CN1570674A - Microlens manufacturing method and manufacturing device thereof - Google Patents

Abstract

A manufacturing method of micro lens and its manufacturing device, especially relating to a manufacturing method of micro lens and micro lens array by micro fluid, and its manufacturing device, including providing a medium substrate; then, forming a film on the medium substrate, and patterning the film to form a film-free or film-containing area with a micro lens pattern on the medium substrate; then, a micro-fluid coating step is performed to coat a micro-fluid on the area without or with the thin film to form a micro-lens.

Description

Microlens manufacturing method and manufacturing device thereof

technical field

The present invention relates to a manufacturing method of a microlens and a manufacturing device thereof, in particular to a method of manufacturing a microlens and a microlens array by microfluidic cloth and a manufacturing device thereof.

Background technique

In the field of finished products of micro-optical components, optical lenses are gradually applied to optoelectronic products such as "optical communication" and "digital imaging" because of their basic functions of allowing light to pass through and changing the optical path. In the above-mentioned application, the miniature passive optical element is mostly attached to the main system body (major system body) by means of glue in the micro-package stage. The main disadvantages are:

This two-pass packaging approach is often a major factor in process failures for micro-opto-electric products.

Traditional inkjet-based technology (inkjet-based technology) has the ability to control the generation of micro-droplets. The size of the droplets is mostly between 5-12pl (pico-liter; abbreviated as pl). The corresponding liquid The droplet diameter ranges from 10 μm to 50 μm. In recent years, such micron-scale fluid generation technology has begun to be used in biochips in the field of biomedicine, color filters for liquid crystal displays in the field of optoelectronics, and organic transistors in the field of semiconductors. In terms of the characteristic dimension of the main active area of these components, it can be concluded that the width of a single line diameter is mostly between 10 μm and 100 μm, while the thickness of the line diameter is not greater than about 10 μm.

The single width of the above-mentioned feature size is closely related to the diameter of micro-droplets in the core technology of inkjet today, especially the basic principle that the droplet diameter cannot be greater than the width of the line diameter. At the same time, most of the components of the micro-droplets are solvents that can be evaporated (volatilized) at room temperature, so the diameter and thickness of the micro-droplets are mostly less than 1 micron. Therefore, when we apply this dimensional analysis to the micro-lens manufacturing process, we find that the circle radius of its characteristic size can range from tens of microns to hundreds of microns, which is basically roughly Fall within the width range that the droplet diameter can form. Unfortunately, however, this is not the case with regard to the height of the feature size. For example, for semi-sphericallens, its height value (t) can be obtained by the mathematical formula R=[t ² +(D/2) ² ]/(2t),

Here, the R value represents its radius of curvature, and the D value represents its circular diameter. And, the value of this radius of curvature R can be calculated and obtained by the physical relation f=R/(n-1);

Here, the f value represents its lens focus radius (focallength), while the n value represents its light refractive index (refractive index).

Thus, when we use general glass (n=1, 5) to manufacture a microlens with a focal radius (f) of 450 μm, its focal radius R value is estimated to be about 225 μm;

Then, when the circle radius (D/2) of this lens is 180 μm, it can be calculated that its height t value will be as high as 90 μm. Obviously, this lens height is much larger than the basic principle of less than 1 micron in the common case mentioned above, which causes a big manufacturing problem.

US Patent No. 5,434,876 discloses a method based on photolithography-based technology to manufacture a micro-lens array. Although microlithography has the advantage of high positional accuracy, it has manufacturing limitations related to exposure energy in terms of coating photoresist height.

U.S. Patent No. 5,644,431 discloses an extrusion and molding technology (extruding&molding technology), which uses general optical plastic materials (plastic, such as PP, PPT) to manufacture a micro-lens array (micro-lens array) with a specific mold (mask). sheet). This technology has the advantage of being highly productive, but there are manufacturing limitations in manufacturing size and precision.

It is particularly worth noting that the above-mentioned methods all need to use pre-manufactured patterns (with a mask or a mold) for production, which makes it difficult to change the position of the microlens elastically and increases the cost.

US Pat. Nos. 5,498,444 and 5,707,684 disclose methods for manufacturing optical lenses using inkjet heads, mainly using inkjet technology as the core to manufacture micro-optical elements. However, the disclosed inkjet technology content is limited to how to make optical elements of various shapes, but does not discuss how to make a precise positioning and systematic method on a media substrate. At the same time, when the height of a single lens droplet is much greater than 1 micron, the problem of cross-talking in-between drops caused by the shrinking distance between adjacent lens droplets is also ignored.

Further, when discussing that the liquid flow of the lens droplet is injected into the surface of the medium substrate in the air, the interface line of the liquid, solid and gas phases (interfacial line) will eventually reach a state of contact angle equilibrium, this physics The relational expression can be calculated by γ _LV cos(θ)=γ _SV -γ _LS and ΔP=ρgt=γ _LS (1/r ₁ +1/r ₂ ) of the Young-Laplace equation;

Here, the θ value represents the contact angle of the liquid-solid phase interface (contact tangle), the γ _LV , γ _SV , and γ _LS values represent the surface energy of the liquid-gas, solid-gas, and liquid-solid phase interfaces respectively, and the ΔP value Indicates the pressure difference between the inside and outside of the liquid, the ρ value represents the liquid density, the g value represents the acceleration of gravity, the t value represents the maximum height of the liquid, and the r ₁ and r ₂ values represent the curvature radius of the liquid in two directions on the solid surface.

It can be found that when the values of γ _LV , γ _SV , and γ _LS are respectively given, the contact angle θ of the liquid-solid interface line can be obtained by calculation; at the same time, it is assumed that the curvature of the liquid on the solid surface The radii are exactly the same (that is, the arcs with directional differences, r ₁ =r ₂ =r) and the liquid volume (V), density, and acceleration of gravity are known, then the t and r values can be further determined by the mathematical relationship V=π/6×[t ³ +3r ² t] is calculated and obtained.

So far, it is known that the surface energy properties of the liquid-gas, solid-gas, and liquid-solid interfaces can be used to precisely control the position and shape of the liquid on the surface of the media substrate. In other words, according to the desired position and size of the lens, hydrophilic or hydrophobic patterning areas (hydrophilic or hydrophobic patterning) can be produced on the surface of the media substrate, so that the liquid can be precisely controlled at a specific position on the surface of the media substrate and Complete the formation of shape of the lens object.

However, further consideration must be given to the fluiddynamics of the liquid before reaching a contact angle equilibrium state. When inkjet technology is used to inject liquid, the microfluid with mass (m) has a moving velocity (v) before reaching the surface of the medium substrate, which gives the microfluid a moment of inertia (momentum of inertia, P) and Energy (energy, E); wherein, the moment of inertia P value can be represented by the physical relation P=mv, and the energy E value can be represented by E=1/2×mv ² to represent the kinetic energy.

In this way, the momentum change ΔP mass produces a force, which is overcome by the friction force (τ) generated by the viscosity of the liquid (τ) between the solid surfaces and the tension (σ) of the liquid surface energy. Since the speed of microfluidics can be as high as 10meter/second, microfluidics must go through tens of microseconds (micro-second, μs) to tens of milliseconds (mini-second, ms) to reach the above-mentioned Young-Laplace static equilibrium. . However, during this short period of time, the dynamic contact circle radius (r _t ) of the liquid on the medium substrate surface may sometimes be larger than the static equilibrium circle radius r value (over-size), and sometimes may be smaller than the static equilibrium circle radius r value (under-size);

And the variation (Δr/r=|r _t -r|/r) value can be as high as 25% or more, which makes the phenomenon of mutual interference (cross-talking) occur between adjacent lens droplets and cause mixed deformation, thus The predetermined static equilibrium position cannot be reached.

Note: This basic phenomenon of viscoelastic movement of oscillating microfluid will continue until its energy E is directly converted into heat energy and completely dissipated. After the static equilibrium is reached, the liquid must be transformed into a solid phase through cooling phase change or evaporation (volatility), and finally form the desired microlens object. This kind of phase change process from liquid to solid phase (no fluidity) must go through a period of about several seconds to several minutes; during this period, although the magnitude of the change in the radius of the circle remains approximately constant $(\mathrm{\Δr}/r\≅0),$ However, the shape change (deformation) is still caused by contact with other external objects.

Invention content:

The purpose of the present invention is to provide a method for manufacturing microlenses, using microfluidic cloth to manufacture microlenses and microlens arrays, overcoming the above-mentioned defects in the prior art, and based on inkjet technology, to achieve the development of accurate The purpose of localizing (localizing) the hydrophilic (repellent) hydrophobic patterning area (patterning) of the micro-droplet.

Yet another object of the present invention is to provide a method of manufacturing a microlens, by providing a single-stage (one-pass) method that does not need to be bonded again, to directly and accurately manufacture the microlens on a predetermined media substrate ) on purpose.

Another object of the present invention is to provide a method of manufacturing microlenses and a manufacturing device thereof, through the interlaced deposition (interlaced deposition) injection method, to achieve the desired lens manufacturing shape, mainly using "time" and " The interlaced deposition jetting methodology (jetting methodology) separated from the "position", during the period of achieving the above-mentioned static equilibrium, and even during the period of achieving the phase change of the solid, the formation of adjacent lens liquids can ensure that there is no interaction between them. The phenomenon of interference (cross-talking) affects the normal completion of the purpose.

The object of the present invention is achieved in this way: a method of manufacturing a microlens, comprising the following steps: providing a medium substrate; forming a film on the medium substrate; patterning the film to form a microlens pattern without or a thin-film area on the medium substrate; and performing a microfluidic dispensing step, distributing a microfluid on the thin-film-free or thin-film area to form a microlens object.

The present invention also provides a method for manufacturing microlenses, which is suitable for manufacturing lens arrays in a staggered pattern, comprising the following steps: providing a medium substrate; forming a thin film on the medium substrate; patterning the thin film to form a microlens A film-free or film-free area of the lens pattern is on the media substrate; and a microfluidic dispensing step is performed in a staggered manner to deposit a microfluid on the film-free or film-free area.

According to a preferred embodiment of the present invention, wherein, the staggered layout method is divided into four times by time, and is completed by dividing into four areas in conjunction with the position, and further includes the following steps:

Define the first starting point, perform injection at the first time, and use p ₁ , which is twice the value of the pitch p, as the injection pitch in the X and Y directions, and perform staggered placement to complete the microfluidic pattern placement in the first area;

Define the second starting point, carry out the injection at the second time, and then use p ₁ as the injection pitch, and carry out staggered layout in the X and Y directions to complete the layout of the microfluidic pattern in the second area;

Define the third starting point, carry out the injection at the third time, and then use p ₁ as the injection pitch, and carry out staggered layout in the X and Y directions to complete the microfluidic pattern layout in the third area;

And define the fourth starting point, carry out the injection at the fourth time, and then use _p1 as the injection pitch, carry out staggered laying in the X and Y directions, and complete the fourth area microfluidic pattern laying; wherein, the second starting point The position of the third starting point is shifted by p in the X and Y directions relative to the first starting point, the third starting point is shifted by p in the X direction relative to the first starting point, and the fourth starting point is moved by p in the Y direction relative to the first starting point.

According to another preferred embodiment of the present invention, wherein, the staggered layout method is completed by dividing the time into two parts and dividing it into two areas in conjunction with the position, and further includes the following steps:

Define a first starting point, carry out injection at the first time, set p ₁ which is twice the value of the pitch p in the X direction as the injection pitch, and set a pitch p which is half the value of the injection pitch in the Y direction, and perform staggered placement , complete the microfluidic patterning in the first area;

And define a second starting point, carry out the injection at the second time, take _p1 which is twice the value of the pitch p as the injection pitch in the X direction and use a pitch p which is half of the value of the injection pitch in the Y direction, and perform staggering Laying, completing the microfluidic pattern distributing in the second area; wherein, all the injection fluids in the same Y direction are naturally superimposed into one body, so as to obtain a long cylindrical mirror array with a radian; wherein, the second starting point is opposite to The position of the first starting point is shifted by p in the X direction.

The present invention further provides a micro-lens manufacturing device, comprising: a micro-fluid injection unit for injecting micro-lens materials; an injection control unit for controlling the injection unit to perform injection of micro-fluids ; a motion platform, including a medium base, cooperating with the microfluid injection unit to move the microfluid interlaced; a drive control unit, used to control the motion coordinate position of the motion platform; and a computer A control unit is used to communicate with the injection control unit and the drive control unit.

The manufacturing device of the above-mentioned microlens further includes: a pulse wave timing unit; a first light source; a strobe-type light source control, used to control the first light source; a first camera, which cooperates with the computer control unit to contact the strobe-type light source Controlling and driving the pulse wave timing unit and the injection unit are used to watch the microfluid at any moment in time coordination; a second light source; a second light source control unit is used to control the second light source; and a second camera, Turn on the second light source through the second light source control unit to check the result of the microlens.

The present invention further provides a method for manufacturing a microlens, which is suitable for manufacturing a microlens grating sheet of a three-dimensional image, comprising the following steps: providing a medium object having a first surface and a second surface; printing on the first side of the media object to form a color flat image; using a heating unit to accelerate drying of the color flat image to fix the color flat image; and injecting microlens fluid material on the second side of the media object to produce a micro lens Lens array; the first and second sides are respectively printed with a color plane image and a microlens array as a lenticular film with stereo images.

The present invention further provides a microlens manufacturing device, which is suitable for producing a microlens grating sheet of a three-dimensional image by means of microfluidic distribution injection, including: a set of feed rollers, used to advance a predetermined medium object Direction incoming; a color inkjet printing head unit, used to print the color inkjet droplets on the medium object to form a color plane image; a heating unit, used to accelerate the drying of the color plane image to fix the image; a reverse The rotating roller is used to turn the media object printed with images downward; and a microlens injection unit is used to inject the microlens fluid material on the reverse side of the media object to produce a microlens array.

The following describes in detail with accompanying drawings and preferred embodiments.

Description of drawings

Fig. 1 is the schematic diagram of the basic structure of a single microlens proposed by the present invention as the technical basis;

Fig. 2 is a schematic diagram of the basic structure of a plurality of microlenses proposed by the present invention as the technical basis;

Fig. 3 is a schematic diagram of the implementation steps of the present invention utilizing the micro-development method and the micro-fluid distribution method to manufacture the micro-lens;

Fig. 4 is a schematic diagram of the opposite implementation steps of Fig. 3 of the present invention;

Fig. 5 is a schematic diagram of the implementation steps of the present invention to manufacture microlenses in the way of multiple droplets and microfluid superposition;

Fig. 6 is a micro-developing method of the present invention, which is more suitable for the situation that the interface between the surface of the medium substrate and the material of the microlens is essentially affinity;

FIG. 7 is another micro-development method disclosed by the present invention, which is more suitable for the situation where the interface between the surface of the medium substrate and the material of the microlens is essentially repellent;

Fig. 8 is a schematic diagram of the injection rule of a kind of staggered cloth of the present invention;

Fig. 9 is a schematic diagram of another jet injection rule suitable for interlaced arrangement of strip lens arrays provided by the present invention;

Figure 10 is a schematic diagram of the structure of the injection equipment used to implement the microfluidic placement method or the superimposed placement method of the present invention;

FIG. 11 is a schematic diagram of the implementation steps and device of the microlens lenticular sheet for stereoscopic images by using the microfluidic deposition method or the superimposed deposition method of the present invention.

Detailed ways

Firstly, in order to describe the technical method to be disclosed in the present invention simply and conveniently, the present invention proposes a basic structure of a single microlens as the technical basis.

Referring to Fig. 1, two main objects are provided: a medium substrate 1 (media substrate) with a surface 2 and a micro-lens 3 (micro-lens); superior.

Here, the basic structural dimensions of a single microlens are clearly defined, including the height H of the media substrate 1, the refractive index n (refractive index of mediasubstrate) of the media substrate 1, the circle diameter D of the microlens, the radius of curvature R of the microlens, and The thickness t of the microlens.

If the microlens is used as an optical lens (opticallens), the microlens must have the basic functions of allowing light to pass through (transmittance) and changing the optical path (changing of raypath); At the common focus (focus point), the focal length f value (focus length) can be obtained by the following formula (1). At the same time, the volume value of the microlens 3 can also be obtained by formula (2).

f＝R/(n-1)        (1)

V=π/6×[t ³ +3r ² t], r=D/2 (2)

where R=[t ² +r ² ]/(2t)

Referring to FIG. 2 , further, a basic structure of multiple microlenses is proposed here as a technical basis.

Referring to FIG. 2 , a media substrate 1 (media substrate) and a plurality of micro-lenses (micro-lens) including micro-lenses 3, micro-lenses 4, and micro-lenses 5 are provided.

The basic structural dimensions of multiple microlenses are clearly defined, including the height H of the media substrate 1, the refractive index n (refractive index of media substrate) of the media substrate 1, the circle radius r of the microlens, the curvature radius R of the microlens, and The thickness t of the microlens.

In addition, the relative positional relationship among the lens arrays still needs to be added, the center-to-center distance value p (pitch of lenses) between the lenses. Wherein, the gap value 6 between the microlens 3 and the microlens 4, and the gap value 7 between the microlens 3 and the microlens 5, these two gap values w (not shown) may be greater than or equal to zero. Thus, for an expanded array of multiple microlenses, attention must be paid to the relative positional relationship of the lens array regulated by the following formula (3).

2×r+w=p, w≥0 (3)

For micro-sized objects, the radius r and the focal length f of the microlens are mostly defined between tens of micrometers and hundreds of micrometers.

For example, assuming that a given glass lens (n=1, 5) has a circle radius r value of 180 μm and a focal length f value of 450 μm, the required focus radius R value can be calculated using formula 1 and formula 2, respectively, It is about 225 μm, the height t value is 90 μm, and the volume V value is estimated to be 4.96 nano-liter(nl).

So far, the present invention has made a sufficiently complete basic structure definition for a single microlens and a plurality of microlenses. Thereafter, the technical method, process and equipment structure of how to manufacture these microlenses by microfluidics will be described in detail.

In order to achieve the precise positioning of the microlens on the medium substrate (precisedeposition), the present invention provides the use of micro-development (lithographypatterning, abbreviated as LP) method and micro-fluidic deposition (abbreviated as MD) to achieve this purpose, as shown in Figure 3 The flow of manufacturing steps shown.

Referring to shown in Figure 3, at first a clean and pollution-free medium substrate 1 (media substrate) is provided;

Then, in step S3-1, utilize physical vapor deposition (PVD) or wet coating method (wetdeposition by spin or slitcoating) to make a thin film 8 on the medium substrate 1 front; Generally speaking, the material of this thin film 8 has Hydrophobic photoresist material (photoresist, abbreviated as PR), such as Teflon (Teflon), polyvinyl chloride (PVC), polyvinyl alcohol (PVA) or silicone photoresist, the thickness can be between about 10 nanometers to about between 1 micron.

Then, in step S3-2, use a mask with the same pattern of microlenses to perform exposure and development, for example, I-line 365nm/5mW mercury lamp light source for irradiation, so that the surface of the medium substrate 1 can be obtained. Desired microlens flat style. At the same time, the surface of the medium substrate 1 is divided into a region with a film 8a and a region without a film 8b, and a region with a film 8a and a microlens material (for example, polyvinyl-butyral (poly-vinyl-butyral, PVB) )/cured particles (ParticulateMatter, PM), ethylene glycol butyl ether acetate (propylene glycol monomethyl etheracetate, PGMEA)) interface is phase repellency but no film 8b area and the interface between the microlens material is affinity, That is to say, the medium substrate 1 and the microlens material are made of both hydrophilic or hydrophobic materials. For example, if the radius of the microlens plane of the photomask is r and the gap is w, then the width of the area without the thin film 8b is w and the width of the area with the thin film 8a is 2×r=D.

Finally, in step S3-3, the desired lens object 3 is formed by micro-fluidic depositing in the area without the thin film 8b.

It is worth noting that the interface between the media substrate 1 and the microlens material in this embodiment is essentially affinity, that is, the media substrate 1 and the microlens material are both hydrophilic or hydrophobic. As mentioned earlier, when the lens fluid reaches a static equilibrium, it will be precisely positioned by natural forces due to the affinity (repellency) patterned regions on the surface of the media substrate 1 .

In addition, the patterns shown in FIG. 3 can be in various geometric shapes such as strips, squares, circles, ellipses, etc., depending on the desired microlens pattern.

FIG. 4 shows the reverse manufacturing process flow of FIG. 3, revealing another micro-development method, which is more suitable for the situation where the interface between the surface of the medium substrate 1 and the microlens material is essentially repellent, for example, the medium substrate 1 is copolymerized polypropylene (PP), polyethylene terephthalate (polyethyleneterephthalate, PET) and other materials.

Referring to shown in Fig. 4, in step S4-1, utilize the same method as step S3-1 of Fig. 3 to make a thin film 9, generally speaking, the material of this thin film generally has hydrophilic material (for example , SiO ₂ , TiO ₂ ), the thickness may be between about 10 nm and about 1 micron.

Then, in step S4-2, use a mask sheet with the same pattern of microlenses to perform exposure imaging and development, for example, I-line 365nm/5mW mercury lamp light source for irradiation, so that the surface of the medium substrate 1 Obtain the desired microlens plane pattern. At the same time, the surface of the medium substrate 1 is divided into a region without a thin film 9a and a region with a thin film 9b, and the region without the thin film 9a and the microlens material (for example, polyvinyl-butyral (poly-vinyl-butyral, PVB) )/cured particles (Particulate Matter, PM), propylene glycol mono methyle ther acetate (PGMEA)), the interface between is hydrophobic (hydrophobic), but there is a gap between the film 9b area and the microlens material The interface between them is affinity.

Finally, in step S4-3, the desired lens object 3 is formed by micro-fluidic depositing on the area with the thin film 9b. Again as previously mentioned, when the lens fluid reaches a static equilibrium, it will be precisely positioned by natural forces due to the affinity (repellency) patterned regions on the surface of the media substrate 1 .

In addition, the patterns shown in FIG. 4 can be in various geometric shapes such as strips, squares, circles, ellipses, etc., depending on the desired microlens pattern.

Here, we should pay special attention to: the effect of the above-mentioned "patterning" method is to limit the size of the circle diameter (D) of the desired microlens; in other words, for a specific If the microfluidic liquid droplet with volume V is desired to obtain a larger height t value, then the above-mentioned method is not enough to achieve this purpose. On the other hand, many types of microfluidic droplets (fluid) are mainly solvents composed of solute and solvent.

Generally speaking, assuming that the content of the solute component is s, the content of the solvent component is 100%-s. In this case, although the circle diameter (D) of the microlens will not change, the final volume of the microlens will be reduced to V×s (or in other words, reduced by 100%-s).

For example, if a microfluidic droplet of a certain volume V is composed of sixty percent (ie, s=60%) of the solute polyvinylbutyral (poly-vinyl-butyral, PVB) and four percent Ten (that is, 100%-s=40%) solvent ethylene glycol butyl ether ester (propylene glycol mono methyl ether, PGMEA) is formed solution, then the final solidification formation volume of the microlens that it forms will be reduced to V x 60% (or, 40% less).

Referring to Figure 5, below we further expand the micro-fluid deposition in the above step S4-3 to obtain a method for adjusting and improving the t value, as shown in the sectional view of Figure 5, more specifically, The implementation steps of manufacturing micro-lenses by means of multiple drops and stacking micro-fluidic deposition (SMD for short) are described in detail.

First, a first microfluidic droplet 5a with a diameter of φ (volume V _φ is π/6×φ ³ ) is injected into a patterned (that is, the microlens pattern is a circle diameter D) Media substrate surface;

Then, the first layer (1 ^st stack, also the bottom stack) of the microlens is completed through the laying step of step S5-1 and the curing and forming step of step S5-2, and its height is t ₁ (not shown) . Similarly, the second microfluidic droplet 5b is continuously injected in place (in the same position as the first microfluidic droplet 5a);

Then, the second layer ( ^2nd stack, also middle stack (middlestack)) of the microlens is completed through the laying step of step S5-3 and the solidification forming step of step S5-4, and its height is t ₂ (not shown ).

Finally, the third microfluidic droplet 5c is continuously injected in place (in the same position as the first microfluidic droplet 5a and the second microfluidic droplet 5b); And the solidification forming step of step S5-6 to complete the third layer (3 ^rd stack, also the upper layer (topstack)) of the microlens, its height is t ₃ (not shown). At this point, we have also completed a microlens with a circle diameter value D (and a circle radius value r), a height value t, and a volume value V. Obviously, we can obtain t=t ₁ +t ₂ +t ₃ and V=3×V _φ ; and here, the average height of each layer is defined as t _ave , then the height value t can also be expressed as t=3 ×t _ave .

Looking back at formula (1), if the circle radius value r (fixed value) is much greater than the height value t (that is, r>>t ₁ , t ₂ and t ₃ ), the height increase of each layer is approximately equal, Both are proportional to the volume V _φ of the droplet.

In addition, when considering the volume reduction factor s of the microfluidic droplet in the solidification and forming step, the height value t=s×3×t _ave and the volume value V=s×3×V _φ are further corrected.

An example is as follows: polyvinyl butyral resin (poly-vinyl-butyral, PVB) / acetic acid ethylene glycol monobutyl ether ester (propylene glycol mono methyl ether acetate, PGMEA) optical material solution (wherein the s value is 67%) is measured by diameter A microfluidic droplet with a φ of 120 μm (volume V _φ is approximately 0.905 nl) is sprayed onto a patterned medium substrate surface with a circle radius r value of 180;

In this way, the height t value of single-layer layout can be obtained to be about 17 μm [that is, t=(0.905nl×2)/(π×180 μm×180 μm)=17 μm]. After a total of three layers of distribution steps, the height t value The increase was 51 μm (ie, t=3×17 μm=51 μm). Considering that the volume reduction factor s of the microfluidic droplet in the solidification forming step is 67%, the height t value is further corrected to 34 μm (ie, t=67%×3×17 μm=34 μm). In this way, we can manufacture a camera with a curvature radius R value of approximately 493 μm (ie, R=(34 μm×34 μm+180 μm×180 μm)/(2×34 μm)=493 μm) and a focal length f value of approximately 986 μm (ie, f = 493 μm/(1, 5-1) = 986 μm, assuming n = 1, 5) microlens objects.

Referring to FIG. 6 , a microfluidic lens manufacturing method including a lithography patterning (LP) method and a microfluidic superposition deposition (SMD) method can be proposed here, as shown in the manufacturing process flow of FIG. 6 .

Firstly, a clean and pollution-free medium substrate 1 is provided;

Then, in step S6-1, utilize physical vapor deposition (PVD) or wet coating method (wetdeposition by spin or slitcoating) to make a thin film 8 on the medium substrate 1 front; Generally speaking, the material of this thin film is to have hydrophobic Permanent photoresist material (photoresist, abbreviated PR), such as Teflon (Teflon), polyvinyl chloride (PVC), polyvinyl alcohol (PVA) or silicone photoresist, the thickness can be between about 10 nanometers to about 1 between microns.

Then, in step S6-2, use a mask with the same pattern of microlenses to perform exposure and development, for example, I-line 365nm/5mW mercury lamp light source for irradiation, so that the surface of the medium substrate 1 can be obtained. Desired microlens flat style. At the same time, the surface of the medium substrate 1 is divided into a region with a film 8a and a region without a film 8b, and a region with a film 8a and a microlens material (for example, polyvinyl-butyral (poly-vinyl-butyral, PVB) )/cured particles (ParticulateMatter, PM), propylene glycol mono methyl ether acetate (PGMEA)) interface is phase repellency but no film 8b area and the interface between the microlens material is blind sex. For example, if the radius of the microlens plane of the photomask is r and the gap is w, then the width of the area without the thin film 8b is w and the width of the area with the thin film 8a is 2×r=D.

Finally, in step S6-3, micro-fluidic depositing (micro-fluidic depositing) on the area without the film 8b to form the desired first layer of depositing 6a.

It is worth noting that the interface between the media substrate 1 and the microlens material in this embodiment is essentially affinity, that is, the media substrate 1 and the microlens material are both hydrophilic or hydrophobic. As mentioned earlier, when the lens fluid reaches a static equilibrium, it will be precisely positioned by natural forces due to the affinity (repellency) patterned regions on the surface of the media substrate 1 .

Finally, in step S6-4, we use the microfluidic superimposed distribution (SMD) method, and then inject the microfluidic droplets 5b and 5c into the original place in order to form the desired second layer of distribution 6b and third layer. Layer distribution 6c is as described above; thus, in step S6-5, desired microlenses can be obtained. In addition, the patterns shown in FIG. 6 can be in various geometric shapes such as strips, squares, circles, ellipses, etc., depending on the desired microlens pattern.

Referring to FIG. 7, similarly, another micro-development method is disclosed, which is more suitable for the situation where the interface between the surface of the medium substrate 1 and the micro-lens material is essentially repellent, for example, the manufacturing method of PP, PET and other materials process.

Referring to shown in Fig. 7, in the 1st step (step1), utilize step S7-1 identical with the step S3-1 of Fig. 3 to make a film 9, generally speaking, the material of this film generally has hydrophilic non-conductive material (eg, SiO ₂ , TiO ₂ ), the thickness may be between about 10 nm and about 1 micron.

Then, in step S7-2, use a mask sheet with the same pattern of microlenses to perform exposure imaging and development, for example, I-line 365nm/5mW mercury lamp light source for irradiation, so that the surface of the medium substrate 1 Obtain the desired microlens plane pattern. At the same time, the surface of the medium substrate 1 is divided into a region without a thin film 9a and a region with a thin film 9b, and the region without the thin film 9a and the microlens material (for example, polyvinyl-butyral (poly-vinyl-butyral, PVB) )/cured particles (ParticulateMatter, PM), ethylene glycol butyl ether acetate (propylene glycol mono methyl ether acetate, PGMEA)), the interface is affinity, but the interface between the film 9b area and the microlens material is phase sparse sex.

Finally, in step S7-3, the micro-fluidic depositing (micro-fluidic depositing) on the region with the thin film 9b to form the desired first layer of depositing 7a. Note: the medium substrate 1 and the microlens material in this embodiment are essentially repellent. Again as mentioned above, when the lens fluid reaches static equilibrium, it will be precisely positioned by natural forces due to the affinity (repellency) patterned regions on the surface of the media substrate 1 .

Finally, in step S7-4, we use the microfluidic superimposed distribution (SMD) method, and then inject the microfluidic droplets 5b and 5c into the original place in order to form the desired second layer of distribution 7b and third layer. Layer distribution 7c is as described above; thus, in step S7-5, desired microlenses can be obtained.

In addition, the patterns shown in FIG. 7 can be in various geometric shapes such as strips, squares, circles, ovals, etc., depending on the desired microlens pattern.

Here, it is worth mentioning that in the above-mentioned embodiments of FIG. 5-FIG. 7, the number of superimposed layers of the microfluidic superimposed deposition (SMD) method is not limited to three layers. In the most general possibility, the value of the superimposed layer is an integer m, and the number of superimposed layers of the fluid distribution height value is also approximately m (m≥2).

So far, the present invention discloses a microfluidic lens manufacturing method of LP plus MD or LP plus SMD, which can be applied to a single microlens and a multi-microlens array.

In addition, it is still necessary to further consider the dynamics of the liquid before reaching the equilibrium angle state (fluid dynamics). When using inkjet technology (inkjet-based technology) to spray liquid, the micro-fluid that the micro-droplet generator (droplet actuator) hits has inertia (inertia) and momentum (momentum), and therefore provides micro-droplets in Capable of spreading during MD or SMD steps.

However, it may take tens of microseconds (μs) to tens of milliseconds (ms) for the microfluid to reach static equilibrium from the outward expansion; The radius r _t may be larger than the static balance circle radius r value, however the variation (Δr/r=|r _t −r|/r) may be as high as 25% or more. On this occasion, look back at the relative positional relationship of the lens array shown in formula 3, which clearly specifies the given lens circle radius r, pitch p, and gap w;

In view of this, if at a certain moment the difference between the radius r _t of the contact circle and the radius r of the balance circle is twice greater than the value of the gap w, that is, twice the radius r _t is greater than the value of the distance p, this will cause adjacent lenses Interference (crosstalking) may occur among the droplets to mix and deform, thus, the predetermined static equilibrium position cannot be reached.

Therefore, the present invention proposes an interlaced placement (ID) jetting methodology separated by "timing" and "locating", as described in detail below.

Referring to FIG. 8 , it specifically depicts an injection rule of interlaced deposition (ID).

First, imagine a microlens array that satisfies the relative positional relationship of the above formula 3, that is, meets the size requirements of each lens circle radius r, pitch p, and gap w. Therefore, the "timing" will be divided into four times and the "location" will be divided into four areas.

At the moment of the first injection, define a first starting point and set p ₁ , which is twice the value of the interval p, as the injection pitch (both X and Y directions), and then complete (A) 1 ^st microfluidic pattern 10 cloth;

Then in the second injection moment, transfer the pitch p ₂ in terms of "locating" (both in the X and Y directions), define a second starting point and take p ₁ twice the value of the pitch p as Injection spacing (both in X and Y directions), and then complete (B) 2 ^nd microfluidic pattern 11 laying. Wherein, the lens spacing w value between pattern 10 and pattern 11 is increased to 0, 828r+1, 414w (that is,

$<span\; class="notranslate">\; (</span>\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; \&times;</span><span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; 4</span>}\mathrm{<span\; class="notranslate">\; r</span>}<span\; class="notranslate">\; +</span>\mathrm{<span\; class="notranslate">\; 2</span>}\mathrm{<span\; class="notranslate">\; w</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; 4</span>}\mathrm{<span\; class="notranslate">\; r</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; /</span>\mathrm{<span\; class="notranslate">\; 2</span>}<span\; class="notranslate">\; =</span><span\; class="notranslate">\; (</span>\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}<span\; class="notranslate">\; -</span>\mathrm{<span\; class="notranslate">\; 1</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; \&times;</span>\mathrm{<span\; class="notranslate">\; 2</span>}\mathrm{<span\; class="notranslate">\; r</span>}<span\; class="notranslate">\; +</span>\sqrt{\mathrm{<span\; class="notranslate">\; 2</span>}}\mathrm{<span\; class="notranslate">\; w</span>}<span\; class="notranslate">\; \&ap;</span>\mathrm{<span\; class="notranslate">\; 0.828</span>}\mathrm{<span\; class="notranslate">\; r</span>}<span\; class="notranslate">\; +</span>\mathrm{<span\; class="notranslate">\; 1.414</span>}\mathrm{<span\; class="notranslate">\; w</span>}<span\; class="notranslate">\; .</span><span\; class="notranslate">\; )</span>$

In this case, even if the distance w is zero, the instantaneous dynamic contact circle radius r _t between any two adjacent lens droplets can allow up to 82% of the circular lens radius r value, so that mutual interference can be avoided ( crosstalking) and blend shapes.

Similarly, continue at the third injection moment, shift the pitch p ₂ (X direction) in terms of "locating", define a third starting point and use p ₁ twice the value of the pitch p as the injection The spacing (both X and Y directions are the same), and the result of (C) 3 ^rd pattern 12 laying is completed.

And, in the fourth injection moment, shift the pitch p ₂ (Y direction) in terms of "locating", define a fourth starting point and use p ₁ which is twice the value of the pitch p as the injection pitch ( Both X and Y directions are the same), and the result of (D) 4 ^th pattern 13 laying is completed. The results of the distribution between the two subsequent injections are obviously exactly the same as the previous two injections without mutual interference.

Of course, it should be further pointed out that a period of drying (drying) time can be allowed between each injection pattern laying to further reduce the possibility of mixed deformation caused by mutual interference. In particular, between the third finish (C) 3 ^rd pattern 12 and pattern 11 and between the fourth finish (D) 4 ^th pattern 13 and pattern 12 .

Of course, it must be emphasized here that the above-mentioned embodiment is not limited to the four times of interlaced cloth, but is superior to the four times of interlaced cloth; (timing)" to 9 times, 16 times, 25 times or K ² times (for example, K is 2, 3, 4, 5, etc.), and correspondingly cooperate to divide "location (locating)" into 9 times, 16 times , 25 times, or K ² times (eg, K is 2, 3, 4, 5, etc.).

Or in addition to the above, it can be extended to the most generalized 5 times, 6 times, 7 times, or J times (J belongs to an integer). It is emphasized here that the more interleaving between "time (timing)" and "location (locating)", the more it can ensure that no mutual interference occurs; however, it will relatively require more Time to complete the full injection pattern.

In addition to the above-mentioned lens arrays, the present invention also provides an injection rule applicable to the staggered arrangement of strip lens arrays, as shown in FIG. 9 .

First, imagine again the microlens array that satisfies the relative positional relationship of Formula 3 above, that is, meets the size requirements of each lens circle radius r, pitch p, and gap w. Therefore, the "timing" will be divided into two parts and the "location" will be divided into two areas and interlaced. At the moment of the first injection, define a first starting point, take p ₁ which is twice the value of the pitch p as the distance between the injections in the X direction, and then complete (A) 1 ^st microfluidic pattern 14 laying. Note that what is desired at the moment is an arc-shaped long cylinder (cylender), so it is necessary to apply the SMD method to overlap (overlaptomerge) all the injection fluids with a pitch p value of two in the Y direction to naturally become one.

Then, it may take tens of microseconds (μs) to tens of milliseconds (ms) to complete the drying of the microfluid in (B) until the static equilibrium position pattern 15 is laid. At the second injection moment, transfer the pitch p ₂ in the X direction of "locating", and use twice the pitch p ₁ as the injection pitch in the X direction, and then apply the above steps to the SMD method in the In the Y direction, all the injection fluids with a pitch p value divided into two are overlapped to merge, and the (C) 2 ^nd microfluidic pattern 16 is laid out.

Finally, the microfluid passed through (D) again is dried until the static equilibrium position pattern 17 is laid. In this way, all injection patterns are completed to obtain a strip lens array.

In the above-mentioned embodiments, the SMD method is not limited to overlapping to merge all injected fluids with a pitch p in the Y direction. In the most general possibility, its Y-direction overlaps to merge all injected fluids at a distance p value divided by an integer m, where m (m≥2).

Of course, it must be emphasized here that the above-mentioned embodiment is not limited to the two-time interlaced cloth, but is superior to the two-time interlaced cloth; (timing)" to 4 times, 8 times, 16 times or 2 ^L times (for example, L is 2, 3, 4, etc.), and correspondingly cooperate to divide "location (locating)" into 4 times, 8 times, 16 times times or 2 ^L times (for example, L is 2, 3, 4, etc.).

Or in addition to the above, it can be extended to the most generalized 3 times, 5 times, 6 times, or 1 time (I belongs to an integer).

It is particularly emphasized here that the more "time (timing)" and "location (locating)" are interleaved, the more it can ensure that there is no mutual interference problem; however, it will relatively require more time to complete all injection patterns.

Referring to Fig. 10, in order to implement the above-mentioned microfluidic dispensing (MD) method or superposition distributing (SMD) method, the present invention uses the following injection equipment architecture to carry out, first this injection equipment architecture includes an XY motion The platform (XYstage) 18 can move its coordinate position (for example, X, Y) through a computer control unit (PC) 19 through contact with a drive control unit (stagedriver) 20 . Moreover, the computer control unit 19 can activate the microfluid injection unit (jethead) 24 to perform injection of microfluid (microdroplet) 29 by communicating with the injection control unit (headdriver) 21 . In order to know whether the injection of microfluid is normal, the above-mentioned computer control unit 19 can drive a flashing light source control (LEDdriver) 23 (used to control the first light source 23') and Injection control unit 21, and a first camera (camera) 28 watches the micro-fluid 29 at a certain moment in unison through time.

Note: the first camera 28 is preferably able to adjust the height Z direction and the angle θ orientation to view the microfluidic results at different positions.

In addition, in order to know whether the micro-lens formation 30 of the microfluid injection on the surface of the medium substrate 1 is normal, the device structure preferably has a second camera 25 to turn on a second light source 26 through a second light source control unit 27 to Monitor the microlens forming 30 results. Certainly, it is preferable that the second camera 25 can also be adjusted in the height Z direction and the angle θ direction to observe the microfluidic results at different positions. In this way, the injection device architecture can be used to implement microfluidic placement, and complete in-situ monitoring and detection of microfluidic injection and lens forming results. Of course, the injection equipment structure of the present invention is not limited thereto. If the injection equipment structure does not have the above-mentioned camera and other parts, the above-mentioned MD method and SMD method can still be completed. However, it is preferable to have the above-mentioned camera and other parts for online detection in the structure of the injection equipment.

Finally, the manufacturing method of the present invention can also be used as the implementation and application of the current stereoscopic image; that is, the microlens grating sheet ( lenticular lens sheet), as shown in Figure 11.

Firstly, the inkjet printing system architecture includes a set of feed rollers 32 .

Next, a predetermined media object (media) 31 is passed in forward direction 33 .

Then, a color image jet-heads 34 is used to print color ink droplets 35 on the medium object 31 to form a color plane image 37.

At this time, in order to speed up the drying of the color planar image 37, it is preferable to use a heat dryer 36 to quickly dry it to fix the image. Then, utilize a reversing roller (reverseroller) 38, the medium object face that this is printed with image is reversed face down; Then, use a microlens injection unit 39 to carry out the injection of microlens fluid material 40, to produce a The microlens array 41 is the finished product (lenticular image) with a lenticular lens sheet.

Finally, the system will hand out the medium object with the lenticular lens sheet from the moving direction 42, that is, complete the entire manufacturing process.

Note: the above-mentioned media object 31 can be patterned in a specific area in advance by using the above-mentioned LP method. In this way, the subsequent injection microlens array 41 can be precisely positioned; in other words, the LP process is completed before the medium object 31 enters the feed roller 32 (refer to the aforementioned FIGS. 3 and 4 ).

In addition, the injection process can use the above-mentioned MD or SMD process to adjust and increase the height of the microlens, and use the ID method to stagger the layout to ensure that there is no problem of mutual interference between adjacent fluids.

Features and effects of the present invention are as follows:

1. The characteristics and effects of the present invention are that the present invention provides a one-pass method that does not need to be bonded again, and can directly and accurately manufacture microlenses on a predetermined media substrate. And based on the inkjet technology, then develop a hydrophilic (repellent) hydrophobic patterning area (patterning) that can accurately locate (localizing) micro-droplets.

2. In addition, the present invention achieves the desired manufacturing shape of the lens through the injection rule of interlaced deposition. Mainly use the jetting method of interlaced deposition separated by "timing" and "locating"; thus, during the above-mentioned period of achieving static equilibrium, even during the period of achieving solid phase change Inside, the molding of adjacent lens liquids can be ensured to be completed normally without being affected by the phenomenon of cross-talking.

3. In addition, since the present invention uses multiple drops and microfluidic superposition (stacking micro-fluidic deposition, abbreviated as SMD) to manufacture the implementation steps of the lens, the microfluidic deposition step is repeated to continue stacking to increase the thickness of the final lens object on the media substrate.

Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any changes and modifications made by those skilled in the art without departing from the spirit and scope of the present invention belong to the present invention. within the scope of protection.

Claims (54)

1. A method for manufacturing a microlens, comprising the following steps: providing a medium substrate; forming a thin film on the media substrate; patterning the film to form a film-free region with a pattern of microlenses on the media substrate; The step of distributing microfluid is carried out, distributing a microfluid on the non-film area to form a microlens. 2. The manufacturing method of the microlens according to claim 1, wherein the interface between the medium substrate and the microlens material is essentially affinity. 3. The manufacturing method of the microlens according to claim 1, wherein the film material is a hydrophobic material. 4. The manufacturing method of the microlens according to claim 3, wherein the film material is Teflon, polyvinyl chloride, polyvinyl alcohol or silica gel photoresist. 5. The manufacturing method of the microlens according to claim 1, wherein the thickness of the film material is between 10 nanometers and 1 micrometer. 6. The method of manufacturing a micro-lens according to claim 1, wherein the micro-fluid comprises a lens material. 7. The manufacturing method of the microlens according to claim 6, wherein the microlens material is polyvinyl butyral resin/cured particles or butyl ether acetate. 8. The method of manufacturing a microlens according to claim 1, wherein the static diameter of the microfluids distributed on the surface of the medium substrate is substantially equal to the diameter of the non-film region. 9. The manufacturing method of microlenses according to claim 1, further comprising repeating the microfluidic laying step, continuously stacking to increase the thickness of the final lens object on the medium substrate, and the superimposed layer value If it is an integer m, then the number of superimposed layers of the fluid distribution height value is also slightly m. 10. A method for manufacturing a microlens, characterized in that it comprises the following steps: provide a media base; forming a thin film on the media substrate; patterning the film to form a filmed region having a pattern of microlenses on the media substrate; The step of distributing microfluid is carried out, distributing a microfluid on the area with thin film to form a microlens object. 11. The method of manufacturing a microlens according to claim 10, wherein the interface between the medium substrate and the microlens material is substantially repellent. 12. The manufacturing method of the microlens according to claim 10, wherein the film material is a hydrophilic material. 13. The manufacturing method of the microlens according to claim 12, wherein the film material is SiO ₂ or TiO ₂ . 14. The manufacturing method of the microlens according to claim 10, wherein the thickness of the thin film material is between 10 nanometers and 1 micrometer. 15. The method of manufacturing a microlens according to claim 10, wherein the microfluid comprises a lens material. 16. The manufacturing method of the microlens according to claim 15, wherein the microlens material is polyvinyl butyral resin/cured particles or butyl acetate. 17 . The method of manufacturing a microlens according to claim 10 , wherein the static diameter of the microfluid distributed on the surface of the medium substrate is substantially equal to the diameter of the non-film region. 18. The manufacturing method of microlenses according to claim 10, further comprising repeating the microfluidic dispensing step, continuously stacking to increase the thickness of the final lens object on the medium substrate, and the superimposed layer value If it is an integer m, then the number of superimposed layers of the fluid distribution height value is also slightly m. 19. A method for manufacturing microlenses, characterized in that it is suitable for manufacturing lens arrays in a staggered manner, comprising the following steps: provide a media base; forming a thin film on the media substrate; patterning the film to form a film-free region having a pattern of microlenses on the media substrate; The step of distributing the microfluid is carried out in a staggered dispensing manner, distributing a microfluid on the film-free area. 20. The method of manufacturing a microlens according to claim 19, wherein the interface between the medium substrate and the microlens material is essentially affinity. 21. The manufacturing method of the microlens according to claim 19, characterized in that: the film material is a hydrophobic material. 22. The manufacturing method of the microlens according to claim 21, wherein the film material is Teflon, polyvinyl chloride, polyvinyl alcohol or silicone photoresist. 23. The manufacturing method of the microlens according to claim 19, characterized in that: the thickness of the thin film material is between tens of nanometers and 1 micron. 24. The method of manufacturing a microlens as claimed in claim 19, wherein the microfluid comprises a lens material. 25. The manufacturing method of the microlens according to claim 24, wherein the microlens material is polyvinyl butyral resin/cured particles or butyl acetate. 26. The manufacturing method of microlenses according to claim 19, wherein the lens array has a radius r of each lens circle, a pitch p and a gap w. 27. The manufacturing method of microlenses according to claim 26, characterized in that: the staggered placement method is divided into four times by time, and is completed by dividing into four areas according to the position, further comprising the following steps: Define a first starting point, perform injection at the first time, and use p ₁ , which is twice the value of the interval p, as the injection pitch in the X and Y directions, and perform staggered placement to complete the placement of the microfluidic pattern in the first area; Define a second starting point, carry out the injection at the second time, and then use p ₁ as the injection pitch, carry out staggered layout in the X and Y directions, and complete the layout of the microfluidic pattern in the second area; Define a third starting point, perform injection at the third time, and then use p ₁ as the injection pitch, and perform staggered layout in the X and Y directions to complete the microfluidic pattern layout in the third area; Define a fourth starting point, carry out the injection at the fourth time, and then use p ₁ as the injection pitch, carry out staggered layout in the X and Y directions, and complete the layout of the microfluidic pattern in the fourth area; Wherein, the second starting point shifts p in the X and Y directions relative to the first starting point, the third starting point moves p in the X direction relative to the first starting point, and the fourth starting point moves p in the X direction relative to the first starting point. The position is shifted in the Y direction by p. 28. The manufacturing method of microlenses according to claim 27, characterized in that: the staggered laying method is divided into K ² times by time, and is completed by dividing K ² areas in conjunction with positions; wherein, K is equal to 2, 3 , 4, 5 or an integer. 29. The manufacturing method of microlenses according to claim 27, characterized in that: the staggered placement method is divided into J times by time, and is completed by dividing J regions according to the position; wherein, J is equal to 5, 6, 7 or an integer. 30. The manufacturing method of microlenses according to claim 27, further comprising repeating the microfluidic dispensing step, continuously stacking to increase the thickness of the final lens object on the medium substrate, and the superimposed layer value If it is an integer m, then the number of superimposed layers of the fluid distribution height value is also slightly m. 31. The manufacturing method of microlenses according to claim 26, characterized in that: the staggered placement method is divided into two times by time, and is completed by dividing into two areas according to the position, further comprising the following steps: Define a first starting point, carry out injection at the first time, set p ₁ which is twice the value of the pitch p in the X direction as the injection pitch, and set a pitch p which is half the value of the injection pitch in the Y direction, and perform staggered placement , complete the microfluidic patterning in the first area; Define a second starting point, carry out injection at the second time, set p ₁ which is twice the value of the pitch p in the X direction as the injection pitch, and use a pitch p which is half the value of the injection pitch in the Y direction to perform staggered layout Next, complete the microfluid pattern layout in the second area; all the injection fluids in the same Y direction are naturally superimposed into one body to obtain a long cylindrical mirror array with a radian; The second starting point is shifted by p in the X direction relative to the first starting point. 32. The manufacturing method of microlenses according to claim 31, characterized in that: the staggered laying method is divided into ^2L times by time, and completed by dividing 2L areas according to the position; wherein, the L is equal to 2, 3, 4 or an integer. 33. The manufacturing method of microlenses according to claim 31, characterized in that: the staggered placement method is divided into I times by time, and completed by dividing I regions according to positions; wherein, I is equal to 3, 5, 6 or an integer. 34. The manufacturing method of microlenses according to claim 31, characterized in that: a pitch p divided by an integer m in the Y direction is the injection pitch, and the microfluidic laying step is repeated, and the stacking is continued to increase the final The thickness of the lens object on the media substrate; wherein the m≧2. 35. A method for manufacturing microlenses, which is characterized in that it is suitable for manufacturing lens arrays in a staggered manner, comprising the following steps: provide a media base; forming a thin film on the media substrate; patterning the film to form a filmed region having a pattern of microlenses on the media substrate; The microfluidic dispensing step is carried out in a staggered distributing manner, and a microfluid is distributing on the area with a thin film to form a microlens array. 36. The method of manufacturing a microlens according to claim 35, wherein the interface between the medium substrate and the microlens material is substantially repellent. 37. The manufacturing method of the microlens according to claim 35, wherein the film material is a hydrophilic material. 38. The manufacturing method of the microlens according to claim 37, wherein the film material is SiO ₂ or TiO ₂ . 39. The manufacturing method of the microlens according to claim 35, wherein the thickness of the thin film material is between 10 nanometers and 1 micrometer. 40. The method of manufacturing a microlens as claimed in claim 35, wherein the microfluid comprises a lens material. 41. The manufacturing method of the microlens according to claim 40, characterized in that: the microlens material is polyvinyl butyral resin/cured particles or butyl acetate. 42. The manufacturing method of microlenses according to claim 35, characterized in that: the lens array has size requirements for each lens circle radius r, pitch p and gap w. 4 3. The manufacturing method of microlenses according to claim 42, characterized in that: the staggered laying method is divided into four times by time and completed by dividing into four regions according to the position, further comprising the following steps: Define a first starting point, perform injection at the first time, and use p ₁ , which is twice the value of the interval p, as the injection pitch in the X and Y directions, and perform staggered placement to complete the placement of the microfluidic pattern in the first area; Define a second starting point, carry out the injection at the second time, and then use p ₁ as the injection pitch, carry out staggered layout in the X and Y directions, and complete the layout of the microfluidic pattern in the second area; Define a third starting point, perform injection at the third time, and then use p ₁ as the injection pitch, and perform staggered layout in the X and Y directions to complete the microfluidic pattern layout in the third area; Define a fourth starting point, carry out the injection at the fourth time, and then use p ₁ as the injection pitch, carry out staggered layout in the X and Y directions, and complete the layout of the microfluidic pattern in the fourth area; Wherein, the second starting point shifts p in the X and Y directions relative to the first starting point, the third starting point moves p in the X direction relative to the first starting point, and the fourth starting point moves p in the X direction relative to the first starting point. The position is shifted in the Y direction by p. 44. The manufacturing method of microlenses according to claim 43, characterized in that: the staggered placement method is divided into K ² times by time, and completed by dividing K ² areas in conjunction with positions; wherein, K is equal to 2, 3 , 4, 5 or an integer. 45. The manufacturing method of microlenses according to claim 43, characterized in that: the staggered placement method is divided into J times by time, and is completed by dividing J regions according to the position; wherein, J is equal to 5, 6, 7 or an integer. 46. The manufacturing method of microlenses according to claim 43, further comprising repeating the step of depositing microfluids, continuously stacking to increase the thickness of the final lens object on the medium substrate; wherein, the stacking If the layer value is an integer m, then the number of superimposed layers of the fluid distribution height value is also slightly m. 47. The manufacturing method of microlenses according to claim 43, characterized in that: the staggered laying method is divided into two times by time, and is completed by dividing into two areas according to the position, further comprising the following steps: Define a first starting point, carry out injection at the first time, set p ₁ which is twice the value of the pitch p in the X direction as the injection pitch, and set a pitch p which is half the value of the injection pitch in the Y direction, and perform staggered placement , complete the microfluidic patterning in the first area; Define a second starting point, carry out injection at the second time, set p ₁ which is twice the value of the pitch p in the X direction as the injection pitch, and use a pitch p which is half the value of the injection pitch in the Y direction to perform staggered layout Next, the microfluid pattern layout in the second area is completed; wherein, all the injection fluids in the same Y direction are naturally superimposed into one body to obtain a long cylindrical mirror array with a radian; The second starting point is shifted by p in the X direction relative to the first starting point. 48. The manufacturing method of microlenses according to claim 47, characterized in that: the staggered laying method is divided into 2 ^L times by time, and completed by dividing 2 ^L areas according to the position; wherein, the L is equal to 2, 3 , 4, or an integer. 49. The manufacturing method of microlenses according to claim 47, characterized in that: the staggered placement method is divided into I times by time, and completed by dividing I regions according to positions; wherein, I is equal to 3, 5, 6 or an integer. 50. The manufacturing method of microlenses according to claim 47, characterized in that: in the Y direction, a pitch p divided by an integer m is the injection pitch, and the microfluidic distributing step is repeated, and the stacking is continued to increase the final The thickness of the lens object on the media substrate; wherein the m≧2. 51. A method for manufacturing a microlens, characterized in that it is suitable for manufacturing a microlens grating sheet for stereoscopic images, comprising the following steps: providing a media object having a first face and a second face; printing color inkjet drops on the first surface of the media object to form a color planar image; Utilizing a heating unit to accelerate drying the color planar image to fix the color planar image; Injecting microlens fluid material onto the second surface of the medium object to produce a microlens array; the first surface and the second surface are respectively printed with the color plane image and the medium object of the microlens array, namely It is a lenticular film with stereoscopic images. 52. A microlens manufacturing device, characterized in that it includes: A microfluid injection unit for injecting microlens materials; An injection control unit, used to control the injection unit to perform microfluid injection; A motion platform, including a medium base, moves in cooperation with the microfluid injection unit to carry out interlaced dispensing of microfluids; A drive control unit, used to control the motion coordinate position of the motion platform; A computer control unit is used to communicate with the injection control unit and the drive control unit. 53. The manufacturing device of microlens according to claim 52, characterized in that it further comprises: A pulse timing unit; a first light source; A strobe light source control, used to control the first light source; A first camera, coordinating with the computer control unit to contact the strobe light source to control and drive the pulse wave timing unit and the injection unit, to watch the microfluid at any moment in time coordination; a second light source; a second light source control unit, used to control the second light source; A second camera turns on the second light source through the second light source control unit to check the results of the microlens. 54. A micro-lens manufacturing device, characterized in that it is suitable for micro-lens grating sheets for producing three-dimensional images in the form of micro-fluid injection, and it includes: A set of feed rollers is used to feed a predetermined medium object in the forward direction; A color inkjet printing head unit is used to print color inkjet droplets on the medium object to form a color plane image; a heating unit for accelerating drying of the color flat image to fix the image; a reversing roller for reversing the media object on which the image is printed facing downward; A microlens injection unit is used for injecting microlens fluid material on the reverse side of the medium object to produce a microlens array.

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