CN1437018A - Prepn of capillary electrophoresis chip for biochemical analysis - Google Patents
Prepn of capillary electrophoresis chip for biochemical analysis Download PDFInfo
- Publication number
- CN1437018A CN1437018A CN 03111185 CN03111185A CN1437018A CN 1437018 A CN1437018 A CN 1437018A CN 03111185 CN03111185 CN 03111185 CN 03111185 A CN03111185 A CN 03111185A CN 1437018 A CN1437018 A CN 1437018A
- Authority
- CN
- China
- Prior art keywords
- chip
- capillary electrophoresis
- biochemical analysis
- handled
- raceway groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Surface Treatment Of Glass (AREA)
- Micromachines (AREA)
Abstract
Description
(一)技术领域(1) Technical field
本发明涉及的是一种用于生物化学分析的集成毛细管电泳芯片的制备方法。The invention relates to a method for preparing an integrated capillary electrophoresis chip for biochemical analysis.
(二)背景技术(2) Background technology
九十年代以来毛细管电泳技术得到了迅速发展,在短短数年间完成从实验室技术到商用技术,从小分子分析到生物大分子分析,从简单的分离模式到多种分离模式和技术,从大型仪器到微型化的几步飞跃。基于毛细管结构的集成毛细管电泳芯片(integrated capillaryelectrophoresis chip,ICEC)是结合生物技术、微电子技术及MEMS技术把各种通道、电极槽、检测流动池等集成在同一个基片(硅片、玻璃或有机玻璃)内的超高速电泳仪。现阶段所制作而成的芯片多采用以玻璃为衬底的标准的微电子加工工艺过程,即光刻→腐蚀→打通孔→键合。工艺过程相对复杂,成品率低,成本相对较高。Capillary electrophoresis technology has developed rapidly since the 1990s. In just a few years, it has completed the transition from laboratory technology to commercial technology, from small molecule analysis to biomacromolecule analysis, from simple separation modes to multiple separation modes and technologies, and from large-scale Several leaps from instrumentation to miniaturization. The integrated capillary electrophoresis chip (ICEC) based on the capillary structure combines biotechnology, microelectronics technology and MEMS technology to integrate various channels, electrode slots, detection flow cells, etc. on the same substrate (silicon wafer, glass or Ultra-high-speed electrophoresis apparatus inside plexiglass). Most of the chips produced at this stage adopt the standard microelectronics processing process with glass as the substrate, that is, photolithography → corrosion → punching holes → bonding. The process is relatively complicated, the yield is low, and the cost is relatively high.
近年来,有机玻璃(polymethylmethacrylate,PMMA)以其造价低,加工容易在毛细管电泳芯片领域占有的比例愈来愈大,也是ICEC的主要发展方向。有机玻璃的化学名称为聚甲基丙烯酸甲酯(CH2CH3(CO)2CH3)n,是由单体聚甲基丙烯酸甲酯聚合而成,由于其透光性很好(可透过90%以上的太阳光,透过紫外线的能力达73%),可和普通硅酸盐无机玻璃比拟;有机玻璃是热塑性塑料,它的首要性能特点是重量轻,相对密度为1.19,其重量仅为无机玻璃的一半,为铝的43%;其次是其机械强度高,这是由于它带有支链的线型高聚物,即有柔软的大分子链段的缘故,它的拉伸强度为60~70MPa,冲击强度为1.2~1.37MPa/cm2,是无机玻璃的7~18倍;最后,有机玻璃具有一定的耐热性,在温度140℃时开始软化。目前利用有机玻璃制作生物化学分析的集成毛细管电泳芯片的方法主要有注塑法、金属丝印模法、硅片印制法、激光烧蚀法。注塑法,是先用硅片的制作方法制成一块负板,然后利用此负片制成一个铬的母板,再利用此母板制出子板,最后再利用该子板作模子,用注塑的方法制出许多塑料芯片来。粘合温度为105℃,时间为5分钟,粘合剂为Mylar(Top Flight Monokote,Champaign,IL),厚度为2mm;金属丝印模法,是将长约为20cm,直径为13-25μm的Ni-Cr合金的两端固定在一金属弓上,使之绷紧,放在事先用防静电刷刷干净的宽2cm、长10cm、厚1.6cm的PMMA片上,金属丝上也加上一个载玻片,然后用两个铝块将两个载玻片完全盖上,夹紧铝块,放入炉中,在105℃时加热10min,使金属丝在PMMA上形成槽后取出整块冷却,取掉铝块及载玻片后,拨出金属丝,底板与盖板在108℃粘合,时间10min;硅片印制法,是将制成的硅负片置于两个光滑的铝片之间,在硅片和铝片之间放入用防静电刷刷干净的PMMA片,然后同样用铝片夹紧,加热到135℃,5min后取出冷却,粘合过程采用热方式,如前所述;激光烧蚀法,是将高强度的激光从掩膜上射向PMMA上,瞬间在特定位置烧蚀成所需的形状,再参照前述方法,将盖板与底片粘合。In recent years, plexiglass (polymethylmethacrylate, PMMA) occupies an increasing proportion in the field of capillary electrophoresis chips because of its low cost and easy processing, and it is also the main development direction of ICEC. The chemical name of plexiglass is polymethyl methacrylate (CH2CH3(CO)2CH3)n, which is polymerized from monomer polymethyl methacrylate. Sunlight, the ability to pass through ultraviolet rays reaches 73%), which can be compared with ordinary silicate plexiglass; plexiglass is a thermoplastic, its main performance feature is light weight, relative density is 1.19, its weight is only that of plexiglass Half, 43% of aluminum; followed by its high mechanical strength, this is because it has a branched linear polymer, that is, has a soft macromolecular segment, and its tensile strength is 60-70MPa , the impact strength is 1.2-1.37MPa/cm 2 , which is 7-18 times that of inorganic glass; finally, organic glass has certain heat resistance and begins to soften at a temperature of 140°C. At present, the methods of using plexiglass to make integrated capillary electrophoresis chips for biochemical analysis mainly include injection molding, wire printing, silicon wafer printing, and laser ablation. The injection molding method is to first make a negative plate with the method of making a silicon wafer, then use this negative film to make a chrome mother plate, then use this mother plate to make a sub-plate, and finally use the sub-plate as a mold, and use the injection molding Many plastic chips are produced by the method. The bonding temperature is 105°C, the time is 5 minutes, the adhesive is Mylar (Top Flight Monokote, Champaign, IL), and the thickness is 2mm; the wire stamping method is about 20cm long and 13-25μm in diameter. - The two ends of the Cr alloy are fixed on a metal bow to make it taut, and placed on a PMMA sheet with a width of 2 cm, a length of 10 cm, and a thickness of 1.6 cm that has been cleaned with an antistatic brush in advance, and a glass carrier is also added to the metal wire. Then cover the two glass slides completely with two aluminum blocks, clamp the aluminum blocks, put them in the furnace, heat at 105°C for 10 minutes, make the metal wires form grooves on the PMMA, take out the whole piece to cool, and take out After removing the aluminum block and the glass slide, pull out the wire, and bond the bottom plate and the cover plate at 108°C for 10 minutes; the silicon wafer printing method is to place the silicon negative film made between two smooth aluminum plates , put a PMMA sheet cleaned with an antistatic brush between the silicon sheet and the aluminum sheet, and then clamp it with the aluminum sheet, heat it to 135°C, take it out after 5 minutes and cool it down, and use heat for the bonding process, as described above The laser ablation method is to shoot a high-intensity laser from the mask to the PMMA, and instantly ablate it into the desired shape at a specific position, and then refer to the above method to bond the cover plate and the negative.
(三)发明内容(3) Contents of the invention
本发明的目的在于提供一种工艺过程简单、有利于提高产品质量的用于生物化学分析的毛细管电泳芯片的制备方法。The purpose of the present invention is to provide a method for preparing a capillary electrophoresis chip for biochemical analysis, which has a simple process and is beneficial to improving product quality.
本发明的目的是这样实现的:The purpose of the present invention is achieved like this:
(1)芯片的衬底材料为有机玻璃;(1) The substrate material of the chip is plexiglass;
(2)将有机玻璃放在微沟道加工机上,用刻划刀头在有机玻璃衬底上亥划出微沟道;(2) the plexiglass is placed on the micro-channel processing machine, and the micro-channel is drawn on the plexiglass substrate with the marking cutter head;
(3)对微沟道进行表面处理:将2~4∶1的三氯甲烷与冰醋酸的混合溶液注入微沟道中,至溶液挥发对微沟道表面进行光滑处理,用5~15%丙烯酸的水溶液进行接枝处理5-15分钟,用60~80%的N-甲基硅油与20~40%的乙酸乙酯混合物进行改性处理5~20分钟,放置12~24小时进行陈化处理;(3) Surface treatment of the microchannel: inject a mixed solution of 2-4:1 chloroform and glacial acetic acid into the microchannel until the solution volatilizes to smooth the surface of the microchannel, and use 5-15% acrylic acid The aqueous solution is grafted for 5-15 minutes, modified with a mixture of 60-80% N-methyl silicone oil and 20-40% ethyl acetate for 5-20 minutes, and left for 12-24 hours for aging treatment ;
(4)在加工完成微沟道的芯片上打通孔,孔径在0.3~2mm之间;(4) Drill through holes on the chip with the processed micro-channel, and the hole diameter is between 0.3 and 2 mm;
(5)将加工处理好的芯片与另一块有机玻璃用5~7∶1~2∶1的三氯甲烷、冰醋酸和乙醇的混合溶液进行粘接,制成产品。(5) bonding the processed chip to another piece of organic glass with a mixed solution of chloroform, glacial acetic acid and ethanol in a ratio of 5 to 7:1 to 2:1 to make a product.
本发明的优点在于:1、采用有机玻璃作为加工衬底材料,较以用玻璃为衬底材料的芯片在材质的选用上具有较高性价比;2、采用机械加工方法进行微沟道的加工,沟道的尺寸及形状可控,且可按需求更改图形的形状,较以光刻制版法更加方便灵活,成本大大降低;3、在同一片有机玻璃上面加工微沟道及打通孔工艺,另一片有机玻璃上面不做其他加工工艺,降低了对准难度;4、在沟道内部注入溶液,随溶液的挥发沟道表面也变得光滑,提高了沟道内流体流动的流平性,沟道表面光滑,可以提高电泳的分离效果。对表面进行接枝改性,降低表面能,提高反应惰性。5、该制备方法不需要复杂的工艺设备,加工工艺过程简化,制作成本降低,加工成品率高。The present invention has the advantages of: 1. Adopt organic glass as the processing substrate material, which has higher cost-effectiveness in material selection than chips with glass as the substrate material; 2. Adopt the mechanical processing method to process the microchannel, The size and shape of the channel can be controlled, and the shape of the pattern can be changed according to the needs, which is more convenient and flexible than the photolithography plate-making method, and the cost is greatly reduced; There is no other processing technology on a piece of plexiglass, which reduces the difficulty of alignment; 4. The solution is injected into the channel, and the surface of the channel becomes smooth with the volatilization of the solution, which improves the leveling of the fluid flow in the channel, and the channel The surface is smooth, which can improve the separation effect of electrophoresis. The surface is grafted and modified to reduce the surface energy and improve the reaction inertness. 5. The preparation method does not require complex process equipment, the processing process is simplified, the production cost is reduced, and the processing yield is high.
(四)附图说明(4) Description of drawings
图1为实施例1中直沟道芯片加工图;Fig. 1 is the straight channel chip processing diagram in
图2为实施例2中弯角转弯形弯沟道芯片加工图;Fig. 2 is the processing diagram of the curved channel chip with curved corner and curved shape in embodiment 2;
图3是微沟道加工机的结构示意图。Fig. 3 is a structural schematic diagram of a micro-channel processing machine.
(四)具体实施方案(4) Specific implementation plan
下面举例对本发明作更详细的描述:The following examples describe the present invention in more detail:
实施例1:Example 1:
本实施例是加工图1中所示的简单的直沟道形式。首先将有机玻璃加工成所需要的芯片尺寸,例如25*50mm2,用去离子水超声清洗表面;用微沟道加工仪进行直沟道的加工。结合图3,微沟道加工仪的组成包括基座3,安装在基座上的刀头支架1、X向工作台6、Y向工作台5,安装在刀头支架上的滑刻刀头7,滑刻刀头上带有Z向调节钮8,X向工作台上带有X向调节钮2、Y向工作台上带有Y向调节钮4。在芯片衬底上利用微沟道加工仪X轴控制横向位移,Y轴控制纵向位移,Z轴控制划刻深度,加工出深30μm,宽100μm的微沟道;This embodiment is for processing the simple straight channel form shown in FIG. 1 . Firstly, the plexiglass is processed into the required chip size, such as 25*50mm 2 , and the surface is ultrasonically cleaned with deionized water; the straight channel is processed with a micro-channel processor. Referring to Figure 3, the composition of the micro-groove processing instrument includes a base 3, a
对划刻后的有机玻璃芯片衬底表面进行处理:Treat the surface of the plexiglass chip substrate after scribing:
首先利用2∶1的三氯甲烷与冰醋酸的混合溶液对微沟道表面进行光滑处理。在微沟道内部注入溶液,随溶液的挥发微沟道表面也变得光滑,以提高沟道内流体流动的流平性;First, the surface of the microchannel was smoothed with a 2:1 mixed solution of chloroform and glacial acetic acid. The solution is injected into the microchannel, and the surface of the microchannel becomes smooth with the volatilization of the solution, so as to improve the leveling of the fluid flow in the channel;
另一方面,对表面进行接枝、改性,降低表面能,提高反应惰性。具体改性如下:(1)用8-10%丙烯酸的水溶液处理10分钟。(2)用70%的N-甲基硅油与30%的乙酸乙酯的混合物处理15分钟;(3)陈化放置20~24小时;On the other hand, the surface is grafted and modified to reduce the surface energy and improve the reaction inertness. The specific modification is as follows: (1) Treat with 8-10% acrylic acid aqueous solution for 10 minutes. (2) Treatment with a mixture of 70% N-methyl silicone oil and 30% ethyl acetate for 15 minutes; (3) Aging and standing for 20-24 hours;
加工制作完微沟道后,在芯片上打孔,作为进样池、缓冲样池、废液池、样品回收池。先用半径为0.5mm的钻头打通,再用半径为1.0mm的钻头钻有机玻片厚度的一半,这样是可以满足插移液管的要求,并保证密封条件;After the microchannel is processed and manufactured, holes are punched on the chip to serve as sample pools, buffer sample pools, waste liquid pools, and sample recovery pools. First use a drill with a radius of 0.5mm to open it, and then use a drill with a radius of 1.0mm to drill half of the thickness of the organic glass slide, which can meet the requirements for inserting the pipette and ensure the sealing condition;
粘接处理,进行沟道的封闭:(1)表面处理:采用超声波清洗,用电子清洗剂DZ-1和DZ-2分别配置1#和2#洗液,采用标准清洗工艺进行,然后将芯片衬底放入烘箱,在60℃温度下把芯片烘干;(2)溶剂的涂布:要做到平整、均匀,否则会由于收缩不均匀,在接口处产生内应力;(3)粘接:采用三氯甲烷等做粘接剂,将两块玻片粘合。Adhesive treatment, seal the channel: (1) Surface treatment: use ultrasonic cleaning, use electronic cleaning agent DZ-1 and DZ-2 to configure 1# and 2# lotion respectively, use standard cleaning process, and then chip The substrate is placed in an oven, and the chip is dried at 60°C; (2) Coating of the solvent: it must be smooth and uniform, otherwise internal stress will be generated at the interface due to uneven shrinkage; (3) Bonding : Use chloroform or the like as an adhesive to bond two glass slides.
实施例2Example 2
首先将有机玻璃加工成所需要芯片尺寸,例如25*50mm2,用去离子水超声清洗表面;First process the plexiglass into the required chip size, such as 25*50mm 2 , and ultrasonically clean the surface with deionized water;
用微沟道加工仪进行直沟道的加工,在芯片衬底上利用该仪器X轴控制横向位移,Y轴控制纵向位移,Z轴控制划刻深度,加工出深30μm,宽100μm的微沟道;Use the micro-groove processing instrument to process the straight channel, and use the instrument to control the lateral displacement on the X-axis, the longitudinal displacement on the Y-axis, and the scribe depth on the Z-axis on the chip substrate, and process a micro-groove with a depth of 30 μm and a width of 100 μm road;
对划刻后的有机玻璃芯片衬底表面进行处理:Treat the surface of the plexiglass chip substrate after scribing:
首先利用3∶1的三氯甲烷与冰醋酸的混合溶液对微沟道表面进行光滑处理。在微沟道内部注入溶液,随溶液的挥发微沟道表面也变得光滑,以提高沟道内流体流动的流平性;First, the surface of the microchannel was smoothed with a 3:1 mixed solution of chloroform and glacial acetic acid. The solution is injected into the microchannel, and the surface of the microchannel becomes smooth with the volatilization of the solution, so as to improve the leveling of the fluid flow in the channel;
另一方面,对表面进行接枝、改性,降低表面能,提高反应惰性。具体改性如下:(1)用9%丙烯酸的水溶液处理15分钟。(2)用60%的N-甲基硅油与40%的乙酸乙酯的混合物处理20分钟;(3)陈化放置20小时;On the other hand, the surface is grafted and modified to reduce the surface energy and improve the reaction inertness. The specific modification is as follows: (1) Treat with 9% acrylic acid aqueous solution for 15 minutes. (2) Treat with a mixture of 60% N-methyl silicone oil and 40% ethyl acetate for 20 minutes; (3) Aging and leave for 20 hours;
加工制作完微沟道后,在芯片上打孔,作为进样池、缓冲样池、废液池、样品回收池。先用半径为0.5mm的钻头打通,再用半径为1.0mm的钻头钻有机玻片厚度的一半,这样是可以满足插移液管的要求,并保证密封条件;After the microchannel is processed and manufactured, holes are punched on the chip to serve as sample pools, buffer sample pools, waste liquid pools, and sample recovery pools. First use a drill with a radius of 0.5mm to open it, and then use a drill with a radius of 1.0mm to drill half of the thickness of the organic glass slide, which can meet the requirements for inserting the pipette and ensure the sealing condition;
粘接处理,进行沟道的封闭:(1)表面处理:采用超声波清洗,用电子清洗剂DZ-1和DZ-2分别配置1#和2#洗液,采用标准清洗工艺进行,然后将芯片衬底放入烘箱,在60℃温度下把芯片烘干;(2)溶剂的涂布:要做到平整、均匀,否则会由于收缩不均匀,在接口处产生内应力;(3)粘接:采用三氯甲烷等做粘接剂,将两块玻片粘合。Adhesive treatment, seal the channel: (1) Surface treatment: use ultrasonic cleaning, use electronic cleaning agent DZ-1 and DZ-2 to configure 1# and 2# lotion respectively, use standard cleaning process, and then chip The substrate is placed in an oven, and the chip is dried at 60°C; (2) Coating of the solvent: it must be smooth and uniform, otherwise internal stress will be generated at the interface due to uneven shrinkage; (3) Bonding : Use chloroform or the like as an adhesive to bond two glass slides.
实施例3Example 3
本实施例是加工图2中所示的具有弯角转弯形的弯沟道形式,与实施例1中加工过程基本相同,只在沟道加工过程中将沟道划刻程序作相应改变。This embodiment is to process the curved channel form shown in Fig. 2 with an angle turn, and the processing process is basically the same as that in
Claims (5)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031111858A CN1185484C (en) | 2003-03-14 | 2003-03-14 | Prepn of capillary electrophoresis chip for biochemical analysis |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031111858A CN1185484C (en) | 2003-03-14 | 2003-03-14 | Prepn of capillary electrophoresis chip for biochemical analysis |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1437018A true CN1437018A (en) | 2003-08-20 |
| CN1185484C CN1185484C (en) | 2005-01-19 |
Family
ID=27634122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031111858A Expired - Fee Related CN1185484C (en) | 2003-03-14 | 2003-03-14 | Prepn of capillary electrophoresis chip for biochemical analysis |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1185484C (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100417937C (en) * | 2005-01-13 | 2008-09-10 | 清华大学 | Chip Capacitively Coupled Non-Contact Conductivity Detector |
| CN100420622C (en) * | 2005-12-28 | 2008-09-24 | 哈尔滨工业大学 | Secondary Template Replication Processing Method Based on Polydimethylsiloxane Micro Components |
| CN100425984C (en) * | 2005-11-03 | 2008-10-15 | 武汉化工学院 | Method for producing miniflow control chip |
| CN100443397C (en) * | 2004-05-28 | 2008-12-17 | 哈尔滨工业大学 | Processing method of micro-cooling measurement and control system |
| CN102198926A (en) * | 2011-04-06 | 2011-09-28 | 哈尔滨工业大学 | Micro-channel processing method for micro-fluidic chip |
| CN103213943A (en) * | 2013-04-23 | 2013-07-24 | 山东省科学院海洋仪器仪表研究所 | Method for processing and leveling micro-channel of polymer chip |
| US8844782B2 (en) | 2010-07-16 | 2014-09-30 | Corning Incorporated | Methods for scribing and separating strengthened glass substrates |
| US8875967B2 (en) | 2010-03-19 | 2014-11-04 | Corning Incorporated | Mechanical scoring and separation of strengthened glass |
| US10351460B2 (en) | 2012-05-22 | 2019-07-16 | Corning Incorporated | Methods of separating strengthened glass sheets by mechanical scribing |
| US10386854B2 (en) | 2014-02-07 | 2019-08-20 | Crown Equipment Corporation | Systems, methods, and mobile client devices for supervising industrial vehicles |
-
2003
- 2003-03-14 CN CNB031111858A patent/CN1185484C/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100443397C (en) * | 2004-05-28 | 2008-12-17 | 哈尔滨工业大学 | Processing method of micro-cooling measurement and control system |
| CN100417937C (en) * | 2005-01-13 | 2008-09-10 | 清华大学 | Chip Capacitively Coupled Non-Contact Conductivity Detector |
| CN100425984C (en) * | 2005-11-03 | 2008-10-15 | 武汉化工学院 | Method for producing miniflow control chip |
| CN100420622C (en) * | 2005-12-28 | 2008-09-24 | 哈尔滨工业大学 | Secondary Template Replication Processing Method Based on Polydimethylsiloxane Micro Components |
| US9802854B2 (en) | 2010-03-19 | 2017-10-31 | Corning Incorporated | Mechanical scoring and separation of strengthened glass |
| US8875967B2 (en) | 2010-03-19 | 2014-11-04 | Corning Incorporated | Mechanical scoring and separation of strengthened glass |
| US8844782B2 (en) | 2010-07-16 | 2014-09-30 | Corning Incorporated | Methods for scribing and separating strengthened glass substrates |
| US8864005B2 (en) | 2010-07-16 | 2014-10-21 | Corning Incorporated | Methods for scribing and separating strengthened glass substrates |
| US9611167B2 (en) | 2010-07-16 | 2017-04-04 | Corning Incorporated | Methods for scribing and separating strengthened glass substrates |
| CN102198926A (en) * | 2011-04-06 | 2011-09-28 | 哈尔滨工业大学 | Micro-channel processing method for micro-fluidic chip |
| US10351460B2 (en) | 2012-05-22 | 2019-07-16 | Corning Incorporated | Methods of separating strengthened glass sheets by mechanical scribing |
| CN103213943A (en) * | 2013-04-23 | 2013-07-24 | 山东省科学院海洋仪器仪表研究所 | Method for processing and leveling micro-channel of polymer chip |
| CN103213943B (en) * | 2013-04-23 | 2015-08-05 | 山东省科学院海洋仪器仪表研究所 | A kind of processing of polymer chip microchannel and leveling method |
| US10386854B2 (en) | 2014-02-07 | 2019-08-20 | Crown Equipment Corporation | Systems, methods, and mobile client devices for supervising industrial vehicles |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1185484C (en) | 2005-01-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101037185A (en) | Method for making nano-groove on quartz glass | |
| Wei et al. | Photochemically patterned poly (methyl methacrylate) surfaces used in the fabrication of microanalytical devices | |
| CN1185484C (en) | Prepn of capillary electrophoresis chip for biochemical analysis | |
| CN1699984A (en) | A multi-channel microfluidic chip, its preparation method and application | |
| CN1305410A (en) | Microfluidic articles and method of manufacturing same | |
| JP4998462B2 (en) | Manufacturing method of resin composite molded body | |
| CN101281136B (en) | Microflow control chip used for ultraviolet-visible absorption detection and preparation thereof | |
| CN107335490A (en) | A kind of micro-fluidic chip of the PLC technology based on liquid liquid electrowetting effect | |
| CN103055985A (en) | Polymer micro-fluidic chip batch manufacturing process based on metal wire hot pressing method | |
| CN101560061B (en) | Method for preparing patterned polymer brush | |
| CN105932151B (en) | Micro-fluidic chip and production method for viscosity test | |
| CN2831115Y (en) | Multi-channel microflow controlled chip | |
| CN106198660A (en) | A kind of method depositing nanometer silver in micro-fluidic duct | |
| CN109317228A (en) | A preparation method of microfluidic chip based on laser engraving micromachining | |
| CN101000290A (en) | Sample enrichment chip, manufacturing method and enrichment method and on micronano structure | |
| CN108097338A (en) | A kind of micro-nano flow control chip based on nanometer gap between nanostructured and preparation method thereof | |
| CN102764676B (en) | Microfluidic chip with non-contact light drive-bipolar electrode (BPE) | |
| JP2002139419A (en) | Micropassage element and production method thereof | |
| CN110354925A (en) | It is a kind of comprising can deformation liquid metal electrode micro-fluidic chip and preparation method thereof | |
| CN1725007A (en) | Preparation method of polymer microflow control chip having metal microelectrode | |
| CN106345543B (en) | A kind of microring array chip of the charge inducing electric osmose based on fixed potential | |
| CN113522381B (en) | Different concentration liquid drop produces chip based on induction charge electroosmosis | |
| CN107876112A (en) | A kind of method of glass Direct Bonding artistic glass base microfluidic channel sealing-in | |
| CN106582904B (en) | A method of it carrying out glass material micro-fluidic chip using dry film and is bonded at normal temperatures | |
| CN112894641B (en) | Liquid drop tweezers with super oleophobic oleophylic patterned surface |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |