CN1570555A - Micromirror detection method and detection device thereof - Google Patents

Abstract

The invention provides a micromirror detection method, which comprises the following steps that a micromirror component is arranged on a micromirror bearing surface of a bearing seat. And then the light source emits light beams towards the micro-mirror assembly. The light beam is reflected from the micromirror assembly to the target surface and projects a second light spot on the target surface. The distance X of the second light spot relative to the reference point is measured, and the inclination of the micro-mirror assembly on the support is calculated accordingly.

Description

Micromirror detection method and detection device thereof

technical field

The invention relates to a micromirror detection method and a detection device thereof, in particular to a micromirror detection method and a detection device thereof for detecting the inclination of a micromirror assembly after assembly.

Background technique

Micro-electro-mechanical technology has been developed for a long time, and it is gradually applied to general daily necessities or electronic products. The digital micromirror component DMD (Digital MicromirrorDevice) developed by Texas Instruments is a reflective component for projection equipment. The projector designed by digital micromirror assembly technology is called digital light output projector (DLP, Digital Light Processing), which uses digital micromirror assembly as an imaging device, and reflects light to project an image to the screen. Its key component, the digital micromirror component, is a semiconductor component developed by Texas Instruments. Each digital micromirror component chip contains thousands of tiny square reflective lenses, also known as micromirrors. These micromirrors are closely arranged in rows and columns, and each micromirror represents a pixel, and can be switched and rotated by the corresponding memory in two states of on or off, so as to control the reflection of light.

There are many optical components in a digital optical projector. Since the resolution and imaging power required by digital optical projectors are extremely strict, it is difficult to grasp the precision and tolerance during manufacturing. In particular, the inclination of the micromirror assembly relative to the optical axis of the lens when it is mounted on the lens holder is directly related to the image quality. However, since the micromirror assembly is manufactured in micrometers, it is difficult to measure its inclination with a general measurement method. Therefore, the characteristics and quality of the finished lens can only be detected after actual imaging. If it is found that the lens is defective after complete assembly, it needs to be disassembled and assembled again, which consumes a lot of time and manpower. Therefore, there is a need for a micromirror detection method and detection device capable of detecting its assembly status in real time during the assembly process, so as to ensure the quality of the lens.

Contents of the invention

The present invention provides a micromirror detection method for real-time detection of lens assembly status, which includes the following steps: firstly, the micromirror assembly is arranged on the micromirror bearing surface of the holder. The light source is then used to emit light beams toward the micromirror assembly. The light beam is reflected from the micromirror assembly to the target surface, and a second light spot is projected on the target surface. The distance X of the second light spot relative to the reference point is measured, and the inclination of the micromirror assembly on the seat is calculated accordingly.

The present invention also provides a micromirror detection device for the above detection, including a target surface and a light source. The light source emits a light beam toward the micromirror assembly, and the light beam is reflected from the micromirror assembly to the target surface.

By using the micromirror detection method of the present invention, the inclination relative to the optical axis of the lens when the micromirror assembly is installed on the lens holder can be quickly and effectively measured. Therefore, during the assembly process of the lens, the assembly status of the micromirror assembly can be directly detected, thereby correcting the inclination of the micromirror assembly and improving the qualified rate of the product.

Description of drawings

Fig. 1a is the three-dimensional view of the existing seat;

Figure 1b is a rear side view of the existing socket;

Fig. 2 a is the schematic diagram of the micromirror detection device of the present invention;

Fig. 2 b is the schematic diagram of the target surface of the micromirror detection device of the present invention;

Fig. 3 a is the schematic diagram of the micromirror detection device of the present invention;

Fig. 3 b is the schematic diagram of the fixture of the micromirror detection device of the present invention;

Fig. 4 is an auxiliary explanatory diagram of the gradient calculation method of the present invention.

Detailed ways

Firstly, the structure of the mount will be explained. Referring to FIG. 1 a , the mount 100 includes a lens resting surface 110 and a lens resting point 111 . Referring to FIG. 1 b , which shows a side view of the holder 100 in direction A, the holder 100 also includes a micromirror bearing surface 120 , and the micromirror bearing surface 120 has a micromirror bearing point 121 and an opening 122 . The micromirror assembly is arranged on the micromirror supporting surface 120 by the micromirror supporting point 121 . What the present invention needs to detect is whether the micromirror assembly is excessively tilted when it is installed on the micromirror bearing surface 120 .

The structure of the micromirror detection device of the present invention will be described below first, and then the micromirror detection method using the micromirror detection device will be described.

Referring to FIG. 2 a , the micromirror inspection device of the present invention includes a target surface 150 and a light source 140 . The light source emits a light beam 160 toward the micromirror assembly 130 , and the light beam 160 is reflected from the micromirror assembly 130 to the target surface 150 .

Referring to FIG. 2 b , there are scales and a reference point 151 on the target surface 150 . According to the position of the second spot 152 of the light beam 160 reflected from the micromirror assembly 130 to the target surface 150 relative to the reference point 151 , the inclination of the micromirror assembly can be known.

The aforementioned light source 140 may be a laser.

The above-mentioned light source 140 can be disposed on the target surface 150 .

The above-mentioned target surface 150 may be made of paper.

Referring to FIG. 3 a , the above-mentioned micromirror detection device may further include a first clamp 185 for clamping the seat. And a second clamp 180 for clamping the light source. The first clamp 185 and the second clamp 180 can be disposed on the base 170 .

Referring to FIG. 3 b , the first clamp 185 and the second clamp 180 may have a clamp body 181 , a baffle plate 182 , a modulation mechanism 183 and a fixing piece 184 . The baffle 182 is disposed in the clamp body 181 . The modulating mechanism 183 passes through the fixture body 181 and contacts the baffle plate 182. By adjusting the modulating mechanism 183, the position of the document plate 182 can be adjusted, and the workpiece is clamped between the baffle plate 182 and the fixture body 181. between. The fixing part 184 is disposed under the clamp body 181 , and the clamp body 181 is fixed on the base 170 by the fixing part 184 .

Referring to FIG. 2a again, the micromirror inspection method of the present invention includes the following steps: first, the position of the light source 140 is defined. First, a standard mirror 135 is disposed on the micromirror supporting surface 120 of the holder 100 . The standard mirror 135 is a mirror surface whose level meets the requirements. When the standard mirror 135 is installed on the micromirror supporting surface 120 , it is in a preset non-tilted state. Then use the light source 140 to emit the light beam 160 toward the standard mirror 135, the light beam 160 is reflected from the standard mirror 135 to the target surface 150, and projects a first light spot 155 on the target surface 150, see FIG. 2b. At this time, the position of the light source 140 is adjusted so that the first light spot 155 is projected to the reference point 151 . Through the above steps, the standard position of the light source 140 can be defined.

Next, the step of measuring the inclination of the micromirror assembly is carried out. Still referring to FIG. 2 a , firstly, the micromirror assembly 130 is disposed on the micromirror bearing surface 120 of the holder 100 . The light source 140 is then used to emit a light beam 160 toward the micromirror assembly 130 . The light beam 160 is reflected from the micromirror assembly 130 to the target surface 150, and projects a second light spot 152 on the target surface 150, as shown in FIG. 2b. The distance X of the second light spot 152 relative to the reference point 151 is measured, and the inclination of the micromirror assembly 130 on the base 100 is calculated accordingly.

The way to calculate the inclination, with reference to Fig. 4, utilizes the distance Y between the light source 140 and the micromirror assembly 130, and the distance X of the second light spot 152 relative to the reference point 151, using the trigonometric formula $2\mathrm{\θ}={\mathrm{the\; tan}}^{-1}\left(\frac{x}{Y}\right),$ The inclination angle θ of the micromirror assembly 130 can be obtained. Using the inclination angle θ and the length of the micromirror assembly 130 itself, the required compensation thickness T can be obtained. Therefore, a spacer with a thickness T can be inserted in the tilt orientation of the micromirror assembly 130 , or compensated in other ways, so as to correct the tilt of the micromirror assembly 130 .

Returning to FIG. 2 a , the detection method of the present invention can also be used to detect the parallelism of the holder 100 , which includes the following steps: first, the standard mirror 135 is set on the micromirror bearing surface 120 of the holder 100 . The light source 140 then emits a light beam 160 toward the standard mirror 135 , the light beam 160 is reflected from the standard mirror 135 to the target surface 150 , and projects a first light spot 155 on the target surface 150 (refer to FIG. 2 b ). Then adjust the position of the light source 140 so that the first light spot 155 is projected to the reference point 151 . Then the standard mirror 135 is arranged on the lens support surface 110 (referring to Fig. 2 a ) of the base 100, the light beam 160 is reflected from the standard mirror 135 to the target surface 150, and projects a second light spot on the target 150 surface 152 (see Figure 2b). Finally, measure the position of the second light spot 152 relative to the reference point 151; and

Calculate the parallelism between the micromirror supporting surface 120 and the lens supporting surface 110 .

The way to calculate the parallelism of the seat 100 can be obtained by means of trigonometric functions in the same way as the way of calculating the inclination of the above-mentioned micromirror assembly.

Since the inclination of the lens supporting surface 110 is directly related to the optical axis angle of the lens, it is possible to compensate for the dimensional errors of components in various parts according to the detection results of the parallelism of the above-mentioned bearings.

By using the micromirror detection method of the present invention, the inclination relative to the optical axis of the lens when the micromirror assembly is installed on the lens holder can be quickly and effectively measured. Therefore, during the assembly process of the lens, the assembly status of the micromirror assembly can be directly detected, thereby correcting the inclination of the micromirror assembly and improving the qualified rate of the product.

Although the present invention has been disclosed in conjunction with the above preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can still make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection should be defined by the claims.

Claims (24)

1. A micromirror detection device is used to detect the inclination of a micromirror assembly on a seat, comprising: a target surface; and A light source, the light source emits a light beam toward the micromirror assembly, and the light beam is reflected from the micromirror assembly to the target surface. 2. The micromirror inspection device according to claim 1, wherein the micromirror inspection device further comprises a first clamp for clamping the seat. 3. The micromirror inspection device as claimed in claim 1, wherein the micromirror inspection device further comprises a second clamper for clamping the light source. 4. The micromirror inspection device as claimed in claim 1, wherein the light source is a laser. 5. The micromirror detection device as claimed in claim 1, wherein the material of the target surface is paper. 6. The micromirror inspection device as claimed in claim 1, wherein the light source is disposed above the target surface. 7. A method for detecting the parallelism of a seat, comprising the steps of: setting a standard mirror on a micromirror bearing surface of the holder; A light source is used to project a light beam toward the standard mirror, the light beam is reflected from the standard mirror to a target surface, and a first light spot is projected on the target surface; adjusting the position of the light source so that the first light point is projected to a reference point; The standard mirror is arranged on a lens supporting surface of the base, the light beam is reflected from the standard mirror to the target surface, and a second light spot is projected on the target surface; measuring the position of the second light spot relative to the reference point; and Calculate the parallelism between the supporting surface of the micromirror and the supporting surface of the lens. 8. The method for detecting the parallelism of a socket according to claim 7, wherein the light source is a laser. 9. The method for detecting parallelism of sockets according to claim 7, wherein the material of the target surface is paper. 10. The method for detecting the parallelism of a socket according to claim 7, wherein the socket is clamped by a first jig. 11. The method for testing the parallelism of a socket according to claim 7, wherein the light source is disposed above the target surface. 12. The method for testing the parallelism of a socket according to claim 7, wherein the light source is clamped by a second fixture. 13. The method for detecting parallelism of sockets according to claim 12, wherein the step of adjusting the position of the light source so that the first light spot is projected onto the reference point is to adjust the position of the light source by adjusting the second fixture . 14. A micromirror detection method, comprising the steps of: A micromirror assembly is arranged on a micromirror supporting surface of a seat; A light source is used to emit a light beam toward the micromirror assembly, the light beam is reflected from the micromirror assembly to a target surface, and a second light spot is projected on the target surface; measuring the distance X of the second light spot relative to a reference point; and Calculate the inclination of the micromirror assembly on the seat. 15. micromirror detection method as claimed in claim 14, wherein, before this micromirror assembly is arranged on the step of this micromirror bearing surface of this seat, also comprise the following steps: setting a standard mirror on the micromirror bearing surface of the holder; using the light source to emit the light beam toward the standard mirror, the light beam is reflected from the standard mirror to the target surface, and projects a first light spot on the target surface; The position of the light source is adjusted so that the first light point is projected to the reference point. 16. The micromirror inspection method as claimed in claim 14, further comprising a step of measuring the distance Y between the light source and the micromirror assembly. 17. The micromirror inspection method as claimed in claim 16, wherein the step of calculating the inclination of the micromirror assembly on the seat utilizes the distance Y between the light source and the micromirror assembly and the second light spot The distance X relative to a reference point is calculated using trigonometric functions. 18. micromirror detection method as claimed in claim 17, wherein, $2\mathrm{\θ}={\mathrm{the\; tan}}^{-1}\left(\frac{x}{Y}\right),$ θ is the inclination angle of the micromirror assembly on the seat. 19. The inspection method of a micromirror as claimed in claim 14, wherein the light source is a laser. 20. The micromirror detection method as claimed in claim 14, wherein the material of the target surface is paper with scales drawn on it. 21. The inspection method for a micromirror as claimed in claim 14, wherein the seat is clamped by a first fixture. 22. The micromirror detection method according to claim 14, wherein the light source is arranged above the target surface. 23. The micromirror inspection method according to claim 14, wherein the light source is held by a second fixture. 24. The micromirror inspection method as claimed in claim 15, wherein the step of adjusting the position of the light source to project the first light spot onto the reference point is to adjust the position of the light source by adjusting the second fixture.

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