被测样品流动池10,在棱镜2端面产生全反射,两束反射光分别进入到第一PD探测器6、第二PD探测器7。Au膜8的厚度为40~60nm。棱镜2为K9玻璃等腰三角棱镜。As shown in the figure, the dual-beam detection and modulation device based on surface plasmon wave sensing has a laser (laser diode) 1, which is divided into a first beam 4 by optical components (including beam collimator, polarizer and beam splitter) 3 1. The second light beam 5 and two beams of polarized light are incident on the prism 2, and an Au film 8 is evaporated on the end surface of the prism 2, and a biosensitive film 9 is grown on the Au film, and the biosensitive film 9 is provided with a flow cell for the sample to be measured 10. Total reflection occurs at the end face of the prism 2, and the two beams of reflected light enter the first PD detector 6 and the second PD detector 7 respectively. Au film 8 has a thickness of 40 to 60 nm. Prism 2 is an isosceles triangular prism of K9 glass.

在棱镜端面采用磁控溅射蒸镀40~60nm的Au膜8,在Au膜上生长一层生物质敏感膜9,如免疫检测中的抗体等,盛有被测样品的流动池10置于Au膜8的上表面。激光器1通过包括准直器、偏振器和分束器在内的光学组件3,产生两束光波,第一光束4和第二光束5,两光束分别以共振角附近的角度入射到棱镜的端面——Au膜与被测样品的界面,第一PD光电探测器6和第二PD光电探测器7获取两束反射光的功率值p(θ1)和p(θ2)。当样品流动池10中被分析的物质与生物敏感膜9相结合时产生折射率变化,计算此时两束反射光的功率差值Δp=|p(θ1)-p(θ2)|,样品浓度变化引起的折射率变化分别对应不同的Δp值,建立Δp与被测样品的折射率值之间的关系,由此关系通过标定则可以获得被测样品的浓度值。Au film 8 of 40-60nm is vapor-deposited on the end face of the prism by magnetron sputtering, and a layer of biomass-sensitive film 9 is grown on the Au film, such as the antibody in immunoassay, etc., and the flow cell 10 containing the sample to be tested is placed in The upper surface of the Au film 8 . The laser 1 generates two beams of light through an optical component 3 including a collimator, a polarizer and a beam splitter, the first beam 4 and the second beam 5, and the two beams are respectively incident on the end face of the prism at an angle near the resonance angle - the interface between the Au film and the sample to be measured, the first PD photodetector 6 and the second PD photodetector 7 obtain the power values p(θ 1 ) and p(θ 2 ) of the two beams of reflected light. When the analyzed substance in the sample flow cell 10 is combined with the biosensitive film 9, the refractive index changes, and the power difference Δp=|p(θ 1 )-p(θ 2 )| of the two beams of reflected light is calculated at this time, The refractive index changes caused by the sample concentration change correspond to different Δp values respectively, and the relationship between Δp and the refractive index value of the measured sample is established, and the concentration value of the measured sample can be obtained through calibration of the relationship.

Claims (3)

1. double light beam detection modulation device based on surface plasma wave sensing, it is characterized in that, it has laser instrument (1), laser instrument is divided into first light beam (4), second light beam (5) two bundle polarized lights by optical module (3), incide prism (2), evaporation has Au film (8) on prism (2) end face, growth has bio-sensitive film (9) on the Au film, bio-sensitive film (9) is provided with sample flow cell (10), produce total reflection at prism (2) end face, two bundle reflected light enter into a PD detector (6), the 2nd PD detector (7) respectively.
2. a kind of double light beam detection modulation device based on surface plasma wave sensing according to claim 1 is characterized in that the thickness of described Au film (8) is 40~60nm.
3. a kind of double light beam detection modulation device based on surface plasma wave sensing according to claim 1 is characterized in that, described prism (2) is a K9 glass isoceles triangle prism.
CN 200510050606 2005-07-07 2005-07-07 Double light beam detection modulation device based on surface plasma wave sensing Pending CN1715878A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101779117A (en) * 2007-07-31 2010-07-14 皇家飞利浦电子股份有限公司 Microelectronic sensor device with a light source
CN101825568A (en) * 2010-03-31 2010-09-08 中国科学院半导体研究所 Device for detecting medium refraction index change by utilizing spectrum intensity change
CN101451952B (en) * 2008-12-01 2011-01-12 华东师范大学 A Method to Realize Broadband Spectral Surface Plasmon Resonance
CN101592606B (en) * 2008-05-28 2011-09-07 中国科学院电子学研究所 Portable surface plasma resonance biochemical analyzer
CN101802592B (en) * 2007-08-20 2013-01-09 韩国生命工学研究院 Surface plasmon resonance sensor using rotating mirror
CN109916860A (en) * 2019-04-19 2019-06-21 广东海洋大学 A kind of two-beam p-polarization glass prism SPR heavy metal ion sensor and preparation method thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101779117A (en) * 2007-07-31 2010-07-14 皇家飞利浦电子股份有限公司 Microelectronic sensor device with a light source
CN101779117B (en) * 2007-07-31 2013-12-04 皇家飞利浦电子股份有限公司 Microelectronic sensor device with modulated light source
CN101802592B (en) * 2007-08-20 2013-01-09 韩国生命工学研究院 Surface plasmon resonance sensor using rotating mirror
CN101592606B (en) * 2008-05-28 2011-09-07 中国科学院电子学研究所 Portable surface plasma resonance biochemical analyzer
CN101451952B (en) * 2008-12-01 2011-01-12 华东师范大学 A Method to Realize Broadband Spectral Surface Plasmon Resonance
CN101825568A (en) * 2010-03-31 2010-09-08 中国科学院半导体研究所 Device for detecting medium refraction index change by utilizing spectrum intensity change
CN109916860A (en) * 2019-04-19 2019-06-21 广东海洋大学 A kind of two-beam p-polarization glass prism SPR heavy metal ion sensor and preparation method thereof
CN109916860B (en) * 2019-04-19 2024-02-13 广东海洋大学 A double-beam p-polarized prism SPR heavy metal ion sensor and its preparation method

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