CN1695946A - Droplet ejection device, electro-optical device, manufacturing method thereof, and electronic device - Google Patents

Abstract

A plurality of functional liquid droplet ejection heads (71R), (71G), and (71B) of different colors are arranged so as to: a control mechanism (27) for repeating main scanning for driving the functional liquid droplet ejection heads (71) in synchronization with the movement of the substrate (W) in the X-axis direction, wherein a plurality of partial drawing lines (lp), (LpR), (LPG), (LpB) for each color formed by the respective plurality of ejection heads (95) are formed continuously in the Y-axis direction to form one drawing line (L); and a sub-scanning process for moving each functional liquid droplet ejection head (71) in the Y-axis direction by a part of the drawing line (Lp) by the carriage member (23) to perform the drawing process.

Description

Droplet ejection device, electro-optical device, manufacturing method thereof, and electronic device

technical field

The present invention relates to a droplet ejection device and a method for manufacturing an electro-optical device for drawing functional liquid droplets while relatively moving a plurality of color-specific functional droplet ejection heads that respectively introduce multi-color functional liquids with respect to a substrate, Electro-optical devices and electronic instruments.

Background technique

Conventionally, as a droplet ejection device made of color filters, it is known to introduce R (red), G (green), and B (blue) three-color ink (functional liquid) color-specific inkjet head (functional liquid droplet ejection head), a liquid droplet ejection device that ejects and ejects ink droplets to a black matrix according to the three-color color matching mode to perform drawing. In addition, in such a droplet ejection device, the amount of positional deviation of the XY stage (X-axis stage and Y-axis stage) relative to the moving substrate of the inkjet head for the black matrix that should eject ink with high precision is measured, And correct its position deviation (Japanese Patent Laid-Open No. 11-258416).

However, even if the positional deviation correction of the XY stage as described above is performed in the drawing operation of the liquid droplet ejection device, it is difficult to correctly eject ink to the black matrix due to uneven moving speed of the XY stage, flight bending of ink droplets, etc. difficult. In particular, when the three-color inks of R, G, and B are ejected at the same time (in the same main scan), they exist between adjacent pixel areas. Since the inks cannot be ejected correctly, the inks of different colors overlap each other on the substrate. Mixing, instead becomes a matter of mixing colors. Therefore, the quality of manufactured color filters suffers.

Contents of the invention

The object of the present invention is to provide a method for simultaneously ejecting and spraying multi-colored functional liquid droplets on a substrate, even if the functional liquid droplets are not correctly sprayed on each pixel area, it is possible to prevent the color mixing of functional liquid droplets of different colors. A liquid droplet ejection device, a manufacturing method of an electro-optical device, an electro-optical device, and an electronic instrument.

The droplet ejection device of the present invention is a kind of substrate that constitutes a plurality of pixel regions, while relatively moving a plurality of color-specific droplet ejection heads that respectively introduce functional liquids of various colors, and according to a multi-color color matching mode, multiple A droplet ejection device for ejecting and ejecting functional droplets in each pixel area for drawing processing is characterized in that it has: a plurality of carriage units (carrige units) for loading multi-functional liquid ejection heads with different colors; The X-axis table that moves the substrate in the X-axis direction that becomes the main scanning direction; the Y-axis table that moves multiple frame components in the Y-axis direction; controls the various functional droplet ejection heads, X-axis The control mechanism of the workbench and the Y-axis workbench; wherein, the color-specific multiple functional droplet nozzles of each frame component are configured so that the partial drawing lines of multiple color-differential multiple nozzles formed by multiple nozzles follow the prescribed Sequentially line up in the Y-axis direction to form a divided drawing line; the control mechanism is repeated, synchronous with the movement of the substrate in the X-axis direction to drive the main scan of each functional droplet nozzle, and through the frame components to move each functional droplet nozzle to the Y direction. The sub-scan is shifted in the axial direction by approximately part of the drawing line to perform the drawing process.

Also, in this case, the color matching pattern is preferably any one of a band arrangement, a mosaic arrangement and a triangle arrangement.

According to this configuration, the partial drawing lines with multiple colors are in the specified order (for example, the order of R·G·B three colors), continuous in the Y-axis direction, and there is no overlap in the X-axis direction, so in the adjacent Functional droplets of different colors cannot be ejected or ejected in the same main scan between the pixel areas in the X-axis direction. Therefore, even if functional droplets of different colors are sprayed on the bank portion between the pixel regions adjacent to the X-axis direction, the two functional droplets are sprayed and sprayed separately in different main scans. Yes, so when the functional droplets are sprayed in the second main scan, the functional droplets that have been sprayed by the first main scan become dry to some extent, and the two functional droplets will not mix with each other. Therefore, it is possible to reliably prevent color mixing of functional droplets of different colors between pixel regions adjacent to the X-axis direction. Furthermore, since functional liquid droplets of a plurality of colors are simultaneously ejected and ejected, drawing can be efficiently performed by a single liquid droplet ejection device. Furthermore, if the functional liquid of the same color is introduced into a plurality of droplet ejection heads configured in this way, in the sub-scanning, the drawing line amount is shifted not part of the drawing line amount, and drawing can be efficiently performed.

In addition, in the case of manufacturing color filters, multi-color functional liquids are commonly used as R·G·B tricolor functional liquids, but it is also possible to use R·G·B tricolor functional liquids that should improve color reproducibility. Four-color functional fluids of C (cyan) or E (emerald green), of course, other combinations and functional fluids of other colors can also be used. In addition, the so-called pixel area is the area where functional liquid droplets of multiple colors (for example, three colors of R, G, and B) are sprayed. The pixel area where the droplet is sprayed, the pixel area where the G functional liquid droplet is sprayed, and the pixel area where the B functional liquid droplet is sprayed constitute a so-called pixel.

In this case, each frame component is loaded with functional droplet ejection heads of each color on the frame, and the color-specific multiple functional droplet ejection heads of each frame component are preferably arranged so that the nozzles formed by a plurality of nozzles respectively A plurality of partial drawing lines of different colors are repeated in a row in the Y-axis direction in a prescribed order to form a dividing drawing line.

According to such a configuration, a plurality of partial drawing lines of each color are repeated in a predetermined order in the Y-axis direction to form a divided drawing line (for example, R·G·B·R·G·B·R·G·B) . Therefore, the length of each partial plot line is shorter than when one partial plot line of each color is repeated in a predetermined order in the Y-axis direction to form a divided plot line (for example, R·G·B). Accordingly, the moving distance of each functional droplet discharge head in the sub-scan is shortened, and the sub-scan can be performed in a short time.

In this case, the control mechanism is such that when the functional droplets ejected from the two pixel regions adjacent to the Y-axis direction are of different colors, it is preferable to use different main scans to perform the functional liquid droplet ejection of the two pixel regions. squirt.

According to such a configuration, in the two pixel regions adjacent to the Y-axis direction, functional droplets of mutually different colors are not ejected or ejected during the same main scan. Therefore, not only between pixel regions adjacent to the X-axis direction, but also between pixel regions adjacent to the Y-axis direction, color mixing of functional droplets of different colors can be reliably prevented.

In these cases, the drive source of the Y-axis table is preferably constituted by a linear motor.

According to such a structure, each movement of a plurality of frame members can be performed with a simple structure and with high precision.

In these cases, it is preferable to mount a plurality of color-specific functional liquid tanks for supplying multi-color functional liquids to respective color-specific multiple functional liquid droplet ejection heads on each frame member.

According to such a configuration, not only the distance between the functional liquid tank and the functional liquid droplet discharge head can be shortened, but also the handling of the functional liquid supply pipe between the functional liquid tank and the functional liquid droplet discharge head can be simplified. Therefore, ejection of functional liquid droplets from the functional liquid droplet discharge head can be stabilized.

In addition, it is preferable to install a pressure regulating valve between the functional liquid tank and the functional liquid drop discharge head. With such a method, the hydraulic head between the functional liquid tank and the functional liquid droplet discharge head does not fluctuate excessively, so that the discharge of functional liquid droplets from the functional liquid droplet discharge head can be performed more stably.

In these cases, it is further provided that a flushing unit is disposed on the X-axis table and receives flushing from each nozzle of the functional liquid droplet ejection head during main scanning. The flushing part is preferably formed correspondingly in the direction of the Y-axis, by sub-scanning, the spraying coverage area covered by all the functional liquid droplet spraying heads of the plurality of frame parts.

According to such a structure, even if the flushing unit is moved in the Y-axis direction within the ejection coverage area of the head during the sub-scanning of the carriage member, it can be washed by the full-function droplet ejection head mounted on a plurality of carriage members. functional droplets. Therefore, not only do the functional droplets not splash around, but also the discharge function of the overall functional droplet ejection head can be well maintained. Here, when sub-scanning is performed n times in the drawing process, the discharge coverage of the head is a range in which the drawing line becomes n times the size of the partial drawing line in the Y-axis direction. In addition, the flushing member is preferably also formed in the X-axis direction corresponding to the length of the plurality of frame members in the X-axis direction.

In this case, as described above, if the color-specific multiple functional droplet ejection heads of each frame member are arranged so that the partial drawing lines of multiple colors are repeated in the Y-axis direction in a prescribed order to form a divisional drawing line , the drawing lines of each part become shorter, so the spray coverage of the nozzle becomes shorter. Therefore, the length of the rinsing member in the Y-axis direction can be shortened. That is, it contributes to space saving.

In this case, the maintenance area is formed at a position deviated from the outer side of the X-axis table on the moving track of the frame components of the Y-axis table;

In the maintenance area, there is also a maintenance mechanism that restores the functions of multiple nozzles of each functional droplet nozzle;

It is preferable for the control means to bring any functional liquid droplet ejection head that is not driven during the main scan close to the maintenance means until the next main scan to perform function recovery processing.

According to such a configuration, even if the functional fluid of the nozzles of the non-driven functional droplet discharge heads is dried during the main scanning period, the nozzles can be prevented from being clogged by subjecting the functional liquid droplet discharge heads to the function restoration process.

In addition, the so-called arbitrary one main scan refers to: for example, for the pixel area located at the end position of the substrate in the Y-axis direction, not from the functional droplet ejection head mounted on the outermost end in the Y-axis direction but from the functional droplet ejection head mounted on the inner side. Functional droplet ejection heads of other colors perform the main scan of ejection and landing. In this case, the functional droplet discharge heads of other colors that are ejected to the pixel area located at the end of the Y-axis direction of the substrate also deviate from the functional droplet discharge heads on the outside of the Y-axis direction, which means that the substrate is closer to the substrate than the Y-axis direction. outside, so its main scan is not ejection drive. Therefore, according to this configuration, the functional recovery process may be performed on the functional droplet discharge head until the next main scan.

In addition, in this case, a pair of maintenance areas are formed at positions deviated from the two outer sides of the X-axis table on the moving track of the frame member of the Y-axis table, and each maintenance area preferably further includes, A maintenance mechanism for performing function recovery processing on multiple nozzles of each functional droplet ejection head.

According to such a configuration, maintenance can be performed by dividing a plurality of frame components into two groups, and the function restoration process of the functional droplet ejection head can be quickly performed. In addition, in the case of replacing the functional droplet ejection head, the frame part on which the functional droplet ejection head needs to be replaced is brought close to one maintenance mechanism, and the other frame parts are brought close to the other maintenance mechanism while the head is being replaced. , the function recovery process can be performed without stopping the operation of the device.

Also, in this case, it is preferable that the control means bring any functional droplet ejection head that is not driven during the main scan close to the maintenance means to perform function recovery processing until the next main scan.

The method of manufacturing an electro-optical device according to the present invention is characterized in that a film-forming portion made of functional droplets is formed on a substrate by using the above-mentioned droplet ejection device.

In addition, the electro-optical device of the present invention is characterized in that a film-forming portion made of functional droplets is formed on a substrate by using the above-mentioned droplet ejection device.

According to these configurations, it is possible to manufacture a highly reliable electro-optical device by using a droplet ejection device capable of drawing without color mixing of functional droplets of different colors. In addition, as an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emitting device, and the like can be considered. In addition, the electron emitting device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device.

The electronic device of the present invention is characterized by incorporating the above-mentioned electro-optical device.

In this case, the electronic equipment includes a mobile phone equipped with a so-called flat panel display, a personal computer, and various other electrical products.

Description of drawings

FIG. 1 is a plan view schematically showing a workpiece (substrate).

2A , 2B, and 2C are diagrams showing examples of color matching patterns of three colors of R, G, and B in color filters.

Fig. 3 is a plan view of the drawing system.

FIG. 4 is an external perspective view of the droplet ejection device.

Fig. 5 is a plan view of the droplet discharge device.

Fig. 6 is a front view of the droplet discharge device.

Fig. 7 is a side view of the droplet discharge device.

Fig. 8 is an explanatory view of a plurality of frame members, showing a view around a head plate of the frame member.

9A and 9B are explanatory views of the frame member, FIG. 9A is a perspective view showing the appearance of the frame member, and FIG. 9B is a view (bottom view) of the frame member viewed from below.

FIG. 10 is a diagram illustrating a sub-scan in which seven frame members move in the Y-axis direction with respect to a workpiece in drawing processing.

FIG. 11 is a perspective view of the appearance of a functional droplet discharge head.

12A and 12B are explanatory diagrams of the functional liquid supply mechanism, FIG. 12A is an explanatory diagram around the pressure regulating valve, and FIG. 12B is a sectional view of the pressure regulating valve.

Fig. 13 is an external perspective view of the maintenance mechanism.

FIG. 14 is a block diagram illustrating a control system of the droplet ejection device.

15A and 15B are diagrams illustrating the first main scan in the drawing process by the droplet ejection device.

16A and 16B are diagrams illustrating the second main scan following FIG. 14 .

17A and 17B are diagrams illustrating the third main scan following FIGS. 15A and 15B .

18A and 18B are diagrams illustrating drawing processing by the droplet ejection device when the color matching pattern of the three colors of R, G, and B of the color filters is a mosaic arrangement.

Fig. 19 is a bottom view of the frame member of the second embodiment.

20A, 20B, and 20C are diagrams illustrating drawing processing of the droplet ejection device according to the second embodiment.

Fig. 21 is a flow chart illustrating the color filter manufacturing process.

22A, 22B, 22C, 22D, and 22E are schematic cross-sectional views showing color filters shown in order of manufacturing steps.

Fig. 23 is a sectional view of main parts showing a schematic configuration of a liquid crystal device using a color filter of the present invention.

Fig. 24 is a sectional view of main parts showing a schematic configuration of a second example of a liquid crystal device to which a color filter of the present invention is applied.

Fig. 25 is a sectional view of main parts showing a schematic configuration of a third example of a liquid crystal device to which a color filter of the present invention is applied.

Fig. 26 is a sectional view of main parts of a display device as an organic EL device.

FIG. 27 is a flowchart illustrating a manufacturing process of a display device as an organic EL device.

Fig. 28 is a diagram illustrating a process of forming an inorganic bank layer.

Fig. 29 is a diagram illustrating the process of forming an organic matter bank layer.

Fig. 30 is a process diagram illustrating a process of forming a hole injection/transport layer.

Fig. 31 is a process diagram illustrating a state where a hole injection/transport layer has been formed.

Fig. 32 is a process diagram illustrating a process of forming a blue light emitting layer.

Fig. 33 is a process diagram illustrating a state in which a blue light-emitting layer has been formed.

Fig. 34 is a process diagram illustrating a state in which light-emitting layers of respective colors have been formed.

Fig. 35 is a process diagram illustrating the formation of a cathode.

Fig. 36 is an exploded perspective view of main parts of a display device as a plasma display device (PDP device).

Fig. 37 is a sectional view of main parts of a display device as an electron emitting device (FED device).

38A and 38B are plan views around the electron emitting portion of the display device and a plan view showing a method of forming it.

In the picture:

1-droplet ejection device, 21-workpiece moving mechanism, 22-nozzle moving mechanism, 23-frame parts, 25-maintenance mechanism, 26-flushing parts, 27-controller, 32-maintenance processing area, 62-Y Axial motor, 71-functional liquid drop nozzle, 95-nozzle, 103-functional liquid tank, 500-color filter, 507a-pixel area, 507b-regional wall, L-drawing line, Lp-partial drawing line , Rh-nozzle spray coverage, W-workpiece.

Detailed ways

Hereinafter, a droplet ejection device to which the present invention is applied will be described with reference to the drawings. The droplet ejection device of this embodiment is a drawing system assembled on an FPD manufacturing line such as a liquid crystal display device, and a functional liquid such as a special ink or a luminescent resin is introduced into a functional droplet ejection head, and the color filter The film-forming part of the R·G·B tricolor functional droplet is formed on the substrate such as. Here, first, a brief description will be given of a substrate (workpiece) that is a functional liquid droplet ejection object (drawing object) of the liquid droplet ejection device.

As shown in FIG. 1 , the workpiece W is a transparent substrate (glass substrate) with a length of 1500 mm x a width of 1800 mm, and at two places on the left and right of the edge, there are respectively formed a plate for identifying the position by the droplet ejection device 1 (see FIG. 4 ). A pair of workpiece positioning marks Wm, Wm are arranged in a matrix in a plurality of pixel areas 507a defined by the division wall 507b (coffering portion) in a range of 1360 mm in the longitudinal direction and 1630 mm in the lateral direction except for the edge thereof. . Each pixel region 507a is formed as a square concave portion in plan view surrounded by the partition wall portion 507b, and is formed by the function droplet ejection head 71 described later. R (red), G (green), B (blue) When the film-forming portion (colored layers 508R, 508G, 508B) is colored, it becomes the spraying area of functional droplets (see FIGS. 22A, 22B, 22C, 22D and 22E). In addition, as shown in FIG. 2A, the color matching pattern of the plurality of pixel regions 507a in this embodiment is a strip arrangement of the same color in the rows of the matrix, but it may also be three pixel regions 507a arranged in columns and rows of the matrix. It is a mosaic arrangement of R·G·B three colors (refer to Figure 2B). Alternatively, the pixel regions 507a may be arranged in a zigzag triangular shape (see FIG. 2C ).

Next, a brief description will be given of the drawing system provided with the droplet ejection device. Fig. 3 is a plan view of the drawing system. As shown in Figure 3, the drawing system S is composed of three sets of drawing parts Su. On the introduced workpiece W (refer to Figure 4), coloring layers 508R, 508G, and 508B of R, G, and B are formed to produce color Parts of the filter. Each drawing unit Su is designed to form a coloring layer for each color on the workpiece W (substrate) which is sequentially introduced in order to correspond to each color of R, G, and B. However, as will be described later, each droplet discharge device 1 provided can discharge (draw) three-color functional liquids (filter materials) of R, G, and B, so each drawing member Su can be placed on the workpiece W. A three-color colored layer is formed. That is, the color filter can be manufactured efficiently without moving the workpiece W between the drawing parts Su.

Each drawing part Su is equipped with: in order to form the droplet discharge device 1 of coloring layer 508R, 508G, 508B; Be arranged in parallel at droplet discharge device 1, carry in and carry out the workpiece conveying device 2 of workpiece W; , and control the overall host machine 3 of the drawing component Su. In addition, the droplet discharge device 1 is accommodated in the container device 4 . The container device 4 is a so-called heat-sensitive container, and houses the entire droplet ejection device 1 under temperature control so as to eject droplets to the workpiece W under a constant temperature condition. The container device 4 is equipped with: a box-shaped container body 11 that directly accommodates the entire liquid droplet ejection device 1; in order to keep the temperature in the container body 11 constant, an air conditioning device 12 for temperature management; a control panel (omitted) for controlling these icon). Although not shown in the figure, an opening and closing door serving as an opening for loading and unloading workpieces is formed on the front side of the right side of the container body 11. , can access the droplet ejection device 1 housed in the container main body 11 .

The workpiece conveying device 2 is equipped with a mechanical arm 13 for conveying the workpiece W. By this mechanical arm 13, the workpiece W before drawing is carried into the drawing part Su through the above-mentioned opening and closing door, and it is ejected to the liquid droplet. The device 1 is drawn in, and the workpiece W after drawing is collected from the droplet ejection device 1 and carried out to the outside of the drawing unit Su. In addition, the host machine 3 is constituted by a small computer, and is provided with a keyboard 17 and a display 18 in addition to the device host 16 (see FIG. 14 ).

In addition, reference numeral 5 shown in FIG. 14 is an installation space for a drying device. Depending on the situation, a drying device for vaporizing the functional liquid solvent of the functional liquid sprayed on the workpiece W can be installed in the drawing unit Su.

Next, the droplet ejection device 1 according to the present invention will be described. As shown in FIGS. 4 to 7 , the droplet ejection device 1 has a large-scale public platform 28 provided on the base and an installation workbench 41 provided on the public platform 28 for installing the workpiece W (refer to FIG. 4 ); and Equipped with: a workpiece moving mechanism 21 (X-axis table) that reciprocates the workpiece W in the X-axis direction (main scanning) through the installation table 41; a nozzle moving mechanism 22 (Y-axis working platform); load a plurality (12) of functional droplet ejection heads 71 (referring to FIG. 8 ) and a plurality of (7) frame parts 23 that are freely movable with respect to the nozzle moving mechanism 22; The functional liquid droplet ejection head 71 of the frame part 23 supplies the functional liquid supply mechanism 24 constituted by seven functional liquid supply parts 101 of the functional liquid respectively; Mechanism 21 deviates from the outer side (right side in FIG. 5 ) and maintains the maintenance mechanism 25 of the functional droplet ejection head 71; the flushing component that is installed on the installation workbench 41 and restores the function of the functional droplet ejection head 71 together with the maintenance mechanism 26.

In addition, although not shown, the droplet ejection device 1 is also equipped with a liquid supply and recovery mechanism for supplying liquid (functional liquid and cleaning liquid) to each mechanism and recovering unnecessary liquid, or a compressor for supplying drive and controlling each mechanism. An air supply mechanism for air; an air suction mechanism for adsorbing the workpiece W on the installation workbench 41; a workpiece recognition camera 36 for recognizing the position of the workpiece W; a nozzle recognition camera 37 for recognizing the position of the frame component 23; It is connected to the above-mentioned host machine 3 and the controller 27 (control unit 162 , see FIG. 14 ) that controls the entire droplet ejection device 1 in general.

In this droplet ejection device 1, the functional droplet ejection head 71 is driven synchronously with the drive of the workpiece moving mechanism 21, and the function of ejecting and spraying the three colors of R, G, and B on the pixel area 507a of the workpiece W The liquid droplets perform drawing processing on the workpiece W, and when the workpiece is replaced and other non-drawing processing, the nozzle moving mechanism 22 is driven to make the frame member 23 approach the maintenance mechanism 25, and the maintenance mechanism 25 performs maintenance of the functional droplet nozzle 71 deal with. In addition, as described above, the droplet ejection device 1 is accommodated in the container device 4 , and almost all processing including these drawing processing and maintenance processing is performed in the container device 4 .

And, the area where the moving track of the workpiece W by the workpiece moving mechanism 21 intersects with the moving track of the frame member 23 due to the nozzle moving mechanism 22 becomes the drawing area 31 for drawing processing. The area on the moving track of the frame member 23 that deviates from the outside of the workpiece moving mechanism 21 becomes the maintenance processing area 32 where the maintenance processing is performed by the maintenance mechanism 25 . In addition, the maintenance treatment area 32 also serves as an area for replacing the functional droplet ejection head 71 . On the other hand, one end portion (the lower side in FIG. 5 ) of the workpiece moving mechanism 21 is a loading and unloading area 33 for loading and unloading the workpiece W to and from the liquid droplet ejection device 1, and is provided close to the loading and unloading area 33. The above-mentioned workpiece conveying device 2 .

The workpiece moving mechanism 21 is located on the platform 30 extending in the X-axis direction placed on the common stand 28, and is equipped with: an adsorption workbench 42 for absorbing and mounting the workpiece W and a device for fine-tuning (θ correction) the workpiece W through the adsorption workbench 42 The installation table 41 with the workpiece θ table 43 at the θ position; the X-axis pneumatic slide block 44 that freely slides the installation table 41 in the X-axis direction; extends in the X-axis direction, and passes the installation table 41. A pair of left and right X-axis motors 45, 45 that move in the X-axis direction; and a pair of X-axis guide rails 46, 46 that guide the X-axis pneumatic slider 44 to move on the X-axis motor 45; for grasping the installation work X-axis-shaped scale at the position of stage 41 (illustration omitted). Then, if a pair of X-axis motors 45 and 45 are driven, the X-axis pneumatic slider 44 is moved in the X-axis direction with a pair of X-axis guide rails 46 and 46 as guides, and the workpiece installed on the mounting table 41 W moves in the direction of the X axis.

In addition, the suction table 42 is provided with an unprocessed workpiece W loaded in the workpiece loading and unloading area 33 on the mounting table 41 , and a supply mechanism 51 for recovering the processed workpiece W from the mounting table 41 . The workpiece removal and supply mechanism 51 has: a lifting mechanism 56 for placing and separating the workpiece W on the installation workbench 41; the unprocessed workpiece W placed on the adsorption workbench 42 is clamped by the lifting mechanism at its front and rear ends and left and right ends. A front positioning mechanism 57 for positioning (front positioning) the adsorption table 42; a static elimination mechanism (not shown) composed of an ionizer for removing static electricity charged by peeling off the back of the workpiece W.

In addition, the X-axis air slider 44 supports the flushing member 26 .

On the other hand, the nozzle moving mechanism 22 is supported by a pair of front and rear support frames 29, 29 extending in the Y-axis direction, and is erected between the drawing area 31 and the maintenance processing area 32, and moves the seven frame parts 23 respectively. The mechanism between the drawing area 31 and the maintenance processing area 32 . The nozzle moving mechanism 22 is equipped with: to arrange the bridge plates 75 (described later) of the seven frame parts in the Y-axis direction, and support these seven groups of Y-axis pneumatic sliders 61 at both ends; extend in the Y-axis direction , and a pair of Y-axis motors 62, 62 that move each bridge plate 75 in the Y-axis direction through each group of Y-axis pneumatic sliders 61; extend in the Y-axis direction and guide the bridge plates of the seven frame components 75 a pair of Y-axis guide rails 63, 63 that move; a Y-axis-shaped scale (illustration omitted) that detects the moving position of each vehicle frame component.

Then, when the pair of Y-axis motors 62 and 62 are driven, the seven sets of Y-axis air sliders 61 move independently, and the seven sets of frame members 23 can be individually moved in the Y-axis direction. According to these, individual movements of the seven sets of frame members 23 can be performed with a simple structure and high precision. Of course, by simultaneously moving the seven sets of Y-axis pneumatic sliders 61 in the Y-axis direction, the seven sets of frame members 23 can also be moved in the Y-axis direction as a whole.

In addition, supported on the bridge plate 75 of each group of Y-axis pneumatic sliders 61, there are equipped electrical components for driving the twelve functional droplet ejection heads 71 mounted on the corresponding frame members 23. 66 ; the above-mentioned functional liquid supply member 101 . The seven head electrical components 66 are arranged in a zigzag shape so as not to interfere with each other (interference prevention), and the seven functional liquid supply members 101 are arranged in a zigzag shape so as to face each head electrical component 66 . In addition, corresponding to the seven frame members 23 that can be moved independently, the hoses or cables that connect each frame member 23 are traced to the seven Y-axis cable carriers (cables) that are movably housed in each frame member 23. Bracket: registered trademark) is arranged in a zigzag shape corresponding to the seven electrical components 66 for the head, and is divided into two and provided (illustration omitted). However, if the electrical components 66 for each shower head are miniaturized, the seven electrical components 66 for the shower head may be arranged in a row close to the workpiece loading and unloading area 33 instead of being arranged in a zigzag manner. In this case, the seven functional liquid supply members 101 may also be arranged in a row near the other side of the workpiece loading and unloading area 33 to facilitate operations such as ink replacement.

As shown in FIG. 6 , the seven frame components 23 are respectively supported by seven sets of Y-axis pneumatic sliders 61 of the nozzle moving mechanism 22 and arranged in the Y-axis direction. Then, one drawing line L (see FIG. 10 ) is formed by all the nozzles 95 (nozzles, see FIG. 9B ) of all (12×7) functional droplet discharge heads 71 of the seven frame members 23 . Accordingly, by moving each of the frame members 23 to the maintenance processing area 32 , maintenance of each frame member 23 can be performed by the maintenance mechanism 25 , and the functional droplet ejection head 71 of each frame member 23 can be replaced. Therefore, without impairing the maintainability and replacement operability of the functional droplet ejection head 71, it is possible to configure a large-sized head unit that forms a wide drawing line (long line).

In addition, if one drawing line L can be formed, the arrangement of the seven frame members 23 can be set arbitrarily. Of course, the number of frame members 23 and the number of functional droplet discharge heads 71 mounted on each frame member 23 can also be set arbitrarily.

As shown in Fig. 7, Fig. 8, Fig. 9A and Fig. 9B, each frame part 23 is equipped with: twelve functional liquid drop nozzles; a nozzle plate 72 supporting twelve functional liquid drop nozzles 71; Twelve head holding parts 73 for fixing 71 twelve functional droplet nozzles; a frame 74 supporting the nozzle plate 72; Plate 75. In addition, the rack 74 has a head θ stage 76 for finely adjusting (θ correction) the θ position of the functional liquid droplet discharge head 71 by the head plate 72 .

The nozzle plate 72 is composed of a thick plate that is approximately parallelogram-shaped in a top view made of stainless steel or the like, and positions twelve functional droplet nozzles 71, and forms twelve nozzles for fixing each functional droplet nozzle 71 by the head holding member 73. installation openings (not shown). In addition, a valve member 105 (described later) of the functional liquid supply member 101 is also fixed to the head plate 72 .

Each functional droplet ejection head 71 is mounted on the frame 74, and is positioned and fixed on the ejection head plate 72 in the form that two nozzle rows 94, 94 to be described later are parallel to the Y-axis direction. Thus, the twelve functional droplet ejection heads 71 are closely overlapped in the width direction, and at the same time, every time the length of the nozzle row is deviated in the length direction, they are arranged in steps in the X-axis direction and the Y-axis direction, and a plurality of nozzles 95 are continuously formed in the Y-axis direction. Divide the drawing line LD (see FIG. 10 ). That is, the above-mentioned plot line L is constituted by seven divided plot lines LD continuous in the Y-axis direction.

In addition, each functional liquid drop discharge head 71, in terms of the structure of the internal flow path (not shown) to be described later, the ejection amount of the nozzles 95 located at both ends is larger than the ejection amount of the nozzles 95 located in the center, so it is preferable No functional liquid droplets are ejected from the nozzles 95 at both ends, and the other nozzles 95 serve as ejection nozzles. In this case, the twelve functional droplet discharge heads 71 are arranged such that the nozzles 95 at both ends of each overlap in the Y-axis direction.

In addition, if the plurality of nozzles 95 of the twelve functional droplet discharge heads 71 mounted on the head plate 72 are continuous in the Y-axis direction, and the dividing drawing line LD can be formed, the arrangement method of the functional droplet discharge heads 71 of the head plate 72 Can be set arbitrarily. For example, as the second embodiment will be described later, when the twelve functional droplet discharge heads 71 are divided into two groups of six in the Y-axis direction, each group of six functional droplet discharge heads 71 can be arranged in steps. shape (refer to Figure 19). In this way, if a plurality of functional droplet ejection heads 71 are divided and arranged in a plurality of groups, the width of the head plate 72 in the X-axis direction can be narrowed. Of course, the number of functional droplet discharge heads 71 mounted on each frame member 23 can also be set arbitrarily.

FIG. 10 is a diagram illustrating a sub-scan in which the seven frame members 23 move in the Y-axis direction with respect to the workpiece W in the drawing process. As shown in FIG. 10, the twelve functional liquid drop ejection heads 71 of each frame member 23 are formed in order of four units from the right side of FIG. A droplet discharge head 71R, a G-series functional droplet discharge head 71G, and a B-series functional droplet discharge head 71B. That is, the twelve functional droplet ejection heads 71 of each frame member 23 are arranged so that a plurality of nozzles 95 of all (four) functional droplet ejection heads 71 of each color constitute a partial drawing line Lp of each color, three colors The partial plot lines LpR·LpG·LpB are connected in the Y-axis direction in the order of R·G·B from the right side of the illustration to constitute one partial plot line Lp. Then, in the whole of the seven frame members 23, seven partial plot lines Lp of each color are connected in the Y-axis direction in the order of R·G·B from the right side of the figure to form one partial plot line Lp.

The length of the drawing line L is set to be about 1900 mm longer than twice the length (90 mm) of the partial drawing line Lp compared to the length of the long side of the workpiece W forming the pixel area 507a (about 1630 mm). Therefore, functional liquid droplets can be ejected and applied to the entire workpiece W by one main scan.

However, as mentioned above, the color matching mode of the plurality of pixel regions 507a is such that any three pixels arranged in the X-axis direction become the three colors of R, G, and B. On the contrary, in this embodiment, multiple functions of each color are used. The droplet ejection head 71 is arranged away from the Y-axis direction, so it is not possible to spray all the pixel regions 507a in one main scan, and it needs to be divided into at least three main scans. Then, during the period of the three main scans, two sub-scans (details will be described later) are performed to move each functional droplet ejection head 71 in the Y-axis direction by a portion of the drawing line Lp through the frame member 23. ). Thus, the seven frame members 23 are moved in the Y-axis direction by a portion of the drawing line Lp during three main scans (and two sub-scans in between). In other words, during the drawing process, the overall functional droplet ejection heads 71 of the seven frame members 23 cover the extended portion of the drawing line L in the Y-axis direction within the size range of twice the drawing line Lp (times of sub-scanning times). (Nozzle spray coverage Rh).

In addition, in FIG. 10 , three functional droplet ejection heads 71 correspond to one pixel area 507a in the Y-axis direction on the drawing, but actually, one functional droplet ejection head 71 corresponds to a plurality of pixel areas 507a.

As shown in FIG. 11 , the functional droplet discharge head 71 is a so-called duplex nozzle, which is provided with: a functional liquid introduction part 81 having a duplex connection needle 82; a duplex nozzle substrate 83 connected to the functional liquid introduction part 81; Below the functional liquid introduction part 81 (upper in FIG. 11 ), the head main body 84 is filled with the functional liquid and forms the internal flow path of the head. The connection needle 82 is connected to a functional liquid tank 103 described later, and supplies the functional liquid into the head channel of the functional liquid droplet discharge head 71 . The head body 84 has a cavity 91 formed of piezoelectric elements and the like, and a nozzle plate 92 having a nozzle surface 93 forming two nozzle rows 94 , 94 parallel to each other. Each nozzle row 94 is configured by arranging a plurality of (180) nozzles 95 at equal intervals. In addition, on the head substrate 83 , there are provided dual connectors 96 , 96 connected to the electrical component 66 for the head described above via a flexible flat cable. Then, when the functional droplet ejection head 71 is driven by applying a drive waveform to the cavity 91 , functional droplets are ejected from the nozzles 95 by the pump action of the cavity 91 .

As shown in FIGS. 4 and 5 , the functional liquid supply mechanism 24 is composed of seven functional liquid supply members 101 corresponding to the seven frame members 23 . As shown in Fig. 8, Fig. 12A and Fig. 12B, each functional liquid supply part 101 has: a tank part 102 with a plurality (12) of functional liquid tanks 103 for storing functional liquid; 12 functional liquid supply pipes 104 of the 12 functional liquid droplet ejection heads 71 ; valve components 105 with 12 pressure regulating valves 106 provided on the 12 functional liquid supply pipes 104 . The twelve functional liquid tanks 103 of each tank member 102 store one kind of functional liquids of R, G, and B in four units. Then, the functional liquid in each functional liquid tank 103 is introduced into the corresponding functional liquid droplet discharge head 71 through the functional liquid supply pipe 104 . For example, the above-mentioned R system functional droplet discharge head 71R is connected to the functional liquid tank 103 storing the R functional liquid, and introduces the R functional liquid.

In addition, each functional liquid tank 103 is preferably in a cartridge form in which a functional liquid bag vacuum-packed with a functional liquid is housed in a resin cartridge case, and the functional liquid is preferably degassed in advance.

As shown in FIG. 8 , the valve component 105 is arranged on the nozzle plate 72 and has: twelve pressure regulating valves 106 ; The twelve pressure regulating valves 106 imitate the twelve functional droplet ejection heads 71 arranged in steps, and are arranged on the head plate 72 in steps. In this way, by imitating the arrangement of twelve functional droplet ejection heads 71 to configure twelve pressure adjustment valves 106, the lengths of the functional liquid supply pipes 104 between the functional droplet ejection heads 71 and the pressure adjustment valves 106 can be made the same, and the The pressure supplied to the twelve functional droplet extruders is uniform.

In addition, in the present embodiment, each functional liquid tank 103 is mounted on the bridge plate 75 , but it may be configured to be mounted on the head plate 72 . Accordingly, the length of the functional liquid supply pipe 104 from the functional liquid tank 103 to the functional liquid droplet discharge head 71 can be shortened, and the functional liquid can be effectively used.

As shown in Fig. 12A and Fig. 12B, each pressure regulating valve 106 forms a first chamber 111 in line with the functional liquid tank 103, a second chamber 112 in line with the functional droplet ejection head 71, and communicates with the first chamber 112 in the valve housing 110. The communication channel 113 between the chamber 111 and the second chamber 112 . A diaphragm 114 facing outside is provided on one surface of the second chamber 112 ; and a valve body 115 that is opened and closed by the diaphragm 114 is provided on the communication flow path 113 .

The functional liquid introduced into the first chamber 111 from the functional liquid tank 103 is supplied to the functional droplet discharge head 71 through the second chamber 112, but at this time, the diaphragm 114 is displaced by the air pressure (usually atmospheric pressure) in the container device 4 . As a result, the valve body 115 provided in the communication channel 113 opens and closes, and the pressure in the second chamber 112 is adjusted so that the functional hydraulic pressure in the second chamber 112 becomes a slight negative pressure. In this way, by installing the pressure regulating valve 106 between the functional liquid tank 103 and the functional liquid droplet discharge head 71, the water head pressure between the functional liquid tank 103 and the functional liquid droplet discharge head 71 will not change excessively. The drip ejection head 71 ejects the functional liquid stably. In addition, the installation position of the valve member 105 is not limited to the nozzle plate 72 , and may be provided on the bridge plate 75 .

As shown in Figures 5 and 7, the flushing part 26 is to receive the functional liquid droplets ejected in the flushing action, that is, the preliminary ejection (throwing ejection) of the functional liquid droplet ejection head 71, especially for receiving, when the workpiece W is replaced. Parts that are regularly flushed during The flushing unit 26 is located at a position on the front side when the workpiece W is fed and moved to the mounting table 41 (movement from the lower side to the upper side in FIG. 5 ). The periodic flushing box 121 is arranged (in the Y-axis direction) and directly receives functional droplets; the box support member 122 that is fixed to the above-mentioned X-axis pneumatic slider 44 and supports the regular flushing box 121 is constituted.

The periodic flushing box 121 is formed in a rectangular box shape in plan view; an absorbent material (not shown) for absorbing functional liquid is laid on the bottom surface thereof. The long side (Y-axis direction) of the periodic flushing box 121 is formed corresponding to the spray coverage Rh of the above-mentioned spray head. Therefore, even when the periodic flushing box 121 is moved in the Y-axis direction within the nozzle discharge coverage area Rh during the sub-scanning of the frame member 23, it is possible to receive all the functions mounted on the seven frame members 23. Functional droplets that are flushed by the droplet ejection head 71 . In addition, the short sides (X-axis direction) of the periodic flushing box 121 are also preferably formed to correspond to the lengths of the seven frame members 23 in the X-axis direction.

In addition, although not shown, in the drawing area 31 of the suction table 42, a pre-discharge flushing box is provided. Then, when the workpiece W is fed and moved in the X-axis direction, the frame member 23 approaches the workpiece W after the pre-discharge flushing box. Therefore, just before approaching the workpiece W, flushing before discharge can be performed, and clogging of the nozzle can be effectively prevented. In addition, the long side (Y-axis direction) of the pre-discharge flushing box is formed corresponding to the discharge coverage Rh of the nozzle, similarly to the periodic flushing box 121 .

In addition, in the present embodiment, the functional liquid droplets are only ejected and sprayed when the workpiece W is moved in feed, but it is also possible to use In this case, it is preferable to provide a pair of pre-discharge flushing boxes for the ejection structure of the functional liquid droplet ejection head 71, and arrange them so that the installation table 41 is sandwiched in the X-axis direction. Accordingly, flushing can be performed prior to ejection drive following the reciprocating movement of the workpiece W.

In this way, in the flushing operation, there is pre-discharge flushing performed before discharging (drawing) onto the workpiece W, as well as periodic flushing performed when the workpiece W is temporarily stopped for drawing, as when the workpiece W is replaced.

Next, the maintenance mechanism 25 will be described with reference to FIG. 13 . The maintenance mechanism 25 has a suction member 131, a friction member 132, and a member lifting mechanism 133, and these are arranged in the maintenance processing area 32 (see FIGS. 5 and 6 ).

The suction member 131 is a member that sucks the functional liquid droplet discharge head 71 and forcibly discharges the functional liquid from the functional liquid droplet discharge head 71 . The suction member 131 has seven divided suction members 141 corresponding to the seven frame members 23 . In addition, the seven divided suction members 141 are arranged in the Y-axis direction in imitation of the arrangement of the seven frame members 23 , and are supported by the member elevating mechanism 133 so as to be able to move up and down individually.

Each divided suction member 141 is equipped with: a cap member 142 having twelve caps that is close to the frame member 23 from the lower side and closes the nozzle faces 93 of the twelve functional droplet ejection heads 71; the cap members 142 are freely supported up and down The cap supporting member 145; the ejector (ejector) (not shown) that makes the functional liquid drop discharge head 71 have an attractive effect through the closed cap 143.

The cap member 142 is a member in which twelve caps 143 are arranged on the cap base 144 corresponding to the arrangement of the twelve functional liquid drop discharge heads 71 mounted on the frame member 23 . Therefore, 12×7 caps 143 are arranged in the entirety of the suction member 131 in imitation of the arrangement pattern of the overall functional droplet ejection heads 71 mounted on the seven frame members 23, which can be closed at one time, respectively corresponding to the overall functional droplet ejection heads. 71 caps 143. Then, by driving the ejector with the cap 143 closing the nozzle surface 93 , the functional liquid is sucked from the nozzle 95 . Thereby, the functional liquid with increased viscosity in the functional droplet discharge head 71 can be removed. In addition, as will be described later, the functional liquid droplet ejection head 71 suctioned by the suction member 131 may have the functional liquid adhered to the nozzle surface 93, so the friction member 132 is brought close to the friction member 132 before rubbing.

In addition, the suction member 131 may not only provide suction to the functional liquid drop discharge head 71, but may also receive the functional liquid for periodic flushing as described above. That is, each cap 143 of the suction member 131 also serves as a flushing box. In addition, the suction member 131 can prevent drying of the nozzle 95 by making the cap 143 close the nozzle surface 93 of the functional droplet discharge head 71 during non-drawing processing of the droplet discharge device 1 .

The friction member 132 is arranged between the drawing area 31 and the suction member 131, that is, on the side of the drawing area 31 of the maintenance treatment area 32. The friction plate 151 is used to wipe off the dirt caused by the adhesion of the functional liquid due to the suction of the functional droplet ejection head 71. parts of the nozzle face. Due to such arrangement, the friction member 132 can approach and move to the frame member 23 respectively to the drawing area 31 after the suction of the suction member 131 is finished, and the functional droplet discharge head 71 can be rubbed.

Friction member 132 is equipped with: pay out successively (in its extending direction) the drawing upper side of friction plate 151 pays out cylinder 152; The friction plate 151 is a cleaning liquid supply part (not shown) that spreads the cleaning liquid; the wiping part 154 that approaches from the underside of the functional droplet ejection head 71 and wipes the nozzle surface 93 with the friction plate 151; and the friction frame 155 that supports these. In addition, the cleaning liquid supplied to the friction plate 151 is a solvent of a relatively highly volatile functional liquid in order to effectively remove the functional liquid adhering to the nozzle surface 93 of the functional droplet discharge head 71 .

Then, the nozzle moving mechanism 22 is driven, and each frame member 23 is approached to the friction member 132 in order, and becomes the state where the friction plate 151 impregnated with washing liquid is in contact with the nozzle faces 93 of the twelve functional droplet nozzles, and then, The nozzle surface 93 is wiped by the rubbing plate 151 by moving the frame member 23 in the Y-axis direction (to the drawing area 31 side) by the nozzle moving mechanism 22 . In this way, the twelve functional droplet discharge heads 71 mounted on each frame member 23 are rubbed in series. In addition, since the rubbing operation is performed from a direction in which the row direction (Y-axis direction) of the nozzle row 94 is consistent, different functional liquids are not wiped off at the same place on the rubbing plate 151, so the functional liquid does not rub on the nozzle surface 93. mix with each other.

The member elevating mechanism 133 has eight divided member elevating mechanisms 156 that each support the seven divided suction members 141 of the suction member 131 and the friction member 132 , each of which can be raised and lowered. Each divided member elevating mechanism 156 is composed of a cylinder or the like, and lifts and lowers the seven divided suction members and the friction member 132 between the predetermined maintenance position (access position) and the predetermined retreat position of the maintenance function liquid drop discharge head 71. part. Therefore, when replacing the functional droplet ejection head 71 , the method of driving each divided member elevating mechanism 156 to lower the suction member 131 and the friction member 132 can ensure the working area of the suction member 131 and the friction member 132 .

In this way, by performing suction processing by the suction member 131 and wiping processing by the friction member 132 on the functional liquid droplet discharge head 71 , the discharge function of the functional liquid droplet discharge head 71 of each frame member 23 can be maintained in a good state. Furthermore, since the suction member 131 is constituted by seven divided suction members 141 corresponding to the seven frame members 23 , assembly of each divided suction member 141 is facilitated.

In addition, in this embodiment, as shown in FIG. 5 and FIG. 6, a maintenance mechanism is provided in a single maintenance treatment area 32, but it may also be due to the movement track of the frame member 23 of the nozzle moving mechanism 22, A pair of maintenance areas 32 are formed at positions offset from both sides of the workpiece moving mechanism 21 (drawing area 31 ), and each maintenance area 32 may be provided with a maintenance mechanism 25 . Accordingly, the seven frame members 23 can be divided into two groups (for example, three and four) for maintenance, and the function recovery process of the functional droplet ejection head 71 can be quickly performed. In addition, in the case of replacing the functional droplet ejection head 71, the corresponding frame member 23 is brought close to one maintenance mechanism 25 to perform head replacement, and the other frame member 23 is close to the other maintenance mechanism 25. The function restoration process can be performed without stopping the operation of the droplet ejection device 1 . In addition, when a pair of maintenance treatment areas 32 are constituted in this way, the number of divided suction members 141 constituting the suction members 131 of each maintenance mechanism may be three or four.

Next, referring to FIG. 14 , the overall control system of the droplet ejection device 1 will be described. The control system of the droplet ejection device 1 is basically equipped with: the above-mentioned host machine 3; a driving unit having various drivers such as the driving function droplet ejection head 71, the workpiece moving mechanism 21, the nozzle moving mechanism 22, the driving maintenance mechanism 25, etc. 161 ; the control unit 162 (controller 27 ) that collectively controls the entire droplet ejection device 1 including the drive unit 161 .

The drive unit 161 is equipped with: a driver 171 for driving and controlling the respective motors of the workpiece moving mechanism 21 and the nozzle moving mechanism 22; a nozzle driver 172 for driving and controlling the ejection of the functional droplet nozzle 71; 131 , the driver 173 for maintenance of the friction member 132 and the member lifting mechanism 133 .

The control unit 162 includes a CPU 181 , a ROM 182 , a RAM 183 , and a P-CON 184 ; these are connected to each other via a bus 185 . The ROM 182 has a control program area for storing control programs processed by the CPU 181 , and a control data area for storing control data for performing drawing operations or function recovery processing.

The RAM 183 has: in addition to various register groups, a drawing data storage unit for storing drawing data for drawing the workpiece W; and a position data storage unit for storing position data of the workpiece W and the functional droplet discharge head 71 as a control processing. Various work areas to use. In P-CON184, in addition to the various drivers of the drive unit 161, a workpiece recognition camera 36 or a nozzle recognition camera 37 is also connected, and it is also equipped with logic for compensating the function of the CPU181 and processing the interface signals between peripheral circuits circuit. Therefore, P-CON184 is to install various instructions from the host machine 3 in the original state or after processing on the bus 185, and at the same time as the CPU 181 to link the data or signals output from the CPU 181 to the bus 185 according to its original state or processing. The original state or after processing is output to the drive unit 161 .

In addition, the CPU 181 inputs various detection signals, various instructions, and various data through the P-CON 184 according to the control program in the ROM 182, and after processing various data in the RAM 183, outputs various data to the drive unit 161 through the P-CON 184. A control signal is used to control the droplet ejection device 1 as a whole. For example, the CPU 181 controls the functional liquid drop ejection head 71, the workpiece moving mechanism 21, and the nozzle moving mechanism 22, and performs drawing on the workpiece W under prescribed drawing conditions and prescribed moving conditions.

Here, a series of drawing processing by the droplet discharge device 1 will be described. First, utilize the workpiece conveying device 2 to introduce the unprocessed workpiece W on the installation table 41 positioned at the workpiece loading and unloading area 33, before and after this, drive the spray head moving mechanism 22 to move the seven vehicle frame components 23 to the drawing area 31 (drawing source). position) to move. Next, as preparations before ejection of functional liquid droplets, the position correction in the X-axis direction by the workpiece moving mechanism 21 and the position correction in the θ-axis direction by the workpiece θ table 43 are performed, and the workpiece W mounted on the suction table 42 In addition, the position correction of each frame member 23 is performed by the position correction of the nozzle moving mechanism 22 in the Y-axis direction and the position correction of the nozzle θ table 76 in the θ-axis direction. Once the position correction has been performed, the plurality of pixel regions 507a formed on the workpiece W are arranged in a matrix in the X-axis direction and the Y-axis direction.

As shown in FIG. 15A1 and FIG. 15B , in this embodiment, the color matching pattern of pixels is arranged in a strip shape, and pixel columns of each color are formed along the Y-axis direction. That is, in the X-axis direction, three adjacent pixels are arranged in three colors of R·G·B. Therefore, as mentioned above, when the seven frame components 23 are located at the original positions of the drawing, the B-series functional liquid spray head 71B at the right end of the frame component 23 at the right end of the figure is close to the pixel area 507a at the right end of the figure, and is located in the Y-axis direction. The R-series functional liquid ejection head 71R and the G-series functional liquid ejection head 71G on the outside (right side) are located outside the pixel area 507 a in the Y-axis direction. In addition, at this time, the B-series functional liquid nozzle head 71B at the left end of the frame member 23 at the left end in the drawing is close to the pixel area 507a at the left end in the drawing (see FIG. 15A ).

In this state, while being controlled by the controller 27 (control unit 162), the droplet discharge apparatus 1 is synchronized with the feed movement of the workpiece W in the X-axis direction by the workpiece moving mechanism 21 in the X-axis direction. A main scan in which R, G, and B three-color functional liquids are simultaneously ejected and sprayed is performed based on the color matching pattern arranged in stripes to a plurality of pixel regions 507a. In the X-axis direction, relative to the alternate arrangement of the pixel regions 507a of the three colors of R, G, and B, here, the color-specific partial drawing lines Lp are continuous in the Y-axis direction, so the adjacent X-axis direction Between the pixel regions 507a, functional droplets of mutually different colors are not ejected or ejected in the same main scan. That is, each functional droplet discharge head 71 discharges functional droplets to only one of the three pixel regions 507a arranged in the X-axis direction (see FIG. 15B ).

If the first main scan (feed movement of the workpiece W) is finished, the workpiece W will be re-moved by the workpiece moving mechanism 21, and the nozzle moving mechanism 22 will be driven to carry out seven frame parts 23 as a whole in the Y-axis direction (shown in the figure). Left side) Sub-scan of moving part drawing line Lp amount (equivalent to four amounts of functional droplet discharge head). As shown in Figures 16A and 16B, through this sub-scanning, the G-series functional liquid droplet ejection head 71G is brought close to the pixel area 507a where the B-functional liquid droplet was sprayed in the first main scan, and the B-series functional liquid droplet ejection head 71B is brought close to the already The pixel area 507a on which the R-functional liquid droplet has been sprayed is brought close to the pixel area 507a on which the G-functional liquid droplet has been sprayed by the R-system functional liquid droplet discharge head 71R. Therefore, the G-series functional droplet ejection head 71G that was originally located in the first main scan and deviated from the pixel area 507a to the outside (right side) in the Y-axis direction is close to the pixel area 507a on the right side of the figure. However, the R-series functional liquid droplet The shower head 71R is still in a state of being deviated outward in the Y-axis direction from the pixel region 507 a. In addition, at the time of the first main scan, the B-series functional liquid droplet discharge head 71B at the left end of the frame member 23, which was originally close to the pixel area 507a at the left end of the figure, deviates from the pixel area 507a to the outside (left side) in the Y-axis direction. The G-series functional droplet ejection head 71G adjacent to the right is close to the pixel area 507a at the left end in the figure (refer to FIG. 16A ).

In this state, the second main scan is performed as in the first main scan (see FIG. 16B ). Here, in the first main scan, the G-series functional droplet ejection head 71G, which is originally positioned away from the pixel area 507a to the outside in the Y-axis direction (the maintenance area 32 side), does not apply the functional liquid to the pixel area 507a during this period. However, in the first main scan and the second main scan, just before the workpiece W is approached, the pre-ejection rinse box is subjected to a pre-ejection rinse, so that the nozzle 95 will not be dried. In the second main scan, functional droplets can be properly ejected to the pixel region 507a.

In addition, during the first and second main scanning periods, the maintenance treatment may be performed by the suction member 131 and the friction member 132 only by moving the frame member 23 at the right end in the figure to the maintenance treatment area 32 . According to this, even if the R-type functional liquid droplet ejection head 71R and the G-system functional liquid droplet ejection head 71G are not ejected in the first main scan, before the second main scan, the nozzles 95 have been dried so that only the pre-ejection flushing is performed. It is not possible to fully restore the level of function, but it is also possible to appropriately restore the ejection function. Therefore, while the functional liquid droplet ejection head 71 of the frame member 23 at the right end is undergoing the maintenance process, the functional liquid droplet ejection heads 71 of the other frame members 23 preferably stand by while flushing the regular flushing box 121 as appropriate. In addition, in addition to the frame member 23 at the right end, due to the relationship of the ejection mode, if there is a functional droplet ejection head 71 without ejection drive, the frame member 23 equipped with the functional droplet ejection head 71 may also be (and thus the frame member 23 on the side of the maintenance area 32 ) moves to the maintenance area 32 , and the maintenance process is performed by the suction member 131 and the friction member 132 .

If the second main scan ends, the workpiece W will be moved back to the X-axis direction by the workpiece moving mechanism 21, and the nozzle moving mechanism 22 will be driven to move the seven frame components 23 as a whole to the Y-axis direction (left side of the figure). ) sub-scanning of the moving part drawing line Lp weight (equivalent to four weights of the functional liquid drop ejection head). As shown in Figures 17A and 17B, through this sub-scanning, the R-series functional droplet ejection head 71R is brought close to the pixel area 507a on which the G-functional liquid droplets were sprayed in the second main scan, so that the G-series functional droplet ejection head 71G Close to the pixel area 507a where the B-functional droplet has been sprayed, make the B-series functional droplet discharge head 71B close to the pixel area 507a where the R-functional liquid droplet has been sprayed. Therefore, the R-system functional droplet ejection head 71R, which was originally located in the second main scan and deviated from the pixel area 507a to the outside (right side) in the Y-axis direction, is close to the pixel area 507a at the right end in the figure. in addition. During the second main scan, the G-series functional droplet ejection head 71G at the left end of the vehicle frame member 23 at the left end of the drawing, which was originally close to the pixel area 507a at the left end of the drawing, is located at the side that deviates from the pixel area 507a to the outside (left side) in the Y-axis direction. The R-system functional droplet discharge head 71R adjacent to the right is close to the pixel area 507a at the left end of the drawing (see FIG. 17A ).

In this state, the third main scan is performed as in the second main scan (see FIG. 17B ). Here, in the second main scan, the R-system functional droplet ejection head 71R, which is originally positioned away from the pixel area 507a to the outside in the Y-axis direction (the maintenance area 32 side), does not apply the functional liquid to the pixel area 507a during this period. However, in the first main scan to the third main scan, just before the workpiece W is approached, the pre-discharge rinse box is subjected to pre-discharge flushing, so that the nozzle 95 will not be dried. In the third main scan, functional droplets can be properly ejected to the pixel region 507a.

In addition, in this case, during the second and third main scanning periods, only the frame member 23 at the right end in the figure is moved to the maintenance treatment area 32, and the maintenance treatment can also be performed by the suction member 131 and the friction member 132. . Furthermore, as described above, when the maintenance area 32 is formed at two positions deviated from the drawing area 31, only the vehicle frame member 23 on the left end of the drawing (and thus the vehicle frame on the maintenance area 32 side) may be placed. The component 23) moves to the maintenance area 32 on the left side of the figure, and maintenance processing is performed.

In this way, between the pixel areas 507a adjacent to the X-axis direction, functional liquid droplets of different colors are not ejected and ejected in the same main scan to complete the ejection and ejection of functional liquid droplets to the entire pixel area 507a of the workpiece W. with. Therefore, on the partition wall portion 507b between the pixel regions 507a adjacent to the X-axis direction, for example, even if the R functional droplet is sprayed by the first main scan and the G functional droplet is sprayed by the second main scan, When the G functional liquid droplets are sprayed in the second main scan, the R functional liquid droplets sprayed in the first main scan are already dried to some extent, so the two functional liquid droplets do not mix with each other. Therefore, between the pixel regions 507a adjacent to the X-axis direction, it is possible to reliably prevent functional droplets of different colors from mixing with each other.

In addition, in the first main scan, the workpiece W may be reciprocated multiple times to eject and spray functional droplets to each pixel area 507a multiple times. In this case, in each reciprocating movement, it is preferable to Each frame member 23 is moved in the Y-axis direction. According to these, the functional liquid droplets can be ejected/discharged over the entire area of each pixel area 507a without pits. In addition, in FIG. 15A and FIG. 15B, FIG. 16A and FIG. 16B, and FIG. 17A and FIG. 17B, in the drawing, three functional droplet discharge heads 71 correspond to one pixel area 507a in the Y-axis direction. However, as mentioned above, In fact, one functional droplet discharge head 71 corresponds to multiple pixel regions 507a.

In this embodiment, as mentioned above, the color matching mode of pixels is arranged in a strip shape, and the pixel columns of each color are formed along the Y-axis direction, so the pixel area 507a adjacent to the Y-axis direction will not be sprayed with different colors. Functional droplet. However, when the color matching mode of pixels is a mosaic mode or a triangular arrangement, pixels of different colors are formed by arranging in the Y-axis direction. If the two pixel regions 507a in the axial direction eject functional liquid droplets of different colors in the same main scan, the functional liquid droplets of different colors are sprayed on the partition wall 507b between adjacent pixel regions, resulting in Danger of mixing colors. In such a case, it is preferable to discharge to the two pixel regions 507a using different main scans (especially effective when the amount of functional liquid discharged from the pixel region 507a is large).

As shown in FIG. 18A and FIG. 18B , for example, when the color matching mode of the pixels is a mosaic arrangement, the pairs corresponding to the R-series functional droplet ejection head 71R adjacent to the Y-axis direction and corresponding to the G-series functional droplet ejection head 71G The two pixel areas 507a adjacent to the Y-axis direction, in the first main scan, the G-system functional droplet ejection head 71G (a part of the nozzles 95) is non-driven and the R-system functional droplet ejection head 71R is driven to eject R functional droplet (referring to Fig. 18A), in the second main scan, its R system functional droplet ejection head 71R is used as non-driven and its G series functional droplet ejection head 71G is used as a drive to eject G functional droplet (refer to Figure 18A). According to these, in the same main scan, functional liquid droplets of mutually different colors are not ejected/discharged between the pixel regions 507a adjacent to the Y-axis direction. Therefore, not only between the pixel regions 507a adjacent to the X-axis direction, but also between the pixel regions 507a adjacent to the Y-axis direction, color mixing of functional droplets of different colors can be reliably prevented.

In addition, in FIG. 18A and FIG. 18B , in drawing, one functional droplet ejection head 71 corresponds to one pixel region 507a in the Y-axis direction, but as mentioned above, in fact, one functional droplet ejection head 71 corresponds to more pixels. pixel area 507a.

Next, a second embodiment of the droplet ejection device will be described with reference to FIGS. 19 , 20A, 20B, and 20C. The droplet discharge device 1 of the second embodiment has substantially the same configuration as the droplet discharge device 1 of the above-mentioned first embodiment, and in the first embodiment, twelve functional droplets for each frame member 23 The nozzles 71 are arranged in a row of steps, and four units are used to introduce the R-G-B three-color functional liquid into the composition of the R-series functional droplet discharge head 71R, the G-series functional droplet discharge head 71G, and the B-series functional droplet discharge head 71B. (Refer to FIG. 9A, FIG. 9B and FIG. 10 ), unlike this, in the second embodiment, the difference is that the twelve functional droplet ejection heads 71 are divided into two groups of six in the Y-axis direction. , each group of six functional droplet ejection heads 71 is arranged in a ladder shape, and from the right side of Figure 19, in the order of one unit, respectively introduce the R-series functional droplet ejection heads 71R of R·G·B three-color functional droplets , the G-series functional droplet ejection head 71G, and the B-series functional droplet ejection head 71B.

That is, in the second embodiment, the twelve functional droplet discharge heads 71 of each frame member 23 are arranged so that four partial drawings of each color are formed by a plurality of nozzles 95 of four functional droplet discharge heads 71 of each color. The line Lp and the three-color partial plot lines LpR·LpG·LpB are repeated four times in this order in the Y-axis direction from the right side of the illustration to form one divided plot line LD. Therefore, compared with the first embodiment, the length of each partial drawing line Lp is shortened.

Here, a series of drawing processing of the droplet ejection device 1 according to the second embodiment will be described with reference to FIGS. 20A , 20B, and 20C. First, the workpiece W is mounted on the suction table 42 in the same manner as above, and the position of the workpiece W and the frame member 23 is corrected.

At this time, the B-series functional droplet ejection head 71B at the right end of the frame member 23 at the right end in the figure is close to the pixel area 507a at the right end of the figure, and the R-series functional liquid droplet ejection heads 71R and G located outside (right side) in the Y-axis direction The B-series functional droplet ejection head 71G is located at a position deviated from the pixel area 507a outward in the Y-axis direction, and the B-series functional liquid droplet ejection head 71B at the left end of the frame member 23 at the left end in the figure is close to the pixel area 507a at the left end in the figure. Then, in this state, the first main scan is performed, and functional droplets are ejected from each functional droplet discharge head 71 to only one pixel region 507a among the three pixel regions 507a arranged in the X-axis direction (refer to FIG. 20A ).

If the first main scan is finished, proceed as follows: make the G-series functional droplet ejection head 71G close to the pixel area 507a where the B functional liquid has been sprayed in the first main scan, and make the B-series functional droplet ejection head 71B close to the pixel area 507a that has sprayed the B functional liquid. The pixel area 507a where the R functional liquid is sprayed should be integrated with the seven frame components 23 that are close to the pixel area 507a that has been sprayed with the G functional liquid by the R-based functional liquid droplet ejection head 71R, and move in the direction of the Y axis (left side in the figure). The sub-scan of the drawing line Lp weight (equivalent to the weight of a functional droplet discharge head). That is, in the droplet discharge device 1 of the second embodiment, compared with the first embodiment, by shortening the length of the drawing line Lp of each part, it is possible to shorten the length of each functional droplet discharge head 71 (vehicle) in the sub-scan. The moving distance of the frame part 23). Accordingly, sub-scanning can be performed in a short time.

Then, similarly to the first embodiment, the second main scan is performed on the basis of the pre-discharge flushing, and the pixel region 507a adjacent to the pixel region 507a that has been sprayed with the B functional liquid in the first main scan , the functional liquid of G is sprayed; for the pixel area 507a adjacent to the pixel area 507a sprayed with the R functional liquid, the functional liquid of B is sprayed; for the adjacent pixels of the pixel area 507a sprayed with the G functional liquid The area 507a is sprayed with R functional liquid (see FIG. 20B ).

If the second main scan is finished, proceed as follows: make the G-series functional droplet ejection head 71G close to the pixel area 507a where the B functional liquid has been sprayed in the second main scan, and make the B-series functional droplet ejection head 71B close to the pixel area 507a that has sprayed the B functional liquid. For the pixel area 507a where the R functional liquid is sprayed, the seven frame components 23 of the R-system functional liquid droplet discharge head 71R that are close to the pixel area 507a that has been sprayed with the G functional liquid should be moved in the Y-axis direction (left side in the figure) as a whole. The sub-scan of the portion of the drawing line Lp (equivalent to the amount of a functional droplet discharge head). Here, the moving distance of each functional droplet ejection head 71 (carriage member 23 ) in the sub-scanning can also be shortened, and the sub-scanning can be performed in a short time.

Then, in the same way as above, on the basis of performing flushing before ejection, the third main scan is performed, and the pixel area 507a adjacent to the pixel area 507a that has been sprayed with B functional liquid in the second main scan is sprayed. The functional liquid of G; the functional liquid of B is sprayed on the pixel area 507a adjacent to the pixel area 507a sprayed with the R functional liquid; the adjacent pixel area 507a of the pixel area 507a sprayed with the G functional liquid, The functional fluid of R is sprayed (refer to FIG. 20C).

As described above, in the drawing processing of the second embodiment, it is also possible to eliminate the points whose moving distances in the sub-scanning are different, perform the drawing processing in the same manner as the first embodiment, and do not spray between the pixel regions 507a adjacent to the X-axis direction. The functional droplets of different colors are ejected and sprayed, and the ejection and spraying of the functional droplets to the entire pixel area 507a on the workpiece W are completed. Therefore, between the pixel regions 507a adjacent to the X-axis direction, it is possible to reliably prevent the color mixing phenomenon of the functional droplets of different colors.

In addition, in the second embodiment, compared with the first embodiment, the length of each part of the drawing line Lp is shortened, so the above-mentioned spray head discharge coverage Rh (in the Y-axis direction, the drawing line L is lengthened to a partial drawing line 2 times of Lp (the number of times of sub-scanning) the size portion range) becomes shorter. Accordingly, the length in the Y-axis direction of the pre-discharge flushing box can be shortened, contributing to space saving.

In addition, in the second embodiment, also between the first main scan and the second main scan, and between the second main scan and the third main scan, only the frame member 23 on the right end of the drawing may be , move to the maintenance area 32, and perform maintenance processing. In addition, in the second embodiment as well, the rubbing operation is performed from a direction in which the row direction (Y-axis direction) of the nozzle rows 94 coincides, but in each frame member 23, the functional droplet discharge heads 71 arranged at the same position in the X-axis direction , introduce functional liquids of the same color (see FIG. 19, FIG. 20A, FIG. 20B and FIG. 20C), so different functional liquids will not be wiped at the same place on the friction plate 151, and the functional liquids will not mix in the nozzle surface 93.

As described above, according to the droplet ejection device 1 of the present embodiment, when the functional droplets of R, G, and B are simultaneously ejected and applied to the workpiece W, even if the functional droplets are not correctly ejected on each pixel area 507a , can also reliably prevent the phenomenon of color mixing of functional droplets of different colors.

Next, electro-optical devices (flat panel displays), color filters, liquid crystal display devices, organic EL devices, plasma displays (PDP devices), and electron emission devices manufactured by the droplet discharge device 1 of this embodiment are (FED devices, SED devices) and active matrix substrates formed on these display devices are taken as examples, and their structures and manufacturing methods will be described. In addition, the so-called active matrix substrate refers to a substrate on which thin film transistors and power lines and data lines electrically connected to the thin film transistors are formed.

First, a method of manufacturing a color filter plate incorporated in a liquid crystal display device, an organic EL device, or the like will be described. FIG. 21 is a flow chart showing the manufacturing process of the color filter, and FIG. 22A, FIG. 22B, FIG. 22C, FIG. 22D, and FIG. 22E show the color filter 500 (filter substrate 500A) of this embodiment shown in order of the manufacturing process. Pattern cutaway.

First, in the black matrix forming step ( S101 ), as shown in FIG. 22A , a black matrix 502 is formed on a substrate (W) 501 . The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. In order to form the black matrix 502 made of a metal thin film, a sputtering method or a sputtering method can be used. Moreover, when forming the black matrix 502 which consists of a resin film, a gravure printing method, a photoresist method, a thermal transfer method, etc. can be utilized.

Next, in the bank forming step ( S102 ), the bank 503 is formed in a state of overlapping on the black matrix 502 . That is, first, as shown in FIG. 22B , the substrate 501 and the black matrix 502 are covered, and a protective layer 504 made of a negative-type transparent photosensitive resin is formed. Then, the state where the upper surface of the mask sheet 505 formed by the matrix pattern is restricted, and the exposure treatment is performed.

Furthermore, as shown in FIG. 22C , the unexposed portion of the protective layer 504 is processed by photolithography to form the banks 503 in the pattern of the protective layer 504 . In addition, when the black matrix is formed of resin black blocks, both the black matrix and the bank can be used.

The bank 503 and the black matrix 502 below it become the partition wall 507b that divides each pixel area 507a. In the subsequent colored layer forming process, the functional liquid droplet ejection head 16 is used to form the colored layer (film formation portion) 508R, In the case of 508G and 508B, the spraying area of functional liquid droplets is specified.

The above-mentioned filter base 500A can be obtained through the above-mentioned black matrix forming process and bank forming process.

In addition, in this embodiment, as the material of the banks 503, a resin material whose surface of the coating film becomes lyophobic (hydrophobic) is used. In addition, since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), it is automatically corrected toward each pixel region surrounded by the banks 503 (dividing wall portions 507b) in the colored layer formation process described later. The spraying positions of the liquid droplets in 507a are not uniform.

Next, in the colored layer forming step (S103), as shown in FIG. 22D, the functional liquid droplets are ejected from the functional liquid droplet discharge head 16, and are sprayed in each pixel area 507a surrounded by the partition wall portion 507b. In this case, functional liquids (filter materials) of three colors of R, G, and B are introduced by the functional liquid droplet ejection head 16, and functional liquid droplets are ejected. In addition, as the color matching patterns of the three colors of R, G, and B, there are band arrangement, mosaic arrangement, and triangle arrangement.

Then, the functional liquid is immobilized through drying treatment (treatment such as heating) to form three-color colored layers 508R, 508G, and 508B. If the colored layers 508R, 508G, 508B have been formed, transfer to the protective film forming step (S104), as shown in FIG. , forming a protective film 509 .

That is, the protective film 509 is formed by spraying the protective film coating liquid onto the entire surface of the substrate 501 on which the colored layers 508R, 508G, and 508B have been formed, followed by drying.

Then, after the protective film 509 is formed, the color filter 500 moves to a film deposition process such as ITO (Indium Tin Oxide) which becomes the transparent electrode in the next process.

23 is a cross-sectional view of main parts showing a schematic configuration of a passive matrix type liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the above-mentioned color filter 500 . By mounting incidental elements such as an IC for driving a liquid crystal, a backlight, and a support on such a liquid crystal device 520 , a transmissive liquid crystal display device as a final product can be obtained. 22A, 22B, 22C, 22D, and 22E, the same reference numerals are assigned to corresponding parts, and description thereof will be omitted.

Such a liquid crystal device 520 is roughly constituted as a liquid crystal composed of a color filter 500, an opposing substrate 521 composed of a glass substrate, and an STN (Super Twisted Nematic liquid crystal) liquid crystal composition sandwiched between them. On the layer 522, the color filter 500 is disposed on the upper side (observer side) in the drawing.

In addition, although not shown in the figure, polarizers are respectively arranged on the outer surfaces of the counter substrate 521 and the color filter 500 (the side opposite to the liquid crystal layer 522), and on the outer side of the polarizer positioned on the counter substrate 521 side, a polarizer is arranged. There is a backlight.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of rectangular first electrodes 523 elongated in the horizontal direction in FIG. The first alignment film 524 is formed on the surface opposite to the color filter 500 side.

On the other hand, on the surface of the counter substrate 521 facing the color filter 500, a plurality of rectangular second electrodes having a longitudinal direction in a direction perpendicular to the first electrode 523 of the color filter 500 are formed at predetermined intervals. 526 so as to cover such a surface of the second electrode 526 on the liquid crystal layer 522 side, a second alignment film 527 is formed. The first electrode 523 and the second electrode 526 are formed of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is an internal component for maintaining a constant thickness of the liquid crystal layer 522 . In addition, the sealing material 529 is used to prevent the liquid crystal composition in the liquid crystal layer 522 from leaking out. In addition, one end portion of the first electrode 523 is extended to the outside of the sealing material 529 as a pull-back wiring.

Therefore, the portion where the first electrode 523 intersects the second electrode 526 is a pixel, and such a portion that becomes a pixel is configured in such a manner that it is located in the colored layers 508R, 508G, and 508B of the color filter 500 .

In a normal manufacturing process, patterning of the first electrode 523 and coating of the first alignment film 524 are performed on the color filter 500 to fabricate the part on the side of the color filter 500, and in another way, On the other counter substrate 521 , the second electrode 526 is patterned and the second alignment film 527 is applied to form a part on the counter substrate 521 side. Then, a spacer 528 and a sealing material 529 are produced and incorporated in the part on the opposing substrate 521 side, and the part on the color filter 500 side is bonded in this state. Next, after the liquid crystal constituting the liquid crystal layer 522 is injected from the injection port of the sealing material 529, the injection port is closed. Then, two polarizers and a backlight are laminated.

In the droplet ejection device 1 according to the embodiment, for example, the above-mentioned spacer material (functional liquid) constituting the cell gap is applied, and the part on the side of the counter substrate 521 is bonded to the part on the side of the color filter 500 . The area surrounded by the sealing material 529 can be uniformly coated with liquid crystal (functional liquid). In addition, the above-described printing of the sealing material 529 can also be performed by the functional droplet discharge head 16 . Further, the application of the first and second alignment films 524 and 527 can also be performed by using the functional droplet discharge head 16 .

FIG. 24 is a cross-sectional view of main parts showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in this embodiment.

This liquid crystal device 530 is greatly different from the above-mentioned liquid crystal device 520 in that the color filter 500 is arranged on the lower side in the figure (opposite to the observer).

Such a liquid crystal device 530 is generally configured such that a liquid crystal layer 532 made of STN liquid crystal is sandwiched between a counter substrate 531 made of a color filter 500 and a glass substrate. In addition, although illustration is omitted, polarizing plates are disposed on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the side of the liquid crystal layer 532), a plurality of rectangular first electrodes 533 whose inward direction in the figure is the longitudinal direction are formed at predetermined intervals to cover the edges of the first electrodes 533. The first alignment film 534 is formed on the surface of the liquid crystal layer 532 side.

On the surface of the color filter 500 facing the counter substrate 531, a plurality of rectangular second electrodes 536 extending in a direction perpendicular to the first electrode 533 on the side of the color filter 500 are formed at predetermined intervals, The second alignment film 537 is formed to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing member 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside.

Then, like the above-mentioned liquid crystal device 520, the portion where the first electrode 523 and the second electrode 526 intersect is a pixel, and the coloring layers 508R, 508G, and 508B of the color filter 500 are located in such a portion as a pixel. , and constituted.

25 is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor thin film transistor) type liquid crystal device, which is a third example of a liquid crystal device constructed using a color filter 500 to which the present invention is applied.

Such a liquid crystal device 550 is a liquid crystal device in which the color filter 500 is arranged on the upper side (viewer's side) in the figure.

Such a liquid crystal device 550 generally consists of a color filter 500 , a counter substrate 551 facing such an arrangement, and a liquid crystal layer (not shown) sandwiched between them, and arranged on the color filter 500 . The polarizing plate 555 on the front side (observer side) and the polarizing plate (not shown) arranged on the lower surface side of the opposing substrate 551 are configured.

On the surface of the protective film 509 of the liquid crystal device 550 (the surface on the counter substrate 551 side), an electrode 556 for driving a liquid crystal is formed. This electrode 556 is made of an ITO transparent conductive material and serves as a full-surface electrode that covers the entire area where the pixel electrode 560 will be described later. In addition, an alignment film 557 is provided to cover the surface of the electrode 556 opposite to the pixel electrode 560 .

An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500 , and scanning lines 561 and signal lines 562 are formed on the insulating layer 558 so as to be perpendicular to each other. In addition, a pixel electrode 560 is formed in a region surrounded by these scanning lines 561 and signal lines 562 . In addition, in an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

In addition, in the portion surrounded by the scanning line 561 and the signal line 562 , a thin film transistor 563 including a source, a drain, a semiconductor, and a gate is assembled in a cutout portion of the pixel electrode 560 . In addition, it is configured such that the thin film transistor 563 is turned on and off by applying signals to the scanning line 561 and the signal line 562 , so that energization of the pixel electrode 560 can be controlled.

In addition, the liquid crystal devices 520, 530, and 550 of the above-mentioned examples are configured as a transmissive type, but they may also be liquid crystal devices with a reflective layer or a transflective liquid crystal with a reflective layer or a semi-transmissive reflective layer. device.

Next, FIG. 26 is a cross-sectional view of main parts of the display region of the organic EL device (hereinafter, simply referred to as display device 600 ).

Such a display device 600 is generally configured in a state where a circuit element portion 602 , a light emitting element portion 603 , and a cathode 604 are laminated on a substrate (W) 601 .

In such a display device 600, the light emitted from the light emitting element portion 603 to the substrate 601 side is emitted to the observer side through the circuit element portion 602 and the substrate 601, and is emitted from the light emitting element portion 603 to the side opposite to the substrate 601. The light is reflected by the cathode 604, passes through the circuit element portion 602 and the substrate 601, and is emitted toward the observer.

Between the circuit element portion 602 and the substrate 601, an underprotective film 606 made of a silicon oxide film is formed, and an island-shaped semiconductor made of polysilicon is formed on the underprotective film 606 (on the light emitting element portion 603 side). Film 607. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are respectively formed by implanting high-concentration cations. Also, the central portion where cations are not implanted becomes the channel region 607c.

In addition, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed on the circuit element portion 602, and at a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608, for example, A gate electrode 609 made of Al, Mo, Ta, Ti, W, or the like is formed. On such a gate electrode 609 and a gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. In addition, through the first and second interlayer insulating films 611a and 611b, there are formed contact holes 612a and 612b respectively communicating with the source region 607a and the drain region 607b of the semiconductor film 607 .

Furthermore, on the second interlayer insulating film 611b, a transparent pixel electrode 613 made of ITO or the like is patterned in a predetermined shape, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a.

In addition, a power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

In this manner, the driving thin film transistors 615 connected to the respective pixel electrodes 613 are formed in the circuit element portion 602 .

The above-mentioned light-emitting element portion 603 is generally composed of functional layers 617 stacked on each of the plurality of pixel electrodes 613 , and bank portions 618 provided between the pixel electrodes 613 and the functional layers 617 to partition the functional layers 617 .

These pixel electrodes 613, the functional layer 617, and the cathode 604 mounted on the functional layer 617 constitute a light emitting element. In addition, the pixel electrodes 613 form a substantially rectangular pattern in plan view, and bank portions 618 are formed between the respective pixel electrodes 613 .

The dam part 618 is, for example, an inorganic material dam layer 618a (first dam layer) formed of an inorganic material such as SiO, SiO ₂ , TiO ₂ , and an acrylic dam layer laminated on the inorganic material dam layer 618a. The cross-section formed by a resist having excellent heat resistance and solvent resistance such as resin or polyimide resin is constituted by a trapezoidal organic material bank layer 618b (second bank layer). Part of the bank layer 618 is formed in a state of being grounded on the peripheral edge of the pixel electrode 613 .

In addition, between the bank portions 618 , an opening portion 619 gradually expanding upward toward the pixel electrode 613 is formed.

The above-mentioned functional layer 617 is composed of a hole injection/transport layer 617a formed in a laminated state on the pixel electrode 613 in the opening 619 and a light emitting layer 617b formed on the hole injection/transport layer 617a. In addition, other functional layers having other functions may be formed adjacent to the light emitting layer 617b. For example, an electron transport layer can also be formed.

The hole injection/transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. Such a hole injection/transport layer 617a can be formed by spraying the first composition (functional liquid) containing the material of the hole injection/transport layer. Well-known materials can be used as the hole injection/transport layer material.

The luminescent layer 617b is formed by discharging a second composition (functional liquid) containing a luminescent layer forming material (luminescent material) that emits red (R), green (G), or blue (B) light. As the solvent (non-polar solvent) of the second composition, it is preferable to use a well-known material that is insoluble in the hole injection/transport layer 617a. By using such a non-polar solvent as the second composition of the light-emitting layer 617b, no further The hole injection/transport layer 617a is dissolved to form the light emitting layer 617b.

Furthermore, in the light-emitting layer 617b, holes injected from the hole injection/transport layer 617a and electrons injected from the cathode 604 are recombined in the light-emitting layer 617b to emit light.

The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603 , is paired with the pixel electrode portion 613 , and functions to flow current to the functional layer 617 . In addition, a sealing material (not shown) is disposed on the upper portion of the cathode 604 .

Next, the manufacturing process of the display device 600 described above will be described with reference to FIGS. 27 to 35 .

As shown in FIG. 27, such a display device 600 is formed through a bank forming step (S111), a surface treatment step (S112), a hole injection/transport layer forming step (S113), a light emitting layer forming step (S114), and Manufactured after setting the electrode forming step (S115) and the like. In addition, the manufacturing process is not limited to the illustrated process, and other processes may be removed or added as necessary.

First, as shown in FIG. 28 , in the bank forming step ( S111 ), an inorganic bank layer 618 a is formed on the second interlayer insulating film 611 b. Such an inorganic bank layer 618a is formed by forming an inorganic film at the formation position, and then patterning the inorganic film by photolithography or the like. At this time, the inorganic bank layer 618 a is formed in such a manner that a part overlaps with the edge of the pixel electrode 613 .

If the inorganic material bank layer 618a is already formed, as shown in FIG. 29, the organic material bank layer 618b is formed on the inorganic material bank layer 618a. This organic bank layer 618b is also formed by a patterning method such as photolithography in the same way as the inorganic bank layer 618a.

In this way, the dam portion 618 is formed. And accordingly, openings 619 that open upward to the pixel electrodes 613 are formed between the bank portions 618 . The opening 619 defines a pixel area.

In the surface treatment step (S112), hydrophilic treatment and hydrophobic treatment are performed. The regions to be subjected to hydrophilic treatment are the first lamination portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613, and these regions are, for example, treated with oxygen as a plasma treatment gas to make the surface hydrophilic. sex. This plasma treatment also serves to clean the ITO serving as the pixel electrode 613 and the like.

In addition, the lyophobic treatment is carried out on the wall surface 618s of the organic matter bank layer 618b and the upper surface 618t of the organic matter bank layer 618b. liquid).

By performing such surface treatment, when the functional layer 617 is formed by the functional droplet discharge head 16 , the functional liquid droplets can be more reliably sprayed on the display area, and the functional liquid droplets sprayed on the display area can be prevented from overflowing from the opening 619 .

Then, through the above steps, the display device base 600A is obtained. Such a display device substrate 600A is placed on the mounting table 41 of the droplet ejection device 1 shown in FIG. 4, and the following hole injection/transport layer forming step (S113) and light emitting layer forming step (S114) are performed.

As shown in FIG. 30, in the hole injection/transport layer forming step (S113), the first layer containing the hole injection/transport layer forming material is discharged from the functional droplet discharge head 16 into each opening 619 serving as the display area. combination. Then, as shown in FIG. 31 , drying treatment and heat treatment are performed to evaporate the polar solvent contained in the first composition to form a hole injection/transport layer 617 a on the pixel electrode (electrode surface 613 a ) 613 .

Next, the light emitting layer forming step ( S114 ) will be described. In such a light-emitting layer forming step, as described above, in order to prevent the re-dissolution of the hole injection/transport layer 617a, as the second composition used in the formation of the light-emitting layer, a composition insoluble to the hole injection/transport layer 617a can be used. non-polar solvents.

However, on the other hand, the hole injection/transport layer 617a has a low affinity for non-polar solvents, so even if the second composition containing the non-polar solvent is sprayed on the hole injection/transport layer 617a, there are voids. There is a risk that the hole injection/transport layer 617a cannot be in close contact with the light-emitting layer 617b or that the light-emitting layer 617b cannot be uniformly coated.

Therefore, in order to increase the affinity of the surface of the hole injection/transport layer 617a to the nonpolar solvent and the material for forming the light emitting layer, it is preferable to perform a surface treatment (surface modification treatment) before forming the light emitting layer. This surface treatment is performed by applying a surface modifying material having the same solvent as the second composition used in forming the light emitting layer or a similar solvent to the hole injecting/transporting layer 617a, followed by drying.

By performing such a treatment, the surface of the hole injecting/transporting layer 617a becomes easily soluble in a nonpolar solvent, and in the subsequent process, the second composition containing a light-emitting layer-forming material can be uniformly applied to the holes. Injection/delivery layer 617a.

Next, as shown in FIG. 32, the second composition containing the light-emitting layer forming material corresponding to any of the colors (blue (B) in the example of FIG. Part 619) into the prescribed amount. The second composition implanted in the pixel region diffuses on the hole injection/transport layer 617 a and fills the opening 619 . In addition, even if the second composition is sprayed on the upper surface 618t of the bank part 618 away from the pixel area, because the upper surface 618t is subjected to the liquid-repellent treatment as described above, the second composition is easy to spray. Roll into the opening 619.

Thereafter, by performing a drying process, etc., the discharged second composition is dried to evaporate the non-polar solvent contained in the second composition, and as shown in FIG. Light emitting layer 617b.

Similarly, using the functional droplet ejection head 16, as shown in FIG. 34, the same steps as those corresponding to the above-mentioned blue (B) light-emitting layer 617b are sequentially performed to form other color (red (R) and green (G)) phases. The corresponding light emitting layer 617b. In addition, the formation order of the light emitting layer 617b is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the material for forming the light emitting layer. In addition, as an arrangement pattern of the three colors of R·G·B, there are band arrangement, mosaic arrangement, delta arrangement and the like.

As described above, on the pixel electrode 613, the functional layer 617, that is, the hole injection/transport layer 617a and the light emitting layer 617b are formed. Then, it transfers to a counter electrode forming process (S115).

In the counter electrode forming step (S115), as shown in FIG. 35, the cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by sputtering, sputtering, or CVD. . Such a cathode 604 is formed, for example, by laminating a calcium layer and an aluminum layer in this embodiment.

On the upper surface of the cathode 604, an Al film, an Ag film, and a protective layer of SiO ₂ , SiN, etc. for preventing oxidation are appropriately provided as electrodes.

In this manner, after the cathode 604 is formed, the display device 600 is obtained by performing other processing such as sealing treatment or wiring treatment to seal the upper portion of the cathode 604 with a sealing member.

Next, FIG. 36 is an exploded perspective view of main parts of a plasma display device (PDP device: hereinafter simply referred to as display device 700). In addition, in FIG. 36, the display device 700 is shown with a part removed.

Such a display device 700 generally includes a first substrate 701 , a second substrate 702 arranged to face each other, and a discharge display portion 703 formed therebetween. The discharge display unit 703 is composed of a plurality of discharge cells 705 . Among the plurality of discharge cells 705, three discharge cells 705 of red discharge cell 705R, green discharge cell 705G, and blue discharge cell 705B are arranged as a group to constitute one pixel.

On the upper surface of the first substrate 701 , address electrodes 706 are formed in stripes at predetermined intervals, and a dielectric layer 707 is formed to cover the address electrodes 706 and the upper surface of the first substrate 701 . On the dielectric layer 707 , partition walls 708 are erected at positions between the address electrodes 706 and along the form of the address electrodes 706 . Such barrier ribs 708 include barrier ribs extending on both sides in the width direction of the address electrodes 706 as shown in the figure, and barrier ribs (not shown) extending perpendicular to the address electrodes 706 .

Then, the regions partitioned by such partition walls 708 become discharge cells 705 .

In the discharge cells 705, phosphors 709 are arranged. Phosphor 709 emits fluorescence of any color of red (R), green (G), and blue (B). Red phosphor 709R is arranged at the bottom of red discharge chamber 705R, and red phosphor 709R is arranged at the bottom of green discharge chamber 705G. There is a green phosphor 709G, and a blue phosphor 709B is arranged at the bottom of the blue discharge chamber 705B.

On the lower surface in the figure of the second substrate 702 , a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction perpendicular to the address electrodes 706 . And, covering these forms, a protective film 713 made of a dielectric layer 712 and MgO or the like is formed.

The first substrate 701 and the second substrate 702 are in a state where the address electrodes 706 and the display electrodes 711 are perpendicular to each other, and are bonded facing each other. In addition, the above-mentioned address electrodes 706 and display electrodes 711 are connected to an AC power supply (not shown).

Then, by energizing the respective electrodes 706 and 711, the phosphor 709 is excited to emit light in the discharge display portion 703, enabling color display.

In this embodiment, the above-mentioned address electrodes 706, display electrodes 711, and phosphors 709 can be formed by using the droplet ejection device 1 shown in FIG. Next, the steps of forming the address electrodes 706 on the first substrate 701 will be illustrated.

In this case, the first substrate 701 is placed on the mounting stage 41 of the liquid droplet ejection device 1, and the following steps are performed.

First, a liquid material (functional liquid) containing a material for forming conductive film wiring is discharged as functional liquid droplets by the functional liquid droplet discharge head 16 onto the address electrode forming region. This liquid material is used as a material for forming conductive film wiring, and is a material in which conductive fine particles such as metal are dispersed in a dispersion medium. Metal fine particles or conductive polymers containing gold, silver, copper, palladium, or nickel can be used as such conductive fine particles.

After replenishment of the liquid material in all address electrode forming regions to be replenished is completed, the discharged liquid material is dried to evaporate the dispersion medium contained in the liquid material, and the address electrodes 706 can be formed.

However, although the formation of the address electrodes 706 was exemplified above, the above-mentioned display electrodes 711 and phosphors 709 may also be formed through the above-mentioned respective steps.

When forming the display electrodes 711, as in the case of forming the address electrodes 706, a liquid material (functional liquid) containing a conductive film wiring forming material is sprayed as functional droplets on the display electrode forming area.

In addition, in the case of forming the phosphor 709, the liquid material (functional liquid) containing the fluorescent material corresponding to each color (R, G, B) is ejected from the functional droplet discharge head 16 as a droplet, and is sprayed on the corresponding surface. Color discharge chamber 705.

Next, FIG. 37 is a cross-sectional view of main parts of an electron emitting device (also referred to as an FED device or an SED device, hereinafter simply referred to as a display device 800). In addition, in FIG. 37, the display device 800 is shown by taking part of it as a cross section.

Such a display device 800 generally includes a first substrate 801 , a second substrate 802 arranged to face each other, and an electric field emitting display portion 803 formed therebetween. The electric field emission display portion 803 is composed of a plurality of electric field emission portions 805 arranged in a matrix.

On the upper surface of the first substrate 801, the first element electrode 806a and the second element electrode 806b constituting the cathode electrode 806 are formed perpendicularly to each other. In addition, a conductive film 807 in which a gap 808 is formed is formed in a portion defined by the first element electrode 806a and the second element electrode 806b. That is, the plurality of electric field emitting portions 805 are constituted by the first element electrode 806 a, the second element electrode 806 b, and the conductive film 807 . The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after the conductive film 807 is formed.

An anode electrode 809 facing the cathode electrode 806 is formed on the lower surface of the second substrate 802 . On the lower surface of the anode electrode 809 , grid-like dams 811 are formed, and phosphors 813 are arranged corresponding to the electric field emitting portions 805 in the downward openings 812 surrounded by the dams 811 . Phosphor 813 is a member that emits fluorescence of any one of red (R), green (G), and blue (B), and red phosphor 813R and green phosphor 813G are arranged in each opening 812 in the above-mentioned predetermined pattern. and blue phosphor 813B.

In addition, the first substrate 801 and the second substrate 802 configured in this way are bonded with a small gap. In such a display device 800, electrons flying out from the first element electrode 806a or the second element electrode 806b as the cathode through the conductive film (gap 808) 807 collide with the fluorescent light formed on the anode electrode 809 as the anode. The body 813 is excited to emit light, and color display becomes possible.

In this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed by using the droplet discharge device 1. The device 1 can form phosphors 813R, 813G, and 813B of respective colors.

The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the plan view shape shown in FIG. 38A. When forming these films, as shown in FIG. 38B, the first element electrode 806a, After the part of the second element electrode 806b and the conductive film 807, the bank portion BB is formed (photolithography). Next, the first element electrode 806a and the second element electrode 806b are formed in the groove portion formed by the bank portion BB (using the inkjet method of the droplet ejection device 1), and the solvent is dried to form a film. , the conductive film 807 is formed (inkjet method using the droplet discharge device 1). After the conductive film 807 is formed, the bank portion BB is removed (polished and peeled off), and the process proceeds to the above-mentioned forming method. Also, as in the case of the organic EL device described above, it is preferable to perform a lyophilic treatment on the first substrate 801 and the second substrate 802 or a lyophobic treatment on the bank portions 811 and BB.

By using the method of the above-mentioned droplet ejection device 1 in the manufacture of various electro-optical devices (displays), it becomes possible to efficiently manufacture various electro-optical devices.

Claims (12)

1, a kind of droplet ejection apparatus, be to constituting the substrate of a plurality of pixel regions, the not a plurality of functional liquid droplet ejection heads of color that one side relatively moves and introduces multiple color functional liquid respectively, one side is according to the color matching pattern of many colors, described a plurality of pixel regions are being sprayed function liquid droplet and the droplet ejection apparatus of the processing of drawing, it is characterized in that, comprising:

The not a plurality of functional liquid droplet ejection heads of described color are loaded in a plurality of frame parts on the vehicle frame;

The X-axis workbench that is loaded on the described substrate and described substrate is moved to the X-direction that becomes main scanning direction;

Described a plurality of frame part, to the mobile separately Y-axis workbench of Y direction;

Control the controlling organization of described each functional liquid droplet ejection head, described X-axis workbench and described Y-axis workbench, wherein

The not a plurality of functional liquid droplet ejection heads of the described color of described each frame part are configured to, and make respectively by the not a plurality of part drawing line of the color that a plurality of nozzle constituted, and order is according to the rules embarked on journey and constituted one in Y direction and cuts apart the drawing line;

Described controlling organization, the X-direction that repeats to be synchronized with described substrate moves and drives the main scanning of described each functional liquid droplet ejection head and the subscan of described each functional liquid droplet ejection head roughly being moved described part drawing line deal to Y direction by described frame part, handles to carry out described drawing.

2, droplet ejection apparatus according to claim 1 is characterized in that: described each frame part is the described functional liquid droplet ejection head that a plurality of each color are installed respectively on described;

The not a plurality of functional liquid droplet ejection heads of the described color of described each frame part are configured to make respectively by the not a plurality of part drawing line of the color that a plurality of nozzle constituted, and order according to the rules repeats to embark on journey and constitutes one in Y direction and cuts apart the drawing line.

3, droplet ejection apparatus according to claim 1, it is characterized in that: described controlling organization, the function liquid droplet that is sprayed in two described pixel regions of Y direction adjacency is under the situation of different colours, carries out the ejection of the function liquid droplet of described two pixel regions by mutual different described main scanning.

4, droplet ejection apparatus according to claim 1 is characterized in that: described color matching pattern is banded any arrangement in arrangement and the rounded projections arranged of arranging, inlay.

5, droplet ejection apparatus according to claim 1 is characterized in that: the drive source of described Y-axis workbench is made of linear motor.

6, droplet ejection apparatus according to claim 1 is characterized in that: on described each frame part, be mounted with the not a plurality of functional liquid case of color of supplying with a plurality of color functional liquids to the not a plurality of functional liquid droplet ejection heads of described color respectively.

7, droplet ejection apparatus according to claim 1 is characterized in that: also possess and be configured in described X-axis workbench and when described main scanning, accept from the flushing parts of the flushing of described each nozzle of described functional liquid droplet ejection head;

Described flushing parts, the shower nozzle that is covered corresponding to the described overall function droplet discharging head that is made described a plurality of frame parts by described subscan on Y direction ejection coverage forms.

8, droplet ejection apparatus according to claim 1 is characterized in that: by on the motion track of the described frame part of described Y-axis workbench, constitute the maintenance field from the position that described X-axis workbench departs to a side the outside;

Also possess in described maintenance field,, carry out the maintenance establishment of function recovery process described a plurality of nozzles of described each functional liquid droplet ejection head;

Described controlling organization, the functional liquid droplet ejection head that does not drive in the described main scanning of any one, till described main scanning next time during in, near described maintenance establishment and carry out function recovery process.

9, droplet ejection apparatus according to claim 1 is characterized in that: by on the motion track of the described frame part of described Y-axis workbench, from the position that described X-axis workbench departs to two outsides, constitute a pair of maintenance field;

Also possess in described maintenance field,, carry out the maintenance establishment of function recovery process described a plurality of nozzles of described each functional liquid droplet ejection head.

10, a kind of manufacture method of electro-optical device is characterized in that: utilize the described droplet ejection apparatus of claim 1 to 9, form the one-tenth membranous part by function liquid droplet on described substrate.

11, a kind of electro-optical device is characterized in that: utilize the described droplet ejection apparatus of claim 1 to 9, form the one-tenth membranous part by function liquid droplet on described substrate.

12, a kind of electronic instrument is characterized in that: utilize the electro-optical device that the manufacture method of the described electro-optical device of claim 10 makes or loaded the described electro-optical device of claim 11.

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