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CN1784512A - Electrodeposition of aluminum and refractory metals from non-aromatic organic solvents - Google Patents

Electrodeposition of aluminum and refractory metals from non-aromatic organic solvents Download PDF

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CN1784512A
CN1784512A CN 200480012257 CN200480012257A CN1784512A CN 1784512 A CN1784512 A CN 1784512A CN 200480012257 CN200480012257 CN 200480012257 CN 200480012257 A CN200480012257 A CN 200480012257A CN 1784512 A CN1784512 A CN 1784512A
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electroplating
plating
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aromatic organic
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Y·M·赫努塞特
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Global Ionix Inc
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Abstract

An electroplating solution includes a non-aqueous non-aromatic organic solvent and a mixture including soluble metallic salts and organic additives dissolved in the non-aqueous or non-aromatic organic solvent. Electrodeposition of a metal from the electroplating solution includes preparing an electroplating solution and electrodepositing the metal from the electroplating solution onto a conductive substrate under a cathodic current. An electroplating system has a plating chamber containing an electroplating solution, an entry point to the electroplating system, and a transporting system to convey a part to be electroplated from the entry point to the plating chamber. The electroplating solution includes a non-aqueous non-aromatic organic solvent and a mixture including soluble metallic salts and organic additives, the mixture dissolved in the non-aqueous non-aromatic organic solvent.

Description

铝和难熔金属自非芳香有机溶剂的电沉积Electrodeposition of Aluminum and Refractory Metals from Nonaromatic Organic Solvents

相关申请的交叉引用Cross References to Related Applications

[0001]本申请要求2003年3月5日在美国申请的美国临时专利申请No.60/451,631的权益,在此以引用的方式将其全部内容包括在内。[0001] This application claims the benefit of U.S. Provisional Patent Application No. 60/451,631 filed in the U.S. on March 5, 2003, which is hereby incorporated by reference in its entirety.

背景技术Background technique

发明领域:Field of invention:

[0002]本方法通常涉及电沉积涂层。更具体地,本方法涉及铝、镁和难熔金属如钛、钽、锆及其合金的金属涂层,该金属涂层通过电沉积自非芳香有机溶剂获得。[0002] The method generally involves electrodeposition of coatings. More specifically, the present method relates to metallic coatings of aluminum, magnesium and refractory metals such as titanium, tantalum, zirconium and their alloys, obtained by electrodeposition from non-aromatic organic solvents.

发明背景:Background of the invention:

[0003]在下面的本发明背景的说明中,参考了某些设备和方法,但是,不必将这种参考认为是承认这些设备和方法性能是现有技术。申请人保留证明任何所参考的主题不构成本发明现有技术的权利。[0003] In the following description of the background of the invention, reference is made to certain apparatus and methods, however, such reference is not necessarily to be construed as an admission that such apparatus and method properties are prior art. Applicants reserve the right to demonstrate that any subject matter referred to does not constitute prior art to the present invention.

[0004]可将抗腐蚀和磨损的表面保护应用于铁类和非铁类金属部件。一种获得这种保护的适宜方法为涂层。例如,在航空、航天工业中,将镉涂层用来保护部件如起落架或紧固件以阻止腐蚀。该镉涂层用作牺牲涂层,该涂层即使在被刮擦时也提供保护。但是,镉为由基于氰化物的镀液电沉积的有毒金属,其影响操作和处理保护措施。需要适宜的用于镉的金属涂层。[0004] Surface protection against corrosion and wear can be applied to ferrous and non-ferrous metal parts. One suitable method of obtaining this protection is coating. For example, in the aerospace industry, cadmium coatings are used to protect components such as landing gear or fasteners from corrosion. This cadmium coating acts as a sacrificial coating that provides protection even when scratched. However, cadmium is a toxic metal electrodeposited from cyanide-based baths, which affects handling and handling safeguards. Suitable metal coatings for cadmium are required.

[0005]由这种涂层提供的保护的一个方面为镉涂层的盐水电化学电位相对于下面的材料要负的结果。因此,用于取代镉的适宜的涂层材料包括那些相对于下面的材料,具有相似的例如负的盐水电化学电位的材料。例如候选材料中包括锌、锰、铍和镁,从而替代涂层中的镉。但是,这些候选材料有缺陷。锌在易于电镀的同时,遭受因环境而产生的脆裂,因此不适宜用于高强度钢。可通过含水方法电镀锰,但是其暴露可导致对肺和神经的影响。相似地,铍也具有环境上的缺陷,以及当未掺合在涂层内中时,镁在这种应用中高度活泼。[0005] One aspect of the protection afforded by such coatings is the result that the brine electrochemical potential of the cadmium coating is negative relative to the underlying material. Accordingly, suitable coating materials for replacing cadmium include those that have a similar, eg negative, brine electrochemical potential relative to the underlying material. Examples of candidate materials include zinc, manganese, beryllium and magnesium to replace cadmium in coatings. However, these candidate materials have drawbacks. Zinc, while being easy to plate, suffers from environmental embrittlement and is therefore unsuitable for use in high-strength steels. Manganese can be electroplated by aqueous methods, but exposure can cause lung and neurological effects. Similarly, beryllium also has environmental drawbacks, and magnesium is highly reactive in this application when not incorporated in the coating.

[0006]铝和难熔金属例如钛为用于保护涂层和用于替代镉涂层的替代候选物。铝涂层可提供阻止铁类金属部件腐蚀的牺牲性保护阻挡层。难熔金属涂层可提供保护阻挡层,该保护阻挡层阻止通过如腐蚀、侵蚀、磨损、磨蚀以及脆化等机制对下面的金属例如铁类和非铁类金属部件的损害。[0006] Aluminum and refractory metals such as titanium are alternative candidates for protective coatings and for replacing cadmium coatings. Aluminum coatings provide a sacrificial protective barrier against corrosion of ferrous metal parts. Refractory metal coatings can provide a protective barrier that prevents damage to underlying metals, such as ferrous and non-ferrous metal parts, through mechanisms such as corrosion, erosion, wear, abrasion, and embrittlement.

[0007]铝和难熔金属如钛通常由如那些基于氯化锂的熔盐浴化学物质,或由如那些基于苯和甲苯的有毒有机溶剂,或者通过电泳电化学地获得。这些已知的方法在涂层质量和成本上有负面缺陷。例如,熔盐浴方法可在电镀期间避免脆化,但是截留的盐可为后续腐蚀和脆化的来源。[0007] Aluminum and refractory metals such as titanium are typically obtained electrochemically from molten salt bath chemistries such as those based on lithium chloride, or from toxic organic solvents such as those based on benzene and toluene, or by electrophoresis. These known methods have negative drawbacks in terms of coating quality and cost. For example, molten salt bath methods can avoid embrittlement during electroplating, but trapped salts can be a source of subsequent corrosion and embrittlement.

[0008]铝和难熔金属的金属涂层还可通过其它方法获得。例如,可使用物理技术,如电弧喷镀,物理气相沉积技术,如铝的离子真空沉积(或者称为ivadizing)和化学技术,如溶胶-凝胶,或者由有毒的有机溶剂或通过熔盐的电沉积来形成铝和难熔金属的涂层。[0008] Metallic coatings of aluminum and refractory metals can also be obtained by other methods. For example, physical techniques such as arc spraying, physical vapor deposition techniques such as ion vacuum deposition of aluminum (otherwise known as ivadizing) and chemical techniques such as sol-gel can be used, either from toxic organic solvents or through molten salts. Electrodeposition to form coatings of aluminum and refractory metals.

[0009]美国专利No.4,145,261公开了一种镀液,其为甲苯、包括苯的有机物以及卤化铝的混合物。美国专利No.4,759,831公开了用于铝的电沉积的承载(load-lock)隔离电解液室。该镀液的特性例如环境问题和当暴露在空气时,易于被污染导致这种公开的溶液和工艺昂贵、效率低以及可能危害环境和健康。[0009] US Patent No. 4,145,261 discloses a plating solution that is a mixture of toluene, organics including benzene, and aluminum halides. US Patent No. 4,759,831 discloses a load-lock isolated electrolyte chamber for electrodeposition of aluminum. Properties of the bath such as environmental concerns and susceptibility to contamination when exposed to air make the disclosed solutions and processes expensive, inefficient and potentially hazardous to the environment and health.

[0010]日本专利55-158289公开了多种其中溶解有合成铝盐的低分子量有机溶剂。但是,未提供具体涂层性能。[0010] Japanese Patent No. 55-158289 discloses various low molecular weight organic solvents in which synthetic aluminum salts are dissolved. However, specific coating properties are not provided.

[0011]因此,尤其是在高强钢和航空、航天应用中,仍存有对可替代目前镉层的涂层技术的需要。此外,还需要对环境安全和干净、同时成本和时间效率还高的铝电沉积技术。[0011] Thus, there remains a need for coating technologies that can replace current cadmium layers, especially in high strength steel and aerospace applications. In addition, there is a need for an aluminum electrodeposition technique that is environmentally safe and clean, while also being cost and time efficient.

                        发明概述Summary of Invention

[0012]一种金属电沉积的代表性方法,包括制备电镀液和在阴极电流下,将金属从该电镀液电沉积在导电基底上。该电镀液包括可溶金属盐和溶解在无水、非芳香有机溶剂中的有机添加剂的混合物。[0012] A representative method of metal electrodeposition includes preparing an electroplating bath and electrodepositing metal from the electroplating bath on a conductive substrate under cathodic current. The plating bath includes a mixture of soluble metal salts and organic additives dissolved in an anhydrous, non-aromatic organic solvent.

[0013]一种代表性电镀液包括无水、非芳香有机溶剂和包括可溶金属盐及有机添加剂的混合物,该混合物溶解在该无水、非芳香有机溶剂中。[0013] A representative electroplating bath includes an anhydrous, non-aromatic organic solvent and a mixture comprising a soluble metal salt and an organic additive dissolved in the anhydrous, non-aromatic organic solvent.

[0014]一种电镀系统的代表性实施方案包括含有电镀液的镀室、进入电镀系统的入口以及将待电镀的部件从入口输送到镀室的输送系统。该电镀液包括无水、非芳香有机溶剂和包括可溶金属盐及有机添加剂的混合物,该混合物溶解在该无水、非芳香有机溶剂中。[0014] A representative embodiment of an electroplating system includes a plating chamber containing a plating solution, an inlet into the electroplating system, and a delivery system for transporting parts to be plated from the inlet to the plating chamber. The electroplating solution includes an anhydrous, non-aromatic organic solvent and a mixture including soluble metal salts and organic additives, the mixture being dissolved in the anhydrous, non-aromatic organic solvent.

                         附图说明Description of drawings

[0015]结合附图可理解下面详细说明的优选实施方案,其中相同的数字表示相同的部件,其中:Can understand the preferred embodiment described in detail below in conjunction with accompanying drawing, wherein identical numeral represents identical part, wherein:

[0016]图1为电镀系统的略图。[0016] Figure 1 is a schematic diagram of the electroplating system.

优选实施方案的详细说明Detailed Description of the Preferred Embodiment

[0017]自非芳香有机溶剂(NAOS)的电沉积可沉积通过常规(含水)电镀不能获得的金属和合金。由于几乎没有或没有水存在于溶液中(如在含水溶液的水中),所以可降低或最小化高拉伸强度材料的氢脆化。此外,就部件处理、某些设备和方法而言,NAOS工艺同常规电镀具有相似或相同的特性,从而在常规电沉积设备中,允许NAOS的有效替代。[0017] Electrodeposition from non-aromatic organic solvents (NAOS) can deposit metals and alloys not obtainable by conventional (aqueous) electroplating. Since little or no water is present in solution (eg, in water in an aqueous solution), hydrogen embrittlement of high tensile strength materials can be reduced or minimized. In addition, the NAOS process has similar or identical characteristics to conventional electroplating in terms of part handling, certain equipment and methods, thereby allowing an effective replacement of NAOS in conventional electrodeposition equipment.

[0018]金属电沉积的代表性方法包括制备电镀液以及在阴极电流下,将金属从该电镀液电沉积在导电基底上。该电镀液包括溶解在无水、非芳香有机溶剂中的可溶金属盐和有机添加剂的混合物。[0018] A representative method of metal electrodeposition involves preparing an electroplating bath and electrodepositing metal from the electroplating bath on a conductive substrate under cathodic current. The electroplating bath comprises a mixture of soluble metal salts and organic additives dissolved in an anhydrous, non-aromatic organic solvent.

[0019]该无水、非芳香有机溶剂可为任意适宜的溶剂。例如,一种适宜的溶剂包括低分子量非芳香有机溶剂。在本文中,低分子量意味着200g/mole或更低。这样的溶剂包括醇类如乙醇、丙醇、异丙醇、丁醇、2-丁醇及其相应的、具有多于一个OH官能团的醇,乙醇胺以及胺。羧酸如草酸、柠檬酸以及柠檬酸铵可用作支持电解液(supportelectrolyte)或者也可作为溶剂。此外,电镀电解液可具有这些适宜溶剂的两种或多种的组合。此外,尽管也可使用其它有机溶剂,如酮、醛、烯烃、炔、醚、酰胺以及有毒的芳香族化合物,但是这些溶剂的毒性使得它们不受欢迎。[0019] The anhydrous, non-aromatic organic solvent can be any suitable solvent. For example, one suitable solvent includes low molecular weight non-aromatic organic solvents. Herein, low molecular weight means 200 g/mole or less. Such solvents include alcohols such as ethanol, propanol, isopropanol, butanol, 2-butanol and their corresponding alcohols having more than one OH functionality, ethanolamine and amines. Carboxylic acids such as oxalic acid, citric acid and ammonium citrate can be used as support electrolytes or also as solvents. In addition, the plating electrolyte may have a combination of two or more of these suitable solvents. Furthermore, although other organic solvents such as ketones, aldehydes, alkenes, alkynes, ethers, amides, and toxic aromatic compounds can also be used, the toxicity of these solvents makes them undesirable.

[0020]可溶性金属盐溶解在这些溶剂中。这些金属盐包括金属醇盐如乙醇盐、丙醇盐、异丙醇盐、丁醇盐及其相应的卤化物、磷酸盐、碳酸盐以及其它在电沉积期间,能够在阴极提供被还原金属离子的无机和有机化合物。该金属盐可单独存在,或可使用其它盐以及它们的混合物。[0020] Soluble metal salts are dissolved in these solvents. These metal salts include metal alkoxides such as ethoxides, propoxides, isopropoxides, butoxides and their corresponding halides, phosphates, carbonates, and other Ionic inorganic and organic compounds. The metal salt may be present alone, or other salts and mixtures thereof may be used.

[0021]在代表性方法中,用于电沉积的目标金属为那些不容易从含水溶液电镀的金属。目标金属的实例包括铝、钛、钽、锆、钼、钨、铌、锇、铪、镁以及这些金属的任意组合的合金,或者来自于溶解在上述溶剂中的盐的其它金属。[0021] In representative methods, the target metals for electrodeposition are those metals that are not easily electroplated from aqueous solutions. Examples of target metals include aluminum, titanium, tantalum, zirconium, molybdenum, tungsten, niobium, osmium, hafnium, magnesium, alloys of any combination of these metals, or other metals from salts dissolved in the above solvents.

[0022]在电镀液中,金属盐的浓度可为在电沉积的操作温度下各金属盐在溶剂中的饱和浓度的5%-100%。还可将导电添加剂如草酸、磷酸以及其它低分子量有机酸添加到这种电镀电解液中。在本文中,低分子量意味着200g/mol或者更低。可单独或组合添加增加溶剂电导率、且可溶解在这样的溶剂中的任意有机或无机化合物。例如,在乙醇中,下面的副产物是可溶的:氢氧化钠、硼酸、氯化铵、碳酸钙、碘化钠、氟化铵、硝酸铝、硬脂酸盐或氢氯酸盐、氯化铝、磷酸铝和磷酸铝钾。[0022] In the electroplating solution, the concentration of the metal salt can be 5%-100% of the saturation concentration of each metal salt in the solvent at the operating temperature of electrodeposition. Conductive additives such as oxalic acid, phosphoric acid, and other low molecular weight organic acids can also be added to this plating electrolyte. Herein, low molecular weight means 200 g/mol or lower. Any organic or inorganic compound that increases the conductivity of the solvent and is soluble in such a solvent may be added alone or in combination. For example, in ethanol the following by-products are soluble: sodium hydroxide, boric acid, ammonium chloride, calcium carbonate, sodium iodide, ammonium fluoride, aluminum nitrate, stearate or hydrochloride, chloride aluminum oxide, aluminum phosphate, and potassium aluminum phosphate.

[0023]最小化电解液污染可改善粘附力和涂层性能。电镀电解液的污染可导致沉积物不均匀、多孔、粘结(galling)、点蚀、起泡以及甚至导致根本不沉积。有多种方式抑制或最小化电解液被空气、水或溶液或者电沉积副产物污染。可利用电解液过滤和控制气氛(例如在封装镀液处)来协助维持电沉积浴的正确操作。例如,可在分子筛上连续过滤电镀电解液以最小化水的污染。用于该应用适宜的分子筛为3埃分子筛。在另一个实施例中,至少在金属在基底上电沉积期间,在电镀液上保持惰性气氛。该惰性气氛可例如通过保持同电镀液接触的气氛基本上无氧和无水来最小化被氧和水的污染。例如,氧含量可为1-10ppm,优选少于5ppm,以及水含量可为1-10ppm,优选少于5ppm,但是实际条件可依赖于被电沉积的金属而改变。优选地,当使用惰性气氛时,在电镀液上连续保持惰性气氛。一种惰性气氛的实例包括将氮气鼓入通过电解液和/或在电镀浴上气体调节氮气氛。[0023] Minimizing electrolyte contamination improves adhesion and coating performance. Contamination of the plating electrolyte can lead to uneven, porous, galling, pitting, foaming and even no deposition at all in the deposit. There are various ways to suppress or minimize electrolyte contamination by air, water or solution or by-products of electrodeposition. Electrolyte filtration and controlled atmospheres (eg, at potting baths) can be utilized to assist in maintaining proper operation of the electrodeposition bath. For example, plating electrolytes can be continuously filtered over molecular sieves to minimize water contamination. A suitable molecular sieve for this application is a 3 Angstrom molecular sieve. In another embodiment, an inert atmosphere is maintained over the plating bath at least during the electrodeposition of the metal on the substrate. The inert atmosphere can minimize contamination by oxygen and water, for example, by keeping the atmosphere in contact with the plating bath substantially free of oxygen and water. For example, the oxygen content may be 1-10 ppm, preferably less than 5 ppm, and the water content may be 1-10 ppm, preferably less than 5 ppm, although actual conditions may vary depending on the metal being electrodeposited. Preferably, when an inert atmosphere is used, the inert atmosphere is continuously maintained over the plating bath. An example of an inert atmosphere includes bubbling nitrogen gas through the electrolyte and/or gas-conditioning the nitrogen atmosphere on the electroplating bath.

[0024]在另一个实施例中,在镀室内可使用正压来减少污染。优选地,将正压保持在1大气压,但是取决于工艺的灵敏度和镀室的设计,该气氛可低于或高于1大气压。[0024] In another embodiment, a positive pressure may be used within the plating chamber to reduce contamination. Preferably, the positive pressure is maintained at 1 atmosphere, but depending on the sensitivity of the process and the design of the plating chamber, the atmosphere can be lower or higher than 1 atmosphere.

[0025]在另一个实施例中,可将用惰性气体如氮气充满、并用适当的催化剂过滤掉水和氧的手套箱型或密闭双室的室用于NAOS。可将在该手套箱型或密闭双室的室内的电镀液安排为单一的电解液浴,或可使之分成隔离的阴极电解液和阳极电解液室。使之分成阴极电解液和阳极电解液室是任选的,其中可能发生由于电解造成的溶液的分解。当将阴极电解液和阳极电解液室分开时,可通过例如在室之间的、适宜的离子渗透膜来获得可能的分解。对于需要分开电解液的电镀化学而言,尽管可使用很多种商用全渗透或半渗透膜,但适宜的离子渗透膜为聚合膜。在电极之间还可使用膜隔离,以使用不同的阳极和阴极电解液。[0025] In another embodiment, a glove box-type or closed double chamber chamber filled with an inert gas such as nitrogen and filtered out of water and oxygen with a suitable catalyst can be used for NAOS. The plating bath in this glove box-type or closed dual chamber chamber can be arranged as a single electrolyte bath, or it can be divided into separate catholyte and anolyte chambers. The separation into catholyte and anolyte compartments is optional, where decomposition of the solution due to electrolysis may occur. When separating the catholyte and anolyte compartments, possible dissociation can be obtained, for example, by a suitable ion-permeable membrane between the compartments. For plating chemistries that require separation of the electrolyte, suitable ion-permeable membranes are polymeric membranes, although a wide variety of commercially permeable or semi-permeable membranes are available. Membrane separation can also be used between the electrodes to use different anode and catholyte solutions.

[0026]在代表性电沉积方法中,适宜的阳极材料包括与被电镀金属电化学等同或相似的金属,只要它们在表面不形成绝缘阻挡层,或者无论可溶或不可溶、与该电解液相容的金属。为避免电解液污染,可使用由含有待电镀金属的材料形成的适宜的不可溶阳极或可溶阳极。另外,可使用其它阳极材料如镀铂钛,DSA型阳极或其它不可溶但导电的材料。[0026] In representative electrodeposition methods, suitable anode materials include metals that are electrochemically equivalent or similar to the metal being plated, as long as they do not form an insulating barrier on the surface, or, whether soluble or insoluble, are compatible with the electrolyte compatible metals. To avoid contamination of the electrolyte, suitable insoluble or soluble anodes formed from the material containing the metal to be plated may be used. Alternatively, other anode materials such as platinized titanium, DSA type anodes or other insoluble but conductive materials may be used.

[0027]取决于电解液组成和待电镀的金属,在导电基底上适宜的阴极电流密度可以在0.05到1000安培/dm2之间变化。在每一NAOS过程中,确定电极表面比,以使从阳极溶解的金属和被电镀金属之间的量达到平衡,从而维持电解液的化学平衡。[0027] Depending on the electrolyte composition and the metal to be plated, suitable cathodic current densities on the conductive substrate can vary between 0.05 and 1000 amps/ dm2 . In each NAOS process, the electrode surface ratio is determined so that the amount of metal dissolved from the anode and the metal to be plated is in balance, thereby maintaining the chemical balance of the electrolyte.

[0028]导电基底任选具有在电沉积之前制备的表面。例如,可将表面喷砂、掩蔽(masked),然后在电镀之前用碱或酸清洗。在用碱和酸清洗后,将该导电基底用醇浸渍或喷涂以去除任何含水清洗剂。在一些情况下,可用反向蚀刻(reverse etch)来提高粘附力。[0028] The conductive substrate optionally has a surface prepared prior to electrodeposition. For example, the surface can be grit blasted, masked, and then cleaned with alkali or acid prior to plating. After cleaning with alkali and acid, the conductive substrate is dipped or sprayed with alcohol to remove any aqueous cleaners. In some cases, a reverse etch can be used to improve adhesion.

[0029]可将电镀液或部分溶液的任意类型的搅拌结合在该工艺中。例如,可使用移动或振动汇流线(bus-bar),氮气或其它惰性气体鼓入或者超声设备。[0029] Any type of agitation of the plating solution or part of the solution may be incorporated into the process. For example, moving or vibrating bus-bars, nitrogen or other inert gas sparging, or ultrasonic equipment may be used.

[0030]可调节用于每一NAOS工艺的电镀液温度,从而使得溶剂表面张力不超过其汽化压的约50%(±10%),或者从而使得电镀液变冷来改善电镀条件和效率。例如,可通过使用热交换器或冷却器来调节电镀液。[0030] The bath temperature for each NAOS process can be adjusted so that the solvent surface tension does not exceed about 50% (± 10%) of its vapor pressure, or so that the bath is cooled to improve plating conditions and efficiency. For example, the plating bath can be conditioned by using a heat exchanger or cooler.

[0031]通过在液体表面部顶加入可以阻止蒸发但允许部件进入浴中的漂浮装置如聚合球或者化合物来减少电解液的蒸发。[0031] Evaporation of the electrolyte is reduced by adding flotation devices such as polyspheres or compounds on top of the liquid surface that prevent evaporation but allow the part to enter the bath.

[0032]图1是电镀系统的略图。电镀系统100的一种代表性实施方案包括含有电镀液的镀室102,电镀系统100的入口104和将待电镀部件108从入口104输送到镀室102中的输送系统106。[0032] Figure 1 is a schematic diagram of an electroplating system. A representative embodiment of an electroplating system 100 includes a plating chamber 102 containing an electroplating solution, an inlet 104 of the electroplating system 100 , and a delivery system 106 for transferring a part 108 to be electroplated from the inlet 104 into the plating chamber 102 .

[0033]电镀室102包括单一的电镀室,或者如在此讨论的,用于阳极电解液和阴极电解液的分开的室。如在图1中所示,该室102包括具有两个阳极110、112的分开的室,该两个阳极基本上彼此相对设置,其间具有阴极电解液。每一个阳极110、112通过膜114、116同阴极电解液隔开。[0033] The plating chamber 102 includes a single plating chamber, or, as discussed herein, separate chambers for the anolyte and catholyte. As shown in FIG. 1 , the chamber 102 comprises a separate chamber having two anodes 110, 112 disposed substantially opposite each other with the catholyte in between. Each anode 110,112 is separated from the catholyte by a membrane 114,116.

[0034]通过循环通过容纳分子筛的外室118来连续搅拌电镀液,该外室清除水分子。一个协同泵(未显示)帮助在镀室102和外室118之间循环和再循环电解液,从而协助控制电解液的纯度和组成。[0034] The plating solution is continuously agitated by circulation through an outer chamber 118 containing a molecular sieve, which scavenges water molecules. A cooperating pump (not shown) helps circulate and recirculate the electrolyte between the plating chamber 102 and the outer chamber 118, thereby assisting in controlling the purity and composition of the electrolyte.

[0035]此外,通过气体调节至少在镀室102内,优选在电镀系统100中保持惰性气氛。在图1中,气体调节显示为调节的氮气罐120。但是,可以使用任意适宜的惰性气氛和任意适宜的调节系统。一般在镀室102中保持例如大约1atm的正压。[0035] Furthermore, an inert atmosphere is maintained at least within the plating chamber 102, preferably in the electroplating system 100, by gas conditioning. In FIG. 1 , the gas regulation is shown as a regulated nitrogen tank 120 . However, any suitable inert atmosphere and any suitable conditioning system may be used. A positive pressure, for example about 1 atm, is generally maintained in the plating chamber 102 .

[0036]电镀系统100的入口104可为任意适宜的入口,在保持适当的污染和浴蒸汽控制的同时,该入口容纳部件108并能与镀室102对接。例如,图1显示入口104为气锁型转移点,其具有第一外门122和第二内门124。通常,外门120和内门122的操作与真空泵和惰性气体回填阀相协调,从而使从电镀系统100的外部引入到镀室102中的空气最小化。[0036] The inlet 104 of the electroplating system 100 may be any suitable inlet that accommodates the member 108 and interfaces with the plating chamber 102 while maintaining proper contamination and bath vapor control. For example, FIG. 1 shows the entrance 104 as an airlock type transfer point having a first outer door 122 and a second inner door 124 . Generally, the operation of the outer door 120 and inner door 122 is coordinated with the vacuum pump and inert gas backfill valve to minimize the introduction of air into the plating chamber 102 from outside the electroplating system 100 .

[0037]输送系统106将部件108放置进镀室102内用于电沉积的位置。例如如图1所示,输送系统106将部件108放置进阴极电解液中,并同电源126电连接。取决于电化学条件,电源126可为重量分析(gravimetric)或恒电势电源。电源126还同每一个阳极110、112电连接。[0037] Conveyor system 106 places part 108 into position within plating chamber 102 for electrodeposition. For example, as shown in FIG. 1 , the delivery system 106 places the component 108 into the catholyte and is electrically connected to a power source 126 . Depending on the electrochemical conditions, the power source 126 may be a gravimetric or potentiostatic power source. A power source 126 is also electrically connected to each anode 110,112.

[0038]输送系统106可包括任意适宜的、用于部件108的输送系统。适宜的输送系统实例包括液压升降装置,链式升运机,传送带,升降机系统,上推动系统(rack-up system),旋转系统等。例如,大部件可被向上推动,并从推动位置电镀,小部件可以滚镀法电镀。在滚镀中,将部件放置在滚筒中,该滚筒在电镀液中旋转,从而使得部件全部浸在镀液内。在滚镀中,将来自于推动步骤的、剩余的未电镀点减少到最小值,从而电镀整个部件。[0038] Delivery system 106 may comprise any suitable delivery system for component 108. Examples of suitable conveyor systems include hydraulic lifts, chain elevators, conveyor belts, elevator systems, rack-up systems, rotary systems, and the like. For example, large parts can be pushed up and plated from the pushed position, and small parts can be plated by barrel plating. In barrel plating, the part is placed in a drum that is rotated in an electroplating bath so that the part is fully immersed in the bath. In barrel plating, the remaining unplated spots from the push step are minimized to plate the entire part.

[0039]在下面的实施例(实施例1-实施例3)中说明了可使铝电镀基于NAOS的溶液:[0039] The following examples (Example 1-Example 3) illustrate the possibility of electroplating aluminum with NAOS-based solutions:

实施例1:Example 1:   成分 Element   化学名称 Chemical Name   浓度 Concentration   备注 Remark   溶剂 Solvent   乙醇 ethanol   - -   铝源#1 Aluminum source #1   异丙醇铝 Aluminum isopropoxide   0-5g/L 0-5g/L   导电添加剂#1 Conductive Additive #1   草酸 Oxalic acid   0-100g/L 0-100g/L   铝源#2 Aluminum source #2   氯化铝 aluminum chloride   0-900g/L 0-900g/L   导电添加剂#2 Conductive Additive #2   硼酸 boric acid   0-50g/L 0-50g/L   温度 temperature   室温 room temperature   阳极材料 Anode material   铝 aluminum

实施例2:Example 2:   成分 Element   化学名称 Chemical Name   浓度 Concentration   备注 Remark   溶剂 Solvent   乙醇-异丙醇 ethanol-isopropanol   0-50V/V 0-50V/V   铝源#1 Aluminum source #1   异丙醇铝 Aluminum isopropoxide   0-5g/L 0-5g/L   导电添加剂#1 Conductive Additive #1   草酸 Oxalic acid   0-100g/L 0-100g/L   铝源#2 Aluminum source #2   氯化铝 aluminum chloride   0-900g/L 0-900g/L   温度 temperature   室温 room temperature   阳极材料 Anode material   铝 aluminum

实施例3:Example 3:   成分 Element   化学名称 Chemical Name   浓度 Concentration   备注 Remark   溶剂 Solvent   丁醇 Butanol   - -   铝源#1 Aluminum source #1   丁醇铝 Aluminum butoxide   0-10g/L 0-10g/L   导电添加剂#1 Conductive Additive #1   草酸 Oxalic acid   0-100g/L 0-100g/L   铝源#2 Aluminum source #2   氯化铝 aluminum chloride   0-500g/L 0-500g/L   温度 temperature   室温 room temperature   阳极材料 Anode material   铝 aluminum

[0040]下面的实施例(实施例4)中说明了可使钛电镀基于NAOS的溶液:[0040] The following example (Example 4) illustrates the possibility of electroplating titanium with a NAOS-based solution:

实施例4:Example 4:   成分 Element   化学名称 Chemical Name   浓度 Concentration   备注 Remark   溶剂 Solvent   乙醇 ethanol   - -   钛源#1 Titanium source #1   乙醇钛 Titanium Ethoxide   0-10g/L 0-10g/L   导电添加剂#1 Conductive Additive #1   硼酸 boric acid   0-50g/L 0-50g/L   钛盐#2 Titanium salt #2   氯化钛 Titanium chloride   0-50g/L 0-50g/L   温度 temperature   室温 room temperature   阳极材料 Anode material   钛 Titanium

[0041]下面的实施例(实施例5)中说明了可使钽电镀基于NAOS的溶液:[0041] The following example (Example 5) illustrates the possibility of electroplating tantalum with NAOS-based solutions:

实施例5:Example 5:   成分 Element   化学名称 Chemical Name   浓度 Concentration   备注 Remark   溶剂 Solvent   乙醇 ethanol   - -   钽源#1 Tantalum Source #1   异丙醇钽 Tantalum isopropoxide   0-100g/L 0-100g/L   导电添加剂#1 Conductive Additive #1   草酸 Oxalic acid   90±15g/L 90±15g/L   钽源#2 Tantalum source #2   五氯化钽 Tantalum pentachloride   0-5000g/L 0-5000g/L   温度 temperature   室温 room temperature   阳极材料 Anode material   钽 Tantalum

[0042]下面的实施例(实施例6)中说明了可使锆电镀基于NAOS的溶液:[0042] The following example (Example 6) demonstrates that zirconium can be electroplated with a NAOS-based solution:

实施例6:Embodiment 6:   成分 Element   化学名称 Chemical Name   浓度 Concentration   备注 Remark   溶剂 Solvent   乙醇 ethanol   - -   锆源#1 Zirconium source #1   乙醇锆 Zirconium ethoxide   0-50g/L 0-50g/L   导电添加剂#1 Conductive Additive #1   草酸 Oxalic acid   0-100g/L 0-100g/L   锆源#2 Zirconium source #2   四氯化锆 Zirconium tetrachloride   0-500g/L 0-500g/L   温度 temperature   室温 room temperature   阳极材料 Anode material   锆 Zirconium

[0043]尽管在金属沉积工艺中,可以使用多种阳极、阴极和溶液化学组成,但是用于铝的优选电沉积工艺使用铝阳极、温和的、有机和无机铝盐以及其它电导率促进化学剂。但是,通过电沉积可以从相同官能团的有机溶剂获得其它金属和难熔金属。[0043] Although in metal deposition processes, a variety of anode, cathode and solution chemistries can be used, the preferred electrodeposition process for aluminum uses aluminum anodes, mild, organic and inorganic aluminum salts, and other conductivity enhancing chemistries . However, other metals and refractory metals can be obtained from organic solvents of the same functional groups by electrodeposition.

[0044]分析了该电沉积方法的特性和来自于该工艺的电镀铝的性能。发现均镀能力大约与镉沉积的均镀能力相等,该均镀能力对于在复杂结构和内径上进行均匀涂覆而言是重要的。由于该铝电镀工艺是无水的,该工艺在阴极不释放在高强钢中可导致氢脆的游离氢。此外,不象传统的镉那样,电镀的铝可被阳极氧化,从而可将硬度从一般的10-25维氏硬度(Hv)增加到如此电镀涂层大约500维氏的硬度(在该硬度范围内,使用用于维氏硬度的ASTM标准测试规程),从而有助于在制造和使用中减少刮伤和损坏。[0044] The characteristics of the electrodeposition method and the performance of the electroplated aluminum from this process were analyzed. The throwing power was found to be approximately equal to that of cadmium deposition, which is important for uniform coating on complex structures and inside diameters. Since the aluminum plating process is anhydrous, the process does not release free hydrogen at the cathode which can cause hydrogen embrittlement in high strength steel. In addition, unlike traditional cadmium, plated aluminum can be anodized, thereby increasing the hardness from a typical Vickers hardness (Hv) of 10-25 to about 500 Vickers hardness for such plated coatings (in this hardness range inside, using the ASTM standard test procedure for Vickers hardness), thus helping to reduce scratches and damage during manufacture and use.

[0045]本发明的应用之一为在航空、航天中使用的高强钢部件上电沉积铝。只要基底不易受由镀液的化学性质带来的化学侵蚀的影响,可将该NAOS工艺应用在任意导电基底上。[0045] One of the applications of the present invention is the electrodeposition of aluminum on high-strength steel parts used in aviation and aerospace. The NAOS process can be applied to any conductive substrate as long as the substrate is not susceptible to chemical attack by the chemistry of the plating solution.

[0046]尽管已结合其代表性实施方案公开了本发明,但是应该意识到的是,不违背本发明精神和如在所附权利要求中限定的本发明范围,本领域技术人员可进行未具体公开的添加、删减、修改和替代。[0046] Although the invention has been disclosed in connection with representative embodiments thereof, it should be appreciated that, without departing from the spirit and scope of the invention as defined in the appended claims, those skilled in the art may make unspecified Additions, deletions, modifications and substitutions are disclosed.

Claims (34)

1.金属的电沉积方法,该方法包括:1. The electrodeposition method of metal, this method comprises: 制备电镀液,该电镀液包括溶解在无水、非芳香有机溶剂中的可溶金属盐和有机添加剂的混合物;以及preparing a plating solution comprising a mixture of soluble metal salts and organic additives dissolved in an anhydrous, non-aromatic organic solvent; and 在阴极电流下,在导电基底上自该电镀液电沉积该金属。The metal is electrodeposited from the plating solution on a conductive substrate under cathodic current. 2.权利要求1的方法,其中该可溶金属盐为金属醇盐。2. The method of claim 1, wherein the soluble metal salt is a metal alkoxide. 3.权利要求2的方法,其中该金属醇盐选自金属乙醇盐、丙醇盐、异丙醇盐、丁醇盐、相应的卤化物、磷酸盐和碳酸盐及其混合物。3. The method of claim 2, wherein the metal alkoxide is selected from the group consisting of metal ethoxides, propoxides, isopropoxides, butoxides, the corresponding halides, phosphates and carbonates, and mixtures thereof. 4.权利要求1的方法,其中该金属选自铝、钛、钽、锆、钼、钨、铌、锇、铪、镁及其合金和组合。4. The method of claim 1, wherein the metal is selected from the group consisting of aluminum, titanium, tantalum, zirconium, molybdenum, tungsten, niobium, osmium, hafnium, magnesium, and alloys and combinations thereof. 5.权利要求1的方法,其中该无水、非芳香有机溶剂为低分子量非芳香溶剂。5. The method of claim 1, wherein the anhydrous, non-aromatic organic solvent is a low molecular weight non-aromatic solvent. 6.权利要求1的方法,其中该无水、非芳香有机溶剂为醇或胺。6. The method of claim 1, wherein the anhydrous, non-aromatic organic solvent is an alcohol or an amine. 7.权利要求6的方法,其中该醇具有多于一个OH官能团。7. The method of claim 6, wherein the alcohol has more than one OH functional group. 8.权利要求1的方法,其中该无水、非芳香有机溶剂选自乙醇、丙醇、异丙醇、丁醇、2-丁醇以及乙醇胺。8. The method of claim 1, wherein the anhydrous, non-aromatic organic solvent is selected from the group consisting of ethanol, propanol, isopropanol, butanol, 2-butanol, and ethanolamine. 9.权利要求1的方法,其中可溶金属盐在电镀液中的浓度为在电沉积的操作温度下,该金属盐在无水、非芳香有机溶剂中的饱和浓度的5%-100%。9. The method of claim 1, wherein the concentration of the soluble metal salt in the electroplating bath is 5% to 100% of the saturation concentration of the metal salt in an anhydrous, non-aromatic organic solvent at the operating temperature of electrodeposition. 10.权利要求1的方法,包括将导电添加剂加入到电镀液中以提高溶剂的电导率。10. The method of claim 1, comprising adding a conductive additive to the plating solution to increase the conductivity of the solvent. 11.权利要求10的方法,其中导电添加剂为低分子量的有机固体。11. The method of claim 10, wherein the conductive additive is a low molecular weight organic solid. 12.权利要求10的方法,其中导电添加剂为草酸、柠檬酸、柠檬酸铵或金属的氯化物、五氯化物、四氯化物、或在电镀液中可溶的有机或无机化合物。12. The method of claim 10, wherein the conductive additive is oxalic acid, citric acid, ammonium citrate, or metal chlorides, pentachlorides, tetrachlorides, or organic or inorganic compounds soluble in the electroplating bath. 13.权利要求1的方法,包括在分子筛上连续过滤该电镀液,并至少在电沉积期间,在电镀液上保持惰性气氛。13. The method of claim 1, comprising continuously filtering the plating solution over molecular sieves and maintaining an inert atmosphere over the plating solution at least during electrodeposition. 14.权利要求13的方法,其中惰性气氛使得同电镀液接触的气氛保持基本上无氧和无水。14. The method of claim 13, wherein the inert atmosphere maintains the atmosphere in contact with the plating bath substantially free of oxygen and water. 15.权利要求1的方法,包括使电镀液分成分离的阴极电解液室和阳极电解液室,该阴极电解液室和阳极电解液室由膜隔开。15. The method of claim 1, comprising dividing the electroplating bath into separate catholyte and anolyte compartments, the catholyte and anolyte compartments being separated by a membrane. 16.权利要求1的方法,包括搅拌该电镀液或者搅拌被电镀的部件。16. The method of claim 1, comprising agitating the electroplating bath or agitating the part being electroplated. 17.权利要求1的方法,包括通过喷砂表面、掩蔽表面、用碱性或酸性清洗溶液清洗以及通过醇浸入或喷涂去除清洗溶液,来制备用于电沉积的导电基底表面。17. The method of claim 1, comprising preparing the conductive substrate surface for electrodeposition by sandblasting the surface, masking the surface, cleaning with an alkaline or acidic cleaning solution, and removing the cleaning solution by alcohol immersion or spraying. 18.一种电镀液,包括:18. An electroplating solution comprising: 无水、非芳香有机溶剂;以及Anhydrous, non-aromatic organic solvents; and 包括可溶金属盐和有机添加剂的混合物,该混合物溶解在无水、非芳香有机溶剂中。Consists of a mixture of soluble metal salts and organic additives dissolved in an anhydrous, non-aromatic organic solvent. 19.权利要求18的电镀液,其中该可溶金属盐包括可使铝电沉积的铝盐。19. The electroplating bath of claim 18, wherein the soluble metal salt comprises an aluminum salt capable of electrodepositing aluminum. 20.权利要求18的电镀液,其中该可溶金属盐包括可使钛电沉积的钛盐。20. The electroplating bath of claim 18, wherein the soluble metal salt comprises a titanium salt capable of electrodepositing titanium. 21.权利要求18的电镀液,其中该可溶金属盐包括可使钽电沉积的钽盐。21. The electroplating bath of claim 18, wherein the soluble metal salt comprises a tantalum salt capable of electrodepositing tantalum. 22.权利要求18的电镀液,其中该可溶金属盐包括可使锆电沉积的锆盐。22. The electroplating bath of claim 18, wherein the soluble metal salt comprises a zirconium salt capable of electrodepositing zirconium. 23.权利要求18的电镀液,其中该可溶金属盐包括至少一种可使难熔金属电沉积的难熔金属盐。23. The electroplating bath of claim 18, wherein the soluble metal salt comprises at least one refractory metal salt capable of electrodepositing a refractory metal. 24.权利要求23的电镀液,其中该难熔金属为钼、钨、铌、锇、铪、其合金或其组合。24. The electroplating bath of claim 23, wherein the refractory metal is molybdenum, tungsten, niobium, osmium, hafnium, alloys thereof, or combinations thereof. 25.权利要求18的电镀液,其中该可溶金属盐为金属醇盐。25. The electroplating bath of claim 18, wherein the soluble metal salt is a metal alkoxide. 26.权利要求18的电镀液,其中该无水、非芳香有机溶剂为低分子量非芳香溶剂。26. The electroplating solution of claim 18, wherein the anhydrous, non-aromatic organic solvent is a low molecular weight non-aromatic solvent. 27.一种电镀系统,包括:27. An electroplating system comprising: 含有电镀液的镀室;a plating chamber containing an electroplating solution; 电镀系统的入口;以及Inlets to plating systems; and 将待电镀部件从该入口输送到镀室的输送系统,a conveying system for conveying the parts to be plated from this inlet to the plating chamber, 其中该电镀液包括无水、非芳香有机溶剂和包括可溶性金属盐及有机溶剂的混合物,该混合物溶解在该无水、非芳香有机溶剂中。Wherein the electroplating solution includes anhydrous, non-aromatic organic solvent and a mixture including soluble metal salt and organic solvent, and the mixture is dissolved in the anhydrous, non-aromatic organic solvent. 28.权利要求27的电镀系统,其中该镀室包括单一的电镀室,或者用于阳极电解液和阴极电解液的分开的电镀室。28. The electroplating system of claim 27, wherein the plating chamber comprises a single plating chamber, or separate plating chambers for the anolyte and catholyte. 29.权利要求27的电镀系统,其中该电镀室包括具有两个阳极的分开的电镀室,该两个阳极基本上彼此相对设置,其间具有阴极电解液,各阳极通过膜同阴极电解液隔开。29. The electroplating system of claim 27, wherein the electroplating chamber comprises a separate electroplating chamber having two anodes disposed substantially opposite each other with a catholyte therebetween, each anode being separated from the catholyte by a membrane . 30.权利要求27的电镀系统,包括容纳分子筛的外室,其中通过循环经过外室来连续搅拌该电镀液。30. The electroplating system of claim 27, comprising an outer chamber containing the molecular sieve, wherein the electroplating solution is continuously agitated by circulation through the outer chamber. 31.权利要求27的电镀系统,包括惰性气体源,以及通过惰性气体源的气体调节将惰性气氛保持在至少该镀室内。31. The electroplating system of claim 27, comprising an inert gas source, and maintaining an inert atmosphere within at least the plating chamber by gas conditioning of the inert gas source. 32.权利要求31的电镀系统,其中将该惰性气氛保持在正压。32. The electroplating system of claim 31, wherein the inert atmosphere is maintained at a positive pressure. 33.权利要求27的电镀液,其中该可溶性金属盐为金属醇盐。33. The electroplating bath of claim 27, wherein the soluble metal salt is a metal alkoxide. 34.权利要求27的电镀液,其中该无水、非芳香有机溶剂为低分子量非芳香溶剂。34. The electroplating bath of claim 27, wherein the anhydrous, non-aromatic organic solvent is a low molecular weight non-aromatic solvent.
CN 200480012257 2003-03-05 2004-03-05 Electrodeposition of aluminum and refractory metals from non-aromatic organic solvents Pending CN1784512A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101289753B (en) * 2007-04-19 2011-03-09 英飞凌科技股份公司 Electric deposition aluminum
CN102449204A (en) * 2009-05-29 2012-05-09 阿斯特恩先进材料有限公司 Electrodeposition of elemental zinrconium
CN104894610A (en) * 2015-06-10 2015-09-09 陈新棠 Electroplate liquid
CN105229825A (en) * 2013-07-30 2016-01-06 株式会社Lg化学 Electrodes that contain a coating to prevent reaction with the electrolyte
CN106435706A (en) * 2015-08-04 2017-02-22 张无量 Electrochemical polishing method for magnesium metal component

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101289753B (en) * 2007-04-19 2011-03-09 英飞凌科技股份公司 Electric deposition aluminum
CN102449204A (en) * 2009-05-29 2012-05-09 阿斯特恩先进材料有限公司 Electrodeposition of elemental zinrconium
CN105229825A (en) * 2013-07-30 2016-01-06 株式会社Lg化学 Electrodes that contain a coating to prevent reaction with the electrolyte
US9899682B2 (en) 2013-07-30 2018-02-20 Lg Chem, Ltd. Electrode including coating layer for preventing reaction with electrolyte solution
CN104894610A (en) * 2015-06-10 2015-09-09 陈新棠 Electroplate liquid
CN106435706A (en) * 2015-08-04 2017-02-22 张无量 Electrochemical polishing method for magnesium metal component
CN106435706B (en) * 2015-08-04 2019-02-26 张无量 The electrochemical polishing method of magnesium intravascular stent

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