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CN1696710A - Detection device - Google Patents

Detection device Download PDF

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Publication number
CN1696710A
CN1696710A CN 200410027265 CN200410027265A CN1696710A CN 1696710 A CN1696710 A CN 1696710A CN 200410027265 CN200410027265 CN 200410027265 CN 200410027265 A CN200410027265 A CN 200410027265A CN 1696710 A CN1696710 A CN 1696710A
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China
Prior art keywords
probe
probe base
pick
unit
workplace
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Pending
Application number
CN 200410027265
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Chinese (zh)
Inventor
黄茂源
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hongfujin Precision Industry Shenzhen Co Ltd
Innolux Corp
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Hongfujin Precision Industry Shenzhen Co Ltd
Innolux Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Hongfujin Precision Industry Shenzhen Co Ltd, Innolux Corp filed Critical Hongfujin Precision Industry Shenzhen Co Ltd
Priority to CN 200410027265 priority Critical patent/CN1696710A/en
Publication of CN1696710A publication Critical patent/CN1696710A/en
Pending legal-status Critical Current

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Abstract

A detection device is prepared as setting operation table for placing tested object on probe platform, setting probe seat on operation table and erecting probe on the seat, installing electronic video camera on the probe and connecting monitor to the electronic video camera.

Description

检测装置Detection device

【技术领域】【Technical field】

本发明是关于一种检测装置,特别是一种采用探针对电路进行检测的检测装置。The invention relates to a detection device, in particular to a detection device which uses a probe to detect a circuit.

【背景技术】【Background technique】

平面显示器的制造过程中,必须先经过检测,确定其上的电路无断路或其它不正常的情形后,才能进行下一步的组装和销售。During the manufacturing process of the flat-panel display, it must first be tested to ensure that there is no open circuit or other abnormal conditions in the circuit on it before the next step of assembly and sales can be carried out.

一种现有技术的检测装置如图1所示,该检测装置1包括一探针平台11、两探针座12与17、一支架14、一固持臂15和一光学显微镜16。A detection device in the prior art is shown in FIG. 1 . The detection device 1 includes a probe platform 11 , two probe holders 12 and 17 , a support 14 , a holding arm 15 and an optical microscope 16 .

该探针平台11包括一工作面111和两相对的侧面112。该工作面111是水平面,其用于放置待检测的工件,如平面显示器,该工作面111定义一垂直于该工作面111的Z轴、一与该Z轴垂直的X轴和一与该Z轴及X轴均垂直的Y轴。该两侧面112与该工作面111垂直,其分别设置一与Y轴平行的滑槽113。The probe platform 11 includes a working surface 111 and two opposite sides 112 . The work surface 111 is a horizontal plane, which is used to place the workpiece to be detected, such as a flat panel display. The work surface 111 defines a Z axis perpendicular to the work surface 111, an X axis perpendicular to the Z axis, and an X axis perpendicular to the Z axis. The Y-axis and the X-axis are both perpendicular to the Y-axis. The two side surfaces 112 are perpendicular to the working surface 111 , and are respectively provided with a slide groove 113 parallel to the Y-axis.

该探针座12设置在该工作面111的边缘部位,其包括一用于触探电路的探针13。该探针座17同探针座12相同,其也设置在该工作面111的边缘部位,并包括一用于触探电路的探针18。该探针座12和17均可在工作面111上移动,以触探不同位置的电路。The probe base 12 is disposed on the edge of the working surface 111 and includes a probe 13 for probing a circuit. The probe base 17 is the same as the probe base 12, it is also arranged on the edge of the working surface 111, and includes a probe 18 for probing the circuit. Both the probe bases 12 and 17 can move on the working surface 111 to probe circuits at different positions.

该支架14包括两竖立杆141和连接该两竖立杆141的水平杆142,该两竖立杆141的下端与该滑槽113以可滑动的方式配合,从而使该支架14可以沿Y轴方向自由往返移动。该固持臂15用于固持该光学显微镜16,其设置在该水平杆142上,并可沿该水平杆142往返移动,以带动该光学显微镜16沿X轴方向自由往返移动。The bracket 14 includes two vertical rods 141 and a horizontal rod 142 connecting the two vertical rods 141. The lower ends of the two vertical rods 141 are slidably engaged with the slide groove 113, so that the bracket 14 can move freely along the Y-axis direction. Move back and forth. The holding arm 15 is used to hold the optical microscope 16 , is disposed on the horizontal bar 142 , and can move back and forth along the horizontal bar 142 to drive the optical microscope 16 to freely move back and forth along the X-axis direction.

实际操作中,该探针13和18可以单独作用或配合作用,对电路的通、断进行触探,该光学显微镜16则做为观察工具,供操作者观察探针13和18的触探位置是否正确。In actual operation, the probes 13 and 18 can work alone or in cooperation to detect the on and off of the circuit, and the optical microscope 16 is used as an observation tool for the operator to observe the probe positions of the probes 13 and 18 is it right or not.

但是,上述检测装置1存在如下缺点:But there is following shortcoming in above-mentioned detection device 1:

首先,因为该探针平台11上仅能装设一个光学显微镜16,其无法同时观察各个探针13和18对电路的触探状况;First of all, because only one optical microscope 16 can be installed on the probe platform 11, it cannot observe the contacting conditions of each probe 13 and 18 pairs of circuits at the same time;

其次,当该探针平台11尺寸较大时,操作者在观看光学显微镜16时,要同时操作探针平台11上的探针13和18,甚为不便;Secondly, when the size of the probe platform 11 is large, it is very inconvenient for the operator to simultaneously operate the probes 13 and 18 on the probe platform 11 when watching the optical microscope 16;

再者,因为光学显微镜的成本过高,造成整个检测装置1的造价也较高。Furthermore, because the cost of the optical microscope is too high, the cost of the entire detection device 1 is also relatively high.

【发明内容】【Content of invention】

为克服现有技术的检测装置操作不便而且成本较高的问题,本发明提供一种操作方便而且成本低的检测装置。In order to overcome the problems of inconvenient operation and high cost of the detection device in the prior art, the present invention provides a detection device with convenient operation and low cost.

本发明的检测装置包括一探针平台、一探针座、一探针、一电子摄影机和一监视器,该探针平台具有一用于放置待测物的工作面,该探针座设置在该工作面上,该探针安装在该探针座上,该电子摄影机安装在该探针座上,该监视器与该电子摄影机相连。The detection device of the present invention includes a probe platform, a probe base, a probe, an electronic camera and a monitor, the probe platform has a working surface for placing the object to be tested, and the probe base is arranged on On the working surface, the probe is installed on the probe base, the electronic camera is installed on the probe base, and the monitor is connected with the electronic camera.

相较于现有技术,由于本发明的检测装置采用一电子摄影机对探针与探针触探到电路的影像进行摄影,所摄得的影像再显示在监视器上,操作者直接观察监视器上的影像即可,方便操作;而且,因为电子摄影机较光学显微镜便宜许多,可大幅降低本发明检测装置的造价。Compared with the prior art, since the detection device of the present invention uses an electronic camera to photograph the probe and the image of the probe touching the circuit, the captured image is then displayed on the monitor, and the operator directly observes the monitor It is easy to operate; moreover, because the electronic camera is much cheaper than the optical microscope, the cost of the detection device of the present invention can be greatly reduced.

【附图说明】【Description of drawings】

图1是现有技术检测装置的立体示意图。Fig. 1 is a schematic perspective view of a detection device in the prior art.

图2是本发明检测装置的立体示意图。Fig. 2 is a schematic perspective view of the detection device of the present invention.

图3是本发明检测装置的探针座与电子摄影机的平面示意图。Fig. 3 is a schematic plan view of the probe base and the electronic camera of the detection device of the present invention.

【具体实施方式】【Detailed ways】

如图2所示,是本发明检测装置的立体示意图。该检测装置2包括一探针平台21、两探针座22与32、两探针23与33、两电子摄影机27与28。As shown in FIG. 2 , it is a schematic perspective view of the detection device of the present invention. The detection device 2 includes a probe platform 21 , two probe bases 22 and 32 , two probes 23 and 33 , and two electronic cameras 27 and 28 .

该探针平台21包括一工作面211和两相对的侧面212。该工作面211是水平面,其用于放置待检测的工件(图未示),该工作面211定义一垂直于该工作面211的Z轴、一与该Z轴垂直的X轴和一与该Z轴及X轴均垂直的Y轴。该两侧面212与该工作面211垂直,其分别设置一与Y轴平行的滑槽213。The probe platform 21 includes a working surface 211 and two opposite sides 212 . The work surface 211 is a horizontal plane, which is used to place workpieces to be detected (not shown), the work surface 211 defines a Z-axis perpendicular to the work surface 211, an X-axis perpendicular to the Z-axis and an X-axis perpendicular to the Z-axis Both the Z axis and the X axis are vertical to the Y axis. The two side surfaces 212 are perpendicular to the working surface 211 , and are respectively provided with a slide groove 213 parallel to the Y-axis.

该探针座22设置在该工作面211的边缘部位,该探针23安装在该探针座22上并用于触探待检测工件的电路。该探针座32同探针座22相同,其也设置在该工作面211的边缘部位,并安装有用于触探电路的探针33。该探针座22和32均可在工作面211上移动,以触探不同位置的电路。该电子摄影机27安装在该探针座22上并用于取得探针23与探针23所触探到电路的影像。该电子摄影机28安装在该探针座32上并用于取得探针33与探针33所触探到电路的影像。The probe base 22 is arranged on the edge of the working surface 211 , and the probe 23 is mounted on the probe base 22 and used for probing the circuit of the workpiece to be detected. The probe base 32 is the same as the probe base 22 , it is also arranged on the edge of the working surface 211 , and is equipped with a probe 33 for probing the circuit. Both the probe bases 22 and 32 can move on the working surface 211 to probe circuits at different positions. The electronic camera 27 is installed on the probe base 22 and is used to obtain images of the probe 23 and the circuit touched by the probe 23 . The electronic camera 28 is installed on the probe base 32 and is used to obtain images of the probe 33 and the circuit touched by the probe 33 .

该检测装置2还包括一支架24和一通过固持臂25安装在该支架24上的电子摄影机26。该支架24包括两竖立杆241和连接该两竖立杆241的水平杆242,该两竖立杆241的下端与该滑槽213以可滑动的方式配合,从而使该支架24安装在该探针平台21上并可以沿Y轴方向自由往返移动。该固持臂25用于固持该电子摄影机26,其设置在该水平杆242上,并可沿该水平杆242往返移动,以带动该电子摄影机26沿X轴方向自由往返移动。The detection device 2 also includes a bracket 24 and an electronic camera 26 mounted on the bracket 24 through a holding arm 25 . The bracket 24 includes two vertical rods 241 and a horizontal rod 242 connecting the two vertical rods 241. The lower ends of the two vertical rods 241 are slidably matched with the chute 213, so that the bracket 24 is installed on the probe platform. 21 and can freely move back and forth along the Y-axis direction. The holding arm 25 is used to hold the electronic camera 26 , is disposed on the horizontal bar 242 , and can move back and forth along the horizontal bar 242 to drive the electronic camera 26 to freely move back and forth along the X-axis direction.

本实施方式中,该电子摄影机26、27和28均为电荷耦合器件(Charge Couple Device,CCD)。In this embodiment, the electronic cameras 26, 27 and 28 are all charge coupled devices (Charge Couple Device, CCD).

一起参照图3,是本发明检测装置2的探针座22与电子摄影机27的平面示意图。该探针座22包括一吸盘226、一X轴方向调节旋钮221、一Y轴方向调节旋钮222、一Z轴方向调节旋钮223和一角度调节旋钮224。该吸盘226通过真空吸附作用,可任意吸附在该工作面211上,该X轴方向调节旋钮221用于调节探针23在X轴方向的位移,该Y轴方向调节旋钮222用于调节探针23在Y轴方向的位移,该Z轴方向调节旋钮223用于调节探针23在Z轴方向的位移,该角度调节旋钮224与一弹簧225配合作用,以调节探针23相对于该探针平台21的工作面211的角度。该电子摄影机27通过导光光纤272连接一光源(图未示),该导光光纤272用于传送光源所发出的光线到该电子摄影机27的内部镜头,一信号线271将该电子摄影机27的信号传输至一信号处理装置(图未示),该信号处理装置将处理后的信号输出到一监视器(图未示),该监视器用于显示该电子摄影机27所取得的影像。Referring to FIG. 3 together, it is a schematic plan view of the probe base 22 and the electronic camera 27 of the detection device 2 of the present invention. The probe base 22 includes a suction cup 226 , an X-axis adjustment knob 221 , a Y-axis adjustment knob 222 , a Z-axis adjustment knob 223 and an angle adjustment knob 224 . The sucker 226 can be arbitrarily adsorbed on the working surface 211 through vacuum adsorption, the X-axis direction adjustment knob 221 is used to adjust the displacement of the probe 23 in the X-axis direction, and the Y-axis direction adjustment knob 222 is used to adjust the displacement of the probe 23. 23 in the Y-axis direction, the Z-axis direction adjustment knob 223 is used to adjust the displacement of the probe 23 in the Z-axis direction, and the angle adjustment knob 224 cooperates with a spring 225 to adjust the probe 23 relative to the probe The angle of the working surface 211 of the platform 21 . The electronic camera 27 is connected to a light source (not shown) through a light guide fiber 272, the light guide fiber 272 is used to transmit the light emitted by the light source to the internal lens of the electronic camera 27, and a signal line 271 connects the electronic camera 27 The signal is transmitted to a signal processing device (not shown in the figure), and the signal processing device outputs the processed signal to a monitor (not shown in the figure), and the monitor is used to display the image obtained by the electronic camera 27 .

该探针座32的结构同探针座22相同,电子摄影机26和28的结构与电子摄影机27相同,此处不再详述。当然,该电子摄影机26和28的影像可以显示在上述的同一个监视器上。The structure of the probe base 32 is the same as that of the probe base 22, and the structures of the electronic cameras 26 and 28 are the same as those of the electronic camera 27, which will not be described in detail here. Of course, the images of the electronic cameras 26 and 28 could be displayed on the same monitor as described above.

实际操作中,利用探针座22的吸盘226将探针座22固定在大致位置,随后,通过电子摄影机26观察探针座22上探针23与电路的对位状况,再通过调节旋钮221、222或223将探针23微调至准确位置,即可进行电路的检测,该探针座22上的电子摄影机27实时将影像传输至监视器上,以便操作者观察。该探针座32的操作方式同探针座22的操作,该两探针23和33可以单独作用或配合作用,对电路的通、断进行触探。In actual operation, use the suction cup 226 of the probe base 22 to fix the probe base 22 at an approximate position, then observe the alignment status of the probe 23 and the circuit on the probe base 22 through the electronic camera 26, and then adjust the knob 221, 222 or 223 finely adjust the probe 23 to an accurate position, and then the circuit inspection can be carried out, and the electronic camera 27 on the probe base 22 transmits the image to the monitor in real time, so that the operator can observe. The operation mode of the probe base 32 is the same as that of the probe base 22, and the two probes 23 and 33 can act independently or in cooperation to detect whether the circuit is on or off.

相较于现有技术,因为本发明的检测装置2采用电子摄影机27、28对探针与探针触探到电路的影像进行摄影,所摄得的影像再显示在监视器上,操作者直接观察监视器上的影像即可,方便操作;而且,因为电子摄影机27、28较光学显微镜便宜许多,可大幅降低本发明检测装置2的造价。另外,因为电子摄影机重量较轻,故探针平台21上的支架24的设计可简单化;又因为本发明的检测装置2采用多个电子摄影机,其取得的影像可以同时显示在一个监视器上,便于操作者同时观察多个目标。Compared with the prior art, because the detection device 2 of the present invention uses electronic cameras 27 and 28 to take pictures of the probes and the images of the probes touching the circuit, the captured images are then displayed on the monitor, allowing the operator to directly Just observe the images on the monitor, which is convenient to operate; and, because the electronic cameras 27, 28 are much cheaper than optical microscopes, the cost of the detection device 2 of the present invention can be greatly reduced. In addition, because the weight of the electronic camera is relatively light, the design of the support 24 on the probe platform 21 can be simplified; and because the detection device 2 of the present invention uses a plurality of electronic cameras, the images obtained can be simultaneously displayed on a monitor , which is convenient for the operator to observe multiple targets at the same time.

上述探针座22的吸盘226也可采用磁铁片,利用该磁铁片与探针平台21的磁性吸引力,可将探针座22任意吸附在该工作面211上。The suction cup 226 of the probe base 22 can also be a magnet sheet, and the probe base 22 can be arbitrarily adsorbed on the working surface 211 by utilizing the magnetic attraction between the magnet sheet and the probe platform 21 .

Claims (9)

1. pick-up unit, it comprises a probe platform, a probe base and a probe, this probe platform has a workplace that is used to place determinand, this probe base is arranged on this workplace, this probe is installed on this probe base, it is characterized in that: this pick-up unit further comprises one first electronic still camera and a monitor, and this first electronic still camera is installed on this probe base, and this monitor links to each other with this first electronic still camera.
2. pick-up unit as claimed in claim 1 is characterized in that: comprise that further a support and is installed in second electronic still camera on this support, this support is installed on this probe platform and can comes and goes along a first direction that is parallel to this workplace and moves.
3. pick-up unit as claimed in claim 2 is characterized in that: this second electronic still camera can be parallel to this workplace and round mobile perpendicular to the second direction of this first direction along one.
4. pick-up unit as claimed in claim 1 is characterized in that: this probe base comprises a sucker, and this sucker is adsorbed on this workplace.
5. pick-up unit as claimed in claim 1 is characterized in that: this probe base comprises a flat thin magnet, and this flat thin magnet is adsorbed on this workplace.
6. pick-up unit as claimed in claim 1 is characterized in that: this probe base comprises a first direction adjusting knob, and this first direction is parallel to this workplace.
7. pick-up unit as claimed in claim 6 is characterized in that: this probe base comprises a second direction adjusting knob, and this second direction is parallel to this workplace and perpendicular to this first direction.
8. pick-up unit as claimed in claim 1 is characterized in that: this probe base comprises a third direction adjusting knob, and this third direction is perpendicular to this workplace.
9. pick-up unit as claimed in claim 1 is characterized in that: this probe base comprises an angular adjustment knob.
CN 200410027265 2004-05-15 2004-05-15 Detection device Pending CN1696710A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200410027265 CN1696710A (en) 2004-05-15 2004-05-15 Detection device

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Application Number Priority Date Filing Date Title
CN 200410027265 CN1696710A (en) 2004-05-15 2004-05-15 Detection device

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Publication Number Publication Date
CN1696710A true CN1696710A (en) 2005-11-16

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101598764B (en) * 2008-06-06 2012-01-25 财团法人工业技术研究院 Solar battery testing machine
CN102623365A (en) * 2011-01-27 2012-08-01 惠特科技股份有限公司 A spot measurement method and device thereof
CN104969080A (en) * 2012-11-21 2015-10-07 康拉德有限责任公司 Method and device for testing workpieces
CN105929208A (en) * 2016-06-20 2016-09-07 东莞市联洲知识产权运营管理有限公司 Test probe card used for detecting integrated circuit
CN110073227A (en) * 2016-12-20 2019-07-30 夸利陶公司 There are five the general probe assemblies of freedom degree for tool
CN114578208A (en) * 2022-02-21 2022-06-03 嘉兴浮昇科技有限公司 Test tool for testing conduction of semiconductor chip
TWI871921B (en) * 2022-06-01 2025-02-01 南亞科技股份有限公司 Probe station

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101598764B (en) * 2008-06-06 2012-01-25 财团法人工业技术研究院 Solar battery testing machine
CN102623365A (en) * 2011-01-27 2012-08-01 惠特科技股份有限公司 A spot measurement method and device thereof
CN104969080A (en) * 2012-11-21 2015-10-07 康拉德有限责任公司 Method and device for testing workpieces
CN110031658A (en) * 2012-11-21 2019-07-19 康拉德有限责任公司 Method and device for test piece
CN110031658B (en) * 2012-11-21 2021-11-30 康拉德有限责任公司 Method and device for testing workpieces
CN105929208A (en) * 2016-06-20 2016-09-07 东莞市联洲知识产权运营管理有限公司 Test probe card used for detecting integrated circuit
CN110073227A (en) * 2016-12-20 2019-07-30 夸利陶公司 There are five the general probe assemblies of freedom degree for tool
CN110073227B (en) * 2016-12-20 2022-07-29 夸利陶公司 Universal probe assembly with five degrees of freedom
CN114578208A (en) * 2022-02-21 2022-06-03 嘉兴浮昇科技有限公司 Test tool for testing conduction of semiconductor chip
TWI871921B (en) * 2022-06-01 2025-02-01 南亞科技股份有限公司 Probe station

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