CN1588558B - A scanning probe microscope probe driving device - Google Patents

Abstract

The invention discloses a probe driving device of a scanning probe microscope, which comprises a fixing groove, a clamping sleeve, a slider, a shear crystal and a piezoelectric ceramic tube. The pair of shearing crystals are arranged in the clamping sleeve, clamped with the rectangular sleeve and can slide along its inner wall, and the clamping sleeve is arranged in the fixing groove through two pairs of shearing crystals fixed on opposite sides of the outer wall. The fixing groove is clamped and can slide laterally along the direction perpendicular to the driving direction of the shear crystal on the slider. The piezoelectric ceramic tube is axially fixed to the slider, and the piezoelectric ceramic tube connected to the slider is responsible for the longitudinal movement of the probe. The piezoelectric ceramic tube connected with the probe is responsible for the fine adjustment of the position in three dimensions. The device can realize large-scale and high-precision adjustment of the position of the probe (or sample) of the scanning probe microscope in the three-dimensional direction in a very limited small space.

Description

A scanning probe microscope probe driving device

technical field

The invention relates to a driving device, in particular to a scanning probe microscope probe driving device installed in an electron microscope.

Background technique

People use the newly invented scanning probe microscope technology to measure the surface structure and surface physical, chemical and mechanical properties of material micro-regions. Scanning probe microscopes usually include two parts, mechanical and electronic, and the mechanical part controls the scanning probe microscope probe. The electronic part is responsible for loading various signals and processing the detected data signals. In recent years, with the continuous development of nanotechnology, people have invested a lot of manpower and material resources in the research of new methods and technologies for nanostructure and physical property characterization. However, due to the microscopic structure of nanomaterials, how to manipulate nanomaterials and perform in-situ The characterization of structure and physical properties has become a difficult problem for researchers. The existing equipment that can directly observe the microstructure is the electron microscope. Combining it with the scanning probe microscope makes it possible to solve the above problems. However, the sample transportation and operation space of the electron microscope are very limited. The tip of the scanning probe microscope can be precisely driven in a large range in three dimensions within a small operating space.

Contents of the invention

In view of the deficiencies in the prior art, the purpose of the present invention is to provide a driving device capable of adjusting the position of the probe (or sample) of a scanning probe microscope in a large range and with high precision in three-dimensional directions in a small space.

In order to achieve the above object, the scanning probe microscope probe driving device of the present invention includes a fixed groove, a clamping sleeve, a slider, a shear crystal and a piezoelectric ceramic tube. The shearing crystal is set in the clamping sleeve, clamped with the rectangular sleeve and can slide along its inner wall, and the clamping sleeve is arranged in the fixing groove through two pairs of shearing crystals fixed on the opposite sides of the outer wall, and fixed The groove is clamped and can slide laterally along the direction perpendicular to the driving direction of the shear crystal on the slider. The piezoelectric ceramic tube is fixed axially with the slider, and the piezoelectric ceramic tube connected with the slider is responsible for longitudinal movement. The other piezoelectric ceramic tube is The electroceramic tube is responsible for the fine adjustment of the three-dimensional direction position.

Further, the outer surface of the fixing groove is arc-shaped, and the inner surface is stepped to match the clamping sleeve.

Further, the clamping sleeve is a rectangular sleeve.

Further, the slider is in the shape of a cuboid.

Further, the position of the shear crystal is close to the two ends of the slider and the clamping sleeve, and its thickness matches the installation gap.

Further, there are two piezoelectric ceramic tubes, and the two piezoelectric ceramic tubes are butted and installed at one end of the slider.

Further, there are two piezoelectric ceramic tubes, which can also be respectively installed at both ends of the slider.

Further, the top end of the piezoelectric ceramic tube responsible for the fine adjustment of the three-dimensional direction is provided with a probe mounting seat.

Further, the piezoelectric ceramic tube, the probe mount, and the slider are connected by insulating material, and the connection is cured with vacuum insulating resin glue.

Further, an insulating layer is provided between the shear crystal, the rectangular sleeve layer and the fixing groove, and the insulating layer may be a thin gemstone sheet.

In the present invention, four pairs of shear crystals and the first piezoelectric ceramic tube fixed to the slider are used to control the movement of the probe in the horizontal and vertical directions respectively, and then the three-dimensional direction is realized through the second piezoelectric ceramic tube bonded to the probe. For the fine adjustment of the upper position, due to the high-precision driving function of the shear crystal and the piezoelectric ceramic tube, the coarse adjustment range in the three-dimensional direction of the present invention is more than 1 mm, and the fine adjustment accuracy is 0.1 nm.

Description of drawings

Fig. 1 is the structure diagram of fixed shear crystal on the slider;

Fig. 2 is a schematic structural diagram of the slider and the clamping sleeve being fixed;

Fig. 3 is a schematic diagram of the structure of the clamping sleeve installed in the fixing groove;

Fig. 4 is a three-dimensional schematic view of the clamping sleeve installed in the fixing groove;

Figure 5 is a schematic diagram of the connection of the piezoelectric ceramic tube;

Figure 6 is a schematic diagram of the overall structure of the present invention;

FIG. 7 is a structural schematic diagram of piezoelectric ceramic tubes respectively arranged at both ends of the slider;

Fig. 8 is the schematic diagram of the electrode arrangement on the cut crystal;

Fig. 9 is a schematic diagram of the electrode arrangement of the piezoelectric ceramic tube with the metal tube installed;

Fig. 10 is a schematic diagram of the electrode arrangement of the piezoelectric ceramic tube installed on the slider.

Detailed ways:

As shown in FIG. 1 , the slider 1 is in the shape of a cuboid, and two pairs of shear crystals 2 are fixed on opposite sides of its outer surface.

As shown in Figure 2, the slider 1 is made of hard and light materials. The slider 1 is fixed in the clamping sleeve layer 3 by shearing the crystal 2, clamped with the clamping sleeve layer 3 and can be moved along its inner wall. Sliding, the clamping sleeve layer 3 is a rectangular sleeve, and a thin gem piece is arranged between the inner wall of the clamping sleeve layer 3 and the shearing crystal 2, which not only plays a good insulating role, but also is smooth and wear-resistant, and the shearing The area of the cut crystal is larger than the area of the gemstone that is bonded to it, so as to leave a space to paste the wire. Of course, the slider can also be made into a long strip with other cross-sectional shapes, such as a parallelogram in cross-section, as long as the bonding shears The two opposite sides of the cut crystal are parallel to each other, and the lateral movement of the probe can be realized, but in the limited installation space, the moving distance and efficiency will be reduced; two opposite sides of the outer wall of the clamping layer 3 are fixed For the shear crystal 4 , the outer wall of the fixed shear crystal 4 is perpendicular to the outer surface of the fixed shear crystal on the slider 1 .

As shown in Figure 3 and Figure 4, the outer surface of the fixing groove 5 is arc-shaped, and its inner surface is in the shape of a ladder matching the clamping sleeve 3, and the clamping sleeve 3 with the slider 1 is opposite to each other through its outer wall. Two pairs of shear crystals 4 on both sides are arranged in the fixed groove 5, and the inner wall of the fixed groove 5 is provided with an installation groove 6 matched with the shear crystal 4, and the clamping sleeve layer 3 is clamped with the fixed groove 5 and can be aligned with Slider 1 slides laterally in a direction perpendicular to the driving direction of the shear crystal.

As shown in Figure 5, the piezoelectric ceramic tube 6 and the piezoelectric ceramic tube 7 are connected by a connector made of insulating material. The connector is thick in the middle and thin on both sides, and the thin end is inserted into the piezoelectric ceramic tube. The seat is a metal tube 9, and the piezoelectric ceramic tube 7 and the thin metal tube 9 are connected with an insulating plug 8, and the center of the insulating plug 8 is drilled with a thin hole for inserting the thin metal tube 9.

As shown in Figure 6, the piezoelectric ceramic tube 6 and the slider 1 are also connected by an insulating material. The used insulating connecting material is made of a material that is hard and less outgassed. , the other end is thick, and it is glued to the slider 1, and all the glued and possibly loose places are solidified with vacuum insulating resin glue. The setting of the piezoelectric ceramic tube can also adopt the method as shown in FIG. 7 , the piezoelectric ceramic tube 6 is bonded to one end of the slider, and the piezoelectric ceramic tube 7 is bonded to the other end of the slider.

As shown in Figure 8, each group of shear crystals has two electrodes, which are responsible for the loading of the driving voltage; The loading of driving voltage for lateral (4 electrodes) and vertical (1 electrode) movement; as shown in Figure 10, the piezoelectric ceramic tube 2 connected to the slider has two electrodes, and the driving voltage is applied to make the ceramic tube expand and contract. The difference in telescopic speed causes the probe to move longitudinally.

Whether the shear crystal and the slider connected together can be insulated or not, if it is insulated (the slider is made of insulating material), more leads are needed, and the electrode leads on the contact side of the shear crystal and the slider need to be combined together Grounding, if it is not insulated (the slider is made of metal material), you only need to ground the slider, and the wires of every two pairs of shear crystals on the slider and the rectangular sleeve are connected in series so that voltage can be applied at the same time, so that They shear and move in the same direction and amplitude, and complete a movement in a certain lateral direction.

Claims (7)

1. driving device for scan probe microscopic probe, it is characterized in that, comprise pickup groove, clamp jacket layer, slide block, shear crystal for two pairs first, shear crystal for two pairs second, first piezoelectric ceramic tube and second piezoelectric ceramic tube, described slide block is arranged in the described clamping jacket layer by the described two pairs first shearing crystal that are fixed on its relative both sides of outside surface, clamp also and can slide with described clamping jacket layer along its inwall, described clamping jacket layer is arranged in the described pickup groove by the described two pairs second shearing crystal that are fixed on its relative both sides of outer wall, clamp also and can laterally slide with described pickup groove along the direction vertical with the described two pairs first shearing crystal-driven directions on the described slide block, be installed in an end of described slide block after described first piezoelectric ceramic tube and the butt joint of second piezoelectric ceramic tube, described first piezoelectric ceramic tube and described slide block axial restraint, the top of described second piezoelectric ceramic tube is provided with the probe mount pad that is used to install probe, shear crystal and described two pairs second by described two pairs first and shear crystal control probes moving in the horizontal, by described first piezoelectric ceramic tube control probe moving in the vertical, finish the fine tuning of position on the three-dimensional by described second piezoelectric ceramic tube again, shear crystal for every group two electrodes are arranged, be responsible for the loading of driving voltage, described first piezoelectric ceramic tube has two electrodes, load driver voltage makes this ceramic pipe flexible, difference by stretching speed, cause that probe vertically moves, described second piezoelectric ceramic tube has 5 electrodes, and wherein 4 electrodes are responsible for loading the driving voltage that laterally moves, 1 electrode is responsible for loading the driving voltage that vertically moves.

2. driving device for scan probe microscopic probe, it is characterized in that, comprise pickup groove, clamp jacket layer, slide block, shear crystal for two pairs first, shear crystal for two pairs second, first piezoelectric ceramic tube and second piezoelectric ceramic tube, described slide block is arranged in the described clamping jacket layer by the described two pairs first shearing crystal that are fixed on its relative both sides of outside surface, clamp also and can slide with described clamping jacket layer along its inwall, described clamping jacket layer is arranged in the described pickup groove by the described two pairs second shearing crystal that are fixed on its relative both sides of outer wall, clamp also and can laterally slide with described pickup groove along the direction vertical with the described two pairs first shearing crystal-driven directions on the described slide block, described first piezoelectric ceramic tube and second piezoelectric ceramic tube are installed in the two ends of described slide block respectively, with described slide block axial restraint, the top of described second piezoelectric ceramic tube is provided with the probe mount pad that is used to install probe, shear crystal and two pairs second by described two pairs first and shear crystal control probe moving in the horizontal, by described first piezoelectric ceramic tube control probe moving in the vertical, finish the fine tuning of position on the three-dimensional by described second piezoelectric ceramic tube again, shear crystal for every group two electrodes are arranged, be responsible for the loading of driving voltage, described first piezoelectric ceramic tube has two electrodes, load driver voltage makes this ceramic pipe flexible, difference by stretching speed, cause that probe vertically moves, described second piezoelectric ceramic tube has 5 electrodes, and wherein 4 electrodes are responsible for loading the driving voltage that laterally moves, 1 electrode is responsible for loading the driving voltage that vertically moves.

3, driving device for scan probe microscopic probe as claimed in claim 1 or 2 is characterized in that, the outside surface of described pickup groove is circular arc, its inside surface be with described clamping jacket layer match stepped.

4. driving device for scan probe microscopic probe as claimed in claim 1 or 2 is characterized in that described clamping jacket layer is a rectangular sleeve.

5. driving device for scan probe microscopic probe as claimed in claim 1 or 2 is characterized in that described slide block is rectangular-shaped.

6. driving device for scan probe microscopic probe as claimed in claim 1 or 2, it is characterized in that, the position of described two pairs first shearing crystal is the two ends of close described slide block respectively, the position of described two pairs second shearing crystal is the two ends of close described clamping jacket layer respectively, and described two pairs first thickness and the assemblage gaps of shearing crystal and two pairs second shearing crystal match.

7. driving device for scan probe microscopic probe as claimed in claim 1 or 2 is characterized in that, adopts insulating material to be connected between described first piezoelectric ceramic tube and the described slide block, and the junction is cured with the vacuum insulation resin glue.

8. driving device for scan probe microscopic probe as claimed in claim 1 or 2 is characterized in that, is provided with insulation course between described two pairs first shearing crystal and the described clamping jacket layer, and this insulation course is thin jewel sheet.

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