CN1760092A - Caps for thin plate support containers - Google Patents

Abstract

The invention reliably fixes the cover body on the container body, and can easily clean and dry each part and restrain the rotation of the semiconductor wafer caused by vibration. The cover 15 for a production line of the present invention can plug the container body 12 of the thin plate supporting container 11. The simple attachment/detachment mechanism 32 includes an engaging member 42 which is capable of being extended and engaged with the container body side, and a push-out member 43 which is connected to the engaging member and capable of being extended and retracted, and when the push-out member pushes out the engaging member, the front end thereof is faced to a front end side cam 40 on one side top, the base end is faced to a base end lower cam 39 on the other side top, and the base end lower cam is similarly faced to a base end side upper cam 53 and a projection 69 of the push-out cam on the other side top. The simple attachment/detachment mechanism is detachably detachable, and includes a support rib 126 and a support ridge 131.

Description

Caps for thin plate support containers

technical field

The present invention relates to a cover body for a thin plate holding container used for storing, transporting, manufacturing steps, etc., for storing thin plates such as semiconductor wafers, memory disks, and liquid crystal glass substrates.

Background technique

Sheet support containers for storing and transporting thin sheets such as semiconductor wafers are known.

The thin-plate support container is mainly composed of a container body and a cover that blocks the upper opening of the container body. A member for supporting thin plates such as semiconductor wafers is provided inside the container body. In this sheet supporting container, in order to prevent contamination of the surface of the thin sheet such as a semiconductor wafer accommodated therein, it is necessary to keep the inside of the container clean during transportation. Therefore, the inside of the container is hermetically sealed. In other words, the cover body is fixed on the container body, so that the container body is in a sealed state. There are various configurations for fixing the lid to the container body.

Thin plate support containers transported to semiconductor manufacturing plants, etc., are placed on the production line, and the lids are automatically attached and detached by dedicated equipment.

One of the lids corresponding to this dedicated device is described in Patent Document 1. The cover 1 is composed of a main body 2 , a cam member 3 , a latch lever 4 and a fulcrum 5 as shown in FIG. 2 .

The cam member 3 is rotatably mounted on the body 2 . The cam member 3 is provided with a cam portion 6 . The cam portion 6 is provided with an elongated hole-shaped connection opening 7 .

The base end of the latch lever 4 is provided with an S-shaped cam follower 8 , and the S-shaped cam follower 8 is fitted into the connection opening 7 to catch its movement.

The fulcrum 5 is constituted by a protruding member provided on the body 2 for supporting the latch lever 4 .

According to this configuration, the S-shaped cam follower portion 8 captured by the connection opening 7 moves rightward in the drawing and is pushed up upward by the rotation of the cam member 3 . Thus, the latch lever 4 extends from the main body 2 and rotates around the fulcrum 5 to push the front end of the latch lever 4 downward.

At this time, the front end of the latch lever 4 is fitted into the hole on the side of the container body and pushed down downward, thereby fixing the lid body against the side of the container body.

(Patent Document 1) Japanese Patent Application Laid-Open No. 2001-512288

Contents of the invention

However, as described above in the cover body 1, since the base end portion of the latch lever 4 is captured by the cam member 3 and is pushed up while extending outward, the latch lever 4 is configured to be able to rotate around the fulcrum 5. , if it is changed to the principle of leverage, the base end of the latch lever 4 can be used as the force point, the front end is the action point, and the fulcrum 5 becomes the fulcrum.

In such a case, in order to improve the airtightness of the container body, the lid body 1 must be strongly pressed against the container body, so the front end of the latch lever 4 must be strongly pressed against the hole on the side of the container body.

To achieve such an effect, it is necessary to increase the strength of the cam member 3 and the latch lever 4 . This is because the distance between the front end of the latch lever 4 and the fulcrum 5 is relatively long. In this situation, as long as the fulcrum 5 and the front end of the latch lever 4 are staggered, the front end of the latch lever 4 can be strongly pressed against the container body without increasing the strength of the cam member 3 and the latch lever 4. side hole.

However, if the fulcrum 5 is shifted from the front end side, the distance to push the base end of the latch lever 4 upward will be lengthened, so that the thickness of the cover body 1 must be thickened to maintain the pushed-up distance. .

In addition, the inner surface of the cover is usually provided with a pressing piece against the wafer, which supports the semiconductor wafer contained in the container body from above, but when the diameter of the semiconductor wafer increases, the strength of supporting each semiconductor wafer also needs to be increased. Increase. Therefore, the reaction force from the semiconductor wafer that the wafer presser bears also increases. Furthermore, similarly, when the number of accommodated semiconductor wafers increases, the reaction force from the semiconductor wafers increases. As a result, the reaction force bends the cover body and the wafer holder outward to weaken the pressing force of the center of the wafer holder, so when external shock is transmitted, the semiconductor wafer may rotate.

The present invention is made in view of the above-mentioned problems. Therefore, the object of the present invention is to provide a cover for a thin-plate support container that can be firmly and reliably fixed without increasing the volume, even when shocks from the outside are transmitted to the inside. Can prevent the rotation of the thin plate. means of solving problems

The cover body for a sheet-holding container of the first invention is a cover body for a sheet-holding container that closes the container body of a sheet-holding container containing a plurality of sheets and is conveyed therein, and is characterized in that: A detachable simple loading and unloading mechanism for fixing and releasing the fixing. The simple loading and unloading mechanism includes: an engaging member capable of extending out and engaging with the container body side; a pushing member capable of being connected with the engaging member to extend and retract; a side cam that pushes the front end side of the above-mentioned joint member to one side when the above-mentioned joint member is pushed out by the above-mentioned push-out member; .

According to the above configuration, when the joint member is pushed out by the pushing member, the front cam pushes the front end side of the joint member to one side, and the proximal cam also pushes the proximal side of the joint member to the other side. In this way, the cover body can be fixed on the side of the container body.

The lid body for a thin-plate holding container according to the second invention is characterized in that in the lid body for a thin-plate holding container according to the first invention, the front end side cam has an inclined surface pushing the front end side of the joining member to one side.

According to the above configuration, the front end side of the joining member can be pushed to one side by the inclined surface of the front end side cam, and joined to the container main body side.

The lid body for a thin-plate holding container according to the third invention is characterized in that in the lid body for a thin-plate holding container according to the first or second invention, the base end side cam is provided with a slope that pushes the base end side of the joining member toward the other side. .

According to the above configuration, the base end side of the joint member can be pushed to the other side by the inclined surface of the base end side cam, and joined to the container body side.

A cover for a thin-plate holding container according to a fourth invention is characterized in that in the cover for a thin-plate holding container according to any one of the first to third inventions, a fulcrum for rotation of the joining member is provided on the front end side of the joining member.

According to the above configuration, the joint member rotates around the fulcrum. Since the fulcrum is provided on the front end side of the joining member, the lid can be strongly pressed against the container body by the principle of leverage.

The lid body for thin-plate holding containers of the fifth invention is characterized in that in any one of the lid bodies for thin-plate holding containers of the first to fourth inventions, the above-mentioned simple attachment and detachment mechanism is set to be freely attachable and detachable, and its constituent parts are also assembled as Can be disassembled separately.

According to the above structure, when cleaning, it can be easily disassembled and disassembled to take out the constituent parts and clean them separately. In this way, not only can all corners be cleaned, but also dry quickly.

A cover for a sheet-holding container according to the sixth invention is a cover for a sheet-holding container that closes the container body of a sheet-holding container containing a plurality of sheets and is transported, and is characterized in that: A thin plate pressing member for supporting the thin plate in the above-mentioned container body, the thin plate pressing member has supporting pieces arranged alternately.

According to the above configuration, the supporting pieces arranged alternately can support the peripheral edge of the thin plate. At this time, the surrounding edges of the thin plate are connected alternately with each other through the supporting pieces, so as to be reliably supported.

A lid for a thin plate holding container according to a seventh invention is a lid for a thin plate holding container that closes the container body of a thin plate supporting container that contains a plurality of thin plates and is transported, and is characterized in that: The thin plate resisting part of the thin plate in the container body, the thin plate resisting part is composed of two top joints with supporting plates arranged alternately, and an elastic support plate part elastically supporting the top joints. The elastic support plate part is installed to support between each top piece and both sides, and at the same time, the elastic support plate part between each top piece supports each top piece in a slightly floating state.

According to the above configuration, since the elastic supporting plate portion between the top tabs supports the top tabs in a state slightly raised from the mounting surface, the thin plate can usually be supported with not too strong force. When the thin-plate supporting container is accidentally dropped, etc., and receives a large impact from the outside, the elastic support plate portion between the top pieces contacts the support surface to strongly support the top pieces. In this way, the sheet can be protected from strong impacts.

The cover body for a sheet-holding container according to the eighth invention is a cover body for a sheet-holding container for sealing a container body of a sheet-holding container containing a plurality of sheets inside for transportation, and is characterized in that a cover fixing member is provided, In the state attached to the above-mentioned container body, it is covered and fixed from the outside.

According to the above configuration, the cover fixing member can be attached to the support cover on the container body. In this way, even if a strong impact such as dropping occurs, the lid body will not separate from the container body.

A cover for a sheet-holding container according to a ninth invention is a cover for a sheet-holding container that closes the container body of a sheet-holding container containing a plurality of sheets and is transported, and is characterized in that: The thin plate resisting part supported by the thin plate in the container body, the thin plate resisting part has a plurality of top joints arranged in parallel and directly connected to the plurality of thin plates respectively, and each of the above parallel top joints is formed so that it is located in the center The part on the side protrudes toward the side of the thin plate more than the parts located on both sides.

According to the above configuration, the top tabs arranged so that the central side protrudes toward the thin plate side more than the two sides can absorb the bending of the lid body and support the thin plates with equal force.

The cover body for a thin-plate holding container according to the tenth invention is characterized in that in the cover body for a thin-plate holding container according to the ninth invention, the above-mentioned thin plate pressing member includes: a base end support portion fixed on the inner surface side of the cover; A plurality of elastic support plate parts supported by the end support part and respectively supporting one end of each of the above-mentioned top tabs supports each elastic support plate part of each of the above-mentioned top tabs, and is formed so that the above-mentioned top tabs positioned at the central side are larger than those positioned at the other top tabs. The above-mentioned top tabs on both sides further protrude toward the above-mentioned thin plate side.

According to the above-mentioned structure, each elastic support plate portion, because among each top tab that arranges side by side, center side is more than both sides protrudes toward thin plate side and supports, so can absorb the bending of lid body, and with equal strength Each sheet is supported.

The lid body for a thin-plate holding container of the eleventh invention is characterized in that in the lid body for a thin-plate holding container of the ninth invention, the above-mentioned thin plate pressing member is provided with a base end support portion fixed on the inner surface side of the lid, and the base end The supporting part is supported by a plurality of one-side elastic support plate parts that respectively support one end of the above-mentioned top tabs, and a plurality of other-side elastic support plates that respectively support the other ends of the above-mentioned top tabs and are connected to the inner surface of the above-mentioned cover. One or both of the one-side elastic support plate part and the other side elastic support plate part supporting each of the above-mentioned top tabs are formed so that the above-mentioned top tab on the central side is larger than the above-mentioned top tab on both sides. The top tab further bulges toward the side of the sheet.

According to the above-mentioned structure, because the elastic support plate portion on one side or the support plate portion on the other side, among the top tabs arranged in parallel, the central side is more raised to the thin plate side than the two sides to support, so the cover can be absorbed. The bending of each sheet is supported with equal force.

The cover body for a thin-plate holding container according to the twelfth invention is characterized in that in the cover body for a thin-plate holding container according to the ninth invention, the above-mentioned thin plate pressing member is provided with a base end support portion fixed on the inner surface side of the cover, and the base end Supported by the supporting part and respectively supporting a plurality of one-side elastic support plates at one end of each of the above-mentioned top tabs, respectively supporting the other ends of each of the above-mentioned top tabs and a plurality of other-side elastic support plates that are abutted on the inner surface of the above-mentioned cover. part, and the support ridge provided on the inner surface of the cover and abutted against the other side elastic support plate to support the other side support plate, the support ridge and the other side elastic support plate One or both of them are formed so that the above-mentioned top tab located on the central side is more raised toward the side of the thin plate than the above-mentioned top tabs located on both sides thereof.

According to the above-mentioned structure, because the supporting protruding line or the other side supporting plate part, among the top tabs arranged in parallel, the central side is more raised to the thin plate side than the two sides to support, so the bending of the cover can be absorbed. Instead, each sheet is supported with an equal force.

A cover body for a thin-plate holding container according to a thirteenth invention is characterized in that in any one of the cover body for a thin-plate holding container according to any one of the ninth to twelfth inventions, the above-mentioned top tab has a V-shaped groove with an inclination angle of 40° to 44°. .

According to the above configuration, since the edges of the thin plates are fitted into the V-shaped grooves having an inclination angle of 40° to 44°, the V-shaped grooves can catch the edges of the thin plates and support the thin plates more reliably.

A cover for a sheet-holding container according to a fourteenth invention is a cover for a sheet-holding container that closes the container body of a sheet-holding container containing a plurality of sheets and is transported, and is characterized in that: The thin plate resisting part supported by the thin plate in the container body, the thin plate resisting part has: two base end support parts, fixed on the inner surface side of the cover; Connected to the thin plate; two elastic support plate parts are respectively supported by the above-mentioned base end support parts and can support the outer ends of the two ends of the above-mentioned top joint pieces; connect the support plate parts, and the above-mentioned Each of the top tabs is connected to each other to support the top tabs; and, the supporting member prevents the displacement of the inner surface of the above-mentioned cover along the connecting support plate portion, and allows the variation in the vertical direction of the inner surface of the above-mentioned cover. .

According to the above structure, among the multi-piece top tabs, the outer ends of the top tabs at both ends are supported by the elastic support plate portion, and the connection support plate portion is used to support the respective top tabs. Supporting the connection support plate portion enables each top tab to reliably support the peripheral edge of the thin plate. In particular, the top tabs are supported by the connecting support plate portion supported by the supporting member, so that the top tabs are prevented from being displaced along the inner surface of the cover, and the thin plate is reliably supported.

The lid body for thin-plate holding containers of the fifteenth invention is characterized in that in the lid body for thin-plate holding containers of the fourteenth invention, the above-mentioned supporting members are provided with supporting ribs capable of individually supporting each of the above-mentioned connection supporting plate parts so that they do not follow the Displacement occurs on the inside of the above-mentioned cover body.

According to the above structure, since the connecting support plate portion is supported by the supporting rib, displacement of each top piece along the inner surface of the cover can be prevented, and the thin plate can be supported reliably.

The cover body for thin-plate holding containers of the sixteenth invention is characterized in that in the cover body for thin-plate holding containers of the fourteenth invention, the above-mentioned support members are provided with fitting protrusions for fitting into the connecting support plate parts. The fitting hole is used to prevent the above-mentioned connecting support plate from being displaced along the inner surface of the above-mentioned cover, and to allow its variation in the vertical direction on the inner surface of the above-mentioned cover.

According to the above structure, the fitting protrusions can be fitted into the fitting holes provided in the connection support plate to support the connection support plate, so that the displacement of the top tabs along the inner surface of the cover can be prevented, and the thin plate can be reliably supported.

The lid body for thin-plate holding containers of the seventeenth invention is characterized in that in the lid body for thin-plate holding containers of the fourteenth invention, the elastic force used by the above-mentioned connecting support plate portion to support the above-mentioned top tab is larger than that used by the above-mentioned elastic support plate portion. The elastic force supporting the above-mentioned top tab is stronger.

According to the above structure, since the elastic force of the connecting support plate portion for supporting the top tab is stronger, the difference in elastic force (supporting force) between the central portion and the end portion of the thin plate pressing member can be eliminated, and the thin plate can be pressed against. The force can be averaged as a whole, and the thin plate can be supported more reliably.

A lid for a thin plate holding container according to an eighteenth invention is a lid for a thin plate holding container that closes the container body of a thin plate holding container that contains a plurality of thin plates and is transported, and is characterized in that: A thin-plate pressing member for supporting the thin plate in the container body, the thin-plate pressing member has a top piece that directly abuts the above-mentioned thin plate and supports the thin plate, and the top joint has a V-shaped joint that fits with the edge of the above-mentioned thin plate groove, the inclination angle of the V-shaped groove is set to 20°-60°.

According to the above configuration, the V-shaped groove of the above-mentioned top tab is fitted into the thin plate, and the edge portion of the thin plate is cut into the V-shaped groove. At this time, the inclination angle of the V-shaped groove is set at 20°-60°, and the edge of the thin plate is cut into the V-shaped groove for support. Furthermore, when the top tab is separated from the thin plate, the thin plate cut into the V-shaped groove is not pulled out from the V-shaped groove, and is separated smoothly. If the inclination angle of the V-shaped groove is set to be less than 20°, when the top tab is separated from the thin plate, the thin plate will be pulled out from the V-shaped groove and fall out. If the inclination angle of the V-shaped groove is set to be more than 60°, the notch of the thin plate facing the V-shaped groove of the top tab is not enough to cause rotation. Setting the inclination angle of the V-shaped groove to 20°-60° can prevent rotation due to the notch of the V-shaped groove facing the thin plate and achieve smooth separation.

A cover body for a thin-plate holding container according to a nineteenth invention is characterized in that in the cover body for a thin-plate holding container according to the eighteenth invention, the V-shaped groove has an edge portion of the thin plate in a state where the edge portion of the thin plate is fitted. There is a gap between it and the bottom of the V-shaped groove.

According to the above structure, the V-shaped groove of the top tab is fitted into the thin plate, and the edge of the thin plate is cut into the V-shaped groove. At this time, there is no gap between the edge of the thin plate and the bottom of the V-shaped groove. In contact, the edge of the thin plate can be strongly pressed against the inclined surface of the V-shaped groove for installation. In this way, it is possible to securely support by cutting the thin plate into the V-shaped groove.

A lid for a thin plate holding container according to a twentieth invention is a lid for a thin plate holding container that closes the container body of a thin plate holding container that contains a plurality of thin plates and is transported, and is characterized in that: A thin plate pressing member for supporting the thin plate in the container body, the thin plate pressing member has a top piece directly abutting against the thin plate to support the thin plate, and the top joint has the same edge angle as the edge portion of the above thin plate The V-shaped groove at an inclined angle also has a gap between the edge of the thin plate and the bottom of the V-shaped groove in a state where the V-shaped groove is fitted with the edge of the thin plate.

According to the above configuration, the V-shaped groove of the top tab fits into the thin plate, and the edge angle of the edge portion of the thin plate matches the inclination angle of the V-shaped groove, thereby making contact over a large area. At this time, since there is a gap between the edge of the thin plate and the bottom of the V-shaped groove so that there is no contact with each other, it is possible to forcefully resist the edge of the thin plate and the inclined surface of the V-shaped groove in a large area. pressure installation.

The lid body for thin-plate holding containers of the 21st invention is characterized in that in the lid body for thin-plate holding containers of the 20th invention, the inclination angle of the V-shaped groove of the top tab is set to 44°.

According to the above-mentioned structure, the thin plate whose edge angle is set to 44° is fitted with the V-shaped groove of the top piece whose inclination angle is set to 44°, and the edge of the thin plate matches the V-shaped groove to achieve a large-area range. Mounting with strong pressure while in contact.

A cover body for a thin plate holding container according to a twenty-second invention is a cover body for a thin plate holding container for closing a container body of a thin plate holding container containing a plurality of thin plates inside for transportation, and is characterized in that: The thin plate supporting part for supporting the thin plate in the container body, when the thin plate supporting part is pressed against the thin plate supporting the thin plate, the central part deformed outward due to its reaction force is formed in advance toward the above container body. The indentation of the side makes it possible to counteract this deformation.

According to the above configuration, by raising the central portion of the cover for the thin plate supporting container, when the thin plate is supported by the thin plate pressing member in contact with the thin plate, the reaction force thereof can be absorbed. The reaction force when supporting the thin plate deforms the central portion of the lid for the thin plate supporting container outward, and this bending cancels out by making the pre-depressed central portion flat, so that the entire thin plate can be supported with an average force.

A cover body for a thin plate holding container according to the twenty-third invention is a cover body for a thin plate holding container that closes the container body of a thin plate supporting container containing a plurality of thin plates and is transported, and is characterized in that: When the thin plate supporting member supported by the thin plate in the container body is pressed against the thin plate supporting the thin plate, the surrounding reinforcement flange deformed outward due to its reaction force is formed in advance as Bending toward the above-mentioned container body side makes it possible to counteract this deformation.

According to the above configuration, by pre-bending the reinforcing flange around the thin plate supporting container lid, the reaction force can be absorbed when the thin plate is supported by the thin plate pressing member in contact with the thin plate. The reaction force at the time of supporting the thin plate deforms the reinforcing flange outward, and this deformation cancels out the previously curved reinforcing flange into a straight shape, so that the entire thin plate can be supported with an average force.

A cover body for a sheet-supporting container according to a twenty-fourth invention is a cover body for a sheet-holding container that closes the container body of a sheet-holding container containing a plurality of sheets and is conveyed therein, and is characterized in that it has a reinforcing flange formed around it. Adding reinforcement components to the insert (insert) forming.

According to the above structure, since the reinforcement flange formed around the cover of the thin plate supporting container is insert-molded with a reinforcing member, when the thin plate is supported by the thin plate pressing member in contact with the thin plate, it is possible to Resists its reaction force and can support the entire sheet with an average force.

Invention effect

As described in detail above, if the thin plate support container of the present invention is used, the following effects can be obtained:

(1) Since the engaging member is pushed out using the principle of leverage, the cover for the production line can be firmly and securely fixed to the container body.

(2) Because the simple loading and unloading mechanism can be easily disassembled and disassembled into various components, the parts can be removed and cleaned separately during cleaning, not only can clean all corners, but also dry quickly.

(3) Since the supporting pieces are arranged alternately, and the supporting pieces are alternately abutted against each other on the peripheral edge of the thin plate, it can be reliably supported.

(4) Among the side-by-side top tabs, the center side bulges toward the sheet side more than the side pieces, so the bending of the lid can be absorbed, and the sheets can be supported with an equal force.

(5) Since each elastic supporting plate portion, among the top pieces arranged side by side, is located on the central side is more raised toward the thin plate side than on both sides, it can absorb the bending of the cover body and use equal force to support each sheet.

(6) Because the elastic support plate portion on one side or the elastic support plate portion on the other side, among the top pieces arranged side by side, the one on the central side is raised toward the thin plate side than the ones on both sides, so it can absorb The bending of the cover body supports each thin plate with equal strength.

(7) Because of the protruding ribs for support or the elastic support plate portion on the other side, among the top tabs arranged in parallel, the one located on the central side is more raised toward the thin plate side than the ones located on both sides, so that the cover body can be absorbed. bend, while supporting each sheet with equal force.

(8) Since the connecting support plate portion between the top pieces is supported by the supporting member, the displacement of the top pieces along the inner surface of the cover can be prevented, and the thin plate can be reliably supported.

(9) Since the connecting support plate portion is supported by the supporting rib, displacement of each top piece along the inner surface of the cover can be prevented, and the thin plate can be reliably supported.

(10) Since the fitting protrusions can be fitted into the fitting holes provided on the connection support plate to support the connection support plate, it is possible to prevent the displacement of each top piece along the inner surface of the cover and reliably support the thin plate .

(11) Since the elastic force used to support the top tab by connecting the supporting plate part is stronger, the difference in supporting force between the central part and the end of the thin plate pressing part can be eliminated, so that the force against the thin plate is integrated in the whole It can be averaged and support the thin plate more reliably.

(12) Since the inclination angle of the V-shaped groove of the top tab is set at 20°-60°, the edge of the thin plate is cut into the V-shaped groove for support, preventing the rotation of the thin plate. Furthermore, when the top tab is separated from the thin plate, the thin plate cut into the V-shaped groove can be smoothly separated without being pulled out from the V-shaped groove. In this way, the thin plate can be reliably supported, and at the same time, the cover can be easily detached.

(13) Since there is a gap between the edge of the thin plate and the bottom of the V-shaped groove of the top tab, when the V-shaped groove and the thin plate are fitted, the edge of the thin plate and the bottom of the V-shaped groove do not contact each other, so that the thin plate The edge part and the inclined surface of the V-shaped groove are strongly pressed against the installation. In this way, the v-shaped groove is reliably supported when the thin plate is cut.

(14) Since the top tab is provided with a V-shaped groove having the same inclination angle as the edge angle of the thin plate, at the same time, the edge of the thin plate and the above-mentioned There is a gap between the bottom of the V-shaped groove, so that the edge angle of the edge of the thin plate and the inclination angle of the V-shaped groove match to make contact in a larger area, according to the gap between the edge of the thin plate and the bottom of the V-shaped groove Install by firmly pressing the edge of the sheet against the V-shaped groove. In other words, even if the top tab is not installed on the thin plate with strong pressure, the edge of the thin plate can be installed on the inclined surface of the V-shaped groove with strong pressure. As a result, even if the thin plate pressing member is attached to the thin plate with a weak pressing force, the thin plate can be reliably supported by the thin plate pressing member and rotation of the thin plate due to vibration or the like can be prevented. In this way, the thin plate can be reliably supported even if the lid is attached to the container body with a moderate force without increasing the strength of the lid.

(15) Since the inclination angle of the V-shaped groove of the top contact piece is set to 44°, the V-shaped groove matches the thin plate whose edge angle is set to 44°, and contacts with a large area range for strong resistance Install. As a result, even if the thin plate pressing member is attached to the thin plate with not so strong pressing force, the thin plate can be reliably supported by the thin plate pressing member and rotation of the thin plate due to vibration or the like can be prevented. In this way, even if the cover body is attached to the container body with a weak pressing force, the thin plate can be reliably supported and rotation of the thin plate due to vibration or the like can be prevented. In this way, the thin plate can be reliably supported even if the lid is attached to the container body with a moderate force without increasing the strength of the lid.

(16) Since the central part of the lid body for the thin plate supporting container is depressed, the depression in the central portion of the lid body for the thin plate supporting container caused by the reaction force when the thin plate pressing member abuts against the thin plate and supports the thin plate is offset. Deformation can support the entire sheet with a uniform force, so rotation of the sheet due to vibration, etc., can be prevented.

Also in the case where the reinforcement flange around the lid of the thin plate supports the container is deformed toward the container body, the deformation to the container body cancels the effect of supporting the thin plate when the thin plate pressing member abuts against the thin plate. The bending of the reinforcing flange due to the reaction force can support the entire sheet with a uniform force, so that the rotation of the sheet due to vibration or the like can be prevented.

(17) Since the strengthening flange around the main body is formed by adding a reinforcing member to insert (insert) for reinforcement, when the thin plate pressing member supports the thin plate, it is supported by a uniform force against its reaction force The entire thin plate, so it is possible to prevent the rotation of the thin plate caused by vibration or the like.

Description of drawings

FIG. 1 is a partial perspective view showing a production line cover according to a first embodiment of the present invention.

Fig. 2 is a side sectional view showing a prior art lid for a sheet-supporting container.

Fig. 3 is a perspective view showing a thin plate holding container according to the first embodiment of the present invention.

Fig. 4 is a perspective view showing the thin-plate holding container according to the first embodiment of the present invention when the cover is removed.

Fig. 5 is a perspective view showing a cover support portion of the thin-plate holding container according to the first embodiment of the present invention.

Fig. 6 is a partial sectional view showing a lid receiving portion of the thin-plate holding container according to the first embodiment of the present invention.

Fig. 7 is a top perspective view showing a production line cover according to the first embodiment of the present invention.

Fig. 8 is a bottom perspective view showing a production line cover according to the first embodiment of the present invention.

Fig. 9 is a top perspective view showing the joining member according to the first embodiment of the present invention.

Fig. 10 is a bottom perspective view showing the joining member according to the first embodiment of the present invention.

Fig. 11 is a side sectional view showing a joining member according to a first embodiment of the present invention.

Fig. 12 is a top perspective view showing the push-out member according to the first embodiment of the present invention.

Fig. 13 is a bottom perspective view showing the push-out member according to the first embodiment of the present invention.

Fig. 14 is a plan view showing the push-out member of the first embodiment of the present invention.

Fig. 15 is an internal view showing the push-out member of the first embodiment of the present invention.

Fig. 16 is a top perspective view showing the holding cap of the first embodiment of the present invention.

Fig. 17 is a bottom perspective view showing the holding cap of the first embodiment of the present invention.

Fig. 18 is a top perspective view showing the lid pressing part of the first embodiment of the present invention.

Fig. 19 is a perspective view showing the bottom of the cover pressing member according to the first embodiment of the present invention.

Fig. 20 is a side view showing the wafer holding member according to the first embodiment of the present invention.

Fig. 21 is a perspective view showing a wafer holding member according to the first embodiment of the present invention.

Fig. 22 is a perspective view showing a wafer holding member according to the first embodiment of the present invention.

FIG. 23 is a perspective view showing the cover fixing member according to the first embodiment of the present invention.

24(A)-(D) are schematic diagrams showing the operation of the simple loading and unloading mechanism of the first embodiment of the present invention.

Fig. 25 is a side view showing a wafer holding member according to a first modification of the first embodiment of the present invention.

Fig. 26 is a perspective view showing a wafer holding member according to a first modification of the first embodiment of the present invention.

Fig. 27 is a perspective view showing a wafer holding member according to a first modification of the first embodiment of the present invention.

Fig. 28 is a perspective view showing a wafer holding member according to a second modified example of the first embodiment of the present invention.

Fig. 29 is a front view showing a wafer holding member according to a second modification of the first embodiment of the present invention.

Fig. 30 is a perspective view showing a wafer holding member according to a third modification of the first embodiment of the present invention.

Fig. 31 is a cross-sectional view showing important parts of a wafer holding member according to a third modified example of the first embodiment of the present invention.

Fig. 32 is a perspective view showing a wafer holding member according to a fourth modification of the first embodiment of the present invention.

Fig. 33 is a front view showing a wafer holding member according to a fourth modification of the first embodiment of the present invention.

Fig. 34 is a perspective view showing important parts of a wafer holding member according to a second embodiment of the present invention.

Fig. 35 is a perspective view showing the inner surface of the cover including the wafer holding member according to the second embodiment of the present invention.

36 is a partial perspective view showing the inner surface of the cover including the wafer holding member according to the second embodiment of the present invention.

37 is a perspective view of important parts showing the state of the inner surface of the cover with the wafer holding member removed according to the second embodiment of the present invention.

38 is a partial perspective view showing the state of the inner surface of the cover with the wafer holding member removed according to the second embodiment of the present invention.

Fig. 39 is a perspective view showing a sectional state of a support rib according to a second embodiment of the present invention.

Fig. 40 is an enlarged view of important parts showing a wafer holding member according to a second embodiment of the present invention.

Fig. 41 is an enlarged view of important parts showing the top tab of the wafer holding member according to the second embodiment of the present invention.

Fig. 42 is an enlarged view of important parts showing the top tab of the wafer holding member according to the second embodiment of the present invention.

Fig. 43 is a sectional view of important parts showing the top tab of the wafer holding member according to the second embodiment of the present invention.

Fig. 44 is a perspective view of important parts showing a modified example of the second embodiment of the present invention.

Fig. 45 is a sectional view of important parts showing a modified example of the second embodiment of the present invention.

(Description of Reference Signs)

1 cover

2 body

3 cam member

4 Latch lever

5 pivot

6 cam part

7 Link opening

8 S-shaped cam follower part

11 thin plate support container

12 container body

12A, 12B, 12C, 12D side wall

12E bottom plate

12F opening

13 thin plate support part

14 Cover for transportation

15 cover for production line

16 Top flange

17 Handles for carrying

21 Cover receiving part

21A vertical plate

21B Horizontal deck

21C sealing groove

22 tongue reed

23 The first embedded part

24 The second part to be fitted

26 Simple loading and unloading mechanism for transportation

30 Body

31 Reed receiving part

32 Simple loading and unloading mechanism

33 concave part

34 opening

36 Rotary support shaft

37 stopper

37A receiving part

38 engaging claw

39 base end lower side cam

39A inclined plane

40 front side cam

40A inclined plane

40B Fitting recess

42 joint member

43 Launch components

44 cam mechanism

45 retaining cover

46 cover plate press

51 connecting shaft

52 Sliding joint on base end side

53 base end upper side cam

53A inclined plane

54 upper side groove

55 fulcrum

55A front side sliding joint

56 Front end fitting part

57 base end side plate

58 front side panel

61 top plate

62 keyway

63 rotating barrel

64 long hole

64A One end

64B The other end

64C wall

65 Series Composite Films

65A Protrusion

66 gaps

69 The protrusion of the pressing cam

71 push out member holding part

72 Joint member holding part

74 peripheral board

75 top plate

76 keyhole

78 side panels

78A wide part

78B Narrow section

79 top plate

80 Protrusions for support

81 Gap

82 Elevation

82A Central raised piece

82B left and right joint piece

85 side panels

86 top plate

86A Cross-shaped notch

87 Upper support plate

88 Lower support plate

88A Wedge

91 wafer pressure piece

92 base end support

93 Elastic support plate part

93A The first support plate

93B Second support plate

94 Top tab

94A First top tab

94B Second top tab

96 corner blocks

96A inclined surface

96B top joint

97 Support claw

100 cover fixing parts

101 support plate

102 hook

103 Chimeric protrusions

110 base end support

111 Elastic support plate part

112 Top tab

112A inclined surface

112B top joint

113 Support claw

115 corner blocks

115A top junction

120 semiconductor wafers

121 wafer pressure piece

122 base end support

123 Elastic support plate part

124 top tab

124A V-shaped fitting groove

125 Connect the support board

125A, 125B longitudinal plate

125C Transverse plate

126 Support ribs

127 cover body

128 hook support

129, 130 support wall

131 Ribs for support

133 support pattern

134 Partition plates

141 combined hole

142 Coupling protrusions

S gap

Detailed ways

Hereinafter, embodiments of the present invention will be described based on the drawings. The sheet supporting container of the present invention is a container used in processes such as storage, transportation, and production line of thin sheets containing semiconductor wafers, memory disks, liquid crystal glass substrates, and the like. In addition, the thin-plate support container which accommodates a semiconductor wafer is demonstrated here as an example. Caps for plugging thin plate support containers are divided into transport caps and production line caps and used separately.

first embodiment

The thin plate support container 11 of the present embodiment, as shown in Figures 3 to 8, is composed of: a container body 12 that can accommodate a plurality of semiconductor wafers (not shown in the figure) inside, and is respectively arranged on opposite sides of the container body 12. Two thin plate support parts 13 for supporting the semiconductor wafer contained in the inside from both sides on the wall, a transport cover 14 for plugging the container body 12 and a production line cover 15, and a transfer device in the factory (not shown) ) and the top end flange 16 held by the wrist, and the transport handle 17 grasped by the operator when transporting the thin plate support container 11 by hand.

As shown in FIGS. 3 and 4 , the container body 12 is substantially cuboid as a whole. This container body 12 is in the state (the state shown in Fig. 3, 4) of vertical placement, is to be made of 4 side wall parts 12A, 12B, 12C, 12D and bottom plate part 12E and bottom plate part 12E that form surrounding four walls, and its top is provided with Open 12F. The container main body 12 is placed sideways when it is mounted facing a wafer transfer robot (not shown) on a semiconductor wafer production line or the like. A device (not shown) for positioning the thin plate holding container 11 is provided on the outside of the side wall portion 12A serving as the bottom in this horizontally placed state. A detachable front end flange 16 is attached to the outer side of the side wall portion 12A serving as the top plate portion in the horizontally placed state. On the outer side of the side wall parts 12C, 12D which are lateral wall parts in the horizontally placed state, a detachable handle 17 for holding and carrying is installed.

The upper ends of the side walls 12A, 12B, 12C, and 12D of the container body 12 are provided with lid receiving portions 21 for fitting the lid 4 as shown in FIGS. 5 and 6 . The cover receiving portion 21 is formed by expanding the upper end of the container body 12 to the size of the cover 4 . In this way, the cover body 4 can fit inside the vertical plate portion 21A of the cover body receiving portion 21 , abut against the horizontal plate portion 21B, and be installed on the cover body receiving portion 21 . In addition, the horizontal plate portion 21B is also provided with a full-circle sealing groove 21C on its entire peripheral edge, and the tongue piece 22 installed on the lower side of the transport cover 14 is fitted so that the thin plate supports the inside of the container 11. seal. The inner surface of the vertical plate portion 21A at the four corners of the cover receiving portion 21 is provided with a first fitted portion 23, which is used to embed the cover engagement claw (not shown) of the simple loading and unloading mechanism 26 for transportation described later. Fittingly, the transport lid 14 is fixed to the container body 12 side. The first fitted portion 23 is formed by denting the vertical plate portion 21A into a square shape so that the lid engaging claws can be fitted on the inner upper surface.

In addition, a second fitted portion 24 is provided in the vicinity of each first fitted portion 23 . The second fitted portion 24 is used in the production line. The engaging member 42 of the simple attachment and detachment mechanism 32 of the production line cover 15 is fitted into the second fitted portion 24 to fix the production line cover 15 to the container body 12 side.

The transport cover 14 is a known cover. The transport cover 14 is in the shape of a disk, and its central part is arched upward in the shape of a barrel so as not to touch the upper part of the semiconductor wafer accommodated therein.

The four corners of the transport cover 14, as shown in FIGS. The simple loading and unloading mechanism 26 for transport is provided with a cover body engagement claw (not shown), which is in a state of protruding from the periphery of the cover body 14 for transport. The lid engaging claw is formed so as to be able to fit on the first fitted portion 23 .

The cover body 15 for the production line is a cover body that can be used as it is on the production line in the factory without the container body 12 of the shipped thin plate support container 11 . This production line cover 15 is a product provided separately from the above-mentioned thin plate holding container 11, and is placed in a semiconductor manufacturing factory or the like. As shown in FIGS. 7 and 8 , the production line cover 15 is composed of a main body 30 , a cover (not shown), and a simple attachment and detachment mechanism 32 .

The main body part 30 is generally thin-walled and has a substantially square shape, and a reinforcing flange is formed around it, so that it does not protrude outside when the lid receiving part 21 of the container body 12 is mounted. A reed receiving part 31 is installed around the lower part of the main body part 30 . The reed piece (not shown) provided on the reed piece receiving part 31 fits in the sealing groove 21C under the condition that the main body part 30 is installed on the cover body receiving part 21 so that the inside of the container body 12 Can be sealed. In addition, the reed piece and the reed piece 22 of the transport cover 14 can also be appropriately formed in accordance with the shape of the sealing groove 21C.

In the body part 30 of the cover body 15 for the production line, on the ends of the two sides in the longer direction (the upper left and lower right sides in FIG. 7 ), recessed parts 33 for installing a simple loading and unloading mechanism 32 are respectively provided. The concave portion 33 is formed by denting the end portion of the main body portion 30 into a substantially rectangular shape. Both ends in the longitudinal direction of the recess 33 (both ends in the upper right and lower left directions in FIG. 7 ) are provided with openings 34 through which a front end fitting portion 56 of a joint member 42 described later can enter and exit. The opening 34 is provided at a position that can be matched with the second fitted portion 24 of the cover receiving portion 21 when the main body portion 30 is fitted into the cover receiving portion 21 . Attached to the bottom of the concave portion 33 are: a rotation support shaft 36 , a stopper 37 , an engagement claw 38 , a base end lower cam 39 , and a front end side cam 40 . The recess 33 is provided with a freely attachable and detachable cover plate. This cover plate can be removed when cleaning the simple loading and unloading mechanism 32 located in the recessed portion 33 .

The rotation support shaft 36 is a member for rotatably supporting a push-out member 43 which will be described later. The rotation support shaft 36 is provided in a columnar shape protruding from the bottom. The rotation support shaft 36 is fitted into the rotating cylindrical portion 63 of the pushing member 43, and supports the pushing member 43 so as to be rotatable. The stopper 37 is a member that supports the push-out member 43 while being rotated at a predetermined angle. The stoppers 37 are constituted by plate-shaped members whose bottoms rise at two places around the rotation support shaft 36 . This plate-like member is bent to form the receiving portion 37A. By fitting the protrusion 65A of the engaging piece 65 of the ejection member 43 into the receiving portion 37A, the ejection member 43 can be supported at a predetermined angle.

The engagement claw 38 is a member for fixing a cover retainer 46 described later to the bottom of the recess 33 . Since the cover plate pressing pieces 46 are installed on both sides of the recess 33 in the longitudinal direction, six engaging claws 38 are respectively installed on both sides of the recess 33 in the longitudinal direction. The engaging pawl 38 is formed of an L-shaped member, and can fit the lower support plate 88 of the cover presser 46 .

The base-end lower cam 39 and the distal-side cam 40 are members constituting a cam mechanism 44 described later. Further, the base end lower cam 39 and the base end upper cam 53 described later constitute a base end side cam that presses the base end side of the joining member 42 downward when the joining member 42 is pushed out.

As shown in FIGS. 1 and 7 , the base end lower cam 39 is a member for pushing (pushing down) the base end side of the joining member 42 to the other side (downward in FIG. 1 ) as the joining member 42 is pushed out. The base-end lower cams 39 are provided on both sides of the rotation support shaft 36, respectively. The base end lower cam 39 has a substantially triangular side cross-sectional shape, and is provided with a slope 39A for allowing the base end side of the engaging member 42 to go up and down. This inclined surface 39A is finished into a mirror surface so as to reduce the frictional resistance with the base end side sliding contact surface 52 of the engaging member 42 .

The front end side cam 40 is a member for pushing (pushing up) the front end fitting portion 56 to one side (upward in FIG. 1 ) as the joint member 42 is pushed out. The front-end side cams 40 are provided at both ends in the longitudinal direction of the concave portion 33 so as to face the opening 34 . The front end side cam 40 has a substantially triangular side cross-sectional shape, and has a slope 40A capable of lifting the front end side of the joint member 42 upward. This inclined surface 40A is finished into a mirror surface so as to reduce the frictional resistance between it and the front end side sliding contact surface 55A of the fulcrum portion 55 of the joint member 42 . The upper end portion of the slope 40A is provided with a fitting recess 40B. This fitting recess 40B is a portion where the fulcrum portion 55 of the joint member 42 is fitted.

A simple loading and unloading mechanism 32 is provided in the concave portion 33 . The simple attachment and detachment mechanism 32 is a device that allows the production line cover 15 to be easily attached to and detached from the container body 12 . The simple attachment and detachment mechanism 32 is composed of an engaging member 42 , a push-out member 43 , a cam mechanism 44 , a holding cover 45 , and a cover presser 46 as shown in FIG. 1 .

The engaging member 42 is used to protrude from the opening 34 of the main body 30 when the production line cover 15 is installed on the cover receiving part 21 of the container body 12, and fit into the second part of the cover receiving part 21. A member of the fitted portion 24 . This joining member 42, as shown in Fig. 1, Fig. 9～Fig. portion 56 , the base end side plate portion 57 , and the front end side plate portion 58 .

The connection shaft 51 is a member for connecting the pushing member 43 and the joining member 42 to each other, and is fitted in the elongated hole portion 64 of the pushing member 43 which will be described later. The connecting shaft 51 is formed in a round stick shape, and is provided facing upward on the base end portion of the joint member 42 .

The base end side sliding contact surface 52 is slidably connected to the inclined surface 39A of the base end lower side cam 39 and is a portion for moving the base end portion of the engaging member 42 up and down. The base end side sliding contact surface 52 is formed by obliquely cutting the lower side of the base end portion of the joining member 42 . The base end side sliding contact surface 52 is finished into a mirror surface to reduce the frictional resistance between it and the inclined surface 39A of the base end lower side cam 39 . In the state where the base-end side sliding contact surface 52 is slidably connected to the slope 39A of the base-end lower cam 39, the base end of the joint member 42 is pressed downward by pushing out the joint member 42, and the The method of retracting the joining member 42 is to push up the base end portion of the joining member 42 upward.

The proximal upper cam 53 is a portion that moves the proximal end portion of the joining member 42 up and down together with the proximal lower cam 39 . The base end upper side cam 53 is a part of the force point in the principle of leverage. In addition, the connecting shaft 51 is not a point of application of the principle of leverage, but is only a portion that receives force in the longitudinal direction when the joint member 42 moves in and out.

The proximal upper side cam 53 is provided near the proximal end of the joint member 42 toward the upper side. The proximal upper side cam 53 has a substantially triangular side cross-sectional shape, and is configured to include a slope 53A that allows the proximal end side of the joint member 42 to be vertically moved up and down. The inclined surface 53A of the proximal upper cam 53 is finished into a mirror surface like the inclined surface 39A of the proximal lower cam 39 so as to slide with the protrusion 69 of the pressing cam on the holding cover 45 side described later. The inclined surface 53A of the proximal upper cam 53 is set substantially parallel to the inclined surface 39A of the proximal lower cam 39 . In this way, in the state where the projection 69 of the pressing cam is in sliding contact with the slope 53A of the upper cam 53 at the base end, when the joining member is pushed out, the protrusion 69 of the pressing cam presses the upper cam 53 of the base end so that the joining member The base end portion of 42 is pressed downward. In addition, when the joining member 42 is retracted, the base-end side sliding contact surface 52 is pressed against the slope 39A of the base-end lower cam 39 , and the base-end portion of the joining member 42 is pushed upward.

The fulcrum portion 55 is a portion that supports the front end portion of the joining member 42 and serves as a center of rotation. The fulcrum portion 55 is a fulcrum portion that functions as a lever principle. The fulcrum portion 55 forms a substantially right-angled sharp corner on the lower side near the front end of the joining member 42 . A tip-side sliding contact surface 55A is formed on the apex portion of the pointed fulcrum portion 55 . The front-end side sliding contact surface 55A is a portion for slidingly contacting the inclined surface 40A of the front-end side cam 40 to move the front-end fitting portion 56 of the joint member 42 up and down. The tip side sliding contact surface 55A is formed by obliquely cutting the apex portion of the fulcrum portion 55 . The front side sliding contact surface 55A is finished into a mirror surface so as to reduce the frictional resistance between it and the inclined surface 40A of the front side cam 40 . In the state where the front-end side sliding contact surface 55A is slidably connected to the inclined surface 40A of the front-end side cam 40 , the front-end fitting portion 56 of the joint member 42 is pressed upward by the push-out action of the joint member 42 , and retracted by the joint member 42 . action, the front end of the joining member 42 is pressed downward.

Further, the fulcrum portion 55 is fitted into the fitting recessed portion 40B of the distal end side cam 40 so as to be able to rotate around the fitting recessed portion 40B.

The front end fitting portion 56 protrudes from the opening 34 of the concave portion 33 to the outside, and is a portion that directly fits into the second fitted portion 24 of the cover receiving portion 21 . This front end fitting portion 56 is a point of action in the principle of leverage. In order to enable the front end fitting portion 56 to fully exert its capability when it is fitted to the second fitted portion 24 of the cover receiving portion 21 , it is provided at a position very close to the fulcrum portion 55 .

The base end side plate portion 57 and the front end side plate portion 58 support the joint member 42 and allow it to move back and forth.

The push-out member 43 is connected to the joint member 42 to move the joint member 42 out and in. As shown in FIG. The push-out member 43 is rotatably mounted on the rotation support shaft 36 of the concave portion 33 . The pushing member 43 is composed of a top plate portion 61 , a keyway 62 , a rotating cylinder portion 63 , a long hole portion 64 , and a fastening piece 65 as shown in FIGS. 1 , 7 , and 12 to 15 .

The top plate portion 61 is formed substantially in a disk shape. In two places opposite to the top plate portion 61 , there are notches 66 for setting the fastening pieces 65 .

The keyway 62 is a groove for fitting the latch key of the device when the cover body 15 for the production line is automatically loaded and unloaded by a cover body loading and unloading device (not shown). The key groove 62 is provided at the center of the upper side surface of the top plate portion 61 .

The rotating cylinder portion 63 is a member for rotatably attaching the pushing member 43 to the rotation support shaft 36 of the concave portion 33 . The rotating cylinder portion 63 is provided at the central portion of the lower surface of the top plate portion 61 . And the key groove 62 is positioned at the center of this rotating cylindrical portion 63 .

The elongated hole portion 64 is a portion for converting the rotation of the pushing member 43 into the moving in and out of the engaging member 42 . The long hole portions 64 are respectively provided at two places facing the top plate portion 61 . One end portion 64A of the elongated hole portion 64 is near the center of the top plate portion 61, and the other end portion 64B is relatively far away, constituting a part of the spiral. When the connecting shaft 51 of the joint member 42 is fitted to the one end 64A of the elongated hole 64, the joint member 42 is pulled in, and when the other end 64B is fitted, the joint member 42 is protruded.

In the long hole portion 64 , a gently inclined wall surface 64C is provided on the lower surface of the top plate portion 61 . This wall surface 64C is set at the same height as the one end portion 64A of the elongated hole portion 64 and the lower surface of the top plate portion 61 , and is set so as to become higher as it approaches the other end portion. This is because the joining member 42 and the push-out member 43 are to be connected reliably. In other words, in the state where the connecting shaft 51 of the joint member 42 is fitted and protruded by the other end 64B of the elongated hole 64 , since the base end of the joint member 42 is pushed downward, even at this base end Even in the depressed state, the connecting shaft 51 can be reliably fitted into the elongated hole portion 64 .

The fastening piece 65 is a member that supports the push-out member 43 so that it can only rotate by a predetermined angle. The fastening pieces 65 are respectively provided at two places opposite to the peripheral edge of the top plate portion 61 . The fastening piece 65 is formed of a plate-shaped member extending from the top plate portion 61 along the peripheral edge. The front end portion of the fastening piece 65 is provided with a protrusion portion 65A that fits into the receiving portion 37A of the stopper 37 . Moreover, the fastening piece 65 has elasticity, and the elastic support protrusion 65A. This protrusion 65A fits into the receiving portion 37A of the stopper 37, that is, when the push-out member 43 rotates at a predetermined angle (the angle at which the joint member 42 protrudes and fixes the production line cover 15 to the container body 12). support.

The cam mechanism 44 is under the condition that the front end fitting portion 56 of the protruding engaging member 42 is fitted into the second fitted portion 24 of the cover receiving portion 21 by the pushing member 43, and abuts against the second fitted portion 24 of the cover receiving portion 21. On the upper surface of the joint part 24, the member that presses down the cover body 15 for the production line is fixed to the side of the container body 12. This cam mechanism 44 can push up the front end fitting part 56 of the engagement member 42 protruding out with the push-out member 43 to abut against the upper surface of the second fitted part 24, and press the base end part downwards. The lever principle in the method presses down the cover body 15 for the production line and fixes it on the side of the container body 12 . The cam mechanism 44 is composed of the base lower cam 39, the base upper cam 53, the base sliding contact surface 52, the protrusion 69 pressing the cam, the distal cam 40, and the distal sliding contact surface 55A. Incidentally, the proximal lower cam 39 , the proximal upper cam 53 , the proximal sliding contact surface 52 , the distal cam 40 , and the distal sliding contact surface 55A are all the same as described above.

The protrusion 69 pressing the cam abuts against the inclined surface 53A of the base-end upper cam 53 , and is a member for pressing down the base end portion of the joint member 42 as the joint member 42 is pushed out. The protrusion 69 for pressing the cam is provided on the lower side of the holding cover 45 . Specifically, in a state where the proximal side sliding contact surface 52 of the engaging member 42 is slidably connected to the slope 39A of the proximal lower cam 39, the projection 69 pressing the cam and the proximal upper cam 53 are arranged so that There is no gap between the slopes 53A at the sliding position.

The holding cover 45 is a member for holding the engaging member 42 and the push-out member 43 . The holding cover 45 is constituted by a pushing member holding portion 71 and an engaging member holding portion 72 as shown in FIGS. 16 and 17 .

The push-out member holding portion 71 is a member for supporting the push-out member 43 while allowing it to rotate. The pushing member holding portion 71 is composed of a peripheral plate 74 and a top plate 75 . The peripheral plate 74 covers the formation of the periphery of the push-out member 43 . The top plate 75 then covers the formation of the upper side of the push-out member 43 . A keyhole 76 having the same size as the keyway 62 of the ejection member 43 is provided in the central portion of the top plate 75 . This key hole 76 is matched with the key groove 62 of the ejection member 43 in the state where the top plate 75 covers the ejection member 43 . In this way, the keyway 62 and the keyhole 76 can match when the engaging member 42 is retracted.

The joining member holding portion 72 is a member for supporting the joining member 42 in a state where the back and forth movement of the joining member 42 is allowed. The engagement member holding portion 72 is provided on the left and right sides of the pushing member holding portion 71, respectively. Each joining member holding portion 72 is constituted by side plates 78 and a top plate 79 .

The side plate 78 is a member for supporting the vicinity of the proximal end of the joining member 42 from left and right. The side plate 78 is composed of a wide portion 78A and a narrow portion 78B. The wide portion 78A is a portion into which the proximal end side plate portion 57 of the joint member 42 is inserted. The narrow portion 78B is a portion inserted between the base end side plate portion 57 and the front end side plate portion 58 of the joining member 42 .

The top plate 79 serves to support the members of the joining member 42 from the upper side. The above-mentioned protrusion 69 for pressing the cam is provided at the base end portion of the lower side of the top plate. A support protrusion 80 that fits into the upper groove portion 54 of the joint member 42 is provided at the front end of the lower surface of the top plate 79 . A slit 81 is provided on the front end side of the top plate, and a raised portion 82 is provided at the front end of the slit 81 . The protruding portion 82 is composed of a central protruding piece 82A and left and right joining pieces 82B, and is elastically supported by the slit 81 . The central raised piece 82A and the left and right joining pieces 82B of the raised portion 82 are positioned between the holding cover 45 and the cover holder 46 by fitting into the cross-shaped notch 86A of the cover holder 46 .

The cover presser 46 is a member for fixing the holding cover 45 to the concave portion 33 of the production line cover 15 as shown in FIGS. 1 , 18 , and 19 . Specifically, the two cover holders 46 respectively support the joining member holding portion 72 to fix the holding cover 45 to the concave portion 33 . The cover plate holder 46 is composed of side plates 85 , a top plate 86 , an upper support plate 87 and a lower support plate 88 .

Each side plate 85 respectively covers the left and right sides of the joint member 42 and allows the joint member 42 to move back and forth. The top plate 86 supports the respective side plates 85 integrally, and also covers the upper side of the joint member 42 to allow the joint member 42 to move back and forth. The upper support plate piece 87 is a member that supports the top plate 79 of the joining member holding portion 72 holding the cover 45 from below. The top plate 79 of the joining member holding portion 72 is supported from the top and bottom by the top plate 86 of the cover plate holder 46 and the upper support plate piece 87 . The lower support plate 88 is a part for fixing the cover presser 46 to the concave portion 33 . Three lower support plates 88 are provided at the lower ends of the respective side plates 85 . Each of the lower support plates 88 fixes the cover retainer 46 to the recess 33 by being fitted into the engagement claw 38 provided on the recess 33 . Wedges 88A are respectively provided on each of the lower support plates 88 to make the engaging claws 38 fit more easily.

As shown in FIGS. 20 , 21 , and 22 , wafer holding members 91 are provided on the undersides of the transport cover 14 and the production line cover 15 for fixing thin plates. The wafer holding member 91 is a member for supporting a plurality of semiconductor wafers accommodated in the container body 12 from above. The wafer holding member 91 is composed of a base support portion 92 , an elastic support plate portion 93 and a top contact piece 94 .

The base end support portion 92 is a member for supporting the elastic support plate portion 93 and the top piece 94 . The base end support portion 92 is formed in the shape of a square bar across the entire length of the wafer hold-down member 91 and is fixed to the lower surface of the cover.

The elastic support plate portion 93 is a member for elastically supporting the top tab 94 . The number of elastic supporting plate parts 93 arranged in parallel is equivalent to the number of semiconductor chips accommodated in the container body 12 . Each elastic support plate part 93 is respectively fixed to the base end support part 92 in the state arranged in a row in a row. The elastic support plate portion 93 is composed of a first support plate piece 93A bent in an S-shape and a second support plate piece 93B bent in a U-shape. The base end portion of the first support plate 93A is fixed on the base end support portion 92 , and the front end portion is fixed on the first top contact piece 94A. The base end of the second support plate 93B is integrated with the first support plate 93A through the first top joint 94A, and the front end is fixed with the second top joint 94B.

The top tab 94 is a member for directly supporting each semiconductor wafer. Each top tab 94 is composed of a first top tab 94A and a second top tab 94B, and supports the semiconductor wafer from two places respectively. Each top piece 94 is composed of two corner pieces 96 and supporting claws 97 as supporting pieces arranged alternately.

The corner block 96 has an inclined surface 96A and a contact surface 96B. The inclined surface 96A is formed so as to be opened outward when the two corner blocks 96 are installed facing each other, so that the peripheral edge of the semiconductor wafer can be easily inserted between the two corner blocks 96 . The top junction surface 96B is formed by forming a groove with a certain width (a width slightly wider than the thickness of the semiconductor wafer) in a state where the two corner blocks 96 are mounted opposite to each other.

The support claws 97 are members for directly contacting and supporting the peripheral edge of the semiconductor wafer. The supporting claws 97 are respectively disposed on the top joint surfaces 96B of the corner blocks 96 . The supporting claws 97 are made of elongated protrusions, and the supporting claws 97 are arranged alternately on the opposing top contact surfaces 96B. Specifically, two support claws 97 are set at both ends of one of the top joint surfaces 96B, and one support claw 97 is set at the center of the other top joint surface 96B, so that the opposite support claws 97 alternate with each other. Equipped. Each support claw 97 is formed of an elastic material, and can elastically support the peripheral edge of the semiconductor wafer. Since the width between the two top joints 96B is only slightly wider than the thickness of the semiconductor wafer, the distance between the front ends of the supporting claws 97 disposed on each top joint 96B is slightly narrower than the thickness of the semiconductor wafer. Therefore, when the semiconductor wafer is inserted between the supporting claws 97, the supporting claws 97 made of elastic materials arranged alternately are slightly crushed and inserted. In this way, the supporting claws 97 arranged alternately can reliably support the peripheral edge of the semiconductor wafer.

On the outside of the production line cover 15, a cover fixing member 100 as shown in FIG. 23 is provided. The cap holder 100 is a member for preventing the production line cap 15 from falling off from the container body 12 . The cover fixing tool 100 is composed of a support plate portion 101 , a hook portion 102 and a fitting protrusion 103 .

The support plate portion 101 is a member for supporting the hook portion 102 and the fitting protrusion 103 . Hook portions 102 are respectively provided at both end portions of the support plate portion 101 . The flange of the container body 12 is hooked with this hook portion 102 .

The fitting protrusion 103 is provided on one side surface of the support plate portion 101 . The fitting protrusion 103 is formed in the same shape as the key groove 62 and fitted into the key groove 62 through the key hole 76 . Two fitting protrusions 103 are provided, and are respectively located at positions matched with the two key grooves 62 . In this way, when the hook portion 102 hooks the flange of the container body 12 , each fitting protrusion 103 fits into each key groove 62 to fix the pushing member 43 . This is because, during the transportation of the sheet-supporting container, it is necessary to prevent the ejection member 43 from rotating due to vibration or impact, causing loosening of the fixing of the container body 12 to the cover body 15 for the production line.

The thin-plate support container 11 constituted as explained above can be used as explained below:

When removing the production line cover 15 from the container body 12 , the latch key is fitted into the key groove 62 and rotated. In this way, from the state of FIG. 24(A), the push-out member 43 can be rotated so that the engaging member 42 is gradually retracted. In this way, the front end side sliding contact surface 55A of the fulcrum portion 55 of the joint member 42 can be slidably connected to the slope 40A of the front end side cam 40, as shown in FIG. 24(B), (C) and (D), the front end is fitted The portion 56 is pressed down. At the same time, the base end side sliding contact surface 52 of the joint member 42 is slidably connected to the inclined surface 39A of the base end lower cam 39 to push up the base end portion of the joint member 42 . In this way, the front end fitting portion 56 can be completely accommodated in the main body portion 30 . Furthermore, the cover body 15 for a production line can also be detached from the container body 12 .

When attaching the production line cover 15 to the container body 12 , the production line cover 15 is attached to the cover receiving portion 21 , and the latch key is fitted into the key groove 62 and rotated. In this way, contrary to the above description, the joining member 42 can be pushed out from the main body portion 30 . At this time, the fulcrum portion 55 of the engaging member 42 is slidably connected to the inclined surface 40A of the front end side cam 40 to push the front end fitting portion 56 upward. Furthermore, the inclined surface 53A of the base end upper side cam 53 also abuts against the projection 69 of the pressing cam, and presses down the base end portion of the joint member 42 . In this way, the base end side sliding contact surface 52 of the joining member 42 can push downward along the slope 39A of the base end lower side cam 39 .

On the fulcrum portion 55 of the joint member 42 , the front end side sliding contact surface 55A is fitted into the fitting recess 40B, so that the joint member 42 rotates around the fitting recess 40B.

In the base end portion of the engaging member 42, the protrusion 69 of the pressing cam also abuts against the base end upper cam 53 while the base end side sliding contact surface 52 is slidingly connected to the inclined surface 39A of the base end lower cam 39. The inclined surface 53A pushes down the base end portion of the engaging member 42 .

In this way, the engagement member 42 exerts a leverage effect with the fulcrum portion 55 fitted into the fitting recess 40B as a fulcrum, and in a state where the front end fitting portion 56 is fitted into the second fitted portion 24 of the cover receiving portion 21 , The production line cover body 15 is strongly pressed to the container body 12 side and fixed.

In a state where the production line cap 15 is attached to the container body 12, the cap holder 100 is attached. Specifically, the hook portion 102 is hooked to the flange portion of the container body 12 . In this way, the fitting protrusion 103 can be fitted into the key groove 62 to fix the pushing member 43 .

Inside the container body 12 , the peripheral edge portion of the semiconductor wafer is fitted into the top tab 94 . In the top tab 94 , the peripheral edge portion of the semiconductor wafer is fitted between supporting claws 97 arranged alternately, and each supporting claw 97 is reliably supported.

When the sheet support container 11 is subjected to a strong impact from the outside, the production line cover 15 will not fall off from the container body 12 because the joint member 42 can force the production line cover 15 against the container body 12 by the principle of leverage. Moreover, since the push-out member 43 is fixed by the lid fixing member 100 , the push-out member 43 does not rotate to cause the engagement member 42 to fall off from the second engaged portion 24 .

On the other hand, the semiconductor wafer in the thin plate holding container 11 is supported from both sides by the support claws 97 arranged alternately with each other because it is fitted to the top tab 94 of the wafer holding member 91, so the semiconductor wafer will not fall from the wafer. The top tab 94 falls off. And, because the top tab 94 is supported by the elastic support plate portion 93, the first support plate 93A and the second support plate 93B can use their own elasticity to support the semiconductor wafer against the lower side of the production line cover 15, Prevent breakage of semiconductor wafers.

When cleaning, by staggering the cover pressing piece 46 and taking it off from the engagement claw 38, the simple loading and unloading mechanism 32 can make the engaging member 42, the ejecting member 43, the cam mechanism 44, the holding cover 45 and the cover pressing piece 46 are all separated and can be cleaned and dried individually.

As described above, according to the sheet support container 11, the following effects can be achieved:

(1) Since the engaging member 42 is pushed out using the principle of leverage, the production line cover 15 can be firmly and reliably fixed to the container body 12 .

(2) Since the parts of the simple loading and unloading mechanism can be easily disassembled, the disassembled parts can be disassembled during cleaning, which can not only clean every corner thoroughly, but also dry quickly.

(3) Since the supporting claws 97 are arranged alternately, each supporting claw 97 alternately butts against the peripheral edge of the semiconductor wafer, thereby enabling more reliable support.

(second embodiment)

Next, a second embodiment of the present invention will be described. This embodiment is an improved wafer holding member.

Sheet support containers are subject to vibration due to various factors during transportation. When these vibrations are transmitted to the semiconductor wafer, the semiconductor wafer may rotate accordingly, which is very unfavorable. Therefore, the wafer pressing member (thin plate pressing member) of this embodiment can be used in a situation where the thin plate holding container may vibrate. The wafer holding member 121 of this embodiment will be described based on FIGS. 34 to 43 . Incidentally, except for the wafer holding member 121, since all are the same as the thin-plate holding container 11 of the above-mentioned first embodiment, the same reference numerals are used for the same components, and description thereof will be omitted.

As shown in FIG. 40 , the wafer holding member 121 is composed of a base end support portion 122 , an elastic support plate portion 123 , a top tab 124 , a connection support plate portion 125 , and support ribs 126 .

The base end supporting portion 122 is a member for directly supporting two elastic supporting plate portions 123 respectively provided at both ends of the wafer holding member 121 . The base end support portion 122 is not only formed in a square bar shape, but also formed over the entire length of the wafer hold-down member 121 in the longitudinal direction (the vertical direction in FIG. 35 ). Two hook-shaped support portions 128 are respectively provided on the lower side of the cover body 127 . The base end support part 122 is fitted into each hook-shaped support part 128, and is fixed on the inner surface of the cover body.

The elastic support plate portion 123 is a member for elastically supporting the outer end of the top tab 124 . The two elastic support plate portions 123 are arranged in parallel in the same number as the number of semiconductor wafers 120 accommodated in the container body 12 . Each elastic support plate part 123 is respectively fixed to the proximal end support part 122 in the state aligned in the horizontal direction. The elastic support plate portion 123 is bent to have an S-shaped side shape. The base ends of the two elastic supporting boards 123 are respectively fixed on the two base end supporting parts 122 , and the top joints 124 are respectively mounted on the front ends thereof, and elastically support each top joint 124 .

The top tab 124 is a member directly abutting on the peripheral edge of each semiconductor chip 120 and used to directly support each semiconductor chip 120 . One side surface of each top tab 124 is provided with a V-shaped fitting groove 124A for fitting the semiconductor chip 120 as shown in FIGS. 42 and 43 . This fitting groove 124A becomes a two-stage V-shaped groove. The first segment is a gently sloping groove with an angle of 124°. The second segment is a groove with an angle of 44° inclination. In this way, when the edge of the semiconductor wafer 120 touches the first-segment groove, the edge of the semiconductor wafer 120 is guided by a gentle slope to enter the second-segment groove, and the second-segment groove supports the semiconductor wafer 120 . The bottom of the trench in the second stage is formed into a flat surface having approximately the same width as the thickness of the semiconductor wafer 120 . The inclination angle and bottom width of the second groove are formed according to the size of the edge of the semiconductor wafer 120 . Since the edge of the semiconductor wafer 120 is truncated to an edge angle of 44°, the inclination angle of the trench is also set to 44°. Moreover, the width of the bottom of the trench is also formed in accordance with the size of the edge of the semiconductor wafer 120 . In this way, the second-stage groove can grasp the edge of the semiconductor wafer 120, contact the semiconductor wafer 120 over a larger area and reliably support it, and can also restrain the rotation of the semiconductor wafer 120 during vibration. Incidentally, the second groove is set at 44° according to the edge angle of the semiconductor wafer 120 , but because of the material of the top tab 124 , it can also be set at a narrower angle. Specifically, it may be appropriately set within a range of about 40° to 44° according to the difference in elastic force. However, if the angle of the second section of the groove is too narrow, the edge of the semiconductor wafer 120 will be clamped, and the semiconductor wafer 120 will be lifted together when the cover 127 is lifted. Therefore, the semiconductor wafer 120 It is set to an angle that does not pinch the semiconductor wafer 120 . In addition, when the off-angle angle of the semiconductor wafer 120 is different, or other thin plates other than the semiconductor wafer 120 are used, the angle can be appropriately set within a range of about 20° to 60°.

The bottom of the fitting groove 124A, as shown in FIGS. 40 and 41 , is set at an angle along the shape of the outer peripheral edge of the semiconductor wafer 120, that is, is set in a tangential direction of the outer peripheral edge of the semiconductor wafer 120, as described later. , the elastic force increases in proportion to the curvature of the wafer holding member 121, so the strength of each top tab 124 pressing the semiconductor wafer 120 is uniform as a whole. In other words, if one of the two top tabs 124 has an increased amount of change, the change increases and the elastic force on the other top tab 124 side increases to slightly press down the semiconductor wafer 120, and finally the two top tabs 124 are pushed down. The elastic force of the tab 124 is balanced at a point of the same strength, so as a result, the left and right sides can be automatically adjusted to the same elastic force. And, in the state where the lid body 127 is attached to the container body 12, it is set to be in contact with the bottom near the approximate center of the fitting groove 124A (contact point A in FIG. 41 ).

The connection support plate portion 125 is a member for connecting and supporting the two top tabs 124 to each other. Both ends of the connection support plate portion 125 are respectively connected to the top tabs 124 to elastically support the top tabs 124 . The connection support plate portion 125 is bent so that its side surface is substantially U-shaped. Specifically, it is composed of vertical plate portions 125A and 125B on both sides and a horizontal plate portion 125C. The vertical plate portions 125A, 125B are disposed in a direction perpendicular to the inner surface of the cover body 127 , and support the respective top tabs 124 almost without bending.

The transverse plate portion 125C is elastically bendable. The function of elastically supporting each top piece 124 of the connecting support plate portion 125 is mainly performed by the transverse plate portion 125C. Both ends of the horizontal plate portion 125C are arranged along the direction of the inner surface of the cover body 127 in a state where the vertical plate portions 125A and 125B are respectively connected. The horizontal plate portion 125C is supported at its center by a support ridge 131 described later, and both ends thereof are bent around the support ridge 131 .

The elastic force generated by the deformation of the transverse plate portion 125C (that is, the elastic force used to support the top tab 124 by connecting the support plate portion 125 ) is set to be stronger than the elastic force of the elastic support plate portion 123 supporting the top tab 124 . In this way, the inner ends of the two top tabs 124 are supported by stronger elastic forces, while the outer ends are supported by weaker elastic forces. Moreover, the bottoms of the fitting grooves 124A of the two top tabs 124 are arranged in the tangential direction of the outer peripheral edge of the semiconductor wafer 120 as described above. In this way, the supporting force of the semiconductor wafer 120 by the wafer holding member 121 is set to increase in proportion to the movement amount (vibration amount) of the semiconductor wafer 120 . In other words, in a normal state, as shown by the solid line in FIG. 41 , the semiconductor wafer 120 is supported by being in contact near the substantially central portion of the bottom of the fitting groove 124A (contact point A in FIG. 41 ). If the semiconductor wafer 120 vibrates, the inner end of the top tab 124 supported by the strong elastic force of the connection support plate portion 125 hardly changes, while the outer end supported by the weaker elastic force of the elastic support plate portion 123 changes greatly. 41, the semiconductor wafer 120 (contact point B side in FIG. 41) is supported by the bottom of the fitting groove 124A to move to its inner end side. In this way, when the amount of vibration of the semiconductor wafer 120 is small (the amount of bending of the wafer holding member 121 is also small), the semiconductor wafer 120 contacts the fitting groove 124A with its outer end side (contact point A side in FIG. 41 ) Supported by the weaker elastic force, when the amount of vibration of the semiconductor wafer 120 increases (the amount of bending of the wafer holding member 121 also increases), the contact point of the semiconductor wafer 120 moves to the inner end side of the fitting groove 124A ( The contact point B side in Fig. 41) is supported by a strong elastic force. And, the larger the amount of movement of the contact point of the semiconductor wafer 120 toward the inner end side, the more force applied to the connection support plate portion 125 than the elastic support plate portion 123, and the more the elastic force is strengthened, so it can be more flexible. Efficiently suppress the vibration of the semiconductor wafer 120 .

The support rib 126 is a support member for supporting the connecting support plate portion 125 so as to prevent displacement along the inner surface of the lid. The support rib 126 is provided at the center of the inner surface of the lid body 127 as shown in FIGS. 34 to 40 . The support ribs 126 are designed to cover all of the connection support plate portions 125 provided with a plurality of wafer hold-down members 121 . Specifically, it is set to a length capable of fitting all the connection support plate portions 125 arranged in parallel for the number of semiconductor wafers 120 to be accommodated. The supporting rib 126 is constituted by two supporting wall parts 129 and 130 .

The support wall portions 129, 130 are arranged parallel to each other. Each support wall portion 129 , 130 is constituted by a support plate piece 133 and a partition plate piece 134 .

The support plate piece 133 is a member for supporting the vertical plate portions 125A, 125B connecting the support plate portion 125 so as not to be displaced in the circumferential direction of the semiconductor wafer 120 (left-right direction in FIG. 40 ). The support plate 133 indirectly supports the top tab 124 so as not to be displaced in the circumferential direction of the semiconductor wafer 120 by directly supporting the longitudinal plate portions 125A, 125B connecting the support plate portion 125 .

The partition plate 134 is a plate for individually partitioning a large number of connection support plate portions 125 . Each partition plate piece 134 is respectively disposed on the outermost side and between each connection support plate portion 125 . In this way, each partition sheet 134 can support each connection supporting plate portion 125 from both sides in the width direction. In this way, each partition plate 134 indirectly supports the top contact piece 124 by directly supporting and connecting the support plate portion 125 so that it will not be displaced in a direction perpendicular to the circumferential direction of the semiconductor wafer 120 .

By means of the support plate 133 and the partition plate 134 described above, the connection support plate portion 125 can be sandwiched by the surrounding (the direction perpendicular to the circumferential direction of the semiconductor wafer 120 accommodated in the container body 12) and supported separately. , to prevent displacement along the direction of the inner surface of the cover connecting the support plate portion 125, and allow the inner surface of the cover to change in the vertical direction.

Between the support plate 133 and the partition plate 134, and the connecting support plate portion 125, there is a very small gap, which can avoid contact when there is a slight vibration. In other words, when the semiconductor wafer 120 vibrates only slightly, the connecting and supporting plate portion 125 can bend slightly to absorb the vibration without contacting the supporting plate 133 and the separating plate 134 . When the vibration is intensified, because the connection support plate part 125 vibrates violently through each top contact piece 124, the connection support plate part 125 can contact the support plate 133 and the partition plate 134 for support.

Between the two support wall portions 129, 130 of the support rib 126, a support protrusion 131 as shown in FIGS. 34, 37 to 39 is provided. The support ridges 131 are members for directly abutting and supporting the connecting support plate portions 125 . Specifically, the central portion of the horizontal plate portion 125C of each connecting support plate portion 125 is supported by the supporting protrusion 131 , and both ends of the horizontal plate portion 125C can be bent freely. The support ridge 131 is formed parallel to the support wall portions 129 , 130 at the center portion between the two support wall portions 129 , 130 parallel to each other and has substantially the same length.

The support ridge 131 is as shown in FIG. 38 and FIG. 39 . In other words, the central side of the top tab 124 (side a in FIG. 38 ) is thicker and the two sides (side b of FIG. 38 ) are thinner, so that the top tab 124 on the central side is thicker than the top tab 124 on both sides. The tab 124 protrudes toward the side of the semiconductor wafer 120 . In this embodiment, the whole is formed in an arcuate bend. In this way, when the wafer holding member 121 is attached to the cover body 127, the distance between each connection support plate portion 125 is set to be wider on both sides and narrower on the central side as shown in FIG. 39 . The specific size of the supporting rib 131 is appropriately set according to the amount of bending of the cover body 127 .

The reason why the supporting ribs 131 are formed in this way is as follows. If the upper lid body 127 is attached in the state where the plurality of semiconductor wafers 120 are accommodated in the container body 12 , a certain reaction force will be generated against the lid body 127 . The wafer holding member 121 that is contained in the inner surface of the cover, because every semiconductor wafer 120 is all supported with certain force respectively, so when the diameter of semiconductor wafer 120 increases and the supporting force to this wafer semiconductor wafer 120 is bigger, or If the number of wafers is more, the reaction force of pressing back the wafer holding member 121 will be larger. This reaction force makes the cover body 127 on which the wafer holding member 121 is installed slightly bend outward. Furthermore, if the cover body 127 is bent outward, the force supporting the semiconductor wafer 120 by the wafer holding member 121 is weakened at the center. In order to solve such a problem of uneven force supporting the semiconductor wafer 120 , supporting ribs 131 are provided. The thick support rib 131 at the central side can absorb the bending of the cover body 127, so that the wafer holding member 121 can support each semiconductor wafer 120 with equal force.

The thin plate supporting container formed above can function as follows:

When the upper cover 127 is mounted in the state where the container body 12 accommodates a plurality of semiconductor wafers 120 , the wafer holding member 121 is fitted into each semiconductor wafer 120 . Specifically, the fitting grooves 124A of the top tabs 124 respectively fit into the peripheral edges of the semiconductor chips 120 , and guide the peripheral edges of the semiconductor chips 120 to the bottom of the fitting grooves 124A. At this time, in the state where the edge portion of the semiconductor wafer 120 is fitted in the second-stage groove, the second-stage groove grasps the edge portion of the semiconductor wafer 120, and can contact the semiconductor wafer 120 with a large area and reliably for support. Each top tab 124 is supported by the elastic support plate portion 123 and the connection support plate portion 125 .

The elastic support plate portion 123 elastically supports the outer ends of the top tabs 124 with its front end in a state where its base end is supported by the base end support portion 122 fixed on the inner surface of the cover body 127 . The connection support plate portion 125 elastically supports the inner end of each top piece 124 by its both side end portions in a state where the central portion is supported by the support rib 126 .

In addition, the arch-shaped support ridges 131 support the top tabs 124 in a state where the absorbing cover 127 is bent. In this way, each top tab 124 can support each semiconductor chip 120 with equal force.

In addition, the inner end of each top tab 124 is supported by relatively strong elastic force, and the outer end of each top tab 124 is elastically supported by relatively weak force. Now, each top tab 124 is in contact with each semiconductor wafer 120 at the bottom of its fitting groove 124A along the tangential direction of the peripheral edge of each semiconductor wafer 120, and automatically adjusts the elastic force of the two top tabs 124 to become the same. The strength makes the overall strength against the semiconductor wafer 120 equal, and supports the semiconductor wafer 120 more stably.

When the thin-plate support container vibrates during transport of the thin-plate support container, each semiconductor wafer 120 also vibrates. Moreover, each top tab 124 also vibrates with the vibration of the semiconductor wafer 120 .

At this moment, when the vibration is small, because the vibration amplitude of each top tab 124 is small, the contact between the semiconductor wafer 120 and the top tab 124 is on the outside (for example, near the contact point A in FIG. 41 ), which is mainly the elastic support plate portion. 123 bends and supports it with a weaker elastic force.

When the vibration is strong, the vibration amplitude of each top tab 124 is also large, but along with the large vibration of the top tab 124, the contact between the semiconductor wafer 120 and each top tab 124 moves towards the inside (for example, near the contact point B in FIG. 41 ). According to this movement amount, the force acting on the connecting support plate portion 125 is greater than that of the elastic support plate portion 123, and the elastic force is also strengthened. Therefore, when the semiconductor chip 120 is about to vibrate greatly, the top tab 124 will suppress the vibration of the semiconductor chip 120 with strong elastic back pressure. In this way, according to the intensity of the vibration, the force supporting the semiconductor wafer 120 is automatically changed, so that the semiconductor wafer 120 can be reliably supported.

As a result, all the semiconductor wafers 120 can be supported with an equal force, and at the same time, the vibration of the semiconductor wafers 120 can be suppressed to a minimum and the rotation of the semiconductor wafers 120 can be prevented.

Variation

(1) In the above-mentioned first embodiment, the base end support portion 92, the elastic support plate portion 93, and the top joint piece 94 are used to form the product sheet pressing member 91, and as shown in FIGS. 25, 26, and 27, Then, it is composed of the base end supporting part 110 , the elastic supporting plate part 111 and the top connecting piece 112 . The elastic support plate portion 111 supports one end of the top tab 112 in a state where the base end portion is fixed to the base end support portion 110 . Moreover, the elastic support plate portion 111 is formed by extending from the other end of the top joint 112 on the lower side of the production line cover 15 . The inclined surface 112A and the top joint surface 112B on the top contact piece 112 have substantially the same functions as the inclined surface 96A and the top joint surface 96B of the above-mentioned embodiment. Three support claws 113 are arranged alternately with respect to each other. The number of the supporting claws 113 is set according to needs.

Such a constitution also has the same effect as the above-mentioned embodiment, and can obtain the same effect.

(2) In the above-mentioned first embodiment, the wafer holding member 91 is a unilateral supporting structure, but it can also be a bilateral supporting structure as shown in Fig. 28 and Fig. 29, for example. The elastic support plate portion is installed to support between the top tabs and both sides, and at the same time, the elastic support plate portion between the top tabs supports each top plate at a distance from the lower side of the production line cover body 15 with a gap S. Splices.

In this way, the elastic support plate portion between the top tabs supports the top tabs with only a small distance from the mounting surface, so the thin board is usually supported with a not too strong force. For example, when the thin-plate support container is accidentally dropped, when a strong impact from the outside is received, the buffer of the gap S disappears, so that the elastic support plate between the top pieces is connected to the support surface, and it is strongly supported. Each top tab. This protects the sheet from impacts.

(3) In the above-mentioned first embodiment, the semiconductor wafer is supported by the support claws 97, but it may be supported by corner blocks. As shown in FIGS. 30 and 31 , the two corner blocks 115 are arranged alternately in a state where they face each other, as in the above-mentioned embodiment. In other words, two sets of oppositely arranged corner blocks 115 are kept at a certain distance from each other, and four sets of one unit are respectively arranged and alternately arranged with each other. In addition, each abutting surface 115A in a group of corner blocks 115 is set to be inclined at 20° and 4° with respect to the vertical plane, respectively. Also, the side abutting against the semiconductor wafer is set at an angle of 4°. In this way, the peripheral edge of the semiconductor wafer can be clamped at an angle of 4° on one side (8° on both sides), and the semiconductor wafer can be reliably supported without sliding the semiconductor wafer.

In this case, each corner block can also be arranged as shown in Figures 32 and 33 . This is almost the same configuration as the example described above with reference to FIGS. 28 and 29 , and can also exhibit the same action and effect.

(4) In the above-mentioned first embodiment, the lid body for the thin-plate support container used in the production line was described as an example, but it can be used in storage, transportation, and the like in the same way. In these occasions, the same function and effect as those of the above-mentioned embodiments can also be brought into play.

(5) In the above-mentioned first embodiment, two simple loading and unloading mechanisms 32 are provided on the production line cover body 15 as an example, but one or more than three can also be provided according to conditions such as specifications.

(6) In the above-mentioned first embodiment, the cover body for the thin plate supporting container is used as an example to describe the container for accommodating semiconductor wafers, but it is not limited to semiconductor wafers, and containers for accommodating other thin plates can also be used in the same way. This situation also brings into play the same effect and effect as the above-mentioned embodiment.

(7) In the above-mentioned first embodiment and the modified example, the wafer holding member is used as the thin-plate holding member for supporting the thin plate contained in the container body, and is used in the thin-plate holding container 11 of the above-mentioned embodiment, but the present invention does not Limiting to this example, other configurations of sheet support containers can also be used. In this case, the same functions and effects as those of the above-mentioned embodiments can also be brought into play.

(8) In the above-mentioned first embodiment, the lid holder 100 is used for the thin plate holding container 11, but the present invention is not limited to this example, and thin plate holding containers of other structures can also be used. In this case, the same functions and effects as those of the above-mentioned embodiments can also be brought into play.

(9) In the above-mentioned second embodiment, two top tabs 124 of the wafer holding member 121 are provided, but three or more may be provided. When three or more top tabs 124 are provided, a connection support plate portion 125 and support ribs 126 are provided between the respective top tabs 124 . In this case, the same functions and effects as those of the above-mentioned embodiments can also be brought into play.

(10) In the above-mentioned second embodiment, the lateral plate portion 125C is supported by the support ridge 131 , but a support protrusion may be provided at the central portion of the lateral plate portion 125C. In the case of providing support protrusions, the support protrusions 131 may or may not be provided. The supporting protrusions are connected to the supporting convex lines 131 in the case where the supporting convex lines 131 are provided, and are connected to the inner surface of the cover body 127 in the case of no supporting convex lines 131 to support the horizontal plate. Section 125C.

When the support protrusion 131 is not provided, the height of the support protrusion at the central portion of the lateral plate portion 125C is set to be higher on the central side than on both sides as in the second embodiment described above. On the other hand, when the support protrusion 131 is provided, the sum of the heights of the support protrusion and the support protrusion 131 at the central portion of the lateral plate portion 125C is set so that the central side is higher than the height of both sides. In this case, the same functions and effects as those of the second embodiment described above can also be brought into play.

(11) In the above-mentioned second embodiment, the fitting groove 124A of the top tab 124 is formed in a V shape, but it can also be equipped with the top tab 124 like the top tab 94 of the above-mentioned first embodiment. Supporting sheets arranged alternately with each other. In other words, the top contact piece 124 of the second embodiment, like the top contact piece 94 of the first embodiment, can also be composed of two corner pieces 96 and supporting claws 97 (supporting pieces) arranged alternately. In this way, the supporting pieces arranged alternately contact the peripheral edges of the semiconductor wafer 120 alternately, so that the semiconductor wafer 120 can be reliably supported. As a result, the vibration of the semiconductor wafer 120 can be suppressed to a minimum against external vibration, and the rotation of the semiconductor wafer 120 can also be reliably prevented.

(12) The configuration of the top tab 124 for supporting the wafer holding member 121 is not limited to the second embodiment, and may be other configurations. For example, the top tab 124 located on the center side may be arranged to protrude toward the semiconductor wafer 120 side than the top tabs 124 located on both sides.

For example, the elastic support plate portion 123 may also be formed so that the top tab 124 positioned at the central side protrudes toward the semiconductor wafer 120 side than the top tabs 124 positioned at both sides, or the elastic support plate portion 123 may be provided or connected to the semiconductor wafer 120. One or both of the plate portions 125 are supported so that the top tab 124 on the central side protrudes toward the semiconductor wafer 120 more than the top tabs 124 on both sides.

(13) In the above-mentioned second embodiment, the connection support plate portion 125 is supported by the support rib 126, but it may be supported by a protrusion. Specifically, as shown in FIG. 44 , by fitting with the fitting hole 141 provided on the connection support plate portion 125, the displacement along the inner surface of the cover body of the connection support plate portion 125 is prevented and it is allowed to move vertically in the inner surface of the cover body. The fitting protrusion 142 that moves upward is used to support the connecting support plate portion 125 . In this case, the same functions and effects as those of the second embodiment described above can also be brought into play.

(14) In the above-mentioned second embodiment, the bottom of the V-shaped fitting groove 124A of the top contact piece 124 is formed in a flat surface shape, and has approximately the same thickness as the semiconductor wafer 120, but the bottom of the bottom as shown in FIG. It can be formed very finely. Specifically, the top tab 151 has a V-shaped groove 151A having an inclination angle of 44° that is the same as the edge angle of 44° of the edge portion of the semiconductor wafer 152 . In addition, this V-shaped groove 151A can also be set to an angle of two stages or an angle of one stage.

The bottom of the V-shaped groove 151A is formed thinner than the temperature of the semiconductor wafer 152 . In this way, in the state where the semiconductor wafer 152 is fitted into the V-shaped groove 151A, a gap 153 is formed between the edge portion of the semiconductor wafer 152 and the bottom of the above-mentioned V-shaped groove 151A. A semiconductor wafer 152 is supported. At this time, since the edge angle of the edge portion of the semiconductor wafer 152 and the inclination angle of the V-shaped groove 151A of the top tab 151 are both 44°, the edge portion of the semiconductor wafer 152 and the inclination surface of the V-shaped groove 151A can be compared with each other. Large area contact.

And, since there is a gap 153 between the edge of the semiconductor wafer 152 and the bottom of the V-shaped groove 151A, the edge of the semiconductor wafer 152 is not directly supported. As a result, the edge of the semiconductor wafer 152 is embedded in a V shape. Word groove 151A. In this way, the edge portion of the semiconductor wafer 152 is strongly pressed against the inclined surface of the V-shaped groove 151A.

As a result, even if the thin-plate pressing member is mounted on the semiconductor wafer 152 with not so strong pressing force, the semiconductor wafer 152 can be reliably supported by the top tab 151 of the thin-plate pressing member, preventing damage to the semiconductor wafer caused by vibration or the like. 152 spins. In this way, the semiconductor wafer 152 can be reliably supported even when the lid is attached to the container body without a strong pressure, and the rotation of the semiconductor wafer 152 due to vibration or the like can be prevented. In this way, there is no need to increase the strength of the cover. In this way, it is possible to easily automate the work of attaching and detaching the cover.

In addition, if the inclination angle of the V-shaped groove 151A of the top contact piece 151 is set to 20°-60°, the same functions and effects as above can be obtained. In this case, the semiconductor chip 152 is fitted into the V-shaped groove 151A of the top tab 151 , and the edge portion of the semiconductor chip 152 is fitted into the V-shaped groove 151A. At this time, the inclination angle of the V-shaped groove 151A is set to 20°-60°, so that the semiconductor wafer 152 can be reliably and easily supported, loaded and unloaded. In other words, the semiconductor wafer 152 is fitted into the V-shaped groove 151A, and the edge portion of the semiconductor wafer 152 is fitted into the V-shaped groove 151A for support. At this time, if the inclination angle of the V-shaped groove 151A is set to be 60° or more, the fitting of the semiconductor wafer 152 into the V-shaped groove 151A is insufficient and rotation occurs. In fact, from experiments in which the inclination angle of the V-shaped groove 151A was set to 60°, rotation due to vibration transmitted from the outside rarely occurred. If the inclination angle exceeds 60°, rotation due to external vibration is likely to occur. Moreover, when the top tab 151 is separated from the semiconductor wafer 152, it is not necessary to pull the semiconductor wafer 152 embedded in the V-shaped groove 151A out from the V-shaped groove 151A, and it can be smoothly separated. At this time, if the inclination angle of the V-shaped groove 151A is set below 20°, when the top tab 151 is detached from the semiconductor wafer 152, the semiconductor wafer 152 will be pulled out from the V-shaped groove 151A. The semiconductor wafer 152 is removed. In fact, from the experiment in which the inclination angle of the V-shaped groove 151A is set to 20°, the semiconductor wafer 152 rarely pulls the semiconductor wafer 152 from the V-shaped groove 151A, and the semiconductor wafer 152 is pulled out of the container. Remove from the body. If the inclination angle is less than 20°, it is easy to pull out.

Therefore, it is preferable to set the inclination angle of the V-shaped groove 151A to 20°-60°. In this manner, it is possible to simultaneously prevent rotation of the semiconductor wafer 152 due to fitting into the V-shaped groove 151A and achieve smooth separation.

In this way, while reliably supporting the semiconductor wafer 152, the cover can be easily attached and detached, and the automation of the cover's attachment and detachment is realized.

In addition, while the inclination angle of the V-shaped groove 151A is set to 20°-60°, it is preferable to provide a gap between the edge of the semiconductor wafer 152 and the bottom of the V-shaped groove 151A of the top tab 151 . In this case, when the semiconductor chip 152 is fitted on the V-shaped groove 151A, the edge of the semiconductor chip 152 and the bottom of the V-shaped groove 151A are not in contact with each other, and the edge of the semiconductor chip 152 is strongly pressed. portion and the inclined surface of the V-shaped groove 151A to securely support the semiconductor wafer 152 embedded in the V-shaped groove 151A. Moreover, the above method can also be easily attached and detached.

(15) In the above-mentioned second embodiment, the thickness provided on the central side of the support rib 131 of the cover body 127 absorbs the bending of the cover body 127, and the wafer holding member 121 supports each semiconductor wafer 120 with an equal force. Improvements are made to the cover body 127 itself.

Specifically, the center portion of the flat cover 127 is recessed toward the container body side, and warping caused by each semiconductor wafer 120 is canceled out. In other words, when the cover body 127 is mounted on the container body, each semiconductor wafer 120 presses the cover body 127 so that its central portion is bent outward, and the central portion of the cover body 127 is formed in advance toward the above-mentioned container body side. Debossed to counteract this curvature. In this way, when the central part of the cover body 127 bends outward, the bending is canceled out by absorbing the dents to become flat, and all the semiconductor wafers 120 can be supported by the wafer holding member with an equal force.

The size of the recess of the central part of the lid body 127 toward the container body side is set in accordance with conditions such as different acting forces caused by the number of semiconductor wafers 120 and the like. In addition, the shape of the dent may be appropriately set in accordance with the state of deformation caused by reaction forces such as spherical, ellipsoidal, aspheric, etc., according to the state that can support the semiconductor wafer 120 with an equal force that cancels them. . In this way, all of the semiconductor wafers 120 can be supported with an equal force, and rotation of the semiconductor wafers 120 due to vibration or the like can be prevented. In addition, in this case, the support protrusions 131 of the cover body 127 are set to have the same thickness on both end sides and the center side. Moreover, the bending of the cover body 127 is absorbed by both the depression in the central part of the cover body 127 and the thickness of the supporting rib 131, and the thickness of the depression in the central part of the cover body 127 and the supporting rib 131 can also be adjusted. Both are adjusted.

It is also possible to bend the reinforcement flange around the cover body 127 . In other words, the reaction force generated by each semiconductor wafer 120 and the deformation of the reinforcing flange formed around the cover 127 can also be offset by the deformation of the reinforcing flange formed in advance toward the container body side.

When the thin plate pressing member abuts against the supporting semiconductor wafer 120 of the semiconductor wafer 120, its reaction force also makes the reinforcing flange formed around the cover body deform outwardly, and the reinforcing flange is preliminarily deformed to the container body side. to absorb the outward deformation. In other words, the pre-bent reinforcing flange is linearly offset against the outward deformation, and supports all the semiconductor wafers 120 with a uniform force. The concrete size of the reinforcing flange is the same as that of the central part of the cover body 127, and it is appropriately set to a size and shape capable of absorbing and canceling deformation. It is also possible to appropriately combine the curved form of the reinforcing flange, the form in which the center portion of the lid body 127 is recessed, and the form in which the thickness of the supporting rib 131 is adjusted.

Furthermore, it is also possible to insert a reinforcing member into a reinforcing flange formed around the cover body 127 . In this way, the strength of the reinforcing flange is increased, the reaction force of each semiconductor wafer 120 can be resisted, and all the semiconductor wafers 120 can be supported with uniform force. Also in this case, it is possible to add a reinforcing member to the reinforcing flange, a curved reinforcing flange, a recessed central part of the cover body 127, and adjust the position of the supporting rib 131. Appropriate combination of the shape of the thickness.

Even in these cases, the same actions and effects as those of the above-mentioned embodiments can be obtained.

Claims (24)

1. A cover body for a sheet-supporting container, a cover body for a sheet-supporting container that is plugged by a container body of a sheet-supporting container that carries a plurality of sheets in the contents, and is characterized in that: It has a detachable simple loading and unloading mechanism that can easily fix and release the above-mentioned container body; the simple loading and unloading mechanism has: an engaging member capable of protruding to be engaged with the container body side; a push-out member capable of extending and retracting in connection with the engaging member; a front end side cam that pushes the front end side of the engaging member to one side when the engaging member is pushed out by the pushing member; and The base end side cam pushes the base end side of the above-mentioned joint member to the other side when pushing out the above-mentioned joint member. 2. The lid body for a thin-plate holding container according to claim 1, wherein the front end cam has a slope that pushes the front end side of the joining member to one side. 3. The lid body for a thin-plate holding container according to claim 1 or 2, wherein the base end side cam has a slope that pushes the base end side of the joining member toward the other side. 4. The lid body for a thin-plate holding container according to any one of claims 1 to 3, wherein a fulcrum portion for rotation of the joint member is provided on the front end side of the joint member. 5. The lid body for a thin-plate holding container according to any one of claims 1-4, wherein the simple attachment and detachment mechanism is configured to be freely attachable and detachable, and its constituent parts are also assembled so as to be detachable. 6. A cover body for a sheet-supporting container, which is a cover body for a sheet-supporting container in which a container body of a sheet-supporting container containing a plurality of sheets for transportation is plugged, and is characterized in that: There are thin plate retaining members which can be used to support the thin plate contained in the above-mentioned container body, The thin-plate pressing member has support pieces arranged alternately with each other. 7. A cover body for a sheet-supporting container, which is a cover body for a sheet-supporting container in which a container body of a sheet-supporting container containing a plurality of sheets for transportation is plugged, and is characterized in that: There are thin plate retaining members which can be used to support the thin plate contained in the above-mentioned container body, Wherein, the above-mentioned thin plate pressing member is composed of two top joints with support plates alternately arranged with each other, and an elastic support plate part elastically supporting the top joints, The above-mentioned elastic support plate part is installed to support between each top tab and both sides, and at the same time, the elastic support plate part between each top tab supports each top tab in a slightly floating state. 8. A cover body for a sheet-supporting container, which is a cover body for a sheet-supporting container in which a container body of a sheet-supporting container containing a plurality of sheets for transportation is plugged, and is characterized in that: Cover and fix the cover from the outside while it is attached to the container body above. 9. A cover body for a sheet-supporting container, which is a cover body for a sheet-supporting container in which a container body of a sheet-supporting container containing a plurality of sheets for transportation is plugged, and is characterized in that: There is a thin plate pressing piece that can be used to support the thin plate contained in the above-mentioned container body, and the thin plate pressing piece has a plurality of top joints that are arranged in parallel and directly abut the above-mentioned multiple thin plates respectively, The above-mentioned top tabs arranged in parallel are formed so that those located on the central side protrude more toward the thin plate side than those located on both sides. 10. The lid body for a thin plate holding container according to claim 9, wherein the thin plate pressing member comprises: a base end support portion fixed on the inner surface of the cover and a plurality of elastic support plate portions supported by the base end support portion to respectively support one end of each of the above-mentioned top tabs, Each elastic supporting plate portion supporting each of the top tabs is formed such that the top tab positioned at the central side protrudes further toward the sheet side than the top tabs positioned at both sides thereof. 11. The lid body for a thin-plate holding container according to claim 9, wherein the thin-plate pressing member comprises: The base end support part fixed on the inner side of the cover body is supported by the base end support part to respectively support a plurality of side elastic support plate parts at one end of each of the above-mentioned top tabs, and support the other end of each of the above-mentioned top tabs respectively. a plurality of elastic support plates on the other side connected to the inner surface of the above-mentioned cover body, One or both of the one-side elastic support plate portion and the other side elastic support plate portion supporting each of the above-mentioned top tabs are formed so that the above-mentioned top tab positioned at the central side is smaller than the above-mentioned top tab positioned at both sides. The sheet further bulges toward the above-mentioned thin plate side. 12. The lid body for a thin plate holding container according to claim 9, wherein the thin plate pressing member comprises: The base end supporting part fixed on the inner side of the cover body is supported by the base end supporting part and supports respectively a plurality of side elastic supporting plate parts at one end of each of the above-mentioned top tabs, supports the other end of each of the above-mentioned top tabs respectively A plurality of the other side elastic supporting plate parts connected to the inner surface of the above-mentioned cover body, and a support that is arranged on the inner surface side of the above-mentioned cover body and abuts against the above-mentioned other side elastic supporting plate part to support the other side supporting plate part ribs, Either one or both of the support rib and the other elastic support plate portion is formed such that the top piece located at the center side protrudes toward the thin plate side more than the top piece located at both sides thereof. 13. The lid body for a thin-plate holding container according to any one of claims 9-12, wherein the top tab has a V-shaped groove with an inclination angle of 40° to 44°. 14. A cover body for a sheet-supporting container, which is a cover body for a sheet-supporting container in which a container body of a sheet-supporting container accommodating and transporting a plurality of sheets is plugged, wherein: There are thin plate retaining members which can be used to support the thin plate contained in the above-mentioned container body, The thin plate retainer has: Two base end support parts, which are fixed on the inner side of the cover body; Top tabs, a plurality of which are arranged along the peripheral edge of the above-mentioned thin plate and are directly connected to the thin plate; Two elastic supporting plate parts are respectively supported by the above-mentioned base-end supporting parts and can support the outer ends of the two ends of the above-mentioned top connecting pieces; Connecting the supporting plate part, connecting the above-mentioned top tabs to each other to support each top tab; and The support member prevents displacement along the inner surface of the cover connected to the support plate portion and allows movement in the vertical direction on the inner surface of the cover. 15. The lid body for a thin-plate holding container according to claim 14, wherein said supporting member includes supporting ribs capable of individually supporting said connecting support plate portions so as not to be displaced along the inner surface of said lid body. 16. The lid body for a thin-plate holding container according to claim 14, wherein said supporting member has a fitting protrusion for fitting into a fitting hole provided on said connecting supporting plate portion, so as to prevent said connecting supporting plate from The part is displaced along the inner surface of the above-mentioned cover body, and its variation in the vertical direction on the inner surface of the above-mentioned cover body is allowed. 17. The lid body for a thin-plate holding container according to claim 14, wherein the elastic force of the connecting support plate part for supporting the above-mentioned top tab is stronger than the elastic force of the elastic support plate part for supporting the above-mentioned top tab. strong. 18. A cover body for a sheet-supporting container, which is a cover body for a sheet-supporting container in which a container body of a sheet-supporting container accommodating and transporting a plurality of sheets is plugged, wherein: A thin plate pressing member capable of supporting the thin plate accommodated in the above-mentioned container body is provided, the thin plate pressing member has a top tab directly connected to the above thin plate to support the thin plate, The top tab has a V-shaped groove fitted on the edge of the thin plate, and the inclination angle of the V-shaped groove is set at 20°-60°. 19. The lid body for a thin plate holding container according to claim 18, wherein the V-shaped groove has a gap between the edge portion of the thin plate and the bottom of the V-shaped groove in a state where the edge portion of the thin plate is fitted. . 20. A cover for a sheet-supporting container, which is a cover for a sheet-supporting container in which a container body of a sheet-supporting container containing a plurality of sheets for transportation is plugged, wherein: There is a thin plate pressing member which can be used to support the thin plate contained in the above-mentioned container body, the thin plate pressing member has a top tab directly connected to the above thin plate to support the thin plate, and the top tab has There is a V-shaped groove having the same inclination angle as the edge angle of the edge portion of the above-mentioned thin plate, and there is a gap between the edge portion of the thin plate and the bottom of the V-shaped groove in a state of fitting with the edge portion of the above-mentioned thin plate. . 21. The lid body for a thin-plate holding container according to claim 20, wherein the inclination angle of the V-shaped groove of the top piece is set to 44°. 22. A cover for a sheet-supporting container, which is a cover for a sheet-supporting container in which a container body of a sheet-supporting container containing a plurality of sheets for transportation is plugged, wherein: There is a thin plate pressing member that can be used to support the thin plate accommodated in the above-mentioned container body, and when the thin plate pressing member abuts against the above-mentioned thin plate to support the thin plate, its reaction force causes outward deformation In the central portion, this deformation is canceled out by forming a depression toward the container body side in advance. 23. A cover for a sheet-supporting container, which is a cover for a sheet-supporting container in which a container body of a sheet-supporting container containing a plurality of sheets for transportation is plugged, wherein: There is a thin plate pressing member that can be used to support the thin plate accommodated in the above-mentioned container body, and when the thin plate pressing member abuts against the above-mentioned thin plate to support the thin plate, its reaction force causes outward deformation The surrounding reinforcing flange counteracts this deformation by preliminarily forming a bend toward the container body side. 24. A cover body for a sheet-supporting container, which is a cover body for a sheet-supporting container in which a container body of a sheet-supporting container accommodating and transporting a plurality of sheets is plugged, wherein the cover body for a sheet-supporting container is characterized by: Insert molding is performed by adding reinforcement components.

Images