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CN1421278A - Laminar flow plasma spraying equipment and method - Google Patents

Laminar flow plasma spraying equipment and method Download PDF

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CN1421278A
CN1421278A CN01139772A CN01139772A CN1421278A CN 1421278 A CN1421278 A CN 1421278A CN 01139772 A CN01139772 A CN 01139772A CN 01139772 A CN01139772 A CN 01139772A CN 1421278 A CN1421278 A CN 1421278A
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jet
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powder supply
plasma
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CN1204979C (en
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吴承康
潘文霞
马维
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Institute of Mechanics of CAS
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Abstract

本发明层流等离子体喷涂的装置及方法,采用层流等离子体发生器,枪内或枪外、单口或多口供粉形式,在以小功率维持层流等离子体射流状态下,提高气体流量增加射流的热效率,根据粉体的种类、材料性质和颗粒粒径及分布,选择或调整射流的能量及分布,配合适当的粉末携带气体流量,喷涂各种粉体材料并获得高质量涂层。本发明方法由于层流等离子体射流对周围气体的卷吸和搅动小,减小周围尘埃杂质的混入,致使射流能量高效利用,可以在低功率条件下喷涂高熔点物质的涂层,在大气压条件下喷涂有利于减少非氧化物涂层的氧化,在减压喷涂条件下有利于粉体颗粒的充分加热。

Figure 01139772

The laminar flow plasma spraying device and method of the present invention adopts a laminar flow plasma generator, inside or outside the gun, single-port or multi-port powder supply form, and maintains the state of laminar plasma jet flow with low power to increase the gas flow rate. The thermal efficiency of the jet, according to the type of powder, material properties, and particle size and distribution, select or adjust the energy and distribution of the jet, and cooperate with the appropriate powder-carrying gas flow rate to spray various powder materials and obtain high-quality coatings. Due to the small entrainment and agitation of the laminar plasma jet to the surrounding gas, the method of the present invention reduces the mixing of surrounding dust and impurities, resulting in efficient use of jet energy, and can spray coatings of high melting point substances under low power conditions. Down spraying is beneficial to reduce the oxidation of non-oxide coating, and it is conducive to the sufficient heating of powder particles under the condition of decompression spraying.

Figure 01139772

Description

层流等离子体喷涂装置及方法Laminar plasma spraying device and method

技术领域technical field

本发明涉及利用长直层流电弧等离子体进行喷涂的方法与装置。这种方法与装置可以在低输入功率的条件下喷涂高熔点物质的涂层,有效控制涂层组织,提高沉积率。The invention relates to a method and a device for spraying with long straight laminar arc plasma. The method and device can spray the coating of high melting point substance under the condition of low input power, effectively control the coating structure and increase the deposition rate.

背景技术Background technique

目前用于喷涂的热等离子体射流一般为湍流流动状态,改变喷枪结构和产生参数,只能一定程度地改变射流的能量密度,很难明显大幅度地改变射流的能量分布。对于特定的喷枪,在可用的等离子体产生参数范围内,射流长度变化不大。这是由于处于湍流状态的射流会对周围冷气体形成严重的卷吸,射流的能量很快耗散于与周围冷气体的混合,以至射流的有效高温区很短,加之高温区的气流速度很高,用于喷涂时,注入射流中的粉体颗粒的被加热路径和时间都很短。所以当其用于喷涂高熔点物质的涂层时,需要采用大功率的喷涂系统。At present, the thermal plasma jet used for spraying is generally in a turbulent flow state. Changing the structure and production parameters of the spray gun can only change the energy density of the jet to a certain extent, and it is difficult to significantly change the energy distribution of the jet. For a particular spray gun, the jet length does not vary much over the range of available plasma generation parameters. This is because the jet in the turbulent state will seriously entrain the surrounding cold gas, and the energy of the jet will be quickly dissipated in the mixing with the surrounding cold gas, so that the effective high temperature zone of the jet is very short, and the air velocity in the high temperature zone is very fast. High, when used for spraying, the heated path and time of the powder particles injected into the jet are very short. Therefore, when it is used for spraying coatings of high melting point substances, a high-power spraying system is required.

与其不同,长弧层流等离子体射流的出口温度与湍流射流相当,但气流流速约为湍流射流的一半。射流长度可根据气压、气流量、气体种类和输入功率等产生条件的改变,在8~100cm宽的范围内明显变化,弧长与其直径之比超过70。因此,粉体颗粒供入层流等离子体射流,在其高温区的滞留和被加热时间均比湍流射流条件下提高一个数量级。然而,要控制产生高长径比的等离子体射流,需要平衡控制产生过程中的各个因素,相关技术存在很多尚未解决的关键问题。申请人先前提出了“产生长弧等离子体射流的装置及方法”的发明专利申请(发明专利号:99121825.6),要以这种射流进行等离子体喷涂,还需要提高产生射流的热效率、解决供粉气体对射流可能产生的扰乱以至破坏其层流流动状态、将各种粉体颗粒均匀供入射流高温区等问题。In contrast, the exit temperature of the long-arc laminar plasma jet is comparable to that of the turbulent jet, but the gas flow velocity is about half of that of the turbulent jet. The length of the jet can vary significantly in the range of 8 to 100 cm wide according to the conditions of air pressure, air flow, gas type and input power, and the ratio of the arc length to its diameter exceeds 70. Therefore, when the powder particles are fed into the laminar plasma jet, the residence time and heating time in the high temperature zone are both increased by an order of magnitude compared with the turbulent jet conditions. However, in order to control the generation of plasma jets with high aspect ratios, it is necessary to balance and control various factors in the generation process, and there are many unsolved key problems in related technologies. The applicant had previously filed an invention patent application for "Devices and methods for generating long-arc plasma jets" (invention patent number: 99121825.6). To use this jet for plasma spraying, it is necessary to improve the thermal efficiency of the jet and solve the problem of powder supply. Gas may disturb the jet flow and destroy its laminar flow state, and evenly supply various powder particles into the high temperature zone of the jet flow.

发明内容 Contents of the invention

本发明的目的是在于提供长直层流电弧等离子体喷涂装置与方法。在由大气压到20托低气压范围内,以远低于常规湍流等离子体射流喷涂所需功率产生稳定的长直层流等离子体射流。以多种形式向长直层流电弧等离子体射流中实施均匀供粉,实现各种材质高质量喷涂涂层的制备。The object of the present invention is to provide a long straight laminar arc plasma spraying device and method. In the range from atmospheric pressure to 20 torr low pressure, a stable long straight laminar plasma jet is generated at a power much lower than that required for conventional turbulent plasma jet spraying. Implement uniform powder supply into the long straight laminar arc plasma jet in various forms to realize the preparation of high-quality spray coatings of various materials.

本发明的技术方案是把握气流量和输入功率等因素对层流等离子体射流稳定状态和热效率的影响。在维持层流流动的条件下提高气流量,以提高射流的热效率,电源输入的能量转换为气体电弧的能量,除向发生器和冷却系统的散热以外,发生器出口处射流的热能超过40%,在使用氩气的情况下,喷枪出口处射流的最高温度约为12000K。保证喷枪出口处气流最高温度不低于一般湍流射流喷涂时的气流温度;进而采用不同角度的枪内、枪外、单口和多口供粉,配合适当的粉末携带气体流量,可在不破坏射流层流状态情况下,将粉末颗粒供入射流高温区;枪内供粉情况下阳极喷口可设计成台阶型。靠近发生器出口端有较大口径。其内壁侧面开有一个或环向均匀分布的数个与射流轴线成不同角度的供粉口;根据喷涂粉体的种类和性质,如比重、熔点及颗粒粒径和分布等,调整射流的能量及分布,确定最佳喷涂工艺参数,达到在小功率条件下喷涂各种粉末材料的高质量涂层;同时,对易氧化材料的高质量涂层制备,可采用减压等离子体喷涂工艺。这时,可配用口径达30mm的喷枪,获得直径增大3~5倍的高温层流等离子体射流。The technical scheme of the invention is to grasp the influence of factors such as gas flow rate and input power on the steady state and thermal efficiency of the laminar plasma jet. Increase the air flow under the condition of maintaining laminar flow to improve the thermal efficiency of the jet. The energy input by the power supply is converted into the energy of the gas arc. In addition to the heat dissipation to the generator and the cooling system, the thermal energy of the jet at the generator outlet exceeds 40%. , in the case of using argon, the maximum temperature of the jet at the outlet of the spray gun is about 12000K. Ensure that the highest airflow temperature at the outlet of the spray gun is not lower than the airflow temperature during general turbulent jet spraying; and then adopt different angles of gun inside, gun outside, single-port and multi-port powder supply, with appropriate powder-carrying gas flow, can be without damaging the jet layer In the case of flow state, the powder particles are supplied into the high temperature zone of the jet; in the case of powder supply in the gun, the anode nozzle can be designed as a step type. There is a larger diameter near the outlet of the generator. There is one or evenly distributed circumferentially several powder supply ports at different angles to the jet axis on the side of the inner wall; adjust the energy of the jet according to the type and properties of the sprayed powder, such as specific gravity, melting point, particle size and distribution, etc. and distribution, determine the optimal spraying process parameters, and achieve high-quality coatings of various powder materials sprayed under low power conditions; at the same time, for the preparation of high-quality coatings for easily oxidized materials, the decompression plasma spraying process can be used. At this time, a spray gun with a diameter of 30 mm can be used to obtain a high-temperature laminar plasma jet with a diameter increased by 3 to 5 times.

本发明层流等离子体喷涂装置,包括一直流电源和与其相联的电路控制操作部分,一可旋转或平移的样品台和传动系统,一置于喷枪和被喷件之间的可移开式挡板,一气体流量控制部分和与其相联的一等离子体发生器(即喷枪),一与发生器相联的供粉器以及一换气系统。水冷真空腔体和抽真空系统只在减压喷涂的情况下需要。The laminar flow plasma spraying device of the present invention includes a DC power supply and a circuit control operation part associated with it, a rotatable or translational sample stage and a transmission system, and a removable The baffle plate, a gas flow control part and a plasma generator (that is, a spray gun) connected with it, a powder feeder connected with the generator and a ventilation system. Water-cooled vacuum chamber and vacuum system are only required in the case of depressurized spraying.

等离子体发生器是依次由阴极、中间段和阳极等主要构件组成的长直层流电弧等离子体射流发生器。该发生器的供气有主气流和辅气流。主气流从开在阴极与中间段间隙的起弧端的主气流入口进入,辅气流从中间段与阳极的间隔处的辅气流入口进入;供粉口分枪内和枪外供粉口两种,且均有单孔和多孔两种形式。枪内供粉口开在阳极喷口内侧壁面;枪外供粉单孔时使用喷嘴。多孔口时使用分流环。该分流环与喷枪阳极喷口保持绝缘。等离子体发生器的设计和阳极喷口直径的大小应根据使用条件的不同而改变。在减压或增大功率条件下可使用大口径阳极发生器。反之则要使用小口径阳极发生器。The plasma generator is a long straight laminar arc plasma jet generator composed of main components such as cathode, middle section and anode in turn. The generator is supplied with primary and secondary air. The main airflow enters from the main airflow inlet at the arc-starting end of the gap between the cathode and the middle section, and the auxiliary airflow enters from the auxiliary airflow inlet at the gap between the middle section and the anode; the powder supply port is divided into two types: inside the gun and outside the gun. And there are two forms of single hole and porous. The powder supply port in the gun is opened on the inner wall of the anode nozzle; the nozzle is used when the powder supply is single hole outside the gun. Use diverter rings for multiple ports. This diverter ring is insulated from the gun anode nozzle. The design of the plasma generator and the size of the diameter of the anode nozzle should be changed according to the different conditions of use. Large diameter anode generators can be used under reduced pressure or increased power conditions. Otherwise, a small-diameter anode generator should be used.

本发明装置中,阳极为台阶式,1~5个枪内供粉口在阳极的侧壁上,并与射流轴线的夹角为-20°~50°。In the device of the present invention, the anode is stepped, and the powder supply ports in the 1 to 5 guns are on the side wall of the anode, and the included angle with the jet axis is -20° to 50°.

本发明装置中,设在分流环上的枪外供粉口有3~7个,并与射流轴线的夹角为-30°~40°;枪外供粉口为单孔时,该单孔是在供粉管前端直接安装的供粉嘴。In the device of the present invention, there are 3 to 7 powder supply ports outside the gun arranged on the diverter ring, and the included angle with the jet axis is -30° to 40°; when the powder supply port outside the gun is a single hole, the single hole It is a powder supply nozzle installed directly at the front end of the powder supply pipe.

本发明装置中,在层流等离子体阳极喷口附近装有可供入惰性保护气体的保护气体环。层流等离子体发生器与被喷涂的样品之间有可移开的挡板。In the device of the present invention, a protective gas ring for feeding inert protective gas is installed near the laminar flow plasma anode nozzle. There is a removable baffle between the laminar plasma generator and the sprayed sample.

本发明层流等离子体喷涂方法是采用本发明层流等离子体喷涂装置实施的。其中等离子体射流发生器(即喷枪)是依次由阴极、中间段和阳极组成的定弧长式层流电弧等离子体射流发生器。控制气体流量和输入功率以产生稳定的长直层流电弧层流等离子体射流。在小功率维持层流等离子体射流状态下提高气体流量可以增加射流的热效率;根据喷涂粉体种类、材料性质和颗粒粒径及分布,选择或调整射流的能量及其分布;采用枪内或枪外单口或多口供粉形式,或采用枪内加枪外组合供粉形式,配合适当的粉末携带气体流量,在小功率条件下喷涂各种粉体材料,并获得高质量涂层。The laminar flow plasma spraying method of the present invention is implemented by using the laminar flow plasma spraying device of the present invention. Among them, the plasma jet generator (namely spray gun) is a fixed-arc-length laminar arc plasma jet generator composed of a cathode, an intermediate section and an anode in sequence. The gas flow and input power are controlled to produce a stable long straight laminar arc laminar plasma jet. Increasing the gas flow rate while maintaining the laminar plasma jet state with low power can increase the thermal efficiency of the jet; select or adjust the energy and distribution of the jet according to the type of sprayed powder, material properties, particle size and distribution; External single-port or multi-port powder supply mode, or the combined powder supply mode of gun inside and gun outside, with appropriate powder-carrying gas flow, spray various powder materials under low power conditions, and obtain high-quality coatings.

本发明层流等离子体喷涂方法,当喷涂易氧化材料时,采用减压等离子体喷涂,并选用大直径的阳极喷口。The laminar flow plasma spraying method of the present invention adopts decompression plasma spraying and selects large-diameter anode nozzles when spraying easily oxidizable materials.

本发明方法中,在大气压条件下射流在等离子体射流发生器出口处的最高气流速度一般不超过400m/s,射流直径一般小于15mm,射流长度小于700mm。In the method of the present invention, the maximum air velocity of the jet at the outlet of the plasma jet generator under atmospheric pressure is generally not more than 400m/s, the diameter of the jet is generally less than 15mm, and the length of the jet is less than 700mm.

本发明方法中,在大气压到20托的气压条件下,等离子体射流的长度在20~100cm范围内调整,射流的直径在5~30mm范围内调整,电源输出功率一般在15kW以下就基本能满足各种粉体的喷涂条件。In the method of the present invention, under the atmospheric pressure to 20 Torr, the length of the plasma jet is adjusted within the range of 20-100 cm, the diameter of the jet is adjusted within the range of 5-30 mm, and the output power of the power supply is generally below 15 kW. Spraying conditions for various powders.

本发明方法中,对高熔点物质粉末,不易被加热的粉体材料,或较难供入射流高温区的粉体,采用枪内供粉形式,选择适当数目的枪内供粉口以及供粉口与射流轴线的角度。In the method of the present invention, for powders with high melting points, powder materials that are not easily heated, or powders that are difficult to feed into the high-temperature zone of the jet flow, the powder supply form in the gun is adopted, and an appropriate number of powder supply ports and powder supply ports in the gun are selected. The angle between the mouth and the jet axis.

本发明方法中,对低熔点物质粉末、易熔化和蒸发的材料、或容易送入射流高温区的粉体,采用枪外供粉方式。选择适当数目的枪外供粉口以及供粉口与射流轴线的角度。In the method of the present invention, for powders of low-melting substances, materials that are easy to melt and evaporate, or powders that are easy to be sent into the high-temperature zone of the jet flow, the powder supply method outside the gun is adopted. Select the appropriate number of powder supply ports outside the gun and the angle of the powder supply ports to the jet axis.

本发明方法中,对于复合材料涂层或梯度分布涂层的制备,采用不同的枪内或枪外供粉方式,或枪内加枪外组合供粉方式,以不同的参数在不同的部位供入等离子体射流。In the method of the present invention, for the preparation of the composite material coating or the gradient distribution coating, adopt different powder supply modes in the gun or outside the gun, or combine powder supply modes in the gun and outside the gun, and supply powder at different positions with different parameters. into the plasma jet.

本发明方法中,在大气压下,根据喷涂材料和喷涂质量要求,为防止涂层与工件氧化,在层流等离子体发生器阳极喷口附近加装保环和套筒,也可供入惰性保护气体。In the method of the present invention, under atmospheric pressure, according to the spraying material and spraying quality requirements, in order to prevent the coating and the workpiece from being oxidized, a protective ring and a sleeve are installed near the anode nozzle of the laminar flow plasma generator, and an inert protective gas can also be fed. .

本发明层流等离子体喷涂装置和方法的效果和特点是,等离子体发生器的设计和阳极口径的大小可根据使用条件的不同而改变。在减压或增大功率条件下可以使用大口径发生器。反之可以使用小直径的阳极喷口;在高熔点、或不易被加热或较难供入射流高温区的粉体材料的喷涂过程中,枪内供粉的阳极可采用台阶式结构。其内侧壁面上开有1~5个供粉孔不等。根据粉体种类和粒径分布,供粉口与射流轴线角度可在-20°~50°间变化,使粉体供入射流高温区中;枪外供粉情况下可采用单孔和多孔供粉方式。单孔供粉是在供粉管前端直接安装供粉嘴。多孔供粉是通过供粉管将粉体供入一粉末分流环中。该环内侧均匀开有3~7个供粉口。分流环与发生器阳极间绝缘。根据粉体材料性能和流动性,供粉口与射流轴线的角度可在-30°~40°之间适当选择。The effect and characteristics of the laminar flow plasma spraying device and method of the present invention are that the design of the plasma generator and the size of the anode aperture can be changed according to different conditions of use. Large diameter generators can be used under reduced pressure or increased power conditions. Conversely, a small-diameter anode nozzle can be used; during the spraying process of powder materials that have a high melting point, are not easily heated, or are difficult to supply into the jet high temperature area, the anode for powder supply in the gun can adopt a stepped structure. There are 1 to 5 powder supply holes on the inner wall surface. According to the powder type and particle size distribution, the angle between the powder supply port and the jet axis can be changed from -20° to 50°, so that the powder can be supplied into the high temperature zone of the jet flow; single hole and multi-hole supply can be used for powder supply outside the gun. powder way. Single-hole powder supply is to directly install the powder supply nozzle at the front end of the powder supply pipe. Porous powder supply is to feed the powder into a powder distribution ring through the powder supply pipe. The inner side of the ring is evenly opened with 3 to 7 powder supply ports. The shunt ring is insulated from the anode of the generator. According to the properties and fluidity of the powder material, the angle between the powder supply port and the jet axis can be properly selected between -30° and 40°.

本发明层流等离子体射流喷涂技术和方法是根据粉末材料性能、种类和粒径,在大气压到20托低气压条件下,在20~100cm范围调整等离子体射流长度及在5~30mm范围调整射流直径。在电源出入功率低于15kW的条件下,确保喷枪出口处气体的最高温度不小于湍流射流出口的最高温度。通过选择枪内和枪外不同供粉方式,能够有效熔化各种粉末颗粒,喷涂高熔点物质的高质量涂层;如果在喷涂工作气体中加入氮气,还可以提高气体的焓值和增加射流长度;测试结果表明:射流在喷枪出口处的最高气流速度一般不超过400m/s。因此,粉体颗粒在层流射流高温区的滞留时间可比湍流射流喷涂时延长约一个数量级;由于层流射流受环境气体的扰动和卷吸作用影响远低于湍流射流,因此,明显减少了基材预热和喷涂过程中空气混合气体掺混和杂质卷入等负面因素的影响。有利于提高涂层质量和涂层材料与工件的界面接合力;如果阳极喷口处加装保护套和保护气供给环,可以更有效地控制空气混合气体对工作气体射流的掺混和喷涂过程中颗粒和基材的氧化。并且还可以明显提高或调节基材预热温度范围。The laminar plasma jet spraying technology and method of the present invention is to adjust the plasma jet length in the range of 20-100 cm and adjust the jet flow in the range of 5-30 mm under the condition of atmospheric pressure to 20 Torr low pressure according to the powder material performance, type and particle size diameter. Under the condition that the input and output power of the power supply is lower than 15kW, ensure that the maximum temperature of the gas at the outlet of the spray gun is not less than the maximum temperature of the outlet of the turbulent jet. By choosing different powder supply methods inside and outside the gun, it can effectively melt various powder particles and spray high-quality coatings with high melting point substances; if nitrogen is added to the spraying working gas, the enthalpy of the gas can also be increased and the length of the jet can be increased ; The test results show that the highest air velocity of the jet at the outlet of the spray gun is generally not more than 400m/s. Therefore, the residence time of powder particles in the high-temperature zone of laminar jet flow can be extended by about an order of magnitude compared with that of turbulent jet spraying; since laminar jet flow is much less affected by the disturbance and entrainment of ambient gas than turbulent jet flow, the fundamental The impact of negative factors such as air mixture gas mixing and impurity involvement during material preheating and spraying. It is conducive to improving the coating quality and the interface bonding force between the coating material and the workpiece; if a protective sleeve and a protective gas supply ring are installed at the anode nozzle, the mixing of the air mixed gas to the working gas jet and the particles during the spraying process can be more effectively controlled and substrate oxidation. And it can also significantly increase or adjust the substrate preheating temperature range.

附图说明Description of drawings

图1是减压层流电弧等离子体喷涂装置系统示意图。Fig. 1 is a system schematic diagram of a decompression laminar arc plasma spraying device.

图2是大气压条件下射流长度随弧电流变化的关系图。Figure 2 is a graph showing the relationship between jet length and arc current variation under atmospheric pressure conditions.

图3是大气压条件下射流长度随气流量的变化关系图。Figure 3 is a graph showing the relationship between jet length and gas flow rate under atmospheric pressure conditions.

图4是枪内供粉阳极喷口结构简图。Figure 4 is a schematic diagram of the powder supply anode nozzle in the gun.

图5是枪外多孔供粉部件结构简图。Fig. 5 is a schematic structural diagram of the porous powder supply part outside the gun.

具体实施方式Detailed ways

以下结合附图详细说明本发明装置和方法的实施例。Embodiments of the device and method of the present invention will be described in detail below in conjunction with the accompanying drawings.

如图1所示,本发明层流等离子体喷涂装置包括喷涂机械部分100和水电气源300两大部分。喷涂机械部分100中,真空腔体10上直接安装着等离子体发生器20、旋转式样品台30、水冷过滤器40、挡板轴50和供粉系统60等部件。水电气源300中,控制柜70是喷涂操作的控制中心。包括控制气体流量的质量流量计和显示器71、供粉气体流量和粉末流量的控制仪72、电源开关73和冷却水控制阀门74等器件。喷涂中可以方便地进行气源81、电源82、粉末83和冷却水84的控制。双线85示意地表示整个装置所需的电源线、送气管、供粉管和冷却水管等。As shown in FIG. 1 , the laminar flow plasma spraying device of the present invention includes a spraying mechanical part 100 and a water and electric power source 300 . In the spraying machine part 100 , the plasma generator 20 , the rotary sample stage 30 , the water-cooled filter 40 , the baffle shaft 50 and the powder supply system 60 are directly installed on the vacuum cavity 10 . In the water and electricity source 300, the control cabinet 70 is the control center of the spraying operation. It includes mass flow meter and display 71 for controlling gas flow, controller 72 for powder supply gas flow and powder flow, power switch 73 and cooling water control valve 74 and other components. The control of gas source 81, power supply 82, powder 83 and cooling water 84 can be conveniently carried out during spraying. Double line 85 schematically represents the required power line, air supply pipe, powder supply pipe and cooling water pipe etc. of the whole device.

由图1可见,在减压喷涂条件下,圆柱形腔体1上有发生器接口4、观察窗5、供粉孔7和水冷过滤器接口8等;前盖板2上也有气孔11。其上的发生器接口12上安装等离子体发生器20。旋转式样品台30通过套筒13安装在中心孔14上,并在同时进行转动和移动的情况下具有良好的密封性能。水冷过滤器40安装在圆柱形腔体1和机械泵之间;挡板轴50的中心轴与接口4的中心轴平行;供粉系统60由真空腔体15、供粉器16、供粉管17、支架18和供粉嘴19组成。工作时可以放置在圆柱形腔体1的上方实现重力供粉,或放置于别处进行携带微量气体供粉。供粉嘴19可以连接在阳极喷口22不同部位,实现枪内或枪外不同方式供粉。或通过连接机构将供粉嘴19安装在喷口22的前方实现枪外供粉。整个喷涂机械部分100支撑在水平度可调的支架23上。It can be seen from Figure 1 that under the condition of decompression spraying, the cylindrical cavity 1 has a generator interface 4, an observation window 5, a powder supply hole 7 and a water-cooling filter interface 8, etc.; the front cover 2 also has air holes 11. A plasma generator 20 is installed on the generator interface 12 thereon. The rotary sample stage 30 is installed on the central hole 14 through the sleeve 13, and has good sealing performance under the condition of simultaneous rotation and movement. The water-cooled filter 40 is installed between the cylindrical cavity 1 and the mechanical pump; the central axis of the baffle shaft 50 is parallel to the central axis of the interface 4; the powder supply system 60 is composed of a vacuum cavity 15, a powder supply device 16, and a powder supply tube 17, bracket 18 and powder supply nozzle 19 are formed. During work, it can be placed above the cylindrical cavity 1 to realize gravity powder supply, or placed elsewhere for powder supply with trace gas. The powder supply nozzle 19 can be connected to different parts of the anode nozzle 22 to realize powder supply in different ways inside or outside the gun. Or the powder supply nozzle 19 is installed in front of the spout 22 through the connecting mechanism to realize powder supply outside the gun. The whole spraying machine part 100 is supported on the support 23 with adjustable levelness.

图2给出大气压条件下以纯氩为工作气体、使用直径为4mm的阳极喷口时射流长度随弧电流变化的关系图。说明在一定气流量的条件下,层流等离子体射流的长度随弧电流的增加而增加,也就是说在气流量不变的情况下,只要在低的弧电流条件下产生出层流等离子体射流,之后单纯提高弧电流,在相当大的范围内,不会发生射流流动状态由层流到湍流的转变。Figure 2 shows the relationship between the jet length and the arc current when pure argon is used as the working gas and an anode nozzle with a diameter of 4mm is used under atmospheric pressure conditions. It shows that under the condition of a certain gas flow, the length of the laminar plasma jet increases with the increase of the arc current. Jet flow, and then simply increase the arc current, in a considerable range, the flow state of the jet flow will not change from laminar flow to turbulent flow.

图3给出的是大气压条件下以纯氩为工作气体、使用直径为4mm的阳极喷口时射流长度随气体流量变化的关系图。在气流量低于180cm3/s的范围内,射流的长度随气流量的增加而增加,在超过210cm3/s的情况下,射流的长度骤然缩短,这对应的是射流的流动状态由稳定的层流流动转变为波动性很大的湍流状态,射流对周围冷空气的卷吸掺混严重发展,致使射流的能量衰减很快。在转变点处,射流的能量为3.7kW,可估算出纯氩等离子体射流由层流向湍流转变的临界雷诺数约为370。由此可见,在合理的喷枪结构和产生方法的条件下,无论改变气流量、弧电流、阳极喷口直径或其它有关的等离子体射流产生参数,其综合效应只要使气流的雷诺数不超过这一临界值,就能确保等离子体射流为稳定的层流状态。Figure 3 shows the relationship between jet length and gas flow rate when pure argon is used as the working gas and an anode nozzle with a diameter of 4 mm is used under atmospheric pressure conditions. When the air flow is lower than 180cm 3 /s, the length of the jet increases with the increase of the air flow, and when it exceeds 210cm 3 /s, the length of the jet suddenly shortens, which corresponds to the flow state of the jet changing from stable to The laminar flow changes into a turbulent state with large fluctuations, and the entrainment and mixing of the jet to the surrounding cold air develops seriously, resulting in the rapid attenuation of the energy of the jet. At the transition point, the energy of the jet is 3.7kW, and it can be estimated that the critical Reynolds number for pure argon plasma jet transition from laminar flow to turbulent flow is about 370. It can be seen that under the condition of reasonable spray gun structure and generation method, no matter changing the gas flow, arc current, anode nozzle diameter or other relevant plasma jet generation parameters, the combined effect only needs to make the Reynolds number of the gas flow not exceed this The critical value can ensure that the plasma jet is in a stable laminar flow state.

图4是枪内供粉喷涂时阳极喷口的结构简图。其主要构件有层流等离子体发生器的阳极210、供粉管220和连接环230。阳极210喷口214上有环形供粉槽215。其内有沿圆周均匀分布的数个供粉孔216。连接环230上有供粉孔237和密封槽238。阳极210与连接环230通过螺纹239连接。“O”形圈235的密封作用确保了喷涂时粉末221沿供粉孔216进入阳极喷口214中的等离子体射流212中。供粉孔的轴线与射流轴线的角度可根据喷涂材料等条件在-20°~50°范围内变化。供粉孔出口位置也可以移至图4中点线222所示位置。Fig. 4 is a schematic diagram of the structure of the anode nozzle when the powder is sprayed in the gun. Its main components are the anode 210 of the laminar flow plasma generator, the powder supply pipe 220 and the connecting ring 230 . An annular powder supply tank 215 is arranged on the nozzle 214 of the anode 210 . There are several powder supply holes 216 evenly distributed along the circumference. A powder supply hole 237 and a sealing groove 238 are arranged on the connecting ring 230 . The anode 210 is connected to the connecting ring 230 through threads 239 . The sealing effect of the "O" ring 235 ensures that the powder 221 enters the plasma jet 212 in the anode nozzle 214 along the powder supply hole 216 during spraying. The angle between the axis of the powder supply hole and the axis of the jet flow can vary within the range of -20° to 50° according to the conditions such as spraying materials. The outlet position of the powder supply hole can also be moved to the position shown by the dotted line 222 in FIG. 4 .

图5是枪外多孔供粉喷涂时阳极喷口的结构简图。其主要构件有层流等离子体发生器的阳极250、供粉管260和供粉环270。支撑环254通过电绝缘紧配螺栓255固定在阳极250上。支杆256和供粉管260分别由销钉257、258固定。供粉环270通过螺纹和胶圈连接在供粉管260上。平行移动支杆256和移动供粉管260可以调节供粉环270离开枪口的位置。供粉孔口可与射流轴线成-30°~40°。Fig. 5 is a schematic diagram of the structure of the anode nozzle when the powder is sprayed with holes outside the gun. Its main components are the anode 250 of the laminar flow plasma generator, the powder supply pipe 260 and the powder supply ring 270 . The support ring 254 is fixed on the anode 250 by electrically insulating fit bolts 255 . The support rod 256 and the powder supply pipe 260 are respectively fixed by pins 257 and 258 . The powder supply ring 270 is connected to the powder supply pipe 260 through threads and rubber rings. Parallel movement of the strut 256 and movement of the powder supply tube 260 can adjust the position of the powder supply ring 270 away from the muzzle. The powder supply orifice can be at -30°~40° with the jet axis.

本发明层流等离子体喷涂装置和方法运行时,喷枪阳极喷口直径随喷涂环境压力和所需功率的大小,在4~30mm范围变化。对应的喷枪其它部分结构根据阳极喷口直径尺寸按一定比例相应变化;根据喷涂粉体材质和对涂层质量的不同要求,可改变气流量和输入功率,实现层流等离子体射流长度、总能量和能量密度的再分配。配合适当的供粉方式,达到最佳喷涂效果;对高熔点物质的粉末、不易被加热的粉体材料、比较难以供入射流高温区的粉体,采用枪内供粉形式,选择适当的供粉口数目和与射流轴线的角度;对低熔点物质粉体、易熔化或蒸发材料、或容易送入射流高温区的粉体,采用枪外供粉的方式;对于复合材料涂层或梯度涂层的制备,不用通常的供粉方式和参数供入复合或混合好的粉体,而是采取不同的供粉方式和参数由不同的部位将粉体供入等离子体射流,确保不同物质和粒度的粉体分别有最佳的熔化和沉积状况;根据实际喷涂材料和对涂层质量的要求,在大气压条件下,或确需防止涂层与工件氧化的情况下,需在喷口附近加保护气环供入惰性保护气体。When the laminar flow plasma spraying device and method of the present invention are in operation, the diameter of the anode nozzle of the spray gun varies in the range of 4-30mm according to the pressure of the spraying environment and the required power. The structure of other parts of the corresponding spray gun changes according to a certain proportion according to the diameter of the anode nozzle; according to the different requirements of the spray powder material and coating quality, the air flow and input power can be changed to achieve laminar plasma jet length, total energy and Redistribution of energy density. Cooperate with the appropriate powder supply method to achieve the best spraying effect; for powders of high melting point substances, powder materials that are not easy to be heated, and powders that are difficult to supply into the high temperature zone of the jet flow, the powder supply form in the gun is used, and an appropriate supply method is selected. The number of powder ports and the angle with the jet axis; for powders with low melting point, materials that are easy to melt or evaporate, or powders that are easy to be sent into the high temperature zone of the jet, the powder supply method outside the gun is used; for composite material coating or gradient coating The preparation of the layer does not use the usual powder supply methods and parameters to feed the composite or mixed powder, but adopts different powder supply methods and parameters to feed the powder into the plasma jet from different parts to ensure that different substances and particle sizes The powders have the best melting and deposition conditions; according to the actual spraying materials and the requirements for coating quality, under atmospheric pressure conditions, or when it is necessary to prevent the oxidation of the coating and the workpiece, it is necessary to add a protective gas near the nozzle. The ring is supplied with inert protective gas.

本发明装置和方法根据喷涂粉体的种类、粒径、对涂层质量的要求,在大气压到20托气压的条件下,在20~100cm范围内调整等离子体射流长度,在5~30mm范围内调整射流直径,在15kW以下的低电源出入功率的条件下,确保喷枪出口处气体的最高温度不小于一般湍流射流喷涂时的出口最高温度,在大气压条件下射流在喷枪出口处的最高气流速度一般不超过400m/s,粉体颗粒在长射流高温区中的滞留时间可比一般湍流射流喷涂时延长约一个数量级,有效喷涂各种物质的高质量涂层。The device and method of the present invention adjust the length of the plasma jet within the range of 20-100 cm under the condition of atmospheric pressure to 20 torr according to the type, particle size, and coating quality requirements of the spraying powder, and the length of the plasma jet is adjusted within the range of 5-30 mm. Adjust the diameter of the jet, and under the condition of low power input and output power below 15kW, ensure that the maximum temperature of the gas at the outlet of the spray gun is not less than the maximum temperature of the outlet of the general turbulent jet spraying. No more than 400m/s, the residence time of powder particles in the long-jet high-temperature zone can be extended by about an order of magnitude compared with general turbulent jet spraying, effectively spraying high-quality coatings of various substances.

实施例一、减压层流等离子体射流在不锈钢基材表面进行氧化锆陶瓷或三氧化二铝涂层制备。表1实验参数喷涂、送粉气体        Ar            送粉气体流量(cm3/s)     8总气流量(cm3/s)      180           真空腔体气压(Pa)        1.3×104输入功率(kW)          <8           沉积距离(mm)            200~220基底初始温度(K)       600~900Embodiment 1: Laminar decompression plasma jet is used to prepare zirconia ceramic or aluminum oxide coating on the surface of stainless steel substrate. Table 1 Experimental Parameters Spraying, Powder Feeding Gas Ar Powder Feeding Gas Flow Rate (cm 3 /s) 8 Total Gas Flow Rate (cm 3 /s) 180 Vacuum Chamber Pressure (Pa) 1.3×10 4 Input Power (kW) <8 Deposition Distance (mm) 200~220 Initial temperature of substrate (K) 600~900

本发明实施例中,基材为1Cr18Ni9Ti不锈钢。粉体为ZrO2-8mol%Y2O3陶瓷粉末,其颗粒粒度小于25μm。阳极出口直径为20mm。层流射流长度达到600mm,直径约为25mm。相关喷涂实验参数列于表1中。In the embodiment of the present invention, the substrate is 1Cr18Ni9Ti stainless steel. The powder is ZrO 2 -8mol% Y 2 O 3 ceramic powder, and its particle size is less than 25 μm. The diameter of the anode outlet is 20mm. The laminar jet reaches a length of 600mm and a diameter of about 25mm. The relevant spraying experimental parameters are listed in Table 1.

产生稳定的层流等离子体射流之后,接通送粉气气阀和送粉器电源开关进行送粉,实现层流等离子体喷涂。本发明中对送粉器结构进行了技术改进。不论是枪内还是枪外送粉,既可以进行粒度为25~75μm普通粉末的送粉,还实现了粒度小于25μm细粉的均匀送粉。细粉的应用有利于实现低功率等离子体射流状态下,高熔点粉末材料涂层的制备。用这种方法和装置,可在输入功率小于8kW的条件下喷涂熔化点约为2600℃的氧化锆高熔点陶瓷涂层。得到了较一般喷涂工艺晶粒组织细化和孔隙率小的高质量涂层,且涂层的相组织结构与粉体相同。After generating a stable laminar plasma jet, turn on the powder feeding gas valve and the power switch of the powder feeder for powder feeding to realize laminar plasma spraying. In the present invention, the structure of the powder feeder is technically improved. Regardless of whether the powder is fed inside or outside the gun, it can not only feed the ordinary powder with a particle size of 25-75 μm, but also realize the uniform powder feeding of the fine powder with a particle size of less than 25 μm. The application of fine powder is beneficial to realize the preparation of high melting point powder material coating under the state of low power plasma jet. With this method and device, the zirconia high-melting-point ceramic coating with a melting point of about 2600° C. can be sprayed under the condition that the input power is less than 8 kW. A high-quality coating with finer grain structure and smaller porosity than the general spraying process is obtained, and the phase structure of the coating is the same as that of the powder.

实施例二、大气压层流等离子体射流进行材料表面金属或陶瓷涂层制备。工件可装在车床的刀架和工件夹上,利用车床的传动装置作为工件传动架。发生器出口直径为6mm。在电源输出功率为9kW,总气流量200cm3/s的氩等离子体射流条件下,供粉气流量为6cm3/s。采用枪外供粉。粒径小于100μm的氧化铝粉末和粒径小于25μm的氧化钇稳定氧化锆粉末能够供入射流高温区,得到了充分的熔化。Embodiment 2. Atmospheric pressure laminar flow plasma jet is used to prepare a metal or ceramic coating on the material surface. The workpiece can be installed on the tool holder and workpiece holder of the lathe, and the transmission device of the lathe is used as the workpiece transmission frame. The generator outlet diameter is 6mm. Under the conditions of argon plasma jet with a power output of 9kW and a total gas flow of 200cm 3 /s, the powder supply gas flow is 6cm 3 /s. The powder is supplied outside the gun. The alumina powder with a particle size of less than 100 μm and the yttria-stabilized zirconia powder with a particle size of less than 25 μm can be fed into the jet high-temperature zone and fully melted.

实施例三、复合涂层材料和梯度涂层的制备。Embodiment 3, preparation of composite coating material and gradient coating.

本发明实施例中基材为1Cr18Ni9Ti不锈钢。一种粉体为ZrO2-8mol%Y2O3陶瓷粉末,其颗粒粒度小于25μm。另一种粉体为NiCrAlY2O3粉末,其颗粒粒度小于25~75μm。阳极出口直径为20mm。层流射流长度达到600mm,直径约为25mm。相关喷涂实验参数列于表1中。In the embodiment of the present invention, the substrate is 1Cr18Ni9Ti stainless steel. One kind of powder is ZrO 2 -8mol% Y 2 O 3 ceramic powder, the grain size of which is less than 25 μm. Another kind of powder is NiCrAlY 2 O 3 powder, whose particle size is less than 25-75 μm. The diameter of the anode outlet is 20mm. The laminar jet reaches a length of 600mm and a diameter of about 25mm. The relevant spraying experimental parameters are listed in Table 1.

产生稳定的层流等离子体射流之后,接通送粉气气阀和送粉器电源开关进行送粉,实现层流等离子体喷涂。ZrO2-8mol%Y2O3陶瓷粉末采用枪内送粉,NiCrAlY2O3粉末枪外送粉。在制备复合涂层时应使两种粉末的送粉量保持不变。当其中一种送粉量为零时,可得该种粉末的涂层。当另一种送粉量为零时,可得另一种粉末的涂层。当调整两种送粉量的比值时,可得由两种粉末的混合涂层。这样可以制备出复合涂层;如果在喷涂过程中将两种粉末的送粉量按某种规律连续调整,并保持一减少,另一增大,则可以制备出粉末成分连续变化的梯度涂层。After generating a stable laminar plasma jet, turn on the powder feeding gas valve and the power switch of the powder feeder for powder feeding to realize laminar plasma spraying. The ZrO 2 -8mol% Y 2 O 3 ceramic powder is fed inside the gun, and the NiCrAlY 2 O 3 powder is fed outside the gun. When preparing the composite coating, the powder feeding amount of the two powders should be kept constant. When one of the powder feeding amount is zero, the coating of the powder can be obtained. When the feeding amount of another powder is zero, another powder coating can be obtained. When adjusting the ratio of the two powder feeding amounts, a mixed coating of the two powders can be obtained. In this way, a composite coating can be prepared; if the powder feeding amount of the two powders is continuously adjusted according to a certain rule during the spraying process, and one keeps decreasing while the other increases, a gradient coating with continuously changing powder components can be prepared. .

Claims (12)

1.一种层流等离子体喷涂装置,包括一个直流电源和与其相联的一电路控制操作部分,一个气体流量控制部分和与其相联的一等离子体发生器,一与等离子体发生器相联的供粉器及换气系统,1. A laminar flow plasma spraying device, comprising a DC power supply and a circuit control operation part connected with it, a gas flow control part and a plasma generator connected with it, and a plasma generator connected with it powder feeder and ventilation system, 其特征是其中的等离子体发生器是包括由顺序相连的阴极、中间段和阳极组成的长直层流等离子体射流发生器;该发生器的供气有主气流和辅气流,主气流从开在阴极与中间段间隙的起弧端的主气流入口进入,辅气流从中间段与阳极的间隔处的辅气流入口进入;It is characterized in that the plasma generator is a long straight laminar flow plasma jet generator composed of sequentially connected cathodes, middle sections and anodes; the gas supply of the generator has a main air flow and an auxiliary air flow, and the main air flow is from the opening The main airflow inlet enters the arcing end of the gap between the cathode and the middle section, and the auxiliary airflow enters from the auxiliary airflow inlet at the interval between the middle section and the anode; 供粉口分枪内供粉口和枪外供粉口,且均有单孔和多孔两种形式,枪内供粉口开在阳极喷口内侧壁面;枪外供粉多孔时使用分流环。The powder supply port is divided into the powder supply port inside the gun and the powder supply port outside the gun, and there are two types of single hole and multi-hole. 2.根据权利要求1所述的层流等离子体喷涂装置,其特征是其中的阳极为台阶式,1~5个枪内供粉口在阳极的侧壁上,并与射流轴线的夹角为-20°~50°。2. The laminar flow plasma spraying device according to claim 1, wherein the anode is stepped, and the powder supply ports in 1 to 5 guns are on the side wall of the anode, and the included angle with the jet axis is -20°~50°. 3.根据权利要求1所述的层流等离子体喷涂装置,其特征是其中设在分流环上的枪外供粉口有3~7个,并与射流轴线的夹角为-30°~70°。3. The laminar flow plasma spraying device according to claim 1, characterized in that there are 3 to 7 powder supply ports outside the gun arranged on the diverter ring, and the included angle with the jet axis is -30° to 70° °. 4.根据权利要求1所述的层流等离子体喷涂装置,其特征是枪外供粉口为单孔时,该单孔是在供粉管前端直接安装的供粉嘴。4. The laminar flow plasma spraying device according to claim 1, characterized in that when the powder supply port outside the gun is a single hole, the single hole is a powder supply nozzle directly installed at the front end of the powder supply pipe. 5.根据权利要求1所述的层流等离子体喷涂装置,其特征是可在层流等离子体发生器阳极喷口附近装保护套或供入惰性保护气体的保护气体环。5. The laminar flow plasma spraying device according to claim 1, characterized in that a protective sleeve or a protective gas ring for supplying an inert protective gas can be installed near the anode nozzle of the laminar flow plasma generator. 6.一种层流等离子体喷涂方法,其特征是采用层流等离子体喷涂装置,相配的等离子体射流发生器,在维持层流等离子体射流状态下提高气体流量可增加射流的热效率;根据喷涂粉体种类、材料性质和颗粒粒径及分布,选择或调整射流的能量及其分布;采用枪内或枪外单口或多口供粉形式,或采用枪内加枪外组合供粉形式,配合适当的粉末携带气体流量,在小功率条件下喷涂各种粉体材料,并获得高质量涂层。6. A laminar plasma spraying method is characterized in that it adopts a laminar plasma spraying device, and a matched plasma jet generator maintains the laminar plasma jet state to improve the gas flow rate and increase the thermal efficiency of the jet; according to the spraying Powder type, material properties, particle size and distribution, select or adjust the energy and distribution of the jet; use single or multiple powder supply forms inside or outside the gun, or use a combined powder supply form inside the gun plus outside the gun, with proper coordination The powder carries the gas flow rate, sprays various powder materials under low power conditions, and obtains high-quality coatings. 7.根据权利要求6所述的层流等离子体喷涂方法,其特征是当喷涂易氧化材料时,采用减压等离子体喷涂,并选用大直径的阳极喷口。7. The laminar flow plasma spraying method according to claim 6, characterized in that when the easily oxidizable material is sprayed, the decompression plasma spraying is used, and an anode nozzle with a large diameter is selected for use. 8.根据权利要求6所述的层流等离子体喷涂方法,其特征是在大气压到20托的气压条件下,等离子体射流的长度在20~100cm范围内调整,射流的直径在5~30mm范围内调整,电源输出功率在15kW以下。8. The laminar flow plasma spraying method according to claim 6, characterized in that the length of the plasma jet is adjusted within the range of 20 to 100 cm, and the diameter of the jet is within the range of 5 to 30 mm under the condition of atmospheric pressure to 20 torr Internally adjusted, the output power of the power supply is below 15kW. 9.根据权利要求6所述的层流等离子体喷涂方法,其特征是对高熔点物质粉末,不易被加热的粉体材料,或较难供入射流高温区的粉体,采用枪内供粉形式,选择适当数目的枪内供粉口以及供粉口与射流轴线的角度。9. The laminar flow plasma spraying method according to claim 6, characterized in that for powders with high melting point, powder materials that are difficult to be heated, or powders that are difficult to feed into the high-temperature zone of the jet flow, powder supply in the gun is used Form, select the appropriate number of powder supply ports in the gun and the angle between the powder supply port and the jet axis. 10.根据权利要求6所述的层流等离子体喷涂方法,其特征是对低熔点物质粉末、易熔化和蒸发的材料、或容易送入射流高温区的粉体,采用枪外供粉方式,选择适当数目的枪外供粉口以及供粉口与射流轴线的角度。10. The laminar flow plasma spraying method according to claim 6, characterized in that the powder supply mode outside the gun is adopted for the powder of low melting point substance, the material that is easy to melt and evaporate, or the powder that is easy to be sent into the high temperature zone of the jet flow, Select the appropriate number of powder supply ports outside the gun and the angle of the powder supply ports to the jet axis. 11.根据权利要求6所述的层流等离子体喷涂方法,其特征是对于复合材料涂层或梯度分布涂层的制备,采用不同的枪内或枪外供粉方式,或枪内加枪外组合供粉方式,以不同的参数在不同的部位供入等离子体射流。11. The laminar flow plasma spraying method according to claim 6, characterized in that for the preparation of the composite material coating or the gradient distribution coating, different powder supply methods are adopted in the gun or outside the gun, or in the gun and outside the gun Combining powder supply methods, different parameters are used to supply plasma jets at different locations. 12.根据权利要求6所述的层流等离子体喷涂方法,其特征是在大气压下,根据喷涂材料和喷涂质量要求,为防止涂层与工件氧化,在层流等离子体发生器阳极喷口附近加装保护套或气体环并供入惰性保护气体。12. laminar flow plasma spraying method according to claim 6 is characterized in that under atmospheric pressure, according to spraying material and spraying quality requirements, in order to prevent coating and workpiece oxidation, add Install protective sleeve or gas ring and supply inert protective gas.
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