CN1565811A - Single-layer structure micromotion workbench with six degrees of freedom and its parallel control mode - Google Patents
Single-layer structure micromotion workbench with six degrees of freedom and its parallel control mode Download PDFInfo
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Abstract
Description
技术领域：Technical field:
本发明涉及一种用于纳米级精密测量和精密定位的单层结构六自由度微动工作台及其控制方式。The invention relates to a single-layer structure six-degree-of-freedom micro-motion workbench for nanoscale precision measurement and precise positioning and its control method.
背景技术：Background technique:
目前，微技术已成为极有生命力的新兴高科技领域，微型机电器件及系统已从实验室走向市场，形成新的产业。以微型器件为测量对象的纳米测量技术自二十世纪末起也已受到学术界的普遍重视，具有纳米级分辨率的测量方法研究日趋深入和成熟，并陆续开发研制出一些测量器件及仪器。已经研究出的多自由度工作台一般采用多层结构或多杆结构。在控制方式上，多层结构工作台各自由度的运动多为相互独立，运动的自由度越多，工作台的层数越多，因而造成结构的复杂而难以微型化，分步调整所需要的时间也较长。因此这种结构形式的微动工作台为一个自由度或两个自由度，用于微测量仪器或微加工机械。多杆结构工作台各自由度的运动是相关的，调整也相对灵活，但其控制模型较复杂，结构难以实现微型化，精度往往也满足不了纳米测量的要求。At present, microtechnology has become an emerging high-tech field with great vitality, and micro-electromechanical devices and systems have moved from the laboratory to the market, forming a new industry. Since the end of the 20th century, the nano-measurement technology with micro-devices as the measurement object has also been widely valued by the academic circles. The research on measurement methods with nano-scale resolution has become increasingly in-depth and mature, and some measurement devices and instruments have been developed successively. The multi-degree-of-freedom workbench that has been researched generally adopts a multi-layer structure or a multi-rod structure. In terms of control methods, the movements of each degree of freedom of the multi-layer structure workbench are mostly independent of each other. The more degrees of freedom of movement, the more layers of the workbench, resulting in a complex structure that is difficult to miniaturize. Step-by-step adjustments are required. The time is also longer. Therefore, the micro-motion worktable of this structure has one degree of freedom or two degrees of freedom, and is used for micro-measurement instruments or micro-processing machinery. The motion of each degree of freedom of the multi-rod structure table is related, and the adjustment is relatively flexible, but its control model is complex, the structure is difficult to miniaturize, and the accuracy often cannot meet the requirements of nanometer measurement.
发明内容：Invention content:
本发明所要解决的技术问题是避免上述现有技术中所存在的不足之处，提供一种单层结构六自由度微动工作台及其并行控制方式，用于实现精密测量和精密定位。The technical problem to be solved by the present invention is to avoid the deficiencies in the above-mentioned prior art, and provide a single-layer structure six-degree-of-freedom micro-motion workbench and its parallel control method for realizing precise measurement and precise positioning.
本发明解决技术问题所采用的技术方案是：The technical scheme that the present invention solves technical problem adopts is:
本发明六自由度微动工作台的结构特点是：采用单层结构，由压电驱动杆以八杆对称的方式联接，压电驱动杆A-a、B-b、C-c、D-d、E-e、F-f、G-g、H-h的外端通过柔性铰链A、B、C、D、E、F、G、H与固定台相连，内端通过柔性铰链a、b、c、d、e、f、g、h与微动台相连。The structural characteristics of the six-degree-of-freedom micro-motion workbench of the present invention are as follows: a single-layer structure is adopted, and the piezoelectric driving rods are connected in a symmetrical manner with eight rods, and the piezoelectric driving rods A-a, B-b, C-c, D-d, E-e, F-f, G-g, The outer end of H-h is connected to the fixed platform through flexible hinges A, B, C, D, E, F, G, H, and the inner end is connected to the micro-motion through flexible hinges a, b, c, d, e, f, g, h Taiwan is connected.
本发明控制方式的特点是采用并行控制方式，所述并行控制方式是通过并行控制八根压电驱动杆的长度变化，使工作台多个自由度的运动同步进行，各驱动杆的控制为独立与局部相关相结合。The control method of the present invention is characterized in that it adopts a parallel control method. The parallel control method is to control the length variation of eight piezoelectric driving rods in parallel, so that the movement of multiple degrees of freedom of the workbench is carried out synchronously, and the control of each driving rod is independent. combined with local correlation.
本发明中所采用的压电驱动杆在外加电压下伸缩，通过控制外加电压值即可改变压电驱动器的长度。利用八根对称设置的压电驱动杆在长度上的变化，结合柔性铰链的变形，即可实现微动台的六自由度的运动。整个工作台除了在柔性铰链处产生变形外，其余都看作是刚体。The piezoelectric driving rod used in the present invention expands and contracts under the applied voltage, and the length of the piezoelectric driver can be changed by controlling the value of the applied voltage. The six-degree-of-freedom movement of the micro-motion table can be realized by using the change in length of the eight symmetrically arranged piezoelectric driving rods, combined with the deformation of the flexible hinge. The entire workbench is regarded as a rigid body except for the deformation at the flexible hinge.
与已有技术相比，本发明的有益效果体现在：Compared with the prior art, the beneficial effects of the present invention are reflected in:
1、本发明六自由度工作台采用单层结构，其相对于多层结构具有体积小、结构简单、易于装配、累计误差小的优势。1. The six-degree-of-freedom workbench of the present invention adopts a single-layer structure, which has the advantages of small volume, simple structure, easy assembly, and small cumulative error compared with the multi-layer structure.
2、本发明采用压电驱动杆八杆对称结构，各驱动杆的控制为独立与局部相关相结合，即实现工作台各单自由度运动需要控制的驱动杆不同，有的控制两杆、有的控制四杆，多自由度运动通过同步控制各单自由度运动来实现。这种结构可以简化驱动控制模型，相对用于机器人运动的六杆结构工作台控制简单且易于提高运动精度和实现微型化，各压电驱动器的运动并行控制，各自由度的运动可同步进行，这样可大大减小工作台方位调整所需的时间，提高测量速率和效率。2. The present invention adopts a symmetrical structure of eight piezoelectric driving rods, and the control of each driving rod is a combination of independent and local correlation, that is, different driving rods need to be controlled to realize the single-degree-of-freedom movement of the workbench. The control of the four-rod, multi-degree-of-freedom motion is realized by synchronously controlling each single-degree-of-freedom motion. This structure can simplify the drive control model. Compared with the six-bar structure table used for robot motion, the control is simple and easy to improve motion accuracy and realize miniaturization. The motion of each piezoelectric driver is controlled in parallel, and the motion of each degree of freedom can be carried out synchronously. This can greatly reduce the time required for the orientation adjustment of the workbench, and improve the measurement rate and efficiency.
3、本发明微动台采用柔性铰链为弹性导轨，具有无机械摩擦、无间隙、运动灵敏度高等优点，以压电陶瓷为驱动器，结构紧凑，微位移分辨率高、控制简单，并且没有发热问题。这就使得工作台更易于实现微型化。3. The micro-motion stage of the present invention uses flexible hinges as elastic guide rails, which has the advantages of no mechanical friction, no gap, and high motion sensitivity. It uses piezoelectric ceramics as the driver, has a compact structure, high micro-displacement resolution, simple control, and no heating problems. . This makes the table easier to miniaturize.
4、通过建立运动模型分析工作台的运动精度，由模型本身简化带来的误差在几个纳米范围内，由加工、安装误差引起柔性铰链坐标误差也会影响运动精度，而工作台运动误差相对铰链坐标误差具有很大的缩小比，因此这种误差影响会很小。通过计算微动台的运动精度能达到纳米级，可见工作台能够实现纳米级的测量和定位。4. Analyze the movement accuracy of the workbench by establishing a movement model. The error caused by the simplification of the model itself is in the range of several nanometers. The coordinate error of the flexible hinge caused by processing and installation errors will also affect the movement accuracy, while the movement error of the workbench is relatively The hinge coordinate error has a large reduction ratio, so the effect of this error will be small. By calculating the motion precision of the micro-motion table can reach the nanometer level, it can be seen that the workbench can realize the measurement and positioning of the nanometer level.
图面说明：Graphic description:
图1为本发明微动台运动构件坐标系示意图。Fig. 1 is a schematic diagram of a coordinate system of a moving component of a micro-motion stage according to the present invention.
图2(a)、(b)、(c)、(d)、(e)、(f)为本发明工作台单自由度运动示意图。Fig. 2 (a), (b), (c), (d), (e), (f) are schematic diagrams of single-degree-of-freedom movement of the workbench of the present invention.
图3为本发明压电驱动杆与柔性铰链配合状态结构示意图。Fig. 3 is a structural schematic diagram of the cooperation state of the piezoelectric driving rod and the flexible hinge according to the present invention.
具体实施方式：Detailed ways:
参见图1、图3，本实施例采用压电驱动杆，以八杆对称的方式进行联接，压电驱动杆A-a、B-b、C-c、D-d、E-e、F-f、G-g、H-h的外端通过柔性铰链A、B、C、D、E、F、G、H与固定台相连，内端通过柔性铰链a、b、c、d、e、f、g、h与微动台相连。Referring to Fig. 1 and Fig. 3, the present embodiment adopts piezoelectric driving rods, which are connected in a symmetrical manner with eight rods. The outer ends of piezoelectric driving rods A-a, B-b, C-c, D-d, E-e, F-f, G-g, H-h pass through flexible hinges A, B, C, D, E, F, G, H are connected to the fixed platform, and the inner ends are connected to the micro-motion platform through flexible hinges a, b, c, d, e, f, g, h.
具体实施中，如图1所示，是以柔性铰链A、B、C、D固定端点构成面的中心为原点O，柔性铰链A、B、C、D固定端点所在的平面为XOY坐标面所建立的固定坐标系中，压电驱动杆A-a、C-c以及B-b、D-d的初始位置分别与Y轴或X轴平行，压电驱动杆E-e，F-f，G-g，H-h初始位置与Z轴平行，与微动台相连的各个铰链点相对坐标原点对称分布，并且八杆初始长度相等。In the specific implementation, as shown in Figure 1, the center of the surface formed by the fixed endpoints of flexible hinges A, B, C, and D is taken as the origin O, and the plane where the fixed endpoints of flexible hinges A, B, C, and D are located is defined by the XOY coordinate plane. In the established fixed coordinate system, the initial positions of the piezoelectric actuators A-a, C-c, B-b, and D-d are parallel to the Y-axis or the X-axis respectively, and the initial positions of the piezoelectric actuators E-e, F-f, G-g, and H-h are parallel to the Z-axis and parallel to the micro The hinge points connected by the movable table are distributed symmetrically with respect to the coordinate origin, and the initial lengths of the eight bars are equal.
图3示出，本实施中所采用的压电驱动杆为压电陶瓷驱动杆1，压电陶瓷驱动杆1在外加电压下伸长，通过控制外加电压值来改变驱动杆1的长度。微动台2运动时，仅在柔性铰链3位置处发生弹性变形，其它部分都被认为是刚体。Fig. 3 shows that the piezoelectric driving rod used in this implementation is a piezoelectric ceramic driving rod 1, and the piezoelectric ceramic driving rod 1 is elongated under an applied voltage, and the length of the driving rod 1 is changed by controlling the value of the applied voltage. When the micro-motion table 2 moves, elastic deformation occurs only at the position of the
本实施例中，采用并行控制方式，该并行控制方式是通过并行控制八根压电驱动杆的长度变化，使工作台多个自由度的运动同步进行。In this embodiment, a parallel control mode is adopted, and the parallel control mode is to synchronize the movement of multiple degrees of freedom of the worktable by controlling the length variation of the eight piezoelectric driving rods in parallel.
具体为：以八根驱动杆的长度变化量与工作台各个自由度运动量的关系建立工作台运动模型；按照模型控制压电驱动杆的长度来同步实现工作台多个自由度的运动。Specifically, the workbench motion model is established based on the relationship between the length variation of the eight drive rods and the movement of each degree of freedom of the workbench; the length of the piezoelectric drive rods is controlled according to the model to realize the movement of multiple degrees of freedom of the workbench synchronously.
关于工作台运动模型的建立：About the establishment of the table motion model:
在图2(a)、2(b)、2(c)、2(d)、2(e)、2(f)分别示出了工作台各种单自由度的运动。Figures 2(a), 2(b), 2(c), 2(d), 2(e), and 2(f) show the movements of various single-degree-of-freedom workbenches, respectively.
以下说明单自由度微动时，工作台位移与单驱动杆变形量的关系。The following describes the relationship between the displacement of the table and the deformation of the single driving rod when the single degree of freedom is slightly moved.
以驱动杆A-a为例。微动工作台沿X方向平动ΔX(图2(a))，则a点坐标值(Xa，Ya，Za)变化为：Take drive rod A-a as an example. The micro-motion table moves ΔX along the X direction (Fig. 2(a)), then the coordinate value of point a (Xa, Ya, Za) changes as:
X′a＝Xa+ΔX，Y′a＝Ya，Z′a＝Za，X' a =X a +ΔX, Y' a =Y a , Z' a =Z a ,
驱动杆A-a长度变化为：The length of drive rod A-a changes as:
L′2 (A-a)＝(X′a-XA)2+(Y′a-YA)2+(Z′a-ZA)2＝L2 (A-a)+2(Xa-XA)ΔX+(ΔX)2。L′ 2 (Aa) ＝(X′ a -X A ) 2 +(Y′ a -Y A ) 2 +(Z′ a -Z A ) 2 ＝L 2 (Aa) +2(X a -X A )ΔX+(ΔX) 2 .
同理，微动工作台沿Y方向平动ΔY(图2(b))，有：Similarly, the micro-movement table moves ΔY along the Y direction (Fig. 2(b)), there are:
X′a＝Xa，Y′a＝Ya+ΔY，Z′a＝Za，X' a =X a , Y' a =Y a +ΔY, Z' a =Z a ,
L′2 (A-a)＝L2 (A-a)+2(Ya-YA)ΔY+(ΔY)2。L' 2 (Aa) = L 2 (Aa) + 2(Y a - Y A )ΔY+(ΔY) 2 .
微动工作台沿Z方向平动ΔZ(图2(c))，有：The micro-movement table moves ΔZ along the Z direction (Fig. 2(c)), there are:
X′a＝Xa，Y′a＝Ya，Z′a＝Za+ΔZ，X' a =X a , Y' a =Y a , Z' a =Z a +ΔZ,
L′2 (A-a)＝L2 (A-a)+2(Za-ZA)ΔZ+(ΔZ)2。L' 2 (Aa) = L 2 (Aa) + 2(Z a - Z A )ΔZ + (ΔZ) 2 .
再说明工作台绕固定坐标系转动，设a点转矩为Ra。Then explain that the workbench rotates around the fixed coordinate system, and set the torque at point a as Ra.
微动工作台单绕X轴转动Δα(图2(d))，则
Za＝Rasinθ。Z a =R a sin θ.
a点坐标(Xa，Ya，Za)变化为：The coordinates of point a (Xa, Ya, Za) change to:
X′a＝Xa，X' a = X a ,
Y′a＝Racos(θ+Δα)＝RacosθcosΔα-RasinθsinΔα＝YacosΔα-ZasinΔα，Y' a =R a cos(θ+Δα)=R a cosθcosΔα-R a sinθsinΔα=Y a cosΔα-Z a sinΔα,
Z′a＝Rasin(θ+Δα)＝RasinθcosΔα+RacosθsinΔα＝ZacosΔα+YasinΔα，Z' a =R a sin(θ+Δα)=R a sinθcosΔα+R a cosθsinΔα=Z a cosΔα+Y a sinΔα,
同理，工作台单纯绕Y轴转动Δβ(图2(e))，有：Similarly, the table simply rotates Δβ around the Y axis (Fig. 2(e)), we have:
Xa′＝XacosΔβ-ZasinΔβ，X a '=X a cosΔβ-Z a sinΔβ,
Y′a＝Ya，Y′ a = Y a ,
Z′a＝ZacosΔβ+XasinΔβ，Z' a =Z a cosΔβ+X a sinΔβ,
工作台单纯绕Z轴转动Δγ(图2(f))，有：The table simply rotates Δγ around the Z axis (Fig. 2(f)), there are:
Xa′＝XacosΔγ-YasinΔγ，X a '=X a cosΔγ-Y a sinΔγ,
Y′a＝YacosΔγ+XasinΔγY′ a ＝Y a cosΔγ+X a sinΔγ
Z′a＝Za Z' a = Z a
八杆的长度变化公式的推导方法与驱动杆A-a相同。The derivation method of the length variation formula of the eight rods is the same as that of the driving rod A-a.
由于ΔX，ΔY，ΔZ，Δα，Δβ，Δγ都很小，故可作如下近似：Since ΔX, ΔY, ΔZ, Δα, Δβ, Δγ are very small, it can be approximated as follows:
ΔX2→0，ΔY2→0，ΔZ2→0，sinΔα→Δα，sinΔβ→Δβ，sinΔγ→Δγ，cosΔα→1，cosΔβ→1，cosΔγ→1 ΔX2 →0, ΔY2 →0, ΔZ2 →0, sinΔα→Δα, sinΔβ→Δβ, sinΔγ→Δγ, cosΔα→1, cosΔβ→1, cosΔγ→1
令ΔL(A-a)＝L′(A-a)-L(A-a)，则(ΔL)2→0Let ΔL (Aa) = L′ (Aa) -L (Aa) , then (ΔL) 2 →0
可得单自由度微动时，驱动杆A-a长度变化量与工作台位移量之间有如下关系：It can be obtained that the length change of the drive rod A-a and the displacement of the worktable have the following relationship when the single degree of freedom is fretting:
L(A-a)ΔL(A-a)＝(Xa-XA)ΔX，L (Aa) ΔL (Aa) = (X a -X A ) ΔX,
L(A-a)ΔL(A-a)＝(Ya-YA)ΔY，L (Aa) ΔL (Aa) = (Y a - Y A ) ΔY,
L(A-a)ΔL(A-a)＝(Za-ZA)ΔZ，L (Aa) ΔL (Aa) = (Z a - Z A ) Δ Z,
L(A-a)ΔL(A-a)＝(ZaYA-YaZA)Δα，L (Aa) ΔL (Aa) = (Z a Y A -Y a Z A ) Δα,
L(A-a)ΔL(A-a)＝(ZaXA-XaZA)Δβ，L (Aa) ΔL (Aa) = (Z a X A -X a Z A ) Δβ,
L(A-a)ΔL(A-a)＝(YaXA-XaYA)Δγ。L (Aa) ΔL (Aa) = (Y a X A −X a Y A ) Δγ.
多自由度微动时，单驱动杆长度变化量与工作台位移量的关系The relationship between the length change of a single drive rod and the displacement of the table during multi-degree-of-freedom micro-motion
设微动顺序为ΔX→ΔY→ΔZ→Δα→Δβ→Δγ，仍以A-a杆为例。Let the micro-motion sequence be ΔX→ΔY→ΔZ→Δα→Δβ→Δγ, still taking the A-a rod as an example.
Xa′(1)＝Xa+ΔX Xa′(2)＝Xa+ΔX Xa′(3)＝Xa+ΔXX a '(1)=X a +ΔX X a '(2)=X a +ΔX X a '(3)=X a +ΔX
Ya′(1)＝Ya Ya′(2)＝Ya+ΔY Ya′(3)＝Ya+ΔYY a '(1)=Y a Y a '(2)=Y a +ΔY Y a '(3)=Y a +ΔY
Za′(1)＝Za Za′(2)＝Za Za′(3)＝Za+ΔZZ a ′(1)=Z a Z a ′(2)=Z a Z a ′(3)=Z a +ΔZ
Xa′(4)＝Xa+ΔXX a '(4)=X a +ΔX
Ya′(4)＝(Ya+ΔY)cos(Δα)-(Za+ΔZ)sin(Δα)Y a ′(4)=(Y a +ΔY)cos(Δα)-(Z a +ΔZ)sin(Δα)
Za′(4)＝(Za+ΔZ)cos(Δα)+(Ya+ΔY)sin(Δα)Z a ′(4)=(Z a +ΔZ)cos(Δα)+(Y a +ΔY)sin(Δα)
Xa′(5)＝(Xa+ΔX)cos(Δβ)-(Za+ΔZ)cos(Δα)sin(Δβ)-(Ya+ΔY)sin(Δα)sin(Δβ)X a ′(5)=(X a +ΔX)cos(Δβ)-(Z a +ΔZ)cos(Δα)sin(Δβ)-(Y a +ΔY)sin(Δα)sin(Δβ)
Ya′(5)＝(Ya+ΔY)cos(Δα)-(Za+ΔZ)sin(Δα)Y a '(5)=(Y a +ΔY)cos(Δα)-(Z a +ΔZ)sin(Δα)
Za′(5)＝(Za+ΔZ)cos(Δα)cos(Δβ)+(Ya+ΔY)sin(Δα)cos(Δβ)+(Xa+ΔX)sin(Δβ)Z a ′(5)=(Z a +ΔZ)cos(Δα)cos(Δβ)+(Y a +ΔY)sin(Δα)cos(Δβ)+(X a +ΔX)sin(Δβ)
Xa′(6)＝(Xa+ΔX)cos(Δβ)cos(Δγ)-(Za+ΔZ)cos(Δα)sin(Δβ)cos(Δγ)X a ′(6)=(X a +ΔX)cos(Δβ)cos(Δγ)-(Z a +ΔZ)cos(Δα)sin(Δβ)cos(Δγ)
-(Ya+ΔY)sin(Δα)sin(Δβ)cos(Δγ)-(Ya+ΔY)cos(Δα)sin(Δγ)-(Y a +ΔY)sin(Δα)sin(Δβ)cos(Δγ)-(Y a +ΔY)cos(Δα)sin(Δγ)
+(Za+ΔZ)sin(Δα)sin(Δγ)+(Z a +ΔZ)sin(Δα)sin(Δγ)
Ya′(6)＝(Ya+ΔY)cos(Δα)cos(Δγ)-(Za+ΔZ)sin(Δα)cos(Δγ)Y a ′(6)=(Y a +ΔY)cos(Δα)cos(Δγ)-(Z a +ΔZ)sin(Δα)cos(Δγ)
+(Xa+ΔX)cos(Δβ)sin(Δγ)-(Za+ΔZ)cos(Δα)sin(Δβ)sin(Δγ)+(X a +ΔX)cos(Δβ)sin(Δγ)-(Z a +ΔZ)cos(Δα)sin(Δβ)sin(Δγ)
-(Ya+ΔY)sin(Δα)sin(Δβ)sin(Δγ)-(Y a +ΔY)sin(Δα)sin(Δβ)sin(Δγ)
Za′(6)＝(Za+ΔZ)cos(Δα)cos(Δβ)+(Ya+ΔY)sin(Δα)cos(Δβ)+(Xa+ΔX)sin(Δβ)Z a ′(6)=(Z a +ΔZ)cos(Δα)cos(Δβ)+(Y a +ΔY)sin(Δα)cos(Δβ)+(X a +ΔX)sin(Δβ)
L′2 (A-a)＝(Xa′ (6)-XA)2+(Ya′ (6)-YA)2+(Za′ (6)-ZA)2 L′ 2 (Aa) ＝(X a′ (6) -X A ) 2 +(Y a′ (6) -Y A ) 2 +(Z a′ (6) -Z A ) 2
≈L2 (A-a)+2(Xa-XA)ΔX+2(Ya-YA)ΔY+2(Za-ZA)ΔZ≈L 2 (Aa) +2(X a -X A )ΔX+2(Y a -Y A )ΔY+2(Z a -Z A )ΔZ
+2(ZaYA-YaZA)Δα+2(ZaXA-XaZA)Δβ+2(YaXA-XaYA)Δγ+2(Z a Y A -Y a Z A )Δα+2(Z a X A -X a Z A )Δβ+2(Y a X A -X a Y A )Δγ
其它驱动杆的公式推导方法同上。可证，微动顺序不影响结论。The formula derivation method of other driving rods is the same as above. It can be proved that the order of fretting does not affect the conclusion.
并行运动时，驱动杆变形控制的数学模型Mathematical Model of Drive Rod Deformation Control during Parallel Movement
对前面导出的公式加以归纳，可得各杆变形与各自由度微动间的关系：Summarizing the formulas derived above, the relationship between the deformation of each rod and the fretting of each degree of freedom can be obtained:
此即为各杆并行运动时，驱动器控制的数学模型。若各杆的长度、位置均为理想状态，则上式可简化成：This is the mathematical model of the drive control when the rods move in parallel. If the length and position of each rod are ideal, the above formula can be simplified as:
该驱动控制模型是在理想状态下导出的，由模型可以看出实现工作台各单个自由度运动所要控制的驱动杆各不相同，有的控制两杆、有的控制四杆、要实现工作台多自由度运动就要同步控制各单自由度运动，各驱动杆的控制为独立与局部相关相结合。沿X方向平动ΔX要控制驱动杆A-a和C-c，沿Y方向平动ΔY要控制驱动杆B-b和D-d，沿Z方向平动ΔZ要控制驱动杆E-e、F-f、G-g、H-h，单纯绕X轴转动Δα要控制驱动杆F-f和H-h，单纯绕Y轴转动Δβ要驱动杆E-e和G-g，单纯绕Z轴转动Δγ要控制驱动杆A-a、B-b、C-c、D-d，工作台多自由度的运动就要对各驱动杆进行相关控制，实现微动台多自由度运动时各个驱动杆长度变化量各不相同，单层结构六自由度微动工作台并行控制方法，就是根据上述模型由要实现的各个自由度的运动量ΔX、ΔY、ΔZ、Δα、Δβ、Δγ来计算各个压电驱动杆的长度变化量，对压电驱动器的运动相关控制，各自由度的运动可同步进行，达到对工作台并行控制的目的。通过这种并行控制方法可大大减少工作台方位调整所需的时间，提高测量速率和效率。The drive control model is derived under ideal conditions. It can be seen from the model that the drive rods to be controlled to realize the movement of each single degree of freedom of the workbench are different. Some control two rods, some control four rods, and to realize the The multi-degree-of-freedom movement requires synchronous control of each single-degree-of-freedom movement, and the control of each driving rod is a combination of independent and local correlation. Translate ΔX along the X direction to control the drive rods A-a and C-c, translate ΔY along the Y direction to control the drive rods B-b and D-d, and translate ΔZ along the Z direction to control the drive rods E-e, F-f, G-g, H-h, simply around the X axis To rotate Δα, you need to control the driving rods F-f and H-h, to simply rotate Δβ around the Y axis, you need to drive the rods E-e and G-g, and to simply rotate Δγ around the Z axis, you need to control the driving rods A-a, B-b, C-c, D-d. The movement of the worktable with multiple degrees of freedom requires Correlation control is carried out on each drive rod, and the length variation of each drive rod is different when the multi-degree-of-freedom movement of the micro-motion stage is realized. The parallel control method of the single-layer structure six-degree-of-freedom micro-motion table is based on the above model. The amount of motion of the degrees of freedom ΔX, ΔY, ΔZ, Δα, Δβ, Δγ is used to calculate the length change of each piezoelectric drive rod, and for the motion-related control of the piezoelectric actuator, the movement of each degree of freedom can be carried out synchronously to achieve parallelism of the workbench purpose of control. This parallel control method can greatly reduce the time required for the orientation adjustment of the workbench, and improve the measurement rate and efficiency.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100340378C (en) * | 2005-03-10 | 2007-10-03 | 中国科学院上海光学精密机械研究所 | Six-freedom-degree precision positioning workbench |
| CN100394156C (en) * | 2005-05-23 | 2008-06-11 | 苏州试验仪器总厂 | Three-axis six-degree-of-freedom aerodynamic vibration, transport bumps, tilt and swing test bench |
| CN102063122A (en) * | 2010-11-10 | 2011-05-18 | 哈尔滨工业大学 | Spatial six-degree-of-freedom motion platform modal control method |
| CN103252761A (en) * | 2013-04-28 | 2013-08-21 | 合肥工业大学 | Long-stroke two-dimensional nano worktable system with angle compensation function |
| CN107785054A (en) * | 2017-11-10 | 2018-03-09 | 大连交通大学 | A kind of Space Curved-Beam six-degree of freedom micro-displacement workbench |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH04205113A (en) * | 1990-11-30 | 1992-07-27 | Hitachi Ltd | Sample table driving device |
| CN1086163C (en) * | 1999-09-30 | 2002-06-12 | 燕山大学 | Six-freedom parallel decoupling-structure jogging robot |
| CN2466767Y (en) * | 2001-02-23 | 2001-12-19 | 北京远泰通达科技开发有限责任公司 | Six-freedom super-precision location and fine operating platform |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100340378C (en) * | 2005-03-10 | 2007-10-03 | 中国科学院上海光学精密机械研究所 | Six-freedom-degree precision positioning workbench |
| CN100394156C (en) * | 2005-05-23 | 2008-06-11 | 苏州试验仪器总厂 | Three-axis six-degree-of-freedom aerodynamic vibration, transport bumps, tilt and swing test bench |
| CN102063122A (en) * | 2010-11-10 | 2011-05-18 | 哈尔滨工业大学 | Spatial six-degree-of-freedom motion platform modal control method |
| CN102063122B (en) * | 2010-11-10 | 2012-09-05 | 哈尔滨工业大学 | Spatial six-degree-of-freedom motion platform modal control method |
| CN103252761A (en) * | 2013-04-28 | 2013-08-21 | 合肥工业大学 | Long-stroke two-dimensional nano worktable system with angle compensation function |
| CN103252761B (en) * | 2013-04-28 | 2015-11-11 | 合肥工业大学 | There is the Long Distances two-dimensional nano work system of angle compensation function |
| CN107785054A (en) * | 2017-11-10 | 2018-03-09 | 大连交通大学 | A kind of Space Curved-Beam six-degree of freedom micro-displacement workbench |
| CN107785054B (en) * | 2017-11-10 | 2023-02-21 | 大连交通大学 | A six-degree-of-freedom micro-displacement worktable for curved beams in space |
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