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CN1685463A - Image display device, method of manufacturing a spacer for use in the image display device, and image display device having spacers manufactured by the method - Google Patents

Image display device, method of manufacturing a spacer for use in the image display device, and image display device having spacers manufactured by the method Download PDF

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Publication number
CN1685463A
CN1685463A CNA038225891A CN03822589A CN1685463A CN 1685463 A CN1685463 A CN 1685463A CN A038225891 A CNA038225891 A CN A038225891A CN 03822589 A CN03822589 A CN 03822589A CN 1685463 A CN1685463 A CN 1685463A
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Prior art keywords
substrate
dividing plate
image display
distal portion
powder slurry
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Chinese (zh)
Inventor
竹中滋男
二階堂勝
石川諭
小柳津聡子
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Toshiba Corp
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Toshiba Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/028Mounting or supporting arrangements for flat panel cathode ray tubes, e.g. spacers particularly relating to electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123Flat display tubes
    • H01J31/125Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/18Assembling together the component parts of electrode systems
    • H01J9/185Assembling together the component parts of electrode systems of flat panel display devices, e.g. by using spacers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/86Vessels
    • H01J2329/8625Spacing members
    • H01J2329/864Spacing members characterised by the material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/86Vessels
    • H01J2329/8625Spacing members
    • H01J2329/865Connection of the spacing members to the substrates or electrodes
    • H01J2329/8655Conductive or resistive layers

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

An image-displaying device has a first substrate (10) with a fluorescent face and a second substrate. The second substrate is provided spaced apart from and opposite the first substrate, and has electron sources (18) on it. Between the first and second substrates are spacers (30a, 30b) for supporting a load of atmospheric pressure acting on the substrates. The tip portion of the first substrate of and that of the second substrate of each of the spacers are impregnated with an electric conductive material to form electric conductivity-applying portions (31a, 31b), respectively.

Description

图像显示设备在图像显示设备中使用的隔 板的制造方法和具有该方法制造的隔板的图像显示设备Image display device Manufacturing method of spacer used in image display device and image display device having spacer manufactured by the method

技术领域technical field

本发明涉及一种具有相互正对设置的衬底和许多位于其中一个衬底的内表面上的电子源的图像显示设备。本发明还涉及一种在该图像显示设备中使用的隔板的制造方法,和涉及一种具有该方法制造的隔板的图像显示设备。The present invention relates to an image display device having substrates arranged facing each other and a plurality of electron sources located on the inner surface of one of the substrates. The present invention also relates to a method of manufacturing a spacer used in the image display device, and to an image display device having the spacer manufactured by the method.

背景技术Background technique

近些年来,人们已经对高级广播或高分辨率款式的图像显示设备产生了需求,这些图像显示设备需要更加严格的屏幕显示性能。为了满足这些需求,屏幕面必须是平板的,并且分辨率得到改进。而且,这些设备还必须质量轻、厚度薄。In recent years, there has been demand for image display devices of advanced broadcasting or high-resolution type, which require more stringent screen display performance. To meet these demands, the screen surface must be flat and the resolution improved. Furthermore, these devices must be lightweight and thin.

平板图像显示设备,如场发射显示(下文称之为FED)作为能够满足上述要求的图像显示设备具有良好的前景。FED具有相互正对设置的第一衬底和第二衬底,在它们之间具有一定的缝隙。这些衬底具有直接或通过形状为矩形框架的侧壁而连接的相应周缘部。因此,这些衬底组成了真空壳层。在第一衬底的内表面上形成荧光层。许多电子发射元件设置在第二衬底的内表面上,它们用作激发荧光层的电子源,并使荧光层发光。Flat panel image display devices such as field emission displays (hereinafter referred to as FEDs) have good prospects as image display devices capable of satisfying the above requirements. The FED has a first substrate and a second substrate facing each other with a certain gap therebetween. These substrates have respective peripheral portions connected directly or via side walls shaped as rectangular frames. These substrates thus constitute the vacuum envelope. A phosphor layer is formed on the inner surface of the first substrate. A plurality of electron emission elements are provided on the inner surface of the second substrate, and they serve as an electron source for exciting the fluorescent layer and causing the fluorescent layer to emit light.

许多隔板或支撑件位于第一和第二衬底之间,以便于支撑作用在衬底上的大气负荷。在FED上显示图像时,阳极电压作用于荧光屏上,从电子发射元件发出的电子束通过阳极电压进行加速,由于它们撞击荧光屏,因此使荧光屏发光和显示视频图像。A number of spacers or supports are located between the first and second substrates to facilitate supporting atmospheric loads on the substrates. When an image is displayed on the FED, an anode voltage is applied to the phosphor screen, and electron beams emitted from the electron emission element are accelerated by the anode voltage, and as they hit the phosphor screen, the phosphor screen emits light and video images are displayed.

在此类型的FED中,每个电子发射元件具有微米级的尺寸,第一衬底和第二衬底之间的距离为毫米级。因此,这种图像显示设备能够实现较高的分辨率,并且比用作现有电视接收机或计算机的显示器的阴极射线管(CRTs)的质量要轻和厚度要薄。In this type of FED, each electron emission element has a size on the order of micrometers, and the distance between the first substrate and the second substrate is on the order of millimeters. Therefore, such an image display device can achieve higher resolution and is lighter in mass and thinner than cathode ray tubes (CRTs) used as displays of existing television receivers or computers.

上述类型的图像显示设备必须具有实用的显示性能。为此,阳极电压在与荧光粉一起使用时最好应该为几千伏或更高,与常用的阴极射线管的相似。但是,考虑到其分辨率和属性以及支撑件的可制造性,第一和第二衬底之间的间隙不能太大。该间隙必须大约为1mm至3mm。不可避免的是,在从第二衬底发射出的电子撞击在隔板上时要产生二次电子和反射电子。因此,隔板被充电。通常,隔板以FED的加速电压进行正向充电。结果是,隔板吸引从电子发射元件发射出的电子束,并使这些电子束从它们原路径发生偏转。这样会导致电子错误地降落在荧光层上,最终降低所显示图像的色纯度。An image display device of the above-mentioned type must have practical display performance. For this reason, the anode voltage should preferably be several thousand volts or higher when used with phosphors, similar to that of conventional cathode ray tubes. However, the gap between the first and second substrates cannot be too large in consideration of its resolution and properties and the manufacturability of the support. This gap must be approximately 1mm to 3mm. It is unavoidable that secondary electrons and reflected electrons are generated when electrons emitted from the second substrate impinge on the spacer. Therefore, the separator is charged. Typically, the separator is forward charged at the accelerating voltage of the FED. As a result, the spacer attracts the electron beams emitted from the electron-emitting elements and deflects these electron beams from their original paths. This can cause electrons to erroneously land on the phosphor layer, ultimately reducing the color purity of the displayed image.

为了减小电子束对隔板的吸引力,每个隔板可以在其整个表面或其部分表面上呈现出电导性。例如,美国专利No.5,726,529公开了这样的一种结构,其中绝缘隔板在接近第二衬底的一端呈现出电导性。因此,能够防止隔板进行充电。In order to reduce the attraction force of electron beams to the spacers, each spacer may exhibit electrical conductivity over its entire surface or a part of its surface. For example, US Patent No. 5,726,529 discloses a structure in which an insulating spacer exhibits electrical conductivity at an end close to the second substrate. Therefore, it is possible to prevent the separator from being charged.

但是,如果隔板呈现出电导性,从第一衬底流向第二衬底的无效电流将会增加。这样就会使温度升高,并且增加了功耗。而且,使隔板呈现出电导性的常用工艺过程不得不提高了制造成本。However, if the spacer exhibits electrical conductivity, the inactive current flowing from the first substrate to the second substrate will increase. This increases temperature and increases power consumption. Moreover, the usual process of rendering the separator electrically conductive has to increase the manufacturing cost.

本发明的技术方案Technical scheme of the present invention

本发明是考虑到上述问题而提出的,其目的是提供一种图像显示设备,其中能够防止电子束偏离其路径,以此显示较高质量的图像。本发明的另一个目的是提供一种用于该图像显示设备的隔板的制造方法,和一种具有使用该方法制造的隔板的图像显示设备。The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide an image display apparatus in which electron beams can be prevented from being deviated from their paths, thereby displaying higher-quality images. Another object of the present invention is to provide a method of manufacturing a spacer used in the image display device, and an image display device having a spacer manufactured using the method.

为了实现上述目的,根据本发明一种方案的图像显示设备包括:第一衬底,具有荧光面;第二衬底,与第一衬底正对,具有一间隙,并具有许多电子源,其构成能够发射电子束以激发荧光面;和许多隔板,由绝缘材料制成,设置在第一衬底和第二衬底之间,支撑作用在第一衬底和第二衬底上的大气负荷,每个隔板分别在第一和额第二衬底具有远端部,远端部充满导电材料,并组成导电部分。In order to achieve the above object, an image display device according to a solution of the present invention includes: a first substrate having a fluorescent surface; a second substrate facing the first substrate, having a gap, and having a plurality of electron sources, which constituting a surface capable of emitting electron beams to excite fluorescent light; and a plurality of spacers, made of insulating material, disposed between the first substrate and the second substrate, supporting the atmosphere acting on the first substrate and the second substrate Each spacer has a distal portion on the first and second substrates respectively, and the distal portion is filled with conductive material and constitutes a conductive portion.

在由此构成的图像显示设备中,由位于一个隔板附近的每个电子源发射出的电子束被设置在该隔板端部的电导提供部产生的电场排斥。因此电子束沿着偏离隔板的路径传播。然后,电子束被吸引至隔板,因此沿着靠近隔板的路径传播。斥力和引力消除了电子束偏离路径。电子发射元件发射出的电子束最终到达荧光面上的目标位置。这就避免电子束错误的着陆,因此,降低了色纯度。所以,SED能够显示较高质量的图像。因此,该图像显示设备能够显示改进质量的图像。此外,从总体上来说,温度的升高和功耗的增加能够比具有电导性隔板的图像显示设备得到更多的控制。In the thus constituted image display apparatus, electron beams emitted from each electron source located near a spacer are repelled by the electric field generated by the conductance providing portion provided at the end of the spacer. The electron beam thus propagates along a path deviated from the partition. Then, the electron beam is attracted to the partition and thus propagates along a path close to the partition. Repulsive and attractive forces eliminate the deviation of the electron beam from its path. The electron beams emitted by the electron emitting element finally reach the target position on the phosphor surface. This avoids erroneous landings of the electron beams, thereby degrading the color purity. Therefore, SED can display higher quality images. Therefore, the image display device can display images of improved quality. Furthermore, the increase in temperature and the increase in power consumption can be more controlled than an image display device with an electrically conductive spacer in general.

根据本发明的另一个方案,一种图像显示设备中许多隔板的制造方法,包括:通过使用绝缘材料形成隔板;将包含任一导电成分的粉浆或溶液加入到每个隔板的远端部上,并使粉浆或溶液依靠毛细管作用渗透入远端部;烧制粉浆或溶液已经渗透的每个隔板,以此提供一种在远端部具有充满导电材料的导电部分的隔板。According to another aspect of the present invention, a method for manufacturing a plurality of partitions in an image display device includes: forming the partitions by using an insulating material; adding a slurry or a solution containing any conductive component to a remote part of each partition; end, and allow the slurry or solution to permeate into the distal end by capillary action; fire each separator that has been infiltrated by the slurry or solution to provide a conductive portion at the distal end that is filled with conductive material clapboard.

根据本发明的又一种方案,一种隔板的制造方法,包括:通过使用绝缘材料形成隔板;将包含任一导电成分的粉浆或溶液加入到隔板的远端部上;并对加有粉浆的隔板执行热处理,在隔板的远端部扩散导电成分,由此提供一种在远端部具有充满导电材料的导电部分的隔板。According to still another aspect of the present invention, a method of manufacturing a separator includes: forming the separator by using an insulating material; adding a slurry or a solution containing any conductive component to the distal end of the separator; and A heat treatment is performed on the slipped separator to diffuse the conductive component at the distal end of the separator, thereby providing a separator having a conductive portion filled with the conductive material at the distal end.

根据本发明的还一种方案,一种隔板的制造方法,包括:准备具有许多通孔的印模,用于形成隔板;将不包含导电成分的第一粉浆灌注到通孔中;将在其中分散导电成分的第二粉浆灌注到通孔中,以此将第二粉浆作用在第一粉浆上;加热第一粉浆和第二粉浆,由此提供一种在远端部具有在其中分散导电成分的导电部分的隔板。According to another solution of the present invention, a method for manufacturing a separator includes: preparing a stamp with many through holes for forming the separator; pouring a first slurry that does not contain conductive components into the through holes; pouring a second paste in which a conductive component is dispersed into the through hole, whereby the second paste acts on the first paste; heating the first paste and the second paste, thereby providing a remote The ends have a partition having a conductive portion in which the conductive composition is dispersed.

附图的简述Brief description of the drawings

图1是根据本发明第一实施例的表面发射显示器(下文称之为SED)的透视图;1 is a perspective view of a surface emitting display (hereinafter referred to as SED) according to a first embodiment of the present invention;

图2是沿图1中线II-II剖切的SED透视图;Fig. 2 is the SED perspective view cut along line II-II in Fig. 1;

图3是SED的放大剖视图;Figure 3 is an enlarged cross-sectional view of the SED;

图4是表示在SED中使用的隔板制造步骤中粘附于格栅上的第一和第二印模的剖视图;4 is a cross-sectional view showing first and second stampers adhered to a grid in a spacer manufacturing step used in an SED;

图5是描述了填充隔板材料的印模的剖视图,其中对隔板材料已经被执行UV应用和银膏应用;5 is a cross-sectional view depicting a stamp filled with spacer material to which UV application and silver paste application have been performed;

图6是表示在隔板制造方法中从印模中去除隔板的剖视图;Fig. 6 is a sectional view showing removal of a spacer from a die in the spacer manufacturing method;

图7是表示在SED中使用的隔板的制造方法的剖视图,它是本发明的第二7 is a cross-sectional view showing a method of manufacturing a spacer used in an SED, which is a second embodiment of the present invention.

实施例;Example;

图8是解释在根据第二实施例的方法中将溶液加到隔板顶端上的步骤的剖视图,所述溶液包含导电成份;8 is a cross-sectional view explaining a step of adding a solution, the solution containing a conductive component, onto the top of the spacer in the method according to the second embodiment;

图9是解释在SED中使用的隔板的制造方法的剖视图,它是本发明的第三Fig. 9 is a sectional view explaining the manufacturing method of the separator used in the SED, which is the third aspect of the present invention.

实施例;Example;

图10是描述在根据第三实施例的隔板的制造方法中填充有第一粉浆和第二粉浆的印模的剖视图;和10 is a cross-sectional view describing a stamp filled with a first slip and a second slip in a method of manufacturing a separator according to a third embodiment; and

图11是表示在根据第三实施例的隔板制造方法中从印模中去除隔板的剖视图。Fig. 11 is a cross-sectional view showing removal of the spacer from the stamp in the spacer manufacturing method according to the third embodiment.

实施本发明的最佳模式Best Mode for Carrying Out the Invention

将参考附图详细地描述本发明的实施例,它们适用于是平板图像显示设备和FED一种类型的SED。Embodiments of the present invention will be described in detail with reference to the accompanying drawings, which are applicable to SEDs which are one type of flat panel image display devices and FEDs.

如图1至3所示,SED包括第一衬底10和第二衬底12,它们是用作透明绝缘衬底的矩形玻璃板。这些衬底相互正对设置,它们之间的缝隙大约为1.0至2.0mm。第二衬底12的尺寸比第一衬底10的尺寸要大些。第一衬底10和第二衬底12通过形状为矩形框架的玻璃侧壁14在它们的周缘部结合在一起。由此结合的衬底10和12组成偏平方形真空壳层15。As shown in FIGS. 1 to 3, the SED includes a first substrate 10 and a second substrate 12, which are rectangular glass plates serving as transparent insulating substrates. These substrates are arranged facing each other with a gap of about 1.0 to 2.0 mm between them. The size of the second substrate 12 is larger than that of the first substrate 10 . The first substrate 10 and the second substrate 12 are bonded together at their peripheral portions by glass side walls 14 shaped as rectangular frames. The thus bonded substrates 10 and 12 make up a planar vacuum envelope 15 .

荧光屏16或荧光面在第一衬底10的内表面上形成。荧光屏16由位于第一衬底10上的荧光层R,G和G以及黑色避光层11组成。在电子撞击这些层时,层R发出红色光,层G发出绿色光,层B发出蓝色光。荧光层R,G和B是以条状或点状形式设置的。在荧光屏16上形成由铝等制成的金属壳17。透明导电膜,例如为ITO,或其它的滤色膜可插入在第一衬底10和荧光屏16之间。A phosphor screen 16 or phosphor face is formed on the inner surface of the first substrate 10 . The fluorescent screen 16 is composed of fluorescent layers R, G and G and a black light-shielding layer 11 on the first substrate 10 . When electrons hit the layers, layer R glows red, layer G glows green, and layer B glows blue. Phosphor layers R, G and B are arranged in stripes or dots. A metal case 17 made of aluminum or the like is formed on the phosphor screen 16 . A transparent conductive film, such as ITO, or other color filter films can be interposed between the first substrate 10 and the fluorescent screen 16 .

在第二衬底12的内表面上设置大量的表面导电的电子发射元件18。它们是电子源,并能发射激发荧光屏16的荧光层的电子束。电子发射元件18成行和成列设置,每个形成为一个像素。每个电子发射元件18具有电子发射部(未图示),和一对给电子发射部等施加电压的元件电极。将电压作用于电子发射元件18的大量导线(未图示)以矩阵的形式设置在第二衬底12的内表面上。导线在任一个端部从真空壳层15引出。On the inner surface of the second substrate 12, a large number of surface conduction electron emission elements 18 are provided. They are electron sources and emit electron beams that excite the phosphor layers of the phosphor screen 16 . The electron emission elements 18 are arranged in rows and columns, each forming a pixel. Each electron emission element 18 has an electron emission portion (not shown), and a pair of element electrodes for applying a voltage to the electron emission portion and the like. A large number of wires (not shown) for applying a voltage to the electron emission elements 18 are arranged on the inner surface of the second substrate 12 in a matrix. The wires exit the vacuum envelope 15 at either end.

用作连接件的侧壁14使用密封剂20密封于第一衬底10和第二衬底12的周缘端部上。因此,侧壁14与第一和第二衬底连接在一起。例如,密封剂是由低熔化玻璃或低熔化金属制成。Side walls 14 serving as connectors are sealed on peripheral end portions of the first substrate 10 and the second substrate 12 using a sealant 20 . Thus, the sidewall 14 is connected to the first and second substrates. For example, the sealant is made of low-melting glass or low-melting metal.

如图2和3所述,SED具有隔板组件22。隔板组件22位于第一衬底10和第二衬底12之间。在本实施例中,隔板组件22设有板状格栅24和许多柱状隔板,这些柱状隔板一体形成在格栅的两表面上。As described in FIGS. 2 and 3 , the SED has a bulkhead assembly 22 . The spacer assembly 22 is located between the first substrate 10 and the second substrate 12 . In this embodiment, the spacer assembly 22 is provided with a plate-shaped grid 24 and a plurality of columnar spacers integrally formed on both surfaces of the grid.

更具体的说,格栅24设有第一表面24a和第二表面24b,它平行于这些衬底设置。第一表面24a面对第一衬底10的内表面。第二表面24b面对第二衬底12的内表面。格栅24设有许多电子束通道孔26和许多隔板开口28。通道孔26和开口28是通过蚀刻或类似的工艺过程制造而成的。电子束通道孔26的设置要分别通向于电子发射元件18,电子发射元件发射出的电子束穿过相应的电子束通道孔。隔板开口28位于电子束通道孔26之间,并以设定的间距排列。More specifically, the grid 24 has a first surface 24a and a second surface 24b, which are disposed parallel to the substrates. The first surface 24 a faces the inner surface of the first substrate 10 . The second surface 24 b faces the inner surface of the second substrate 12 . The grid 24 is provided with a number of electron beam passage holes 26 and a number of baffle openings 28 . Via holes 26 and openings 28 are formed by etching or similar processes. The electron beam passage holes 26 are arranged to lead to the electron emission elements 18 respectively, and the electron beams emitted by the electron emission elements pass through the corresponding electron beam passage holes. The partition openings 28 are located between the electron beam passage holes 26 and are arranged at a set interval.

格栅24是一片厚度,例如,为0.1至0.25mm的铁—镍金属。在格栅24的表面上,形成金属氧化膜,它形成金属膜。该金属氧化膜,例如,是由Fe3O4和Fe2NiO4制成的。至少在格栅24的表面上设置高阻膜,该格栅位于第二衬底上。该高阻膜通过施加和烧制是由玻璃和陶瓷制成的高阻物质而形成。高阻膜的阻值为E+8Ω/□或更大些。The grid 24 is a sheet of iron-nickel metal having a thickness of, for example, 0.1 to 0.25 mm. On the surface of the grid 24, a metal oxide film is formed, which forms a metal film. The metal oxide film is made, for example, of Fe 3 O 4 and Fe 2 NiO 4 . A high-resistance film is provided at least on the surface of the grid 24, which is located on the second substrate. The high resistance film is formed by applying and firing a high resistance substance made of glass and ceramics. The resistance value of the high resistance film is E+8Ω/□ or more.

电子束通道孔26为方形,例如,其每个的宽度为0.15mm至0.25mm,长度为0.15mm至0.25mm。隔板开口28的直径,例如,大约为0.2mm至0.5mm。前述的高阻膜也设置在限定电子束通道孔26的壁的表面上。The electron beam passage holes 26 are square, for example, each of which has a width of 0.15 mm to 0.25 mm and a length of 0.15 mm to 0.25 mm. The diameter of the partition opening 28 is, for example, approximately 0.2 mm to 0.5 mm. The aforementioned high-resistance film is also provided on the surface of the wall defining the electron beam passage hole 26 .

第一隔板30a从格栅24的第一表面24a上突出,并与其一体形成,分别与相应的隔板开口28相重叠。每个第一隔板30a的延伸端通过金属壳17和荧光屏16的黑色避光层11邻接第一衬底10的内表面。第二隔板30b从格栅24的第二表面24b上突出,并与其一体形成,分别与相应的隔板开口28相重叠。每个第二隔板30b的延伸端邻接第二衬底12的内表面。第二隔板30b的延伸端位于设置在第二衬底12内表面上的引线21上。The first partitions 30a protrude from the first surface 24a of the grid 24 and are integrally formed therewith, overlapping with the corresponding partition openings 28, respectively. The extended end of each first spacer 30 a is adjacent to the inner surface of the first substrate 10 through the metal shell 17 and the black light-shielding layer 11 of the fluorescent screen 16 . The second partitions 30b protrude from the second surface 24b of the grid 24 and are integrally formed therewith, overlapping with the corresponding partition openings 28, respectively. The extended end of each second spacer 30 b abuts on the inner surface of the second substrate 12 . The extended end of the second spacer 30 b is located on the lead 21 provided on the inner surface of the second substrate 12 .

第一隔板30a和第二隔板30b是由绝缘材料制成的。第一隔板30a和第二隔板30b的远端部包含导电材料,并分别构成了导电的部分31a和31b。在导电部分31a和31b中,导电材料的含量从远端部向中部,即向格栅24逐渐减少。The first spacer 30a and the second spacer 30b are made of an insulating material. The distal end portions of the first spacer 30a and the second spacer 30b contain a conductive material and constitute conductive portions 31a and 31b, respectively. In the conductive parts 31a and 31b, the content of the conductive material gradually decreases from the distal end to the middle, that is, to the grid 24 .

正如下文所描述,导电部分31a和31b产生电场。该电场偏转从电子发射元件18发射出的电子束,远离第一隔板30a和第二隔板30b。包含在导电部分31a和31b中的导电材料,例如,可以是Ni,In,Ag,Au,Pt,Ir,Ru和W等导电部分31a和31b的高度和导电材料的含量是由作用于电子束的斥力,即,校正电子束路径的程度来确定的。As described below, the conductive portions 31a and 31b generate an electric field. The electric field deflects the electron beams emitted from the electron emission elements 18 away from the first spacer 30a and the second spacer 30b. The conductive material contained in the conductive parts 31a and 31b, for example, can be Ni, In, Ag, Au, Pt, Ir, Ru and W etc. The height of the conductive parts 31a and 31b and the content of the conductive material are determined by the action of the electron beam The repulsive force, that is, the degree to which the electron beam path is corrected is determined.

每个第一隔板30a和第二隔板30b设计成锥形以使它们的直径从格栅24的侧面向延伸端减小。例如,每个第一隔板30a的形成要使其在格栅24侧面上的近端直径大约为0.4mm,其延伸端的直径大约为0.3mm,其高度大约为0.6mm。每个第二隔板30b的形成要使其在格栅24侧面上的近端直径大约为0.4mm,其延伸端的直径大约为0.25mm,其高度大约为0.8mm。因此,第二隔板31b的高度大于第一隔板31a的高度。Each of the first baffles 30a and the second baffles 30b is designed to be tapered such that their diameters decrease from the sides of the grid 24 toward the extended ends. For example, each first partition 30a is formed such that its proximal end on the side of the grid 24 has a diameter of about 0.4 mm, its extended end has a diameter of about 0.3 mm, and its height is about 0.6 mm. Each second partition 30b is formed such that its proximal end on the side of the grid 24 has a diameter of about 0.4 mm, its extended end has a diameter of about 0.25 mm, and its height is about 0.8 mm. Therefore, the height of the second partition 31b is greater than the height of the first partition 31a.

第一隔板30a和第二隔板30b的表面电阻为5×1013Ω。每个隔板开口28和第一和第二隔板30a、30b相互校直。第一隔板30a和第二隔板30b通过隔板开口28相互连接,形成一个整体部件。第一隔板30a和第二隔板30b由此与格栅24一体形成,夹紧格栅24就夹入在两侧面上。The surface resistance of the first separator 30 a and the second separator 30 b was 5×10 13 Ω. Each baffle opening 28 and the first and second baffles 30a, 30b are aligned with each other. The first bulkhead 30a and the second bulkhead 30b are connected to each other by the bulkhead opening 28 to form a unitary part. The first partition 30a and the second partition 30b are thus integrally formed with the grid 24, and the clamping grid 24 is clamped on both sides.

如上述构成的隔板组件22插入在第一衬底10和第二衬底12之间。第一隔板30a和第二隔板30b分别邻接第一衬底10和第二衬底12的内表面,承载作用于这些衬底上的空气负荷。因此,隔板30a和30b支撑作用于这些衬底上的空气负荷,并使这些衬底保持间隔规定的距离。The spacer assembly 22 constituted as described above is interposed between the first substrate 10 and the second substrate 12 . The first spacer 30a and the second spacer 30b adjoin the inner surfaces of the first substrate 10 and the second substrate 12, respectively, carrying the air load acting on these substrates. Therefore, the spacers 30a and 30b support the air load acting on these substrates, and keep these substrates at a prescribed distance apart.

如图2所示,SED具有给格栅24和第一衬底10的金属壳17提供电压的供压单元(未图示)。该供压单元与格栅24和金属壳17相连接。它将一个电压,例如为12kv和一个等于或小于12kv的电压分别提供给格栅12和金属壳17。作用于格栅24上的电压设定成等于或大于作用于第一衬底10上的电压。As shown in FIG. 2 , the SED has a voltage supply unit (not shown) that supplies voltage to the grid 24 and the metal shell 17 of the first substrate 10 . The pressure supply unit is connected with the grid 24 and the metal shell 17 . It supplies a voltage, for example, 12 kv and a voltage equal to or less than 12 kv to the grid 12 and the metal case 17, respectively. The voltage applied to the grid 24 is set to be equal to or greater than the voltage applied to the first substrate 10 .

为了使SED显示图像,阳极电压作用于荧光屏16和金属壳17上,该阳极电压加速了从电子发射元件18发射出的电子束B,使该电子束撞击在荧光屏16上。电子束激活荧光屏16的荧光层。以此显示图像。In order for the SED to display an image, an anode voltage is applied to the phosphor screen 16 and the metal case 17 , which accelerates the electron beam B emitted from the electron emission element 18 to impinge on the phosphor screen 16 . The electron beams activate the phosphor layers of the phosphor screen 16 . This displays the image.

将解释上述的SED类型的制造方法。为了制造隔板组件22,准备具有规定尺寸的格栅24,和两个尺寸几乎相同的矩形板的第一和第二印模36a和36b。在此情况下,对由Fe-45-55%Ni形成的厚度为0.12mm的薄板进行脱脂、清洗和干燥处理。此后,在该薄板上通过蚀刻形成电子束通道孔26和隔板开口28,由此提供格栅24。整个格栅24通过氧化工艺进行氧化处理,在格栅24的表面上、每个电子束通道孔26的内表面上和每个隔板开口28的内表面上形成绝缘膜。而且,具有精细氧化锑颗粒散布在其中的溶液喷洒到绝缘膜上,形成溶液层。该溶液层经过干燥和烧制,由此形成高阻膜。A manufacturing method of the above-mentioned SED type will be explained. To manufacture the separator assembly 22, a grid 24 having a prescribed size, and two first and second stampers 36a and 36b of rectangular plates of almost the same size are prepared. In this case, a thin plate formed of Fe-45-55%Ni with a thickness of 0.12 mm was degreased, washed and dried. Thereafter, electron beam passage holes 26 and spacer openings 28 are formed by etching on the thin plate, thereby providing the grid 24 . The entire grid 24 is oxidized by an oxidation process to form an insulating film on the surface of the grid 24 , on the inner surface of each electron beam passage hole 26 and on the inner surface of each partition opening 28 . Also, a solution having fine antimony oxide particles dispersed therein is sprayed onto the insulating film to form a solution layer. The solution layer is dried and fired, thereby forming a high-resistance film.

如图4所示,用作铸模的第一印模36a和第二印模36b分别设有通孔38a和38b。孔38a和38b分别用于形成隔板。这些通孔分别与格栅24的隔板开口28准直分布。第一和第二印模36a和36b涂覆能够至少在通孔38a和38b的内表面上进行热分解的树脂。As shown in FIG. 4, a first die 36a and a second die 36b serving as a mold are provided with through holes 38a and 38b, respectively. Holes 38a and 38b are used to form partitions, respectively. These through-holes are respectively distributed in alignment with the partition openings 28 of the grid 24 . The first and second stampers 36a and 36b are coated with a resin capable of thermally decomposing at least on the inner surfaces of the through holes 38a and 38b.

第一印模36a位于格栅24的第一表面24a上,在定位时,使用与格栅24相对应的隔板开口28准直的通孔38a。同样,第二印模36b位于格栅24的第二表面24b上,在定位时,使用与格栅24相对应的隔板开口28准直的通孔38b。第一印模36a、格栅24和第二印模36b使用夹持器(未图示)等相互进行固定。The first stamp 36a is positioned on the first surface 24a of the grid 24 using through-holes 38a aligned with the corresponding bulkhead openings 28 of the grid 24 when positioned. Likewise, a second die 36b is positioned on the second surface 24b of the grid 24 using through-holes 38b aligned with the corresponding bulkhead openings 28 of the grid 24 when positioned. The first stamper 36a, the grid 24, and the second stamper 36b are fixed to each other using a clamper (not shown) or the like.

然后,例如,从第一印模36a的外表面提供粉浆隔板形成材料40,填充第一印模36a的通孔38a,格栅24的隔板开口28和第二印模36b的通孔38b。至少包含紫外线固化粘合剂(有机分量)和玻璃填料的玻璃粉浆用作隔板形成材料40。Then, for example, the slip barrier forming material 40 is supplied from the outer surface of the first stamp 36a, filling the through holes 38a of the first stamp 36a, the barrier openings 28 of the grid 24 and the through holes of the second stamp 36b. 38b. A glass frit containing at least an ultraviolet curable binder (organic component) and a glass filler is used as the spacer forming material 40 .

随后,紫外线(下文称之为UV)作为辐射从第一和第二印模36a和36b的外表面侧作用于所填充的隔板形成材料40上,固化隔板形成材料。此后,如果需要可执行热固化处理。然后,作用于第一印模36a的通孔38a和第二印模36b的通孔38b上的树脂通过热处理进行热分解,形成图5所示的隔板形成材料40和通孔之间的缝隙。例如,通过将银粉浆或导电材料作用于隔板形成材料40的每层两端,即,仅是那些将形成第一隔板30a和第二隔板30b的部分上,执行丝网印刷处理。然后,从格栅24中去除第一和第二印模36a和36b。Subsequently, ultraviolet rays (hereinafter referred to as UV) act as radiation on the filled spacer forming material 40 from the outer surface sides of the first and second stamps 36a and 36b, curing the spacer forming material. Thereafter, heat curing treatment may be performed if necessary. Then, the resin applied to the through holes 38a of the first stamper 36a and the through holes 38b of the second stamper 36b is thermally decomposed by heat treatment, forming gaps between the spacer forming material 40 and the through holes shown in FIG. . For example, the screen printing process is performed by applying silver paste or a conductive material to both ends of each layer of the spacer forming material 40, ie, only those portions where the first spacer 30a and the second spacer 30b will be formed. Then, the first and second stamps 36 a and 36 b are removed from the grid 24 .

接着,在加热炉中对已具有由隔板材料40形成的第一和第二隔板30a和30b的格栅24进行热处理。由此粘合剂从隔板形成材料中蒸发掉。此后,隔板形成材料均匀地以大约500至550℃温度烧制30分钟至一小时。具有第一和第二隔板30a和30b的隔板组件22由此如图6所示设置在格栅24上。此时,银粉浆的银成分散布在第一和第二隔板30a和30b的远端上,距离大约为0.15mm。结果是,第一和第二隔板30a和30b获取,asbulgs,导电部分31a和31b。该导电部分31a和31b在远端包含银,并与隔板30a和30b一体形成。Next, the grid 24 having the first and second partitions 30a and 30b formed of the partition material 40 is heat-treated in a heating furnace. As a result, the binder evaporates from the separator-forming material. Thereafter, the separator forming material is uniformly fired at a temperature of about 500 to 550° C. for 30 minutes to one hour. The baffle assembly 22 having the first and second baffles 30a and 30b is thus disposed on the grid 24 as shown in FIG. 6 . At this time, the silver component of the silver paste is spread on the distal ends of the first and second spacers 30a and 30b at a distance of about 0.15mm. As a result, the first and second spacers 30a and 30b acquire, asbulgs, the conductive portions 31a and 31b. The conductive portions 31a and 31b contain silver at the distal ends and are integrally formed with the spacers 30a and 30b.

与此同时,准备第一衬底10和第二衬底12。第一衬底10具有荧光屏16和金属壳17。第二衬底12具有电子发射元件18和引线21,并与侧壁14连接。At the same time, the first substrate 10 and the second substrate 12 are prepared. The first substrate 10 has a fluorescent screen 16 and a metal shell 17 . Second substrate 12 has electron emission elements 18 and leads 21 and is connected to side wall 14 .

然后,如上所述构成的隔板组件22分布在第二衬底12上。此时,隔板组件22的定位要使第二隔板30b的延伸端位于引线21上。由此定位的第一衬底10、第二衬底12和隔板组件22分布在真空室中。该真空室被排空,第一衬底使用侧壁14连接第二衬底。由此能够制造具有隔板组件22的SED。Then, the spacer assembly 22 constructed as described above is distributed on the second substrate 12 . At this time, the spacer assembly 22 is positioned such that the extended end of the second spacer 30 b is located on the lead 21 . The thus positioned first substrate 10, second substrate 12 and spacer assembly 22 are distributed in the vacuum chamber. The vacuum chamber is evacuated and the first substrate is connected to the second substrate using side walls 14 . Thereby, the SED having the separator assembly 22 can be manufactured.

如图3所示,从位于第二隔板30b附近的电子发射元件18发射出的电子束B受到第二隔板30b的远端部的导电部分31b产生的电场的排斥。因此,电子束B向电子束通道孔26传播,同时在偏离第二隔板的通道中行进。此后,电子束B被充电过的第二隔板30b吸引,并在接近于这些隔板的通道中行进。然后,电子束B被构成第一隔板30a的远端部的导电部分31a产生的电场排斥。因此,电子束B向荧光屏16传播,同时在偏离第以二隔板的通道中行进。斥力和引力抵偿了电子束B偏离该通道。电子发射元件18发射出的电子束B最后到达荧光屏16的目标荧光体。As shown in FIG. 3, the electron beams B emitted from the electron emission elements 18 located near the second spacer 30b are repelled by the electric field generated by the conductive portion 31b at the distal end portion of the second spacer 30b. Accordingly, the electron beam B propagates toward the electron beam passage hole 26 while traveling in a passage deviated from the second partition. Thereafter, the electron beams B are attracted by the charged second spacers 30b, and travel in channels close to these spacers. Then, the electron beam B is repelled by the electric field generated by the conductive portion 31a constituting the distal end portion of the first spacer 30a. Therefore, the electron beam B propagates toward the fluorescent screen 16 while traveling in a path deviated from the second partition. The repulsive and attractive forces compensate for the electron beam B's deviation from the channel. The electron beams B emitted from the electron emitting elements 18 finally reach the target phosphors of the phosphor screen 16 .

电子发射元件18和隔板之间的距离越短,电子束行进向隔板的距离就越长。相反,如果电子发射元件和隔板之间的距离足够长,电子束行进向隔板的距离短的可忽略不计。电子束一直保持运动直到在荧光屏表面产生的二次电子或反射电子撞击隔板,并对隔板进行充电为止。用于SED中的加速电压是这样的一个值,即二次电子的发射系数是1或更大。因此,隔板侧壁被正向充电,并将电子束吸引到隔板上。The shorter the distance between the electron emitting element 18 and the spacer, the longer the electron beam travels to the spacer. On the contrary, if the distance between the electron-emitting element and the spacer is sufficiently long, the distance traveled by the electron beams to the spacer is negligibly short. The electron beam keeps moving until the secondary electrons or reflected electrons generated on the surface of the screen hit the spacer and charge the spacer. The acceleration voltage used in the SED is such a value that the emission coefficient of secondary electrons is 1 or more. Therefore, the side walls of the spacer are positively charged and the electron beams are attracted to the spacer.

在该SED中,不会通过放电隔板产生从隔板排斥电子束的电场。相反,电场是通过分别在第一和第二隔板30a和30b的远端部设置导电部分31a和31b产生的,第一和第二隔板30a和30b分别位于第一和第二衬底10和12的附近。因此导电部分31a和31b的高度能被控制以改变磁场的强度,最后,控制排斥的程度。In this SED, an electric field that repels electron beams from the spacer is not generated through the discharge spacer. On the contrary, the electric field is generated by disposing the conductive portions 31a and 31b at the distal ends of the first and second spacers 30a and 30b, which are located on the first and second substrates 10, respectively. and the vicinity of 12. Thus the height of the conductive portions 31a and 31b can be controlled to vary the strength of the magnetic field and, finally, to control the degree of repulsion.

从此,即使第一和第二隔板30a和30b经过充电,并吸引电子束B,也能防止电子束B在SED中偏离通道。这样就能防止电子束B错误的登陆,由此,降低了色纯度的退化。因此该SED能够显示高质量的图像。From this, even if the first and second spacers 30a and 30b are charged and attract the electron beam B, the electron beam B can be prevented from being deviated from the path in the SED. This prevents erroneous landing of the electron beams B, thereby reducing degradation in color purity. Therefore, the SED can display high-quality images.

在设置在隔板上的导电部分中,设置在第二衬底12上的导电部分31b位于电子发射侧附近。导电部分31b产生的电场极大地影响了电子束的通道。即,电子束对导电部分31b产生的电场敏感。因此,即使导电部分31b的高度,如第二衬底12测量的那样,改变一点,电子束的通道也将会改变很多。这就是为什么如果导电部分31b在制造过程中已获取不同的高度,从许多电子发射元件发射出的电子束也会移动不同距离的原因。因此,电子束的通道仅使用设置在第二衬底附近的导电部分31b是几乎不能进行精确地控制的。Among the conductive portions provided on the spacer, the conductive portion 31b provided on the second substrate 12 is located near the electron emission side. The electric field generated by the conductive portion 31b greatly affects the passage of electron beams. That is, the electron beams are sensitive to the electric field generated by the conductive portion 31b. Therefore, even if the height of the conductive portion 31b, as measured by the second substrate 12, changes a little, the path of the electron beam will change a lot. This is why the electron beams emitted from many electron-emitting elements also move by different distances if the conductive portion 31b has acquired different heights during the manufacturing process. Therefore, the passage of electron beams can hardly be precisely controlled using only the conductive portion 31b provided in the vicinity of the second substrate.

然而,根据本发明的实施例,电子束的通道能够在SED中很容易地进行高精度的控制。这是因为导电部分31a和31b分别设置在第一和第二隔板30a和30b的远端部上,减轻了导电部分31b施加给电子束上的作用。具有较低灵敏度的导电部分31a补偿了不足通道的校正。这就能够容易和正确地控制电子束的通道。However, according to the embodiment of the present invention, the passage of electron beams can be easily controlled with high precision in the SED. This is because the conductive portions 31a and 31b are provided on the distal end portions of the first and second spacers 30a and 30b, respectively, reducing the effect of the conductive portion 31b on the electron beams. The conductive portion 31a with lower sensitivity compensates for the correction of insufficient channels. This enables easy and correct control of the passage of the electron beams.

因此,导电部分31a和31b不必高精度的形成。因此,它们能够易于制造。即,导电部分设置在第一隔板30a和第二隔板30b的远端部上,因此获得与通过仅在第二衬底12的侧面上设置精确高度的导电部分而实现的相同效果。Therefore, the conductive portions 31a and 31b do not have to be formed with high precision. Therefore, they can be easily manufactured. That is, the conductive portion is provided on the distal end portions of the first spacer 30a and the second spacer 30b, thus obtaining the same effect as that achieved by providing the conductive portion at a precise height only on the side surface of the second substrate 12 .

如果第一和第二隔板30a和30b全部呈现为电导性,那么从第一衬底10经过隔板流向第二衬底12的无效电流将会增大而使温度升高和增加了功耗。而且,呈电导性的每个隔板的部件在SED工作时产生气体,可能会使离子撞击在位于隔板附近的电子发射元件上。If the first and second spacers 30a and 30b all exhibit electrical conductivity, the reactive current flowing from the first substrate 10 through the spacers to the second substrate 12 will increase to increase the temperature and increase the power consumption. . Also, the parts of each spacer that are electrically conductive generate gas during operation of the SED, which may cause ions to impinge on electron-emitting elements located near the spacers.

在本实施例中,第一和第二隔板30a和30b分别仅在其远端部设有导电部分31a和31b。每个隔板是三段式结构,或者是导体—绝缘体—导体单元。因此,隔板不会使无效电流增加、温度升高或离子碰撞。导电部分31a和31b改变了隔板周围的电场,能够容易和准确地控制电子束的路径。In this embodiment, the first and second partitions 30a and 30b are provided with conductive portions 31a and 31b only at their distal ends, respectively. Each partition is a three-section structure, or a conductor-insulator-conductor unit. Therefore, the separator does not cause an increase in reactive current, an increase in temperature, or collision of ions. The conductive portions 31a and 31b change the electric field around the spacer, enabling easy and accurate control of the path of the electron beams.

准备一种根据本实施例的SED和一种具有隔板、而隔板各自没有导电部分31a和31b的SED,它们根据电子束的运动进行比较。在没有导电部分31a和31b的SED中,电子束被吸引向隔板大约120μm。在根据本实施例的SED中,电子束的运动距离为±20μm,而且,图像的色纯度得到改善。An SED according to this embodiment and an SED having spacers each having no conductive portions 31a and 31b were prepared, and they were compared in terms of movement of electron beams. In the SED without the conductive portions 31a and 31b, the electron beam is attracted towards the spacer by about 120 [mu]m. In the SED according to the present embodiment, the moving distance of the electron beam is ±20 μm, and the color purity of the image is improved.

在SED中,格栅24分布在第一衬底10和第二衬底12之间,第一隔板30a的高度小于第二隔板30b的高度。因此,格栅24比第二隔板12更接近于第一隔板10。因此,即使第一隔板10产生放电,格栅24也能够防止设置在第二隔板12上的电子发射元件18产生放电损耗。因而,SED在阻止放电方面具有优越的性能,并能够显示质量改善的图像。In the SED, the grids 24 are distributed between the first substrate 10 and the second substrate 12, and the height of the first spacer 30a is smaller than the height of the second spacer 30b. Therefore, the grid 24 is closer to the first partition 10 than the second partition 12 . Therefore, even if the first spacer 10 is discharged, the grid 24 can prevent the electron emission elements 18 provided on the second spacer 12 from being damaged by discharge. Thus, the SED has superior performance in preventing discharge and can display images with improved quality.

在上述结构的SED中,第一隔板30a的高度小于第二隔板30b的高度。因此,即使作用于格栅24上的电压大于作用于第一衬底10上的电压,电子发射元件18发射出的电子也能够可靠地到达荧光屏上。In the above-structured SED, the height of the first spacer 30a is smaller than the height of the second spacer 30b. Therefore, even if the voltage applied to the grid 24 is higher than the voltage applied to the first substrate 10, the electrons emitted from the electron-emitting elements 18 can reliably reach the phosphor screen.

将描述一种根据本发明第二实施例的隔板的制造方法。具有规定尺寸的格栅24用与根据第一实施例方法相同的方式来形成。而且,准备第一和第二印模36a和36b。随后,第一印模36a位于格栅24的第一表面24a上,并用与格栅24的隔板开口28准直的通孔38a进行定位,如图4所示。同样,第二印模36b位于格栅24的第二表面24b上,并用与格栅24的隔板开口28准直的通孔38b进行定位。第一印模36a、格栅24和第二印模36b使用夹持器(未图示)等相互固定。A method of manufacturing a separator according to a second embodiment of the present invention will be described. A grid 24 having a prescribed size is formed in the same manner as in the method according to the first embodiment. Also, first and second stampers 36a and 36b are prepared. The first stamp 36a is then positioned on the first surface 24a of the grid 24 and positioned with the through holes 38a aligned with the bulkhead openings 28 of the grid 24, as shown in FIG. Likewise, a second die 36b is positioned on the second surface 24b of the grid 24 and is positioned with through-holes 38b aligned with the bulkhead openings 28 of the grid 24 . The first stamper 36a, the grid 24, and the second stamper 36b are fixed to each other using a clamper (not shown) or the like.

然后,例如,从第一印模36a的外表面提供粉浆隔板形成材料40,填充第一印模36a的通孔38a,格栅24的隔板开口28和第二印模36b的通孔38b。至少包含紫外线固化粘合剂(有机成分)和玻璃填料的玻璃粉浆用作隔板形成材料40。Then, for example, the slip barrier forming material 40 is supplied from the outer surface of the first stamp 36a, filling the through holes 38a of the first stamp 36a, the barrier openings 28 of the grid 24 and the through holes of the second stamp 36b. 38b. A glass frit containing at least an ultraviolet curable binder (organic component) and a glass filler is used as the spacer forming material 40 .

随后,UV射线从第一和第二印模36a和36b的外表面侧作用于所填充的隔板形成材料40上,固化隔板形成材料。此后,如果需要可执行热固化处理。然后,作用于第一印模36a的通孔38a和第二印模36b的通孔38b上的树脂通过热处理进行热分解,形成图7所示的隔板形成材料40和通孔之间的缝隙。然后,从格栅24中去除第一和第二印模36a和36b。Subsequently, UV rays act on the filled spacer-forming material 40 from the outer surface sides of the first and second stamps 36a and 36b, curing the spacer-forming material. Thereafter, heat curing treatment may be performed if necessary. Then, the resin applied to the through holes 38a of the first stamper 36a and the through holes 38b of the second stamper 36b is thermally decomposed by heat treatment, forming gaps between the spacer forming material 40 and the through holes shown in FIG. . Then, the first and second stamps 36 a and 36 b are removed from the grid 24 .

接着,在加热炉中对已具有由隔板材料40形成的第一和第二隔板30a和30b的格栅24进行热处理。由此粘合剂从隔板形成材料中蒸发掉。此后,由非常精细的银颗粒和etradecane溶液组成的一种溶液,例如,通过喷墨工艺作用于第一隔板30a的远端部和第二隔板30b的远端部上,如图8所示,同时隔板形成材料40在烧制前仍然是多孔的。所作用的溶液通过毛细管作用渗透进第一和第二隔板30a和30b的远端部。深度大约为0.2mm。Next, the grid 24 having the first and second partitions 30a and 30b formed of the partition material 40 is heat-treated in a heating furnace. As a result, the binder evaporates from the separator-forming material. Thereafter, a solution composed of very fine silver particles and etradecane solution, for example, acts on the distal end portion of the first spacer 30a and the distal end portion of the second spacer 30b by an inkjet process, as shown in FIG. As shown, while the spacer forming material 40 is still porous before firing. The applied solution penetrates into the distal end portions of the first and second partitions 30a and 30b by capillary action. The depth is about 0.2mm.

然后,具有第一和第二隔板30a和30b的格栅24放置在加热炉上。格栅24被均匀地以大约500至550℃温度烧制30分钟至一小时。这种烧制使构成隔板形成材料的玻璃晶粒融合在一起。因此,获得隔板组件22。同时,获得具有导电部分31a和31b的第一和第二隔板30a和30b,as bulgs。该导电部分31a和31b各具有包含银的远端部。Then, the grid 24 having the first and second partitions 30a and 30b is placed on the furnace. The grid 24 is evenly fired at a temperature of about 500 to 550° C. for 30 minutes to one hour. This firing fuses together the glass grains constituting the spacer forming material. Thus, a separator assembly 22 is obtained. At the same time, first and second spacers 30a and 30b having conductive portions 31a and 31b are obtained, as bulgs. The conductive portions 31a and 31b each have a distal end portion containing silver.

此后,第一衬底10、隔板组件22和第二衬底12以与第一实施例中相同的方法连接在一起。结果是,能够制造一种具有隔板组件22的SED。Thereafter, the first substrate 10, the spacer assembly 22, and the second substrate 12 are connected together in the same method as in the first embodiment. As a result, an SED having the spacer assembly 22 can be manufactured.

准备一种根据本实施例的SED和一种具有隔板、而隔板各自没有导电部分31a和31b的SED,它们根据电子束的运动进行比较。在没有导电部分31a和31b的SED中,电子束被吸引向隔板大约120μm。在根据本实施例的SED中,电子束的运动距离为±20μm,而且,图像的色纯度得到改善。An SED according to this embodiment and an SED having spacers each having no conductive portions 31a and 31b were prepared, and they were compared in terms of movement of electron beams. In the SED without the conductive portions 31a and 31b, the electron beam is attracted towards the spacer by about 120 [mu]m. In the SED according to the present embodiment, the moving distance of the electron beam is ±20 μm, and the color purity of the image is improved.

本实施例在其它结构方面与第一实施例的相同。与第一实施例中相同的那些部件用相同的参考标号表示,对其就不作详细描述了。具有用根据第二实施例的方法制造的隔板的SED能够获得与第一实施例相同的效果。This embodiment is the same as the first embodiment in terms of other structures. Components that are the same as those in the first embodiment are denoted by the same reference numerals and will not be described in detail. The SED having the separator manufactured by the method according to the second embodiment can obtain the same effect as that of the first embodiment.

将描述一种根据本发明第三实施例的隔板的制造方法。格栅24用与根据第一实施例方法相同的方式形成。而且,准备第一和第二印模36a和36b。随后,第一印模36a位于格栅24的第一表面24a上,并用与格栅24的隔板开口28准直的通孔38a进行定位,如图9所示。同样,第二印模36b位于格栅24的第二表面24b上,并用与格栅24的隔板开口28准直的通孔38b进行定位。第一印模36a、格栅24和第二印模36b使用夹持器(未图示)等相互固定。A method of manufacturing a separator according to a third embodiment of the present invention will be described. The grid 24 is formed in the same manner as in the method according to the first embodiment. Also, first and second stampers 36a and 36b are prepared. The first stamp 36a is then positioned on the first surface 24a of the grid 24 and positioned with the through-holes 38a aligned with the bulkhead openings 28 of the grid 24, as shown in FIG. Likewise, a second die 36b is positioned on the second surface 24b of the grid 24 and is positioned with through-holes 38b aligned with the bulkhead openings 28 of the grid 24 . The first stamper 36a, the grid 24, and the second stamper 36b are fixed to each other using a clamper (not shown) or the like.

然后,从第一印模36a的外表面提供用作隔板形成材料的第一粉浆40a,填充第一印模36a的通孔38a,格栅24的隔板开口28和第二印模36b的通孔38b。通孔38a和38b的端部没有被第一粉浆40a所填充,在这些通孔38a和38b中留一些空间。第一粉浆40a是一种至少包含UV固化粘合剂和玻璃填料的绝缘玻璃粉浆。该粉浆不包含导电成份。Then, the first slip 40a serving as a spacer forming material is supplied from the outer surface of the first stamp 36a, filling the through holes 38a of the first stamp 36a, the spacer openings 28 of the grid 24 and the second stamp 36b. The through hole 38b. The ends of the through holes 38a and 38b are not filled with the first slip 40a, leaving some spaces in these through holes 38a and 38b. The first slip 40a is an insulating glass slip comprising at least a UV-curable binder and a glass filler. The paste does not contain conductive components.

随后,从第二印模36b的外表面提供用作隔板形成材料的第二粉浆40b给通孔38a和38b的端部,在第一粉浆40a之上。第二粉浆40b是一种包含UV固化粘合剂(有机成份)、玻璃填料和Au微粒的玻璃粉浆。该Au微粒用作导电成份。Subsequently, the second paste 40b serving as a barrier-forming material is supplied from the outer surface of the second stamper 36b to the end portions of the through holes 38a and 38b, over the first paste 40a. The second paste 40b is a glass paste containing a UV-curable binder (organic component), glass filler, and Au particles. The Au microparticles serve as a conductive component.

接着,UV射线从第一和第二印模36a和36b的外表面侧作用于所使用的第一和第二粉浆40a和40b上。第一和第二粉浆40a和40b用UV射线进行固化。此后,如果需要可执行热固化处理。然后,作用于第一印模36a的通孔38a和第二印模36b的通孔38b上的树脂通过热处理进行热分解。以此形成隔板形成材料40和通孔之间的缝隙。然后,从格栅24中去除第一和第二印模36a和36b。Next, UV rays are applied to the used first and second slips 40a and 40b from the outer surface sides of the first and second stampers 36a and 36b. The first and second slips 40a and 40b are cured with UV rays. Thereafter, heat curing treatment may be performed if necessary. Then, the resin acting on the through holes 38a of the first stamper 36a and the through holes 38b of the second stamper 36b is thermally decomposed by heat treatment. This forms a gap between the spacer forming material 40 and the through hole. Then, the first and second stamps 36 a and 36 b are removed from the grid 24 .

接着,在加热炉中对已具有由第一和第二粉浆40a和40b形成的第一和第二隔板30a和30b的格栅24进行热处理。由此粘合剂从第一和第二粉浆40a和40b中蒸发掉。粘合剂由此被去除掉。而且,第一和第二粉浆40a和40b被均匀地以大约500至550℃温度烧制30分钟至一小时。因此,获得隔板组件22,它具有在格栅24上形成的第一和第二隔板30a和30b,如图11所示。同时,获得第一和第二隔板30a和30b,as bulgs,其远端部具有包含扩散了Au的导电部分31a和31b。Next, the grid 24 having the first and second partitions 30a and 30b formed of the first and second slips 40a and 40b is heat-treated in a heating furnace. The binder thus evaporates from the first and second slips 40a and 40b. The adhesive is thereby removed. Also, the first and second slips 40a and 40b are uniformly fired at a temperature of about 500 to 550° C. for 30 minutes to one hour. Thus, a partition assembly 22 is obtained, which has first and second partitions 30a and 30b formed on the grid 24, as shown in FIG. Simultaneously, first and second spacers 30a and 30b, as bulgs, having conductive portions 31a and 31b containing Au diffused at their distal end portions were obtained.

此后,第一衬底10、隔板组件22和第二衬底12以与第一实施例中相同的方法连接在一起。结果是,能够制造一种具有隔板组件22的SED。Thereafter, the first substrate 10, the spacer assembly 22, and the second substrate 12 are connected together in the same method as in the first embodiment. As a result, an SED having the spacer assembly 22 can be manufactured.

准备一种根据本实施例的SED和一种具有隔板、而隔板各自没有导电部分31a和31b的SED,它们根据电子束的运动进行比较。在没有导电部分31a和31b的SED中,电子束被吸引向隔板大约120μm。在根据本实施例的SED中,电子束的运动距离为±20μm,而且,图像的色纯度得到改善。An SED according to this embodiment and an SED having spacers each having no conductive portions 31a and 31b were prepared, and they were compared in terms of movement of electron beams. In the SED without the conductive portions 31a and 31b, the electron beam is attracted towards the spacer by about 120 [mu]m. In the SED according to the present embodiment, the moving distance of the electron beam is ±20 μm, and the color purity of the image is improved.

第三实施例在其它结构方面与第一实施例的相同。与第一实施例中相同的那些部件用相同的参考标号表示,对其就不作详细描述了。具有用根据第三实施例的方法制造的隔板的SED能够获得与第一实施例相同的效果。The third embodiment is the same as the first embodiment in other configurations. Components that are the same as those in the first embodiment are denoted by the same reference numerals and will not be described in detail. The SED having the separator manufactured by the method according to the third embodiment can obtain the same effect as that of the first embodiment.

本发明并不局限于上述的实施例。在本发明的范围内可对其进行各种修改。例如,本发明并不局限于具有格栅的图像显示设备。它可适用于没有格栅的图像显示设备。在此情况下,可使用一体形成的隔板,其形状可以是柱状,或是板状,每个隔板分别在正对第一和第二衬底的远端设有两个导电部分。这样的设备能够获得与上述实施例相同的效果。The present invention is not limited to the above-described embodiments. Various modifications can be made thereto within the scope of the present invention. For example, the present invention is not limited to image display devices having a grid. It is applicable to an image display device without a grille. In this case, integrally formed spacers may be used, the shape of which may be columnar or plate-shaped, and each spacer is provided with two conductive portions at the distal ends facing the first and second substrates, respectively. Such a device can obtain the same effects as those of the above-described embodiments.

如果需要,隔板的高度、其它部件的尺寸、材料等可以改变。在上述实施例中,设置在第二衬底上的每个隔板的端部位于设置在第二衬底上的引线之上。但是,它也可以位于其它任何位置,只要它与电子发射元件相间隔即可。The height of the partitions, dimensions of other components, materials, etc. can be changed if necessary. In the above-described embodiments, the end portion of each spacer provided on the second substrate is located above the lead provided on the second substrate. However, it may be located at any other position as long as it is spaced from the electron-emitting element.

格栅24和第一衬底可设定在相同的电位。如果是这样的情况,第一隔板可用导电材料进行填充,由此其全部呈现出导电性。The grid 24 and the first substrate can be set at the same potential. If this is the case, the first spacers may be filled with a conductive material, whereby they all assume electrical conductivity.

在上述的实施例中,第一和第二隔板分别设有可导电的远端部。但是,也可仅有第二隔板在正对第二衬底的端部设有导电部分。使用该隔板,可构成SED。In the above-mentioned embodiments, the first and second partitions are respectively provided with conductive distal ends. However, only the second spacer may be provided with the conductive portion at the end facing the second substrate. Using this separator, an SED can be configured.

电子源并不局限于表面导电的电子发射元件。因此,本发明能够适用于使用了电子源的任何FED,如场发射元件或碳纳米管,该FED可在真空中发射电子。The electron source is not limited to surface conduction electron-emitting elements. Therefore, the present invention can be applied to any FED using an electron source, such as a field emission element or carbon nanotube, which emits electrons in a vacuum.

工业实用性Industrial Applicability

本发明能够提供一种图像显示设备,其中电子束的路径能被易于控制,而不会使温度升高、功耗增加或制造成本提高,由此能够显示较高质量的图像。本发明还能够提供一种在图像显示设备中使用的隔板的制造方法,和一种具有用该方法制造的隔板的图像显示设备。The present invention can provide an image display apparatus in which the path of electron beams can be easily controlled without increasing temperature, power consumption, or manufacturing cost, thereby enabling display of higher quality images. The present invention can also provide a method of manufacturing a spacer used in an image display device, and an image display device having a spacer manufactured by the method.

Claims (18)

1. image display comprises:
First substrate has the face;
Second substrate, relative with first substrate, and have the gap, also have a plurality of electron sources, its formation can divergent bundle with the fluorescence excitation face; With
A plurality of dividing plates are made by insulating material, are arranged between first substrate and second substrate, and the atmospheric loading of supporting role on first substrate and second substrate,
Each dividing plate has distal portion at first and second substrates respectively, distal portion dipping electric conducting material, and form current-carrying part.
2. image display as claimed in claim 1, wherein: the concentration of electric conducting material reduces to its middle part gradually from arbitrary distal portion of dividing plate in the current-carrying part.
3. image display as claimed in claim 1 or 2, wherein: dividing plate is made by the insulating material that comprises glass, and each current-carrying part comprises and has conductivity and be dispersed in metal particle in the glass composition, and the glass composition forms each dividing plate.
4. image display as claimed in claim 1 or 2, wherein: dividing plate is made by the insulating material that comprises glass, and each current-carrying part comprises and has conductivity and be dispersed in metal ingredient in the glass composition, and the glass composition forms each dividing plate.
5. image display as claimed in claim 3, wherein: metal particle is from by Ni, In, Ag, Au, Pt, Ir selects a kind of particulate of metal at least in the group that Ru and W form.
6. image display as claimed in claim 1, wherein: the lead-in wire of a plurality of current potential special uses is arranged on second substrate, and the end that is positioned at each dividing plate on second substrate is distributed on the current potential dedicated pin.
7. image display as claimed in claim 6, wherein: electron source is the electronic emission element of surface conductance.
8. image display as claimed in claim 7, wherein: the current potential dedicated pin is that current potential is acted on lead-in wire on the electron source.
9. image display as claimed in claim 1 or 2, it comprises: tabular grid, be arranged between first and second substrates, have a plurality of electron beam channel holes that electron source provides that are respectively, wherein each dividing plate is fixed on the grid.
10. the manufacture method of a plurality of dividing plates in the image display, this image display comprises: first substrate has the face; Second substrate, relative with first substrate, and have the gap, also have a plurality of electron sources, its formation can divergent bundle with the fluorescence excitation face; With a plurality of dividing plates, make by insulating material, be arranged between first substrate and second substrate, the atmospheric loading of supporting role on first substrate and second substrate, this method comprises:
By using insulating material to form dividing plate;
The powder slurry or the solution that will comprise arbitrary conductive compositions join on the distal portion of each dividing plate, and make powder slurry or solution rely on capillarity to infiltrate through distal portion;
Fire each dividing plate that powder slurry or solution have permeated, provide a kind of dividing plate that has the current-carrying part of dipping electric conducting material in distal portion with this.
11. the manufacture method of dividing plate as claimed in claim 10, wherein: the powder slurry acts on the distal portion of each dividing plate, provides a kind of dividing plate that has the current-carrying part of dipping electric conducting material in distal portion with this.
12. the manufacture method of the dividing plate that uses in the image display, this image display comprises: first substrate has the face; Second substrate, relative with first substrate, and have the gap, also have a plurality of electron sources, its formation can divergent bundle with the fluorescence excitation face; With a plurality of dividing plates, make by insulating material, be arranged between first substrate and second substrate, the atmospheric loading of supporting role on first substrate and second substrate, this method comprises:
By using insulating material to form dividing plate;
The powder slurry that will comprise conductive compositions joins on the distal portion of dividing plate; With
The dividing plate that is added with the powder slurry is carried out heat treatment, and the distal portion diffusion conductive compositions at dividing plate provides a kind of dividing plate that has the current-carrying part of dipping electric conducting material in distal portion thus.
13. the manufacture method of dividing plate as claimed in claim 12, wherein: the powder slurry acts on the distal portion of each dividing plate, provides a kind of dividing plate that has the current-carrying part of dipping electric conducting material in distal portion with this.
14. the manufacture method of the dividing plate that uses in the image display, this image display comprises: first substrate has the face; Second substrate, relative with first substrate, and have the gap, also have a plurality of electron sources, its formation can divergent bundle with the fluorescence excitation face; With a plurality of dividing plates, make by insulating material, be arranged between first substrate and second substrate, the atmospheric loading of supporting role on first substrate and second substrate, this method comprises:
Preparation has the die of a plurality of through holes, is used to form dividing plate;
First powder slurry that does not comprise conductive compositions is filled in the through hole;
Second powder slurry of dispersed electro-conductive composition therein is filled in the through hole, second powder slurry is acted on first powder slurry with this; With
Heat first powder slurry and second powder slurry, provide a kind of thus and have the dividing plate of the current-carrying part of dispersed electro-conductive composition therein in distal portion.
15. the manufacture method of dividing plate as claimed in claim 14, wherein: after first powder slurry is injected in the through hole, second powder slurry is injected into the through hole from the two ends of each through hole, therefore second powder slurry acts on first powder slurry, thus, provide a kind of dividing plate that has the current-carrying part of the composition of diffusion conduction therein in distal portion.
16. an image display comprises:
First substrate has the face;
Second substrate, relative with first substrate, and have the gap, also have a plurality of electron sources, its formation can divergent bundle with the fluorescence excitation face; With
A plurality of dividing plates by arbitrary described method manufacturing forms as claim 10 to 15, are arranged between first substrate and second substrate atmospheric loading of supporting role on first substrate and second substrate.
17. image display as claimed in claim 16, it comprises tabular grid, and this grid has a plurality of electron beam channel holes that electron source provides that are respectively, and dividing plate is fixed on the grid.
18. an image display comprises:
First substrate has the face;
Second substrate, relative with first substrate, and have the gap, also have a plurality of electron sources, its formation can divergent bundle with the fluorescence excitation face;
Grid is arranged between first and second substrates, forms tabularly, has a plurality of electron beam channel holes that electron source provides that are respectively; With
A plurality of dividing plates, by as claim 10,12 and 14 arbitrary described method manufacturings form, and are arranged between first substrate and second substrate, have current-carrying part and the atmospheric loading of supporting role on first substrate and second substrate in the distal portion that is positioned on second substrate respectively.
CNA038225891A 2002-09-27 2003-09-25 Image display device, method of manufacturing a spacer for use in the image display device, and image display device having spacers manufactured by the method Pending CN1685463A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105700219A (en) * 2015-12-18 2016-06-22 厦门天马微电子有限公司 A color filter and a manufacture method therefor, and a display panel

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004311247A (en) 2003-04-08 2004-11-04 Toshiba Corp Image display device and method of manufacturing spacer assembly used for image display device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5859502A (en) * 1996-07-17 1999-01-12 Candescent Technologies Corporation Spacer locator design for three-dimensional focusing structures in a flat panel display
JP3187367B2 (en) * 1997-03-31 2001-07-11 キヤノン株式会社 Electronic device and image forming apparatus using the same
KR20010031780A (en) * 1997-12-17 2001-04-16 비센트 비.인그라시아, 알크 엠 아헨 Field emission device having a composite spacer
JP4095195B2 (en) * 1999-02-15 2008-06-04 キヤノン株式会社 Electron beam generator and image forming apparatus
JP2001272926A (en) * 2000-03-23 2001-10-05 Toshiba Corp Spacer assembly for flat panel display, flat panel display provided with the same, method for manufacturing spacer assembly, mold used for manufacturing spacer assembly
US6441559B1 (en) * 2000-04-28 2002-08-27 Motorola, Inc. Field emission display having an invisible spacer and method
JP3999942B2 (en) * 2001-02-20 2007-10-31 京セラ株式会社 SUBSTRATE WITH PROJECT MEMBER, ITS MANUFACTURING METHOD, AND IMAGE FORMING APPARATUS
JP2003297265A (en) * 2002-04-03 2003-10-17 Toshiba Corp Image display device and method of manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105700219A (en) * 2015-12-18 2016-06-22 厦门天马微电子有限公司 A color filter and a manufacture method therefor, and a display panel

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