CN1690852A - Glass composition for silver paste, photosensitive silver paste using same, electrode pattern and plasma display panel - Google Patents
Glass composition for silver paste, photosensitive silver paste using same, electrode pattern and plasma display panel Download PDFInfo
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- C—CHEMISTRY; METALLURGY
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- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
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- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C8/00—Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
- C03C8/02—Frit compositions, i.e. in a powdered or comminuted form
- C03C8/04—Frit compositions, i.e. in a powdered or comminuted form containing zinc
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- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
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Abstract
Description
技术领域technical field
本发明涉及一种银浆用玻璃组合物和使用该玻璃组合物的感光性银浆,具体地说,涉及一种适用于作为电极材料的银浆用玻璃组合物和使用该玻璃组合物形成的感光性银浆,其中电极材料是通过烧制利用丝网印刷法、光刻法中形成的图形涂膜得到的。The invention relates to a glass composition for silver paste and a photosensitive silver paste using the glass composition, in particular to a glass composition for silver paste suitable as an electrode material and a glass composition using the glass composition. Photosensitive silver paste, in which the electrode material is obtained by firing a graphic coating film formed by screen printing or photolithography.
背景技术Background technique
以前,在等离子体显示板和CCD传感器、图象传感器等部件中,非碱性玻璃和其它各种玻璃基板上的电极一直是通过蒸镀法形成的。然而,这种蒸镀法,是在真空容器内贮存电极形成材料而蒸镀金属膜,存在装置大,价格高,而且部件出入麻烦、引入真空需要时间等操作性差的缺点。而且,采用蒸镀法电极难以厚膜化,线路不适合低电阻化。Conventionally, electrodes on non-alkaline glass and other various glass substrates have been formed by vapor deposition in components such as plasma display panels, CCD sensors, and image sensors. However, this vapor deposition method deposits the electrode forming material in a vacuum container and deposits the metal film, which has the disadvantages of large equipment, high cost, troublesome parts in and out, and poor operability, such as time required for vacuum introduction. In addition, it is difficult to increase the thickness of the electrode by the vapor deposition method, and it is not suitable for the low resistance of the circuit.
与此对应地,作为在基板上形成电极图形层的其它方法,已提出了用丝网印刷等印刷技术使在非感光性有机粘合剂中混合导电粉末形成的浆料,例如使干燥型和热固性导电性浆于基板上图形化的方法,以及通过光刻法用感光性导电浆形成导电体图形的方法(例如,参照专利文献1、2)。所述技术的优点是不经过复杂工序就能形成导电体图形,但是在用于形成电极线路间空隙小的高精度图形的情况下,诱发迁移,不能得到长期可靠性。Correspondingly, as other methods of forming an electrode pattern layer on a substrate, printing techniques such as screen printing have been proposed to mix conductive powder into a non-photosensitive organic binder to form a paste, such as a dry type and A method of patterning a thermosetting conductive paste on a substrate, and a method of forming a conductor pattern with a photosensitive conductive paste by photolithography (for example, refer to Patent Documents 1 and 2). The advantage of this technique is that it can form conductor patterns without going through complicated steps. However, when it is used to form high-precision patterns with small gaps between electrode lines, migration is induced and long-term reliability cannot be obtained.
专利文献1:特开平10-269848号公报Patent Document 1: Japanese Unexamined Patent Publication No. H10-269848
专利文献2:特开平11-224531号公报Patent Document 2: Japanese Unexamined Patent Publication No. 11-224531
发明内容Contents of the invention
本发明要解决的问题The problem to be solved by the present invention
本发明是鉴于上述现有技术所具有的问题开发的,其主要目的是开发一种在用于高精度的导电体图形的情况下也能够抑制电极迁移的诱发的导电性浆用玻璃组合物,通过使用用该玻璃组合物的感光性银浆,可以提供迁移性低且长期可靠性优异的高精度的导电体图形。The present invention has been developed in view of the above-mentioned problems of the prior art, and its main purpose is to develop a glass composition for conductive paste that can suppress induction of electrode migration even when used in a high-precision conductor pattern, By using the photosensitive silver paste using this glass composition, it is possible to provide a highly accurate conductor pattern with low mobility and excellent long-term reliability.
解决该问题的方法The solution to this problem
本发明人等为了实现上述目的而进行了深入研究,结果发现用导电性浆形成的高精度图形的迁移的诱发与导电性浆中含有的低熔点玻璃粉的组成有重要关系。而且,通过将其组成比限定在特定范围内,发现可以不经过复杂的工序而容易地得到低迁移性的导电性和高精度图形形成性优异的导电体图形,因此完成了本发明。The inventors of the present invention conducted intensive studies to achieve the above objects, and found that the induction of migration of high-precision patterns formed with conductive paste has an important relationship with the composition of low-melting glass frit contained in the conductive paste. Furthermore, by limiting the composition ratio within a specific range, it was found that a conductor pattern with low mobility conductivity and excellent high-precision pattern formability can be easily obtained without going through complicated steps, and thus completed the present invention.
即,根据本发明,提供了一种银浆用玻璃组合物,该组合物是以硼和二氧化硅作为必须成分,并且硼以B2O3换算在玻璃组合物中的含量小于等于10重量%,其特征在于:其组成比以氧化物换算满足下式(I)或(II)That is, according to the present invention, there is provided a glass composition for silver paste, which composition contains boron and silicon dioxide as essential components, and the content of boron in the glass composition in terms of B 2 O 3 is less than or equal to 10 wt. %, characterized in that: its composition ratio satisfies the following formula (I) or (II) in terms of oxides
B2O3重量%≤SiO2重量% (I)B 2 O 3 wt% ≤ SiO 2 wt% (I)
B2O3重量%+ZnO重量%≤SiO2重量% (II)。B 2 O 3 % by weight + ZnO by weight ≦ SiO 2 % by weight (II).
在本发明的一个实施方式中,银浆用玻璃组合物中的ZnO含量优选小于等于12重量%。In one embodiment of the present invention, the ZnO content in the glass composition for silver paste is preferably less than or equal to 12% by weight.
在本发明的一个实施方式中,银浆用玻璃组合物中的SiO2含量优选是8-30重量%。In one embodiment of the present invention, the SiO 2 content in the glass composition for silver paste is preferably 8-30% by weight.
而且,根据本发明,提供了一种感光性银浆,该银浆含有银粉、感光性有机成分和上述玻璃组合物,其中相对100重量份的银粉,该玻璃组合物的含量在2-15重量份的范围内。And, according to the present invention, a kind of photosensitive silver paste is provided, and this silver paste contains silver powder, photosensitive organic component and above-mentioned glass composition, wherein relative to the silver powder of 100 weight parts, the content of this glass composition is 2-15 weight parts within the range of parts.
另外,根据本发明,提供了一种电极图形,它是将前述感光性银浆烧制而成的。In addition, according to the present invention, an electrode pattern is provided, which is formed by firing the aforementioned photosensitive silver paste.
另外,根据本发明,提供了一种等离子体显示板,它使用前述感光性银浆形成电极。Also, according to the present invention, there is provided a plasma display panel using the aforementioned photosensitive silver paste to form electrodes.
发明效果Invention effect
根据本发明,在用于高精度电极图形的情况下也可以提供迁移特性(迁移抑制效果)优异的感光性银浆。因此,本发明的银浆可以有效地用于等离子体显示器。According to the present invention, it is also possible to provide a photosensitive silver paste excellent in migration characteristics (migration suppression effect) when used for high-precision electrode patterns. Therefore, the silver paste of the present invention can be effectively used for plasma displays.
具体实施方式Detailed ways
作为在玻璃基板上形成的电极用导电性浆,为了优选在空气环境下,在620℃以下的温度下烧制得到优异的导电性,导电粉末的选择是很重要的,其中常用贵金属中不易受氧化影响的价格比较便宜的银粉。通过使用丝网印刷法和光刻法,尽管可以形成像线路/间隔=40/40(μm)左右的图案,但是以前在这样高精度的图形中所用的银浆会发生迁移的问题,因此存在如上所述的高精度化限制。As a conductive paste for electrodes formed on a glass substrate, in order to obtain excellent conductivity by firing at a temperature below 620°C in an air environment, the selection of conductive powder is very important, and the commonly used noble metals are not easily susceptible Oxidation affects the price of cheaper silver powder. By using the screen printing method and the photolithography method, although it is possible to form a pattern like a line/space = 40/40 (μm), there is a problem that the silver paste used in such a high-precision pattern will migrate, so there is a problem. High precision limit as mentioned above.
在银浆中使用的低熔点玻璃粉,已知其软化点(下面称之为“SP”值)和添加量对银浆等导电性浆的密合性和电阻值的影响非常大,本发明人等从低迁移化的角度对低熔点玻璃粉进行了深入研究,结果证实下述3种成分对迁移的抑制的影响较大。即,增加SiO2组成比(重量份)可以有效地抑制迁移,另一方面增加B2O3和ZnO的组成比使得迁移显著较差。而且,本发明人等通过测定这些成分的组成比,结果发现满足下式(I)或(II)的组成比的迁移特性最好,因此完成了本发明。The low-melting-point glass powder used in the silver paste, known its softening point (hereinafter referred to as "SP" value) and the amount added have a very large impact on the adhesion and resistance value of conductive pastes such as silver paste, the present invention et al. conducted in-depth research on low-melting point glass powder from the perspective of low migration, and as a result, it was confirmed that the following three components have a great influence on the suppression of migration. That is, increasing the composition ratio (parts by weight) of SiO 2 can effectively suppress the migration, while increasing the composition ratio of B 2 O 3 and ZnO makes the migration significantly worse. Furthermore, the inventors of the present invention have found that the migration characteristics are the best when the composition ratio of these components is satisfied by measuring the composition ratio of these components, and thus completed the present invention.
B2O3重量%≤SiO2重量% (I)B 2 O 3 wt% ≤ SiO 2 wt% (I)
B2O3重量%+ZnO重量%≤SiO2重量% (II)B 2 O 3wt %+ZnOwt%≤SiO 2wt % (II)
其中,B2O3小于等于10重量%。Among them, B 2 O 3 is less than or equal to 10% by weight.
以下详细描述本发明的银浆用玻璃组合物、使用该玻璃组合物的感光性银浆以及电极图形。The glass composition for silver paste of the present invention, the photosensitive silver paste using the glass composition, and the electrode pattern are described in detail below.
本发明的银浆用玻璃组合物,以硼和二氧化硅作为必须成分,并且特征在于其组成比以氧化物换算满足下式(I)或(II)。The glass composition for silver paste of the present invention contains boron and silicon dioxide as essential components, and its composition ratio satisfies the following formula (I) or (II) in terms of oxides.
B2O3重量%≤SiO2重量% (I)B 2 O 3 wt% ≤ SiO 2 wt% (I)
B2O3重量%+ZnO重量%≤SiO2重量% (II)B 2 O 3wt %+ZnOwt%≤SiO 2wt % (II)
SiO2成分具有抑制银浆迁移的效果,其含量没有特别的限制,只要满足式(I)或(II),优选在8-30重量%的范围内混合。不足8重量%时,迁移特性降低,另一方面超过30重量%时软化点太高,例如存在在小于等于620℃的温度下在玻璃基板上烧结时困难的情形。The SiO2 component has the effect of inhibiting the migration of silver paste, and its content is not particularly limited, as long as it satisfies the formula (I) or (II), it is preferably mixed in the range of 8-30% by weight. If it is less than 8% by weight, the migration characteristics will be lowered. On the other hand, if it exceeds 30% by weight, the softening point will be too high, for example, it may be difficult to sinter on a glass substrate at a temperature of 620° C. or lower.
B2O3和ZnO,是增加其含量使得迁移特性变差的成分,其含量必需满足式(I)或(II)。B 2 O 3 and ZnO, which are components whose content is increased to deteriorate migration characteristics, must satisfy the formula (I) or (II).
为了降低玻璃组合物的软化点,使用B2O3作为本发明的必须成分。本发明的玻璃组合物的优选软化点是400-590℃,为了使软化点在该范围内,优选调整B2O3的添加量。但是,由于B2O3含量超过10重量%时迁移特性的降低非常大,因此其含量不能超过10重量%。B2O3的优选含量是1-8重量%,更优选2-6重量%以下。In order to lower the softening point of the glass composition, B 2 O 3 is used as an essential component of the present invention. The preferable softening point of the glass composition of this invention is 400-590 degreeC, and it is preferable to adjust the addition amount of B2O3 in order to make a softening point fall in this range. However, since the reduction in migration characteristics is very large when the B2O3 content exceeds 10% by weight, its content cannot exceed 10% by weight. The preferred content of B 2 O 3 is 1-8% by weight, more preferably 2-6% by weight or less.
ZnO不是必须成分,但是是上述通式(II)的构成要素,在含有它的情况下必需满足该式。而且,其含量理想地小于等于12重量%。其理由在于其含量超过12重量%时玻璃结晶化,因此变得不稳定,而且在高温下烧制时变黄,同时迁移特性降低。ZnO is not an essential component, but is a constituent element of the above-mentioned general formula (II), and when it is contained, this formula must be satisfied. Also, its content is desirably equal to or less than 12% by weight. The reason is that when the content exceeds 12% by weight, the glass becomes unstable due to crystallization, and also turns yellow when fired at a high temperature, and the migration characteristics decrease.
上述本发明的玻璃组合物,可以是铅类或铋类玻璃组合物,以Pb2O3或Bi2O3换算各自优选以40-90重量%的范围混合。不足40重量%时,将银浆在玻璃基板上烧结时导体膜对基板的粘合强度不足,另一方面当超过90重量%时,玻璃粉的软化点降低太大,浆的脱粘合剂性变差,因此导体膜的烧结性降低,而且存在与基板的粘合强度降低的情形。作为银浆用材料使用的本发明的玻璃组合物,从银浆的密合性和电阻值的角度,其优选的软化点在400-590℃,而且相对100重量份浆中的银粉,银浆中其优选的混合比是2-15重量份。The above-mentioned glass composition of the present invention may be a lead-based or bismuth-based glass composition, and each is preferably mixed in a range of 40 to 90% by weight in terms of Pb 2 O 3 or Bi 2 O 3 . When it is less than 40% by weight, the bonding strength of the conductive film to the substrate is insufficient when the silver paste is sintered on the glass substrate. As a result, the sinterability of the conductor film is lowered, and the bonding strength with the substrate may be lowered. The glass composition of the present invention used as the material for silver paste has a preferred softening point of 400-590° C. from the viewpoint of the adhesion and resistance of the silver paste, and the silver powder in 100 parts by weight of the paste is less than the silver paste. Among them, the preferred mixing ratio is 2 to 15 parts by weight.
本发明的玻璃组合物,还可以含有BaO、Al2O3,优选的含量是BaO是0-20重量%,Al2O3是0-5重量%,更优选是0.5-2.5重量%。如果BaO的含量超过20重量%,则玻璃组合物的膨胀系数太大,因此不是优选的,而且Al2O3含量超过5重量%时,玻璃组合物的软化点变高,银浆在玻璃基板上烧结时,导体膜对基板的粘合强度不足,因此不是优选的。The glass composition of the present invention may also contain BaO and Al 2 O 3 . The preferred content is 0-20% by weight of BaO and 0-5% by weight of Al 2 O 3 , more preferably 0.5-2.5% by weight. If the content of BaO exceeds 20% by weight, the expansion coefficient of the glass composition is too large, so it is not preferred, and when the Al2O3 content exceeds 5% by weight, the softening point of the glass composition becomes high, and the silver paste is formed on the glass substrate. In the case of over-sintering, the adhesive strength of the conductor film to the substrate is insufficient, so it is not preferable.
而且,本发明人等通过证实可知,除了上述成分之外,Na2O、Li2O、K2O等碱金属氧化物也与高精度图形的迁移的诱发有关。因此优选本发明的玻璃组合物中不含碱金属氧化物,在含有的情况下优选其含量较低。而且,碱性成分会与银浆中的银粉反应,玻璃基板变黄,因此从抑制变黄的角度也优选不含它们。Furthermore, the inventors of the present invention have found that, in addition to the above-mentioned components, alkali metal oxides such as Na 2 O, Li 2 O, and K 2 O are also involved in inducing migration of high-precision patterns. It is therefore preferred that alkali metal oxides are absent from the glass composition of the invention, and where they are present, they are preferably contained in relatively low amounts. Moreover, since an alkaline component will react with the silver powder in a silver paste, and a glass substrate will turn yellow, it is preferable not to contain them also from a viewpoint of suppressing yellowing.
作为本发明的玻璃组合物的粉末粒径,从清晰度的角度,使用微型轨道等激光衍射散射式粒度分布测定装置或利用激光多普勒法的粒度分布测定装置测定的平均粒径优选小于10μm,而且结晶性和非结晶性任一项都可以。The powder particle size of the glass composition of the present invention is preferably less than 10 μm in average particle size measured using a laser diffraction scattering particle size distribution measuring device such as a micro track or a particle size distribution measuring device using a laser Doppler method from the viewpoint of clarity. , and either crystallinity or non-crystallinity is acceptable.
本发明的玻璃组合物,与作为银浆用材料的银粉、有机成分一起使用,可以抑制用丝网印刷法和光刻法形成的高精度电极图形中迁移的发生。The glass composition of the present invention can suppress migration in high-precision electrode patterns formed by screen printing and photolithography when used together with silver powder as a material for silver paste and an organic component.
有机成分中含有有机粘合剂,该有机粘合剂起到作为在烧制之前粘合各成分的材料以及给组合物赋予光固性和显影性的材料的功能。该有机粘合剂,可以是感光性或非感光性的,是具有羧基的树脂。具体地说其自身可以使用具有乙烯基不饱和双键的含羧基感光性树脂和没有乙烯基不饱和双键的含羧基树脂之一。适合使用的树脂(低聚物和聚合物都可以)可以列举如下物质。The organic component contains an organic binder that functions as a material that binds the components before firing and a material that imparts photocurability and developability to the composition. The organic binder may be photosensitive or non-photosensitive, and is a resin having a carboxyl group. Specifically, one of a carboxyl group-containing photosensitive resin having an ethylenically unsaturated double bond and a carboxyl group-containing resin not having an ethylenically unsaturated double bond can be used by itself. Examples of suitable resins (both oligomers and polymers) are listed below.
通过(a)不饱和羧酸与(b)具有不饱和双键的化合物共聚合得到的含羧基树脂;A carboxyl-containing resin obtained by copolymerization of (a) an unsaturated carboxylic acid and (b) a compound having an unsaturated double bond;
在(a)不饱和羧酸与(b)具有不饱和双键的化合物的共聚物上,通过加成乙烯基不饱和基团作为侧基得到的含羧基的感光性树脂;A carboxyl-containing photosensitive resin obtained by adding an ethylenically unsaturated group as a side group to a copolymer of (a) an unsaturated carboxylic acid and (b) a compound having an unsaturated double bond;
在(c)具有环氧基和不饱和双键的化合物与(b)具有不饱和双键的化合物的共聚物上,使(a’)饱和或不饱和羧酸反应,在生成的二级羟基上使(d)多元酸酐反应得到的含羧基树脂;On the copolymer of (c) a compound having an epoxy group and an unsaturated double bond and (b) a compound having an unsaturated double bond, the (a') saturated or unsaturated carboxylic acid is reacted, and the resulting secondary hydroxyl The carboxyl-containing resin obtained by making (d) polybasic acid anhydride reaction;
在(e)具有不饱和双键的酸酐与(b)具有不饱和双键的化合物的共聚物上,使(f)具有羟基的化合物反应得到的含羧基树脂;On the copolymer of (e) an acid anhydride having an unsaturated double bond and (b) a compound having an unsaturated double bond, make (f) a carboxyl-containing resin obtained by reacting a compound having a hydroxyl group;
在(e)具有不饱和双键的酸酐与(b)具有不饱和双键的化合物的共聚物上,使(f’)具有羟基和不饱和双键的化合物反应得到的含羧基感光性树脂;On the copolymer of (e) an acid anhydride having an unsaturated double bond and (b) a compound having an unsaturated double bond, the carboxyl-containing photosensitive resin obtained by reacting (f') a compound having a hydroxyl group and an unsaturated double bond;
使(g)环氧化合物与(h)不饱和一元羧酸反应,在生成的二级羟基上使(d)多元酸酐反应得到的含羧基感光性树脂;Carboxyl group-containing photosensitive resin obtained by reacting (g) epoxy compound with (h) unsaturated monocarboxylic acid, and reacting (d) polybasic acid anhydride on the generated secondary hydroxyl group;
在(b)具有不饱和双键的化合物与(甲基)丙烯酸缩水甘油酯的共聚物的环氧基上,使(i)一个分子中有一个羧基并且没有乙烯基不饱和键的有机酸反应,在生成的二级羟基上使(d)多元酸酐反应得到含羧基树脂;On the epoxy group of a copolymer of (b) a compound having an unsaturated double bond and glycidyl (meth)acrylate, react (i) an organic acid having a carboxyl group in one molecule and having no ethylenically unsaturated bond , make (d) polybasic acid anhydride reaction obtain carboxyl-containing resin on the secondary hydroxyl group that generates;
在(j)含羟基聚合物上使(d)多元酸酐反应得到含羧基树脂;On the (j) hydroxyl-containing polymer, (d) polybasic acid anhydride is reacted to obtain carboxyl-containing resin;
在(j)含羟基聚合物上使(d)多元酸酐反应得到含羧基树脂,在该含羧基树脂上,再使(c)具有环氧基和不饱和双键的化合物反应得到含羧基的感光性树脂。On the (j) hydroxyl-containing polymer, (d) polybasic acid anhydride is reacted to obtain a carboxyl-containing resin, and on the carboxyl-containing resin, (c) is reacted with a compound having an epoxy group and an unsaturated double bond to obtain a carboxyl-containing photosensitive Sexual resin.
另外,也可以使用印刷型树脂作为有机成分,该树脂例如可以列举的有硝酸纤维素、乙基纤维素、羟基乙基纤维素等纤维素类树脂;聚丙烯酸丁酯、聚甲基丙烯酸酯等丙烯酸类树脂;丙烯酸类共聚物;聚乙烯醇;聚乙烯基丁缩醛等,它们可以单独使用或者可以两种以上混合使用。In addition, printing resins can also be used as organic components, such as cellulose resins such as nitrocellulose, ethyl cellulose, and hydroxyethyl cellulose; polybutyl acrylate, polymethacrylate, etc.; Acrylic resin; acrylic copolymer; polyvinyl alcohol; polyvinyl butyral, etc., which may be used alone or in combination of two or more.
如上所述的含有含羧基感光性树脂的感光性有机成分、以及含羧基树脂、或含印刷型树脂的非感光性有机成分,可以单独使用也可以混合使用,但是在任一情况下含有它们的有机粘合剂总共以组合物总量的5-50重量%的比例混合就可以。当这些树脂的混合量小于等于上述范围时,形成的涂膜中上述树脂的分布趋于不均匀,难以获得足够的光固化性和光固化深度,因此难以通过选择的曝光、显影来布图。另一方面,如果大于所述范围,烧制时易于产生图形皱缩和线宽收缩,因此不是优选的。The above-mentioned photosensitive organic components containing carboxyl group-containing photosensitive resins, and carboxyl group-containing resins or non-photosensitive organic components containing printing resins can be used alone or in combination, but in any case, the organic components containing them The binder may be mixed in a proportion of 5-50% by weight of the total composition. When the mixing amount of these resins is less than or equal to the above range, the distribution of the above resins in the formed coating film tends to be uneven, and it is difficult to obtain sufficient photocurability and photocurability depth, so it is difficult to pattern through selective exposure and development. On the other hand, if it exceeds the above range, pattern shrinkage and line width shrinkage tend to occur during firing, so it is not preferable.
而且,作为上述含羧基的感光性树脂和含羧基树脂,可以合适地使用各自重均分子量是1000-100000,更优选5000-70000并且酸价为30-250mgKOH/g的树脂,而且在为含羧基感光性树脂的情况下,可以合适地使用双键当量是350-2000,更优选400-1500的树脂。当上述树脂的分子量小于等于1000时,对显影时的薄膜的密合性有不利影响,另一方面,当高于100000时,易于产生显影不佳,因此不是优选的。另外,当酸价小于等于30mgKOH/g时,由于相对碱性水溶液的溶解性不充分,因此易于产生显影不佳,另一方面,当高于250mgKOH/g时,产生显影时薄膜的密合性差并且光固化部(曝光部)溶解,因此不是优选的。而且,当为含羧基的感光性树脂时,感光性树脂的双键当量小于350时,烧制时易于残留残渣,另一方面,当大于2000时,显影时的操作容限狭窄,而且在光固化时可能会需要高曝光量,所以不是优选的。Moreover, as the above-mentioned carboxyl group-containing photosensitive resin and carboxyl group-containing resin, resins each having a weight average molecular weight of 1,000-100,000, more preferably 5,000-70,000 and an acid value of 30-250 mgKOH/g can be suitably used, and the carboxyl group-containing In the case of a photosensitive resin, a resin having a double bond equivalent of 350-2000, more preferably 400-1500 can be suitably used. When the molecular weight of the resin is less than or equal to 1,000, the adhesion of the film during development is adversely affected. On the other hand, when it is higher than 100,000, poor development tends to occur, which is not preferable. In addition, when the acid value is less than or equal to 30 mgKOH/g, due to insufficient solubility in alkaline aqueous solution, poor development is likely to occur. On the other hand, when the acid value is higher than 250 mgKOH/g, poor adhesion of the film during development occurs. And since the photocured part (exposed part) melt|dissolves, it is not preferable. Moreover, when it is a carboxyl-containing photosensitive resin, when the double bond equivalent of the photosensitive resin is less than 350, residues tend to remain during firing; High exposure levels may be required for curing and are not preferred.
在本发明所述的含有玻璃组合物与银粉和感光性有机成分形成的感光性银浆中,为了促进组合物的光固化性和提高显影性,可以含有光聚合性单体。该光聚合性单体例如可以列举的有丙烯酸2-羟基乙酯、丙烯酸2-羟基丙酯、二甘醇二丙烯酸酯、三甘醇二丙烯酸酯、聚乙二醇二丙烯酸酯、聚氨酯二丙烯酸酯、三羟甲基丙烷三丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、三羟甲基丙烷环氧乙烷改性的三丙烯酸酯、三羟甲基丙烷环氧丙烷改性的三丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯以及与上述丙烯酸酯对应的各甲基丙烯酸酯类;邻苯二甲酸、己二酸、马来酸、衣康酸、琥珀酸、偏苯三酸、对苯二甲酸等多元酸与羟基(甲基)丙烯酸烷基酯的单-、二-、三-或之上的聚酯等,但是并不限于这些特定的物质,并且它们可以单独使用或者混合两种以上使用。这些光聚合性单体中,优选1分子中有2个以上丙烯酰基或甲基丙烯酰基的多官能单体。In the photosensitive silver paste formed by the glass composition, silver powder and photosensitive organic components according to the present invention, in order to promote the photocurability and developability of the composition, a photopolymerizable monomer may be included. Examples of the photopolymerizable monomer include 2-hydroxyethyl acrylate, 2-hydroxypropyl acrylate, diethylene glycol diacrylate, triethylene glycol diacrylate, polyethylene glycol diacrylate, polyurethane diacrylate ester, trimethylolpropane triacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, trimethylolpropane ethylene oxide modified triacrylate, trimethylolpropane propylene oxide modified triacrylate esters, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate and the respective methacrylates corresponding to the above acrylates; phthalic acid, adipic acid, maleic acid, itaconic acid, succinic acid, trimellitic acid Acids, polybasic acids such as terephthalic acid and mono-, di-, tri- or above polyesters of hydroxy (meth)acrylates, etc., but are not limited to these specific substances, and they can be used alone Or mix two or more. Among these photopolymerizable monomers, polyfunctional monomers having two or more acryloyl groups or methacryloyl groups in one molecule are preferable.
相对100重量份的前述有机粘合剂,该光聚合性单体的混合比适当地是20-100重量份。当光聚合性单体的混合量小于等于上述范围时,难以得到组合物的充分固化性,另一方面,当大大超过上述范围时,与薄膜内部相比,表层部过早光固化,因此容易产生固化色斑。The mixing ratio of the photopolymerizable monomer is suitably 20 to 100 parts by weight relative to 100 parts by weight of the aforementioned organic binder. When the mixing amount of the photopolymerizable monomer is equal to or less than the above-mentioned range, it is difficult to obtain sufficient curability of the composition. On the other hand, when it exceeds the above-mentioned range, the surface layer part is prematurely photocured compared with the inside of the film, so it is easy to Produces cured stains.
本发明的感光性银浆,含有光聚合引发剂作为引发光反应的成分。作为主要吸收紫外线产生自由基的光聚合引发剂的具体例子,可以举出的有苯偶姻、苯偶姻甲基醚、苯偶姻乙基醚、苯偶姻异丙基醚等苯偶姻和苯偶姻烷基醚类;苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮等苯乙酮类;2-甲基-1-[4-(甲硫基)苯基]-2-吗啉基丙烷-1-酮、2-苄基-2-二甲基氨基-1-(4-吗啉基苯基)-丁酮-1等氨基苯乙酮类;2-甲基蒽醌、2-乙基蒽醌、2-叔丁基蒽醌、1-氯蒽醌等蒽醌类;2,4-二甲基噻吨酮、2,4-二乙基噻吨酮、2-氯噻吨酮、2,4-二异丙基噻吨酮等噻吨酮类;苯乙酮二甲基缩酮、苄基二甲基缩酮等缩酮类;二苯酮等二苯酮类;或咕吨酮类;(2,6-二甲氧基苯甲酰基)-2,4,4-戊基氧化膦、二(2,4,6-三甲基苯甲酰基)-苯基氧化膦、2,4,6-三甲基苯甲酰基二苯基氧化膦、2,4,6-三甲基苯甲酰基苯基亚膦酸乙酯等氧化膦类;各种过氧化物类等,但是并不限于这些特定的物质,并且它们可以单独使用或者混合两种以上使用。The photosensitive silver paste of the present invention contains a photopolymerization initiator as a component for initiating a photoreaction. Specific examples of photopolymerization initiators that mainly absorb ultraviolet rays to generate free radicals include benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether. and benzoin alkyl ethers; acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1 -Acetophenones such as dichloroacetophenone; 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinopropan-1-one, 2-benzyl-2-di Methylamino-1-(4-morpholinophenyl)-butanone-1 and other aminoacetophenones; 2-methylanthraquinone, 2-ethylanthraquinone, 2-tert-butylanthraquinone, 1 -Anthraquinones such as chloroanthraquinone; 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropylthioxanthone, etc. Thioxanthones; ketals such as acetophenone dimethyl ketal and benzyl dimethyl ketal; benzophenones such as benzophenone; or xanthones; (2,6-dimethoxy Benzoyl)-2,4,4-pentylphosphine oxide, bis(2,4,6-trimethylbenzoyl)-phenylphosphine oxide, 2,4,6-trimethylbenzoyl di Phine oxides such as phenylphosphine oxide, ethyl 2,4,6-trimethylbenzoylphenylphosphinate; various peroxides, etc., but are not limited to these specific substances, and they may be used alone Use or mix two or more.
相对100重量份的前述有机粘合剂,这些光聚合引发剂在浆中的混合比,合适的是1-30重量份,优选为5-20重量份。当小于上述范围时,难以获得浆的充分光固化性,另一方面,当大大超过上述范围时,由于阻止了光透过,因此难以获得内部光固化性。The mixing ratio of these photopolymerization initiators in the slurry is suitably 1 to 30 parts by weight, preferably 5 to 20 parts by weight, relative to 100 parts by weight of the aforementioned organic binder. When it is less than the above range, it is difficult to obtain sufficient photocurability of the paste, and on the other hand, when it is greatly exceeded, it is difficult to obtain internal photocurability because light transmission is prevented.
而且,在需要更深的光固化深度的情况下,根据需要,可以将在可视区域引发自由基聚合的チバ·スペシャルテイ一·ケミカルズ公司制的イルガキュア784等双核茂钛(titanocene)类光聚合引发剂、隐色染料等作为固化助剂结合使用。Moreover, in the case where a deeper photocuring depth is required, if necessary, dinuclear titanocene (titanocene) photopolymerization initiators such as イルガキュュア 784 manufactured by Chiba Specialty Chemikarls Co., Ltd. that initiates radical polymerization in the visible region can be Agents, leuco dyes, etc. are used in combination as curing aids.
本发明的感光性银浆中所含的银粉,不受氧化的影响,在450-620℃下烧制使得浆具有优异的导电性,因此是本发明选择的导电粉末。作为颗粒的形状,可以使用球状、片状、枝状等各种形状,但是从光特性和分散性考虑,特别优选使用球状颗粒。使用微型轨道等激光衍射散射式粒度分布测定装置或利用激光多普勒法的粒度分布测定装置测定,银粉的平均粒径可以是0.5-5.0μm。平均粒径小于等于0.1μm时,光透过性差,难以描绘高精度图形,因此不是优选的。另一方面,平均粒径超过5μm时,难以得到线边的直线性,因此也不是优选的。比表面积可以合适地使用0.1-2.0m2/g。比表面积不足0.1m2/g时,保存时引起沉淀等问题,因此不是优选的,另一方面,超过2.0m2/g时,吸油量大,浆的流动性受损,因此也不是优选的。The silver powder contained in the photosensitive silver paste of the present invention is not affected by oxidation, and firing at 450-620° C. makes the paste have excellent conductivity, so it is the selected conductive powder in the present invention. As the particle shape, various shapes such as spherical shape, flake shape, and dendritic shape can be used, but spherical particles are particularly preferably used in view of optical characteristics and dispersibility. The average particle diameter of the silver powder may be 0.5-5.0 μm as measured by a laser diffraction scattering type particle size distribution measuring device such as a micro track or a particle size distribution measuring device using a laser Doppler method. When the average particle diameter is less than or equal to 0.1 μm, the light transmittance is poor and it is difficult to draw a high-precision pattern, so it is not preferable. On the other hand, when the average particle diameter exceeds 5 μm, it is difficult to obtain the linearity of the line edge, which is also not preferable. The specific surface area can be suitably used in the range of 0.1 to 2.0 m 2 /g. When the specific surface area is less than 0.1 m 2 /g, it is not preferable because problems such as sedimentation occur during storage. On the other hand, when the specific surface area exceeds 2.0 m 2 /g, the oil absorption is large and the fluidity of the slurry is impaired, so it is also not preferable. .
相对100重量份的感光性银浆,该银粉的混合比合适地是45-90重量份。导电性粉末的混合比小于等于上述范围时,使用这种浆形成的导电体图形中不能得到足够的导电性,另一方面,大于上述范围时,与基材的密合性差,因此也不是优选的。The mixing ratio of the silver powder is suitably 45-90 parts by weight relative to 100 parts by weight of the photosensitive silver paste. When the mixing ratio of the conductive powder is less than or equal to the above range, sufficient conductivity cannot be obtained in the conductor pattern formed using this slurry. On the other hand, if it exceeds the above range, the adhesion to the base material is poor, so it is not preferable. of.
另外,基于调整色调的目的,可以添加由含有Fe、Co、Cu、Cr、Mn、Al、Ru、Ni中的一种或多种作为主要成分的金属氧化物或复合金属氧化物构成的黑色颜料、四氧化三钴(Co3O4)、氧化钌、镧复合氧化物等黑色材料。In addition, for the purpose of adjusting the color tone, black pigments composed of metal oxides or composite metal oxides containing one or more of Fe, Co, Cu, Cr, Mn, Al, Ru, and Ni as main components can be added. , cobalt tetroxide (Co 3 O 4 ), ruthenium oxide, lanthanum composite oxide and other black materials.
而且,本发明的感光性银浆,根据需要,也可以混合用于保证保存稳定性的含有磷酸、磷酸酯、羧酸的化合物等酸性化合物,硅酮类、丙烯酸类等消泡、均化剂,用于调节流动性的触变性赋予剂,用于提高薄膜密合性的硅烷偶联剂等其它添加剂。而且,根据需要,也可以添加用于防止导电性金属粉氧化的公知且常用的氧化抑制剂、用于提高保存时的热稳定性的热聚合抑制剂、烧制时作为与基板的结合成分金属氧化物、硅氧化物、硼氧化物、低熔点玻璃等微粒。而且,基于调整烧制收缩的目的,也可以加入二氧化硅、氧化铋、氧化铝、氧化钛等无机粉末、有机金属化合物、金属有机酸盐、金属醇盐等。Furthermore, the photosensitive silver paste of the present invention may also be mixed with acidic compounds such as phosphoric acid, phosphoric acid ester, carboxylic acid-containing compounds, silicones, acrylics, and other defoaming and leveling agents for ensuring storage stability, if necessary. , Thixotropy imparting agent for adjusting fluidity, silane coupling agent and other additives for improving film adhesion. In addition, if necessary, known and commonly used oxidation inhibitors for preventing oxidation of conductive metal powder, thermal polymerization inhibitors for improving thermal stability during storage, and metals as bonding components to the substrate during firing may be added. Particles such as oxides, silicon oxides, boron oxides, and low-melting glass. Furthermore, inorganic powders such as silica, bismuth oxide, alumina, and titanium oxide, organometallic compounds, metal organic acid salts, metal alkoxides, and the like may be added for the purpose of adjusting firing shrinkage.
本发明的感光性银浆,是将如上所述的必须成分与任选成分以一定比例混合,经三辊和搅拌器等混炼机均匀分散得到的。由此得到的本发明的感光性银浆,例如,经如下工序以导电体图形形成于基材上。这种导电体图形,可以合适地用作等离子体显示板的正面基板和/或背面基板等的电极图形。The photosensitive silver paste of the present invention is obtained by mixing the above-mentioned essential components and optional components in a certain ratio, and uniformly dispersing them through kneading machines such as three rolls and agitators. The photosensitive silver paste of the present invention thus obtained is formed on a substrate as a conductor pattern through the following steps, for example. Such a conductor pattern can be suitably used as an electrode pattern of a front substrate and/or a rear substrate of a plasma display panel.
(1)首先,本发明的感光性银浆,经过丝网印刷法、刮棒涂布法、刮刀涂布法等适宜的涂布方法,涂布到基材,例如等离子体显示板(PDP)的正面基板的玻璃基板等上,然后为了得到指触干燥性,在热风循环式干燥炉和远红外线干燥炉等中,例如在约60-120℃下干燥约5-40分钟左右,使有机溶剂蒸发,得到无粘性的薄膜。(1) First, the photosensitive silver paste of the present invention is applied to a substrate, such as a plasma display panel (PDP), through suitable coating methods such as screen printing, bar coating, and knife coating. On the glass substrate of the front substrate, etc., in order to obtain finger-touch dryness, dry at about 60-120°C for about 5-40 minutes in a hot air circulation drying oven or a far-infrared drying oven, etc., and let the organic solvent Evaporation gave a tack-free film.
在这里,作为基材,没有特别的限制,但是例如可以使用玻璃基板和陶瓷基板等耐热性基板。Here, the substrate is not particularly limited, but for example, heat-resistant substrates such as glass substrates and ceramic substrates can be used.
另外,也可以预先将浆成膜为薄膜状,这种情况下可以将薄膜层压在基材上。In addition, the slurry may be formed into a film in advance, and in this case, the film may be laminated on the substrate.
(2)其次,通过图形曝光将基材上形成的干燥涂膜显影。作为曝光工序,可以是使用具有一定曝光图形的负掩膜的接触曝光或非接触曝光。作为曝光光源可以使用卤素灯、高压汞灯、激光、金属卤化物灯、黑光灯、无电极灯等。曝光量优选为约50-1000mJ/cm2。(2) Next, the dried coating film formed on the substrate is developed by pattern exposure. As the exposure step, contact exposure or non-contact exposure using a negative mask having a certain exposure pattern may be used. As the exposure light source, a halogen lamp, a high-pressure mercury lamp, a laser, a metal halide lamp, a black light lamp, an electrodeless lamp, or the like can be used. The exposure amount is preferably about 50-1000 mJ/cm 2 .
显影工序使用喷雾法、浸渍法等。作为显影液,合适地使用氢氧化钠、氢氧化钾、碳酸钠、碳酸钾、硅酸钠等金属碱性水溶液,以及单乙醇胺、二乙醇胺、三乙醇胺等胺水溶液,尤其是约1.5重量%以下浓度的稀碱性水溶液,也可以将组合物中含羧基的树脂中的羧基皂化,除去未固化部分(未曝光部分),但是并不限于上述显影液。而且,为了除去显影之后不需要的显影液,优选进行水洗和酸中和。A spray method, a dipping method, etc. are used for a developing process. As the developing solution, metal alkaline aqueous solution such as sodium hydroxide, potassium hydroxide, sodium carbonate, potassium carbonate, sodium silicate, and amine aqueous solution such as monoethanolamine, diethanolamine, triethanolamine are suitably used, especially about 1.5% by weight or less The dilute alkaline aqueous solution of concentration can also saponify the carboxyl group in the carboxyl group-containing resin in the composition to remove the uncured part (unexposed part), but it is not limited to the above-mentioned developing solution. Furthermore, in order to remove unnecessary developing solution after development, it is preferable to perform washing with water and acid neutralization.
(3)然后,将得到的感光性银浆的图形烧制后,将浆中所含的有机成分脱粘合剂,得到一定的导电体图形。(3) Next, after firing the pattern of the obtained photosensitive silver paste, the organic component contained in the paste is debindered to obtain a fixed conductor pattern.
实施例Example
下面通过实施例详细地描述本发明,然而本发明并不限于下面的实施例。另外,下面的“份”全部是指重量份,除非另有说明。The present invention is described in detail below by examples, however, the present invention is not limited to the following examples. In addition, the following "parts" all mean parts by weight unless otherwise specified.
(有机粘合剂的合成例)(Synthesis example of organic binder)
在配备有温度计、搅拌器、滴液漏斗和回流冷却器的烧瓶中,加入溶剂二甘醇单乙醚乙酸酯、催化剂偶氮二异丁腈,在氮气环境下,加热到80℃,在约2小时内滴加甲基丙烯酸与甲基丙烯酸甲酯以0.4mol∶0.6mol的摩尔比混合的单体,再搅拌1小时之后,升温至115℃使之失活,得到树脂溶液。In a flask equipped with a thermometer, a stirrer, a dropping funnel and a reflux cooler, add the solvent diethylene glycol monoethyl ether acetate, the catalyst azobisisobutyronitrile, and heat to 80°C under a nitrogen atmosphere. Within 2 hours, a monomer mixture of methacrylic acid and methyl methacrylate in a molar ratio of 0.4 mol:0.6 mol was added dropwise, and after stirring for 1 hour, the temperature was raised to 115° C. to inactivate it to obtain a resin solution.
将该树脂溶液冷却之后,使用催化剂溴化四丁基铵,在95-105℃、30小时的条件下,使0.4mol的丁基缩水甘油基醚与等量的所得树脂的羧基进行加成反应,冷却。After cooling the resin solution, use the catalyst tetrabutylammonium bromide to add 0.4 mol of butyl glycidyl ether to the carboxyl group of the obtained resin under the condition of 95-105°C for 30 hours. ,cool down.
而且,对得到的树脂的OH基,在95-105℃、8小时的条件下,与0.26mol的四氢邻苯二甲酸酐进行加成反应,冷却之后取出,得到固形成分为55%的有机粘合剂A。Moreover, the OH group of the obtained resin was subjected to an addition reaction with 0.26 mol of tetrahydrophthalic anhydride at 95-105° C. for 8 hours, and was taken out after cooling to obtain an organic compound with a solid content of 55%. Adhesive A.
(组合物例1-5、对比组合例1-4)(composition example 1-5, comparative combination example 1-4)
使用如上所述得到的有机粘合剂A,与表1所示的玻璃粉末A一起以下面所示的组成比混合,用搅拌机搅拌之后,用3辊粉碎机研磨,进行浆化,制得感光性银浆(组合物例1)。而且,用22-55份的表1所述的玻璃粉末B-H替换玻璃粉末A,制成组合物例2-5、对比组合物例1-4。而且,用激光衍射散射式粒度分布测定装置:LMS-30(セイシン株式会社制造)测定这些玻璃粉末A-H的平均粒径在1.2-3.4μm的范围内。Using the organic binder A obtained as described above, it is mixed with the glass powder A shown in Table 1 at the composition ratio shown below, stirred with a mixer, and then ground with a 3-roll pulverizer to make a slurry to obtain a photosensitive permanent silver paste (composition example 1). Furthermore, glass powder A was replaced with 22-55 parts of glass powder B-H described in Table 1 to prepare composition examples 2-5 and comparative composition examples 1-4. Furthermore, the average particle diameters of these glass powders A-H were measured to be in the range of 1.2 to 3.4 μm using a laser diffraction scattering type particle size distribution measuring device: LMS-30 (manufactured by Seishin Co., Ltd.).
表1Table 1
(组合物例1)(composition example 1)
有机粘合剂A 180.0份Organic Adhesive A 180.0 parts
三羟甲基丙烷三丙烯酸酯 45.0份Trimethylolpropane triacrylate 45.0 parts
2-苄基-2-二甲基氨基-1-(4-吗啉基苯基)丁酮-1 10.0份2-Benzyl-2-dimethylamino-1-(4-morpholinophenyl)butanone-1 10.0 parts
异丙基噻吨酮 1.0份Isopropylthioxanthone 1.0 parts
二丙二醇单甲醚 90.0份Dipropylene glycol monomethyl ether 90.0 parts
银粉A* 550.0份Silver powder A * 550.0 parts
玻璃粉末A 38.5份Glass powder A 38.5 parts
磷酸酯 2.0份Phosphate 2.0 parts
消泡剂(BYK-354:ビツクケミ一·ジャパン株式会社) 1.0份Antifoaming agent (BYK-354: ビツクケミミー・Japan Co., Ltd.) 1.0 parts
*使用平均粒径(用激光衍射散射式粒度分布测定装置:マイクロトラックHRA测定):2.0μm,比表面积(通过BET1点法测定):0.42m2/g的物质。 * The average particle size (measured by a laser diffraction scattering particle size distribution measuring device: Microtrac HRA): 2.0 μm, and the specific surface area (measured by BET 1-point method): 0.42 m 2 /g were used.
通过检测由此获得的组合物例1-5、对比组合物例1-4各自的感光性导电浆的绝缘电阻值、是否产生枝状来评价迁移特性。Migration characteristics were evaluated by examining the insulation resistance value of the photosensitive electroconductive paste obtained in this way for Composition Examples 1-5 and Comparative Composition Examples 1-4, and whether dendrites were generated.
其评价方法如下。The evaluation method is as follows.
实验片的制作:Production of experimental films:
在玻璃基板上,用180目的聚酯筛将评价用的各感光性银浆全面涂布,接下来,在热封循环式干燥炉中于90℃下干燥20分钟,形成指触干燥性良好的涂膜。然后,用金属卤化物灯作为光源,通过负掩膜,使得干燥涂膜上的累积光量为300mJ/cm2下图形曝光之后,用液温为30℃的0.5重量%Na2CO3水溶液进行显影,水洗。然后,将由此形成涂膜图形的基板,在大气环境下以5℃/分升温至570℃,并在570℃下烧制30分钟,制成形成导电体图形的试验片。On the glass substrate, each photosensitive silver paste for evaluation was fully coated with a 180-mesh polyester sieve, and then dried at 90°C for 20 minutes in a heat-sealing circulation drying oven to form a silver paste with good finger-drying properties. coating film. Then, using a metal halide lamp as a light source, pass through a negative mask so that the cumulative light intensity on the dry coating film is 300mJ/ cm2 After pattern exposure, develop with a 0.5% by weight Na2CO3 aqueous solution at a liquid temperature of 30°C , washed with water. Then, the substrate thus formed with the coating film pattern was heated up to 570° C. at 5° C./minute in the air environment, and fired at 570° C. for 30 minutes to prepare a test piece on which a conductor pattern was formed.
(绝缘电阻值)(insulation resistance value)
对L/S=120/80μm的梳型图形进行曝光、显影成像,直至进行烧制,其图形上涂布紫外线固化型防潮剂,然后固化,制作评价片。之后,于65℃、95%RH恒温高湿槽内在施加80V直流电的同时处理144小时,测定处理之后的绝缘电阻值,评价绝缘性的退化。其绝缘电阻值是施加500V电压1分钟之后的测定值。The comb-shaped pattern with L/S=120/80 μm was exposed, developed and imaged until fired, and the pattern was coated with a UV-curable moisture-proof agent, and then cured to prepare an evaluation sheet. After that, it was treated in a 65°C, 95% RH constant temperature and high humidity chamber for 144 hours while applying a direct current of 80V, and the insulation resistance value after the treatment was measured to evaluate the degradation of insulation. The insulation resistance value is a measured value after applying a voltage of 500V for 1 minute.
(枝状评价)(dendritic evaluation)
对进行绝缘性评价的试验片,确认评价之后在梳性电极之间是否产生银枝。With respect to the test piece subjected to insulation evaluation, it was confirmed whether or not silver branches were generated between the comb electrodes after the evaluation.
这些评价结果示于表2。These evaluation results are shown in Table 2.
由表2可知,本发明的银浆在用于高精度导电体图形时迁移特性优异。It can be seen from Table 2 that the silver paste of the present invention has excellent migration characteristics when used for high-precision conductor patterns.
表1续
表2
Claims (10)
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| JP2004129764 | 2004-04-26 | ||
| JP2004129764A JP4789426B2 (en) | 2004-04-26 | 2004-04-26 | Glass composition for silver paste, photosensitive silver paste and electrode pattern using the same |
| JP2004-129764 | 2004-04-26 |
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| CN1690852A true CN1690852A (en) | 2005-11-02 |
| CN1690852B CN1690852B (en) | 2012-01-18 |
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| JP (1) | JP4789426B2 (en) |
| KR (1) | KR101113473B1 (en) |
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| WO2009143685A1 (en) * | 2008-05-29 | 2009-12-03 | 四川虹欧显示器件有限公司 | Black conductive paste and plasma display using the same |
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| JPH06223617A (en) * | 1993-01-27 | 1994-08-12 | Sumitomo Metal Mining Co Ltd | Conductive paste composition |
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- 2005-04-25 KR KR1020050034075A patent/KR101113473B1/en not_active Expired - Lifetime
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2005306699A (en) | 2005-11-04 |
| KR20060045846A (en) | 2006-05-17 |
| KR101113473B1 (en) | 2012-03-13 |
| JP4789426B2 (en) | 2011-10-12 |
| CN1690852B (en) | 2012-01-18 |
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